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WO2011116956A1 - Milieux séparateurs fluides et leur utilisation - Google Patents

Milieux séparateurs fluides et leur utilisation Download PDF

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Publication number
WO2011116956A1
WO2011116956A1 PCT/EP2011/001453 EP2011001453W WO2011116956A1 WO 2011116956 A1 WO2011116956 A1 WO 2011116956A1 EP 2011001453 W EP2011001453 W EP 2011001453W WO 2011116956 A1 WO2011116956 A1 WO 2011116956A1
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WO
WIPO (PCT)
Prior art keywords
fluid
glycol
sawing
fluid according
water
Prior art date
Application number
PCT/EP2011/001453
Other languages
German (de)
English (en)
Inventor
Beate Bussemer
Christine Fugger
Thomas Schmiady
Original Assignee
Schott Solar Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott Solar Ag filed Critical Schott Solar Ag
Publication of WO2011116956A1 publication Critical patent/WO2011116956A1/fr

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    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M169/00—Lubricating compositions characterised by containing as components a mixture of at least two types of ingredient selected from base-materials, thickeners or additives, covered by the preceding groups, each of these compounds being essential
    • C10M169/04—Mixtures of base-materials and additives
    • C10M169/041—Mixtures of base-materials and additives the additives being macromolecular compounds only
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M169/00—Lubricating compositions characterised by containing as components a mixture of at least two types of ingredient selected from base-materials, thickeners or additives, covered by the preceding groups, each of these compounds being essential
    • C10M169/04—Mixtures of base-materials and additives
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/02—Water
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/06—Metal compounds
    • C10M2201/061—Carbides; Hydrides; Nitrides
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/06—Metal compounds
    • C10M2201/061—Carbides; Hydrides; Nitrides
    • C10M2201/0613—Carbides; Hydrides; Nitrides used as base material
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/10—Compounds containing silicon
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/10—Compounds containing silicon
    • C10M2201/1006—Compounds containing silicon used as base material
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
    • C10M2207/04—Ethers; Acetals; Ortho-esters; Ortho-carbonates
    • C10M2207/0406—Ethers; Acetals; Ortho-esters; Ortho-carbonates used as base material
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
    • C10M2207/04—Ethers; Acetals; Ortho-esters; Ortho-carbonates
    • C10M2207/046—Hydroxy ethers
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
    • C10M2207/10—Carboxylix acids; Neutral salts thereof
    • C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
    • C10M2207/121—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of seven or less carbon atoms
    • C10M2207/123—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of seven or less carbon atoms polycarboxylic
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
    • C10M2207/10—Carboxylix acids; Neutral salts thereof
    • C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
    • C10M2207/121—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of seven or less carbon atoms
    • C10M2207/124—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of seven or less carbon atoms containing hydroxy groups; Ethers thereof
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C10M2209/104—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C10M2209/104—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only
    • C10M2209/1045—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only used as base material
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C10M2209/105—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing three carbon atoms only
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C10M2209/105—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing three carbon atoms only
    • C10M2209/1055—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing three carbon atoms only used as base material
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C10M2209/106—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing four carbon atoms only
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C10M2209/106—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing four carbon atoms only
    • C10M2209/1065—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing four carbon atoms only used as base material
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
    • C10N2030/06—Oiliness; Film-strength; Anti-wear; Resistance to extreme pressure
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
    • C10N2030/40—Low content or no content compositions
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2040/00—Specified use or application for which the lubricating composition is intended
    • C10N2040/32—Wires, ropes or cables lubricants

Definitions

  • the invention relates to improved fluid separation media, such as sawing fluids or slurries, in particular for sawing brittle-hard material blocks, and their use, in particular for the production of wafers, and
  • Wafer, z. As those of silicon, serve as
  • Support plate for electronic components in particular for semiconductor components and photovoltaic elements. They form the basis for the production of
  • Solar cells which are further processed into ready-to-use solar modules.
  • the wafers are obtained even by sawing multicrystalline block-shaped blocks, columns or bricks or monocrystalline, round or squared ingots, wherein the sawing usually takes place by means of wire saws, in which a plurality of parallel, closely
  • adjacent wires are moved at a sufficiently high speed along their longitudinal direction over the material to be sawn.
  • Wire saw is described for example in US-A 2006/0249134.
  • Cooling the saw surface and the wire is used and therefore also referred to as Coolant.
  • the fluid may optionally contain Abrasions- or abrasive particles and is therefore referred to as slurry.
  • the fluid When using saw wires with bonded grain, the fluid usually contains none of these Abrasions- or
  • Abrasion particles e.g. be made of diamond
  • Used separation media whose liquid phase are also referred to only as fluid, coolant, sawing fluid or carrier fluid and z. B. from oil or
  • glycols exist, which may additionally rheologically active agents may be added.
  • Carrier fluids usually differ, inter alia, by their viscosity. Frequently used carrier fluids are oil, and in particular glycols, such as PEG300, PEG400 or PEG200.
  • carrier liquids also serve as a coolant and have mainly the task of the abrasion or the removal of material particles on the
  • Cutting gaps abraded or istspanten Material particles can only absorb in a limited amount, the used slurries or coolants must be replaced from time to time.
  • saw wires especially with increased loading of the slurry or the coolants with abrad faced or istspanten particles, the saw wires are deflected laterally, whereby wafers are obtained with non-constant thickness, which have no perfectly flat side surfaces but the sawing depths, also called saw marks , exhibit.
  • EP 1752521 AI describes an aqueous
  • Carrier fluid for abrasive particles contains glycols and glycol ethers in a ratio of 1: 1 to 99: 1 and 2-50% by weight of water. However, it has been shown that one of a
  • JP 2002-080883 A is a water-soluble organic compound
  • Carrier fluid for a wire saw which comprises 90-99,499% by weight of a water-soluble glycol
  • Glycol esters and up to 5 wt .-% of an organic acid and up to 5 wt .-% of an organic smectite.
  • Such a fluid which is mixed with water to the finished shegeslurry, should a
  • the invention therefore has for its object to provide a carrier fluid or sawing fluid, which avoids the aforementioned disadvantages and which, when used as a cooling component or wafer component in wafer sawing in addition to an increased wafer yield, has a prolonged service life and which energy needed in the production of wafers,
  • the invention also aims to provide a sawing fluid or a sawing slurry, which can be recycled many times and with which also after
  • the fluid is substantially free of water or has the lowest possible water content.
  • the sawing fluid therefore has a maximum of 5% by volume of water, which corresponds to about 4.24% by weight (about 1.13 g / cm 3 ), but typically contains less than 2% by weight of water. Usually, no water is added, ie the water content is produced only by
  • the load of the sawing fluid with kerf can be significantly higher, which drastically increases the service life of the coolant or the slurry.
  • the fluid is substantially free of water or
  • the sawing fluid contains less than 1.8% by weight or by weight of water, with water contents of less than 1.3 or less than 1% by weight being particularly preferred. Typical levels of water are less than 0.8 and 0.5 wt .-%, with very particular maximum water contents 0.3 or 0.2 wt .-% are preferred.
  • the mixed sawing fluid from the components is down to a delivery specification-related water content of the components except for a minimum fraction of
  • the sawing fluid or separating fluid according to the invention usually contains at least one base glycol.
  • Typical basic glycols have the formula
  • n is an integer.
  • Usual maximum values for n are 14 or in particular 10, where
  • n 2 or 4.
  • glycols which consist of ethylene, Propylene and butylene units are constructed.
  • the units may be constructed both linearly and from branched or isomeric units. They can also be composed of mixed units.
  • Typical basic glycols are PEG200, as well as PEG300 and PEG400. However, preferred are ethylene glycols and propylene glycols and mixtures thereof. Especially
  • ethylene glycol, diethylene glycol and triethylene glycol or dipropylene glycol are preferred.
  • the etherified glycol added according to the invention is in particular a polyethylene glycol which has been etherified with an alkyl radical. It preferably has the formula
  • b is an integer of at least 1 or 2, in particular 1-8 and a is 1, 2, 3 or 4.
  • R is a linear or branched alkyl radical having 1-10 or 1-8 C atoms.
  • a 2.
  • R is an alkyl radical having 1-10 C atoms
  • etherified alkyl radicals having a maximum proportion of C atoms of 6, in particular of 4.
  • Cutting grains as well as other additives) at least 1% by weight, with a minimum amount of 3, in particular 5% by weight are preferred. Particularly preferred
  • a usual maximum proportion of the etherified with an alkyl glycol content of the total fluid is at most 50% by weight, with a maximum of 40% by weight is preferred. Particularly preferred
  • z. B the slurry up to 5 vol .-% water, but preferably the liquid phase of the slurry, the sawing fluid only less than 2 wt .-% water.
  • the water has a slightly acidic pH of 3-6, wherein a pH of 3 to 5, in particular a pH of
  • the content of acid in this water is between 0.1 and 3 mol / l, with a value between 0.5 and 2 mol / l
  • a typical concentration is 1 +/- 0.5 mol / 1. According to the invention, all acids can be used here, as long as they do not contain saw wire or the material to be cut in use attack. However, it has been shown here that
  • Citric acid is particularly suitable.
  • Typical materials to be diced are all brittle-hard, especially crystalline materials, with mono- or polycrystalline silicon being particularly preferred.
  • the sawing fluid according to the invention is particularly suitable for use with wire saws, especially so-called.
  • the sawing fluid is suitable for both loose and bonded grain sawing.
  • a slurry which consists of a suspension of abrasive grains, usually SiC, diamond or corundum, and the sawing fluid, on a formed on one of many wires
  • the slurry is entrained by each of the rapidly moving wires and penetrates into the cutting gap along with the wire. In the narrow
  • Cutting gap the Abrasionskörner unfold their abrading effect by temporarily touching both the wire and the brittle-hard material so or jamming in this space that material from the contact point or contact surface chipped or removed.
  • the wires intersect so deeper into the brittle-hard material, forming cutting gap and ultimately lead to a
  • Material e.g. a block, a column, one
  • the sawing fluid according to the invention is used in this method for cooling and recording on selectspanntem brittle material. Also here
  • Cutting the material to be sawn e.g. a block, a column, a brick or a
  • the invention also relates to the use of such a fluid in the manufacture of
  • Silicon carbide mixed into a slurry. With this slurry, a 6-inch-long silicon ingot was sawn to a thickness of 200 ⁇ m. The wire speed was 14 m / s and the feed rate 400 pm / min. A wire of 130 ⁇ m in diameter was used, the pitch (the distance between 2 wires) being 360 ⁇ m.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Organic Chemistry (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

L'invention porte sur un fluide destiné à débiter à la scie des blocs de matériaux durs et fragiles, en particulier avec des scies multi-fils. Le fluide contient au moins un glycol de base de formule générale HO‑[(CH2‑)x-O]n-H, dans laquelle n est un entier de 1 à 14 et x vaut 1, 2, 3 ou 4, ainsi qu'éventuellement d'autres additifs. Le fluide est caractérisé par une teneur supplémentaire en au moins un glycol éthérifié par un radical alkyle de formule générale HO-[(CH2-)a-O]b-R, où a vaut 1, 2, 3 ou 4 et b est un nombre entier de 1 à 10, et R est un radical alkyle à chaîne droite ou ramifiée ayant 1 à 8 atomes de carbone, et pour l'essentiel est anhydre. Un tel fluide de sciage est particulièrement adapté à la fabrication de tranches, de composants électroniques et de cellules photovoltaïques.
PCT/EP2011/001453 2010-03-23 2011-03-23 Milieux séparateurs fluides et leur utilisation WO2011116956A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010015111.4 2010-03-23
DE102010015111A DE102010015111A1 (de) 2010-03-23 2010-03-23 Fluide Trennmedien und deren Verwendung

Publications (1)

Publication Number Publication Date
WO2011116956A1 true WO2011116956A1 (fr) 2011-09-29

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106929124A (zh) * 2017-03-23 2017-07-07 江苏美科硅能源有限公司 一种粘度调节剂、其制备方法及其应用

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002080883A (ja) 2000-06-20 2002-03-22 Neos Co Ltd ワイヤソ−用水溶性加工液
WO2003042340A1 (fr) * 2001-11-14 2003-05-22 Ppt Research, Inc. Elements coupants et lubrifiants pour cable de sciage
US20060249134A1 (en) 2003-10-27 2006-11-09 Takafumi Kawasaki Multi-wire saw
EP1752521A1 (fr) 2005-07-25 2007-02-14 Yushiro Chemical Industry Co., Ltd. Liquide porteur aqueuse d' une dispersion des particules abrasives
US20090270293A1 (en) * 2008-04-28 2009-10-29 Ward Irl E Cutting and lubricating composition for use with a wire cutting apparatus

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002080883A (ja) 2000-06-20 2002-03-22 Neos Co Ltd ワイヤソ−用水溶性加工液
WO2003042340A1 (fr) * 2001-11-14 2003-05-22 Ppt Research, Inc. Elements coupants et lubrifiants pour cable de sciage
US20060249134A1 (en) 2003-10-27 2006-11-09 Takafumi Kawasaki Multi-wire saw
EP1752521A1 (fr) 2005-07-25 2007-02-14 Yushiro Chemical Industry Co., Ltd. Liquide porteur aqueuse d' une dispersion des particules abrasives
US20070169422A1 (en) * 2005-07-25 2007-07-26 Shingo Kikuchi Aqueous abrasives dispersion medium composition
US20090270293A1 (en) * 2008-04-28 2009-10-29 Ward Irl E Cutting and lubricating composition for use with a wire cutting apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106929124A (zh) * 2017-03-23 2017-07-07 江苏美科硅能源有限公司 一种粘度调节剂、其制备方法及其应用

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