WO2013125303A1 - ガラス板の搬送装置及びその搬送方法 - Google Patents
ガラス板の搬送装置及びその搬送方法 Download PDFInfo
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- WO2013125303A1 WO2013125303A1 PCT/JP2013/051876 JP2013051876W WO2013125303A1 WO 2013125303 A1 WO2013125303 A1 WO 2013125303A1 JP 2013051876 W JP2013051876 W JP 2013051876W WO 2013125303 A1 WO2013125303 A1 WO 2013125303A1
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- WIPO (PCT)
- Prior art keywords
- glass plate
- width direction
- conveyance
- transport
- belt
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
- B65G15/10—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface
- B65G15/12—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface with two or more endless belts
- B65G15/14—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface with two or more endless belts the load being conveyed between the belts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
- B65G15/10—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface
- B65G15/12—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface with two or more endless belts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
- B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2812/00—Indexing codes relating to the kind or type of conveyors
- B65G2812/01—Conveyors composed of several types of conveyors
- B65G2812/016—Conveyors composed of several types of conveyors for conveying material by co-operating units in tandem
- B65G2812/017—Conveyors composed of several types of conveyors for conveying material by co-operating units in tandem using tilted or side by side conveyor sections
Definitions
- the present invention relates to an improvement in a conveyance technique for positioning a glass plate on a conveyance path prior to end face processing of the glass plate.
- various glass plates such as a liquid crystal display and a glass substrate for a flat panel display (FPD) such as an organic EL display are placed on a plurality of conveyance belts arranged in parallel at intervals. In some cases, it is conveyed at a high speed (see, for example, Patent Documents 1 and 2).
- end face processing such as grinding is performed on both sides in the width direction of the glass plate orthogonal to the conveyance direction.
- end face processing such as grinding is performed on both sides in the width direction of the glass plate orthogonal to the conveyance direction.
- the glass plate is usually moved on the transport belt in a direction perpendicular to the transport direction to adjust the position and orientation of the glass plate with respect to the transport belt.
- an object of the present invention is to perform smooth positioning on a plurality of conveyor belts even when a glass plate is thinned.
- the present invention provides a glass plate that is transported in a state in which the glass plate is placed on a plurality of transport belts arranged in parallel and is positioned by positioning means disposed on the transport path.
- the glass plate transfer device for positioning by moving in the width direction perpendicular to the transfer direction, a part of the glass plate supported by the transfer belt is supplementarily supported by a fluid or an elastic body during positioning, and the glass plate It is characterized by having an auxiliary support part for reducing the movement resistance in the width direction.
- the movement resistance in the width direction of the glass plate is reduced by the auxiliary support by the fluid or the elastic body of the auxiliary support portion. For this reason, even if it is a case where a glass plate is thinned, a glass plate can be smoothly moved to the width direction by a positioning means, and it becomes possible to perform a positioning operation
- the auxiliary support portion is configured such that the amount of fluid supplied is reduced during the conveyance of the glass plate than during the positioning.
- the glass plate is levitated and supported by the liquid layer, when the glass plate is moved in the width direction at the time of positioning, the situation where the glass plate is rubbed against the auxiliary support portion and is damaged is prevented. Can do. Further, if the liquid layer is sequentially renewed by circulating the liquid, it is possible to prevent particles such as glass powder from adhering to the glass plate and to prevent the particles from being scratched.
- assistant support part has a brush-like part (included in the said elastic body) which consists of a some linear member, and is a structure which supports a glass plate using the elasticity of the said brush-like part. There may be.
- the brush-like portion has a rotation axis in the width direction and is configured to be rotatable with the conveyance of the glass plate.
- the support surface that supports the glass plate in an auxiliary manner is sequentially updated by the rotation of the brush-like portion, so that particles such as glass powder adhere to the glass plate or scratches caused by the particles occur. Can be prevented.
- the lower part of the brush-like part is automatically cleaned.
- a method of automatically cleaning the lower part of the brush-like part for example, a method of immersing the lower part of the brush-like part in the cleaning liquid tank in which the cleaning liquid is stored may be used.
- a method for automatically cleaning the lower part of the brush-like part for example, it is more preferable to adopt a configuration in which the cleaning liquid is directly jetted from the cleaning liquid jetting part such as a nozzle to the lower part of the brush-like part. In this way, it is possible to avoid a situation in which the particles removed by the cleaning liquid are mixed into the cleaning liquid used for cleaning, so that the cleaning power can be increased.
- auxiliary support portions are provided on both sides in the width direction of the transport belt.
- the present invention provides a glass plate that is transported in a state in which the glass plate is placed on a plurality of transport belts arranged in parallel and is positioned by positioning means disposed on the transport path.
- a part of the glass plate supported by the transport belt is supplementarily supported by a fluid or an elastic body during positioning, and the glass plate Is characterized by reducing the movement resistance in the width direction.
- a part of the glass plate supported by the conveyor belt is supplementarily supported by a fluid or an elastic body, so that the movement resistance in the width direction of the glass plate is reduced. Even if the glass plate is reduced in thickness, it can be positioned smoothly on the conveyor belt.
- FIG. 1 is a plan view showing a glass sheet conveying apparatus according to the first embodiment of the present invention.
- a plurality of conveying belts 1 parallel to the conveying direction are arranged in a width direction ( In the following, it is simply referred to as the width direction).
- the conveyor belt 1 is composed of an endless belt, and is driven synchronously by, for example, sharing a servo motor and a rotating shaft.
- the width of the conveyor belt 1 and the arrangement pitch thereof can be appropriately changed according to the bending of the glass plate G.
- the thickness of the conveyed glass plate G is, for example, 0.3 to 0.7 mm, and the size thereof is, for example, 1500 mm or more on one side.
- a positioning area Z ⁇ b> 1 for positioning the glass plate G placed on the conveyance belt 1 is provided.
- the pressure rollers 2 functioning as positioning means are disposed on both sides of the conveyance path of the glass sheet G, respectively.
- Each pressing roller 2 can be moved back and forth in the direction of the arrow B (width direction) in the figure, and comes into contact with both sides facing the width direction of the glass plate G being conveyed. Perform positioning.
- assistant support part 3 which supports the glass plate G supported by the conveyance belt 1 is provided further.
- a plurality of auxiliary support portions 3 are arranged between adjacent conveyance belts 1 and between the conveyance belt 1 and the pressure roller 2 at both ends in the width direction.
- the auxiliary support portion 3 includes a base member 4 made of metal or the like, and a support block 5 made of resin or the like integrated with the base portion 4.
- the support surface 6 formed on the upper surface of the support block 5 has a liquid ejection hole 7 through which a liquid (eg, water) as a fluid is ejected.
- a liquid layer 8 is formed by the liquid ejected from the liquid ejection holes 7, and a part of the glass plate G is floated and supported by the liquid layer 8.
- the liquid layer 8 is sequentially updated to a new liquid by supplying the liquid from the liquid ejection hole 7.
- 9 is a belt guide and 10 is a belt frame.
- the support surface 6 includes a first taper surface 6a located upstream in the transport direction, a second taper surface 6b located downstream in the transport direction, a first taper surface 6a and a second taper surface. It consists of the horizontal surface 6c located between the taper surfaces 6b.
- the first tapered surface 6 a is provided to prevent the glass plate G from coming into direct contact with the support surface 6 when the glass plate G is largely bent.
- the support surface 6 may be configured by the first tapered surface 6a and the horizontal surface 6c by omitting the second tapered surface 6b, or may be configured by only the horizontal surface 6c by omitting these tapered surfaces 6a and 6b. May be.
- the horizontal surface 6 c of the support surface 6 is preferably disposed slightly lower than the upper surface of the transport belt 1.
- a pair of auxiliary belts 11 that sandwich and convey the glass plate G between the conveying belt 1 and the processing region Z2 adjacent to the downstream side of the positioning region Z1 are provided. They are arranged in parallel. Furthermore, as shown in FIG. 5, on both sides of the conveyance path of the glass plate G where the conveyance belt 1 and the auxiliary belt 11 overlap, on both sides of the glass plate G sandwiched between the conveyance belt 1 and the auxiliary belt 11.
- a grinding tool 12 made of a rotating grindstone or the like for performing grinding or corner cutting is provided.
- the glass plate G is placed on the conveyor belt 1 in a horizontal posture. Then, the glass plate G is transported in the direction of arrow A at a transport speed of, for example, 60 to 180 m / min as the transport belt 1 is driven.
- the glass plate G is temporarily stopped or sufficiently decelerated (for example, about 1/10 of the transport speed), and both sides of the glass plate G in the width direction.
- the pressing roller 2 provided on the side abuts on both sides of the glass plate G to position the glass plate G. During this positioning, the glass plate G is supplementarily supported by the auxiliary support portion 3.
- a part of the glass plate G is levitated and supported by the liquid layer 8 formed on the support surface 6 of the auxiliary support portion 3.
- the bending of the glass plate G generated in a region not supported by the conveyance belt 1 such as between adjacent conveyance belts 1 is restricted, and the movement resistance (friction resistance) in the width direction of the glass plate G can be reduced. it can. Therefore, the glass plate G can be smoothly positioned by the pressing roller 2.
- the protective effect of the liquid layer 8 can effectively suppress the situation in which the glass plate G is in direct contact with the support surface 6 and scratches are generated.
- the supply of the liquid supplied from the auxiliary support portion 3 is stopped or reduced, and the glass plate G is conveyed to the downstream processing region Z2. That is, by returning the glass plate G to a state in which it is difficult to move on the transport belt 1, the glass plate G can be accelerated and decelerated in a short time, and the overall transport speed is increased.
- the glass plate G transported to the processing region Z2 is sandwiched between the transport belt 1 and the auxiliary belt 11, and is subjected to end face processing by the grinding tool 12.
- the glass plate G is sandwiched between the conveyor belt 1 and the auxiliary belt 11 so as to maintain the position of the positioned glass plate G.
- the auxiliary belt 11 is omitted and the processing is performed.
- the glass plate G may be sucked and held on the transport belt 1 in the region Z2.
- the liquid may be directly sprayed onto the glass plate G without being layered and supported by the spray pressure.
- gas for example, air
- the liquid may be directly sprayed onto the glass plate G without being layered and supported by the spray pressure.
- FIG. 6 is a plan view showing a glass plate transport device according to a second embodiment of the present invention.
- the conveyance device according to the second embodiment is different from the conveyance device according to the first embodiment in that the auxiliary support portion 3 is provided only between the conveyance belt 1 located at both ends in the width direction and the pressing roller 2. It is at the point where it was placed. That is, when the glass plate G is relatively small (for example, when the dimension of one side is 1500 mm or less), the bending of the glass plate G in the non-existing region of the conveyance belt 1 is small, and therefore the number of auxiliary support portions 3 to be arranged is reduced. It can be reduced as appropriate.
- the thickness of the glass plate G is relatively thick (for example, when the thickness is 0.5 mm or more), the bending of the glass plate G is reduced, so the number of auxiliary support portions 3 to be disposed. Can be reduced. In other words, the arrangement mode of the auxiliary support portion 3 can be appropriately changed according to the size and thickness of the glass plate G.
- FIG. 7 is a plan view showing a glass sheet transport device according to a third embodiment of the present invention.
- the conveying device according to the third embodiment is different from the conveying devices according to the first and second embodiments in that the positioning of the glass plate G is performed while conveying.
- a plurality of pressing rollers 2 urged toward the center in the width direction by an elastic body 13 such as a leaf spring are arranged along one side of the conveyance path corresponding to the positioning region Z1.
- a reference belt 14 that is long in the transport direction is disposed on the other side of the transport path side corresponding to the positioning region Z1 so as to face the pressing roller 2.
- the reference belt 14 is composed of an endless belt so as not to hinder the conveyance of the glass plate G, and is driven and rotated at the same speed as the conveyance speed of the glass plate G or in accordance with the movement of the glass plate G. To follow and rotate.
- the glass plate G is continuously conveyed at a predetermined conveyance speed (for example, 4 to 25 m / min) without decelerating, and the pressure roller 2 sequentially presses the glass plate G toward the reference belt 14 side. And positioning.
- a predetermined conveyance speed for example, 4 to 25 m / min
- auxiliary support portions 3 are arranged between adjacent conveyance belts 1.
- the supply amount of the liquid supplied from the auxiliary support unit 3 may be constant after the positioning is completed. . This is because the conveyance of the glass plate G is performed at a relatively low speed without acceleration / deceleration, and the risk that the glass plate G is displaced on the conveyance belt 1 after passing through the positioning region Z1 is small. In this case, the facility for switching the liquid supply amount can be simplified.
- FIG. 8 is a plan view showing a glass sheet transport device according to a fourth embodiment of the present invention.
- the conveying device according to the fourth embodiment is different from the conveying devices according to the first to third embodiments in that the auxiliary support portion is constituted by a rotating brush 16 including a plurality of linear members 15 as elastic bodies. There is.
- each rotating brush 16 is supported by a rotating shaft 17 orthogonal to the conveying direction, and is driven to rotate as the glass plate G is conveyed.
- These rotating brushes 16 support the glass plate G supported by the conveyor belt 1 by using the elasticity of the linear member 15.
- the linear member 15 has such elasticity that the hair tips are bent by the weight of the glass plate G when the glass plate G is auxiliary supported, and is made of, for example, resin (for example, nylon resin) Those having a small diameter (for example, 30 ⁇ m or less, preferably 20 ⁇ m or less) are used.
- each rotary brush 16 As shown in FIG. 9, the lower part of each rotary brush 16 is immersed in the cleaning liquid 18, and particles and the like adhering to the linear member 15 are cleaned by the cleaning liquid 18 as the rotary brush 16 rotates. It has come to be. As a result, it is possible to prevent the glass plate G that is supplementarily supported by the rotating brush 16 from being stained or scratched due to particles.
- one or more cleaning liquid spray nozzles 19 (or pipes are opened in the lower portion of the rotary brush 16.
- the cleaning liquid 18 may be directly sprayed from the small holes). In this way, the clean cleaning liquid 18 can be continuously supplied simply from the cleaning liquid spray nozzle 19, so that particles can be efficiently removed.
- assistant support part was comprised with a rotating brush
- planar brush-like member for example, artificial grass etc.
- any low friction material having a frictional resistance smaller than that of the conveyor belt 1 can be applied as an auxiliary support portion.
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Registering Or Overturning Sheets (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
Description
図1は、本発明の第1実施形態に係るガラス板の搬送装置を示す平面図である。この搬送装置は、搬送方向(図中の矢印A方向。なお、他の図中の矢印Aも搬送方向を示す。)に平行な複数本の搬送ベルト1が、搬送方向と直交する幅方向(以下では単に幅方向という。)に間隔を置いて並列に配列された構成を備えている。
図6は、本発明の第2実施形態に係るガラス板の搬送装置を示す平面図である。この第2実施形態に係る搬送装置が、第1実施形態に係る搬送装置と相違するところは、幅方向両端部に位置する搬送ベルト1と、押圧ローラ2の間にのみ、補助支持部3を配置した点にある。すなわち、ガラス板Gが相対的に小さい場合(例えば、一辺の寸法が1500mm以下の場合)、搬送ベルト1の不存在領域におけるガラス板Gの撓みは小さくなるので、補助支持部3の配置個数を適宜減少させることができる。また、同様に、ガラス板Gの板厚が相対的に厚い場合(例えば、板厚が0.5mm以上の場合)にも、ガラス板Gの撓みが小さくなるので、補助支持部3の配置個数を減少させることができる。換言すれば、補助支持部3の配置態様は、ガラス板Gの大きさや板厚に応じて、適宜変更することができる。
図7は、本発明の第3実施形態に係るガラス板の搬送装置を示す平面図である。この第3実施形態に係る搬送装置が、第1~2実施形態に係る搬送装置と相違するところは、ガラス板Gの位置決めを搬送しながら行う点にある。
図8は、本発明の第4実施形態に係るガラス板の搬送装置を示す平面図である。この第4実施形態に係る搬送装置が、第1~3実施形態に係る搬送装置と相違する点は、補助支持部が、弾性体としての複数の線状部材15からなる回転ブラシ16で構成されているところにある。
2 押圧ローラ
3 補助支持部
6 支持面
6a 第1テーパ面
6b 第2テーパ面
6c 水平面
7 液体噴出孔
8 液体層
11 補助ベルト
12 研削ツール
13 弾性体
14 基準ベルト
15 線状部材
16 回転ブラシ
18 洗浄液
Claims (8)
- 並列に配列された複数本の搬送ベルト上にガラス板を載置した状態で搬送し、その搬送経路上に配置された位置決め手段によってガラス板を搬送方向と直交する幅方向に移動させて位置決めするガラス板の搬送装置において、
位置決め時に、前記搬送ベルトにより支持されたガラス板の一部を流体又は弾性体で補助的に支持し、ガラス板の前記幅方向の移動抵抗を低減する補助支持部を備えていることを特徴とするガラス板の搬送装置。 - 前記補助支持部は、位置決め時よりもガラス板の搬送時において、前記流体の供給量が減少するように構成されていることを特徴とする請求項1に記載のガラス板の搬送装置。
- 前記補助支持部は、液体の供給により液体層が形成される支持面を有し、前記液体層を介してガラス板を支持することを特徴とする請求項1又は2に記載のガラス板の搬送装置。
- 前記補助支持部は、複数の線状部材からなるブラシ状部を有し、前記ブラシ状部の弾性を利用してガラス板を支持することを特徴とする請求項1に記載のガラス板の搬送装置。
- 前記ブラシ状部が、前記幅方向の回転軸を有し、ガラス板の搬送に伴って回転可能であることを特徴とする請求項4に記載のガラス板の搬送装置。
- 前記ブラシ状部の下方部が、自動洗浄されることを特徴とする請求項5に記載のガラス板の搬送装置。
- 前記補助支持部が、前記搬送ベルトの前記幅方向両側に設けられていることを特徴とする請求項1~6のいずれか1項に記載のガラス板の搬送装置。
- 並列に配列された複数本の搬送ベルト上にガラス板を載置した状態で搬送し、その搬送経路上に配置された位置決め手段によってガラス板を搬送方向と直交する幅方向に移動させて位置決めするガラス板の搬送方法において、
位置決め時に、前記搬送ベルトにより支持されたガラス板の一部を流体又は弾性体で補助的に支持し、ガラス板の前記幅方向の移動抵抗を低減することを特徴とするガラス板の搬送方法。
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US14/379,560 US9260246B2 (en) | 2012-02-20 | 2013-01-29 | Glass sheet conveying apparatus and glass sheet conveying method |
KR20147017325A KR20140130101A (ko) | 2012-02-20 | 2013-01-29 | 유리판의 반송 장치 및 그 반송 방법 |
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Cited By (7)
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CN105151780A (zh) * | 2015-08-28 | 2015-12-16 | 武汉华星光电技术有限公司 | 一种超声波传送装置 |
WO2018194022A1 (ja) * | 2017-04-20 | 2018-10-25 | 日本電気硝子株式会社 | ガラス板の製造方法および製造装置 |
WO2019054127A1 (ja) * | 2017-09-15 | 2019-03-21 | 日本電気硝子株式会社 | ガラス板の製造方法および製造装置 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002347922A (ja) * | 2001-05-22 | 2002-12-04 | Central Glass Co Ltd | 板状体の搬送方法および装置 |
JP2003300618A (ja) * | 2002-04-10 | 2003-10-21 | Orc Mfg Co Ltd | 基板搬送機構 |
JP2007099553A (ja) * | 2005-10-03 | 2007-04-19 | Nippon Electric Glass Co Ltd | 板ガラスの加工方法及びその装置 |
JP2008273687A (ja) * | 2007-04-27 | 2008-11-13 | Dainippon Printing Co Ltd | 平板状基材の搬送装置 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1751712A (en) * | 1928-06-25 | 1930-03-25 | Pittsburgh Plate Glass Co | Glass-handling apparatus |
US4716086A (en) * | 1984-12-19 | 1987-12-29 | Ppg Industries, Inc. | Protective overcoat for low emissivity coated article |
DE3536846A1 (de) * | 1985-10-16 | 1987-04-16 | Karl Lenhardt | Vorrichtung zum foerdern von hochkant stehenden glasscheiben |
US5311979A (en) * | 1993-01-29 | 1994-05-17 | Ambec | Vacuum combiner |
JPH076987A (ja) * | 1993-06-15 | 1995-01-10 | Toshiba Corp | 洗浄装置 |
JPH09169427A (ja) | 1995-12-22 | 1997-06-30 | Kaijo Corp | 浮揚装置及び該装置を具備した基板搬送装置 |
AT405863B (de) * | 1997-09-12 | 1999-12-27 | Lisec Peter | Vorrichtung zum beschichten von abstandhalterrahmen für isolierglasscheiben |
JP2000193604A (ja) | 1998-12-25 | 2000-07-14 | Takano Co Ltd | 基板用自動検査装置 |
ITMI991382A1 (it) * | 1999-06-21 | 2000-12-21 | Bavelloni Z Spa | Macchina automatica bilaterale per la lavorazione dei bordi di lastredi vetro materiali lapidei e simili |
US6296029B1 (en) * | 1999-07-21 | 2001-10-02 | Timesavers, Inc. | Centering sectional shoe assembly |
JP2001085496A (ja) | 1999-09-10 | 2001-03-30 | Daiichi Shisetsu Kogyo Kk | 板状部材の搬送装置 |
JP3587104B2 (ja) * | 1999-10-12 | 2004-11-10 | 坂東機工株式会社 | ガラス板の加工機械 |
JP2002331449A (ja) * | 2001-05-09 | 2002-11-19 | Bando Kiko Co Ltd | ガラス板の加工方法及びその装置 |
TWI222423B (en) * | 2001-12-27 | 2004-10-21 | Orbotech Ltd | System and methods for conveying and transporting levitated articles |
TWI226303B (en) | 2002-04-18 | 2005-01-11 | Olympus Corp | Substrate carrying device |
KR101018909B1 (ko) | 2002-10-25 | 2011-03-02 | 도쿄엘렉트론가부시키가이샤 | 기판 얼라이먼트장치, 기판처리장치 및 기판반송장치 |
JP2005239403A (ja) * | 2004-02-27 | 2005-09-08 | Espec Corp | コンベア |
JP2005262423A (ja) * | 2004-03-22 | 2005-09-29 | Shiraitekku:Kk | 板ガラスの研磨装置 |
JP4270142B2 (ja) | 2005-03-09 | 2009-05-27 | 日本電気硝子株式会社 | ガラス基板の製造方法及びその装置 |
JP4553376B2 (ja) * | 2005-07-19 | 2010-09-29 | 東京エレクトロン株式会社 | 浮上式基板搬送処理装置及び浮上式基板搬送処理方法 |
JP2007038369A (ja) * | 2005-08-05 | 2007-02-15 | Central Glass Co Ltd | ガラス板端面加工装置 |
JP5003990B2 (ja) | 2005-08-18 | 2012-08-22 | 日本電気硝子株式会社 | ガラス板の加工方法及びその装置 |
JP4753313B2 (ja) | 2006-12-27 | 2011-08-24 | 東京エレクトロン株式会社 | 基板処理装置 |
JP5128148B2 (ja) * | 2007-03-02 | 2013-01-23 | 株式会社オーク製作所 | 搬送装置 |
JP5550107B2 (ja) | 2010-03-15 | 2014-07-16 | 株式会社シライテック | Lcdパネルuv硬化前基板のエッジカット加工装置 |
US9004262B2 (en) * | 2010-05-03 | 2015-04-14 | Lisec Austria Gmbh | Device for conveying plate-shaped elements |
CN102161438B (zh) * | 2011-03-10 | 2013-04-24 | 李梦琪 | 搬送装置 |
-
2012
- 2012-02-20 JP JP2012034086A patent/JP5912642B2/ja active Active
-
2013
- 2013-01-29 KR KR20147017325A patent/KR20140130101A/ko not_active Ceased
- 2013-01-29 WO PCT/JP2013/051876 patent/WO2013125303A1/ja active Application Filing
- 2013-01-29 US US14/379,560 patent/US9260246B2/en active Active
- 2013-01-29 CN CN201380009904.4A patent/CN104136349B/zh active Active
- 2013-01-29 KR KR1020197036629A patent/KR102094730B1/ko active Active
- 2013-02-18 TW TW102105543A patent/TWI554461B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002347922A (ja) * | 2001-05-22 | 2002-12-04 | Central Glass Co Ltd | 板状体の搬送方法および装置 |
JP2003300618A (ja) * | 2002-04-10 | 2003-10-21 | Orc Mfg Co Ltd | 基板搬送機構 |
JP2007099553A (ja) * | 2005-10-03 | 2007-04-19 | Nippon Electric Glass Co Ltd | 板ガラスの加工方法及びその装置 |
JP2008273687A (ja) * | 2007-04-27 | 2008-11-13 | Dainippon Printing Co Ltd | 平板状基材の搬送装置 |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105151780B (zh) * | 2015-08-28 | 2018-11-23 | 武汉华星光电技术有限公司 | 一种超声波传送装置 |
CN105151780A (zh) * | 2015-08-28 | 2015-12-16 | 武汉华星光电技术有限公司 | 一种超声波传送装置 |
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WO2018194022A1 (ja) * | 2017-04-20 | 2018-10-25 | 日本電気硝子株式会社 | ガラス板の製造方法および製造装置 |
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WO2019054127A1 (ja) * | 2017-09-15 | 2019-03-21 | 日本電気硝子株式会社 | ガラス板の製造方法および製造装置 |
JP2019051572A (ja) * | 2017-09-15 | 2019-04-04 | 日本電気硝子株式会社 | ガラス板の製造方法および製造装置 |
CN110775586B (zh) * | 2019-11-15 | 2021-04-06 | 湖北中纬幸和自动化设备科技有限公司 | 一种pcb板自动光学检测机送料系统 |
CN110775586A (zh) * | 2019-11-15 | 2020-02-11 | 湖北中纬幸和自动化设备科技有限公司 | 一种pcb板自动光学检测机送料系统 |
WO2021205898A1 (ja) * | 2020-04-06 | 2021-10-14 | 日本電気硝子株式会社 | ガラス板の製造方法及び製造装置 |
KR102760512B1 (ko) | 2020-04-06 | 2025-02-03 | 니폰 덴키 가라스 가부시키가이샤 | 유리판의 제조 방법 및 제조 장치 |
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KR20220164688A (ko) * | 2020-04-06 | 2022-12-13 | 니폰 덴키 가라스 가부시키가이샤 | 유리판의 제조 방법 및 제조 장치 |
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CN112885248A (zh) * | 2021-01-21 | 2021-06-01 | 杨秀东 | 一种室内led显示屏防尘用玻璃框架 |
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CN104136349A (zh) | 2014-11-05 |
TW201341289A (zh) | 2013-10-16 |
KR20140130101A (ko) | 2014-11-07 |
KR20200003200A (ko) | 2020-01-08 |
TWI554461B (zh) | 2016-10-21 |
US9260246B2 (en) | 2016-02-16 |
CN104136349B (zh) | 2017-04-05 |
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