WO2012039331A1

WO2012039331A1 - Glass forming mold, glass forming device, glass forming method, and method for manufacturing photomask substrate

Info

Publication number: WO2012039331A1
Application number: PCT/JP2011/070961
Authority: WO
Inventors: 史康中野
Original assignee: 株式会社ニコン
Priority date: 2010-09-21
Filing date: 2011-09-14
Publication date: 2012-03-29
Also published as: JP5812005B2; CN102958854A; TWI498289B; CN102958854B; KR101865977B1; KR20130112029A; TW201217279A; JPWO2012039331A1

Abstract

A glass forming mold is provided with: a mold body (10) used to form glass by heating and pressurizing the glass; and a support member (15) disposed so that the support member (15) can come into contact with the movable member (11) of the mold body and capable of being broken in order to relieve stress caused by the difference in linear expansion coefficient between the mold body and the glass.

Description

Mold for glass molding, glass molding apparatus, glass molding method, and photomask substrate manufacturing method

The present invention relates to a molding die for glass molding, a glass molding apparatus, a glass molding method, and a photomask substrate manufacturing method.
This application claims priority based on Japanese Patent Application No. 2010-210686 for which it applied on September 21, 2010, and uses the content here.

In recent years, in order to obtain an optical member having a large area, such as a large lens or reticle, or a large liquid crystal display, a glass lump such as a pre-formed glass ingot is formed into a flat shape by heating and pressing. A molding method for enlarging the width is used (for example, see Patent Document 1).

JP 2004-307265 A

Here, in the case where the above-mentioned glass lump is heat-pressed, the glass lump is pressure-formed at a high temperature using a mold, and then the glass lump is cooled and then taken out of the furnace. It is. During this cooling, a difference in shrinkage due to a temperature drop occurs between the glass and the mold. That is, when a mold having a larger linear expansion coefficient than that of the glass to be molded is used, when the glass and the mold are shrunk during cooling, the outer mold is more than the inner glass due to the difference in linear expansion coefficient. The amount of shrinkage becomes larger. As a result, excessive stress is applied, causing a phenomenon that the mold is damaged or the glass is damaged.

As a method for preventing such breakage, there is a method of providing a gap on the mold side in consideration of the amount of shrinkage because the amount of shrinkage from a high temperature increases as the size of the mold increases. However, by providing a gap in the mold, the glass that has become a viscous material enters the gap during molding, and a necessary shape may not be obtained. Alternatively, there may be a problem that glass enters the gap between the connecting portions of the mold and damages the mold or induces damage to the mold.

Aspects according to the present invention provide a mold, a glass molding apparatus, a glass molding method, and a method for manufacturing a photomask substrate that can avoid breakage of glass and a mold body and can mold glass into a desired shape. With the goal.

A first aspect of the present invention is a mold main body used for glass heating and pressing,
A support member that is arranged so as to be able to contact a movable member in the mold body and is breakable to release stress based on a difference in linear expansion coefficient between the mold body and the glass. It is characterized by being a mold.

The second aspect of the present invention has a hollow portion that accommodates the glass ingot, and the hollow portion can be moved up and down inside the base plate, the side plate disposed thereon, and the side plates. A glass molding die configured to be surrounded by a top plate, wherein the base plate is provided with a support member so as to come into contact with the outside of the side plate, The base plate is formed so as to be relatively movable in the outer direction, and is supported by the support member from the outside of the side plate. The support member heats the glass ingot accommodated in the hollow portion. When the glass ingot is deformed by pressure, it has a strength that does not break with a shearing force generated by a load applied from the glass ingot via the side plate, and when the glass ingot deformed by heating and pressing is cooled, the molding is performed. Type Characterized in that the mold for glass molding having a strength to break by shearing forces caused by the load applied due to the difference in linear expansion coefficient between the glass ingot.

Further, a third aspect of the present invention is characterized in that a glass forming apparatus having the above-described forming mold for glass forming, a heating means and a pressurizing means for the glass ingot is provided.

According to a fourth aspect of the present invention, there is provided a glass forming method using the glass forming apparatus described above, wherein a glass ingot is accommodated in a forming die, and the glass ingot is heated and pressurized by a heating means and a pressing means. When cooling the deformed glass ingot, the side plate is moved outwardly with respect to the base plate due to a load applied due to a difference in linear expansion coefficient between the mold and the glass ingot. The glass molding method is characterized in that the glass member is moved relative to each other so that a shearing force acts on the supporting member, and the supporting member is broken in accordance with the shearing force.

Further, the fifth aspect of the present invention is characterized in that it is a method for producing a photomask substrate having a step of obtaining a glass molded body by using the glass molding method described above.

According to the mold of the aspect of the present invention, it is possible to avoid breakage of the glass and the mold body, and to mold the glass into a desired shape.

It is sectional drawing which shows the glass forming apparatus which concerns on this Embodiment. It is a top view which shows the shaping | molding die for glass shaping | molding in the glass shaping | molding apparatus of FIG. FIG. 3 is a cross-sectional view taken along line AA in FIG. 2. It is sectional drawing which shows the state which deform | transformed the glass ingot in the shaping | molding die for glass shaping | molding of FIG. It is sectional drawing which shows the state in which the pin was broken in the shaping | molding die for glass shaping | molding of FIG. It is a perspective view which shows the other example of the shaping | molding die for glass forming. It is a perspective view which shows the other example of the shaping | molding die for glass forming. It is a perspective view which shows the other example of the shaping | molding die for glass forming. It is a perspective view which shows the other example of the shaping | molding die for glass forming.

Hereinafter, examples of embodiments of the present invention will be described.

FIG. 1 is a cross-sectional view showing a glass forming apparatus according to the present embodiment. FIG. 2 is a plan view showing a glass forming mold in the glass forming apparatus of FIG. 3 is a cross-sectional view taken along the line AA in FIG. FIG. 4 is a cross-sectional view showing a state where the glass ingot is deformed in the glass forming mold of FIG. FIG. 5 is a cross-sectional view showing a state in which a pin is broken in the glass forming mold of FIG. 6 to 9 are perspective views showing other examples of a molding die for glass molding.

The glass forming apparatus 1 of the present embodiment forms a photomask substrate such as a semiconductor mask, a liquid crystal mask, an optical large lens material, or the like into a desired shape from a synthetic quartz glass ingot manufactured using a silicon compound as a raw material. It is an apparatus for heat forming.

As shown in FIG. 1, the glass forming apparatus 1 includes a heat insulating material 3 provided over the entire inner wall of a metal vacuum chamber 2, and a carbon heater (heating means) provided on the wall of the heat insulating material 3. ) 5. A glass graphite mold 10 (hereinafter referred to as a mold 10) made of carbon graphite is installed in the center of the vacuum chamber 2, and a cylinder (pressurizing means) 4 is provided on the upper part thereof. ing.

The forming die 10 is disposed on the pedestal 6 inside the vacuum chamber 2 of the glass forming apparatus 1 and has a bottom portion including a base plate 14 and a bottom plate 17 as shown in FIGS. The mold 10 (mold body) including the base plate 14 and the bottom plate 17 is made of carbon graphite as described above, and is made of a material having a larger linear expansion coefficient than the glass ingot 20A. Specifically, the linear expansion coefficient of synthetic quartz glass is about 5 × 10 −7 / ° C., and the linear expansion coefficient of carbon graphite is about 2 to 5 × 10 −6 / ° C.

Moreover, the shaping | molding die 10 (mold main body) has the hollow part 19 which accommodates glass ingot 20A, The said hollow part 19 is the baseplate 14 and the baseplate 17, and the side plate 11 arrange | positioned on it. The inner sides of the side plates 11 are surrounded by a top plate 13 that can move up and down. More specifically, the mold 10 (mold body) is provided with a side plate 11 (movable member) formed to be movable relative to the base plate 14. This side plate 11 and the side plate guide 12 fixed with bolts or the like limit the freedom (movement) of the top plate 13 that directly presses the glass ingot 20A to be formed in the vertical direction. In the present embodiment, as shown in FIG. 2, a rail 18 is provided on the base plate 14, and the side plate 11 is on the rail 18. The side plate 11 is movable with respect to the base plate 14 in the direction of the rail 18 (that is, the outer direction of the side plate 11).

Further, on the outside of the side plate 11 in the base plate 14, a pin (support member) 15 is disposed so as to contact the side plate 11. The pin 15 supports and restrains the side plate 11 from the outside. In particular, in the present embodiment, as shown in FIG. 2, a plurality of insertion holes 16 are formed in the base plate 14 along positions that contact the outside of the side plate 11. The pin 15 can be inserted into and removed from the plurality of insertion holes 16. Furthermore, in the present embodiment, a plurality of pins 15 are arranged for each of the four side plates 11 in the mold 10 arranged in a substantially square shape in plan view. Here, two pins 15 are arranged on each side plate 11.

In addition, a plurality of pins 15 of the same type may be arranged. Alternatively, the pins 15 may be arranged by combining different materials, shapes, and diameters according to the required strength and the like. The plurality of insertion holes 16 are configured such that all of the insertion holes 16 can correspond to different shapes and diameters (for example, the diameter of the holes is gradually reduced from the surface side). Also good. Or the some insertion hole 16 may be comprised so that the shape and diameter which can be inserted mutually differ. Alternatively, the number of pins 15 to be arranged may be changed for each side plate 11 (that is, the number of pins 15 may be different between one side plate 11 and another side plate 11). .

When the glass ingot 20A accommodated in the hollow portion 19 is deformed by heating and pressing, the pin 15 has a strength that does not break due to a shearing force generated by a load applied from the glass ingot 20A through the side plate 11, and is heated. When the glass ingot 20B deformed by pressing is cooled, the glass ingot 20B has a strength to break due to a shearing force generated by a load applied due to the difference between the linear expansion coefficient of the mold 10 and the linear expansion coefficient of the glass ingot 20A. is doing. In the present embodiment, the linear expansion coefficients of the members constituting the mold 10 are all equal. In this case, since the lateral width of the base plate 14 is the largest, the magnitude of the shear force generated during cooling is substantially determined by the difference in the linear expansion coefficient between the base plate 14 and the glass ingot 20A.

That is, the pin 15 has a strength that can withstand the pressure acting on the side plate 11 from the deformed glass ingot 20A when the glass ingot 20A accommodated in the hollow portion 19 is deformed by heating and pressing. is doing. When the deformed glass ingot 20B is cooled, the base plate 14 of the mold 10 made of carbon graphite has a larger linear expansion coefficient than the glass ingot 20B. 14 is larger. As a result, a load is generated in which the glass ingot 20B having a small shrinkage amount pushes the side plate 11 disposed on the base plate 14 having a large shrinkage amount toward the outside. The pin 15 has such strength that it can be broken by a shearing force generated by the load applied at this time. A load is applied due to the difference in linear expansion coefficient between the glass ingot 20B and the base plate 14 of the mold 10 when the glass ingot 20B is cooled, and the pin 15 is bent by a shearing force generated by the load. As a result, the glass and the mold 10 can be prevented from being damaged.

Further, as described above, the cylinder (pressurizing means) 4 for directly pressing the top plate 13 is installed on the upper portion of the glass forming apparatus 1. With this cylinder 4, the glass ingot 20 A is pressed and molded to an arbitrary thickness.

Next, a glass molding method and a photomask substrate manufacturing method using the mold 10 and the glass molding apparatus 1 including the mold 10 will be described.

First, as shown in FIGS. 1 and 3, a base plate 14, a bottom plate 17, a side plate 11, and a side plate guide 12 are arranged in combination on the base 6 inside the vacuum chamber 2 in the glass forming apparatus 1. Further, predetermined pins 15 (here, two pins 15 are arranged for each side plate 11) are inserted into insertion holes 16 formed in the base plate 14. Thereby, the shaping | molding die 10 set in the state which supported the side plate 11 with the pin 15 from the outer side is formed. Further, the glass ingot 20 A is disposed in the hollow portion 19 of the mold 10 with respect to the mold 10, the top plate 13 is disposed thereon, and the cylinder 4 is brought into contact with the upper surface of the top plate 13.

Next, after evacuating the inside of the vacuum chamber 2 of the glass forming apparatus 1 set as described above, the inside of the vacuum chamber 2 is filled with an inert gas. Further, the glass ingot 20 A in the hollow portion 19 of the mold 10 is heated by the carbon heater 5, and the temperature is raised to the softening point or higher from the crystallization temperature. At this time, the inside of the glass ingot 20A may be held at a constant temperature until the temperature reaches a uniform temperature.

When the predetermined temperature is reached, the cylinder 4 is operated to move the top plate 13 downward, and the glass ingot 20A is pressure-molded. In addition, at the time of starting the pressure molding, the mold 10 exhibits expansion according to the environmental temperature. Further, as the pressurization process of the glass ingot 20A progresses, the glass ingot 20A gradually becomes a flat shape and is in close contact with the side plate 11 without any gap.

As the glass ingot 20A is pressurized by the top plate 13, the pressing force of the top plate 13 acts on the side plate 11 as a stress in the outer peripheral direction (outward direction) via the glass ingot 20A. The side plate 11 is difficult to move because the freedom to move outward is restricted by the pins 15. At this time, the stress generated by the glass molding is transmitted to the pin 15 through the glass ingot 20 A and the side plate 11. Here, when the pin 15 is broken by the stress described above, the side plate 11 is moved in the outer circumferential direction in which the glass ingot 20A flows due to the force received from the glass ingot 20A at the same time as the restraint is released. As a result, the glass ingot 20 A flows out of the area surrounded by the side plate 11, and a shape following the inner side surface of the side plate 11 cannot be obtained. For this reason, the pin 15 needs to be strong enough to withstand the stress generated by the molding of the glass, and is configured to have this.

Next, as shown in FIG. 4, the glass ingot 20 A is pressed to the state in close contact with the bottom plate 17, the top plate 13, and the side plate 11 of the mold 10 by the above-described heat and pressure molding, Then, a cooling process is performed. With this cooling, the mold 10 and the glass ingot 20B show shrinkage according to the ambient temperature. Here, the mold 10 has a larger linear expansion coefficient than the glass ingot 20B. Further, in particular, the base plate 14 of the mold 10 is larger in the lateral direction than the side plate 11. Therefore, the contraction amount of the base plate 14 becomes relatively large with respect to the side plate 11, and the contraction accompanying cooling becomes remarkable. Accordingly, when viewed relatively, a load is generated in the direction in which the glass ingot 20B expands as it cools, that is, in the direction in which the side plate 11 is pushed outward (outward).

The load received by the side plate 11 is transmitted to the pins 15 installed outside the side plate 11. When the stress generated by the contraction applied from the side plate 11 exceeds the strength limit of the pin 15, the pin 15 is broken toward the outside as shown in FIG. As the pin 15 is broken, the side plate 11 is released from the restraint, and at the same time, the side plate 11 moves in the outer circumferential direction (outward direction) in which the glass ingot 20B flows to release the stress. At this time, since the glass ingot 20B has already been solidified by cooling, it does not flow out of the area surrounded by the side plates 11. Then, it cools to about room temperature and takes out the shaping | molding die 10 from the inside of the vacuum chamber 2, and shaping | molding of glass is completed.

After that, for the glass molded body obtained by using the glass molding method as described above, grinding and slicing for processing into a predetermined size, chamfering for making the end face into an R shape, an abrasive, etc. Processing such as a polishing step for finishing the surface by using is appropriately performed. As a result, a desired photomask substrate can be obtained.

As described above, according to the molding die 10 for glass molding, the glass molding apparatus 1, the glass molding method, and the photomask substrate manufacturing method of the present embodiment, the pin (support) that is broken by the stress generated by cooling after molding. By installing the member 15, the stress can be released without applying excessive stress to the glass to be molded and without damaging the glass to be molded, and the glass to be molded And the load on the mold 10 due to the stress caused by the difference in linear expansion coefficient between the base plate 14 of the mold 10 and the glass can be molded into a desired shape.

Further, in the present embodiment, a pin 15 (pin-like member, rod-like member) is used as a support member, and the pin 15 can be inserted into and removed from a plurality of insertion holes 16 formed in the base plate 14. Therefore, the strength can be easily changed by changing the number and types of pins 15 to be arranged. For example, in the present embodiment, two pins 15 of the same type are arranged on each side plate. If the number of pins to be arranged is increased, the strength as a whole pin can be increased (in contrast, if the number of pins to be arranged is reduced, the strength as a whole pin can be lowered). In addition, when placing multiple pins, use only one with a large diameter, use only a plurality with a small diameter, or use a mixture of one with a large diameter and one with a small diameter. The strength can be changed by mixing a plurality of types with different shapes. In addition, when arrange | positioning a some pin, you may arrange | position so that a load may be applied to each pin equally and it may contact | abut with a side plate in a substantially line. Moreover, you may arrange | position a several pin at equal intervals as much as possible so that a load may be applied equally to each pin. Additionally and / or alternatively, the pins can be non-aligned or non-equally spaced.

Further, as described above, in the present embodiment, the pin 15 that can be inserted into and removed from the insertion hole 16 formed in the base plate 14 is used as the support member. Therefore, the processing after the pin 15 is broken can be simplified. For example, it is only necessary to remove the broken pin 15 from the insertion hole 16 and reinsert the new pin 15 into the insertion hole 16 after the glass is formed. Therefore, the manufacturing efficiency of glass and a photomask substrate can be improved.

When determining the strength of the pin, for example, the load applied to the side plate and the shear force generated on the pin are obtained in advance by dynamic simulation, and the shear force generated by the load during cooling does not break with the shear force generated by the load during molding. The strength of the pin can be determined so as to break with force. If the strength required for the pin is determined in this way, a pin having the required strength can be selected from various pins whose strength has been measured in advance.

The embodiment described above is described for easy understanding of the present invention, and is not described for limiting the present invention.

For example, in the above-described embodiment, quartz glass is taken as an example of the glass to be molded and carbon (carbon graphite) is taken as an example of the material of the mold, but the present invention is not limited to this. For example, borosilicate glass, soda lime glass, etc. are mentioned as other glass to shape | mold. The material of the mold may be another material that can be used at a high temperature such as alumina (aluminum oxide).

Here, when selecting the material of the glass and the mold, it may be determined in consideration of the glass composition and molding conditions. The linear expansion coefficient of the glass is relatively smaller than the linear expansion coefficient of the material of the mold (particularly the base plate) (conditions in which the support member breaks and the function of the mold of the present invention is exhibited). If it is a combination, the effect of the present embodiment can be obtained. However, as the material of the mold (mold body), carbon is often preferable because carbon is superior in strength and thermal shock resistance to alumina.

In this embodiment, carbon graphite is used as the material of the pin 15. As the material of the pin 15, a material other than carbon graphite may be used. For example, a material that can be used at a high temperature such as alumina (aluminum oxide) may be used.

In the above-described embodiment, the pin 15 (pin-like member, rod-like member) is used as the support member, but the present invention is not limited to this. A member other than the pin 15 may be used as long as the member has a necessary strength and can be broken by a predetermined load. As the support member other than the pin 15, for example, a plurality of insertion members 115b that can be inserted into and removed from the insertion holes 116 formed in the base plate 114 are formed below the long plate member 115a as shown in FIG. The long plate-like member 115 with an insertion member is mentioned. In the mold using the long plate-like member 115 with the insertion member, the long plate-like member 115a contacting the side plate 111 is pressed in the outer peripheral direction (outward) during cooling, so that the long plate-like member 115a is inserted. The portion between the members 115b can be broken.

Further, as a support member other than the pin 15, a form shown in FIG. In FIG. 7, a groove 216 is formed at a position along the side plate 211 in the base plate 214 instead of the insertion hole 16, and a thin plate member 215 that can be inserted into and removed from the groove 216 is used as a support member. In the mold using the thin plate member 215, a part (contact portion) of the thin plate member 215 is in contact with the side plate 211, and this is pressed in the outer peripheral direction (outward direction) during cooling. Further, another part (insertion portion) of the thin plate member 215 is inserted into the groove 216 and substantially fixed. As a result, the portion between the contact portion and the insertion portion of the thin plate member 215 can be broken.

Moreover, as a support member other than the pin 15, the form shown in FIG. 8 is mentioned. In FIG. 8, a substantially L-shaped member 315 is a support member. In one example, the L-shaped bottom portion 315b of the substantially L-shaped member 315 is fixed to the base plate 314 with its longitudinal direction as the outer peripheral direction (outward direction). For example, a recess 316 for fixing the bottom portion 315b is formed in the base plate 314. Further, the side plate 311 is in contact with the L-shaped upper portion 315a. In other words, in one example, the substantially L-shaped member 315 is inserted into a recess 316 provided in the base plate 314 and substantially fixed to the base plate 314, and one end of the base portion 315b is used as a base. An upper portion 315a extending in a direction orthogonal to the extending direction of the bottom portion 315b, and one surface of the upper portion 315a is in contact with the side plate 311. In the mold using the substantially L-shaped member 315, the side plate 311 presses the upper portion 315a of the substantially L-shaped member 315 during cooling, so that the space between the L-shaped upper portion 315a and the bottom portion 315b is reduced. The part can be broken.

Further, as a support member other than the pin 15, a form shown in FIG. In FIG. 9, a substantially L-shaped long plate-like member 415 is used as a support member, and an L-shaped bottom portion 415 b of the substantially L-shaped rod-like member 415 is fixed to the base plate 414. For example, a recess 416 for fixing the bottom portion 415b is formed in the base plate 414. The side plate 411 is in contact with the upper portion 415a of the L shape. In other words, in one example, the substantially L-shaped long plate-like member 415 has a bottom portion 415 b that is inserted into a recess 416 provided in the base plate 414 and substantially fixed to the base plate 414. The bottom side portion 415 b has a long side extending along the side plate 411. The substantially L-shaped long plate-like member 415 has an upper portion 415 a extending with one long side of the bottom portion 415 b as a base, and one surface of the upper portion 415 a is in contact with the side plate 411. The angle between the bottom portion 415b and the upper portion 415a is, for example, 90 °. In the mold using the substantially L-shaped long plate-like member 415, when the side plate 411 presses the upper portion 415a of the substantially L-shaped long plate-like member 415 during cooling, the upper portion 415a, the bottom portion 415b, The part in between can be broken.

In the present embodiment, the example in which the glass ingot 20A is formed at a temperature not lower than the crystallization temperature and not higher than the softening point temperature has been described. However, the present invention is not limited to this. The molding temperature may be equal to or higher than the crystallization temperature of the glass ingot 20A. For example, you may shape | mold at temperature higher than the softening point of glass ingot 20A.

DESCRIPTION OF SYMBOLS 1 Glass forming apparatus 2 Vacuum chamber 3 Heat insulating material 4 Cylinder (pressurizing means)
5 Carbon heater (heating means)
6 Pedestal 10 Mold for

glass molding

11, 111, 211, 311, 411 Side plate 12 Side plate guide 13

Top plate

14, 114, 214, 314, 414 Base plate 15 Pin (support member)
115 Long plate member with support member (support member)
215 Thin plate member (support member)
315 substantially L-shaped rod-shaped member (supporting member)
415 substantially L-shaped long plate member (support member)
16, 116 Insertion hole 216

Groove

316, 416 Recess 17 Bottom plate 18

Rail

20A, 20B Glass ingot

Claims

A mold body used for glass heating and pressing,
A support member that is disposed so as to be able to contact a movable member in the mold body, and is breakable to release stress based on a difference in linear expansion coefficient between the mold body and the glass;
A mold for forming glass.
2. The mold for glass molding according to claim 1, wherein the mold body has a plurality of holes and / or a plurality of grooves into which a part of the support member can be inserted.
The support member has a strength that is not broken by a shearing force generated by a load applied through the movable member in the heating and pressurizing step, and a difference in linear expansion coefficient between the mold body and the glass in the cooling step. The mold for glass molding according to claim 1 or 2, which has a strength to be broken by a shearing force generated by a load applied due to.
The glass mold according to any one of claims 1 to 3, wherein a material of the support member includes carbon.
The mold body is
A base plate,
A top plate that can move up and down;
A side plate as the movable member, which is disposed on the base plate and is relatively movable with respect to the base plate;
The molding die for glass molding according to any one of claims 1 to 4, comprising:
It has a hollow portion that accommodates a glass ingot, and is configured to surround the hollow portion with a base plate, a side plate disposed thereon, and a top plate that can move up and down between the side plates. A mold for glass molding,
A support member is disposed on the base plate so as to contact the outside of the side plate, and the side plate is formed to be movable relative to the base plate in the outer direction, and Supported from the outside of the side plate by a support member;
The support member is
When the glass ingot accommodated in the hollow portion is heated and pressed to be deformed, the glass ingot has a strength that does not break with a shearing force generated by a load applied via the side plate from the glass ingot,
When the glass ingot deformed by heating and pressing is cooled, the glass ingot has a strength to be broken by a shearing force generated by a load applied due to a difference in linear expansion coefficient between the mold and the glass ingot. Characteristic mold for glass molding.
A plurality of insertion holes are formed in the base plate along a position where it contacts the outside of the side plate,
The said support member is comprised with the pin which can be inserted or removed by these insertion holes, The shaping | molding die for glass forming of Claim 6 characterized by the above-mentioned.
The mold for glass molding according to claim 6 or 7, wherein the glass ingot is quartz glass.
The glass mold according to any one of claims 6 to 8, wherein the mold is made of carbon.
A mold for glass molding according to any one of claims 1 to 9,
A glass forming apparatus comprising a heating means and a pressurizing means for a glass ingot.
A glass forming method using the glass forming apparatus according to claim 10,
A glass ingot is accommodated in the mold,
The glass ingot is heated and pressurized to be deformed by a heating means and a pressure means,
When cooling the deformed glass ingot, the side plate moves relative to the base plate in the outer direction due to a load applied due to a difference in linear expansion coefficient between the mold and the glass ingot. Thus, a shearing force acts on the supporting member, and the supporting member is broken according to the shearing force.
A method for producing a photomask substrate, comprising a step of obtaining a glass molded body using the glass molding method according to claim 11.