WO2024193395A1 - Sensor, detection apparatus, and method for manufacturing sensor - Google Patents

Abstract

Provided in the embodiments of the present application are a sensor, a detection apparatus, and a method for manufacturing a sensor. The sensor comprises: a substrate, which substrate comprises two parts, wherein at least part of a first part extends in a first direction, and a second part is provided at one end of the first part in the first direction; an electrode substrate, which electrode substrate is arranged on a first main plane of the electrode substrate and is arranged at the other end of the first part in the first direction; a first electrode, which first electrode is arranged on the electrode substrate, and the size of the first electrode is smaller than that of the electrode substrate, wherein the first electrode comprises a first working electrode and a first counter electrode, the surface of the first working electrode comprising a biological coating, and the biological coating being used for reacting with a target substrate; and a first electrode interface, which first electrode interface is arranged on the first main plane and is arranged on the second part, wherein the first electrode interface is connected to the electrode substrate by means of a first lead. By means of the sensor provided in the present application, the foreign matter reaction of a human body after the sensor is implanted into the human body can be reduced.

Description

Sensor, detection device and method for making sensor

This application claims priority to the Chinese patent application filed with the State Intellectual Property Office of China on March 22, 2023, with application number 202310318089.5 and application name “Sensor, detection device and method for manufacturing sensor”, all contents of which are incorporated by reference in this application.

Technical Field

The embodiments of the present application relate to the field of biotechnology, and more specifically, to a sensor, a detection device, and a method for manufacturing a sensor.

Background Art

With the improvement of people's living standards and the growth of the proportion of the elderly population, the proportion of people with high blood sugar is increasing year by year, and blood sugar testing is receiving more and more attention. The continuous blood sugar testing system places the sensor in the subcutaneous tissue of the human body to achieve real-time reading of the human blood sugar concentration during its use cycle, improve the user's ability to monitor and manage their own blood sugar, and reduce the potential risk of high blood sugar complications. However, implanting the sensor into the human body can easily cause a strong foreign body reaction to the human body, such as causing local inflammation, local fibrosis and other symptoms. Therefore, it is necessary to provide a sensor to reduce the human body's foreign body reaction.

Summary of the invention

The embodiments of the present application provide a sensor, a detection device, and a method for manufacturing the sensor, which can reduce the foreign body reaction of the human body.

In a first aspect, a sensor is provided, comprising: a substrate, the substrate comprising a first part and a second part, at least a part of the first part extending along a first direction, and the second part being arranged at one end of the first part in the first direction; an electrode substrate, the electrode substrate being arranged on a first principal plane of the substrate, and the electrode substrate being arranged at the other end of the first part in the first direction; a first electrode, the first electrode being arranged at the other end of the first part in the first direction, and the first electrode being arranged on the electrode substrate, the size of the first electrode being smaller than the size of the electrode substrate, the first electrode comprising a first working electrode and a first pair of electrodes, the surface of the first working electrode comprising a biological coating, and the biological coating being used to react with a target substrate; a first electrode interface, the first electrode interface being arranged on the first principal plane, and the first electrode interface being arranged in the second part, and the first electrode interface being connected to the electrode substrate via a first lead.

In the embodiment provided in the present application, the first electrode is laid on the electrode substrate, and the size of the first electrode is smaller than the size of the electrode substrate, so that the size of the first electrode can be easily controlled, the dimensional accuracy of the first electrode can be improved, and a first electrode of smaller size can be obtained, thereby reducing the damage to the human body when the sensor is implanted in the human body and reducing the foreign body reaction of the human body. The electrode substrate and the first electrode interface are arranged on the first main plane, and the first electrode is arranged on the electrode substrate, that is, the first electrode, the electrode substrate, the first electrode interface and the first lead are all arranged on the same main plane of the substrate, which can improve the utilization rate of the surface space of the substrate.

In combination with the first aspect, in some implementations of the first aspect, the number of the first working electrodes is multiple, the number of the first pair of electrodes is multiple, and the multiple first working electrodes and the multiple first pair of electrodes are spaced apart along the first direction.

In the embodiments provided in the present application, the number of the first working electrode and the number of the first pair of electrodes are both multiple, and the multiple first working electrodes and the multiple pair of electrodes are spaced apart along the first direction, which can improve the space utilization of the substrate surface, shorten the electron transfer path between the first working electrode and the first pair of electrodes, improve the electron transfer efficiency, and thereby improve the detection efficiency of the sensor.

In combination with the first aspect, in some implementations of the first aspect, the material of the substrate is polyimide.

In the embodiments provided in the present application, polyimide is used as the base material, which can make the sensor have a higher degree of flexibility, and can reduce the damage of the sensor to the human body when the sensor is implanted in the human body. Polyimide has strong biocompatibility, which can reduce the foreign body reaction of the human body, so that the sensor can exist stably in the human body for a long time, realize long-term continuous detection of target substrates such as glucose and other components, and can improve the accuracy of sensor detection.

In combination with the first aspect, in certain implementations of the first aspect, the material of the first working electrode and the first counter electrode is an Ag/AgCl composite material.

In the embodiment provided in the present application, the material of the first working electrode and the first counter electrode is Ag/AgCl composite material, which can make the sensor have a higher degree of flexibility and reduce the damage of the sensor to the human body when the sensor is implanted in the human body. It has good biocompatibility, can exist stably in the human body for a long time, realizes long-term continuous detection of the target substrate, and can improve the accuracy of sensor detection.

In combination with the first aspect, in some implementations of the first aspect, the first electrode further includes a first reference electrode, and a material of the first reference electrode is Pt.

In the embodiment provided in the present application, the material of the first reference electrode is Pt, which can make the sensor have a high degree of flexibility, can reduce the damage of the sensor to the human body when the sensor is implanted in the human body, and Pt has good biocompatibility, can exist stably in the human body for a long time, realize long-term continuous detection of the target substrate, and can improve the accuracy of sensor detection. The setting of the first reference electrode can also eliminate the interference introduced by electrode polarization.

In combination with the first aspect, in some implementations of the first aspect, the periphery of the first electrode includes an insulating layer, and the material of the insulating layer is polyimide.

In the embodiment provided in the present application, the first electrode includes an insulating layer around it, which can prevent the first electrode from short-circuiting when the sensor is implanted in the human body to detect the target substrate. The material of the insulating layer is polyimide, which can have good biocompatibility and good flexibility, can reduce the foreign body reaction of the human body, and realize continuous and stable detection of the sensor in the human body.

In combination with the first aspect, in some implementations of the first aspect, a portion of the first portion close to the second portion includes a recessed portion.

In the embodiments provided in the present application, when the sensor is implanted in a human body to detect a target substrate, at least a portion of the first part can be implanted in the human body. In order to prevent the portion exposed to the human body from being affected by external force and causing the sensor to detach from the human body, the portion of the sensor exposed to the human body can be bent to fit the human body. The portion of the first part close to the second part includes a recessed portion, which can promote the release of bending stress when the first part is bent, so that the sensor can be bent multiple times without breaking, thereby extending the service life of the sensor.

In combination with the first aspect, in certain implementations of the first aspect, the material of the electrode substrate is a Ti/Au composite material.

In the embodiments provided in the present application, the material of the electrode substrate is a Ti/Au composite material, which can enable the electrode substrate to have a high degree of flexibility and good biocompatibility, can reduce the foreign body reaction of the human body, realize long-term continuous detection of the sensor, and can improve the accuracy of sensor detection.

In combination with the first aspect, in certain implementations of the first aspect, the material of the first electrode interface and the first lead is a Ti/Au composite material.

In the embodiment provided in the present application, the material of the first electrode interface and the first lead is a Ti/Au composite material, which can enable the first electrode interface and the first lead to have a high degree of flexibility and good biocompatibility, can reduce the foreign body reaction of the human body, realize long-term continuous detection of the sensor, and can improve the accuracy of sensor detection.

In combination with the first aspect, in some implementations of the first aspect, a width of the first working electrode is smaller than a width of the first pair of electrodes.

In the embodiment provided in the present application, the width of the first working electrode is smaller than the width of the first pair of electrodes, so that the surface area of the first working electrode is smaller than the surface area of the first pair of electrodes, so that the externally applied polarization voltage acts on the first working electrode.

In combination with the first aspect, in certain implementations of the first aspect, the sensor also includes a second electrode, a second electrode interface and a second lead, the second electrode, the second electrode interface and the second lead are arranged on a second principal plane of the substrate, the second principal plane is arranged opposite to the first principal plane, and the second electrode includes a second working electrode and a second pair of electrodes.

In the embodiments provided in the present application, a second electrode, a second electrode interface and a second lead are arranged on the second main plane of the substrate, which can improve the space utilization rate of the substrate surface, and can detect the resistance of the first electrode with the help of the second electrode, the second electrode interface and the second lead, thereby improving the first electrode's ability to resist temperature interference, thereby improving the accuracy of sensor detection, or, the electrode system composed of the second electrode, the second electrode interface and the second lead can be used to detect the target substrate, thereby enabling the sensor to simultaneously detect two target substrates.

In combination with the first aspect, in some implementations of the first aspect, the second electrode further includes a second reference electrode.

In the embodiment provided in the present application, the second electrode includes a second reference electrode, forming a three-electrode system, so that the second electrode of the sensor can be used to detect the target substrate, thereby enabling the sensor to simultaneously detect two target substrates and improve the space utilization of the substrate surface.

In combination with the first aspect, in certain implementations of the first aspect, the thickness of the substrate is 25 micrometers to 50 micrometers.

In the embodiment provided in the present application, the thickness of the substrate is 25 microns to 50 microns, so that the sensor is relatively light and thin, which can reduce the damage of the sensor to the human body, reduce the human body's foreign body reaction, and make the sensor wearable.

In combination with the first aspect, in some implementations of the first aspect, the width of the first lead and/or the second lead is 35 microns to 80 microns. rice.

In the embodiments provided in the present application, the width of the first lead and/or the second lead is 35 microns to 80 microns, which can enable the sensor circuit to have higher dimensional accuracy and narrower width, thereby reducing damage to the human body caused by the sensor and reducing the human body's foreign body reaction.

In a second aspect, a detection device is provided, which includes a sensor as described in the first aspect or any possible implementation manner of the first aspect.

In a third aspect, a method for manufacturing a sensor is provided, which is used to manufacture the sensor described in the first aspect or any possible implementation of the first aspect, the method comprising: obtaining a substrate, the substrate comprising a first part and a second part, at least a part of the first part extending along a first direction, and the second part being arranged at one end of the first part in the first direction; laying an electrode substrate, an electrode interface and a lead, the electrode substrate, the first electrode interface and the first lead being laid on a first main plane of the substrate, and the electrode substrate being laid at the other end of the first part in the first direction, the first electrode interface being laid in the second part, and the first lead being laid between the electrode substrate and the first electrode interface; laying a first electrode on the electrode substrate, the first electrode comprising a first working electrode and a first pair of electrodes, and the size of the first electrode being smaller than the size of the electrode substrate.

In the embodiment provided in the present application, the electrode substrate is first laid and then the first electrode is laid on the electrode substrate, so that the size of the first electrode can be easily controlled, the dimensional accuracy of the first electrode can be improved, and a first electrode of smaller size can be obtained, thereby reducing the damage to the human body when the sensor is implanted in the human body and reducing the foreign body reaction of the human body. The electrode substrate and the first electrode interface are arranged on the first principal plane, and the first electrode is arranged on the electrode substrate, so that the first electrode, the electrode substrate, the first electrode interface and the first lead can all be arranged on the same principal plane of the substrate, thereby improving the utilization rate of the surface space of the substrate. When the materials of the electrode substrate, the first electrode interface and the first lead are the same, the electrode substrate, the first electrode interface and the first lead can be formed in one step, which can reduce the process steps and facilitate production and processing.

In combination with the third aspect, in certain implementations of the third aspect, before laying the electrode base, the first electrode interface and the first lead, the method also includes: coating a first photoresist on the base; exposing the surface of the first photoresist; using a developer to develop the exposed area of the first photoresist to obtain the patterns of the electrode base, the first electrode interface and the first lead, and the electrode base, the first electrode interface and the first lead are respectively laid in the corresponding patterns.

In the embodiments provided in the present application, a first photoresist is coated on a substrate, and after exposure and development treatment, patterns of an electrode substrate, a first electrode interface, and a first lead are obtained. Then, the electrode substrate, the first electrode interface, and the first lead are laid in the corresponding patterns, respectively. This can greatly improve the dimensional accuracy of the electrode substrate, the first electrode interface, and the first lead, and thus can also improve the dimensional accuracy of the first electrode laid on the electrode substrate. For example, the sensor can have a narrower lead width and a smaller first electrode size, thereby reducing damage to the human body when the sensor is implanted in the human body, reducing the human body's foreign body reaction, and avoiding directly coating the first electrode, the first electrode interface, and the first lead on the substrate surface, which affects the dimensional accuracy, and thus affects the detection performance of the sensor and user experience.

In combination with the third aspect, in certain implementations of the third aspect, the method further includes: removing the first photoresist remaining after the development process.

In the embodiment provided in the present application, after the electrode substrate, the first electrode interface and the first lead portion are laid, the first photoresist remaining on the surface of the substrate can be removed to prevent the first photoresist from remaining on the sensor and causing the human body to produce a foreign body reaction when the sensor is implanted in the human body for use.

In combination with the third aspect, in certain implementations of the third aspect, the first electrode also includes a first reference electrode.

In the embodiments provided in the present application, laying the first reference electrode can eliminate the interference introduced by electrode polarization.

In combination with the third aspect, in certain implementations of the third aspect, laying the first electrode on the electrode substrate includes: laying an insulating layer on the electrode substrate; coating a second photoresist on the insulating layer; etching the second photoresist and the insulating layer to form a window structure; removing the second photoresist; and laying the first electrode in the area enclosed by the window structure.

In the embodiment provided in the present application, an insulating layer and a second photoresist are laid on the electrode substrate, and an exposure and etching process are performed to form a window structure, and then a first electrode is laid in the area surrounded by the window structure, which can further improve the dimensional accuracy of the first electrode and obtain an electrode of smaller size, thereby reducing the damage to the human body when the sensor is implanted in the human body and reducing the foreign body reaction of the human body. An insulating layer is laid on the electrode substrate, and the first electrode is laid in the area surrounded by the window structure opened on the insulating layer, so that the periphery of the electrode substrate and the first electrode will not be exposed to the external environment. When the sensor is implanted in the human body, the insulating layer can prevent the periphery of the electrode substrate and the first electrode from being exposed to human tissue fluid, blood and other environments, thereby preventing the sensor from short-circuiting. Laying a second photoresist on the insulating layer can prevent the portion of the insulating layer that does not need to open the window structure from being damaged by the etching solution during the etching process, resulting in damage to the insulating layer.

In combination with the third aspect, in some implementations of the third aspect, the method further includes: laying an insulating layer on the surface of the first lead.

In the embodiment provided in the present application, the first lead wire can be prevented from being exposed to the external environment. When the sensor is implanted in the human body, The insulating layer can prevent the first lead from being exposed to human tissue fluid, blood and other environments, thereby preventing the sensor from short-circuiting.

In combination with the third aspect, in certain implementations of the third aspect, the method further includes: coating a biological coating on the surface of the first working electrode, wherein the biological coating is used to react with a target substrate and perform sensing.

In the embodiments provided in the present application, a biological coating is coated on the surface of the first working electrode, and the biological coating can specifically react with the target substrate, thereby generating electron transfer on the surface of the first working electrode to facilitate detection of the concentration of the target substrate.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram of the structure of a sensor provided in an embodiment of the present application.

FIG. 2 is a schematic diagram of the structure of a sensor provided in an embodiment of the present application.

FIG3 is a schematic diagram of the structure of a sensor provided in an embodiment of the present application.

FIG. 4 is a schematic diagram of the structure of a sensor provided in an embodiment of the present application.

FIG5 is a schematic flow chart of a method for manufacturing a sensor provided in an embodiment of the present application.

FIG. 6 is a schematic diagram of structural changes during the manufacturing process of a sensor provided in an embodiment of the present application.

FIG. 7 is a schematic diagram of structural changes during the manufacturing process of a sensor provided in an embodiment of the present application.

DETAILED DESCRIPTION

The technical solutions in the embodiments of the present application will be described below in conjunction with the accompanying drawings.

References to "one embodiment" or "some embodiments" etc. described in this specification mean that a particular feature, structure or characteristic described in conjunction with the embodiment is included in one or more embodiments of the present application. Thus, the phrases "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. appearing in different places in this specification do not necessarily all refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways.

In various embodiments of the present application, the first, second, etc. are only used to indicate that multiple objects are different. For example, the first part and the second part are only used to indicate different parts of the substrate. The substrate itself, etc. should not have any impact, and the first, second, etc. mentioned above should not impose any limitations on the embodiments of the present application.

"Multiple" means two or more. "And/or" describes the relationship between related objects, indicating that there can be three relationships. For example, A and/or B can mean: A exists alone, A and B exist at the same time, and B exists alone, where A and B can be singular or plural. The character "/" generally indicates that the related objects are in an "or" relationship. For example, A/B means: A or B.

The terms "include", "comprising", "having" and variations thereof mean "including but not limited to", unless specifically emphasized otherwise.

The structure of the sensor provided by the embodiment of the present application is described in detail below in conjunction with Figures 1 to 4. As shown in Figure 1, the sensor may include a substrate 110, and the substrate 110 may include a first portion 111 and a second portion 112. At least a portion of the first portion 111 may extend along a first direction, and the second portion 112 may be disposed at one end of the first portion 111 in the first direction. The first direction is the y-axis direction shown in the figure.

Exemplarily, as shown in FIG1 , the first portion 111 may be in the shape of a long strip, or in the shape of a needle, so that the first portion 111 is implanted in the human body and reduces trauma to the human body. The second portion 112 may be circular, and the diameter of the second portion 112 may be 5.5 millimeters (mm). The second portion 112 may also be elliptical, rectangular or irregular in shape, etc. The present application does not limit the shape of the second portion 112, and only requires the second portion 112 to have a certain surface area, so that the first electrode interface 310 described later can be easily set. The length of the first portion 111 may be, for example, 10 mm, which is the size of the first portion 111 along the y-axis direction shown in the figure; the width of the first portion 111 may be 500 micrometers (μm), which is the size of the first portion 111 along the x-axis direction shown in the figure.

The first part 111 and the second part 112 may be an integrally formed structure or two fixedly connected parts, for example, the first part 111 and the second part 112 may be fixedly connected by bonding. When the sensor is implanted in a human body to detect a target substrate such as blood sugar, at least a portion of the first part 111 may be implanted in the human body.

In some embodiments, the material of the substrate 110 may be polyimide (PI), for example, a PI film. The PI film has a high degree of flexibility, and when the sensor is implanted in the human body, it can reduce damage to the human body, thereby reducing the human body's foreign body reaction; and the PI film has good biocompatibility, and can stably exist in human tissues, reducing the human body's foreign body reaction; the sensor can stably exist in the human body, and can also improve the accuracy of the sensor's detection, and enable the sensor to continuously monitor the human body's blood sugar content, thereby improving the user's monitoring and management of their own blood sugar.

The thickness of the substrate 110 may be 25 μm to 50 μm. For example, the thickness of the substrate 110 may be 25 μm, 30 μm, 35 μm, 40 μm, 45 μm or 50 μm.

The sensor may include a first electrode 210, and the first electrode 210 may be disposed on a first principal plane of the substrate 110, the first principal plane being the xy plane of the substrate 110, the substrate 110 may include two principal planes, and the first principal plane may be any one of the principal planes. The first electrode 210 may be disposed at the other end of the first portion 111 in the first direction, or in other words, the first electrode 210 may be disposed at an end of the first portion 111 away from the second portion 112.

In some embodiments, the first electrode 210 may include a first working electrode 212 and a first counter electrode 213, and the surface of the first working electrode 212 may include a bio-coating 2121, and the bio-coating 2121 may be used to react with a target substrate and perform sensing. The target substrate is the substance to be detected, for example, glucose in the human body, or it may also be called blood sugar. When the sensor is used to detect the blood sugar content in the human body, the bio-coating 2121 may include a glucose enzyme, such as glucose oxidase, and the bio-coating may also include a polymer material with a rigid main chain, a natural polymer material, an aldehyde-based cross-linking agent (such as a double-arm aldehyde-based cross-linking agent or a multi-arm aldehyde-based cross-linking agent) and other materials as a fixing agent.

The first working electrode 212 is the main electrode for the electrochemical reaction. When the sensor is implanted in the human body for detecting blood sugar concentration, the glucose enzyme on the surface of the first working electrode 212 can oxidize the glucose in the human body, causing the glucose to lose electrons, and the electrons of the glucose can be transferred to the first working electrode 212. The first pair of electrodes 213 can form a current loop with the first working electrode 212 to maintain the normal operation of the electrochemical reaction. Thus, the detection device connected to the sensor can calculate the glucose concentration in the human body based on the electron transfer situation.

The number of the first working electrodes 212 may be one or more, the number of the first pair of electrodes 213 may be one or more, and the number of the first working electrodes 212 and the number of the first pair of electrodes 213 may be the same or different.

As an example, as shown in FIG. 1 , the number of the first working electrodes 212 can be 3, and the 3 first working electrodes 212 can be connected by a lead 322 to form a working electrode system. The number of the first pair of electrodes 213 can also be 3, and the 3 first pair of electrodes 213 can be connected by a lead 323 to form a pair of electrodes system. The 3 first working electrodes 212 and the 3 first pair of electrodes 213 can be arranged at intervals along the first direction, that is, the y-axis direction, to make full use of the surface space of the substrate 110. The first working electrode 212 and the first pair of electrodes 213 can also be as close to each other as possible without contacting each other, so as to shorten the electron transfer path between the first working electrode 212 and the first pair of electrodes 213, increase the electron transfer rate, thereby improving the detection efficiency and accuracy of the sensor, and avoiding electrode short circuit.

As another example, when there are multiple first working electrodes 212 and first pair of electrodes 213, the multiple first working electrodes 212 can be arranged in sequence along the y-axis direction shown in the figure. Similarly, the multiple first pair of electrodes 213 can also be arranged in sequence along the y-axis direction (not shown in the figure), and the first working electrodes 212 and the first pair of electrodes 213 can also be arranged relatively to each other along the x-axis direction.

In some embodiments, the width of the first pair of electrodes 213 may be greater than the width of the first working electrode 212, so that the sum of the surface areas of the first pair of electrodes 213 may be greater than the sum of the surface areas of the first working electrode 212, so that the externally applied polarization voltage acts on the first working electrode 212. The surface area may be the area of the surface of the first working electrode 212 and the first pair of electrodes 213 parallel to the xy plane shown in the figure, and the length of the first pair of electrodes 213 may be the same as the length of the first working electrode 212, or may be greater than the length of the first working electrode 212. For example, the number of the first pair of electrodes 213 shown in FIG. 1 is 3, and the number of the first working electrodes 212 is also 3, and the length of the three first pair of electrodes 213 may be greater than the length of the three first working electrodes 212.

For example, the length of the first working electrode 212, that is, the dimension in the y-axis direction, can be 360 μm, and the width of the first working electrode 212, that is, the dimension in the x-axis direction, can be 260 μm; the length of the first pair of electrodes 213 can be 360 μm, and the width can be 300 μm. The length or width of the first working electrode 212 can be the length or width of one of the three first working electrodes 212 shown in FIG. 1 , and the length or width of the first pair of electrodes 213 can be the length or width of one of the three first pair of electrodes 213 shown in FIG. 1 .

In other embodiments, the length of the first working electrode 212 may be smaller than the length of the first pair of electrodes 213, so that the surface area of the first working electrode 212 is smaller than the surface area of the first pair of electrodes 213. The width of the first working electrode 212 may be the same as the width of the first pair of electrodes 213, or may be smaller than the width of the first pair of electrodes 213.

The shape of the first working electrode 212 and the first pair of electrodes 213 may be a rectangle as shown in FIG. 1 , or a trapezoid as shown in FIG. 2 , or a circular or semicircular shape, etc., which is not limited in the present application. When the shape of the first working electrode 212 and the first pair of electrodes 213 is a trapezoid or other shape, the width and length may also refer to the dimensions of the first working electrode 212 and the first pair of electrodes 213 in the x-axis direction and the y-axis direction, respectively, and the length of the first working electrode 212 may also be less than the length of the first pair of electrodes 213.

In some embodiments, the material of the first working electrode 212 and the first counter electrode 213 may be a Ag/AgCl composite material. The material of the first working electrode 212 and the first counter electrode 213 is a Ag/AgCl composite material, which can make the first working electrode 212 and the first counter electrode 213 have good flexibility and good biocompatibility, thereby reducing the foreign body reaction of the human body and allowing the sensor to be stably stored. It is to realize continuous blood sugar detection in human tissue.

In some embodiments, the first electrode 210 may further include a first reference electrode 211, and the material of the first reference electrode 211 may be Pt. The material of the first reference electrode 211 is Pt, which can make the first reference electrode 211 have good flexibility and good biocompatibility, so that when the sensor is implanted in the human body, the foreign body reaction of the human body can be reduced, thereby enabling the sensor to stably exist in the human body and realize continuous blood glucose detection.

The first reference electrode 211 can also provide a reference potential for the first working electrode 212. When the potential of the first working electrode 212 changes, the potential of the first reference electrode 211 can be changed through a negative feedback system so that the voltage difference between the first working electrode 212 and the first reference electrode 211 is a constant value, thereby eliminating the interference introduced by electrode polarization.

The number of the first reference electrode 211 can be one, and the first reference electrode 211 can be arranged outside the arrangement area of the first working electrode 212 and the first pair of electrodes 213. For example, the first reference electrode 211 can be arranged above the first working electrode 212 and the first pair of electrodes 213 in the y-axis direction (as shown in (a) in Figure 1) to facilitate the arrangement of the first lead 320 corresponding to the first electrode 210. The first reference electrode 211 may also be disposed in the arrangement area of the first working electrode 212 and the first pair of electrodes 213. For example, when the first working electrode 212 and the first pair of electrodes 213 are arranged at intervals, the first reference electrode 211 may be disposed between adjacent first working electrodes 212 and first pair of electrodes 213 (not shown in the figure); or, when the first working electrode 212 and the first pair of electrodes 213 are arranged relative to each other, a plurality of first working electrodes 212 are arranged in sequence along the y-axis direction, and a plurality of first pair of electrodes 213 are arranged in sequence along the y-axis direction, the first reference electrode 211 may be disposed between two adjacent first working electrodes 212 or between two adjacent first pair of electrodes 213 (not shown in the figure). The present application does not limit the arrangement of the first reference electrode 211 and the first pair of electrodes 213 or the first working electrode 212.

Exemplarily, the first reference electrode 211 may be a rectangle as shown in FIG. 1 , and the size of the reference electrode 211 in the y-axis direction may be 400 μm, and the size in the x-axis direction may be 260 μm.

In some embodiments, the sensor may further include an electrode substrate 230, the position of the electrode substrate 230 may correspond to the position of the electrode 210, and the first electrode 210 may be disposed on the electrode substrate 230. Referring to the structure shown in (b) of FIG. 1 , FIG. 1 (b) is a schematic diagram of a cross-sectional structure of the sensor shown in (a) of FIG. 1 after being cut along the direction indicated by the section line A-A, that is, a schematic diagram of a cross-sectional structure of the first electrode 210 along the yz plane. When the sensor includes a first working electrode 212, a first counter electrode 213, and a first reference electrode 211, the first working electrode 212, the first counter electrode 213, and the first reference electrode 211 may all be disposed on the electrode substrate 230.

The size of the first electrode 210 can be smaller than the size of the electrode substrate 230, that is, the size of the first electrode 210 in the x-axis direction and the y-axis direction can be smaller than the size of the electrode substrate 230 in the x-axis direction and the y-axis direction, respectively, and the size of the first electrode 210 in the z-axis direction can also be smaller than the size of the electrode substrate 230 in the z-axis direction.

The first electrode 210 is laid on the electrode substrate 230, and the size of the first electrode 210 is smaller than that of the electrode substrate 230, which can make the size of the first electrode easy to control, improve the dimensional accuracy of the first electrode, and obtain a first electrode of smaller size, thereby reducing the damage to the human body when the sensor is implanted in the human body and reducing the foreign body reaction of the human body.

The material of the electrode substrate 230 can be a Ti or C-doped Ag-based or Au-based composite material, for example, a Ti/Au composite material, that is, a Ti-doped Au-based composite material. The material of the electrode substrate 230 is a Ti/Au composite material, which can make the electrode substrate 230 have good flexibility and good biocompatibility, so that when the sensor is implanted in the human body, it can reduce the foreign body reaction of the human body, thereby enabling the sensor to exist stably in the human body and realize continuous blood glucose detection.

In some embodiments, the periphery of the first electrode 210 may include an insulating layer 220, that is, the peripheries of the first working electrode 212, the first counter electrode 213, and the first reference electrode 211 may include an insulating layer 220, see the structure shown in (b) in FIG1 . When the sensor includes an electrode substrate 230, the periphery of the electrode substrate 230 may also include an insulating layer 220. Providing an insulating layer 220 on the periphery of the first electrode 210 and the first electrode substrate 230 can prevent the first electrode 210 and the first electrode substrate 230 from being exposed to the external environment. When the sensor is implanted in the human body, the insulating layer 220 can prevent the first electrode 210 and the first electrode substrate 230 from being exposed to human tissue fluid, and from being connected through the human tissue fluid, resulting in a short circuit.

The material of the insulating layer 220 may be PI, for example, PI glue, and the molecular weight of the PI glue may be less than the molecular weight of the PI film. The material of the insulating layer 220 is PI, so that the insulating layer 220 has good flexibility and biocompatibility, so that the sensor can be stably present in the human body and realize long-term continuous detection of the target substrate.

In some embodiments, the sensor may further include a first electrode interface 310, which may be disposed on the first principal plane of the substrate 110, and the first electrode interface 310 may be disposed on the second portion 112, and the first electrode interface 310 may be connected to the first electrode 210 via a first lead 320. In other words, the first electrode interface 310, the first electrode 210, the electrode substrate 230, and the first lead 320 may be disposed on the same principal plane of the substrate 110 to avoid the first lead 320 from being wound from one principal plane of the substrate 110 to another principal plane, thereby improving the stability of the sensor structure and improving the surface space utilization of the sensor. The sensor is implanted in the human body for blood glucose measurement. During detection, the first electrode interface 310 can be connected to the blood glucose detection device through an external connection line. Furthermore, when an electrochemical reaction occurs on the surface of the first electrode 210 and electron transfer occurs, the generated current can flow to the detection device through the first electrode 210, the electrode substrate 230, the first lead 320 and the first electrode interface 310 in sequence, so that the detection device can calculate the glucose concentration according to the change of the current.

When the first electrode 210 includes three electrodes, namely, the first working electrode 212, the first counter electrode 213 and the first reference electrode 211, the number of the first electrode interfaces 310 may be three, for example, the illustrated first reference electrode interface 311, the first working electrode interface 312 and the first counter electrode interface 313 may be included, the first reference electrode interface 311 is connected to the first reference electrode 211 via a lead 321, the first working electrode interface 312 is connected to the first working electrode 212 via a lead 322, and the first counter electrode interface 313 is connected to the first counter electrode 213 via a lead 323. When there are multiple first working electrodes 212, the multiple first working electrodes 212 may be connected by the same lead 322, and the lead 322 may be connected to the first working electrode interfaces 312 corresponding to the first working electrodes 212. Similarly, when there are multiple first pairs of electrodes 213, the multiple first pairs of electrodes 213 can be connected by the same lead 323, and the lead 323 can be connected to the first pair of electrode interfaces 313 corresponding to the first pairs of electrodes 213. In other words, at least part of the first lead 320 can be disposed on the first portion 111, and the rest of the first lead 320 can be disposed on the second portion 112.

Exemplarily, the first electrode interface 310 may be circular, for example, the circular electrode interface shown in FIG1, and the diameter of the circular electrode interface may be 1 mm. The first electrode interface may also be elliptical, rectangular, trapezoidal or irregular in shape, etc., which is not limited in the present application, and only requires that the first electrode interface 310 can be connected to an external detection device.

In some embodiments, the material of the first electrode interface 310 may be a Ti or C doped Ag-based or Au-based composite material, such as a Ti/Au composite material, and the material of the first lead 320 may also be a Ti/Au composite material. The width of the first lead 320 may be 35 μm to 80 μm, and the width of the first lead 320 is the size of the first lead 320 in the x-axis direction. The width of the first lead 320 may be, for example, 35 μm, 40 μm, 50 μm, 60 μm, 70 μm or 80 μm.

The material of the first lead 320 is a Ti/Au composite material, which can make the first lead 320 have good flexibility and biocompatibility, can reduce the foreign body sensation of the human body, and the first lead 320 can be stably present in human tissue, so that the sensor can achieve continuous blood sugar detection. The Ti/Au composite material can also enable the first lead 320 and the first electrode interface 310 to be tightly combined with the substrate 110.

When using the sensor provided in the embodiment of the present application, the first part 111 of the sensor, including the first electrode 210 disposed on the first part 111, can be punctured and implanted into human skin tissue with the assistance of a stainless steel needle, and then the stainless steel needle is withdrawn, leaving at least part of the first part 111 of the sensor in the human tissue, and the first electrode 210 disposed at the end of the first part 111 of the sensor, including the first working electrode 212, the first counter electrode 213 and the first reference electrode 211, can be left in the human tissue together with the first part 111. Since the substrate 110 and the first lead 320 have good flexibility, the sensor can be bent, for example, the part of the sensor exposed to the human skin can be bent so that the part exposed to the skin can fit with the human skin, preventing the sensor from being separated from the human tissue due to external forces, and improving the detection stability of the sensor.

In some embodiments, the first part 111 of the sensor substrate 110 may further include a recessed portion 120, see the sensor shown in FIG3 . The size of the recessed portion 120 in the x-axis direction is smaller than the size of other parts of the first part 111 in the x-axis direction. When the sensor is implanted in a human body for blood glucose detection, the portion of the first part 111 located below the recessed portion 120 in the y-axis direction can be implanted in the human body, and the portion of the first part 111 located above the recessed portion 120 in the y-axis direction and the second part 112 can be exposed to the human skin. In other words, the recessed portion 120 can be bent so that the portion of the sensor exposed to the skin fits the human skin, so that the portion of the sensor exposed to the skin is not easily affected by external forces to drive the sensor away from the human body, thereby improving the detection stability of the sensor.

The sensor includes a recessed portion 120 and is bent at the recessed portion 120 , so that the stress of the bent portion of the sensor can be released more easily, thereby allowing the sensor to be bent multiple times, thereby extending the service life of the sensor and allowing the sensor to be reused multiple times.

The sensor described in the above Figures 1 to 3 is an electrode system arranged on a single surface of the substrate 110, and the electrode system can also be arranged on the two main planes of the substrate, for example, see the structure shown in Figure 4. Among them, the solid line part in Figure 4 (a) can represent the electrode system arranged on the front side of the substrate 110, and the dotted line part can represent the electrode system arranged on the back side of the substrate 110; Figure 4 (b) is a side view of the sensor, and the left side of Figure 4 (b) can be the electrode system on the front side of the substrate 110, for example, it can include the structure of any one of the electrode systems described in Figures 1 to 3 above, which will not be repeated here, and the right side of Figure 4 (b) can be the electrode system on the back side of the substrate 110, that is, on the second main plane. The electrode system arranged on the back side of the substrate 110 is briefly introduced below.

As an example, the electrode system on the back of the substrate 110 may include a second electrode 410, a second electrode interface 430, and a second lead 420. Similar to the first electrode 210, the first electrode interface 310, and the first lead 320 described in Figures 1 to 3 above, the second electrode 410 may include a second working electrode 412, a second counter electrode 413, and a second reference electrode 411. The second working electrode 412 may be connected to the second working electrode interface 432 via a lead 422, the second counter electrode 413 may be connected to the second counter electrode interface 433 via a lead 423, the second reference electrode 411 may be connected to the second reference electrode interface 431 via a lead 421, and the second working electrode 412, the second counter electrode 413, and The second reference electrode 411 can be arranged on the electrode substrate. It is only possible to replace the composition of the biological coating coated on the surface of the second working electrode 412 so that the electrode system on the back can be used to detect the concentration of components such as uric acid, lactic acid, dissolved oxygen or hydrogen peroxide. For example, when the back electrode system is used to detect uric acid, the biological coating on the surface of the second working electrode 412 may include urate oxidase. When the electrode system is arranged on both the front and back sides of the substrate 110, the electrode systems on the front and back sides of the substrate 110 may be independent electrode systems, that is, the first lead 320 and the second lead 420 may not be connected to each other. Thus, when the sensor is implanted in the human body, the concentration of any two components of blood sugar, uric acid, lactic acid, dissolved oxygen and hydrogen peroxide in the human body can be detected simultaneously.

In this case, the positions of the electrode interfaces set on the two planes can be different or the same. Similarly, the electrode positions, lead positions, electrode positions and number of electrodes on the two planes can be the same or different.

As another example, the second electrode 410 in the electrode system on the back of the substrate 110 may also include only the second working electrode 412 and the second pair of electrodes 413, but not the second reference electrode 411. The second working electrode 412 and the second pair of electrodes 413 may not be arranged on the electrode substrate, and the materials of the second working electrode 412 and the second pair of electrodes 413 may both be Ti/Au composite materials, and the materials of the second electrode interface 430 and the second lead 420 may also be Ti/Au composite materials. The second working electrode 412 and the second pair of electrodes 413 may constitute a thermocouple to detect the resistance of the first electrode 210, improve the anti-temperature interference ability of the front electrode system, and thus improve the accuracy of the front electrode system in detecting components such as blood sugar.

In this case, the front electrode system and the back electrode system can share leads, that is, the leads 322 of the front electrode system connecting one or more first working electrodes 212 can be connected to the leads 422 of the back electrode system connecting the second working electrode 412 and the corresponding second working electrode interface 432, and the leads 323 of the front electrode system connecting one or more first pair of electrodes 213 can be connected to the leads 423 of the back electrode system connecting the second pair of electrodes 413 and the corresponding second pair of electrode interface 433.

An embodiment of the present application also provides a detection device, including any one of the sensors described in Figures 1 to 4 above. The detection device can be used to detect the blood sugar content in the human body. The detection device can also be used to detect components such as lactic acid, uric acid, dissolved oxygen or hydrogen peroxide in the human body. Alternatively, the detection device can also be used to detect the concentration of any two of the components such as blood sugar, uric acid, lactic acid, dissolved oxygen and hydrogen peroxide in the human body.

The structure of the sensor provided in the embodiment of the present application is introduced above in combination with Figures 1 to 4. The embodiment of the present application also provides a process method for manufacturing the sensor, which is used to manufacture the sensor described in Figures 1 to 4. As shown in Figure 5, the method for manufacturing the sensor may include steps S501 to S503.

S501 , obtaining a substrate 110 , the substrate 110 comprising a first portion 111 and a second portion 112 , at least a portion of the first portion 111 extending along a first direction, and the second portion 112 being disposed at one end of the first portion 111 in the first direction.

In some embodiments, a PI film of a certain thickness may be selected as the material of the substrate 110, and the PI film may be cut to obtain the substrate 110. The thickness of the PI film may be 25 μm to 50 μm.

In other embodiments, a PI precursor may be coated on the surface of a clean glass sheet to form a substrate 110. The structure corresponding to this step can be seen in (a) of FIG6 , which is a schematic diagram of the structural change of a sensor corresponding to a method for manufacturing a sensor provided in an embodiment of the present application. A PI precursor may be coated on the surface of a glass sheet 401 according to the shape and thickness of the desired substrate 110. The PI precursor may be molten PI, and the substrate 110 may be formed after the PI precursor is fully cured. The curing temperature may be, for example, 300°C.

S502, laying the electrode substrate 230, the first electrode interface 310 and the first lead 320, the electrode substrate 230 is arranged at the other end of the first part 111 in the first direction, the first electrode interface 310 is arranged at the second part 112, and the first lead 320 is arranged between the electrode substrate 230 and the first electrode interface 310.

S503 , laying the first electrode 210 on the electrode substrate 230 , the first electrode 210 includes a first working electrode 212 and a first counter electrode 213 , and the size of the first electrode 210 is smaller than the size of the electrode substrate 230 .

In some embodiments, the electrode substrate 230, the first electrode interface 310 and the first lead 320 can be directly laid on the substrate 110, for example, by electroplating, chemical plating, sputtering or screen printing. The electrode substrate 230, the first electrode interface 310 and the first lead 320 can be laid on the substrate 110. The structure corresponding to this step can be seen in (b) of FIG6. The first electrode 210 can be laid on the electrode substrate 230, for example, by screen printing or photolithography. The structure corresponding to this step can be seen in (c) of FIG6. Laying the first electrode 210 on the electrode substrate 230 can make the size of the first electrode 210 easy to control, improve the dimensional accuracy of the first electrode 210, and easily obtain a first electrode 210 of smaller size, thereby reducing the damage to the human body when the sensor is implanted in the human body and reducing the foreign body reaction of the human body.

The material of the electrode substrate 230 may be a Ti/Au composite material. The first electrode 210 may include a first working electrode 212 and a first counter electrode 213, that is, the first working electrode 212 and the first counter electrode 213 may be laid on the corresponding electrode substrate 230. The materials of the first working electrode 212 and the first counter electrode 213 may be the same, for example, the materials of the first working electrode 212 and the first counter electrode 213 may both be Ag/AgCl composite materials. The first electrode 210 may also include a first reference electrode 211, the material of which may be Pt, When the first electrode 210 includes the first reference electrode 211, the first reference electrode 211 can also be laid on the electrode substrate 230. When the first working electrode 212, the first counter electrode 213 and the first reference electrode 211 need to use different materials, the corresponding electrodes 210 can be laid on the corresponding electrode substrates 230 respectively.

In other embodiments, the electrode substrate 230, the first electrode interface 310 and the first lead 320 may be laid by photolithography. That is, before laying the electrode substrate 230, the first electrode interface 310 and the first lead 320, the method further includes: coating the first photoresist 402 on the substrate 110; exposing the surface of the first photoresist 402; developing the first photoresist 402 with a developer to obtain the patterns of the electrode substrate 230, the first electrode interface 310 and the first lead 320, and the electrode substrate 230, the first electrode interface 310 and the first lead 320 are laid in the corresponding patterns respectively.

The structure corresponding to the method can be seen in (a) to (d) in FIG. 7 , wherein the step corresponding to (a) in FIG. 7 is similar to (a) in FIG. 6 , and will not be repeated here. As shown in (b) in FIG. 7 , the first photoresist 402 can be laid on the substrate 110, and the shape of the first photoresist 402 can be the same as the shape of the substrate 110. The first photoresist 402 can be a positive photoresist, and the exposed portion can be removed by a developer to form a pattern of the electrode substrate 230, the first electrode interface 310 and the first lead 320, such as forming the gap 2112 portion of the first photoresist 402 shown in (c) in FIG. 7 .

It should be understood that FIG. 7 only schematically illustrates the formation process of the electrode system, and schematically uses two gaps 2112 to represent the graphics corresponding to the electrode substrate 230, the first electrode interface 310 and the first lead 320. For example, it can represent the position of the electrode substrate 230 corresponding to the first reference electrode 211 and the first working electrode 212. The shape and position of the electrode substrate 230, the first electrode interface 310 and the first lead 320 of the sensor should not be limited.

Specifically, the first photoresist 402 may be a positive photoresist, which may include components such as a resin, a photosensitive material, and a solvent. The photosensitive material may be, for example, quinone diazo, the resin may be, for example, a phenolic resin, and the developer may be an alkaline solution, such as a tetramethylammonium hydroxide solution, a sodium hydroxide solution, or a potassium hydroxide solution. Before exposure, the photosensitive material of the positive photoresist is insoluble or difficult to dissolve in the developer, and the dissolution of the phenolic resin in the developer is also inhibited. During the exposure process, the photosensitive material may undergo a chemical reaction and be hydrolyzed into a carboxylic acid, so that it is easily dissolved in an alkaline developer, and the carboxylic acid may also promote the dissolution of the phenolic resin in the developer, so that the exposed portion can be removed by the developer.

Therefore, the exposed portion may be the portion where the electrode substrate 230, the first electrode interface 310 and the first lead 320 need to be laid subsequently. The shape and size of the electrode substrate 230, the first electrode interface 310 and the first lead 320 can be determined according to the laying requirements of the electrode substrate 230, the first electrode interface 310 and the first lead 320, and then the position where the exposure processing needs to be determined.

After the first photoresist 402 is treated with a developer to form the patterns corresponding to the electrode substrate 230, the first electrode interface 310 and the first lead 320, the electrode substrate 230, the first electrode interface 310 and the first lead 320 parts can be laid in the corresponding patterns, such as the structure of the electrode substrate 230 shown in (d) of FIG. 7 . The formation process of the first electrode interface 310 and the first lead 320 is similar to the formation process of the structure of the electrode substrate 230. The electrode substrate 230, the first electrode interface 310 and the first lead 320 can be laid in the corresponding patterns by sputtering process or screen printing process. When the materials of the electrode substrate 230, the first electrode interface 310 and the first lead 320 are the same, for example, when they are all Ti/Au composite materials, the electrode substrate 230, the first electrode interface 310 and the first lead 320 can be formed in one step by sputtering process, etc., so as to reduce the manufacturing steps of the sensor and improve the production efficiency of the product.

The shapes of the electrode substrate 230, the first electrode interface 310 and the first lead 320 are first formed on the substrate 110 through exposure and development treatment, and then the electrode substrate 210, the first electrode interface 310 and the first lead 320 are laid. This can make the shapes of the electrode substrate 230, the first electrode interface 310 and the first lead 320 more uniform, and it is not easy to lay them at other unexpected positions. The dimensional accuracy of the electrode substrate 230, the first electrode interface 310 and the first lead 320 can be improved to obtain an ultra-narrow lead width. Further, the dimensional accuracy of the first electrode 210 laid on the electrode substrate 230 can be improved to obtain a smaller-sized first electrode 210, thereby reducing the damage to the human body when the sensor is implanted in the human body and reducing the foreign body reaction to the human body.

After the electrode substrate 230, the first electrode interface 310 and the first lead 320 are laid, the first photoresist 402 remaining on the surface of the substrate 110 can be removed, for example, by using an acetone solution or a sodium hydroxide solution. The redundant electrode material, such as a Ti/Au composite material, laid to the outer part of the pattern when laying the electrode substrate 230, the first electrode interface 310 and the first lead 320 can be removed together with the first photoresist 402, so that only the electrode substrate 230, the first electrode interface 310 and the first lead 320 are left on the surface of the substrate 110, as shown in the structure (e) of FIG. 7, to form an electrode system on the surface of the substrate 110, so as to prevent the first photoresist 402 from remaining on the surface of the substrate 110, causing the human body to produce an immune response when the sensor is implanted in the human body.

In some embodiments, the first electrode 210 may be directly laid on the electrode substrate 230 obtained by a photolithography method, and this step is similar to the step corresponding to the structure shown in (c) in FIG. 6 .

In some embodiments, the first electrode 210 may be laid on the electrode substrate 230 by photolithography, and the method may include: An insulating layer 220 is laid on the substrate 230; a second photoresist 403 is coated on the insulating layer 220; the second photoresist 403 and the insulating layer 220 are etched to form a window structure 2113; the second photoresist 403 is removed; and a first electrode 210 is laid in the area surrounded by the window structure 2113. The structures corresponding to this method can be seen in (f) to (j) of FIG. 7 .

As shown in (f) of Fig. 7 , the insulating layer 220 can cover the electrode substrate 230 to prevent the electrode substrate 230 from being exposed to the human body and causing a short circuit after the sensor is implanted in the human body. The insulating layer 220 can be made of PI.

In some embodiments, an insulating layer 220 may also be laid on the surface of the first lead 320 to prevent the first lead 320 from being exposed to the human body after the sensor is implanted in the human body, thereby preventing a short circuit. The insulating layer 220 may or may not be laid on the surface of the first electrode interface 310. When the insulating layer 220 is laid on the surface of the first electrode interface 310, a window may be opened on the surface of the first electrode interface 310 through an etching process, so that the first electrode interface 310 can be electrically connected to an external detection device.

The second photoresist 403 is coated on the insulating layer 220, as shown in (g) of FIG. 7 , and the second photoresist 403 can be a positive photoresist. The second photoresist 403 and the insulating layer 220 are etched, and the window structure 2113 formed can be shown in (h) of FIG. 7 , and the window structure 2113 can be a hollow "mouth"-shaped structure, such as the gap 2113 shown in (h) of FIG. 7 . The size of the window structure 2113 can be smaller than the size of the electrode substrate 230, so that the electrode substrate 230 can be fully covered by the insulating layer 220, preventing the electrode substrate 230 from short-circuiting when implanted in the human body, and obtaining a first electrode 210 of a smaller size, reducing the damage to the human body when the sensor is implanted in the human body, thereby reducing the foreign body reaction of the human body. The size of the window structure 2113 can include the size of the window structure 2113 in the x-axis direction and the size in the y-axis direction.

Specifically, the portion of the second photoresist 403 where the window structure 2113 is required can be exposed, and then the exposed portion can be removed with a developer. When the second photoresist 403 is developed with a developer, the developer can simultaneously etch the insulating layer 220, so that the second photoresist 403 and the insulating layer 220 form a window structure 2113 at the same time.

After the window structure 2113 is formed, the second photoresist 403 on the surface of the insulating layer 220 can be removed, as shown in the structure (i) of FIG7 , to prevent the second photoresist 403 from remaining on the sensor surface and causing the human body to produce an immune response when the sensor is implanted in the human body. The second photoresist 403 is laid on the insulating layer 220, and then developed and etched, so as to prevent the portion of the insulating layer 220 where the window structure 2113 is not required from being damaged during the etching process.

The first electrode 210 can be laid in the formed window structure 2113, that is, in the hollow area surrounded by the window structure 2113, as shown in (j) in FIG. 7 . The first working electrode 212, the first counter electrode 213 and the first reference electrode 211 can all be laid in the area surrounded by the corresponding window structure 2113. For example, a screen printing process can be used to lay the Ag/AgCl composite material in the window structure 2113 corresponding to the first working electrode 212 and the first counter electrode 213, and Pt can be laid in the window structure 2113 corresponding to the first reference electrode 211. Since the first electrode 210 is laid in the area surrounded by the corresponding window structure 2113, and the size of the window structure 2113 is smaller than the size of the electrode substrate 230, the size of the first electrode 210 can be smaller than the size of the electrode substrate 230. The first electrode 210 is laid in the area surrounded by the corresponding window structure 2113, and the outer periphery of the first electrode 210 can also be covered by the insulating layer 220 to prevent the first electrode 210 from short-circuiting when implanted in the human body.

The window structure 2113 is obtained through photolithography and development processing, and the first electrode 210 is laid in the area surrounded by the window structure 2113. This can further improve the dimensional accuracy of the first electrode 210 and obtain a smaller-sized first electrode 210, thereby reducing damage to the human body when the sensor is implanted in the human body, thereby reducing the foreign body reaction of the human body.

In some embodiments, after the first electrode 210 is laid, a biological coating 2121 (not shown in FIG. 7 ) may be coated on the surface of the first working electrode 212. The biological coating 2121 is used to chemically react with the target substrate, thereby generating electron transfer on the surface of the first working electrode 211 to achieve detection of the target substrate. When the sensor is used to detect blood sugar concentration, the biological coating 2121 may include glucose enzyme, which may be oxidized glucose, that is, a glucose detection area may be formed.

In some embodiments, if the substrate 110 is partially formed on a glass sheet 401, after the sensor is manufactured, the sensor can be separated from the glass sheet 401 by laser cutting to obtain an independent sensor structure, as shown in (k) in FIG. 7 .

The manufacturing method of the electrode system on the back of the substrate 110, namely the second electrode 410, the second electrode interface 430 and the second lead 420, can be similar to the manufacturing method of the first electrode 210, the first electrode interface 310 and the first lead 320 mentioned above, and will not be repeated here.

The method for making a sensor provided in the embodiment of the present application first lays the electrode substrate 230, and then lays the first electrode 210 on the electrode substrate 230, which can make the size of the first electrode 210 easy to control, improve the dimensional accuracy of the first electrode 210, obtain a first electrode 210 of smaller size, reduce the damage to the human body when the sensor is implanted in the human body, and thus reduce the foreign body reaction of the human body. The pattern of the electrode substrate 230, the first lead 320 and the first electrode interface 310 is obtained by using photolithography technology, and then the electrode substrate 230, the first lead 320 and the first electrode interface 310 are laid at the corresponding position, and the window structure 2113 is obtained by using photolithography technology, and then the first electrode 210 is laid, which can further improve the dimensional accuracy of the first electrode 210, the first lead 320 and the first electrode interface 310, and obtain a first lead 320 with a narrower width and a first electrode 210 of smaller size, so as to further reduce the foreign body reaction of the human body after the sensor is implanted in the human body, and improve the detection of the sensor. The accuracy of the measurement.

The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims (22)

A sensor, characterized in that it comprises: A substrate (110), the substrate (110) comprising a first portion (111) and a second portion (112), at least a portion of the first portion (111) extending along a first direction, and the second portion (112) being arranged at one end of the first portion (111) in the first direction; an electrode substrate (230), the electrode substrate (230) being arranged on a first main plane of the substrate (110), and the electrode substrate (230) being arranged at the other end of the first part (111) in the first direction; A first electrode (210), wherein the first electrode (210) is disposed on the electrode substrate (230), the size of the first electrode (210) is smaller than the size of the electrode substrate (230), the first electrode (210) comprises a first working electrode (212) and a first counter electrode (213), the surface of the first working electrode (212) comprises a biological coating (2121), and the biological coating (2121) is used to react with a target substrate; A first electrode interface (310), wherein the first electrode interface (320) is disposed on the first main plane, and the first electrode interface (310) is disposed on the second portion (112), and the first electrode interface (310) is connected to the electrode substrate (230) via a first lead wire (320). The sensor according to claim 1 is characterized in that the number of the first working electrodes (212) is multiple, the number of the first pair of electrodes (213) is multiple, and the multiple first working electrodes (212) and the multiple first pair of electrodes (213) are arranged at intervals along the first direction. The sensor according to claim 1 or 2, characterized in that the material of the substrate (110) is polyimide. The sensor according to any one of claims 1 to 3, characterized in that the material of the first working electrode (212) and the first pair of electrodes (213) is Ag/AgCl composite material. The sensor according to any one of claims 1 to 4, characterized in that the first electrode (210) further comprises a first reference electrode (211), and the material of the first reference electrode (211) is Pt. The sensor according to any one of claims 1 to 5, characterized in that the periphery of the first electrode (210) comprises an insulating layer (220), and the material of the insulating layer (220) is polyimide. The sensor according to any one of claims 1 to 6, characterized in that a portion of the first portion (111) close to the second portion (112) comprises a recessed portion (120). The sensor according to any one of claims 1 to 7, characterized in that the material of the electrode substrate (230) is a Ti/Au composite material. The sensor according to any one of claims 1 to 8, characterized in that the material of the first electrode interface (310) and the first lead (320) is a Ti/Au composite material. The sensor according to any one of claims 1 to 9, characterized in that the width of the first working electrode (212) is smaller than the width of the first pair of electrodes (213). The sensor according to any one of claims 1 to 10, characterized in that the sensor further comprises a second electrode (410), a second electrode interface (430) and a second lead (420), the second electrode (410), the second electrode interface (430) and the second lead (420) being arranged on a second principal plane of the substrate (110), the second principal plane being arranged opposite to the first principal plane, and the second electrode (410) comprising a second working electrode (412) and a second pair of electrodes (413). The sensor according to claim 11, characterized in that the second electrode (410) further includes a second reference electrode (411). The sensor according to any one of claims 11 or 12, characterized in that the width of the first lead (320) and/or the second lead (420) is 35 microns to 80 microns. The sensor according to any one of claims 1 to 13, characterized in that the thickness of the substrate (110) is 25 microns to 50 microns. A detection device, characterized by comprising the sensor according to any one of claims 1 to 14. A method for manufacturing a sensor, used for manufacturing the sensor according to any one of claims 1 to 14, characterized in that it comprises: A substrate (110) is obtained, wherein the substrate (110) comprises a first portion (111) and a second portion (112), wherein at least a portion of the first portion (111) extends along a first direction, and the second portion (112) is disposed at a position along a first direction of the first portion (111). end; Laying an electrode substrate (230), a first electrode interface (310) and a first lead wire (320), wherein the electrode substrate (230), the first electrode interface (310) and the first lead wire (320) are laid on a first main plane of the substrate (110), and the electrode substrate (230) is laid on the other end of the first part (111) in the first direction, the first electrode interface (310) is laid on the second part (112), and the first lead wire (320) is laid between the electrode substrate (230) and the first electrode interface (310); A first electrode (210) is laid on the electrode substrate (230), wherein the first electrode (210) comprises a first working electrode (212) and a first counter electrode (213), and the size of the first electrode (210) is smaller than the size of the electrode substrate (230). The method according to claim 16, characterized in that, before laying the electrode substrate (230), the first electrode interface (310) and the first lead (320), the method further comprises: Coating a first photoresist (402) on the substrate (110); Exposing the surface of the first photoresist (402); The exposed area of the first photoresist (402) is developed using a developer to obtain patterns of the electrode substrate (230), the first electrode interface (310) and the first lead (320), wherein the electrode substrate (230), the first electrode interface (310) and the first lead (320) are respectively laid in corresponding patterns. The method according to claim 17, characterized in that the method further comprises: The first photoresist remaining after the development process is removed (402). The method according to any one of claims 16 to 18, characterized in that laying the first electrode (210) on the electrode substrate (230) comprises: Laying an insulating layer (220) on the electrode substrate (230); Coating a second photoresist (403) on the insulating layer (220); Performing an etching process on the second photoresist (403) and the insulating layer (220) to form a window structure (2113); removing the second photoresist (403); The first electrode (210) is laid in the area surrounded by the window structure (2113). The method according to any one of claims 16 to 19, characterized in that the method further comprises: A biological coating (2121) is coated on the surface of the first working electrode (212), and the biological coating (2121) is used to react with a target substrate. The method according to any one of claims 16 to 20, characterized in that the first electrode (210) further comprises a first reference electrode (211). The method according to any one of claims 16 to 21, characterized in that the method further comprises: An insulating layer (220) is laid on the first lead (320).