WO2018223439A1 - Vacuum sintering furnace enabling continuous production - Google Patents
Vacuum sintering furnace enabling continuous production Download PDFInfo
- Publication number
- WO2018223439A1 WO2018223439A1 PCT/CN2017/090430 CN2017090430W WO2018223439A1 WO 2018223439 A1 WO2018223439 A1 WO 2018223439A1 CN 2017090430 W CN2017090430 W CN 2017090430W WO 2018223439 A1 WO2018223439 A1 WO 2018223439A1
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- WIPO (PCT)
- Prior art keywords
- return line
- hatch
- transfer device
- chamber
- vacuum sintering
- Prior art date
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- 238000005245 sintering Methods 0.000 title claims abstract description 33
- 238000010924 continuous production Methods 0.000 title claims abstract description 16
- 238000001816 cooling Methods 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims description 92
- 239000000969 carrier Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 abstract description 14
- 238000000034 method Methods 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000011031 large-scale manufacturing process Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 4
- 230000006872 improvement Effects 0.000 description 9
- 239000000243 solution Substances 0.000 description 8
- 239000003570 air Substances 0.000 description 6
- 239000012080 ambient air Substances 0.000 description 4
- 238000001746 injection moulding Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000004663 powder metallurgy Methods 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B21/00—Open or uncovered sintering apparatus; Other heat-treatment apparatus of like construction
Definitions
- the invention relates to the field of powder metallurgy and metal/nonmetal heat treatment, in particular to a sintering device for metal injection molding, in particular to a sintering furnace.
- Metal Injection Molding is a new powder metallurgy forming technology that has been extended from the plastic injection molding industry.
- the basic process steps are: first select the metal powder and binder that meet the MIM requirements, and then adopt the appropriate method at a certain temperature.
- the powder and the binder are mixed into a uniform feed, which is granulated and then injected into a mold by an injection molding machine, and the obtained shaped preform is degreased and then sintered at a high temperature to become a final product.
- MIM high-temperature sintering equipment mainly includes batch type sintering furnace, and batch type sintering furnace is most commonly used as vacuum sintering furnace.
- the vacuum sintering furnace is operated, the workpiece to be sintered is sent to the furnace body by manual or robotic loading, and each time the furnace is opened, the following processes are required: charging ⁇ closing the furnace door ⁇ vacuum ⁇ heating and heating ⁇ Insulation ⁇ cooling ⁇ opening the furnace door ⁇ discharging, which leads to the low productivity of the existing vacuum sintering furnace, which cannot meet the requirements of continuous and large-scale production.
- the present invention provides a vacuum sintering furnace capable of achieving continuous production, so as to solve the problem that the existing vacuum sintering furnace has low productivity and cannot meet the requirements of continuity and large-scale production.
- a vacuum sintering furnace capable of continuous production comprising a furnace body, a feed replacement tank and a discharge replacement tank, wherein the feed replacement tank comprises a first hatch leading to the outside and a second hatch leading to the furnace body,
- the material replacement chamber includes a third hatch leading to the outside and a fourth hatch leading to the furnace body, and the first hatch, the second hatch door, the third hatch door and the fourth hatch door can be independently opened and closed, wherein A hatch and/or a second hatch are simultaneously closed with the third hatch and/or the fourth hatch to ensure that the internal space of the furnace body maintains a vacuum during operation.
- the first material transfer device for feeding the material from the feed replacement tank to the furnace body is further included.
- a second material transfer device that pushes the material to move inside the furnace body is also included.
- the third material transfer device for feeding the material from the furnace body to the discharge replacement tank is further included.
- the fourth material transfer device for feeding the material from the discharge replacement tank is further included.
- a return line connecting the feed replacement chamber and the discharge replacement chamber is also included.
- the return line includes a first return line connected to the feed replacement chamber, a second return line connected to the discharge replacement chamber, and a first return line and a second return line connected The third return line.
- the method further comprises: transporting the material from the third return line to the fifth material transfer device of the first return line, and transporting the material from the first return line to the sixth material of the feed replacement tank.
- the transfer device transports the material from the second return line to the seventh material transfer device of the third return line, and the eighth material transfer device that pushes the material to move on the third return line.
- the furnace body is provided with a heating zone and a cooling zone in the direction of the feed replacement tank to the discharge replacement tank.
- the furnace body can be continuously maintained in the heating and vacuum state, eliminating the process of frequent vacuuming, heating, heat preservation and temperature reduction inside the furnace body, thereby greatly improving the production efficiency and being more suitable for large-scale production.
- a plurality of material transfer devices are also provided to achieve an automated supply of materials.
- a return line is also provided to achieve reflow of the carrier, further increasing production efficiency.
- Figure 1 is a front elevational view of a first embodiment of the present invention
- Figure 2 is a perspective view of one direction of the feed replacement chamber of the present invention.
- Figure 3 is a perspective view showing the other direction of the feed replacement tank of the present invention.
- Figure 4 is a front elevational view of a second embodiment of the present invention.
- the vacuum sintering furnace comprises a furnace body 100, a feed replacement tank 200 and a discharge replacement tank 300, wherein the furnace body 100 serves as a main place for material sintering, and the feed replacement tank 200 and the discharge replacement tank 300 are respectively used for Before the material is fed and before the discharge, the furnace 100 can be used for continuous production of the vacuum sintering furnace.
- the furnace body 100 can be a well-known vacuum sintering furnace body structure, which is not limited in the present invention.
- the furnace body 100 is provided with a heating zone and a cooling zone in the direction of the feed replacement compartment 200 to the discharge replacement compartment 300, so that the material can be heated and then cooled.
- the heating zone preferably has a plurality of sections of different temperatures
- the furnace body of the cooling zone is preferably provided with a water-cooled interlayer to achieve rapid heat dissipation through the water-cooled interlayer.
- the feed replacement chamber includes a cabin 210 having a first hatch 220 leading to the outside and a second hatch 230 leading to the furnace body 100, the first hatch 220 and the second
- the hatch 230 can Independently opening and closing, and after the first hatch 220 and the second hatch 230 are completely closed, a sealed space is formed in the cabin 210, and a vacuum environment can be formed in the cabin 210 in conjunction with the vacuuming device.
- the cabin 210 is further provided with an intake valve.
- the door can be any known door structure.
- a hanging door structure is preferably used.
- the bracket 231 is fixed on the cabin 210.
- the straight guide rail 232 is slidably connected to the guide rail 232, and the top end of the door leaf 233 is fixed to the drive shaft of the cylinder 234.
- the opening on the cabin 210 is blocked; when the door leaf 233
- the opening is opened, and the internal space of the cabin 210 communicates with the internal space of the furnace body 100.
- the present invention preferably also includes a first material transfer device 410 for feeding material from the feed displacement chamber 200 to the furnace body 100.
- the first material transfer device 410 in this embodiment preferably adopts a push rod mechanism, as shown in FIG. 3, and includes a power device 411 fixedly connected to the cabin 210, such as a cylinder, a motor, etc., and a second door 230.
- the push rod 412, the push rod 412 can be moved toward the second hatch 230 by the power unit 411, and can be reset by the spring 413.
- the inside of the cabin 210 is further provided with a slide rail including a slide rail 211 facing the second hatch 230 and a slide rail facing the first hatch 220 (not shown) Out).
- the material is preferably placed on the carrier 700, the carrier can be moved relative to the slide rail, and the stroke of the push rod 412 should be greater than the length of the cabin 210.
- the structure of the discharge replacement tank 300 is similar to that of the feed replacement tank 200, that is, includes a tank 310 having a third hatch 320 leading to the outside and a passage to the furnace body 100.
- the material discharge device 300 is also provided with a material transfer device, that is, a fourth material transfer device 440, with the difference that the fourth material transfer device 440 is used to feed the material from the discharge replacement chamber 300.
- the furnace body 100 is provided with a second material transfer device 420 for pushing the material to move in the furnace body 100, and the material is sent from the furnace body 100 to the discharge replacement chamber 300.
- the structure of the third material transfer device 430, the second material transfer device 420, and the third material transfer device 430 is similar to that of the first material transfer device 410, and will not be described herein.
- the first hatch 220 and/or the second hatch 230 should be in a closed state with the third hatch 320 and/or the fourth hatch 330, ie, at least one of the first hatch 220 and the second hatch 230, At least one of the third hatch 320 and the fourth hatch 330 should be simultaneously closed to ensure that the furnace body 100 is maintained in a vacuum during operation.
- the usage method of the present invention is:
- each door is closed, open the furnace vacuum pump 510 to vacuum to the set value (the furnace vacuum pump is always turned on during the operation of the equipment to maintain the set vacuum), and turn on the furnace heating device to the set temperature.
- the first hatch 220 and the second hatch 230 of the feed replacement tank 200 are in a closed state at this time, and it is checked whether the air pressure value in the cabin 210 is consistent with the ambient air pressure, and if not, the air intake on the cabin 210 is opened.
- the valve keeps the pressure constant.
- the first hatch 220 is closed, and the inlet vacuum pump 520 is activated to evacuate the cabin 210 to a set value.
- the second hatch 230 is opened (the first hatch 220 remains closed at this time), and the first material transfer is started.
- the device 410 pushes the carrier within the pod 210 to a loading position within the furnace body 100.
- the first material transfer device 410 is retracted and reset, the second door 230 is closed, nitrogen gas is introduced into the cabin 210 or the intake valve is opened, so that the air pressure in the cabin 210 and the external environment are Consistent.
- the second material transfer device 420 is reset; at this time, it is checked whether the discharge replacement chamber 300 is empty, and if it is not empty, it is waiting for discharge replacement. If the discharge replacement chamber 300 is empty, it is checked whether the vacuum degree reaches the set value. If the set value is not reached, the outlet vacuum pump 530 is started to evacuate to the set value, for example, the discharge replacement chamber 300 is empty. And the set vacuum is reached, the outlet vacuum pump 530 is closed and the fourth hatch 330 is opened (at this time the third hatch 320 remains closed).
- the third material transfer device 430 initiates pushing the carrier at the end of the furnace body 100 to the discharge replacement chamber 300.
- the third hatch 320 is opened (the fourth hatch 330 remains closed), and the fourth material transfer device 440 is started after the third hatch 320 is opened.
- the carrier is delivered from the discharge replacement compartment 300.
- the above steps 2 to 14 can be repeated to achieve continuous sintering of the material. Since the furnace body can be continuously maintained in a heating and vacuum state, the process of frequently evacuating, heating, holding, and cooling the inside of the furnace body is eliminated, thereby The earth enhances production efficiency and is more suitable for large-scale production. At the same time, the vacuum sintering furnace does not need to frequently raise and lower temperature, thereby saving energy and prolonging the service life of the vacuum furnace; in addition, heat conduction can only be achieved by radiation and heat conduction during vacuum sintering.
- the internal temperature rise rate is slower, and the existing vacuum sintering furnace has to increase the furnace volume in order to pursue greater production capacity, so the temperature uniformity of the heating temperature zone in the furnace cavity is poor (usually the temperature difference is about ⁇ 10 °C), thus affecting Sintering of the material.
- a return line is added on the basis of the first embodiment, and the return line is connected to the feed replacement chamber 200 and the discharge replacement chamber 300, so that the return of the carrier can be realized, thereby further improving the production efficiency.
- the return line includes a first return line 610 connected to the feed replacement chamber 200, a second return line 620 connected to the discharge replacement chamber 300, and a first return line 610 and a second return line 620.
- the third return line 630 is added on the basis of the first embodiment, and the return line is connected to the feed replacement chamber 200 and the discharge replacement chamber 300, so that the return of the carrier can be realized, thereby further improving the production efficiency.
- the return line includes a first return line 610 connected to the feed replacement chamber 200, a second return line 620 connected to the discharge replacement chamber 300, and a first return line 610 and a second return line 620.
- the third return line 630 is provided to the return line 630.
- the embodiment is further provided with a fifth material transfer device 450 for transporting the material from the third return line 630 to the first return line 610, and the material is returned by the first return.
- Line 610 is transported to sixth material transfer device 460 of feed replacement chamber 200, which carries material from second return line 620 to seventh material transfer unit 470 of third return line 630, and pushes the material at a third reflow.
- the eighth material transfer device 480, the fifth material transfer device 450, the sixth material transfer device 460, the seventh material transfer device 470, and the eighth material transfer device 480, which are moved on the line 630, have a structure similar to that of the first material transfer device 410. Do not repeat here.
- the embodiment further adds a reflow step to the steps of the first embodiment, including:
- the fourth material transfer device 440 transports the carrier from the discharge replacement chamber 300 to the second return line 620.
- the seventh material transfer device 470 resets the carrier after being transported by the second return line 620 to the third return line 630.
- the eighth material transfer device 480 pushes the carrier to move on the third return line 630, and moves to the set position and then resets.
- the fifth material transfer device 450 resets the carrier after being transported by the third return line 630 to the first return line 610.
- the sixth material transfer device 460 resets the carrier after being transported by the first return line 610 to the feed replacement chamber 200.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Powder Metallurgy (AREA)
- Tunnel Furnaces (AREA)
Abstract
A vacuum sintering furnace enabling continuous production, the furnace comprising a main body (100), a feed replacement chamber (200), and a discharge replacement chamber (300). The feed replacement chamber comprises a first chamber door (220) open to an ambient environment and a second chamber door (230) open to the main body. The discharge replacement chamber comprises a third chamber door (320) open to the ambient environment and a fourth chamber door (330) open to the main body. The first, second, third, an fourth chamber doors can be opened or closed independently. The first and/or second chamber doors and the third and/or fourth chamber doors are closed at the same time to ensure that an internal space of the main body is kept in a vacuum state during operation. The vacuum sintering furnace enables the main body to perform continuous heating and remain in a vacuum state, thus eliminating the process in which air evacuation, heating, temperature holding, and cooling need to be frequently performed, and improving production efficiency to facilitate large-scale production.
Description
技术领域Technical field
本发明涉及粉末冶金及金属/非金属热处理领域,尤其是涉及一种用于金属注射成型的烧结设备,具体是涉及一种烧结炉。The invention relates to the field of powder metallurgy and metal/nonmetal heat treatment, in particular to a sintering device for metal injection molding, in particular to a sintering furnace.
背景技术Background technique
金属注射成型(Metal Injection
Molding,简称MIM)是一种从塑料注射成型行业中引申出来的新型粉末冶金成型技术,基本工艺步骤是:首先选取符合MIM要求的金属粉末和粘结剂,然后在一定温度下采用适当的方法将粉末和粘结剂混合成均匀的喂料,经造粒后再通过注塑机注射到模具里成型,获得的成型坯经过脱脂处理后再高温烧结致密化成为最终成品。Metal Injection
Molding (MIM) is a new powder metallurgy forming technology that has been extended from the plastic injection molding industry. The basic process steps are: first select the metal powder and binder that meet the MIM requirements, and then adopt the appropriate method at a certain temperature. The powder and the binder are mixed into a uniform feed, which is granulated and then injected into a mold by an injection molding machine, and the obtained shaped preform is degreased and then sintered at a high temperature to become a final product.
目前MIM高温烧结设备主要包括批次型烧结炉,而批次型烧结炉又以真空烧结炉最为普遍。真空烧结炉每次运行需通过人工或以机械手装载的方式将待烧结的工件送至炉体中,且每次开炉都需要经历以下过程:装料→关闭炉门→抽真空→加热升温→保温→降温→开启炉门→出料,这导致现有真空烧结炉的产能较低,无法满足连续性、大规模生产的需求。At present, MIM high-temperature sintering equipment mainly includes batch type sintering furnace, and batch type sintering furnace is most commonly used as vacuum sintering furnace. Each time the vacuum sintering furnace is operated, the workpiece to be sintered is sent to the furnace body by manual or robotic loading, and each time the furnace is opened, the following processes are required: charging→closing the furnace door→vacuum→heating and heating→ Insulation → cooling → opening the furnace door → discharging, which leads to the low productivity of the existing vacuum sintering furnace, which cannot meet the requirements of continuous and large-scale production.
发明内容Summary of the invention
为了克服现有技术的不足,本发明提供一种可实现连续生产的真空烧结炉,以解决现有真空烧结炉的产能较低,无法满足连续性、大规模生产需求的问题。In order to overcome the deficiencies of the prior art, the present invention provides a vacuum sintering furnace capable of achieving continuous production, so as to solve the problem that the existing vacuum sintering furnace has low productivity and cannot meet the requirements of continuity and large-scale production.
本发明解决其技术问题所采用的技术方案是:The technical solution adopted by the present invention to solve the technical problem thereof is:
一种可实现连续生产的真空烧结炉,包括炉体、进料置换舱与出料置换舱,进料置换舱包括通向外界的第一舱门与通向炉体的第二舱门,出料置换舱包括通向外界的第三舱门与通向炉体的第四舱门,第一舱门、第二舱门、第三舱门与第四舱门可独立启闭,其中,第一舱门和/或第二舱门与第三舱门和/或第四舱门同时处于关闭状态,以保证炉体的内部空间在工作过程中维持真空状态。A vacuum sintering furnace capable of continuous production, comprising a furnace body, a feed replacement tank and a discharge replacement tank, wherein the feed replacement tank comprises a first hatch leading to the outside and a second hatch leading to the furnace body, The material replacement chamber includes a third hatch leading to the outside and a fourth hatch leading to the furnace body, and the first hatch, the second hatch door, the third hatch door and the fourth hatch door can be independently opened and closed, wherein A hatch and/or a second hatch are simultaneously closed with the third hatch and/or the fourth hatch to ensure that the internal space of the furnace body maintains a vacuum during operation.
作为上述方案的进一步改进方式,还包括将物料由进料置换舱送入炉体的第一物料移送装置。As a further improvement of the above scheme, the first material transfer device for feeding the material from the feed replacement tank to the furnace body is further included.
作为上述方案的进一步改进方式,还包括推动物料在炉体内移动的第二物料移送装置。As a further improvement of the above solution, a second material transfer device that pushes the material to move inside the furnace body is also included.
作为上述方案的进一步改进方式,还包括将物料由炉体送入出料置换舱的第三物料移送装置。As a further improvement of the above solution, the third material transfer device for feeding the material from the furnace body to the discharge replacement tank is further included.
作为上述方案的进一步改进方式,还包括将物料从出料置换舱内送出的第四物料移送装置。As a further improvement of the above solution, the fourth material transfer device for feeding the material from the discharge replacement tank is further included.
作为上述方案的进一步改进方式,还包括连接进料置换舱与出料置换舱的回流线。As a further improvement of the above solution, a return line connecting the feed replacement chamber and the discharge replacement chamber is also included.
作为上述方案的进一步改进方式,回流线包括连接进料置换舱的第一回流线,连接出料置换舱的第二回流线,以及连接第一回流线、第二回流线的第三回流线。As a further improvement of the above solution, the return line includes a first return line connected to the feed replacement chamber, a second return line connected to the discharge replacement chamber, and a first return line and a second return line connected The third return line.
作为上述方案的进一步改进方式,还包括将物料由第三回流线运送至第一回流线的第五物料移送装置,将物料由第一回流线运送至进料置换舱的第六物料移送装置,将物料由第二回流线运送至第三回流线的第七物料移送装置,以及推动物料在第三回流线上移动的第八物料移送装置。As a further improvement of the above solution, the method further comprises: transporting the material from the third return line to the fifth material transfer device of the first return line, and transporting the material from the first return line to the sixth material of the feed replacement tank. The transfer device transports the material from the second return line to the seventh material transfer device of the third return line, and the eighth material transfer device that pushes the material to move on the third return line.
作为上述方案的进一步改进方式,还包括依次排列在回流线上并可相对回流线运动的若干载具。As a further improvement of the above scheme, there are also several carriers which are sequentially arranged on the return line and movable relative to the return line.
作为上述方案的进一步改进方式,炉体沿进料置换舱至出料置换舱的方向依次设有加热区与冷却区。As a further improvement of the above solution, the furnace body is provided with a heating zone and a cooling zone in the direction of the feed replacement tank to the discharge replacement tank.
本发明的有益效果是:The beneficial effects of the invention are:
炉体可以持续维持在加热与真空状态,省去了炉体内部频繁地抽真空、加热、保温、降温的过程,从而可以极大地提升了生产效率,更适合于规模化生产。The furnace body can be continuously maintained in the heating and vacuum state, eliminating the process of frequent vacuuming, heating, heat preservation and temperature reduction inside the furnace body, thereby greatly improving the production efficiency and being more suitable for large-scale production.
在本发明的优选实施例中,还设置有若干的物料移送装置以实现物料的自动化供应。In a preferred embodiment of the invention, a plurality of material transfer devices are also provided to achieve an automated supply of materials.
在本发明的优选实施例中,还设置有回流线以实现载具的回流,进一步提升生产效率。In a preferred embodiment of the invention, a return line is also provided to achieve reflow of the carrier, further increasing production efficiency.
附图说明DRAWINGS
下面结合附图和实施例对本发明进一步说明。The invention will now be further described with reference to the drawings and embodiments.
图1是本发明第一个实施例的正视图;Figure 1 is a front elevational view of a first embodiment of the present invention;
图2是本发明进料置换舱一个方向上的立体示意图;Figure 2 is a perspective view of one direction of the feed replacement chamber of the present invention;
图3是本发明进料置换舱另一个方向上的立体示意图;Figure 3 is a perspective view showing the other direction of the feed replacement tank of the present invention;
图4是本发明第二个实施例的正视图。Figure 4 is a front elevational view of a second embodiment of the present invention.
具体实施方式detailed description
以下将结合实施例和附图对本发明的构思、具体结构及产生的技术效果进行清楚、完整的描述,以充分地理解本发明的目的、方案和效果。需要说明的是,在不冲突的情况下,本申请中的实施例及实施例中的特征可以相互组合。The concept, the specific structure and the technical effects of the present invention will be clearly and completely described in conjunction with the embodiments and the accompanying drawings. It should be noted that the embodiments in the present application and the features in the embodiments may be combined with each other without conflict.
需要说明的是,如无特殊说明,当某一特征被称为“固定”、“连接”在另一个特征,它可以直接固定、连接在另一个特征上,也可以间接地固定、连接在另一个特征上。此外,本发明中所使用的上、下、左、右、前、后等描述仅仅是相对于附图中本发明各组成部分的相互位置关系来说的。It should be noted that, unless otherwise stated, when a feature is referred to as “fixed” or “connected” in another feature, it may be directly fixed, connected to another feature, or indirectly fixed and connected to another feature. A feature. Further, the descriptions of the upper, lower, left, right, front, rear, and the like used in the present invention are merely relative to the mutual positional relationship of the respective components of the present invention in the drawings.
此外,除非另有定义,本文所使用的所有的技术和科学术语与本技术领域的技术人员通常理解的含义相同。本文说明书中所使用的术语只是为了描述具体的实施例,而不是为了限制本发明。本文所使用的术语“及/或”包括一个或多个相关的所列项目的任意的组合。Moreover, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art, unless otherwise defined. The terminology used in the description herein is for the purpose of description The term "and/or" used herein includes any combination of one or more of the associated listed items.
参照图1,示出了本发明第一个实施例的正视图。如图所示,真空烧结炉包括炉体100、进料置换舱200与出料置换舱300,其中炉体100作为物料烧结的主要场所,进料置换舱200与出料置换舱300分别用于物料进料之前与出料之前的缓存,二者配合炉体100可以实现真空烧结炉的连续生产。Referring to Figure 1, a front view of a first embodiment of the present invention is shown. As shown in the figure, the vacuum sintering furnace comprises a furnace body 100, a feed replacement tank 200 and a discharge replacement tank 300, wherein the furnace body 100 serves as a main place for material sintering, and the feed replacement tank 200 and the discharge replacement tank 300 are respectively used for Before the material is fed and before the discharge, the furnace 100 can be used for continuous production of the vacuum sintering furnace.
炉体100可以采用公知的真空烧结炉炉体结构,本发明对此不做限定。优选的,炉体100沿进料置换舱200至出料置换舱300的方向设有加热区与冷却区,从而可以实现物料先加热后冷却的操作。进一步的,加热区优选具有若干个不同温度的区间,冷却区的炉体优选设有水冷夹层,通过水冷夹层实现快速散热。The furnace body 100 can be a well-known vacuum sintering furnace body structure, which is not limited in the present invention. Preferably, the furnace body 100 is provided with a heating zone and a cooling zone in the direction of the feed replacement compartment 200 to the discharge replacement compartment 300, so that the material can be heated and then cooled. Further, the heating zone preferably has a plurality of sections of different temperatures, and the furnace body of the cooling zone is preferably provided with a water-cooled interlayer to achieve rapid heat dissipation through the water-cooled interlayer.
具体的,参照图2、图3,分别示出了本发明进料置换舱不同方向上的立体示意图,其中第一舱门处于关闭状态,第二舱门处于开启状态。如图所示,进料置换舱包括舱体210,舱体210上设有通向外界的第一舱门220与通向炉体100的第二舱门230,第一舱门220与第二舱门230可以
独立启闭,且在第一舱门220与第二舱门230完全封闭后,舱体210内将形成一密封空间,配合抽真空装置便可以在舱体210内形成真空环境。Specifically, referring to FIG. 2 and FIG. 3, respectively, three-dimensional schematic diagrams of different directions of the feed replacement tank of the present invention are shown, wherein the first hatch is in a closed state and the second hatch is in an open state. As shown, the feed replacement chamber includes a cabin 210 having a first hatch 220 leading to the outside and a second hatch 230 leading to the furnace body 100, the first hatch 220 and the second The hatch 230 can
Independently opening and closing, and after the first hatch 220 and the second hatch 230 are completely closed, a sealed space is formed in the cabin 210, and a vacuum environment can be formed in the cabin 210 in conjunction with the vacuuming device.
优选的,舱体210上还设有进气阀。Preferably, the cabin 210 is further provided with an intake valve.
舱门可以采用公知的任何舱门结构,本实施例中优选采用吊门结构,以第二舱门230为例,其包括固定在舱体210上的支架231,支架231的两侧设有竖直的导轨232,导轨232上滑动连接有门扇233,门扇233的顶端与气缸234的驱动轴固接,当门扇233运动至支架231的下端时,舱体210上的开口被遮挡;当门扇233如图中所示运动至支架231的上端时,开口开启,舱体210的内部空间与炉体100的内部空间连通。The door can be any known door structure. In this embodiment, a hanging door structure is preferably used. Taking the second door 230 as an example, the bracket 231 is fixed on the cabin 210. The straight guide rail 232 is slidably connected to the guide rail 232, and the top end of the door leaf 233 is fixed to the drive shaft of the cylinder 234. When the door leaf 233 is moved to the lower end of the bracket 231, the opening on the cabin 210 is blocked; when the door leaf 233 When moving to the upper end of the bracket 231 as shown in the figure, the opening is opened, and the internal space of the cabin 210 communicates with the internal space of the furnace body 100.
本发明优选还包括将物料由进料置换舱200送入炉体100的第一物料移送装置410。本实施例中的第一物料移送装置410优选采用推杆机构,具体如图3所示,包括固定连接在舱体210上的动力装置411如气缸、电机等,以及正对第二舱门230的推杆412,推杆412可在动力装置411的驱动下朝第二舱门230运动,并可在弹簧413的驱动下复位。The present invention preferably also includes a first material transfer device 410 for feeding material from the feed displacement chamber 200 to the furnace body 100. The first material transfer device 410 in this embodiment preferably adopts a push rod mechanism, as shown in FIG. 3, and includes a power device 411 fixedly connected to the cabin 210, such as a cylinder, a motor, etc., and a second door 230. The push rod 412, the push rod 412 can be moved toward the second hatch 230 by the power unit 411, and can be reset by the spring 413.
对应上述推杆机构,参照图2,舱体210的内部还设有滑轨,滑轨包括正对第二舱门230的滑轨211,以及正对第一舱门220的滑轨(未示出)。物料优选放置在载具700上,载具可以相对滑轨移动,推杆412的行程应当大于舱体210的长度。Corresponding to the above-mentioned push rod mechanism, referring to FIG. 2, the inside of the cabin 210 is further provided with a slide rail including a slide rail 211 facing the second hatch 230 and a slide rail facing the first hatch 220 (not shown) Out). The material is preferably placed on the carrier 700, the carrier can be moved relative to the slide rail, and the stroke of the push rod 412 should be greater than the length of the cabin 210.
参照图1,出料置换舱300的结构与进料置换舱200的主体结构类似,即包括舱体310,舱体310上设有通向外界的第三舱门320与通向炉体100的第四舱门330。出料置换舱300上同样设有物料移送装置,即第四物料移送装置440,区别在于第四物料移送装置440用于将物料从出料置换舱300内送出。Referring to Fig. 1, the structure of the discharge replacement tank 300 is similar to that of the feed replacement tank 200, that is, includes a tank 310 having a third hatch 320 leading to the outside and a passage to the furnace body 100. The fourth hatch 330. The material discharge device 300 is also provided with a material transfer device, that is, a fourth material transfer device 440, with the difference that the fourth material transfer device 440 is used to feed the material from the discharge replacement chamber 300.
为了实现物料在炉体100内的移动,炉体100上设有还设有推动物料在炉体100内移动的第二物料移送装置420,以及将物料由炉体100送入出料置换舱300的第三物料移送装置430,第二物料移送装置420、第三物料移送装置430的结构与第一物料移送装置410类似,在此不做累述。In order to realize the movement of the material in the furnace body 100, the furnace body 100 is provided with a second material transfer device 420 for pushing the material to move in the furnace body 100, and the material is sent from the furnace body 100 to the discharge replacement chamber 300. The structure of the third material transfer device 430, the second material transfer device 420, and the third material transfer device 430 is similar to that of the first material transfer device 410, and will not be described herein.
第一舱门220和/或第二舱门230应当与第三舱门320和/或第四舱门330同时处于关闭状态,即第一舱门220、第二舱门230中的至少一个,与第三舱门320、第四舱门330中的至少一个应该同时处于关闭状态,以保证炉体100在工作过程中保持在真空状态。具体结合图1、图2与图3,本发明的使用方法为:The first hatch 220 and/or the second hatch 230 should be in a closed state with the third hatch 320 and/or the fourth hatch 330, ie, at least one of the first hatch 220 and the second hatch 230, At least one of the third hatch 320 and the fourth hatch 330 should be simultaneously closed to ensure that the furnace body 100 is maintained in a vacuum during operation. Specifically referring to FIG. 1 , FIG. 2 and FIG. 3 , the usage method of the present invention is:
1、首先启动设备,各舱门关闭,开启炉体真空泵510抽真空至设定数值(炉体真空泵在设备运行中一直开启以维持设定的真空度),开启炉内加热装置至设定的温度。1. First start the equipment, each door is closed, open the furnace vacuum pump 510 to vacuum to the set value (the furnace vacuum pump is always turned on during the operation of the equipment to maintain the set vacuum), and turn on the furnace heating device to the set temperature.
2、进料置换舱200的第一舱门220、第二舱门230此时处于关闭状态,检查舱体210内的气压值是否与环境气压一致,如不一致则开启舱体210上的进气阀使之气压一致。2. The first hatch 220 and the second hatch 230 of the feed replacement tank 200 are in a closed state at this time, and it is checked whether the air pressure value in the cabin 210 is consistent with the ambient air pressure, and if not, the air intake on the cabin 210 is opened. The valve keeps the pressure constant.
3、当舱体210内的气压与环境气压一致后,开启第一舱门220(此时第二舱门230保持关闭),放置有物料的载具送入舱体210。3. When the air pressure in the cabin 210 coincides with the ambient air pressure, the first hatch 220 is opened (the second hatch 230 remains closed at this time), and the carrier on which the material is placed is sent to the cabin 210.
4、当物料送入舱体210后,第一舱门220关闭,启动入口真空泵520将舱体210抽真空至设定值。4. After the material is delivered into the cabin 210, the first hatch 220 is closed, and the inlet vacuum pump 520 is activated to evacuate the cabin 210 to a set value.
5、当舱体210内的真空度已达到设定值后,检查第二物料移送装置420是否在初始位,如第二物料移送装置420不在初始位则等待第二物料移送装置420完成推送动作回到初始位。5. After the vacuum in the cabin 210 has reached the set value, check whether the second material transfer device 420 is in the initial position. If the second material transfer device 420 is not in the initial position, wait for the second material transfer device 420 to complete the push action. Go back to the initial position.
6、当舱体210内的真空度已达到设定值且第二物料移送装置420位于初始位后,开启第二舱门230(此时第一舱门220保持关闭),启动第一物料移送装置410将舱体210内的载具推送到炉体100内的上料位置。6. When the degree of vacuum in the cabin 210 has reached the set value and the second material transfer device 420 is in the initial position, the second hatch 230 is opened (the first hatch 220 remains closed at this time), and the first material transfer is started. The device 410 pushes the carrier within the pod 210 to a loading position within the furnace body 100.
7、载具到达舱体210后,第一物料移送装置410后退复位,第二舱门230关闭,向舱体210内通入氮气或者打开进气阀,使舱体210内的气压与外部环境一致。7. After the carrier arrives at the cabin 210, the first material transfer device 410 is retracted and reset, the second door 230 is closed, nitrogen gas is introduced into the cabin 210 or the intake valve is opened, so that the air pressure in the cabin 210 and the external environment are Consistent.
8、检查第三物料移送装置430是否在初始位(后限位),如否,则等待第三物料移送装置430动作完成后返回初始位;如是,则启动第二物料移送装置420推动上料位置的载具,第二物料移送装置420的推送行程略大于单个载具的长度,从而可以使炉体内依次排列的载具向出料置换舱300的方向整体移动。8. Check whether the third material transfer device 430 is in the initial position (back limit). If not, wait for the third material transfer device 430 to complete the operation and return to the initial position; if yes, start the second material transfer device 420 to push the feed. At the position of the carrier, the pushing stroke of the second material transfer device 420 is slightly larger than the length of the single carrier, so that the sequentially arranged carriers in the furnace body can be moved integrally in the direction of the discharge replacement chamber 300.
9、当位于炉体100尾端的载具对正第三物料移送装置430时,第二物料移送装置420复位;此时检查出料置换舱300是否为空,如不为空则等待出料置换舱300排空,如出料置换舱300为空则检查真空度是否达到设定值,如未达设定值至则启动出口真空泵530抽真空至设定值,如出料置换舱300为空且已达设定的真空度,则关闭出口真空泵530并开启第四舱门330(此时第三舱门320保持关闭)。9. When the carrier at the end of the furnace body 100 is aligned with the third material transfer device 430, the second material transfer device 420 is reset; at this time, it is checked whether the discharge replacement chamber 300 is empty, and if it is not empty, it is waiting for discharge replacement. If the discharge replacement chamber 300 is empty, it is checked whether the vacuum degree reaches the set value. If the set value is not reached, the outlet vacuum pump 530 is started to evacuate to the set value, for example, the discharge replacement chamber 300 is empty. And the set vacuum is reached, the outlet vacuum pump 530 is closed and the fourth hatch 330 is opened (at this time the third hatch 320 remains closed).
10、当第四舱门330开启后,第三物料移送装置430启动将位于炉体100尾端的载具推送至出料置换舱300。10. When the fourth hatch 330 is opened, the third material transfer device 430 initiates pushing the carrier at the end of the furnace body 100 to the discharge replacement chamber 300.
11、当载具到达出料置换舱300后,第三物料移送装置430复位,第四舱门330关闭。11. When the carrier reaches the discharge replacement chamber 300, the third material transfer device 430 is reset and the fourth door 330 is closed.
12、当第四舱门330关闭后,开启出料置换舱300的进气阀使出料置换舱300内的气压与环境气压一致。12. When the fourth hatch 330 is closed, the intake valve of the discharge replacement chamber 300 is opened to make the air pressure in the discharge replacement chamber 300 coincide with the ambient air pressure.
13、当出料置换舱300内的气压与环境气压一致后,开启第三舱门320(第四舱门330保持关闭),并在第三舱门320开启完成后启动第四物料移送装置440,将载具从出料置换舱300送出。13. When the air pressure in the discharge replacement chamber 300 coincides with the ambient air pressure, the third hatch 320 is opened (the fourth hatch 330 remains closed), and the fourth material transfer device 440 is started after the third hatch 320 is opened. The carrier is delivered from the discharge replacement compartment 300.
14、当载具送出后,关闭第三舱门320。14. When the carrier is delivered, the third hatch 320 is closed.
如此,重复上述步骤2至14便可以实现物料的连续烧结,由于炉体可以持续保持在加热与真空状态,省去了炉体内部频繁地抽真空、加热、保温、降温的过程,从而可以极大地提升生产效率,更适合于规模化生产;同时,真空烧结炉无需频繁地升降温,从而可以节约电能,延长真空炉的使用寿命;此外,真空烧结时只能靠辐射及热传导传热,炉体内部升温速度较慢,而现有真空烧结炉为了追求更大的产能由不得不提升炉膛容积,因此炉腔内加热温区的均温性较差(通常温差在±10℃左右),从而影响物料的烧结。Thus, the above steps 2 to 14 can be repeated to achieve continuous sintering of the material. Since the furnace body can be continuously maintained in a heating and vacuum state, the process of frequently evacuating, heating, holding, and cooling the inside of the furnace body is eliminated, thereby The earth enhances production efficiency and is more suitable for large-scale production. At the same time, the vacuum sintering furnace does not need to frequently raise and lower temperature, thereby saving energy and prolonging the service life of the vacuum furnace; in addition, heat conduction can only be achieved by radiation and heat conduction during vacuum sintering. The internal temperature rise rate is slower, and the existing vacuum sintering furnace has to increase the furnace volume in order to pursue greater production capacity, so the temperature uniformity of the heating temperature zone in the furnace cavity is poor (usually the temperature difference is about ±10 °C), thus affecting Sintering of the material.
参照图4,示出了本发明第二个实施例的正视图。如图所示,本实施例即在第一实施例的基础上增加回流线,回流线连接进料置换舱200与出料置换舱300,可以实现载具的回流,从而进一步提升生产效率。优选的,回流线包括连接进料置换舱200的第一回流线610,连接出料置换舱300的第二回流线620,以及连接第一回流线610、第二回流线620的第三回流线630。Referring to Figure 4, a front elevational view of a second embodiment of the present invention is shown. As shown in the figure, in this embodiment, a return line is added on the basis of the first embodiment, and the return line is connected to the feed replacement chamber 200 and the discharge replacement chamber 300, so that the return of the carrier can be realized, thereby further improving the production efficiency. . Preferably, the return line includes a first return line 610 connected to the feed replacement chamber 200, a second return line 620 connected to the discharge replacement chamber 300, and a first return line 610 and a second return line 620. The third return line 630.
为了实现载具在各回流线上的移动,本实施例还设置有将物料由第三回流线630运送至第一回流线610的第五物料移送装置450,将物料由第一回流线610运送至进料置换舱200的第六物料移送装置460,将物料由第二回流线620运送至第三回流线630的第七物料移送装置470,以及推动物料在第三回流线630上移动的第八物料移送装置480,第五物料移送装置450、第六物料移送装置460、第七物料移送装置470与第八物料移送装置480的结构与第一物料移送装置410类似,在此不做累述。In order to realize the movement of the carrier on each return line, the embodiment is further provided with a fifth material transfer device 450 for transporting the material from the third return line 630 to the first return line 610, and the material is returned by the first return. Line 610 is transported to sixth material transfer device 460 of feed replacement chamber 200, which carries material from second return line 620 to seventh material transfer unit 470 of third return line 630, and pushes the material at a third reflow. The eighth material transfer device 480, the fifth material transfer device 450, the sixth material transfer device 460, the seventh material transfer device 470, and the eighth material transfer device 480, which are moved on the line 630, have a structure similar to that of the first material transfer device 410. Do not repeat here.
本实施例在第一实施例的步骤上还增加有回流步骤,包括:The embodiment further adds a reflow step to the steps of the first embodiment, including:
1、第四物料移送装置440将载具由出料置换舱300运送至第二回流线620。1. The fourth material transfer device 440 transports the carrier from the discharge replacement chamber 300 to the second return line 620.
2、第七物料移送装置470将载具由第二回流线620运送至第三回流线630后复位。2. The seventh material transfer device 470 resets the carrier after being transported by the second return line 620 to the third return line 630.
3、第八物料移送装置480推动载具在第三回流线630上移动,移动至设定位置后复位。3. The eighth material transfer device 480 pushes the carrier to move on the third return line 630, and moves to the set position and then resets.
4、第五物料移送装置450将载具由第三回流线630运送至第一回流线610后复位。4. The fifth material transfer device 450 resets the carrier after being transported by the third return line 630 to the first return line 610.
5、第六物料移送装置460将载具由第一回流线610运送至进料置换舱200后复位。5. The sixth material transfer device 460 resets the carrier after being transported by the first return line 610 to the feed replacement chamber 200.
以上是对本发明的较佳实施进行了具体说明,但本发明创造并不限于所述实施例,熟悉本领域的技术人员在不违背本发明精神的前提下还可做出种种的等同变形或替换,这些等同的变形或替换均包含在本申请权利要求所限定的范围内。The above is a detailed description of the preferred embodiments of the present invention, but the present invention is not limited to the embodiments, and various equivalent modifications or substitutions can be made by those skilled in the art without departing from the spirit of the invention. Such equivalent modifications or alternatives are intended to be included within the scope of the claims.
Claims (10)
- 一种可实现连续生产的真空烧结炉,其特征在于,包括炉体、进料置换舱与出料置换舱,所述进料置换舱包括通向外界的第一舱门与通向所述炉体的第二舱门,所述出料置换舱包括通向外界的第三舱门与通向所述炉体的第四舱门,所述第一舱门、第二舱门、第三舱门与第四舱门可独立启闭,其中,所述第一舱门和/或第二舱门,与所述第三舱门和/或第四舱门同时处于关闭状态,以保证所述炉体的内部空间在工作过程中维持真空状态。 A vacuum sintering furnace capable of achieving continuous production, comprising: a furnace body, a feed replacement tank and a discharge replacement tank, the feed replacement tank comprising a first hatch leading to the outside and a furnace door a second hatch of the body, the discharge replacement compartment comprising a third hatch leading to the outside and a fourth hatch leading to the furnace body, the first hatch, the second hatch, the third cabin The door and the fourth hatch can be independently opened and closed, wherein the first hatch and/or the second hatch are simultaneously closed with the third hatch and/or the fourth hatch to ensure the The internal space of the furnace body maintains a vacuum during operation.
- 根据权利要求1所述的可实现连续生产的真空烧结炉,其特征在于,还包括将物料由所述进料置换舱送入所述炉体的第一物料移送装置。A vacuum sintering furnace capable of achieving continuous production according to claim 1, further comprising a first material transfer device for feeding material from said feed displacement chamber to said furnace body.
- 根据权利要求1所述的可实现连续生产的真空烧结炉,其特征在于,还包括推动物料在所述炉体内移动的第二物料移送装置。A vacuum sintering furnace capable of achieving continuous production according to claim 1, further comprising a second material transfer device that pushes the material to move within the furnace body.
- 根据权利要求1所述的可实现连续生产的真空烧结炉,其特征在于,还包括将物料由所述炉体送入所述出料置换舱的第三物料移送装置。A vacuum sintering furnace capable of achieving continuous production according to claim 1, further comprising a third material transfer device for feeding material from said furnace body to said discharge replacement chamber.
- 根据权利要求1所述的可实现连续生产的真空烧结炉,其特征在于,还包括将物料从所述出料置换舱内送出的第四物料移送装置。A vacuum sintering furnace capable of achieving continuous production according to claim 1, further comprising a fourth material transfer device for discharging material from said discharge discharge chamber.
- 根据权利要求1至5中任一项所述的可实现连续生产的真空烧结炉,其特征在于,还包括连接所述进料置换舱与出料置换舱的回流线。A vacuum sintering furnace capable of achieving continuous production according to any one of claims 1 to 5, further comprising a return line connecting the feed replacement chamber and the discharge replacement chamber.
- 根据权利要求6所述的可实现连续生产的真空烧结炉,其特征在于,所述回流线包括连接所述进料置换舱的第一回流线,连接所述出料置换舱的第二回流线,以及连接所述第一回流线、第二回流线的第三回流线。A vacuum sintering furnace capable of achieving continuous production according to claim 6, wherein said return line comprises a first return line connecting said feed replacement chamber, and a second connection connecting said discharge replacement tank a return line, and a third return line connecting the first return line and the second return line.
- 根据权利要求7所述的可实现连续生产的真空烧结炉,其特征在于,还包括将物料由所述第三回流线运送至所述第一回流线的第五物料移送装置,将物料由所述第一回流线运送至所述进料置换舱的第六物料移送装置,将物料由所述第二回流线运送至所述第三回流线的第七物料移送装置,以及推动物料在所述第三回流线上移动的第八物料移送装置。A vacuum sintering furnace capable of achieving continuous production according to claim 7, further comprising: a fifth material transfer device for conveying material from said third return line to said first return line, said material a sixth material transfer device transported by the first return line to the feed replacement chamber, a material transported by the second return line to a seventh material transfer device of the third return line, and An eighth material transfer device that pushes the material to move on the third return line.
- 根据权利要求6所述的可实现连续生产的真空烧结炉,其特征在于,还包括依次排列在所述回流线上并可相对所述回流线运动的若干载具。A vacuum sintering furnace capable of achieving continuous production according to claim 6, further comprising a plurality of carriers sequentially arranged on said return line and movable relative to said return line.
- 根据权利要求1至5中任一项所述的可实现连续生产的真空烧结炉,其特征在于,所述炉体沿所述进料置换舱至所述出料置换舱的方向依次设有加热区与冷却区。The vacuum sintering furnace capable of achieving continuous production according to any one of claims 1 to 5, wherein the furnace body is sequentially heated in the direction from the feed replacement chamber to the discharge replacement chamber. Zone and cooling zone.
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CN201720671267.2 | 2017-06-09 | ||
CN201720671267.2U CN206869125U (en) | 2017-06-09 | 2017-06-09 | A kind of achievable quantity-produced vacuum sintering furnace |
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CN117553574A (en) * | 2024-01-11 | 2024-02-13 | 淄博澳丰电子有限公司 | Firing furnace for chip tube seat |
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CN109579515A (en) * | 2018-11-26 | 2019-04-05 | 太原开元智能装备有限公司 | A kind of external-heat vacuum continuous fritting furnace |
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- 2017-06-09 CN CN201720671267.2U patent/CN206869125U/en active Active
- 2017-06-28 WO PCT/CN2017/090430 patent/WO2018223439A1/en active Application Filing
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CN2044710U (en) * | 1989-03-06 | 1989-09-20 | 吴胜久 | Automatic and continuous vacuum sintering furnace |
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CN206869125U (en) | 2018-01-12 |
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