WO2019188078A1

WO2019188078A1 - Vibration element

Info

Publication number: WO2019188078A1
Application number: PCT/JP2019/008988
Authority: WO
Inventors: 弘毅崔
Original assignee: 株式会社村田製作所
Priority date: 2018-03-30
Filing date: 2019-03-07
Publication date: 2019-10-03

Abstract

A vibration element (10) according to the present invention is provided with: a base part (50); a first vibration arm part (60a) and a second vibration arm part (60b); a support arm part (70); a first excitation electrode (82a) and a second excitation electrode (82b); a first connection electrode (86a) and a second connection electrode (86b); and a first lead-out electrode (84a) and a second lead-out electrode (84b). The first lead-out electrode (84a) is provided on a first lateral surface (70C) of the support arm part (70); the second lead-out electrode (84b) is provided on a first main surface (70A), a second main surface (70B) or a second lateral surface (70D) of the support arm part (70); and the distance (D14) between the first lead-out electrode (84a) and the second lead-out electrode (84b) is longer than the distance (H14) between the first main surface (70A) and the second main surface (70B) in at least a part of the support arm part (70).

Description

Vibration element

The present invention relates to a vibration element.

In electronic devices such as mobile computers, portable game machines, mobile phones, IC cards, and communication base stations, vibrators are widely used as electronic devices such as timing devices and vibration gyro sensors. Along with the downsizing and high performance of electronic equipment, the vibrator is also required to be downsized and high performance.

For example, Patent Document 1 includes a base, a vibrating arm extending from the base, a connecting portion connected to the base, and a holding arm connected to the connecting portion. A vibration comprising: an excitation electrode provided on the pair of vibrating arms; a connection electrode provided on the holding part; and an extraction electrode provided on the coupling part for electrically connecting the excitation electrode and the connection electrode. An element is disclosed.

JP 2016-149673 A Japanese Patent Laying-Open No. 2015-8352

However, as disclosed in Patent Document 1, in the vibration element in which the first extraction electrode is provided on the first main surface of the support arm portion and the second extraction electrode is provided on the second main surface of the support arm portion, the vibration element When trying to reduce the size, the electrodes approach or face each other at the support arm. In particular, when trying to widen the extraction electrode in order to reduce the electrical resistance, the stray capacitance generated between the extraction electrodes increases, and the effective resistance Re (Re = R1 × (1 + C0 / CL), R1: equivalent series resistance, (C0: stray capacitance, CL: load capacitance) may increase.

Incidentally, Patent Document 2 discloses a vibration element in which a first extraction electrode is provided on a first side surface of a support arm portion, and a second extraction electrode is provided on a second side surface of the support arm portion. In the vibration element, in the holding portion of the support arm portion, the distance between the first main surface and the second main surface is substantially equal to the distance between the first side surface and the second side surface. Further, in the vibration element, in the connection portion narrower than the holding portion, the distance between the first side surface and the second side surface is smaller than the distance between the first main surface and the second main surface. Conceivable. Therefore, the configuration of the vibration element has a problem that the stray capacitance generated between the extraction electrodes cannot be reduced as compared with the configuration in which the extraction electrode is provided on the main surface of the support arm portion.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a vibration element capable of reducing stray capacitance.

A resonator element according to one aspect of the present invention includes a base, a first vibrating arm and a second vibrating arm that extend from the base, and a first main surface and a second main surface that extend from the base and face each other. , A supporting arm portion having a first side surface and a second side surface that connect the first main surface and the second main surface and face each other, and a first excitation provided on the first vibrating arm portion and the second vibrating arm portion. A first lead that electrically connects the electrode and the second excitation electrode, the first connection electrode and the second connection electrode provided on the first main surface of the support arm, and the first excitation electrode and the first connection electrode; An electrode, and a second extraction electrode that electrically connects the second excitation electrode and the second connection electrode. The first extraction electrode is provided on the first side surface of the support arm, and the second extraction electrode is The first extraction electrode and the second extraction are provided on the first main surface, the second main surface, or the second side surface of the support arm portion, and at least part of the support arm portion. The distance between the poles is greater than the distance between the first major surface and a second major surface.

According to the present invention, it is possible to provide a vibration element that can reduce stray capacitance.

FIG. 1 is an exploded perspective view schematically showing a configuration of a tuning fork type crystal resonator according to the first embodiment. FIG. 2 is a cross-sectional view schematically showing a cross-sectional configuration along the line II-II of the tuning fork type crystal resonator shown in FIG. FIG. 3 is a plan view schematically showing the configuration of the first main surface side of the tuning-fork type crystal resonator element according to the first embodiment. FIG. 4 is a plan view schematically showing the configuration of the second main surface side of the tuning fork type crystal resonator element according to the first embodiment. FIG. 5 is a cross-sectional view schematically showing a cross-sectional configuration along line VV of the tuning-fork type crystal vibrating element shown in FIG. FIG. 6 is a cross-sectional view schematically showing a cross-sectional configuration of the holding portion of the support arm portion according to the first embodiment. FIG. 7 is a cross-sectional view schematically showing a cross-sectional configuration of the connecting portion of the support arm portion according to the first embodiment. FIG. 8 is a plan view schematically showing the configuration of the support arm portion of the tuning-fork type crystal resonator element according to the second embodiment. FIG. 9 is a cross-sectional view schematically showing a cross-sectional configuration of the holding portion of the support arm portion according to the second embodiment. FIG. 10 is a cross-sectional view schematically showing a cross-sectional configuration of the connecting portion of the support arm portion according to the second embodiment. FIG. 11 is a plan view schematically showing the configuration of the support arm portion of the tuning-fork type crystal resonator element according to the third embodiment. FIG. 12 is a plan view schematically showing the configuration of the support arm portion of the tuning-fork type crystal resonator element according to the fourth embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, in the second and subsequent embodiments, the same or similar components as those in the first embodiment are denoted by the same or similar reference numerals as those in the first embodiment, and detailed description thereof is omitted as appropriate. Moreover, about the effect acquired in embodiment after 2nd Embodiment, description is abbreviate | omitted suitably about the thing similar to 1st Embodiment. The drawings of the embodiments are exemplifications, the dimensions and shapes of the respective parts are schematic, and the technical scope of the present invention should not be understood as being limited to the embodiments.

Each drawing includes a first direction D1, a second direction D2, and a third direction D3 for the sake of convenience in order to clarify the relationship between the drawings and to help understand the positional relationship between the members. An orthogonal coordinate system may be attached. The first direction D1, the second direction D2, and the third direction D3 mean the three reference directions shown in FIG. 1, and are the positive direction (the direction of the arrow) and the negative direction (the direction opposite to the arrow), respectively. ). In addition, the first direction D1, the second direction D2, and the third direction D3 shown in the drawing are, for example, directions that are orthogonal to each other, but are not limited to these as long as they intersect each other. The directions may intersect each other at an angle other than 90 °.

In the following description, as an example of a piezoelectric vibrator (Piezoelectric Resonator Unit), a crystal vibrator (Quartz Crystal Resonator Unit) including a quartz crystal resonator element (Quartz Crystal Resonator) will be described as an example. The quartz resonator element uses a quartz piece (Quartz Crystal Element) formed of quartz as a piezoelectric body that vibrates according to an applied voltage. A crystal resonator corresponds to an example of a resonator, a crystal resonator element corresponds to an example of a resonator element, and a crystal piece corresponds to an example of a vibration substrate.

Note that the vibration substrate according to the embodiment of the present invention is not limited to a crystal piece. The vibration substrate may be a piezoelectric piece formed of an arbitrary piezoelectric material such as a piezoelectric single crystal, a piezoelectric ceramic, a piezoelectric thin film, or a piezoelectric polymer film. As an example, the piezoelectric single crystal can include lithium niobate (LiNbO ₃ ). Similarly, piezoelectric ceramics include barium titanate (BaTiO ₃ ), lead titanate (PbTiO ₃ ), lead zirconate titanate (Pb (Zr _x Ti _1-x ) O 3; PZT), aluminum nitride (AlN), niobium. Lithium oxide (LiNbO ₃ ), lithium metaniobate (LiNb ₂ O ₆ ), bismuth titanate (Bi ₄ Ti ₃ O ₁₂ ) lithium tantalate (LiTaO ₃ ), lithium tetraborate (Li ₂ B ₄ O ₇ ), langa Site (La ₃ Ga ₅ SiO ₁₄ ), tantalum pentoxide (Ta ₂ O ₅ ), and the like can be given. Examples of the piezoelectric thin film include a film obtained by forming the above piezoelectric ceramic on a substrate such as quartz or sapphire by a sputtering method or the like. Examples of the piezoelectric polymer film include polylactic acid (PLA), polyvinylidene fluoride (PVDF), vinylidene fluoride / ethylene trifluoride (VDF / TrFE) copolymer, and the like. The various piezoelectric materials described above may be used by being stacked on each other, or may be stacked on other members. Further, the vibration element according to the embodiment of the present invention is not limited to the piezoelectric vibration element. At this time, the vibration substrate may be formed of an insulating material having no piezoelectricity or an insulating material having low piezoelectricity, or may be formed of a semiconductor material, a conductive material, or the like.

<First Embodiment>
First, the configuration of a tuning-fork quartz crystal resonator unit (Tuning-Fork Quartz Crystal Resonator Unit) 1 according to the first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is an exploded perspective view schematically showing a configuration of a tuning fork type crystal resonator according to the first embodiment. FIG. 2 is a cross-sectional view schematically showing a cross-sectional configuration along the line II-II of the tuning fork type crystal resonator shown in FIG. FIG. 3 is a plan view schematically showing the configuration of the first main surface side of the tuning-fork type crystal resonator element according to the first embodiment. FIG. 4 is a plan view schematically showing the configuration of the second main surface side of the tuning fork type crystal resonator element according to the first embodiment. FIG. 5 is a cross-sectional view schematically showing a cross-sectional configuration along line VV of the tuning-fork type crystal vibrating element shown in FIG. 1 and 2, some or all of the electrode groups such as the excitation electrode, the connection electrode, and the extraction electrode provided in the tuning fork type crystal resonator element 10 are omitted. 3 and 4, some or all of the extraction electrodes provided on the side surfaces of the base portion and the vibrating arm portion are omitted.

The tuning fork type crystal resonator 1 is a kind of piezoelectric resonator and corresponds to an example of a resonator. As shown in FIG. 1, the tuning fork crystal resonator 1 includes a tuning fork crystal resonator element 10, a lid member 20, a base member 30, and a bonding member 40. The tuning fork type crystal vibrating element 10 is a kind of vibrating element and corresponds to a piezoelectric driving type vibrating element. The base member 30 and the lid member 20 are holders for housing the tuning fork type crystal resonator element 10. In the example illustrated here, the lid member 20 has a concave shape, specifically, a box shape having an opening, and the base member 30 has a flat plate shape. The shapes of the lid member 20 and the base member 30 are not limited to the above. For example, the base member may have a concave shape, and both the lid member and the base member have a concave shape having openings on the sides facing each other. It may be.

The tuning fork type crystal resonator element 10 includes a crystal piece 11, a first excitation electrode 82a, a second excitation electrode 82b, a first extraction electrode 84a, a second extraction electrode 84b, a first connection electrode 86a, and a second connection electrode 86b. ing. The crystal piece 11 is referred to as a plane parallel to a plane specified by the X axis and the Y ′ axis (hereinafter referred to as “XY ′ plane”) in an orthogonal coordinate system including the X axis, the Y ′ axis, and the Z ′ axis. The same applies to the surface specified by the other axis or other directions.) Is the main surface, and the direction parallel to the Z ′ axis is the thickness. For example, the crystal piece 11 is obtained by cutting and polishing a crystal of an artificial crystal (Synthetic Quartz Crystal) to form a crystal substrate, and processing the crystal substrate into a tuning fork type. The crystal piece 11 is a kind of vibration substrate and corresponds to an example of a piezoelectric piece excited by a piezoelectric effect.

The Y ′ axis is an axis obtained by rotating the Y axis so that the + Y side is tilted to the + side of the Z axis when the X axis is the rotation axis. The Z ′ axis is an axis obtained by rotating the Z axis so that the + Z side is inclined toward the − side of the Y axis. The X axis, the Y axis, and the Z axis are crystal axes of quartz, respectively. The X axis corresponds to an electric axis (polarity axis), the Y axis corresponds to a mechanical axis, and the Z axis corresponds to an optical axis. Note that, from the viewpoint of reducing the change in the resonance frequency due to the temperature change, the rotation inclination is performed in the range of −5 degrees to 15 degrees (including 0 degrees). Therefore, the embodiment of the present invention includes a configuration in which the Y ′ axis and the Z ′ axis become the Y axis and the Z axis, respectively.

In the first embodiment, the tuning fork type crystal resonator element 10 has the Y ′ axis parallel to the first direction D1, the X axis parallel to the second direction D2, and the Z ′ axis parallel to the third direction D3. . Hereinafter, directions parallel to the X axis, the Y ′ axis, and the Z ′ axis are referred to as an X axis direction, a Y ′ axis direction, and a Z ′ axis direction, respectively. Further, in the X-axis direction, the + X-axis direction is the positive direction of the second direction D2, and the −X-axis direction is the negative direction of the second direction D2. Similarly, in the Y′-axis direction, the + Y′-axis direction is the positive direction of the first direction D1, and the −Y′-axis direction is the negative direction of the first direction D1. In the Z′-axis direction, the + Z′-axis direction is the positive direction of the third direction D3, and the −Z′-axis direction is the negative direction of the third direction D3.

As shown in FIG. 1, the crystal piece 11 has a base 50, a first vibrating arm 60a, a second vibrating arm 60b, and a support arm 70. As shown in FIG. 2, the crystal piece 11 has a first main surface 12A and a second main surface 12B that face each other. The first main surface 12A is located on the base member 30 side, and the second main surface 12B is located on the lid member 20 side.

First, the base 50 will be described.
The base 50 is provided in a substantially flat plate shape at the end of the crystal piece 11 on the −Y′-axis direction (first direction D1 negative direction) side. The base 50 connects the first vibrating arm 60 a, the second vibrating arm 60 b, and the support arm 70. The length along the Y′-axis direction of the base 50 is, for example, 50 μm or more and 300 μm or less.

Next, the first vibrating arm portion 60a and the second vibrating arm portion 60b will be described.
The first vibrating arm portion 60a and the second vibrating arm portion 60b extend in parallel to each other in the + Y′-axis direction (first direction D1 positive direction) from the base portion 50. The first vibrating arm portion 60a and the second vibrating arm portion 60b constituting the pair of vibrating arm portions are arranged in the X-axis direction. The first vibrating arm portion 60a is provided on the + X axis direction (second direction D2 positive direction) side of the second vibrating arm portion 60b. As shown in FIGS. 3 and 4, the first vibrating arm portion 60a has an arm portion 62a and a weight portion 64a, and the second vibrating arm portion 60b has an arm portion 62b and a weight portion 64b. The arm part 62 a and the arm part 62 b are connected to the base part 50. The weight part 64a and the weight part 64b are connected to the ends of the arm part 62a and the arm part 62b opposite to the ends connected to the base part 50, respectively. That is, when the first main surface 12A of the crystal piece 11 is viewed in plan, the outer shape of the crystal piece 11 is substantially U-shaped by the base 50 and the pair of first vibrating arm portions 60a and the second vibrating arm portions 60b. Is provided.

The arm portion 62a of the first vibrating arm portion 60a has a bottomed groove portion 63a that opens to the first main surface 12A side and the second main surface 12B side. The arm portion 62b of the second vibrating arm portion 60b is formed with a bottomed groove portion 63b that opens to the first main surface 12A side and the second main surface 12B side. The groove 63a and the groove 63b extend along the Y′-axis direction (first direction D1). As shown in FIGS. 3 and 4, the tip of the groove 63a (the end opposite to the base 50 side) is located at the boundary between the arm 62a and the weight 64a, and the base end (base 50 side) of the groove 63a. Is positioned at the boundary between the base portion 50 and the arm portion 62a. The same applies to the distal end and the proximal end of the groove 63b. As shown in FIG. 5, the arm part 62a and the arm part 62b have a substantially H-shaped cross-sectional shape. By providing the groove 63a and the groove 63b as described above, in the tuning fork type crystal resonator element 10, the ease of movement of the first vibrating arm 60a and the second vibrating arm 60b is improved, and the first vibrating arm 60a and the first vibrating arm 60a 2 Vibration leakage from the vibrating arm portion 60b to the base portion 50 can be suppressed. Further, the equivalent series resistance and CI (Crystal Impedance) value of the tuning fork type crystal resonator element 10 can be reduced, and the power consumption can be reduced. In addition, the length of the groove part 63a and the groove part 63b is not specifically limited, Each may be formed also in the weight part 64a and the weight part 64b, and may be formed also in the base part 50, respectively.

The weight portion 64a of the first vibrating arm portion 60a has a substantially flat plate shape. As shown in FIGS. 3 and 4, the width W1 along the X-axis direction (second direction D2) of the weight portion 64a is larger than the width W2 along the X-axis direction (second direction D2) of the arm portion 62a. large. The ratio of the width W1 to the width W2 (W1 / W2) is preferably 2 or more and 10 or less, and more preferably 5 or more and 7 or less. The same applies to the weight portion 64b of the second vibrating arm portion 60b. As a result, the tuning fork type crystal resonator element 10 can reduce the thermoelastic loss due to the loss of vibration energy caused by the heat conduction generated between the compression portion and the extension portion of the crystal resonator element that flexes and vibrates. Vibration leakage caused by twisting of the portion 64a and the weight portion 64b can be suppressed.

Note that the shape of the weight portion is not limited to the above as long as the mass per unit length is larger than that of the arm portion. For example, the weight part may have a width that is the same as the width of the arm part and may be thicker than the arm part. Further, the weight portion may be configured by forming a surface of a vibrating arm corresponding to the weight portion or a concave portion and providing a metal such as gold there. Furthermore, the weight portion may be made of a material having a mass density higher than that of the arm portion.

Next, the support arm part 70 will be described.
The support arm portion 70 extends in the + Y′-axis direction (first direction D1 positive direction) from the base portion 50, and is provided between the first vibrating arm portion 60a and the second vibrating arm portion 60b. The support arm portion 70, the first vibrating arm portion 60a, and the second vibrating arm portion 60b are aligned with each other along the X-axis direction. The length of the support arm 70 along the Y′-axis direction is smaller than the length of the first vibrating arm 60 a and the second vibrating arm 60 b along the Y′-axis. As shown in FIGS. 3 and 4, the distal end of the support arm portion 70 is located closer to the base portion 50 than the weight portion 64a and the weight portion 64b. According to this, in the tuning fork type crystal resonator element 10, it is possible to suppress deterioration of vibration characteristics due to the weight portion 64 a and the weight portion 64 b coming into contact with the support arm portion 70.

The support arm portion 70 includes a holding portion 74 and a connecting portion 72 that connects the base portion 50 and the holding portion 74. When the main surface 70A of the support arm 70 is viewed in plan, the connecting portion 72 and the holding portion 74 are arranged in the Y′-axis direction (first direction D1). That is, the support arm portion 70 has the holding portion 74 at the distal end portion and the connecting portion 72 at the proximal end portion.

The support arm portion 70 has a main surface 70A and a main surface 70B that face each other in the Z′-axis direction (third direction D3). The support arm portion 70 has a side surface 70C and a side surface 70D that connect the main surface 70A and the main surface 70B and face each other in the X-axis direction (second direction D2). The main surface 70A corresponds to a part of the first main surface 12A of the crystal piece 11, and the main surface 70B corresponds to a part of the second main surface 12B of the crystal piece 11. 70 A of main surfaces and 70 B of main surfaces are provided over the connection part 72 and the holding | maintenance part 74. As shown in FIG. The side surface 70C is located on the first vibrating arm portion 60a side, and the side surface 70D is located on the second vibrating arm portion 60b side. The holding portion 74 includes a side surface 74C that connects the main surface 70A and the main surface 70B on the first vibrating arm portion 60a side, and a side surface 74D that connects the main surface 70A and the main surface 70B on the second vibrating arm portion 60b side. Have. The connecting portion 72 includes a side surface 72C that connects the main surface 70A and the main surface 70B on the first vibrating arm portion 60a side, and a side surface 72D that connects the main surface 70A and the main surface 70B on the second vibrating arm portion 60b side. Have. That is, the side surface 74 C of the holding portion 74 is a part of the side surface 70 C of the support arm portion 70, and the side surface 72 C of the connecting portion 72 is a part of the side surface 70 C of the support arm portion 70. The side surface 74D of the holding portion 74 is a part of the side surface 70D of the support arm portion 70, and the side surface 72D of the connecting portion 72 is a part of the side surface 70D of the support arm portion 70.

Next, the first excitation electrode 82a and the second excitation electrode 82b will be described.
The first excitation electrode 82a and the second excitation electrode 82b form an electric field in the first vibration arm portion 60a and the second vibration arm portion 60b by the supplied applied voltage, and the first vibration arm portion 60a and the second vibration electrode portion 60b by the piezoelectric effect. The two vibrating arms 60b are excited.

1st excitation electrode 82a and 2nd excitation electrode 82b are provided in the 1st vibration arm part 60a and the 2nd vibration arm part 60b, as shown in FIG.3 and FIG.4. As shown in FIG. 5, in the arm portion 62a of the first vibrating arm portion 60a, the first excitation electrode 82a is provided on the surface of the arm portion 62a inside the groove portion 63a. The second excitation electrode 82b is provided on the outer side surface of the arm portion 62a so as to face the first excitation electrode 82a in the X-axis direction (second direction D2). In the arm portion 62b of the second vibrating arm portion 60b, the second excitation electrode 82b is provided on the surface of the arm portion 62b inside the groove portion 63b, and the first excitation electrode 82a is provided on the outer side surface of the arm portion 62b. . Further, as shown in FIGS. 3 and 4, the second excitation electrode 82b is provided on the first main surface 12A and the second main surface 12B of the weight portion 64a of the first vibrating arm portion 60a. A first excitation electrode 82a is provided on the first main surface 12A and the second main surface 12B of the weight portion 64b of the second vibrating arm portion 60b.

Next, the first extraction electrode 84a and the second extraction electrode 84b will be described.
The first extraction electrode 84a electrically connects the first excitation electrode 82a provided on the first vibrating arm 60a and the first excitation electrode 82a provided on the second vibrating arm 60b. Further, the first extraction electrode 84a electrically connects the first excitation electrode 82a and the first connection electrode 86a. The second extraction electrode 84b electrically connects the second excitation electrode 82b provided on the first vibrating arm 60a and the second excitation electrode 82b provided on the second vibrating arm 60b. Further, the second extraction electrode 84b electrically connects the second excitation electrode 82b and the second connection electrode 86b.

The first extraction electrode 84 a and the second extraction electrode 84 b are provided on the base 50 and the support arm 70. In the base 50, the first extraction electrode 84a and the second extraction electrode 84b are provided on both the first main surface 12A and the second main surface 12B. Although not shown in FIGS. 3 and 4, the first extraction electrode 84a and the second extraction electrode 84b are also provided on the side surface connecting the first main surface 12A and the second main surface 12B of the base 50. It has been. That is, the first extraction electrode 84a includes a portion provided on the first main surface 12A of the base 50, a portion provided on the second main surface 12B of the base 50, and a portion provided on the side surface of the base 50. Are electrically connected. Similarly, the second extraction electrode 84b includes a portion provided on the first main surface 12A of the base portion 50 and a portion provided on the second main surface 12B of the base portion 50 by a portion provided on the side surface of the base portion 50. , Are electrically connected.

In the support arm portion 70, the first extraction electrode 84a is provided on the side surface 70C, and the second extraction electrode 84b is provided on the side surface 70D. The first extraction electrode 84a extends, for example, from the first main surface 12A of the base portion 50 to the side surface 70C of the support arm portion 70, and is provided on the side surface 72C of the coupling portion 72 and the side surface 74C of the holding portion 74. The second extraction electrode 84b extends, for example, from the second main surface 12B of the base portion 50 to the side surface 70D of the support arm portion 70, and is provided on the side surface 72D of the connecting portion 72 and the side surface 74D of the holding portion 74. In the support arm portion 70, the length of the second extraction electrode 84b along the first direction D1 is larger than the length of the first extraction electrode 84a along the first direction D1. In other words, the first extraction electrode 84 a extends to the proximal end portion of the holding portion 74, that is, the end portion of the holding portion 74 on the base portion 50 side. The second extraction electrode 84b extends to the distal end portion of the holding portion 74, that is, the end portion of the holding portion 74 on the

weight portions

64a and 64b side. The first extraction electrode 84a and the second extraction electrode 84b are not limited to the above as long as they are provided on different side surfaces of the support arm portion 70, respectively. The first extraction electrode 84a may be provided on the side surface 70D, and the second extraction electrode 84b may be provided on the side surface 70C.

Next, the first connection electrode 86a and the second connection electrode 86b will be described.
A pair of drive signals having different applied potentials are supplied to the first connection electrode 86a and the second connection electrode 86b from the outside. One drive signal is supplied from the first connection electrode 86a to the first excitation electrode 82a through the first extraction electrode 84a. The other drive signal paired with the one drive signal is supplied from the second connection electrode 86b to the second excitation electrode 82b through the second extraction electrode 84b.

The first connection electrode 86a and the second connection electrode 86b are provided on the main surface 70A (first main surface 12A) of the support arm portion 70. The first connection electrode 86 a and the second connection electrode 86 b are provided on the holding portion 74 of the support arm portion 70. The first connection electrode 86a and the second connection electrode 86b are arranged along the Y′-axis direction (first direction D1). The first connection electrode 86 a is located at the proximal end portion of the holding portion 74. The second connection electrode 86 b is located at the tip of the holding part 74. When the main surface 70 A of the support arm 70 is viewed in plan, the first connection electrode 86 a is located between the second connection electrode 86 b and the coupling portion 72.

As shown in FIG. 3, the width of the first connection electrode 86a along the X-axis direction (second direction D2) is substantially equal to the width of the holding portion 74 along the X-axis direction (second direction D2). Since the second connection electrode 86b is separated from the first connection electrode 86a and the first extraction electrode 84a in the first direction D1 and there is no fear of a short circuit, the second connection electrode 86b extends in the X-axis direction (second direction D2). The width along may be substantially equal to the width along the X-axis direction (second direction D2) of the holding portion 74. For example, the first connection electrode 86a and the second connection electrode 86b have a substantially rectangular shape when the first main surface 12A is viewed in plan. According to this, even if the tuning fork type crystal resonator element 10 is downsized, it is possible to suppress a reduction in the bonding area between the

connection electrodes

86a and 86b of the tuning fork type crystal resonator element 10 and

conductive holding members

36a and 36b described later. . In other words, it is possible to suppress a decrease in the bonding strength of the tuning fork type quartz vibrating element 10 to the base member 30 which has occurred with the downsizing of the tuning fork type quartz vibrating element 10. Further, the stability of the electrical connection between the tuning fork type crystal resonator element 10 and the base member 30 is increased.

The first connection electrode and the second connection electrode may extend from the main surface to the side surface of the support arm portion. According to this, the bonding strength between the tuning fork type crystal resonator element and the base member is further improved, and the stability of the electrical connection between the tuning fork type crystal resonator element and the base member is further increased.

Next, the lid member 20 will be described.
The shape of the lid member 20 has a concave shape and is a box shape opened toward the third main surface 32A of the base member 30. An inner space 26 joined to the base member 30 and surrounded by the lid member 20 and the base member 30 is provided in the lid member 20. The tuning fork type crystal resonator element 10 is accommodated in the internal space 26. The shape of the lid member 20 is defined by, for example, a long side parallel to the first direction D1, a short side parallel to the second direction D2, and a height parallel to the third direction D3. The material of the lid member 20 is not particularly limited, but is made of a conductive material such as metal. By including the conductive material, an electromagnetic shielding function for shielding at least a part of the electromagnetic waves entering and leaving the internal space 26 of the lid member 20 is obtained.

The lid member 20 is connected to the top surface portion 21 facing the third main surface 32A of the base member 30 and the outer edge of the top surface portion 21 and extends in a direction intersecting the main surface of the top surface portion 21. Part 22. The shape of the lid member 20 is not particularly limited as long as the tuning fork type crystal resonator element 10 can be accommodated. For example, it has a substantially rectangular shape when viewed from the normal direction of the main surface of the top surface portion 21. As shown in FIG. 2, the lid member 20 has an inner surface 24 and an outer surface 25. The inner surface 24 is a surface on the inner space 26 side, and the outer surface 25 is a surface opposite to the inner surface 24. The lid member 20 has a facing surface 23 that faces the third main surface 32 A of the base member 30 at the concave opening end, that is, the end of the side wall 22 near the base member 30. The facing surface 23 extends in a frame shape so as to surround the periphery of the tuning fork type crystal resonator element 10.

Next, the base member 30 will be described.
The base member 30 holds the tuning-fork type crystal resonator element 10 so that it can be excited. The base member 30 has a flat plate shape. The base member 30 has a long side parallel to the first direction D1, a short side parallel to the second direction D2, and a thickness parallel to the third direction D3. The base member 30 has a base 31. The base 31 has a third main surface 32A (front surface) and a fourth main surface 32B (back surface) that face each other. The base 31 is a sintered material such as an insulating ceramic. Specifically, the base member 30 uses alumina as the base 31. The base 31 is preferably made of a heat resistant material. From the viewpoint of suppressing the stress applied to the tuning fork type crystal resonator element 10 by the thermal history, the base 31 may be provided by a material having a thermal expansion coefficient close to that of the crystal piece 11, and may be provided by, for example, crystal.

The base member 30 includes a first electrode pad 33a and a second electrode pad 33b provided on the third main surface 32A, and a first external electrode 35a and a second external electrode 35b provided on the fourth main surface 32B. Have. The first electrode pad 33 a and the second electrode pad 33 b are terminals for electrically connecting the base member 30 and the tuning fork type crystal vibrating element 10. The first external electrode 35 a and the second external electrode 35 b are terminals for electrically connecting a circuit board (not shown) and the tuning fork type crystal resonator 1. The first electrode pad 33a and the second electrode pad 33b are arranged along the first direction D1. The first external electrode 35a and the second external electrode 35b are arranged along the first direction D1. The first electrode pad 33a is electrically connected to the first external electrode 35a via the first via electrode 34a extending in the third direction D3, and extends along the first direction D1. The second electrode pad 33b is electrically connected to the second external electrode 35b via the second via electrode 34b extending in the third direction D3, and extends along the first direction D1. The first via electrode 34a and the second via electrode 34b are formed in a via hole that penetrates the base 31 in the third direction D3. Note that the fourth main surface 32B side of the base member 30 is a dummy electrode as an external electrode through which an electric signal or the like is not input / output, and grounding that improves the electromagnetic shielding function of the lid member 20 by supplying a ground potential to the lid member 20. An electrode or the like may be provided.

Next, the first conductive holding member 36a and the second conductive holding member 36b will be described.
The first conductive holding member 36 a and the second conductive holding member 36 b are provided between the third main surface 32 A of the base member 30 and the main surface 70 A of the support arm portion 70. The first conductive holding member 36a electrically connects the first connection electrode 86a and the first electrode pad 33a. The second conductive holding member 36b electrically connects the second connection electrode 86b and the second electrode pad 33b. Further, the first conductive holding member 36a and the second conductive holding member 36b are tuned fork-type spaced apart from the base member 30 so that the first vibrating arm portion 60a and the second vibrating arm portion 60b can be excited. The crystal resonator element 10 is held. The first conductive holding member 36a and the second conductive holding member 36b are made of, for example, a conductive adhesive containing a thermosetting resin or an ultraviolet curable resin mainly composed of an epoxy resin or a silicone resin, Additives such as conductive particles for imparting conductivity to the adhesive are included. The first conductive holding member 36a and the second conductive holding member 36b cure the conductive adhesive paste by a chemical reaction caused by heating, ultraviolet irradiation or the like after the conductive adhesive paste as a precursor is applied. Provided. Furthermore, a filler may be added to the first conductive holding member 36a and the second conductive holding member 36b for the purpose of increasing the strength or maintaining the distance between the base member 30 and the tuning fork type crystal vibrating element 10. . The filler is a spherical filler or a fibrous filler formed of ceramics, resin or the like, and is larger than, for example, conductive particles. Moreover, the said filler may have electroconductivity, for example, a metal filler may be sufficient. The first conductive holding member 36a and the second conductive holding member 36b may be provided by metal solder.

Next, the sealing member 37 and the joining member 40 will be described.
A sealing member 37 is provided on the third main surface 32 A of the base member 30. The sealing member 37 has better adhesion to the base 31 than the bonding member 40 and is provided to improve the bonding strength between the lid member 20 and the base member 30. In the example shown in FIG. 1, the shape of the sealing member 37 is a rectangular frame shape when the third main surface 32A is viewed in plan. Further, the sealing member 37 is provided so as to surround the tuning fork type crystal resonator element 10 when the third main surface 32A is viewed in plan, and the first electrode pad 33a and the second electrode pad 33b are the sealing member 37. It is arranged inside. The sealing member 37 is made of a conductive material. For example, the material of the sealing member 37 is made of the same material as the first electrode pad 33a and the second electrode pad 33b, and the forming process of the sealing member 37 is the forming process of the first electrode pad 33a and the second electrode pad 33b. At the same time. Thereby, the manufacturing process can be simplified.

The joining member 40 is provided over the entire circumference of the lid member 20 and the base member 30. Specifically, the joining member 40 is provided on the sealing member 37 and is formed in a rectangular frame shape. The sealing member 37 and the joining member 40 are sandwiched between the facing surface 23 of the side wall portion 22 of the lid member 20 and the third main surface 32 A of the base member 30.

When the lid member 20 and the base member 30 are joined together with the sealing member 37 and the joining member 40 interposed therebetween, the tuning fork type crystal resonator element 10 is surrounded by the lid member 20 and the base member 30 (inside space ( Cavity) 26 is sealed. The internal space 26 is preferably at a lower pressure than the atmospheric pressure, and more preferably in a vacuum state. According to this, oxidation of electrode groups, such as the 1st excitation electrode 82a and the 2nd excitation electrode 82b, can be suppressed. Therefore, the tuning fork type crystal resonator 1 has a frequency characteristic variation with time due to changes in the thickness and mass of the excitation electrode, an increase in power consumption due to an increase in electrical resistance of the extraction electrode, and a signal delay. Occurrence of malfunction can be reduced. The sealing member may be provided in a discontinuous frame shape, and the joining member may be provided in a discontinuous frame shape.

Next, the operation of the tuning fork type crystal resonator element 10 will be described.
An electric field is generated in the tuning fork type crystal resonator element 10 by a drive signal (alternating voltage) applied by the first excitation electrode 82a and the second excitation electrode 82b. The drive signal is applied to the first excitation electrode 82a and the second excitation electrode 82b from the outside via the first connection electrode 86a and the second connection electrode 86b. Then, due to the piezoelectric effect of the crystal piece 11, the first vibrating arm 60a and the second vibrating arm 60b are shown in FIGS. 3 and 4 with the roots of the first vibrating arm 60a and the second vibrating arm 60b as fulcrums. A bending vibration is generated that is displaced so as to bend alternately in the direction indicated by the arrows A and B. An arrow A direction is a direction in which the first vibrating arm portion 60a and the second vibrating arm portion 60b are separated from each other, and an arrow B direction is a direction in which the first vibrating arm portion 60a and the second vibrating arm portion 60b are close to each other. That is, the first vibrating arm portion 60a and the second vibrating arm portion 60b of the tuning fork type crystal vibrating element 10 vibrate in a bending vibration mode having an opposite phase in the X axis direction.

Note that the tuning fork type crystal resonator element 10 uses the anti-phase bending vibration mode as the main vibration, but can also vibrate in the in-phase bending vibration mode. The in-phase bending vibration mode is a bending vibration mode in which the first vibrating arm portion 60a and the second vibrating arm portion 60b are sequentially displaced in the + X axis direction and then displaced in the −X axis direction sequentially. In the anti-phase bending vibration mode, one of the first vibrating arm portion 60a and the second vibrating arm portion 60b is displaced in the + X-axis direction and the other is displaced in the -X-axis direction, and then one is in the -X-axis direction And a bending vibration mode in which the other is sequentially displaced in the + X-axis direction. In the tuning fork type crystal resonator element 10, the frequency of the anti-bending vibration mode and the frequency of the in-phase bending vibration mode are desirably separated from each other. According to this, in the tuning fork type crystal resonator element 10, the coupling between the in-phase bending vibration mode and the anti-phase bending vibration mode can be suppressed. In other words, it is possible to reduce the in-phase bending vibration mode vibration posture and the anti-phase bending vibration mode vibration posture of the tuning fork type crystal resonator element 10.

Note that the vibration (drive) method of the vibration element according to the embodiment of the present invention is not limited to piezoelectric drive. For example, the vibration element according to an embodiment of the present invention is a vibration element such as an electrostatic drive type using electrostatic force or a Lorentz drive type using magnetic force, in addition to a piezoelectric drive type using a piezoelectric substrate. There may be.

Next, a more detailed configuration of the support arm unit 70 will be described with reference to FIGS. 6 and 7. FIG. 6 is a cross-sectional view schematically showing a cross-sectional configuration of the holding portion of the support arm portion according to the first embodiment. FIG. 7 is a cross-sectional view schematically showing a cross-sectional configuration of the connecting portion of the support arm portion according to the first embodiment.

As shown in FIG. 6, in the holding portion 74, a first extraction electrode 84a is provided on the side surface 74C. In the holding portion 74, the shortest distance D14 (hereinafter referred to as “distance D14”) in the X-axis direction between the first extraction electrode 84a and the second extraction electrode 84b is the main surface 70A and the main surface. It is larger than the shortest distance H14 (hereinafter referred to as “distance H14”) in the Z′-axis direction with respect to 70B. According to this, the distance D14 between the first extraction electrode 84a and the second extraction electrode 84b in the holding portion 74 is larger than the configuration in which the pair of extraction electrodes are provided on the pair of main surfaces of the support arm portion. it can. Therefore, in the tuning fork type crystal resonator element 10, since the stray capacitance generated between the extraction electrodes can be reduced, the effective resistance of the extraction electrodes can be reduced and the power consumption can be reduced.

As shown in FIG. 6, in the holding portion 74, the shortest distance W14 in the X-axis direction between the side surface 74C and the side surface 74D (hereinafter referred to as “distance W14”) is the main surface 70A and the main surface 70B. Is greater than the distance H14. According to this, in the tuning fork type crystal resonator element 10, it becomes easy to provide the second extraction electrode 84b so that the distance D14 between the first extraction electrode 84a and the second extraction electrode 84b in the holding portion 74 is increased.

As shown in FIG. 6, the second extraction electrode 84 b is provided on the side surface 74 D of the holding portion 74, that is, the side surface 70 D of the support arm portion 70. That is, the first extraction electrode 84 a and the second extraction electrode 84 b are provided on the side surface 74 C and the side surface 74 D of the holding portion 74 that face each other. At this time, in the holding portion 74, the distance W14 between the side surface 74C and the side surface 74D corresponds to the distance D14 between the first extraction electrode 84a and the second extraction electrode 84b. According to this, the distance D14 between the first extraction electrode 84a and the second extraction electrode 84b in the holding portion 74 is larger than the configuration in which the second extraction electrode 84b is provided on the main surface 70A or the main surface 70B. it can. Therefore, the stray capacitance generated between the extraction electrodes of the tuning fork type crystal resonator element 10 can be reduced.

As shown in FIG. 6, in a cross-sectional view orthogonal to the Y′-axis direction (first direction D 1) that is the extending direction from the base 50 of the support arm 70, the shape of the holding portion 74 is the main surface 70 A and the main It is a substantially rectangular shape having a pair of long sides composed of the surface 70B and a pair of short sides composed of the side surface 74C and the side surface 74D. According to this, the facing area between the first connection electrode 86a and the second extraction electrode 84b can be reduced. Therefore, the stray capacitance generated between the first connection electrode 86a and the second extraction electrode 84b of the tuning fork type crystal resonator element 10 can be reduced.

The support arm portion 70 is provided between the first vibrating arm portion 60a and the second vibrating arm portion 60b. According to this, the tuning fork type crystal resonator element 10 can be downsized. Further, the difference between the length of the first extraction electrode 84a and the length of the second extraction electrode 84b can be reduced. Therefore, the difference in electrical resistance between the first extraction electrode 84a and the second extraction electrode 84b of the tuning fork type crystal resonator element 10 can be reduced. Further, in the tuning fork type crystal resonator element 10, the influence of the difference in stray capacitance can be reduced.

The support arm portion 70 is bundled at the connecting portion 72 when the main surface 70A is viewed in plan. Specifically, in the connecting portion 72, the support arm portion 70 is formed with recesses on both sides of the side surface 70C and the side surface 70D. In other words, the connecting portion 72 is formed with a hole that opens to both the main surface 70A and the main surface 70B and opens to the side surface 70C. The side surface 72C corresponds to the inner surface of the hole. Similarly, the connecting portion 72 is formed with a hole that opens to the main surface 70A, the main surface 70B, and the side surface 70D and has the side surface 72D as an inner surface. That is, the shortest distance W12 in the X-axis direction between the side surface 72C and the side surface 72D in the connecting portion 72 (hereinafter referred to as “distance W12”) is between the side surface 74C and the side surface 74D in the holding portion 74. It is smaller than the distance W14. As shown in FIG. 7, the side surface 72 C and the side surface 72 D of the connecting portion 72 are provided inside the holding portion 74 in a cross-sectional view orthogonal to the extending direction from the base 50 of the support arm portion 70.

According to this, when the tuning fork type crystal resonator element 10 is operating, vibration propagating from the first vibrating arm portion 60a and the second vibrating arm portion 60b to the holding portion 74 via the connecting portion 72 can be reduced. That is, vibration leakage of the tuning fork type crystal resonator element 10 can be suppressed.

It should be noted that the configuration of the connecting portion is not limited to the above as long as vibration leakage can be reduced. For example, the support arm portion may be formed with a hole that is open on one main surface and is surrounded by the one main surface when the one main surface is viewed in plan in the connecting portion. The hole portion may be a bottomed groove portion, or may be a through hole that also opens on the other main surface. Further, the support arm portion may be formed with a notch portion having an inner surface provided on one main surface and one side surface and provided on the other main surface side and the other side surface in the connection portion. . That is, the support arm portion may be provided with one main surface in the connecting portion, and when the one main surface is viewed in plan, an end portion of the one main surface is provided inside the other main surface. .

As shown in FIG. 7, similarly to the holding portion 74, a first extraction electrode 84 a is provided on the side surface 74 C in the connecting portion 72. In the connecting portion 72, the shortest distance D12 in the X-axis direction between the first extraction electrode 84a and the second extraction electrode 84b (hereinafter referred to as “distance D12”) is the main surface 70A and the main surface. It is larger than the shortest distance H12 in the Z′-axis direction with respect to 70B (hereinafter referred to as “distance H12”). Since the support arm portion 70 is confined by the connecting portion 72, in the configuration in which the first extraction electrode 84a is provided on the side surface 70C of the support arm portion 70, the distance between the first extraction electrode 84a and the second extraction electrode 84b. Can be the smallest at the connecting portion 72. However, in the tuning-fork type crystal resonator element 10, compared with a configuration in which a pair of extraction electrodes is provided on a pair of main surfaces of the support arm portion, between the first extraction electrode 84 a and the second extraction electrode 84 b in the connection portion 72. The distance D12 can be increased. Therefore, in the tuning fork type crystal resonator element 10, vibration leakage can be reduced, and stray capacitance generated between the extraction electrodes can be reduced.

7, similarly to the holding portion 74, the distance W12 between the side surface 72C and the side surface 72D is larger than the distance H12 between the main surface 70A and the main surface 70B in the connecting portion 72. According to this, arrangement | positioning of the 2nd extraction electrode 84b that the distance D12 between the 1st extraction electrode 84a and the 2nd extraction electrode 84b in the connection part 72 becomes large becomes easy. Therefore, the stray capacitance generated between the extraction electrodes of the tuning fork type crystal resonator element 10 can be reduced.

As shown in FIG. 7, similarly to the holding portion 74, the second extraction electrode 84 b is provided on the side surface 72 D of the connecting portion 72. At this time, in the connecting portion 72, the distance W12 between the side surface 72C and the side surface 72D corresponds to the distance D12 between the first extraction electrode 84a and the second extraction electrode 84b. According to this, the distance D12 between the 1st extraction electrode 84a and the 2nd extraction electrode 84b in the connection part 72 is large compared with the structure in which the 2nd extraction electrode 84b is provided in 70 A of main surfaces, or the main surface 70B. it can. Therefore, the stray capacitance generated between the extraction electrodes of the tuning fork type crystal resonator element 10 can be reduced.

As shown in FIG. 7, similarly to the holding portion 74, the shape of the connecting portion 72 in a cross-sectional view orthogonal to the Y′-axis direction (first direction D 1) that is the extending direction from the base portion 50 of the support arm portion 70. Is a substantially rectangular shape having a pair of long sides composed of the main surface 70A and the main surface 70B and a pair of short sides composed of the side surface 72C and the side surface 72D.

Hereinafter, the configuration of a tuning fork type crystal resonator element according to another embodiment of the present invention will be described. In the following embodiment, description of matters common to the first embodiment is omitted, and only different points will be described. In particular, the same operation effect by the same configuration will not be mentioned sequentially. In addition, the configuration given the same reference numerals as in the first embodiment has the same configuration and function as the configuration in the first embodiment.

Second Embodiment
The configuration of the support arm portion 270 of the tuning fork type crystal resonator element according to the second embodiment will be described with reference to FIGS. FIG. 8 is a plan view schematically showing the configuration of the support arm portion of the tuning-fork type crystal resonator element according to the second embodiment. FIG. 9 is a cross-sectional view schematically showing a cross-sectional configuration of the holding portion of the support arm portion according to the second embodiment. FIG. 10 is a cross-sectional view schematically showing a cross-sectional configuration of the connecting portion of the support arm portion according to the second embodiment.

The support arm portion 270 of the tuning fork type crystal resonator element according to the second embodiment has a holding portion 274 and a connecting portion 272, as in the tuning fork type crystal resonator element 10 according to the first embodiment. The main surface 270 A and the main surface 270 B are provided across the connecting portion 272. The holding portion 274 has a side surface 274C and a side surface 274D, and the connecting portion 272 has a side surface 272C and a side surface 272D. The tuning fork type crystal resonator element according to the second embodiment includes a first extraction electrode 284a, a second extraction electrode 284b, a first connection electrode 286a, and a second connection electrode 286b.

The difference between the tuning fork type crystal resonator element according to the second embodiment and the tuning fork type crystal resonator element 10 according to the first embodiment is that the second extraction electrode 284b is provided on the main surface 270B. Even in such a configuration, as shown in the cross-sectional view of FIG. 9, the shortest distance D24 between the first extraction electrode 284a and the second extraction electrode 284b in the holding portion 274 is the main surface 270A and the main surface 270B. It is larger than the distance H24 between. Further, the distance W24 between the side surface 274C and the side surface 274D in the holding portion 274 is larger than the distance H24 between the main surface 270A and the main surface 270B. Similarly, as shown in the cross-sectional view of FIG. 10, the shortest distance D22 between the first extraction electrode 284a and the second extraction electrode 284b in the connecting portion 272 is between the main surface 270A and the main surface 270B. It is larger than the distance H22. Further, the distance W22 between the side surface 272C and the side surface 272D in the connecting portion 272 is larger than the distance H22 between the main surface 270A and the main surface 270B.

Since the distance W24 corresponding to the width of the main surface 270B is larger than the distance H24 corresponding to the width of the side surface 274D, the second extraction electrode 284b provided on the main surface 270B can be provided wide. That is, in the tuning fork type crystal resonator element according to the second embodiment, the electrical resistance of the second extraction electrode 284b can be reduced. Further, in the configuration of the tuning fork type crystal resonator element according to the second embodiment, the first extraction electrode 284a and the second extraction electrode 284b are more than the configuration in which the pair of extraction electrodes are provided on the pair of main surfaces of the support arm portion. Can be reduced. Thereby, stray capacitance generated between the extraction electrodes can be reduced. Therefore, the power consumption of the tuning fork type crystal resonator element according to the second embodiment can be reduced.

<Third Embodiment>
With reference to FIG. 11, the configuration of the support arm portion 370 of the tuning fork type crystal resonator element according to the third embodiment will be described. FIG. 11 is a plan view schematically showing the configuration of the support arm portion of the tuning-fork type crystal resonator element according to the third embodiment.

Similar to the tuning fork type crystal resonator element 10 according to the first embodiment, the support arm portion 370 of the tuning fork type crystal resonator element according to the third embodiment includes a holding portion 374 and a connecting portion 372. The main surface 370 A and the main surface 370 B are provided over the connecting portion 372. The holding portion 374 has a side surface 374C and a side surface 374D, and the connecting portion 372 has a side surface 372C and a side surface 372D. The tuning fork type crystal resonator element according to the second embodiment includes a first extraction electrode 384a, a second extraction electrode 384b, a first connection electrode 386a, and a second connection electrode 386b.

The difference between the tuning fork type crystal resonator element according to the third embodiment and the tuning fork type crystal resonator element 10 according to the first embodiment is that the second connection electrode 386b is provided closer to the base than the first connection electrode 386a, The second extraction electrode 384b is provided on the main surface 370B of the support arm portion 370. When the main surface 370B of the support arm 370 is viewed in plan, the first extraction electrode 384a is provided outside the second connection electrode 386b, and the second extraction electrode 384b is provided outside the first connection electrode 386a. Thereby, the stray capacitance generated between the connection electrode and the extraction electrode can be reduced. Therefore, the power consumption of the tuning fork type crystal resonator element according to the third embodiment can be reduced.

<Fourth embodiment>
With reference to FIG. 12, a configuration of a tuning-fork type crystal vibrating element 410 according to the fourth embodiment will be described. FIG. 11 is a plan view schematically showing a configuration of a tuning fork type crystal resonator element according to the fourth embodiment.

Similar to the tuning fork type crystal resonator element 10 according to the first embodiment, the tuning fork type crystal resonator element 410 according to the fourth embodiment includes a base 450, a first vibrating arm portion 460a, a second vibrating arm portion 460b, and a support arm portion. 470.

The difference between the tuning fork type crystal resonator element 410 according to the fourth embodiment and the tuning fork type crystal resonator element 10 according to the first embodiment is that the support arm portion 470 includes a first vibrating arm portion 460a and a second vibrating arm portion 460b. It is a point provided outside the area between. Specifically, the first vibrating arm portion 460a is provided between the support arm portion 470 and the second vibrating arm portion 460b.

According to this, since the first vibrating arm portion 460a and the second vibrating arm portion 460b approach each other, the efficiency of exchanging vibration energy between the first vibrating arm portion 460a and the second vibrating arm portion 460b is improved. To do. Therefore, the influence of the support arm portion 470 on the exchange of vibration energy between the first vibrating arm portion 460a and the second vibrating arm portion 460b is reduced, and vibration leakage of the tuning fork type crystal vibrating element 410 can be suppressed.

<Appendix>
Hereinafter, some or all of the embodiments of the present invention will be described as supplementary notes. The present invention is not limited to the following supplementary notes.

According to one aspect of the present invention, a base, a first vibrating arm and a second vibrating arm that extend from the base, a first main surface and a second main surface that extend from the base and face each other, A support arm portion having a first side surface and a second side surface that connect the first main surface and the second main surface and face each other; a first excitation electrode provided on the first vibration arm portion and the second vibration arm portion; A second excitation electrode; a first connection electrode and a second connection electrode provided on the first main surface of the support arm; a first extraction electrode that electrically connects the first excitation electrode and the first connection electrode; , A second extraction electrode for electrically connecting the second excitation electrode and the second connection electrode, the first extraction electrode is provided on the first side surface of the support arm, and the second extraction electrode is supported It is provided on the first main surface, the second main surface, or the second side surface of the arm portion, and at least a part of the support arm portion includes a first extraction electrode and a second extraction electrode. Distance is greater than the distance between the first major surface and a second major surface, the vibration device is provided.

In at least a part of the support arm portion, the distance between the first side surface and the second side surface may be greater than the distance between the first main surface and the second main surface.

The second extraction electrode may be provided on the second side surface of the support arm portion.

The first connection electrode may be provided closer to the base than the second connection electrode, and the second extraction electrode may be provided on the first main surface or the second main surface of the support arm portion.

The second connection electrode may be provided closer to the base than the first connection electrode, and the second extraction electrode may be provided on the first main surface or the second main surface of the support arm portion.

In a cross-sectional view orthogonal to the extending direction from the base portion of the support arm portion, at least a part of the support arm portion has a pair of long sides including the first main surface and the second main surface, the first side surface, and the first side surface. The substantially rectangular shape which has a pair of short side which consists of 2 side surfaces may be sufficient.

The support arm portion may be provided between the first vibrating arm portion and the second vibrating arm portion.

The first vibrating arm portion may be provided between the support arm portion and the second vibrating arm portion.

The support arm portion includes a holding portion provided with the first connection electrode and the second connection electrode, and a connecting portion that connects the holding portion and the base portion, and the support arm portion is a plan view of the first main surface. Sometimes, it may be bundled at the connecting portion.

In the connecting portion, the distance between the first extraction electrode and the second extraction electrode may be larger than the distance between the first main surface and the second main surface.

In the connecting portion, the distance between the first side surface and the second side surface may be larger than the distance between the first main surface and the second main surface.

As described above, according to one embodiment of the present invention, it is possible to provide a resonator element that can reduce stray capacitance.

The embodiment described above is for facilitating understanding of the present invention, and is not intended to limit the present invention. The present invention can be changed / improved without departing from the spirit thereof, and the present invention includes equivalents thereof. In other words, those obtained by appropriately modifying the design of each embodiment by those skilled in the art are also included in the scope of the present invention as long as they include the features of the present invention. For example, each element included in each embodiment and its arrangement, material, condition, shape, size, and the like are not limited to those illustrated, and can be changed as appropriate. For example, the vibration element and the vibrator of the present invention can be used for a timing device or a load sensor. In addition, each element included in each embodiment can be combined as much as technically possible, and combinations thereof are included in the scope of the present invention as long as they include the features of the present invention.

1 ... Tuning fork type crystal resonator (vibrator)
10 ... Tuning fork type crystal vibrating element (vibrating element)
DESCRIPTION OF SYMBOLS 11 ... Crystal piece 12A ... 1st main surface 12B ... 2nd main surface 20 ... Lid member 30 ...

Base member

33a, 33b ...

Electrode pad

36a, 36b ... Conductive holding member 40 ... Joining member 50 ...

Base

60a, 60b ...

Vibration Arm part

62a, 62b ...

Arm part

64a, 64b ...

Weight part

63a, 63b ... Groove part 70 ... Support arm part 72 ... Connection part 74 ... Holding

part

82a, 82b ...

Excitation electrode

84a, 84b ...

Extraction electrode

86a, 86b ... Connection electrode

Claims

The base,
A first vibrating arm and a second vibrating arm extending from the base;
A support arm having a first main surface and a second main surface that extend from the base and face each other, and a first side surface and a second side surface that connect the first main surface and the second main surface and face each other. And
A first excitation electrode and a second excitation electrode provided on the first vibrating arm portion and the second vibrating arm portion;
A first connection electrode and a second connection electrode provided on the first main surface of the support arm,
A first extraction electrode that electrically connects the first excitation electrode and the first connection electrode;
A second extraction electrode that electrically connects the second excitation electrode and the second connection electrode;
With
The first extraction electrode is provided on the first side surface of the support arm;
The second extraction electrode is provided on the first main surface, the second main surface, or the second side surface of the support arm portion,
In at least a part of the support arm portion, a vibration element in which a distance between the first extraction electrode and the second extraction electrode is larger than a distance between the first main surface and the second main surface .
In at least a part of the support arm portion, a distance between the first side surface and the second side surface is larger than a distance between the first main surface and the second main surface.
The vibration element according to claim 1.
The second extraction electrode is provided on the second side surface of the support arm portion,
The vibration element according to claim 1.
The first connection electrode is provided closer to the base than the second connection electrode;
The second extraction electrode is provided on the first main surface or the second main surface of the support arm portion,
The vibration element according to claim 1.
The second connection electrode is provided closer to the base than the first connection electrode;
The second extraction electrode is provided on the first main surface or the second main surface of the support arm portion,
The vibration element according to claim 1.
In a cross-sectional view orthogonal to the extending direction of the support arm from the base, at least a part of the support arm has a pair of long sides including the first main surface and the second main surface, A substantially rectangular shape having a pair of short sides composed of the first side surface and the second side surface,
The vibration element according to claim 1.
The support arm is provided between the first vibrating arm and the second vibrating arm.
The vibration element according to claim 1.
The first vibrating arm portion is provided between the support arm portion and the second vibrating arm portion.
The vibration element according to claim 1.
The support arm includes a holding portion provided with the first connection electrode and the second connection electrode, and a connecting portion that connects the holding portion and the base portion,
The support arm portion is bundled in the connecting portion when the first main surface is viewed in plan view.
The vibration element according to claim 1.
In the connecting portion, a distance between the first extraction electrode and the second extraction electrode is larger than a distance between the first main surface and the second main surface.
The vibration element according to claim 9.
In the connecting portion, a distance between the first side surface and the second side surface is larger than a distance between the first main surface and the second main surface.
The vibration element according to claim 9 or 10.