WO2011158976A1

WO2011158976A1 - Device for supplying an epoxy moulding compound

Info

Publication number: WO2011158976A1
Application number: PCT/KR2010/003834
Authority: WO
Inventors: 김선오
Original assignee: 세크론 주식회사
Priority date: 2010-06-15
Filing date: 2010-06-15
Publication date: 2011-12-22

Abstract

In a facility for moulding semiconductor chips, an epoxy-moulding-compound supply device for loading a tray with an epoxy moulding compound may comprise: a container for receiving the epoxy moulding compound in the form of a powder; a trench member which extends in one direction from the container and functions as a delivery route for supplying the epoxy moulding compound to the tray for transporting the epoxy moulding compound; a vibration generator which is connected to the container and causes the container and the trench member to vibrate so as to move the epoxy moulding compound from the container towards the end of the trench member such that the epoxy moulding compound drops from the end of the trench member towards the tray; and an external disturbance blocking part disposed underneath the vibration generator in order to reduce the direct transmission of external disturbances to the trench member.

Description

Apparatus for feeding epoxy molding compound

The present invention relates to an apparatus for supplying an epoxy molding compound (EMC). More particularly, the present invention relates to an apparatus for supplying a powdered epoxy molding compound into a mold by using a tray for packaging semiconductor chips mounted on a substrate in the manufacture of a semiconductor device.

In general, in the manufacture of a semiconductor device, a molding process may be performed to package semiconductor chips mounted on a substrate using an epoxy resin. The molding process may be performed by a molding apparatus including a mold that provides a space for molding the semiconductor chips.

The mold may include an upper mold and a lower mold, and a substrate in which the semiconductor chips are mounted and an epoxy molding compound in powder form may be supplied to the mold by a loader. have. At this time, the EMC powder may be carried by the tray.

The device for supplying the EMC feeds the EMC powder to the tray, which can be transported into the mold by the loader.

The EMC supply device includes a storage container for storing the EMC in a powder state, a storage container for storing the EMC powder supplied from the storage container, and an induction furnace for extending the EMC powder to the tray and extending from the storage container. It may include a trench member to perform a function and a vibration generator for vibrating the trench member to move the EMC powder through the trench member.

In the case of using the conventional EMC supply device as described above, disturbances from the outside, for example, shock or vibration, may be directly transmitted to the trench member through the vibration generator, and conversely, vibration by the vibration generator It can be delivered directly throughout this molding installation. As a result, EMC powder falling from the trench member may not be uniformly supplied to the tray by the disturbance, and vibration by the vibration generator may damage other elements in the molding facility. In addition, when the EMC powder falls irregularly due to the disturbance, a large amount of dust may be generated from the EMC powder, and thus the inside of the molding facility may be contaminated by the dust.

It is an object of the present invention to provide an EMC supply apparatus capable of preventing external disturbances from being directly transmitted to a trench member for supplying an EMC powder.

Embodiments of the present invention have another object to provide an EMC supply device that can reduce the dust generated during the supply of the EMC powder.

According to embodiments of the present invention, an EMC supply apparatus is provided for supplying an epoxy molding compound to a container for receiving an epoxy molding compound in a powder state, and a tray extending from the container and carrying the epoxy molding compound. A trench member which functions as a delivery passage, and is connected with the vessel and moves the epoxy molding compound from the vessel toward the end of the trench member and the epoxy molding compound is dropped from the end of the trench member towards the tray And a vibration generator configured to vibrate the trench member, and a disturbance blocker disposed under the vibration generator to reduce direct transmission of external disturbances to the trench member.

According to embodiments of the present invention, the disturbance blocker is disposed between the upper plate supporting the vibration generator, the lower plate disposed below the upper plate, and the upper plate and the lower plate to absorb the disturbance. Attenuation member may be included.

According to embodiments of the present invention, the damping member may comprise a plurality of springs.

According to embodiments of the present invention, the EMC supply device is connected to the disturbance blocker on the side of the disturbance blocker for measuring the weight of the epoxy molding compound contained in the container and the vibration frequency and amplitude by the vibration generator It may further include a weight sensor.

According to embodiments of the present invention, the disturbance blocking unit may be connected to the weight sensor by a cantilever beam extending in the horizontal direction from the weight sensor and a bracket connecting the end plate and the lower plate of the cantilever beam.

According to embodiments of the present invention, the lower plate may be disposed lower than the upper surface of the weight sensor.

According to embodiments of the present invention, the EMC supply device may further include a reinforcing member bonded to the trench member to extend along the trench member and to increase the rigidity of the trench member.

According to embodiments of the present invention, the EMC supply device may further include a gate member disposed in the trench member to adjust the amount of the epoxy molding compound carried along the inside of the trench.

According to embodiments of the present invention, the gate member may have sides configured to be parallel to the inner surfaces of the trench member.

According to embodiments of the present invention, the trench member may have a width reduced downward.

According to embodiments of the present disclosure, the EMC supply apparatus may further include a chute disposed between the end of the trench member and the tray to guide the epoxy molding compound dropped from the end of the trench member to the tray. have.

According to embodiments of the present invention, the EMC supply device is disposed adjacent to the chute, and the dust generated in the space adjacent to the end of the chute while supplying the epoxy molding compound to the tray through the chute. It may further include an epoxy molding compound remover having a plurality of vacuum holes for removal.

According to embodiments of the present invention, the epoxy molding compound remover may include an upper and lower suction chambers, and the lower end of the chute may be disposed in the suction chamber while supplying the epoxy molding compound. The plurality of vacuum holes may be disposed on sidewalls of the suction chamber.

According to embodiments of the present invention, the epoxy molding compound removal unit is connected to the suction chamber, has sidewalls and bottom panels constituting an open top and a closed bottom, to remove the epoxy molding compound contained in the container. A second suction chamber having a plurality of second vacuum holes for sucking the epoxy molding compound dropped through the trench member into the second suction chamber, and the suction to adjust positions of the suction chamber and the second suction chamber. The apparatus may further include a driver for moving the chamber and the second suction chamber.

According to embodiments of the present invention, the trench member may extend in a horizontal direction or a direction inclined downward.

According to the embodiments of the present invention as described above, the EMC supply device is the EMC powder by the disturbance because the disturbance can be sufficiently blocked by the disturbance blocker while supplying the EMC powder to the EMC tray for transporting the EMC powder This irregular drop can be prevented.

In addition, a weight sensor for measuring the weight and vibration frequency and amplitude of the EMC powder is disposed on the side of the disturbance blocker to reduce the dropping distance of the EMC powder, thereby reducing the scattering of the EMC powder. . In particular, the EMC powder scattered during the supply of the EMC powder to the tray can be removed by an EMC remover disposed adjacent to the bottom of the chute.

In addition, by placing the gate member in the trench member for supplying the EMC powder to the EMC tray for transporting the EMC powder, it is possible to prevent abnormal drop of a large amount of the EMC powder by the disturbance.

As a result, the EMC supply device can load the EMC powder uniformly in the tray, and can sufficiently reduce the contamination of the molding equipment by the EMC powder.

1 is a schematic front view illustrating an EMC supply apparatus according to an embodiment of the present invention.

FIG. 2 is a schematic side view for explaining the EMC supply apparatus shown in FIG. 1.

3 is a schematic view for explaining a method of loading an EMC powder in an EMC tray.

4 and 5 are schematic diagrams for describing the EMC powder carried through the trench member and the gate member shown in FIGS. 1 and 2.

6 and 7 are schematic diagrams for describing the EMC remover illustrated in FIG. 3.

FIG. 8 is a schematic cross-sectional view for describing the first and second suction chambers shown in FIG. 3.

FIG. 9 is a schematic diagram illustrating another example of the trench member illustrated in FIG. 1.

10 and 11 are schematic configuration diagrams for explaining another example of a method of mounting the container and the trench member shown in FIG. 1 to the vibration generator.

The invention is now described in more detail with reference to the accompanying drawings showing embodiments of the invention. However, the present invention should not be construed as limited to the embodiments described below and may be embodied in various other forms. The following examples are provided to fully convey the scope of the invention to those skilled in the art, rather than to allow the invention to be fully completed.

When an element is described as being disposed or connected on another element or layer, the element may be placed or connected directly on the other element, and other elements or layers may be placed therebetween. It may be. Alternatively, where one element is described as being directly disposed or connected on another element, there may be no other element between them. Terms such as first, second, third, etc. may be used to describe various items such as various elements, compositions, regions, layers and / or parts, but the items are not limited by these terms. Will not.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Also, unless stated otherwise, all terms including technical and scientific terms have the same meaning as would be understood by one of ordinary skill in the art having ordinary skill in the art. Such terms, such as those defined in conventional dictionaries, will be construed as having meanings consistent with their meanings in the context of the related art and description of the invention, and ideally or excessively intuitional unless otherwise specified. It will not be interpreted.

Embodiments of the invention are described with reference to cross-sectional illustrations that are schematic illustrations of ideal embodiments of the invention. Accordingly, changes from the shapes of the illustrations, such as changes in manufacturing methods and / or tolerances, are those that can be expected. Accordingly, embodiments of the invention are not to be described as limited to the particular shapes of the areas described as the illustrations, but include deviations in the shapes, and the areas described in the figures are entirely schematic and their shapes. Are not intended to describe the precise shape of the region nor are they intended to limit the scope of the invention.

FIG. 1 is a schematic front view for explaining an EMC supply device according to an embodiment of the present invention, and FIG. 2 is a schematic side view for explaining the EMC supply device shown in FIG. 3 is a schematic view for explaining a method of loading an EMC powder in an EMC tray.

1 and 2, an EMC supply apparatus 100 according to an embodiment of the present invention molds semiconductor chips mounted on a substrate such as a printed circuit board (PCB) in manufacturing a semiconductor device. It can be used to supply the powdered EMC 2 into a mold (not shown).

The EMC powder 2 may be supplied into the mold by the tray 10. As shown in FIG. 3, the tray 10 may be supported by a separate tray transfer device 12, for example, a Cartesian robot at the bottom of the EMC supply device 100, and the EMC powder. (2) can be moved by the tray transfer device 12 in the horizontal direction to load. The tray 10 loaded with the EMC powder 2 may be transported into the mold by a conveying device such as a load elevator (not shown) and a loader (not shown).

In particular, the tray 10 may be transported to the load elevator by the tray transfer device 12, and may be transported into the mold by the loader after being lifted by the load elevator. After supplying the EMC powder 2 into the mold, the tray 10 may be taken out of the mold by the loader and lowered by an unload elevator (not shown). Although not shown, a cleaning device (not shown) for removing residual EMC powder 2 inside the tray may be disposed below the tray transport device 12, and the tray 10 may be disposed in the unload elevator. By the cleaning device. The tray 10 cleaned by the cleaning device may be lifted by the load elevator, and under the EMC supply device 100 for loading of the EMC powder 2 by the tray transport device 12. Can be placed in.

Although not shown in detail, the tray 10 may include sidewalls defining a space for loading the EMC powder 2 and lower shutters slidably disposed in a horizontal direction under the sidewalls. The lower shutters may be opened and closed in a slide manner to supply the EMC powder 2 into the mold.

As shown in FIG. 3, the EMC supply apparatus 100 may be used to supply the EMC powder 2 to the tray 10 from a storage container 20 for storing the EMC powder 2. . An opening for supplying the EMC powder 2 may be formed in the lower panel of the storage container 20, and may be formed by a screw 22 extending in a horizontal direction through the lower space of the storage container 20. EMC powder 2 may fall through the opening in the vertical direction. The screw 22 may extend to the outside through one sidewall of the storage container 20, and may be connected to a rotation driver 24 for rotating the screw 22. That is, a predetermined amount of the EMC powder 2 may be delivered to the EMC supply device 100 by the rotation of the rotation driver 24.

The operation of the rotary driver 24 may be controlled by a controller (not shown) for controlling the EMC supply. That is, in order to accurately supply the required amount of EMC powder 2 to the semiconductor device to be molded, the controller may control the operation of the rotation driver 24 according to the volume information of the semiconductor device.

The EMC supply device 100 may be disposed below the storage container 20. For example, the EMC supply device 100 is disposed below the storage container 20 and contains a container 102 for receiving the EMC powder 2 falling from the storage container 20, and the container ( It may include a trench member 104 extending in one direction from the 102, a vibration generator 110 for moving the EMC powder 2 by vibrating the trench member 104, and the like.

Specifically, the container 102 may be disposed below the opening of the storage container 20 to receive the EMC powder 2, and may be open at the top to receive the EMC powder 2. have. The container 102 may have an interior space that gradually decreases from the top to the bottom. In particular, as shown, both sidewalls of the container 102 may be adjacent to each other at the bottom, and the rear sidewall may also be inclined inwardly of the container 102 like the sidewalls. However, the front sidewall connected to the trench member 104 may extend in the vertical direction.

The trench member 104 may have a trough shape and may extend in a horizontal direction from the front sidewall of the container 102.

The trench member 104 may have a trench used as a passage for carrying the EMC powder 2. The trench may have a shape that gradually narrows downward, that is, a width gradually narrowing downward to reduce the width of the falling EMC powder 2 while the EMC powder 2 falls. For example, the trench member 104 may have a trench having a 'V' shape, and the container 102 may have an opening connected to the trench.

According to other embodiments of the present invention, the trench member 104 may have a 'V' shape or a 'U' shape with a flat bottom.

In addition, by reducing the lower width of the trench member 104 as described above, it is possible to reduce the EMC powder (2) adhered to the inside and the end of the trench member 104.

According to the exemplary embodiment of the present invention, as shown in FIGS. 4 and 5, the gate member 106 may be disposed in the trench member 104. The gate member 106 may be provided to adjust a transfer amount of the EMC powder 2 transferred by vibration along the inside of the trench member 104. For example, the gate member 106 may have sides configured to be parallel to the inner surfaces of the trench member 104. In particular, when the trench member 104 has an internal structure having a 'V' shape, the gate member 106 may have an inverted triangle structure, and inner surfaces of the trench member 104 and the The EMC powder 2 may be transferred through an 'V' shaped opening formed between the gate members 106. That is, the transfer amount of the EMC powder 2 may be adjusted by the width between the inner surfaces of the trench member 104 and the side surfaces of the gate member 106.

As described above, since the transfer amount of the EMC powder 2 can be kept constant by the gate member 106, the EMC powder 2 can be uniformly supplied to the tray 10, and unwanted shock or vibration It is possible to prevent the large amount of EMC powder 2 from being dropped at once by the frequency change. As a result, dust generation due to abnormal drop of the EMC powder 2 can be reduced.

Although not shown, the gate member 106 may be configured to adjust the height in the vertical direction. That is, the degree of opening between the trench member 104 and the gate member 106 may be adjusted by providing a separate driving part for adjusting the height of the gate member 106, and thus the EMC powder 2 The feed rate or feed amount of the can be adjusted.

Referring again to FIGS. 1 and 2, the vibration generator 110 is disposed below the vessel 102 and the EMC powder 2 is removed from the trench 102 in the trench member 104 within the trench member 104. The container 102 and the trench member 104 may be vibrated to move toward an end of the 104. Although not shown in detail, the vibration generator 110 may include a piezoelectric element or a rotating body connected to a motor, and may vibrate the container 102 and the trench member 104 at a frequency of about 100 to 400 Hz. Can be.

The container 102 and the trench member 104 may be connected to the vibration generator 110 through separate support panels 112 and reinforcing members 114. The support panel 112 may have a flat plate shape and may be disposed on the vibration generator 110. The reinforcing member 114 may extend along the trench member 104 from the bottom of the container 102, and may have sides of the container 102 and the trench member 104 and the support panel 112. It may have a shape bent to correspond to the upper surface. For example, as shown, a pair of reinforcement members 114 may be attached on the lower sides of the container 102 and the trench member 104, and with the pair of reinforcement members 114. The support panel 112 may be coupled to each other by bolts 116. In addition, the pair of reinforcing members 114 may be bonded to the container 102 and the trench member 104 using an adhesive, soldering, welding, or the like.

The reinforcing member 114 may be used to prevent secondary vibration of the trench member 104 by the excitation of the vibration generator 110. That is, by increasing the rigidity of the trench member 104, the secondary vibration of the trench member 104 itself, which may be generated by the vibration transmitted from the vibration generator 110, may be attenuated or reduced. The trench member 104 may be vibrated at a frequency substantially the same as the frequency of the vibration generator 110.

The EMC powder supply device 100 may include a disturbance blocker 120 for preventing external disturbance, ie, disturbance, from being directly applied to the container 102 and the trench member 104. The disturbance blocking unit 120 may be disposed below the vibration generator 110, and the disturbance is directly applied to the container 102 and the trench member 104 through the vibration generator 110. Can be used to prevent. That is, external disturbances, for example, vibrations or shocks, are directly transmitted to the container 102 and the trench member 104, thereby sufficiently preventing the EMC powder 2 from falling off irregularly. In addition, the vibration generated by the vibration generator 110 may be prevented from being directly transmitted to the molding facility including the EMC powder supply device 100.

According to one embodiment of the invention, the disturbance blocker 120 is the upper plate 122 for supporting the vibration generator 110 and the lower plate 124 and the upper portion disposed below the upper plate 122 It may include a damping member 126 disposed between the plate 122 and the lower plate 124 to absorb the disturbance and the vibration. For example, the damping member 126 may include a plurality of coil springs. In addition, although not shown, a pneumatic or hydraulic shock absorber may be additionally disposed between the upper plate 122 and the lower plate 124.

According to another embodiment of the present invention, although not shown, a plurality of elastic blocks (not shown) may be disposed between the upper plate 122 and the lower plate 124 in place of the coil springs. The elastic blocks may be formed of rubber or sponge.

According to one embodiment of the present invention, the EMC supply device 100 may include a weight sensor 130 for measuring the weight of the EMC powder (2) supplied into the container (102). The load cell may be used as the weight sensor 130. That is, the weight of the EMC powder 2 introduced into the container 102 may be sensed by the weight sensor 130, and the injected EMC powder 2 may be in the trench by vibration by the vibration generator 110. The weight loss of the EMC powder 2 can be monitored in the course of being fed to the lower EMC tray 10 via the end of the member 104.

The controller may control the amount of the EMC powder 2 supplied to the EMC tray 10 by using data on the weight change of the EMC powder 2 transmitted from the weight sensor 130. In addition, the weight sensor 130 may measure the vibration frequency and amplitude by the vibration generator 110 and may transmit a signal relating to the vibration frequency and amplitude to the controller.

Meanwhile, as described above, the container 102, the vibration generator 110, and the disturbance blocker 120 may be arranged in a vertical direction, and the weight sensor 130 may be connected to the lower plate 124 of the disturbance blocker. In this case, when the weight sensor 130 is disposed below the lower plate 124, the height of the EMC supply apparatus 100 may be greatly increased. Accordingly, the trench member 104 and the tray 10 may be increased. The height between) can be increased. As a result, the amount of dust generation may be increased by increasing the distance that the EMC powder 2 falls from the end of the trench member 104.

According to one embodiment of the present invention, in order to reduce the falling distance of the EMC powder (2), the weight sensor 130 may be disposed on the side of the disturbance blocking unit 120, the weight sensor 130 And the lower plate 124 includes a cantilever 132 extending in the horizontal direction from the weight sensor 130, and a connection bracket 134 extending downward between the cantilever 132 and the lower plate 124. Can be connected to one another. As a result, since the lower plate 124 of the disturbance blocking unit 120 is positioned lower than the upper surface of the weight sensor 130, the drop distance of the EMC powder 2 may be reduced, thereby reducing the EMC powder ( The amount of dust generated by falling of 2) can be reduced. The weight sensor 130 may be disposed on the base panel 136.

Referring to FIG. 3, an EMC supply device 100 according to an embodiment of the present invention is disposed between an end of the trench member 104 and the tray 10 to be discharged from the trench member 104. A chute 140 for guiding (2) to the tray 10 may be further included. The chute 140 may extend in the vertical direction and have an internal passage for guiding the EMC powder 2. As a result, the EMC powder 2 can be prevented from scattering laterally while the EMC powder 2 is dropped.

The lower end of the chute 140 may be positioned above the tray 10, and the tray 10 may be moved to the tray transfer device 12 while the EMC powder 2 is supplied through the chute 140. It can be moved in the horizontal direction by. In particular, the tray 10 may be moved in a zigzag form by the tray transfer device 12, and thus the EMC powder 2 may be uniformly loaded in the tray 10.

6 and 7 are schematic diagrams for describing the EMC remover illustrated in FIG. 3, and FIG. 8 is a schematic cross-sectional view for describing the first and second suction chambers illustrated in FIG. 3.

3, 6 to 8, the upper part of the tray 10 supported by the tray conveying apparatus 12 by using a vacuum the EMC powder (2) scattered during the supply of the EMC powder (2) The EMC removal unit 150 may be arranged to remove and to remove residual EMC powder 2. The EMC removal unit 150 may include a first suction chamber 152 having upper and lower openings, and a second suction chamber 156 connected to the first suction chamber 152 and having an open upper and closed lower portions. It may include. For example, the first and

second suction chambers

152 and 156 may be integrally formed and may have one common side wall.

Sidewalls constituting the first suction chamber 152 may include a plurality of first vacuum holes 154 for sucking the scattered EMC powder 2, and the second suction chamber 156 may be provided. Side walls and a bottom panel constituting the plurality of second vacuum holes 158 for removing the residual EMC powder 2 may be provided.

The first and second vacuum holes 154 and 158 may be connected to the vacuum module 160 through the first and

second vacuum lines

162 and 164. In particular, the first and

second vacuum lines

162 and 164 may be connected to the third vacuum line 166, and the third vacuum line 166 may be connected to the vacuum module 160. The sucked EMC powder 2 may be removed through filters 168 installed in the first and

second vacuum lines

162 and 164.

Meanwhile, first vacuum channels 153 may be provided in the sidewalls of the first suction chamber 152, and second vacuum channels 157 may be provided in the sidewalls and the bottom panel of the second suction chamber 156. ) May be provided. The first and

second vacuum channels

153 and 157 may be connected to the first and

second vacuum lines

162 and 164, respectively.

According to one embodiment of the present invention, the chute 140 may be configured to be movable in the vertical direction by the vertical drive unit 170, the EMC removal unit 150 is a horizontal direction by the horizontal drive unit 174 It can be configured to be movable. Although not shown in detail with respect to the vertical drive unit 172 and the horizontal drive unit 174, the vertical drive unit 172 and the horizontal drive unit 174 is a cam and motor, ball screw and motor, hydraulic or pneumatic cylinder, linear motor, Or the like.

The lower end of the chute 140 may be disposed in the first suction chamber 152 while supplying the EMC powder 2. That is, the EMC powder 2 may be supplied to the tray 10 through the lower end of the chute 140, and dust generated in a space adjacent to the lower end of the chute 140, that is, the chute 140. EMC powder 2 scattered from the lower end of the first suction chamber 152 may be removed through the first vacuum holes 154.

The second suction chamber 156 may be used to remove the EMC powder 2 introduced into the container 102 and the EMC powder 2 remaining in the trench member 104. In this case, the chute 140 may be lifted by the vertical driver 172, and then the first and

second suction chambers

152 and 156 may have a second suction under the raised chute 140. The chamber 156 may be horizontally moved by the horizontal driver 174 to be positioned. Subsequently, the chute 140 is lowered by the vertical drive unit 172 so that the lower end of the chute 140 is positioned inside the second suction chamber 156 and then EMC is inserted into the second suction chamber 156. The powder 2 may be dropped, and the dropped EMC powder 2 may be removed through the second vacuum holes 158 of the second suction chamber 156.

As described above, EMC dust, which may be generated during the supply of the EMC powder 2 or during the disposal of the EMC powder 2, is discharged from the first and second vacuums of the first and

second suction chambers

152, 156. Since it can be sufficiently removed through the holes (154, 158), contamination of the molding facility by the EMC dust can be sufficiently reduced.

The controller may be connected to the vibration generator 110 and the weight sensor 130. The controller may control an operation of the vibration generator 110 according to volume information of semiconductor chips to be molded.

The volume information may be calculated using information of semiconductor chips transmitted from a vision inspection unit (not shown). The vision inspection unit may acquire a 3D image of the semiconductor chips while the substrate on which the semiconductor chips are mounted is loaded into a molding facility, and obtain information including the thickness and size of the semiconductor chips from the image. The information obtained as described above may be transmitted to the controller, and the controller may process the information to obtain volume information of the semiconductor chips. In addition, the controller may calculate the amount of the EMC powder 2 required to mold the semiconductor chips using volume information of the semiconductor chips, and the calculated amount of the EMC powder 2 may be transferred to the tray 10. The operation of the vibration generator 110 can be controlled to load on.

In particular, the control unit of the vibration generator 110 by using the information about the weight change of the EMC powder (2) transmitted from the weight sensor 130 and the vibration frequency and amplitude provided by the vibration generator 110. Feedback control can be performed.

Referring to FIG. 9, the trench member 204 is tilted downward to reduce the fall distance of the EMC powder 2, ie to reduce the vertical distance between the end of the trench member 204 and the tray 10. It can extend in the direction of the picture. In this case, as illustrated, the weight sensor 230 and the base panel 236 may be disposed below the disturbance blocking unit 120. That is, the weight sensor 230 may be disposed on the base panel 236, and the disturbance blocking unit 120 may be disposed on the weight sensor 230. In particular, the base panel 236 and the weight sensor 230 may be disposed under the disturbance blocking unit 120 to reduce the size of the EMC supply device 100.

10 and 11, a position at which the container 102 and the trench member 104 are mounted may be adjusted in a horizontal direction. For example, the support panel 212 disposed on the vibration generator 110 may have holes 212A extending in parallel with an extending direction of the trench member 104, and the container 102 and the trench The member 104 is mounted on the vibration generator 110 by bolts 216A passing through the reinforcing members 114 and the holes 212A and nuts 216B coupled to the bolts 216A. It can be mounted on.

By adjusting the mounting position of the container 110 and the trench member 104 as described above, the length of the trench member 104 protruding from the support panel 212 can be adjusted, thereby adjusting the trench member 104. The natural frequency of can be adjusted. As a result, by appropriately controlling the excitation frequency of the vibration generator 110 and the natural frequency of the trench member 104, the frequency characteristic and amplitude of the trench member 104 can be efficiently controlled, and thus the EMC The feeding process of the powder can be controlled more precisely.

The EMC supply apparatus according to the embodiments of the present invention as described above can be used to mold the semiconductor chips mounted on the substrate. Since the disturbance can be sufficiently blocked by the disturbance blocker while supplying the EMC powder to the EMC tray for transporting the EMC powder, the EMC supply device can be prevented from dropping irregularly by the disturbance.

Although described above with reference to a preferred embodiment of the present invention, those skilled in the art will be variously modified and changed within the scope of the invention without departing from the spirit and scope of the invention described in the claims below I can understand that you can.

Claims

A container for containing the epoxy molding compound in powder state;

A trench member extending from the vessel and serving as a delivery passage for feeding the epoxy molding compound to a tray for transporting the epoxy molding compound;

A vibration generator connected to the vessel and moving the epoxy molding compound from the vessel toward the end of the trench member and vibrating the vessel and the trench member such that the epoxy molding compound is dropped from the end of the trench member toward the tray. ; And

Epoxy molding compound supply device, characterized in that it comprises a disturbance blocker disposed below the vibration generator to reduce the direct transmission of external disturbance to the trench member.
The method of claim 1, wherein the disturbance blocking unit,

An upper plate supporting the vibration generator;

A lower plate disposed below the upper plate; And

And an attenuating member disposed between the upper plate and the lower plate to absorb the disturbance.
3. The epoxy molding compound supply apparatus of claim 2, wherein the damping member comprises a plurality of springs.
The apparatus of claim 2, further comprising a weight sensor connected to the disturbance blocker on the side of the disturbance blocker and measuring a weight of the epoxy molding compound contained in the container and a vibration frequency and amplitude of the vibration generator. Epoxy molding compound supply apparatus.
5. The epoxy molding compound supply of claim 4, wherein the disturbance blocking unit is connected to the weight sensor by a cantilever beam extending in the horizontal direction from the weight sensor and a bracket connecting the end of the cantilever beam to the lower plate. 6. Device.
6. The epoxy molding compound supply apparatus according to claim 5, wherein the lower plate is disposed lower than an upper surface of the weight sensor.
2. The apparatus of claim 1, further comprising a reinforcing member bonded to the trench member to extend along the trench member and to increase the rigidity of the trench member.
The apparatus of claim 1, further comprising a gate member disposed within the trench member to adjust the amount of epoxy molding compound carried along the interior of the trench.
9. The epoxy molding compound supply apparatus according to claim 8, wherein the gate member has sides configured to be parallel to the inner surfaces of the trench member.
9. The epoxy molding compound supply apparatus as claimed in claim 8, wherein the trench member has a width which is reduced downward.
The epoxy molding compound supply apparatus according to claim 1, further comprising a chute disposed between the end of the trench member and the tray to guide the epoxy molding compound dropped from the end of the trench member to the tray. .
12. The apparatus of claim 11, wherein the plurality of vacuum holes are disposed adjacent to the chute to remove dust generated in a space adjacent to the end of the chute while supplying the epoxy molding compound through the chute to the tray. Epoxy molding compound supply device further comprising an epoxy molding compound removal having.
13. The method of claim 12, wherein the epoxy molding compound removal portion comprises a suction chamber open top and bottom,

Wherein the lower end of the chute is disposed in the suction chamber while the epoxy molding compound is supplied, and the plurality of vacuum holes are disposed on sidewalls of the suction chamber.
The method of claim 13, wherein the epoxy molding compound removal portion,

An epoxy molding connected to the suction chamber and having sidewalls and bottom panels constituting an open top and a closed bottom, the epoxy molding being dropped into the second suction chamber through the trench member to remove the epoxy molding compound contained in the container; A second suction chamber having a plurality of second vacuum holes for sucking the compound; And

Epoxy molding compound supply device further comprises a drive for moving the suction chamber and the second suction chamber to adjust the position of the suction chamber and the second suction chamber.
The epoxy molding compound supply apparatus according to claim 1, wherein the trench member extends in a horizontal direction or a downwardly inclined direction.