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WO2021233074A1 - Manufacturing method of lens grating - Google Patents

Manufacturing method of lens grating Download PDF

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Publication number
WO2021233074A1
WO2021233074A1 PCT/CN2021/089584 CN2021089584W WO2021233074A1 WO 2021233074 A1 WO2021233074 A1 WO 2021233074A1 CN 2021089584 W CN2021089584 W CN 2021089584W WO 2021233074 A1 WO2021233074 A1 WO 2021233074A1
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WO
WIPO (PCT)
Prior art keywords
substrate
light
lenses
opening
manufacturing
Prior art date
Application number
PCT/CN2021/089584
Other languages
French (fr)
Chinese (zh)
Inventor
刁鸿浩
黄玲溪
Original Assignee
北京芯海视界三维科技有限公司
视觉技术创投私人有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 北京芯海视界三维科技有限公司, 视觉技术创投私人有限公司 filed Critical 北京芯海视界三维科技有限公司
Publication of WO2021233074A1 publication Critical patent/WO2021233074A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B30/00Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
    • G02B30/20Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes
    • G02B30/26Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type
    • G02B30/27Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type involving lenticular arrays
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • G02B3/0012Arrays characterised by the manufacturing method
    • G02B3/0031Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • G02B3/0037Arrays characterized by the distribution or form of lenses
    • G02B3/005Arrays characterized by the distribution or form of lenses arranged along a single direction only, e.g. lenticular sheets
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • G02B3/0037Arrays characterized by the distribution or form of lenses
    • G02B3/0056Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings

Definitions

  • This application relates to the field of optical technology, for example, to a method for manufacturing a lens grating.
  • lens gratings are widely used in 3D displays, and 3D displays based on lens gratings can obtain 3D viewing effects without using glasses.
  • the embodiment of the present disclosure provides a method for manufacturing a lens grating to solve the technical problem of image crosstalk caused by the distortion area between two lenses in the lens grating.
  • a method for manufacturing a lens grating including:
  • At least one light-shielding structure and at least two lenses are formed on the substrate, so that the light-shielding structure corresponds to the boundary area of adjacent lenses among the at least two lenses.
  • the substrate may be a monolithic substrate.
  • forming at least one light-shielding structure and at least two lenses on the substrate may include:
  • At least two lenses are formed on one side of the substrate
  • the at least one light shielding structure is formed on the substrate.
  • forming at least one light-shielding structure on the substrate may include:
  • An opening is provided on the substrate corresponding to the boundary area of the adjacent lenses in the at least two lenses;
  • the light-shielding material is filled in the opening to form a light-shielding structure.
  • providing an opening on the substrate corresponding to the boundary area of the adjacent lens of the at least two lenses may include:
  • the substrate corresponds to the boundary area of the adjacent lenses of the at least two lenses, and an opening is provided along the thickness direction of the substrate.
  • providing the opening along the thickness direction of the substrate may include:
  • An opening is formed from the side of the substrate away from the at least two lenses, so that the opening extends into the corresponding lens, or extends into the substrate, or penetrates the substrate.
  • filling the opening with a light-shielding material may include:
  • the light-shielding material in the opening may further include:
  • forming at least one light-shielding structure and at least two lenses on the substrate may include:
  • At least two lenses are formed on one side of the substrate.
  • forming at least one light-shielding structure on the substrate may include:
  • the light-shielding material is filled in the opening to form a light-shielding structure.
  • providing an opening at a preset position of the substrate may include:
  • an opening is provided along the thickness direction of the substrate, and the opening extends to the other side of the substrate or extends into the substrate.
  • filling the opening with a light-shielding material may include:
  • the light-shielding material in the opening may further include:
  • forming at least two lenses on one side of the substrate may include:
  • At least two lenses are formed on either side of the substrate.
  • the light-shielding material after the light-shielding material is completely filled in the opening, it may further include:
  • a light-shielding material is formed corresponding to the opening area, so that the formed light-shielding structure partially protrudes from the surface of the substrate.
  • forming at least one light-shielding structure on the substrate may include:
  • a light-shielding structure is formed on one side of the substrate, and the light-shielding structure completely protrudes from the surface of the substrate.
  • forming at least two lenses on one side of the substrate may include:
  • the light-shielding structure on the substrate protrudes from one side of the substrate, and at least two lenses are arranged so that the convex part of the light-shielding structure corresponds to the boundary area of the adjacent lenses of the at least two lenses.
  • the substrate may be a partial substrate:
  • Forming at least one light shielding structure on the substrate may include:
  • the substrate material is laid on the side of the partial substrate where the light-shielding structure is formed.
  • the formed at least two lenses may include at least one of a concave lens and a convex lens.
  • the lens may include at least one of a cylindrical lens and a spherical lens.
  • the lens may include a cylindrical lens
  • Forming at least two lenses on the substrate may include:
  • Part or all of the lenticular lenses are distributed on the substrate in parallel.
  • the lens may include a spherical lens
  • Forming at least two lenses on the substrate may include:
  • Part or all of the spherical lenses are arranged in an array on the substrate.
  • FIG. 1 is a schematic flowchart of an embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure
  • FIG. 2 is a schematic diagram of a cross-sectional structure of a substrate in a first embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure
  • Fig. 3 is a schematic view of the process of forming a light-shielding structure and a lens in the first embodiment of the method for manufacturing a lens grating according to an embodiment of the present disclosure
  • FIG. 4 is a schematic diagram of a cross-sectional structure of a lens formed in the first embodiment of the method for manufacturing a lens grating according to an embodiment of the present disclosure
  • FIG. 5 is a schematic diagram of a cross-sectional structure of forming a light-shielding structure in the first embodiment of the method for manufacturing a lens grating according to an embodiment of the present disclosure
  • FIG. 6 is a schematic cross-sectional structure diagram of an embodiment in which the lens formed in the method for manufacturing the lens grating provided by the embodiment of the present disclosure is a concave lens;
  • FIG. 7 is a schematic cross-sectional structure diagram of an embodiment in which the lens formed in the method for manufacturing the lens grating provided by the embodiment of the present disclosure is a concave lens and a convex lens;
  • FIG. 8 is a schematic flow chart of forming a light-shielding structure in the first embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure
  • FIGS. 9A to 9C are schematic diagrams of the cross-sectional structure of the opening formed in the first embodiment of the manufacturing method of the lens grating provided by the embodiments of the present disclosure.
  • 10A to 10B are schematic diagrams of a cross-sectional structure in which the opening is completely filled with light-shielding material in the first embodiment of the manufacturing method of the lens grating provided by the embodiment of the present disclosure;
  • 11A to 11C are schematic diagrams of the cross-sectional structure of partially filling the light-shielding material in the opening in the first embodiment of the manufacturing method of the lens grating provided by the embodiment of the present disclosure;
  • FIGS. 12A to 12C are schematic diagrams of the cross-sectional structure of the first embodiment of the method for manufacturing a lens grating provided by an embodiment of the present disclosure after partially filling the opening with a light-shielding material and filling the substrate material;
  • FIG. 13 is a schematic view of the process of forming a light-shielding structure and a lens in the second embodiment of the method for manufacturing a lens grating according to an embodiment of the present disclosure
  • FIG. 14 is a schematic diagram of a cross-sectional structure of a substrate formed in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure
  • 15 is a schematic view of the process of forming a light-shielding structure in the second embodiment of the method for manufacturing a lens grating according to an embodiment of the present disclosure
  • 16A to 16B are schematic diagrams of a cross-sectional structure of an opening formed on a substrate in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure
  • FIG. 17A to FIG. 17B are schematic cross-sectional structural diagrams of a substrate completely filled with light-shielding material in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure
  • 18A to 18B are schematic diagrams of a cross-sectional structure of a substrate partially filled with a light-shielding material in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure
  • 19A to 19B are schematic diagrams of the cross-sectional structure of the base material after the substrate is partially filled with light-shielding material in the second embodiment of the method for manufacturing a lens grating according to an embodiment of the present disclosure
  • 20A to 20E are schematic diagrams of a cross-sectional structure of a lens formed in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure
  • 21 is a schematic cross-sectional structure diagram of a second embodiment of a concave lens formed in a method for manufacturing a lens grating according to an embodiment of the present disclosure
  • FIG. 22 is a schematic cross-sectional structure diagram of a second embodiment of a concave lens and a convex lens formed in the method for manufacturing a lens grating according to an embodiment of the present disclosure
  • FIG. 23A to FIG. 23D are schematic cross-sectional structural diagrams of a light-shielding structure formed by etching a light-shielding layer in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure
  • FIG. 24 is a schematic diagram of a cross-sectional structure of a light-shielding layer formed on the surface of a substrate in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure
  • 25 is a schematic cross-sectional structure diagram of a light-shielding structure formed by etching a light-shielding layer formed on the surface of a substrate in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure
  • 26A to 26C are schematic diagrams of a cross-sectional structure of a lens formed in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure
  • 27 to 29 are schematic diagrams of the cross-sectional structure of the substrate formed in the third embodiment of the method for manufacturing a lens grating according to an embodiment of the present disclosure
  • FIG. 30 is a schematic diagram of an arrangement of cylindrical lenses formed in a method for manufacturing a lens grating according to an embodiment of the present disclosure
  • FIG. 31 is a schematic diagram of another arrangement of cylindrical lenses formed in the method for manufacturing a lens grating according to an embodiment of the present disclosure.
  • FIG. 32 is a schematic diagram of an arrangement of spherical lenses formed in a method for manufacturing a lens grating according to an embodiment of the present disclosure
  • FIG. 33 is a schematic diagram of another arrangement of spherical lenses formed in the method for manufacturing a lens grating according to an embodiment of the present disclosure.
  • FIG. 34 is a schematic diagram of an arrangement of cylindrical lenses and spherical lenses in a method for manufacturing a lens grating provided by an embodiment of the present disclosure.
  • 101 substrate; 102: lens; 103: light-shielding structure; 104: opening; 105: substrate material;
  • 201 substrate; 202: opening; 203: light-shielding structure; 204: substrate material; 205: lens; 206: light-shielding layer;
  • 301 part of the substrate
  • 302 light-shielding layer
  • 303 light-shielding structure
  • 304 substrate material
  • 401 substrate; 4021: cylindrical lens; 4022: spherical lens.
  • FIG. 1 is a schematic flowchart of an embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure.
  • a method for manufacturing a lens grating including:
  • FIG. 2 is a schematic diagram of a cross-sectional structure of a substrate in the first embodiment of a method for manufacturing a lens grating provided by an embodiment of the present disclosure.
  • the substrate 101 provided may be an integral substrate.
  • FIG. 3 is a schematic view of the process of forming a light-shielding structure and a lens in the first embodiment of a method for manufacturing a lens grating provided by an embodiment of the present disclosure
  • FIG. 4 is a method for manufacturing a lens grating provided by an embodiment of the present disclosure
  • FIG. 5 is a schematic diagram of a cross-sectional structure of the light-shielding structure formed in the first embodiment of the method for manufacturing a lens grating provided by an embodiment of the present disclosure.
  • Forming at least one light-shielding structure and at least two lenses on the substrate may include:
  • the at least two lenses 102 formed on one surface of the substrate 101 may include at least one of a concave lens and a convex lens.
  • FIG. 4 is a schematic diagram of a cross-sectional structure of a lens formed in the first embodiment of a method for manufacturing a lens grating provided by an embodiment of the present disclosure.
  • the at least two lenses 102 formed on one surface of the substrate 101 may include convex lenses.
  • FIG. 6 is a schematic cross-sectional structure diagram of an embodiment in which the lens formed in the lens grating manufacturing method provided by the embodiment of the present disclosure is a concave lens.
  • the at least two lenses 102 formed on one surface of the substrate 101 may include concave lenses.
  • FIG. 7 is a schematic cross-sectional structure diagram of an embodiment in which the lens formed in the method for manufacturing a lens grating provided by an embodiment of the present disclosure is a concave lens and a convex lens.
  • the at least two lenses 102 formed on one side of the substrate 101 may include convex lenses. And concave lens.
  • the lens 102 is a convex lens as an example.
  • FIG. 8 is a schematic view of the process of forming a light-shielding structure in the first embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure.
  • at least one light-shielding structure is formed on a substrate, including :
  • S1022b Fill the opening with a light-shielding material to form a light-shielding structure.
  • FIGS. 9A to 9C are schematic diagrams of the cross-sectional structure of openings formed in the first embodiment of the method for manufacturing a lens grating provided by an embodiment of the present disclosure, corresponding to at least two openings on the substrate.
  • the boundary area between adjacent lenses in each lens is provided with an opening, including:
  • the substrate corresponds to the boundary area of the adjacent lenses of the at least two lenses, and an opening is provided along the thickness direction of the substrate.
  • providing the opening along the thickness direction of the substrate includes:
  • An opening is formed from the side of the substrate away from the at least two lenses, so that the opening extends into the corresponding lens, or extends into the substrate, or penetrates the substrate.
  • an opening 104 is formed on the side of the substrate 101 away from the at least two lenses 102, and the formed opening 104 extends into the corresponding lens 102.
  • an opening 104 is formed on the side of the substrate 101 away from the at least two lenses 102, and the formed opening 104 extends into the substrate 101.
  • an opening 104 is formed on the side of the substrate 101 away from the at least two lenses 102, and the formed opening 104 penetrates the substrate 101.
  • FIGS. 10A to 11C are schematic diagrams of the cross-sectional structure of completely filling the light-shielding material in the opening in the first embodiment of the manufacturing method of the lens grating provided by the embodiments of the present disclosure
  • FIGS. 11A to 11C are the schematic diagrams of the present disclosure.
  • the manufacturing method of the lens grating provided by the embodiment is a schematic diagram of the cross-sectional structure of partially filling the light-shielding material in the opening in the first embodiment.
  • filling the light-shielding material in the opening includes:
  • the opening 104 extends into the lens 102, the opening 104 is completely filled with light-shielding material, and the formed light-shielding structure 103 extends into the lens 102.
  • the opening 104 extends into the substrate 101, the light shielding material is completely filled in the opening 104, and the formed light shielding structure 103 extends into the substrate 101.
  • the opening 104 penetrates through the substrate 101, and the light shielding material is completely filled in the opening 104, and the formed light shielding structure 103 penetrates the substrate 101.
  • the opening 104 extends into the lens 102, and a light-shielding material is partially filled in the opening 104 to form a light-shielding structure 103.
  • the opening 104 extends into the substrate 101, and a light-shielding material is partially filled in the opening 104 to form a light-shielding structure 103.
  • the opening 104 penetrates through the substrate 101, and a light shielding material is partially filled in the opening 104 to form a light shielding structure 103.
  • FIGS. 12A to 12C are the cross-sectional structure of the substrate material after the opening is partially filled with light-shielding material in the first embodiment of the method for manufacturing a lens grating provided by an embodiment of the present disclosure
  • the material filled on the surface of the light-shielding material is a substrate material.
  • the opening 104 extends into the lens 102, a light shielding material is partially filled in the opening 104, and the substrate material 105 is filled after the light shielding structure 103 is formed.
  • the opening 104 extends into the substrate 101, a light shielding material is partially filled in the opening 104, and the substrate material 105 is filled after the light shielding structure 103 is formed.
  • the opening 104 penetrates the substrate 101, and the light shielding material is partially filled in the opening 104. After the light shielding structure 103 is formed, the substrate material 105 is filled.
  • each light-shielding structure 103 may be the same or different.
  • the light-shielding material of the light-shielding structure 103 protruding from the surface of the substrate 101 and the light-shielding material on the inner part of the substrate 101 may be the same or different.
  • FIG. 13 is a schematic view of the process of forming a light-shielding structure and a lens in the second embodiment of the method for manufacturing a lens grating according to an embodiment of the present disclosure.
  • at least one light-shielding structure is formed on the substrate
  • at least two lenses including:
  • FIG. 14 is a schematic diagram of a cross-sectional structure of a substrate formed in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure.
  • an overall substrate 201 is provided.
  • FIG. 15 is a schematic flow diagram of forming a light-shielding structure in the second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure.
  • at least one light-shielding structure is formed on a substrate, including :
  • S102b Fill the opening with a light-shielding material to form a light-shielding structure.
  • FIGS. 16A to 16B are schematic diagrams of the cross-sectional structure of openings formed on the substrate in the second embodiment of the method for manufacturing a lens grating provided by an embodiment of the present disclosure.
  • the substrate 201 is preformed Design the location of the opening, and set the opening in the preset position of the substrate, including:
  • an opening is provided along the thickness direction of the substrate, and the opening extends to the other side of the substrate or extends into the substrate.
  • an opening 202 is provided, and the opening 202 extends to the other side of the substrate 201.
  • an opening 202 is provided, and the opening 202 extends into the substrate 201.
  • filling the opening with a light-shielding material includes:
  • FIGS. 17A to 17B are schematic diagrams of the cross-sectional structure of the substrate completely filled with light-shielding material in the second embodiment of the manufacturing method of the lens grating provided by the embodiments of the present disclosure.
  • the opening 202 extends to the substrate 201
  • the light-shielding material is completely filled to form a light-shielding structure 203.
  • the opening 202 extends into the substrate 201, and the opening 202 is completely filled with a light-shielding material to form a light-shielding structure 203.
  • FIGS. 18A to 18B are schematic diagrams of the cross-sectional structure of the substrate partially filled with light-shielding material in the second embodiment of the manufacturing method of the lens grating provided by the embodiments of the present disclosure.
  • the opening 202 extends to the other side of the substrate 201, and the A light shielding material is partially filled in 202 to form a light shielding structure 203.
  • the opening 202 extends into the substrate 201, and a light-shielding material is partially filled in the opening 202 to form a light-shielding structure 203.
  • the method further includes:
  • the material filled on the surface of the light-shielding material is a substrate material.
  • 19A to 19B are schematic diagrams of the cross-sectional structure of the substrate after partially filling the light-shielding material with the base material in the second embodiment of the manufacturing method of the lens grating provided by the embodiments of the present disclosure.
  • the opening 202 extends to another part of the substrate 201 On one side, the opening 202 is partially filled with a light-shielding material, and after the light-shielding structure 203 is formed, a substrate material 204 is filled on the surface of the light-shielding material.
  • the opening 202 extends into the substrate 201, and a light shielding material is partially filled in the opening 202.
  • the substrate material 204 is filled on the surface of the light shielding material.
  • forming at least two lenses on one side of the substrate includes:
  • At least two lenses are formed on either side of the substrate.
  • FIGS. 20A to 20E are schematic diagrams of the cross-sectional structure of the lens formed in the second embodiment of the method for manufacturing a lens grating provided by an embodiment of the present disclosure.
  • the formed substrate 201 can be formed on any side of the substrate 201
  • the at least two lenses 205 are schematic diagrams of the cross-sectional structure of the lens formed in the second embodiment of the method for manufacturing a lens grating provided by an embodiment of the present disclosure.
  • the formed substrate 201 can be formed on any side of the substrate 201
  • the at least two lenses 205 are schematic diagrams of the cross-sectional structure of the lens formed in the second embodiment of the method for manufacturing a lens grating provided by an embodiment of the present disclosure.
  • the at least two lenses 205 formed on any side of the substrate 201 may include convex lenses.
  • FIG. 21 is a schematic cross-sectional structure diagram of a second embodiment of a concave lens formed in a method for manufacturing a lens grating according to an embodiment of the present disclosure.
  • the at least two lenses 205 formed on any side of the substrate 201 may include concave lenses. .
  • FIG. 22 is a schematic cross-sectional structure diagram of a second embodiment of a concave lens and a convex lens formed in the lens grating manufacturing method provided by an embodiment of the present disclosure. At least two lenses 205 formed on any side of the substrate 201 can be Including concave lens and convex lens.
  • the lens 205 is a convex lens.
  • FIGS. 23B and 23D are schematic diagrams of the light-shielding structure protruding from the surface of the substrate. After the light-shielding material is completely filled in the opening, the method further includes:
  • a light-shielding material is formed corresponding to the opening area, so that the formed light-shielding structure 203 partially protrudes from the surface of the substrate 201.
  • the portion of the light shielding structure 201 protruding from the surface of the substrate 201 can be formed by etching, inkjet, imprinting, screen printing, etc.
  • etching inkjet, imprinting, screen printing, etc.
  • FIGS. 23A to 23D are schematic diagrams of the cross-sectional structure of the light-shielding structure formed by etching the light-shielding layer in the second embodiment of the method for manufacturing a lens grating according to an embodiment of the present disclosure.
  • Also includes:
  • a light-shielding material is coated, and a light-shielding layer 206 is provided;
  • the light-shielding layer 206 is etched to retain the light-shielding material corresponding to the opening area, so that the formed light-shielding structure 203 partially protrudes from the surface of the substrate.
  • FIG. 25 is a schematic cross-sectional structure diagram of a light-shielding structure formed on the surface of a substrate in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure. At least one light-shielding structure is formed on the substrate, including:
  • a light-shielding structure 203 is formed on one side of the substrate 201, and the light-shielding structure 203 completely protrudes from the surface of the substrate 201.
  • the light-shielding structure 201 completely protrudes from the surface of the substrate 201 and can be formed by etching, ink-jet, imprinting, etc.
  • etching ink-jet, imprinting, etc.
  • FIG. 24 is a schematic diagram of a cross-sectional structure of a light shielding layer formed on the surface of a substrate in the second embodiment of a method for manufacturing a lens grating provided by an embodiment of the present disclosure.
  • FIG. 25 is an embodiment of the present disclosure.
  • a cross-sectional structure diagram of a light-shielding structure formed on the surface of a substrate, forming at least one light-shielding structure on the substrate includes:
  • the light-shielding layer 206 is etched, and the light-shielding material at a preset position is reserved to form a light-shielding structure 203, which completely protrudes from the surface of the substrate.
  • each light-shielding structure 203 may be the same or different.
  • the light-shielding material of the light-shielding structure 203 protruding from the surface of the substrate 201 and the light-shielding material on the inner part of the substrate 201 may be the same or different.
  • FIGS. 26A to 26C are schematic diagrams of the cross-sectional structure of the lens formed in the second embodiment of the method for manufacturing a lens grating provided by an embodiment of the present disclosure.
  • the light-shielding structure 203 on the substrate 201 In the case of protruding from the substrate 201, at least two lenses are formed on one side of the substrate, including:
  • the light-shielding structure 203 protrudes from one surface of the substrate, and at least two lenses 205 are provided, so that the protruding part of the light-shielding structure 203 corresponds to the boundary area of the adjacent lenses of the at least two lenses 205.
  • FIGS. 28 and 29 are schematic diagrams of the cross-sectional structure of the substrate formed in the third embodiment of the lens grating manufacturing method provided by the embodiments of the present disclosure.
  • the substrate may be a part of the substrate:
  • Forming at least one light shielding structure on the substrate may include:
  • a light-shielding structure 303 is formed on one side of part of the substrate 301;
  • the substrate material 304 is laid on the side of the partial substrate 301 where the light-shielding structure 303 is formed.
  • the light-shielding structure 303 formed on part of the substrate 301 may be formed by etching, inkjet, imprinting, etc.
  • etching inkjet, imprinting, etc.
  • FIGS. 27 to 29 are schematic diagrams of the cross-sectional structure of the substrate formed in the third embodiment of the method for manufacturing the lens grating provided by the embodiments of the present disclosure.
  • the substrate provided is part of the substrate 301 :
  • At least one light-shielding structure is formed on the substrate, including:
  • the substrate material 304 is laid on the side of the partial substrate 301 where the light-shielding structure 303 is formed, and then the at least two lenses can be provided on any side of the substrate.
  • FIG. 30 is a schematic diagram of an arrangement of lenticular lenses in a method for manufacturing a lens grating provided by an embodiment of the present disclosure
  • FIG. 31 is a schematic diagram of a lens grating provided by an embodiment of the present disclosure.
  • FIG. 32 is a schematic diagram of an arrangement of spherical lenses in the manufacturing method of a lens grating provided in an embodiment of the present disclosure.
  • FIG. 33 is a lens grating provided in an embodiment of the present disclosure.
  • FIG. 30 is a schematic diagram of an arrangement of lenticular lenses in a method for manufacturing a lens grating provided by an embodiment of the present disclosure
  • FIG. 31 is a schematic diagram of a lens grating provided by an embodiment of the present disclosure.
  • FIG. 32 is a schematic
  • FIG. 34 is a schematic diagram of an arrangement of cylindrical lenses and spherical lenses in the manufacturing method of lens grating provided by an embodiment of the present disclosure.
  • the lenses are arranged on the substrate 401.
  • 402 includes at least one of a cylindrical lens 4021 and a spherical lens 4022.
  • the lens 402 includes a cylindrical lens 4021;
  • Forming at least two lenses on the substrate 401 includes:
  • Part or all of the cylindrical lenses 4021 are distributed in parallel on the substrate.
  • the lens 402 includes a spherical lens 4022;
  • Forming at least two lenses on the substrate 401 includes:
  • Part or all of the spherical lenses 4022 are arranged in an array on the substrate.
  • At least two lenses including a cylindrical lens 4021 and a spherical lens 4022 are formed on the substrate 401.
  • the plurality of cylindrical lenses 4021 may be cylindrical concave lenses, cylindrical convex lenses, or a combination of cylindrical convex lenses and cylindrical concave lenses.
  • the plurality of spherical lenses 4022 may be spherical concave lenses, spherical convex lenses, or a combination of spherical concave lenses and spherical convex lenses.
  • the plurality of lenses may also be a combination of a cylindrical convex lens and a spherical convex lens, a combination of a cylindrical convex lens and a spherical concave lens, a combination of a cylindrical concave lens and a spherical concave lens, and a combination of a cylindrical concave lens and a spherical convex lens.
  • the number and type of lenses 102 are set according to actual requirements.
  • At least one curve on the surface of the lens may be circular or non-circular in a macroscopic view, for example: elliptical, hyperbolic, parabolic, Wait.
  • at least one curve on the surface of the lens may be in a non-circular shape such as a polygon in a microscopic view.
  • the shape of the lens may be determined according to actual conditions such as process requirements, for example: the shape of the surface of the lens.
  • the manufacturing method of the lens grating provided by the embodiments of the present disclosure and the formed light-shielding structure of the lens grating can effectively reduce or eliminate the stray light generated at the junction of the two lenses, thereby effectively improving the quality of the image projected in this area.
  • the first element can be called the second element, and similarly, the second element can be called the first element, as long as all occurrences of the "first element” are renamed consistently and all occurrences "Second component” can be renamed consistently.
  • the first element and the second element are both elements, but they may not be the same element.
  • the terms used in this application are only used to describe the embodiments and are not used to limit the claims. As used in the description of the embodiments and claims, unless the context clearly indicates, the singular forms "a” (a), “an” (an) and “the” (the) are intended to also include plural forms .
  • the term “and/or” as used in this application refers to any and all possible combinations that include one or more of the associated lists.
  • the term “comprise” and its variants “comprises” and/or including (comprising) and the like refer to the stated features, wholes, steps, operations, elements, and/or The existence of components does not exclude the existence or addition of one or more other features, wholes, steps, operations, elements, components, and/or groups of these. If there are no more restrictions, the element defined by the sentence “including a" does not exclude the existence of other identical elements in the process, method, or device that includes the element.
  • each embodiment focuses on the differences from other embodiments, and the same or similar parts between the various embodiments can be referred to each other.
  • the relevant parts can be referred to the description of the method parts.
  • the disclosed methods and products can be implemented in other ways.
  • the device embodiments described above are merely illustrative.
  • the division of units may only be a logical function division, and there may be other divisions in actual implementation, for example, multiple units or components may be combined or may be Integrate into another system, or some features can be ignored or not implemented.
  • the displayed or discussed mutual coupling or direct coupling or communication connection may be indirect coupling or communication connection through some interfaces, devices or units, and may be in electrical, mechanical or other forms.
  • the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the units can be selected according to actual needs to implement this embodiment.
  • the functional units in the embodiments of the present disclosure may be integrated into one processing unit, or each unit may exist alone physically, or two or more units may be integrated into one unit.

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Abstract

A manufacturing method of a lens grating comprises: providing a substrate (101); and forming at least one light-blocking structure (103) and at least two lenses (102) on the substrate (101), and configuring such that the light-blocking structure (103) corresponds to a boundary region between adjacent lenses of the at least two lenses (102). The light-blocking structure (103) can effectively reduce or eliminate stray light generated at a boundary region between two lenses (102), thereby effectively improving the quality of an image projected via the boundary region.

Description

透镜光栅的制作方法Lens grating manufacturing method
本申请要求在2020年05月22日提交中国知识产权局、申请号为202010439805.1、发明名称为“透镜光栅的制作方法”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application claims the priority of a Chinese patent application filed with the Chinese Intellectual Property Office with an application number of 202010439805.1 and the title of the invention "Method for Making Lens Grating" on May 22, 2020, the entire content of which is incorporated into this application by reference.
技术领域Technical field
本申请涉及光学技术领域,例如涉及一种透镜光栅的制作方法。This application relates to the field of optical technology, for example, to a method for manufacturing a lens grating.
背景技术Background technique
目前,透镜光栅广泛应用于3D显示器中,基于透镜光栅的3D显示器不需要借助眼镜即可获得3D观看效果。At present, lens gratings are widely used in 3D displays, and 3D displays based on lens gratings can obtain 3D viewing effects without using glasses.
在实现本公开实施例的过程中,发现相关技术中至少存在如下问题:由于制作工艺的精度限制,透镜表面不会绝对光滑,尤其是在两个透镜的交界处,极易形成畸变的沟槽,当子像素的光线经过畸变区域时,透射光线无法控制,会成为杂散光,造成左右眼图像串扰,降低了该区域投射的图像质量。In the process of implementing the embodiments of the present disclosure, it was found that there are at least the following problems in the related technology: due to the precision limitation of the manufacturing process, the surface of the lens will not be absolutely smooth, especially at the junction of the two lenses, it is easy to form a distorted groove When the light of the sub-pixel passes through the distortion area, the transmitted light cannot be controlled and will become stray light, causing crosstalk between the left and right eye images and reducing the quality of the image projected in this area.
发明内容Summary of the invention
为了对披露的实施例的一些方面有基本的理解,下面给出了简单的概括。该概括不是泛泛评述,也不是要确定关键/重要组成元素或描绘这些实施例的保护范围,而是作为后面的详细说明的序言。In order to have a basic understanding of some aspects of the disclosed embodiments, a brief summary is given below. This summary is not a general comment, nor is it intended to determine key/important components or describe the scope of protection of these embodiments, but serves as a prelude to the detailed description that follows.
本公开实施例提供了一种透镜光栅的制作方法,以解决透镜光栅中两个透镜之间畸变区域带来的图像串扰的技术问题。The embodiment of the present disclosure provides a method for manufacturing a lens grating to solve the technical problem of image crosstalk caused by the distortion area between two lenses in the lens grating.
在一些实施例中,提供一种透镜光栅的制作方法,包括:In some embodiments, a method for manufacturing a lens grating is provided, including:
提供基板;Provide substrate;
在基板上形成至少一个遮光结构以及至少两个透镜,使得遮光结构对应于至少两个透镜中相邻透镜的交界区域。At least one light-shielding structure and at least two lenses are formed on the substrate, so that the light-shielding structure corresponds to the boundary area of adjacent lenses among the at least two lenses.
在一些实施例中,基板可以为整体基板。In some embodiments, the substrate may be a monolithic substrate.
在一些实施例中,在基板上形成至少一个遮光结构以及至少两个透镜,可以包括:In some embodiments, forming at least one light-shielding structure and at least two lenses on the substrate may include:
在基板的一面形成至少两个透镜;At least two lenses are formed on one side of the substrate;
在基板上形成所述至少一个遮光结构。The at least one light shielding structure is formed on the substrate.
在一些实施例中,在基板上形成至少一个遮光结构,可以包括:In some embodiments, forming at least one light-shielding structure on the substrate may include:
在基板上对应于至少两个透镜中相邻透镜的交界区域,设置开口;An opening is provided on the substrate corresponding to the boundary area of the adjacent lenses in the at least two lenses;
在开口中填充遮光材料,形成遮光结构。The light-shielding material is filled in the opening to form a light-shielding structure.
在一些实施例中,在基板上对应于至少两个透镜中相邻透镜的交界区域,设置开口,可以包括:In some embodiments, providing an opening on the substrate corresponding to the boundary area of the adjacent lens of the at least two lenses may include:
基板上对应于至少两个透镜中相邻透镜的交界区域,沿基板的厚度方向上设置开口。The substrate corresponds to the boundary area of the adjacent lenses of the at least two lenses, and an opening is provided along the thickness direction of the substrate.
在一些实施例中,沿基板的厚度方向设置开口,可以包括:In some embodiments, providing the opening along the thickness direction of the substrate may include:
从基板背离至少两个透镜的一面,形成开口,使得开口延伸至对应的透镜内,或者延伸至基板内,或者贯穿基板。An opening is formed from the side of the substrate away from the at least two lenses, so that the opening extends into the corresponding lens, or extends into the substrate, or penetrates the substrate.
在一些实施例中,在开口中填充遮光材料,可以包括:In some embodiments, filling the opening with a light-shielding material may include:
在开口中完全填充遮光材料;或者,Fill the opening completely with shading material; or,
在开口中部分填充遮光材料。Partially fill the opening with a light-shielding material.
在一些实施例中,在开口中部分填充遮光材料之后,还可以包括:In some embodiments, after partially filling the light-shielding material in the opening, it may further include:
在遮光材料表面填充材料。Fill the surface of the shading material with material.
在一些实施例中,在基板上形成至少一个遮光结构以及至少两个透镜,可以包括:In some embodiments, forming at least one light-shielding structure and at least two lenses on the substrate may include:
在基板上形成至少一个遮光结构;Forming at least one light-shielding structure on the substrate;
在基板的一面形成至少两个透镜。At least two lenses are formed on one side of the substrate.
在一些实施例中,在基板上形成至少一个遮光结构,可以包括:In some embodiments, forming at least one light-shielding structure on the substrate may include:
在基板的预设位置设置开口;Setting an opening at the preset position of the substrate;
在开口中填充遮光材料,形成遮光结构。The light-shielding material is filled in the opening to form a light-shielding structure.
在一些实施例中,在基板的预设位置设置开口,可以包括:In some embodiments, providing an opening at a preset position of the substrate may include:
从基板的一面,沿基板的厚度方向上设置开口,开口延伸至基板的另一面或者延伸至基板内。From one side of the substrate, an opening is provided along the thickness direction of the substrate, and the opening extends to the other side of the substrate or extends into the substrate.
在一些实施例中,在开口中填充遮光材料,可以包括:In some embodiments, filling the opening with a light-shielding material may include:
在开口中完全填充遮光材料;或者,Fill the opening completely with shading material; or,
在开口中部分填充遮光材料。Partially fill the opening with a light-shielding material.
在一些实施例中,在开口中部分填充遮光材料之后,还可以包括:In some embodiments, after partially filling the light-shielding material in the opening, it may further include:
在遮光材料表面填充材料。Fill the surface of the shading material with material.
在一些实施例中,在基板的一面形成至少两个透镜,可以包括:In some embodiments, forming at least two lenses on one side of the substrate may include:
在基板的任意一面形成至少两个透镜。At least two lenses are formed on either side of the substrate.
在一些实施例中,在开口中完全填充遮光材料之后,还可以包括:In some embodiments, after the light-shielding material is completely filled in the opening, it may further include:
在基板上靠近开口的开口端的一面,对应于开口区域形成遮光材料,使得形成的遮光结构部分凸出于基板的表面。On the surface of the substrate close to the opening end of the opening, a light-shielding material is formed corresponding to the opening area, so that the formed light-shielding structure partially protrudes from the surface of the substrate.
在一些实施例中,在基板上形成至少一个遮光结构,可以包括:In some embodiments, forming at least one light-shielding structure on the substrate may include:
在基板的一面形成遮光结构,遮光结构完全凸出于基板的表面。A light-shielding structure is formed on one side of the substrate, and the light-shielding structure completely protrudes from the surface of the substrate.
在一些实施例中,在基板的一面形成至少两个透镜,可以包括:In some embodiments, forming at least two lenses on one side of the substrate may include:
在基板上遮光结构凸出于基板的一面,设置至少两个透镜,使得遮光结构凸出的部分对应于至少两个透镜中相邻透镜的交界区域。The light-shielding structure on the substrate protrudes from one side of the substrate, and at least two lenses are arranged so that the convex part of the light-shielding structure corresponds to the boundary area of the adjacent lenses of the at least two lenses.
在一些实施例中,基板可以为部分基板:In some embodiments, the substrate may be a partial substrate:
在基板上形成至少一个遮光结构,可以包括:Forming at least one light shielding structure on the substrate may include:
在部分基板的一面形成遮光结构;Forming a light-shielding structure on one side of part of the substrate;
在部分基板形成有遮光结构的一面铺设基板材料。The substrate material is laid on the side of the partial substrate where the light-shielding structure is formed.
在一些实施例中,形成的所述至少两个透镜可以包括凹透镜和凸透镜中的至少一种。In some embodiments, the formed at least two lenses may include at least one of a concave lens and a convex lens.
在一些实施例中,透镜可以包括柱状透镜和球面透镜中的至少一种。In some embodiments, the lens may include at least one of a cylindrical lens and a spherical lens.
在一些实施例中,透镜可以包括柱状透镜;In some embodiments, the lens may include a cylindrical lens;
在基板上形成至少两个透镜可以包括:Forming at least two lenses on the substrate may include:
将柱状透镜中的部分或全部呈平行分布在基板上。Part or all of the lenticular lenses are distributed on the substrate in parallel.
在一些实施例中,透镜可以包括球面透镜;In some embodiments, the lens may include a spherical lens;
在基板上形成至少两个透镜可以包括:Forming at least two lenses on the substrate may include:
将球面透镜中的部分或全部呈阵列排布在基板上。Part or all of the spherical lenses are arranged in an array on the substrate.
本公开实施例提供的透镜光栅的制作方法,可以实现以下技术效果:The manufacturing method of the lens grating provided by the embodiments of the present disclosure can achieve the following technical effects:
解决透镜光栅中两个透镜之间畸变区域带来的图像串扰的技术问题。Solve the technical problem of image crosstalk caused by the distortion area between two lenses in the lens grating.
以上的总体描述和下文中的描述仅是示例性和解释性的,不用于限制本申请。The above general description and the following description are only exemplary and explanatory, and are not used to limit the application.
附图说明Description of the drawings
一个或多个实施例通过与之对应的附图进行示例性说明,这些示例性说明和附图并不构成对实施例的限定,附图中具有相同参考数字标号的元件示为类似的元件,附图不构成比例限制,并且其中:One or more embodiments are exemplified by the accompanying drawings. These exemplified descriptions and drawings do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are shown as similar elements. The drawings do not constitute a scale limitation, and among them:
图1是本公开实施例提供的透镜光栅的制作方法一种实施例的流程示意图;FIG. 1 is a schematic flowchart of an embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure;
图2是本公开实施例提供的透镜光栅的制作方法第一种实施例中基板的剖面结构示意图;2 is a schematic diagram of a cross-sectional structure of a substrate in a first embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure;
图3是本公开实施例提供的透镜光栅的制作方法第一种实施例中形成遮光结构和透镜 的流程示意图;Fig. 3 is a schematic view of the process of forming a light-shielding structure and a lens in the first embodiment of the method for manufacturing a lens grating according to an embodiment of the present disclosure;
图4是本公开实施例提供的透镜光栅的制作方法第一种实施例中形成透镜的剖面结构示意图;4 is a schematic diagram of a cross-sectional structure of a lens formed in the first embodiment of the method for manufacturing a lens grating according to an embodiment of the present disclosure;
图5是本公开实施例提供的透镜光栅的制作方法第一种实施例中形成遮光结构的剖面结构示意图;5 is a schematic diagram of a cross-sectional structure of forming a light-shielding structure in the first embodiment of the method for manufacturing a lens grating according to an embodiment of the present disclosure;
图6是本公开实施例提供的透镜光栅的制作方法中形成的透镜为凹透镜一种实施例的剖面结构示意图;6 is a schematic cross-sectional structure diagram of an embodiment in which the lens formed in the method for manufacturing the lens grating provided by the embodiment of the present disclosure is a concave lens;
图7是本公开实施例提供的透镜光栅的制作方法中形成的透镜为凹透镜和凸透镜一种实施例的剖面结构示意图;7 is a schematic cross-sectional structure diagram of an embodiment in which the lens formed in the method for manufacturing the lens grating provided by the embodiment of the present disclosure is a concave lens and a convex lens;
图8是本公开实施例提供的透镜光栅的制作方法第一种实施例中形成遮光结构的流程示意图;FIG. 8 is a schematic flow chart of forming a light-shielding structure in the first embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure; FIG.
图9A至图9C是本公开实施例提供的透镜光栅的制作方法第一种实施例中形成开口的剖面结构示意图;9A to 9C are schematic diagrams of the cross-sectional structure of the opening formed in the first embodiment of the manufacturing method of the lens grating provided by the embodiments of the present disclosure;
图10A至图10B是本公开实施例提供的透镜光栅的制作方法第一种实施例中在开口中完全填充遮光材料的剖面结构示意图;10A to 10B are schematic diagrams of a cross-sectional structure in which the opening is completely filled with light-shielding material in the first embodiment of the manufacturing method of the lens grating provided by the embodiment of the present disclosure;
图11A至图11C是本公开实施例提供的透镜光栅的制作方法第一种实施例中在开口中部分填充遮光材料的剖面结构示意图;11A to 11C are schematic diagrams of the cross-sectional structure of partially filling the light-shielding material in the opening in the first embodiment of the manufacturing method of the lens grating provided by the embodiment of the present disclosure;
图12A至图12C是本公开实施例提供的透镜光栅的制作方法第一种实施例中在开口中部分填充遮光材料之后填充基板材料的剖面结构示意图;12A to 12C are schematic diagrams of the cross-sectional structure of the first embodiment of the method for manufacturing a lens grating provided by an embodiment of the present disclosure after partially filling the opening with a light-shielding material and filling the substrate material;
图13是本公开实施例提供的透镜光栅的制作方法第二种实施例中形成遮光结构和透镜的流程示意图;13 is a schematic view of the process of forming a light-shielding structure and a lens in the second embodiment of the method for manufacturing a lens grating according to an embodiment of the present disclosure;
图14是本公开实施例提供的透镜光栅的制作方法第二种实施例中形成基板的剖面结构示意图;14 is a schematic diagram of a cross-sectional structure of a substrate formed in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure;
图15是本公开实施例提供的透镜光栅的制作方法第二种实施例中形成遮光结构的流程示意图;15 is a schematic view of the process of forming a light-shielding structure in the second embodiment of the method for manufacturing a lens grating according to an embodiment of the present disclosure;
图16A至图16B是本公开实施例提供的透镜光栅的制作方法第二种实施例中基板上形成开口的剖面结构示意图;16A to 16B are schematic diagrams of a cross-sectional structure of an opening formed on a substrate in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure;
图17A至图17B是本公开实施例提供的透镜光栅的制作方法第二种实施例中基板中完全填充遮光材料的剖面结构示意图;17A to FIG. 17B are schematic cross-sectional structural diagrams of a substrate completely filled with light-shielding material in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure;
图18A至图18B是本公开实施例提供的透镜光栅的制作方法第二种实施例中基板中部分填充遮光材料的剖面结构示意图;18A to 18B are schematic diagrams of a cross-sectional structure of a substrate partially filled with a light-shielding material in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure;
图19A至图19B是本公开实施例提供的透镜光栅的制作方法第二种实施例中基板中部分填充遮光材料之后填充基底材料的剖面结构示意图;19A to 19B are schematic diagrams of the cross-sectional structure of the base material after the substrate is partially filled with light-shielding material in the second embodiment of the method for manufacturing a lens grating according to an embodiment of the present disclosure;
图20A至图20E是本公开实施例提供的透镜光栅的制作方法第二种实施例中形成透镜的剖面结构示意图;20A to 20E are schematic diagrams of a cross-sectional structure of a lens formed in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure;
图21是本公开实施例提供的透镜光栅的制作方法中形成的透镜为凹透镜第二种实施例的剖面结构示意图;21 is a schematic cross-sectional structure diagram of a second embodiment of a concave lens formed in a method for manufacturing a lens grating according to an embodiment of the present disclosure;
图22是本公开实施例提供的透镜光栅的制作方法中形成的透镜为凹透镜和凸透镜第二种实施例的剖面结构示意图;22 is a schematic cross-sectional structure diagram of a second embodiment of a concave lens and a convex lens formed in the method for manufacturing a lens grating according to an embodiment of the present disclosure;
图23A至图23D是本公开实施例提供的透镜光栅的制作方法第二种实施例中刻蚀遮光层形成遮光结构的剖面结构示意图;23A to FIG. 23D are schematic cross-sectional structural diagrams of a light-shielding structure formed by etching a light-shielding layer in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure;
图24是本公开实施例提供的透镜光栅的制作方法第二种实施例中基板表面形成遮光层的剖面结构示意图;24 is a schematic diagram of a cross-sectional structure of a light-shielding layer formed on the surface of a substrate in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure;
图25是本公开实施例提供的透镜光栅的制作方法第二种实施例中基板表面形成遮光层刻蚀形成遮光结构的剖面结构示意图;25 is a schematic cross-sectional structure diagram of a light-shielding structure formed by etching a light-shielding layer formed on the surface of a substrate in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure;
图26A至图26C是本公开实施例提供的透镜光栅的制作方法第二种实施例中形成透镜的剖面结构示意图;26A to 26C are schematic diagrams of a cross-sectional structure of a lens formed in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure;
图27至图29是本公开实施例提供的透镜光栅的制作方法第三种实施例中形成基板的剖面结构示意图;27 to 29 are schematic diagrams of the cross-sectional structure of the substrate formed in the third embodiment of the method for manufacturing a lens grating according to an embodiment of the present disclosure;
图30是本公开实施例提供的透镜光栅的制作方法中形成柱状透镜一种排列方式的示意图;FIG. 30 is a schematic diagram of an arrangement of cylindrical lenses formed in a method for manufacturing a lens grating according to an embodiment of the present disclosure; FIG.
图31是本公开实施例提供的透镜光栅的制作方法中形成柱状透镜另一种排列方式的示意图;FIG. 31 is a schematic diagram of another arrangement of cylindrical lenses formed in the method for manufacturing a lens grating according to an embodiment of the present disclosure; FIG.
图32是本公开实施例提供的透镜光栅的制作方法中形成球面透镜一种排列方式的示意图;FIG. 32 is a schematic diagram of an arrangement of spherical lenses formed in a method for manufacturing a lens grating according to an embodiment of the present disclosure; FIG.
图33是本公开实施例提供的透镜光栅的制作方法中形成球面透镜另一种排列方式的示意图;FIG. 33 is a schematic diagram of another arrangement of spherical lenses formed in the method for manufacturing a lens grating according to an embodiment of the present disclosure; FIG.
图34是本公开实施例提供的透镜光栅的制作方法中形成柱状透镜和球面透镜一种排列方式的示意图。FIG. 34 is a schematic diagram of an arrangement of cylindrical lenses and spherical lenses in a method for manufacturing a lens grating provided by an embodiment of the present disclosure.
附图标记:Reference signs:
101:基板;102:透镜;103:遮光结构;104:开口;105:基板材料;101: substrate; 102: lens; 103: light-shielding structure; 104: opening; 105: substrate material;
201:基板;202:开口;203:遮光结构;204:基板材料;205:透镜;206:遮光层;201: substrate; 202: opening; 203: light-shielding structure; 204: substrate material; 205: lens; 206: light-shielding layer;
301:部分基板;302:遮光层;303:遮光结构;304:基板材料;301: part of the substrate; 302: light-shielding layer; 303: light-shielding structure; 304: substrate material;
401:基板;4021:柱状透镜;4022:球面透镜。401: substrate; 4021: cylindrical lens; 4022: spherical lens.
具体实施方式Detailed ways
为了能够更加详尽地了解本公开实施例的特点与技术内容,下面结合附图对本公开实施例的实现进行详细阐述,所附附图仅供参考说明之用,并非用来限定本公开实施例。在以下的技术描述中,为方便解释起见,通过多个细节以提供对所披露实施例的充分理解。然而,在没有这些细节的情况下,一个或多个实施例仍然可以实施。在其它情况下,为简化附图,熟知的结构和装置可以简化展示。In order to have a more detailed understanding of the features and technical content of the embodiments of the present disclosure, the implementation of the embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings. The attached drawings are for reference only and are not used to limit the embodiments of the present disclosure. In the following technical description, for the convenience of explanation, a number of details are used to provide a sufficient understanding of the disclosed embodiments. However, without these details, one or more embodiments can still be implemented. In other cases, in order to simplify the drawings, well-known structures and devices may be simplified for display.
参考图1,图1是本公开实施例提供的透镜光栅的制作方法一种实施例的流程示意图,在一些实施例中,提供一种透镜光栅的制作方法,包括:Referring to FIG. 1, FIG. 1 is a schematic flowchart of an embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure. In some embodiments, a method for manufacturing a lens grating is provided, including:
S101,提供基板;S101, provide a substrate;
S102,在基板上形成至少一个遮光结构以及至少两个透镜,使得遮光结构对应于至少两个透镜中相邻透镜的交界区域。S102, forming at least one light-shielding structure and at least two lenses on the substrate, so that the light-shielding structure corresponds to a boundary area between adjacent lenses of the at least two lenses.
参考图2,图2是本公开实施例提供的透镜光栅的制作方法第一种实施例中基板的剖面结构示意图,在一些实施例中,S101中,提供的基板101可以为整体基板。Referring to FIG. 2, FIG. 2 is a schematic diagram of a cross-sectional structure of a substrate in the first embodiment of a method for manufacturing a lens grating provided by an embodiment of the present disclosure. In some embodiments, in S101, the substrate 101 provided may be an integral substrate.
参考图3至图5,图3是本公开实施例提供的透镜光栅的制作方法第一种实施例中形成遮光结构和透镜的流程示意图,图4是本公开实施例提供的透镜光栅的制作方法第一种实施例中形成透镜的剖面结构示意图,图5是本公开实施例提供的透镜光栅的制作方法第一种实施例中形成遮光结构的剖面结构示意图,在一些实施例中,S102中,在基板上形成至少一个遮光结构以及至少两个透镜,可以包括:Referring to FIGS. 3 to 5, FIG. 3 is a schematic view of the process of forming a light-shielding structure and a lens in the first embodiment of a method for manufacturing a lens grating provided by an embodiment of the present disclosure, and FIG. 4 is a method for manufacturing a lens grating provided by an embodiment of the present disclosure A schematic diagram of a cross-sectional structure of a lens formed in the first embodiment. FIG. 5 is a schematic diagram of a cross-sectional structure of the light-shielding structure formed in the first embodiment of the method for manufacturing a lens grating provided by an embodiment of the present disclosure. In some embodiments, in S102, Forming at least one light-shielding structure and at least two lenses on the substrate may include:
S1021,在基板101的一面形成至少两个透镜102;S1021, forming at least two lenses 102 on one side of the substrate 101;
S1022,在基板101上形成至少一个遮光结构103。S1022, forming at least one light-shielding structure 103 on the substrate 101.
在一些实施例中,在基板101的一面形成的至少两个透镜102,可以包括凹透镜和凸透镜中的至少一种。In some embodiments, the at least two lenses 102 formed on one surface of the substrate 101 may include at least one of a concave lens and a convex lens.
参考图4,图4是本公开实施例提供的透镜光栅的制作方法第一种实施例中形成透镜的剖面结构示意图,在基板101的一面形成的至少两个透镜102可以包括凸透镜。Referring to FIG. 4, FIG. 4 is a schematic diagram of a cross-sectional structure of a lens formed in the first embodiment of a method for manufacturing a lens grating provided by an embodiment of the present disclosure. The at least two lenses 102 formed on one surface of the substrate 101 may include convex lenses.
参考图6,图6是本公开实施例提供的透镜光栅的制作方法中形成的透镜为凹透镜一种实施例的剖面结构示意图,在基板101的一面形成的至少两个透镜102可以包括凹透镜。Referring to FIG. 6, FIG. 6 is a schematic cross-sectional structure diagram of an embodiment in which the lens formed in the lens grating manufacturing method provided by the embodiment of the present disclosure is a concave lens. The at least two lenses 102 formed on one surface of the substrate 101 may include concave lenses.
参考图7,图7是本公开实施例提供的透镜光栅的制作方法中形成的透镜为凹透镜和 凸透镜一种实施例的剖面结构示意图,在基板101的一面形成的至少两个透镜102可以包括凸透镜和凹透镜。Referring to FIG. 7, FIG. 7 is a schematic cross-sectional structure diagram of an embodiment in which the lens formed in the method for manufacturing a lens grating provided by an embodiment of the present disclosure is a concave lens and a convex lens. The at least two lenses 102 formed on one side of the substrate 101 may include convex lenses. And concave lens.
以下以透镜102为凸透镜为例进行说明。In the following description, the lens 102 is a convex lens as an example.
参考图8,图8是本公开实施例提供的透镜光栅的制作方法第一种实施例中形成遮光结构的流程示意图,在一些实施例中,S1022中,在基板上形成至少一个遮光结构,包括:Referring to FIG. 8, FIG. 8 is a schematic view of the process of forming a light-shielding structure in the first embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure. In some embodiments, in S1022, at least one light-shielding structure is formed on a substrate, including :
S1022a,在基板上对应于至少两个透镜中相邻透镜的交界区域,设置开口;S1022a, setting an opening on the substrate corresponding to the boundary area of the adjacent lenses among the at least two lenses;
S1022b,在开口中填充遮光材料,形成遮光结构。S1022b: Fill the opening with a light-shielding material to form a light-shielding structure.
在一些实施例中,参考图9A至图9C,图9A至图9C是本公开实施例提供的透镜光栅的制作方法第一种实施例中形成开口的剖面结构示意图,在基板上对应于至少两个透镜中相邻透镜的交界区域,设置开口,包括:In some embodiments, referring to FIGS. 9A to 9C, FIGS. 9A to 9C are schematic diagrams of the cross-sectional structure of openings formed in the first embodiment of the method for manufacturing a lens grating provided by an embodiment of the present disclosure, corresponding to at least two openings on the substrate. The boundary area between adjacent lenses in each lens is provided with an opening, including:
基板上对应于至少两个透镜中相邻透镜的交界区域,沿基板的厚度方向上设置开口。The substrate corresponds to the boundary area of the adjacent lenses of the at least two lenses, and an opening is provided along the thickness direction of the substrate.
在一些实施例中,沿基板的厚度方向设置开口,包括:In some embodiments, providing the opening along the thickness direction of the substrate includes:
从基板背离至少两个透镜的一面,形成开口,使得开口延伸至对应的透镜内,或者延伸至基板内,或者贯穿基板。An opening is formed from the side of the substrate away from the at least two lenses, so that the opening extends into the corresponding lens, or extends into the substrate, or penetrates the substrate.
参考图9A,在一些实施例中,从基板101背离至少两个透镜102的一面,形成开口104,形成的开口104延伸至对应的透镜102内。Referring to FIG. 9A, in some embodiments, an opening 104 is formed on the side of the substrate 101 away from the at least two lenses 102, and the formed opening 104 extends into the corresponding lens 102.
参考图9B,在一些实施例中,从基板101背离至少两个透镜102的一面,形成开口104,形成的开口104延伸至基板101内。Referring to FIG. 9B, in some embodiments, an opening 104 is formed on the side of the substrate 101 away from the at least two lenses 102, and the formed opening 104 extends into the substrate 101.
参考图9C,在一些实施例中,从基板101背离至少两个透镜102的一面,形成开口104,形成的开口104贯穿基板101。Referring to FIG. 9C, in some embodiments, an opening 104 is formed on the side of the substrate 101 away from the at least two lenses 102, and the formed opening 104 penetrates the substrate 101.
参考图10A至图11C,图10A至图10B是本公开实施例提供的透镜光栅的制作方法第一种实施例中在开口中完全填充遮光材料的剖面结构示意图,图11A至图11C是本公开实施例提供的透镜光栅的制作方法第一种实施例中在开口中部分填充遮光材料的剖面结构示意图,在一些实施例中,在开口中填充遮光材料,包括:Referring to FIGS. 10A to 11C, FIGS. 10A to 10B are schematic diagrams of the cross-sectional structure of completely filling the light-shielding material in the opening in the first embodiment of the manufacturing method of the lens grating provided by the embodiments of the present disclosure, and FIGS. 11A to 11C are the schematic diagrams of the present disclosure. The manufacturing method of the lens grating provided by the embodiment is a schematic diagram of the cross-sectional structure of partially filling the light-shielding material in the opening in the first embodiment. In some embodiments, filling the light-shielding material in the opening includes:
在开口中完全填充遮光材料;或者,Fill the opening completely with shading material; or,
在开口中部分填充遮光材料。Partially fill the opening with a light-shielding material.
具体地,参考图10A,开口104延伸至透镜102内,在开口104中完全填充遮光材料,形成的遮光结构103延伸至透镜102内。Specifically, referring to FIG. 10A, the opening 104 extends into the lens 102, the opening 104 is completely filled with light-shielding material, and the formed light-shielding structure 103 extends into the lens 102.
参考图10B,开口104延伸至基板101内,在开口104中完全填充遮光材料,形成的遮光结构103延伸至基板101内。Referring to FIG. 10B, the opening 104 extends into the substrate 101, the light shielding material is completely filled in the opening 104, and the formed light shielding structure 103 extends into the substrate 101.
参考图5,开口104贯穿基板101,在开口104中完全填充遮光材料,形成的遮光结构 103贯穿基板101。Referring to FIG. 5, the opening 104 penetrates through the substrate 101, and the light shielding material is completely filled in the opening 104, and the formed light shielding structure 103 penetrates the substrate 101.
参考图11A,开口104延伸至透镜102内,在开口104中部分填充遮光材料,形成遮光结构103。Referring to FIG. 11A, the opening 104 extends into the lens 102, and a light-shielding material is partially filled in the opening 104 to form a light-shielding structure 103.
参考图11B,开口104延伸至基板101内,在开口104中部分填充遮光材料,形成遮光结构103。Referring to FIG. 11B, the opening 104 extends into the substrate 101, and a light-shielding material is partially filled in the opening 104 to form a light-shielding structure 103.
参考图11C,开口104贯穿基板101,在开口104中部分填充遮光材料,形成遮光结构103。Referring to FIG. 11C, the opening 104 penetrates through the substrate 101, and a light shielding material is partially filled in the opening 104 to form a light shielding structure 103.
在一些实施例中,参考图12A至图12C,图12A至图12C是本公开实施例提供的透镜光栅的制作方法第一种实施例中在开口中部分填充遮光材料之后填充基板材料的剖面结构示意图,在开口中部分填充遮光材料之后,还包括:In some embodiments, referring to FIGS. 12A to 12C, FIGS. 12A to 12C are the cross-sectional structure of the substrate material after the opening is partially filled with light-shielding material in the first embodiment of the method for manufacturing a lens grating provided by an embodiment of the present disclosure The schematic diagram, after partially filling the light-shielding material in the opening, it also includes:
在遮光材料表面填充材料。Fill the surface of the shading material with material.
在一些实施例中,遮光材料表面填充的材料为基板材料。In some embodiments, the material filled on the surface of the light-shielding material is a substrate material.
参考图12A,开口104延伸至透镜102内,在开口104中部分填充遮光材料,形成遮光结构103之后,填充基板材料105。Referring to FIG. 12A, the opening 104 extends into the lens 102, a light shielding material is partially filled in the opening 104, and the substrate material 105 is filled after the light shielding structure 103 is formed.
参考图12B,开口104延伸至基板101内,在开口104中部分填充遮光材料,形成遮光结构103之后,填充基板材料105。Referring to FIG. 12B, the opening 104 extends into the substrate 101, a light shielding material is partially filled in the opening 104, and the substrate material 105 is filled after the light shielding structure 103 is formed.
参考图12C,开口104贯穿基板101,在开口104中部分填充遮光材料,形成遮光结构103之后,填充基板材料105。Referring to FIG. 12C, the opening 104 penetrates the substrate 101, and the light shielding material is partially filled in the opening 104. After the light shielding structure 103 is formed, the substrate material 105 is filled.
在一些实施例中,在一些实施例中,各个遮光结构103的遮光材料可以相同也可以不同。In some embodiments, in some embodiments, the light-shielding material of each light-shielding structure 103 may be the same or different.
在一些实施例中,遮光结构103凸出于基板101表面部分的遮光材料与位于基板101内部分的遮光材料可以相同也可以不同。In some embodiments, the light-shielding material of the light-shielding structure 103 protruding from the surface of the substrate 101 and the light-shielding material on the inner part of the substrate 101 may be the same or different.
参考图13,图13是本公开实施例提供的透镜光栅的制作方法第二种实施例中形成遮光结构和透镜的流程示意图,在一些实施例中,S102中,在基板上形成至少一个遮光结构以及至少两个透镜,包括:Referring to FIG. 13, FIG. 13 is a schematic view of the process of forming a light-shielding structure and a lens in the second embodiment of the method for manufacturing a lens grating according to an embodiment of the present disclosure. In some embodiments, in S102, at least one light-shielding structure is formed on the substrate And at least two lenses, including:
S102A,在基板上形成至少一个遮光结构;S102A, forming at least one light-shielding structure on the substrate;
S102B,在基板的一面形成至少两个透镜。S102B, forming at least two lenses on one side of the substrate.
参考图14,图14是本公开实施例提供的透镜光栅的制作方法第二种实施例中形成基板的剖面结构示意图,首先,提供整体的基板201。Referring to FIG. 14, FIG. 14 is a schematic diagram of a cross-sectional structure of a substrate formed in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure. First, an overall substrate 201 is provided.
参考图15,图15是本公开实施例提供的透镜光栅的制作方法第二种实施例中形成遮光结构的流程示意图,在一些实施例中,S102A中,在基板上形成至少一个遮光结构,包 括:Referring to FIG. 15, FIG. 15 is a schematic flow diagram of forming a light-shielding structure in the second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure. In some embodiments, in S102A, at least one light-shielding structure is formed on a substrate, including :
S102a,在基板的预设位置设置开口;S102a, setting an opening at a preset position of the substrate;
S102b,在开口中填充遮光材料,形成遮光结构。S102b: Fill the opening with a light-shielding material to form a light-shielding structure.
参考图16A至图16B,图16A至图16B是本公开实施例提供的透镜光栅的制作方法第二种实施例中基板上形成开口的剖面结构示意图,在一些实施例中,预先在基板201上设计出设置开口的位置,在基板的预设位置设置开口,包括:Referring to FIGS. 16A to 16B, FIGS. 16A to 16B are schematic diagrams of the cross-sectional structure of openings formed on the substrate in the second embodiment of the method for manufacturing a lens grating provided by an embodiment of the present disclosure. In some embodiments, the substrate 201 is preformed Design the location of the opening, and set the opening in the preset position of the substrate, including:
从基板的一面,沿基板的厚度方向上设置开口,开口延伸至基板的另一面或者延伸至基板内。From one side of the substrate, an opening is provided along the thickness direction of the substrate, and the opening extends to the other side of the substrate or extends into the substrate.
参考图16A,从基板201的一面,延其厚度方向,设置开口202,开口202延伸至基板201的另一面。Referring to FIG. 16A, from one side of the substrate 201 along the thickness direction, an opening 202 is provided, and the opening 202 extends to the other side of the substrate 201.
参考图16B,从基板201的一面,延其厚度方向,设置开口202,开口202延伸至基板201内。Referring to FIG. 16B, from one side of the substrate 201 along the thickness direction, an opening 202 is provided, and the opening 202 extends into the substrate 201.
在一些实施例中,在开口中填充遮光材料,包括:In some embodiments, filling the opening with a light-shielding material includes:
在开口中完全填充遮光材料;或者,Fill the opening completely with shading material; or,
在开口中部分填充遮光材料。Partially fill the opening with a light-shielding material.
在一些实施例中,图17A至图17B是本公开实施例提供的透镜光栅的制作方法第二种实施例中基板中完全填充遮光材料的剖面结构示意图,参考图17A,开口202延伸至基板201的另一面,在开口202中完全填充遮光材料,形成遮光结构203。In some embodiments, FIGS. 17A to 17B are schematic diagrams of the cross-sectional structure of the substrate completely filled with light-shielding material in the second embodiment of the manufacturing method of the lens grating provided by the embodiments of the present disclosure. Referring to FIG. 17A, the opening 202 extends to the substrate 201 On the other side of the opening 202, the light-shielding material is completely filled to form a light-shielding structure 203.
参考图17B,开口202延伸至基板201内,开口202中完全填充遮光材料,形成遮光结构203。Referring to FIG. 17B, the opening 202 extends into the substrate 201, and the opening 202 is completely filled with a light-shielding material to form a light-shielding structure 203.
图18A至图18B是本公开实施例提供的透镜光栅的制作方法第二种实施例中基板中部分填充遮光材料的剖面结构示意图,参考图18A,开口202延伸至基板201的另一面,在开口202中部分填充遮光材料,形成遮光结构203。18A to 18B are schematic diagrams of the cross-sectional structure of the substrate partially filled with light-shielding material in the second embodiment of the manufacturing method of the lens grating provided by the embodiments of the present disclosure. Referring to FIG. 18A, the opening 202 extends to the other side of the substrate 201, and the A light shielding material is partially filled in 202 to form a light shielding structure 203.
参考图18B,开口202延伸至基板201内,在开口202中部分填充遮光材料,形成遮光结构203。Referring to FIG. 18B, the opening 202 extends into the substrate 201, and a light-shielding material is partially filled in the opening 202 to form a light-shielding structure 203.
在一些实施例中,在开口中部分填充遮光材料之后,还包括:In some embodiments, after partially filling the light-shielding material in the opening, the method further includes:
在遮光材料表面填充材料。Fill the surface of the shading material with material.
在一些实施例中,遮光材料表面填充的材料为基板材料。In some embodiments, the material filled on the surface of the light-shielding material is a substrate material.
图19A至图19B是本公开实施例提供的透镜光栅的制作方法第二种实施例中基板中部分填充遮光材料之后填充基底材料的剖面结构示意图,参考图19A,开口202延伸至基板201的另一面,在开口202中部分填充遮光材料,形成遮光结构203之后,在遮光材料 表面填充基板材料204。19A to 19B are schematic diagrams of the cross-sectional structure of the substrate after partially filling the light-shielding material with the base material in the second embodiment of the manufacturing method of the lens grating provided by the embodiments of the present disclosure. Referring to FIG. 19A, the opening 202 extends to another part of the substrate 201 On one side, the opening 202 is partially filled with a light-shielding material, and after the light-shielding structure 203 is formed, a substrate material 204 is filled on the surface of the light-shielding material.
参考图19B,开口202延伸至基板201内,在开口202中部分填充遮光材料,形成遮光结构203之后,在遮光材料表面填充基板材料204。Referring to FIG. 19B, the opening 202 extends into the substrate 201, and a light shielding material is partially filled in the opening 202. After the light shielding structure 203 is formed, the substrate material 204 is filled on the surface of the light shielding material.
在一些实施例中,在基板的一面形成至少两个透镜,包括:In some embodiments, forming at least two lenses on one side of the substrate includes:
在基板的任意一面形成至少两个透镜。At least two lenses are formed on either side of the substrate.
参考图20A至20E,图20A至图20E是本公开实施例提供的透镜光栅的制作方法第二种实施例中形成透镜的剖面结构示意图,形成的上述基板201,可在基板201的任意一面形成该至少两个透镜205。Referring to FIGS. 20A to 20E, FIGS. 20A to 20E are schematic diagrams of the cross-sectional structure of the lens formed in the second embodiment of the method for manufacturing a lens grating provided by an embodiment of the present disclosure. The formed substrate 201 can be formed on any side of the substrate 201 The at least two lenses 205.
参考图20A至20E,形成带有遮光结构203的基板201之后,在基板201的任意一面形成的至少两个透镜205可以包括凸透镜。Referring to FIGS. 20A to 20E, after the substrate 201 with the light shielding structure 203 is formed, the at least two lenses 205 formed on any side of the substrate 201 may include convex lenses.
参考图21,图21是本公开实施例提供的透镜光栅的制作方法中形成的透镜为凹透镜第二种实施例的剖面结构示意图,在基板201的任意一面形成的至少两个透镜205可以包括凹透镜。Referring to FIG. 21, FIG. 21 is a schematic cross-sectional structure diagram of a second embodiment of a concave lens formed in a method for manufacturing a lens grating according to an embodiment of the present disclosure. The at least two lenses 205 formed on any side of the substrate 201 may include concave lenses. .
参考图22,图22是本公开实施例提供的透镜光栅的制作方法中形成的透镜为凹透镜和凸透镜第二种实施例的剖面结构示意图,在基板201的任意一面形成的至少两个透镜205可以包括凹透镜和凸透镜。Referring to FIG. 22, FIG. 22 is a schematic cross-sectional structure diagram of a second embodiment of a concave lens and a convex lens formed in the lens grating manufacturing method provided by an embodiment of the present disclosure. At least two lenses 205 formed on any side of the substrate 201 can be Including concave lens and convex lens.
以下以透镜205为凸透镜进行说明。In the following description, the lens 205 is a convex lens.
在一些实施例中,参考图23B和图23D,图23B和图23D是遮光结构凸出于基板表面的结构示意图,在开口中完全填充遮光材料之后,还包括:In some embodiments, referring to FIGS. 23B and 23D, FIGS. 23B and 23D are schematic diagrams of the light-shielding structure protruding from the surface of the substrate. After the light-shielding material is completely filled in the opening, the method further includes:
在基板201上靠近开口202的开口端的一面,对应于开口区域形成遮光材料,使得形成的遮光结构203部分凸出于基板201的表面。On the surface of the substrate 201 close to the opening end of the opening 202, a light-shielding material is formed corresponding to the opening area, so that the formed light-shielding structure 203 partially protrudes from the surface of the substrate 201.
在一些实施例中,遮光结构201凸出于基板201表面的部分,可以通过刻蚀、喷墨、压印、丝网印刷等方式形成,以下以刻蚀为例进行说明:In some embodiments, the portion of the light shielding structure 201 protruding from the surface of the substrate 201 can be formed by etching, inkjet, imprinting, screen printing, etc. The following is an example of etching:
参考图23A至图23D,图23A至图23D是本公开实施例提供的透镜光栅的制作方法第二种实施例中刻蚀遮光层形成遮光结构的剖面结构示意图,在开口中完全填充遮光材料之后,还包括:Referring to FIGS. 23A to 23D, FIGS. 23A to 23D are schematic diagrams of the cross-sectional structure of the light-shielding structure formed by etching the light-shielding layer in the second embodiment of the method for manufacturing a lens grating according to an embodiment of the present disclosure. After the light-shielding material is completely filled in the opening ,Also includes:
在基板201上靠近开口202的开口端的一面,涂覆遮光材料,设置遮光层206;On the surface of the substrate 201 close to the opening end of the opening 202, a light-shielding material is coated, and a light-shielding layer 206 is provided;
对遮光层206进行刻蚀,保留对应于开口区域的遮光材料,使得形成的遮光结构203部分凸出于基板的表面。The light-shielding layer 206 is etched to retain the light-shielding material corresponding to the opening area, so that the formed light-shielding structure 203 partially protrudes from the surface of the substrate.
参考图25,图25是本公开实施例提供的透镜光栅的制作方法第二种实施例中基板表面形成遮光结构的剖面结构示意图,在基板上形成至少一个遮光结构,包括:Referring to FIG. 25, FIG. 25 is a schematic cross-sectional structure diagram of a light-shielding structure formed on the surface of a substrate in a second embodiment of a method for manufacturing a lens grating according to an embodiment of the present disclosure. At least one light-shielding structure is formed on the substrate, including:
在基板201的一面形成遮光结构203,遮光结构203完全凸出于基板201的表面。A light-shielding structure 203 is formed on one side of the substrate 201, and the light-shielding structure 203 completely protrudes from the surface of the substrate 201.
在一些实施例中,遮光结构201完全凸出于基板201表面的部分,可以通过刻蚀、喷墨、压印等方式形成,以下以刻蚀为例进行说明:In some embodiments, the light-shielding structure 201 completely protrudes from the surface of the substrate 201 and can be formed by etching, ink-jet, imprinting, etc. The following is an example of etching:
在一些实施例中,参考图24和图25,图24是本公开实施例提供的透镜光栅的制作方法第二种实施例中基板表面形成遮光层的剖面结构示意图,图25是本公开实施例提供的透镜光栅的制作方法第二种实施例中基板表面形成遮光结构的剖面结构示意图,在基板上形成至少一个遮光结构,包括:In some embodiments, referring to FIGS. 24 and 25, FIG. 24 is a schematic diagram of a cross-sectional structure of a light shielding layer formed on the surface of a substrate in the second embodiment of a method for manufacturing a lens grating provided by an embodiment of the present disclosure. FIG. 25 is an embodiment of the present disclosure. In the second embodiment of the method for manufacturing a lens grating provided, a cross-sectional structure diagram of a light-shielding structure formed on the surface of a substrate, forming at least one light-shielding structure on the substrate, includes:
在基板201的一面涂覆遮光材料,设置遮光层206;Coat a light-shielding material on one side of the substrate 201, and provide a light-shielding layer 206;
对遮光层206进行刻蚀,保留预设位置的遮光材料,形成遮光结构203,遮光结构203完全凸出于基板的表面。The light-shielding layer 206 is etched, and the light-shielding material at a preset position is reserved to form a light-shielding structure 203, which completely protrudes from the surface of the substrate.
在一些实施例中,各个遮光结构203的遮光材料可以相同也可以不同。In some embodiments, the light-shielding material of each light-shielding structure 203 may be the same or different.
在一些实施例中,遮光结构203凸出于基板201表面部分的遮光材料与位于基板201内部分的遮光材料可以相同也可以不同。In some embodiments, the light-shielding material of the light-shielding structure 203 protruding from the surface of the substrate 201 and the light-shielding material on the inner part of the substrate 201 may be the same or different.
在一些实施例中,参考图26A至图26C,图26A至图26C是本公开实施例提供的透镜光栅的制作方法第二种实施例中形成透镜的剖面结构示意图,对于基板201上遮光结构203凸出于基板201的情况,在基板的一面形成至少两个透镜,包括:In some embodiments, referring to FIGS. 26A to 26C, FIGS. 26A to 26C are schematic diagrams of the cross-sectional structure of the lens formed in the second embodiment of the method for manufacturing a lens grating provided by an embodiment of the present disclosure. For the light-shielding structure 203 on the substrate 201 In the case of protruding from the substrate 201, at least two lenses are formed on one side of the substrate, including:
在基板201上遮光结构203凸出于基板的一面,设置至少两个透镜205,使得遮光结构203凸出的部分对应于至少两个透镜205中相邻透镜的交界区域。On the substrate 201, the light-shielding structure 203 protrudes from one surface of the substrate, and at least two lenses 205 are provided, so that the protruding part of the light-shielding structure 203 corresponds to the boundary area of the adjacent lenses of the at least two lenses 205.
参考图28至图29,图28和图29是本公开实施例提供的透镜光栅的制作方法第三种实施例中形成基板的剖面结构示意图,在一些实施例中,基板可以为部分基板:Referring to FIGS. 28 to 29, FIGS. 28 and 29 are schematic diagrams of the cross-sectional structure of the substrate formed in the third embodiment of the lens grating manufacturing method provided by the embodiments of the present disclosure. In some embodiments, the substrate may be a part of the substrate:
在基板上形成至少一个遮光结构,可以包括:Forming at least one light shielding structure on the substrate may include:
在部分基板301的一面形成遮光结构303;A light-shielding structure 303 is formed on one side of part of the substrate 301;
在部分基板301形成有遮光结构303的一面铺设基板材料304。The substrate material 304 is laid on the side of the partial substrate 301 where the light-shielding structure 303 is formed.
在一些实施例中,部分基板301上形成的遮光结构303,可以通过刻蚀、喷墨、压印等方式形成,以下以刻蚀为例进行说明:In some embodiments, the light-shielding structure 303 formed on part of the substrate 301 may be formed by etching, inkjet, imprinting, etc. The following is an example of etching:
在一些实施例中,参考图27至图29,图27至图29是本公开实施例提供的透镜光栅的制作方法第三种实施例中形成基板的剖面结构示意图,提供的基板为部分基板301:In some embodiments, referring to FIGS. 27 to 29, FIGS. 27 to 29 are schematic diagrams of the cross-sectional structure of the substrate formed in the third embodiment of the method for manufacturing the lens grating provided by the embodiments of the present disclosure. The substrate provided is part of the substrate 301 :
在基板上形成至少一个遮光结构,包括:At least one light-shielding structure is formed on the substrate, including:
在部分基板301的一面涂覆遮光材料,形成遮光层302;Coating a light-shielding material on one side of a part of the substrate 301 to form a light-shielding layer 302;
对遮光层302进行刻蚀,形成遮光结构303;Etch the light-shielding layer 302 to form a light-shielding structure 303;
在部分基板301形成有遮光结构303的一面铺设基板材料304,之后可在基板的任意 一面设置该至少两个透镜。The substrate material 304 is laid on the side of the partial substrate 301 where the light-shielding structure 303 is formed, and then the at least two lenses can be provided on any side of the substrate.
在一些实施例中,参考图30至图34,图30是本公开实施例提供的透镜光栅的制作方法中形成柱状透镜一种排列方式的示意图,图31是本公开实施例提供的透镜光栅的制作方法中形成柱状透镜另一种排列方式的示意图,图32是本公开实施例提供的透镜光栅的制作方法中形成球面透镜一种排列方式的示意图,图33是本公开实施例提供的透镜光栅的制作方法中形成球面透镜另一种排列方式的示意图,图34是本公开实施例提供的透镜光栅的制作方法中形成柱状透镜和球面透镜一种排列方式的示意图,基板401上,设置的透镜402包括柱状透镜4021和球面透镜4022中的至少一种。In some embodiments, referring to FIGS. 30 to 34, FIG. 30 is a schematic diagram of an arrangement of lenticular lenses in a method for manufacturing a lens grating provided by an embodiment of the present disclosure, and FIG. 31 is a schematic diagram of a lens grating provided by an embodiment of the present disclosure. A schematic diagram of another arrangement of cylindrical lenses formed in the manufacturing method. FIG. 32 is a schematic diagram of an arrangement of spherical lenses in the manufacturing method of a lens grating provided in an embodiment of the present disclosure. FIG. 33 is a lens grating provided in an embodiment of the present disclosure. A schematic diagram of another arrangement of spherical lenses formed in the manufacturing method of the present disclosure. FIG. 34 is a schematic diagram of an arrangement of cylindrical lenses and spherical lenses in the manufacturing method of lens grating provided by an embodiment of the present disclosure. The lenses are arranged on the substrate 401. 402 includes at least one of a cylindrical lens 4021 and a spherical lens 4022.
在一些实施例中,参考图30和图31,透镜402包括柱状透镜4021;In some embodiments, referring to FIGS. 30 and 31, the lens 402 includes a cylindrical lens 4021;
在基板401上形成至少两个透镜包括:Forming at least two lenses on the substrate 401 includes:
将柱状透镜4021中的部分或全部呈平行分布在基板上。Part or all of the cylindrical lenses 4021 are distributed in parallel on the substrate.
在一些实施例中,参考图32和图33,透镜402包括球面透镜4022;In some embodiments, referring to FIGS. 32 and 33, the lens 402 includes a spherical lens 4022;
在基板401上形成至少两个透镜包括:Forming at least two lenses on the substrate 401 includes:
将球面透镜4022中的部分或全部呈阵列排布在基板上。Part or all of the spherical lenses 4022 are arranged in an array on the substrate.
参考图34,在基板401上形成至少两个透镜包括柱状透镜4021和球面透镜4022。Referring to FIG. 34, at least two lenses including a cylindrical lens 4021 and a spherical lens 4022 are formed on the substrate 401.
在一些实施例中,多个柱状透镜4021可以是柱状凹透镜,也可以是柱状凸透镜,也可以是柱状凸透镜和柱状凹透镜的组合。多个球面透镜4022可以是球面凹透镜,也可以是球面凸透镜,还可以是球面凹透镜和球面凸透镜的组合。此外,多个透镜还可以是柱状凸透镜和球面凸透镜的组合、柱状凸透镜和球面凹透镜的组合、柱状凹透镜和球面凹透镜的组合,柱状凹透镜和球面凸透镜的组合。透镜102的数量、类型根据实际需求设置。In some embodiments, the plurality of cylindrical lenses 4021 may be cylindrical concave lenses, cylindrical convex lenses, or a combination of cylindrical convex lenses and cylindrical concave lenses. The plurality of spherical lenses 4022 may be spherical concave lenses, spherical convex lenses, or a combination of spherical concave lenses and spherical convex lenses. In addition, the plurality of lenses may also be a combination of a cylindrical convex lens and a spherical convex lens, a combination of a cylindrical convex lens and a spherical concave lens, a combination of a cylindrical concave lens and a spherical concave lens, and a combination of a cylindrical concave lens and a spherical convex lens. The number and type of lenses 102 are set according to actual requirements.
在一些实施例中,无论透镜包括柱状透镜、球面透镜还是具有其他形状,透镜的表面的至少一条曲线在宏观上可以是圆形或非圆形,例如:椭圆形、双曲线形、抛物线形,等。可选地,透镜的表面的至少一条曲线在微观上可以呈多边形等非圆形的形状。可选地,可以根据工艺需求等实际情况确定透镜的形状,例如:透镜的表面的形状。In some embodiments, whether the lens includes a cylindrical lens, a spherical lens, or has other shapes, at least one curve on the surface of the lens may be circular or non-circular in a macroscopic view, for example: elliptical, hyperbolic, parabolic, Wait. Optionally, at least one curve on the surface of the lens may be in a non-circular shape such as a polygon in a microscopic view. Optionally, the shape of the lens may be determined according to actual conditions such as process requirements, for example: the shape of the surface of the lens.
本公开实施例提供的透镜光栅的制作方法,形成的透镜光栅的遮光结构,能够有效减少或消除两个透镜交界处产生的杂散光,从而有效提高该区域投射的图像质量。The manufacturing method of the lens grating provided by the embodiments of the present disclosure and the formed light-shielding structure of the lens grating can effectively reduce or eliminate the stray light generated at the junction of the two lenses, thereby effectively improving the quality of the image projected in this area.
以上描述和附图充分地示出了本公开的实施例,以使本领域技术人员能够实践它们。其他实施例可以包括结构的、逻辑的、电气的、过程的以及其他的改变。实施例仅代表可能的变化。除非明确要求,否则单独的部件和功能是可选的,并且操作的顺序可以变化。一些实施例的部分和特征可以被包括在或替换其他实施例的部分和特征。本公开实施例的范围包括权利要求书的整个范围,以及权利要求书的所有可获得的等同物。当用于本申请 中时,虽然术语“第一”、“第二”等可能会在本申请中使用以描述各元件,但这些元件不应受到这些术语的限制。这些术语仅用于将一个元件与另一个元件区别开。比如,在不改变描述的含义的情况下,第一元件可以叫做第二元件,并且同样地,第二元件可以叫做第一元件,只要所有出现的“第一元件”一致重命名并且所有出现的“第二元件”一致重命名即可。第一元件和第二元件都是元件,但可以不是相同的元件。而且,本申请中使用的用词仅用于描述实施例并且不用于限制权利要求。如在实施例以及权利要求的描述中使用的,除非上下文清楚地表明,否则单数形式的“一个”(a)、“一个”(an)和“所述”(the)旨在同样包括复数形式。类似地,如在本申请中所使用的术语“和/或”是指包含一个或一个以上相关联的列出的任何以及所有可能的组合。另外,当用于本申请中时,术语“包括”(comprise)及其变型“包括”(comprises)和/或包括(comprising)等指陈述的特征、整体、步骤、操作、元素,和/或组件的存在,但不排除一个或一个以上其它特征、整体、步骤、操作、元素、组件和/或这些的分组的存在或添加。在没有更多限制的情况下,由语句“包括一个…”限定的要素,并不排除在包括该要素的过程、方法或者设备中还存在另外的相同要素。本文中,每个实施例重点说明的可以是与其他实施例的不同之处,各个实施例之间相同相似部分可以互相参见。对于实施例公开的方法、产品等而言,如果其与实施例公开的方法部分相对应,那么相关之处可以参见方法部分的描述。The above description and drawings sufficiently illustrate the embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural, logical, electrical, procedural, and other changes. The embodiments only represent possible changes. Unless explicitly required, the individual components and functions are optional, and the order of operations can be changed. Parts and features of some embodiments may be included in or substituted for parts and features of other embodiments. The scope of the embodiments of the present disclosure includes the entire scope of the claims and all available equivalents of the claims. When used in this application, although the terms "first", "second", etc. may be used in this application to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another element. For example, without changing the meaning of the description, the first element can be called the second element, and similarly, the second element can be called the first element, as long as all occurrences of the "first element" are renamed consistently and all occurrences "Second component" can be renamed consistently. The first element and the second element are both elements, but they may not be the same element. Moreover, the terms used in this application are only used to describe the embodiments and are not used to limit the claims. As used in the description of the embodiments and claims, unless the context clearly indicates, the singular forms "a" (a), "an" (an) and "the" (the) are intended to also include plural forms . Similarly, the term "and/or" as used in this application refers to any and all possible combinations that include one or more of the associated lists. In addition, when used in this application, the term "comprise" and its variants "comprises" and/or including (comprising) and the like refer to the stated features, wholes, steps, operations, elements, and/or The existence of components does not exclude the existence or addition of one or more other features, wholes, steps, operations, elements, components, and/or groups of these. If there are no more restrictions, the element defined by the sentence "including a..." does not exclude the existence of other identical elements in the process, method, or device that includes the element. In this article, each embodiment focuses on the differences from other embodiments, and the same or similar parts between the various embodiments can be referred to each other. For the methods, products, etc. disclosed in the embodiments, if they correspond to the method parts disclosed in the embodiments, then the relevant parts can be referred to the description of the method parts.
本领域技术人员可以意识到,结合本文中所公开的实施例描述的各示例的单元及算法步骤,能够以电子硬件、或者计算机软件和电子硬件的结合来实现。这些功能究竟以硬件还是软件方式来执行,可以取决于技术方案的特定应用和设计约束条件。本领域技术人员可以对每个特定的应用来使用不同方法以实现所描述的功能,但是这种实现不应认为超出本公开实施例的范围。本领域技术人员可以清楚地了解到,为描述的方便和简洁,上述描述的系统、装置和单元的工作过程,可以参考前述方法实施例中的对应过程,在此不再赘述。Those skilled in the art may realize that the units and algorithm steps of the examples described in combination with the embodiments disclosed herein can be implemented by electronic hardware or a combination of computer software and electronic hardware. Whether these functions are performed by hardware or software may depend on the specific application and design constraint conditions of the technical solution. Those skilled in the art may use different methods for each specific application to realize the described functions, but such realization should not be considered as going beyond the scope of the embodiments of the present disclosure. Those skilled in the art can clearly understand that, for the convenience and conciseness of the description, the working process of the above-described system, device, and unit may refer to the corresponding process in the foregoing method embodiment, which will not be repeated here.
本文所披露的实施例中,所揭露的方法、产品(包括但不限于装置、设备等),可以通过其它的方式实现。例如,以上所描述的装置实施例仅仅是示意性的,例如,单元的划分,可以仅仅为一种逻辑功能划分,实际实现时可以有另外的划分方式,例如多个单元或组件可以结合或者可以集成到另一个系统,或一些特征可以忽略,或不执行。另外,所显示或讨论的相互之间的耦合或直接耦合或通信连接可以是通过一些接口,装置或单元的间接耦合或通信连接,可以是电性,机械或其它的形式。作为分离部件说明的单元可以是或者也可以不是物理上分开的,作为单元显示的部件可以是或者也可以不是物理单元,即可以位于一个地方,或者也可以分布到多个网络单元上。可以根据实际的需要选择其中的部分或 者全部单元来实现本实施例。另外,在本公开实施例中的各功能单元可以集成在一个处理单元中,也可以是各个单元单独物理存在,也可以两个或两个以上单元集成在一个单元中。In the embodiments disclosed herein, the disclosed methods and products (including but not limited to devices, equipment, etc.) can be implemented in other ways. For example, the device embodiments described above are merely illustrative. For example, the division of units may only be a logical function division, and there may be other divisions in actual implementation, for example, multiple units or components may be combined or may be Integrate into another system, or some features can be ignored or not implemented. In addition, the displayed or discussed mutual coupling or direct coupling or communication connection may be indirect coupling or communication connection through some interfaces, devices or units, and may be in electrical, mechanical or other forms. The units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the units can be selected according to actual needs to implement this embodiment. In addition, the functional units in the embodiments of the present disclosure may be integrated into one processing unit, or each unit may exist alone physically, or two or more units may be integrated into one unit.

Claims (22)

  1. 一种透镜光栅的制作方法,包括:A manufacturing method of lens grating includes:
    提供基板;Provide substrate;
    在所述基板上形成至少一个遮光结构以及至少两个透镜,使得所述遮光结构对应于所述至少两个透镜中相邻透镜的交界区域。At least one light-shielding structure and at least two lenses are formed on the substrate, so that the light-shielding structure corresponds to a boundary area of adjacent lenses in the at least two lenses.
  2. 根据权利要求1所述的透镜光栅的制作方法,其中,所述基板为整体基板。The method of manufacturing a lens grating according to claim 1, wherein the substrate is a monolithic substrate.
  3. 根据权利要求2所述的透镜光栅的制作方法,其中,在所述基板上形成至少一个遮光结构以及至少两个透镜,包括:4. The method of manufacturing a lens grating according to claim 2, wherein forming at least one light-shielding structure and at least two lenses on the substrate comprises:
    在所述基板的一面形成所述至少两个透镜;Forming the at least two lenses on one side of the substrate;
    在所述基板上形成所述至少一个遮光结构。The at least one light shielding structure is formed on the substrate.
  4. 根据权利要求3所述的透镜光栅的制作方法,其中,在所述基板上形成所述至少一个遮光结构,包括:4. The method of manufacturing a lens grating according to claim 3, wherein forming the at least one light shielding structure on the substrate comprises:
    在所述基板上对应于所述至少两个透镜中相邻透镜的交界区域,设置开口;An opening is provided on the substrate corresponding to the boundary area of the adjacent lenses of the at least two lenses;
    在所述开口中填充遮光材料,形成所述遮光结构。Filling the opening with a light-shielding material to form the light-shielding structure.
  5. 根据权利要求4所述的透镜光栅的制作方法,其中,在所述基板上对应于所述至少两个透镜中相邻透镜的交界区域,设置开口,包括:4. The method for manufacturing a lens grating according to claim 4, wherein the setting of an opening on the substrate corresponding to the boundary area of the adjacent lenses in the at least two lenses comprises:
    所述基板上对应于所述至少两个透镜中相邻透镜的交界区域,沿所述基板的厚度方向上设置开口。The substrate corresponds to the boundary area of the adjacent lenses of the at least two lenses, and an opening is provided along the thickness direction of the substrate.
  6. 根据权利要求5所述的透镜光栅的制作方法,其中,沿所述基板的厚度方向设置开口,包括:5. The method of manufacturing a lens grating according to claim 5, wherein arranging the opening along the thickness direction of the substrate comprises:
    从所述基板背离所述至少两个透镜的一面,形成开口,使得所述开口延伸至对应的透镜内,或者延伸至所述基板内,或者贯穿所述基板。An opening is formed from the side of the substrate away from the at least two lenses, so that the opening extends into the corresponding lens, or extends into the substrate, or penetrates the substrate.
  7. 根据权利要求6所述的透镜光栅的制作方法,其中,在所述开口中填充遮光材料,包括:7. The method of manufacturing a lens grating according to claim 6, wherein filling the opening with a light-shielding material comprises:
    在所述开口中完全填充遮光材料;或者,Fill the opening completely with light-shielding material; or,
    在所述开口中部分填充遮光材料。A light-shielding material is partially filled in the opening.
  8. 根据权利要求7所述的透镜光栅的制作方法,其中,在所述开口中部分填充遮光材料之后,还包括:7. The method for manufacturing a lens grating according to claim 7, wherein after partially filling the opening with a light-shielding material, the method further comprises:
    在所述遮光材料表面填充材料。Fill the surface of the light-shielding material with material.
  9. 根据权利要求2所述的透镜光栅的制作方法,其中,在所述基板上形成至少一个遮光结构以及至少两个透镜,包括:4. The method of manufacturing a lens grating according to claim 2, wherein forming at least one light-shielding structure and at least two lenses on the substrate comprises:
    在所述基板上形成所述至少一个遮光结构;Forming the at least one light shielding structure on the substrate;
    在所述基板的一面形成所述至少两个透镜。The at least two lenses are formed on one surface of the substrate.
  10. 根据权利要求9所述的透镜光栅的制作方法,其中,在所述基板上形成所述至少一个遮光结构,包括:9. The method for manufacturing a lens grating according to claim 9, wherein forming the at least one light shielding structure on the substrate comprises:
    在所述基板的预设位置设置开口;Setting an opening at a preset position of the substrate;
    在所述开口中填充遮光材料,形成所述遮光结构。Filling the opening with a light-shielding material to form the light-shielding structure.
  11. 根据权利要求10所述的透镜光栅的制作方法,其中,在所述基板的预设位置设置开口,包括:10. The method of manufacturing a lens grating according to claim 10, wherein setting an opening at a preset position of the substrate comprises:
    从所述基板的一面,沿所述基板的厚度方向上设置开口,所述开口延伸至所述基板的另一面或者延伸至所述基板内。From one side of the substrate, an opening is provided along the thickness direction of the substrate, and the opening extends to the other side of the substrate or extends into the substrate.
  12. 根据权利要求11所述的透镜光栅的制作方法,其中,在所述开口中填充遮光材料,包括:11. The method for manufacturing a lens grating according to claim 11, wherein filling the opening with a light-shielding material comprises:
    在所述开口中完全填充遮光材料;或者,The opening is completely filled with light-shielding material; or,
    在所述开口中部分填充遮光材料。A light-shielding material is partially filled in the opening.
  13. 根据权利要求12所述的透镜光栅的制作方法,其中,在所述开口中部分填充遮光材料之后,还包括:The method of manufacturing a lens grating according to claim 12, wherein after partially filling the opening with a light-shielding material, the method further comprises:
    在所述遮光材料表面填充材料。Fill the surface of the light-shielding material with material.
  14. 根据权利要求10至13任一项所述的透镜光栅的制作方法,其中,在所述基板的一面形成所述至少两个透镜,包括:The method for manufacturing a lens grating according to any one of claims 10 to 13, wherein forming the at least two lenses on one surface of the substrate comprises:
    在所述基板的任意一面形成所述至少两个透镜。The at least two lenses are formed on any side of the substrate.
  15. 根据权利要求12所述的透镜光栅的制作方法,其中,在所述开口中完全填充遮光材料之后,还包括:The method of manufacturing a lens grating according to claim 12, wherein after the opening is completely filled with a light-shielding material, the method further comprises:
    在所述基板上靠近所述开口的开口端的一面,对应于开口区域形成遮光材料,使得形成的所述遮光结构部分凸出于所述基板的表面。On a surface of the substrate close to the opening end of the opening, a light-shielding material is formed corresponding to the opening area, so that the formed light-shielding structure partially protrudes from the surface of the substrate.
  16. 根据权利要求9所述的透镜光栅的制作方法,其中,在所述基板上形成所述至少一个遮光结构,包括:The method for manufacturing a lens grating according to claim 9, wherein forming the at least one light shielding structure on the substrate comprises:
    在所述基板的一面形成遮光结构,所述遮光结构完全凸出于所述基板的表面。A light-shielding structure is formed on one side of the substrate, and the light-shielding structure completely protrudes from the surface of the substrate.
  17. 根据权利要求15或16所述的透镜光栅的制作方法,其中,在所述基板的一面形成所述至少两个透镜,包括:The method for manufacturing a lens grating according to claim 15 or 16, wherein forming the at least two lenses on one surface of the substrate comprises:
    在所述基板上所述遮光结构凸出于所述基板的一面,设置所述至少两个透镜,使得所述遮光结构凸出的部分对应于所述至少两个透镜中相邻透镜的交界区域。The light-shielding structure on the substrate protrudes from one side of the substrate, and the at least two lenses are arranged so that the convex part of the light-shielding structure corresponds to the boundary area of the adjacent lenses of the at least two lenses .
  18. 根据权利要求1所述的透镜光栅的制作方法,其中,所述基板为部分基板:The method for manufacturing a lens grating according to claim 1, wherein the substrate is a partial substrate:
    在所述基板上形成至少一个遮光结构,包括:Forming at least one light-shielding structure on the substrate includes:
    在所述部分基板的一面形成遮光结构;Forming a light-shielding structure on one side of the part of the substrate;
    在所述部分基板形成有所述遮光结构的一面铺设基板材料。A substrate material is laid on the side of the part of the substrate where the light shielding structure is formed.
  19. 根据权利要求3或9所述的透镜光栅的制作方法,其中,形成的所述至少两个透镜包括凹透镜和凸透镜中的至少一种。The method for manufacturing a lens grating according to claim 3 or 9, wherein the formed at least two lenses include at least one of a concave lens and a convex lens.
  20. 根据权利要求19所述的透镜光栅的制作方法,其中,形成的所述至少两个透镜包括柱状透镜和球面透镜中的至少一种。The method for manufacturing a lens grating according to claim 19, wherein the formed at least two lenses include at least one of a cylindrical lens and a spherical lens.
  21. 根据权利要求20所述的透镜光栅的制作方法,其中,所述至少两个透镜包括柱状透镜;22. The method of manufacturing a lens grating according to claim 20, wherein the at least two lenses comprise cylindrical lenses;
    在所述基板上形成所述至少两个透镜包括:Forming the at least two lenses on the substrate includes:
    将所述柱状透镜中的部分或全部呈平行分布在所述基板上。Part or all of the lenticular lenses are distributed on the substrate in parallel.
  22. 根据权利要求20所述的透镜光栅的制作方法,其中,所述至少两个透镜包括球面透镜;The method of manufacturing a lens grating according to claim 20, wherein the at least two lenses comprise spherical lenses;
    在所述基板上形成所述至少两个透镜包括:Forming the at least two lenses on the substrate includes:
    将所述球面透镜中的部分或全部呈阵列排布在所述基板上。Part or all of the spherical lenses are arranged in an array on the substrate.
PCT/CN2021/089584 2020-05-22 2021-04-25 Manufacturing method of lens grating WO2021233074A1 (en)

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