WO2024255602A1 - Photosensitive developing resin having imide structure, preparation method therefor, and use thereof - Google Patents
Photosensitive developing resin having imide structure, preparation method therefor, and use thereof Download PDFInfo
- Publication number
- WO2024255602A1 WO2024255602A1 PCT/CN2024/096221 CN2024096221W WO2024255602A1 WO 2024255602 A1 WO2024255602 A1 WO 2024255602A1 CN 2024096221 W CN2024096221 W CN 2024096221W WO 2024255602 A1 WO2024255602 A1 WO 2024255602A1
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- WIPO (PCT)
- Prior art keywords
- parts
- reaction
- imide structure
- photosensitive developing
- developing resin
- Prior art date
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- 229920005989 resin Polymers 0.000 title claims abstract description 44
- 239000011347 resin Substances 0.000 title claims abstract description 44
- 238000002360 preparation method Methods 0.000 title claims abstract description 7
- 125000005462 imide group Chemical group 0.000 title abstract 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims abstract description 42
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims abstract description 26
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910000679 solder Inorganic materials 0.000 claims abstract description 16
- 229920000768 polyamine Polymers 0.000 claims abstract description 13
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 claims abstract description 11
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims abstract description 11
- 235000019253 formic acid Nutrition 0.000 claims abstract description 11
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical class [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 claims abstract description 10
- 229940057499 anhydrous zinc acetate Drugs 0.000 claims abstract description 10
- 239000003112 inhibitor Substances 0.000 claims abstract description 10
- DJWUNCQRNNEAKC-UHFFFAOYSA-L zinc acetate Chemical compound [Zn+2].CC([O-])=O.CC([O-])=O DJWUNCQRNNEAKC-UHFFFAOYSA-L 0.000 claims abstract description 10
- 239000003054 catalyst Substances 0.000 claims abstract description 8
- 239000002253 acid Substances 0.000 claims abstract description 7
- -1 alicyclic anhydride Chemical class 0.000 claims abstract description 7
- 239000002994 raw material Substances 0.000 claims abstract description 6
- 238000006116 polymerization reaction Methods 0.000 claims abstract description 4
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 3
- 238000006243 chemical reaction Methods 0.000 claims description 52
- 239000000047 product Substances 0.000 claims description 33
- 150000003949 imides Chemical group 0.000 claims description 32
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 claims description 24
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 18
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 claims description 15
- 229920003192 poly(bis maleimide) Polymers 0.000 claims description 15
- 239000000843 powder Substances 0.000 claims description 15
- 239000007787 solid Substances 0.000 claims description 15
- HTZCNXWZYVXIMZ-UHFFFAOYSA-M benzyl(triethyl)azanium;chloride Chemical compound [Cl-].CC[N+](CC)(CC)CC1=CC=CC=C1 HTZCNXWZYVXIMZ-UHFFFAOYSA-M 0.000 claims description 14
- 239000012044 organic layer Substances 0.000 claims description 14
- 238000003756 stirring Methods 0.000 claims description 14
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 10
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims description 9
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims description 8
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 7
- 239000007795 chemical reaction product Substances 0.000 claims description 7
- 229910052943 magnesium sulfate Inorganic materials 0.000 claims description 7
- 235000019341 magnesium sulphate Nutrition 0.000 claims description 7
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 7
- 238000002390 rotary evaporation Methods 0.000 claims description 7
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 claims description 6
- QLBRROYTTDFLDX-UHFFFAOYSA-N [3-(aminomethyl)cyclohexyl]methanamine Chemical compound NCC1CCCC(CN)C1 QLBRROYTTDFLDX-UHFFFAOYSA-N 0.000 claims description 6
- PWGJDPKCLMLPJW-UHFFFAOYSA-N 1,8-diaminooctane Chemical compound NCCCCCCCCN PWGJDPKCLMLPJW-UHFFFAOYSA-N 0.000 claims description 4
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 claims description 4
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 claims description 4
- 238000001723 curing Methods 0.000 claims description 3
- 238000001914 filtration Methods 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 claims description 2
- JTTIOYHBNXDJOD-UHFFFAOYSA-N 2,4,6-triaminopyrimidine Chemical compound NC1=CC(N)=NC(N)=N1 JTTIOYHBNXDJOD-UHFFFAOYSA-N 0.000 claims description 2
- RNLHGQLZWXBQNY-UHFFFAOYSA-N 3-(aminomethyl)-3,5,5-trimethylcyclohexan-1-amine Chemical compound CC1(C)CC(N)CC(C)(CN)C1 RNLHGQLZWXBQNY-UHFFFAOYSA-N 0.000 claims description 2
- DZIHTWJGPDVSGE-UHFFFAOYSA-N 4-[(4-aminocyclohexyl)methyl]cyclohexan-1-amine Chemical compound C1CC(N)CCC1CC1CCC(N)CC1 DZIHTWJGPDVSGE-UHFFFAOYSA-N 0.000 claims description 2
- XESZUVZBAMCAEJ-UHFFFAOYSA-N 4-tert-butylcatechol Chemical compound CC(C)(C)C1=CC=C(O)C(O)=C1 XESZUVZBAMCAEJ-UHFFFAOYSA-N 0.000 claims description 2
- MWSKJDNQKGCKPA-UHFFFAOYSA-N 6-methyl-3a,4,5,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1CC(C)=CC2C(=O)OC(=O)C12 MWSKJDNQKGCKPA-UHFFFAOYSA-N 0.000 claims description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 2
- OXIKYYJDTWKERT-UHFFFAOYSA-N [4-(aminomethyl)cyclohexyl]methanamine Chemical compound NCC1CCC(CN)CC1 OXIKYYJDTWKERT-UHFFFAOYSA-N 0.000 claims description 2
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 claims description 2
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 claims description 2
- CZZYITDELCSZES-UHFFFAOYSA-N diphenylmethane Chemical compound C=1C=CC=CC=1CC1=CC=CC=C1 CZZYITDELCSZES-UHFFFAOYSA-N 0.000 claims description 2
- 238000000016 photochemical curing Methods 0.000 claims description 2
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 claims description 2
- 238000005406 washing Methods 0.000 claims description 2
- 239000000976 ink Substances 0.000 abstract description 9
- 239000004642 Polyimide Substances 0.000 abstract description 5
- 229920001721 polyimide Polymers 0.000 abstract description 5
- 238000012986 modification Methods 0.000 abstract description 3
- 230000004048 modification Effects 0.000 abstract description 3
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 abstract description 2
- 238000006735 epoxidation reaction Methods 0.000 abstract description 2
- 230000032050 esterification Effects 0.000 abstract description 2
- 238000005886 esterification reaction Methods 0.000 abstract description 2
- 239000002861 polymer material Substances 0.000 abstract description 2
- 238000007142 ring opening reaction Methods 0.000 abstract description 2
- 150000008064 anhydrides Chemical class 0.000 abstract 2
- 230000009466 transformation Effects 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 238000007747 plating Methods 0.000 description 8
- 238000005530 etching Methods 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 238000011161 development Methods 0.000 description 5
- 239000012153 distilled water Substances 0.000 description 5
- 238000009713 electroplating Methods 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000005562 fading Methods 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 150000004985 diamines Chemical class 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 101001121408 Homo sapiens L-amino-acid oxidase Proteins 0.000 description 2
- 102100026388 L-amino-acid oxidase Human genes 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012536 packaging technology Methods 0.000 description 2
- 230000036211 photosensitivity Effects 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 240000005002 Erythronium dens canis Species 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004925 denaturation Methods 0.000 description 1
- 230000036425 denaturation Effects 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 239000012074 organic phase Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 150000003071 polychlorinated biphenyls Chemical class 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000013517 stratification Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D209/00—Heterocyclic compounds containing five-membered rings, condensed with other rings, with one nitrogen atom as the only ring hetero atom
- C07D209/02—Heterocyclic compounds containing five-membered rings, condensed with other rings, with one nitrogen atom as the only ring hetero atom condensed with one carbocyclic ring
- C07D209/44—Iso-indoles; Hydrogenated iso-indoles
- C07D209/48—Iso-indoles; Hydrogenated iso-indoles with oxygen atoms in positions 1 and 3, e.g. phthalimide
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D11/00—Inks
- C09D11/02—Printing inks
- C09D11/10—Printing inks based on artificial resins
- C09D11/101—Inks specially adapted for printing processes involving curing by wave energy or particle radiation, e.g. with UV-curing following the printing
Definitions
- the invention belongs to the technical field of polymer materials, and in particular relates to an imide structure photosensitive developing resin and a preparation method and application thereof.
- IC substrate technology originated in Japan in the 1980s and has a history of more than 30 years. In the early days, it coexisted with IC integrated packaging technology.
- substrate packaging technology As a precision connection device between the core chip and the conventional printed circuit board (PCB).
- IC substrates are made of copper-clad laminates through processes such as photolithography, solder mask photosensitive development, and gold plating, which are different from traditional copper plates in PCBs in several aspects.
- the substrate used for copper-clad laminates of IC substrates is different from the epoxy/glass fiber composite material of traditional copper-clad laminates.
- solder resist photosensitive developing ink is required to have strict heat resistance, thermal expansion resistance, hardness, scratch resistance, and impact resistance on the IC substrate. Some applications even require the solder resist layer to have a lower dielectric constant to meet the requirements of high-frequency communication.
- solder resist layer is required to have strict heat resistance, thermal expansion resistance, hardness, scratch resistance, and impact resistance on the IC substrate. Some applications even require the solder resist layer to have a lower dielectric constant to meet the requirements of high-frequency communication.
- most of the IC substrate back-end processing uses chemical gold plating (industrial abbreviation chemical gold) rather than electroplating. Chemical gold solutions generally have strong acidity or alkalinity, which requires the IC substrate solder resist layer to have a high resistance to chemical gold (i.e. corrosion resistance) to avoid defects such as discoloration, denaturation, and easy peeling of the solder resist layer.
- IC substrate solder resist inks have more stringent requirements on development resolution, development quality, thermal expansion resistance, and chemical gold resistance.
- the technical key to IC substrate solder resist inks lies in the photosensitive developing main resin and the photoinitiator system. Therefore, it is necessary to improve the relevant performance indicators of the photosensitive developing main resin to meet the requirements of the IC substrate.
- the first object of the present invention is to provide an imide structure photosensitive developing resin
- the second object of the present invention is to provide a method for preparing the photosensitive developing resin
- the third object of the present invention is to provide an application of the photosensitive developing resin.
- an imide structure photosensitive developing resin wherein the raw materials thereof include, by weight: 2-6 parts of a polyamine, 6-20 parts of a dicarboxylic acid anhydride, 1-6 parts of an unsaturated monobasic acid, 0.02-0.08 parts of an inhibitor, 0.02-0.08 parts of a catalyst, 2-10 parts of hydrogen peroxide, 2-6 parts of a saturated sodium bicarbonate solution, 1-5 parts of ether, 3-10 parts of formic acid, 50-70 parts of N-methylpyrrolidone, and anhydrous acetic acid.
- Zinc 2-8 parts Zinc 2-8 parts.
- the polyamine is selected from one or more of 4,4'-diaminodicyclohexylmethane, 1,4-cyclohexanedimethylamine, 1,3-cyclohexanedimethylamine, 4,4'-(p-dimethylamino)diphenylmethane, isophorone diamine, 1,8-octanediamine, polyoxyethylene diamine, and 2,4,6-triaminopyrimidine.
- the toughness and film-forming properties of the imide structure photosensitive developing resin derived from the chain polyamine can be improved; the imide structure photosensitive developing resin derived from the alicyclic polyamine is more rigid and tough, and has a better balance of properties; the imide structure photosensitive developing resin derived from the aromatic polyamine is more rigid, brittle, and has unsatisfactory solubility and film-forming properties. Therefore, it is generally necessary to match the three to offset and balance the performance.
- the dicarboxylic acid anhydride is selected from one or more of tetrahydrophthalic anhydride, hexahydrophthalic anhydride, and methyltetrahydrophthalic anhydride.
- the unsaturated monoacid is selected from one or more of acrylic acid, methacrylic acid, and crotonic acid.
- the polymerization inhibitor is selected from at least one of hydroquinone, p-tert-butylcatechol, and catechol.
- the catalyst is selected from one or more of benzyltriethylammonium chloride, benzyldiamine, triethylamine, diethylamine, and triphenylphosphine.
- step S2 mixing the bismaleimide solid powder obtained in step S1 with formic acid, stirring at 50-60° C. for 1-3 h, then adding hydrogen peroxide, and continuing the reaction for 3-5 h.
- step S2 adding saturated sodium bicarbonate solution and diethyl ether to the reaction product, shaking evenly and standing to separate, separating the organic layer, washing the organic layer with water for 2-3 times, then removing the diethyl ether by rotary evaporation, adding anhydrous magnesium sulfate to dry overnight, and then filtering to remove the magnesium sulfate to obtain the product;
- step S3 mixing the product obtained in step S2 with the remaining inhibitor and catalyst, heating the system to 90-100°C, then adding unsaturated monoacid, heating to 110-120°C after addition, and continuing to react for 2-3h, after the reaction is completed, lowering the temperature of the reaction system to 70-90°C, adding the remaining dicarboxylic acid anhydride, and reacting for 6-8h to obtain.
- step S1 anhydrous zinc acetate is used to adsorb water generated in the reaction, and N-methylpyrrolidone is used as a solvent.
- step S1 a staged heating method is adopted, the purpose is to first heat all the reaction raw materials at a lower temperature. Mix evenly at 70-80°C to avoid local explosion in the subsequent high temperature (140-160°C) reaction.
- step S2 the role of formic acid is mainly to provide a weak acid environment to enhance the oxidizing property of hydrogen peroxide.
- step S2 the role of diethyl ether is to provide an organic phase in the extraction.
- step S3 the main reaction raw materials are mixed evenly with the inhibitor and the catalyst, and then the temperature is raised to 90-100° C. At this time, the unsaturated monoacid is added, which is not easy to self-polymerize. After stirring evenly, the temperature is raised to 110-120° C. to further prevent the unsaturated monoacid from exploding.
- the present invention introduces an imide structure into a photosensitive developing main resin, and continues to graft on the basis of the generated polyimide to increase the functionality of the resin.
- the present invention first reacts a polyamine with an alicyclic anhydride with a double bond to generate a polyimide structure with a double bond at the end group, then performs epoxidation conversion on the double bond, then performs ring-opening esterification with an unsaturated monobasic acid, and then performs an acid anhydride modification to introduce a carboxyl group, and finally obtains a photosensitive developing resin with an imide structure.
- the resin has the advantages of excellent electrical properties, heat resistance, good dimensional stability, excellent adhesion, and a relatively low dielectric constant.
- the schematic diagram of the synthesis route of the present invention is shown in FIG1 .
- step S1 the product is dried in a vacuum oven at 50° C. for 4-6 hours and ground to obtain a bismaleimide solid powder.
- step S2 hydrogen peroxide needs to be slowly added dropwise, and the adding time is controlled within 2-4 hours.
- the stirring speed is 600-800 rpm.
- a third aspect of the present invention there is provided a use of the above-mentioned imide structure photosensitive developing resin in the preparation of an IC substrate solder resist ink, a printed circuit board solder resist ink or a chip photoresist.
- a dry film obtained by photocuring or thermally curing the above-mentioned imide structure photosensitive developing resin.
- the imide structure photosensitive developing resin is printed on a carrier and baked at 70-80° C. for 20-30 minutes to obtain a dry film.
- a fifth aspect of the present invention there is provided a use of the above-mentioned dry film in the preparation of an IC substrate or a printed circuit board.
- the imide structure photosensitive developing resin of the present invention has a low molecular weight.
- the low molecular weight polyimide structure oligomer can make the cured film obtained after the resin is cured have a higher glass transition temperature and lower thermal expansion performance.
- due to the large amount of imide structures present after double bond cross-linking and curing, it becomes a polyimide cured film, so it has excellent heat resistance, thermal expansion resistance, and dimensional stability, and can meet the stringent requirements of IC substrate solder mask ink on line width accuracy and thermal deformation resistance.
- FIG1 is a schematic diagram of the synthesis route of Example 1 of the present invention.
- the stirring speed is 600 rpm.
- step (2) Add 29.35 g of the bismaleimide solid powder obtained in step (1) and 75.85 g of formic acid into a three-necked flask, stir at 50° C. for 2 h, then slowly add 48.89 g of hydrogen peroxide dropwise for about 3 h. After the addition is complete, continue the reaction for 5 h.
- reaction product After the reaction is complete, pour the reaction product into a separatory funnel, then add 50 g of saturated sodium bicarbonate solution and 25 g of ether, shake evenly and let stand to separate, separate the organic layer and then wash the organic layer three times with distilled water, then pour the washed product into a beaker, remove the ether by rotary evaporation, then add 30 g of anhydrous magnesium sulfate and dry overnight, then filter to remove the magnesium sulfate to obtain a dry product.
- step (3) Add 31.32 g of the dried product obtained in step (2) into another three-necked flask, then add 0.48 g of hydroquinone and 0.32 g of benzyltriethylammonium chloride, heat the system to 90° C., then drop 28.53 g of acrylic acid into the three-necked flask, and after the dropwise addition is complete, heat the system to 110° C. and continue to react for 2.5 h. After the reaction is complete, lower the temperature of the reaction system to 80° C., add 60.23 g of tetrahydrophthalic anhydride, and react for 6 h to obtain the product.
- the washed product was then poured into a beaker, the ether was removed by rotary evaporation, and then 30 g of anhydrous magnesium sulfate was added and dried overnight. After that, the magnesium sulfate was removed by filtration to obtain a dry product.
- step (3) Add 31.32 g of the dried product obtained in step (2) into another three-necked flask, then add 0.48 g of hydroquinone and 0.32 g of benzyltriethylammonium chloride, heat the system to 90° C., then drop 28.53 g of acrylic acid into the three-necked flask, and after the dropwise addition is complete, heat the system to 110° C. and continue the reaction for 2.5 h. After the reaction is complete, lower the temperature of the reaction system to 80° C., add 60.23 g of tetrahydrophthalic anhydride, and react for 6 h to obtain the product.
- step (2) Add 27.74 g of the bismaleimide solid powder obtained in step (1) and 75.85 g of formic acid into a three-necked flask, stir at 50° C. for 2 h, then slowly add 48.89 g of hydrogen peroxide dropwise for about 3 h. After the addition is complete, continue the reaction for 5 h.
- reaction product After the reaction is complete, pour the reaction product into a separatory funnel, then add 50 g of saturated sodium bicarbonate solution and 25 g of ether, shake evenly and let stand to separate, separate the organic layer and then wash the organic layer three times with distilled water, then pour the washed product into a beaker, remove the ether by rotary evaporation, then add 30 g of anhydrous magnesium sulfate and dry overnight, then filter to remove the magnesium sulfate to obtain a dry product.
- step (3) Add 31.32 g of the dried product obtained in step (2) into another three-necked flask, then add 0.48 g of hydroquinone and 0.32 g of benzyltriethylammonium chloride, heat the system to 90° C., then drop 28.53 g of acrylic acid into the three-necked flask, and after the dropwise addition is complete, heat the system to 110° C. and continue the reaction for 2.5 h. After the reaction is complete, lower the temperature of the reaction system to 80° C., add 60.23 g of tetrahydrophthalic anhydride, and react for 6 h to obtain the product.
- step (2) Add 28.79 g of the bismaleimide solid powder obtained in step (1) and 75.85 g of formic acid into a three-necked flask, stir at 50° C. for 2 h, then slowly add 48.89 g of hydrogen peroxide dropwise for about 3 h. After the addition is complete, continue the reaction for 5 h.
- reaction product After the reaction is complete, pour the reaction product into a separatory funnel, then add 50 g of saturated sodium bicarbonate solution and 25 g of ether, shake evenly and let stand to separate, separate the organic layer and then wash the organic layer three times with distilled water, then pour the washed product into a beaker, remove the ether by rotary evaporation, then add 30 g of anhydrous magnesium sulfate and dry overnight, then filter to remove the magnesium sulfate to obtain a dry product.
- step (3) Add 31.32 g of the dried product obtained in step (2) into another three-necked flask, then add 0.48 g of hydroquinone and 0.32 g of benzyltriethylammonium chloride, heat the system to 90° C., then drop 28.53 g of acrylic acid into the three-necked flask, and after the dropwise addition is complete, heat the system to 110° C. and continue the reaction for 2.5 h. After the reaction is complete, lower the temperature of the reaction system to 80° C., add 60.23 g of tetrahydrophthalic anhydride, and react for 6 h to obtain the product.
- step (2) Add 29.78 g of the bismaleimide solid powder obtained in step (1) and 75.85 g of formic acid into a three-necked flask, stir at 50° C. for 2 h, then slowly add 48.89 g of hydrogen peroxide dropwise for about 3 h. After the addition is complete, continue the reaction for 5 h.
- reaction product After the reaction is complete, pour the reaction product into a separatory funnel, then add 50 g of a saturated sodium bicarbonate solution and 25 g of ether, shake evenly and let stand to separate, separate the organic layer and then wash the organic layer three times with distilled water, then pour the washed product into a beaker, remove the ether by rotary evaporation, then add 30 g of anhydrous magnesium sulfate and dry overnight, then filter to remove the magnesium sulfate to obtain a dry product.
- a separatory funnel then add 50 g of a saturated sodium bicarbonate solution and 25 g of ether, shake evenly and let stand to separate, separate the organic layer and then wash the organic layer three times with distilled water, then pour the washed product into a beaker, remove the ether by rotary evaporation, then add 30 g of anhydrous magnesium sulfate and dry overnight, then filter to remove the magnesium sulfate to obtain a dry product.
- step (3) Add 31.32 g of the dried product obtained in step (2) into another three-necked flask, then add 0.48 g of hydroquinone and 0.32 g of benzyltriethylammonium chloride, heat the system to 90° C., then drop 28.53 g of acrylic acid into the three-necked flask, and after the dropwise addition is complete, heat the system to 110° C. and continue the reaction for 2.5 h. After the reaction is complete, lower the temperature of the reaction system to 80° C., add 60.23 g of tetrahydrophthalic anhydride, and react for 6 h to obtain the product.
- Photosensitivity The imide structure photosensitive developing resin is printed on the copper clad laminate, baked at 75°C for 20 minutes, a 21-level light gradient ruler is placed on the film layer, and exposed and developed under an exposure machine with an LED light source. The time when 7 grids remain on the film layer is used as the standard.
- Etching resistance The etching resistance is tested according to the method of GB/T 29846-2013 for photo-imaging electroplating resists for printed circuit boards. After etching, the pattern is visually intact, the line edges are neat, and there is no wrinkling, shedding or dog-tooth shape. The excellent one is wrinkled but not shedding. The good one is shedding. The poor one is shedding.
- Anti-plating property was tested according to the method of photo-imaging anti-plating resist for printed circuit board in GB/T 29846-2013. The image after electroplating was visually inspected to be free of plating seepage, bubbles and shedding, which was considered excellent. The image after plating was considered good with plating seepage but no shedding, which was considered poor.
- Film fading property The test specimens were placed in a 50°C, 3 wt% NaOH aqueous solution and the film fading performance was observed. The film fading performance was evaluated as excellent if it completely shed within 60 seconds without any residue, good if it completely shed within 60-120 seconds without any residue, and poor if it shed after 120 seconds without any residue.
- the imide structure photosensitive developing resin of the present invention has excellent properties such as photosensitivity, etching resistance, electroplating resistance, and film-fading resistance, and is suitable for use in preparing IC substrates.
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Abstract
Description
本发明属于高分子材料技术领域,具体涉及一种酰亚胺结构感光显影树脂及其制备方法和应用。The invention belongs to the technical field of polymer materials, and in particular relates to an imide structure photosensitive developing resin and a preparation method and application thereof.
IC载板技术上世纪80年代起源于日本,发展至今已有30多年历史,早期与IC一体化封装技术并存,当前高端IC基本都已采用载板封装技术,作为核心芯片与常规印制电路板(PCB)的精密连接装置。IC载板是由覆铜板经光刻、阻焊感光显影、镀金等工艺制作而成,与PCB传统铜板存在几个方面不同。其一,IC载板覆铜板所用基材不同于传统覆铜板的环氧/玻纤复合材料,而主要采用BT树脂、ABF绝缘膜(味之素公司的Ajinomoto Build-up Film)、MIS聚合物作为覆铜板(膜)基材,该三类基板材料都被国外企业垄断,经常成为芯片制造的卡脖子环节。其二,IC载板制作从特种覆铜板(膜)开始,所经历的线路蚀刻、阻焊感光显影加工都要求比常规PCB制作更为精细的技术要求,即蚀刻、阻焊显影分辨率更高,线宽通常控制在数十微米范围内。其三,阻焊感光显影油墨作为永久精细保护性薄层材料,在IC载板上要求具有严苛的耐热性、抗热膨胀、硬度、耐刮擦、抗冲击性能,甚至某些应用场合还要求该阻焊层具有较低的介电常数,以适应高频通讯要求。其四,IC载板后段加工大多采用化学镀金(工业简称化金),而非电镀,化金药水一般具有较强的酸性或碱性,这就要求IC载板阻焊层具有较高的耐化金性(即耐腐蚀性),避免出现阻焊层变色、变性、易剥落等缺陷。因此,IC载板阻焊油墨相对于传统PCB阻焊油墨,其显影分辨率、显影质量、抗热膨胀性、耐化金性等指标有了更严苛的要求,而IC载板阻焊油墨的技术关键在于感光显影主体树脂和光引发体系。因此,有必要提升感光显影主体树脂的相关性能指标以适应IC载板的要求。IC substrate technology originated in Japan in the 1980s and has a history of more than 30 years. In the early days, it coexisted with IC integrated packaging technology. Currently, most high-end ICs have adopted substrate packaging technology as a precision connection device between the core chip and the conventional printed circuit board (PCB). IC substrates are made of copper-clad laminates through processes such as photolithography, solder mask photosensitive development, and gold plating, which are different from traditional copper plates in PCBs in several aspects. First, the substrate used for copper-clad laminates of IC substrates is different from the epoxy/glass fiber composite material of traditional copper-clad laminates. It mainly uses BT resin, ABF insulating film (Ajinomoto Build-up Film of Ajinomoto Company), and MIS polymer as the substrate of copper-clad laminates (films). These three types of substrate materials are monopolized by foreign companies and often become the bottleneck of chip manufacturing. Second, the production of IC substrates starts with special copper-clad laminates (films), and the line etching and solder mask photosensitive development processes required require more sophisticated technical requirements than conventional PCB production, that is, the etching and solder mask development resolutions are higher, and the line width is usually controlled within tens of microns. Third, as a permanent fine protective thin layer material, solder resist photosensitive developing ink is required to have strict heat resistance, thermal expansion resistance, hardness, scratch resistance, and impact resistance on the IC substrate. Some applications even require the solder resist layer to have a lower dielectric constant to meet the requirements of high-frequency communication. Fourth, most of the IC substrate back-end processing uses chemical gold plating (industrial abbreviation chemical gold) rather than electroplating. Chemical gold solutions generally have strong acidity or alkalinity, which requires the IC substrate solder resist layer to have a high resistance to chemical gold (i.e. corrosion resistance) to avoid defects such as discoloration, denaturation, and easy peeling of the solder resist layer. Therefore, compared with traditional PCB solder resist inks, IC substrate solder resist inks have more stringent requirements on development resolution, development quality, thermal expansion resistance, and chemical gold resistance. The technical key to IC substrate solder resist inks lies in the photosensitive developing main resin and the photoinitiator system. Therefore, it is necessary to improve the relevant performance indicators of the photosensitive developing main resin to meet the requirements of the IC substrate.
发明内容Summary of the invention
本发明的第一个目的,在于提供一种酰亚胺结构感光显影树脂,本发明的第二个目的,在于提供该感光显影树脂的制备方法,本发明的第三个目的,在于提供该感光显影树脂的应用。The first object of the present invention is to provide an imide structure photosensitive developing resin, the second object of the present invention is to provide a method for preparing the photosensitive developing resin, and the third object of the present invention is to provide an application of the photosensitive developing resin.
根据本发明的第一个方面,提供了一种酰亚胺结构感光显影树脂,以重量份计,其原料组成包括:多元胺2-6份、二元羧酸酐6-20份、不饱和一元酸1-6份、阻聚剂0.02-0.08份、催化剂0.02-0.08份、过氧化氢2-10份、饱和碳酸氢钠溶液2-6份、乙醚1-5份、甲酸3-10份、N-甲基吡咯烷酮50-70份、无水醋酸 锌2-8份。According to the first aspect of the present invention, an imide structure photosensitive developing resin is provided, wherein the raw materials thereof include, by weight: 2-6 parts of a polyamine, 6-20 parts of a dicarboxylic acid anhydride, 1-6 parts of an unsaturated monobasic acid, 0.02-0.08 parts of an inhibitor, 0.02-0.08 parts of a catalyst, 2-10 parts of hydrogen peroxide, 2-6 parts of a saturated sodium bicarbonate solution, 1-5 parts of ether, 3-10 parts of formic acid, 50-70 parts of N-methylpyrrolidone, and anhydrous acetic acid. Zinc 2-8 parts.
在一些实施方式中,多元胺选自4,4'-二氨基二环己基甲烷、1,4-环己烷二甲胺、1,3-环己烷二甲胺、4,4'-(对二甲氨基)二苯基甲烷、异氟尔酮二胺、1,8-辛二胺、聚氧乙烯二胺、2,4,6-三氨基嘧啶中的一种或多种。链式多胺衍生的酰亚胺结构感光显影树脂,其韧性和成膜性可得以改善;脂环多胺衍生的酰亚胺结构感光显影树脂,其偏于刚韧,性能较好平衡;芳香多胺衍生的酰亚胺结构感光显影树脂,其性能偏于刚性、脆硬,溶解性和成膜性不理想。因此,一般需要三者搭配,对冲平衡性能。In some embodiments, the polyamine is selected from one or more of 4,4'-diaminodicyclohexylmethane, 1,4-cyclohexanedimethylamine, 1,3-cyclohexanedimethylamine, 4,4'-(p-dimethylamino)diphenylmethane, isophorone diamine, 1,8-octanediamine, polyoxyethylene diamine, and 2,4,6-triaminopyrimidine. The toughness and film-forming properties of the imide structure photosensitive developing resin derived from the chain polyamine can be improved; the imide structure photosensitive developing resin derived from the alicyclic polyamine is more rigid and tough, and has a better balance of properties; the imide structure photosensitive developing resin derived from the aromatic polyamine is more rigid, brittle, and has unsatisfactory solubility and film-forming properties. Therefore, it is generally necessary to match the three to offset and balance the performance.
在一些实施方式中,二元羧酸酐选自四氢苯酐、六氢苯酐、甲基四氢苯酐中的一种或多种。In some embodiments, the dicarboxylic acid anhydride is selected from one or more of tetrahydrophthalic anhydride, hexahydrophthalic anhydride, and methyltetrahydrophthalic anhydride.
在一些实施方式中,不饱和一元酸选自丙烯酸、甲基丙烯酸、丁烯酸中的一种或多种。In some embodiments, the unsaturated monoacid is selected from one or more of acrylic acid, methacrylic acid, and crotonic acid.
在一些实施方式中,阻聚剂选自对苯二酚、对叔丁基邻苯二酚、邻苯二酚中的至少一种。In some embodiments, the polymerization inhibitor is selected from at least one of hydroquinone, p-tert-butylcatechol, and catechol.
在一些实施方式中,催化剂选自苄基三乙基氯化铵、苄基二胺、三乙胺、二乙胺、三苯基膦中的一种或多种。In some embodiments, the catalyst is selected from one or more of benzyltriethylammonium chloride, benzyldiamine, triethylamine, diethylamine, and triphenylphosphine.
根据本发明的第二个方面,提供了上述的酰亚胺结构感光显影树脂的制备方法,包括以下步骤:According to a second aspect of the present invention, there is provided a method for preparing the above-mentioned imide structure photosensitive developing resin, comprising the following steps:
S1、将二元羧酸酐总量40-60%的二元羧酸酐、多元胺、无水醋酸锌、阻聚剂总量20-30%的阻聚剂和N-甲基吡咯烷酮混合,在氮气氛围中,加热至70-80℃并搅拌0.5-2h,然后加热至140-160℃,持续搅拌15-18小时,反应完成后将反应溶液降温至20-35℃,抽滤并用无水乙醇洗涤,将产物进行干燥,研磨,得到双马来酰亚胺固体粉末;S1. Mix 40-60% of the total amount of dicarboxylic acid anhydride, polyamine, anhydrous zinc acetate, 20-30% of the total amount of polymerization inhibitor and N-methylpyrrolidone, heat to 70-80° C. and stir for 0.5-2h in a nitrogen atmosphere, then heat to 140-160° C. and continue stirring for 15-18 hours. After the reaction is completed, cool the reaction solution to 20-35° C., filter and wash with anhydrous ethanol, dry and grind the product to obtain a bismaleimide solid powder;
S2、将步骤S1制得的双马来酰亚胺固体粉末和甲酸混合,在50-60℃下搅拌1-3h,然后加入过氧化氢,继续反应3-5h,反应完成后往反应产物中加入饱和碳酸氢钠溶液和乙醚,摇晃均匀后静置分层,分离出有机层,用水将有机层清洗2-3遍,然后通过旋蒸除去乙醚,再加入无水硫酸镁过夜干燥,之后过滤除去硫酸镁,得到产物;S2, mixing the bismaleimide solid powder obtained in step S1 with formic acid, stirring at 50-60° C. for 1-3 h, then adding hydrogen peroxide, and continuing the reaction for 3-5 h. After the reaction is completed, adding saturated sodium bicarbonate solution and diethyl ether to the reaction product, shaking evenly and standing to separate, separating the organic layer, washing the organic layer with water for 2-3 times, then removing the diethyl ether by rotary evaporation, adding anhydrous magnesium sulfate to dry overnight, and then filtering to remove the magnesium sulfate to obtain the product;
S3、将步骤S2制得的产物与剩余的阻聚剂、催化剂混合,将体系升温到90-100℃,然后加入不饱和一元酸,加完后升温到110-120℃,继续反应2-3h,反应完成后将反应体系的温度降到70-90℃,再加入剩余的二元羧酸酐,反应6-8h,即得。S3, mixing the product obtained in step S2 with the remaining inhibitor and catalyst, heating the system to 90-100°C, then adding unsaturated monoacid, heating to 110-120°C after addition, and continuing to react for 2-3h, after the reaction is completed, lowering the temperature of the reaction system to 70-90°C, adding the remaining dicarboxylic acid anhydride, and reacting for 6-8h to obtain.
步骤S1中,无水醋酸锌用于吸附反应中生成的水,N-甲基吡咯烷酮作为溶剂。In step S1, anhydrous zinc acetate is used to adsorb water generated in the reaction, and N-methylpyrrolidone is used as a solvent.
步骤S1中,采取分阶段加热的方式,目的是先让所有反应原料在较低的温 度(70-80℃)下混合均匀,避免后续高温(140-160℃)反应发生局部爆聚。In step S1, a staged heating method is adopted, the purpose is to first heat all the reaction raw materials at a lower temperature. Mix evenly at 70-80℃ to avoid local explosion in the subsequent high temperature (140-160℃) reaction.
步骤S2中,甲酸的作用主要是提供一种弱酸环境,增强过氧化氢的氧化性。In step S2, the role of formic acid is mainly to provide a weak acid environment to enhance the oxidizing property of hydrogen peroxide.
步骤S2中,乙醚的作用是在萃取中提供有机相。In step S2, the role of diethyl ether is to provide an organic phase in the extraction.
步骤S3中,将主要反应原料与阻聚剂、催化剂混合均匀,再升温到90-100℃,此时加入不饱和一元酸,不容易发生自聚,搅拌均匀后再升温到110-120℃,可以进一步防止不饱和一元酸爆聚。In step S3, the main reaction raw materials are mixed evenly with the inhibitor and the catalyst, and then the temperature is raised to 90-100° C. At this time, the unsaturated monoacid is added, which is not easy to self-polymerize. After stirring evenly, the temperature is raised to 110-120° C. to further prevent the unsaturated monoacid from exploding.
本发明将酰亚胺结构引入到感光显影主体树脂中,在生成的多酰亚胺的基础上继续接枝增加树脂的功能性。本发明先将多元胺与带双键的脂环酸酐进行反应,生成端基带有双键的多酰亚胺结构,继而对双键进行环氧化转变,再用不饱和一元酸开环酯化,再经酸酐改性,引入羧基,最终获得酰亚胺结构的感光显影树脂。该树脂具有优异电性能,耐热、尺寸稳定性较好、附着性优异、介电常数比较低等优点。The present invention introduces an imide structure into a photosensitive developing main resin, and continues to graft on the basis of the generated polyimide to increase the functionality of the resin. The present invention first reacts a polyamine with an alicyclic anhydride with a double bond to generate a polyimide structure with a double bond at the end group, then performs epoxidation conversion on the double bond, then performs ring-opening esterification with an unsaturated monobasic acid, and then performs an acid anhydride modification to introduce a carboxyl group, and finally obtains a photosensitive developing resin with an imide structure. The resin has the advantages of excellent electrical properties, heat resistance, good dimensional stability, excellent adhesion, and a relatively low dielectric constant.
当二元羧酸酐为四氢苯酐,多元胺为1,3-环己烷二甲胺,不饱和一元酸为丙烯酸时,本发明的合成路线示意图如图1所示。When the dicarboxylic acid anhydride is tetrahydrophthalic anhydride, the polyamine is 1,3-cyclohexanedimethylamine, and the unsaturated monoacid is acrylic acid, the schematic diagram of the synthesis route of the present invention is shown in FIG1 .
在一些实施方式中,步骤S1中,将产物在50℃的真空烘箱中干燥4-6小时,研磨后得到双马来酰亚胺固体粉末。In some embodiments, in step S1, the product is dried in a vacuum oven at 50° C. for 4-6 hours and ground to obtain a bismaleimide solid powder.
在一些实施方式中,步骤S2中,过氧化氢需缓慢滴加,滴加时间控制在2-4h。In some embodiments, in step S2, hydrogen peroxide needs to be slowly added dropwise, and the adding time is controlled within 2-4 hours.
在一些实施方式中,搅拌的转速为600-800rpm。In some embodiments, the stirring speed is 600-800 rpm.
根据本发明的第三个方面,提供了上述的酰亚胺结构感光显影树脂在制备IC载板阻焊油墨、印制电路板阻焊油墨或芯片光刻胶中的应用。According to a third aspect of the present invention, there is provided a use of the above-mentioned imide structure photosensitive developing resin in the preparation of an IC substrate solder resist ink, a printed circuit board solder resist ink or a chip photoresist.
根据本发明的第四个方面,提供了一种干膜,其通过上述的酰亚胺结构感光显影树脂进行光固化或热固化得到的。According to a fourth aspect of the present invention, there is provided a dry film obtained by photocuring or thermally curing the above-mentioned imide structure photosensitive developing resin.
在一些实施方式中,将酰亚胺结构感光显影树脂印刷在载体上,于70-80℃烘烤20-30分钟,即得干膜。In some embodiments, the imide structure photosensitive developing resin is printed on a carrier and baked at 70-80° C. for 20-30 minutes to obtain a dry film.
根据本发明的第五个方面,提供了上述的干膜在制备IC载板或印制电路板中的应用。According to a fifth aspect of the present invention, there is provided a use of the above-mentioned dry film in the preparation of an IC substrate or a printed circuit board.
本发明的有益效果包括:The beneficial effects of the present invention include:
本发明的酰亚胺结构的感光显影树脂,其分子量较低,低分子量的多元酰亚胺结构低聚物可以使得树脂固化后所得固化膜具有较高的玻璃化转变温度和较低的热膨胀性能,同时,因大量存在的酰亚胺结构在双键交联固化后成为聚酰亚胺固化膜,所以其具有优异的耐热性、抗热膨胀性、尺寸稳定性,能够满足IC载板阻焊油墨对线宽精度、抗热变形性的苛刻要求。The imide structure photosensitive developing resin of the present invention has a low molecular weight. The low molecular weight polyimide structure oligomer can make the cured film obtained after the resin is cured have a higher glass transition temperature and lower thermal expansion performance. At the same time, due to the large amount of imide structures present, after double bond cross-linking and curing, it becomes a polyimide cured film, so it has excellent heat resistance, thermal expansion resistance, and dimensional stability, and can meet the stringent requirements of IC substrate solder mask ink on line width accuracy and thermal deformation resistance.
图1为本发明实施例1的合成路线示意图。 FIG1 is a schematic diagram of the synthesis route of Example 1 of the present invention.
下面对本发明作进一步详细的说明,值得说明的是,以下实施例只是为了更好地解释本发明的内容,并不对本发明保护的范围做限制。实施例中未公开的工艺步骤为现有技术。若无特殊说明,以下原料均为市购。The present invention is further described in detail below. It is worth noting that the following examples are only for better explanation of the present invention and are not intended to limit the scope of the present invention. The undisclosed process steps in the examples are prior art. Unless otherwise specified, the following raw materials are commercially available.
以下实施例中,搅拌的转速为600rpm。In the following examples, the stirring speed is 600 rpm.
实施例1Example 1
本实施例的酰亚胺结构感光显影树脂的制备方法,包括如下步骤:The method for preparing the imide structure photosensitive developing resin of this embodiment comprises the following steps:
(1)将50.00g四氢苯酐、46.74g 1,3-环己烷二甲胺、60.30g无水醋酸锌、0.16g对苯二酚和1.00L N-甲基吡咯烷酮放入装有氮气入口和温度计的3L圆底四颈烧瓶中,将混合物在氮气氛围中,加热至80℃并搅拌半小时,然后加热至150℃,持续搅拌16小时。反应完成后将反应溶液降至室温,抽滤并用无水乙醇洗涤3次,将产物在50℃的真空烘箱中干燥4小时,研磨后得到双马来酰亚胺固体粉末。(1) 50.00 g of tetrahydrophthalic anhydride, 46.74 g of 1,3-cyclohexanedimethylamine, 60.30 g of anhydrous zinc acetate, 0.16 g of hydroquinone and 1.00 L of N-methylpyrrolidone were placed in a 3 L round-bottom four-necked flask equipped with a nitrogen inlet and a thermometer. The mixture was heated to 80 ° C in a nitrogen atmosphere and stirred for half an hour, then heated to 150 ° C and stirred for 16 hours. After the reaction was completed, the reaction solution was cooled to room temperature, filtered and washed with anhydrous ethanol three times. The product was dried in a vacuum oven at 50 ° C for 4 hours and ground to obtain a bismaleimide solid powder.
(2)在三口瓶中加入步骤(1)中得到的双马来酰亚胺固体粉末29.35g和甲酸75.85g,在50℃下搅拌2h,然后缓慢滴加48.89g过氧化氢,滴加时间约3h,滴加完成后,继续反应5h,反应完成后将反应产物倒入分液漏斗,然后加入50g饱和碳酸氢钠溶液和25g乙醚,摇晃均匀后静置分层,分离出有机层后再用蒸馏水将有机层清洗3次,接着将清洗后的产物倒入烧杯中,旋蒸除去乙醚,然后加入30g无水硫酸镁过夜干燥,之后过滤除去硫酸镁,得到干燥的产物。(2) Add 29.35 g of the bismaleimide solid powder obtained in step (1) and 75.85 g of formic acid into a three-necked flask, stir at 50° C. for 2 h, then slowly add 48.89 g of hydrogen peroxide dropwise for about 3 h. After the addition is complete, continue the reaction for 5 h. After the reaction is complete, pour the reaction product into a separatory funnel, then add 50 g of saturated sodium bicarbonate solution and 25 g of ether, shake evenly and let stand to separate, separate the organic layer and then wash the organic layer three times with distilled water, then pour the washed product into a beaker, remove the ether by rotary evaporation, then add 30 g of anhydrous magnesium sulfate and dry overnight, then filter to remove the magnesium sulfate to obtain a dry product.
(3)将步骤(2)中得到的干燥的产物31.32g加入另一个三口瓶中,再加入0.48g对苯二酚和0.32g苄基三乙基氯化铵,将体系升温到90℃,然后往三口瓶中滴加28.53g丙烯酸,滴加完成后升温到110℃,继续反应2.5h,反应完成后将反应体系的温度降到80℃,再加入60.23g四氢苯酐,反应6h,即得。(3) Add 31.32 g of the dried product obtained in step (2) into another three-necked flask, then add 0.48 g of hydroquinone and 0.32 g of benzyltriethylammonium chloride, heat the system to 90° C., then drop 28.53 g of acrylic acid into the three-necked flask, and after the dropwise addition is complete, heat the system to 110° C. and continue to react for 2.5 h. After the reaction is complete, lower the temperature of the reaction system to 80° C., add 60.23 g of tetrahydrophthalic anhydride, and react for 6 h to obtain the product.
实施例2Example 2
本实施例的酰亚胺结构感光显影树脂的制备方法,包括如下步骤:The method for preparing the imide structure photosensitive developing resin of this embodiment comprises the following steps:
(1)将50.00g四氢苯酐、46.23g 1,8-辛二胺、60.30g无水醋酸锌、0.16g对苯二酚和1.00L N-甲基吡咯烷酮放入装有氮气入口和温度计的3L圆底四颈烧瓶中,将混合物在氮气氛围中,加热至80℃并搅拌半小时,然后加热至150℃,持续搅拌16小时。反应完成后将反应溶液降至室温,抽滤并用无水乙醇洗涤3次,将产物在50℃的真空烘箱中干燥4小时,研磨后得到双马来酰亚胺固体粉末。(1) 50.00 g of tetrahydrophthalic anhydride, 46.23 g of 1,8-octanediamine, 60.30 g of anhydrous zinc acetate, 0.16 g of hydroquinone and 1.00 L of N-methylpyrrolidone were placed in a 3 L round-bottom four-necked flask equipped with a nitrogen inlet and a thermometer. The mixture was heated to 80 ° C in a nitrogen atmosphere and stirred for half an hour, then heated to 150 ° C and stirred for 16 hours. After the reaction was completed, the reaction solution was cooled to room temperature, filtered and washed with anhydrous ethanol three times. The product was dried in a vacuum oven at 50 ° C for 4 hours and ground to obtain a bismaleimide solid powder.
(2)在三口瓶中加入步骤(1)中得到的双马来酰亚胺固体粉末29.35g和 甲酸75.85g,在50℃下搅拌2h,然后缓慢滴加48.89g过氧化氢,滴加时间约3h,滴加完成后,继续反应5h,反应完成后将反应产物倒入分液漏斗,然后加入50g饱和碳酸氢钠溶液和25g乙醚,摇晃均匀后静置分层,分离出有机层后再用蒸馏水将有机层清洗3次,接着将清洗后的产物倒入烧杯中,旋蒸除去乙醚,然后加入30g无水硫酸镁过夜干燥,之后过滤除去硫酸镁,得到干燥的产物。(2) Add 29.35 g of the bismaleimide solid powder obtained in step (1) and 75.85 g of formic acid was stirred at 50 ° C for 2 h, and then 48.89 g of hydrogen peroxide was slowly added dropwise for about 3 h. After the addition was completed, the reaction was continued for 5 h. After the reaction was completed, the reaction product was poured into a separatory funnel, and then 50 g of saturated sodium bicarbonate solution and 25 g of ether were added. After shaking evenly, the mixture was allowed to stand for stratification. After separating the organic layer, the organic layer was washed 3 times with distilled water. The washed product was then poured into a beaker, the ether was removed by rotary evaporation, and then 30 g of anhydrous magnesium sulfate was added and dried overnight. After that, the magnesium sulfate was removed by filtration to obtain a dry product.
(3)将步骤(2)中得到的干燥的产物31.32g加入另一个三口瓶中,再加入0.48g对苯二酚和0.32g苄基三乙基氯化铵,将体系升温到90℃,然后往三口瓶中滴加28.53g丙烯酸,滴加完成后升温到110℃,继续反应2.5h,反应完成后将反应体系的温度降到80℃,再加入60.23g四氢苯酐,反应6h,即得。(3) Add 31.32 g of the dried product obtained in step (2) into another three-necked flask, then add 0.48 g of hydroquinone and 0.32 g of benzyltriethylammonium chloride, heat the system to 90° C., then drop 28.53 g of acrylic acid into the three-necked flask, and after the dropwise addition is complete, heat the system to 110° C. and continue the reaction for 2.5 h. After the reaction is complete, lower the temperature of the reaction system to 80° C., add 60.23 g of tetrahydrophthalic anhydride, and react for 6 h to obtain the product.
实施例3Example 3
本实施例的酰亚胺结构感光显影树脂的制备方法,包括如下步骤:The method for preparing the imide structure photosensitive developing resin of this embodiment comprises the following steps:
(1)将50.00g四氢苯酐、41.23g聚氧乙烯二胺、60.30g无水醋酸锌、0.16g对苯二酚和1.00L N-甲基吡咯烷酮放入装有氮气入口和温度计的3L圆底四颈烧瓶中,将混合物在氮气氛围中,加热至80℃并搅拌半小时,然后加热至150℃,持续搅拌16小时。反应完成后将反应溶液降至室温,抽滤并用无水乙醇洗涤2次,将产物在50℃的真空烘箱中干燥4小时,研磨后得到双马来酰亚胺固体粉末。(1) 50.00 g of tetrahydrophthalic anhydride, 41.23 g of polyoxyethylene diamine, 60.30 g of anhydrous zinc acetate, 0.16 g of hydroquinone and 1.00 L of N-methylpyrrolidone were placed in a 3 L round-bottom four-necked flask equipped with a nitrogen inlet and a thermometer. The mixture was heated to 80 ° C in a nitrogen atmosphere and stirred for half an hour, then heated to 150 ° C and stirred for 16 hours. After the reaction was completed, the reaction solution was cooled to room temperature, filtered and washed twice with anhydrous ethanol. The product was dried in a vacuum oven at 50 ° C for 4 hours and ground to obtain a bismaleimide solid powder.
(2)在三口瓶中加入步骤(1)中得到的双马来酰亚胺固体粉末27.74g和甲酸75.85g,在50℃下搅拌2h,然后缓慢滴加48.89g过氧化氢,滴加时间约3h,滴加完成后,继续反应5h,反应完成后将反应产物倒入分液漏斗,然后加入50g饱和碳酸氢钠溶液和25g乙醚,摇晃均匀后静置分层,分离出有机层后再用蒸馏水将有机层清洗3次,接着将清洗后的产物倒入烧杯中,旋蒸除去乙醚,然后加入30g无水硫酸镁过夜干燥,之后过滤除去硫酸镁,得到干燥的产物。(2) Add 27.74 g of the bismaleimide solid powder obtained in step (1) and 75.85 g of formic acid into a three-necked flask, stir at 50° C. for 2 h, then slowly add 48.89 g of hydrogen peroxide dropwise for about 3 h. After the addition is complete, continue the reaction for 5 h. After the reaction is complete, pour the reaction product into a separatory funnel, then add 50 g of saturated sodium bicarbonate solution and 25 g of ether, shake evenly and let stand to separate, separate the organic layer and then wash the organic layer three times with distilled water, then pour the washed product into a beaker, remove the ether by rotary evaporation, then add 30 g of anhydrous magnesium sulfate and dry overnight, then filter to remove the magnesium sulfate to obtain a dry product.
(3)将步骤(2)中得到的干燥的产物31.32g加入另一个三口瓶中,再加入0.48g对苯二酚和0.32g苄基三乙基氯化铵,将体系升温到90℃,然后往三口瓶中滴加28.53g丙烯酸,滴加完成后升温到110℃,继续反应2.5h,反应完成后将反应体系的温度降到80℃,再加入60.23g四氢苯酐,反应6h,即得。(3) Add 31.32 g of the dried product obtained in step (2) into another three-necked flask, then add 0.48 g of hydroquinone and 0.32 g of benzyltriethylammonium chloride, heat the system to 90° C., then drop 28.53 g of acrylic acid into the three-necked flask, and after the dropwise addition is complete, heat the system to 110° C. and continue the reaction for 2.5 h. After the reaction is complete, lower the temperature of the reaction system to 80° C., add 60.23 g of tetrahydrophthalic anhydride, and react for 6 h to obtain the product.
实施例4Example 4
本实施例的酰亚胺结构感光显影树脂的制备方法,包括如下步骤:The method for preparing the imide structure photosensitive developing resin of this embodiment comprises the following steps:
(1)将50.00g四氢苯酐、23.37g 1,3-环己烷二甲胺、20.62g聚氧乙烯二胺、60.30g无水醋酸锌、0.16g对苯二酚和1.00L N-甲基吡咯烷酮放入装有氮气入口 和温度计的3L圆底四颈烧瓶中,将混合物在氮气氛围中,加热至80℃并搅拌半小时,然后加热至150℃,持续搅拌16小时。反应完成后将反应溶液降至室温,抽滤并用无水乙醇洗涤2次,将产物在50℃的真空烘箱中干燥4小时,研磨后得到双马来酰亚胺固体粉末。(1) 50.00 g of tetrahydrophthalic anhydride, 23.37 g of 1,3-cyclohexanedimethylamine, 20.62 g of polyoxyethylene diamine, 60.30 g of anhydrous zinc acetate, 0.16 g of hydroquinone and 1.00 L of N-methylpyrrolidone were placed in a nitrogen inlet. The mixture was placed in a 3L round-bottom four-necked flask with a thermometer and heated to 80°C in a nitrogen atmosphere and stirred for half an hour, then heated to 150°C and stirred for 16 hours. After the reaction was completed, the reaction solution was cooled to room temperature, filtered and washed twice with anhydrous ethanol, and the product was dried in a vacuum oven at 50°C for 4 hours and ground to obtain a bismaleimide solid powder.
(2)在三口瓶中加入步骤(1)中得到的双马来酰亚胺固体粉末28.79g和甲酸75.85g,在50℃下搅拌2h,然后缓慢滴加48.89g过氧化氢,滴加时间约3h,滴加完成后,继续反应5h,反应完成后将反应产物倒入分液漏斗,然后加入50g饱和碳酸氢钠溶液和25g乙醚,摇晃均匀后静置分层,分离出有机层后再用蒸馏水将有机层清洗3次,接着将清洗后的产物倒入烧杯中,旋蒸除去乙醚,然后加入30g无水硫酸镁过夜干燥,之后过滤除去硫酸镁,得到干燥的产物。(2) Add 28.79 g of the bismaleimide solid powder obtained in step (1) and 75.85 g of formic acid into a three-necked flask, stir at 50° C. for 2 h, then slowly add 48.89 g of hydrogen peroxide dropwise for about 3 h. After the addition is complete, continue the reaction for 5 h. After the reaction is complete, pour the reaction product into a separatory funnel, then add 50 g of saturated sodium bicarbonate solution and 25 g of ether, shake evenly and let stand to separate, separate the organic layer and then wash the organic layer three times with distilled water, then pour the washed product into a beaker, remove the ether by rotary evaporation, then add 30 g of anhydrous magnesium sulfate and dry overnight, then filter to remove the magnesium sulfate to obtain a dry product.
(3)将步骤(2)中得到的干燥的产物31.32g加入另一个三口瓶中,再加入0.48g对苯二酚和0.32g苄基三乙基氯化铵,将体系升温到90℃,然后往三口瓶中滴加28.53g丙烯酸,滴加完成后升温到110℃,继续反应2.5h,反应完成后将反应体系的温度降到80℃,再加入60.23g四氢苯酐,反应6h,即得。(3) Add 31.32 g of the dried product obtained in step (2) into another three-necked flask, then add 0.48 g of hydroquinone and 0.32 g of benzyltriethylammonium chloride, heat the system to 90° C., then drop 28.53 g of acrylic acid into the three-necked flask, and after the dropwise addition is complete, heat the system to 110° C. and continue the reaction for 2.5 h. After the reaction is complete, lower the temperature of the reaction system to 80° C., add 60.23 g of tetrahydrophthalic anhydride, and react for 6 h to obtain the product.
实施例5Example 5
本实施例的酰亚胺结构感光显影树脂的制备方法,包括如下步骤:The method for preparing the imide structure photosensitive developing resin of this embodiment comprises the following steps:
(1)将50.00g四氢苯酐、23.37g 1,3-环己烷二甲胺、23.12g 1,8-辛二胺、60.30g无水醋酸锌、0.16g对苯二酚和1.00L N-甲基吡咯烷酮放入装有氮气入口和温度计的3L圆底四颈烧瓶中,将混合物在氮气氛围中,加热至80℃并搅拌半小时,然后加热至150℃,持续搅拌16小时。反应完成后将反应溶液降至室温,抽滤并用无水乙醇洗涤2次,将产物在50℃的真空烘箱中干燥4小时,研磨后得到双马来酰亚胺固体粉末。(1) 50.00 g of tetrahydrophthalic anhydride, 23.37 g of 1,3-cyclohexanedimethylamine, 23.12 g of 1,8-octanediamine, 60.30 g of anhydrous zinc acetate, 0.16 g of hydroquinone and 1.00 L of N-methylpyrrolidone were placed in a 3 L round-bottom four-necked flask equipped with a nitrogen inlet and a thermometer. The mixture was heated to 80 ° C in a nitrogen atmosphere and stirred for half an hour, then heated to 150 ° C and stirred for 16 hours. After the reaction was completed, the reaction solution was cooled to room temperature, filtered and washed twice with anhydrous ethanol. The product was dried in a vacuum oven at 50 ° C for 4 hours and ground to obtain a bismaleimide solid powder.
(2)在三口瓶中加入步骤(1)中得到的双马来酰亚胺固体粉末29.78g和甲酸75.85g,在50℃下搅拌2h,然后缓慢滴加48.89g过氧化氢,滴加时间约3h,滴加完成后,继续反应5h,反应完成后将反应产物倒入分液漏斗,然后加入50g饱和碳酸氢钠溶液和25g乙醚,摇晃均匀后静置分层,分离出有机层后再用蒸馏水将有机层清洗3次,接着将清洗后的产物倒入烧杯中,旋蒸除去乙醚,然后加入30g无水硫酸镁过夜干燥,之后过滤除去硫酸镁,得到干燥的产物。(2) Add 29.78 g of the bismaleimide solid powder obtained in step (1) and 75.85 g of formic acid into a three-necked flask, stir at 50° C. for 2 h, then slowly add 48.89 g of hydrogen peroxide dropwise for about 3 h. After the addition is complete, continue the reaction for 5 h. After the reaction is complete, pour the reaction product into a separatory funnel, then add 50 g of a saturated sodium bicarbonate solution and 25 g of ether, shake evenly and let stand to separate, separate the organic layer and then wash the organic layer three times with distilled water, then pour the washed product into a beaker, remove the ether by rotary evaporation, then add 30 g of anhydrous magnesium sulfate and dry overnight, then filter to remove the magnesium sulfate to obtain a dry product.
(3)将步骤(2)中得到的干燥的产物31.32g加入另一个三口瓶中,再加入0.48g对苯二酚和0.32g苄基三乙基氯化铵,将体系升温到90℃,然后往三口瓶中滴加28.53g丙烯酸,滴加完成后升温到110℃,继续反应2.5h,反应完成后将反应体系的温度降到80℃,再加入60.23g四氢苯酐,反应6h,即得。 (3) Add 31.32 g of the dried product obtained in step (2) into another three-necked flask, then add 0.48 g of hydroquinone and 0.32 g of benzyltriethylammonium chloride, heat the system to 90° C., then drop 28.53 g of acrylic acid into the three-necked flask, and after the dropwise addition is complete, heat the system to 110° C. and continue the reaction for 2.5 h. After the reaction is complete, lower the temperature of the reaction system to 80° C., add 60.23 g of tetrahydrophthalic anhydride, and react for 6 h to obtain the product.
下面,对实施例1-5制得的酰亚胺结构感光显影树脂进行性能测试,测试方法如下:Next, the performance of the imide structure photosensitive developing resin prepared in Examples 1-5 was tested, and the testing method was as follows:
(1)感光性:将酰亚胺结构感光显影树脂印刷在覆铜板上,于75℃烘烤20分钟,将21级光梯度尺置于膜层上方,在LED光源的曝光机下曝光、显影,以膜层残留7格的时间为标准。(1) Photosensitivity: The imide structure photosensitive developing resin is printed on the copper clad laminate, baked at 75°C for 20 minutes, a 21-level light gradient ruler is placed on the film layer, and exposed and developed under an exposure machine with an LED light source. The time when 7 grids remain on the film layer is used as the standard.
(2)最小线距线宽:按照GB/T 29846-2013印制板用光成像耐电镀抗蚀剂的方法测试。(2) Minimum line spacing and line width: Tested in accordance with the method of GB/T 29846-2013 Photo-imaging electroplating resists for printed circuit boards.
(3)抗蚀刻性:按照GB/T 29846-2013印制板用光成像耐电镀抗蚀剂的方法测试抗蚀刻性能,以蚀刻后目测图形完整,线路边缘整齐,无起皱脱落或者狗牙形状为优,起皱无脱落为良,脱落为差。(3) Etching resistance: The etching resistance is tested according to the method of GB/T 29846-2013 for photo-imaging electroplating resists for printed circuit boards. After etching, the pattern is visually intact, the line edges are neat, and there is no wrinkling, shedding or dog-tooth shape. The excellent one is wrinkled but not shedding. The good one is shedding. The poor one is shedding.
(4)抗电镀性:按照GB/T 29846-2013印制板用光成像耐电镀抗蚀剂的方法测试抗电镀性,以电镀后目测图形无渗镀、气泡、脱落为优,有渗镀、无脱落为良,脱落为差。(4) Anti-plating property: Anti-plating property was tested according to the method of photo-imaging anti-plating resist for printed circuit board in GB/T 29846-2013. The image after electroplating was visually inspected to be free of plating seepage, bubbles and shedding, which was considered excellent. The image after plating was considered good with plating seepage but no shedding, which was considered poor.
(5)褪膜性:将试验样板置于50℃、3wt%的NaOH水溶液中,观察褪膜性能的好坏,以在60s内全部脱落干净无残留的为优,60-120s内全部脱落干净无残留的为良,120s后才脱落干净无残留的为差。(5) Film fading property: The test specimens were placed in a 50°C, 3 wt% NaOH aqueous solution and the film fading performance was observed. The film fading performance was evaluated as excellent if it completely shed within 60 seconds without any residue, good if it completely shed within 60-120 seconds without any residue, and poor if it shed after 120 seconds without any residue.
测试结果如表1所示。The test results are shown in Table 1.
表1实施例1-5的酰亚胺结构感光显影树脂的性能测试结果
Table 1 Performance test results of imide structure photosensitive developing resins of Examples 1-5
由表1可见,本发明的酰亚胺结构感光显影树脂的感光性、抗蚀刻性、抗电镀性、褪膜性等性能优良,适合应用于制备IC载板。As can be seen from Table 1, the imide structure photosensitive developing resin of the present invention has excellent properties such as photosensitivity, etching resistance, electroplating resistance, and film-fading resistance, and is suitable for use in preparing IC substrates.
上述实施例为本发明较佳的实施方式,但本发明的实施方式并不受上述实施例的限制,其他的任何未背离本发明的精神实质与原理下所作的改变、修饰、替代、组合、简化,均应为等效的置换方式,都包含在本发明的保护范围之内。 The above embodiments are preferred implementation modes of the present invention, but the implementation modes of the present invention are not limited to the above embodiments. Any other changes, modifications, substitutions, combinations, and simplifications that do not deviate from the spirit and principles of the present invention should be equivalent replacement methods and are included in the protection scope of the present invention.
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Citations (6)
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EP0624826A1 (en) * | 1993-05-14 | 1994-11-17 | OCG Microelectronic Materials Inc. | Method of forming relief patterns by i-line light irradiation |
JPH07118368A (en) * | 1993-10-27 | 1995-05-09 | Nippon Kayaku Co Ltd | Resin composition, resist ink composition and cured product thereof |
JPH10246958A (en) * | 1997-03-04 | 1998-09-14 | Hitachi Chem Co Ltd | Photosensitive resin composition |
CN103145988A (en) * | 2013-02-28 | 2013-06-12 | 中山大学 | A kind of polyimide oligomer and liquid photosensitive solder resist ink |
CN110673441A (en) * | 2019-11-11 | 2020-01-10 | 新东方油墨有限公司 | Photosensitive solder resist resin and preparation method thereof |
CN116751152A (en) * | 2023-06-14 | 2023-09-15 | 广东三求光固材料股份有限公司 | Imide structure photosensitive developing resin and preparation method and application thereof |
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- 2023-06-14 CN CN202310708449.2A patent/CN116751152A/en active Pending
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- 2024-05-30 WO PCT/CN2024/096221 patent/WO2024255602A1/en unknown
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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EP0624826A1 (en) * | 1993-05-14 | 1994-11-17 | OCG Microelectronic Materials Inc. | Method of forming relief patterns by i-line light irradiation |
JPH07118368A (en) * | 1993-10-27 | 1995-05-09 | Nippon Kayaku Co Ltd | Resin composition, resist ink composition and cured product thereof |
JPH10246958A (en) * | 1997-03-04 | 1998-09-14 | Hitachi Chem Co Ltd | Photosensitive resin composition |
CN103145988A (en) * | 2013-02-28 | 2013-06-12 | 中山大学 | A kind of polyimide oligomer and liquid photosensitive solder resist ink |
CN110673441A (en) * | 2019-11-11 | 2020-01-10 | 新东方油墨有限公司 | Photosensitive solder resist resin and preparation method thereof |
CN116751152A (en) * | 2023-06-14 | 2023-09-15 | 广东三求光固材料股份有限公司 | Imide structure photosensitive developing resin and preparation method and application thereof |
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