WO2019035321A1 - Polarized light irradiation device - Google Patents

Abstract

According to the present invention, exposure can be performed at a time on a large-sized workpiece. A first lamp and a second lamp, the longitudinal directions of which are approximately perpendicular to the conveying direction of a target object, are disposed offset from each other in the conveying direction and a perpendicular direction which is approximately perpendicular to the conveying direction, and in the perpendicular direction, a first end of the first lamp overlaps the second lamp, and a second end of the second lamp overlaps the first lamp. When seen in a plan view, a first light-shielding part is provided so as to overlap a first region, which is a portion of a long strip-shaped region, in the perpendicular direction in which light is emitted from the first lamp; a second light-shielding part is provided so as to overlap a second region, which is a portion of a long strip-shaped region, in the perpendicular direction in which light is emitted from the second lamp; and the positions of the first region and the second region are approximately the same in the perpendicular direction. In addition, the sum of the areas of the first light-shielding part and the second light-shielding part are approximately the same as the area of the first region and the second region.

Description

Polarized light irradiation device

The present invention relates to a polarized light irradiation apparatus.

In Patent Document 1, linear lamps extending in a direction orthogonal to the transport direction of the light alignment film are arranged in multiple stages along the transport direction of the light alignment film, and a plurality of wire grids are arranged along the extension direction of the light source. There is disclosed a polarized light irradiation device for photo alignment in which polarizing elements are arranged.

Patent No. 4815995 gazette

In recent years, with the increase in size of display panels such as liquid crystals, there has been an increasing demand for performing exposure processing on a large-sized work whose width exceeds 3 m. However, it is difficult to manufacture a lamp as long as about 3 m due to problems such as deflection in manufacturing the lamp.

In the invention described in Patent Document 1, since the width of the work (the length in the direction orthogonal to the transport direction) is narrower than the width of the lamp, it is possible to respond to the demand for exposure processing on a large work. Can not.

The present invention has been made in view of such circumstances, and it is an object of the present invention to provide a polarized light irradiation apparatus capable of performing exposure processing on a large work piece at one time.

In order to solve the above problems, in the polarized light irradiation apparatus according to the present invention, for example, a stage on which an object to be irradiated with polarized light is placed, and a longitudinal direction thereof is substantially orthogonal to the transport direction of the object Provided between the first lamp and the second lamp and the stage, the light emitted from the first lamp and the second lamp being polarized A first light shielding portion provided between the first lamp and the stage, the first light shielding portion blocking light emitted from the first lamp, and a second light shielding portion provided between the second lamp and the stage; And a second light shielding portion configured to block light emitted from the second lamp, wherein the first lamp and the second lamp are shifted in the conveying direction and a direction substantially orthogonal to the conveying direction. Arranged in the orthogonal direction In addition, the first end of the first lamp overlaps with the second lamp, and the second end of the second lamp overlaps with the first lamp, and in plan view, the first light shielding portion is the first lamp To be overlapped with the first region which is a part of the strip-like region elongated in the orthogonal direction to which the light from the light source is irradiated, and the second light shielding portion is irradiated with the light from the second lamp in plan view And the second region is substantially the same in the orthogonal direction as the first region and the second region. A sum of an area of the first light shielding portion and an area of the second light shielding portion may be substantially equal to an area of the first region and the second region.

According to the polarized light irradiation apparatus of the present invention, the first lamp and the second lamp whose longitudinal direction is substantially orthogonal to the transport direction of the object are orthogonal to the transport direction and the transport direction. Displaced, in the orthogonal direction, the first end of the first lamp overlaps the second lamp, and the second end of the second lamp overlaps the first lamp. In plan view, the first light shielding portion is provided to overlap with the first region which is a part of a band-like region elongated in the orthogonal direction to which the light from the first lamp is irradiated, and the light from the second lamp is irradiated The second light shielding portion is provided to overlap with a second region which is a part of a strip-shaped region which is long in the orthogonal direction, and the first region and the second region have substantially the same positions in the orthogonal direction. Thus, by arranging the first lamp and the second lamp along the transport direction and the orthogonal direction, and providing the first light shielding portion and the second light shielding portion in the first area and the second area (junction area), Two lamps can be connected. The sum of the area of the first light shielding portion and the area of the second light shielding portion is substantially the same as the area of the first region and the second region. Thus, the sum of the integrated light quantity of light emitted from the first lamp and the integrated light quantity of light emitted from the second lamp in the joint area is the light emitted from the first lamp in the area other than the joint area. And the integrated light amount of the light emitted from the second lamp can be made substantially the same, and it is possible to eliminate the uneven exposure amount in the junction area. Therefore, the exposure process can be performed at one time on a large work having a width wider than the length of the first lamp and the second lamp.

Here, in a plan view, the first light shielding portion has a first side oblique to the transport direction, and the second light shield portion has a second side oblique to the transport direction. The shape in which the first light shielding portion and the second light shielding portion are arranged with the first side and the second side substantially aligned may be substantially rectangular. Thereby, even when the positions of the first light shielding portion and the second light shielding portion are shifted in the rotational direction or in the parallel direction, the influence on the exposure amount and the optical characteristics can be reduced.

Here, the illuminance distribution of the first lamp in plan view includes a third region substantially parallel along the longitudinal direction of the first lamp and a fourth region not substantially parallel along the longitudinal direction of the first lamp , And the illuminance distribution of the second lamp in plan view includes a fifth region substantially parallel along the longitudinal direction of the second lamp, and a sixth region not substantially parallel along the longitudinal direction of the first lamp. In the area having the area, in which the light is irradiated with the illuminance substantially the same as the area directly below the first lamp, the end on the first end side of the first side is the third area and the fourth area And the second end of the second side of the second side is the fifth area and the sixth area. It may be on the border with Thereby, the distribution of the exposure amount of the light irradiated to the object can be made substantially the same as the distribution of the exposure amount when the light is irradiated from one long lamp.

Here, when viewed from the transport direction, the illuminance distributions of the first lamp and the second lamp each have a substantially trapezoidal shape that is high at the central portion and becomes lower toward the end, When the height of the bottom portion is 100, a point which is substantially parallel to the bottom of the substantially trapezoidal shape and which intersects a line existing at a height of about 90 to about 99 and a line indicating the illuminance distribution The position in the orthogonal direction may substantially coincide with the end on the first end side of the first side and the end on the second end side of the second side. Thereby, the distribution of the exposure amount of the light irradiated to the object can be made substantially the same as the distribution of the exposure amount when the light is irradiated from one long lamp.

Here, a first aperture is provided between the first lamp and the stage so as to cover an area to which light from the first lamp is irradiated, and between the second lamp and the stage And a second aperture provided to cover a region irradiated with light from the second lamp, wherein the first light blocking portion and the second light blocking portion have a dot pattern including a plurality of dots. The first aperture includes a substantially plate-shaped first light transmitting member and the first light blocking portion formed in the first light transmitting member, and the second aperture is a substantially plate-shaped second light transmitting portion. A light transmitting member and the second light shielding portion formed in the second light transmitting member are provided, and in the first region, the number of the dots per unit area increases as the first end is approached. And the number of dots per unit area as the distance from the first end increases As the number of dots per unit area gradually changes so as to decrease, in the second area, the number of dots per unit area increases as the second end is approached, and from the second end The number of dots per unit area may gradually change so that the number of dots per unit area decreases with distance. Thereby, it is possible to eliminate the unevenness in the exposure amount in the joint portion area.

Here, when the distance between the first lamp and the object is about 150 mm to about 160 mm, the length of the first region is about 8% to about 15% of the length of the first lamp in the longitudinal direction. When the distance between the second lamp and the object is about 150 mm to about 160 mm, the length of the second region is about 8% to about 15% of the length of the second lamp in the longitudinal direction. It may be As described above, the first light blocking portion and the second light blocking portion cover a region where the first lamp and the second lamp deteriorate and become dark and the exposure amount decreases, thereby causing the degradation of the first lamp and the second lamp. Since the decrease of the exposure dose does not affect the exposure, the unevenness of the exposure dose can be eliminated.

Here, in a plan view, the shape of the first light shielding portion is approximately 180 degrees around the second light shielding portion around a second point where the second side and the central axis of the second lamp intersect. The shape of the second light shielding portion is approximately 180 degrees around the first light shielding portion at a point at which the first side intersects with the central axis of the first lamp. It may be a rotated shape. As a result, it is possible to eliminate the variation in the polarization axis of the polarized light irradiated to the object, that is, the unevenness of the optical characteristics.

Here, a moving unit may be provided to move the first lamp or the second lamp in a direction substantially orthogonal to the transport direction. As a result, it is not necessary to use a region where the exposure amount decreases due to blackening when the first and second lamps deteriorate. Accordingly, unevenness in the exposure amount can be eliminated by preventing the decrease in the exposure amount due to the deterioration of the first lamp and the second lamp from affecting the exposure.

According to the present invention, it is possible to perform exposure processing on a large workpiece at one time.

It is a front view which shows the outline of the polarized light irradiation apparatus 1 which concerns on 1st Embodiment. It is a top view which shows the outline of the polarized light irradiation apparatus 1 which concerns on 1st Embodiment. It is a principal part perspective view showing an outline when polarization irradiation part 10 and work W are seen from the side. FIG. 2 is a view showing the arrangement of the apertures 17 and 18 in a plan view of the polarized light irradiation device 1; It is a figure which shows the relationship between the apertures 17 and 18 and the integrated light quantity of the light irradiated to the workpiece | work W, (A) shows arrangement | positioning of the apertures 17 and 18 in planar view, (B) is every lamps 11 and 12. And (C) indicates the total of the integrated light amounts of the lamps 11 and 12. It is a figure which shows the relationship between the polarization axis of light, and the position of the apertures 17 and 18. It is an example of illuminance distribution of the lamps 11 and 12 in planar view. It is a figure which shows typically the relationship between aperture 17A, 18A in planar view of the polarized light irradiation apparatus 2, and illumination distribution. It is a figure which shows typically the relationship of aperture 17B, 18B and illumination intensity distribution in planar view of 2 A of polarized light irradiation apparatuses concerning a modification. (A) shows the relationship between the position in the longitudinal direction of the lamps 11 and 12 and the illuminance distribution, (B) shows the relationship between the illuminance distribution and the aperture 17C, and (C) shows the relationship between the illuminance distribution and the aperture 18C Indicates FIG. 7 is a view showing the arrangement of the apertures 17C and 18C in a plan view of the polarized light irradiation device 3. FIG. 6 is a view showing the arrangement of a polarized light irradiation unit 10A in a plan view of the polarized light irradiation device 4; It is a top view which shows the outline of the apertures 17E and 18E. It is a figure which shows the relationship between the apertures 17E and 18E and the integrated light quantity of the light irradiated to the workpiece W, (A) shows arrangement of the apertures 17E and 18E in plan view, (B) shows each lamp 11, 12 And (C) indicates the total of the integrated light amounts of the lamps 11 and 12.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the polarized light irradiation apparatus of the present invention, for example, light from a light source is allowed to pass through a polarizing film to obtain polarized light, and this polarized light is irradiated to a surface to be exposed of a glass substrate etc. For producing an alignment film and the like.

First Embodiment
FIG. 1 is a front view showing an outline of a polarized light irradiation device 1 according to a first embodiment. FIG. 2 is a plan view showing an outline of the polarized light irradiation device 1 according to the first embodiment. Here, the transport direction of the workpiece W is y, the direction orthogonal to the transport direction is x, and the vertical direction is z.

The polarized light irradiation apparatus 1 mainly includes a polarized light irradiation unit 10, a stage 20, and a stage drive unit 30.

The polarized light irradiation unit 10 irradiates the workpiece W with polarized light. The polarized light irradiation unit 10 has two lamps 11 and 12. The lamps 11 and 12 are rod-like lamps having a long light emission length of approximately 1500 mm to 2000 mm, and emit unpolarized light (for example, ultraviolet light). As the lamps 11 and 12, a long arc lamp can be used which efficiently emits short wavelength ultraviolet light (for example, 254 nm wavelength light) necessary for the light alignment processing. Electrodes 11a, 11b, 12a, 12b are provided at both ends of the lamps 11, 12, respectively.

The lamps 11 and 12 are provided such that the longitudinal direction is substantially orthogonal to the conveyance direction (y direction) of the work W (substantially along the x direction). Further, the lamps 11 and 12 are disposed to be shifted in the x direction and the y direction.

FIG. 3 is a perspective view of main parts schematically showing the polarized light irradiation unit 10 and the work W as viewed from the side. The polarized light irradiation unit 10 mainly includes the lamps 11 and 12, the reflector 13, the specific wavelength transmission filter 14, the polarization member 15, the cover glass 16, and the apertures 17 and 18.

The specific wavelength transmission filter 14, the polarization member 15, and the cover glass 16 are provided on the lower side (−z side) of the lamps 11 and 12, ie, between the lamps 11 and 12 and the stage 20, respectively. The light emitted from the lamps 11 and 12 is reflected by the reflector 13, passes through the specific wavelength transmission filter 14, the polarization member 15 and the like, and is irradiated to the work W.

The reflector 13 has a substantially wedge shape in a side view and a substantially rectangular shape in a plan view. The reflector 13 reflects the light from the lamps 11 and 12 so that the light from the lamps 11 and 12 is concentrated on the irradiation area.

The specific wavelength transmission filter 14 is a filter that transmits only light of a specific wavelength range and absorbs light of other wavelengths. In the specific wavelength transmission filter 14, a filter layer of a band pass filter that transmits only light in a specific wavelength range is formed on a transparent substrate that is a plate-like glass (such as quartz glass). However, the filter formed on the transparent substrate is not limited to the band pass filter, and may be, for example, a low cut filter or a reflection filter.

The polarization member 15 is formed by arranging a plurality of wire grid polarizers less dependent on the incident angle along the x direction. A wire grid polarizer is a transparent substrate with a metal wire formed on the surface, and by making the pitch of the metal wire equal to or less than the wavelength of the incident light, a polarization component substantially parallel to the longitudinal direction of the metal wire is obtained. It reflects and transmits a polarized light component substantially orthogonal to the longitudinal direction of the metal wire. The polarization member 15 is not limited to the wire grid polarizer.

A cover glass 16 is provided below the polarizing member 15. However, the cover glass 16 is not essential.

Apertures 17 and 18 are provided under the cover glass 16, ie, between the cover glass 16 and the stage 20. The aperture 17 is provided below the lamp 11, and the aperture 18 is provided below the lamp 12. The apertures 17 and 18 will be described in detail later. The apertures 17 and 18 may be provided, for example, between the specific wavelength transmission filter 14 and the polarization member 15 instead of between the cover glass 16 and the stage 20.

It returns to the explanation of FIGS. The stage 20 is provided movably in the y direction. The workpiece W to which polarized light is irradiated is placed on the upper surface of the stage 20.

The stage drive unit 30 has a stage guide rail 31 extended in the y direction, a stage scan axis 32, and a drive unit 33 having an actuator and the like.

The stage 20 is provided movably along the stage guide rail 31 by driving means (not shown) (see thick arrows in FIGS. 1 and 2). The drive unit 33 moves the stage 20 along the stage guide rail 31 (that is, the transport direction) (see thick arrows in FIG. 1).

When the stage 20 moves in the y direction along the stage guide rail 31, the position detection unit (not shown) detects the position of the stage 20 on the stage scan axis 32. Thereby, the position of the stage 20 in the y direction can be adjusted. In addition, since movement and positioning of the stage 20 are already known techniques, the description is omitted.

The robot 40 is a moving unit that moves the work W to the stage 20 and moves the work W from the stage 20. The robot 40 is already known, and thus the description thereof is omitted. The position of the robot 40 is not limited to the position shown in FIGS. Further, the moving means for moving the work W to the stage 20 or moving the work W from the stage 20 is not limited to the robot 40.

The polarized light irradiation unit 10, the stage 20, and the stage drive unit 30 are provided inside the apparatus frame 50. The apparatus frame 50 is provided with an opening (not shown) for an operator to move in and out, and for the robot 40 to move the workpiece W relative to the stage 20.

Next, the apertures 17 and 18 will be described in detail. FIG. 4 is a view showing the arrangement of the apertures 17 and 18 in a plan view (when viewed from the + z direction). In FIG. 4, the lamps 11 and 12 are indicated by two-dot chain lines. Further, in FIG. 4, the light shielding portions 17 a and 18 a are hatched for explanation.

The apertures 17 and 18 respectively have light shielding portions 17a and 18a and openings 17b and 18b. The apertures 17 and 18 are provided so as to cover the area to which the light from the lamps 11 and 12 is irradiated in plan view.

The light shielding portion 17a is provided on the lamp 12 side (+ x side) of the opening 17b, and the light shielding portion 18a is provided on the lamp 11 side (−x side) of the opening 18b.

Here, the areas irradiated with the light from the lamps 11 and 12 are band-like areas long in the x direction in plan view. The area irradiated with the light from the lamp 11 substantially coincides with the area where the light shielding portion 17a and the opening 17b in FIG. 4 are arranged. Further, the area irradiated with the light from the lamp 12 substantially coincides with the area where the light shielding portion 18 a and the opening 18 b in FIG. 4 are disposed.

In the x direction, the end 11c (the end on the + x side) of the lamp 11 is at a position overlapping with the lamp 12, and this position is x = X1. Further, in the x direction, the end 12c (the end on the -x side) of the lamp 12 is at a position overlapping the lamp 11, and this position is x = X2.

In a plan view, the light shielding portion 17 a is provided to overlap the region A <b> 1 on the + x side in the long strip-like region in the x direction to which the light from the lamp 11 is irradiated. Further, in plan view, the light shielding portion 18a is provided so as to overlap the region A2 on the −x side in the long strip-like region in the x direction to which the light from the lamp 12 is irradiated. The areas A1 and A2 are parts of a band-like area which is long in the x direction and to which light from the lamps 11 and 12 is irradiated. Although the areas A1 and A2 are not visible, in FIG. 4 the ends of the areas A1 and A2 are indicated by dotted lines for the sake of explanation. The regions A1 and A2 have substantially the same position in the x direction, and the regions A1 and A2 are defined as joint region.

The light shielding portions 17a and 18a have sides 17m and 18m oblique to the x direction and the y direction. The sides 17m and 18m are inclined approximately 45 degrees with respect to the x direction and the y direction, respectively. However, the inclination of the sides 17m and 18m is not limited to about 45 degrees.

Each of the light shielding portions 17a and 18a has a shape like a substantially rectangular plate member cut obliquely to the y direction. In other words, the shape in which the light shielding portion 17a and the light shielding portion 18a are arranged with the side 17m and the side 18m substantially aligned is a substantially rectangular shape. The sum of the area of the light shielding portion 17a and the area of the light shielding portion 18a is substantially the same as the area of the regions A1 and A2.

The position of the end on the + x side of the side 17m is x = X4, and the position of the end on the −x side of the side 18m is x = X3. When the distance H (see FIG. 3) between the lamps 11 and 12 and the work W is approximately 150 mm to approximately 160 mm, the distance d between the position X2 and the position X3 and the distance d between the position X1 and the position X4 are the lamp 11, It is about 8% to about 15% of the length of the 12 longitudinal directions (here, the x direction). For example, when the length of the lamps 11 and 12 is about 2500 mm, the distance d is about 200 mm, which is about 8% of the length of the lamps 11 and 12. Further, for example, when the length of the lamps 11 and 12 is approximately 2250 mm, the distance d is approximately 225 mm, which is approximately 10% of the length of the lamps 11 and 12. Also, for example, when the length of the lamps 11 and 12 is approximately 1500 mm, the distance d is approximately 200 mm, which is approximately 13.3% of the length of the lamps 11 and 12.

From the end of the lamps 11 and 12 to the area of approximately 8% to approximately 15% of the longitudinal length of the lamps 11 and 12, the lamp becomes black when the lamps 11 and 12 deteriorate, and the exposure amount decreases It is an area. By covering this area using the light shielding portions 17a and 18a, since the decrease in the exposure amount due to the deterioration of the lamps 11 and 12 does not affect the exposure of the work W, the unevenness in the exposure amount can be eliminated.

The operation of the polarized light irradiation device 1 will be described. While irradiating the light from the polarized light irradiation unit 10, the light irradiated from the polarized light irradiation unit 10 while moving the stage 20 (that is, the work W) in the y direction, which is the transport direction, through the drive unit 33 (one reciprocation) It irradiates to the to-be-exposed surface of the workpiece | work W, and the exposure process which produces alignment film etc. is performed.

FIG. 5 is a diagram showing the relationship between the apertures 17 and 18 and the integrated light amount of light irradiated to the work W, where (A) shows the arrangement of the apertures 17 and 18 in plan view, and (B) shows a lamp (C) indicates the total of the integrated light amounts of the lamps 11 and 12. The light emitted from the lamp 11 passes through the opening 17b of the aperture 17 and is applied to the workpiece W, but is blocked by the light shielding portion 17a. Therefore, the integrated light amount gradually decreases toward the + x side in the area A1. The light emitted from the lamp 12 passes through the opening 18b of the aperture 18 and is applied to the workpiece W, but is blocked by the light shielding portion 18a. Therefore, the integrated light quantity gradually increases toward the −x side in the area A2. It becomes smaller.

Since the sum of the area of the light shielding portion 17a and the area of the light shielding portion 18a is substantially the same as the area of the regions A1 and A2, the integrated light quantity of the light emitted from the lamp 11 and the light emitted from the lamp 12 in the joint region The sum with the integrated light amount of light is substantially the same as the integrated light amount of light emitted from the lamp 11 and the integrated light amount of light emitted from the lamp 12 in the region other than the junction region. Thereby, it is possible to eliminate the unevenness in the exposure amount in the joint portion area.

FIG. 6 is a view showing the relationship between the polarization axis of light emitted from the lamps 11 and 12 and polarized by the polarization member 15 and the position of the apertures 17 and 18. The shape of the light shielding portion 17a in plan view is a shape in which the light shielding portion 18a is rotated approximately 180 degrees around the point 18s where the central axis ax2 of the lamp 12 intersects the side 18m, and the shape of the light shielding portion 18a in plan view Since the light shielding portion 17a is rotated approximately 180 degrees around the point 17s where the central axis ax1 of the lamp 11 and the side 17m intersect, the light shielding portions 17a and 18a are displayed with a lower right shoulder in FIG. The polarized light having the above-mentioned polarization axis is mainly shielded, and the work W is mainly irradiated with the polarized light having the polarization axis indicated by the upper right corner in FIG. Therefore, it is possible to eliminate the variation of the polarization axis of the polarized light irradiated to the work W, that is, the unevenness of the optical characteristics.

According to the present embodiment, a plurality of (two in this case) lamps 11 and 12 are arranged along the x direction and the y direction, and the light shielding portions 17a and 18a are provided in the joint portion region, thereby uneven exposure amount and optics Two lamps can be connected without any unevenness in characteristics. Therefore, the exposure process can be performed on a large workpiece at one time (one reciprocation).

Further, according to the present embodiment, when the lamps 11 and 12 deteriorate, the lamp becomes black and the exposure amount decreases (in the present embodiment, from the end of the lamps 11 and 12 Since the light shielding portions 17a and 18a cover the region of approximately 8% to approximately 15% of the length in the longitudinal direction, the exposure processing can be performed without any influence even if the exposure amount decreases due to the deterioration of the lamps 11 and 12.

Further, according to the present embodiment, since the light shielding portions 17a and 18a have sides 17m and 18m oblique to the x direction and the y direction, the positions of the apertures 17 and 18 shift in the rotational direction or in the y direction. Even in the case of a shift, the influence on the exposure amount and the optical characteristics can be reduced.

In the present embodiment, the light from the lamps 11 and 12 is partially covered by providing the apertures 17 and 18 having the light shielding portions 17a and 18a and the openings 17b and 18b. Only the light shielding portions 17a and 18a (the openings 17b and 18b may be omitted) may be provided in the portion where it is desired to block the light.

Second Embodiment
In the first embodiment of the present invention, a region of approximately 8% to approximately 15% of the length in the longitudinal direction of the lamps 11 and 12 is covered by the light shielding portions 17a and 18a from the ends of the lamps 11 and 12 The arrangement of the light shielding portions 17a and 18a is not limited to this.

In the second embodiment, an area to be covered with the light shielding portions 17 a and 18 a is determined based on the illuminance distribution of the lamps 11 and 12. Hereinafter, the polarized light irradiation apparatus 2 of the second embodiment will be described. The difference between the polarized light irradiation apparatus 1 according to the first embodiment and the polarized light irradiation apparatus 2 according to the second embodiment is only the aperture, and hence the polarized light irradiation apparatus according to the second embodiment will hereinafter be described. The apertures 17A and 18A in 2 will be mainly described. The same parts as those of the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

First, the illuminance distribution of light emitted from the lamps 11 and 12 will be described. FIG. 7 is an example of the illuminance distribution of the lamps 11 and 12 in plan view. The illuminance distribution of the lamps 11 and 12 has a region I substantially parallel along the longitudinal direction of the lamps 11 and 12 and a region II not substantially parallel along the longitudinal direction of the lamps 11 and 12. The upper and lower ends of the illuminance distribution in FIG. 6 are shielded by the both end surfaces of the reflector 13 (not shown in FIG. 6).

FIG. 8 is a view schematically showing the relationship between the apertures 17A and 18A and the illuminance distribution in plan view. In FIG. 8, the illuminance distribution is illustrated by a two-dot chain line for the sake of explanation. The apertures 17A and 18A, like the apertures 17 and 18, are provided below the lamps 11 and 12, respectively, and are provided to cover the area to which the light from the lamps 11 and 12 is irradiated. The apertures 17A and 18A respectively have light shielding portions 17c and 18c and openings 17d and 18d.

The light shielding portion 17c is provided on the + x side of the opening 17d, and the light shielding portion 18c is provided on the −x side of the opening 18d. The light shielding portions 17c and 18c have sides 17n and 18n oblique to the x direction and the y direction. The shape in which the light shielding portion 17 c and the light shielding portion 18 c are aligned with the side 17 n and the side 18 n substantially matched is a substantially rectangular shape. The sum of the area of the light shielding portion 17c and the area of the light shielding portion 18c is substantially the same as the area of the junction portion region A3.

The shape of the light shielding portion 17c in a plan view is a shape obtained by rotating the light shielding portion 18c approximately 180 degrees around a point 18t at which the central axis ax2 of the lamp 12 intersects the side 18n, and the shape of the light shielding portion 18c in a plan view Is a shape in which the light shielding portion 17c is rotated approximately 180 degrees around a point 17t at which the central axis ax1 of the lamp 11 and the side 17n intersect.

The end on the + x side of the side 17n is on the boundary between the region I and the region II, and the end on the −x side of the side 18m is on the boundary between the region I and the region II. Therefore, the sum of the integrated light quantity of the light emitted from the lamp 11 and the integrated light quantity of the light emitted from the lamp 12 in the joint area A3 is the integration of the light emitted from the lamp 11 in the area other than the joint area A3. The light amount and the integrated light amount of the light emitted from the lamp 12 are substantially the same.

According to the present embodiment, the distribution of the exposure amount of the light irradiated to the work W is substantially the same as the distribution of the exposure amount when the light is irradiated from one long lamp, and therefore, a large work can be obtained. Appropriate exposure processing can be performed.

In the present embodiment, the end on the + x side of the side 17 n is on the boundary between the area I and the area II, and the end on the −x side of the side 18 n is on the boundary between the area I and the area II. However, for example, as shown in FIG. 9, an aperture 17B having a light shielding portion 17e in which the point 17u where the central axis ax1 of the lamp 11 intersects the side 17o is on the boundary between the region I and the region II; An aperture 18B may be used which has a light shielding portion 18e in which the point 18u at which the central axis ax2 intersects the side 18o is on the boundary between the region I and the region II.

The apertures 17B and 18B have light shielding portions 17e and 18e and openings 17f and 18f. The light shielding portions 17e and 18e have a substantially triangular shape in plan view. The shape of the light shielding portion 17e in plan view is a shape in which the light shielding portion 18e is rotated approximately 180 degrees around the point 18u, and the shape of the light shielding portion 18e in plan view is approximately 180 around the point 17u. It is a rotated shape. In this case, the exposure amount of light irradiated to the workpiece W in the joint area is slightly reduced, but the distribution of the exposure amount of light irradiated to the workpiece W is irradiated with light from one long lamp. The lamps 11 and 12 can be used in a wider range in a state of being substantially the same as the distribution of the exposure amount.

Third Embodiment
Although the second embodiment of the present invention determines the shapes of the apertures 17A and 18A based on the illuminance distribution of the lamps 11 and 12 in plan view, the form of the apertures is not limited to this.

The third embodiment is a mode in which the shape of the aperture is determined based on the illuminance distribution of the lamps 11 and 12 when viewed substantially along the transport direction. The polarized light irradiation device 3 of the third embodiment will be described below. The difference between the polarized light irradiation apparatus 1 according to the first embodiment and the polarized light irradiation apparatus 3 according to the third embodiment is only the aperture, and hence the polarized light irradiation apparatus according to the third embodiment will hereinafter be described. The apertures 17C and 18C in 3 will be mainly described. The same parts as those of the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

10 (A) shows the relationship between the longitudinal position of the lamps 11 and 12 and the illuminance distribution, FIG. 10 (B) shows the relationship between the illuminance distribution and the aperture 17C, and FIG. 10 (C) shows the illuminance distribution And the aperture 18C. FIG. 10 exemplifies the case where the radiation angle from a certain point of the lamps 11 and 12 is 30 degrees.

The two-dot chain line in FIG. 10A indicates the appearance of light emitted from the end of the light emitting area of the lamps 11 and 12. The region outside the two-dot chain line in FIG. 10A is only the light emitted from the inside, and there is no light emitted from the outside. Therefore, when viewed from the y direction, the illuminance distribution of the lamps 11 and 12 has a substantially trapezoidal shape that is high at the central portion and becomes lower toward the end. The left and right ends of the illuminance distribution in FIG. 10A are shielded by the both end surfaces of the reflector 13 (not shown in FIG. 10).

The apertures 17C and 18C respectively have light shielding portions 17g and 18g and openings 17h and 18h. The light shielding portion 17g is provided on the + x side of the opening 17h, and the light shielding portion 18g is provided on the −x side of the opening 18h. The light shielding portions 17g and 18g have sides 17p and 18p oblique to the x direction and the y direction. The shape in which the light shielding portion 17g and the light shielding portion 18g are arranged with the side 17p and the side 18p substantially aligned is a substantially rectangular shape.

A line l1 is a line substantially parallel to the bottom of the substantially trapezoidal shape, and when the height of the upper bottom portion of the substantially trapezoidal shape indicating the illuminance distribution of the lamps 11 and 12 is 100, the height is about 90 to about 99 To be present. The positions in the x direction of points P1 and P2 at which the line l1 intersects the line indicating the illuminance distribution substantially coincide with the end on the + x side of the side 17p and the end on the -x side of the side 18p.

FIG. 11 is a view showing the arrangement of the apertures 17C and 18C in a plan view. The light shielding portion 17g is provided so as to overlap the region A4, and the light shielding portion 18g is provided so as to overlap the region A5. The area A4 and the area A5 have substantially the same position in the x direction, and the areas A4 and A5 are defined as the joint area. The sum of the area of the light shielding portion 17g and the area of the light shielding portion 18g is substantially the same as the area of the regions A4 and A5.

The shape of the light shielding portion 17g in plan view is a shape in which the light shielding portion 18g is rotated approximately 180 degrees around a point 18v at which the central axis ax2 of the lamp 12 intersects the side 18p, and the shape of the light shielding portion 18g in plan view The light shielding portion 17g is rotated approximately 180 degrees around a point 17v at which the central axis ax1 of the lamp 11 intersects the side 17p.

According to the present embodiment, when the illuminance at the central portion of the lamps 11 and 12 is 100, an area having an illuminance of approximately 90 to approximately 99 is used. Therefore, light emitted from the two lamps 11 and 12 is used. The distribution of exposure can be made substantially the same as the distribution of exposure when light is emitted from one long lamp. Therefore, appropriate exposure processing can be performed on a large work.

Fourth Embodiment
In the first embodiment of the present invention, although the area in which the exposure amount decreases when the lamps 11 and 12 deteriorate is covered by the light shielding portions 17a and 18a, the lamps 11 and 12 are deteriorated. The form for avoiding the use of the area where the exposure dose decreases sometimes is not limited to this.

In the fourth embodiment, the lamps 11 and 12 are moved so as not to use the deteriorated portion. The polarized light irradiation device 4 of the fourth embodiment will be described below.

The difference between the polarized light irradiation device 1 according to the first embodiment and the polarized light irradiation device 4 according to the fourth embodiment is only the configuration of the polarized light irradiation unit. Only the polarized light irradiation part 10A in the polarized light irradiation device 4 will be described, and the illustration and description of the other parts will be omitted. The same parts as those of the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

FIG. 12 is a diagram showing the arrangement of the polarized light irradiation unit 10A in plan view. The polarized light irradiation unit 10A mainly includes the lamps 11 and 12, a reflector 13 (not shown), a specific wavelength transmission filter 14 (not shown), a polarization member 15 (not shown), and a cover glass 16 (not shown). , Apertures 17D and 18D, and a lamp moving unit (not shown).

The apertures 17D and 18D respectively have light shielding portions 17i and 18i and openings 17j and 18j. The light shielding portion 17i is provided on the + x side of the opening 17j, and the light shielding portion 18i is provided on the −x side of the opening 18j. The light shielding portions 17i and 18i have a substantially triangular shape in a plan view, and a shape obtained by arranging the light shielding portions 17i and the light shielding portions 18i with the sides oblique to the x direction and the y direction of the light shielding portions 17i and 18i substantially coinciding , Substantially rectangular shape.

The lamp moving unit moves the lamps 11 and 12 in the x direction. The lamp moving unit can use a known technique, and thus the description thereof is omitted.

The lamps 11 and 12 are initially at positions overlapping the apertures 17D and 18D (indicated by dotted lines in FIG. 12). When the lamps 11 and 12 deteriorate and the ends of the lamps 11 and 12 become black, the lamp moving unit moves the lamp 11 in the + x direction and moves the lamp 12 in the −x direction (indicated by solid lines in FIG. 12) . At this time, the lamps 11 and 12 are disposed such that the light shielding portions 17i and 18i cover the blackened portions of the lamps 11 and 12, respectively.

According to the present embodiment, the lamp 11 or 12 is deteriorated because the region where the exposure amount decreases when the lamp 11 or 12 is deteriorated is not used by moving the lamp 11 or 12 in the x direction. The reduction of the exposure amount due to the above does not affect the exposure of the workpiece W, and the unevenness of the exposure amount can be eliminated.

Fifth Embodiment
In the first embodiment of the present invention, the apertures 17 and 18 have the substantially plate-shaped light shielding portions 17a and 18a having sides 17m and 18m oblique to the x direction and the y direction, respectively. Is not limited to this.

The fifth embodiment does not use a substantially plate-like light shielding portion. The polarized light irradiation device 5 of the fifth embodiment will be described below. The difference between the polarized light irradiation apparatus 1 according to the first embodiment and the polarized light irradiation apparatus 5 according to the fifth embodiment is only the aperture, and hence the polarized light irradiation apparatus according to the fifth embodiment will be described below. The apertures 17E and 18E at 5 will be mainly described. The same parts as those of the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

FIG. 13 is a plan view showing an outline of the apertures 17E and 18E. The aperture 17E is provided below the lamp 11 so as to cover the area to which the light from the lamp 11 is irradiated in plan view. The aperture 18E is provided below the lamp 12 so as to cover the area to which the light from the lamp 12 is irradiated in plan view.

The apertures 17E and 18E respectively include light shielding portions 17k and 18k, and substantially plate-like light transmitting members 17l and 18l. The light shielding portion 17k is provided so as to overlap the region A1, and the light shielding portion 18k is provided so as to overlap the region A2.

The light shielding portions 17k and 18k are dot patterns including a plurality of dots. The light shielding portion 17k is formed on the light transmitting member 17l, and the light shielding portion 18k is formed on the light transmitting member 18l.

In the region A1, the number of dots per unit area gradually changes so that the number of dots per unit area increases as approaching the end 11c and the number of dots per unit area decreases as the distance from the end 11c increases. Do. As a result, in the area A1, the dot pattern at the position adjacent to the end 11c is the darkest, and the dot pattern gradually becomes thinner as the distance from the end 11c increases.

Further, in the region A2, the number of dots per unit area gradually increases so that the number of dots per unit area increases as approaching the end 12c and the number of dots per unit area decreases as the distance from the end 12c increases. Change to In FIG. 13, the number of dots in the area F1 near the end 12c is larger than the number of dots in the area F2 far from the end 12c. As a result, in the region A2, the dot pattern at the position adjacent to the end 12c is the darkest, and the dot pattern gradually becomes thinner as the distance from the end 12c increases.

In FIG. 13, for convenience of illustration, the density of the dot pattern changes stepwise, but in practice the density of the dot pattern changes continuously. Although it is possible to change the density of the dot pattern stepwise, it is desirable to change the density of the dot pattern continuously in order to eliminate the unevenness of the light shielding amount.

FIG. 14 is a diagram showing the relationship between the apertures 17E and 18E and the integrated light amount of light irradiated to the work W, where (A) shows the arrangement of the apertures 17E and 18E in plan view, and (B) shows a lamp (C) indicates the total of the integrated light amounts of the lamps 11 and 12. The light emitted from the lamp 11 is blocked by the light shielding portion 17k, so in the area A1, the accumulated light amount gradually decreases as it goes to the + x side. Further, since the light emitted from the lamp 12 is blocked by the light shielding portion 18k, the integrated light amount gradually decreases toward the −x side in the region A2.

Since the sum of the area of the light shielding portion 17k and the area of the light shielding portion 18k is substantially the same as the area of the regions A1 and A2, the integrated light quantity of the light emitted from the lamp 11 and the light emitted from the lamp 12 in the joint region The sum with the integrated light amount of light is substantially the same as the integrated light amount of light emitted from the lamp 11 and the integrated light amount of light emitted from the lamp 12 in the region other than the junction region. Thereby, it is possible to eliminate the unevenness in the exposure amount in the joint portion area.

According to the present embodiment, two lamps can be connected in a state where there is no unevenness in exposure amount or unevenness in optical characteristics. Therefore, the exposure process can be performed on a large workpiece at one time.

The embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration is not limited to this embodiment, and design changes and the like within the scope of the present invention are also included. Moreover, it is possible to employ | adopt the structure which combined suitably the structure demonstrated as each embodiment and modification which were mentioned above. For example, the configuration of the fourth embodiment can be appropriately combined with the configuration of the first embodiment.

Further, in the present invention, “abbreviation” is a concept including not only the case of strictly identical but also an error and a deformation that do not lose the sameness. For example, substantially parallel is not limited to strictly parallel. Further, for example, when expressing simply as parallel, orthogonal, etc., not only strictly parallel, orthogonal, etc., but also substantially parallel, substantially orthogonal, etc. shall be included.

1, 2, 2A, 3, 4: Polarized light irradiation device 10, 10A: Polarized irradiation part 11, 12: Lamps 11a, 11b, 12a, 12b: Electrodes 11c, 12c: End 13: Reflector 14: Specific wavelength transmission filter 15 : Polarizing member 16: Cover glass 17, 17A, 17B, 17C, 17D: Apertures 17a, 17c, 17e, 17g, 17i: Light shielding parts 17b, 17d, 17f, 17h, 17j: Openings 17m, 17n, 17o, 17p, Sides 18, 18A, 18B, 18C, 18D: Apertures 18a, 18c, 18e, 18g, 18i: Light shields 18b, 18d, 18f, 18h, 18j: Openings 18m, 18n, 18o, 18p: Side 20: Stage 30 : Stage driver 31: Stage guide rail 32 : Stage scan axis 33: Drive part 40: Robot 50: Device frame

Claims (8)

1. A stage on which an object to be irradiated with polarized light is placed;
   A first lamp and a second lamp provided such that the longitudinal direction is substantially orthogonal to the transport direction of the object;
   A polarization member provided between the first lamp and the second lamp and the stage for polarizing the light emitted from the first lamp and the second lamp;
   A first light shielding portion provided between the first lamp and the stage and configured to block the light emitted from the first lamp;
   A second light shielding portion provided between the second lamp and the stage and configured to block the light emitted from the second lamp;
   Equipped with
   The first lamp and the second lamp are arranged to be shifted in a direction orthogonal to the conveying direction and a direction substantially orthogonal to the conveying direction.
   In the orthogonal direction, the first end of the first lamp overlaps the second lamp, and the second end of the second lamp overlaps the first lamp,
   In a plan view, the first light shielding portion is provided so as to overlap with a first region which is a part of a band-like region elongated in the orthogonal direction to which the light from the first lamp is irradiated,
   In plan view, the second light shielding portion is provided so as to overlap with a second region which is a part of a band-like region elongated in the orthogonal direction to which light from the second lamp is irradiated;
   The first area and the second area have substantially the same position in the orthogonal direction,
   The sum of the area of the first light shielding portion and the area of the second light shielding portion is substantially the same as the area of the first region and the second region.
2. In a plan view, the first light shielding portion has a first side oblique to the transport direction, and the second light shield portion has a second side oblique to the transport direction.
   The polarized light irradiation according to claim 1, wherein a shape in which the first light shielding portion and the second light shielding portion are aligned with the first side and the second side being substantially aligned is a substantially rectangular shape. apparatus.
3. The illuminance distribution of the first lamp in a plan view includes a third region substantially parallel along the longitudinal direction of the first lamp and a fourth region not substantially parallel along the longitudinal direction of the first lamp. And
   The illuminance distribution of the second lamp in a plan view includes a fifth region substantially parallel along the longitudinal direction of the second lamp and a sixth region not substantially parallel along the longitudinal direction of the first lamp. And
   In a region irradiated with light at substantially the same illuminance as the area directly below the first lamp, the end on the first end side of the first side is on the boundary between the third region and the fourth region,
   The end on the second end side of the second side is on the boundary between the fifth area and the sixth area in the area where light is irradiated at substantially the same illuminance as the area directly below the second lamp. The polarized light irradiation apparatus according to claim 2, characterized in that
4. When viewed from the transport direction, the illuminance distributions of the first lamp and the second lamp each have a substantially trapezoidal shape having a high central portion and a lower value toward the end,
   When the height of the upper base portion of the substantially trapezoidal shape is 100, a line which is substantially parallel to the bottom of the substantially trapezoidal shape and which exists at a height of approximately 90 to approximately 99, and a line showing the illuminance distribution The position in the orthogonal direction of the point where the two intersect with each other substantially coincides with the end on the first end side of the first side and the end on the second end side of the second side. The polarized light irradiation device described in.
5. A first aperture provided between the first lamp and the stage so as to cover an area irradiated with light from the first lamp;
   A second aperture provided between the second lamp and the stage so as to cover an area irradiated with light from the second lamp;
   Equipped with
   The first light shielding portion and the second light shielding portion have a dot pattern including a plurality of dots,
   The first aperture includes a substantially plate-like first light transmitting member, and the first light shielding portion formed on the first light transmitting member.
   The second aperture includes a substantially plate-like second light transmitting member, and the second light shielding portion formed on the second light transmitting member.
   In the first region, the number of dots per unit area increases as the first end is approached, and the number of dots per unit area decreases as the distance from the first end decreases. The number of said dots of
   In the second region, the number of dots per unit area increases as the second end is approached, and the number of dots per unit area decreases as the distance from the second end decreases. The polarized light irradiation device according to claim 1, wherein the number of the dots of the light emitting diode gradually changes.
6. When the distance between the first lamp and the object is about 150 mm to about 160 mm, the length of the first region is about 8% to about 15% of the length in the longitudinal direction of the first lamp,
   When the distance between the second lamp and the object is about 150 mm to about 160 mm, the length of the second region is about 8% to about 15% of the length of the second lamp in the longitudinal direction. The polarized light irradiation apparatus according to claim 1, 2 or 5, characterized in that
7. In plan view, the shape of the first light blocking portion is such that the second light blocking portion is rotated approximately 180 degrees around a second point at which the second side intersects with the central axis of the second lamp. The shape of the second light shielding portion is such that the first light shielding portion is rotated approximately 180 degrees around a first point where the first side intersects the central axis of the first lamp. It is a shape. The polarized light irradiation device according to any one of claims 2 to 4 characterized by things.
8. It has a moving part which moves a said 1st lamp | ramp or a said 2nd lamp | ramp in the direction substantially orthogonal to the said conveyance direction. The polarized light irradiation apparatus as described in any one of Claim 1 to 7 characterized by the above-mentioned.
   

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