WO2012090829A1

WO2012090829A1 - Heater and method for manufacturing same

Info

Publication number: WO2012090829A1
Application number: PCT/JP2011/079698
Authority: WO
Inventors: 研二飯田; 大作石; 佐々木　章
Original assignee: ニチアス株式会社
Priority date: 2010-12-28
Filing date: 2011-12-21
Publication date: 2012-07-05
Also published as: TW201233927A; JP5851423B2; TWI481791B; JPWO2012090829A1

Abstract

The present invention pertains to a heater having the following: a first member which comprises a heating element and a metal plate, and which has a pair of longitudinal parts arranged on both sides of a heating object; and a pair of second members which sandwich the heating element together with the first member.

Description

Heater and manufacturing method thereof

The present invention relates to a heater for heating a valve, piping and the like, and a method for manufacturing the same.

Conventionally, it has been practiced to prevent condensation of the gas flowing through the interior of the valve by heating the valve and hardening of the liquid. In order to heat the valve, a heater wire is wrapped around the valve body or joint and the whole is surrounded by a heat insulating material, or the valve body or joint is surrounded by a heat insulating material with a built-in heater wire. The method to do is common.

However, in the above method, the method of winding the heater wire and the manner in which the heat insulating material is attached vary depending on the operator, and thus heating unevenness often occurs.

On the other hand, Patent Document 1 proposes a heater unit in which a direct heating part and a radiant heating part are provided in a housing surrounding a main body part and a joint part of a valve. In this heater unit, a pair of housing halves meet to form a housing, each housing half has a built-in ceramic heater, and a stainless steel plate is attached to the inner surface of the ceramic heater to directly heat the heating part. In each housing half, a portion other than the portion to which the ceramic heater is attached constitutes a radiation heating unit. Further, the stainless steel plate of the direct heating part is fixed at a position where it contacts the main body part of the valve when the housing halves meet each other, and directly heats the main body part when the ceramic heater is energized. At the same time, other parts excluding the main body part of the valve including the joint part are heated by the radiant heat from the radiant heating part.

Japanese Unexamined Patent Publication No. 2004-316864

According to the heater unit of Patent Document 1, the direct heating portion is positioned corresponding to the main body portion of the valve, and the mounting method to the valve only needs to assemble the housing halves. Uneven heating does not occur. However, since the main part of the valve is directly heated, the other parts of the valve including the joint part are radiant heating, which causes uneven heating. Further, since most of the housing half is a radiant heating section, it is necessary to arrange a large area ceramic heater, or to arrange a small area ceramic heater at a plurality of locations in the housing half. Since it is used frequently, it becomes expensive as a whole. In addition, since the entire housing heater is heated, power consumption increases.

Accordingly, an object of the present invention is to provide a heater with low heating unevenness and low power consumption at a low cost.

In order to achieve the above object, the present invention provides the following heater and method for producing the same.
(1) a heating element;
A first member made of a metal plate and having a pair of longitudinal portions disposed on both sides of the object to be heated;
A pair of second members that sandwich the heating element together with the first member;
Having a heater.
(2) In the above (1), the first member further has a connection part, the longitudinal parts are connected to each other at the connection part, and the cross-sectional shape at the connection part of the first member is U-shaped. The heater described.
(3) The heater according to (1), further including a connecting member, wherein the second members are connected by the connecting member.
(4) The heater according to (2) above, further including a temperature control means for the heating element, wherein the temperature control means is attached to the connecting portion.
(5) The heater according to (3), further including a heating element temperature control unit, and the temperature control unit is attached to the connecting member.
(6) The heater according to any one of (1) to (5), wherein the heating element is a ceramic heater.
(7) The heated object is a valve, and a portion of the longitudinal portion facing the main body portion of the valve protrudes toward the main body portion side of the valve from the other portion of the longitudinal portion. The heater according to any one of 3), (5), and (6).
(8) The above-mentioned (2) or (), wherein the heated object is a valve, and a portion of the longitudinal portion facing the main body portion of the valve protrudes from the other portion of the longitudinal portion toward the main body portion side of the valve. The heater according to 4).
(9) An H-shaped plate material composed of a pair of longitudinal portions facing the object to be heated and a coupling portion that couples the longitudinal portions is punched from the metal plate, and the longitudinal portion of the H-shaped plate material is connected to the coupling site side. A step of producing the first member by bending toward the
Producing a second member having a shape superimposed on a longitudinal portion of the first member;
A method of manufacturing a heater, comprising: sandwiching a heating element between a first member and a second member and connecting the first member and the second member.

In the heater of this invention, it arrange | positions so that a to-be-heated body may be covered with the metal 1st member, and can heat the whole to-be-heated body uniformly by transferring the heat from a heat generating body to a 1st member. . Therefore, the heating element only needs a small area and consumes less power.

Further, in manufacturing, the first member can be produced simply by cutting and bending the H-shaped plate material from the metal plate, the second member is also a plate member, and the first member and the second member further generate a heating element. Therefore, the process is simple and the manufacturing cost is low.

FIG. 1 is an exploded perspective view showing a heater according to an embodiment of the present invention in a state where the heater is mounted on a valve. FIG. 2 is a view of the first member as viewed from the A direction or the B direction in FIG. 1. FIG. 3 is a view of the first member viewed from the C direction or the D direction in FIG. 1. 4 is a view of the first member as viewed from the direction E of FIG. FIG. 5 is a view of the first member viewed from the direction F in FIG. 6A to 6C are views showing a process for manufacturing the first member. 7 is a view of the heater according to one embodiment of the present invention when viewed from the A direction or the B direction in FIG. 1. 8 is a view of the heater according to one embodiment of the present invention as viewed from the direction E in FIG. 9 is a diagram of the heater according to one embodiment of the present invention as viewed from the G direction or the H direction in FIG. 10 is a view of the heater according to one embodiment of the present invention as viewed from the I direction in FIG. 1. 11A is a diagram of a connection portion of one embodiment of the present invention viewed from below (corresponding to a direction F in FIG. 1), and FIG. 11B is a connection portion illustrated in FIG. 11A. FIG. 11C is a side view of the connecting portion when the connecting portion shown in FIG. 11A has a claw piece. 12 (A) and 12 (B) are diagrams illustrating a mode in which both longitudinal portions of the first member are fixed using bolts and nuts. FIG. 13 is a diagram showing another aspect of the heater of the present invention. FIG. 14 is a diagram illustrating temperature measurement points in the example. FIG. 15 is a graph showing the results of the example.

Hereinafter, preferred embodiments of the present invention will be described by exemplifying valves as heated objects.

FIG. 1 is an exploded perspective view showing a heater according to an embodiment of the present invention mounted on a valve. As the valve 100, a two-way valve having joint portions 102 at both ends of the main body portion 101 is illustrated. The main body portion 101 is provided with an actuator 105 that controls opening and closing of a valve disposed therein, and a pipe (not shown) is connected to the joint portion 102 via a nut 103.

The valve heater 1 includes a first member 10 that covers the main body portion 101 and the joint portion 102 of the valve 100, a heating element 20 that is attached to a surface of the first member 10 that is outside the valve 100, and a heating element 20. A pair of second members 30 sandwiching the first member 10 together with the first member 10 are main constituent members.

The first member 10 is obtained by processing a metal plate, and a pair of longitudinal portions 11 having a length covering the main body portion 101 and the joint portion 102 of the valve 100 are arranged in parallel and further connected at the central portion of the longitudinal portion 11. It is a member configured by being connected by a portion 12 and has a substantially U-shape as shown in FIG. 2 (a view of FIG. 1 viewed from the A direction or the B direction). Further, the longitudinal portion 11 of the first member 10 is opposed to a portion 11a facing the body portion 101 of the valve 100 (hereinafter referred to as a “body portion facing portion”), and a joint portion 102 of the valve 100 on both sides of the body portion facing portion 11a. Section 11b (hereinafter referred to as “joint portion facing portion”).

The main body portion facing portion 11a is set so as to be in contact with the main body portion 101 of the valve 100 or to form a slight gap with the main body portion 101. In addition, it is preferable that the length (L) of the main body portion facing portion 11a is formed to be slightly wider than the side surface 101a of the main body portion 101 of the valve 100 in terms of heating efficiency. Further, in this aspect, the main body portion facing portion 11 a is connected by the connecting portion 12.

A hexagon nut is usually used as the nut 103 attached to the joint portion 102 of the valve 100. Therefore, depending on the tightening condition of the hexagon nut, the corner of the nut may be positioned outside the plane formed by the side surface 101a of the main body portion 101 of the valve 100. Therefore, the step between the main body portion facing portion 11a and the joint portion facing portion 11b is equal to or greater than the thickness of the heating element 20 so that the joint portion facing portion 11b does not come into contact with the nut corner of the nut 103. In this manner, the joint portion facing portion 11b is projected in a direction away from the joint portion 102 of the valve 100 (C direction or D direction in FIG. 1). Thereby, the bending part 11c is formed in the connection part of the main body part opposing part 11a and the joint part opposing part 11b. In other words, the main body portion facing portion 11a of the longitudinal portion protrudes toward the main body portion side of the valve as compared with other portions of the longitudinal portion.

Note that an opening 60 through which the wiring cable of the heating element 20 passes may be opened in the longitudinal portion 11 of the first member 10 as shown in FIG. By passing the wiring cable through the opening 60, the displacement and movement of the heating element 20 in the heater 1 can be suppressed to some extent. Note that the shape, size, and number of the openings 60 can be appropriately set within a range not impairing the effects of the present invention. For example, a plurality of openings 60 may be provided so that the wiring cable can be passed from the inner side to the outer side after passing the wiring cable from the outer side (second member side) to the inner side (heated body side) of the first member. good. 3 shows an embodiment in which the opening 60 is provided in the joint portion facing portion 11b of the longitudinal portion 11, but the opening 60 is opposed to the body portion as long as the contact between the body portion facing portion 11a and the object to be heated is not hindered. It may be provided in the part 11a.

Further, a plurality of projections 15 such as half piercings are formed in the central portion of the outer surface of the body portion facing portion 11a (the surface opposite to the surface facing the valve body), and the space surrounded by the projections 15 is formed. The heating element 20 is accommodated. The interval and the number of the protrusions 15 are set according to the shape of the heating element 20. For example, in the case of a rectangular heating element 20 as shown in the figure, the four protrusions 15 are located at positions that divide each side of the heating element 20 into two. May be formed. Thereby, the movement of the heating element 20 in the space surrounded by the protrusions 15 is restricted. FIG. 3 shows a view of the first member 10 viewed from the C direction or D direction of FIG.

A thermocouple (not shown) for temperature control is attached to the lower surface of the connecting portion 12. The thermocouple can be an ungrounded type with a round end crimped to the tip. The valve heater 1 according to this embodiment is configured to transfer heat from the heating element 20 by the first member 10 to heat the main body portion 101 and the joint portion 102 of the valve 100, and detects heat temperature with a thermocouple to generate heat. Controls the power supply to the body 20. The thermostat 50 is attached to the connecting portion 12 with a screw 52 via a mounting bracket 51. Corresponding to this, as shown in FIG. 4 (viewed from the E direction) and FIG. 5 (viewed from the F direction) in FIG. A thread groove 53 is provided. Further, a screw hole 55 for attaching a thermocouple with a screw 54 is formed in the bottom surface of the main body portion 101 of the valve 100 in the connection portion 12.

In order to manufacture the first member 10, for example, first, as shown in FIG. 6A, an H-shaped plate material in which the central portions of a pair of longitudinal portions 11 are connected by a connecting portion 12 from a metal plate 300. Punch out. Then, as shown in FIG. 6 (B), the joint portion facing portion 11b is formed by bending the longitudinal portion 11 of the punched H-shaped plate member 310, and the body portion facing portion of the surface (back surface) 300a facing the valve 100 is further formed. A protrusion 15 (not shown) is formed by embossing on a portion to become 11a. Further, a screw groove 53 and a screw hole 55 are formed in the connecting portion 12. And as shown in FIG.6 (C), the longitudinal part 11 is bend | folded at right angle to the connection site | part side. Thus, the 1st member 10 can be produced simply.

The metal forming the first member 10 is preferably iron, copper, aluminum, or an alloy thereof because it is easy to transfer heat from the heating element 20, is inexpensive, and has excellent workability. is there.

The second member 30 is a plate-like object that is slightly larger than the longitudinal portion 11 of the first member 10. In addition, by curving the peripheral edge 30a, an effect of regulating the movement of the longitudinal portion 11 when the second member 30 is overlapped with the longitudinal portion 11 of the first member 10 is obtained along with the reinforcing effect. Moreover, the corner | angular part of the periphery 30a is missing and the space is formed, and the cable for wiring (not shown) of the heat generating body 20 may be inserted. In addition, as a cable for wiring, what has outer skins, such as a fluororesin which has heat resistance and electrical insulation, is preferable. Further, the second member 30 has an opening 31 corresponding to a portion surrounded by the protrusion 15 provided in the longitudinal portion 11 of the first member 10 and where the heating element 20 is disposed. A pair of

claw pieces

32, 32 that curves toward the longitudinal portion of the first member 10 extends. The second member 30 is preferably formed of a stainless steel plate in view of heat resistance, strength, and the like, but a metal forming the first member 10 can also be used. Moreover, when giving priority to heat insulation, it can also be made from ceramics.

The heating element 20 is preferably a planar heater because it is sandwiched between the first member 10 and the second member 30, and a ceramic heater excellent in heating capability is particularly preferable. In the ceramic heater, a resistance heating element is formed inside or on the surface of a ceramic substrate, and a nitride ceramic, a carbide ceramic, an oxide ceramic or the like is used as a ceramic substrate. Specifically, examples of the nitride ceramic include aluminum nitride, silicon nitride, boron nitride, and titanium nitride, and examples of the carbide ceramic include silicon carbide, zirconium carbide, titanium carbide, tantalum carbide, and tungsten carbide. Examples of the ceramic include alumina, zirconia, cordierite, mullite and the like. Among these, nitride ceramics and carbide ceramics are preferable because they have higher thermal conductivity than oxide ceramics. In addition, the resistance heating element has a predetermined pattern made of a conductive paste including a noble metal such as gold, silver, platinum, or palladium, a metal such as lead, tungsten, molybdenum, or nickel, or a conductive ceramic such as carbide of tungsten or molybdenum. Formed.

In this embodiment, since the heat from the heating element 20 is transferred to the first member 10 to heat the entire valve, the heating element 20 has a small area, and even when an expensive ceramic heater is used, the material cost is suppressed. be able to. Further, the amount of power supplied to the heating element 20 can be reduced, and power can be saved. The planar shape of the heating element 20 may be a square or a circle in addition to the illustrated rectangle, and the arrangement of the protrusions 15 of the first member 10 is changed accordingly.

The heating element 20 is supplied with power through a wiring cable. As described above, the wiring cable is preferably one having a sheath such as a fluororesin having heat resistance and electrical insulation. For the purpose of fixing so as not to cause a gap between the heating element and the outer sheath of the wiring cable, it is preferable that a treatment with an adhesive is applied to a portion where the wiring cable extends from the heating element. In this case, the portion where the adhesive is attached may be thicker than other portions of the heating element 20. Therefore, as shown in FIG. 3, it is preferable that an opening 61 is provided in advance in a portion of the longitudinal portion 11 of the first member 10 that is in contact with a portion where the wiring cable extends from the heating element. By carrying out like this, it can prevent that a pressure concentrates on the location where the adhesive agent of the heat generating body 20 adhered, and can suppress the failure | damage of the location where the adhesive agent of the heat generating body 20 adhered. Furthermore, since the location where the wiring cable extends from the heating element 20 and the longitudinal portion 11 are spatially separated, the possibility of electrical leakage can be further reduced. The size and shape of the opening can be set as appropriate within a range not impairing the effects of the present invention.

In order to assemble the valve heater 1, the second member 30 is stacked in a state where the heating element 20 is disposed in the space surrounded by the protrusion 15 of the first member 10, and the first member 10 and the second member 30 are Are connected. Further, the thermostat 50 is attached to the connecting portion 12 with screws 52. Further, the thermocouple is attached to the screw hole 55 with the screw 54 to the connecting portion 12. As described above, since the heating element 20 can be attached to the first member 10 without using an adhesive, no outgas is generated during heating, which is suitable for applications requiring a clean environment such as a semiconductor manufacturing apparatus. It is. The assembled valve heater 1 is shown in FIG. 7 as viewed from the A or B direction in FIG. 1, in FIG. 8 as viewed from the E direction in FIG. 1, and in FIG. 9 in the G or H direction in FIG. FIG. 10 is a diagram seen from the direction, and FIG. 10 is a diagram seen from the I direction in FIG.

In order to attach the valve heater 1 to the valve 100, the main body portion 101 of the valve 100 faces the main body portion facing portion 11 a in the space surrounded by the longitudinal portion 11 and the connecting portion 12 of the first member 10. Thus, the valve 100 can be accommodated and attached to the bottom surface of the main body portion 101 of the valve 100 with the screw 54 through the screw hole 55 of the connecting portion 12.

It should be noted that it may be difficult to fix the valve heater 1 with the screw 54 due to the structure of the valve 100 that is a heated object. In such a case, as shown in FIGS. 11A to 11C, a protrusion such as a half piercing 63 or a claw piece 64 may be formed on the valve side of the connecting portion 12 of the first member 10. preferable. Thereby, since it can fix so that the bottom face of the main-body part 101 of the valve | bulb 100 may not shift | deviate by this protrusion and the longitudinal part 11, the shift | offset | difference and movement of the valve | bulb 100 in the valve | bulb heater 1 are suppressed. be able to. The position at which the protrusion is formed is not limited to the connection portion 12 of the first member 10 and may be the longitudinal portion 11 of the first member 10 as long as the effects of the present invention are not impaired. Even when the protrusion is formed on the longitudinal portion 11 of the first member 10, the displacement and movement of the valve 100 in the valve heater 1 in the longitudinal direction can be suppressed. It should be noted that the number and shape of the protrusions can be set as appropriate as long as the above effects are not impaired.

As another method of fixing the valve heater 1 to the valve 100, as shown in FIGS. 12 (A) and 12 (B), it is opposite to the side of the first member 10 that is connected to the connecting portion among the two longitudinal portions 11 of the first member 10. There is a method in which an opening 66 is provided at a position close to the edge on the side, and both the longitudinal portions 11 are fixed using bolts 67 and nuts 68 that penetrate both the longitudinal portions 11. 12 (A) and 12 (B) are views of the first member 10 of this aspect as viewed from the A direction or the B direction in FIG. The valve 100 is omitted for simplicity. FIG. 12B is a diagram showing a state in which both the longitudinal portions 11 are fixed using bolts 67 and nuts 68 that penetrate both longitudinal portions 11, but the head of the bolt 67 that penetrates both longitudinal portions 11. Since the part and the nut 68 are hidden in the step between the main body part facing part 11a and the joint part facing part 11b in the longitudinal part 11, they cannot be seen from the A direction or the B direction. The position and number of the fixing parts in the above method can be appropriately set within a range in which an excessive load is not applied to the heater of the present invention without impairing the effects of the present invention. In other words, the main body part facing part 11a of the longitudinal part 11 may have a fixing part, and the joint part facing part 11b may have a fixing part. Further, the fixed part may be one place or two or more places. An opening (not shown) is provided at the same location of the second member in place of the two longitudinal portions 11 of the first member 10, and bolts and nuts that penetrate both the second members 30 are used. May be fixed. In this case, openings may be provided in both the longitudinal part 11 and the second member 30 of the first member 10 and the bolts may be fixed so as to penetrate all of them, or openings may be provided only in the second member 30. Alternatively, the bolt may be fixed so as to penetrate both the second members.

The fixing method shown above can be selected and applied as appropriate, and can be applied in combination of two or more.

Then, by supplying power to the heating element 20, the heat from the heating element 20 is transferred to the first member 10, and the main body portion 101 and the joint portion 102 of the valve 100 are uniformly heated. At that time, although not shown, it is preferable to surround the portion excluding the actuator 105 with a heat insulating material in order to maintain a good heating state and prevent a worker from touching and burning.

As described above, the embodiment of the present invention has been described by exemplifying the two-way valve, but the present invention can be variously modified. For example, when another valve such as a stop valve is connected to the joint portion 102, as shown in FIG. 13, the main body portion of the other valve is connected to the joint portion facing portion 11b of the first member 10. A second main body portion facing portion 11a 'facing, a second joint portion facing portion 11b' facing the connecting portion of another valve, and a second connecting portion 12 'are provided. Correspondingly, the second heating element 20 ′ can be used, and the second member 30 can be lengthened so as to cover the entire first member 10.

The valve heater 1 of the present invention can also be used for heating a pipe. In this case, the screw hole 55 provided in the connection portion 12 of the first member 10 is omitted in order to attach the valve heater 1. The whole can be mounted by wrapping around the pipe with a heat insulating tape.

Furthermore, although the longitudinal part 11 of the first member 10 is connected by the connecting part 12 in the above, the second members 30 may be connected by the connecting member without connecting the longitudinal part 11.

A two-way valve was prepared as a valve.

In order to produce the first member, as shown in FIG. 6, an H-shaped plate material in which a pair of longitudinal portions covering the main body portion and the joint portion of the two-way valve are connected by a connecting portion is punched from an aluminum plate. The body portion facing portion and the joint portion facing portion are formed in the longitudinal portion, the protrusion is formed in the body portion facing portion, and the screw groove and the screw hole are further formed in the connecting portion. Then, the 1st member was produced by bend | folding the longitudinal part of both sides to the connection site | part side.

Further, a plate member having a size covering the longitudinal portion of the first member was punched from the stainless steel plate to form an opening and a claw piece, and then the periphery was curved to produce a second member.

Then, a ceramic heater was placed in the space surrounded by the protrusions of the first member, the second member was overlapped and connected with screws, and a thermostat and a thermocouple were attached to the connection part to produce a valve heater.

The above-mentioned valve heater is mounted on a two-way valve, and as shown in FIG. 14, the two-way valve body has a central part on both sides (measurement points a and b), a bottom center part (measurement point c), and a joint part. Attach thermocouples at 7 locations on the center of both sides (measurement points d, e) of one nut and the center of both sides (measurement points f, g) of the other nut. Besieged. Note that the measurement points (b), (e), and (g) shown in the figure indicate that they are on the back side of the illustrated surface. Then, power was supplied to the ceramic heater, and the temperature at each measurement point when the set temperature was 150 ° C. was measured.

The results are shown in FIG. 15. The temperature difference is within 1 ° C. at all measurement points, and it can be seen that the entire valve is heated uniformly.

Although the present invention has been described in detail and with reference to specific embodiments, it will be apparent to those skilled in the art that various modifications and changes can be made without departing from the spirit and scope of the invention.

This application is based on Japanese Patent Application 2010-292550 filed on Dec. 28, 2010, the contents of which are incorporated herein by reference. Moreover, all the content of the literature described in the specification is also taken in as a reference.

1 Heater for valve (heater)
10 First member 11 Longitudinal portion 12 Connecting portion 15 Protrusion 20 Heating element 30 Second member 50 Thermostat 100 Valve 101 Body portion 102 Joint portion 103 Nut 105 Actuator

Claims

A heating element;
A first member made of a metal plate and having a pair of longitudinal portions disposed on both sides of the object to be heated;
A pair of second members that sandwich the heating element together with the first member;
Having a heater.
The heater according to claim 1, wherein the first member further has a connection portion, the longitudinal portions are connected to each other at the connection portion, and a cross-sectional shape at the connection portion of the first member is U-shaped.
The heater according to claim 1, further comprising a connecting member, wherein the second members are connected by the connecting member.
3. The heater according to claim 2, further comprising a temperature control body for controlling the temperature of the heating element, wherein the temperature control body is attached to the connecting portion.
4. The heater according to claim 3, further comprising a temperature control body for controlling the temperature of the heating element, wherein the temperature control body is attached to the connecting member.
The heater according to any one of claims 1 to 5, wherein the heating element is a ceramic heater.
The said to-be-heated body is a valve | bulb, The part facing the main-body part of the valve | bulb of the said longitudinal part protrudes in the main-body part side of the valve | bulb rather than the other part of a longitudinal part, and The heater according to any one of 6.
The heater according to claim 2 or 4, wherein the object to be heated is a valve, and a portion of the longitudinal portion facing the main body portion of the valve protrudes toward the main body portion side of the valve from the other portion of the longitudinal portion. .
From the metal plate, an H-shaped plate material composed of a pair of longitudinal portions facing the object to be heated and a coupling portion that couples the longitudinal portions is punched, and the longitudinal portion of the H-shaped plate material is directed toward the coupling site side. A step of bending to produce the first member;
Producing a second member having a shape superimposed on a longitudinal portion of the first member;
A method of manufacturing a heater, comprising: sandwiching a heating element between a first member and a second member, and connecting the first member and the second member.