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WO2024179260A1 - Power module and electronic device comprising same - Google Patents

Power module and electronic device comprising same Download PDF

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Publication number
WO2024179260A1
WO2024179260A1 PCT/CN2024/074791 CN2024074791W WO2024179260A1 WO 2024179260 A1 WO2024179260 A1 WO 2024179260A1 CN 2024074791 W CN2024074791 W CN 2024074791W WO 2024179260 A1 WO2024179260 A1 WO 2024179260A1
Authority
WO
WIPO (PCT)
Prior art keywords
voltage
power
chip
low
power module
Prior art date
Application number
PCT/CN2024/074791
Other languages
French (fr)
Chinese (zh)
Inventor
谢地林
周文杰
李正凯
成章明
刘剑
Original Assignee
海信家电集团股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN202310188449.4A external-priority patent/CN116190369B/en
Priority claimed from CN202310190287.8A external-priority patent/CN116247049B/en
Priority claimed from CN202310188489.9A external-priority patent/CN116130477B/en
Priority claimed from CN202310188427.8A external-priority patent/CN116072663B/en
Application filed by 海信家电集团股份有限公司 filed Critical 海信家电集团股份有限公司
Publication of WO2024179260A1 publication Critical patent/WO2024179260A1/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/49Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions wire-like arrangements or pins or rods
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of semiconductor or other solid state devices
    • H01L25/16Assemblies consisting of a plurality of semiconductor or other solid state devices the devices being of types provided for in two or more different subclasses of H10B, H10D, H10F, H10H, H10K or H10N, e.g. forming hybrid circuits
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/60Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
    • H10D84/645Combinations of only lateral BJTs

Definitions

  • the present disclosure relates to the technical field of electronic equipment, and in particular to a power module and an electronic equipment having the same.
  • the power module encapsulated by molded resin contains a power chip and a driver chip for driving the power chip.
  • the application end has higher and higher requirements for the miniaturization of power modules.
  • a power module comprising a low-voltage driver chip, a high-voltage driver chip, at least one low-voltage power chip and a plurality of high-voltage power chips.
  • a bootstrap boost chip is integrated in the high-voltage driver chip.
  • the at least one low-voltage power chip is electrically connected to the low-voltage driver chip.
  • Any one of the plurality of high-voltage power chips is electrically connected to the high-voltage driver chip.
  • Any one of the high-voltage power chips comprises a drift layer.
  • the drift layers of at least two adjacent high-voltage power chips among the plurality of high-voltage power chips are constructed as an integral part, so that the at least two adjacent high-voltage power chips are integrated into an integral structure.
  • an electronic device comprising the power module mentioned above.
  • FIG1 is a structural diagram of a power module according to some embodiments.
  • FIG2 is a cross-sectional view of a high-voltage power chip of a power module according to some embodiments
  • FIG3 is a structural diagram of a high-voltage power chip of a power module according to some embodiments.
  • FIG4 is a cross-sectional view of a power module according to some embodiments.
  • FIG5 is a cross-sectional view of another power module according to some embodiments.
  • FIG6 is a cross-sectional view of yet another power module according to some embodiments.
  • FIG7 is a structural diagram of another power module according to some embodiments.
  • FIG8 is a cross-sectional view of yet another power module according to some embodiments.
  • FIG9 is a cross-sectional view of yet another power module according to some embodiments.
  • FIG10 is a structural diagram of a high voltage diode of yet another power module according to some embodiments.
  • FIG. 11 is a cross-sectional view of a high voltage diode of yet another power module according to some embodiments.
  • first and second are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features.
  • a feature defined as “first” or “second” may explicitly or implicitly include one or more of the features.
  • plural means two or more.
  • connection and its derivative expressions may be used.
  • connection should be understood in a broad sense.
  • connection can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium.
  • At least one of A, B, and C has the same meaning as “at least one of A, B, or C” and both include the following combinations of A, B, and C: A only, B only, C only, the combination of A and B, the combination of A and C, the combination of B and C, and the combination of A, B, and C.
  • a and/or B includes the following three combinations: A only, B only, and a combination of A and B.
  • parallel includes absolute parallelism and approximate parallelism, wherein the acceptable deviation range of approximate parallelism can be, for example, a deviation within 5°;
  • perpendicular includes absolute perpendicularity and approximate perpendicularity, wherein the acceptable deviation range of approximate perpendicularity can also be, for example, a deviation within 5°.
  • equal includes absolute equality and approximate equality, wherein the acceptable deviation range of approximate equality can be, for example, the difference between the two equalities is less than or equal to 5% of either one.
  • Exemplary embodiments are described herein with reference to cross-sectional views and/or plan views that are idealized exemplary drawings.
  • the thickness of layers and regions are exaggerated for clarity. Therefore, variations in shape relative to the drawings due to, for example, manufacturing techniques and/or tolerances are conceivable. Therefore, the exemplary embodiments should not be interpreted as being limited to the shapes of the regions shown herein, but include shape deviations due to, for example, manufacturing. For example, an etched region shown as a rectangle will typically have curved features. Therefore, the regions shown in the drawings are schematic in nature, and their shapes are not intended to illustrate the actual shape of regions of the device, and are not intended to limit the scope of the exemplary embodiments.
  • a power module includes multiple chips, such as a low voltage driver chip, a high voltage driver chip, a bootstrap chip, a low voltage power chip, and a high voltage power chip.
  • the size of the power module is affected by the size and arrangement of the multiple chips.
  • the bootstrap boost chip has a certain width, so the power module will be limited in the width direction, so that the power module cannot be further reduced in the width direction.
  • the layout of multiple high-voltage power chips is unreasonable, it will also affect the design of the power module, resulting in the inability to reduce the size of the power module, which will in turn increase the cost of the power module and reduce production efficiency.
  • the power module 1 is an intelligent power module (IPM).
  • IPM intelligent power module
  • the power module 1 in some embodiments of the present disclosure may also be other types of power modules, such as a thyristor module, an insulated gate bipolar field effect transistor module or a metal-oxide-semiconductor field-effect transistor module, etc.
  • the present disclosure does not limit the type of power module.
  • a power module 1 includes a low-voltage driver chip 100 and at least one low-voltage power chip 300 .
  • the low voltage driver chip 100 is electrically connected to at least one low voltage power chip 300, and is configured to control the working state of at least one low voltage power chip 300.
  • the low voltage driver chip 100 can be configured to receive a low level signal, and drive at least one low voltage power chip 300 to work according to the low level signal to process the low power signal, or, according to the low level signal, control at least one low voltage power chip 300 to stop working.
  • the power module 1 further includes a high-voltage driver chip 200 and at least one high-voltage power chip 400 .
  • the high-voltage driver chip 200 is electrically connected to at least one high-voltage power chip 400, and is configured to control the working state of at least one high-voltage power chip 400.
  • the high-voltage driver chip 200 is configured to drive at least one high-voltage power chip 400 to work to process a high-power signal, or to control at least one high-voltage power chip 400 to stop working.
  • the power module 1 can realize the preset functions, for example, the power module 1 can perform conversion between alternating current and direct current.
  • the power module 1 further includes at least one bootstrap boost chip 210.
  • At least one bootstrap boost chip 210 is integrated in the high-voltage driver chip 200.
  • the bootstrap boost chip 210 is configured to provide the additional voltage required by the drive circuit.
  • the high-voltage driver chip 200 can not only drive the high-voltage power chip 400, but also realize the bootstrap boost function, thereby reducing the number of chips in the power module 1, which is conducive to reducing the size of the power module 1 in the width direction (i.e., the S3-S4 direction as shown in FIG1 ), thereby improving production efficiency.
  • the power module 1 includes three bootstrap boost chips 210, and the three bootstrap boost chips 210 are integrated in the high-voltage driver chip 200.
  • the number of chips included in the power module 1 can be reduced, and the welding wires used to connect the bootstrap boost chip 210 and the high-voltage driver chip 200 are correspondingly omitted, which is beneficial to reduce costs and simplify the packaging process of the power module 1.
  • the pad area of the bootstrap boost chip 210 is any value between 0.95 mm 2 and 3.7 mm 2.
  • the pad area of the bootstrap boost chip 210 is any value between 0.95 mm 2 and 2 mm 2 , any value between 2 mm 2 and 3 mm 2 , or any value between 3 mm 2 and 3.7 mm 2 .
  • the material cost of the bootstrap boost chip 210 can be reduced while achieving the bootstrap function of the bootstrap boost chip 210 .
  • the low voltage driver chip 100 and the high voltage driver chip 200 are arranged along the length direction of the power module 1 (i.e., the S1-S2 direction shown in FIG1 ), and the low voltage power chip 300 and the high voltage power chip 400 can be arranged along the length direction of the power module 1. In this way, it is beneficial to improve the space utilization of the power module 1 and to reduce the volume of the power module 1.
  • At least one high-voltage power chip 400 includes a plurality of high-voltage power chips 400.
  • the high-voltage power chip 400 includes a drift layer 410.
  • the drift layers 410 of at least two adjacent high-voltage power chips 400 among the plurality of high-voltage power chips 400 are constructed as an integral piece, so that at least two adjacent high-voltage power chips 400 are integrated into an integral structure. In this way, it is beneficial to improve the space utilization of the power module 1 and to reduce the volume of the power module 1.
  • adjacent high-voltage power chips 400 are integrated into one, which means that the adjacent high-voltage power chips 400 can be synchronously installed in the power module 1, or can be synchronously removed from the power module 1.
  • the adjacent high-voltage power chips 400 have a certain connection strength.
  • adjacent high-voltage power chips 400 can be effectively reduced.
  • adjacent high-voltage power chips 400 are in contact, or spaced apart by a predetermined distance (such as less than 1 mm).
  • a predetermined distance such as less than 1 mm.
  • the drift layers 410 of at least two adjacent high-voltage power chips 400 are constructed as an integral piece, the adjacent high-voltage power chips 400 do not need to be diced during processing, thereby reducing production processes and improving production efficiency.
  • At least one high-voltage power chip 400 includes three high-voltage power chips 400.
  • the three high-voltage power chips 400 are not separated during dicing (i.e., the drift layers of the three high-voltage power chips 400 are an integrated piece), and two adjacent high-voltage power chips 400 are separated by a first partition, and the functions of the two adjacent high-voltage power chips 400 are independent.
  • the three high-voltage power chips 400 can be installed at the same time, which is beneficial to improve the packaging efficiency of the power module 1.
  • the three high-voltage power chips 400 shown in FIG1 are merely an example of a case of at least one high-voltage power chip 400, and cannot be regarded as a limitation on the number of at least one high-voltage power chip 400.
  • the at least one high-voltage power chip 400 may include one high-voltage power chip 400, or may include two high-voltage power chips 400, four high-voltage power chips 400, or more high-voltage power chips 400.
  • the high-voltage power chip 400 includes a first active region 420 and a first terminal region 430, the first terminal region 430 is arranged around the first active region 420, and the first terminal region 430 is located at the edge of the high-voltage power chip 400.
  • the first terminal region 430 includes a first passivation layer 431, and the first passivation layer 431 is arranged on one side surface of the drift layer 410.
  • the first passivation layers 431 of adjacent high-voltage power chips 400 are spaced apart, and a first partition 440 is defined between the first passivation layers 431 of adjacent high-voltage power chips 400.
  • the first partition 440 is a groove, and a portion of the first partition 440 is located in the drift layer 410.
  • first passivation layer 431 is not limited to being disposed in the first terminal region 430 . In some embodiments, the first passivation layer 431 may also be disposed in the first active region 420 .
  • the first passivation layer 431 is disposed at opposite sides of the drift layer 410 , and the first separator 440 is formed in the first passivation layer 431 .
  • the first separator 440 can physically separate two adjacent high-voltage power chips 400 so that the first passivation layers 431 of the two adjacent high-voltage power chips 400 do not contact each other, thereby facilitating improving the reliability of the high-voltage power chip 400 .
  • the polarity of the region between two adjacent high-voltage power chips 400 can be defined by a mask to form at least one first partition 440. In this way, at least one first partition 440 and a plurality of high-voltage power chips 400 can be formed simultaneously, thereby simplifying the production steps and improving production efficiency.
  • a first electrical isolation portion 450 is provided at a position corresponding to the first partition portion 440 on one side surface of the drift layer 410, that is, the first electrical isolation portion 450 is provided in the first partition portion 440, so that the first partition portion 440 and the first electrical isolation portion 450 can be formed in the same direction to improve production efficiency.
  • the first electrical isolation portion 450 is configured to electrically isolate two adjacent high-voltage power chips 400 to avoid electrical conduction between the two adjacent high-voltage power chips 400, thereby preventing problems such as short circuits.
  • a surface of the first electrical isolation portion 450 close to the first passivation layer 431 is flush with a surface of the drift layer 410 close to the first passivation layer 431. In this way, the transition between the first electrical isolation portion 450 and the drift layer 410 is smooth, which is convenient for processing.
  • ions of a preset doping concentration may be implanted into the first partition 440 to form the first electrical isolation portion 450.
  • the drift layer 410 is a low-doped N-type semiconductor
  • the first electrical isolation portion 450 is a high-doped N-type semiconductor
  • the thickness of the first electrical isolation portion 450 is less than the thickness of the drift layer 410.
  • the first electrical isolation part 450 is formed on the side of the drift layer 410 facing the first separation part 440. Due to the setting of the first separation part 440, it is convenient to inject ions into the drift layer 410 (that is, the first separation part 440) and form the first electrical isolation part 450, and it is beneficial to improve the reliability of electrical isolation of the first electrical isolation part 450.
  • the high-voltage power chip 400 further includes a field stop layer 401.
  • the field stop layer 401 is disposed on a surface of the drift layer 410 that is away from the first passivation layer 431 and is configured to control the electric field distribution in the high-voltage power chip 400 and prevent gate charge from flowing to the semiconductor material.
  • the field stop layers 401 of at least two adjacent high-voltage power chips 400 are constructed as an integral piece.
  • the high-voltage power chip 400 further includes a collector layer 402.
  • the collector layer 402 is disposed on a surface of the field stop layer 401 that is away from the drift layer 410.
  • the collector layer 402 is a main current channel in the high-voltage power chip 400 and is configured to bear the current load.
  • the collector layers 402 of at least two adjacent high-voltage power chips 400 are constructed as an integral piece.
  • the high-voltage power chip 400 further includes a metal layer 403.
  • the metal layer 403 is disposed on a surface of the collector layer 402 that is away from the field stop layer 401, and is configured to achieve electrical connection of the high-voltage power chip 400 and assist in heat dissipation of the high-voltage power chip 400.
  • the metal layers 403 of at least two adjacent high-voltage power chips 400 are constructed as an integral piece.
  • the drift layer 410 , the field stop layer 401 , the collector layer 402 and the metal layer 403 may be stacked in sequence along the thickness direction of the high-voltage power chip 400 .
  • the connection strength between the two adjacent high-voltage power chips 400 can be improved, and the accuracy of the relative position between the two adjacent high-voltage power chips 400 can be ensured, thereby facilitating the assembly of the high-voltage power chips 400.
  • At least one of the low voltage power chip 300 and the high voltage power chip 400 is a reverse conducting insulated gate bipolar transistor (RC-IGBT).
  • RC-IGBT reverse conducting insulated gate bipolar transistor
  • At least one of the low voltage power chip 300 and the high voltage power chip 400 is a metal-oxide semiconductor field effect transistor (MOSFET).
  • MOSFET metal-oxide semiconductor field effect transistor
  • the types of the low-voltage power chip 300 and the high-voltage power chip 400 can be selected and set according to the use scenario of the power module 1, thereby enriching the applicable scenarios of the power module 1.
  • the low voltage power chip 300 and the high voltage power chip 400 can achieve the same function, thereby reducing the number of chips on the power module 1.
  • the power module 1 includes a low voltage driver chip 100, a high voltage driver chip 200, three low voltage power chips 300 and three high voltage power chips 400.
  • the high-voltage driver chip 200 includes a power supply end and a high-side floating power supply end, the positive end of the bootstrap boost chip 210 is electrically connected to the power supply end of the high-voltage driver chip 200, and the negative end of the bootstrap boost chip 210 is electrically connected to the high-side floating power supply end of the high-voltage driver chip 200.
  • the power module 1 further includes a package shell 500.
  • the low voltage driver chip 100, the high voltage driver chip 200, the low voltage power chip 300, and the high voltage power chip 400 are packaged in the package shell 500.
  • the opposite sides of the package shell 500 are respectively the control side (i.e., the side pointed by the direction S4 as shown in FIG. 1 ) and the power side (i.e., the side pointed by the direction S3 as shown in FIG. 1 ) of the power module 1.
  • the power module 1 further includes a power chip base 600 , at least a portion of which is encapsulated in a packaging shell 500 , and the low voltage power chip 300 and the high voltage power chip 400 are disposed on the power chip base 600 .
  • the power module 1 further includes a control side lead frame 700.
  • the control side lead frame 700 is connected to the power chip base 600, and at least a portion of the control side lead frame 700 is encapsulated in the package shell 500.
  • the control side lead frame 700 includes a low voltage chip base island 710, a high voltage chip base island 720, and a plurality of control side pins 730.
  • the low voltage driver chip 100 is disposed on the low voltage chip base island 710
  • the high voltage driver chip 200 is disposed on the high voltage chip base island 720
  • the plurality of control side pins 730 are configured to be electrically connected to the low voltage driver chip 100 and the high voltage driver chip 200, and extend from the control side to the outside of the package shell 500.
  • the power module 1 further includes a power side lead frame 800.
  • the power side lead frame 800 is connected to the power chip base 600, and at least a portion of the power side lead frame 800 is encapsulated in the package housing 500.
  • the power side lead frame 800 includes a plurality of power side pins 810, which are configured to be electrically connected to the low voltage power chip 300 and the high voltage power chip 400, and extend from the power side to extend out of the package housing 500.
  • multiple control side pins 730 and multiple power side pins 810 can be electrically connected to the external circuit, thereby realizing the electrical connection between the internal circuit of the power module 1 and the external circuit, forming an electrical loop, so that the power module 1 can operate.
  • control side lead frame 700 can connect the low voltage driver chip 100 and the high voltage driver chip 200 to external electrical components through multiple control side pins 730, and multiple control side pins 730 can be disassembled and assembled synchronously, thereby reducing the difficulty of disassembling and assembling the intelligent power module 1.
  • control-side lead frame 700 is connected to the low-voltage driver chip 100 and the high-voltage driver chip 200 through gold wires, copper wires or other materials with low resistivity.
  • power-side lead frame 800 is connected to the low-voltage power chip 300 and the high-voltage power chip 400 through gold wires, copper wires or other materials with low resistivity.
  • the bootstrap boost chip is integrated in the high-voltage driver chip 200, the size of the power chip base 600 will increase, thereby increasing the heat dissipation area of the power chip base 600, which is beneficial to improving the heat dissipation performance and reliability of the power module 1.
  • the length of the bonding wire between some of the control side pins 730 and the high-voltage chip base island 720 can be shortened, which is beneficial to saving materials for bonding wires and reducing costs.
  • the plurality of control side pins 730 and the plurality of power side pins 810 may be made of metal copper or copper alloy. In some embodiments, the plurality of control side pins 730 and the plurality of power side pins 810 may also be made of other materials with good electrical conductivity.
  • the package shell 500 may be made of epoxy resin. It is understood that epoxy resin has high compressive strength and insulation, so that the package shell 500 can provide physical and electrical protection to the chip inside it to prevent the external environment from impacting the chip. In some embodiments, the package shell 500 can also be made of other materials with high compressive strength and good insulation.
  • the low-voltage driver chip 100 and the high-voltage driver chip 200 are bonded to the control side lead frame 700 by silver glue or other adhesive materials, the control side lead frame 700 and the power side lead frame 800 are pre-fixed with the power chip base 600 by solder paste printing or laser welding, and the low-voltage power chip 300 and the high-voltage power chip 400 can be connected to the power chip base 600 by solder paste printing.
  • the low-voltage driver chip 100, the high-voltage driver chip 200, the low-voltage power chip 300, the high-voltage power chip 400 and at least a part of the power chip base 600 can be packaged through the packaging shell 500, thereby not only avoiding damage to the low-voltage driver chip 100, the high-voltage driver chip 200, the low-voltage power chip 300, the high-voltage power chip 400 and the power chip base 600, but also preventing the low-voltage driver chip 100, the high-voltage driver chip 200, the low-voltage power chip 300 and the high-voltage power chip 400 from being electrically connected to the outside world, which is beneficial to improving the stability and reliability of the power module 1.
  • the plurality of control-side pins 730 include at least two high-side suspended power supply pins 731, and the high-side suspended power supply pins 731 are electrically connected to the high-voltage driver chip 200.
  • the high-side suspended power supply pins 731 are electrically connected to the high-voltage driver chip 200 via a connecting wire, and the length of the connecting wire is any value between 0.4 mm and 3.2 mm.
  • the distance between the high-side suspended power supply pin 731 and the high-voltage driver chip 200 can be shortened, thereby shortening the length of the connection line.
  • the connection line can be shortened to 0.4 mm, thereby saving the material cost of the connection line and facilitating the connection between the high-side suspended power supply pin 731 and the high-voltage driver chip 200.
  • the length of the connecting line is any value between 0.4 mm and 1 mm, any value between 1 mm and 1.6 mm, any value between 1.6 mm and 2.4 mm, or any value between 2.4 mm and 3.2 mm.
  • the plane defined by the width direction and the length direction of the power module 1 is defined as the reference plane.
  • the distance between the edge of the side of the orthographic projection of the high-side floating power supply pin 731 on the reference plane close to the high-voltage driver chip 200 and the edge of the orthographic projection of the package shell 500 close to the control side is L1, and the distance L1 is any value between 1.4mm and 2.05mm. In this way, it is beneficial to reduce the occupied area of the high-side floating power supply pin 731 on the package shell 500, save the material of the high-side floating power supply pin 731, and improve the structural strength of the high-side floating power supply pin 731.
  • the size of the power chip base 600 in the width direction of the power module 1 can be increased (for example, increased by 1.9 mm), which is beneficial for the power module 1 to exchange heat with the outside world through the power chip base 600, thereby improving the heat dissipation performance and operation reliability of the power module 1.
  • the distance L1 is any value between 1.4 mm and 1.6 mm, any value between 1.6 mm and 1.8 mm, or any value between 1.8 mm and 2.05 mm.
  • the two side edges of at least two high-side suspended power supply pins 731 are located between the two side edges of the high-voltage chip base island 720.
  • the number of high-side suspended power supply pins 731 may correspond to the number of high-voltage power chips 400. In this way, the distance L1 can be shortened, which facilitates the electrical connection between the high-side suspended power supply pins 731 and the high-voltage driver chip 200, and helps to reduce the size of the power module 1 in the width direction.
  • the high-side floating power supply pin 731 is separated from the high-voltage chip base island 720 by a gap, which is conducive to reducing the distance between the high-side floating power supply pin 731 and the high-voltage chip base island 720, thereby reducing the width of the control-side lead frame 700.
  • the size of the above gap can be set according to actual needs, for example, the width of the gap can be 0.1mm, 0.25mm, 0.5mm or 1mm, etc.
  • the distance between the edge of the high-voltage chip base island 720 projected on the reference plane toward the control side and the edge of the package shell 500 projected on the reference plane toward the control side is L2, and L2 is any value between 1.8 mm and 2.45 mm.
  • L2 is any value between 1.8 mm and 2.0 mm, any value between 2.0 mm and 2.2 mm, or any value between 2.2 mm and 2.45 mm.
  • At least a portion of at least two high-side floating power supply pins 731 is located between an edge of the high-voltage chip island 720 projected on the reference plane toward the control side and an edge of the package housing 500 projected on the reference plane toward the control side.
  • the high-side floating power supply pin 731 is smaller in the width direction of the power module 1, the distance between the edge of the high-voltage chip base island 720 projected on the reference plane toward the control side and the edge of the packaging shell 500 projected on the reference plane toward the control side can be shortened.
  • the plurality of control-side pins 730 include at least two high-side suspended power supply pins 731, and the at least two high-side suspended power supply pins 731 are electrically connected to the high-voltage driver chip 200.
  • the area of the orthographic projection of any one of the at least two high-side suspended power supply pins 731 is any value between 1.8 mm 2 and 3 mm 2 .
  • the area of the orthographic projection of any high-side floating power pin 731 is any value between 1.8 mm 2 and 2.2 mm 2 , any value between 2.2 mm 2 and 2.6 mm 2 , or any value between 2.6 mm 2 and 3 mm 2 .
  • any high-side floating power supply pin 731 on the reference plane is less than 1.8 mm2 , the space occupied by the high-side floating power supply pin 731 on the package shell 500 is small, which is not conducive to the operation of the high-side floating power supply pin 731.
  • the area of the orthographic projection of any high-side floating power supply pin 731 on the reference plane is greater than 3 mm2 , the space occupied by the high-side floating power supply pin 731 on the package shell 500 is large, which reduces the contact area between the power module 1 and other heat dissipation components and affects the heat dissipation performance of the power module 1.
  • the high-side floating power supply pin 731 occupies a smaller space on the packaging shell 500 while ensuring the heat dissipation efficiency of the power module 1, thereby improving the reliability and stability of the power module 1.
  • the number of the high-side floating power pins 731 corresponds to the number of the high-voltage power chips 400 .
  • any high-side floating power pin 731 is spaced apart from the high-voltage chip island 720 in the length direction of the power module 1 .
  • the high-side floating power supply pin 731 is connected to the high-voltage driver chip 200 by wire bonding, so the above arrangement can reduce the length dimension of the power module 1 and improve the strength of the pin while reserving enough wire bonding space.
  • the area of the orthographic projection of the high-side floating power supply pin 731 will not be too small, thereby facilitating the connection between the high-voltage driver chip 200 and the high-side floating power supply pin 731.
  • the plurality of control-side pins 730 further include at least one power pin 732 and at least one input pin 733.
  • the power pin 732, the input pin 733 and the high-side floating power pin 731 are electrically connected to the high-voltage driver chip 200.
  • the power pin 732 is located between the input pin 733 and the high-side floating power supply pin 731. In this way, on the one hand, it is helpful to reduce the size of the power pin 732 in the width direction of the power module 1, thereby reducing the size of the power module 1 in the width direction.
  • the power pin 732 can be arranged close to the high-voltage driver chip 200, which is helpful to shorten the distance between the power pin 732 and the high-voltage driver chip 200, and the length of the power pin 732 can be shortened to reduce the material cost of the power pin 732. Furthermore, the high-voltage chip base island 720 and the low-voltage chip base island 710 can be adjusted to a position closer to the control side, so that the size of the control side lead frame 700 in the width direction of the power module 1 can be reduced.
  • some embodiments of the present disclosure are not limited to the power pin 732 being located between the input pin 733 and the high-side suspended power pin 731.
  • the input pin 733 is located between the power pin 732 and the high-side suspended power pin 731.
  • the space occupied by the power pin 732 between the high-side suspended power pin 731 and the high-voltage chip base island 720 can be reduced, thereby reducing the size of the control-side lead frame 700 in the width direction of the power module 1.
  • this arrangement can relatively shorten the length of the power pin 732, thereby reducing the material cost of the power pin 732.
  • the plurality of control side pins 730 further include at least one high-voltage driver chip connection pin 734, the high-voltage driver chip connection pin 734 is spaced apart from the high-side suspension power supply pin 731, and the minimum distance between the high-voltage driver chip connection pin 734 and the high-side suspension power supply pin 731 is less than or equal to a preset distance.
  • the preset distance is 2 to 3 times the thickness of the high-side suspension power supply pin 731.
  • the preset distance is 2 times, 2.2 times, 2.5 times, 2.7 times or 3 times the thickness of the high-side suspension power supply pin 731.
  • the high-voltage driver chip connection pin 734 extends along the width direction of the power module 1, and the end of the right end of the high-voltage driver chip connection pin 734 is opposite to the right side of the high-side suspension power supply pin 731.
  • the minimum distance between the high-voltage driver chip connection pin 734 and the high-side suspended power supply pin 731 is less than or equal to 1.08 mm.
  • the distance between the high-voltage driver chip connection pin 734 and the high-side suspended power supply pin 731 can be set to 0.5 mm or 0.6 mm. In this way, the interference between the high-side suspended power supply pin 731 and the high-voltage driver chip connection pin 734 can be reduced, and it is beneficial to reduce the size of the power module 1 in the width direction and reduce the volume of the power module 1.
  • the plurality of control side pins 730 further include at least one high voltage driver chip connection pin 734.
  • the high voltage driver chip connection pin 734 includes an extension portion 7341 and a connection portion 7342.
  • One end of the extension portion 7341 is connected to the high voltage chip base island 720, and the other end of the extension portion 7341 extends along the length direction of the power module 1 (such as the S2 direction in FIG. 1 ).
  • One end of the connection portion 7342 is connected to the extension portion 7341, and the other end of the connection portion 7342 extends toward the control side (i.e., the S4 direction in FIG. 1 ), and extends to the outside of the package shell 500.
  • the extension portion 7341 is spaced apart from the high side suspension power supply pin 731, and the connection portion 7342 is also spaced apart from the high side suspension power supply pin 731.
  • the minimum distance between the connection portion 7342 and the high-side floating power pin 731 is less than or equal to 2.7 times the size of the high-side floating power pin 731 .
  • the minimum distance between the high-voltage driver chip connection pin 734 and the high-side suspended power supply pin 731 is less than or equal to 1.08 mm, and the distance between the connection portion 7342 and the high-side suspended power supply pin 731 is 0.5 mm or 0.6 mm.
  • Such a setting can reduce the interference between the high-side suspended power supply pin 731 and the high-voltage driver chip connection pin 734, and is conducive to reducing the dimension of the power module 1 in the width direction and reducing the volume of the power module 1.
  • the at least one low voltage power chip 300 includes a plurality of low voltage power chips 300 .
  • the base 600 includes a plurality of low-voltage conductive parts 610 (e.g., three low-voltage conductive parts 610) and a high-voltage conductive part 620.
  • the plurality of low-voltage conductive parts 610 are arranged at intervals, and the plurality of low-voltage conductive parts 610 are arranged at intervals from the high-voltage conductive part 620.
  • the plurality of low-voltage power chips 300 are correspondingly arranged on the plurality of low-voltage conductive parts 610, and the high-voltage power chip 400 is arranged on the high-voltage conductive part 620.
  • the plurality of low-voltage conductive parts 610 and the high-voltage conductive part 620 are respectively connected to corresponding power-side pins 810.
  • the size of the power module 1 in the length direction can be reduced, and it is convenient to reduce the arrangement and assembly of the high-voltage power chip 400.
  • the power chip base 600 only needs to be provided with one high-voltage conductive portion 620, which is conducive to reducing the processing difficulty and production cost of the power chip base 600.
  • the low voltage power chip 300 and the high voltage power chip 400 are located at a position of the power chip base 600 close to the control side, and a portion of the power chip base 600 close to the power side at least partially overlaps with the power side pins 810 .
  • the power chip base 600, the control side lead frame 700 and the power side lead frame 800 are constructed as an integral part, so that the relative positions of the control side lead frame 700 and the power side lead frame 800 are fixed and can be assembled and disassembled synchronously. This is conducive to improving the connection strength between the control side lead frame 700 and the power side lead frame 800, and is conducive to improving the assembly efficiency and accuracy of the power module 1.
  • the power module 1 also includes an insulating sheet 510 and a heat sink 520, the insulating sheet 510 is arranged on the side of the power chip base 600 facing away from the low-voltage power chip 300 and the high-voltage power chip 400, and the heat sink 520 is arranged on the side of the insulating sheet 510 facing away from the power chip base 600.
  • the position of the package housing 500 corresponding to the heat sink 520 is opened to form an opening. At least a portion of the heat sink 520 is disposed in the opening, or a surface of at least a portion of the heat sink 520 away from the insulating sheet 510 is flush with the plane where the opening is located, or at least a portion of the heat sink 520 protrudes from the plane where the opening is located.
  • the heat sink 520 may be a metal material, such as a copper material, or other material with good thermal conductivity.
  • the heat sink 520 has good thermal conductivity, which is helpful to reduce the temperature of the power chip base 600, the low-voltage power chip 300 and the high-voltage power chip 400, and avoid heat accumulation in the low-voltage power chip 300 and the high-voltage power chip 400 when the power module 1 is running.
  • the insulating sheet 510 may be made of a material having good thermal conductivity and insulation properties, such as a ceramic material, an Al2O3 material, or an AlN material.
  • control side lead frame 700 and the power side lead frame 800 are integrated, so that the relative positions of the control side lead frame 700 and the power side lead frame 800 are fixed and can be assembled and disassembled synchronously. This is conducive to improving the connection strength between the control side lead frame 700 and the power side lead frame 800, and is conducive to improving the assembly efficiency and accuracy of the power module 1.
  • the power side lead frame 800 is connected to the power chip base 600.
  • the power chip base 600 includes a conductive layer 601, an insulating layer 602 and a heat dissipation layer 603 which are stacked.
  • the insulating layer 602 is arranged on the side of the conductive layer 601 away from the high-voltage power chip 400, and the heat dissipation layer 603 is arranged on the side of the insulating layer 602 away from the conductive layer 601.
  • the low-voltage power chip 300 and the high-voltage power chip 400 are arranged on the conductive layer 601, and the power side pin 810 is connected to the conductive layer 601.
  • the insulating layer 602 is configured to cut off the electrical conduction between the conductive layer 601 and the heat dissipation layer 603, and transfer the heat of the conductive layer 601 to the heat dissipation layer 603, so that the heat dissipation layer 603 can dissipate the heat of the power chip base 600, the low-voltage power chip 300 and the high-voltage power chip 400 to the outside of the package shell 500.
  • the position of the package shell 500 corresponding to the heat dissipation layer 603 is open to form an opening.
  • the heat dissipation layer 603 is located in the opening, or the surface of the heat dissipation layer 603 on one side away from the insulating layer 602 is flush with the plane where the opening is located, or the heat dissipation layer 603 protrudes from the plane where the opening is located.
  • the heat generated by the operation of the power chip can be transferred to the heat dissipation layer 603 via the conductive layer 601 and the insulating layer 602, and the heat dissipation layer 603 performs heat exchange with the outside to achieve heat dissipation of the power module 1.
  • the conductive layer 601 and the heat dissipation layer 603 may be metal layer structures, for example, the conductive layer 601 and the heat dissipation layer 603 may be metal copper layers or copper alloy layers.
  • the conductive layer 601 may also be made of other materials with good electrical conductivity and thermal conductivity
  • the heat dissipation layer 603 may also be made of other materials with good thermal conductivity
  • the insulating layer 602 may be made of insulating materials with good thermal conductivity, such as ceramics. Al2O3 or AlN.
  • the power module 1 includes three low voltage power chips 300 and three high voltage power chips 400.
  • the three low voltage power chips 300 are arranged along the length direction of the power module 1
  • the three high voltage power chips 400 are arranged along the length direction of the power module 1.
  • the power module 1 can form a three-phase bridge circuit, and the arrangement of the three high-voltage power chips 400 facilitates the connection between the high-voltage power chip 400 and the high-voltage driver chip 200, which is conducive to simplifying the structural layout of the power module 1.
  • the power module 1 further includes at least one low voltage diode 310 and at least one high voltage diode 460.
  • the low voltage power chip 300 is electrically connected to the power side lead frame 800 through the low voltage diode 310
  • the high voltage power chip 400 is electrically connected to the power side lead frame 800 through the high voltage diode 460.
  • the low voltage power chip 300 is electrically connected to the corresponding power side pin 810 through the low voltage diode 310
  • the high voltage power chip 400 is electrically connected to the corresponding power side pin 810 through the high voltage diode 460.
  • the power side lead frame 800 is connected to the low voltage diode 310 and the high voltage diode 460 through gold wire or copper wire, or the power side lead frame 800 can also be connected to the low voltage diode 310 and the high voltage diode 460 through other materials with low resistivity.
  • the at least one low voltage diode 310 includes a plurality of low voltage diodes 310 , and the plurality of low voltage diodes 310 corresponds to the plurality of low voltage power chips 300 and is electrically connected to the plurality of low voltage power chips 300 .
  • the at least one high-voltage diode 460 includes a plurality of high-voltage diodes 460 , and the plurality of high-voltage diodes 460 corresponds to the plurality of high-voltage power chips 400 and is electrically connected to the plurality of high-voltage power chips 400 .
  • the high-voltage diode 460 includes an epitaxial layer 461.
  • the epitaxial layers 461 of at least two adjacent high-voltage diodes 460 among the plurality of high-voltage diodes 460 are constructed as an integral piece, so that at least two adjacent high-voltage diodes 460 are integrated into one. In this way, it is beneficial to improve the space utilization of the power module 1 and to reduce the volume of the power module 1.
  • At least two adjacent high-voltage diodes 460 are integrated into one body, which means that the adjacent high-voltage diodes 460 can be synchronously installed in the power module 1, or can be synchronously removed from the power module 1. In addition, there is a certain connection strength between the adjacent high-voltage diodes 460.
  • the distance between two adjacent high-voltage diodes 460 can be effectively reduced.
  • the size of the power module 1 can be reduced, the manufacturing cost can be reduced, and the length of the wire connected to the high-voltage diode 460 can be reduced, thereby saving wire materials and reducing the risk of wire collision.
  • the epitaxial layers 461 of at least two adjacent high-voltage diodes 460 are constructed as an integral piece, the adjacent high-voltage diodes 460 do not need to be diced during processing, thereby reducing the production process and improving production efficiency.
  • the multiple high-voltage diodes 460 may include two, four or more high-voltage diodes 460.
  • the low-voltage power chip 300 and the low-voltage diode 310 are arranged along the width direction of the power module 1 (i.e., the S3-S4 direction as shown in Figure 7), and the high-voltage power chip 400 and the high-voltage diode 460 are arranged along the width direction of the power module 1 (i.e., the S3-S4 direction as shown in Figure 7), which is beneficial to reducing the volume of the power module 1.
  • the high voltage diode 460 includes a second active region 462 and a second terminal region 463, the second terminal region 463 is disposed around the second active region 462, and the second terminal region 463 is located at the edge of the high voltage diode 460.
  • the second terminal region 463 includes a second passivation layer 464, and the second passivation layer 464 is disposed on a side surface of the epitaxial layer 461.
  • the second passivation layers 464 of adjacent high voltage diodes 460 are spaced apart, and a second partition 469 is formed between the second passivation layers 464 of adjacent high voltage diodes 460.
  • the second partition 469 is a groove, and a portion of the second partition 469 is located in the epitaxial layer 461.
  • the second passivation layer 464 is not limited to being disposed in the second terminal region 463 . In some embodiments, the second passivation layer 464 may also be disposed in the second active region 462 .
  • the second separator 469 can physically separate two adjacent high-voltage diodes 460 so that the second passivation layers 464 of the two adjacent high-voltage diodes 460 do not contact each other, thereby facilitating improving the reliability of the high-voltage diodes 460 .
  • a second electrical The isolating portion 465 that is, the second electrical isolating portion 465 is disposed in the second separating portion 469, so that the second separating portion 469 and the second electrical isolating portion 465 can be formed in the same direction to improve production efficiency.
  • the second electrical isolating portion 465 is configured to electrically separate two adjacent high-voltage diodes 460 to avoid electrical conduction between the two adjacent high-voltage diodes 460, thereby preventing problems such as short circuits.
  • the epitaxial layer 461 is a low-doped N-type semiconductor
  • the second electrical isolation portion 465 is a high-doped N-type semiconductor
  • the thickness of the second electrical isolation portion 465 is less than the thickness of the epitaxial layer 461 .
  • a surface of the second electrical isolation portion 465 close to the second partition 469 is flush with a surface of the epitaxial layer 461 close to the second passivation layer 464. In this way, the transition between the second electrical isolation portion 465 and the epitaxial layer 461 is smooth, which is convenient for processing.
  • the second electrical isolation portion 465 is formed on the side of the epitaxial layer 461 facing the second separation portion 469. Due to the setting of the second separation portion 469, it is convenient to inject ions into the epitaxial layer 461 (that is, the second separation portion 469) to form the second electrical isolation portion 465, and it is beneficial to improve the reliability of electrical isolation of the second electrical isolation portion 465.
  • the high voltage diode 460 further includes a substrate 466.
  • the substrate 466 is disposed on a surface of the epitaxial layer 461 that is away from the second passivation layer 464.
  • the substrates 466 of at least two adjacent high voltage diodes 460 are constructed as an integral piece.
  • the epitaxial layer 461 includes a first sub-epitaxial layer 467 and a second sub-epitaxial layer 468, and the first sub-epitaxial layer 467 is disposed between the second sub-epitaxial layer 468 and the substrate 466.
  • the first sub-epitaxial layers 467 of at least two adjacent high-voltage diodes 460 are constructed as an integral piece, and the second sub-epitaxial layers 468 of at least two adjacent high-voltage diodes 460 are constructed as an integral piece, which is conducive to improving the connection strength between the two adjacent high-voltage diodes 460, as well as the accuracy and stability of the relative position between the two adjacent high-voltage diodes 460, thereby improving the stability and reliability of the operation of the high-voltage diodes 460.
  • the substrate 466, the first sub-epitaxial layer 467 and the second sub-epitaxial layer 468 are all N-type semiconductors.
  • the doping concentration of the substrate 466 is greater than the doping concentration of the first sub-epitaxial layer 467, and the doping concentration of the first sub-epitaxial layer 467 is greater than the doping concentration of the second sub-epitaxial layer 468, so that the high-voltage diode 460 can achieve unidirectional conduction.
  • the low voltage diode 310 and the high voltage diode 460 are disposed on the power chip base 600 and packaged in the package housing 500, thereby extending the service life of the low voltage diode 310 and the high voltage diode 460.
  • the low voltage diode 310 and the high voltage diode 460 are connected to the power chip base 600 through solder paste.
  • At least one low-voltage diode 310 includes a plurality of low-voltage diodes 310, and the plurality of low-voltage diodes 310 correspond to the plurality of low-voltage conductive portions 610 and are disposed on the plurality of low-voltage conductive portions 610.
  • At least one high-voltage diode 460 is integrated as one body and disposed on the high-voltage conductive portion 620, thereby facilitating the reduction of the size of the power module 1 in the length direction and facilitating the reduction of the arrangement and assembly of the high-voltage diode 460.
  • the power chip base 600 only needs to be provided with one high-voltage conductive portion 620, which is conducive to reducing the processing difficulty and production cost of the power chip base 600.
  • the power module 1 includes three low-voltage power chips 300 , three low-voltage diodes 310 , three high-voltage power chips 400 , and three high-voltage diodes 460 .
  • Three low-voltage power chips 300 are arranged along the length direction of the power module 1, three low-voltage diodes 310 are arranged along the length direction of the power module 1, three high-voltage power chips 400 are arranged along the length direction of the power module 1, and three high-voltage diodes 460 are arranged along the length direction of the power module 1.
  • Each low-voltage power chip 300 and the corresponding low-voltage diode 310 are arranged along the width direction of the power module 1, and each high-voltage power chip 400 and the corresponding high-voltage diode 460 are arranged along the width direction of the power module 1.
  • the power module 1 can form a three-phase bridge circuit, and the arrangement of the three high-voltage power chips 400 facilitates the connection between the high-voltage power chip 400 and the high-voltage driver chip 200, and facilitates the connection between the high-voltage power chip 400 and the corresponding high-voltage diode 460, which is conducive to simplifying the structural layout of the power module 1.
  • Some embodiments of the present disclosure further provide an electronic device, which includes the power module 1 provided by any of the above embodiments.
  • the beneficial effects of the electronic device are the same as those of the power module 1, and the present disclosure will not elaborate on this.

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Abstract

Disclosed is a power module, comprising a low-voltage driving chip, a high-voltage driving chip, at least one low-voltage power chip, and a plurality of high-voltage power chips. A bootstrap chip is integrated in the high-voltage driving chip. The at least one low-voltage power chip is electrically connected to the low-voltage driving chip. Any high-voltage power chip in the plurality of high-voltage power chips is electrically connected to the high-voltage driving chip. Any high-voltage power chip comprises a drift layer. Drift layers of at least two adjacent high-voltage power chips in the plurality of high-voltage power chips are constructed as an integrated part, so that the at least two adjacent high-voltage power chips are integrated as an integrated structure.

Description

功率模块以及具有其的电子设备Power module and electronic device having the same

本申请要求于2023年2月28日提交的、申请号为202310188489.9的中国专利申请的优先权,于2023年2月28日提交的、申请号为202310188427.8的中国专利申请的优先权,于2023年2月28日提交的、申请号为202310190287.8的中国专利申请的优先权,以及于2023年2月28日提交的、申请号为202310188449.4的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application claims the priority of Chinese patent application No. 202310188489.9 filed on February 28, 2023, the priority of Chinese patent application No. 202310188427.8 filed on February 28, 2023, the priority of Chinese patent application No. 202310190287.8 filed on February 28, 2023, and the priority of Chinese patent application No. 202310188449.4 filed on February 28, 2023, the entire contents of which are incorporated by reference into this application.

技术领域Technical Field

本公开涉及电子设备技术领域,尤其涉及一种功率模块和具有其的电子设备。The present disclosure relates to the technical field of electronic equipment, and in particular to a power module and an electronic equipment having the same.

背景技术Background Art

电子设备的内部通常构建有功率模块以实现其功能的应用。由模塑树脂封装而成的功率模块包含功率芯片以及用于驱动功率芯片的驱动芯片。随着电子设备的普及,应用端对于功率模块的小型化的要求也越来越高。Electronic devices are usually built with power modules to realize their functional applications. The power module encapsulated by molded resin contains a power chip and a driver chip for driving the power chip. With the popularization of electronic devices, the application end has higher and higher requirements for the miniaturization of power modules.

发明内容Summary of the invention

一方面,提供一种功率模块,包括低压驱动芯片、高压驱动芯片、至少一个低压功率芯片和多个高压功率芯片。所述高压驱动芯片内集成有自举升压芯片。所述至少一个低压功率芯片与所述低压驱动芯片电连接。多个高压功率芯片中的任一个高压功率芯片与所述高压驱动芯片电连接。所述任一个高压功率芯片包括漂移层。所述多个高压功率芯片中的至少两个相邻的高压功率芯片的漂移层被构造成一体件,以使所述至少两个相邻的高压功率芯片被集成为一体结构。On the one hand, a power module is provided, comprising a low-voltage driver chip, a high-voltage driver chip, at least one low-voltage power chip and a plurality of high-voltage power chips. A bootstrap boost chip is integrated in the high-voltage driver chip. The at least one low-voltage power chip is electrically connected to the low-voltage driver chip. Any one of the plurality of high-voltage power chips is electrically connected to the high-voltage driver chip. Any one of the high-voltage power chips comprises a drift layer. The drift layers of at least two adjacent high-voltage power chips among the plurality of high-voltage power chips are constructed as an integral part, so that the at least two adjacent high-voltage power chips are integrated into an integral structure.

另一方面,提供一种电子设备,包括上述功率模块。On the other hand, an electronic device is provided, comprising the power module mentioned above.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1为根据一些实施例的一种功率模块的结构图;FIG1 is a structural diagram of a power module according to some embodiments;

图2为根据一些实施例的一种功率模块的高压功率芯片的截面图;FIG2 is a cross-sectional view of a high-voltage power chip of a power module according to some embodiments;

图3为根据一些实施例的一种功率模块的高压功率芯片的结构图;FIG3 is a structural diagram of a high-voltage power chip of a power module according to some embodiments;

图4为根据一些实施例的一种功率模块的截面图;FIG4 is a cross-sectional view of a power module according to some embodiments;

图5为根据一些实施例的另一种功率模块的截面图;FIG5 is a cross-sectional view of another power module according to some embodiments;

图6为根据一些实施例的又一种功率模块的截面图;FIG6 is a cross-sectional view of yet another power module according to some embodiments;

图7为根据一些实施例的又一种功率模块的结构图;FIG7 is a structural diagram of another power module according to some embodiments;

图8为根据一些实施例的又一种功率模块的截面图;FIG8 is a cross-sectional view of yet another power module according to some embodiments;

图9为根据一些实施例的又一种功率模块的截面图;FIG9 is a cross-sectional view of yet another power module according to some embodiments;

图10为根据一些实施例的又一种功率模块的高压二极管的结构图;FIG10 is a structural diagram of a high voltage diode of yet another power module according to some embodiments;

图11为根据一些实施例的又一种功率模块的高压二极管的截面图。FIG. 11 is a cross-sectional view of a high voltage diode of yet another power module according to some embodiments.

具体实施方式DETAILED DESCRIPTION

下面将结合附图,对本公开一些实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本公开一部分实施例,而不是全部的实施例。基于本公开所提供的实施例,本领域普通技术人员所获得的所有其他实施例,都属于本公开保护的范围。The following will be combined with the accompanying drawings to clearly and completely describe the technical solutions in some embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments provided by the present disclosure, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the present disclosure.

除非上下文另有要求,否则,在整个说明书和权利要求书中,术语“包括(comprise)”及其其他形式例如第三人称单数形式“包括(comprises)”和现在分词形式“包括(comprising)”被解释为开放、包含的意思,即为“包含,但不限于”。在说明书的描述中,术语“一个实施例(one embodiment)”、“一些实施例(some embodiments)”、“示例性实施例(exemplary embodiments)”、“示例(example)”、“特定示例(specific example)”或“一些示例(some examples)”等旨在表明与该实施例或示例相关的特定特征、结构、材料或特性包括在本公开的至少一个实施例或示例中。上述术语的示意性表示不一定是指同一实施例或示例。此外,所述的特定特征、结构、材料或特点可以以任何适当方式包括在任何一个或多个实施例或示例中。 Unless the context requires otherwise, throughout the specification and claims, the term "comprise" and other forms thereof, such as the third person singular form "comprises" and the present participle form "comprising", are to be interpreted as open, inclusive, that is, "including, but not limited to". In the description of the specification, the terms "one embodiment", "some embodiments", "exemplary embodiments", "example", "specific example" or "some examples" and the like are intended to indicate that specific features, structures, materials or characteristics associated with the embodiment or example are included in at least one embodiment or example of the present disclosure. The schematic representation of the above terms does not necessarily refer to the same embodiment or example. In addition, the specific features, structures, materials or characteristics may be included in any one or more embodiments or examples in any appropriate manner.

以下,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本公开实施例的描述中,除非另有说明,“多个”的含义是两个或两个以上。In the following, the terms "first" and "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present disclosure, unless otherwise specified, "plurality" means two or more.

在描述一些实施例时,可能使用了“连接”及其衍伸的表达。术语“连接”应做广义理解,例如,“连接”可以是固定连接,也可以是可拆卸连接,或成一体;可以是直接相连,也可以通过中间媒介间接相连。When describing some embodiments, the term "connection" and its derivative expressions may be used. The term "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium.

“A、B和C中的至少一个”与“A、B或C中的至少一个”具有相同含义,均包括以下A、B和C的组合:仅A,仅B,仅C,A和B的组合,A和C的组合,B和C的组合,及A、B和C的组合。“At least one of A, B, and C” has the same meaning as “at least one of A, B, or C” and both include the following combinations of A, B, and C: A only, B only, C only, the combination of A and B, the combination of A and C, the combination of B and C, and the combination of A, B, and C.

“A和/或B”,包括以下三种组合:仅A,仅B,及A和B的组合。“A and/or B” includes the following three combinations: A only, B only, and a combination of A and B.

本文中“适用于”或“被配置为”的使用意味着开放和包容性的语言,其不排除适用于或被配置为执行额外任务或步骤的设备。The use of "adapted to" or "configured to" herein is meant to be open and inclusive language that does not exclude devices adapted or configured to perform additional tasks or steps.

如本文所使用的那样,“约”、“大致”或“近似”包括所阐述的值以及处于特定值的可接受偏差范围内的平均值,其中所述可接受偏差范围如由本领域普通技术人员考虑到正在讨论的测量以及与特定量的测量相关的误差(即,测量系统的局限性)所确定。As used herein, "about," "substantially," or "approximately" includes the stated value and an average value that is within an acceptable range of variation from the particular value as determined by one of ordinary skill in the art taking into account the measurements in question and the errors associated with the measurement of the particular quantity (i.e., the limitations of the measurement system).

如本文所使用的那样,“平行”、“垂直”、“相等”包括所阐述的情况以及与所阐述的情况相近似的情况,该相近似的情况的范围处于可接受偏差范围内,其中所述可接受偏差范围如由本领域普通技术人员考虑到正在讨论的测量以及与特定量的测量相关的误差(即,测量系统的局限性)所确定。例如,“平行”包括绝对平行和近似平行,其中近似平行的可接受偏差范围例如可以是5°以内偏差;“垂直”包括绝对垂直和近似垂直,其中近似垂直的可接受偏差范围例如也可以是5°以内偏差。“相等”包括绝对相等和近似相等,其中近似相等的可接受偏差范围内例如可以是相等的两者之间的差值小于或等于其中任一者的5%。As used herein, "parallel", "perpendicular", and "equal" include the situations described and situations similar to the situations described, and the range of the similar situations is within the acceptable deviation range, wherein the acceptable deviation range is determined by a person of ordinary skill in the art taking into account the measurement in question and the errors associated with the measurement of a particular quantity (i.e., the limitations of the measurement system). For example, "parallel" includes absolute parallelism and approximate parallelism, wherein the acceptable deviation range of approximate parallelism can be, for example, a deviation within 5°; "perpendicular" includes absolute perpendicularity and approximate perpendicularity, wherein the acceptable deviation range of approximate perpendicularity can also be, for example, a deviation within 5°. "Equal" includes absolute equality and approximate equality, wherein the acceptable deviation range of approximate equality can be, for example, the difference between the two equalities is less than or equal to 5% of either one.

本文参照作为理想化示例性附图的剖视图和/或平面图描述了示例性实施方式。在附图中,为了清楚,放大了层和区域的厚度。因此,可设想到由于例如制造技术和/或公差引起的相对于附图的形状的变动。因此,示例性实施方式不应解释为局限于本文示出的区域的形状,而是包括因例如制造而引起的形状偏差。例如,示为矩形的蚀刻区域通常将具有弯曲的特征。因此,附图中所示的区域本质上是示意性的,且它们的形状并非旨在示出设备的区域的实际形状,并且并非旨在限制示例性实施方式的范围。Exemplary embodiments are described herein with reference to cross-sectional views and/or plan views that are idealized exemplary drawings. In the drawings, the thickness of layers and regions are exaggerated for clarity. Therefore, variations in shape relative to the drawings due to, for example, manufacturing techniques and/or tolerances are conceivable. Therefore, the exemplary embodiments should not be interpreted as being limited to the shapes of the regions shown herein, but include shape deviations due to, for example, manufacturing. For example, an etched region shown as a rectangle will typically have curved features. Therefore, the regions shown in the drawings are schematic in nature, and their shapes are not intended to illustrate the actual shape of regions of the device, and are not intended to limit the scope of the exemplary embodiments.

通常,功率模块包括多个芯片,如低压驱动芯片、高压驱动芯片、自举升压芯片、低压功率芯片和高压功率芯片。功率模块的尺寸受到所述多个芯片的尺寸和布置方式的影响。Generally, a power module includes multiple chips, such as a low voltage driver chip, a high voltage driver chip, a bootstrap chip, a low voltage power chip, and a high voltage power chip. The size of the power module is affected by the size and arrangement of the multiple chips.

例如,自举升压芯片具有一定宽度,因此,会在宽度方向上限制功率模块,使功率模块无法在宽度方向上继续缩小。或者,若多个高压功率芯片的布置方式不合理,也会影响功率模块的设计,导致功率模块的尺寸无法缩小,进而会导致功率模块的成本提高,且会降低生产效率。For example, the bootstrap boost chip has a certain width, so the power module will be limited in the width direction, so that the power module cannot be further reduced in the width direction. Alternatively, if the layout of multiple high-voltage power chips is unreasonable, it will also affect the design of the power module, resulting in the inability to reduce the size of the power module, which will in turn increase the cost of the power module and reduce production efficiency.

基于此,本公开的一些实施例提供了一种功率模块1,例如,功率模块1为智能功率模块(Intelligent Power Module,IPM),然而,本公开的一些实施例中的功率模块1还可以是其他类型的功率模块,如晶闸管模块(Thyristor Module)、绝缘栅双极型场效应晶体管模块(Insulated Gate Bipolar Transistor Module)或金属氧化物半导体场效应晶体管模块(Metal-Oxide-Semiconductor Field-Effect Transistor Module)等,本公开对功率模块的类型不做限定。Based on this, some embodiments of the present disclosure provide a power module 1. For example, the power module 1 is an intelligent power module (IPM). However, the power module 1 in some embodiments of the present disclosure may also be other types of power modules, such as a thyristor module, an insulated gate bipolar field effect transistor module or a metal-oxide-semiconductor field-effect transistor module, etc. The present disclosure does not limit the type of power module.

在一些实施例中,如图1所示,功率模块1包括低压驱动芯片100和至少一个低压功率芯片300。In some embodiments, as shown in FIG. 1 , a power module 1 includes a low-voltage driver chip 100 and at least one low-voltage power chip 300 .

低压驱动芯片100与至少一个低压功率芯片300电连接,且被配置为控制至少一个低压功率芯片300的工作状态。例如,低压驱动芯片100可以被配置为接收低电平信号,并根据所述低电平信号,驱动至少一个低压功率芯片300工作,以处理低功率信号,或者,根据所述低电平信号,控制至少一个低压功率芯片300停止工作。The low voltage driver chip 100 is electrically connected to at least one low voltage power chip 300, and is configured to control the working state of at least one low voltage power chip 300. For example, the low voltage driver chip 100 can be configured to receive a low level signal, and drive at least one low voltage power chip 300 to work according to the low level signal to process the low power signal, or, according to the low level signal, control at least one low voltage power chip 300 to stop working.

在一些实施例中,如图1所示,功率模块1还包括高压驱动芯片200和至少一个高压功率芯片400。In some embodiments, as shown in FIG. 1 , the power module 1 further includes a high-voltage driver chip 200 and at least one high-voltage power chip 400 .

高压驱动芯片200与至少一个高压功率芯片400电连接,且被配置为控制至少一个高压功率芯片400的工作状态。例如,高压驱动芯片200被配置为驱动至少一个高压功率芯片400工作,以处理高功率信号,或者,控制至少一个高压功率芯片400停止工作。The high-voltage driver chip 200 is electrically connected to at least one high-voltage power chip 400, and is configured to control the working state of at least one high-voltage power chip 400. For example, the high-voltage driver chip 200 is configured to drive at least one high-voltage power chip 400 to work to process a high-power signal, or to control at least one high-voltage power chip 400 to stop working.

这样,功率模块1能够实现预设功能,例如功率模块1可以进行交流电和直流电之间的转化。 In this way, the power module 1 can realize the preset functions, for example, the power module 1 can perform conversion between alternating current and direct current.

在一些实施例中,如图1所示,功率模块1还包括至少一个自举升压芯片210。至少一个自举升压芯片210集成在高压驱动芯片200中。自举升压芯片210被配置为提供驱动电路所需的附加电压。这样,高压驱动芯片200不仅能够实现对高压功率芯片400的驱动,而且能够实现自举升压功能,从而可以减少功率模块1的芯片数量,有利于降低功率模块1在宽度方向(即如图1所示的S3-S4方向)的尺寸,进而可以提高生产效率。In some embodiments, as shown in FIG1 , the power module 1 further includes at least one bootstrap boost chip 210. At least one bootstrap boost chip 210 is integrated in the high-voltage driver chip 200. The bootstrap boost chip 210 is configured to provide the additional voltage required by the drive circuit. In this way, the high-voltage driver chip 200 can not only drive the high-voltage power chip 400, but also realize the bootstrap boost function, thereby reducing the number of chips in the power module 1, which is conducive to reducing the size of the power module 1 in the width direction (i.e., the S3-S4 direction as shown in FIG1 ), thereby improving production efficiency.

例如,功率模块1包括三个自举升压芯片210,且三个自举升压芯片210集成在高压驱动芯片200中,这样,可以降低功率模块1包含的芯片数量,并对应省去了用于连接自举升压芯片210与高压驱动芯片200的焊线,从而有利于降低成本,和简化功率模块1的封装工艺。For example, the power module 1 includes three bootstrap boost chips 210, and the three bootstrap boost chips 210 are integrated in the high-voltage driver chip 200. In this way, the number of chips included in the power module 1 can be reduced, and the welding wires used to connect the bootstrap boost chip 210 and the high-voltage driver chip 200 are correspondingly omitted, which is beneficial to reduce costs and simplify the packaging process of the power module 1.

在一些实施例中,自举升压芯片210的焊盘面积为0.95mm2至3.7mm2之间的任一值。例如,自举升压芯片210的焊盘面积为0.95mm2至2mm2之间的任一值、2mm2至3mm2之间的任一值,或3mm2至3.7mm2之间的任一值。In some embodiments, the pad area of the bootstrap boost chip 210 is any value between 0.95 mm 2 and 3.7 mm 2. For example, the pad area of the bootstrap boost chip 210 is any value between 0.95 mm 2 and 2 mm 2 , any value between 2 mm 2 and 3 mm 2 , or any value between 3 mm 2 and 3.7 mm 2 .

可以理解的是,通过调整自举升压芯片210的焊盘在高压驱动芯片200上的占用面积(如0.95mm2),可以在实现自举升压芯片210的自举功能的同时,降低自举升压芯片210的材料成本。It is understandable that by adjusting the occupied area of the pad of the bootstrap boost chip 210 on the high-voltage driver chip 200 (eg, 0.95 mm 2 ), the material cost of the bootstrap boost chip 210 can be reduced while achieving the bootstrap function of the bootstrap boost chip 210 .

在一些实施例中,如图1所示,低压驱动芯片100和高压驱动芯片200沿功率模块1的长度方向(即如图1所示的S1-S2方向)排布,低压功率芯片300和高压功率芯片400可以沿功率模块1的所述长度方向排布。这样,有利于提高功率模块1的空间利用率,且有利于缩小功率模块1的体积。In some embodiments, as shown in FIG1 , the low voltage driver chip 100 and the high voltage driver chip 200 are arranged along the length direction of the power module 1 (i.e., the S1-S2 direction shown in FIG1 ), and the low voltage power chip 300 and the high voltage power chip 400 can be arranged along the length direction of the power module 1. In this way, it is beneficial to improve the space utilization of the power module 1 and to reduce the volume of the power module 1.

在一些实施例中,如图1和图2所示,至少一个高压功率芯片400包括多个高压功率芯片400。高压功率芯片400包括漂移层410。多个高压功率芯片400中的至少两个相邻的高压功率芯片400的漂移层410被构造为一体件,以使至少两个相邻的高压功率芯片400被集成为一体结构。这样,有利于提高功率模块1的空间利用率,且有利于缩小功率模块1的体积。In some embodiments, as shown in FIG. 1 and FIG. 2 , at least one high-voltage power chip 400 includes a plurality of high-voltage power chips 400. The high-voltage power chip 400 includes a drift layer 410. The drift layers 410 of at least two adjacent high-voltage power chips 400 among the plurality of high-voltage power chips 400 are constructed as an integral piece, so that at least two adjacent high-voltage power chips 400 are integrated into an integral structure. In this way, it is beneficial to improve the space utilization of the power module 1 and to reduce the volume of the power module 1.

需要说明的是,至少两个相邻的高压功率芯片400集成为一体指的是:相邻的高压功率芯片400可以同步地安装至功率模块1中,或者,可以同步地从功率模块1中拆除。并且,相邻的高压功率芯片400之间具有一定的连接强度。It should be noted that at least two adjacent high-voltage power chips 400 are integrated into one, which means that the adjacent high-voltage power chips 400 can be synchronously installed in the power module 1, or can be synchronously removed from the power module 1. In addition, the adjacent high-voltage power chips 400 have a certain connection strength.

可以理解的是,通过将相邻的高压功率芯片400集成为一体,可以有效地降低相邻的两个高压功率芯片400之间的距离。例如,相邻的高压功率芯片400相接触,或间隔开预定距离(如小于1mm)。这样,可以减小功率模块1的尺寸,降低制造成本,且有利于缩短高压功率芯片400与其他部件(如功率芯片基座600)之间的连接线的长度,从而可节省导线的物料,并降低冲线风险。It is understandable that by integrating adjacent high-voltage power chips 400 into one, the distance between two adjacent high-voltage power chips 400 can be effectively reduced. For example, adjacent high-voltage power chips 400 are in contact, or spaced apart by a predetermined distance (such as less than 1 mm). In this way, the size of the power module 1 can be reduced, the manufacturing cost can be reduced, and the length of the connection line between the high-voltage power chip 400 and other components (such as the power chip base 600) can be shortened, thereby saving wire materials and reducing the risk of wire collision.

此外,由于至少两个相邻的高压功率芯片400的漂移层410构造成一体件,因此,相邻的高压功率芯片400在加工时无需划片,从而减少了生产工艺,提高了生产效率。In addition, since the drift layers 410 of at least two adjacent high-voltage power chips 400 are constructed as an integral piece, the adjacent high-voltage power chips 400 do not need to be diced during processing, thereby reducing production processes and improving production efficiency.

例如,参见图1,至少一个高压功率芯片400包括三个高压功率芯片400。三个高压功率芯片400在划片时未划开(即三个高压功率芯片400的漂移层为一体件),且相邻的两个高压功率芯片400之间通过第一分隔部间隔开,相邻的两个高压功率芯片400之间功能独立。这样,在安装高压功率芯片400时,可以同时安装三个高压功率芯片400,从而有利于提高功率模块1的封装效率。For example, referring to FIG. 1 , at least one high-voltage power chip 400 includes three high-voltage power chips 400. The three high-voltage power chips 400 are not separated during dicing (i.e., the drift layers of the three high-voltage power chips 400 are an integrated piece), and two adjacent high-voltage power chips 400 are separated by a first partition, and the functions of the two adjacent high-voltage power chips 400 are independent. In this way, when installing the high-voltage power chips 400, the three high-voltage power chips 400 can be installed at the same time, which is beneficial to improve the packaging efficiency of the power module 1.

需要说明的是,图1所示的三个高压功率芯片400仅是对至少一个高压功率芯片400的一种情况的示例,而不能看作是对至少一个高压功率芯片400的数量的限制。在一些实施例中,至少一个高压功率芯片400可以包括一个高压功率芯片400,也可以包括两个高压功率芯片400、四个高压功率芯片400或更多个高压功率芯片400。It should be noted that the three high-voltage power chips 400 shown in FIG1 are merely an example of a case of at least one high-voltage power chip 400, and cannot be regarded as a limitation on the number of at least one high-voltage power chip 400. In some embodiments, the at least one high-voltage power chip 400 may include one high-voltage power chip 400, or may include two high-voltage power chips 400, four high-voltage power chips 400, or more high-voltage power chips 400.

在一些实施例中,如图3所示,高压功率芯片400包括第一有源区420和第一终端区430,第一终端区430围绕第一有源区420设置,且第一终端区430位于高压功率芯片400的边缘处。如图2所示,第一终端区430包括第一钝化层431,第一钝化层431设置在漂移层410的一侧表面。例如,相邻高压功率芯片400的第一钝化层431间隔开设置,且相邻高压功率芯片400的第一钝化层431之间限定出第一分隔部440。例如,第一分隔部440为凹槽,且第一分隔部440的一部分位于漂移层410中。In some embodiments, as shown in FIG3 , the high-voltage power chip 400 includes a first active region 420 and a first terminal region 430, the first terminal region 430 is arranged around the first active region 420, and the first terminal region 430 is located at the edge of the high-voltage power chip 400. As shown in FIG2 , the first terminal region 430 includes a first passivation layer 431, and the first passivation layer 431 is arranged on one side surface of the drift layer 410. For example, the first passivation layers 431 of adjacent high-voltage power chips 400 are spaced apart, and a first partition 440 is defined between the first passivation layers 431 of adjacent high-voltage power chips 400. For example, the first partition 440 is a groove, and a portion of the first partition 440 is located in the drift layer 410.

需要说明的是,第一钝化层431不限于设置在第一终端区430中,在一些实施例中,第一钝化层431亦可设置在第一有源区420中。It should be noted that the first passivation layer 431 is not limited to being disposed in the first terminal region 430 . In some embodiments, the first passivation layer 431 may also be disposed in the first active region 420 .

在一些实施例中,第一钝化层431设置在漂移层410的相对两侧,且第一分隔部440形成在第一钝化层431中。 In some embodiments, the first passivation layer 431 is disposed at opposite sides of the drift layer 410 , and the first separator 440 is formed in the first passivation layer 431 .

可以理解的是,第一分隔部440可以将相邻的两个高压功率芯片400进行物理分隔,使相邻的两个高压功率芯片400的第一钝化层431不接触,从而有利于提高高压功率芯片400的可靠性。It is understandable that the first separator 440 can physically separate two adjacent high-voltage power chips 400 so that the first passivation layers 431 of the two adjacent high-voltage power chips 400 do not contact each other, thereby facilitating improving the reliability of the high-voltage power chip 400 .

在一些实施例中,在制作功率模块1的过程中,可以通过光罩对相邻的两个高压功率芯片400之间的区域极性进行定义,以形成至少一个第一分隔部440。这样,至少一个第一分隔部440和多个高压功率芯片400可以同步形成,从而有利于简化生产步骤,提高生产效率。In some embodiments, during the process of manufacturing the power module 1, the polarity of the region between two adjacent high-voltage power chips 400 can be defined by a mask to form at least one first partition 440. In this way, at least one first partition 440 and a plurality of high-voltage power chips 400 can be formed simultaneously, thereby simplifying the production steps and improving production efficiency.

在一些实施例,如图2所示,漂移层410的一侧表面的对应第一分隔部440的位置设有第一电气隔离部450,也就是说,第一电气隔离部450设置在第一分隔部440中,这样,第一分隔部440和第一电气隔离部450可以沿同一方向形成,以提高生产效率。第一电气隔离部450被配置为将相邻的两个高压功率芯片400电气分隔,以避免相邻两个高压功率芯片400之间电导通,从而可以防止出现短路等问题。In some embodiments, as shown in FIG. 2 , a first electrical isolation portion 450 is provided at a position corresponding to the first partition portion 440 on one side surface of the drift layer 410, that is, the first electrical isolation portion 450 is provided in the first partition portion 440, so that the first partition portion 440 and the first electrical isolation portion 450 can be formed in the same direction to improve production efficiency. The first electrical isolation portion 450 is configured to electrically isolate two adjacent high-voltage power chips 400 to avoid electrical conduction between the two adjacent high-voltage power chips 400, thereby preventing problems such as short circuits.

在一些实施例中,如图2所示,第一电气隔离部450的靠近第一钝化层431的一侧表面,与漂移层410的靠近第一钝化层431的一侧表面平齐。这样,使得第一电气隔离部450与漂移层410之间的过渡平滑,便于加工。In some embodiments, as shown in Fig. 2, a surface of the first electrical isolation portion 450 close to the first passivation layer 431 is flush with a surface of the drift layer 410 close to the first passivation layer 431. In this way, the transition between the first electrical isolation portion 450 and the drift layer 410 is smooth, which is convenient for processing.

在一些实施例中,在制作功率模块1的过程中,可以通过向第一分隔部440中注入预设掺杂浓度的离子,以形成第一电气隔离部450。例如,漂移层410为低掺杂N型半导体,第一电气隔离部450为高掺杂N型半导体,且第一电气隔离部450的厚度小于漂移层410的厚度。In some embodiments, during the process of manufacturing the power module 1, ions of a preset doping concentration may be implanted into the first partition 440 to form the first electrical isolation portion 450. For example, the drift layer 410 is a low-doped N-type semiconductor, the first electrical isolation portion 450 is a high-doped N-type semiconductor, and the thickness of the first electrical isolation portion 450 is less than the thickness of the drift layer 410.

可以理解的是,第一电气隔离部450形成于漂移层410的朝向第一分隔部440的一侧,由于第一分隔部440的设置,便于向漂移层410(也即第一分隔部440)内注入离子,并形成第一电气隔离部450,且有利于提高第一电气隔离部450对电气隔离的可靠性。It can be understood that the first electrical isolation part 450 is formed on the side of the drift layer 410 facing the first separation part 440. Due to the setting of the first separation part 440, it is convenient to inject ions into the drift layer 410 (that is, the first separation part 440) and form the first electrical isolation part 450, and it is beneficial to improve the reliability of electrical isolation of the first electrical isolation part 450.

在一些实施例中,如图2所示,高压功率芯片400还包括场截止层401。场截止层401设置在漂移层410的背离第一钝化层431的一侧表面,且被配置为控制高压功率芯片400中的电场分布,以及防止栅极电荷流向半导体材料。至少两个相邻的高压功率芯片400的场截止层401被构造成一体件。In some embodiments, as shown in FIG2 , the high-voltage power chip 400 further includes a field stop layer 401. The field stop layer 401 is disposed on a surface of the drift layer 410 that is away from the first passivation layer 431 and is configured to control the electric field distribution in the high-voltage power chip 400 and prevent gate charge from flowing to the semiconductor material. The field stop layers 401 of at least two adjacent high-voltage power chips 400 are constructed as an integral piece.

在一些实施例中,如图2所示,高压功率芯片400还包括集电极层402。集电极层402设置在场截止层401的背离漂移层410的一侧表面,集电极层402是高压功率芯片400中的主要电流通道,且被配置为承担电流负载。至少两个相邻的高压功率芯片400的集电极层402被构造成一体件。In some embodiments, as shown in FIG2 , the high-voltage power chip 400 further includes a collector layer 402. The collector layer 402 is disposed on a surface of the field stop layer 401 that is away from the drift layer 410. The collector layer 402 is a main current channel in the high-voltage power chip 400 and is configured to bear the current load. The collector layers 402 of at least two adjacent high-voltage power chips 400 are constructed as an integral piece.

在一些实施例中,如图2所示,高压功率芯片400还包括金属层403。金属层403设置在集电极层402的背离场截止层401的一侧表面,且被配置为实现高压功率芯片400的电连接,以及辅助高压功率芯片400散热。至少两个相邻的高压功率芯片400的金属层403被构造成一体件。In some embodiments, as shown in FIG2 , the high-voltage power chip 400 further includes a metal layer 403. The metal layer 403 is disposed on a surface of the collector layer 402 that is away from the field stop layer 401, and is configured to achieve electrical connection of the high-voltage power chip 400 and assist in heat dissipation of the high-voltage power chip 400. The metal layers 403 of at least two adjacent high-voltage power chips 400 are constructed as an integral piece.

换言之,漂移层410、场截止层401、集电极层402和金属层403可以沿高压功率芯片400的厚度方向依次层叠设置。In other words, the drift layer 410 , the field stop layer 401 , the collector layer 402 and the metal layer 403 may be stacked in sequence along the thickness direction of the high-voltage power chip 400 .

可以理解的是,通过将相邻两个高压功率芯片400的场截止层401、集电极层402和金属层403都构造为一体件,从而可以提高相邻的两个高压功率芯片400之间的连接强度,且可以确保相邻的两个高压功率芯片400之间的相对位置的准确性,从而便于高压功率芯片400的装配。It can be understood that by constructing the field stop layer 401, collector layer 402 and metal layer 403 of two adjacent high-voltage power chips 400 as an integrated piece, the connection strength between the two adjacent high-voltage power chips 400 can be improved, and the accuracy of the relative position between the two adjacent high-voltage power chips 400 can be ensured, thereby facilitating the assembly of the high-voltage power chips 400.

在一些实施例中,低压功率芯片300和高压功率芯片400中的至少一个为逆导型绝缘栅双极型晶体管(RC-IGBT)。In some embodiments, at least one of the low voltage power chip 300 and the high voltage power chip 400 is a reverse conducting insulated gate bipolar transistor (RC-IGBT).

在一些实施例中,低压功率芯片300和高压功率芯片400中的至少一个为金属-氧化物半导体场效应晶体管(MOSFET)。In some embodiments, at least one of the low voltage power chip 300 and the high voltage power chip 400 is a metal-oxide semiconductor field effect transistor (MOSFET).

这样,低压功率芯片300和高压功率芯片400的种类可以根据功率模块1的使用场景进行选择和设置,从而可以丰富功率模块1的适用场景。In this way, the types of the low-voltage power chip 300 and the high-voltage power chip 400 can be selected and set according to the use scenario of the power module 1, thereby enriching the applicable scenarios of the power module 1.

如上设置,使得低压功率芯片300和高压功率芯片400可以实现相同的功能,从而可以减少功率模块1上的芯片数量。例如,功率模块1包括一个低压驱动芯片100、一个高压驱动芯片200、三个低压功率芯片300和三个高压功率芯片400。As configured above, the low voltage power chip 300 and the high voltage power chip 400 can achieve the same function, thereby reducing the number of chips on the power module 1. For example, the power module 1 includes a low voltage driver chip 100, a high voltage driver chip 200, three low voltage power chips 300 and three high voltage power chips 400.

在一些实施例中,高压驱动芯片200包括电源端和高侧悬浮供电端,自举升压芯片210的正极端与高压驱动芯片200的电源端电连接,自举升压芯片210的负极端与高压驱动芯片200的高侧悬浮供电端电连接。In some embodiments, the high-voltage driver chip 200 includes a power supply end and a high-side floating power supply end, the positive end of the bootstrap boost chip 210 is electrically connected to the power supply end of the high-voltage driver chip 200, and the negative end of the bootstrap boost chip 210 is electrically connected to the high-side floating power supply end of the high-voltage driver chip 200.

这样,可以实现自举升压芯片的正负极的电连接,且便于功率模块1的组装和拆卸。 In this way, the electrical connection between the positive and negative electrodes of the bootstrap boost chip can be achieved, and the assembly and disassembly of the power module 1 is facilitated.

在一些实施例中,如图1和图4所示,功率模块1还包括封装外壳500。低压驱动芯片100、高压驱动芯片200、低压功率芯片300和高压功率芯片400被封装于封装外壳500内。沿功率模块1的宽度方向,封装外壳500的相对两侧分别为功率模块1的控制侧(即如图1所示的方向S4指向的一侧)和功率侧(即如图1所示的方向S3指向的一侧)。In some embodiments, as shown in FIG. 1 and FIG. 4 , the power module 1 further includes a package shell 500. The low voltage driver chip 100, the high voltage driver chip 200, the low voltage power chip 300, and the high voltage power chip 400 are packaged in the package shell 500. Along the width direction of the power module 1, the opposite sides of the package shell 500 are respectively the control side (i.e., the side pointed by the direction S4 as shown in FIG. 1 ) and the power side (i.e., the side pointed by the direction S3 as shown in FIG. 1 ) of the power module 1.

在一些实施例中,如图1和图4所示,功率模块1还包括功率芯片基座600,功率芯片基座600的至少一部分被封装于封装外壳500内,低压功率芯片300和高压功率芯片400设置在功率芯片基座600上。In some embodiments, as shown in FIGS. 1 and 4 , the power module 1 further includes a power chip base 600 , at least a portion of which is encapsulated in a packaging shell 500 , and the low voltage power chip 300 and the high voltage power chip 400 are disposed on the power chip base 600 .

在一些实施例中,如图1和图4所示,功率模块1还包括控制侧引线框架700。控制侧引线框架700连接功率芯片基座600,且控制侧引线框架700的至少一部分被封装在封装外壳500内。控制侧引线框架700包括低压芯片基岛710、高压芯片基岛720和多个控制侧引脚730。低压驱动芯片100设置在低压芯片基岛710上,高压驱动芯片200设置在高压芯片基岛720上,多个控制侧引脚730被配置为与低压驱动芯片100和高压驱动芯片200电连接,且从所述控制侧延伸至封装外壳500的外侧。In some embodiments, as shown in FIGS. 1 and 4 , the power module 1 further includes a control side lead frame 700. The control side lead frame 700 is connected to the power chip base 600, and at least a portion of the control side lead frame 700 is encapsulated in the package shell 500. The control side lead frame 700 includes a low voltage chip base island 710, a high voltage chip base island 720, and a plurality of control side pins 730. The low voltage driver chip 100 is disposed on the low voltage chip base island 710, the high voltage driver chip 200 is disposed on the high voltage chip base island 720, and the plurality of control side pins 730 are configured to be electrically connected to the low voltage driver chip 100 and the high voltage driver chip 200, and extend from the control side to the outside of the package shell 500.

在一些实施例中,如图1和图4所示,功率模块1还包括功率侧引线框架800。功率侧引线框架800连接功率芯片基座600,且功率侧引线框架800的至少一部分被封装在封装外壳500内。功率侧引线框架800包括多个功率侧引脚810,多个功率侧引脚810被配置为与低压功率芯片300和高压功率芯片400电连接,且从所述功率侧延伸至伸出封装外壳500的外侧。In some embodiments, as shown in FIGS. 1 and 4 , the power module 1 further includes a power side lead frame 800. The power side lead frame 800 is connected to the power chip base 600, and at least a portion of the power side lead frame 800 is encapsulated in the package housing 500. The power side lead frame 800 includes a plurality of power side pins 810, which are configured to be electrically connected to the low voltage power chip 300 and the high voltage power chip 400, and extend from the power side to extend out of the package housing 500.

这样,当功率模块1运行时,多个控制侧引脚730和多个功率侧引脚810可以与外部电路电连接,从而实现功率模块1内部电路与外部电路的电连接,形成电气回路,使功率模块1可以运作。In this way, when the power module 1 is running, multiple control side pins 730 and multiple power side pins 810 can be electrically connected to the external circuit, thereby realizing the electrical connection between the internal circuit of the power module 1 and the external circuit, forming an electrical loop, so that the power module 1 can operate.

例如,控制侧引线框架700可以通过多个控制侧引脚730将低压驱动芯片100和高压驱动芯片200与外界电气件连接,且多个控制侧引脚730能够实现同步拆装,从而降低了智能功率模块1的拆装难度。For example, the control side lead frame 700 can connect the low voltage driver chip 100 and the high voltage driver chip 200 to external electrical components through multiple control side pins 730, and multiple control side pins 730 can be disassembled and assembled synchronously, thereby reducing the difficulty of disassembling and assembling the intelligent power module 1.

在一些实施例中,控制侧引线框架700通过金线、者铜线或其他电阻率小的材料,与低压驱动芯片100和高压驱动芯片200连接。在一些实施例中,功率侧引线框架800通过金线、铜线或其他电阻率小的材料,与低压功率芯片300和高压功率芯片400连接。In some embodiments, the control-side lead frame 700 is connected to the low-voltage driver chip 100 and the high-voltage driver chip 200 through gold wires, copper wires or other materials with low resistivity. In some embodiments, the power-side lead frame 800 is connected to the low-voltage power chip 300 and the high-voltage power chip 400 through gold wires, copper wires or other materials with low resistivity.

可以理解的是,由于自举升压芯片集成在高压驱动芯片200中,因此,功率芯片基座600的尺寸会增大,从而使得功率芯片基座600的散热面积增大,有利于提高功率模块1散热性能和可靠性。并且,多个控制侧引脚730中的部分控制侧引脚730与高压芯片基岛720之间焊线的长度可以缩短,从而有利于节省焊线的物料,降低成本。It is understandable that, since the bootstrap boost chip is integrated in the high-voltage driver chip 200, the size of the power chip base 600 will increase, thereby increasing the heat dissipation area of the power chip base 600, which is beneficial to improving the heat dissipation performance and reliability of the power module 1. In addition, the length of the bonding wire between some of the control side pins 730 and the high-voltage chip base island 720 can be shortened, which is beneficial to saving materials for bonding wires and reducing costs.

在一些实施例中,多个控制侧引脚730和多个功率侧引脚810可以为金属铜材料件,或铜合金材料件。在一些实施例中,多个控制侧引脚730和多个功率侧引脚810也可以是其他具有良好导电性能的材料制成的材料件。In some embodiments, the plurality of control side pins 730 and the plurality of power side pins 810 may be made of metal copper or copper alloy. In some embodiments, the plurality of control side pins 730 and the plurality of power side pins 810 may also be made of other materials with good electrical conductivity.

在一些实施例中,封装外壳500可以为环氧树脂材料件。可以理解的是,环氧树脂材料具备较高的抗压强度、绝缘性,从而封装外壳500可以向其内部的芯片提供物理和电气保护,防止外部环境冲击芯片。在一些实施例中,封装外壳500也可以通过其他抗压强度高且绝缘性好的材料制成。In some embodiments, the package shell 500 may be made of epoxy resin. It is understood that epoxy resin has high compressive strength and insulation, so that the package shell 500 can provide physical and electrical protection to the chip inside it to prevent the external environment from impacting the chip. In some embodiments, the package shell 500 can also be made of other materials with high compressive strength and good insulation.

在一些实施例中,低压驱动芯片100和高压驱动芯片200通过银胶或者其他粘性材料粘接在控制侧引线框架700上,控制侧引线框架700和功率侧引线框架800通过锡膏印刷或者激光焊接与功率芯片基座600进行预固定,低压功率芯片300和高压功率芯片400可以通过锡膏印刷与功率芯片基座600连接。In some embodiments, the low-voltage driver chip 100 and the high-voltage driver chip 200 are bonded to the control side lead frame 700 by silver glue or other adhesive materials, the control side lead frame 700 and the power side lead frame 800 are pre-fixed with the power chip base 600 by solder paste printing or laser welding, and the low-voltage power chip 300 and the high-voltage power chip 400 can be connected to the power chip base 600 by solder paste printing.

这样,通过封装外壳500可以对低压驱动芯片100、高压驱动芯片200、低压功率芯片300、高压功率芯片400以及功率芯片基座600的至少一部分实现封装,从而不仅能够避免低压驱动芯片100、高压驱动芯片200、低压功率芯片300、高压功率芯片400以及功率芯片基座600损坏,又能够防止低压驱动芯片100、高压驱动芯片200、低压功率芯片300和高压功率芯片400与外界发生电导通,有利于提高功率模块1的稳定性和可靠性。In this way, the low-voltage driver chip 100, the high-voltage driver chip 200, the low-voltage power chip 300, the high-voltage power chip 400 and at least a part of the power chip base 600 can be packaged through the packaging shell 500, thereby not only avoiding damage to the low-voltage driver chip 100, the high-voltage driver chip 200, the low-voltage power chip 300, the high-voltage power chip 400 and the power chip base 600, but also preventing the low-voltage driver chip 100, the high-voltage driver chip 200, the low-voltage power chip 300 and the high-voltage power chip 400 from being electrically connected to the outside world, which is beneficial to improving the stability and reliability of the power module 1.

在一些实施例中,如图1所示,多个控制侧引脚730包括至少两个高侧悬浮供电引脚731,高侧悬浮供电引脚731与高压驱动芯片200电连接。例如,高侧悬浮供电引脚731与高压驱动芯片200通过连接线电连接,连接线的长度为0.4mm至3.2mm之间的任一值。 In some embodiments, as shown in FIG1 , the plurality of control-side pins 730 include at least two high-side suspended power supply pins 731, and the high-side suspended power supply pins 731 are electrically connected to the high-voltage driver chip 200. For example, the high-side suspended power supply pins 731 are electrically connected to the high-voltage driver chip 200 via a connecting wire, and the length of the connecting wire is any value between 0.4 mm and 3.2 mm.

可以理解的是,通过将自举升压芯片210集成在高压驱动芯片200上,可以缩短高侧悬浮供电引脚731与高压驱动芯片200之间的距离,从而缩短了连接线的长度。例如,连接线可以缩短至0.4mm,从而节省了连接线的物料成本,且便于高侧悬浮供电引脚731与高压驱动芯片200之间的连接。It is understandable that by integrating the bootstrap boost chip 210 on the high-voltage driver chip 200, the distance between the high-side suspended power supply pin 731 and the high-voltage driver chip 200 can be shortened, thereby shortening the length of the connection line. For example, the connection line can be shortened to 0.4 mm, thereby saving the material cost of the connection line and facilitating the connection between the high-side suspended power supply pin 731 and the high-voltage driver chip 200.

例如,连接线的长度为0.4mm至1mm之间的任一值、1mm至1.6mm之间的任一值、1.6mm至2.4mm之间的任一值,或2.4mm至3.2mm之间的任一值。For example, the length of the connecting line is any value between 0.4 mm and 1 mm, any value between 1 mm and 1.6 mm, any value between 1.6 mm and 2.4 mm, or any value between 2.4 mm and 3.2 mm.

定义功率模块1的宽度方向和长度方向所限定的平面为参考平面。高侧悬浮供电引脚731在所述参考平面上的正投影的靠近高压驱动芯片200的一侧边沿,与封装外壳500的正投影的靠近所述控制侧的边沿之间的距离为L1,且距离L1为1.4mm至2.05mm之间的任一值。这样,有利于减小高侧悬浮供电引脚731在封装外壳500上的占用面积,节省高侧悬浮供电引脚731的用料,并提高高侧悬浮供电引脚731的结构强度。The plane defined by the width direction and the length direction of the power module 1 is defined as the reference plane. The distance between the edge of the side of the orthographic projection of the high-side floating power supply pin 731 on the reference plane close to the high-voltage driver chip 200 and the edge of the orthographic projection of the package shell 500 close to the control side is L1, and the distance L1 is any value between 1.4mm and 2.05mm. In this way, it is beneficial to reduce the occupied area of the high-side floating power supply pin 731 on the package shell 500, save the material of the high-side floating power supply pin 731, and improve the structural strength of the high-side floating power supply pin 731.

可以理解的是,通过减小控制侧引线框架700(如供电引脚731)在封装外壳500上的占用空间,从而可以增加功率芯片基座600在功率模块1的宽度方向上的尺寸(如,增加1.9mm),从而有利于功率模块1通过功率芯片基座600与外界进行热量交换,提高了功率模块1的散热性能和运行的可靠性。It can be understood that by reducing the space occupied by the control side lead frame 700 (such as the power supply pin 731) on the packaging shell 500, the size of the power chip base 600 in the width direction of the power module 1 can be increased (for example, increased by 1.9 mm), which is beneficial for the power module 1 to exchange heat with the outside world through the power chip base 600, thereby improving the heat dissipation performance and operation reliability of the power module 1.

例如,距离L1为1.4mm至1.6mm之间的任一值,1.6mm至1.8mm之间的任一值,或1.8mm至2.05mm之间的任一值。For example, the distance L1 is any value between 1.4 mm and 1.6 mm, any value between 1.6 mm and 1.8 mm, or any value between 1.8 mm and 2.05 mm.

在一些实施例中,沿功率模块1的长度方向,至少两个高侧悬浮供电引脚731的两侧边沿,位于高压芯片基岛720的两侧边沿之间。并且,高侧悬浮供电引脚731的数量可以与高压功率芯片400的数量对应。这样,可以缩短距离L1,便于高侧悬浮供电引脚731与高压驱动芯片200之间的电连接,有利于减小功率模块1在宽度方向上的尺寸。In some embodiments, along the length direction of the power module 1, the two side edges of at least two high-side suspended power supply pins 731 are located between the two side edges of the high-voltage chip base island 720. In addition, the number of high-side suspended power supply pins 731 may correspond to the number of high-voltage power chips 400. In this way, the distance L1 can be shortened, which facilitates the electrical connection between the high-side suspended power supply pins 731 and the high-voltage driver chip 200, and helps to reduce the size of the power module 1 in the width direction.

在一些实施例中,高侧悬浮供电引脚731与高压芯片基岛720之间通过间隙隔开,从而有利于减小高侧悬浮供电引脚731与高压芯片基岛720之间的距离,进而减小控制侧引线框架700在宽度方向上的尺寸。需要说明的是,上述间隙的大小可以根据实际需求设置,例如,间隙的宽度可以为0.1mm、0.25mm、0.5mm或1mm等。In some embodiments, the high-side floating power supply pin 731 is separated from the high-voltage chip base island 720 by a gap, which is conducive to reducing the distance between the high-side floating power supply pin 731 and the high-voltage chip base island 720, thereby reducing the width of the control-side lead frame 700. It should be noted that the size of the above gap can be set according to actual needs, for example, the width of the gap can be 0.1mm, 0.25mm, 0.5mm or 1mm, etc.

在一些实施例中,如图1所示,高压芯片基岛720在所述参考平面上的正投影的朝向控制侧的边沿,与封装外壳500在所述参考平面上正投影的朝向所述控制侧的边沿之间的距离为L2,且L2为1.8mm至2.45mm之间的任一值。In some embodiments, as shown in FIG. 1 , the distance between the edge of the high-voltage chip base island 720 projected on the reference plane toward the control side and the edge of the package shell 500 projected on the reference plane toward the control side is L2, and L2 is any value between 1.8 mm and 2.45 mm.

例如,L2为1.8mm至2.0mm之间的任一值,2.0mm至2.2mm之间的任一值,或2.2mm至2.45mm之间的任一值。For example, L2 is any value between 1.8 mm and 2.0 mm, any value between 2.0 mm and 2.2 mm, or any value between 2.2 mm and 2.45 mm.

至少两个高侧悬浮供电引脚731的至少一部分位于高压芯片基岛720在所述参考平面上的正投影的朝向控制侧的边沿,与封装外壳500在所述参考平面上正投影的朝向所述控制侧的边沿之间。At least a portion of at least two high-side floating power supply pins 731 is located between an edge of the high-voltage chip island 720 projected on the reference plane toward the control side and an edge of the package housing 500 projected on the reference plane toward the control side.

可以理解的是,由于高侧悬浮供电引脚731在功率模块1的宽度方向的尺寸较小,从而可以缩短高压芯片基岛720在所述参考平面上的正投影的朝向控制侧的边沿,与封装外壳500在所述参考平面上正投影的朝向所述控制侧的边沿之间的距离。It can be understood that since the high-side floating power supply pin 731 is smaller in the width direction of the power module 1, the distance between the edge of the high-voltage chip base island 720 projected on the reference plane toward the control side and the edge of the packaging shell 500 projected on the reference plane toward the control side can be shortened.

在一些实施例中,如图1所示,多个控制侧引脚730包括至少两个高侧悬浮供电引脚731,至少两个高侧悬浮供电引脚731与高压驱动芯片200电连接。在所述参考平面内,至少两个高侧悬浮供电引脚731中的任一个高侧悬浮供电引脚731的正投影的面积为1.8mm2至3mm2之间的任一值。In some embodiments, as shown in FIG1 , the plurality of control-side pins 730 include at least two high-side suspended power supply pins 731, and the at least two high-side suspended power supply pins 731 are electrically connected to the high-voltage driver chip 200. In the reference plane, the area of the orthographic projection of any one of the at least two high-side suspended power supply pins 731 is any value between 1.8 mm 2 and 3 mm 2 .

例如,任一个高侧悬浮供电引脚731的正投影的面积为1.8mm2至2.2mm2之间的任一值、2.2mm2至2.6mm2之间的任一值,或者,2.6mm2至3mm2之间的任一值。For example, the area of the orthographic projection of any high-side floating power pin 731 is any value between 1.8 mm 2 and 2.2 mm 2 , any value between 2.2 mm 2 and 2.6 mm 2 , or any value between 2.6 mm 2 and 3 mm 2 .

可以理解的是,当任一个高侧悬浮供电引脚731在所述参考平面上的正投影的面积小于1.8mm2时,高侧悬浮供电引脚731在封装外壳500上占用的空间较小,不利于高侧悬浮供电引脚731的运行。当任一个高侧悬浮供电引脚731在所述参考平面上的正投影的面积大于3mm2时,高侧悬浮供电引脚731在封装外壳500上占用的空间较大,减小了功率模块1与其它散热部件的接触面积,影响了功率模块1的散热性能。It is understandable that when the area of the orthographic projection of any high-side floating power supply pin 731 on the reference plane is less than 1.8 mm2 , the space occupied by the high-side floating power supply pin 731 on the package shell 500 is small, which is not conducive to the operation of the high-side floating power supply pin 731. When the area of the orthographic projection of any high-side floating power supply pin 731 on the reference plane is greater than 3 mm2 , the space occupied by the high-side floating power supply pin 731 on the package shell 500 is large, which reduces the contact area between the power module 1 and other heat dissipation components and affects the heat dissipation performance of the power module 1.

因此,通过设置任一个高侧悬浮供电引脚731在所述参考平面上的正投影的面积在1.8mm2至3mm2之间,使得高侧悬浮供电引脚731在封装外壳500上占用较小空间的同时,保证了功率模块1的散热效率,从而提高了功率模块1的可靠性和稳定性。 Therefore, by setting the area of the orthographic projection of any high-side floating power supply pin 731 on the reference plane to be between 1.8 mm 2 and 3 mm 2 , the high-side floating power supply pin 731 occupies a smaller space on the packaging shell 500 while ensuring the heat dissipation efficiency of the power module 1, thereby improving the reliability and stability of the power module 1.

在一些实施例中,高侧悬浮供电引脚731的数量与高压功率芯片400的数量对应。并且,任一个高侧悬浮供电引脚731在功率模块1的长度方向上与高压芯片基岛720间隔开布置。In some embodiments, the number of the high-side floating power pins 731 corresponds to the number of the high-voltage power chips 400 . In addition, any high-side floating power pin 731 is spaced apart from the high-voltage chip island 720 in the length direction of the power module 1 .

可以理解的是,高侧悬浮供电引脚731与高压驱动芯片200通过打线连接,因此,如上设置在预留足够的打线空间的情况下,可以减小功率模块1的长度方向的尺寸,且可以提高引脚的强度。并且高侧悬浮供电引脚731的正投影的面积不会过小,从而便于高压驱动芯片200与高侧悬浮供电引脚731的连接。It can be understood that the high-side floating power supply pin 731 is connected to the high-voltage driver chip 200 by wire bonding, so the above arrangement can reduce the length dimension of the power module 1 and improve the strength of the pin while reserving enough wire bonding space. In addition, the area of the orthographic projection of the high-side floating power supply pin 731 will not be too small, thereby facilitating the connection between the high-voltage driver chip 200 and the high-side floating power supply pin 731.

在一些实施例中,如图1所示,多个控制侧引脚730还包括至少一个电源引脚732和至少一个输入引脚733。电源引脚732、输入引脚733和高侧悬浮供电引脚731与高压驱动芯片200电连接。In some embodiments, as shown in FIG1 , the plurality of control-side pins 730 further include at least one power pin 732 and at least one input pin 733. The power pin 732, the input pin 733 and the high-side floating power pin 731 are electrically connected to the high-voltage driver chip 200.

在一些实施例中,电源引脚732位于输入引脚733和高侧悬浮供电引脚731之间,这样,一方面有利于降低电源引脚732在功率模块1的宽度方向上的尺寸,进而降低功率模块1在宽度方向上的尺寸,另一方面,使得电源引脚732可以靠近高压驱动芯片200设置,有利于缩短电源引脚732与高压驱动芯片200之间的距离,且可以缩短电源引脚732的长度,以降低电源引脚732的材料成本。再者,高压芯片基岛720和低压芯片基岛710可以被调整至更靠近控制侧的位置,从而可以缩小控制侧引线框架700在功率模块1的宽度方向上的尺寸。In some embodiments, the power pin 732 is located between the input pin 733 and the high-side floating power supply pin 731. In this way, on the one hand, it is helpful to reduce the size of the power pin 732 in the width direction of the power module 1, thereby reducing the size of the power module 1 in the width direction. On the other hand, the power pin 732 can be arranged close to the high-voltage driver chip 200, which is helpful to shorten the distance between the power pin 732 and the high-voltage driver chip 200, and the length of the power pin 732 can be shortened to reduce the material cost of the power pin 732. Furthermore, the high-voltage chip base island 720 and the low-voltage chip base island 710 can be adjusted to a position closer to the control side, so that the size of the control side lead frame 700 in the width direction of the power module 1 can be reduced.

需要说明的是,本公开的一些实施例并不局限于电源引脚732位于输入引脚733和高侧悬浮供电引脚731之间,在一些实施例中,输入引脚733位于电源引脚732和高侧悬浮供电引脚731之间。这样,可以缩小电源引脚732在高侧悬浮供电引脚731和高压芯片基岛720之间的占用空间,从而可以缩小控制侧引线框架700在功率模块1的宽度方向上的尺寸。另外,该设置方式可以相对缩短电源引脚732的长度,从而降低了电源引脚732的材料成本。It should be noted that some embodiments of the present disclosure are not limited to the power pin 732 being located between the input pin 733 and the high-side suspended power pin 731. In some embodiments, the input pin 733 is located between the power pin 732 and the high-side suspended power pin 731. In this way, the space occupied by the power pin 732 between the high-side suspended power pin 731 and the high-voltage chip base island 720 can be reduced, thereby reducing the size of the control-side lead frame 700 in the width direction of the power module 1. In addition, this arrangement can relatively shorten the length of the power pin 732, thereby reducing the material cost of the power pin 732.

可以理解的是,功率模块1在不同场景应用时,可以选择不同的电源引脚732、输入引脚733和高侧悬浮供电引脚731的布置方式,从而有利于提高功率模块1的适用性。It is understandable that when the power module 1 is used in different scenarios, different arrangements of the power pins 732 , the input pins 733 and the high-side floating power pins 731 may be selected, thereby facilitating improving the applicability of the power module 1 .

在一些实施例中,如图1所示,多个控制侧引脚730还包括至少一个高压驱动芯片连接引脚734,高压驱动芯片连接引脚734与高侧悬浮供电引脚731之间间隔开设置,高压驱动芯片连接引脚734与高侧悬浮供电引脚731之间的最小距离小于或等于预设距离。例如,预设距离为2倍至3倍的高侧悬浮供电引脚731的厚度。例如,预设距离为2倍、2.2倍、2.5倍、2.7倍或3倍的高侧悬浮供电引脚731的厚度。例如,高压驱动芯片连接引脚734沿功率模块1的宽度方向延伸,高压驱动芯片连接引脚734的右端的端部与高侧悬浮供电引脚731的右侧面相对。In some embodiments, as shown in FIG1 , the plurality of control side pins 730 further include at least one high-voltage driver chip connection pin 734, the high-voltage driver chip connection pin 734 is spaced apart from the high-side suspension power supply pin 731, and the minimum distance between the high-voltage driver chip connection pin 734 and the high-side suspension power supply pin 731 is less than or equal to a preset distance. For example, the preset distance is 2 to 3 times the thickness of the high-side suspension power supply pin 731. For example, the preset distance is 2 times, 2.2 times, 2.5 times, 2.7 times or 3 times the thickness of the high-side suspension power supply pin 731. For example, the high-voltage driver chip connection pin 734 extends along the width direction of the power module 1, and the end of the right end of the high-voltage driver chip connection pin 734 is opposite to the right side of the high-side suspension power supply pin 731.

例如,当高侧悬浮供电引脚731的厚度设置为0.4mm时,高压驱动芯片连接引脚734与高侧悬浮供电引脚731之间的最小距离小于或等于1.08mm。例如,高压驱动芯片连接引脚734与高侧悬浮供电引脚731之间的距离可以设置为0.5mm或0.6mm。如此设置,可以减小高侧悬浮供电引脚731与高压驱动芯片连接引脚734之间的干扰,且有利于减小功率模块1在宽度方向上的尺寸,减小功率模块1的体积。For example, when the thickness of the high-side suspended power supply pin 731 is set to 0.4 mm, the minimum distance between the high-voltage driver chip connection pin 734 and the high-side suspended power supply pin 731 is less than or equal to 1.08 mm. For example, the distance between the high-voltage driver chip connection pin 734 and the high-side suspended power supply pin 731 can be set to 0.5 mm or 0.6 mm. In this way, the interference between the high-side suspended power supply pin 731 and the high-voltage driver chip connection pin 734 can be reduced, and it is beneficial to reduce the size of the power module 1 in the width direction and reduce the volume of the power module 1.

在一些实施例中,如图1所示,多个控制侧引脚730还包括至少一个高压驱动芯片连接引脚734。高压驱动芯片连接引脚734包括延伸部7341和连接部7342。延伸部7341的一端与高压芯片基岛720相连接,且延伸部7341的另一端沿功率模块1的长度方向(如图1中的S2方向)延伸。连接部7342的一端连接延伸部7341,且连接部7342的另一端朝向控制侧(即如图1中的S4方向)延伸,且延伸至封装外壳500的外侧。延伸部7341与高侧悬浮供电引脚731间隔开设置,且连接部7342也与高侧悬浮供电引脚731间隔开设置。In some embodiments, as shown in FIG. 1 , the plurality of control side pins 730 further include at least one high voltage driver chip connection pin 734. The high voltage driver chip connection pin 734 includes an extension portion 7341 and a connection portion 7342. One end of the extension portion 7341 is connected to the high voltage chip base island 720, and the other end of the extension portion 7341 extends along the length direction of the power module 1 (such as the S2 direction in FIG. 1 ). One end of the connection portion 7342 is connected to the extension portion 7341, and the other end of the connection portion 7342 extends toward the control side (i.e., the S4 direction in FIG. 1 ), and extends to the outside of the package shell 500. The extension portion 7341 is spaced apart from the high side suspension power supply pin 731, and the connection portion 7342 is also spaced apart from the high side suspension power supply pin 731.

在一些实施例中,沿功率模块1的长度方向,连接部7342与高侧悬浮供电引脚731之间的最小距离小于或等于2.7倍的高侧悬浮供电引脚731的尺寸。In some embodiments, along the length direction of the power module 1 , the minimum distance between the connection portion 7342 and the high-side floating power pin 731 is less than or equal to 2.7 times the size of the high-side floating power pin 731 .

例如,当高侧悬浮供电引脚731的沿功率模块1的长度方向的尺寸设置为0.4mm时,高压驱动芯片连接引脚734与高侧悬浮供电引脚731之间的最小距离小于或等于1.08mm,连接部7342与高侧悬浮供电引脚731之间的距离为0.5mm或0.6mm。如此设置,可以减小高侧悬浮供电引脚731与高压驱动芯片连接引脚734之间的干扰,且有利于减小功率模块1在宽度方向上的尺寸,减小功率模块1的体积。For example, when the dimension of the high-side suspended power supply pin 731 along the length direction of the power module 1 is set to 0.4 mm, the minimum distance between the high-voltage driver chip connection pin 734 and the high-side suspended power supply pin 731 is less than or equal to 1.08 mm, and the distance between the connection portion 7342 and the high-side suspended power supply pin 731 is 0.5 mm or 0.6 mm. Such a setting can reduce the interference between the high-side suspended power supply pin 731 and the high-voltage driver chip connection pin 734, and is conducive to reducing the dimension of the power module 1 in the width direction and reducing the volume of the power module 1.

在一些实施例中,如图1所示,至少一个低压功率芯片300包括多个低压功率芯片300。功率芯片 基座600包括多个低压导电部610(如,三个低压导电部610)和一个高压导电部620。多个低压导电部610间隔开设置,且多个低压导电部610与高压导电部620间隔开设置。多个低压功率芯片300对应地设置在多个低压导电部610上,高压功率芯片400设置在高压导电部620上。多个低压导电部610和高压导电部620分别连接对应的功率侧引脚810。In some embodiments, as shown in FIG. 1 , the at least one low voltage power chip 300 includes a plurality of low voltage power chips 300 . The base 600 includes a plurality of low-voltage conductive parts 610 (e.g., three low-voltage conductive parts 610) and a high-voltage conductive part 620. The plurality of low-voltage conductive parts 610 are arranged at intervals, and the plurality of low-voltage conductive parts 610 are arranged at intervals from the high-voltage conductive part 620. The plurality of low-voltage power chips 300 are correspondingly arranged on the plurality of low-voltage conductive parts 610, and the high-voltage power chip 400 is arranged on the high-voltage conductive part 620. The plurality of low-voltage conductive parts 610 and the high-voltage conductive part 620 are respectively connected to corresponding power-side pins 810.

这样,通过将多个高压功率芯片400集成为一体(即一个高压功率芯片400),从而可以减小功率模块1在长度方向上的尺寸,且便于降低高压功率芯片400的布置和装配。在此情况下,功率芯片基座600仅需要设置一个高压导电部620,有利于降低了功率芯片基座600的加工难度和生产成本。In this way, by integrating a plurality of high-voltage power chips 400 into one (i.e., one high-voltage power chip 400), the size of the power module 1 in the length direction can be reduced, and it is convenient to reduce the arrangement and assembly of the high-voltage power chip 400. In this case, the power chip base 600 only needs to be provided with one high-voltage conductive portion 620, which is conducive to reducing the processing difficulty and production cost of the power chip base 600.

在一些实施例中,低压功率芯片300和高压功率芯片400位于功率芯片基座600的靠近控制侧的位置处,功率芯片基座600的靠近功率侧的部分与功率侧引脚810至少部分重叠。In some embodiments, the low voltage power chip 300 and the high voltage power chip 400 are located at a position of the power chip base 600 close to the control side, and a portion of the power chip base 600 close to the power side at least partially overlaps with the power side pins 810 .

在一些实施例中,如图1所示,功率芯片基座600、控制侧引线框架700和功率侧引线框架800被构造为一体件,这样,控制侧引线框架700和功率侧引线框架800的相对位置固定,且可以同步拆装。这样,有利于提高控制侧引线框架700和功率侧引线框架800之间的连接强度,有利于提高功率模块1的组装效率以及精度。In some embodiments, as shown in FIG1 , the power chip base 600, the control side lead frame 700 and the power side lead frame 800 are constructed as an integral part, so that the relative positions of the control side lead frame 700 and the power side lead frame 800 are fixed and can be assembled and disassembled synchronously. This is conducive to improving the connection strength between the control side lead frame 700 and the power side lead frame 800, and is conducive to improving the assembly efficiency and accuracy of the power module 1.

在一些实施例中,如图5所示,功率模块1还包括绝缘片510和散热片520,绝缘片510设置在功率芯片基座600的背向低压功率芯片300和高压功率芯片400的一侧,散热片520设置在绝缘片510的背向功率芯片基座600的一侧。In some embodiments, as shown in Figure 5, the power module 1 also includes an insulating sheet 510 and a heat sink 520, the insulating sheet 510 is arranged on the side of the power chip base 600 facing away from the low-voltage power chip 300 and the high-voltage power chip 400, and the heat sink 520 is arranged on the side of the insulating sheet 510 facing away from the power chip base 600.

封装外壳500的与散热片520对应的位置处敞开,以形成开口。散热片520的至少一部分设置在开口内,或者,散热片520的至少一部分的远离绝缘片510的一侧表面与所述开口所在的平面平齐,或者,散热片520的至少一部分凸出于所述开口所在的平面。The position of the package housing 500 corresponding to the heat sink 520 is opened to form an opening. At least a portion of the heat sink 520 is disposed in the opening, or a surface of at least a portion of the heat sink 520 away from the insulating sheet 510 is flush with the plane where the opening is located, or at least a portion of the heat sink 520 protrudes from the plane where the opening is located.

例如,散热片520可以为金属材料件。例如,散热片520为铜材料件,或是其他具有良好导热性能的材料制成的材料件。For example, the heat sink 520 may be a metal material, such as a copper material, or other material with good thermal conductivity.

可以理解的是,散热片520具有良好的导热性,从而有利于降低功率芯片基座600、低压功率芯片300和高压功率芯片400的温度,避免功率模块1运行时,低压功率芯片300和高压功率芯片400产生热堆积。It is understandable that the heat sink 520 has good thermal conductivity, which is helpful to reduce the temperature of the power chip base 600, the low-voltage power chip 300 and the high-voltage power chip 400, and avoid heat accumulation in the low-voltage power chip 300 and the high-voltage power chip 400 when the power module 1 is running.

在一些实施例中,绝缘片510可由具有良好导热性和绝缘性的材料制成。例如,绝缘片510可以为陶瓷材料件、Al2O3材料件或AlN材料件。In some embodiments, the insulating sheet 510 may be made of a material having good thermal conductivity and insulation properties, such as a ceramic material, an Al2O3 material, or an AlN material.

可以理解的是,通过在散热片520和功率芯片基座600之间设置绝缘片510,可以避免散热片520与功率芯片基座600之间导电,进而可以避免低压功率芯片300和高压功率芯片400通过散热片520与外界发生电导通。It is understandable that by providing an insulating sheet 510 between the heat sink 520 and the power chip base 600, conduction between the heat sink 520 and the power chip base 600 can be avoided, thereby preventing the low-voltage power chip 300 and the high-voltage power chip 400 from being electrically connected to the outside world through the heat sink 520.

在一些实施例中,如图6所示,控制侧引线框架700和功率侧引线框架800为一体件,这样,控制侧引线框架700和功率侧引线框架800的相对位置固定,且可以同步拆装。这样,有利于提高控制侧引线框架700和功率侧引线框架800之间的连接强度,有利于提高功率模块1的组装效率以及精度。In some embodiments, as shown in FIG6 , the control side lead frame 700 and the power side lead frame 800 are integrated, so that the relative positions of the control side lead frame 700 and the power side lead frame 800 are fixed and can be assembled and disassembled synchronously. This is conducive to improving the connection strength between the control side lead frame 700 and the power side lead frame 800, and is conducive to improving the assembly efficiency and accuracy of the power module 1.

功率侧引线框架800与功率芯片基座600连接。功率芯片基座600包括层叠设置的导电层601、绝缘层602和散热层603。绝缘层602设置在导电层601的背离高压功率芯片400的一侧,且散热层603设置在绝缘层602的背离导电层601的一侧。低压功率芯片300和高压功率芯片400设置在导电层601上,功率侧引脚810与导电层601相连。绝缘层602被配置为隔断导电层601和散热层603之间的电导通,并将导电层601的热量传递至散热层603,从而散热层603可以将功率芯片基座600、低压功率芯片300和高压功率芯片400的热量散出至封装外壳500的外部。The power side lead frame 800 is connected to the power chip base 600. The power chip base 600 includes a conductive layer 601, an insulating layer 602 and a heat dissipation layer 603 which are stacked. The insulating layer 602 is arranged on the side of the conductive layer 601 away from the high-voltage power chip 400, and the heat dissipation layer 603 is arranged on the side of the insulating layer 602 away from the conductive layer 601. The low-voltage power chip 300 and the high-voltage power chip 400 are arranged on the conductive layer 601, and the power side pin 810 is connected to the conductive layer 601. The insulating layer 602 is configured to cut off the electrical conduction between the conductive layer 601 and the heat dissipation layer 603, and transfer the heat of the conductive layer 601 to the heat dissipation layer 603, so that the heat dissipation layer 603 can dissipate the heat of the power chip base 600, the low-voltage power chip 300 and the high-voltage power chip 400 to the outside of the package shell 500.

封装外壳500的与散热层603对应的位置处敞开,以形成开口。散热层603位于开口内,或者,散热层603的远离绝缘层602的一侧表面与所述开口所在的平面平齐,或者,散热层603凸出于所述开口所在的平面。这样,当功率芯片运行产生的热量可以经由导电层601和绝缘层602传递至散热层603,散热层603与外界进行热交换,以实现功率模块1的散热。The position of the package shell 500 corresponding to the heat dissipation layer 603 is open to form an opening. The heat dissipation layer 603 is located in the opening, or the surface of the heat dissipation layer 603 on one side away from the insulating layer 602 is flush with the plane where the opening is located, or the heat dissipation layer 603 protrudes from the plane where the opening is located. In this way, the heat generated by the operation of the power chip can be transferred to the heat dissipation layer 603 via the conductive layer 601 and the insulating layer 602, and the heat dissipation layer 603 performs heat exchange with the outside to achieve heat dissipation of the power module 1.

在一些实施例中,导电层601和散热层603可以为金属层结构。例如导电层601和散热层603可以为金属铜层或者铜合金层。In some embodiments, the conductive layer 601 and the heat dissipation layer 603 may be metal layer structures, for example, the conductive layer 601 and the heat dissipation layer 603 may be metal copper layers or copper alloy layers.

在一些实施例中,导电层601还可以由其他具有良好导电性和导热性的材料制成,散热层603还可以由其他具有良好导热性的材料制成,绝缘层602可以有具有良好导热性的绝缘材料制成,如陶瓷, Al2O3或AlN。In some embodiments, the conductive layer 601 may also be made of other materials with good electrical conductivity and thermal conductivity, the heat dissipation layer 603 may also be made of other materials with good thermal conductivity, and the insulating layer 602 may be made of insulating materials with good thermal conductivity, such as ceramics. Al2O3 or AlN.

在一些实施例中,如图1所示,功率模块1包括三个低压功率芯片300和三个高压功率芯片400。三个低压功率芯片300沿功率模块1的长度方向排布,且三个高压功率芯片400沿功率模块1的长度方向排布。In some embodiments, as shown in FIG1 , the power module 1 includes three low voltage power chips 300 and three high voltage power chips 400. The three low voltage power chips 300 are arranged along the length direction of the power module 1, and the three high voltage power chips 400 are arranged along the length direction of the power module 1.

这样,功率模块1可以形成三相桥电路,并且三个高压功率芯片400的排布,便于高压功率芯片400与高压驱动芯片200连接,有利于简化功率模块1的结构布局。In this way, the power module 1 can form a three-phase bridge circuit, and the arrangement of the three high-voltage power chips 400 facilitates the connection between the high-voltage power chip 400 and the high-voltage driver chip 200, which is conducive to simplifying the structural layout of the power module 1.

在一些实施例中,如图7至图9所示,功率模块1还包括至少一个低压二极管310和至少一个高压二极管460。低压功率芯片300通过低压二极管310与功率侧引线框架800电连接,高压功率芯片400通过高压二极管460与功率侧引线框架800电连接。例如,低压功率芯片300通过低压二极管310与对应的功率侧引脚810电连接,高压功率芯片400通过高压二极管460与对应的功率侧引脚810电连接。In some embodiments, as shown in FIGS. 7 to 9 , the power module 1 further includes at least one low voltage diode 310 and at least one high voltage diode 460. The low voltage power chip 300 is electrically connected to the power side lead frame 800 through the low voltage diode 310, and the high voltage power chip 400 is electrically connected to the power side lead frame 800 through the high voltage diode 460. For example, the low voltage power chip 300 is electrically connected to the corresponding power side pin 810 through the low voltage diode 310, and the high voltage power chip 400 is electrically connected to the corresponding power side pin 810 through the high voltage diode 460.

在一些实施例中,功率侧引线框架800通过金线或者铜线与低压二极管310和高压二极管460连接,或者,功率侧引线框架800还可以通过其他电阻率小的材料与低压二极管310和高压二极管460连接。In some embodiments, the power side lead frame 800 is connected to the low voltage diode 310 and the high voltage diode 460 through gold wire or copper wire, or the power side lead frame 800 can also be connected to the low voltage diode 310 and the high voltage diode 460 through other materials with low resistivity.

在一些实施例中,至少一个低压二极管310包括多个低压二极管310,多个低压二极管310与多个低压功率芯片300相对应,且与多个低压功率芯片300电连接。In some embodiments, the at least one low voltage diode 310 includes a plurality of low voltage diodes 310 , and the plurality of low voltage diodes 310 corresponds to the plurality of low voltage power chips 300 and is electrically connected to the plurality of low voltage power chips 300 .

在一些实施例中,至少一个高压二极管460包括多个高压二极管460,多个高压二极管460与多个高压功率芯片400相对应,且与多个高压功率芯片400电连接。In some embodiments, the at least one high-voltage diode 460 includes a plurality of high-voltage diodes 460 , and the plurality of high-voltage diodes 460 corresponds to the plurality of high-voltage power chips 400 and is electrically connected to the plurality of high-voltage power chips 400 .

在一些实施例中,高压二极管460包括外延层461。多个高压二极管460中的至少两个相邻的高压二极管460的外延层461被构造为一体件,以使至少两个相邻的高压二极管460被集成为一体。这样,有利于提高功率模块1的空间利用率,且有利于缩小功率模块1的体积。In some embodiments, the high-voltage diode 460 includes an epitaxial layer 461. The epitaxial layers 461 of at least two adjacent high-voltage diodes 460 among the plurality of high-voltage diodes 460 are constructed as an integral piece, so that at least two adjacent high-voltage diodes 460 are integrated into one. In this way, it is beneficial to improve the space utilization of the power module 1 and to reduce the volume of the power module 1.

需要说明的是,至少两个相邻的高压二极管460集成为一体指的是:相邻的高压二极管460可以同步地安装至功率模块1中,或者,可以同步地从功率模块1中拆除。并且,相邻的高压二极管460之间具有一定的连接强度。It should be noted that at least two adjacent high-voltage diodes 460 are integrated into one body, which means that the adjacent high-voltage diodes 460 can be synchronously installed in the power module 1, or can be synchronously removed from the power module 1. In addition, there is a certain connection strength between the adjacent high-voltage diodes 460.

可以理解的是,通过将相邻的高压二极管460集成为一体,可以有效地降低相邻的两个高压二极管460之间的距离。例如,相邻的高压二极管460之间可以不存在间隙,或者间隙极小(如小于1mm)。这样,可以减小功率模块1的尺寸,降低制造成本,且有利于降低高压二极管460连接的导线的长度,从而可节省导线的物料,并降低冲线风险。It is understandable that by integrating adjacent high-voltage diodes 460 into one, the distance between two adjacent high-voltage diodes 460 can be effectively reduced. For example, there may be no gap between adjacent high-voltage diodes 460, or the gap may be extremely small (e.g., less than 1 mm). In this way, the size of the power module 1 can be reduced, the manufacturing cost can be reduced, and the length of the wire connected to the high-voltage diode 460 can be reduced, thereby saving wire materials and reducing the risk of wire collision.

此外,由于至少两个相邻的高压二极管460的外延层461构造成一体件,因此,相邻的高压二极管460在加工时无需划片,从而减少了生产工艺,提高了生产效率。In addition, since the epitaxial layers 461 of at least two adjacent high-voltage diodes 460 are constructed as an integral piece, the adjacent high-voltage diodes 460 do not need to be diced during processing, thereby reducing the production process and improving production efficiency.

需要说明的是,图7所示的三个高压二极管460仅是对多个高压二极管460的一种情况的示例,而不能看作是对多个高压二极管460的数量的限制。在一些实施例中,多个高压二极管460可以包括两个、四个或更多个高压二极管460。7 is only an example of a case of multiple high-voltage diodes 460, and cannot be regarded as a limit to the number of multiple high-voltage diodes 460. In some embodiments, the multiple high-voltage diodes 460 may include two, four or more high-voltage diodes 460.

在一些实施例中,低压功率芯片300和低压二极管310沿功率模块1的宽度方向(即如图7所示的S3-S4方向)排布,高压功率芯片400和高压二极管460沿功率模块1的宽度方向(即如图7所示的S3-S4方向)排布,从而有利于缩小功率模块1的体积。In some embodiments, the low-voltage power chip 300 and the low-voltage diode 310 are arranged along the width direction of the power module 1 (i.e., the S3-S4 direction as shown in Figure 7), and the high-voltage power chip 400 and the high-voltage diode 460 are arranged along the width direction of the power module 1 (i.e., the S3-S4 direction as shown in Figure 7), which is beneficial to reducing the volume of the power module 1.

在一些实施例中,如图10和图11所示,高压二极管460包括第二有源区462和第二终端区463,第二终端区463围绕第二有源区462设置,且第二终端区463位于高压二极管460的边缘处。第二终端区463包括第二钝化层464,第二钝化层464设置在外延层461的一侧表面。例如,相邻的高压二极管460的第二钝化层464间隔开设置,且相邻的高压二极管460的第二钝化层464之间形成第二分隔部469。例如,第二分隔部469为凹槽,且第二分隔部469的一部分位于外延层461中。In some embodiments, as shown in FIGS. 10 and 11 , the high voltage diode 460 includes a second active region 462 and a second terminal region 463, the second terminal region 463 is disposed around the second active region 462, and the second terminal region 463 is located at the edge of the high voltage diode 460. The second terminal region 463 includes a second passivation layer 464, and the second passivation layer 464 is disposed on a side surface of the epitaxial layer 461. For example, the second passivation layers 464 of adjacent high voltage diodes 460 are spaced apart, and a second partition 469 is formed between the second passivation layers 464 of adjacent high voltage diodes 460. For example, the second partition 469 is a groove, and a portion of the second partition 469 is located in the epitaxial layer 461.

需要说明的是,第二钝化层464不限于设置在第二终端区463中,在一些实施例中,第二钝化层464亦可设置在第二有源区462中。It should be noted that the second passivation layer 464 is not limited to being disposed in the second terminal region 463 . In some embodiments, the second passivation layer 464 may also be disposed in the second active region 462 .

可以理解的是,第二分隔部469可以将相邻的两个高压二极管460进行物理分隔,使相邻的两个高压二极管460的第二钝化层464不接触,从而有利于提高高压二极管460的可靠性。It is understandable that the second separator 469 can physically separate two adjacent high-voltage diodes 460 so that the second passivation layers 464 of the two adjacent high-voltage diodes 460 do not contact each other, thereby facilitating improving the reliability of the high-voltage diodes 460 .

在一些实施例,如图11所示,外延层461的一侧表面的对应第二分隔部469的位置设有第二电气 隔离部465,也就是说,第二电气隔离部465设置在第二分隔部469中,这样,第二分隔部469和第二电气隔离部465可以沿同一方向形成,以提高生产效率。第二电气隔离部465被配置为将相邻的两个高压二极管460电气分隔,以避免相邻两个高压二极管460之间电导通,从而可以防止出现短路等问题。In some embodiments, as shown in FIG. 11 , a second electrical The isolating portion 465, that is, the second electrical isolating portion 465 is disposed in the second separating portion 469, so that the second separating portion 469 and the second electrical isolating portion 465 can be formed in the same direction to improve production efficiency. The second electrical isolating portion 465 is configured to electrically separate two adjacent high-voltage diodes 460 to avoid electrical conduction between the two adjacent high-voltage diodes 460, thereby preventing problems such as short circuits.

例如,外延层461为低掺杂N型半导体,第二电气隔离部465为高掺杂N型半导体,且第二电气隔离部465的厚度小于外延层461的厚度。For example, the epitaxial layer 461 is a low-doped N-type semiconductor, the second electrical isolation portion 465 is a high-doped N-type semiconductor, and the thickness of the second electrical isolation portion 465 is less than the thickness of the epitaxial layer 461 .

在一些实施例中,如图11所示,第二电气隔离部465的靠近第二分隔部469的一侧表面,与外延层461的靠近第二钝化层464的一侧表面平齐。这样,使得第二电气隔离部465与外延层461之间的过渡平滑,便于加工。In some embodiments, as shown in FIG11 , a surface of the second electrical isolation portion 465 close to the second partition 469 is flush with a surface of the epitaxial layer 461 close to the second passivation layer 464. In this way, the transition between the second electrical isolation portion 465 and the epitaxial layer 461 is smooth, which is convenient for processing.

可以理解的是,第二电气隔离部465形成于外延层461的朝向第二分隔部469的一侧,由于第二分隔部469的设置,便于向外延层461(也即第二分隔部469)内注入离子,并形成第二电气隔离部465,且有利于提高第二电气隔离部465对电气隔离的可靠性。It can be understood that the second electrical isolation portion 465 is formed on the side of the epitaxial layer 461 facing the second separation portion 469. Due to the setting of the second separation portion 469, it is convenient to inject ions into the epitaxial layer 461 (that is, the second separation portion 469) to form the second electrical isolation portion 465, and it is beneficial to improve the reliability of electrical isolation of the second electrical isolation portion 465.

在一些实施例中,如图11所示,高压二极管460还包括衬底466。衬底466设置在外延层461的背离第二钝化层464的一侧表面。至少两个相邻的高压二极管460的衬底466被构造成一体件。In some embodiments, as shown in Fig. 11, the high voltage diode 460 further includes a substrate 466. The substrate 466 is disposed on a surface of the epitaxial layer 461 that is away from the second passivation layer 464. The substrates 466 of at least two adjacent high voltage diodes 460 are constructed as an integral piece.

例如,外延层461包括第一子外延层467和第二子外延层468,第一子外延层467设置在第二子外延层468与衬底466之间。至少两个相邻的高压二极管460的第一子外延层467被构造成一体件,且至少两个相邻的高压二极管460的第二子外延层468被构造成一体件,这样,有利于提高相邻的两个高压二极管460之间的连接强度,以及相邻的两个高压二极管460之间的相对位置的精度和稳定性,进而可以提高高压二极管460运行的稳定性和可靠性。For example, the epitaxial layer 461 includes a first sub-epitaxial layer 467 and a second sub-epitaxial layer 468, and the first sub-epitaxial layer 467 is disposed between the second sub-epitaxial layer 468 and the substrate 466. The first sub-epitaxial layers 467 of at least two adjacent high-voltage diodes 460 are constructed as an integral piece, and the second sub-epitaxial layers 468 of at least two adjacent high-voltage diodes 460 are constructed as an integral piece, which is conducive to improving the connection strength between the two adjacent high-voltage diodes 460, as well as the accuracy and stability of the relative position between the two adjacent high-voltage diodes 460, thereby improving the stability and reliability of the operation of the high-voltage diodes 460.

例如,衬底466、第一子外延层467和第二子外延层468均为N型半导体。衬底466的掺杂浓度大于第一子外延层467的掺杂浓度,且第一子外延层467的掺杂浓度大于第二子外延层468的掺杂浓度,从而使高压二极管460可以实现单向导电。For example, the substrate 466, the first sub-epitaxial layer 467 and the second sub-epitaxial layer 468 are all N-type semiconductors. The doping concentration of the substrate 466 is greater than the doping concentration of the first sub-epitaxial layer 467, and the doping concentration of the first sub-epitaxial layer 467 is greater than the doping concentration of the second sub-epitaxial layer 468, so that the high-voltage diode 460 can achieve unidirectional conduction.

在一些实施例中,低压二极管310和高压二极管460设置在功率芯片基座600上,且被封装于封装外壳500内,从而可以延长低压二极管310和高压二极管460的使用寿命。例如,低压二极管310和高压二极管460通过锡膏与功率芯片基座600连接。In some embodiments, the low voltage diode 310 and the high voltage diode 460 are disposed on the power chip base 600 and packaged in the package housing 500, thereby extending the service life of the low voltage diode 310 and the high voltage diode 460. For example, the low voltage diode 310 and the high voltage diode 460 are connected to the power chip base 600 through solder paste.

在一些实施例中,如图7所示,至少一个低压二极管310包括多个低压二极管310,多个低压二极管310与多个低压导电部610相对应,且设置在多个低压导电部610上。至少一个高压二极管460集成为一体,并设置在高压导电部620上,从而有利于减小功率模块1在长度方向上的尺寸,且便于降低高压二极管460的布置和装配。在此情况下,功率芯片基座600仅需要设置一个高压导电部620,有利于降低了功率芯片基座600的加工难度和生产成本。In some embodiments, as shown in FIG. 7 , at least one low-voltage diode 310 includes a plurality of low-voltage diodes 310, and the plurality of low-voltage diodes 310 correspond to the plurality of low-voltage conductive portions 610 and are disposed on the plurality of low-voltage conductive portions 610. At least one high-voltage diode 460 is integrated as one body and disposed on the high-voltage conductive portion 620, thereby facilitating the reduction of the size of the power module 1 in the length direction and facilitating the reduction of the arrangement and assembly of the high-voltage diode 460. In this case, the power chip base 600 only needs to be provided with one high-voltage conductive portion 620, which is conducive to reducing the processing difficulty and production cost of the power chip base 600.

在一些实施例中,如图7所示,功率模块1包括三个低压功率芯片300、三个低压二极管310、三个高压功率芯片400和三个高压二极管460。In some embodiments, as shown in FIG. 7 , the power module 1 includes three low-voltage power chips 300 , three low-voltage diodes 310 , three high-voltage power chips 400 , and three high-voltage diodes 460 .

三个低压功率芯片300沿功率模块1的长度方向排布,三个低压二极管310沿功率模块1的长度方向排布,三个高压功率芯片400沿功率模块1的长度方向排布,三个高压二极管460沿功率模块1的长度方向排布。并且每个低压功率芯片300与对应的低压二极管310沿功率模块1的宽度方向布置,每个高压功率芯片400与对应的高压二极管460沿功率模块1的宽度方向布置。Three low-voltage power chips 300 are arranged along the length direction of the power module 1, three low-voltage diodes 310 are arranged along the length direction of the power module 1, three high-voltage power chips 400 are arranged along the length direction of the power module 1, and three high-voltage diodes 460 are arranged along the length direction of the power module 1. Each low-voltage power chip 300 and the corresponding low-voltage diode 310 are arranged along the width direction of the power module 1, and each high-voltage power chip 400 and the corresponding high-voltage diode 460 are arranged along the width direction of the power module 1.

这样,功率模块1可以形成三相桥电路,并且三个高压功率芯片400的排布,便于高压功率芯片400与高压驱动芯片200连接,且便于高压功率芯片400与对应的高压二极管460之间的连接,有利于简化功率模块1的结构布局。In this way, the power module 1 can form a three-phase bridge circuit, and the arrangement of the three high-voltage power chips 400 facilitates the connection between the high-voltage power chip 400 and the high-voltage driver chip 200, and facilitates the connection between the high-voltage power chip 400 and the corresponding high-voltage diode 460, which is conducive to simplifying the structural layout of the power module 1.

本公开的一些实施例还提供了一种电子设备,该电子设备包括上述任一实施例提供的功率模块1。该电子设备的有益效果与功率模块1相同,本公开对此不再赘述。Some embodiments of the present disclosure further provide an electronic device, which includes the power module 1 provided by any of the above embodiments. The beneficial effects of the electronic device are the same as those of the power module 1, and the present disclosure will not elaborate on this.

本领域的技术人员将会理解,本发明的公开范围不限于上述具体实施例,并且可以在不脱离本申请的精神的情况下对实施例的某些要素进行修改和替换。本申请的范围受所附权利要求的限制。 Those skilled in the art will appreciate that the disclosure scope of the present invention is not limited to the above specific embodiments, and certain elements of the embodiments may be modified and replaced without departing from the spirit of the present application. The scope of the present application is limited by the appended claims.

Claims (22)

一种功率模块,包括:A power module, comprising: 低压驱动芯片;Low voltage driver chip; 高压驱动芯片,所述高压驱动芯片内集成有自举升压芯片;A high-voltage driver chip, wherein a bootstrap boost chip is integrated in the high-voltage driver chip; 至少一个低压功率芯片,与所述低压驱动芯片电连接;以及at least one low-voltage power chip electrically connected to the low-voltage driver chip; and 多个高压功率芯片,所述多个高压功率芯片中的任一个高压功率芯片与所述高压驱动芯片电连接;所述任一个高压功率芯片包括漂移层;A plurality of high-voltage power chips, any one of which is electrically connected to the high-voltage driver chip; any one of which comprises a drift layer; 其中,所述多个高压功率芯片中的至少两个相邻的高压功率芯片的漂移层被构造成一体件,以使所述至少两个相邻的高压功率芯片被集成为一体结构。The drift layers of at least two adjacent high-voltage power chips among the plurality of high-voltage power chips are constructed as an integral piece, so that the at least two adjacent high-voltage power chips are integrated into an integral structure. 根据权利要求1所述的功率模块,其中,所述任一个高压功率芯片还包括:The power module according to claim 1, wherein any one of the high-voltage power chips further comprises: 第一有源区;和a first active region; and 第一终端区,围绕所述第一有源区设置;A first terminal region, disposed around the first active region; 其中,所述第一有源区和所述第一终端区中的至少一者包括第一钝化层;所述第一钝化层设置在所述漂移层的一侧表面;所述至少两个相邻的高压功率芯片的第一钝化层间隔开设置,且所述至少两个相邻的高压功率芯片的所述第一钝化层之间限定出第一分隔部;所述第一分隔部被配置为将所述至少两个相邻的高压功率芯片进行物理分隔。Among them, at least one of the first active area and the first terminal area includes a first passivation layer; the first passivation layer is arranged on a side surface of the drift layer; the first passivation layers of the at least two adjacent high-voltage power chips are spaced apart, and a first partition is defined between the first passivation layers of the at least two adjacent high-voltage power chips; the first partition is configured to physically separate the at least two adjacent high-voltage power chips. 根据权利要求2所述的功率模块,其中,所述漂移层的靠近所述第一钝化层的一侧表面的对应所述第一分隔部的位置处,设置有第一电气隔离部;所述第一电气隔离部被配置为将所述至少两个相邻的高压功率芯片电气分隔,以避免所述至少两个相邻的高压功率芯片之间电导通。The power module according to claim 2, wherein a first electrical isolation portion is provided at a position corresponding to the first separation portion on a side surface of the drift layer close to the first passivation layer; the first electrical isolation portion is configured to electrically separate the at least two adjacent high-voltage power chips to avoid electrical conduction between the at least two adjacent high-voltage power chips. 根据权利要求3所述的功率模块,其中,所述第一电气隔离部的靠近所述第一钝化层的一侧表面,与所述漂移层的靠近所述第一钝化层的一侧表面平齐。The power module according to claim 3, wherein a surface of the first electrical isolation portion close to the first passivation layer is flush with a surface of the drift layer close to the first passivation layer. 根据权利要求1至4中任一项所述的功率模块,其中,所述任一个高压功率芯片还包括:The power module according to any one of claims 1 to 4, wherein any one of the high-voltage power chips further comprises: 场截止层,设置在所述漂移层的背离所述第一钝化层的一侧表面;所述至少两个相邻的高压功率芯片的场截止层被构造成一体件;A field stop layer is arranged on a surface of the drift layer on a side away from the first passivation layer; the field stop layers of the at least two adjacent high-voltage power chips are constructed as an integral part; 集电极层,设置在所述场截止层的背离所述漂移层的一侧表面;所述至少两个相邻的高压功率芯片的集电极层被构造成一体件;以及A collector layer is arranged on a surface of the field stop layer facing away from the drift layer; the collector layers of the at least two adjacent high-voltage power chips are constructed as an integral part; and 金属层,设置在所述集电极层的背离所述场截止层的一侧表面;所述至少两个相邻的高压功率芯片的金属层被构造成一体件。A metal layer is arranged on a surface of the collector layer that is away from the field stop layer; the metal layers of the at least two adjacent high-voltage power chips are constructed as an integral part. 根据权利要求1至5中任一项所述的功率模块,其中,所述低压功率芯片和所述高压功率芯片满足如下之一:The power module according to any one of claims 1 to 5, wherein the low-voltage power chip and the high-voltage power chip satisfy one of the following conditions: 所述低压功率芯片和所述高压功率芯片中的至少一者为逆导型绝缘栅双极型晶体管;At least one of the low voltage power chip and the high voltage power chip is a reverse conducting insulated gate bipolar transistor; 或者,or, 所述低压功率芯片和所述高压功率芯片中的至少一者为金属-氧化物半导体场效应晶体管。At least one of the low voltage power chip and the high voltage power chip is a metal-oxide semiconductor field effect transistor. 根据权利要求1所述的功率模块,还包括:The power module according to claim 1, further comprising: 功率芯片基座,所述低压功率芯片和所述多个高压功率芯片设置在所述功率芯片基座上;A power chip base, on which the low-voltage power chip and the plurality of high-voltage power chips are arranged; 封装外壳,所述功率芯片基座的至少一部分、所述低压驱动芯片、所述高压驱动芯片、所述低压功率芯片和所述多个高压功率芯片被封装于所述封装外壳内;所述功率模块的宽度方向上相对两侧,分别为所述功率模块的控制侧和功率侧; A packaging shell, in which at least a portion of the power chip base, the low-voltage driver chip, the high-voltage driver chip, the low-voltage power chip and the plurality of high-voltage power chips are packaged; two opposite sides in the width direction of the power module are respectively a control side and a power side of the power module; 控制侧引线框架;所述控制侧引线框架连接所述功率芯片基座,且所述控制侧引线框架的至少一部分被封装在所述封装外壳内;所述控制侧引线框架包括:A control side lead frame; the control side lead frame is connected to the power chip base, and at least a portion of the control side lead frame is packaged in the package shell; the control side lead frame includes: 低压芯片基岛,所述低压驱动芯片设置在所述低压芯片基岛上;A low-voltage chip base island, wherein the low-voltage driver chip is arranged on the low-voltage chip base island; 高压芯片基岛,所述高压驱动芯片设置在所述高压芯片基岛上,和a high-voltage chip base island, the high-voltage driver chip is arranged on the high-voltage chip base island, and 多个控制侧引脚,多个所述控制侧引脚与所述低压驱动芯片和所述高压驱动芯片电连接,且从所述控制侧延伸至所述封装外壳的外部;A plurality of control side pins, wherein the plurality of control side pins are electrically connected to the low voltage driver chip and the high voltage driver chip and extend from the control side to the outside of the package shell; 功率侧引线框架,所述功率侧引线框架连接所述功率芯片基座,且所述功率侧引线框架的至少一部分被封装在所述封装外壳内;所述功率侧引线框架包括多个功率侧引脚,所述多个功率侧引脚与所述低压功率芯片和所述高压功率芯片电连接,且从所述功率侧延伸至所述封装外壳的外部。A power side lead frame, the power side lead frame is connected to the power chip base, and at least a portion of the power side lead frame is encapsulated in the packaging shell; the power side lead frame includes a plurality of power side pins, the plurality of power side pins are electrically connected to the low voltage power chip and the high voltage power chip, and extend from the power side to the outside of the packaging shell. 根据权利要求7所述的功率模块,其中,所述多个控制侧引脚大致沿所述功率模块的长度方向排布,且包括电源引脚、输入引脚和高侧悬浮供电引脚;所述电源引脚、所述输入引脚和所述高侧悬浮供电引脚分别与所述高压驱动芯片电连接;The power module according to claim 7, wherein the plurality of control-side pins are arranged substantially along the length direction of the power module, and include a power pin, an input pin, and a high-side floating power pin; the power pin, the input pin, and the high-side floating power pin are electrically connected to the high-voltage driver chip respectively; 其中,所述多个控制侧引脚满足如下之一:The plurality of control-side pins satisfy one of the following conditions: 沿所述功率模块的长度方向,所述电源引脚位于所述输入引脚和所述高侧悬浮供电引脚之间;Along the length direction of the power module, the power pin is located between the input pin and the high-side floating power pin; 或者,or, 沿所述功率模块的长度方向,所述输入引脚位于所述电源引脚和所述高侧悬浮供电引脚之间。Along the length direction of the power module, the input pin is located between the power pin and the high-side floating power supply pin. 根据权利要求7或8所述的功率模块,其中,所述至少一个低压功率芯片包括多个低压功率芯片;The power module according to claim 7 or 8, wherein the at least one low-voltage power chip comprises a plurality of low-voltage power chips; 所述功率芯片基座包括:The power chip base comprises: 多个低压导电部,所述多个低压导电部间隔开设置;所述多个低压功率芯片对应设置在所述多个低压导电部上;以及A plurality of low-voltage conductive parts, wherein the plurality of low-voltage conductive parts are arranged at intervals; the plurality of low-voltage power chips are correspondingly arranged on the plurality of low-voltage conductive parts; and 高压导电部,与所述多个低压导电部间隔开设置,所述多个高压功率芯片设置在所述高压导电部上;A high-voltage conductive portion is arranged to be spaced apart from the plurality of low-voltage conductive portions, and the plurality of high-voltage power chips are arranged on the high-voltage conductive portion; 其中,所述高压导电部和所述多个低压导电部与对应的所述功率侧引脚相连接。Wherein, the high-voltage conductive part and the plurality of low-voltage conductive parts are connected to the corresponding power-side pins. 根据权利要求7至9中任一项所述的功率模块,其中,所述功率芯片基座、所述控制侧引线框架和所述功率侧引线框架被构造成一体件。The power module according to any one of claims 7 to 9, wherein the power chip base, the control-side lead frame and the power-side lead frame are constructed as an integral piece. 根据权利要求10所述的功率模块,还包括:The power module according to claim 10, further comprising: 绝缘片,设置在所述功率芯片基座的背向所述低压功率芯片和所述高压功率芯片的一侧;以及an insulating sheet, arranged on a side of the power chip base facing away from the low-voltage power chip and the high-voltage power chip; and 散热片,设置在所述绝缘片的背向所述功率芯片基座的一侧。A heat sink is arranged on a side of the insulating sheet facing away from the power chip base. 根据权利要求11所述的功率模块,其中,所述封装外壳的与所述散热片对应的位置处敞开,以形成开口;The power module according to claim 11, wherein the packaging shell is opened at a position corresponding to the heat sink to form an opening; 所述散热片满足如下之一:The heat sink meets one of the following requirements: 所述散热片的至少一部分设置在所述开口内;At least a portion of the heat sink is disposed within the opening; 或者,or, 所述散热片的至少一部分的远离所述绝缘片的一侧表面与所述开口所在的平面平齐;A surface of at least a portion of the heat sink that is away from the insulating sheet is flush with the plane where the opening is located; 或者,or, 所述散热片的至少一部分凸出于所述开口所在的平面。At least a portion of the heat sink protrudes from a plane where the opening is located. 根据权利要求1至12中任一项所述的功率模块,还包括: The power module according to any one of claims 1 to 12, further comprising: 至少一个低压二极管,分别与所述至少一个低压功率芯片电连接;at least one low voltage diode, electrically connected to the at least one low voltage power chip respectively; 多个高压二极管,分别与所述多个高压功率芯片电连接;所述多个高压二极管中的任一个高压二极管包括外延层;A plurality of high-voltage diodes are electrically connected to the plurality of high-voltage power chips respectively; any one of the plurality of high-voltage diodes comprises an epitaxial layer; 其中,所述多个高压二极管中的至少两个相邻的高压二极管的外延层被构造成一体件,以使所述至少两个相邻的高压二极管被集成为一体结构。The epitaxial layers of at least two adjacent high-voltage diodes among the plurality of high-voltage diodes are constructed as an integral piece, so that the at least two adjacent high-voltage diodes are integrated into an integral structure. 根据权利要求13所述的功率模块,其中,所述任一个高压二极管还包括:The power module according to claim 13, wherein any one of the high-voltage diodes further comprises: 第二有源区;和a second active region; and 第二终端区,围绕所述第二有源区设置;a second terminal region, disposed around the second active region; 其中,所述第二有源区和所述第二终端区中的至少一者包括第二钝化层;所述第二钝化层设置在所述外延层的一侧表面;所述至少两个相邻的高压二极管的第二钝化层间隔开设置,且所述至少两个相邻的高压二极管的所述第二钝化层之间限定出第二分隔部;所述第二分隔部被配置为将所述至少两个相邻的高压二极管进行物理分隔。Wherein, at least one of the second active area and the second terminal area includes a second passivation layer; the second passivation layer is arranged on a side surface of the epitaxial layer; the second passivation layers of the at least two adjacent high-voltage diodes are spaced apart, and a second partition is defined between the second passivation layers of the at least two adjacent high-voltage diodes; the second partition is configured to physically separate the at least two adjacent high-voltage diodes. 根据权利要求14所述的功率模块,其中,所述外延层的靠近所述第二钝化层的一侧表面的对应所述第二分隔部的位置处,设置有第二电气隔离部;所述第二电气隔离部被配置为将所述至少两个相邻的高压二极管电气分隔,以避免所述至少两个相邻的高压二极管之间电导通。The power module according to claim 14, wherein a second electrical isolation portion is provided at a position corresponding to the second separation portion on a side surface of the epitaxial layer close to the second passivation layer; the second electrical isolation portion is configured to electrically separate the at least two adjacent high-voltage diodes to avoid electrical conduction between the at least two adjacent high-voltage diodes. 根据权利要求14或15所述的功率模块,其中,所述任一个高压二极管还包括衬底,所述衬底设置在所述外延层的背离所述第二钝化层的一侧表面;所述至少两个相邻的高压二极管的衬底被构造成一体件。The power module according to claim 14 or 15, wherein any one of the high-voltage diodes further comprises a substrate, and the substrate is arranged on a surface of the epitaxial layer facing away from the second passivation layer; and the substrates of the at least two adjacent high-voltage diodes are constructed as an integral piece. 根据权利要求16所述的功率模块,其中,所述外延层包括:The power module according to claim 16, wherein the epitaxial layer comprises: 第一子外延层;和a first sub-epitaxial layer; and 第二子外延层,所述第一子外延层设置在所述第二子外延层与所述衬底之间;a second sub-epitaxial layer, wherein the first sub-epitaxial layer is disposed between the second sub-epitaxial layer and the substrate; 其中,所述至少两个相邻的高压二极管的第一子外延层被构造成一体件,且所述至少两个相邻的高压二极管的第二子外延层被构造成一体件。The first sub-epitaxial layers of the at least two adjacent high-voltage diodes are constructed as an integral part, and the second sub-epitaxial layers of the at least two adjacent high-voltage diodes are constructed as an integral part. 根据权利要求17所述的功率模块,其中,所述衬底、所述第一子外延层和所述第二子外延层均为N型半导体;所述衬底的掺杂浓度大于所述第一子外延层的掺杂浓度,且所述第一子外延层的掺杂浓度大于所述第二子外延层的掺杂浓度,以使所述高压二极管实现单向导电。The power module according to claim 17, wherein the substrate, the first sub-epitaxial layer and the second sub-epitaxial layer are all N-type semiconductors; the doping concentration of the substrate is greater than the doping concentration of the first sub-epitaxial layer, and the doping concentration of the first sub-epitaxial layer is greater than the doping concentration of the second sub-epitaxial layer, so that the high-voltage diode can achieve unidirectional conduction. 根据权利要求13至18中任一项所述的功率模块,还包括:The power module according to any one of claims 13 to 18, further comprising: 功率芯片基座,所述低压功率芯片、所述低压二极管、所述多个高压功率芯片和所述多个高压二极管片设置在所述功率芯片基座上;A power chip base, on which the low-voltage power chip, the low-voltage diode, the plurality of high-voltage power chips and the plurality of high-voltage diode chips are arranged; 封装外壳,所述功率芯片基座的至少一部分、所述低压驱动芯片、所述高压驱动芯片、所述低压功率芯片、所述低压二极管、所述多个高压功率芯片和所述多个高压二极管被封装于所述封装外壳内;所述功率模块的宽度方向上相对两侧,分别为所述功率模块的控制侧和功率侧;A packaging shell, in which at least a portion of the power chip base, the low-voltage driver chip, the high-voltage driver chip, the low-voltage power chip, the low-voltage diode, the plurality of high-voltage power chips and the plurality of high-voltage diodes are packaged; two opposite sides in the width direction of the power module are respectively the control side and the power side of the power module; 控制侧引线框架;所述控制侧引线框架连接所述功率芯片基座,且所述控制侧引线框架的至少一部分被封装在所述封装外壳内;所述控制侧引线框架包括:A control side lead frame; the control side lead frame is connected to the power chip base, and at least a portion of the control side lead frame is packaged in the package shell; the control side lead frame includes: 低压芯片基岛,所述低压驱动芯片设置在所述低压芯片基岛上;A low-voltage chip base island, wherein the low-voltage driver chip is arranged on the low-voltage chip base island; 高压芯片基岛,所述高压驱动芯片设置在所述高压芯片基岛上,和a high-voltage chip base island, the high-voltage driver chip is arranged on the high-voltage chip base island, and 多个控制侧引脚,多个所述控制侧引脚与所述低压驱动芯片和所述高压驱动芯片电连接,且从所述控制侧延伸至所述封装外壳的外部; A plurality of control side pins, wherein the plurality of control side pins are electrically connected to the low voltage driver chip and the high voltage driver chip and extend from the control side to the outside of the package shell; 功率侧引线框架,所述功率侧引线框架连接所述功率芯片基座,且所述功率侧引线框架的至少一部分被封装在所述封装外壳内;所述功率侧引线框架包括多个功率侧引脚,所述多个功率侧引脚与所述低压二极管和所述高压二极管电连接,且从所述功率侧延伸至所述封装外壳的外部。A power side lead frame, the power side lead frame is connected to the power chip base, and at least a portion of the power side lead frame is encapsulated in the packaging shell; the power side lead frame includes a plurality of power side pins, the plurality of power side pins are electrically connected to the low voltage diode and the high voltage diode, and extend from the power side to the outside of the packaging shell. 根据权利要求19所述的功率模块,其中,所述至少一个低压二极管包括多个低压二极管;The power module of claim 19, wherein the at least one low voltage diode comprises a plurality of low voltage diodes; 所述功率芯片基座包括:The power chip base comprises: 多个低压导电部,所述多个低压导电部间隔开设置;所述多个低压二极管对应设置在所述多个低压导电部上;以及A plurality of low-voltage conductive parts, wherein the plurality of low-voltage conductive parts are arranged at intervals; the plurality of low-voltage diodes are correspondingly arranged on the plurality of low-voltage conductive parts; and 高压导电部,与所述多个低压导电部间隔开设置,所述多个高压二极管设置在所述高压导电部上;A high-voltage conductive portion is arranged to be spaced apart from the plurality of low-voltage conductive portions, and the plurality of high-voltage diodes are arranged on the high-voltage conductive portion; 其中,所述高压导电部和所述多个低压导电部与对应的所述功率侧引脚相连接。Wherein, the high-voltage conductive part and the plurality of low-voltage conductive parts are connected to the corresponding power-side pins. 根据权利要求1至20中任一项所述的功率模块,其中,所述高压驱动芯片包括电源端和高侧悬浮供电端,所述自举升压模块的正端与所述电源端连接,所述自举升压模块的负端与所述高侧悬浮供电端连接。The power module according to any one of claims 1 to 20, wherein the high-voltage driver chip includes a power supply terminal and a high-side floating power supply terminal, the positive terminal of the bootstrap boost module is connected to the power supply terminal, and the negative terminal of the bootstrap boost module is connected to the high-side floating power supply terminal. 一种电子设备,包括根据权利要求1至21中任一项所述的功率模块。 An electronic device comprises the power module according to any one of claims 1 to 21.
PCT/CN2024/074791 2023-02-28 2024-01-30 Power module and electronic device comprising same WO2024179260A1 (en)

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CN202310188427.8 2023-02-28
CN202310188489.9 2023-02-28
CN202310188449.4A CN116190369B (en) 2023-02-28 2023-02-28 Intelligent power module and electronic equipment having the same
CN202310188449.4 2023-02-28
CN202310190287.8A CN116247049B (en) 2023-02-28 2023-02-28 Power module and electronic equipment having the same
CN202310188489.9A CN116130477B (en) 2023-02-28 2023-02-28 Intelligent power module and electronic equipment having the same
CN202310188427.8A CN116072663B (en) 2023-02-28 2023-02-28 Power module and electronic equipment with same
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