WO2019230883A1

WO2019230883A1 - Ultrasonic vibration application tool, traveling wave generation device, and ultrasonic machining device

Info

Publication number: WO2019230883A1
Application number: PCT/JP2019/021522
Authority: WO
Inventors: 大西　一正
Original assignee: 有限会社Ｕｗａｖｅ
Priority date: 2018-05-30
Filing date: 2019-05-30
Publication date: 2019-12-05
Also published as: CN112188938B; JPWO2019230883A1; TW202003121A; CN112188938A; KR20210013694A

Abstract

[Problem] To provide an ultrasonic vibration application tool comprising a Langevin ultrasonic transducer that is incorporated into an ultrasonic machining device and is suitable for generating circular traveling waves. [Solution] An ultrasonic vibration application tool including: a cylindrical housing having a downwardly widening contact surface on the lower part of the inner peripheral surface, and provided with a threaded surface on the lower part of the outer peripheral surface; a Langevin ultrasonic transducer configured such that a polarization-treated piezoelectric element is bolted in a sandwiched state between a front mass, the upper part which is provided with a flange part having a contact surface fitted together with the contact surface of the housing, and a rear mass disposed above the front mass; and a ring-shaped counter weight, the upper part of the inner peripheral surface of which is provided with a threaded surface into which the threaded surface in the lower part of the outer peripheral surface of the housing is threaded, and the lower part of which has an inner-peripheral extended part that comes into contact with the lower surface of the flange part and does not come into contact with the side surface of the front mass; vertical vibration of the front mass and flexural vibration in the center part of a flat surface of the flange part, which projects out in the same direction as said vertical vibration, being generated by the application of electric energy to the piezoelectric element, and arcuate vibration in a direction opposite to the direction of projection by said flexural vibration in the center part of the flat surface of the flange part being simultaneously generated in the outer peripheral surface of the ring-shaped counterweight by said energy application as well.

Description

Ultrasonic vibration applicator, traveling wave generator and ultrasonic processing device

The present invention relates to an ultrasonic vibration applicator, a traveling wave generator, and an ultrasonic processing apparatus. In particular, the present invention is an ultrasonic vibration applicator using a Langevin type ultrasonic vibrator, but an ultrasonic vibration applicator exhibiting a novel vibration mode of ultrasonic vibration, and a progress using the ultrasonic vibration applicator. The present invention relates to a wave generator and an ultrasonic processing apparatus.

Various types of ultrasonic transducers using piezoelectric elements as ultrasonic wave generation sources are known. A typical configuration is a pair of metal blocks and a polarization fixed between these metal blocks. A Langevin type ultrasonic transducer composed of a processed piezoelectric element is known. In particular, a bolted Langevin type ultrasonic transducer with a structure in which a polarized piezoelectric element is connected by a bolt between a pair of metal blocks and fastened at a high pressure can generate high-energy ultrasonic vibrations. In addition, use in ultrasonic processing used by attaching to a tool for performing polishing processing, cutting processing, plastic processing, abrasive processing, and the like of various materials has been studied and actually used. Furthermore, for various types of ultrasonic transducers, ultrasonic vibration generated by the ultrasonic transducers is transmitted via a vibration plate or various vibration means, so that ultrasonic cleaning, metal bonding, plastic welding, ultrasonic waves are performed. Applications of ultrasonic treatments such as atomization, emulsification and dispersion, and use in communication application equipment such as underwater acoustic instruments (sonar) such as fish detectors, ultrasonic flaw detectors, medical echo diagnostic equipment, and flow meters It is considered and used in many fields.

Also, as described in Patent Document 1, a method and an apparatus for generating a traveling wave using ultrasonic vibration are already known. A typical traveling wave using this ultrasonic vibration is a method of generating an annular traveling wave in a vibrating body having an annular shape, and this traveling wave is used as an ultrasonic motor, polishing, or the like. Devices and cutting devices have been proposed. However, devices that use an ultrasonic vibration mode that generates traveling waves, and the devices that are actually used are currently limited to motors that are built into cameras with little mechanical load and little fluctuation. Yes.

The ultrasonic vibration showing the traveling wave ultrasonic vibration mode is a vibration mode characterized in that no node is generated in the vibration, and a piezoelectric ceramic having an annular plane as a vibration body also serving as a vibration source. It is common to use a plate. However, since the vibration node does not appear in the annular vibrating body in which traveling waves are generated, the vibrating body cannot be supported while maintaining the vibration characteristics. In other words, in order to effectively utilize the ultrasonic vibration appearing in the vibrating body, the normal vibrating body is supported at the position where the ultrasonic vibration node appears, but the ultrasonic vibration node appears. When a traveling wave ultrasonic vibration mode is used, the vibrating body cannot be supported using such a support method. For this reason, a method of using a molded body made of a soft material such as felt as a support substrate is used for supporting an annular vibrating body that generates ultrasonic vibration of a traveling wave ultrasonic vibration mode that has been put to practical use. This is realized by suspending the vibrating body in the air by such a support method.
However, when a large mechanical load is applied to the vibrating body, the molded body of a soft material such as felt is compressed and hardened, so that the ultrasonic vibration of the traveling wave ultrasonic vibration mode generated in the vibrating body propagates to the support substrate. Therefore, there is a problem that smooth traveling wave generation in the vibrating body may not be realized.

FIG. 11 of Patent Document 1 discloses a diagram of a traveling wave generation method using a Langevin type ultrasonic transducer. The configuration of the disclosed Langevin type ultrasonic transducer and traveling wave generation are disclosed. There is no specific explanation about the method of supporting the vibrating body for.

In addition, the expected effect of applying ultrasonic vibration to various tools in an ultrasonic processing device is that the ultrasonic vibration generated by the ultrasonic vibrator is held in a tool holder that is combined with the ultrasonic vibrator. For example, the electrical energy required for the machining operation by the tool is reduced and the machining accuracy is improved. However, there are many cases where the expected effects are not sufficiently obtained in the ultrasonic machining apparatus manufactured so far and used in actual machining operations. For this reason, it cannot be said that the spread of ultrasonic processing apparatuses is sufficiently advanced even at the present time. Therefore, in order to further promote the spread of ultrasonic processing apparatuses, it is necessary to develop an ultrasonic processing apparatus that transmits ultrasonic vibrations generated by an ultrasonic vibrator to a tool with high efficiency.

The inventor of the present invention has devised an invention that provides an improvement so that ultrasonic vibration generated by an ultrasonic vibrator incorporated in an ultrasonic machining apparatus is transmitted to a tool with high efficiency, A number of patent applications have been filed. Among these improved inventions, the invention disclosed in Patent Document 2 can be cited as one of the recent inventions. This patent document 2 is filed on August 15, 2018, and the Japanese Patent Application No. 2018-114989 filed on May 30, 2018, claiming priority in this PCT application. It will be released later.

Patent Document 2 discloses a cylindrical housing having a contact surface at a lower portion or a bottom portion of an inner peripheral surface and a screw portion at a lower portion of the outer peripheral surface; a disk having a contact surface fitted to the contact surface of the cylindrical housing Langevin type with a bolted structure with a polarization-treated piezoelectric element sandwiched between a front mass including a cylindrical tool attachment having a cylindrical bulge at the top and a rear mass disposed above the front mass There is disclosed an ultrasonic vibration applicator including an ultrasonic vibrator; and a ring-shaped counterweight having a threaded portion into which a threaded portion of a cylindrical housing is screwed on an inner peripheral surface. Further, as a preferable configuration of the ring-shaped counterweight, a lower small-diameter portion whose inner diameter is smaller than the inner diameter of the screw portion is formed below the screw portion, and the inner peripheral surface of the lower small-diameter portion and the cylinder The structure by which the space | gap is formed between the side surfaces of a tool-like tool attachment (it also serves as a front mass) is disclosed.

Patent Document 1: JP 59-122385 (1984-7-14)
Patent Document 2: PCT / JP2018 / 004728 (filed on Feb. 9, 2018, published on Aug. 15, 2018 as WO 2018 / 147445A1)

The inventor of the present invention expects that the ultrasonic vibration applicator described in Patent Document 2 may be used as an ultrasonic vibration applicator that efficiently generates an annular traveling wave in an annular vibrator. Therefore, the occurrence of an efficient annular traveling wave on the annular vibrator using the ultrasonic vibration applicator having the configuration specifically disclosed in Patent Document 2 was examined. However, the state of occurrence of the annular traveling wave did not necessarily reach a satisfactory level.

Accordingly, an object of the present invention is to provide an ultrasonic vibration applicator equipped with a Langevin type ultrasonic transducer, which is particularly suitable for stably applying ultrasonic vibration of traveling wave mode to an annular vibrator. There is.

In the process of further studying the configuration of the ultrasonic vibration applicator described in Patent Document 2, the inventor of the present invention produces the ultrasonic vibration applicator having the configuration described in FIGS. 1 to 3 attached to this specification. The ultrasonic vibration characteristics of this ultrasonic vibration applicator were examined.

That is, in FIGS. 1 to 3, the ultrasonic vibration applicator 1 has a cylindrical housing 2 having a contact surface that extends downward at the lower portion of the inner peripheral surface and a threaded surface at the lower portion of the outer peripheral surface; The

electrode layers

6a and 6b are used between a front mass 4 having a flange portion 3 having a contact surface fitted to the contact surface of the upper mass 4 and a rear mass 5 disposed above the front mass 4. A Langevin type ultrasonic vibrator having a configuration in which a piezoelectric element 6 subjected to polarization processing is sandwiched (bolted) with a bolt 5a; A ring-shaped fishing ring having a threaded surface at the upper part 7a of the inner peripheral surface, an inner peripheral side extension 7c that contacts the lower surface of the flange part 3 at the lower part 7b and does not contact the side surface of the front mass 4 Including the weight 7; the diameter (Hin) of the circumferential circle formed by the upper end of the region where the contact surface of the cylindrical housing 2 and the contact surface of the flange portion 3 are in contact with each other is the inside of the ring-shaped counterweight 7 This is an ultrasonic vibration applicator characterized by being larger than the diameter (Nin) of the circumferential circle formed by the inner peripheral surface of the extension 7c.

FIG. 3 shows a plan view of the ring-shaped counterweight 7 (FIG. 3A) and a sectional view taken along the line AA in FIG. 3 (FIG. 3B). The ring-shaped counterweight 7 shown in FIG. 3 is of a type having a female screw hole for adjusting the deflection accuracy. Then, on the upper side in the thickness direction (height direction) of the ring-shaped counterweight 7, an upper region 7 a (on the inner peripheral surface having a screw surface into which a lower thread surface of the outer peripheral surface of the cylindrical housing 2 is screwed) Thickness: 7 at), and has a lower region 7b (thickness: 7bt) having an inner peripheral extension 7c that contacts the lower surface of the flange portion 3 and does not contact the side surface of the front mass 4. Yes.

And as a result of investigating the ultrasonic vibration characteristics of the ultrasonic vibration applicator having the basic configuration shown in FIG. 1 to FIG. Such interesting ultrasonic vibration characteristics were found.
(1) The mass of the cylindrical housing has a larger mass than either of the Langevin type ultrasonic vibrator and the ring-shaped counterweight, and the mass of the ring-type counterweight is 0.5 when the mass of the Langevin type ultrasonic vibrator is 1. In the case of having a mass in the range of −1.5, the Langevin type ultrasonic vibrator is applied by applying electric energy having a frequency for exciting the longitudinal zeroth order vibration of the Langevin type ultrasonic vibrator to the piezoelectric element. The vertical vibration of the flange part protruding in the same direction as the whole vertical vibration of the whole Langevin type ultrasonic transducer and the bending vibration of the flat central part of the flange part occur at the same time. The arc-shaped vibration in the direction opposite to the direction of the protrusion is generated on the outer peripheral surface of the ring-shaped counterweight.

(2) FIGS. 4 to 6 of the accompanying drawings schematically show the ultrasonic vibration characteristics described in (1) above. FIG. 5 exaggerates the vibration mode of the Langevin type ultrasonic vibrator and the ring-shaped counterweight shown in FIG.

In the vibration mode shown in FIGS. 4 to 6, a node (node: indicated by a black dot) 9 appears only near the lower end of the cylindrical housing, and the Langevin type ultrasonic vibrator vibrates up and down as a whole. In addition, the flange portion and the ring-shaped counterweight vibrate in the above-described mode, but those vibrations hardly propagate to the cylindrical housing 2, and therefore the cylindrical housing 2 hardly vibrates.

(3) FIGS. 7 and 8 show a node near the lower end of the cylindrical housing by applying electric energy having a frequency for exciting the longitudinal primary vibration of the Langevin type ultrasonic transducer to the piezoelectric element. In addition to the vibration in which 9 appears, longitudinal primary vibration (longitudinal stretching vibration) having a node (node) 10 in the vicinity of the piezoelectric element of the Langevin type ultrasonic transducer is excited, and the Langevin type ultrasonic transducer has a longitudinal direction. This shows how the expansion and contraction vibration appears. Therefore, the vibration of the Langevin type ultrasonic vibrator is a stretching vibration in which the front mass and the rear mass vibrate up and down in opposite directions, and at the same time, the center of the flange portion protruding in the same direction as the vibration direction of the front mass 4 A bending vibration of the portion appears, and an arc-shaped vibration in a direction opposite to the direction in which the bending central portion of the flange portion projects is generated on the outer peripheral surface of the ring-shaped counterweight.
Even in the vibration modes shown in FIGS. 7 and 8, the vibration of the Langevin type ultrasonic vibrator and the vibration of the ring-shaped counterweight hardly propagate to the cylindrical housing 2, and therefore the cylindrical housing 2 hardly vibrates. .

(4) On the other hand, the mass of the cylindrical housing has a larger mass than both the Langevin type ultrasonic transducer and the ring-type counterweight, and the ring-type counterweight has a mass of 1 for the Langevin type ultrasonic transducer. In the case of having a mass in the range of 0.25 to 0.75, by applying electrical energy to the piezoelectric element of the Langevin type ultrasonic transducer, the stretching vibration of the Langevin type ultrasonic transducer and the front mass A bending vibration occurs in the center of the plane of the flange portion protruding in the direction opposite to the vibration in the vertical direction, and at the same time, an arc-shaped direction opposite to the direction protruding by the bending vibration in the center of the plane of the flange portion is generated. Vibration occurs on the outer peripheral surface of the ring-shaped counterweight.

(5) FIGS. 9 and 10 are diagrams schematically showing the state of ultrasonic vibration generated by the ultrasonic vibration applicator having the configuration (4). Even in the vibration mode shown in FIGS. 9 and 10, the vibration of the front mass, the flange portion, and the ring-shaped counterweight hardly propagates to the cylindrical housing 2, and therefore the cylindrical housing 2 hardly vibrates.

Based on the novel findings described above, the inventors of the present invention have completed the invention described below.

(Invention 1) A cylindrical housing having a contact surface extending downward at the lower portion of the inner peripheral surface and a screw surface at the lower portion of the outer peripheral surface; a flange having a contact surface fitted to the contact surface of the cylindrical housing A Langevin type ultrasonic transducer having a structure in which a polarization-treated piezoelectric element is sandwiched between a front mass provided with an upper portion and a rear mass disposed above the front mass; and the above cylindrical shape An inner peripheral side having a screw surface into which the screw surface of the lower outer peripheral surface of the housing is screwed is provided at the upper portion of the inner peripheral surface, contacting the lower surface of the flange portion at the lower portion, and not contacting the side surface of the front mass. A ring-shaped counterweight having an extension; applying the electrical energy to the piezoelectric element causes the front mass to vibrate in the vertical direction and the front mass in the vertical direction. The bending vibration of the flange center portion protruding in the direction occurs, and at the same time, the arc-shaped vibration in the direction opposite to the direction protruding by the bending vibration of the flange center portion of the flange portion is the ring-shaped counterweight. Ultrasonic vibration applicator that occurs on the outer peripheral surface of the.

(Invention 2) A cylindrical housing having a contact surface extending downward at the lower portion of the inner peripheral surface and a threaded surface at the lower portion of the outer peripheral surface; a flange having a contact surface fitted to the contact surface of the cylindrical housing A Langevin type ultrasonic transducer having a structure in which a polarization-treated piezoelectric element is sandwiched between a front mass provided with an upper portion and a rear mass disposed above the front mass; and the above cylindrical shape An inner peripheral side having a screw surface into which the screw surface of the lower outer peripheral surface of the housing is screwed is provided at the upper portion of the inner peripheral surface, contacting the lower surface of the flange portion at the lower portion, and not contacting the side surface of the front mass. A ring-shaped counterweight having an extension; and by applying electrical energy to the piezoelectric element, the vertical vibration of the front mass and the vertical vibration of the front mass are The bending vibration of the flange center portion protruding in the direction occurs, and at the same time, the arc-shaped vibration in the direction opposite to the direction protruding by the bending vibration of the flange center portion of the flange portion is the ring-shaped counterweight. Ultrasonic vibration applicator that occurs on the outer peripheral surface of the.

(Invention 3) Along the ring of the above-mentioned ring-shaped vibrating body, including the ring-shaped vibrating body and the ultrasonic vibration applicator disposed and connected to the ring-shaped vibrating body at a distance from each other. An apparatus for generating a traveling wave, the apparatus using the ultrasonic wave applicator of the invention 1 as an ultrasonic wave applicator.

(Invention 4) Annular vibrator, and along the ring of the annular vibrator, including ultrasonic vibration applicators disposed on and connected to the annular vibrator apart from each other. An apparatus for generating a traveling wave, the apparatus using the ultrasonic wave applicator of the invention 2 as an ultrasonic wave applicator.

(Invention 5) An ultrasonic processing apparatus including an ultrasonic vibration applicator and a tool attached to the ultrasonic vibration applicator, wherein the ultrasonic applicator of the invention 1 is used as the ultrasonic applicator.

(Invention 6) An ultrasonic processing apparatus including an ultrasonic vibration applicator and a tool attached to the ultrasonic vibration applicator, wherein the ultrasonic applicator of the invention 2 is used as the ultrasonic applicator.

Preferred embodiments of the ultrasonic vibration applicator of the present invention are described below.
(1) The diameter (Hin) of the circumferential circle formed by the upper end of the region where the contact surface of the cylindrical housing and the contact surface of the flange contact each other is the inner peripheral surface of the inner extension of the ring-shaped counterweight Is larger than the diameter (Nin) of the circumference of the circle.
(2) The cylindrical housing has a larger mass than both the Langevin type ultrasonic transducer and the ring-shaped counterweight.
(3) Ultrasonic vibration applicator of invention 1-The ring-shaped counterweight has a mass in the range of 0.5-1.5, where 1 is the mass of the Langevin type ultrasonic transducer.
(4) Regarding the ultrasonic vibration applicator according to the second aspect of the present invention, the ring-shaped counterweight has a mass in the range of 0.25 to 0.75, where the mass of the Langevin type ultrasonic transducer is 1.

When the ultrasonic vibration applicator of the present invention is incorporated and used in an ultrasonic processing device, the support member of the ultrasonic vibration applicator of the ultrasonic processing device from the ultrasonic vibration applicator (support for incorporation into the ultrasonic processing device) Leakage of ultrasonic vibration energy into the member) is significantly reduced. For this reason, it becomes possible to transmit the ultrasonic vibration generated by the Langevin type ultrasonic vibrator to the tool or the vibrator attached to the ultrasonic vibration applicator with high efficiency and high stability. .

In addition, by attaching three or more ultrasonic applicators of the present invention to an annular vibrating body in a state of being separated from each other, it is possible to stably generate an annular traveling wave on the vibrating body.

It is a top view of the example of the ultrasonic vibration applicator of this invention. It is front sectional drawing of the ultrasonic vibration provision tool shown in FIG. It is a figure which shows the example of a structure of the ring-shaped balance weight which comprises the ultrasonic vibration provision tool of this invention, (a) is a top view, (b) is along the AA line shown to (a). FIG. Each of the vibration of the Langevin type ultrasonic vibrator, the vibration of the flange portion of the front mass, and the vibration of the ring-shaped counterweight generated when electric energy is applied to the ultrasonic vibration applicator of the present invention shown in FIG. It is explanatory drawing shown in figure. This figure shows a state where the Langevin type ultrasonic transducer is in a position lowered by vibration. Each of the vibration of the Langevin type ultrasonic vibrator, the vibration of the flange portion of the front mass, and the vibration of the ring-shaped counterweight constituting the ultrasonic vibration applicator of the present invention shown in FIG. It is explanatory drawing shown by. Each of the vibration of the Langevin type ultrasonic vibrator, the vibration of the flange portion of the front mass, and the vibration of the ring-shaped counterweight generated when electric energy is applied to the ultrasonic vibration applicator of the present invention shown in FIG. It is explanatory drawing shown in figure. This figure shows a state in which the Langevin type ultrasonic transducer is in a position raised by vibration. The vibration of the Langevin type ultrasonic vibrator, the vibration of the flange portion of the front mass, and the ring shape generated when electric energy is applied to the ultrasonic vibration applicator having the same structure as the ultrasonic vibration applicator shown in FIG. It is explanatory drawing which illustrates each of the vibration of a balance weight. In the configuration of this figure, a vibration node appears near the position of the piezoelectric element of the Langevin type ultrasonic transducer. And this figure shows the state which exists in the position which the front mass fell by the vibration. Each of the vibration of the Langevin type ultrasonic vibrator, the vibration of the flange portion of the front mass, and the vibration of the ring-shaped counterweight generated when electric energy is applied to the ultrasonic vibration applicator of the present invention shown in FIG. It is explanatory drawing shown in figure. In the configuration of this figure, a vibration node appears near the position of the piezoelectric element of the Langevin type ultrasonic transducer. And this figure shows the state which exists in the position which the front mass raised by the vibration. Langevin type ultrasonic vibration generated when electrical energy is applied to an ultrasonic vibration applicator having a configuration similar to that of the ultrasonic vibration applicator shown in FIG. 2 (except that the front mass has a large mass). It is explanatory drawing which illustrates each of the vibration of a child, the vibration of the flange part of a front mass, and the vibration of a ring-shaped balance weight. In the configuration of this figure, a vibration node appears on the front mass. And this figure shows the state which exists in the position which the front mass fell by the vibration. Explanation illustrating the vibration of the Langevin type ultrasonic vibrator, the vibration of the flange portion of the front mass, and the vibration of the ring-shaped counterweight generated when electric energy is applied to the ultrasonic vibration applicator shown in FIG. FIG. In the configuration of this figure, a vibration node appears on the front mass. And this figure shows the state which exists in the position which the front mass raised by the vibration. It is a figure which shows the ultrasonic vibration provision tool of this invention as a structure with which the front mass was integrated with the ring-shaped counterweight via the flange part. The top view of the grinding | polishing apparatus comprised by mounting | wearing the annular | circular shaped grinding | polishing tool with the ultrasonic vibration provision tool of this invention is shown. FIG. 13 is a front sectional view of the polishing apparatus shown in FIG. 12. It is a schematic diagram which shows the mode of the annular traveling wave which generate | occur | produces in an annular | circular grinding | polishing tool when an electrical energy is applied to the ultrasonic vibration provision tool with which the grinding | polishing apparatus shown in FIG. 12 and FIG. 13 was mounted | worn. The top view of the cutting device comprised by mounting | wearing the cutting tool (annular blade) with the ultrasonic vibration applicator of this invention is shown. The front sectional view of the cutting device shown in Drawing 15 is shown. It is a schematic diagram which shows the mode of the annular traveling wave which generate | occur | produces in a cutting tool (annular blade) when an electrical energy is applied to the ultrasonic vibration provision tool with which the cutting apparatus shown in FIG. 15 and FIG. 16 was mounted | worn.

Hereinafter, a detailed description of the ultrasonic vibration applicator of the present invention will be described with reference to FIGS.

1 and 2 are diagrams showing a typical configuration example of an ultrasonic vibration applicator capable of generating ultrasonic vibration in a characteristic mode of the present invention. The configuration of the ultrasonic vibration applicator shown in FIGS. 1 and 2 has already been described in this specification. That is, the ultrasonic vibration applicator shown in FIGS. 1 and 2 has the same basic configuration as the ultrasonic vibration applicator described in Patent Document 2.
However, in the ultrasonic vibration applicator shown in FIGS. 1 and 2, the diameter (Hin) of the circumference formed by the upper end portion of the region where the contact surface of the cylindrical housing 2 and the contact surface of the flange portion 3 are in contact with each other. ) Is an ultrasonic vibration applicator characterized in that it is larger than the diameter (Nin) of the circumferential circle formed by the inner peripheral surface of the inner extension 7 of the ring-shaped counterweight 8. This is different from the ultrasonic vibration applicator. In addition, as a matter of course for the piezoelectric element mounted on the Langevin type ultrasonic transducer of the ultrasonic vibration applicator shown in each drawing attached to the present application, actually, electric energy is supplied. Comes with a wiring system. However, the illustration of such a wiring system is complicated and is omitted in each drawing.
The explanation has already been described for FIG.

4 to 10 show various configurations of the ultrasonic vibration applicator of the present invention, and Langevin type ultrasonic transducers that appear when electric energy is applied to the piezoelectric element of the ultrasonic vibration applicator of those configurations. It is a diagram schematically showing the direction of longitudinal vibration, flexural vibration appearing in the flange portion of the front mass, and arc-shaped vibration appearing in the ring-shaped counterweight, and the explanation of each figure has already been described in this specification. ing.

1 to 10 of the accompanying drawings show the ultrasonic vibration applicator produced by separately forming the front mass provided with the flange portion and the ring-shaped counterweight, but the front mass provided with the flange portion and A ring-shaped counterweight is a saddle that can produce the same effect even if it is made as one piece. Such a configuration is shown in FIG. That is, the front mass 4 and the ring-shaped counterweight 7 are integrated as a whole by an extension 7d of the ring-shaped counterweight that connects them, and a flange portion 7e of the front mass integrated with the extension 7d. Yes. However, it is considered that the ultrasonic vibration applicator shown in FIG. 11 is not practical because it is not easy to produce.

Next, a method for generating an ultrasonic vibration in an annular traveling wave mode using the ultrasonic vibration applicator of the present invention will be described. In the circular traveling wave mode, vibration nodes do not appear in the direction in which the traveling wave propagates, and even large vibrating bodies can be excited. It will be advantageous.

The annular traveling wave mode is a traveling wave in a mode that bends in a direction perpendicular to the radial direction of the annular vibrator, as shown in the diagrams schematically illustrated in FIGS. 14 and 17 to be described later. There are two types of traveling waves in the mode of bending in the radial direction of the annular vibrator. In order to generate a traveling wave in any mode of traveling wave, three or more ultrasonic vibration applicators are separated from each other, preferably at the same distance, on the surface of the annular vibrating body. It is necessary to install with. In general, it is necessary to increase the number of ultrasonic vibration applicators to be attached as the size of the vibrator increases.

FIG. 12 and FIG. 13 show an example of the configuration of an ultrasonic processing apparatus (polishing apparatus) that performs polishing processing by applying ultrasonic vibration in an annular traveling wave mode. FIG. 12 shows a plan view of the polishing apparatus. FIG. 13 is a front cross-sectional view taken along line AA of the polishing apparatus shown in FIG.

In order to generate an annular traveling wave mode ultrasonic vibration in a polishing apparatus using the ultrasonic application apparatus of the present invention, a total of four ultrasonic application apparatuses 1 ( 1a, 1b, 1c, 1d) are used, and the housing of each ultrasonic wave applicator 1 is attached to the rotating plate 11 with bolts in a state of being separated from each other by 90 °. By using the ultrasonic wave application device of the present invention, as described above, the ultrasonic vibration generated by the Langevin type ultrasonic transducer hardly leaks into the housing. And since the ultrasonic provision apparatus equipped with the ring-shaped counterweight shows high rigidity, it is attached to the rotating plate 11 with high rigidity.

Next, an annular polishing plate 14 having an annular grindstone surface 13 formed on the top surface of the front mass of the Langevin type ultrasonic transducer of each ultrasonic wave imparting device (1a, 1b, 1c, 1d) is bolted. Use to install. Even when a large mechanical load is applied to the annular grinding wheel surface 13 formed on the surface of the annular polishing plate 14 in the polishing operation using the polishing apparatus having such a configuration, the annular traveling wave mode in a stable state. The ultrasonic vibration can be supplied.

At the start of the polishing operation, first, the grinding liquid is sprayed on the annular grinding wheel surface 13 of the annular grinding plate 14, and then each of the ultrasonic wave application devices 1 (1a, 1b, 1c, 1d) is transmitted from the ultrasonic wave transmission circuit. Electrical energy having a predetermined voltage and frequency is applied to the Langevin type ultrasonic transducer by the following method.

That is, for example, the Cos wave voltage is used for the Langevin type ultrasonic transducer of the ultrasonic applicator 1a, the Sin wave voltage is used for the Langevin type ultrasonic transducer of the ultrasonic applicator 1b, and the Langevin type ultrasonic wave of the ultrasonic applicator 1c. A -Cos wave voltage is applied to the vibrator, and a -Sin wave voltage is applied to the Langevin type ultrasonic vibrator of the ultrasonic wave applying device 1d. By applying different kinds of voltages to each of the Langevin type ultrasonic transducers of each ultrasonic wave imparting device in this way, as shown in the schematic diagram of FIG. A traveling wave of a mode that bends in a direction perpendicular to the radial direction is generated on the surface.

Next, the rotating shaft 12 is rotated, and the material to be polished is polished according to a predetermined processing program.

In the Langevin type driving, the driving circuit can be simplified if the driving phase is actually two-phase. Therefore, instead of applying the -Cos wave voltage to the Langevin type ultrasonic transducer of the ultrasonic wave applying device 1c. In addition, a method of applying a Cos wave voltage to the Langevin type ultrasonic transducer of the ultrasonic applicator 1c by arranging the piezoelectric elements attached to the Langevin type ultrasonic transducer of the ultrasonic applicator 1c in the reverse direction can be used. . Similarly, instead of applying a -Sin wave voltage to the Langevin type ultrasonic transducer of the ultrasonic applicator 1d, the piezoelectric elements to be attached to the Langevin type ultrasonic transducer of the ultrasonic applicator 1d are arranged in the opposite direction. And the method of applying a Sin wave voltage to the Langevin type ultrasonic transducer | vibrator of the ultrasonic application apparatus 1d can also be utilized.

Next, an example of the configuration of an ultrasonic processing apparatus (grinding apparatus) that performs grinding by applying ultrasonic vibration in an annular traveling wave mode is shown in FIGS. FIG. 15 shows a plan view of the grinding apparatus. FIG. 16 is a front sectional view of the grinding apparatus shown in FIG.

In order to generate an annular traveling wave mode ultrasonic vibration in the grinding device using the ultrasonic applicator of the present invention, the grinding device shown in FIGS. 15 and 16 has a total of four ultrasonic applicators 1 ( 1a, 1b, 1c, 1d) are used. And the housing of each ultrasonic wave applicator 1 is attached to the rotating plate 15 with bolts in a state of being separated from each other by 90 °. By using the ultrasonic wave application device of the present invention, as described above, the ultrasonic vibration generated by the Langevin type ultrasonic transducer hardly leaks into the housing. And since the ultrasonic provision apparatus equipped with the ring-shaped counterweight shows high rigidity, it is attached to the rotating plate 15 with high rigidity.

Next, an annular cutting grindstone (blade) 16 is attached to the step provided on the top surface of the front mass of the Langevin type ultrasonic transducer of each ultrasonic wave applying device (1a, 1b, 1c, 1d). Even when a large mechanical load is applied to the annular cutting grindstone (blade) 16 in the grinding operation using the grinding apparatus having such a configuration, the ultrasonic vibration of the annular traveling wave mode in a stable state is supplied. Can do.

At the start of the grinding operation, first, the grinding fluid is sprayed onto the annular cutting grindstone (blade) 16, and then the Langevin type ultrasonic vibration of the ultrasonic wave application device 1 (1 a, 1 b, 1 c, 1 d) from the ultrasonic wave transmission circuit. Electric energy having a predetermined voltage and frequency is applied to the child.

Electrical energy having a predetermined voltage and frequency is applied to each Langevin type ultrasonic transducer of the ultrasonic wave application device 1 (1a, 1b, 1c, 1d). That is, for example, the Cos wave voltage is used for the Langevin type ultrasonic transducer of the ultrasonic applicator 1a, the Sin wave voltage is used for the Langevin type ultrasonic transducer of the ultrasonic applicator 1b, and the Langevin type ultrasonic wave of the ultrasonic applicator 1c. A -Cos wave voltage is applied to the vibrator, and a -Sin wave voltage is applied to the Langevin type ultrasonic vibrator of the ultrasonic wave applying device 1d. By applying different types of voltages to each of the Langevin type ultrasonic transducers of each ultrasonic wave application device in this way, as shown in the diagram schematically shown in FIG. A traveling wave in a mode of bending in the radial direction is generated on the surface of the annular cutting grindstone (blade) 16. However, the traveling wave mode shown in FIG. 17 is a traveling wave obtained when six (or twelve) ultrasonic wave application devices are attached.

In addition, when performing the grinding operation by this grinding apparatus, instead of applying a -Cos wave voltage to the Langevin type ultrasonic transducer of the ultrasonic applicator 1c, it is attached to the Langevin type ultrasonic transducer of the ultrasonic applicator 1c. A piezoelectric element is arranged in the opposite direction, and a Cos wave voltage is applied to the Langevin type ultrasonic transducer of the ultrasonic applicator 1c, and a −Sin wave is applied to the Langevin type ultrasonic transducer of the ultrasonic applicator 1d. Instead of applying a voltage, a piezoelectric element to be attached to the Langevin type ultrasonic transducer of the ultrasonic applicator 1d is arranged in the reverse direction, and a Sin wave voltage is applied to the Langevin type ultrasonic transducer of the ultrasonic applicator 1d. It is also possible to use this method.
Next, the rotating shaft 15 is rotated, and the material to be ground is ground according to a predetermined machining program.

In addition to the excitation of the ultrasonic vibration of the annular traveling wave mode of the ultrasonic applicator of the present invention described so far, the ultrasonic applicator of the present invention is naturally a mode generally used from the past. It can also be used effectively for applying ultrasonic vibration. For example, the ultrasonic applicator of the present invention can be effectively used also in a feeder, an ultrasonic levitation device, an ultrasonic abrasive processing device, etc. used for conveying articles.

Claims

A cylindrical housing having a contact surface that extends downward at the lower portion of the inner peripheral surface and a threaded surface at the lower portion of the outer peripheral surface; a flange portion having a contact surface fitted to the contact surface of the cylindrical housing at the upper portion A Langevin type ultrasonic vibrator having a configuration in which a polarization-treated piezoelectric element is sandwiched between a front mass provided and a rear mass disposed above the front mass and bolted; and an outer peripheral surface of the cylindrical housing A screw surface into which the lower screw surface is screwed is provided at the upper portion of the inner peripheral surface, and the lower portion has an inner peripheral extension that contacts the lower surface of the flange portion and does not contact the side surface of the front mass. Including a ring-shaped counterweight; by application of electrical energy to the piezoelectric element, the front mass in the vertical direction and in the same direction as the front mass in the vertical direction The bending vibration at the center of the flat surface of the flange portion occurs, and at the same time, the arc-shaped vibration in the direction opposite to the direction protruding by the bending vibration at the flat center portion of the flange portion is caused by the ring-shaped balancing weight. An ultrasonic vibration applicator that occurs on the outer peripheral surface.
A cylindrical housing having a contact surface that extends downward at the lower portion of the inner peripheral surface and a threaded surface at the lower portion of the outer peripheral surface; a flange portion having a contact surface fitted to the contact surface of the cylindrical housing at the upper portion A Langevin type ultrasonic vibrator having a configuration in which a polarization-treated piezoelectric element is sandwiched between a front mass provided and a rear mass disposed above the front mass and bolted; and an outer peripheral surface of the cylindrical housing A screw surface into which the lower screw surface is screwed is provided at the upper portion of the inner peripheral surface, and the lower portion has an inner peripheral extension that contacts the lower surface of the flange portion and does not contact the side surface of the front mass. Including a ring-shaped counterweight; by applying electrical energy to the piezoelectric element, the front mass is caused to vibrate in the up-down direction and the front mass is up-down. The bending vibration at the center of the flat surface of the flange portion occurs, and at the same time, the arc-shaped vibration in the direction opposite to the direction protruding by the bending vibration at the flat center portion of the flange portion is caused by the ring-shaped balancing weight. An ultrasonic vibration applicator that occurs on the outer peripheral surface.
The circumferential circle formed by the inner circumferential surface of the inner extension of the ring-shaped counterweight is formed by the diameter of the circumferential circle formed by the upper end portion of the region where the contact surface of the cylindrical housing and the contact surface of the flange portion contact each other The ultrasonic vibration applicator according to claim 1 or 2, wherein the ultrasonic vibration applicator is larger than the diameter of the ultrasonic vibration applicator.
The ultrasonic vibration applicator according to claim 1 or 2, wherein the cylindrical housing has a larger mass than any of the Langevin type ultrasonic transducer and the ring-shaped counterweight.
The ultrasonic vibration applicator according to claim 1, wherein the ring-shaped counterweight has a mass in the range of 0.5 to 1.5, where the mass of the Langevin type ultrasonic transducer is 1.
The ultrasonic vibration applicator according to claim 2, wherein the ring-shaped counterweight has a mass in the range of 0.25 to 0.75, where the mass of the Langevin type ultrasonic transducer is 1.
A traveling wave along the annular ring of the annular vibrator including the annular vibrator, and the annular vibrator including the ultrasonic vibration applicators arranged and connected to each other along the circumference of the annular vibrator. A device for generating,
The ultrasonic vibration applicator has a cylindrical housing having a contact surface that extends downward at the lower portion of the inner peripheral surface and a threaded surface at the lower portion of the outer peripheral surface; the contact fitted to the contact surface of the cylindrical housing A Langevin type ultrasonic vibrator configured to be bolted in a state where a polarization-treated piezoelectric element is sandwiched between a front mass provided with a flange portion having a surface at an upper portion and a rear mass disposed above the front mass; and A screw surface into which the screw surface of the lower outer peripheral surface of the cylindrical housing is screwed is provided at the upper portion of the inner peripheral surface, the lower surface is in contact with the lower surface of the flange portion, and the side surface of the front mass is in contact with Including a ring-shaped counterweight having an inner peripheral extension; the application of electrical energy to the piezoelectric element causes the front mass to vibrate in the vertical direction and the front mass Bending vibration at the center of the plane of the flange portion protruding in the same direction as the direction vibration occurs, and at the same time, arc-shaped vibration in a direction opposite to the direction protruding by the bending vibration at the center of the plane of the flange portion is generated. An apparatus for imparting ultrasonic vibration generated on an outer peripheral surface of the ring-shaped counterweight.
A traveling wave along the annular ring of the annular vibrator including the annular vibrator, and the annular vibrator including the ultrasonic vibration applicators arranged and connected to each other along the circumference of the annular vibrator. A device for generating a traveling wave for generating a cylindrical housing, wherein the ultrasonic vibration applicator has a contact surface that extends downward at a lower portion of an inner peripheral surface and a screw surface at a lower portion of the outer peripheral surface; A state in which a polarization-treated piezoelectric element is sandwiched between a front mass provided with a flange portion having a contact surface fitted to the contact surface of the cylindrical housing and a rear mass disposed above the front mass A Langevin type ultrasonic transducer having a bolted configuration with a screw surface; and a screw surface into which a screw surface of a lower portion of the outer peripheral surface of the cylindrical housing is screwed is provided at an upper portion of the inner peripheral surface, and a lower portion of the flange portion contact The front mass includes a ring-shaped counterweight having an inner peripheral extension that does not contact; the application of electrical energy to the piezoelectric element causes vertical vibration of the front mass and the front mass. The bending vibration of the flat center portion of the flange portion protruding in the direction opposite to the vertical vibration of the flange occurs, and at the same time, the arc shape in the direction opposite to the direction protruding by the bending vibration of the flat center portion of the flange portion. The apparatus is an ultrasonic vibration applicator in which the vibration of the ring occurs on the outer peripheral surface of the ring-shaped counterweight.
The diameter of the circumferential circle formed by the upper end portion of the region where the contact surface of the cylindrical housing and the contact surface of the flange contact each other is the circumference of the circumferential circle formed by the inner peripheral surface of the inner extension of the ring-shaped counterweight. 9. A device according to claim 7 or 8, wherein the device is larger than the diameter.
The apparatus according to claim 7 or 8, wherein the cylindrical housing has a larger mass than any of the Langevin type ultrasonic transducer and the ring-shaped counterweight.
The apparatus according to claim 7, wherein the ring-shaped counterweight has a mass in the range of 0.5 to 1.5, where the mass of the Langevin type ultrasonic transducer is 1.
The apparatus according to claim 8, wherein the ring-shaped counterweight has a mass in the range of 0.25 to 0.75, where the mass of the Langevin type ultrasonic transducer is 1.
An ultrasonic processing device including an ultrasonic vibration applicator and a tool attached to the ultrasonic vibration applicator, wherein the ultrasonic vibration applicator has a contact surface that extends downward at a lower portion of the inner peripheral surface, A cylindrical housing having a threaded surface at a lower portion of the outer peripheral surface; a front mass having a flange portion having a contact surface fitted to the contact surface of the cylindrical housing at an upper portion, and a rear mass disposed above the front mass; A Langevin type ultrasonic vibrator having a configuration in which a piezoelectric element that has been subjected to a polarization treatment is clamped between them; and a screw surface into which a screw surface at a lower portion of the outer peripheral surface of the cylindrical housing is screwed is an inner peripheral surface A ring-shaped counterweight having an inner peripheral side extension that contacts the lower surface of the flange portion and does not contact the side surface of the front mass; Application of electrical energy to the top mass causes vibrations in the vertical direction of the front mass and flexural vibrations in the center of the plane of the flange portion protruding in the same direction as the vertical vibration of the front mass, and at the same time, the flange portion An ultrasonic vibration applicator in which an arc-shaped vibration in a direction opposite to the direction protruding by the bending vibration at the center of the plane occurs on the outer peripheral surface of the ring-shaped counterweight.
An ultrasonic processing device including an ultrasonic vibration applicator and a tool attached to the ultrasonic vibration applicator, wherein the ultrasonic vibration applicator has a contact surface that extends downward at a lower portion of the inner peripheral surface, A cylindrical housing having a threaded surface at a lower portion of the outer peripheral surface; a front mass having a flange portion having a contact surface fitted to the contact surface of the cylindrical housing at an upper portion, and a rear mass disposed above the front mass; A Langevin type ultrasonic vibrator having a configuration in which a piezoelectric element that has been subjected to a polarization treatment is clamped between them; and a screw surface into which a screw surface at a lower portion of the outer peripheral surface of the cylindrical housing is screwed is an inner peripheral surface A ring-shaped counterweight having an inner peripheral side extension that contacts the lower surface of the flange portion and does not contact the side surface of the front mass; Application of electric energy to the front mass causes vibrations in the vertical direction of the front mass and flexural vibrations in the center of the plane of the flange portion protruding in the direction opposite to the vertical vibration of the front mass, and at the same time, the flange The apparatus is an ultrasonic vibration applicator in which an arc-shaped vibration in a direction opposite to a direction protruding by a flexural vibration at a central portion of the portion is generated on an outer peripheral surface of the ring-shaped counterweight.
The diameter of the circumferential circle formed by the upper end portion of the region where the contact surface of the cylindrical housing and the contact surface of the flange contact each other is the circumference of the circumferential circle formed by the inner peripheral surface of the inner extension of the ring-shaped counterweight. The ultrasonic processing apparatus of Claim 13 or 14 larger than a diameter.
The ultrasonic processing apparatus according to claim 13 or 14, wherein the cylindrical housing has a larger mass than any of the Langevin type ultrasonic transducer and the ring-shaped counterweight.
14. The ultrasonic processing apparatus according to claim 13, wherein the ring-shaped counterweight has a mass in the range of 0.5 to 1.5, where the mass of the Langevin type ultrasonic transducer is 1.
15. The ultrasonic machining apparatus according to claim 14, wherein the ring-shaped counterweight has a mass in the range of 0.25 to 0.75, where the mass of the Langevin ultrasonic transducer is 1.