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WO2011158835A1 - Adhesive sheet - Google Patents

Adhesive sheet Download PDF

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Publication number
WO2011158835A1
WO2011158835A1 PCT/JP2011/063604 JP2011063604W WO2011158835A1 WO 2011158835 A1 WO2011158835 A1 WO 2011158835A1 JP 2011063604 W JP2011063604 W JP 2011063604W WO 2011158835 A1 WO2011158835 A1 WO 2011158835A1
Authority
WO
WIPO (PCT)
Prior art keywords
adhesive layer
adhesive
die bonding
bonding film
film
Prior art date
Application number
PCT/JP2011/063604
Other languages
French (fr)
Japanese (ja)
Inventor
祐樹 中村
正信 宮原
片山　陽二
剛士 玉置
畠山　恵一
池谷　卓二
Original Assignee
日立化成工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立化成工業株式会社 filed Critical 日立化成工業株式会社
Priority to CN201180027958.4A priority Critical patent/CN102959688B/en
Priority to KR1020127030011A priority patent/KR101422603B1/en
Priority to JP2011545576A priority patent/JP5196034B2/en
Publication of WO2011158835A1 publication Critical patent/WO2011158835A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • H01L21/52—Mounting semiconductor bodies in containers
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/20—Adhesives in the form of films or foils characterised by their carriers
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    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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Definitions

  • the present invention relates to an adhesive sheet.
  • One of the manufacturing processes of a semiconductor device is a dicing process of cutting and separating a semiconductor wafer on which a circuit has been formed through a required pretreatment into a plurality of chips.
  • a wafer fixing dicing sheet is affixed to an annular or rectangular annular frame called a ring frame, a semiconductor wafer is affixed to the dicing sheet, and then the semiconductor wafer is diced for each circuit. obtain.
  • an expanding process, a chip mounting process, a wire bonding process, and a molding process by a bonding machine are performed to manufacture a semiconductor device.
  • the die attach film integrated sheet is a multi-layer dicing sheet that combines the function of a dicing sheet with the function of an adhesive that fixes the chip to a lead frame, wiring board, etc., and shortens the machining process compared to conventional methods. There are merits such as being able to do it.
  • a dicing sheet used for these applications is required to be finely bonded to a semiconductor chip (for example, Si chip) -die bonding film laminate after dicing.
  • a semiconductor chip for example, Si chip
  • the adhesion to the ring frame is weakened, and the ring frame may be peeled off from the dicing sheet in the dicing process.
  • the adhesive strength of the portion is reduced by irradiating only the desired portion with ultraviolet rays, but it is difficult to accurately irradiate only the desired portion with ultraviolet rays. There are cases. For this reason, it may be difficult to obtain an adhesive layer that balances the holding force for securely holding the wafer and the ring frame in the dicing step and the ease of peeling from the chip after dicing.
  • the present invention has been made in view of the above circumstances and suppresses ring frame peeling and chip scattering in the dicing process while maintaining ease of peeling between the die bonding film and the dicing sheet in the pickup process.
  • An object is to provide a possible adhesive sheet.
  • the present invention provides a base material, a first adhesive layer disposed on the base material, and a second adhesive having an opening disposed on the first adhesive layer and exposing the first adhesive layer. And a die bonding film disposed in a portion exposed from the opening in the first adhesive layer, and at least a part of the outer periphery of the die bonding film is in contact with the second adhesive layer I will provide a.
  • the adhesive force of the first adhesive layer and the adhesive force of the second adhesive layer are individually provided. Can be adjusted. Thereby, while adjusting the adhesive force of the 1st adhesion layer so that exfoliation between a die bonding film and a dicing sheet becomes easy in a pick-up process, a ring frame does not exfoliate from a 2nd adhesion layer in a dicing process.
  • the adhesive force of the second adhesive layer can be adjusted.
  • the adhesive sheet of the present invention at least a part of the outer periphery of the die bonding film is in contact with the second adhesive layer, whereby the outer periphery of the die bonding film is bonded to the second adhesive layer whose adhesive force is adjusted. Will be. Thereby, since the outer peripheral part of a die bonding film becomes a peeling start point in a dicing process and it is controlled that a die bonding film peels, scattering of a chip can be controlled.
  • the outer peripheral portion of the die bonding film becomes a peeling start point in the dicing step and the die bonding film is further prevented from peeling, the scattering of the chips can be further suppressed.
  • the central portion of the die bonding film is protected by the overlapping portion of the die bonding film and the second adhesive layer, and the die bond film has a winding mark. Can be suppressed from being transferred.
  • the inner periphery of the second adhesive layer overlaps the die bonding film. Even in such a configuration, when the adhesive sheet is rolled up, the central portion of the die bonding film is protected by the overlapping portion of the die bonding film and the second adhesive layer, and the winding marks are transferred to the die bonding film. Can be suppressed.
  • the width of the overlapping portion between the die bonding film and the second adhesive layer is preferably 0.1 to 25 mm.
  • the adhesive sheet of the present invention is used for dicing and die bonding.
  • an adhesive sheet capable of suppressing ring frame peeling and chip scattering in the dicing process while maintaining ease of peeling between the die bonding film and the dicing sheet in the pickup process.
  • the yield of semiconductor devices can be improved by making it possible to easily pick up individual semiconductor chips with die bonding films.
  • FIG. 2 is a schematic cross-sectional view taken along line II-II in FIG. It is a schematic cross section which shows the laminated body which affixed the semiconductor wafer and the ring frame on the adhesive sheet. It is a schematic cross section which shows the process of dicing a semiconductor wafer with a dicing blade. It is a schematic cross section which shows the process of picking up the semiconductor chip with the die-bonding film separated into pieces. It is a schematic cross section which shows the semiconductor device using the picked-up semiconductor chip with a die-bonding film.
  • A is a top view which shows an example of the conventional adhesive sheet
  • (b) is XX sectional drawing of (a).
  • FIG. (A) is a top view which shows the mode of the winding mark in the adhesive sheet shown in FIG. 7, (b) is the YY sectional view taken on the line of (a).
  • (A) is a top view which shows the other example of the conventional adhesive sheet,
  • (b) is the ZZ sectional view taken on the line of (a).
  • FIG. 1 is a plan view showing an embodiment of an adhesive sheet
  • FIG. 2 is a schematic cross-sectional view taken along the line II-II in FIG.
  • FIG. 3 is a schematic cross-sectional view showing a laminate in which a semiconductor wafer and a ring frame are attached to an adhesive sheet.
  • a semiconductor device manufacturing adhesive sheet (die attach film integrated sheet) 1 includes a long base film 10, a long adhesive layer (first adhesive layer) 20, and an adhesive layer ( A second adhesive layer) 30 and a die bonding film 40. As shown in FIG. 3, a ring frame (dicing ring) 50 and a semiconductor wafer 60 are disposed on the adhesive sheet 1 for manufacturing a semiconductor device.
  • the base film 10 for example, a polyethylene film, a polypropylene film, a polyvinyl chloride film, a polyethylene terephthalate film, an ethylene-vinyl acetate copolymer film, an ionomer resin film, or the like is used.
  • the thickness of the base film 10 is preferably about 15 to 200 ⁇ m, for example.
  • the adhesive layer 20 is disposed so as to cover the entire one main surface of the base film 10.
  • the thickness of the adhesive layer 20 is preferably about 5 to 50 ⁇ m, for example.
  • an acrylic adhesive, a rubber adhesive, a silicone adhesive, or the like is used as the adhesive constituting the adhesive layer 20.
  • the adhesive layer 20 is a weakly adhesive pressure-sensitive adhesive layer that can be easily peeled off from the die bonding film 40 in the pickup process.
  • the adhesive force between the adhesive layer 20 and the die bonding film 40 is preferably 0.6 N / 25 mm or less, more preferably 0.4 N / 25 mm or less, and still more preferably 0.3 N / 25 mm or less. If the adhesive layer 20 has such an adhesive force, it can be easily peeled between the adhesive layer 20 and the die bonding film 40 in the pickup process.
  • the adhesive strength of the adhesive layer 20 is, for example, when peeling at a rate of 200 mm / min in the vertical direction (90 ° peeling) using an orientec “Tensilon tensile strength tester RTA-100 type” or a similar tester. It can be measured by the peeling force.
  • a plurality of adhesive layers 30 are arranged on the adhesive layer 20 at predetermined intervals along the longitudinal direction of the base film 10.
  • the adhesive layer 30 is disposed in a region where the ring frame 50 is to be attached in the adhesive layer 20.
  • Each adhesive layer 30 has, for example, an annular shape, and an opening 30 a having a circular cross section is provided at the center of each adhesive layer 30 from the front surface to the back surface of the adhesive layer 30.
  • a portion 25 exposed from the opening 30 a in the adhesive layer 20 is a region where the die bonding film 40 is to be attached.
  • the diameter of the opening 30 a of the adhesive layer 30 is preferably equal to or larger than the wafer diameter of the semiconductor wafer 60, and more preferably larger than the wafer diameter of the semiconductor wafer 60.
  • the diameter of the opening 30a of the adhesive layer 30 is preferably equal to or smaller than the inner diameter of the opening 50a of the ring frame 50, and more preferably smaller than the inner diameter of the opening 50a of the ring frame 50.
  • the diameter of the opening 30a of the adhesive layer 30 is, for example, about 210 mm.
  • the thickness of the adhesive layer 30 is preferably about 5 to 30 ⁇ m, for example.
  • the adhesive layer 30 is a strong adhesive layer for fixing the ring frame having adhesiveness capable of reliably holding the ring frame 50 in the dicing process.
  • the adhesive constituting the adhesive layer 30 for example, an acrylic adhesive, a rubber adhesive, a silicone adhesive, or the like is used.
  • the adhesive force of the adhesive layer 30 is adjusted to be larger than the adhesive force of the adhesive layer 20.
  • the adhesive force between the adhesive layer 30 and the ring frame 50 is preferably smaller than the adhesive force between the adhesive layer 30 and the adhesive layer 20 and is 0.6 N / 25 mm or more.
  • the adhesive force between the adhesive layer 30 and the ring frame 50 is more preferably 0.8 N / 25 mm or more, and further preferably 1.0 N / 25 mm or more. If the adhesive layer 30 has such an adhesive force, the ring frame 50 is further prevented from peeling off from the adhesive layer 30 in the dicing process.
  • the adhesive strength of the adhesive layer 30 is, for example, when peeling at a rate of 200 mm / min in the vertical direction (90 ° peeling) using an orientec “Tensilon tensile strength tester RTA-100 type” or a similar tester. It can be measured by the peeling force.
  • adhesive layers 32 are arranged apart from the adhesive layer 30 so as to follow the shape of the adhesive layer 30.
  • the adhesive layer 32 is composed of the same adhesive as the adhesive layer 30.
  • the die bonding film 40 has a circular shape, for example.
  • the thickness of the die bonding film 40 is preferably about 1 to 100 ⁇ m, for example.
  • the die bonding film 40 contains, for example, a thermosetting component and / or a thermoplastic resin and a filler.
  • the thermosetting component is a component that can be cross-linked by heating to form a cured product.
  • the thermosetting component contains a thermosetting resin and optionally contains a curing agent for the thermosetting resin.
  • the thermosetting resin conventionally known ones can be used, and there is no particular limitation. Among them, convenience as a semiconductor peripheral material (high-purity products are easily available, many types are available, and reactivity is easily controlled. ), An epoxy resin and an imide compound having at least two thermosetting imide groups in one molecule are preferable.
  • the epoxy resin is usually used in combination with an epoxy resin curing agent.
  • the epoxy resin is preferably a compound having two or more epoxy groups.
  • the epoxy resin is preferably a phenol glycidyl ether type epoxy resin from the viewpoint of curability and cured product characteristics.
  • phenol glycidyl ether type epoxy resins include bisphenol A, bisphenol AD, bisphenol S, bisphenol F or a condensate of halogenated bisphenol A and epichlorohydrin, glycidyl ether of phenol novolac resin, glycidyl ether of cresol novolac resin, and Examples include glycidyl ether of bisphenol A novolac resin.
  • novolac type epoxy resins (such as glycidyl ether of cresol novolac resin and glycidyl ether of phenol novolac resin) are preferable in that the cured product has a high crosslinking density and can increase the adhesive strength of the film when heated. .
  • These can be used singly or in combination.
  • epoxy resin curing agents include phenolic compounds, aliphatic amines, alicyclic amines, aromatic polyamines, polyamides, aliphatic acid anhydrides, alicyclic acid anhydrides, aromatic acid anhydrides, dicyandiamide, organic Examples include acid dihydrazide, boron trifluoride amine complex, imidazoles, and tertiary amines.
  • phenol compounds are preferable, and phenol compounds having two or more phenolic hydroxyl groups are particularly preferable. More specifically, a naphthol novolak resin and a trisphenol novolak resin are preferable.
  • these phenolic compounds are used as an epoxy resin curing agent, it is possible to effectively reduce the contamination of the chip surface and device during heating for package assembly and the generation of outgas which causes odor.
  • thermoplastic resin examples include polyimide resin, polyamideimide resin, phenoxy resin, acrylic resin, polyamide resin, and urethane resin. These can be used singly or in combination.
  • the filler is preferably an inorganic filler. More specifically, aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, calcium silicate, magnesium silicate, calcium oxide, magnesium oxide, alumina, aluminum nitride, aluminum borate whisker, boron nitride, crystalline silica, An inorganic filler containing at least one inorganic material selected from the group consisting of amorphous silica and antimony oxide is preferred. Among these, alumina, aluminum nitride, boron nitride, crystalline silica, and amorphous silica are preferable for improving thermal conductivity.
  • aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, calcium silicate, magnesium silicate, calcium oxide, magnesium oxide, alumina, crystalline silica and non-crystalline silica Crystalline silica is preferred.
  • alumina, silica, aluminum hydroxide and antimony oxide are preferred. These can be used singly or in combination.
  • the die bonding film 40 is disposed in the opening 30a of the adhesive layer 30 so as to be concentric with the opening 30a, and covers the entire portion 25 exposed from the opening 30a in the adhesive layer 20. Further, the outer peripheral portion 40 a of the die bonding film 40 protrudes from the opening 30 a and overlaps the adhesive layer 30 in a state where it is in contact with the inner peripheral edge of the surface of the adhesive layer 30. That is, the die bonding film 40 has an outer peripheral portion 40 a that overlaps the adhesive layer 30 and a central portion 40 b that does not overlap the adhesive layer 30.
  • the die bonding film 40 can suppress the peeling of the die bonding film 40 in the dicing process as long as at least a part of the outer periphery is in contact with the adhesive layer 30, but from the viewpoint of further suppressing the peeling in the dicing process. It is preferable that at least a part of the portion 40 a overlaps the adhesive layer 30, and it is more preferable that the entire outer peripheral portion 40 a overlaps the adhesive layer 30 along the outer periphery of the die bonding film 40.
  • the overlapping range (width) of the adhesive layer 30 and the die bonding film 40 is preferably 0.1 to 25 mm, more preferably 0.5 to 15 mm, and still more preferably 1.0 to 10 mm. If the overlapping range of the die bonding film 40 is such a range, only the portion (the central portion 40b) in contact with the adhesive layer 20 of the die bonding film 40 can be attached to the semiconductor wafer 60 in the laminating process. And since it becomes further suppressed that the outer peripheral part 40a of the die bonding film 40 peels from the contact bonding layer 30 in a dicing process, it is further suppressed that a semiconductor chip scatters.
  • the adhesive force between the adhesive layer 30 and the die bonding film 40 is preferably 0.8 N / 25 mm or more, more preferably 1.0 N / 25 mm or more, and further preferably 1.2 N / 25 mm or more. If the adhesive layer 30 has such an adhesive force, it is further suppressed that the die bonding film 40 is peeled from the adhesive layer 30 in the dicing process.
  • the adhesive strength of the adhesive layer 30 is, for example, when peeling at a rate of 200 mm / min in the vertical direction (90 ° peeling) using an orientec “Tensilon tensile strength tester RTA-100 type” or a similar tester. It can measure using the peeling force of.
  • the ring frame 50 is usually a molded body made of metal or plastic.
  • the ring frame 50 has, for example, a substantially annular shape, and a flat cutout (not shown) for guide is formed on a part of the outer periphery of the ring frame 50.
  • the ring frame 50 has an opening 50a at the center. Needless to say, the inner diameter (diameter) of the opening 50a of the ring frame 50 is slightly larger than the diameter of the semiconductor wafer 60 to be diced, and is adjusted to be equal to or larger than the diameter of the opening 30a of the adhesive layer 30.
  • the shape of the ring frame 50 is not limited to an annular shape, and various shapes (for example, a rectangular shape) conventionally used are used.
  • the ring frame 50 is disposed on the adhesive layer 30 so that the opening 50a is concentric with the opening 30a.
  • the ring frame 50 is disposed without overlapping the overlapping portion (the outer peripheral portion 40a) of the die bonding film 40 with the adhesive layer 30.
  • the semiconductor wafer 60 is disposed in the central portion 40b of the die bonding film 40 without overlapping the adhesive layer 30 and the outer peripheral portion 40a of the die bonding film 40.
  • a circuit is formed on the semiconductor wafer 60 through a necessary pretreatment. In the dicing process, the semiconductor wafer 60 is separated into individual circuits, and semiconductor chips are obtained.
  • the adhesive sheet 1 for manufacturing a semiconductor device is used for dicing and die bonding.
  • the adhesive sheet 1 for manufacturing a semiconductor device since the sheet includes the adhesive layer 30 in addition to the adhesive layer 20, the adhesive force of the adhesive layer 20 and the adhesive force of the adhesive layer 30 can be individually adjusted. .
  • the ring frame 50 is peeled from the adhesive layer 30 in the dicing step while adjusting the adhesive force of the adhesive layer 20 so that the die bonding film 40 and the adhesive layer 20 of the dicing sheet are easily peeled in the pickup step.
  • the adhesive force of the adhesive layer 30 can be adjusted so that it does not.
  • the outer peripheral portion 40a of the die bonding film 40 since the outer peripheral portion 40a of the die bonding film 40 is in contact with the adhesive layer 30, the outer peripheral portion 40a adheres to the adhesive layer 30 whose adhesive force is adjusted. Thereby, since the outer peripheral part 40a of the die bonding film 40 becomes a peeling start point in the dicing process and the die bonding film 40 is prevented from peeling off, the scattering of the chips can be suppressed. Furthermore, in the adhesive sheet 1 for manufacturing a semiconductor device, since the outer peripheral portion 40a of the die bonding film 40 is overlapped with the adhesive layer 30, the die bonding film 40 is further prevented from peeling off in the dicing process. Scattering can be further suppressed.
  • FIG. 4 is a schematic cross-sectional view showing a process of dicing a semiconductor wafer with a dicing blade.
  • FIG. 5 is a schematic cross-sectional view showing a process of picking up the separated semiconductor chip with die bonding film.
  • FIG. 6 is a schematic cross-sectional view showing a semiconductor device using a picked-up semiconductor chip with a die bonding film.
  • the laminated body in which the semiconductor wafer 60 is laminated on the adhesive sheet 1 for manufacturing a semiconductor device includes an adhesive film in which the die bonding film 40 and the base material layer are laminated, and the die bonding film 40 and the adhesive layer (the adhesive layer 20 and the adhesive layer). Any of the adhesive films in which the layer 30) and the base material layer are laminated in this order can be used.
  • any of the methods shown in the following (1) and (2) can be used.
  • the die bonding film 40 of the adhesive film and the semiconductor wafer 60 are bonded together.
  • the base material layer of the adhesive film is peeled off, and the die bonding film 40 is bonded to the adhesive layer (the adhesive layer 20 and the adhesive layer 30) and the adhesive layer of the dicing tape on which the base material layer is laminated.
  • the die bonding film 40 of the adhesive film is bonded to the adhesive layer of the dicing tape in which the adhesive layer (the adhesive layer 20 and the adhesive layer 30) and the base material layer are laminated.
  • the base material layer of the adhesive film is peeled off, and the die bonding film 40 and the semiconductor wafer 60 are bonded together.
  • the die bonding film 40 of the adhesive film and the semiconductor wafer 60 are bonded to each other, thereby bonding the adhesive sheet 1 for manufacturing a semiconductor device.
  • a laminated body in which the semiconductor wafers 60 are laminated can be obtained.
  • the adhesive layer (the adhesive layer 20 and the adhesive layer 30) and the die bonding film 40 are laminated so that at least a part of the outer peripheral portion 40a of the die bonding film 40 is in contact with the adhesive layer 30. And are preferably laminated so as to overlap. Further, the semiconductor wafer 60 is disposed so as not to overlap the outer peripheral portion 40 a of the adhesive layer 30 and the die bonding film 40.
  • the ring frame 50 is disposed on the adhesive layer 30 of the adhesive sheet 1 for manufacturing a semiconductor device.
  • the laminated body is cut with a rotary blade 70 of a cutting device (dicer), and the die bonding film 45 is bonded to the semiconductor chip 65. Get 80.
  • a rotary blade 70 of a cutting device (dicer)
  • the die bonding film 45 is bonded to the semiconductor chip 65. Get 80.
  • a full cut method that completely cuts the adhesive film
  • a method (half cut method) that does not completely cut the adhesive film and leaves a part.
  • the dicer and the rotary blade (blade) used when cutting the semiconductor wafer 60 commercially available ones can be used.
  • the dicer for example, a full automatic dicing saw 6000 series or a semi-automatic dicing saw 3000 series manufactured by DISCO Corporation can be used.
  • the blade for example, a dicing blade NBC-ZH05 series or NBC-ZH series manufactured by DISCO Corporation can be used.
  • a rotary blade such as a fully automatic dicing saw 6000 series manufactured by DISCO Corporation, but also manufactured by DISCO Corporation, for example.
  • a laser such as the full automatic laser saw 7000 series can also be used.
  • peeling is performed at the interface between the adhesive layer 20 and the die bonding film 45, and the semiconductor chip with adhesive film 80 is picked up. Then, the picked-up semiconductor chip with adhesive film 80 is mounted on a support base 85 as shown in FIG.
  • the semiconductor chip 65 of the semiconductor chip with adhesive film 80 is connected to an external connection terminal (not shown) on the support base 85 via the wire 90. And the laminated body containing the semiconductor chip 65 is sealed with the sealing resin layer 95, and the semiconductor device 100 shown in FIG. 6 is obtained.
  • the adhesive layer 30 is not limited to an annular shape, and may be a rectangular shape. In this case, a ring frame having a rectangular ring shape is usually used, and a rectangular die bonding film is used. Further, the adhesive layer 30 is not limited to being disposed on the adhesive layer 20, and at least one adhesive layer 30 may be disposed on the adhesive layer 20 according to the number of semiconductor devices 100 manufactured.
  • boron nitride filler (made by Mizushima alloy iron) is added to 25% by mass with respect to the total mass of solids
  • Aerosil filler R972 (made by Nippon Aerosil) is added to 3% by mass with respect to the total mass of solids. Kneaded to get varnish.
  • the prepared varnish was applied onto a polyethylene terephthalate film that had been peeled off, heated at 80 ° C. for 30 minutes, and then heated at 120 ° C. for 30 minutes. Then, the polyethylene terephthalate film was peeled off at room temperature (25 ° C.) to obtain an adhesive film having a thickness of 25 ⁇ m as a die bonding film.
  • An adhesive solution was applied on a biaxially stretched polyester film separator (thickness: 38 ⁇ m) coated with a silicone release agent so that the adhesive thickness during drying was 10 ⁇ m. Subsequently, the adhesive solution was dried at 80 ° C. for 30 minutes, and a polyolefin film (thickness: 100 ⁇ m) was further laminated on the adhesive surface. The multilayer film was allowed to stand at room temperature for 1 week and sufficiently aged, and then used for the test.
  • An adhesive solution was applied on a biaxially stretched polyester film separator (thickness 25 ⁇ m) coated with a silicone release agent so that the adhesive thickness at drying was 20 ⁇ m. Subsequently, the adhesive solution was dried at 80 ° C. for 30 minutes, and a polyolefin film (thickness: 100 ⁇ m) was further laminated on the adhesive surface. The multilayer film was allowed to stand at room temperature for 1 week and sufficiently aged, and then used for the test.
  • Example 1 A laminated product of a semiconductor wafer was obtained in the same manner as in Example 1 except that the strong adhesion layer was not laminated.
  • Comparative Example 2 In place of the laminated product of the weak adhesive layer and the base material, a laminated product of the strong adhesive layer and the base material (dicing tape) is used. Further, except that the strong adhesive layer is not laminated, as in Example 1, A semiconductor wafer laminate was obtained.
  • Example 3 A semiconductor wafer laminate was obtained in the same manner as in Example 1 except that the die bonding film was circularly processed to a diameter of 205 mm and an overlapping portion between the die bonding film and the strong adhesive layer was not provided.
  • Example 1 In the samples prepared in Example 1 and Comparative Examples 1 to 4, the semiconductor wafers were bonded at 60 ° C. using “DM-300-H” manufactured by JCM Corporation.
  • Example 4 Various evaluations (dicing process) Samples produced in Example 1 and Comparative Examples 1 to 4 were cut using a full auto dicer “DFD-6361” manufactured by DISCO Corporation. In the sample cutting, an annular ring frame having an opening with a diameter of 250 mm was used. In the cutting of the sample, a single cut method in which processing is completed with one blade was adopted, and a dicing blade “NBC-ZH104F-SE 27HDBB” manufactured by Disco Corporation was used as the blade. The sample was cut under the conditions of a blade rotation speed of 45,000 rpm and a cutting speed of 50 mm / s. The blade height at the time of cutting was set to cut a dicing substrate by 20 ⁇ m (80 ⁇ m). The size for cutting the semiconductor wafer was 10 ⁇ 10 mm.
  • the pick-up property was evaluated under the conditions of a pin push-up speed during pick-up: 10 mm / s and a push-up height: 1000 ⁇ m. When 100 consecutive chips were picked up and chip cracks, pickup mistakes, etc. did not occur, it was determined as good (A), and when even one chip had chip cracks, pickup mistakes, etc., it was determined as defective (B).
  • Table 1 shows the samples prepared in Example 1 and Comparative Examples 1 to 4 and the results of various evaluations in the dicing process and the pickup process.
  • Comparative Examples 1 to 4 have no contact portion or overlapping portion between the die bonding film and the strong adhesive layer for fixing the ring frame.
  • Comparative Example 1 is preferable because the adhesive force between the ring frame arrangement portion of the adhesive layer and the ring frame is weak, the adhesive layer peels off from the ring frame in the dicing process, and the die bonding film peels off in the dicing process. Absent. Comparative Example 2 is not preferable because the adhesive strength between the dicing tape and the die bonding film is high, and chip cracks and pickup errors occur in the pickup process. Comparative Example 3 is not preferable because there is no contact portion or overlapping portion between the strong adhesive layer and the die bonding film, and thus die bonding film peeling occurs in the dicing process. Comparative Example 4 is not preferable because the adhesion between the dicing tape and the die bonding film is high, and chip cracking and pickup errors occur in the pickup process.
  • the above-mentioned adhesive sheet 1 for manufacturing a semiconductor device has the effect of maintaining ease of peeling between the die bonding film and the dicing sheet in the pick-up process, and suppressing the ring frame peeling and chip scattering in the dicing process. This also contributes to the solution of the problem of winding marks of the die bonding film when wound into a shape. Hereinafter, this point will be described.
  • a circular die bonding film 202 is laminated on a base film 201, and the adhesive sheet 200 that has been subjected to precut processing is circular adhesive so as to cover the die bonding film 202.
  • a layer 203 is stacked.
  • the thickness of the overlapping portion of the die bonding film 202 and the adhesive layer 203 is the same as that of the adhesive sheet 200. Since the thickness is thicker than other portions, the tension during winding may be excessively applied to the die bonding film 202. For this reason, as shown in FIG. 9, the winding marks 212 are transferred to the central portion of the die bonding film 202, and the smoothness of the die bonding film 202 may be impaired. The winding marks 212 are more likely to occur as the thickness of the die bonding film 202 increases. When the winding marks 212 are generated, air enters between the semiconductor wafer and the die bonding film 202 when the adhesive sheet 200 is attached to the semiconductor wafer. There is a risk that problems may occur in the manufacture of the semiconductor device.
  • FIG. 10 there is an adhesive sheet 300 on which the adhesive film 303 is formed on the outside of the pre-cut die bonding film 302 and the adhesive film 303, but it is wound in a roll shape.
  • the problem of winding marks can occur as in the case of the adhesive sheet 200.
  • the adhesive sheet 1 described above as shown in FIG. 2, at least a part of the outer peripheral portion 40a of the die bonding film 40 overlaps the adhesive layer 30, and the adhesive sheet 1 corresponding to the outer peripheral portion 40a The thickness is thicker than the thickness of the adhesive sheet 1 corresponding to the central portion 40b.
  • At least a part of the inner periphery of the adhesive layer 30 may overlap the die bonding film 40 as in the adhesive sheet 2 shown in FIG. Also in this case, the thickness of the adhesive sheet 2 corresponding to the outer peripheral portion 40a is thicker than the thickness of the adhesive sheet 2 corresponding to the central portion 40b. Therefore, similarly to the adhesive sheet 1, it is possible to prevent the winding marks from being transferred to the die bond film 40.
  • Example 1 On the weak adhesive layer of the laminate (dicing tape) of the weak adhesive layer and the base material, the strong adhesive layer of (1), which is continuously cut out in an annular shape with an inner diameter of 210 mm at intervals of 70 mm, is an adhesive layer for fixing the ring frame. Pasted as. Thereafter, a die bonding film circularly processed to a diameter of 220 mm was continuously attached so as to be concentric with the strong adhesive layer.
  • Example 2 An adhesive sheet for manufacturing a semiconductor device was obtained in the same manner as in Example 1 except that the diameter of the die bonding film was circularly processed to 211 mm.
  • Example 1 An adhesive sheet for manufacturing a semiconductor device was obtained in the same manner as in Example 1 except that the diameter of the die bonding film was circularly processed to 205 mm.
  • Comparative Example 3 An adhesive sheet for manufacturing a semiconductor device was obtained in the same manner as in Comparative Example 2 except that the thickness of the die bonding film was 60 ⁇ m.
  • Adhesive sheet for semiconductor device manufacture 10 ... Base film, 20 ... Adhesive layer (first adhesive layer), 25 ... Portion exposed from opening, 30 ... Adhesive layer (second adhesive layer), 30a ... Opening, 40, 45 ... Die bonding film, 50 ... Ring frame, 60 ... Semiconductor wafer, 100 ... Semiconductor device.

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Abstract

The disclosed adhesive sheet (1) for manufacturing a semiconductor device is provided with: a base film (10); an adhesive layer (20) disposed on top of the base film (10); an adhesive layer (30) that is disposed on top of the first adhesive layer (20) and has an opening (30a) through which the first adhesive layer (20) is exposed; and a die-bonding film (40) disposed on the section (25) of the first adhesive film (20) that is exposed through the aforementioned opening (30a). At least part of the outer edge of the die-bonding film (40) is in contact with the second adhesive layer (30).

Description

接着シートAdhesive sheet
　本発明は、接着シートに関する。 The present invention relates to an adhesive sheet.
　半導体装置の製造工程の一つに、所要の前処理を経て回路が形成された半導体ウェハを複数個のチップに切断分離するダイシング工程がある。この工程では、リングフレームと呼ばれる円環状や矩形環状の枠にウェハ固定用のダイシングシートを貼着し、このダイシングシートに半導体ウェハを貼付した後、半導体ウェハを回路毎にダイシングして半導体チップを得る。続いて、ボンディングマシンによるエキスパンド工程、チップマウント工程、さらにワイヤーボンド工程、モールディング工程を行い半導体装置が製造される。 One of the manufacturing processes of a semiconductor device is a dicing process of cutting and separating a semiconductor wafer on which a circuit has been formed through a required pretreatment into a plurality of chips. In this process, a wafer fixing dicing sheet is affixed to an annular or rectangular annular frame called a ring frame, a semiconductor wafer is affixed to the dicing sheet, and then the semiconductor wafer is diced for each circuit. obtain. Subsequently, an expanding process, a chip mounting process, a wire bonding process, and a molding process by a bonding machine are performed to manufacture a semiconductor device.
　近年では、半導体装置の製造に際して、ダイシングシート及びダイアタッチフィルムを一体化したダイアタッチフィルム一体型シートを用いる方法が提案されている。ダイアタッチフィルム一体型シートは、ダイシングシートとしての機能と、チップをリードフレームや配線基板などに固定する接着剤の機能とを兼ね備えた多層ダイシングシートであり、従来の方法に比べて加工工程が短縮できることなどのメリットがある。 In recent years, a method using a die attach film integrated sheet in which a dicing sheet and a die attach film are integrated has been proposed in the manufacture of a semiconductor device. The die attach film integrated sheet is a multi-layer dicing sheet that combines the function of a dicing sheet with the function of an adhesive that fixes the chip to a lead frame, wiring board, etc., and shortens the machining process compared to conventional methods. There are merits such as being able to do it.
　ところが、近年半導体素子の高集積化・大チップ化、薄型化により、ダイシング後のチップのピックアップ作業が困難となるケースが増加している。これらの用途に使用されるダイシングシートは、ダイシング後の半導体チップ（例えばＳｉチップ）－ダイボンディングフィルム積層品に対しては微接着であることが要求される。しかしながら、ダイシングシートを微接着化させると、リングフレームへの接着性も弱まり、ダイシング工程においてダイシングシートからリングフレームが剥離する場合がある。 However, in recent years, there has been an increase in cases where it is difficult to pick up chips after dicing due to high integration, large chips, and thinning of semiconductor elements. A dicing sheet used for these applications is required to be finely bonded to a semiconductor chip (for example, Si chip) -die bonding film laminate after dicing. However, when the dicing sheet is slightly adhered, the adhesion to the ring frame is weakened, and the ring frame may be peeled off from the dicing sheet in the dicing process.
　そのため、より高度なダイシング性能を有するテープが必要とされてきており、ダイシング工程においては高接着力でウェハ（チップ）を保持でき、ピックアップ工程においては紫外線照射等により接着力を低減でき容易にチップをピックアップできるダイシングシートが開発されている（例えば、下記特許文献１，２参照）。 For this reason, tapes having higher dicing performance have been required, and wafers (chips) can be held with high adhesive force in the dicing process, and adhesive force can be reduced by ultraviolet irradiation or the like in the picking process, and chips can be easily formed. A dicing sheet has been developed (see, for example, Patent Documents 1 and 2 below).
特開昭６０－１９６９５６号公報JP-A-60-196956 特開昭６１－２８５７２号公報JP-A 61-28572
　しかしながら、特許文献１の紫外線硬化型ダイシングシートでは、所望の部分のみに紫外線を照射することによりその部分の接着力を低下させているが、所望の部分にのみ精度よく紫外線を照射することが困難な場合がある。そのため、ダイシング工程においてウェハやリングフレームを確実に保持する保持力と、ダイシング後にチップから容易に剥離する剥離容易性とをバランスよく両立した接着層を得ることが困難な場合がある。 However, in the ultraviolet curable dicing sheet of Patent Document 1, the adhesive strength of the portion is reduced by irradiating only the desired portion with ultraviolet rays, but it is difficult to accurately irradiate only the desired portion with ultraviolet rays. There are cases. For this reason, it may be difficult to obtain an adhesive layer that balances the holding force for securely holding the wafer and the ring frame in the dicing step and the ease of peeling from the chip after dicing.
　また、特許文献２では、ダイボンディングフィルムが接着性の低い接着層の上にのみ積層されているため、ダイシング工程においてダイボンディングフィルムの外周部分が接着層から剥離して、ダイボンディングフィルムに貼り付けられていたチップが飛散してしまうという不具合がある。 Moreover, in patent document 2, since the die bonding film is laminated | stacked only on the adhesive layer with low adhesiveness, the outer peripheral part of a die bonding film peels from an adhesive layer in a dicing process, and it affixes on a die bonding film There is a problem that chips that have been scattered are scattered.
　本発明は、上記事情を鑑みてなされたものであり、ピックアップ工程におけるダイボンディングフィルム及びダイシングシート間の剥離容易性を維持しつつ、ダイシング工程におけるリングフレームの剥離及びチップの飛散を抑制することが可能な接着シートを提供することを目的とする。 The present invention has been made in view of the above circumstances and suppresses ring frame peeling and chip scattering in the dicing process while maintaining ease of peeling between the die bonding film and the dicing sheet in the pickup process. An object is to provide a possible adhesive sheet.
　すなわち、本発明は、基材と、基材上に配置された第１の接着層と、第１の接着層上に配置されると共に第１の接着層が露出する開口を有する第２の接着層と、第１の接着層における上記開口から露出する部分に配置されたダイボンディングフィルムと、を備え、ダイボンディングフィルムの外周の少なくとも一部が、第２の接着層に接している、接着シートを提供する。 That is, the present invention provides a base material, a first adhesive layer disposed on the base material, and a second adhesive having an opening disposed on the first adhesive layer and exposing the first adhesive layer. And a die bonding film disposed in a portion exposed from the opening in the first adhesive layer, and at least a part of the outer periphery of the die bonding film is in contact with the second adhesive layer I will provide a.
　本発明の接着シートでは、当該シートが第１の接着層とは別に第２の接着層を備えていることにより、第１の接着層の接着力と第２の接着層の接着力とを個別に調整することができる。これにより、ピックアップ工程においてダイボンディングフィルム及びダイシングシート間の剥離が容易となるように第１の接着層の接着力を調整しつつ、ダイシング工程においてリングフレームが第２の接着層から剥離しないように第２の接着層の接着力を調整することができる。さらに、本発明の接着シートでは、ダイボンディングフィルムの外周の少なくとも一部が第２の接着層に接していることにより、接着力が調整された第２の接着層にダイボンディングフィルムの外周が接着することとなる。これにより、ダイシング工程においてダイボンディングフィルムの外周部分が剥離起点となりダイボンディングフィルムが剥離することが抑制されるため、チップの飛散を抑制することができる。 In the adhesive sheet of the present invention, since the sheet includes the second adhesive layer in addition to the first adhesive layer, the adhesive force of the first adhesive layer and the adhesive force of the second adhesive layer are individually provided. Can be adjusted. Thereby, while adjusting the adhesive force of the 1st adhesion layer so that exfoliation between a die bonding film and a dicing sheet becomes easy in a pick-up process, a ring frame does not exfoliate from a 2nd adhesion layer in a dicing process. The adhesive force of the second adhesive layer can be adjusted. Furthermore, in the adhesive sheet of the present invention, at least a part of the outer periphery of the die bonding film is in contact with the second adhesive layer, whereby the outer periphery of the die bonding film is bonded to the second adhesive layer whose adhesive force is adjusted. Will be. Thereby, since the outer peripheral part of a die bonding film becomes a peeling start point in a dicing process and it is controlled that a die bonding film peels, scattering of a chip can be controlled.
　ダイボンディングフィルムの外周の少なくとも一部は、第２の接着層に重なっていることが好ましい。この場合、ダイシング工程においてダイボンディングフィルムの外周部分が剥離起点となりダイボンディングフィルムが剥離することが更に抑制されるため、チップの飛散を更に抑制することができる。また、このような構成によれば、接着シートをロール状に巻いたときに、ダイボンディングフィルムと第２の接着層との重なり部分によってダイボンディングフィルムの中央部分が保護され、ダイボンドフィルムに巻痕が転写されることを抑制できる。 It is preferable that at least a part of the outer periphery of the die bonding film overlaps the second adhesive layer. In this case, since the outer peripheral portion of the die bonding film becomes a peeling start point in the dicing step and the die bonding film is further prevented from peeling, the scattering of the chips can be further suppressed. In addition, according to such a configuration, when the adhesive sheet is wound in a roll shape, the central portion of the die bonding film is protected by the overlapping portion of the die bonding film and the second adhesive layer, and the die bond film has a winding mark. Can be suppressed from being transferred.
　また、第２の接着層の内周の少なくとも一部が、ダイボンディングフィルムに重なっていることも好ましい。このような構成においても、接着シートをロール状に巻いたときに、ダイボンディングフィルムと第２の接着層との重なり部分によってダイボンディングフィルムの中央部分が保護され、ダイボンドフィルムに巻痕が転写されることを抑制できる。 It is also preferable that at least a part of the inner periphery of the second adhesive layer overlaps the die bonding film. Even in such a configuration, when the adhesive sheet is rolled up, the central portion of the die bonding film is protected by the overlapping portion of the die bonding film and the second adhesive layer, and the winding marks are transferred to the die bonding film. Can be suppressed.
　ダイボンディングフィルムと第２の接着層との重なり部分の幅は、０．１～２５ｍｍであることが好ましい。 The width of the overlapping portion between the die bonding film and the second adhesive layer is preferably 0.1 to 25 mm.
　本発明の接着シートは、ダイシング加工及びダイボンディング加工に用いられる。 The adhesive sheet of the present invention is used for dicing and die bonding.
　本発明によれば、ピックアップ工程におけるダイボンディングフィルム及びダイシングシート間の剥離容易性を維持しつつ、ダイシング工程におけるリングフレームの剥離及びチップの飛散を抑制することが可能な接着シートが提供される。本発明では、個片化したダイボンディングフィルム付き半導体チップを容易にピックアップ可能となることで、半導体装置の歩留まりを向上させることができる。 According to the present invention, there is provided an adhesive sheet capable of suppressing ring frame peeling and chip scattering in the dicing process while maintaining ease of peeling between the die bonding film and the dicing sheet in the pickup process. In the present invention, the yield of semiconductor devices can be improved by making it possible to easily pick up individual semiconductor chips with die bonding films.
接着シートの一実施形態を示す平面図である。It is a top view which shows one Embodiment of an adhesive sheet. 図１のＩＩ－ＩＩ線に沿った模式断面図である。FIG. 2 is a schematic cross-sectional view taken along line II-II in FIG. 接着シートに半導体ウェハ及びリングフレームを貼付けた積層物を示す模式断面図である。It is a schematic cross section which shows the laminated body which affixed the semiconductor wafer and the ring frame on the adhesive sheet. 半導体ウェハをダイシングブレードでダイシングする工程を示す模式断面図である。It is a schematic cross section which shows the process of dicing a semiconductor wafer with a dicing blade. 個片化したダイボンディングフィルム付き半導体チップをピックアップする工程を示す模式断面図である。It is a schematic cross section which shows the process of picking up the semiconductor chip with the die-bonding film separated into pieces. ピックアップしたダイボンディングフィルム付き半導体チップを用いた半導体装置を示す模式断面図である。It is a schematic cross section which shows the semiconductor device using the picked-up semiconductor chip with a die-bonding film. （ａ）は、従来の接着シートの一例を示す平面図であり、（ｂ）は、（ａ）のＸ－Ｘ線断面図である。(A) is a top view which shows an example of the conventional adhesive sheet, (b) is XX sectional drawing of (a). 図７に示した接着シートのロール体を示す斜視図である。It is a perspective view which shows the roll body of the adhesive sheet shown in FIG. （ａ）は、図７に示した接着シートにおける巻痕の様子を示す平面図であり、（ｂ）は、（ａ）のＹ－Ｙ線断面図である。(A) is a top view which shows the mode of the winding mark in the adhesive sheet shown in FIG. 7, (b) is the YY sectional view taken on the line of (a). （ａ）は、従来の接着シートの他の例を示す平面図であり、（ｂ）は、（ａ）のＺ－Ｚ線断面図である。(A) is a top view which shows the other example of the conventional adhesive sheet, (b) is the ZZ sectional view taken on the line of (a). 接着シートの変形例を示す模式断面図である。It is a schematic cross section which shows the modification of an adhesive sheet.
　以下、本発明の好適な実施形態について必要により図面を参照して詳細に説明する。図中、同一又は同等の構成要素については同一符号を付し、重複する説明は適宜省略する。 Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings as necessary. In the figure, the same or equivalent components are denoted by the same reference numerals, and repeated description is omitted as appropriate.
　図１は、接着シートの一実施形態を示す平面図であり、図２は、図１のＩＩ－ＩＩ線に沿った模式断面図である。図３は、接着シートに半導体ウェハ及びリングフレームを貼付けた積層物を示す模式断面図である。 FIG. 1 is a plan view showing an embodiment of an adhesive sheet, and FIG. 2 is a schematic cross-sectional view taken along the line II-II in FIG. FIG. 3 is a schematic cross-sectional view showing a laminate in which a semiconductor wafer and a ring frame are attached to an adhesive sheet.
　図１，２に示す半導体装置製造用接着シート（ダイアタッチフィルム一体型シート）１は、長尺の基材フィルム１０と、長尺の接着層（第１の接着層）２０と、接着層（第２の接着層）３０と、ダイボンディングフィルム４０とを備える。半導体装置製造用接着シート１上には、図３に示すように、リングフレーム（ダイシングリング）５０と、半導体ウェハ６０とが配置される。 1 and 2, a semiconductor device manufacturing adhesive sheet (die attach film integrated sheet) 1 includes a long base film 10, a long adhesive layer (first adhesive layer) 20, and an adhesive layer ( A second adhesive layer) 30 and a die bonding film 40. As shown in FIG. 3, a ring frame (dicing ring) 50 and a semiconductor wafer 60 are disposed on the adhesive sheet 1 for manufacturing a semiconductor device.
　基材フィルム１０としては、例えばポリエチレンフィルム、ポリプロピレンフィルム、ポリ塩化ビニルフィルム、ポリエチレンテレフタレートフィルム、エチレン－酢酸ビニル共重合体フィルム、アイオノマー樹脂フィルム等が用いられる。基材フィルム１０の厚さは、例えば１５～２００μｍ程度が好ましい。 As the base film 10, for example, a polyethylene film, a polypropylene film, a polyvinyl chloride film, a polyethylene terephthalate film, an ethylene-vinyl acetate copolymer film, an ionomer resin film, or the like is used. The thickness of the base film 10 is preferably about 15 to 200 μm, for example.
　接着層２０は、基材フィルム１０の一方の主面全体を覆うように配置されている。接着層２０の厚さは、例えば５～５０μｍ程度が好ましい。接着層２０を構成する接着剤としては、例えばアクリル系接着剤、ゴム系接着剤、シリコーン系接着剤等が用いられる。 The adhesive layer 20 is disposed so as to cover the entire one main surface of the base film 10. The thickness of the adhesive layer 20 is preferably about 5 to 50 μm, for example. As the adhesive constituting the adhesive layer 20, for example, an acrylic adhesive, a rubber adhesive, a silicone adhesive, or the like is used.
　接着層２０は、ピックアップ工程においてダイボンディングフィルム４０から容易に剥離可能な弱接着性の感圧接着剤層である。接着層２０とダイボンディングフィルム４０との接着力は、０．６Ｎ／２５ｍｍ以下が好ましく、０．４Ｎ／２５ｍｍ以下がより好ましく、０．３Ｎ／２５ｍｍ以下が更に好ましい。接着層２０がこのような接着力を有していれば、ピックアップ工程において接着層２０及びダイボンディングフィルム４０間で容易に剥離可能となる。接着層２０の接着力は、例えばオリエンテック製「テンシロン引張強度試験機　ＲＴＡ－１００型」又はこれに類似した試験機を用いて垂直方向（９０°剥離）に２００ｍｍ／ｍｉｎの速度で剥離したときの剥離力で測定することができる。 The adhesive layer 20 is a weakly adhesive pressure-sensitive adhesive layer that can be easily peeled off from the die bonding film 40 in the pickup process. The adhesive force between the adhesive layer 20 and the die bonding film 40 is preferably 0.6 N / 25 mm or less, more preferably 0.4 N / 25 mm or less, and still more preferably 0.3 N / 25 mm or less. If the adhesive layer 20 has such an adhesive force, it can be easily peeled between the adhesive layer 20 and the die bonding film 40 in the pickup process. The adhesive strength of the adhesive layer 20 is, for example, when peeling at a rate of 200 mm / min in the vertical direction (90 ° peeling) using an orientec “Tensilon tensile strength tester RTA-100 type” or a similar tester. It can be measured by the peeling force.
　接着層３０は、基材フィルム１０の長手方向に沿って所定の間隔をおいて接着層２０上に複数配置されている。接着層３０は、接着層２０におけるリングフレーム５０の貼り付け予定領域に配置されている。 A plurality of adhesive layers 30 are arranged on the adhesive layer 20 at predetermined intervals along the longitudinal direction of the base film 10. The adhesive layer 30 is disposed in a region where the ring frame 50 is to be attached in the adhesive layer 20.
　各接着層３０は、例えば円環状をなしており、各接着層３０の中央部には、断面円形状の開口３０ａが接着層３０の表面から裏面にかけて設けられている。接着層２０における開口３０ａから露出する部分２５は、ダイボンディングフィルム４０の貼り付け予定領域となる。接着層３０の開口３０ａの直径は、半導体ウェハ６０のウェハ径以上であることが好ましく、半導体ウェハ６０のウェハ径よりも大きいことがより好ましい。また、接着層３０の開口３０ａの直径は、リングフレーム５０の開口５０ａの内径寸法以下であることが好ましく、リングフレーム５０の開口５０ａの内径寸法よりも小さいことがより好ましい。接着層３０の開口３０ａの直径は、例えば２１０ｍｍ程度である。接着層３０の厚さは、例えば５～３０μｍ程度が好ましい。 Each adhesive layer 30 has, for example, an annular shape, and an opening 30 a having a circular cross section is provided at the center of each adhesive layer 30 from the front surface to the back surface of the adhesive layer 30. A portion 25 exposed from the opening 30 a in the adhesive layer 20 is a region where the die bonding film 40 is to be attached. The diameter of the opening 30 a of the adhesive layer 30 is preferably equal to or larger than the wafer diameter of the semiconductor wafer 60, and more preferably larger than the wafer diameter of the semiconductor wafer 60. The diameter of the opening 30a of the adhesive layer 30 is preferably equal to or smaller than the inner diameter of the opening 50a of the ring frame 50, and more preferably smaller than the inner diameter of the opening 50a of the ring frame 50. The diameter of the opening 30a of the adhesive layer 30 is, for example, about 210 mm. The thickness of the adhesive layer 30 is preferably about 5 to 30 μm, for example.
　接着層３０は、ダイシング工程においてリングフレーム５０を確実に保持することが可能な接着性を有するリングフレーム固定用の強接着性層である。接着層３０を構成する接着剤としては、例えばアクリル系接着剤、ゴム系接着剤、シリコーン系接着剤等が用いられる。接着層３０の接着力は、接着層２０の接着力よりも大きくなるように調整される。 The adhesive layer 30 is a strong adhesive layer for fixing the ring frame having adhesiveness capable of reliably holding the ring frame 50 in the dicing process. As the adhesive constituting the adhesive layer 30, for example, an acrylic adhesive, a rubber adhesive, a silicone adhesive, or the like is used. The adhesive force of the adhesive layer 30 is adjusted to be larger than the adhesive force of the adhesive layer 20.
　接着層３０とリングフレーム５０との接着力は、接着層３０と接着層２０との接着力よりも小さく、かつ、０．６Ｎ／２５ｍｍ以上であることが好ましい。接着層３０とリングフレーム５０との接着力は、０．８Ｎ／２５ｍｍ以上がより好ましく、１．０Ｎ／２５ｍｍ以上が更に好ましい。接着層３０がこのような接着力を有していれば、ダイシング工程において接着層３０からリングフレーム５０が剥離してしまうことが更に抑制される。接着層３０の接着力は、例えばオリエンテック製「テンシロン引張強度試験機　ＲＴＡ－１００型」又はこれに類似した試験機を用いて垂直方向（９０°剥離）に２００ｍｍ／ｍｉｎの速度で剥離したときの剥離力で測定することができる。 The adhesive force between the adhesive layer 30 and the ring frame 50 is preferably smaller than the adhesive force between the adhesive layer 30 and the adhesive layer 20 and is 0.6 N / 25 mm or more. The adhesive force between the adhesive layer 30 and the ring frame 50 is more preferably 0.8 N / 25 mm or more, and further preferably 1.0 N / 25 mm or more. If the adhesive layer 30 has such an adhesive force, the ring frame 50 is further prevented from peeling off from the adhesive layer 30 in the dicing process. The adhesive strength of the adhesive layer 30 is, for example, when peeling at a rate of 200 mm / min in the vertical direction (90 ° peeling) using an orientec “Tensilon tensile strength tester RTA-100 type” or a similar tester. It can be measured by the peeling force.
　接着層２０の短手方向の両端部には、接着層３０の形状に沿うように接着層３０と離れて接着層３２が配置されている。接着層３２は、接着層３０と同様の接着剤により構成されている。 At both ends of the adhesive layer 20 in the short direction, adhesive layers 32 are arranged apart from the adhesive layer 30 so as to follow the shape of the adhesive layer 30. The adhesive layer 32 is composed of the same adhesive as the adhesive layer 30.
　ダイボンディングフィルム４０は、例えば円形状をなしている。ダイボンディングフィルム４０の厚さは、例えば１～１００μｍ程度が好ましい。ダイボンディングフィルム４０は、例えば熱硬化性成分及び／又は熱可塑性樹脂並びにフィラーを含有する。熱硬化性成分は、加熱により架橋して硬化体を形成し得る成分であり、例えば、熱硬化性樹脂を含有し、当該熱硬化性樹脂の硬化剤を任意に含有する。熱硬化性樹脂としては、従来公知のものを使用することができ、特に制限はないが、中でも半導体周辺材料としての利便性（高純度品が入手容易、品種が多い、反応性を制御しやすい）の点で、エポキシ樹脂、及び１分子中に少なくとも２個の熱硬化性イミド基を有するイミド化合物が好ましい。エポキシ樹脂は、通常エポキシ樹脂硬化剤と併用される。 The die bonding film 40 has a circular shape, for example. The thickness of the die bonding film 40 is preferably about 1 to 100 μm, for example. The die bonding film 40 contains, for example, a thermosetting component and / or a thermoplastic resin and a filler. The thermosetting component is a component that can be cross-linked by heating to form a cured product. For example, the thermosetting component contains a thermosetting resin and optionally contains a curing agent for the thermosetting resin. As the thermosetting resin, conventionally known ones can be used, and there is no particular limitation. Among them, convenience as a semiconductor peripheral material (high-purity products are easily available, many types are available, and reactivity is easily controlled. ), An epoxy resin and an imide compound having at least two thermosetting imide groups in one molecule are preferable. The epoxy resin is usually used in combination with an epoxy resin curing agent.
　エポキシ樹脂は、２個以上のエポキシ基を有する化合物が好ましい。エポキシ樹脂としては、硬化性や硬化物特性の点から、フェノールのグリシジルエーテル型のエポキシ樹脂が好ましい。フェノールのグリシジルエーテル型のエポキシ樹脂としては、例えば、ビスフェノールＡ、ビスフェノールＡＤ、ビスフェノールＳ、ビスフェノールＦ又はハロゲン化ビスフェノールＡとエピクロルヒドリンの縮合物、フェノールノボラック樹脂のグリシジルエーテル、クレゾールノボラック樹脂のグリシジルエーテル、及びビスフェノールＡノボラック樹脂のグリシジルエーテルが挙げられる。これらの中でも、ノボラック型エポキシ樹脂（クレゾールノボラック樹脂のグリシジルエーテル及びフェノールノボラック樹脂のグリシジルエーテル等）は、硬化物の架橋密度が高く、フィルムの熱時の接着強度を高くすることができる点で好ましい。これらは１種単独で又は複数組み合わせて用いることができる。 The epoxy resin is preferably a compound having two or more epoxy groups. The epoxy resin is preferably a phenol glycidyl ether type epoxy resin from the viewpoint of curability and cured product characteristics. Examples of phenol glycidyl ether type epoxy resins include bisphenol A, bisphenol AD, bisphenol S, bisphenol F or a condensate of halogenated bisphenol A and epichlorohydrin, glycidyl ether of phenol novolac resin, glycidyl ether of cresol novolac resin, and Examples include glycidyl ether of bisphenol A novolac resin. Among these, novolac type epoxy resins (such as glycidyl ether of cresol novolac resin and glycidyl ether of phenol novolac resin) are preferable in that the cured product has a high crosslinking density and can increase the adhesive strength of the film when heated. . These can be used singly or in combination.
　エポキシ樹脂硬化剤としては、例えば、フェノール系化合物、脂肪族アミン、脂環族アミン、芳香族ポリアミン、ポリアミド、脂肪族酸無水物、脂環族酸無水物、芳香族酸無水物、ジシアンジアミド、有機酸ジヒドラジド、三フッ化ホウ素アミン錯体、イミダゾール類、及び第３級アミンが挙げられる。これらの中でもフェノール系化合物が好ましく、その中でも２個以上のフェノール性水酸基を有するフェノール系化合物が特に好ましい。より具体的には、ナフトールノボラック樹脂及びトリスフェノールノボラック樹脂が好ましい。これらのフェノール系化合物をエポキシ樹脂硬化剤として用いると、パッケージ組み立てのための加熱の際のチップ表面及び装置の汚染や、臭気の原因となるアウトガスの発生を有効に低減できる。 Examples of epoxy resin curing agents include phenolic compounds, aliphatic amines, alicyclic amines, aromatic polyamines, polyamides, aliphatic acid anhydrides, alicyclic acid anhydrides, aromatic acid anhydrides, dicyandiamide, organic Examples include acid dihydrazide, boron trifluoride amine complex, imidazoles, and tertiary amines. Among these, phenol compounds are preferable, and phenol compounds having two or more phenolic hydroxyl groups are particularly preferable. More specifically, a naphthol novolak resin and a trisphenol novolak resin are preferable. When these phenolic compounds are used as an epoxy resin curing agent, it is possible to effectively reduce the contamination of the chip surface and device during heating for package assembly and the generation of outgas which causes odor.
　熱可塑性樹脂としては、例えばポリイミド樹脂、ポリアミドイミド樹脂、フェノキシ樹脂、アクリル樹脂、ポリアミド樹脂及びウレタン樹脂が挙げられる。これらは１種単独で又は複数組み合わせて用いることができる。 Examples of the thermoplastic resin include polyimide resin, polyamideimide resin, phenoxy resin, acrylic resin, polyamide resin, and urethane resin. These can be used singly or in combination.
　フィラーは、無機フィラーであることが好ましい。より具体的には、水酸化アルミニウム、水酸化マグネシウム、炭酸カルシウム、炭酸マグネシウム、ケイ酸カルシウム、ケイ酸マグネシウム、酸化カルシウム、酸化マグネシウム、アルミナ、窒化アルミニウム、ほう酸アルミウイスカ、窒化ホウ素、結晶性シリカ、非晶性シリカ及びアンチモン酸化物からなる群より選ばれる少なくとも１種の無機材料を含む無機フィラーが好ましい。これらの中でも、熱伝導性向上のためには、アルミナ、窒化アルミニウム、窒化ホウ素、結晶性シリカ及び非晶性シリカが好ましい。溶融粘度の調整やチクソトロピック性の付与の目的には、水酸化アルミニウム、水酸化マグネシウム、炭酸カルシウム、炭酸マグネシウム、ケイ酸カルシウム、ケイ酸マグネシウム、酸化カルシウム、酸化マグネシウム、アルミナ、結晶性シリカ及び非晶性シリカが好ましい。また、耐湿性を向上させるためには、アルミナ、シリカ、水酸化アルミニウム及びアンチモン酸化物が好ましい。これらは１種単独で又は複数組み合わせて用いることができる。 The filler is preferably an inorganic filler. More specifically, aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, calcium silicate, magnesium silicate, calcium oxide, magnesium oxide, alumina, aluminum nitride, aluminum borate whisker, boron nitride, crystalline silica, An inorganic filler containing at least one inorganic material selected from the group consisting of amorphous silica and antimony oxide is preferred. Among these, alumina, aluminum nitride, boron nitride, crystalline silica, and amorphous silica are preferable for improving thermal conductivity. For the purpose of adjusting melt viscosity and imparting thixotropic properties, aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, calcium silicate, magnesium silicate, calcium oxide, magnesium oxide, alumina, crystalline silica and non-crystalline silica Crystalline silica is preferred. In order to improve moisture resistance, alumina, silica, aluminum hydroxide and antimony oxide are preferred. These can be used singly or in combination.
　ダイボンディングフィルム４０は、開口３０ａと同心をなすように接着層３０の開口３０ａ内に配置されており、接着層２０における開口３０ａから露出する部分２５の全体を覆っている。また、ダイボンディングフィルム４０の外周部分４０ａは、開口３０ａからせり出しており、接着層３０の表面における内周側の縁部に接した状態で接着層３０に重なっている。すなわち、ダイボンディングフィルム４０は、接着層３０に重なっている外周部分４０ａと、接着層３０に重ならない中央部分４０ｂとを有している。ダイボンディングフィルム４０は、外周の少なくとも一部が接着層３０に接していれば、ダイシング工程におけるダイボンディングフィルム４０の剥離を抑制することができるが、ダイシング工程における剥離を更に抑制する観点から、外周部分４０ａの少なくとも一部が接着層３０に重なっていることが好ましく、外周部分４０ａの全てがダイボンディングフィルム４０の外周に沿って接着層３０に重なっていることがより好ましい。 The die bonding film 40 is disposed in the opening 30a of the adhesive layer 30 so as to be concentric with the opening 30a, and covers the entire portion 25 exposed from the opening 30a in the adhesive layer 20. Further, the outer peripheral portion 40 a of the die bonding film 40 protrudes from the opening 30 a and overlaps the adhesive layer 30 in a state where it is in contact with the inner peripheral edge of the surface of the adhesive layer 30. That is, the die bonding film 40 has an outer peripheral portion 40 a that overlaps the adhesive layer 30 and a central portion 40 b that does not overlap the adhesive layer 30. The die bonding film 40 can suppress the peeling of the die bonding film 40 in the dicing process as long as at least a part of the outer periphery is in contact with the adhesive layer 30, but from the viewpoint of further suppressing the peeling in the dicing process. It is preferable that at least a part of the portion 40 a overlaps the adhesive layer 30, and it is more preferable that the entire outer peripheral portion 40 a overlaps the adhesive layer 30 along the outer periphery of the die bonding film 40.
　接着層３０とダイボンディングフィルム４０との重なり範囲（幅）は、０．１～２５ｍｍが好ましく、０．５～１５ｍｍがより好ましく、１．０～１０ｍｍが更に好ましい。ダイボンディングフィルム４０の重なり範囲がこのような範囲であれば、ラミネート工程において、ダイボンディングフィルム４０の接着層２０に接している部分（上記中央部分４０ｂ）のみを半導体ウェハ６０に貼り付け可能であり、かつ、ダイシング工程においてダイボンディングフィルム４０の外周部分４０ａが接着層３０から剥離する剥離起点となることが更に抑制されるため、半導体チップが飛散することが更に抑制される。 The overlapping range (width) of the adhesive layer 30 and the die bonding film 40 is preferably 0.1 to 25 mm, more preferably 0.5 to 15 mm, and still more preferably 1.0 to 10 mm. If the overlapping range of the die bonding film 40 is such a range, only the portion (the central portion 40b) in contact with the adhesive layer 20 of the die bonding film 40 can be attached to the semiconductor wafer 60 in the laminating process. And since it becomes further suppressed that the outer peripheral part 40a of the die bonding film 40 peels from the contact bonding layer 30 in a dicing process, it is further suppressed that a semiconductor chip scatters.
　接着層３０とダイボンディングフィルム４０との接着力は、０．８Ｎ／２５ｍｍ以上が好ましく、１．０Ｎ／２５ｍｍ以上がより好ましく、１．２Ｎ／２５ｍｍ以上が更に好ましい。接着層３０がこのような接着力を有していれば、ダイシング工程において接着層３０からダイボンディングフィルム４０が剥離してしまうことが更に抑制される。接着層３０の接着力は、例えばオリエンテック製「テンシロン引張強度試験機　ＲＴＡ－１００型」又はこれに類似した試験機を用いて垂直方向（９０°剥離）に２００ｍｍ／ｍｉｎの速度で剥離したときの剥離力を用いて測定することができる。 The adhesive force between the adhesive layer 30 and the die bonding film 40 is preferably 0.8 N / 25 mm or more, more preferably 1.0 N / 25 mm or more, and further preferably 1.2 N / 25 mm or more. If the adhesive layer 30 has such an adhesive force, it is further suppressed that the die bonding film 40 is peeled from the adhesive layer 30 in the dicing process. The adhesive strength of the adhesive layer 30 is, for example, when peeling at a rate of 200 mm / min in the vertical direction (90 ° peeling) using an orientec “Tensilon tensile strength tester RTA-100 type” or a similar tester. It can measure using the peeling force of.
　リングフレーム５０は、通常は金属製又はプラスチック製の成形体である。リングフレーム５０は、例えば略円環状をなしており、リングフレーム５０の外周の一部には、ガイド用の平坦切欠部（図示せず）が形成されている。リングフレーム５０は、中央部に開口５０ａを有している。リングフレーム５０の開口５０ａの内径寸法（直径）は、ダイシングされる半導体ウェハ６０のウェハ径よりも幾分大きいことは言うまでもなく、接着層３０の開口３０ａの直径以上となるように調整されている。なお、リングフレーム５０の形状は、円環状のものに限定されず、従来より用いられている種々の形状（例えば矩形環状）のものが用いられる。 The ring frame 50 is usually a molded body made of metal or plastic. The ring frame 50 has, for example, a substantially annular shape, and a flat cutout (not shown) for guide is formed on a part of the outer periphery of the ring frame 50. The ring frame 50 has an opening 50a at the center. Needless to say, the inner diameter (diameter) of the opening 50a of the ring frame 50 is slightly larger than the diameter of the semiconductor wafer 60 to be diced, and is adjusted to be equal to or larger than the diameter of the opening 30a of the adhesive layer 30. . The shape of the ring frame 50 is not limited to an annular shape, and various shapes (for example, a rectangular shape) conventionally used are used.
　リングフレーム５０は、開口５０ａが開口３０ａと同心をなすように接着層３０上に配置されている。リングフレーム５０は、ダイボンディングフィルム４０における接着層３０との重なり部分（外周部分４０ａ）に重なることなく配置されている。 The ring frame 50 is disposed on the adhesive layer 30 so that the opening 50a is concentric with the opening 30a. The ring frame 50 is disposed without overlapping the overlapping portion (the outer peripheral portion 40a) of the die bonding film 40 with the adhesive layer 30.
　半導体ウェハ６０は、接着層３０とダイボンディングフィルム４０の外周部分４０ａとに重なることなく、ダイボンディングフィルム４０の中央部分４０ｂに配置される。半導体ウェハ６０には、所要の前処理を経て回路が形成されている。ダイシング工程において、半導体ウェハ６０が回路毎に個片化されて、半導体チップが得られる。 The semiconductor wafer 60 is disposed in the central portion 40b of the die bonding film 40 without overlapping the adhesive layer 30 and the outer peripheral portion 40a of the die bonding film 40. A circuit is formed on the semiconductor wafer 60 through a necessary pretreatment. In the dicing process, the semiconductor wafer 60 is separated into individual circuits, and semiconductor chips are obtained.
　半導体装置製造用接着シート１は、ダイシング加工及びダイボンディング加工に用いられる。半導体装置製造用接着シート１では、当該シートが接着層２０とは別に接着層３０を備えていることにより、接着層２０の接着力と接着層３０の接着力とを個別に調整することができる。これにより、ピックアップ工程においてダイボンディングフィルム４０及びダイシングシートの接着層２０の間の剥離が容易となるように接着層２０の接着力を調整しつつ、ダイシング工程においてリングフレーム５０が接着層３０から剥離しないように接着層３０の接着力を調整することができる。さらに、半導体装置製造用接着シート１では、ダイボンディングフィルム４０の外周部分４０ａが接着層３０に接していることにより、接着力が調整された接着層３０に外周部分４０ａが接着することとなる。これにより、ダイシング工程においてダイボンディングフィルム４０の外周部分４０ａが剥離起点となりダイボンディングフィルム４０が剥離することが抑制されるため、チップの飛散を抑制することができる。さらに、半導体装置製造用接着シート１では、ダイボンディングフィルム４０の外周部分４０ａが接着層３０に重なっていることにより、ダイシング工程においてダイボンディングフィルム４０が剥離することが更に抑制されるため、チップの飛散を更に抑制することができる。 The adhesive sheet 1 for manufacturing a semiconductor device is used for dicing and die bonding. In the adhesive sheet 1 for manufacturing a semiconductor device, since the sheet includes the adhesive layer 30 in addition to the adhesive layer 20, the adhesive force of the adhesive layer 20 and the adhesive force of the adhesive layer 30 can be individually adjusted. . Thereby, the ring frame 50 is peeled from the adhesive layer 30 in the dicing step while adjusting the adhesive force of the adhesive layer 20 so that the die bonding film 40 and the adhesive layer 20 of the dicing sheet are easily peeled in the pickup step. The adhesive force of the adhesive layer 30 can be adjusted so that it does not. Furthermore, in the adhesive sheet 1 for manufacturing a semiconductor device, since the outer peripheral portion 40a of the die bonding film 40 is in contact with the adhesive layer 30, the outer peripheral portion 40a adheres to the adhesive layer 30 whose adhesive force is adjusted. Thereby, since the outer peripheral part 40a of the die bonding film 40 becomes a peeling start point in the dicing process and the die bonding film 40 is prevented from peeling off, the scattering of the chips can be suppressed. Furthermore, in the adhesive sheet 1 for manufacturing a semiconductor device, since the outer peripheral portion 40a of the die bonding film 40 is overlapped with the adhesive layer 30, the die bonding film 40 is further prevented from peeling off in the dicing process. Scattering can be further suppressed.
　次に、半導体装置製造用接着シート１を用いた半導体装置の製造方法について説明する。図４は、半導体ウェハをダイシングブレードでダイシングする工程を示す模式断面図である。図５は、個片化したダイボンディングフィルム付き半導体チップをピックアップする工程を示す模式断面図である。図６は、ピックアップしたダイボンディングフィルム付き半導体チップを用いた半導体装置を示す模式断面図である。 Next, a method for manufacturing a semiconductor device using the adhesive sheet 1 for manufacturing a semiconductor device will be described. FIG. 4 is a schematic cross-sectional view showing a process of dicing a semiconductor wafer with a dicing blade. FIG. 5 is a schematic cross-sectional view showing a process of picking up the separated semiconductor chip with die bonding film. FIG. 6 is a schematic cross-sectional view showing a semiconductor device using a picked-up semiconductor chip with a die bonding film.
　半導体装置製造用接着シート１に半導体ウェハ６０が積層された積層体は、ダイボンディングフィルム４０と基材層とが積層された接着フィルム、及び、ダイボンディングフィルム４０と接着層（接着層２０及び接着層３０）と基材層とがこの順に積層された接着フィルムのいずれを用いても得ることができる。 The laminated body in which the semiconductor wafer 60 is laminated on the adhesive sheet 1 for manufacturing a semiconductor device includes an adhesive film in which the die bonding film 40 and the base material layer are laminated, and the die bonding film 40 and the adhesive layer (the adhesive layer 20 and the adhesive layer). Any of the adhesive films in which the layer 30) and the base material layer are laminated in this order can be used.
　ダイボンディングフィルム４０と基材層とが積層された接着フィルムを用いる場合、例えば、以下の（１）、（２）に示すいずれかの方法を使用することができる。 In the case of using an adhesive film in which the die bonding film 40 and the base material layer are laminated, for example, any of the methods shown in the following (1) and (2) can be used.
　（１）まず、接着フィルムのダイボンディングフィルム４０と、半導体ウェハ６０とを貼り合わせる。次に、接着フィルムの基材層をはく離し、ダイボンディングフィルム４０と、接着層（接着層２０及び接着層３０）及び基材層が積層されたダイシングテープの接着層とを貼り合わせる。 (1) First, the die bonding film 40 of the adhesive film and the semiconductor wafer 60 are bonded together. Next, the base material layer of the adhesive film is peeled off, and the die bonding film 40 is bonded to the adhesive layer (the adhesive layer 20 and the adhesive layer 30) and the adhesive layer of the dicing tape on which the base material layer is laminated.
　（２）まず、接着フィルムのダイボンディングフィルム４０と、接着層（接着層２０及び接着層３０）及び基材層が積層されたダイシングテープの接着層とを貼り合わせる。次に、接着フィルムの基材層をはく離し、ダイボンディングフィルム４０と半導体ウェハ６０とを貼り合わせる。 (2) First, the die bonding film 40 of the adhesive film is bonded to the adhesive layer of the dicing tape in which the adhesive layer (the adhesive layer 20 and the adhesive layer 30) and the base material layer are laminated. Next, the base material layer of the adhesive film is peeled off, and the die bonding film 40 and the semiconductor wafer 60 are bonded together.
　ダイボンディングフィルム４０と接着層と基材層とがこの順に積層された接着フィルムを用いる場合は、接着フィルムのダイボンディングフィルム４０と半導体ウェハ６０とを貼り合わせることにより、半導体装置製造用接着シート１に半導体ウェハ６０が積層された積層体を得ることができる。 When using the adhesive film in which the die bonding film 40, the adhesive layer, and the base material layer are laminated in this order, the die bonding film 40 of the adhesive film and the semiconductor wafer 60 are bonded to each other, thereby bonding the adhesive sheet 1 for manufacturing a semiconductor device. A laminated body in which the semiconductor wafers 60 are laminated can be obtained.
　なお、上記のいずれの方法においても、接着層（接着層２０及び接着層３０）とダイボンディングフィルム４０とは、ダイボンディングフィルム４０の外周部分４０ａの少なくとも一部が接着層３０と接するように積層され、好ましくは重なるように積層される。また、半導体ウェハ６０は、接着層３０やダイボンディングフィルム４０の外周部分４０ａと重ならないように配置される。 In any of the above methods, the adhesive layer (the adhesive layer 20 and the adhesive layer 30) and the die bonding film 40 are laminated so that at least a part of the outer peripheral portion 40a of the die bonding film 40 is in contact with the adhesive layer 30. And are preferably laminated so as to overlap. Further, the semiconductor wafer 60 is disposed so as not to overlap the outer peripheral portion 40 a of the adhesive layer 30 and the die bonding film 40.
　前記いずれかの方法で半導体ウェハ６０が半導体装置製造用接着シート１に積層された積層体を得た後に、半導体装置製造用接着シート１の接着層３０上にリングフレーム５０が配置される。 After obtaining the laminate in which the semiconductor wafer 60 is laminated on the adhesive sheet 1 for manufacturing a semiconductor device by any one of the above methods, the ring frame 50 is disposed on the adhesive layer 30 of the adhesive sheet 1 for manufacturing a semiconductor device.
　次に、図４に示すように、上記積層体を切断装置（ダイサー）の回転刃７０で切断し、ダイボンディングフィルム４５が半導体チップ６５に接着してなる所望の大きさの接着フィルム付半導体チップ８０を得る。ダイシング工程では、接着フィルムを完全に切断するフルカット工法を用いることが可能であり、接着フィルムを完全に切断せず一部を残す工法（ハーフカット工法）を用いることも可能である。 Next, as shown in FIG. 4, the laminated body is cut with a rotary blade 70 of a cutting device (dicer), and the die bonding film 45 is bonded to the semiconductor chip 65. Get 80. In the dicing process, it is possible to use a full cut method that completely cuts the adhesive film, and it is also possible to use a method (half cut method) that does not completely cut the adhesive film and leaves a part.
　半導体ウェハ６０を切断する際に使用するダイサーや回転刃（ブレード）は、一般に市販されているものを使用することができる。ダイサーとしては、例えば株式会社ディスコ社製のフルオートマチックダイシングソー６０００シリーズやセミオートマチックダイシングソー３０００シリーズなどが使用できる。ブレードとしては、例えば株式会社ディスコ社製のダイシングブレードＮＢＣ－ＺＨ０５シリーズやＮＢＣ－ＺＨシリーズなどが使用できる。 As the dicer and the rotary blade (blade) used when cutting the semiconductor wafer 60, commercially available ones can be used. As the dicer, for example, a full automatic dicing saw 6000 series or a semi-automatic dicing saw 3000 series manufactured by DISCO Corporation can be used. As the blade, for example, a dicing blade NBC-ZH05 series or NBC-ZH series manufactured by DISCO Corporation can be used.
　また、半導体装置製造用接着シート１と半導体ウェハ６０との積層物を切断する工程において、例えば株式会社ディスコ社製のフルオートマチックダイシングソー６０００シリーズなどの回転刃だけではなく、例えば株式会社ディスコ社製のフルオートマチックレーザソー７０００シリーズなどのレーザを用いることもできる。 Further, in the step of cutting the laminate of the semiconductor device manufacturing adhesive sheet 1 and the semiconductor wafer 60, for example, not only a rotary blade such as a fully automatic dicing saw 6000 series manufactured by DISCO Corporation, but also manufactured by DISCO Corporation, for example. A laser such as the full automatic laser saw 7000 series can also be used.
　ダイシング工程の後、図５に示すように、接着層２０とダイボンディングフィルム４５との界面で剥離し、接着フィルム付半導体チップ８０がピックアップされる。そして、ピックアップされた接着フィルム付半導体チップ８０は、図６に示すように、支持基材８５にマウントされる。 After the dicing step, as shown in FIG. 5, peeling is performed at the interface between the adhesive layer 20 and the die bonding film 45, and the semiconductor chip with adhesive film 80 is picked up. Then, the picked-up semiconductor chip with adhesive film 80 is mounted on a support base 85 as shown in FIG.
　その後、接着フィルム付半導体チップ８０の半導体チップ６５は、ワイヤ９０を介して支持基材８５上の外部接続端子（図示せず）と接続される。そして、半導体チップ６５を含む積層体を封止樹脂層９５によって封止して、図６に示す半導体装置１００が得られる。 Thereafter, the semiconductor chip 65 of the semiconductor chip with adhesive film 80 is connected to an external connection terminal (not shown) on the support base 85 via the wire 90. And the laminated body containing the semiconductor chip 65 is sealed with the sealing resin layer 95, and the semiconductor device 100 shown in FIG. 6 is obtained.
　なお、本発明は上記実施形態に限定されるものではない。例えば、接着層３０は、円環状であることに限られるものではなく、矩形環状であってもよい。この場合、通常、矩形環状を有するリングフレームが用いられ、矩形状のダイボンディングフィルムが用いられる。また、接着層３０は、接着層２０上に複数配置されていることに限られるものではなく、半導体装置１００の製造個数に応じて接着層２０上に少なくとも一つ配置されていればよい。 The present invention is not limited to the above embodiment. For example, the adhesive layer 30 is not limited to an annular shape, and may be a rectangular shape. In this case, a ring frame having a rectangular ring shape is usually used, and a rectangular die bonding film is used. Further, the adhesive layer 30 is not limited to being disposed on the adhesive layer 20, and at least one adhesive layer 30 may be disposed on the adhesive layer 20 according to the number of semiconductor devices 100 manufactured.
　以下、本発明を実施例により詳細に説明するが、本発明はこれらに制限されるものではない。 Hereinafter, the present invention will be described in detail with reference to examples, but the present invention is not limited thereto.
１．ダイボンディングフィルムの作製
　温度計、攪拌機及び塩化カルシウム管を備えた５００ｍｌの四つ口フラスコに、エーテルジアミン２０００（ＢＡＳＦ社製）（０．０２モル）、１，１２―ジアミノドデカン（０．０８モル）及びＮ－メチル－２－ピロリドン１５０ｇをとり、６０℃にて撹拌し、ジアミンを溶解した。ジアミンの溶解後、２，２－ビス［４－（３，４－ジカルボキシフェノキシ）フェニル］プロパン二無水物（０．１モル）を少量ずつ添加した。６０℃で１時間反応させた後、Ｎ２ガスを吹き込みながら１７０℃で加熱し、水を溶剤の一部と共沸除去した。この反応液をポリイミド樹脂のＮＭＰ溶液として得た。 1. Preparation of die bonding film Etherdiamine 2000 (BASF) (0.02 mol), 1,12-diaminododecane (0.08 mol) was added to a 500 ml four-necked flask equipped with a thermometer, stirrer and calcium chloride tube. ) And 150 g of N-methyl-2-pyrrolidone were stirred at 60 ° C. to dissolve the diamine. After dissolution of the diamine, 2,2-bis [4- (3,4-dicarboxyphenoxy) phenyl] propane dianhydride (0.1 mol) was added in small portions. After reacting at 60 ° C. for 1 hour, the mixture was heated at 170 ° C. while blowing N 2 gas to remove water azeotropically with a part of the solvent. This reaction solution was obtained as an NMP solution of polyimide resin.
　上記で得たポリイミド樹脂のＮＭＰ溶液（ポリイミド樹脂を１００質量部含む）に、クレゾールノボラック型エポキシ樹脂（東都化成製）４質量部、４，４’－［１－［４－［１－（４－ヒドロキシフェニル）－１－メチルエチル］フェニル］エチリデン］ビスフェノール（本州化学製）２質量部、テトラフェニルホスホニウムテトラフェニルボラート（東京化成製）０．５質量部加えた。更に、窒化硼素フィラー（水島合金鉄製）を固形分の全質量に対して２５質量％、アエロジルフィラーＲ９７２（日本アエロジル製）を固形分の全質量に対して３質量％となるように加え、良く混錬してワニスを得た。調合したワニスを剥離処理済みのポリエチレンテレフタレートフィルム上に塗布し、８０℃で３０分加熱し、つづいて１２０℃で３０分加熱した。その後、室温（２５℃）でポリエチレンテレフタレートフィルムを剥して、厚さ２５μｍの接着フィルムをダイボンディングフィルムとして得た。 In the NMP solution of polyimide resin obtained above (containing 100 parts by weight of polyimide resin), 4 parts by weight of cresol novolac type epoxy resin (manufactured by Tohto Kasei), 4,4 ′-[1- [4- [1- (4 -Hydroxyphenyl) -1-methylethyl] phenyl] ethylidene] bisphenol (Honshu Chemical) 2 parts by mass and tetraphenylphosphonium tetraphenylborate (Tokyo Kasei) 0.5 part by mass were added. Furthermore, boron nitride filler (made by Mizushima alloy iron) is added to 25% by mass with respect to the total mass of solids, and Aerosil filler R972 (made by Nippon Aerosil) is added to 3% by mass with respect to the total mass of solids. Kneaded to get varnish. The prepared varnish was applied onto a polyethylene terephthalate film that had been peeled off, heated at 80 ° C. for 30 minutes, and then heated at 120 ° C. for 30 minutes. Then, the polyethylene terephthalate film was peeled off at room temperature (25 ° C.) to obtain an adhesive film having a thickness of 25 μm as a die bonding film.
２．ダイシングテープの作製
（１）強接着層　主モノマーとしてブチルアクリレートとエチルアクリレート、アクリロニトリルを用い、官能基モノマーとしてヒドロキシエチルアクリレートを用いたアクリル共重合体を溶液重合法にて接着剤として得た。この合成したアクリル共重合体の重量平均分子量は７０万であり、ガラス転移点は－３０℃であった。このアクリル共重合体１００質量部に対し、多官能イソシアネート架橋剤（日本ポリウレタン工業株式会社製）を２．２質量部配合した接着剤溶液を調製した。シリコーン系離型剤を塗布した二軸延伸ポリエステルフィルムセパレータ（厚さ２５μｍ）の上に乾燥時の接着剤厚さが２０μｍになるように接着剤溶液を塗工した。つづいて、接着剤溶液を８０℃で３０分乾燥後、シリコーン系離型剤を塗布した別の二軸延伸ポリエステルフィルムセパレータ（厚さ２５μｍ）を接着剤面にラミネートした。 2. Production of Dicing Tape (1) Strong Adhesive Layer An acrylic copolymer using butyl acrylate, ethyl acrylate and acrylonitrile as main monomers and hydroxyethyl acrylate as a functional group monomer was obtained as an adhesive by a solution polymerization method. The synthesized acrylic copolymer had a weight average molecular weight of 700,000 and a glass transition point of −30 ° C. An adhesive solution was prepared by blending 2.2 parts by mass of a polyfunctional isocyanate crosslinking agent (manufactured by Nippon Polyurethane Industry Co., Ltd.) with respect to 100 parts by mass of this acrylic copolymer. An adhesive solution was applied on a biaxially stretched polyester film separator (thickness 25 μm) coated with a silicone release agent so that the adhesive thickness at drying was 20 μm. Subsequently, after the adhesive solution was dried at 80 ° C. for 30 minutes, another biaxially stretched polyester film separator (thickness 25 μm) coated with a silicone-based release agent was laminated on the adhesive surface.
（２）弱接着層と基材の積層品
　主モノマーとして２－エチルヘキシルアクリレートとメチルメタクリレートを用い、官能基モノマーとしてヒドロキシエチルメタクリレートとアクリル酸を用いたアクリル共重合体を溶液重合法にて接着剤として得た。この合成したアクリル共重合体の重量平均分子量は４０万であり、ガラス転移点は－３８℃であった。このアクリル共重合体１００質量部に対し、多官能イソシアネート架橋剤（三菱化学株式会社製）を１５質量部配合した接着剤溶液を調製した。シリコーン系離型剤を塗布した二軸延伸ポリエステルフィルムセパレータ（厚さ３８μｍ）の上に乾燥時の接着剤厚さが１０μｍになるように接着剤溶液を塗工した。つづいて、接着剤溶液を８０℃で３０分乾燥後、更にポリオレフィンフィルム（厚さ１００μｍ）を接着剤面にラミネートした。この多層フィルムを室温で１週間放置し十分にエージングを行った後、試験に使用した。 (2) Laminated product of weak adhesive layer and substrate Adhesive by solution polymerization of acrylic copolymer using 2-ethylhexyl acrylate and methyl methacrylate as main monomers and hydroxyethyl methacrylate and acrylic acid as functional group monomers Got as. The synthesized acrylic copolymer had a weight average molecular weight of 400,000 and a glass transition point of −38 ° C. An adhesive solution was prepared by blending 15 parts by mass of a polyfunctional isocyanate crosslinking agent (manufactured by Mitsubishi Chemical Corporation) with respect to 100 parts by mass of this acrylic copolymer. An adhesive solution was applied on a biaxially stretched polyester film separator (thickness: 38 μm) coated with a silicone release agent so that the adhesive thickness during drying was 10 μm. Subsequently, the adhesive solution was dried at 80 ° C. for 30 minutes, and a polyolefin film (thickness: 100 μm) was further laminated on the adhesive surface. The multilayer film was allowed to stand at room temperature for 1 week and sufficiently aged, and then used for the test.
（３）強接着層と基材の積層品
　主モノマーとしてブチルアクリレートとエチルアクリレート、アクリロニトリルを用い、官能基モノマーとしてヒドロキシエチルアクリレートを用いたアクリル共重合体を溶液重合法にて接着剤として得た。この合成したアクリル共重合体の重量平均分子量は７０万であり、ガラス転移点は－３０℃であった。このアクリル共重合体１００質量部に対し、多官能イソシアネート架橋剤（日本ポリウレタン工業株式会社製）を２．２質量部配合した接着剤溶液を調製した。シリコーン系離型剤を塗布した二軸延伸ポリエステルフィルムセパレータ（厚さ２５μｍ）の上に乾燥時の接着剤厚さが２０μｍになるように接着剤溶液を塗工した。つづいて、接着剤溶液を８０℃で３０分乾燥後、更にポリオレフィンフィルム（厚さ１００μｍ）を接着剤面にラミネートした。この多層フィルムを室温で１週間放置し十分にエージングを行った後、試験に使用した。 (3) Laminated product of strong adhesive layer and substrate An acrylic copolymer using butyl acrylate, ethyl acrylate and acrylonitrile as main monomers and hydroxyethyl acrylate as a functional group monomer was obtained as an adhesive by a solution polymerization method. . The synthesized acrylic copolymer had a weight average molecular weight of 700,000 and a glass transition point of −30 ° C. An adhesive solution was prepared by blending 2.2 parts by mass of a polyfunctional isocyanate crosslinking agent (manufactured by Nippon Polyurethane Industry Co., Ltd.) with respect to 100 parts by mass of this acrylic copolymer. An adhesive solution was applied on a biaxially stretched polyester film separator (thickness 25 μm) coated with a silicone release agent so that the adhesive thickness at drying was 20 μm. Subsequently, the adhesive solution was dried at 80 ° C. for 30 minutes, and a polyolefin film (thickness: 100 μm) was further laminated on the adhesive surface. The multilayer film was allowed to stand at room temperature for 1 week and sufficiently aged, and then used for the test.
３．半導体ウェハの積層品の作製
（実施例１）
　弱接着層と基材の積層品（ダイシングテープ）の弱接着層上に、内径２１０ｍｍの円環状に切り抜いた上記（１）の強接着層をリングフレーム固定用の接着層として貼り付けた。その後に、直径２２０ｍｍに円形加工したダイボンディングフィルムを強接着層と同心をなすように貼り付け、半導体装置製造用接着シートとした。直径８インチ、厚み５０μｍの半導体ウェハを６０℃の熱板上で半導体装置製造用接着シートのダイボンディングフィルムと貼り合わせて、半導体ウェハの積層品を得た。 3. Fabrication of semiconductor wafer laminate (Example 1)
On the weak adhesive layer of the laminated product (dicing tape) of the weak adhesive layer and the substrate, the strong adhesive layer (1) cut out in an annular shape with an inner diameter of 210 mm was attached as an adhesive layer for fixing the ring frame. Thereafter, a die bonding film circularly processed to a diameter of 220 mm was attached so as to be concentric with the strong adhesive layer, thereby obtaining an adhesive sheet for manufacturing a semiconductor device. A semiconductor wafer having a diameter of 8 inches and a thickness of 50 μm was bonded to a die bonding film of an adhesive sheet for manufacturing a semiconductor device on a hot plate at 60 ° C. to obtain a laminated product of semiconductor wafers.
（比較例１）
　強接着層を積層しなかったこと以外は実施例１と同様にして、半導体ウェハの積層品を得た。 (Comparative Example 1)
A laminated product of a semiconductor wafer was obtained in the same manner as in Example 1 except that the strong adhesion layer was not laminated.
（比較例２）
　弱接着層と基材の積層品に代えて強接着層と基材の積層品（ダイシングテープ）を使用し、さらに、強接着層を積層しなかったこと以外は実施例１と同様にして、半導体ウェハの積層品を得た。 (Comparative Example 2)
In place of the laminated product of the weak adhesive layer and the base material, a laminated product of the strong adhesive layer and the base material (dicing tape) is used. Further, except that the strong adhesive layer is not laminated, as in Example 1, A semiconductor wafer laminate was obtained.
（比較例３）
　ダイボンディングフィルムを直径２０５ｍｍに円形加工し、ダイボンディングフィルムと強接着層との重なり部分を設けなかったこと以外は実施例１と同様にして、半導体ウェハの積層品を得た。 (Comparative Example 3)
A semiconductor wafer laminate was obtained in the same manner as in Example 1 except that the die bonding film was circularly processed to a diameter of 205 mm and an overlapping portion between the die bonding film and the strong adhesive layer was not provided.
（比較例４）
　弱接着層と基材の積層品に代えて強接着層と基材の積層品（ダイシングテープ）を使用し、さらに、ダイボンディングフィルムを直径２０５ｍｍに円形加工し、ダイボンディングフィルムと強接着層との重なり部分を設けなかったこと以外は実施例１と同様にして、半導体ウェハの積層品を得た。 (Comparative Example 4)
Instead of the laminate of the weak adhesive layer and the base material, a laminate of the strong adhesive layer and the base material (dicing tape) is used, and the die bonding film is processed into a circular shape with a diameter of 205 mm. A laminated product of semiconductor wafers was obtained in the same manner as in Example 1 except that no overlapping portion was provided.
　上記実施例１及び比較例１～４で作製したサンプルにおいて、半導体ウェハの貼り合わせは、株式会社ＪＣＭ社製の「ＤＭ－３００－Ｈ」を用いて６０℃で行った。 In the samples prepared in Example 1 and Comparative Examples 1 to 4, the semiconductor wafers were bonded at 60 ° C. using “DM-300-H” manufactured by JCM Corporation.
４．各種評価
（ダイシング工程）
　株式会社ディスコ社製のフルオートダイサー「ＤＦＤ－６３６１」を用いて、上記実施例１及び比較例１～４で作製したサンプルを切断した。サンプルの切断では、直径２５０ｍｍの開口を有する円環状のリングフレームを用いた。サンプルの切断では、ブレード１枚で加工が完了するシングルカット方式を採用し、株式会社ディスコ社製のダイシングブレード「ＮＢＣ－ＺＨ１０４Ｆ－ＳＥ　２７ＨＤＢＢ」をブレードとして用いた。サンプルの切断は、ブレード回転数４５，０００ｒｐｍ、切断速度５０ｍｍ／ｓの条件にて行った。切断時のブレードハイトは、ダイシング基材を２０μｍ切り込む設定（８０μｍ）とした。半導体ウェハを切断するサイズは１０×１０ｍｍとした。 4). Various evaluations (dicing process)
Samples produced in Example 1 and Comparative Examples 1 to 4 were cut using a full auto dicer “DFD-6361” manufactured by DISCO Corporation. In the sample cutting, an annular ring frame having an opening with a diameter of 250 mm was used. In the cutting of the sample, a single cut method in which processing is completed with one blade was adopted, and a dicing blade “NBC-ZH104F-SE 27HDBB” manufactured by Disco Corporation was used as the blade. The sample was cut under the conditions of a blade rotation speed of 45,000 rpm and a cutting speed of 50 mm / s. The blade height at the time of cutting was set to cut a dicing substrate by 20 μm (80 μm). The size for cutting the semiconductor wafer was 10 × 10 mm.
　ダイシング工程においてリングフレームと接着層間が剥離した場合、又は、ダイシング工程においてダイボンディングフィルムの剥離や半導体チップ飛びが生じた場合をそれぞれ不良（Ｂ）と判定し、上記不具合が発生しなかったものを良好（Ａ）と判定した。 When the ring frame and the adhesive layer are separated in the dicing step, or when the die bonding film is peeled off or the semiconductor chip is jumped in the dicing step, it is determined as defective (B), and the above-mentioned defect does not occur. It was determined as good (A).
（ピックアップ工程）
　上記方法で個片化したチップのピックアップ性について、ルネサス東日本セミコンダクタ社製のフレキシブルダイボンダー「ＤＢ－７３０」を使用して評価した。ピックアップ用コレットには、マイクロメカニクス社製の「ＲＵＢＢＥＲ　ＴＩＰ　１３－０８７Ｅ－３３（サイズ：１０×１０ｍｍ）」を用い、突上げピンには、マイクロメカニクス社製の「ＥＪＥＣＴＯＲ　ＮＥＥＤＬＥ　ＳＥＮ２－８３－０５（直径：０．７ｍｍ、先端形状：直径３５０μｍの半円）」を用いた。突上げピンは、ピン中心間隔４．２ｍｍで９本配置した。ピックアップ時のピンの突上げ速度：１０ｍｍ／ｓ、突上げ高さ：１０００μｍの条件でピックアップ性を評価した。連続１００チップをピックアップし、チップ割れ、ピックアップミス等が発生しない場合を良好（Ａ）と判定し、１チップでもチップ割れやピックアップミス等が発生した場合を不良（Ｂ）と判定した。 (Pickup process)
The pick-up property of the chips separated by the above method was evaluated using a flexible die bonder “DB-730” manufactured by Renesas East Japan Semiconductor. “RUBBER TIP 13-087E-33 (size: 10 × 10 mm)” manufactured by Micromechanics is used as the pickup collet, and “EJECTOR NEEDLE SEN2-83-05” (made by Micromechanics) is used as the push-up pin. Diameter: 0.7 mm, tip shape: semicircle with a diameter of 350 μm) ”. Nine push-up pins were arranged with a pin center interval of 4.2 mm. The pick-up property was evaluated under the conditions of a pin push-up speed during pick-up: 10 mm / s and a push-up height: 1000 μm. When 100 consecutive chips were picked up and chip cracks, pickup mistakes, etc. did not occur, it was determined as good (A), and when even one chip had chip cracks, pickup mistakes, etc., it was determined as defective (B).
　上記実施例１及び比較例１～４で作製したサンプル、及び、ダイシング工程及びピックアップ工程における各種評価の結果を表１に示す。
Figure JPOXMLDOC01-appb-T000001
 Table 1 shows the samples prepared in Example 1 and Comparative Examples 1 to 4 and the results of various evaluations in the dicing process and the pickup process.
Figure JPOXMLDOC01-appb-T000001
　比較例１～４はダイボンディングフィルムとリングフレーム固定用強接着層との接触部分や重なり部分がない。 Comparative Examples 1 to 4 have no contact portion or overlapping portion between the die bonding film and the strong adhesive layer for fixing the ring frame.
　比較例１は、接着層のリングフレーム配置部分とリングフレームとの密着力が弱く、ダイシング工程においてリングフレームから接着層が剥離し、かつ、ダイシング工程においてダイボンディングフィルム剥離が発生してしまうため好ましくない。比較例２は、ダイシングテープとダイボンディングフィルムの密着力が高く、ピックアップ工程においてチップ割れやピックアップミスが発生するため好ましくない。比較例３は、強接着層とダイボンディングフィルムとの接触部分や重なり部分がないため、ダイシング工程においてダイボンディングフィルム剥離が発生してしまうため好ましくない。比較例４は、ダイシングテープとダイボンディングフィルムの密着力が高く、ピックアップ工程においてチップ割れやピックアップミスが発生するため好ましくない。 Comparative Example 1 is preferable because the adhesive force between the ring frame arrangement portion of the adhesive layer and the ring frame is weak, the adhesive layer peels off from the ring frame in the dicing process, and the die bonding film peels off in the dicing process. Absent. Comparative Example 2 is not preferable because the adhesive strength between the dicing tape and the die bonding film is high, and chip cracks and pickup errors occur in the pickup process. Comparative Example 3 is not preferable because there is no contact portion or overlapping portion between the strong adhesive layer and the die bonding film, and thus die bonding film peeling occurs in the dicing process. Comparative Example 4 is not preferable because the adhesion between the dicing tape and the die bonding film is high, and chip cracking and pickup errors occur in the pickup process.
　以上の結果から、半導体装置を製造するに際し、本発明の半導体装置製造用接着シートを用いることにより、ピックアップ工程におけるダイボンディングフィルム及びダイシングシート間の剥離容易性を維持しつつ、ダイシング工程におけるリングフレームの剥離及びチップの飛散を抑制することが可能となることが確認された。本発明では、ダイボンディングフィルム付き半導体チップを容易にピックアップ可能となることで、半導体装置の歩留まりを向上させることが可能となる。 From the above results, when manufacturing a semiconductor device, by using the adhesive sheet for manufacturing a semiconductor device of the present invention, the ring frame in the dicing process is maintained while maintaining the ease of separation between the die bonding film and the dicing sheet in the pickup process. It was confirmed that it was possible to suppress the peeling of the chip and the scattering of the chip. In the present invention, it becomes possible to easily pick up a semiconductor chip with a die bonding film, thereby improving the yield of the semiconductor device.
　ところで、上述した半導体装置製造用接着シート１は、ピックアップ工程におけるダイボンディングフィルム及びダイシングシート間の剥離容易性の維持、及びダイシング工程におけるリングフレームの剥離及びチップの飛散の抑制という効果のほか、ロール状に巻いたときのダイボンディングフィルムの巻痕の問題の解決にも寄与する。以下、この点について説明する。 By the way, the above-mentioned adhesive sheet 1 for manufacturing a semiconductor device has the effect of maintaining ease of peeling between the die bonding film and the dicing sheet in the pick-up process, and suppressing the ring frame peeling and chip scattering in the dicing process. This also contributes to the solution of the problem of winding marks of the die bonding film when wound into a shape. Hereinafter, this point will be described.
　従来、プリカット加工が施された接着シート２００は、例えば図７に示すように、基材フィルム２０１上に円形のダイボンディングフィルム２０２が積層され、さらに、ダイボンディングフィルム２０２を覆うように円形の粘着層２０３が積層されている。 Conventionally, as shown in FIG. 7, for example, as shown in FIG. 7, a circular die bonding film 202 is laminated on a base film 201, and the adhesive sheet 200 that has been subjected to precut processing is circular adhesive so as to cover the die bonding film 202. A layer 203 is stacked.
　このような接着シート２００を、例えば図８に示すように、円筒状の巻芯２１１に巻き付けてロール状にする場合、ダイボンディングフィルム２０２と粘着層２０３との重なり部分の厚みが接着シート２００の他の部分の厚みよりも厚いため、巻き付け時の張力がダイボンディングフィルム２０２に過剰にかかってしまうことがある。そのため、図９に示すように、ダイボンディングフィルム２０２の中央部分に巻痕２１２が転写され、ダイボンディングフィルム２０２の平滑性が損なわれてしまうことがある。巻痕２１２は、ダイボンディングフィルム２０２の厚みが増すほど生じやすく、巻痕２１２が生じると、接着シート２００を半導体ウェハに貼り付けたときに半導体ウェハとダイボンディングフィルム２０２との間に空気が入り込み、半導体装置の製造に不具合が生じてしまうおそれがある。 For example, as shown in FIG. 8, when such an adhesive sheet 200 is wound around a cylindrical core 211 to form a roll, the thickness of the overlapping portion of the die bonding film 202 and the adhesive layer 203 is the same as that of the adhesive sheet 200. Since the thickness is thicker than other portions, the tension during winding may be excessively applied to the die bonding film 202. For this reason, as shown in FIG. 9, the winding marks 212 are transferred to the central portion of the die bonding film 202, and the smoothness of the die bonding film 202 may be impaired. The winding marks 212 are more likely to occur as the thickness of the die bonding film 202 increases. When the winding marks 212 are generated, air enters between the semiconductor wafer and the die bonding film 202 when the adhesive sheet 200 is attached to the semiconductor wafer. There is a risk that problems may occur in the manufacture of the semiconductor device.
　なお、従来の接着シートとしては、図１０に示すように、プリカット加工されたダイボンディングフィルム３０２及び粘着フィルム３０３の外側にも粘着フィルム３０３が形成された接着シート３００もあるが、ロール状に巻き付けたときの巻痕の問題は接着シート２００と同様に生じ得る。 In addition, as a conventional adhesive sheet, as shown in FIG. 10, there is an adhesive sheet 300 on which the adhesive film 303 is formed on the outside of the pre-cut die bonding film 302 and the adhesive film 303, but it is wound in a roll shape. The problem of winding marks can occur as in the case of the adhesive sheet 200.
　これに対し、上述した接着シート１では、図２に示したように、ダイボンディングフィルム４０の外周部分４０ａの少なくとも一部が接着層３０に重なっており、外周部分４０ａに対応する接着シート１の厚みが、中央部分４０ｂに対応する接着シート１の厚みに比べて厚くなっている。これにより、接着シート１をロール状に巻いたときに、ダイボンディングフィルム４０と接着層３０との重なり部分に保護されてダイボンディングフィルムの中央部分４０ｂにかかる巻き付け時の張力が緩和され、ダイボンドフィルム４０に巻痕が転写されることを抑制できる。 On the other hand, in the adhesive sheet 1 described above, as shown in FIG. 2, at least a part of the outer peripheral portion 40a of the die bonding film 40 overlaps the adhesive layer 30, and the adhesive sheet 1 corresponding to the outer peripheral portion 40a The thickness is thicker than the thickness of the adhesive sheet 1 corresponding to the central portion 40b. Thereby, when the adhesive sheet 1 is wound in a roll shape, the tension at the time of winding applied to the central portion 40b of the die bonding film is relaxed by being protected by the overlapping portion of the die bonding film 40 and the adhesive layer 30, and the die bonding film 40 can prevent the winding marks from being transferred.
　また、巻痕の転写を抑制する観点から言えば、図１１に示す接着シート２のように、接着層３０の内周の少なくとも一部が、ダイボンディングフィルム４０に重なっていてもよい。この場合も、外周部分４０ａに対応する接着シート２の厚みが、中央部分４０ｂに対応する接着シート２の厚みに比べて厚くなっている。したがって、接着シート１と同様に、ダイボンドフィルム４０に巻痕が転写されることを抑制できる。 Further, from the viewpoint of suppressing the transfer of the winding marks, at least a part of the inner periphery of the adhesive layer 30 may overlap the die bonding film 40 as in the adhesive sheet 2 shown in FIG. Also in this case, the thickness of the adhesive sheet 2 corresponding to the outer peripheral portion 40a is thicker than the thickness of the adhesive sheet 2 corresponding to the central portion 40b. Therefore, similarly to the adhesive sheet 1, it is possible to prevent the winding marks from being transferred to the die bond film 40.
　以下、本発明に係る接着シートの巻痕転写抑制性の評価試験について述べる。 Hereinafter, the evaluation test of the roll transfer suppression property of the adhesive sheet according to the present invention will be described.
（実施例１）
　弱接着層と基材の積層品（ダイシングテープ）の弱接着層上に、内径２１０ｍｍの円環状に７０ｍｍ間隔で連続して切り抜いた上記（１）の強接着層をリングフレーム固定用の接着層として貼り付けた。その後に、直径２２０ｍｍに円形加工したダイボンディングフィルムを強接着層と同心をなすように連続して貼り付けた。そして、ダイシングテープと強接着層の積層部分に対して、基材への切り込み深さが１０μｍ以下となるように調節しながら、ダイボンディングフィルムと同心円状にφ２９０ｍｍの円形プリカット加工を行うと共に、基材の幅方向の両端部にダイシングテープと強接着層との積層部分が残るように加工し、半導体装置製造用接着シートを得た。 Example 1
On the weak adhesive layer of the laminate (dicing tape) of the weak adhesive layer and the base material, the strong adhesive layer of (1), which is continuously cut out in an annular shape with an inner diameter of 210 mm at intervals of 70 mm, is an adhesive layer for fixing the ring frame. Pasted as. Thereafter, a die bonding film circularly processed to a diameter of 220 mm was continuously attached so as to be concentric with the strong adhesive layer. Then, while adjusting the depth of the cut into the base material to 10 μm or less with respect to the laminated portion of the dicing tape and the strong adhesive layer, a circular precut process of φ290 mm concentrically with the die bonding film is performed, It processed so that the lamination | stacking part of a dicing tape and a strong adhesion layer might remain in the both ends of the width direction of a material, and the adhesive sheet for semiconductor device manufacture was obtained.
（実施例２）
　ダイボンディングフィルムの直径を２１１ｍｍに円形加工した以外は実施例１と同様にして、半導体装置製造用接着シートを得た。 (Example 2)
An adhesive sheet for manufacturing a semiconductor device was obtained in the same manner as in Example 1 except that the diameter of the die bonding film was circularly processed to 211 mm.
（比較例１）
　ダイボンディングフィルムの直径を２０５ｍｍに円形加工した以外は実施例１と同様にして、半導体装置製造用接着シートを得た。 (Comparative Example 1)
An adhesive sheet for manufacturing a semiconductor device was obtained in the same manner as in Example 1 except that the diameter of the die bonding film was circularly processed to 205 mm.
（比較例２）
　弱接着層と基材の積層品（ダイシングテープ）の弱接着層上に、直径２２０ｍｍに円形加工したダイボンディングフィルムを６０ｍｍ間隔で連続して貼り付けた。そして、ダイシングテープと弱接着層の積層部分に対して、基材への切り込み深さが１０μｍ以下となるように調節しながら、ダイボンディングフィルムと同心円状にφ２９０ｍｍの円形プリカット加工を行うと共に、基材の幅方向の両端部にダイシングテープが残るように加工し、半導体装置製造用接着シートを得た。 (Comparative Example 2)
On the weak adhesive layer of the laminated product (dicing tape) of the weak adhesive layer and the substrate, a die bonding film circularly processed to a diameter of 220 mm was continuously pasted at intervals of 60 mm. Then, while adjusting the dicing tape and the weak adhesive layer so that the depth of cut into the base material is 10 μm or less, a circular precut process of φ290 mm is performed concentrically with the die bonding film, It processed so that a dicing tape might remain in the both ends of the width direction of material, and the adhesive sheet for semiconductor device manufacture was obtained.
（比較例３）
　ダイボンディングフィルムの厚さを６０μｍとした以外は比較例２と同様にして、半導体装置製造用接着シートを得た。 (Comparative Example 3)
An adhesive sheet for manufacturing a semiconductor device was obtained in the same manner as in Comparative Example 2 except that the thickness of the die bonding film was 60 μm.
（シートロールの作製）
　実施例及び比較例に係る接着シートを、円形のダイボンディングフィルム１００枚分の長さでロール状に巻き付け、シートロールを得た。巻き付け張力は、１ｋｇ又は３ｋｇとした。次に、得られたシートロールを冷蔵庫内（５℃）で２週間保存し、その後、冷蔵庫から取り出したシートロールの５０枚目のダイボンディングフィルムについて、巻痕の有無を観察した。評価基準は以下のとおりである。
○：あらゆる角度から観察しても巻痕が確認されない
△：フィルム上面から観察しても巻痕が確認されないが、フィルムの角度を変えて観察すると巻痕が確認される
×：フィルム上面から観察すると巻痕が確認される (Production of sheet roll)
The adhesive sheets according to Examples and Comparative Examples were wound in a roll shape with a length corresponding to 100 circular die bonding films to obtain a sheet roll. The winding tension was 1 kg or 3 kg. Next, the obtained sheet roll was stored in a refrigerator (5 ° C.) for 2 weeks, and then the presence or absence of winding marks was observed on the 50th die bonding film of the sheet roll taken out from the refrigerator. The evaluation criteria are as follows.
○: No winding marks are observed even when observed from any angle. Δ: No winding marks are observed even when observed from the top surface of the film, but the winding marks are confirmed when the angle of the film is changed. Then the winding marks are confirmed
　評価結果を表２に示す。ダイボンディングフィルムの外周と接着層とが重なる実施例１，２では、巻き付け張力にかかわらず巻痕は確認されなかった。一方、ダイボンディングフィルムの外周と接着層とが重ならない比較例１～３では巻痕が確認され、巻き付け張力が大きい場合にはより顕著に巻痕が発生していることが確認された。また、実施例及び比較例に係る接着シートを半導体ウェハに貼り付けたときのボイドの発生の有無を目視にて評価した。その結果、ボイドの発生具合は、巻痕の発生具合に応じて増加することが確認された。
Figure JPOXMLDOC01-appb-T000002
 The evaluation results are shown in Table 2. In Examples 1 and 2 in which the outer periphery of the die bonding film and the adhesive layer overlap, no winding marks were confirmed regardless of the winding tension. On the other hand, in Comparative Examples 1 to 3 in which the outer periphery of the die bonding film did not overlap with the adhesive layer, a winding trace was confirmed, and it was confirmed that the winding trace was more prominent when the winding tension was high. Moreover, the presence or absence of generation | occurrence | production of the void when the adhesive sheet which concerns on an Example and a comparative example was affixed on the semiconductor wafer was evaluated visually. As a result, it was confirmed that the degree of occurrence of voids increased according to the degree of occurrence of winding marks.
Figure JPOXMLDOC01-appb-T000002
　１，２…半導体装置製造用接着シート、１０…基材フィルム、２０…接着層（第１の接着層）、２５…開口から露出する部分、３０…接着層（第２の接着層）、３０ａ…開口、４０，４５…ダイボンディングフィルム、５０…リングフレーム、６０…半導体ウェハ、１００…半導体装置。 DESCRIPTION OF SYMBOLS 1, ... Adhesive sheet for semiconductor device manufacture, 10 ... Base film, 20 ... Adhesive layer (first adhesive layer), 25 ... Portion exposed from opening, 30 ... Adhesive layer (second adhesive layer), 30a ... Opening, 40, 45 ... Die bonding film, 50 ... Ring frame, 60 ... Semiconductor wafer, 100 ... Semiconductor device.

Claims (5)

  1. 　基材と、前記基材上に配置された第１の接着層と、前記第１の接着層上に配置されると共に前記第１の接着層が露出する開口を有する第２の接着層と、前記第１の接着層における前記開口から露出する部分に配置されたダイボンディングフィルムと、を備え、
    　前記ダイボンディングフィルムの外周の少なくとも一部が、前記第２の接着層に接している、接着シート。     A base material, a first adhesive layer disposed on the base material, a second adhesive layer disposed on the first adhesive layer and having an opening through which the first adhesive layer is exposed; A die bonding film disposed in a portion exposed from the opening in the first adhesive layer,
    An adhesive sheet, wherein at least a part of the outer periphery of the die bonding film is in contact with the second adhesive layer.
  2. 　前記ダイボンディングフィルムの外周の少なくとも一部が、前記第２の接着層に重なっている、請求項１に記載の接着シート。 The adhesive sheet according to claim 1, wherein at least a part of the outer periphery of the die bonding film overlaps the second adhesive layer.
  3. 　前記第２の接着層の内周の少なくとも一部が、前記ダイボンディングフィルムに重なっている、請求項１に記載の接着シート。 The adhesive sheet according to claim 1, wherein at least a part of an inner periphery of the second adhesive layer overlaps the die bonding film.
  4. 　前記ダイボンディングフィルムと前記第２の接着層との重なり部分の幅が０．１～２５ｍｍである、請求項２又は３に記載の接着シート。 The adhesive sheet according to claim 2 or 3, wherein a width of an overlapping portion between the die bonding film and the second adhesive layer is 0.1 to 25 mm.
  5. 　ダイシング加工及びダイボンディング加工に用いられる、請求項１～４のいずれか一項に記載の接着シート。 The adhesive sheet according to any one of claims 1 to 4, which is used for dicing and die bonding.
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JP2013214720A (en) * 2012-03-07 2013-10-17 Furukawa Electric Co Ltd:The Adhesive tape
US20140356567A1 (en) * 2013-06-03 2014-12-04 Samsung Display Co., Ltd. Substrate laminating lower film and substrate laminated structure and method of manufacturing organic light emitting display apparatus using the same
WO2015105002A1 (en) * 2014-01-08 2015-07-16 リンテック株式会社 Composite sheet for protective-film formation
JP2022109259A (en) * 2016-09-23 2022-07-27 株式会社ダイセル Optical isomer separation agent, and manufacturing method for optical isomer separation agent

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CN103305142A (en) * 2012-03-07 2013-09-18 古河电气工业株式会社 Adhesive tape
JP2013214720A (en) * 2012-03-07 2013-10-17 Furukawa Electric Co Ltd:The Adhesive tape
US20140356567A1 (en) * 2013-06-03 2014-12-04 Samsung Display Co., Ltd. Substrate laminating lower film and substrate laminated structure and method of manufacturing organic light emitting display apparatus using the same
US9437820B2 (en) * 2013-06-03 2016-09-06 Samsung Display Co., Ltd. Substrate laminating lower film and substrate laminated structure and method of manufacturing organic light emitting display apparatus using the same
WO2015105002A1 (en) * 2014-01-08 2015-07-16 リンテック株式会社 Composite sheet for protective-film formation
JP2022109259A (en) * 2016-09-23 2022-07-27 株式会社ダイセル Optical isomer separation agent, and manufacturing method for optical isomer separation agent
JP7359897B2 (en) 2016-09-23 2023-10-11 株式会社ダイセル Separating agent for optical isomers and method for producing the separating agent for optical isomers

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