WO2020199207A1

WO2020199207A1 - Surface defect optical inspection method and related device

Info

Publication number: WO2020199207A1
Application number: PCT/CN2019/081553
Authority: WO
Inventors: 王星泽; 祝毅博; 何良雨
Original assignee: 合刃科技（深圳）有限公司
Priority date: 2019-04-04
Filing date: 2019-04-04
Publication date: 2020-10-08
Also published as: CN111316086A; CN111316086B

Abstract

A surface defect optical inspection method and a related device. The method comprises: holding at least two measurement samples, wherein a slit is linearly provided in a preset direction between any two adjacent measurement samples of the at least two measurement samples; causing parallel light to enter the slit in the preset direction; acquiring an optical image of light exiting from the slit; and determining a surface defect of the measurement samples according to the optical image. The method enables simultaneous inspection of multiple measurement samples, and improves the accuracy and efficiency of surface inspection.

Description

Surface defect optical detection method and related device

Technical field

This application relates to the field of optical inspection technology, and in particular to an optical inspection method and related devices for surface defects.

Background technique

Product appearance inspection is an important part of industrial inspection. At present, in the inspection of product surface defects, it is mostly used to identify whether there are defects on the surface by imaging the product surface. The interaction between light waves and various irregular structures (ie defects themselves) during the propagation process, such as refraction, scattering, and diffraction, is used to determine whether there are defects on the surface of a product. However, most of the existing optical inspection methods currently use incident light to irradiate the surface of the sample and collect reflection or transmission spectra. It is necessary to detect individual samples separately, and it is difficult to determine the type and location of defects through optical images. More importantly, for some very subtle defects, or defects that are difficult to identify with the naked eye, such as slight depressions and protrusions on the transparent surface, or micron-level scratches, it is difficult to distinguish by imaging.

Summary of the invention

The embodiments of the present application provide an optical detection method and related devices for surface defects, in order to improve the efficiency and accuracy of surface defect detection.

In the first aspect, an embodiment of the present application provides an optical detection method for surface defects, which is applied to a surface detection device, and the method includes:

Clamping at least two samples to be tested, and any two adjacent samples to be tested among the at least two samples to be tested form a slit straight through in a preset direction;

Incident parallel light rays to the slit along the preset direction;

Collecting an optical image of the light emitted from the slit;

The surface defect of the sample to be tested is determined according to the optical image.

In a second aspect, an embodiment of the present application provides a surface detection device. The detection device includes a laser emitting module, a clamping mechanism, an image sensor, a spatial filter, and a computer; the laser emitting module includes a laser transmitter, A beam expander, a collimator; the emission direction of the laser transmitter is perpendicular to the beam expander and the mirror surface of the collimator; wherein the clamping mechanism is used to clamp at least two samples to be tested, so A slit linearly penetrating in a preset direction is formed between any two adjacent samples to be tested in the at least two samples to be tested; and the collimator is used to enter the slit along the preset direction Parallel light; and the image sensor is used to collect an optical image of the light emitted from the slit; and the computer is used to determine the surface defect of the sample to be tested based on the optical image; and the laser is used Emit a laser beam; the beam expander is used to diverge the laser beam; and the collimator is also used to convert the divergent laser beam into parallel rays; and the spatial filter is connected to the image sensor for alignment The light rays emitted from the slit are filtered; and the computer is also used to perform a transformation between the time domain and the frequency domain on the optical image, and analyze the spectral information of the optical image.

It can be seen that, in the embodiment of the present application, the surface detection device first clamps at least two samples to be tested, and any two adjacent samples in the at least two samples to be tested form a straight line through the predetermined direction. Slit; secondly, incident parallel light rays to the slit along a preset direction; again collecting an optical image of the light rays emitted from the slit; finally determining the surface defect of the sample to be tested according to the optical image. It can be seen that the surface inspection device can control and clamp at least two samples to be tested, so that a slit is formed between adjacent samples to be tested, which ensures that multiple samples to be tested can be detected at the same time, which improves the efficiency of surface inspection; Light passes through the slit, and uses parallel light to travel in the slit. Refraction, reflection, diffraction, etc., which may occur when encountering defects, collect different optical images. According to different optical images, the types of surface defects of the sample to be tested can be analyzed , Location, size and other information, improve the accuracy and efficiency of surface detection.

Description of the drawings

In order to more clearly describe the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only These are some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative work.

FIG. 1 is a schematic flow chart of a method for optical detection of surface defects according to an embodiment of the present application;

Figure 2(a) is a method for arranging curved samples to be tested according to an embodiment of the present application;

Figure 2(b) is a method for arranging planar samples to be tested according to an embodiment of the present application;

Figure 3(a) is a neural network structure diagram of a deep learning for surface defect optical inspection provided by an embodiment of the present application;

Figure 3(b) is an effect diagram of an optical image provided by an embodiment of the present application obtained by machine learning of product surface defects;

4 is a schematic flowchart of another optical detection method for surface defects provided by an embodiment of the present application;

FIG. 5 is a schematic flowchart of another optical detection method for surface defects according to an embodiment of the present application;

FIG. 6 is a schematic structural diagram of a surface detection device provided by an embodiment of the present application;

Fig. 7 is a block diagram of functional units of a surface detection device provided by an embodiment of the present application.

detailed description

In order to enable those skilled in the art to better understand the solutions of the application, the technical solutions in the embodiments of the application will be clearly and completely described below in conjunction with the drawings in the embodiments of the application. Obviously, the described embodiments are only It is a part of the embodiments of this application, but not all the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of this application.

The terms "first", "second", etc. in the specification and claims of this application and the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific sequence. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but optionally includes unlisted steps or units, or optionally also includes Other steps or units inherent to these processes, methods, products or equipment.

Reference to "embodiments" herein means that a specific feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art clearly and implicitly understand that the embodiments described herein can be combined with other embodiments.

The following describes the embodiments of the present application in detail.

Please refer to FIG. 1. FIG. 1 is a schematic flowchart of a surface defect optical detection method provided by an embodiment of the present application, which is applied to the surface detection device shown in FIG. 6; as shown in the figure, the surface defect optical detection method includes:

S101: Clamp at least two samples to be tested, and a slit linearly penetrating in a preset direction is formed between any two adjacent samples in the at least two samples to be tested;

Among them, the surface detection device can control the clamping mechanism to clamp at least two samples to be tested, and make a gap between the adjacent surfaces of the sample to be tested; if the sample to be tested is a flat sample, the surfaces of the sample to be tested are mutually Parallel arrangement; if the sample to be tested is a curved sample, make it travel a straight through slit in the same direction as the incident light.

Among them, for the sample to be tested with good surface uniformity and high flatness, it can itself be used as an optical device, which can be arranged at a certain interval to form slits. This arrangement does not limit the number of samples to be tested and the slits The number of slits, and the various parameters of the slits can be adjusted according to the requirements of the sample to be tested, which can simultaneously perform surface defect detection of large quantities of products, which is very efficient.

S102, the surface detection device injects parallel light rays into the slit along the preset direction;

Wherein, the preset direction refers to a preset direction through which a straight line of a slit formed by the sample to be tested penetrates.

S103: The surface detection device collects an optical image of the light emitted from the slit;

Wherein, the incident light undergoes physical processes such as diffraction and scattering after passing through the slit, and is finally projected on the image sensor to form an optical image. The surface detection device collects the optical image of the light passing through the slit through the image sensor.

S104: The surface inspection device determines the surface defect of the sample to be tested according to the optical image.

Among them, the geometric shape of the collected optical image (that is, the distribution of light intensity at different positions) is directly related to the obstacles encountered during the propagation of the light. For example, the incident light does not encounter obstacles in the slit formed by the sample to be tested, that is, when the surface of the sample to be tested is smooth and there are no defects, the collected optical image is a regular optical image; when there are some defects on the surface of the sample to be tested When the incident light propagates in the slit, the propagation path of the light will be affected by defects, and reflection, scattering, refraction or diffraction will occur during the propagation process, and finally the optical image collected by the image sensor will also change. According to the position and shape of the optical image collected by the sensor, it can be determined whether there is a defect in the sample to be tested and the type, size and location of the defect.

It can be seen that, in the embodiment of the present application, the surface detection device first clamps at least two samples to be tested, and any two adjacent samples in the at least two samples to be tested form a straight line through the predetermined direction. Slit; secondly, incident parallel light rays along the preset direction to the slit; again collecting an optical image of the light rays emitted from the slit; finally determining the surface defect of the sample to be tested according to the optical image. It can be seen that the surface inspection device can control and clamp at least two samples to be tested, so that a slit is formed between adjacent samples to be tested, which ensures that multiple samples to be tested can be detected at the same time and improves the efficiency of surface detection; Light passes through the slit, and uses parallel light to travel in the slit. Refraction, reflection, diffraction, etc., which will occur when encountering defects, are collected. Different optical images are collected. According to different optical images, the types of surface defects of the sample to be tested can be analyzed. , Location, size and other information, improve the accuracy and efficiency of surface detection.

In a possible example, the surface detection device includes a laser emission module, the surface detection device includes a laser emission module, and the laser emission module includes a laser emitter, a beam expander, and a collimator arranged in sequence The incident parallel light rays to the slit along the preset direction includes: adjusting the emitting direction of the laser emitting module to the preset direction; controlling the laser transmitter to emit a laser beam, and the laser beam passes The beam expander and the collimator form parallel light rays incident on the slit.

Among them, the surface detection device includes a laser emitter, a beam expander, and a collimator. The laser emitter emits a monochromatic laser with good coherence. After the beam expander and the collimator, parallel light is generated, which is perpendicular to the arrangement direction of the sample to be tested. Incident, that is, the direction of the incident light is consistent with the direction in which the slit between the samples penetrates.

It can be seen that, in this example, the surface detection device controls the laser transmitter to emit a laser beam, and the laser beam forms parallel rays incident on the slit after passing through the beam expander and the collimator, which can ensure that the incident rays are parallel rays In addition, the incident area is large to avoid detection errors due to non-parallel incident light and non-parallel to the preset direction, thereby ensuring the efficiency and accuracy of surface detection.

In a possible example, the surface detection device includes a clamping mechanism, and a slit linearly penetrating in a preset direction is formed between any two adjacent samples in the at least two samples to be tested, including : When the at least two samples to be tested are curved samples to be tested; controlling the clamping mechanism to clamp the at least two samples to be tested, the first sample to be tested of the at least two samples to be tested The two surfaces are adjacent to the first surface of the second test sample of the at least two test samples to form a slit; the slit runs straight through in a predetermined direction.

Wherein, the clamping mechanism includes but is not limited to a high-precision three-dimensional manipulator. The at least two curved samples to be tested can form a straight-through slit in a preset direction between adjacent ones. Please refer to Figure 2(a). Figure 2(a) is a schematic diagram of an arrangement of curved samples to be tested. 206 is a plurality of samples to be tested, specifically curved samples to be tested, "arrows" identify incident light, and 705 is an image sensor for collecting optical images of light passing through the slits of the curved samples to be tested. In a specific implementation, the second sample to be tested is adjacent to the first sample to be tested. If the concave surface of the curved sample to be tested is the first surface and the convex surface is the second surface, the second surface of the first sample to be tested can only form a straight slit with the first surface of the second sample to be tested. Wherein, the parallel light generated by the incident light after passing through the collimator can only be incident from the curved plane perpendicular to the curved sample to be tested, and the curved sample to be tested can also be placed in the opposite direction to the concave surface in FIG. 2(a).

It can be seen that, in this example, the surface inspection device can determine whether there are defects on the surface of a curved sample to be tested and the location of the defects through the optical image finally projected on the image sensor, which increases the number of surface inspection devices that can detect The diversity of samples to be tested improves the detection efficiency.

In a possible example, the surface detection device includes a clamping mechanism, and a slit linearly penetrating in a preset direction is formed between any two adjacent samples in the at least two samples to be tested, including : When the at least two samples to be tested are flat samples to be tested; controlling the clamping mechanism to clamp the at least two samples to be tested, the at least two samples to be tested include a third sample to be tested and a second sample Four samples to be tested, the first or second surface of the third sample to be tested is adjacent to the first surface or the second surface of the fourth sample to be tested to form a slit, and the slit is in a preset direction Form a straight line through.

Among them, please refer to Figure 2 (b), Figure 2 (b) is a schematic diagram of the arrangement of a flat sample to be tested, 206 is a plurality of samples to be tested, specifically the flat sample to be tested, the "arrow" indicates the incident light, and 705 is The image sensor is used to collect the optical image of the light passing through the slit of the flat sample to be tested. In a specific implementation, the first sample to be tested is adjacent to the second sample to be tested, the first surface of the first sample to be tested and the first surface or the second surface of the second sample to be tested form a slit, or the first sample to be tested The second surface of the test sample and the first surface or the second surface of the second test sample form a slit. The incident light can be incident in any direction parallel to the plane. As shown in FIG. 2(b), the incident light can be incident in a direction parallel to the plane of the sample 206 to be tested, from any side of the sample to be tested.

It can be seen that, in this example, the surface inspection device can determine whether there are defects on the surface of the sample to be tested on a plane through the optical image formed on the image sensor, and the location of the defect, which increases the number of surface inspection devices that can detect The diversity of the samples to be tested improves the detection efficiency and accuracy.

In a possible example, the method further includes: adjusting the slit between the at least two samples to be tested or the light wave of the emitted laser beam according to a preset strategy. Wherein, the distance of the slit between at least two samples to be tested can be adjusted by a clamping mechanism according to a preset strategy. The wavelength of the laser light emitted by the laser transmitter can be controlled and adjusted by the surface detection device. And the laser transmitter can use a monochromatic laser with good coherence.

It can be seen that, in this example, the surface inspection device can adjust the slit spacing and laser wavelength according to conditions, for example, the slit spacing and laser wavelength can be adjusted according to the size of the defect, which improves the efficiency and accuracy of surface inspection.

In a possible example, the adjusting the slit between the at least two samples to be tested or the light waves of the emitted laser beam according to a preset strategy includes: adjusting according to the types of the at least two samples to be tested The slit pitch or the light wavelength of the laser beam; adjust the slit pitch or the light wavelength of the laser beam according to the defect size of the at least two samples to be tested; The inspection quality of the sample requires adjusting the gap between the slits or the wavelength of the laser beam.

Among them, because the surfaces of different types of samples to be tested have different degrees of smoothness, the slit spacing and the wavelength of the laser beam are adjusted according to the types of at least two samples to be tested. For example, detecting defects on the surface of fine glass samples, such as scratches on the surface of a lens or display panel. For samples with a highly smooth surface, generally the tolerable defect size is also small, and can be detected with light with a shorter wavelength such as visible light. For metal surface defects, such as dents and uneven coating on the back cover of the mobile phone and the optical mirror. For samples that have not been finely polished and have slightly larger roughness, light with longer wavelengths, such as infrared light and terahertz, can be selected for detection.

Among them, the sample to be tested may have defects of different sizes. The defect can be a visible defect or a small defect generated during the production of the sample to be tested. The size can be known from the experience of the production process.

It can be seen that in this example, adjusting the gap between the slits and the wavelength of the laser beam according to the size of the defect can make the detection of the defect more accurate and faster.

In a possible example, the surface detection device further includes a computer. The determining the surface defect of the sample to be tested according to the optical image includes: analyzing the surface defect of the sample to be tested according to the optical image through a pre-trained defect detection model. Measure the type and location of surface defects of the sample.

Among them, deep learning can automatically find features that need to be detected from the original input data. The deep learning method includes multiple levels, and each level completes a transformation (usually a nonlinear transformation). As shown in Figure 3(a), deep learning is implemented by 3 or more layers of artificial neural networks, 301 is the input layer (Input Layer), 302 is the first intermediate layer (Hidden Layer 1), and 303 is the second intermediate layer (Hidden Layer2), 304 is the output layer (Output Layer). The input layer receives the input optical image, processed by the middle layer, and analyzed, and the output is passed to the output layer to output the result, that is, the defect type, location, size, etc. As shown in Figure 3(b), 310 is the optical image obtained by the optical sensor after passing through the slit of the sample to be tested, 320 is the surface defect of the sample to be tested obtained after the optical image is processed by the neural network, such as 321 is a poor silk screen. 322 is the tooth edge, 323 is the button with different color, 324 is dirty, 235 is the sound hole collapse, and 326 is the oil surface.

For the optical image obtained by the optical sensor, the depth and position of the defect corresponding to the optical image can be obtained through the deep learning and analysis of the machine, and as the complexity of the optical structure increases (such as the increase in the number of slits, the increase in irregularities on the sample surface) , The complexity of the optical image collected by the image sensor will also increase. Through the pre-trained deep learning model or neural network model, the type and location of the observed optical image and the product surface defect can be correlated to predict whether the sample to be tested has surface defects And the location of surface defects. For example, for a sample to be tested with an unpolished surface and a slightly larger roughness, even the light spot produced by a good workpiece may be messy. It may be necessary to select a good sample to train the defect detection model so that it can identify the impurities more accurately. The scattered light spot is caused by the roughness of the sample itself or by the defect.

It can be seen that in this example, the surface inspection device can train the defect detection model based on deep learning, and then correlate the observed optical image with the type and location of the product surface defect to predict the surface defect and location of the sample to be tested; further improve the surface Precision and accuracy of detection.

In a possible example, the surface detection device includes a spatial filter, and after the collection of the optical image of the light emitted from the slit, the method further includes: determining the first defect of the at least two samples to be tested Property, the first defect is a specific surface defect to be detected; according to the property, the filter is controlled to filter the electrical signal to obtain the information of the first defect, and the electrical signal refers to the output from the slit The electrical signal generated by light on the image sensor.

Among them, the sample to be tested may have multiple different types of surface defects. If only a certain type of surface defect is tested, the data is filtered according to the nature of the different defects. For example, for very small surface defects such as scattering caused by point defects, relatively high frequency stray speckles are generally generated on the optical image. If you want to detect the point defects of the sample to be tested, you can perform high-pass filtering to obtain the points that need to be detected. The location, size and number of defects, etc.

It can be seen that in this example, the surface inspection device can detect specific surface defects through filtering, which improves the detection efficiency and accuracy of specific surface defects.

In a possible example, the surface detection device includes a computer, and after collecting the optical image of the light emitted from the slit, it further includes: performing a time domain and frequency domain analysis on the optical image by the computer. And analyze the spectrum information of the optical image.

Among them, spectrum analysis can be performed on the collected optical images as needed, and signal parameters such as distortion, modulation, spectral purity, frequency stability, and cross-modulation distortion of the optical signal of the collected light can be analyzed. For example, the signal is transformed between the time domain and the frequency domain through Fourier transform as needed, or the signal is scaled and translated through wavelet transform.

It can be seen that, in this example, the surface inspection device can perform spectrum analysis on the optical signal of the collected light to obtain the parameters of the optical signal of the collected light, and then analyze whether the result of the detected surface defect is true.

Consistent with the embodiment shown in FIG. 1 above, please refer to FIG. 4. FIG. 4 is a schematic flowchart of a surface defect optical detection method provided by an embodiment of the present application, which is applied to the surface detection device as shown in FIG. The surface detection device includes a laser emitting module, the laser emitting module includes a laser emitter, a beam expander, and a collimator, the emitting direction of the laser emitter is perpendicular to the beam expander and the collimator Mirror; as shown in the figure, the optical detection method for surface defects includes:

S401: The surface detection device clamps at least two samples to be tested, and a slit linearly penetrating in a preset direction is formed between any two adjacent samples in the at least two samples to be tested;

S402: The surface detection device adjusts the emission direction of the laser emission module to the preset direction;

S403: The surface detection device controls the laser transmitter to emit a laser beam, and the laser beam forms parallel rays incident on the slit after passing through the beam expander and the collimator;

S404: The surface detection device collects an optical image of the light emitted from the slit;

S405: The surface inspection device determines the surface defect of the sample to be tested according to the optical image.

It can be seen that, in the embodiment of the present application, the surface detection device first clamps at least two samples to be tested, and any two adjacent samples in the at least two samples to be tested form a straight line through the predetermined direction. Slit; secondly, incident parallel light rays along the preset direction to the slit; again collecting an optical image of the light rays emitted from the slit; finally determining the surface defect of the sample to be tested according to the optical image. It can be seen that the surface inspection device can control and clamp at least two samples to be tested, so that a slit is formed between adjacent samples to be tested, which ensures that multiple samples to be tested can be detected at the same time, which improves the efficiency of surface inspection; Light passes through the slit, and uses parallel light to travel in the slit. Refraction, reflection, diffraction, etc., which will occur when encountering defects, are collected. Different optical images are collected. According to different optical images, the types of surface defects of the sample to be tested can be analyzed. , Location, size and other information, improve the accuracy and efficiency of surface detection.

In addition, the surface detection device controls the laser transmitter to emit a laser beam. The laser beam is preferably a monochromatic laser beam with good coherence. After the laser beam passes through the beam expander and the collimator, the laser beam is incident on the slit. Parallel light can ensure that the incident light is parallel and has a large incident area, and avoid detection errors due to the incident light being non-parallel and non-parallel to the preset direction, thereby ensuring the efficiency and accuracy of surface detection.

Consistent with the embodiment shown in FIG. 1 above, please refer to FIG. 5. FIG. 5 is a schematic flowchart of a surface defect optical inspection method provided by an embodiment of the present application, which is applied to a surface inspection device, and the surface inspection device includes a clamp As shown in the figure, the optical detection method for surface defects includes:

S501: The surface detection device clamps at least two samples to be tested, and a slit linearly penetrating in a preset direction is formed between any two adjacent samples of the at least two samples to be tested;

S502, the surface detection device injects parallel light rays into the slit along the preset direction;

S503: The surface detection device collects an optical image of the light emitted from the slit;

S504: The surface inspection device analyzes the type and location of the surface defect of the sample to be tested through a pre-trained defect detection model according to the optical image.

In addition, the surface inspection device can train the defect detection model based on deep learning, and then correlate the observed optical image with the type and location of the product surface defect to predict whether the sample to be tested has surface defects; it further improves the accuracy and Accuracy.

Consistent with the embodiments shown in FIGS. 1, 4, and 5 above, please refer to FIG. 6. FIG. 6 is a schematic structural diagram of a surface detection device 600 provided by an embodiment of the present application. As shown in the figure, the surface The detection device 600 includes a laser emitting module, a clamping mechanism 604, an image sensor 605, a spatial filter 607, and a computer 608; the laser emitting module includes a laser emitter 601, a beam expander 602, and a collimator 603 arranged in sequence ；

The clamping mechanism 604 is used to clamp at least two samples to be tested 206, and any two adjacent samples to be tested in the at least two samples to be tested form a slit straight through in a preset direction; The collimator is used to inject parallel light into the slit along the preset direction; the image sensor is used to collect an optical image of the light emitted from the slit; and the computer is used to obtain an optical image based on the optical image Determine the surface defects of the sample to be tested. The laser is used to emit a laser beam; the beam expander is used to diverge the laser beam; the collimator is also used to convert the divergent laser beam into parallel light; the spatial filter is connected to the image sensor, It is used to filter the light emitted from the slit; the computer is also used to transform the optical image between the time domain and the frequency domain, and analyze the spectral information of the optical image.

Wherein, the centers of the laser emitting module, the three-dimensional manipulator 604 and the image sensor 605 are on the same optical axis.

The foregoing mainly introduces the solution of the embodiment of the present application from the perspective of the execution process on the method side. It can be understood that, in order to realize the above-mentioned functions, the surface detection device includes hardware structures and/or software modules corresponding to each function. Those skilled in the art should easily realize that, in combination with the units and algorithm steps of the examples described in the embodiments provided herein, the present application can be implemented in the form of hardware or a combination of hardware and computer software. Whether a certain function is executed by hardware or computer software-driven hardware depends on the specific application and design constraint conditions of the technical solution. Professionals and technicians can use different methods for each specific application to implement the described functions, but such implementation should not be considered beyond the scope of this application.

The embodiment of the present application may divide the surface detection device into functional units according to the foregoing method examples. For example, each functional unit may be divided corresponding to each function, or two or more functions may be integrated into one processing unit. The above-mentioned integrated unit can be implemented in the form of hardware or software functional unit. It should be noted that the division of units in the embodiments of the present application is illustrative, and is only a logical function division, and there may be other division methods in actual implementation.

FIG. 7 is a block diagram of the functional unit composition of the surface detection device involved in the embodiment of the present application. It includes a processing unit 701 and a communication unit 702, where

The processing unit 701 is configured to clamp at least two samples to be tested, and any two adjacent samples to be tested in the at least two samples to be tested form a slit straight through in a preset direction; and Incident parallel light rays to the slit in the predetermined direction; and collecting an optical image of the light rays emitted from the slit; and determining the surface defect of the sample to be tested based on the optical image.

Wherein, the surface detection device 700 may further include a storage unit 703 for storing program codes and data of the surface detection device. The processing unit 701 may be a processor, the communication unit 702 may be a touch screen or a transceiver, and the storage unit 703 may be a memory.

In a possible example, the surface detection device includes a laser emitting module, the laser emitting module includes a laser emitter, a beam expander, and a collimator, and the emitting direction of the laser emitter is perpendicular to the beam expanding And the mirror surface of the collimator; in the aspect of incident parallel light into the slit along the preset direction, the processing unit 701 is specifically configured to: adjust the emission direction of the laser emission module to be The preset direction; the laser transmitter is controlled to emit a laser beam, and the laser beam forms a parallel light incident to the slit after passing through the beam expander and the collimator.

In a possible example, the surface detection device includes a clamping mechanism, and a slit linearly penetrating in a preset direction is formed between any two adjacent samples in the at least two samples to be tested. , The processing unit 701 is specifically configured to: when the at least two samples to be tested are curved samples to be tested; control the clamping mechanism to clamp the at least two samples to be tested, the at least two samples to be tested The second surface of the first sample to be tested of the sample and the first surface of the second sample to be tested of the at least two samples to be tested are adjacent to form a slit; the slit runs straight through in a preset direction.

In a possible example, the surface detection device includes a clamping mechanism, and a slit linearly penetrating in a preset direction is formed between any two adjacent samples in the at least two samples to be tested. The processing unit 701 is specifically configured to: when the at least two samples to be tested are flat samples to be tested; control the clamping mechanism to clamp the at least two samples to be tested, and the at least two samples to be tested The third surface or the fourth surface of the third sample to be tested and the third surface or the fourth surface of the at least two samples to be tested are adjacent to form a slit; the slit runs straight through in a preset direction.

In a possible example, the processing unit 701 is specifically configured to adjust the slit between the at least two samples to be tested or the light wave of the emitted laser beam according to a preset strategy.

In a possible example, in terms of adjusting the slit between the at least two samples to be tested or the light wave of the emitted laser beam according to a preset strategy, the processing unit 701 is specifically configured to: according to the at least For the types of two samples to be tested, adjust the gap between the slits or the wavelength of the laser beam; adjust the gap between the slits or the wavelength of the laser beam according to the defect size of the at least two samples to be tested ; According to the inspection quality requirements of the at least two samples to be tested, adjust the slit spacing or the wavelength of the laser beam.

In a possible example, the processing unit 701 is specifically configured to analyze the type and location of the surface defect of the sample to be tested through a pre-trained defect detection model according to the optical image.

In a possible example, the surface detection device includes a spatial filter, and the processing unit 701 is further configured to determine the at least two to-be-tested optical images after collecting the optical image of the light emitted from the slit The property of the first defect of the sample, the first defect is a specific surface defect to be detected; the electrical signal is filtered by the filter according to the property control to obtain the information of the first defect, and the electrical signal refers to The light emitted from the slit generates an electrical signal on the image sensor.

In a possible example, the surface detection device includes a computer. The processing unit 701 is further configured to perform processing on the optical image by the computer after the optical image of the light emitted from the slit is collected. The transformation between the time domain and the frequency domain analyzes the spectral information of the optical image.

An embodiment of the present application also provides a computer storage medium, wherein the computer storage medium stores a computer program for electronic data exchange, and the computer program enables a computer to execute part or all of the steps of any method as recorded in the above method embodiment , The aforementioned computer includes electronic equipment.

The embodiments of the present application also provide a computer program product. The above-mentioned computer program product includes a non-transitory computer-readable storage medium storing a computer program. The above-mentioned computer program is operable to cause a computer to execute any of the methods described in the above-mentioned method embodiments. Part or all of the steps of the method. The computer program product may be a software installation package, and the above-mentioned computer includes electronic equipment.

It should be noted that for the foregoing method embodiments, for the sake of simple description, they are all expressed as a series of action combinations, but those skilled in the art should know that this application is not limited by the described sequence of actions. Because according to this application, some steps can be performed in other order or simultaneously. Secondly, those skilled in the art should also know that the embodiments described in the specification are all preferred embodiments, and the actions and modules involved are not necessarily required by this application.

In the above-mentioned embodiments, the description of each embodiment has its own focus. For parts that are not described in detail in an embodiment, reference may be made to related descriptions of other embodiments.

In the several embodiments provided in this application, it should be understood that the disclosed device may be implemented in other ways. For example, the device embodiments described above are only illustrative. For example, the division of the above-mentioned units is only a logical function division, and there may be other divisions in actual implementation, for example, multiple units or components can be combined or integrated. To another system, or some features can be ignored, or not implemented. In addition, the displayed or discussed mutual coupling or direct coupling or communication connection may be indirect coupling or communication connection through some interfaces, devices or units, and may be in electrical or other forms.

The units described above as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the objectives of the solutions of the embodiments.

In addition, the functional units in each embodiment of the present application may be integrated into one processing unit, or each unit may exist alone physically, or two or more units may be integrated into one unit. The above-mentioned integrated unit can be implemented in the form of hardware or software functional unit.

If the above integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer readable memory. Based on this understanding, the technical solution of the present application essentially or the part that contributes to the prior art or all or part of the technical solution can be embodied in the form of a software product, and the computer software product is stored in a memory, A number of instructions are included to enable a computer device (which may be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the foregoing methods of the various embodiments of the present application. The aforementioned memory includes: U disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), mobile hard disk, magnetic disk or optical disk and other various media that can store program codes.

Those of ordinary skill in the art can understand that all or part of the steps in the various methods of the above-mentioned embodiments can be completed by instructing relevant hardware through a program. The program can be stored in a computer-readable memory, and the memory can include: flash disk , Read-only memory (English: Read-Only Memory, abbreviation: ROM), random access device (English: Random Access Memory, abbreviation: RAM), magnetic disk or optical disc, etc.

The embodiments of the application are described in detail above, and specific examples are used in this article to illustrate the principles and implementation of the application. The descriptions of the above examples are only used to help understand the methods and core ideas of the application; A person of ordinary skill in the art, based on the idea of the present application, will have changes in the specific implementation and the scope of application. In summary, the content of this specification should not be construed as a limitation of the present application.

Claims

An optical detection method for surface defects, characterized in that it is applied to a surface detection device, and the detection method includes:

Clamping at least two samples to be tested, and any two adjacent samples to be tested among the at least two samples to be tested form a slit straight through in a preset direction;

Incident parallel light rays to the slit along the preset direction;

Collecting an optical image of the light emitted from the slit;

The surface defect of the sample to be tested is determined according to the optical image.
The method according to claim 1, wherein it is applied to a surface detection device, the surface detection device includes a laser emitting module, and the laser emitting module includes a laser emitter, a beam expander, and a collimator arranged in sequence. The device; said incident parallel light rays to the slit along the predetermined direction, including:

Adjusting the emission direction of the laser emission module to the preset direction;

The laser transmitter is controlled to emit a laser beam, and the laser beam forms a parallel light incident to the slit after passing through the beam expander and the collimator.
The method according to claim 1, wherein the surface detection device comprises a clamping mechanism, and any two adjacent samples in the at least two samples to be tested form a straight line in a preset direction. The through slits include:

When the at least two samples to be tested are curved samples to be tested, the clamping mechanism is controlled to clamp the at least two samples to be tested, the second of the first sample to be tested of the at least two samples to be tested The surface is adjacent to the first surface of the second sample of the at least two samples to be tested to form a slit; the slit runs straight through in a preset direction.
The method according to claim 1, wherein the surface detection device comprises a clamping mechanism, and any two adjacent samples in the at least two samples to be tested form a straight line in a preset direction. The through slits include:

When the at least two samples to be tested are flat samples to be tested, the clamping mechanism is controlled to clamp the at least two samples to be tested, and the at least two samples to be tested include a third sample to be tested and a fourth sample to be tested. For the sample to be tested, the first surface or the second surface of the third sample to be tested is adjacent to the first surface or the second surface of the fourth sample to be tested to form a slit, and the slit is in a preset direction Form a straight line through.
The method of claim 1, wherein the method further comprises:

Adjust the slit between the at least two samples to be tested or the light wave of the emitted laser beam according to a preset strategy.
The method according to claim 5, wherein the adjusting the slit between the at least two samples to be tested or the light wave of the emitted laser beam according to a preset strategy comprises:

Adjusting the gap between the slits or the wavelength of the laser beam according to the types of the at least two samples to be tested;

Adjusting the gap between the slits or the wavelength of the laser beam according to the size of the defects of the at least two samples to be tested;

According to the inspection quality requirements of the at least two samples to be tested, the gap between the slits or the wavelength of the laser beam is adjusted.
The method according to claim 1, wherein the surface detection device further comprises a computer, and the determining the surface defect of the sample to be tested according to the optical image comprises:

According to the optical image, the type and location of the surface defect of the sample to be tested are analyzed through a pre-trained defect detection model.
The method according to claim 1, wherein the surface detection device comprises a spatial filter, and after collecting an optical image of the light emitted from the slit, the method further comprises:

Determining the nature of the first defect of the at least two samples to be tested, where the first defect is a specific surface defect to be tested;

The filter is controlled according to the property to filter the electrical signal to obtain the information of the first defect, and the electrical signal refers to the electrical signal generated on the image sensor by the light emitted from the slit.
The method according to claim 1, wherein the surface detection device comprises a computer, and after collecting an optical image of the light emitted from the slit, the method further comprises:

The computer transforms the optical image between the time domain and the frequency domain, and analyzes the spectral information of the optical image.
A surface detection device, characterized in that the detection device comprises: a laser emission module, a clamping mechanism, an image sensor, a spatial filter, and a computer; the laser emission module includes a laser transmitter and a beam expander arranged in sequence And collimator;

The clamping mechanism is used to clamp at least two samples to be tested, and any two adjacent samples to be tested among the at least two samples to be tested form a slit straight through in a preset direction;

The collimator is used for incident parallel light rays to the slit along the preset direction;

The image sensor is used to collect an optical image of the light emitted from the slit;

The computer is used to determine the surface defect of the sample to be tested according to the optical image;

The laser is used to emit a laser beam; the beam expander is used to diverge the laser beam;

The collimator is also used to convert the divergent laser beam into parallel rays;

The spatial filter is connected to the image sensor, and is used for filtering the light emitted from the slit;

The computer is also used to transform the optical image between the time domain and the frequency domain, and analyze the spectrum information of the optical image.