WO2025033724A1 - Probe station device - Google Patents

Abstract

A probe station device according to one embodiment comprises: a sample stage on which a specimen is placed; a refrigerator which is disposed below the sample stage and which controls the temperature of the sample stage; a mounting part which is disposed below the refrigerator and which supports the refrigerator; a first chamber for encompassing the outside of the sample stage; a second chamber of which the inside is maintained in a vacuum state and which encompasses the outside of the first chamber; and a vibration-reducing member that connects the refrigerator to the second chamber, wherein the sample stage, the first chamber and the second chamber can be connected to each other.

Description

Probe station device

The present invention relates to a probe station device.

The conduction-cooled probe station is a device used to analyze the electrical characteristics of electronic components, semiconductor devices, etc. as a function of temperature. For example, in the semiconductor industry, it is used to measure and test the characteristics of semiconductor devices at high temperatures. It is also used in experiments and measurements that require heat transfer and temperature control in various fields such as nanotechnology, materials research, and optical equipment.

Conduction-cooled probe station devices perform cooling by conducting heat, providing a stable operating environment.

Meanwhile, vibrations are generated due to the reciprocating piston movement of the refrigerator and the movement of gas in the conduction-cooled probe station device, and the generated vibrations are transmitted to the stage, causing problems such as mechanical friction of the probe needle and reduced resolution of the optical microscope.

An object according to one embodiment is to provide a probe station device that suppresses vibrations generated in a refrigerator from being transmitted to a workpiece.

A probe station device according to one embodiment includes a sample stage on which a specimen is placed, a refrigerator disposed below the sample stage and controlling a temperature of the sample stage, a mounting member disposed below the refrigerator and supporting the refrigerator, a first chamber surrounding the outside of the sample stage and having an interior that is maintained in a vacuum state, a second chamber surrounding the outside of the first chamber, and a vibration reduction member connecting the refrigerator to the second chamber, wherein the sample stage, the first chamber, and the second chamber can be connected to each other.

A probe station device according to one embodiment may further include a first supporter connecting the sample stage to the first chamber and a second supporter disposed between the first chamber and the second chamber, connecting the first chamber to the second chamber.

In one embodiment, the first supporter can be secured to the sample stage while being spaced apart from the sample stage.

According to one embodiment, the sample stage is connected to the first chamber and the second chamber through the first supporter and the second supporter to transmit the load of the first chamber and the second chamber.

A probe station device according to one embodiment further includes a connector formed on an inner wall of the second chamber, wherein the connector and a portion of the second supporter are interlocked with each other, and a portion of the sample stage and a portion of the first supporter are interlocked with each other.

According to one embodiment, the first chamber includes a sidewall disposed between the first supporter and the second supporter and surrounding the periphery of the sample stage, a cover supported by the sidewall, and an observation element disposed on the cover to monitor the sample stage, wherein the cover can be provided to be movable with respect to the sidewall.

In one embodiment, the first chamber further includes a base extending from a lower end of the side wall, a clearance exists between the base and the outer wall of the refrigerator, and the base can be connected to the outer wall of the refrigerator by a first heat-conducting link.

In one embodiment, the cover may be connected to the side wall by a second heat-conducting link.

In one embodiment, the first heat-conducting link may be formed of copper or aluminum.

According to one embodiment, the first heat-conducting link may be formed of either a single or multiple wires, a braided wire or a stranded wire.

The probe station device according to one embodiment may further include a bridge connecting the first supporter and the second supporter.

In one embodiment, the bridge can support a side wall of the first chamber.

According to one embodiment, the bridges may be provided in multiple numbers along the periphery centered on the sample stage.

According to one embodiment, the connectors may be provided in multiple numbers along the inner wall of the second chamber.

According to one embodiment, the second supporter may include a supporter body supported by a side wall of the first chamber, and a plurality of supporter protrusions extending from the supporter body toward the second chamber.

In one embodiment, each of the plurality of supporter protrusions may be passable between two adjacent connectors among the plurality of connectors.

The probe station device according to one embodiment may further include a plurality of supporter holes formed through the first supporter or the second supporter.

According to one embodiment, the plurality of supporter holes may be formed penetrating in a first direction, which is a height direction of a side wall of the first chamber, or may be formed penetrating in a second direction intersecting the first direction.

According to one embodiment, the shape of the supporter hole formed through the first supporter and the shape of the supporter hole formed through the second supporter may be different from each other.

In one embodiment, the vibration reduction member may be a damper or a bellows.

A probe station device according to one embodiment further includes an optical table disposed on the ground and supporting the second chamber, wherein the sample stage, the first chamber, the second chamber and the optical table can be connected to each other.

A probe station device according to one embodiment includes a refrigerator arranged below the sample stage and controlling a temperature of the sample stage, a mounting member arranged below the refrigerator and supported on the ground, a stage supporter connected to the mounting member and supporting the sample stage, a first chamber surrounding the outside of the sample stage and maintaining an inside in a vacuum state, a second chamber surrounding the outside of the first chamber, and a vibration reduction member connecting the refrigerator to the second chamber, wherein the sample stage can receive a load of the mounting member through the stage supporter.

A probe station device according to one embodiment can suppress vibrations generated in a refrigerator from being transmitted to a workpiece.

FIG. 1 is a front view schematically illustrating a probe station device according to one embodiment.

FIG. 2 is a front view schematically illustrating the interior of a first chamber and a second chamber according to one embodiment.

FIG. 3 is a plan view schematically illustrating the interior of a first chamber and a second chamber according to one embodiment.

FIG. 4 is a plan view schematically illustrating a first supporter, a second supporter, and a supporter hole according to one embodiment.

FIG. 5 is a plan view schematically illustrating a first supporter, a second supporter, and a supporter hole according to one embodiment.

FIG. 6 is a front view schematically illustrating the interior of the first chamber and the second chamber according to one embodiment.

FIG. 7 is a plan view schematically illustrating a second chamber, a connector, and a second supporter according to one embodiment.

FIG. 8 is a plan view schematically illustrating a second chamber, a connector, and a second supporter according to one embodiment.

FIG. 9 is a plan view schematically illustrating a first supporter, a second supporter, and a bridge according to one embodiment.

FIG. 10 is a front view schematically illustrating a probe station device according to one embodiment.

FIG. 11 is a front view schematically illustrating a mounting portion, an optical table leg, and a spacer according to one embodiment.

Specific structural or functional descriptions of the embodiments are disclosed for illustrative purposes only and may be implemented in various forms. Accordingly, the actual implemented form is not limited to the specific embodiments disclosed, and the scope of the present disclosure includes modifications, equivalents, or alternatives included in the technical idea described in the embodiments.

Although the terms first or second may be used to describe various components, such terms should be construed only for the purpose of distinguishing one component from another. For example, a first component may be referred to as a second component, and similarly, a second component may also be referred to as a first component.

When it is said that a component is "connected" to another component, it should be understood that it may be directly connected or connected to that other component, but there may also be other components in between.

Singular expressions include plural expressions unless the context clearly indicates otherwise. In this specification, the terms "comprises" or "has" and the like are intended to specify the presence of a described feature, number, step, operation, component, part, or combination thereof, but should be understood to not preclude the presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

Components included in one embodiment and components that have common functions will be described using the same names in other embodiments. Unless otherwise stated, descriptions made in one embodiment can be applied to other embodiments, and specific descriptions will be omitted to the extent of overlap.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning they have in the context of the relevant art, and will not be interpreted in an idealized or overly formal sense unless explicitly defined herein.

Hereinafter, embodiments will be described in detail with reference to the attached drawings. In describing with reference to the attached drawings, identical components are given the same reference numerals regardless of the drawing numbers, and redundant descriptions thereof will be omitted.

FIG. 1 is a front view schematically illustrating a probe station device according to one embodiment.

Referring to FIG. 1, a probe station device (1) according to one embodiment can measure and test the characteristics of a specimen placed on a sample stage (11). The probe station device (1) can maximize the masses of the sample stage (11) and the refrigerator (12), respectively, to reduce the amount of vibration generated from the refrigerator (12) and transmitted to the sample stage (11). The probe station device (1) can include a sample stage (11), a refrigerator (12), a mounting portion (91), a first chamber (13), a second chamber (14), and an optical table (92).

A specimen can be placed on the sample stage (11). A refrigerator (12) is arranged below the sample stage (11) and can control the temperature of the sample stage (11). The refrigerator (12) can include a CCR first stage (121, closed-cycle refrigerator first stage), a CCR second stage (122, closed-cycle refrigerator second stage), a refrigerator outer wall (123), and a motor (124).

The CCR first stage (121) can compress the refrigerant. For example, the CCR first stage (121) can be configured as a compressor. The refrigerant compressed through the CCR first stage (121) can be maintained in a liquid state as the pressure increases.

The CCR second stage (122) can remove heat from the compressed refrigerant and evaporate the refrigerant to perform cooling. For example, the CCR second stage (122) can be composed of a condenser and an expansion device. The condenser can release heat from the compressed refrigerant and convert the refrigerant into a liquid state. The expansion device can reduce the pressure of the refrigerant in a liquid state.

The CCR second stage (122) can be connected to the sample stage (11) via a CCR heat conduction link (93). The CCR heat conduction link (93) can be composed of, for example, an elastic body and a damper. The CCR heat conduction link (93) can reduce the temperature of the sample stage (11) by taking heat from the sample stage (11).

The refrigerator outer wall (123) can cover the side of the CCR second stage (122) and the CCR heat conduction link (93) while being supported by the CCR first stage (121). The refrigerator outer wall (123) can reduce the amount of air flowing in from the outside to the surroundings of the CCR second stage (122) and the CCR heat conduction link (93). The refrigerator outer wall (123) can reduce interference of the outside air and reduce heat intrusion by radiant heat from the outside while the temperature of the sample stage (11) is controlled. The refrigerator outer wall (123) may also be referred to as a 'heat radiation shield'.

The motor (124) can provide power to the CCR first stage (121) and the CCR second stage (122). At this time, vibration may occur when the motor (124) is driven, or vibration may occur when the refrigerant moves to the CCR first stage (121) and the CCR second stage (122).

The mounting part (91) is arranged on the lower side of the refrigerator (12) and can support the refrigerator (12). One side of the mounting part (91) can be supported on the ground. The refrigerator (12) is connected to the mounting part (91) and can receive the load of the mounting part (91). The mass of the refrigerator (12) increases and the vibration generated in the refrigerator (12) can be reduced. By connecting an additional weight to the mounting part (91), the weight of the mounting part (91) can be increased.

The first chamber (13) can surround the outside of the sample stage (11). The first chamber (13) can maintain the inside at a constant temperature. For example, the temperature inside the first chamber (13) can be 100K or less, for example, 4.2K. The sample stage (11) can be connected to the first chamber (13) and receive the load of the first chamber (13).

The second chamber (14) can maintain the inside in a vacuum state and surround the outside of the first chamber (13). The second chamber (14) can maintain the inside at a constant temperature. For example, the temperature inside the second chamber (14) can be 30K to 300K. The first chamber (13) is connected to the second chamber (14) and can receive the load of the second chamber (14). From this structure, the sample stage (11) can receive the load of not only the first chamber (13) but also the second chamber (14).

The second chamber (14) may be connected to the refrigerator (12) via a vibration reduction member (15). The vibration reduction member may absorb some of the vibration generated in the refrigerator (12) and reduce the amount of vibration transmitted to the chamber. The vibration reduction member (15) may be, for example, a damper or a bellows.

The optical table (92) may include a leg (921) placed on the ground and a top plate (922) connected to the leg (921) and supporting the second chamber (14). The sample stage (11), the first chamber (13), the second chamber (14), and the optical table (92) may be connected to each other. The sample stage (11) may receive the load of the optical table (92) as well as the load of the first chamber (13) and the second chamber (14).

Although not shown in the drawing, vibration dampening feet may be additionally provided on the legs (921) of the optical table (92) that contact the ground. This can reduce vibrations generated in the optical table (92) due to external impacts on the probe station device (1) and reduce noise generated during operation of the probe station device (1).

FIG. 2 is a front view schematically illustrating the interior of a first chamber and a second chamber according to one embodiment, and FIG. 3 is a plan view schematically illustrating the interior of the first chamber and the second chamber according to one embodiment. FIGS. 4 and 5 are plan views schematically illustrating a first supporter, a second supporter, and a supporter hole according to one embodiment.

Referring to FIGS. 2 and 3, a sample stage (11) according to one embodiment may be connected to a first chamber (13) through a first supporter (16), and the first chamber (13) may be connected to a second chamber (14) through a second supporter (17). The sample stage (11) may receive loads of the first chamber (13) and the second chamber (14) through the first supporter (16) and the second supporter (17).

A part of the first supporter (16) and a part of the sample stage (11) may be interlocked with each other. For example, as illustrated in FIG. 2, the sample stage (11) may have a shape in which the center thereof protrudes upward. Here, the upper part is in the +z direction. The first supporter has a ring shape in which the center thereof is perforated, and the upper part of the first supporter (16) may protrude toward the center of the sample stage (11). In a state in which the protruding center of the sample stage (11) is inserted into the perforated center of the first supporter (16), the first supporter (16) may be supported by the edge of the sample stage (11). The lower part of the first supporter (16) may be supported by the first chamber (13).

Meanwhile, the sample stage (11) and the first supporter (16) may be mechanically connected while being spaced apart from each other. For example, a gap may exist between the edge of the sample stage (11) and the first supporter (16). From this structure, heat conducted from the first supporter (16) to the sample stage (11) may be reduced. The second supporter (17) may be arranged between the first chamber (13) and the second chamber (14), so as to connect the first chamber (13) to the second chamber (14). The lower part of the second supporter (17) may protrude into the inner wall of the second chamber (14) and may be engaged with a connector (19) formed on the inner wall of the second chamber (14). The portion where the second supporter (17) and the connector (19) are engaged may be connected with a screw.

In one embodiment, the first supporter (16) and the second supporter (17) may be formed of a material that is crack-free at extremely low temperatures and has low thermal conductivity. For example, the first supporter (16) and the second supporter (17) may be formed of a fiber reinforced resin composite material, such as glass fiber epoxy resin.

The connector (19) can be formed to protrude along the perimeter of the inner wall of the second chamber (14). The connector (19) can be formed continuously along the perimeter of the inner wall of the second chamber (14). From this structure, the second supporter (17) can be restricted in upward movement by the connector (19) and in downward movement by the first chamber (13).

To prevent heat from the first chamber (13) from being transferred to the sample stage (11), the first supporter (16) may be formed of a material having low thermal conductivity. Similarly, to prevent heat from the second chamber (14) from being transferred to the first chamber (13), the second supporter (17) may be formed of a material having low thermal conductivity.

A plurality of supporter holes (18) may be formed penetratingly in the height direction of the first chamber (13) along the circumference based on the center in the first supporter (16) and the second supporter (17). For example, the plurality of supporter holes (18) may be formed spaced apart from each other at equal intervals. Heat conducted from the outside of the second chamber (14) to the inside of the first chamber (13) through the first supporter (16) and the second supporter (17) may be reduced. The insulation effect of the first chamber (13) and the second chamber (14) may be increased.

Meanwhile, it is to be noted in advance that the shape and number of the plurality of holes (18) are not limited to the shape and number of the holes (18) illustrated in Fig. 3. The plurality of holes may have a single or multiple types of shapes capable of minimizing heat conduction, such as circular, elliptical, spiral, or radial.

For example, as illustrated in FIG. 4, a plurality of supporter holes (58) according to one embodiment may be formed lengthwise in the first supporter (56) and the second supporter (57) respectively along the periphery centered on the sample stage (11). For example, as illustrated in FIG. 5, a plurality of supporter holes (68) according to one embodiment may be formed to penetrate the first supporter (66) and the second supporter (67) respectively in the horizontal direction rather than the vertical direction.

In one embodiment, to reduce vibrations generated from the refrigerator and transmitted to the sample stage (11), the first chamber (13) and the refrigerator outer wall (123) may be separated from each other. Vibrations generated from the refrigerator and transmitted to the first chamber (13) may be reduced. The first chamber (13) may include a base (131), a side wall (132), a cover (133), and an observation element (134).

The base (131) can support the lower part of the first supporter (16) and the lower part of the second supporter (17), respectively. There may be a gap between the base (131) and the outer wall (123) of the refrigerator. The base (131) can be connected to the outer wall (123) of the refrigerator by the first heat-conducting link (94).

The first heat-conducting link (94), like the CCR heat-conducting link (93), may be formed of a flexible and highly thermally conductive material. For example, the CCR heat-conducting link (93) and the first heat-conducting link (94) may be a single or multiple thin and long wire, a braided wire made of wires, or a twisted wire. For example, the CCR heat-conducting link (93) and the first heat-conducting link (94) may be formed of a metal such as copper or aluminum.

The outer wall (123) of the refrigerator and the side wall (132) of the first chamber (13) are connected by the first heat conduction link (94), so that vibration transmitted from the outer wall (123) of the refrigerator to the side wall (132) of the first chamber (13) can be reduced. The refrigerator can take away heat inside the first chamber (13) through the first heat conduction link (94) and maintain the temperature inside the first chamber (13) constant.

The side wall (132) may be formed to extend upward from the base (131). The side wall (132) may be arranged between the first supporter (16) and the second supporter (17) and may surround the perimeter of the sample stage (11). The side wall (132) may prevent heat from entering due to radiant heat from the outside. The side wall (132) may be formed of, for example, aluminum.

The cover (133) may be supported on the side wall (132). The cover (133) may move horizontally with respect to the side wall (132). Here, the horizontal direction is a direction parallel to the y-axis. The cover (133) may be connected to the side wall (132) by a second heat-conducting link (95). The second heat-conducting link (95) may be formed of a flexible and highly heat-conductive material. For example, the second heat-conducting link (95) may be formed of the same material as the first heat-conducting link (94). For example, the second heat-conducting link (95) may be formed of a metal such as copper or aluminum. The heat of the cover (133) may be transferred to the side wall (132) through the second heat-conducting link and then to the refrigerator through the first heat-conducting link (94). Heat diffusion into the first chamber (13) through the cover (133) can be reduced.

Meanwhile, it is to be noted in advance that each of the CCR heat conduction link (93), the first heat conduction link (94) and the second heat conduction link (95) may be provided in multiple units and placed in each section.

The observation element (134) can face the sample stage (11) while being placed on the cover (133). As the cover (133) moves horizontally with respect to the side wall (132), the observation element (134) can also move integrally with the cover (133). In addition to monitoring the sample stage (11) through the observation element (134), a wide range of optical experiments, such as magnified observation of a specimen image and analysis of reflected light after injection of optical energy such as a laser, can be possible. A cover sealing element (135) can be placed between the observation element (134) and the cover (133). The cover sealing element (135) can reduce heat penetrating from the second chamber (34) into the first chamber (33) and reduce frost generated on the surface of the observation element (134).

FIG. 6 is a front view schematically illustrating the interior of the first chamber and the second chamber according to one embodiment.

Referring to FIG. 6, the center of the sample stage (21) of the probe station device (2) according to one embodiment may protrude downward. The lower part of the first supporter (26) may protrude toward the center of the sample stage (21) and support the edge of the sample stage (21). The lower part of the first supporter (26) may be supported by the base (231) of the first chamber.

The upper part of the second supporter (27) may be formed to protrude toward the inside of the second chamber (24). The connector (29) may support the second supporter (27) from below. Unlike the probe station device illustrated in FIG. 2, when assembling the probe station device (2) illustrated in FIG. 6, since each component is assembled by stacking it from the bottom, the assembly process may be simplified. For example, when assembling the probe station device (2) illustrated in FIG. 6, the first supporter (26) may be first placed inside the side wall (232) of the first chamber with the cover removed so as to be supported by the base (231) of the first chamber, and then the sample stage (21) may be placed on the first supporter (26). Similarly, the second supporter (27) may be placed so as to be supported by the connector (29) and the base (231) of the first chamber.

FIGS. 7 and 8 are plan views schematically illustrating a second chamber, a connector, and a second supporter according to one embodiment.

Referring to FIGS. 7 and 8, a plurality of connectors (49) according to one embodiment may be provided. The connectors (49) may be formed discontinuously along the perimeter of the inner wall of the second chamber (44). The second supporter (47) may be screw-connected to the connector (49) after passing through the gap between the connectors (49). In the process of assembling the probe station device, the second supporter (47) may be connected to the second chamber (44) regardless of the assembly order between the second chamber (44) and the second supporter (47). For example, the second chamber (44) may be placed first and then the second supporter (47) may be connected to the connector (49), or the second supporter (47) may be placed first and then the connector (49) may be connected to the second supporter (47). Likewise, in the process of disassembling the probe station device, the second supporter (47) can be separated from the second chamber (44) regardless of the disassembly order between the second chamber (44) and the second supporter (47).

The second supporter (47) may include a supporter body (471) supported by the side wall of the first chamber, and a plurality of supporter protrusions (472) formed to extend from the supporter body (471) toward the second chamber (44). For example, the supporter body (471) may have a ring shape with a through-hole in the center, and the supporter protrusions (472) may protrude circumferentially from the supporter body (471).

Each of the plurality of supporter protrusions (472) can pass between two adjacent connectors (49). From this structure, when the second supporter (47) rotates in one direction after the supporter protrusions (472) pass between the connectors (49), the supporter protrusions (472) can overlap the connectors (49) with respect to the z-axis direction. Each of the supporter protrusions (472) can be connected to each of the overlapped connectors (49) with a screw.

FIG. 9 is a plan view schematically illustrating a first supporter, a second supporter, and a bridge according to one embodiment.

Referring to FIG. 9, a probe station device according to one embodiment may further include a bridge (85). The bridge (85) may connect a first supporter (86) and a second supporter (87). The first supporter (86), the second supporter (87), and the bridge (85) may be connected to each other to have an integrated structure. The bridge (85) may be formed of, for example, the same material as the first supporter (86) and the second supporter (87).

A plurality of bridges (85) may be provided around the sample stage. A portion of the side wall of the first chamber may be extended to pass through a hole (H) surrounded by two adjacent bridges (85), a first supporter (86), and a second supporter (87), while being supported by each bridge (85). The side wall of the first chamber passing through the hole (H) may be connected to the outer wall of the refrigerator through a first heat conduction link.

In one embodiment, the width of the hole (H) may be greater than the width of the bridge (85). As the width of the hole (H) increases and the width of the bridge (85) decreases, the amount of heat conducted from the second supporter (87) to the first supporter (86) may decrease.

FIG. 10 is a front view schematically illustrating a probe station device according to one embodiment.

Referring to FIG. 10, the sample stage (31) of the probe station device (3) according to one embodiment can receive the load of the mounting part (71) through the stage supporter (36). The stage supporter (36) can support the lower part of the sample stage (31) while being connected to the mounting part (71) supported on the ground. From this structure, the sample stage (31) can be physically separated from the refrigerator where vibration occurs.

In one embodiment, the stage supporter (36) may include a plurality of frames. For example, the stage supporter (36) may include a first frame (361) supported by an upper portion of the mounting portion (71) and extending upwardly, a second frame (362) connected to the first frame (361) and extending upwardly, and a third frame (363) connected to the second frame (362), extending upwardly, and connected to a lower portion of the sample stage (31).

The upper part of the first frame (361) and the lower part of the second frame (362) are connected by a coupler (37), so that their movement with respect to each other can be restricted. Similarly, the upper part of the second frame (362) and the lower part of the third frame (363) are also connected by a coupler (37), so that their movement with respect to each other can be restricted.

The first frame (361) can penetrate the first chamber (33) and the second chamber (34). A chamber sealing element (38) is arranged between the first frame (361) and the second chamber (34), so as to reduce heat penetrating from the outside into the second chamber (34). Similarly, a chamber sealing element (38) is arranged between the first frame (361) and the first chamber (33), so as to reduce heat penetrating from the second chamber (34) into the first chamber (33).

In order to level the sample stage (31) with respect to the ground, the first frame (361), the second frame (362), the third frame (363) and the coupler (37) may each be provided in multiple units.

The CCR second stage (322) can be connected to the sample stage (31) using a CCR heat conduction link (73). The CCR heat conduction link (73) can cool the temperature of the sample stage (31) to a cryogenic temperature. For example, two CCR heat conduction links (73) can be provided. The two CCR heat conduction links (73) can generate a phase difference to cancel out the amplitude of the vibration waveform generated in the refrigerator.

FIG. 11 is a front view schematically illustrating a mounting portion, an optical table leg, and a spacer according to one embodiment.

Referring to FIG. 11, a probe station device according to one embodiment can align a side wall of a first chamber and an outer wall of a refrigerator in the z-axis direction by using a spacer (77). Since the side wall of the first chamber (e.g., the side wall (132) of the first chamber (13) of FIG. 2) and the outer wall of the refrigerator (e.g., the outer wall (123) of the refrigerator of FIG. 2) are spaced apart from each other, if they are not aligned with each other, the heat blocking efficiency may decrease or tension may be applied to the first heat conduction link and the CCR heat conduction link.

The spacer (77) can assist in arranging the mounting portion (e.g., the mounting portion (91) of FIG. 1 and the mounting portion (71) of FIG. 10) at the center of the legs of a plurality of optical tables (e.g., the legs (921) of the optical table of FIG. 1 and the legs (721) of the optical table of FIG. 10). For example, the spacers (77) can be provided in the same number as the legs (721, 921) of the optical table, and the lengths of each spacer (77) can be the same.

After the optical table is placed on the ground, one end of a plurality of spacers (77) can be connected to each of the legs (721, 921) of the optical table. The other end of the spacer (77) can be placed toward the center of the leg (721, 921) of the optical table. In this state, the mounting portion (71) is placed where the other ends of the spacers (77) meet, and the other ends of the spacers (77) can be connected to the mounting portion (71, 91).

In a state where the other ends of the plurality of spacers (77) are all connected to the mounting portions (71, 91), the mounting portions (71, 91) can be arranged at the center of the optical table legs (721, 921). Meanwhile, since the center can be marked on the top plate of the optical table supporting the first chamber and the second chamber, the side wall of the first chamber can always be arranged at the center of the optical table. In a state where the mounting portions (71, 91) are arranged at the center of the optical table legs (721, 921), the side wall (132) of the first chamber and the outer wall (123) of the refrigerator can be aligned with each other in the z-axis direction.

In one embodiment, the spacer (77) can be removably connected to the legs (721, 921) of the optical table and the mounting members (71, 91), respectively. After the mounting members (71, 91) are placed on the ground, the spacer (77) can be removed from the probe station device before operating the probe station device.

Meanwhile, unlike what is shown in the drawings of this specification, the spacer (77) may be formed of a plurality of segments. Each of the plurality of segments forming one spacer (77) may be detachably connected to each other. By controlling the presence or absence of connection and the connection strength between the plurality of segments, the vibration transmitted from the mounting portion (71, 91) to the legs (721, 921) of the optical table may be controlled.

Although the embodiments have been described with limited drawings as described above, those skilled in the art can apply various technical modifications and variations based on the above. For example, even if the described techniques are performed in a different order than the described method, and/or the components of the described system, structure, device, circuit, etc. are combined or combined in a different form than the described method, or are replaced or substituted by other components or equivalents, appropriate results can be achieved.

Therefore, other implementations, other embodiments, and equivalents to the claims are also included in the scope of the claims described below.

Claims (22)

A sample stage on which the specimen is placed; A refrigerator positioned below the sample stage and controlling the temperature of the sample stage; A mounting member positioned at the lower side of the refrigerator and supporting the refrigerator; a first chamber surrounding the outer side of the sample stage; and A second chamber having a vacuum inside and surrounding the outside of the first chamber; and Including a vibration reduction member connecting the above refrigerator to the second chamber, A probe station device, wherein the sample stage, the first chamber and the second chamber are connected to each other. In paragraph 1, a first supporter connecting the sample stage to the first chamber; and A second supporter disposed between the first chamber and the second chamber, connecting the first chamber to the second chamber; A probe station device further comprising: In the second paragraph, The above first supporter, A probe station device fixed to the sample stage while being spaced apart from the sample stage. In the second paragraph, The above sample stage is, A probe station device, which is connected to the first chamber and the second chamber through the first supporter and the second supporter and can transmit the load of the first chamber and the second chamber. In the second paragraph, Further comprising a connector formed on the inner wall of the second chamber; A part of the above connector and the second supporter are interlocked with each other, A probe station device, wherein a portion of the sample stage and a portion of the first supporter are interlocked with each other. In paragraph 5, The above first chamber, A side wall disposed between the first supporter and the second supporter and surrounding the periphery of the sample stage; a cover supported on the side wall; and An observation element disposed on the cover and capable of monitoring the sample stage is included, A probe station device, wherein the cover is provided to be movable relative to the side wall. In paragraph 6, The first chamber further comprises a base extending from the lower end of the side wall, A probe station device, wherein a gap exists between the base and the outer wall of the refrigerator, and the base is connected to the outer wall of the refrigerator by a first heat-conducting link. In paragraph 6, The above cover, A probe station device connected to the side wall by a second heat-conducting link. In paragraph 7, The above first heat conduction link, A probe station device formed of copper or aluminum. In paragraph 7, The above first heat conduction link, A probe station device formed of either a single or multiple wires, a braided wire or a stranded wire. In paragraph 6, A probe station device further comprising a bridge connecting the first supporter and the second supporter. In Article 11, The above bridge, A probe station device supporting the side wall of the first chamber. In Article 11, The above bridge, A probe station device, which is provided in multiple units around the periphery centered on the above sample stage. In paragraph 6, The above connector, A probe station device provided in multiple units along the inner wall of the second chamber. In Article 14, The above second supporter, A supporter body supported by the side wall of the first chamber, A probe station device comprising a plurality of supporter protrusions extending from the supporter body toward the second chamber. In Article 15, Each of the above multiple supporter protrusions, A probe station device capable of passing between two adjacent connectors among the above plurality of connectors. In the second paragraph, A probe station device further comprising a plurality of supporter holes formed through the first supporter or the second supporter. In Article 17, The above multiple supporter halls are, A probe station device, which is formed by penetrating in a first direction, which is the height direction of the side wall of the first chamber, or formed by penetrating in a second direction intersecting the first direction. In Article 17, A probe station device, wherein the shape of the supporter hole formed through the first supporter and the shape of the supporter hole formed through the second supporter are different from each other. In paragraph 1, A probe station device wherein the vibration reduction member is a damper or a bellows. In paragraph 1, Further comprising an optical table disposed on the ground and supporting the second chamber, A probe station device, wherein the sample stage, the first chamber, the second chamber and the optical table are connected to each other. A sample stage on which the specimen is placed; A refrigerator positioned below the sample stage and controlling the temperature of the sample stage; A mounting member positioned at the bottom of the refrigerator and supported on the ground; A stage supporter connected to the above mounting portion and supporting the sample stage; a first chamber surrounding the outer side of the sample stage; and A second chamber having a vacuum inside and surrounding the outside of the first chamber; and Including a vibration reduction member connecting the above refrigerator to the second chamber, The above sample stage is a probe station device capable of transmitting the load of the mounting part through the stage supporter.

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