WO2018223751A1 - 一种压电马达 - Google Patents
一种压电马达 Download PDFInfo
- Publication number
- WO2018223751A1 WO2018223751A1 PCT/CN2018/080534 CN2018080534W WO2018223751A1 WO 2018223751 A1 WO2018223751 A1 WO 2018223751A1 CN 2018080534 W CN2018080534 W CN 2018080534W WO 2018223751 A1 WO2018223751 A1 WO 2018223751A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- piezoelectric
- clamping
- piezoelectric ceramic
- driving foot
- motor
- Prior art date
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 64
- 230000036316 preload Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
Definitions
- the present invention relates to the field of driving components, and in particular to a piezoelectric motor.
- piezoelectric motor As a new type of driver, piezoelectric motor has attracted wide attention at home and abroad with its advantages of low speed and large torque, large static holding torque, fast response speed, small size and light weight, nanometer-scale resolution and no magnetic field interference. Applied in many fields.
- a piezoelectric motor can be classified into a linear piezoelectric motor and a rotary piezoelectric motor.
- the mover in the linear piezoelectric motor performs linear motion; the mover in the rotary piezoelectric motor performs rotational motion.
- the L1-B2 piezoelectric motor is a typical linear piezoelectric motor (see US Pat. No. 5,877,579).
- the vibration component of the motor is a rectangular piezoelectric ceramic.
- One side of the ceramic is a full electrode and the other side is a quarter electrode.
- the ceramic is polarized in the thickness direction.
- the motor operates in the first-order longitudinal vibration mode (L1) and the second-order bending vibration mode (B2).
- L1 and B2 are simultaneously applied to the opposite electrodes, an elliptical standing wave is generated in the middle portion of the end portion of the ceramic, and the foot is driven by the friction applied to the portion to drive the mover.
- the vibration is excited by the other pair of electrodes, the driving force is reversed and the mover moves in the other direction.
- This ceramic structure is simple and has a large thrust and has been used in industry.
- the object of the present invention is to provide a piezoelectric motor with simple structure, reasonable design and convenient use in view of the defects and deficiencies of the prior art, the overall structure is small and compact, the service life is long, the driving foot is short, the bonding is firm, and the clip is clamped.
- the holding device is simple and small in size.
- the technical solution adopted by the present invention comprises: a piezoelectric ceramic, a clamping device, and a motor housing; the piezoelectric ceramic is fixed in the motor housing by a clamping device; the piezoelectric ceramic is a rectangular piezoelectric Ceramic; one side of the piezoelectric ceramic is provided with four equally divided electrodes, and the other side is provided with a full electrode; the short side of the piezoelectric ceramic is provided with a columnar driving foot; the middle part of the short side end of the piezoelectric ceramic a slot corresponding to the column driving foot is provided; one side of the column driving foot is embedded in the slot; the clamping device is a U-shaped structure composed of a pre-tightening force applying member and two left and right clamping frames; one of them The outer side of the clamping frame is provided with a deformed spring piece; the clamping frame holds the two long sides of the piezoelectric ceramic, and the clamping position of the clamping frame is located at a portion where the piez
- the cylindrical driving foot is a cylindrical driving foot;
- the slot is a circular arc slot; a part of one side of the cylindrical driving foot is embedded in the circular arc slot;
- the cylindrical driving foot has two end faces and The upper and lower surfaces of the piezoelectric ceramic are substantially flush;
- the columnar driving foot is a cylindrical driving foot having an end face of three right-angled sides and an arc;
- the slot is a rectangular slot; a part of the three right-angle sides of the cylindrical driving foot is embedded in the slot.
- the cylindrical arc surface faces the bottom of the slot and is connected to the driven slider;
- the clamping device is a foldable unitary structure
- the contact portion of the inner wall of the motor housing and the clamping device is pasted with a sheet having a reduced coefficient of friction
- the number of the piezoelectric ceramics is a pair; the two piezoelectric ceramics are respectively disposed in two clamping devices, and the two clamping devices are arranged side by side in the motor housing; the presetting of the two clamping devices a preloading spring piece is disposed at an intermediate position of the tension applying member end; two ends of the preloading spring piece are respectively in contact with the preloading force members of the two clamping devices; and an eccentric pin is provided at an intermediate portion of the preloading spring piece ;
- the number of the piezoelectric ceramics is several pairs; the piezoelectric ceramics are respectively disposed in the respective clamping devices; the plurality of pairs of clamping devices are horizontally arranged side by side or stacked on top of each other in the motor housing; each pair of clamping devices
- the preloading force applying member ends are provided with a preloading spring piece and an eccentric pin.
- the utility model has the beneficial effects that the piezoelectric motor of the invention has the advantages of small and compact overall structure, long service life, short driving force, firm bonding, simple clamping device and small size, and
- the utility model has the advantages of simple structure, reasonable setting and low production cost.
- Figure 1 is a schematic view of the structure of the present invention
- FIG. 2 is a schematic view showing the installation of a piezoelectric ceramic
- FIG. 3 is a schematic structural view of a piezoelectric ceramic
- Figure 4 is a schematic structural view of a clamping device
- Fig. 5 is a schematic structural view of a motorized stage.
- the technical solution adopted in the present embodiment is that it comprises a piezoelectric ceramic 5, a clamping device 3, and a motor housing 4; the piezoelectric ceramic 5 is fixed to the motor housing 4 by a clamping device 3.
- the piezoelectric ceramic 5 is a rectangular piezoelectric ceramic; the piezoelectric ceramic 5 is provided with four equally divided electrodes 5-2 on one side and the entire electrode on the opposite side; the short side of the piezoelectric ceramic 5 a cylindrical driving foot 5-1 is provided; a middle portion of the short side end of the piezoelectric ceramic 5 is provided with a circular arc-shaped slot corresponding to the cylindrical driving foot; a side of the cylindrical driving foot 5-1 is embedded and Adhered in the circular arc-shaped groove, the opposite side is in contact with the driven linear slider 7-1; the two end faces of the cylindrical driving foot 5-1 and the upper and lower surfaces of the piezoelectric ceramic 5 are substantially flush;
- the clamping device 3 is a U-shaped structure composed of a pre-tightening
- the cylindrical driving foot 5-1 is made of wear-resistant material, the wear-resistant material may be ceramic or other hard alloy material; the driving foot may also be a cylindrical driving foot of other shapes;
- One of the clamping devices 3 is in contact with the inner wall of the motor housing 4, and the other clamping frame is in contact with the inner wall of the housing via the deformed spring piece 3-3; the deformed spring piece 3-3 is oriented toward the piezoelectric ceramic 5 After being deformed by extrusion, it is placed in the motor casing 4 so that the piezoelectric ceramic 5 does not shake left and right;
- the pre-tightening force applying member 3-4 of the clamping device 3 and the left and right clamping frames 3-1 can be formed as a unitary structure that can be bent with each other;
- the clamping device 3 is made of an insulating material such as plastic;
- a sheet 6 having a reduced friction coefficient may be attached to the contact portion of the inner wall of the motor housing 4 and the holding device 3, such as by using plastic tape. Grease the inner wall of the motor housing or the inner wall to reduce the friction at the contact;
- the number of the piezoelectric ceramics 5 may be a pair, and the two piezoelectric ceramics 5 are respectively disposed in the two clamping devices 3, and the two clamping devices 3 are horizontally arranged side by side in the motor housing 4; two clamping devices
- the intermediate position of the end of the preloading force applying member 3-4 is provided with a preloading spring piece 2; the two ends of the preloading force spring piece 2 are respectively in contact with the preloading force members 3-4 of the two clamping devices;
- the driving foot 5-1 must apply a certain pressure (preloading force) to the driven linear slider 7-1;
- the intermediate portion of the preloading spring piece 2 is provided with the eccentric pin 1; when the eccentric pin 1 rotates
- the preload force spring piece 2 is deformed to produce a preload force required for the piezoelectric motor 8; due to the eccentric pin 1 in the intermediate position of the preload force spring piece 2, its preload force on the two piezoelectric ceramics 5 Approximately equal.
- the number of piezoelectric ceramics 5 is more than one pair, and the piezoelectric ceramics 5 are respectively disposed in the respective clamping devices 3; the pairs of clamping devices 3 are horizontally arranged side by side or stacked on top of each other in the motor housing. 4; each pre-tensioning force applying member end of the pair of holding devices 3 shares a preloading spring piece 2 to apply a preloading force.
- the piezoelectric motor 8 and the slide table 7 constitute an electric displacement stage; the slide table 7 is provided with a linear slider 7-1; and the side of the linear slider 7-1 is pasted with a wear-resistant drive piece 7-2.
- the cylindrical driving foot of the piezoelectric motor 8 is in contact with the driving piece 7-2, and the linear slider 7-1 is driven to move linearly; the piezoelectric motor 8 and the sliding table 7 are mounted on the same base 9.
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
Claims (7)
- 一种压电马达,其特征在于它包含压电陶瓷、夹持装置、马达壳体;压电陶瓷通过夹持装置固定在马达壳体内;所述的压电陶瓷为长方形压电陶瓷;压电陶瓷的一面设有四个等分的电极,相对的另一面设有全电极;压电陶瓷的短边端部设有柱状驱动足;压电陶瓷的短边端部的中间部位设有与柱状驱动足对应的开槽;柱状驱动足的一侧嵌入开槽内;所述的夹持装置为由预紧力施加部件和左右两个夹持架组成的U形结构;其中一个夹持架的外侧设有变形弹簧片;夹持架夹持住压电陶瓷的两个长边,夹持架的夹持位置位于压电陶瓷被驱动时变形较小或零变形的部位。
- 根据权利要求1所述的一种压电马达,其特征在于所述的柱状驱动足为圆柱形驱动足;开槽为圆弧形开槽;圆柱形驱动足的一侧的一部分嵌入圆弧形开槽内;圆柱形驱动足的两个端面和压电陶瓷上下表面基本平齐。
- 根据权利要求1所述的一种压电马达,其特征在于所述的柱状驱动足为端面为3个直角边和一圆弧构成的柱形驱动足;开槽为长方形开槽;柱形驱动足的3个直角边一侧的一部分嵌入槽内;柱形圆弧面正对开槽底部。
- 根据权利要求1所述的一种压电马达,其特征在于所述的夹持装置为可折弯的一体式结构。
- 根据权利要求1所述的一种压电马达,其特征在于所述的马达壳体的内壁与夹持装置的接触部位粘贴有降低摩擦系数的薄片。
- 根据权利要求1所述的一种压电马达,其特征在于所述的压电陶瓷的数量为一对;两个压电陶瓷分别设在两个夹持装置内,两个夹持装置并排水平排列在马达壳体内;两个夹持装置的预紧力施加部件端的中间位置设有预紧力弹簧片;预紧力弹簧片的两端分别和两个夹持装置的施加预紧力部件接触;预紧力弹簧片的中间部位设有偏心销钉。
- 根据权利要求1或5所述的一种压电马达,其特征在于所述的压电陶瓷的数量为若干对;压电陶瓷分别设在相应的夹持装置内;若干对夹持装置水平并排或上下堆叠地设置在马达壳体内;每对夹持装置的预紧力施加部件端均设有一个预紧力弹簧片和偏心销钉。
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CN201710416239.0A CN109004858A (zh) | 2017-06-06 | 2017-06-06 | 一种压电马达 |
CN201710416239.0 | 2017-06-06 |
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CN112165274B (zh) * | 2020-09-24 | 2021-11-30 | 南京工程学院 | 基于同向偏心式定子的纵弯耦合型直线超声波电机 |
Citations (6)
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JPH11346486A (ja) * | 1998-06-01 | 1999-12-14 | Seiko Instruments Inc | 超音波モータ及び超音波モータ付電子機器 |
DE19648726C2 (de) * | 1996-11-12 | 2003-03-27 | Piezosystem Jena Gmbh | Piezoelektrisches Antriebselement |
CN103151953A (zh) * | 2011-12-06 | 2013-06-12 | 精工爱普生株式会社 | 致动器、机械手、机器人、电子部件输送装置及检查装置 |
CN104702145A (zh) * | 2013-12-06 | 2015-06-10 | 精工爱普生株式会社 | 压电马达、机器人手、机器人、手指辅助装置 |
KR20150114685A (ko) * | 2014-04-02 | 2015-10-13 | 이인호 | 피에조 액추에이터 |
JP2015186329A (ja) * | 2014-03-24 | 2015-10-22 | セイコーエプソン株式会社 | 圧電モーター |
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CN102664552A (zh) * | 2012-05-10 | 2012-09-12 | 南京航空航天大学 | 一种双驱动足矩形压电板式直线超声电机 |
CN203387431U (zh) * | 2013-08-14 | 2014-01-08 | 金陵科技学院 | 双模态并减摩驱动的单驱动足板形压电电机 |
CN104124891B (zh) * | 2014-07-25 | 2016-12-07 | 北京派和科技股份有限公司 | 压电振子及包括该压电振子的精密位移平台 |
CN105071686B (zh) * | 2015-07-17 | 2017-08-04 | 南京航空航天大学 | 一种对称式双足驱动非共振压电直线电机 |
CN105236349B (zh) * | 2015-10-20 | 2017-10-17 | 天津大学 | 压电驱动式高精度引线线夹 |
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2017
- 2017-06-06 CN CN201710416239.0A patent/CN109004858A/zh active Pending
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- 2018-03-26 WO PCT/CN2018/080534 patent/WO2018223751A1/zh active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19648726C2 (de) * | 1996-11-12 | 2003-03-27 | Piezosystem Jena Gmbh | Piezoelektrisches Antriebselement |
JPH11346486A (ja) * | 1998-06-01 | 1999-12-14 | Seiko Instruments Inc | 超音波モータ及び超音波モータ付電子機器 |
CN103151953A (zh) * | 2011-12-06 | 2013-06-12 | 精工爱普生株式会社 | 致动器、机械手、机器人、电子部件输送装置及检查装置 |
CN104702145A (zh) * | 2013-12-06 | 2015-06-10 | 精工爱普生株式会社 | 压电马达、机器人手、机器人、手指辅助装置 |
JP2015186329A (ja) * | 2014-03-24 | 2015-10-22 | セイコーエプソン株式会社 | 圧電モーター |
KR20150114685A (ko) * | 2014-04-02 | 2015-10-13 | 이인호 | 피에조 액추에이터 |
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