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WO2022156227A1 - 一种气相法制备微细粉的耐高温液体回流与出气结构 - Google Patents

一种气相法制备微细粉的耐高温液体回流与出气结构 Download PDF

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Publication number
WO2022156227A1
WO2022156227A1 PCT/CN2021/116952 CN2021116952W WO2022156227A1 WO 2022156227 A1 WO2022156227 A1 WO 2022156227A1 CN 2021116952 W CN2021116952 W CN 2021116952W WO 2022156227 A1 WO2022156227 A1 WO 2022156227A1
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Prior art keywords
pipeline
gas outlet
high temperature
fine powder
phase method
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PCT/CN2021/116952
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English (en)
French (fr)
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钟笔
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钟笔
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Priority claimed from CN202120201012.6U external-priority patent/CN214436543U/zh
Priority claimed from CN202110099337.2A external-priority patent/CN112774228A/zh
Application filed by 钟笔 filed Critical 钟笔
Priority to JP2023516463A priority Critical patent/JP2023540814A/ja
Publication of WO2022156227A1 publication Critical patent/WO2022156227A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/02—Making metallic powder or suspensions thereof using physical processes
    • B22F9/12—Making metallic powder or suspensions thereof using physical processes starting from gaseous material
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B19/00—Obtaining zinc or zinc oxide
    • C22B19/04—Obtaining zinc by distilling
    • C22B19/16—Distilling vessels

Definitions

  • the invention belongs to the technical field of fine powder preparation, in particular to a high temperature-resistant liquid reflux and gas outlet structure for the preparation of fine powder by a gas phase method.
  • the process of preparing fine powder particles by evaporation condensation gas phase method is a process in which the material to be prepared is first heated and gasified at high temperature, and then solidified and formed from gaseous state to liquid state. Because the fine powder particles to be prepared are microscopic materials, mostly nano-, sub-micron or micron-scale powders, the formed particles are small in size, very fast in formation, and very high in temperature. Although the technical principle of steam discharge is simple, it is Practical application is very difficult. After the vapor is discharged from the inner cavity of the crucible, it is very easy to condense into liquid or solid in case of condensation. The liquid is easy to flow out of the crucible, resulting in material loss. The appearance of solid can easily cause the outlet to block and affect the continuous production.
  • the purpose of the present invention is to provide a high temperature resistant liquid reflux and gas outlet structure for the preparation of fine powder by gas phase method, so as to solve the problem that after the steam is discharged from the inner cavity of the crucible, it is very easy to condense into liquid or solid in case of condensation, and the liquid is easy to flow out of the crucible. In addition, it leads to material loss, and the appearance of solids can easily cause outlet blockage and affect the continuation of continuous production.
  • a high temperature-resistant liquid return and gas outlet structure for preparing fine powder by a gas phase method comprising a pipeline for liquid return and gas outlet shared, and a thermal insulation structure and a casing are arranged on the outside of the pipeline in sequence;
  • the lower end of the pipe extends out of the casing and is inserted into the evaporator to be connected with the crucible evaporation gas outlet;
  • the lower end of the casing is provided with a lower connecting portion for connecting with the evaporator casing, and the upper end of the casing is provided with an upper connecting portion for connecting with a subsequent device.
  • the material of the pipe is a material that is difficult to produce a physical or chemical reaction with the prepared powder material under high temperature conditions.
  • the temperature inside the pipeline is above the melting point temperature of the prepared powder material, or between the boiling point and the melting point temperature of the prepared powder material.
  • the shape and size of the cross section of the vaporized gas outlet of the crucible in the evaporator, the pipeline and the connection port of the subsequent device are the same in shape and size, or the shape and size of the cross section are different.
  • the inner shape and inner diameter of the inner cavity at the connection between the evaporator and the pipeline, the inner shape and inner diameter of the inner cavity of the outer shell, and the inner shape and inner diameter of the inner cavity at the connection between the subsequent device and the outer shell are the same or similar.
  • the inner shape is not the same as the inner diameter;
  • connection should be a stepped connection, a gentle deformation connection, or the outer shell should be designed as a transition deformation body of the inner shape and inner diameter of the front and rear shell structures.
  • the casing is connected in multiple sections or shared with casings of adjacent functional structures.
  • the outer shell is of a jacket structure, and a cooling liquid inlet and a cooling liquid outlet communicated with the jacket structure are provided on the outer shell.
  • a fixed structure is provided on the outside of the pipeline.
  • a heating device is provided outside the pipeline.
  • the pipeline is a multi-segment splicing structure, and two adjacent segments are connected by a sub-mother snap; or, the pipeline is a functional segment in an integrated structure of front and rear equipment.
  • the connection port of the internal circulation pipeline through the design of the connection port of the internal circulation pipeline, the design of heat preservation and the control of temperature, the high-temperature steam and the particles that may have been liquefied or solidified can smoothly pass through the liquid backflow and the shared gas outlet with the carrier gas, and can be connected with the internal pipelines of other equipment.
  • the connection is fed into the next structure.
  • the solid state of the required preparation material appearing in this pipeline is smoothly melted into a liquid state, or the liquid state produced by the convergence can be returned to the crucible in the high-temperature evaporator through this pipeline.
  • FIG. 1 is a schematic structural diagram of the high temperature resistant liquid reflux and gas outlet structure of the present invention.
  • the terms “installed”, “connected” and “connected” should be understood in a broad sense, unless otherwise expressly specified and limited, for example, it may be a fixed connection or a detachable connection Connection, or integral connection; may be mechanical connection or electrical connection; may be direct connection, indirect connection through an intermediate medium, or internal communication between two elements.
  • installed may be a fixed connection or a detachable connection Connection, or integral connection; may be mechanical connection or electrical connection; may be direct connection, indirect connection through an intermediate medium, or internal communication between two elements.
  • the high temperature steam is formed in the crucible inside the high temperature evaporator.
  • the carrier gas passes through the crucible vapor outlet and the connection port of the high temperature liquid return and gas outlet structure, it enters the high temperature resistant liquid return and gas outlet shared pipeline, and the high temperature energy carried by the high temperature carrier gas will cause the high temperature liquid return to the internal pipeline of the gas outlet structure.
  • the lumen is maintained above the melting point temperature of the desired preparation material.
  • the powder material vapor carried along with the high-temperature carrier gas is in the liquid return and gas outlet pipeline. Part of the vapor condenses into a liquid state due to the decrease in temperature.
  • the gaseous or liquid particles collide with the inner wall of the internal pipeline and adhere to the high temperature.
  • the powder material in the internal pipeline flows back into the crucible in the liquid phase through the internal pipeline, or the solid phase of the external powder material in the internal pipeline can be quickly melted into a liquid phase and then flow back into the crucible along the pipeline. Maintenance can prevent the occurrence of solids that make powder materials and block the pipeline.
  • this production process is a cyclic production process.
  • the high temperature air flow in the crucible continuously carries heat into the structure, and at the same time, a high temperature-resistant thermal insulation material is provided outside the structure.
  • a heating structure eg, medium frequency heating or resistance wire heating, etc.
  • reinforcement structures can also be provided on other sides to prevent the internal pipes from being deformed or damaged.
  • the high-temperature steam and the particles that may have liquefied or solidified can be smoothly transported to the next structure through the liquid return and gas outlet shared pipelines and the internal pipeline connections of other equipment along with the carrier gas.
  • the solid state of the required preparation material appearing in this pipeline is smoothly melted into a liquid state, or the liquid state generated by the convergence can be returned to the crucible in the high-temperature evaporator through this pipeline.
  • the present application provides a high-temperature-resistant liquid reflux and gas outlet structure for preparing fine powder by gas phase method, including a pipeline 9 for liquid reflux and gas outlet, and a thermal insulation structure 4 and a casing 5 are arranged on the outside of the pipeline 9 in turn. .
  • the lower end of the pipe 9 protrudes out of the casing 5 and is inserted into the evaporator to be connected to the crucible evaporation gas outlet.
  • the lower end of the casing 5 is provided with a lower connecting portion 3 for connecting with the evaporator casing 2
  • the upper end of the casing 5 is provided with an upper connecting portion 6 for connecting with the subsequent device, and the upper end of the pipe 9 is also connected to the subsequent device. device connection.
  • the material of the pipeline 9 is a material that is not easy to produce physical or chemical reaction with the prepared powder material under high temperature conditions, so as to ensure that its structure can be used for powder preparation cycle production for a long time and does not affect the powder to be prepared. .
  • the inside of the pipeline 9 is used by liquid return and gas outlet, and the temperature inside the pipeline 9 is above the melting point temperature of the prepared powder material, or between the boiling point and the melting point temperature of the prepared powder material.
  • the structure realizes the functions of liquid backflow and gas outlet, there is a phenomenon that a part of the powder particles collides and grows in the gas phase or liquid phase.
  • the thermal insulation structure 4 is made of thermal insulation and high temperature resistant materials.
  • the thermal insulation structure 4 is used for thermal insulation of its internal structure, and the internal temperature is controlled to be above the melting point temperature of the powder material to be prepared, so that the powder material appearing in the pipeline 9 flows back into the crucible in a liquid phase, or is allowed to flow back into the crucible.
  • the solid phase of the powder material in the pipeline 9 can be rapidly melted into a liquid phase and then flow back into the crucible, and the maintenance of high temperature can prevent the phenomenon that the pipeline 9 is blocked by the solid for preparing the powder material.
  • the casing 5 is a jacket structure, and a cooling liquid inlet and a cooling liquid outlet communicated with the jacket structure are arranged on the casing 5 . Circulating coolant is introduced into the jacket structure to protect the equipment from cooling.
  • the housing 5 can be multi-segmented or shared with housings of adjacent functional structures.
  • the shape and size of the cross section of the evaporation gas outlet of the crucible 1 in the evaporator, the pipeline 9 and the connection port of the subsequent device are the same, or the shapes and sizes of the cross sections are different. Specifically, it can be selected according to the needs of equipment and use, and the change of the size or ratio or the choice of shape is not considered as other solutions to realize the function of this structure.
  • the inside of the shared pipeline for the outlet and the return can be designed with variable diameter deformation.
  • the inner shape and inner diameter of the inner cavity at the connection between the evaporator and the pipe 9, the inner shape and inner diameter of the inner cavity of the outer shell 5, and the inner shape and inner diameter of the inner cavity at the connection between the subsequent device and the outer shell are the same or similar, or, The inner shape is not the same as the inner diameter.
  • connection is a stepped connection, a gentle deformation connection, or the outer shell 5 is designed as a transition deformation body of the inner shape and inner diameter of the front and rear shell structures.
  • the choice of shape, size and proportion can be designed according to the needs of use, not as other solutions for the use of this high temperature resistant liquid return and gas outlet structure function.
  • the casing can be connected in multiple sections or shared with the casings of adjacent functional structures. The size, shape and front and rear connection methods of the casing are not intended to limit or change the backflow and air outlet structures.
  • the lower end of the pipe needs to be extended into the structure of the steam outlet of the crucible or its edge to ensure that the reflux liquid can flow into the crucible instead of leaking out of the crucible.
  • a fixing structure 8 can be provided on the outer side of the pipeline 9 to prevent the pipeline 9 from being deformed, damaged or collapsed under high temperature.
  • the fixing structure 8 can be made of the same material as the pipe 9, or can be made of other high temperature resistant materials.
  • a heating device 7 may be provided on the outside of the duct 9 .
  • the pipeline 9 is a multi-segment splicing structure, and two adjacent segments are connected by a sub-mother buckle; or, the pipeline 9 is a functional segment in an integrated structure of front and rear equipment.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Glanulating (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)

Abstract

本发明涉及一种气相法制备微细粉的耐高温液体回流与出气结构，包括供液体回流与出气共用的通道，在通道的外侧依次设置有保温结构及外壳；通道的下端伸出于壳体插入蒸发器内部与坩埚蒸发气出口连接；在外壳的下端设置有下连接部与蒸发器外壳连接，外壳的上端设置有上连接部与后序装置连接。本技术方案通过对内部流通管道连接口设计，保温设计与温度控制，使高温蒸气及可能已液化或固化的粒子随着载流气可以顺利通过液体回流与出气共用管道，并与其他设备的内部管道连接输送到下一个结构中。

Description

一种气相法制备微细粉的耐高温液体回流与出气结构 技术领域
本发明属于微细粉制备技术领域，特别是指一种气相法制备微细粉的耐高温液体回流与出气结构。
背景技术
使用蒸发冷凝气相法制备微细粉粒子的过程，是将所需制备的物质先经过高温加热气化后，再由气态经液态后固化成形的过程。因为所需制备的微细粉粒子为微观材料，多为纳米级、亚微米级或微米级粉末，成形的粒子尺寸较小，形成速度非常快，温度非常高，蒸气排出的技术原理虽然简单，但是实际运用却非常困难。在将蒸气排出坩埚内腔后，极易出现遇冷凝聚为液体或固体的情况，液体易流出坩埚外，导致物料损失，固体的出现易造成出口堵塞而影响连续生产的持续进行。
发明内容
本发明的目的在于提供一种气相法制备微细粉的耐高温液体回流与出气结构，以解决在将蒸气排出坩埚内腔后，极易出现遇冷凝聚为液体或固体的情况，液体易流出坩埚外，导致物料损失，固体的出现易造成出口堵塞影响连续生产的持续进行的问题。
本发明是通过以下技术方案实现的：
一种气相法制备微细粉的耐高温液体回流与出气结构，包括供液体回流与出气共用的管道，在管道的外侧依次设置有保温结构及外壳；
所述管道的下端伸出所述外壳并插入蒸发器内部与坩埚蒸发气出口连接；
在所述外壳的下端设置有用于与蒸发器外壳连接的下连接部，外壳的上端设置有用于与后序装置连接的上连接部。
可选的，所述管道的材质为与制备的粉体材料在高温条件下不易产生物理或化学反应的材料。
可选的，管道内部的温度在所制备的粉体材料的熔点温度以上，或处于制 备的粉体材料的沸点与熔点温度之间。
可选的，蒸发器内的坩埚蒸发气出口、所述管道及所述后序装置的连接口三者的横截面的形状和尺寸相同，或者，横截面的形状和尺寸不相同。
可选的，蒸发器与管道连接处的内腔的内形与内径、外壳的内腔的内形与内径及后序装置与外壳连接处的内腔的内形与内径三者相同或相似，或者，内形与内径不相同；
若内形与内径不相同，连接处为台阶形连接、平缓变形连接，或将外壳设计为前后端壳体结构的内形与内径的中转变形体。
可选的，所述外壳为多段连接或是与相邻功能结构的外壳共用。
可选的，所述外壳为夹套结构，并在外壳上设置有与夹套结构连通的冷却液进口和冷却液出口。
可选的，在管道外侧设置有固定结构。
可选的，在管道外侧设置有加热设备。
可选的，所述管道为多节拼接结构，相邻两节之间通过子母卡扣连接；或者，所述管道为前后端设备一体式结构中的功能段。
本发明的有益效果是：
本技术方案通过对内部流通管道连接口设计，保温设计与温度控制，使高温蒸气及可能已液化或固化的粒子随着载流气可以顺利通过液体回流与出气共用管道，并与其他设备的内部管道连接输送到下一个结构中。在此管道内出现的所需制备材料的固态顺利融化为液态，或汇聚产生的液态，都可以通过此管道回流进入高温蒸发器内的坩埚内。
附图说明
图1为本发明耐高温液体回流与出气结构的结构示意图。
附图标记说明
1、坩埚，2、蒸发器外壳，3、下连接部，4、保温结构，5、外壳，6、上连接部，7、加热设备，8、固定结构，9、管道，10、管道与后序装置的连接口，11、管道与坩埚蒸发气连接处。
具体实施方式
以下通过实施例来详细说明本发明的技术方案，以下的实施例仅是示例性的，仅能用来解释和说明本发明的技术方案，而不能解释为是对本发明技术方案的限制。
在本发明的描述中，需要说明的是，术语“中心”、“上”、“下”、“左”、“右”、“前”、“后”、“竖直”、“水平”、“内”、“外”等指示方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为是对本发明的限制，此外，术语“第一”、“第二”、“第三”仅用于描述目的，而不能理解为指示或暗示相对重要性。
在本发明的描述中，需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，也可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本发明中的具体含义。
在蒸发冷凝气相法制备粉体材料时，高温蒸发器内部的坩埚内，高温蒸气得以形成。随着载流气体通过坩埚蒸气出口与耐高温液体回流与出气结构的连接口，进入耐高温液体回流与出气共用管道内，高温载流气体携带的高温能量将耐高温液体回流与出气结构内部管道内腔维持在所需制备材料的熔点温度以上。随着高温载流气体一同被携带的粉体材料蒸气在液体回流与出气管道内，部分蒸气因为温度降低凝结为液态，气态或液态的粒子碰撞到内部管道的内壁并附着，高温让出现在此内部管道内的粉体材料以液相通过内部管道向坩埚内回流，或让外来的出现在内部管道内的粉体材料的固相能快速融化为液相后沿管道向坩埚内回流，高温的维持可防止出现制备粉体材料的固体而出现堵塞管道现象的发生。
为了保持高温条件，此生产过程为循环生产过程，坩埚内的高温气流不断的将热量携带进入此结构内，同时在此结构外侧设置耐高温的保温材料。而且，可以在内部管道结构外侧设置加热结构(如采用中频加热或电阻丝加热等方式)。为了保护内部管道的长时间工作，还可以在其他侧设置加固结构，以防 止内部管道变形或破损。高温蒸气及可能已液化或固化的粒子随着载流气可以顺利通过液体回流与出气共用管道与其他设备的内部管道连接输送到下一个结构中。此管道内出现的所需制备材料的固态顺利融化为液态，或汇聚产生的液态，都可以通过此管道回流进入高温蒸发器内的坩埚内。
如图1所示，本申请提供一种气相法制备微细粉的耐高温液体回流与出气结构，包括供液体回流与出气共用的管道9，在管道9的外侧依次设置有保温结构4及外壳5。
所述管道9的下端伸出所述外壳5并插入蒸发器内部与坩埚蒸发气出口连接。在所述外壳5的下端设置有用于与所述蒸发器外壳2连接的下连接部3，外壳5的上端设置有用于与后序装置连接的上连接部6，管道9的上端也与后序装置连接。
所述管道9的材质为与制备的粉体材料在高温条件下不易产生物理或化学反应的材料，以保证其结构可以长时间用于粉体制备循环生产并且不对所需制备的粉体产生影响。
管道9的内部由液体回流与出气共同使用，管道9内部的温度在所制备的粉体材料的熔点温度以上，或处于制备的粉体材料的沸点与熔点温度之间。在本结构实现液体回流与出气功能时，存在一部分粉体粒子气相或液相碰撞长大的现象。
在管道9的外壁与外壳5之间主要为保温结构4，保温结构4选择保温且耐高温材料制作。保温结构4用于对其内部的结构进行保温，控制其内部的温度处于所需制备粉体材料的熔点温度以上，让出现在管道9内的粉体材料以液相向坩埚内回流，或让管道9内的粉体材料的固相能快速融化为液相后向坩埚内回流，高温的维持可防止出现制备粉体材料的固体堵塞管道9的现象发生。
所述外壳5为夹套结构，并在外壳5上设置有与夹套结构连通的冷却液进口和冷却液出口。夹套结构内部通入循环冷却液，以对设备进行冷却保护。外壳5可以是多段连接或是与相邻功能结构的外壳共用。
蒸发器内的坩埚1的蒸发气出口、所述管道9及所述后序装置的连接口三者的横截面的形状和尺寸相同，或者，横截面的形状和尺寸不相同。具体可以根据设备与使用需要进行选定，尺寸或比例或形状的选择的改变不作为此结构 的功能实现的其他方案。出气与回流共用管道的内部可以做变径变形设计。
蒸发器与管道9连接处的内腔的内形与内径、外壳5的内腔的内形与内径及后序装置与外壳连接处的内腔的内形与内径三者相同或相似，或者，内形与内径不相同。
若内形与内径不相同，连接处为台阶形连接、平缓变形连接，或将外壳5设计为前后端壳体结构的内形与内径的中转变形体。形状和尺寸大小与比例的选择可以根据使用需要进行设计，不作为此耐高温液体回流与出气结构功能的使用的其他方案。同时外壳可以是多段连接或是与相邻功能结构的外壳共用，壳体的尺寸、形状及前后连接方式不作为对回流和出气结构的限制或变更。
管道与坩埚蒸气出口连接处11，需要将管道的下端伸入坩埚蒸出气出口结构内或其边缘内，以保证回流液可以流入坩埚，而不是渗漏至坩埚外。
在高温条件下，为保证长时间工作需要，可以在管道9的外侧设置固定结构8，以防止管道9在高温下变形、破损或坍塌。固定结构8可为与管道9相同的材料，也可以由其他耐高温材料制成。而且，管道9的外侧可设置加热设备7。
所述管道9为多节拼接结构，相邻两节之间通过子母卡扣连接；或者，所述管道9为前后端设备一体式结构中的功能段。
尽管已经示出和描述了本发明的实施例，对于本领域的普通技术人员而言，可以理解在不脱离本发明的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变形，本发明的范围由所附权利要求极其等同限定。

Claims (10)

  1. 一种气相法制备微细粉的耐高温液体回流与出气结构，其特征在于，包括供液体回流与出气共用的管道，在管道的外侧依次设置有保温结构及外壳；
    所述管道的下端伸出所述外壳并插入蒸发器内部与坩埚蒸发气出口连接；
    在所述外壳的下端设置有用于与蒸发器外壳连接的下连接部，外壳的上端设置有用于与后序装置连接的上连接部。
  2. 根据权利要求1所述的气相法制备微细粉的耐高温液体回流与出气结构，其特征在于，所述管道的材质为与制备的粉体材料在高温条件下不易产生物理或化学反应的材料。
  3. 根据权利要求1或2所述的气相法制备微细粉的耐高温液体回流与出气结构，其特征在于，管道内部的温度在所制备的粉体材料的熔点温度以上，或处于制备的粉体材料的沸点与熔点温度之间。
  4. 根据权利要求1至3中任一项所述的气相法制备微细粉的耐高温液体回流与出气结构，其特征在于，蒸发器内坩埚蒸发气出口、所述管道及所述后序装置的连接口三者的横截面的形状和尺寸相同，或者，横截面的形状和尺寸不相同。
  5. 根据权利要求1至4中任一项所述的气相法制备微细粉的耐高温液体回流与出气结构，其特征在于，蒸发器与外壳连接处的内腔的内形与内径、外壳的内腔的内形与内径及后序装置与外壳连接处的内腔的内形与内径三者相同或相似，或者，内形与内径不相同；
    若内形与内径不相同，连接处为台阶形连接、平缓变形连接，或将外壳设计为前后端壳体结构的内形与内径的中转变形体。
  6. 根据权利要求1至5中任一项所述的气相法制备微细粉的耐高温液体回流与出气结构，其特征在于，所述外壳为多段连接或是与相邻功能结构的外壳共用。
  7. 根据权利要求1至6中任一项所述的气相法制备微细粉的耐高温液体回流与出气结构，其特征在于，所述外壳为夹套结构，并在外壳上设置有与夹套结构连通的冷却液进口和冷却液出口。
  8. 根据权利要求1至7中任一项所述的气相法制备微细粉的耐高温液体 回流与出气结构，其特征在于，在管道外侧设置有固定结构。
  9. 根据权利要求1至8中任一项所述的气相法制备微细粉的耐高温液体回流与出气结构，其特征在于，在管道外侧设置有加热设备。
  10. 根据权利要求1至9中任一项所述的气相法制备微细粉的耐高温液体回流与出气结构，其特征在于，所述管道为多节拼接结构，相邻两节之间通过子母卡扣连接；或者，所述管道为前后端设备一体式结构中的功能段。
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