WO2010119868A1 - Photosensitive polyester composition for use in forming thermally cured film - Google Patents
Photosensitive polyester composition for use in forming thermally cured film Download PDFInfo
- Publication number
- WO2010119868A1 WO2010119868A1 PCT/JP2010/056601 JP2010056601W WO2010119868A1 WO 2010119868 A1 WO2010119868 A1 WO 2010119868A1 JP 2010056601 W JP2010056601 W JP 2010056601W WO 2010119868 A1 WO2010119868 A1 WO 2010119868A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- component
- group
- compound
- polyester composition
- formula
- Prior art date
Links
- 229920000728 polyester Polymers 0.000 title claims abstract description 105
- 239000000203 mixture Substances 0.000 title claims abstract description 77
- -1 carboxylic acid compound Chemical class 0.000 claims abstract description 60
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 43
- 150000001875 compounds Chemical class 0.000 claims abstract description 35
- 125000003277 amino group Chemical group 0.000 claims abstract description 25
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 claims abstract description 23
- 125000000962 organic group Chemical group 0.000 claims abstract description 15
- 125000003700 epoxy group Chemical group 0.000 claims abstract description 14
- 239000004593 Epoxy Substances 0.000 claims abstract description 10
- 125000000524 functional group Chemical group 0.000 claims abstract description 10
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 claims abstract description 10
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229920001187 thermosetting polymer Polymers 0.000 claims description 64
- 230000015572 biosynthetic process Effects 0.000 claims description 50
- 229920003192 poly(bis maleimide) Polymers 0.000 claims description 23
- 125000001931 aliphatic group Chemical group 0.000 claims description 17
- 125000002723 alicyclic group Chemical group 0.000 claims description 11
- 125000006158 tetracarboxylic acid group Chemical group 0.000 claims description 11
- 150000002009 diols Chemical class 0.000 claims description 9
- 239000004793 Polystyrene Substances 0.000 claims description 5
- 229920002223 polystyrene Polymers 0.000 claims description 5
- 239000002904 solvent Substances 0.000 abstract description 61
- 239000000463 material Substances 0.000 abstract description 24
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 abstract description 15
- 238000004519 manufacturing process Methods 0.000 abstract description 14
- 125000004122 cyclic group Chemical group 0.000 abstract description 8
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 abstract description 6
- 230000007261 regionalization Effects 0.000 abstract description 5
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 164
- 229910052757 nitrogen Inorganic materials 0.000 description 46
- 125000004432 carbon atom Chemical group C* 0.000 description 39
- 229920000642 polymer Polymers 0.000 description 39
- 239000000758 substrate Substances 0.000 description 32
- 150000002430 hydrocarbons Chemical group 0.000 description 29
- 229930195734 saturated hydrocarbon Natural products 0.000 description 27
- 239000000243 solution Substances 0.000 description 21
- 239000011248 coating agent Substances 0.000 description 20
- 238000000576 coating method Methods 0.000 description 20
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 18
- 239000010410 layer Substances 0.000 description 18
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 17
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 17
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 16
- 239000002253 acid Substances 0.000 description 15
- 230000000052 comparative effect Effects 0.000 description 14
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 14
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical class O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 13
- 238000006243 chemical reaction Methods 0.000 description 12
- 229920000647 polyepoxide Polymers 0.000 description 12
- 239000007787 solid Substances 0.000 description 11
- 238000003786 synthesis reaction Methods 0.000 description 11
- HTZCNXWZYVXIMZ-UHFFFAOYSA-M benzyl(triethyl)azanium;chloride Chemical compound [Cl-].CC[N+](CC)(CC)CC1=CC=CC=C1 HTZCNXWZYVXIMZ-UHFFFAOYSA-M 0.000 description 10
- 229920001721 polyimide Polymers 0.000 description 10
- 238000006116 polymerization reaction Methods 0.000 description 10
- 238000002834 transmittance Methods 0.000 description 10
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 9
- 229910052731 fluorine Inorganic materials 0.000 description 9
- 125000001153 fluoro group Chemical group F* 0.000 description 9
- 239000004642 Polyimide Substances 0.000 description 8
- 150000008065 acid anhydrides Chemical class 0.000 description 8
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 8
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 8
- 238000011156 evaluation Methods 0.000 description 8
- 230000001681 protective effect Effects 0.000 description 8
- 125000000542 sulfonic acid group Chemical group 0.000 description 8
- KMOUUZVZFBCRAM-UHFFFAOYSA-N 1,2,3,6-tetrahydrophthalic anhydride Chemical compound C1C=CCC2C(=O)OC(=O)C21 KMOUUZVZFBCRAM-UHFFFAOYSA-N 0.000 description 7
- 239000003822 epoxy resin Substances 0.000 description 7
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- UFDHBDMSHIXOKF-UHFFFAOYSA-N tetrahydrophthalic acid Natural products OC(=O)C1=C(C(O)=O)CCCC1 UFDHBDMSHIXOKF-UHFFFAOYSA-N 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 6
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 6
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
- 239000004925 Acrylic resin Substances 0.000 description 5
- 229920000178 Acrylic resin Polymers 0.000 description 5
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 5
- RLSSMJSEOOYNOY-UHFFFAOYSA-N m-cresol Chemical compound CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 description 5
- 239000000178 monomer Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 4
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 4
- MRABAEUHTLLEML-UHFFFAOYSA-N Butyl lactate Chemical compound CCCCOC(=O)C(C)O MRABAEUHTLLEML-UHFFFAOYSA-N 0.000 description 4
- 239000004215 Carbon black (E152) Substances 0.000 description 4
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 4
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 4
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 4
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 4
- 229920006243 acrylic copolymer Polymers 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- 125000002947 alkylene group Chemical group 0.000 description 4
- 239000001191 butyl (2R)-2-hydroxypropanoate Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 230000018109 developmental process Effects 0.000 description 4
- KZTYYGOKRVBIMI-UHFFFAOYSA-N diphenyl sulfone Chemical compound C=1C=CC=CC=1S(=O)(=O)C1=CC=CC=C1 KZTYYGOKRVBIMI-UHFFFAOYSA-N 0.000 description 4
- 229940116333 ethyl lactate Drugs 0.000 description 4
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 4
- 229930195733 hydrocarbon Natural products 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 239000002243 precursor Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 125000001424 substituent group Chemical group 0.000 description 4
- HHVIBTZHLRERCL-UHFFFAOYSA-N sulfonyldimethane Chemical compound CS(C)(=O)=O HHVIBTZHLRERCL-UHFFFAOYSA-N 0.000 description 4
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 3
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 3
- CDBAMNGURPMUTG-UHFFFAOYSA-N 4-[2-(4-hydroxycyclohexyl)propan-2-yl]cyclohexan-1-ol Chemical compound C1CC(O)CCC1C(C)(C)C1CCC(O)CC1 CDBAMNGURPMUTG-UHFFFAOYSA-N 0.000 description 3
- MQJKPEGWNLWLTK-UHFFFAOYSA-N Dapsone Chemical compound C1=CC(N)=CC=C1S(=O)(=O)C1=CC=C(N)C=C1 MQJKPEGWNLWLTK-UHFFFAOYSA-N 0.000 description 3
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 3
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 150000001412 amines Chemical class 0.000 description 3
- WKDNYTOXBCRNPV-UHFFFAOYSA-N bpda Chemical compound C1=C2C(=O)OC(=O)C2=CC(C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 WKDNYTOXBCRNPV-UHFFFAOYSA-N 0.000 description 3
- BTANRVKWQNVYAZ-UHFFFAOYSA-N butan-2-ol Chemical compound CCC(C)O BTANRVKWQNVYAZ-UHFFFAOYSA-N 0.000 description 3
- HPXRVTGHNJAIIH-UHFFFAOYSA-N cyclohexanol Chemical compound OC1CCCCC1 HPXRVTGHNJAIIH-UHFFFAOYSA-N 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 238000010828 elution Methods 0.000 description 3
- 239000003759 ester based solvent Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 3
- 239000012948 isocyanate Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 229920003986 novolac Polymers 0.000 description 3
- 238000000016 photochemical curing Methods 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- 229920005575 poly(amic acid) Polymers 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- WOLVEMPZUIFSII-IHHOKICGSA-N (2e,4e)-n-[(2s,5s)-5-(hydroxymethyl)-1-methyl-3-oxo-2-propan-2-yl-2,4,5,6-tetrahydro-1,4-benzodiazocin-8-yl]-5-[4-(trifluoromethyl)phenyl]penta-2,4-dienamide Chemical compound CN([C@H](C(N[C@H](CO)CC1=C2)=O)C(C)C)C1=CC=C2NC(=O)\C=C\C=C\C1=CC=C(C(F)(F)F)C=C1 WOLVEMPZUIFSII-IHHOKICGSA-N 0.000 description 2
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 2
- AVQQQNCBBIEMEU-UHFFFAOYSA-N 1,1,3,3-tetramethylurea Chemical compound CN(C)C(=O)N(C)C AVQQQNCBBIEMEU-UHFFFAOYSA-N 0.000 description 2
- GEYOCULIXLDCMW-UHFFFAOYSA-N 1,2-phenylenediamine Chemical compound NC1=CC=CC=C1N GEYOCULIXLDCMW-UHFFFAOYSA-N 0.000 description 2
- WZCQRUWWHSTZEM-UHFFFAOYSA-N 1,3-phenylenediamine Chemical compound NC1=CC=CC(N)=C1 WZCQRUWWHSTZEM-UHFFFAOYSA-N 0.000 description 2
- CBCKQZAAMUWICA-UHFFFAOYSA-N 1,4-phenylenediamine Chemical compound NC1=CC=C(N)C=C1 CBCKQZAAMUWICA-UHFFFAOYSA-N 0.000 description 2
- AQOSPGCCTHGZFL-UHFFFAOYSA-N 1-(3a-hydroxy-7-methoxy-1,2,4,8b-tetrahydropyrrolo[2,3-b]indol-3-yl)ethanone Chemical compound COC1=CC=C2NC3(O)N(C(C)=O)CCC3C2=C1 AQOSPGCCTHGZFL-UHFFFAOYSA-N 0.000 description 2
- XAZPKEBWNIUCKF-UHFFFAOYSA-N 1-[4-[4-[2-[4-[4-(2,5-dioxopyrrol-1-yl)phenoxy]phenyl]propan-2-yl]phenoxy]phenyl]pyrrole-2,5-dione Chemical compound C=1C=C(OC=2C=CC(=CC=2)N2C(C=CC2=O)=O)C=CC=1C(C)(C)C(C=C1)=CC=C1OC(C=C1)=CC=C1N1C(=O)C=CC1=O XAZPKEBWNIUCKF-UHFFFAOYSA-N 0.000 description 2
- FENFUOGYJVOCRY-UHFFFAOYSA-N 1-propoxypropan-2-ol Chemical compound CCCOCC(C)O FENFUOGYJVOCRY-UHFFFAOYSA-N 0.000 description 2
- DMFAHCVITRDZQB-UHFFFAOYSA-N 1-propoxypropan-2-yl acetate Chemical compound CCCOCC(C)OC(C)=O DMFAHCVITRDZQB-UHFFFAOYSA-N 0.000 description 2
- LKMJVFRMDSNFRT-UHFFFAOYSA-N 2-(methoxymethyl)oxirane Chemical compound COCC1CO1 LKMJVFRMDSNFRT-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- CDAWCLOXVUBKRW-UHFFFAOYSA-N 2-aminophenol Chemical compound NC1=CC=CC=C1O CDAWCLOXVUBKRW-UHFFFAOYSA-N 0.000 description 2
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 2
- CWLKGDAVCFYWJK-UHFFFAOYSA-N 3-aminophenol Chemical compound NC1=CC=CC(O)=C1 CWLKGDAVCFYWJK-UHFFFAOYSA-N 0.000 description 2
- JJYPMNFTHPTTDI-UHFFFAOYSA-N 3-methylaniline Chemical compound CC1=CC=CC(N)=C1 JJYPMNFTHPTTDI-UHFFFAOYSA-N 0.000 description 2
- OFNISBHGPNMTMS-UHFFFAOYSA-N 3-methylideneoxolane-2,5-dione Chemical compound C=C1CC(=O)OC1=O OFNISBHGPNMTMS-UHFFFAOYSA-N 0.000 description 2
- YSWBFLWKAIRHEI-UHFFFAOYSA-N 4,5-dimethyl-1h-imidazole Chemical compound CC=1N=CNC=1C YSWBFLWKAIRHEI-UHFFFAOYSA-N 0.000 description 2
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 description 2
- BOVVHULZWVFIOX-UHFFFAOYSA-N 4-[3-(4-aminophenyl)phenyl]aniline Chemical compound C1=CC(N)=CC=C1C1=CC=CC(C=2C=CC(N)=CC=2)=C1 BOVVHULZWVFIOX-UHFFFAOYSA-N 0.000 description 2
- PLIKAWJENQZMHA-UHFFFAOYSA-N 4-aminophenol Chemical compound NC1=CC=C(O)C=C1 PLIKAWJENQZMHA-UHFFFAOYSA-N 0.000 description 2
- 125000004203 4-hydroxyphenyl group Chemical group [H]OC1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- OZAIFHULBGXAKX-VAWYXSNFSA-N AIBN Substances N#CC(C)(C)\N=N\C(C)(C)C#N OZAIFHULBGXAKX-VAWYXSNFSA-N 0.000 description 2
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 2
- 101100046776 Arabidopsis thaliana TPPB gene Proteins 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- WVOLTBSCXRRQFR-SJORKVTESA-N Cannabidiolic acid Natural products OC1=C(C(O)=O)C(CCCCC)=CC(O)=C1[C@@H]1[C@@H](C(C)=C)CCC(C)=C1 WVOLTBSCXRRQFR-SJORKVTESA-N 0.000 description 2
- 102100026735 Coagulation factor VIII Human genes 0.000 description 2
- 101000985278 Escherichia coli 5-carboxymethyl-2-hydroxymuconate Delta-isomerase Proteins 0.000 description 2
- 101000911390 Homo sapiens Coagulation factor VIII Proteins 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- 102100040448 Leukocyte cell-derived chemotaxin 1 Human genes 0.000 description 2
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 2
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 2
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 2
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 2
- ZWXPDGCFMMFNRW-UHFFFAOYSA-N N-methylcaprolactam Chemical compound CN1CCCCCC1=O ZWXPDGCFMMFNRW-UHFFFAOYSA-N 0.000 description 2
- GRSMWKLPSNHDHA-UHFFFAOYSA-N Naphthalic anhydride Chemical compound C1=CC(C(=O)OC2=O)=C3C2=CC=CC3=C1 GRSMWKLPSNHDHA-UHFFFAOYSA-N 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- ORILYTVJVMAKLC-UHFFFAOYSA-N adamantane Chemical group C1C(C2)CC3CC1CC2C3 ORILYTVJVMAKLC-UHFFFAOYSA-N 0.000 description 2
- 238000012644 addition polymerization Methods 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- XIWMTQIUUWJNRP-UHFFFAOYSA-N amidol Chemical compound NC1=CC=C(O)C(N)=C1 XIWMTQIUUWJNRP-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- HFACYLZERDEVSX-UHFFFAOYSA-N benzidine Chemical group C1=CC(N)=CC=C1C1=CC=C(N)C=C1 HFACYLZERDEVSX-UHFFFAOYSA-N 0.000 description 2
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 2
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 2
- WVOLTBSCXRRQFR-DLBZAZTESA-N cannabidiolic acid Chemical compound OC1=C(C(O)=O)C(CCCCC)=CC(O)=C1[C@H]1[C@H](C(C)=C)CCC(C)=C1 WVOLTBSCXRRQFR-DLBZAZTESA-N 0.000 description 2
- 150000001244 carboxylic acid anhydrides Chemical class 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 239000007810 chemical reaction solvent Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000006482 condensation reaction Methods 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 125000000753 cycloalkyl group Chemical group 0.000 description 2
- PAFZNILMFXTMIY-UHFFFAOYSA-N cyclohexylamine Chemical compound NC1CCCCC1 PAFZNILMFXTMIY-UHFFFAOYSA-N 0.000 description 2
- 125000006159 dianhydride group Chemical group 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- WHRLOJCOIKOQGL-UHFFFAOYSA-N ethyl 2-methoxypropanoate Chemical compound CCOC(=O)C(C)OC WHRLOJCOIKOQGL-UHFFFAOYSA-N 0.000 description 2
- VFPFQHQNJCMNBZ-UHFFFAOYSA-N ethyl gallate Chemical compound CCOC(=O)C1=CC(O)=C(O)C(O)=C1 VFPFQHQNJCMNBZ-UHFFFAOYSA-N 0.000 description 2
- 238000001879 gelation Methods 0.000 description 2
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 2
- 238000004128 high performance liquid chromatography Methods 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 150000002513 isocyanates Chemical class 0.000 description 2
- 150000003903 lactic acid esters Chemical class 0.000 description 2
- 229940018564 m-phenylenediamine Drugs 0.000 description 2
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 2
- FBSFWRHWHYMIOG-UHFFFAOYSA-N methyl 3,4,5-trihydroxybenzoate Chemical compound COC(=O)C1=CC(O)=C(O)C(O)=C1 FBSFWRHWHYMIOG-UHFFFAOYSA-N 0.000 description 2
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 description 2
- 125000003518 norbornenyl group Chemical group C12(C=CC(CC1)C2)* 0.000 description 2
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 2
- RNVCVTLRINQCPJ-UHFFFAOYSA-N o-toluidine Chemical compound CC1=CC=CC=C1N RNVCVTLRINQCPJ-UHFFFAOYSA-N 0.000 description 2
- IWDCLRJOBJJRNH-UHFFFAOYSA-N p-cresol Chemical compound CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 2
- RZXMPPFPUUCRFN-UHFFFAOYSA-N p-toluidine Chemical compound CC1=CC=C(N)C=C1 RZXMPPFPUUCRFN-UHFFFAOYSA-N 0.000 description 2
- 150000002989 phenols Chemical class 0.000 description 2
- 230000036211 photosensitivity Effects 0.000 description 2
- 125000003367 polycyclic group Chemical group 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- BRKFQVAOMSWFDU-UHFFFAOYSA-M tetraphenylphosphanium;bromide Chemical compound [Br-].C1=CC=CC=C1[P+](C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 BRKFQVAOMSWFDU-UHFFFAOYSA-M 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910021642 ultra pure water Inorganic materials 0.000 description 2
- 239000012498 ultrapure water Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- YKNMIGJJXKBHJE-UHFFFAOYSA-N (3-aminophenyl)-(4-aminophenyl)methanone Chemical compound C1=CC(N)=CC=C1C(=O)C1=CC=CC(N)=C1 YKNMIGJJXKBHJE-UHFFFAOYSA-N 0.000 description 1
- ZRDYULMDEGRWRC-UHFFFAOYSA-N (4-hydroxyphenyl)-(2,3,4-trihydroxyphenyl)methanone Chemical compound C1=CC(O)=CC=C1C(=O)C1=CC=C(O)C(O)=C1O ZRDYULMDEGRWRC-UHFFFAOYSA-N 0.000 description 1
- NSGXIBWMJZWTPY-UHFFFAOYSA-N 1,1,1,3,3,3-hexafluoropropane Chemical compound FC(F)(F)CC(F)(F)F NSGXIBWMJZWTPY-UHFFFAOYSA-N 0.000 description 1
- VZXTWGWHSMCWGA-UHFFFAOYSA-N 1,3,5-triazine-2,4-diamine Chemical compound NC1=NC=NC(N)=N1 VZXTWGWHSMCWGA-UHFFFAOYSA-N 0.000 description 1
- OUPZKGBUJRBPGC-UHFFFAOYSA-N 1,3,5-tris(oxiran-2-ylmethyl)-1,3,5-triazinane-2,4,6-trione Chemical compound O=C1N(CC2OC2)C(=O)N(CC2OC2)C(=O)N1CC1CO1 OUPZKGBUJRBPGC-UHFFFAOYSA-N 0.000 description 1
- OEUTXEVXKFXZPB-UHFFFAOYSA-N 1-[12-(2,5-dioxopyrrol-1-yl)dodecyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1CCCCCCCCCCCCN1C(=O)C=CC1=O OEUTXEVXKFXZPB-UHFFFAOYSA-N 0.000 description 1
- PUKLCKVOVCZYKF-UHFFFAOYSA-N 1-[2-(2,5-dioxopyrrol-1-yl)ethyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1CCN1C(=O)C=CC1=O PUKLCKVOVCZYKF-UHFFFAOYSA-N 0.000 description 1
- FJKKJQRXSPFNPM-UHFFFAOYSA-N 1-[3-(2,5-dioxopyrrol-1-yl)-4-methylphenyl]pyrrole-2,5-dione Chemical compound CC1=CC=C(N2C(C=CC2=O)=O)C=C1N1C(=O)C=CC1=O FJKKJQRXSPFNPM-UHFFFAOYSA-N 0.000 description 1
- SIABDEKAVHRTFN-UHFFFAOYSA-N 1-[3-(2,5-dioxopyrrol-1-yl)-5-methoxyphenyl]pyrrole-2,5-dione Chemical compound C=1C(OC)=CC(N2C(C=CC2=O)=O)=CC=1N1C(=O)C=CC1=O SIABDEKAVHRTFN-UHFFFAOYSA-N 0.000 description 1
- IPJGAEWUPXWFPL-UHFFFAOYSA-N 1-[3-(2,5-dioxopyrrol-1-yl)phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1=CC=CC(N2C(C=CC2=O)=O)=C1 IPJGAEWUPXWFPL-UHFFFAOYSA-N 0.000 description 1
- XJBSYHZLEOIPEJ-UHFFFAOYSA-N 1-[4-[2,6-dibromo-4-[2-[3,5-dibromo-4-[4-(2,5-dioxopyrrol-1-yl)phenoxy]phenyl]-1,1,1,3,3,3-hexafluoropropan-2-yl]phenoxy]phenyl]pyrrole-2,5-dione Chemical compound C=1C(Br)=C(OC=2C=CC(=CC=2)N2C(C=CC2=O)=O)C(Br)=CC=1C(C(F)(F)F)(C(F)(F)F)C(C=C1Br)=CC(Br)=C1OC(C=C1)=CC=C1N1C(=O)C=CC1=O XJBSYHZLEOIPEJ-UHFFFAOYSA-N 0.000 description 1
- OGPFZTQPAAOEAG-UHFFFAOYSA-N 1-[4-[2-bromo-4-[1-[3-bromo-4-[4-(2,5-dioxopyrrol-1-yl)phenoxy]phenyl]ethyl]phenoxy]phenyl]pyrrole-2,5-dione Chemical compound C=1C=C(OC=2C=CC(=CC=2)N2C(C=CC2=O)=O)C(Br)=CC=1C(C)C(C=C1Br)=CC=C1OC(C=C1)=CC=C1N1C(=O)C=CC1=O OGPFZTQPAAOEAG-UHFFFAOYSA-N 0.000 description 1
- QMQYJRMHXYICMD-UHFFFAOYSA-N 1-[4-[2-bromo-4-[2-[3-bromo-4-[4-(2,5-dioxopyrrol-1-yl)phenoxy]phenyl]propan-2-yl]phenoxy]phenyl]pyrrole-2,5-dione Chemical compound C=1C=C(OC=2C=CC(=CC=2)N2C(C=CC2=O)=O)C(Br)=CC=1C(C)(C)C(C=C1Br)=CC=C1OC(C=C1)=CC=C1N1C(=O)C=CC1=O QMQYJRMHXYICMD-UHFFFAOYSA-N 0.000 description 1
- MSMRYSXMPLWMFH-UHFFFAOYSA-N 1-[4-[2-butyl-4-[2-[3-butyl-4-[4-(2,5-dioxopyrrol-1-yl)phenoxy]phenyl]propan-2-yl]phenoxy]phenyl]pyrrole-2,5-dione Chemical compound CCCCC1=CC(C(C)(C)C=2C=C(CCCC)C(OC=3C=CC(=CC=3)N3C(C=CC3=O)=O)=CC=2)=CC=C1OC(C=C1)=CC=C1N1C(=O)C=CC1=O MSMRYSXMPLWMFH-UHFFFAOYSA-N 0.000 description 1
- LRLKRMWSHCJOQL-UHFFFAOYSA-N 1-[4-[2-chloro-4-[1-[3-chloro-4-[4-(2,5-dioxopyrrol-1-yl)phenoxy]phenyl]ethyl]phenoxy]phenyl]pyrrole-2,5-dione Chemical compound C=1C=C(OC=2C=CC(=CC=2)N2C(C=CC2=O)=O)C(Cl)=CC=1C(C)C(C=C1Cl)=CC=C1OC(C=C1)=CC=C1N1C(=O)C=CC1=O LRLKRMWSHCJOQL-UHFFFAOYSA-N 0.000 description 1
- UTUDZIVGWZEXJH-UHFFFAOYSA-N 1-[4-[2-chloro-4-[2-[3-chloro-4-[4-(2,5-dioxopyrrol-1-yl)phenoxy]phenyl]propan-2-yl]phenoxy]phenyl]pyrrole-2,5-dione Chemical compound C=1C=C(OC=2C=CC(=CC=2)N2C(C=CC2=O)=O)C(Cl)=CC=1C(C)(C)C(C=C1Cl)=CC=C1OC(C=C1)=CC=C1N1C(=O)C=CC1=O UTUDZIVGWZEXJH-UHFFFAOYSA-N 0.000 description 1
- OJDDBNNNPILOKG-UHFFFAOYSA-N 1-[4-[4-[1-[4-[4-(2,5-dioxopyrrol-1-yl)phenoxy]-3-methylphenyl]ethyl]-2-methylphenoxy]phenyl]pyrrole-2,5-dione Chemical compound C=1C=C(OC=2C=CC(=CC=2)N2C(C=CC2=O)=O)C(C)=CC=1C(C)C(C=C1C)=CC=C1OC(C=C1)=CC=C1N1C(=O)C=CC1=O OJDDBNNNPILOKG-UHFFFAOYSA-N 0.000 description 1
- VZBQHKQTICAEPG-UHFFFAOYSA-N 1-[4-[4-[1-[4-[4-(2,5-dioxopyrrol-1-yl)phenoxy]phenyl]ethyl]phenoxy]phenyl]pyrrole-2,5-dione Chemical compound C=1C=C(OC=2C=CC(=CC=2)N2C(C=CC2=O)=O)C=CC=1C(C)C(C=C1)=CC=C1OC(C=C1)=CC=C1N1C(=O)C=CC1=O VZBQHKQTICAEPG-UHFFFAOYSA-N 0.000 description 1
- OAQGRJSNFQTHST-UHFFFAOYSA-N 1-[4-[4-[2-[4-[4-(2,5-dioxopyrrol-1-yl)phenoxy]-3,5-dimethylphenyl]-1,1,1,3,3,3-hexafluoropropan-2-yl]-2,6-dimethylphenoxy]phenyl]pyrrole-2,5-dione Chemical compound CC1=CC(C(C=2C=C(C)C(OC=3C=CC(=CC=3)N3C(C=CC3=O)=O)=C(C)C=2)(C(F)(F)F)C(F)(F)F)=CC(C)=C1OC(C=C1)=CC=C1N1C(=O)C=CC1=O OAQGRJSNFQTHST-UHFFFAOYSA-N 0.000 description 1
- XRHJTQFPYUPMRJ-UHFFFAOYSA-N 1-[4-[4-[2-[4-[4-(2,5-dioxopyrrol-1-yl)phenoxy]-3-ethylphenyl]propan-2-yl]-2-ethylphenoxy]phenyl]pyrrole-2,5-dione Chemical compound CCC1=CC(C(C)(C)C=2C=C(CC)C(OC=3C=CC(=CC=3)N3C(C=CC3=O)=O)=CC=2)=CC=C1OC(C=C1)=CC=C1N1C(=O)C=CC1=O XRHJTQFPYUPMRJ-UHFFFAOYSA-N 0.000 description 1
- YKSGJSKYCBPXDT-UHFFFAOYSA-N 1-[4-[4-[2-[4-[4-(2,5-dioxopyrrol-1-yl)phenoxy]-3-methoxyphenyl]propan-2-yl]-2-methoxyphenoxy]phenyl]pyrrole-2,5-dione Chemical compound COC1=CC(C(C)(C)C=2C=C(OC)C(OC=3C=CC(=CC=3)N3C(C=CC3=O)=O)=CC=2)=CC=C1OC(C=C1)=CC=C1N1C(=O)C=CC1=O YKSGJSKYCBPXDT-UHFFFAOYSA-N 0.000 description 1
- OVBYYBVBCLQSQZ-UHFFFAOYSA-N 1-[4-[4-[2-[4-[4-(2,5-dioxopyrrol-1-yl)phenoxy]-3-propan-2-ylphenyl]propan-2-yl]-2-propan-2-ylphenoxy]phenyl]pyrrole-2,5-dione Chemical compound CC(C)C1=CC(C(C)(C)C=2C=C(C(OC=3C=CC(=CC=3)N3C(C=CC3=O)=O)=CC=2)C(C)C)=CC=C1OC(C=C1)=CC=C1N1C(=O)C=CC1=O OVBYYBVBCLQSQZ-UHFFFAOYSA-N 0.000 description 1
- IAKITQMGMOKJGX-UHFFFAOYSA-N 1-[4-[4-[2-[4-[4-(2,5-dioxopyrrol-1-yl)phenoxy]-3-propylphenyl]propan-2-yl]-2-propylphenoxy]phenyl]pyrrole-2,5-dione Chemical compound CCCC1=CC(C(C)(C)C=2C=C(CCC)C(OC=3C=CC(=CC=3)N3C(C=CC3=O)=O)=CC=2)=CC=C1OC(C=C1)=CC=C1N1C(=O)C=CC1=O IAKITQMGMOKJGX-UHFFFAOYSA-N 0.000 description 1
- PYTZZNUKESXWLN-UHFFFAOYSA-N 1-[4-[4-[2-[4-[4-(2,5-dioxopyrrol-1-yl)phenoxy]phenyl]-1,1,1,3,3,3-hexafluoropropan-2-yl]phenoxy]phenyl]pyrrole-2,5-dione Chemical compound C=1C=C(OC=2C=CC(=CC=2)N2C(C=CC2=O)=O)C=CC=1C(C(F)(F)F)(C(F)(F)F)C(C=C1)=CC=C1OC(C=C1)=CC=C1N1C(=O)C=CC1=O PYTZZNUKESXWLN-UHFFFAOYSA-N 0.000 description 1
- PYVHLZLQVWXBDZ-UHFFFAOYSA-N 1-[6-(2,5-dioxopyrrol-1-yl)hexyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1CCCCCCN1C(=O)C=CC1=O PYVHLZLQVWXBDZ-UHFFFAOYSA-N 0.000 description 1
- RWNUSVWFHDHRCJ-UHFFFAOYSA-N 1-butoxypropan-2-ol Chemical compound CCCCOCC(C)O RWNUSVWFHDHRCJ-UHFFFAOYSA-N 0.000 description 1
- BQTPKSBXMONSJI-UHFFFAOYSA-N 1-cyclohexylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1CCCCC1 BQTPKSBXMONSJI-UHFFFAOYSA-N 0.000 description 1
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 1
- NNZVKALEGZPYKL-UHFFFAOYSA-N 1-isocyanato-2-methylpropane Chemical compound CC(C)CN=C=O NNZVKALEGZPYKL-UHFFFAOYSA-N 0.000 description 1
- NPOVTGVGOBJZPY-UHFFFAOYSA-N 1-isocyanato-3-methoxybenzene Chemical compound COC1=CC=CC(N=C=O)=C1 NPOVTGVGOBJZPY-UHFFFAOYSA-N 0.000 description 1
- CPPGZWWUPFWALU-UHFFFAOYSA-N 1-isocyanato-3-methylbenzene Chemical compound CC1=CC=CC(N=C=O)=C1 CPPGZWWUPFWALU-UHFFFAOYSA-N 0.000 description 1
- FMDGXCSMDZMDHZ-UHFFFAOYSA-N 1-isocyanato-4-methoxybenzene Chemical compound COC1=CC=C(N=C=O)C=C1 FMDGXCSMDZMDHZ-UHFFFAOYSA-N 0.000 description 1
- BDQNKCYCTYYMAA-UHFFFAOYSA-N 1-isocyanatonaphthalene Chemical compound C1=CC=C2C(N=C=O)=CC=CC2=C1 BDQNKCYCTYYMAA-UHFFFAOYSA-N 0.000 description 1
- VRVUKQWNRPNACD-UHFFFAOYSA-N 1-isocyanatopentane Chemical compound CCCCCN=C=O VRVUKQWNRPNACD-UHFFFAOYSA-N 0.000 description 1
- OQURWGJAWSLGQG-UHFFFAOYSA-N 1-isocyanatopropane Chemical compound CCCN=C=O OQURWGJAWSLGQG-UHFFFAOYSA-N 0.000 description 1
- HTQNYBBTZSBWKL-UHFFFAOYSA-N 2,3,4-trihydroxbenzophenone Chemical compound OC1=C(O)C(O)=CC=C1C(=O)C1=CC=CC=C1 HTQNYBBTZSBWKL-UHFFFAOYSA-N 0.000 description 1
- WCZNKVPCIFMXEQ-UHFFFAOYSA-N 2,3,5,6-tetramethylbenzene-1,4-diamine Chemical compound CC1=C(C)C(N)=C(C)C(C)=C1N WCZNKVPCIFMXEQ-UHFFFAOYSA-N 0.000 description 1
- PCAXITAPTVOLGL-UHFFFAOYSA-N 2,3-diaminophenol Chemical compound NC1=CC=CC(O)=C1N PCAXITAPTVOLGL-UHFFFAOYSA-N 0.000 description 1
- ZXDDPOHVAMWLBH-UHFFFAOYSA-N 2,4-Dihydroxybenzophenone Chemical compound OC1=CC(O)=CC=C1C(=O)C1=CC=CC=C1 ZXDDPOHVAMWLBH-UHFFFAOYSA-N 0.000 description 1
- IFFLKGMDBKQMAH-UHFFFAOYSA-N 2,4-diaminopyridine Chemical compound NC1=CC=NC(N)=C1 IFFLKGMDBKQMAH-UHFFFAOYSA-N 0.000 description 1
- VOZKAJLKRJDJLL-UHFFFAOYSA-N 2,4-diaminotoluene Chemical compound CC1=CC=C(N)C=C1N VOZKAJLKRJDJLL-UHFFFAOYSA-N 0.000 description 1
- XVBLEUZLLURXTF-UHFFFAOYSA-N 2,4-dimethylbenzene-1,3-diamine Chemical compound CC1=CC=C(N)C(C)=C1N XVBLEUZLLURXTF-UHFFFAOYSA-N 0.000 description 1
- UONVFNLDGRWLKF-UHFFFAOYSA-N 2,5-diaminobenzoic acid Chemical compound NC1=CC=C(N)C(C(O)=O)=C1 UONVFNLDGRWLKF-UHFFFAOYSA-N 0.000 description 1
- XQRUEDXXCQDNOT-UHFFFAOYSA-N 2,5-diaminophenol Chemical compound NC1=CC=C(N)C(O)=C1 XQRUEDXXCQDNOT-UHFFFAOYSA-N 0.000 description 1
- 229940075142 2,5-diaminotoluene Drugs 0.000 description 1
- BWAPJIHJXDYDPW-UHFFFAOYSA-N 2,5-dimethyl-p-phenylenediamine Chemical compound CC1=CC(N)=C(C)C=C1N BWAPJIHJXDYDPW-UHFFFAOYSA-N 0.000 description 1
- RLYCRLGLCUXUPO-UHFFFAOYSA-N 2,6-diaminotoluene Chemical compound CC1=C(N)C=CC=C1N RLYCRLGLCUXUPO-UHFFFAOYSA-N 0.000 description 1
- STMDPCBYJCIZOD-UHFFFAOYSA-N 2-(2,4-dinitroanilino)-4-methylpentanoic acid Chemical compound CC(C)CC(C(O)=O)NC1=CC=C([N+]([O-])=O)C=C1[N+]([O-])=O STMDPCBYJCIZOD-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- LWAMAEOQFTYZCQ-UHFFFAOYSA-N 2-(2-phenylphenyl)-3-[[3-(2-phenylphenyl)oxiran-2-yl]methoxymethyl]oxirane Chemical compound O1C(C=2C(=CC=CC=2)C=2C=CC=CC=2)C1COCC1OC1C1=CC=CC=C1C1=CC=CC=C1 LWAMAEOQFTYZCQ-UHFFFAOYSA-N 0.000 description 1
- YSUQLAYJZDEMOT-UHFFFAOYSA-N 2-(butoxymethyl)oxirane Chemical compound CCCCOCC1CO1 YSUQLAYJZDEMOT-UHFFFAOYSA-N 0.000 description 1
- NWLUZGJDEZBBRH-UHFFFAOYSA-N 2-(propan-2-yloxymethyl)oxirane Chemical compound CC(C)OCC1CO1 NWLUZGJDEZBBRH-UHFFFAOYSA-N 0.000 description 1
- CWNOEVURTVLUNV-UHFFFAOYSA-N 2-(propoxymethyl)oxirane Chemical compound CCCOCC1CO1 CWNOEVURTVLUNV-UHFFFAOYSA-N 0.000 description 1
- KFUSXMDYOPXKKT-UHFFFAOYSA-N 2-[(2-methylphenoxy)methyl]oxirane Chemical compound CC1=CC=CC=C1OCC1OC1 KFUSXMDYOPXKKT-UHFFFAOYSA-N 0.000 description 1
- SFJRUJUEMVAZLM-UHFFFAOYSA-N 2-[(2-methylpropan-2-yl)oxymethyl]oxirane Chemical compound CC(C)(C)OCC1CO1 SFJRUJUEMVAZLM-UHFFFAOYSA-N 0.000 description 1
- HHRACYLRBOUBKM-UHFFFAOYSA-N 2-[(4-tert-butylphenoxy)methyl]oxirane Chemical compound C1=CC(C(C)(C)C)=CC=C1OCC1OC1 HHRACYLRBOUBKM-UHFFFAOYSA-N 0.000 description 1
- SYEWHONLFGZGLK-UHFFFAOYSA-N 2-[1,3-bis(oxiran-2-ylmethoxy)propan-2-yloxymethyl]oxirane Chemical compound C1OC1COCC(OCC1OC1)COCC1CO1 SYEWHONLFGZGLK-UHFFFAOYSA-N 0.000 description 1
- SEFYJVFBMNOLBK-UHFFFAOYSA-N 2-[2-[2-(oxiran-2-ylmethoxy)ethoxy]ethoxymethyl]oxirane Chemical compound C1OC1COCCOCCOCC1CO1 SEFYJVFBMNOLBK-UHFFFAOYSA-N 0.000 description 1
- SHKUUQIDMUMQQK-UHFFFAOYSA-N 2-[4-(oxiran-2-ylmethoxy)butoxymethyl]oxirane Chemical compound C1OC1COCCCCOCC1CO1 SHKUUQIDMUMQQK-UHFFFAOYSA-N 0.000 description 1
- PPEASEWKOGNDKZ-UHFFFAOYSA-N 2-[[2,6-bis(oxiran-2-ylmethyl)phenoxy]methyl]oxirane Chemical compound C1OC1COC(C(=CC=C1)CC2OC2)=C1CC1CO1 PPEASEWKOGNDKZ-UHFFFAOYSA-N 0.000 description 1
- SPMYYWZTCLZLQV-UHFFFAOYSA-N 2-[[5-methoxy-2-[4-methoxy-2-(oxiran-2-ylmethyl)phenoxy]phenyl]methyl]oxirane Chemical compound C1OC1CC1=CC(OC)=CC=C1OC1=CC=C(OC)C=C1CC1CO1 SPMYYWZTCLZLQV-UHFFFAOYSA-N 0.000 description 1
- ISFQVFDEWGGEDG-UHFFFAOYSA-N 2-amino-5-(4-amino-3-carboxy-5-hydroxyphenoxy)-3-hydroxybenzoic acid Chemical compound C1=C(C(O)=O)C(N)=C(O)C=C1OC1=CC(O)=C(N)C(C(O)=O)=C1 ISFQVFDEWGGEDG-UHFFFAOYSA-N 0.000 description 1
- IIQLVLWFQUUZII-UHFFFAOYSA-N 2-amino-5-(4-amino-3-carboxyphenyl)benzoic acid Chemical group C1=C(C(O)=O)C(N)=CC=C1C1=CC=C(N)C(C(O)=O)=C1 IIQLVLWFQUUZII-UHFFFAOYSA-N 0.000 description 1
- ZGDMDBHLKNQPSD-UHFFFAOYSA-N 2-amino-5-(4-amino-3-hydroxyphenyl)phenol Chemical group C1=C(O)C(N)=CC=C1C1=CC=C(N)C(O)=C1 ZGDMDBHLKNQPSD-UHFFFAOYSA-N 0.000 description 1
- CKLYCXBMXQVMJA-UHFFFAOYSA-N 2-amino-5-[(4-amino-3-carboxy-5-hydroxyphenyl)methyl]-3-hydroxybenzoic acid Chemical compound C1=C(C(O)=O)C(N)=C(O)C=C1CC1=CC(O)=C(N)C(C(O)=O)=C1 CKLYCXBMXQVMJA-UHFFFAOYSA-N 0.000 description 1
- BVKJPSUJFWVAJJ-UHFFFAOYSA-N 2-amino-5-[2-(4-amino-3-carboxy-5-hydroxyphenyl)propan-2-yl]-3-hydroxybenzoic acid Chemical compound C=1C(O)=C(N)C(C(O)=O)=CC=1C(C)(C)C1=CC(O)=C(N)C(C(O)=O)=C1 BVKJPSUJFWVAJJ-UHFFFAOYSA-N 0.000 description 1
- WGKZYJXRTIPTCV-UHFFFAOYSA-N 2-butoxypropan-1-ol Chemical compound CCCCOC(C)CO WGKZYJXRTIPTCV-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- GSLTVFIVJMCNBH-UHFFFAOYSA-N 2-isocyanatopropane Chemical compound CC(C)N=C=O GSLTVFIVJMCNBH-UHFFFAOYSA-N 0.000 description 1
- 125000004204 2-methoxyphenyl group Chemical group [H]C1=C([H])C(*)=C(OC([H])([H])[H])C([H])=C1[H] 0.000 description 1
- YTTFFPATQICAQN-UHFFFAOYSA-N 2-methoxypropan-1-ol Chemical compound COC(C)CO YTTFFPATQICAQN-UHFFFAOYSA-N 0.000 description 1
- OBCSAIDCZQSFQH-UHFFFAOYSA-N 2-methyl-1,4-phenylenediamine Chemical compound CC1=CC(N)=CC=C1N OBCSAIDCZQSFQH-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- VAYMIYBJLRRIFR-UHFFFAOYSA-N 2-tolyl isocyanate Chemical compound CC1=CC=CC=C1N=C=O VAYMIYBJLRRIFR-UHFFFAOYSA-N 0.000 description 1
- JRBJSXQPQWSCCF-UHFFFAOYSA-N 3,3'-Dimethoxybenzidine Chemical group C1=C(N)C(OC)=CC(C=2C=C(OC)C(N)=CC=2)=C1 JRBJSXQPQWSCCF-UHFFFAOYSA-N 0.000 description 1
- NUIURNJTPRWVAP-UHFFFAOYSA-N 3,3'-Dimethylbenzidine Chemical group C1=C(N)C(C)=CC(C=2C=C(C)C(N)=CC=2)=C1 NUIURNJTPRWVAP-UHFFFAOYSA-N 0.000 description 1
- OVOZYARDXPHRDL-UHFFFAOYSA-N 3,4-diaminophenol Chemical class NC1=CC=C(O)C=C1N OVOZYARDXPHRDL-UHFFFAOYSA-N 0.000 description 1
- UENRXLSRMCSUSN-UHFFFAOYSA-N 3,5-diaminobenzoic acid Chemical compound NC1=CC(N)=CC(C(O)=O)=C1 UENRXLSRMCSUSN-UHFFFAOYSA-N 0.000 description 1
- LJQFYBCLMVVNAQ-UHFFFAOYSA-N 3-(2-aminoethyl)aniline Chemical compound NCCC1=CC=CC(N)=C1 LJQFYBCLMVVNAQ-UHFFFAOYSA-N 0.000 description 1
- LXJLFVRAWOOQDR-UHFFFAOYSA-N 3-(3-aminophenoxy)aniline Chemical compound NC1=CC=CC(OC=2C=C(N)C=CC=2)=C1 LXJLFVRAWOOQDR-UHFFFAOYSA-N 0.000 description 1
- NDXGRHCEHPFUSU-UHFFFAOYSA-N 3-(3-aminophenyl)aniline Chemical group NC1=CC=CC(C=2C=C(N)C=CC=2)=C1 NDXGRHCEHPFUSU-UHFFFAOYSA-N 0.000 description 1
- LJGHYPLBDBRCRZ-UHFFFAOYSA-N 3-(3-aminophenyl)sulfonylaniline Chemical compound NC1=CC=CC(S(=O)(=O)C=2C=C(N)C=CC=2)=C1 LJGHYPLBDBRCRZ-UHFFFAOYSA-N 0.000 description 1
- ZBMISJGHVWNWTE-UHFFFAOYSA-N 3-(4-aminophenoxy)aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=CC(N)=C1 ZBMISJGHVWNWTE-UHFFFAOYSA-N 0.000 description 1
- QSPMTSAELLSLOQ-UHFFFAOYSA-N 3-(4-aminophenyl)aniline Chemical group C1=CC(N)=CC=C1C1=CC=CC(N)=C1 QSPMTSAELLSLOQ-UHFFFAOYSA-N 0.000 description 1
- ZDBWYUOUYNQZBM-UHFFFAOYSA-N 3-(aminomethyl)aniline Chemical compound NCC1=CC=CC(N)=C1 ZDBWYUOUYNQZBM-UHFFFAOYSA-N 0.000 description 1
- FGWQCROGAHMWSU-UHFFFAOYSA-N 3-[(4-aminophenyl)methyl]aniline Chemical compound C1=CC(N)=CC=C1CC1=CC=CC(N)=C1 FGWQCROGAHMWSU-UHFFFAOYSA-N 0.000 description 1
- UVUCUHVQYAPMEU-UHFFFAOYSA-N 3-[2-(3-aminophenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]aniline Chemical compound NC1=CC=CC(C(C=2C=C(N)C=CC=2)(C(F)(F)F)C(F)(F)F)=C1 UVUCUHVQYAPMEU-UHFFFAOYSA-N 0.000 description 1
- CKTOHFTWIAKLPM-UHFFFAOYSA-N 3-[3-(3-aminophenyl)propyl]aniline Chemical compound NC1=CC=CC(CCCC=2C=C(N)C=CC=2)=C1 CKTOHFTWIAKLPM-UHFFFAOYSA-N 0.000 description 1
- REVNJLSBMMHEPZ-UHFFFAOYSA-N 3-amino-2-[4-(2-amino-6-carboxyphenyl)phenyl]benzoic acid Chemical compound Nc1cccc(C(O)=O)c1-c1ccc(cc1)-c1c(N)cccc1C(O)=O REVNJLSBMMHEPZ-UHFFFAOYSA-N 0.000 description 1
- VUGSDMVMFIXNFG-UHFFFAOYSA-N 3-amino-n-[3-[(3-aminobenzoyl)amino]phenyl]benzamide Chemical compound NC1=CC=CC(C(=O)NC=2C=C(NC(=O)C=3C=C(N)C=CC=3)C=CC=2)=C1 VUGSDMVMFIXNFG-UHFFFAOYSA-N 0.000 description 1
- DHUWREIRBJAQAT-UHFFFAOYSA-N 3-amino-n-[4-[(3-aminobenzoyl)amino]phenyl]benzamide Chemical compound NC1=CC=CC(C(=O)NC=2C=CC(NC(=O)C=3C=C(N)C=CC=3)=CC=2)=C1 DHUWREIRBJAQAT-UHFFFAOYSA-N 0.000 description 1
- 229940018563 3-aminophenol Drugs 0.000 description 1
- ZNDKWZIGMWAGKH-UHFFFAOYSA-N 3-n,3-n-bis(3-aminophenyl)benzene-1,3-dicarboxamide Chemical compound NC(=O)C1=CC=CC(C(=O)N(C=2C=C(N)C=CC=2)C=2C=C(N)C=CC=2)=C1 ZNDKWZIGMWAGKH-UHFFFAOYSA-N 0.000 description 1
- UHMARZNHEMRXQH-UHFFFAOYSA-N 3a,4,5,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1=CCCC2C(=O)OC(=O)C21 UHMARZNHEMRXQH-UHFFFAOYSA-N 0.000 description 1
- YBRVSVVVWCFQMG-UHFFFAOYSA-N 4,4'-diaminodiphenylmethane Chemical compound C1=CC(N)=CC=C1CC1=CC=C(N)C=C1 YBRVSVVVWCFQMG-UHFFFAOYSA-N 0.000 description 1
- DPYROBMRMXHROQ-UHFFFAOYSA-N 4,6-diaminobenzene-1,3-diol Chemical compound NC1=CC(N)=C(O)C=C1O DPYROBMRMXHROQ-UHFFFAOYSA-N 0.000 description 1
- LNPMZQXEPNWCMG-UHFFFAOYSA-N 4-(2-aminoethyl)aniline Chemical compound NCCC1=CC=C(N)C=C1 LNPMZQXEPNWCMG-UHFFFAOYSA-N 0.000 description 1
- QYIMZXITLDTULQ-UHFFFAOYSA-N 4-(4-amino-2-methylphenyl)-3-methylaniline Chemical group CC1=CC(N)=CC=C1C1=CC=C(N)C=C1C QYIMZXITLDTULQ-UHFFFAOYSA-N 0.000 description 1
- LVNPGQZSPDFZNC-UHFFFAOYSA-N 4-(4-amino-3-fluorophenyl)-2-fluoroaniline Chemical group C1=C(F)C(N)=CC=C1C1=CC=C(N)C(F)=C1 LVNPGQZSPDFZNC-UHFFFAOYSA-N 0.000 description 1
- BFWYZZPDZZGSLJ-UHFFFAOYSA-N 4-(aminomethyl)aniline Chemical compound NCC1=CC=C(N)C=C1 BFWYZZPDZZGSLJ-UHFFFAOYSA-N 0.000 description 1
- ZSEYIZWTJQYCRJ-UHFFFAOYSA-N 4-N,4-N-bis(3-aminophenyl)benzene-1,4-dicarboxamide Chemical compound C(C1=CC=C(C(=O)N)C=C1)(=O)N(C1=CC(=CC=C1)N)C1=CC(=CC=C1)N ZSEYIZWTJQYCRJ-UHFFFAOYSA-N 0.000 description 1
- DZIHTWJGPDVSGE-UHFFFAOYSA-N 4-[(4-aminocyclohexyl)methyl]cyclohexan-1-amine Chemical compound C1CC(N)CCC1CC1CCC(N)CC1 DZIHTWJGPDVSGE-UHFFFAOYSA-N 0.000 description 1
- XPLAZHDCTNEPMK-UHFFFAOYSA-N 4-[1-(4-aminophenyl)hexyl]aniline Chemical compound C=1C=C(N)C=CC=1C(CCCCC)C1=CC=C(N)C=C1 XPLAZHDCTNEPMK-UHFFFAOYSA-N 0.000 description 1
- QGGBXVBTXFPQKC-UHFFFAOYSA-N 4-[1-(4-aminophenyl)octyl]aniline Chemical compound C=1C=C(N)C=CC=1C(CCCCCCC)C1=CC=C(N)C=C1 QGGBXVBTXFPQKC-UHFFFAOYSA-N 0.000 description 1
- NGMJQNYIDZLGFP-UHFFFAOYSA-N 4-[10-(4-aminophenoxy)decoxy]aniline Chemical compound C1=CC(N)=CC=C1OCCCCCCCCCCOC1=CC=C(N)C=C1 NGMJQNYIDZLGFP-UHFFFAOYSA-N 0.000 description 1
- JXFCYRAFQGPMTH-UHFFFAOYSA-N 4-[11-(4-aminophenoxy)undecoxy]aniline Chemical compound C1=CC(N)=CC=C1OCCCCCCCCCCCOC1=CC=C(N)C=C1 JXFCYRAFQGPMTH-UHFFFAOYSA-N 0.000 description 1
- NYYQMRVJKVNHRC-UHFFFAOYSA-N 4-[12-(4-aminophenoxy)dodecoxy]aniline Chemical compound C1=CC(N)=CC=C1OCCCCCCCCCCCCOC1=CC=C(N)C=C1 NYYQMRVJKVNHRC-UHFFFAOYSA-N 0.000 description 1
- BEKFRNOZJSYWKZ-UHFFFAOYSA-N 4-[2-(4-aminophenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]aniline Chemical compound C1=CC(N)=CC=C1C(C(F)(F)F)(C(F)(F)F)C1=CC=C(N)C=C1 BEKFRNOZJSYWKZ-UHFFFAOYSA-N 0.000 description 1
- WAUKJWLKPXRNKT-UHFFFAOYSA-N 4-[2-(4-aminophenyl)ethynyl]aniline Chemical compound C1=CC(N)=CC=C1C#CC1=CC=C(N)C=C1 WAUKJWLKPXRNKT-UHFFFAOYSA-N 0.000 description 1
- WXYSZTISEJBRHW-UHFFFAOYSA-N 4-[2-[4-[1,1-bis(4-hydroxyphenyl)ethyl]phenyl]propan-2-yl]phenol Chemical compound C=1C=C(C(C)(C=2C=CC(O)=CC=2)C=2C=CC(O)=CC=2)C=CC=1C(C)(C)C1=CC=C(O)C=C1 WXYSZTISEJBRHW-UHFFFAOYSA-N 0.000 description 1
- IRBPSRJHMDQFBT-UHFFFAOYSA-N 4-[3,3-bis(4-hydroxyphenyl)butyl]phenol Chemical compound C=1C=C(O)C=CC=1C(C=1C=CC(O)=CC=1)(C)CCC1=CC=C(O)C=C1 IRBPSRJHMDQFBT-UHFFFAOYSA-N 0.000 description 1
- WUPRYUDHUFLKFL-UHFFFAOYSA-N 4-[3-(4-aminophenoxy)phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=CC(OC=2C=CC(N)=CC=2)=C1 WUPRYUDHUFLKFL-UHFFFAOYSA-N 0.000 description 1
- KWFFEQXPFFDJER-UHFFFAOYSA-N 4-[3-(4-aminophenoxy)propoxy]aniline Chemical compound C1=CC(N)=CC=C1OCCCOC1=CC=C(N)C=C1 KWFFEQXPFFDJER-UHFFFAOYSA-N 0.000 description 1
- HGACYDJLFXNRIZ-UHFFFAOYSA-N 4-[3-(4-aminophenyl)pentan-3-yl]aniline Chemical compound C=1C=C(N)C=CC=1C(CC)(CC)C1=CC=C(N)C=C1 HGACYDJLFXNRIZ-UHFFFAOYSA-N 0.000 description 1
- BMIUMBLWVWZIHD-UHFFFAOYSA-N 4-[3-(4-aminophenyl)propyl]aniline Chemical compound C1=CC(N)=CC=C1CCCC1=CC=C(N)C=C1 BMIUMBLWVWZIHD-UHFFFAOYSA-N 0.000 description 1
- LAFZPVANKKJENB-UHFFFAOYSA-N 4-[4-(4-aminophenoxy)butoxy]aniline Chemical compound C1=CC(N)=CC=C1OCCCCOC1=CC=C(N)C=C1 LAFZPVANKKJENB-UHFFFAOYSA-N 0.000 description 1
- JCRRFJIVUPSNTA-UHFFFAOYSA-N 4-[4-(4-aminophenoxy)phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC(C=C1)=CC=C1OC1=CC=C(N)C=C1 JCRRFJIVUPSNTA-UHFFFAOYSA-N 0.000 description 1
- ULDSADCHIQKXEN-UHFFFAOYSA-N 4-[4-(4-aminophenyl)heptan-4-yl]aniline Chemical compound C=1C=C(N)C=CC=1C(CCC)(CCC)C1=CC=C(N)C=C1 ULDSADCHIQKXEN-UHFFFAOYSA-N 0.000 description 1
- QBSMHWVGUPQNJJ-UHFFFAOYSA-N 4-[4-(4-aminophenyl)phenyl]aniline Chemical compound C1=CC(N)=CC=C1C1=CC=C(C=2C=CC(N)=CC=2)C=C1 QBSMHWVGUPQNJJ-UHFFFAOYSA-N 0.000 description 1
- HHLMWQDRYZAENA-UHFFFAOYSA-N 4-[4-[2-[4-(4-aminophenoxy)phenyl]-1,1,1,3,3,3-hexafluoropropan-2-yl]phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=C(C(C=2C=CC(OC=3C=CC(N)=CC=3)=CC=2)(C(F)(F)F)C(F)(F)F)C=C1 HHLMWQDRYZAENA-UHFFFAOYSA-N 0.000 description 1
- KMKWGXGSGPYISJ-UHFFFAOYSA-N 4-[4-[2-[4-(4-aminophenoxy)phenyl]propan-2-yl]phenoxy]aniline Chemical compound C=1C=C(OC=2C=CC(N)=CC=2)C=CC=1C(C)(C)C(C=C1)=CC=C1OC1=CC=C(N)C=C1 KMKWGXGSGPYISJ-UHFFFAOYSA-N 0.000 description 1
- SLHXQWDUYXSTPA-UHFFFAOYSA-N 4-[5-(4-aminophenoxy)pentoxy]aniline Chemical compound C1=CC(N)=CC=C1OCCCCCOC1=CC=C(N)C=C1 SLHXQWDUYXSTPA-UHFFFAOYSA-N 0.000 description 1
- MJZXFMSIHMJQBW-UHFFFAOYSA-N 4-[5-(4-aminophenyl)-1,3,4-oxadiazol-2-yl]aniline Chemical compound C1=CC(N)=CC=C1C1=NN=C(C=2C=CC(N)=CC=2)O1 MJZXFMSIHMJQBW-UHFFFAOYSA-N 0.000 description 1
- GRFCDFDVGOXFPY-UHFFFAOYSA-N 4-[6-(4-aminophenoxy)hexoxy]aniline Chemical compound C1=CC(N)=CC=C1OCCCCCCOC1=CC=C(N)C=C1 GRFCDFDVGOXFPY-UHFFFAOYSA-N 0.000 description 1
- SURHEQARWKWZMT-UHFFFAOYSA-N 4-[8-(4-aminophenoxy)octoxy]aniline Chemical compound C1=CC(N)=CC=C1OCCCCCCCCOC1=CC=C(N)C=C1 SURHEQARWKWZMT-UHFFFAOYSA-N 0.000 description 1
- DFXGPEKKMXWHQU-UHFFFAOYSA-N 4-[9-(4-aminophenoxy)nonoxy]aniline Chemical compound C1=CC(N)=CC=C1OCCCCCCCCCOC1=CC=C(N)C=C1 DFXGPEKKMXWHQU-UHFFFAOYSA-N 0.000 description 1
- FAUAZXVRLVIARB-UHFFFAOYSA-N 4-[[4-[bis(oxiran-2-ylmethyl)amino]phenyl]methyl]-n,n-bis(oxiran-2-ylmethyl)aniline Chemical compound C1OC1CN(C=1C=CC(CC=2C=CC(=CC=2)N(CC2OC2)CC2OC2)=CC=1)CC1CO1 FAUAZXVRLVIARB-UHFFFAOYSA-N 0.000 description 1
- DIPSNXHWDKBKKB-UHFFFAOYSA-N 4-[bis(4-aminophenyl)methyl]phenol Chemical compound C1=CC(N)=CC=C1C(C=1C=CC(O)=CC=1)C1=CC=C(N)C=C1 DIPSNXHWDKBKKB-UHFFFAOYSA-N 0.000 description 1
- OEIUYPYXOYZUAX-UHFFFAOYSA-N 4-amino-n-[3-[(4-aminobenzoyl)amino]phenyl]benzamide Chemical compound C1=CC(N)=CC=C1C(=O)NC1=CC=CC(NC(=O)C=2C=CC(N)=CC=2)=C1 OEIUYPYXOYZUAX-UHFFFAOYSA-N 0.000 description 1
- LGTGOCSQAOUUFP-UHFFFAOYSA-N 4-amino-n-[4-[(4-aminobenzoyl)amino]phenyl]benzamide Chemical compound C1=CC(N)=CC=C1C(=O)NC(C=C1)=CC=C1NC(=O)C1=CC=C(N)C=C1 LGTGOCSQAOUUFP-UHFFFAOYSA-N 0.000 description 1
- ROCVGJLXIARCAC-UHFFFAOYSA-N 4-aminobenzene-1,3-diol Chemical compound NC1=CC=C(O)C=C1O ROCVGJLXIARCAC-UHFFFAOYSA-N 0.000 description 1
- IMLXLGZJLAOKJN-UHFFFAOYSA-N 4-aminocyclohexan-1-ol Chemical compound NC1CCC(O)CC1 IMLXLGZJLAOKJN-UHFFFAOYSA-N 0.000 description 1
- WDTRNCFZFQIWLM-UHFFFAOYSA-N 4-benzylaniline Chemical compound C1=CC(N)=CC=C1CC1=CC=CC=C1 WDTRNCFZFQIWLM-UHFFFAOYSA-N 0.000 description 1
- ACQVEWFMUBXEMR-UHFFFAOYSA-N 4-bromo-2-fluoro-6-nitrophenol Chemical compound OC1=C(F)C=C(Br)C=C1[N+]([O-])=O ACQVEWFMUBXEMR-UHFFFAOYSA-N 0.000 description 1
- KGYYLUNYOCBBME-UHFFFAOYSA-M 4-fluoro-2-phenyl-4-(4-propylcyclohexyl)cyclohexa-1,5-diene-1-carboxylate Chemical compound C1CC(CCC)CCC1C1(F)C=CC(C([O-])=O)=C(C=2C=CC=CC=2)C1 KGYYLUNYOCBBME-UHFFFAOYSA-M 0.000 description 1
- QYJGMAIQZRWXSD-UHFFFAOYSA-N 4-methylbicyclo[2.2.1]hept-5-ene-2,3-dicarboxylic acid Chemical compound C1C2C=CC1(C)C(C(O)=O)C2C(O)=O QYJGMAIQZRWXSD-UHFFFAOYSA-N 0.000 description 1
- TYAOHZLXKQKCCZ-UHFFFAOYSA-N 4-n,4-n-bis(4-aminophenyl)benzene-1,4-dicarboxamide Chemical compound C1=CC(C(=O)N)=CC=C1C(=O)N(C=1C=CC(N)=CC=1)C1=CC=C(N)C=C1 TYAOHZLXKQKCCZ-UHFFFAOYSA-N 0.000 description 1
- QZHXKQKKEBXYRG-UHFFFAOYSA-N 4-n-(4-aminophenyl)benzene-1,4-diamine Chemical compound C1=CC(N)=CC=C1NC1=CC=C(N)C=C1 QZHXKQKKEBXYRG-UHFFFAOYSA-N 0.000 description 1
- MGYGFNQQGAQEON-UHFFFAOYSA-N 4-tolyl isocyanate Chemical compound CC1=CC=C(N=C=O)C=C1 MGYGFNQQGAQEON-UHFFFAOYSA-N 0.000 description 1
- HJSYPLCSZPEDCQ-UHFFFAOYSA-N 5-[2-(3-amino-4-methylphenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]-2-methylaniline Chemical compound C1=C(N)C(C)=CC=C1C(C(F)(F)F)(C(F)(F)F)C1=CC=C(C)C(N)=C1 HJSYPLCSZPEDCQ-UHFFFAOYSA-N 0.000 description 1
- DDBLQAUMPDHVTI-UHFFFAOYSA-N 5-[2-(3-amino-4-methylphenyl)propan-2-yl]-2-methylaniline Chemical compound C1=C(N)C(C)=CC=C1C(C)(C)C1=CC=C(C)C(N)=C1 DDBLQAUMPDHVTI-UHFFFAOYSA-N 0.000 description 1
- JVERADGGGBYHNP-UHFFFAOYSA-N 5-phenylbenzene-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C(C(=O)O)=CC(C=2C=CC=CC=2)=C1C(O)=O JVERADGGGBYHNP-UHFFFAOYSA-N 0.000 description 1
- OOEGQLPPMITCBZ-UHFFFAOYSA-N 6-propan-2-yl-1,3,5-triazine-2,4-diamine Chemical compound CC(C)C1=NC(N)=NC(N)=N1 OOEGQLPPMITCBZ-UHFFFAOYSA-N 0.000 description 1
- NHJIDZUQMHKGRE-UHFFFAOYSA-N 7-oxabicyclo[4.1.0]heptan-4-yl 2-(7-oxabicyclo[4.1.0]heptan-4-yl)acetate Chemical compound C1CC2OC2CC1OC(=O)CC1CC2OC2CC1 NHJIDZUQMHKGRE-UHFFFAOYSA-N 0.000 description 1
- HFANTPAGNMLGQT-UHFFFAOYSA-N 9h-carbazole-2,6-diamine Chemical compound C1=C(N)C=C2C3=CC=C(N)C=C3NC2=C1 HFANTPAGNMLGQT-UHFFFAOYSA-N 0.000 description 1
- GODIISWDNKKITG-UHFFFAOYSA-N 9h-carbazole-2,7-diamine Chemical compound NC1=CC=C2C3=CC=C(N)C=C3NC2=C1 GODIISWDNKKITG-UHFFFAOYSA-N 0.000 description 1
- YCZUWQOJQGCZKG-UHFFFAOYSA-N 9h-carbazole-3,6-diamine Chemical compound C1=C(N)C=C2C3=CC(N)=CC=C3NC2=C1 YCZUWQOJQGCZKG-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 229920003319 Araldite® Polymers 0.000 description 1
- LCFVJGUPQDGYKZ-UHFFFAOYSA-N Bisphenol A diglycidyl ether Chemical compound C=1C=C(OCC2OC2)C=CC=1C(C)(C)C(C=C1)=CC=C1OCC1CO1 LCFVJGUPQDGYKZ-UHFFFAOYSA-N 0.000 description 1
- SDDLEVPIDBLVHC-UHFFFAOYSA-N Bisphenol Z Chemical compound C1=CC(O)=CC=C1C1(C=2C=CC(O)=CC=2)CCCCC1 SDDLEVPIDBLVHC-UHFFFAOYSA-N 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 1
- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 1
- YCNWRTGYZABVIF-UHFFFAOYSA-N CC(C)(c1ccc(N)cc1)c1ccc(N)cc1.CC(C)(c1cccc(N)c1)c1cccc(N)c1 Chemical compound CC(C)(c1ccc(N)cc1)c1ccc(N)cc1.CC(C)(c1cccc(N)c1)c1cccc(N)c1 YCNWRTGYZABVIF-UHFFFAOYSA-N 0.000 description 1
- VHVZLLXIMIHTAS-UHFFFAOYSA-N COCCC(=O)OCC.COC(C(=O)OC)C Chemical compound COCCC(=O)OCC.COC(C(=O)OC)C VHVZLLXIMIHTAS-UHFFFAOYSA-N 0.000 description 1
- 229920013683 Celanese Polymers 0.000 description 1
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- 239000004262 Ethyl gallate Substances 0.000 description 1
- 101000872170 Homo sapiens Polycomb complex protein BMI-1 Proteins 0.000 description 1
- PEEHTFAAVSWFBL-UHFFFAOYSA-N Maleimide Chemical compound O=C1NC(=O)C=C1 PEEHTFAAVSWFBL-UHFFFAOYSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- OKIZCWYLBDKLSU-UHFFFAOYSA-M N,N,N-Trimethylmethanaminium chloride Chemical compound [Cl-].C[N+](C)(C)C OKIZCWYLBDKLSU-UHFFFAOYSA-M 0.000 description 1
- AFBPFSWMIHJQDM-UHFFFAOYSA-N N-methyl-N-phenylamine Natural products CNC1=CC=CC=C1 AFBPFSWMIHJQDM-UHFFFAOYSA-N 0.000 description 1
- ADILRXGVPLNXKR-UHFFFAOYSA-N NC1=CC=C(CC2=CC=C(C=C2)CC2=CC=C(C=C2)N)C=C1.NC1=CC=C(CC2=CC(=CC=C2)CC2=CC=C(C=C2)N)C=C1 Chemical compound NC1=CC=C(CC2=CC=C(C=C2)CC2=CC=C(C=C2)N)C=C1.NC1=CC=C(CC2=CC(=CC=C2)CC2=CC=C(C=C2)N)C=C1 ADILRXGVPLNXKR-UHFFFAOYSA-N 0.000 description 1
- MOQKQQGZMSHNKW-UHFFFAOYSA-N O=C(C1C(C(O2)=O)=CC2=O)OC1=O Chemical compound O=C(C1C(C(O2)=O)=CC2=O)OC1=O MOQKQQGZMSHNKW-UHFFFAOYSA-N 0.000 description 1
- NVMHHXLEDGFQPF-UHFFFAOYSA-N O=C([N]1(C(O2)=O)C2=O)OC1=O Chemical compound O=C([N]1(C(O2)=O)C2=O)OC1=O NVMHHXLEDGFQPF-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 102100033566 Polycomb complex protein BMI-1 Human genes 0.000 description 1
- WUGQZFFCHPXWKQ-UHFFFAOYSA-N Propanolamine Chemical compound NCCCO WUGQZFFCHPXWKQ-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- GWNRJFTZPSCRAY-UHFFFAOYSA-N [3-(3-aminobenzoyl)oxyphenyl] 3-aminobenzoate Chemical compound NC1=CC=CC(C(=O)OC=2C=C(OC(=O)C=3C=C(N)C=CC=3)C=CC=2)=C1 GWNRJFTZPSCRAY-UHFFFAOYSA-N 0.000 description 1
- IVGBGCPUDUTSHT-UHFFFAOYSA-N [3-(3-aminobenzoyl)phenyl]-(3-aminophenyl)methanone Chemical compound NC1=CC=CC(C(=O)C=2C=C(C=CC=2)C(=O)C=2C=C(N)C=CC=2)=C1 IVGBGCPUDUTSHT-UHFFFAOYSA-N 0.000 description 1
- VRJPMYDKXNTGFV-UHFFFAOYSA-N [3-(4-aminobenzoyl)oxyphenyl] 4-aminobenzoate Chemical compound C1=CC(N)=CC=C1C(=O)OC1=CC=CC(OC(=O)C=2C=CC(N)=CC=2)=C1 VRJPMYDKXNTGFV-UHFFFAOYSA-N 0.000 description 1
- UVXIFYUJZWURAR-UHFFFAOYSA-N [3-(4-aminobenzoyl)phenyl]-(4-aminophenyl)methanone Chemical compound C1=CC(N)=CC=C1C(=O)C1=CC=CC(C(=O)C=2C=CC(N)=CC=2)=C1 UVXIFYUJZWURAR-UHFFFAOYSA-N 0.000 description 1
- KJGPUSGHNHJCNO-UHFFFAOYSA-N [4-(3-aminobenzoyl)phenyl]-(3-aminophenyl)methanone Chemical compound NC1=CC=CC(C(=O)C=2C=CC(=CC=2)C(=O)C=2C=C(N)C=CC=2)=C1 KJGPUSGHNHJCNO-UHFFFAOYSA-N 0.000 description 1
- DBCMPVCYHLRHND-UHFFFAOYSA-N [4-(4-aminobenzoyl)phenyl]-(4-aminophenyl)methanone Chemical compound C1=CC(N)=CC=C1C(=O)C1=CC=C(C(=O)C=2C=CC(N)=CC=2)C=C1 DBCMPVCYHLRHND-UHFFFAOYSA-N 0.000 description 1
- AMNPXXIGUOKIPP-UHFFFAOYSA-N [4-(carbamothioylamino)phenyl]thiourea Chemical compound NC(=S)NC1=CC=C(NC(N)=S)C=C1 AMNPXXIGUOKIPP-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 238000007259 addition reaction Methods 0.000 description 1
- 239000005456 alcohol based solvent Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000001448 anilines Chemical class 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- CHQVQXZFZHACQQ-UHFFFAOYSA-M benzyl(triethyl)azanium;bromide Chemical compound [Br-].CC[N+](CC)(CC)CC1=CC=CC=C1 CHQVQXZFZHACQQ-UHFFFAOYSA-M 0.000 description 1
- UUZYBYIOAZTMGC-UHFFFAOYSA-M benzyl(trimethyl)azanium;bromide Chemical compound [Br-].C[N+](C)(C)CC1=CC=CC=C1 UUZYBYIOAZTMGC-UHFFFAOYSA-M 0.000 description 1
- KXHPPCXNWTUNSB-UHFFFAOYSA-M benzyl(trimethyl)azanium;chloride Chemical compound [Cl-].C[N+](C)(C)CC1=CC=CC=C1 KXHPPCXNWTUNSB-UHFFFAOYSA-M 0.000 description 1
- WTEPWWCRWNCUNA-UHFFFAOYSA-M benzyl(triphenyl)phosphanium;bromide Chemical compound [Br-].C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(C=1C=CC=CC=1)CC1=CC=CC=C1 WTEPWWCRWNCUNA-UHFFFAOYSA-M 0.000 description 1
- USFRYJRPHFMVBZ-UHFFFAOYSA-M benzyl(triphenyl)phosphanium;chloride Chemical compound [Cl-].C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(C=1C=CC=CC=1)CC1=CC=CC=C1 USFRYJRPHFMVBZ-UHFFFAOYSA-M 0.000 description 1
- OSPKGDDLQQVQSG-UHFFFAOYSA-M benzyl(tripropyl)azanium;bromide Chemical compound [Br-].CCC[N+](CCC)(CCC)CC1=CC=CC=C1 OSPKGDDLQQVQSG-UHFFFAOYSA-M 0.000 description 1
- YTRIOKYQEVFKGU-UHFFFAOYSA-M benzyl(tripropyl)azanium;chloride Chemical compound [Cl-].CCC[N+](CCC)(CCC)CC1=CC=CC=C1 YTRIOKYQEVFKGU-UHFFFAOYSA-M 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- 125000006267 biphenyl group Chemical group 0.000 description 1
- DMVOXQPQNTYEKQ-UHFFFAOYSA-N biphenyl-4-amine Chemical group C1=CC(N)=CC=C1C1=CC=CC=C1 DMVOXQPQNTYEKQ-UHFFFAOYSA-N 0.000 description 1
- WXNRYSGJLQFHBR-UHFFFAOYSA-N bis(2,4-dihydroxyphenyl)methanone Chemical compound OC1=CC(O)=CC=C1C(=O)C1=CC=C(O)C=C1O WXNRYSGJLQFHBR-UHFFFAOYSA-N 0.000 description 1
- MKFFVFISLKXOSB-UHFFFAOYSA-N bis(3-aminophenyl) benzene-1,3-dicarboxylate Chemical compound NC1=CC=CC(OC(=O)C=2C=C(C=CC=2)C(=O)OC=2C=C(N)C=CC=2)=C1 MKFFVFISLKXOSB-UHFFFAOYSA-N 0.000 description 1
- GUNJOTGKRMYBEL-UHFFFAOYSA-N bis(3-aminophenyl) benzene-1,4-dicarboxylate Chemical compound NC1=CC=CC(OC(=O)C=2C=CC(=CC=2)C(=O)OC=2C=C(N)C=CC=2)=C1 GUNJOTGKRMYBEL-UHFFFAOYSA-N 0.000 description 1
- TUQQUUXMCKXGDI-UHFFFAOYSA-N bis(3-aminophenyl)methanone Chemical compound NC1=CC=CC(C(=O)C=2C=C(N)C=CC=2)=C1 TUQQUUXMCKXGDI-UHFFFAOYSA-N 0.000 description 1
- FRCGXWDENTYRDC-UHFFFAOYSA-N bis(4-aminophenyl) benzene-1,3-dicarboxylate Chemical compound C1=CC(N)=CC=C1OC(=O)C1=CC=CC(C(=O)OC=2C=CC(N)=CC=2)=C1 FRCGXWDENTYRDC-UHFFFAOYSA-N 0.000 description 1
- CFTXGNJIXHFHTH-UHFFFAOYSA-N bis(4-aminophenyl) benzene-1,4-dicarboxylate Chemical compound C1=CC(N)=CC=C1OC(=O)C1=CC=C(C(=O)OC=2C=CC(N)=CC=2)C=C1 CFTXGNJIXHFHTH-UHFFFAOYSA-N 0.000 description 1
- YMXKKAMHFCWWNZ-UHFFFAOYSA-N bis(4-aminophenyl) butanedioate Chemical compound C1=CC(N)=CC=C1OC(=O)CCC(=O)OC1=CC=C(N)C=C1 YMXKKAMHFCWWNZ-UHFFFAOYSA-N 0.000 description 1
- GOKWZXBYDWJEEX-UHFFFAOYSA-N bis(4-aminophenyl) decanedioate Chemical compound C1=CC(N)=CC=C1OC(=O)CCCCCCCCC(=O)OC1=CC=C(N)C=C1 GOKWZXBYDWJEEX-UHFFFAOYSA-N 0.000 description 1
- WIQCJWYOACZYRI-UHFFFAOYSA-N bis(4-aminophenyl) nonanedioate Chemical compound C1=CC(N)=CC=C1OC(=O)CCCCCCCC(=O)OC1=CC=C(N)C=C1 WIQCJWYOACZYRI-UHFFFAOYSA-N 0.000 description 1
- NTOUEMVDNNZRJH-UHFFFAOYSA-N bis(4-aminophenyl) propanedioate Chemical compound C1=CC(N)=CC=C1OC(=O)CC(=O)OC1=CC=C(N)C=C1 NTOUEMVDNNZRJH-UHFFFAOYSA-N 0.000 description 1
- ZLSMCQSGRWNEGX-UHFFFAOYSA-N bis(4-aminophenyl)methanone Chemical compound C1=CC(N)=CC=C1C(=O)C1=CC=C(N)C=C1 ZLSMCQSGRWNEGX-UHFFFAOYSA-N 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 229910052799 carbon Chemical group 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- RZIPTXDCNDIINL-UHFFFAOYSA-N cyclohexane-1,1,2,2-tetracarboxylic acid Chemical compound OC(=O)C1(C(O)=O)CCCCC1(C(O)=O)C(O)=O RZIPTXDCNDIINL-UHFFFAOYSA-N 0.000 description 1
- GEQHKFFSPGPGLN-UHFFFAOYSA-N cyclohexane-1,3-diamine Chemical compound NC1CCCC(N)C1 GEQHKFFSPGPGLN-UHFFFAOYSA-N 0.000 description 1
- VKIRRGRTJUUZHS-UHFFFAOYSA-N cyclohexane-1,4-diamine Chemical compound NC1CCC(N)CC1 VKIRRGRTJUUZHS-UHFFFAOYSA-N 0.000 description 1
- UKJLNMAFNRKWGR-UHFFFAOYSA-N cyclohexatrienamine Chemical group NC1=CC=C=C[CH]1 UKJLNMAFNRKWGR-UHFFFAOYSA-N 0.000 description 1
- ZWAJLVLEBYIOTI-UHFFFAOYSA-N cyclohexene oxide Chemical group C1CCCC2OC21 ZWAJLVLEBYIOTI-UHFFFAOYSA-N 0.000 description 1
- KQWGXHWJMSMDJJ-UHFFFAOYSA-N cyclohexyl isocyanate Chemical compound O=C=NC1CCCCC1 KQWGXHWJMSMDJJ-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- GBFWRHAMVJCGRC-UHFFFAOYSA-N dibenzofuran-2,6-diamine Chemical compound NC1=CC2=C(OC3=C2C=CC=C3N)C=C1 GBFWRHAMVJCGRC-UHFFFAOYSA-N 0.000 description 1
- YCDUMXSNRLISHV-UHFFFAOYSA-N dibenzofuran-2,7-diamine Chemical compound C1=C(N)C=C2C3=CC=C(N)C=C3OC2=C1 YCDUMXSNRLISHV-UHFFFAOYSA-N 0.000 description 1
- CJEGQJNKRGSCSP-UHFFFAOYSA-N dibenzofuran-3,6-diamine Chemical compound NC=1C=CC2=C(OC3=C2C=CC=C3N)C1 CJEGQJNKRGSCSP-UHFFFAOYSA-N 0.000 description 1
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 1
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 1
- IJUHLFUALMUWOM-UHFFFAOYSA-N ethyl 3-methoxypropanoate Chemical compound CCOC(=O)CCOC IJUHLFUALMUWOM-UHFFFAOYSA-N 0.000 description 1
- 235000019277 ethyl gallate Nutrition 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- WUDNUHPRLBTKOJ-UHFFFAOYSA-N ethyl isocyanate Chemical compound CCN=C=O WUDNUHPRLBTKOJ-UHFFFAOYSA-N 0.000 description 1
- NJXBVBPTDHBAID-UHFFFAOYSA-M ethyl(triphenyl)phosphanium;chloride Chemical compound [Cl-].C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(CC)C1=CC=CC=C1 NJXBVBPTDHBAID-UHFFFAOYSA-M 0.000 description 1
- 125000000219 ethylidene group Chemical group [H]C(=[*])C([H])([H])[H] 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- ANJPRQPHZGHVQB-UHFFFAOYSA-N hexyl isocyanate Chemical compound CCCCCCN=C=O ANJPRQPHZGHVQB-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- YDNLNVZZTACNJX-UHFFFAOYSA-N isocyanatomethylbenzene Chemical compound O=C=NCC1=CC=CC=C1 YDNLNVZZTACNJX-UHFFFAOYSA-N 0.000 description 1
- QZUPTXGVPYNUIT-UHFFFAOYSA-N isophthalamide Chemical compound NC(=O)C1=CC=CC(C(N)=O)=C1 QZUPTXGVPYNUIT-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- IBKQQKPQRYUGBJ-UHFFFAOYSA-N methyl gallate Natural products CC(=O)C1=CC(O)=C(O)C(O)=C1 IBKQQKPQRYUGBJ-UHFFFAOYSA-N 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- HAMGRBXTJNITHG-UHFFFAOYSA-N methyl isocyanate Chemical compound CN=C=O HAMGRBXTJNITHG-UHFFFAOYSA-N 0.000 description 1
- KNRCVAANTQNTPT-UHFFFAOYSA-N methyl-5-norbornene-2,3-dicarboxylic anhydride Chemical compound O=C1OC(=O)C2C1C1(C)C=CC2C1 KNRCVAANTQNTPT-UHFFFAOYSA-N 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- HNHVTXYLRVGMHD-UHFFFAOYSA-N n-butyl isocyanate Chemical compound CCCCN=C=O HNHVTXYLRVGMHD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- KQSABULTKYLFEV-UHFFFAOYSA-N naphthalene-1,5-diamine Chemical compound C1=CC=C2C(N)=CC=CC2=C1N KQSABULTKYLFEV-UHFFFAOYSA-N 0.000 description 1
- HBJPJUGOYJOSLR-UHFFFAOYSA-N naphthalene-2,7-diamine Chemical compound C1=CC(N)=CC2=CC(N)=CC=C21 HBJPJUGOYJOSLR-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- NOQXXYIGRPAZJC-UHFFFAOYSA-N oxiran-2-ylmethyl 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)OCC1OC1 NOQXXYIGRPAZJC-UHFFFAOYSA-N 0.000 description 1
- RPQRDASANLAFCM-UHFFFAOYSA-N oxiran-2-ylmethyl prop-2-enoate Chemical compound C=CC(=O)OCC1CO1 RPQRDASANLAFCM-UHFFFAOYSA-N 0.000 description 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- DGTNSSLYPYDJGL-UHFFFAOYSA-N phenyl isocyanate Chemical compound O=C=NC1=CC=CC=C1 DGTNSSLYPYDJGL-UHFFFAOYSA-N 0.000 description 1
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N phenylbenzene Natural products C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 1
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 1
- 150000004714 phosphonium salts Chemical group 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 238000012643 polycondensation polymerization Methods 0.000 description 1
- 238000006068 polycondensation reaction Methods 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- VHNQIURBCCNWDN-UHFFFAOYSA-N pyridine-2,6-diamine Chemical compound NC1=CC=CC(N)=N1 VHNQIURBCCNWDN-UHFFFAOYSA-N 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 239000007870 radical polymerization initiator Substances 0.000 description 1
- 239000006254 rheological additive Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- ADXGNEYLLLSOAR-UHFFFAOYSA-N tasosartan Chemical compound C12=NC(C)=NC(C)=C2CCC(=O)N1CC(C=C1)=CC=C1C1=CC=CC=C1C=1N=NNN=1 ADXGNEYLLLSOAR-UHFFFAOYSA-N 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- HWCKGOZZJDHMNC-UHFFFAOYSA-M tetraethylammonium bromide Chemical compound [Br-].CC[N+](CC)(CC)CC HWCKGOZZJDHMNC-UHFFFAOYSA-M 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- WAGFXJQAIZNSEQ-UHFFFAOYSA-M tetraphenylphosphonium chloride Chemical compound [Cl-].C1=CC=CC=C1[P+](C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 WAGFXJQAIZNSEQ-UHFFFAOYSA-M 0.000 description 1
- BGQMOFGZRJUORO-UHFFFAOYSA-M tetrapropylammonium bromide Chemical compound [Br-].CCC[N+](CCC)(CCC)CCC BGQMOFGZRJUORO-UHFFFAOYSA-M 0.000 description 1
- FBEVECUEMUUFKM-UHFFFAOYSA-M tetrapropylazanium;chloride Chemical compound [Cl-].CCC[N+](CCC)(CCC)CCC FBEVECUEMUUFKM-UHFFFAOYSA-M 0.000 description 1
- QXJQHYBHAIHNGG-UHFFFAOYSA-N trimethylolethane Chemical compound OCC(C)(CO)CO QXJQHYBHAIHNGG-UHFFFAOYSA-N 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 238000000870 ultraviolet spectroscopy Methods 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L67/00—Compositions of polyesters obtained by reactions forming a carboxylic ester link in the main chain; Compositions of derivatives of such polymers
- C08L67/02—Polyesters derived from dicarboxylic acids and dihydroxy compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G63/00—Macromolecular compounds obtained by reactions forming a carboxylic ester link in the main chain of the macromolecule
- C08G63/91—Polymers modified by chemical after-treatment
- C08G63/914—Polymers modified by chemical after-treatment derived from polycarboxylic acids and polyhydroxy compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/20—Carboxylic acid amides
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/34—Heterocyclic compounds having nitrogen in the ring
- C08K5/3412—Heterocyclic compounds having nitrogen in the ring having one nitrogen atom in the ring
- C08K5/3415—Five-membered rings
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L63/00—Compositions of epoxy resins; Compositions of derivatives of epoxy resins
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L77/00—Compositions of polyamides obtained by reactions forming a carboxylic amide link in the main chain; Compositions of derivatives of such polymers
- C08L77/06—Polyamides derived from polyamines and polycarboxylic acids
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2666/00—Composition of polymers characterized by a further compound in the blend, being organic macromolecular compounds, natural resins, waxes or and bituminous materials, non-macromolecular organic substances, inorganic substances or characterized by their function in the composition
- C08L2666/02—Organic macromolecular compounds, natural resins, waxes or and bituminous materials
- C08L2666/14—Macromolecular compounds according to C08L59/00 - C08L87/00; Derivatives thereof
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2666/00—Composition of polymers characterized by a further compound in the blend, being organic macromolecular compounds, natural resins, waxes or and bituminous materials, non-macromolecular organic substances, inorganic substances or characterized by their function in the composition
- C08L2666/02—Organic macromolecular compounds, natural resins, waxes or and bituminous materials
- C08L2666/14—Macromolecular compounds according to C08L59/00 - C08L87/00; Derivatives thereof
- C08L2666/22—Macromolecular compounds not provided for in C08L2666/16 - C08L2666/20
Definitions
- the specific polymer is represented by a tetracarboxylic dianhydride component (hereinafter, also referred to as an acid component) containing a tetracarboxylic dianhydride represented by the following formula (i), and the following formula (ii). It is obtained by reacting with a diol compound (hereinafter also referred to as a diol component).
- a diol compound hereinafter also referred to as a diol component.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Chemical & Material Sciences (AREA)
- Materials For Photolithography (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Polyesters Or Polycarbonates (AREA)
- Epoxy Resins (AREA)
Abstract
Description
さらに、これまでに感光性を有し配向性を示す平坦化膜に関しては報告されていない。 In addition, in order to improve the adhesion strength with the sealing material used when the substrate is bonded to the TFT array side, it is desired that the film at the adhesion portion can be removed using a photolithography process.
Further, no planarization film having photosensitivity and orientation has been reported so far.
すなわち、第1観点として、
(A)成分、(B)成分、(C)成分及び(D)成分を含有する熱硬化膜形成用感光性ポリエステル組成物。
(A)成分:下記式(1)で表される構造単位を含むポリエステルに、グリシジル基及びイソシアナート基から選ばれる官能基を有する化合物を反応させて得られる修飾されたポリエステル
(B)成分:エポキシ基を2個以上有するエポキシ化合物
(C)成分:ジアミン化合物とジカルボン酸二無水物を反応させて得られるアミノ基含有カルボン酸化合物
(D)成分:1,2-キノンジアジド化合物
That is, as a first viewpoint,
Photosensitive polyester composition for thermosetting film formation containing (A) component, (B) component, (C) component, and (D) component.
Component (A): Modified polyester (B) component obtained by reacting a polyester containing a structural unit represented by the following formula (1) with a compound having a functional group selected from a glycidyl group and an isocyanate group: Epoxy compound (C) component having two or more epoxy groups: Amino group-containing carboxylic acid compound (D) component obtained by reacting a diamine compound and dicarboxylic dianhydride: 1,2-quinonediazide compound
第5観点として、前記(C)成分が、ジアミン化合物1モルと、ジカルボン酸二無水物1.7乃至2モルとを反応させて得られるアミノ基含有カルボン酸化合物である、第1観点乃至第4観点のうちいずれか一項に記載の熱硬化膜形成用感光性ポリエステル組成物。
第6観点として、前記(A)成分の100質量部に基づいて、3乃至50質量部の前記(B)成分、3乃至50質量部の前記(C)成分、5乃至80質量部の前記(D)成分をそれぞれ含有する、第1観点乃至第5観点のうちいずれか一項に記載の熱硬化膜形成用感光性ポリエステル組成物。
第7観点として、更に、(E)成分としてビスマレイミド化合物を含有する、第1観点乃至第5観点のうちいずれか一項に記載の熱硬化膜形成用感光性ポリエステル組成物。
第8観点として、前記(A)成分の100質量部に基づいて、0.5乃至50質量部の第7観点記載の(E)成分を含有する、第6観点に記載の熱硬化膜形成用感光性ポリエステル組成物。
第9観点として、第1観点乃至第8観点のうちいずれか一項に記載の熱硬化膜形成用感光性ポリエステル組成物から形成される硬化膜。
第10観点として、第1観点乃至第8観点のうちいずれか一項に記載の熱硬化膜形成用感光性ポリエステル組成物を用いて得られる液晶配向層。 As a fourth aspect, the modified polyester of the component (A) has a weight average molecular weight of 1,000 to 3,000 in terms of polystyrene, and is described in any one of the first to third aspects. Photosensitive polyester composition for thermosetting film formation.
As a fifth aspect, the component (C) is an amino group-containing carboxylic acid compound obtained by reacting 1 mol of a diamine compound with 1.7 to 2 mol of a dicarboxylic dianhydride. The photosensitive polyester composition for thermosetting film formation as described in any one of 4 viewpoints.
As a sixth aspect, based on 100 parts by mass of the component (A), 3 to 50 parts by mass of the component (B), 3 to 50 parts by mass of the component (C), 5 to 80 parts by mass of the ( D) The photosensitive polyester composition for thermosetting film formation as described in any one of 1st viewpoint thru | or 5th viewpoint each containing a component.
As a seventh aspect, the photosensitive polyester composition for thermosetting film formation according to any one of the first aspect to the fifth aspect, further comprising a bismaleimide compound as the component (E).
As an eighth aspect, for thermosetting film formation according to the sixth aspect, containing 0.5 to 50 parts by mass of the (E) component according to the seventh aspect based on 100 parts by mass of the component (A). Photosensitive polyester composition.
As 9th viewpoint, the cured film formed from the photosensitive polyester composition for thermosetting film formation as described in any one of 1st viewpoint thru | or 8th viewpoint.
As a tenth aspect, a liquid crystal alignment layer obtained using the photosensitive polyester composition for thermosetting film formation according to any one of the first aspect to the eighth aspect.
さらに本発明の熱硬化膜形成用感光性ポリエステル組成物は、グリコール系溶剤及び乳酸エステル系溶剤に可溶であることから、これら溶剤を主として使用する平坦化膜の作製ラインに好適に使用できる。 The photosensitive polyester composition for thermosetting film formation of the present invention has photosensitivity, and forms a cured film having liquid crystal alignment ability in addition to high flatness, high transparency, high solvent resistance, and high heat resistance. Therefore, it can be used as a material for forming a liquid crystal alignment film or a planarization film. In particular, it is possible to form the liquid crystal alignment film and the overcoat layer of the color filter, which have been conventionally formed independently, as a “liquid crystal alignment layer” having both characteristics at the same time, simplifying the manufacturing process and the number of processes. Cost reduction by reduction can be realized.
Furthermore, since the photosensitive polyester composition for forming a thermosetting film of the present invention is soluble in a glycol solvent and a lactic acid ester solvent, it can be suitably used in a production line for a planarized film mainly using these solvents.
また、これまでにも液晶表示素子の配向材料としてポリエステルの使用の提案(特開平5-158055号公報、特開2002-229039号公報参照)がなされたことはあったが、これらはいずれも熱硬化性を有するものではなく、形成した膜の耐溶剤性は劣るものであった。 As described above, the conventionally proposed acrylic resin-based and polyimide resin-based cured films have sufficient performance such as flatness, transparency, and orientation required for liquid crystal alignment films and flattening films. There was nothing satisfactory.
In addition, there have been proposals for the use of polyester as an alignment material for liquid crystal display elements (see Japanese Patent Application Laid-Open Nos. H5-158055 and 2002-229039). It was not curable and the solvent resistance of the formed film was poor.
以下、各成分の詳細を説明する。 Therefore, the present invention is characterized in that the above-described performance improvement is achieved using a thermosetting polyester. That is, the present invention includes (A) component polyester, (B) component epoxy compound having two or more epoxy groups, (C) amino group-containing carboxylic acid compound, (D) component 1, It is a photosensitive polyester composition for thermosetting film formation containing a 2-quinonediazide compound. Furthermore, the present invention relates to a photosensitive polyester for thermosetting film which can contain a bismaleimide compound as the component (E) in addition to the components (A), (B), (C) and (D). It is a composition.
Hereinafter, details of each component will be described.
(A)成分のポリエステルは、下記式(1)で表される構造単位を含むポリエステル(以下、特定重合体ともいう)に、グリシジル基及びイソシアナート基から選ばれる官能基を有する化合物を反応させて得られる修飾されたポリエステルである。好ましくは下記式(1)で表される構造単位からなるポリエステルに、グリシジル基及びイソシアナート基から選ばれる官能基を有する化合物を反応させて得られる修飾されたポリエステルである。
The polyester of component (A) is obtained by reacting a polyester having a structural unit represented by the following formula (1) (hereinafter also referred to as a specific polymer) with a compound having a functional group selected from a glycidyl group and an isocyanate group. It is a modified polyester obtained in this way. Preferably, it is a modified polyester obtained by reacting a polyester having a structural unit represented by the following formula (1) with a compound having a functional group selected from a glycidyl group and an isocyanate group.
ここで、該置換基である脂肪族基は、炭素原子数1乃至5の脂肪族基が好ましく、より好ましくは炭素原子数1乃至3の脂肪族基である。これら置換基が結合して環を形成する場合は、例えば、ノルボルネン基やアダマンタン基などの橋掛け環式炭化水素基、一部又は全部が水素化された縮合多環式炭化水素基となる。
また、Rlは好ましくは単結合、エーテル結合、カルボニル基、スルホン酸基、炭素原子数1乃至5の飽和炭化水素基又はフッ素原子で置換された炭素原子数1乃至5の飽和炭化水素基を表す。
さらに、R2は好ましくは炭素原子数1乃至5の飽和炭化水素基を表し、より好ましくは炭素原子数1乃至3の飽和炭化水素基を表す。 In the above formula, A 1 preferably represents a cyclic saturated hydrocarbon group having 4 to 8 carbon atoms, more preferably a cyclic saturated hydrocarbon group having 4 to 6 carbon atoms. In addition, any hydrogen atom contained in the A 1 group may be independently substituted with an aliphatic group, and two of them may be bonded to each other to form a 4- to 6-membered ring. Also good.
Here, the aliphatic group as the substituent is preferably an aliphatic group having 1 to 5 carbon atoms, more preferably an aliphatic group having 1 to 3 carbon atoms. When these substituents are bonded to form a ring, for example, it becomes a bridged cyclic hydrocarbon group such as a norbornene group or an adamantane group, or a condensed polycyclic hydrocarbon group in which part or all of them are hydrogenated.
R 1 is preferably a single bond, an ether bond, a carbonyl group, a sulfonic acid group, a saturated hydrocarbon group having 1 to 5 carbon atoms, or a saturated hydrocarbon group having 1 to 5 carbon atoms substituted with a fluorine atom. To express.
R 2 preferably represents a saturated hydrocarbon group having 1 to 5 carbon atoms, more preferably a saturated hydrocarbon group having 1 to 3 carbon atoms.
ここで、該置換基である脂肪族基は、炭素原子数1乃至5の脂肪族基が好ましく、より好ましくは炭素原子数1乃至3の脂肪族基である。これら置換基が結合して環を形成する場合は、例えば、ノルボルネン基やアダマンタン基などの橋掛け環式炭化水素基、一部又は全部が水素化された縮合多環式炭化水素基となる。
R3は好ましくは、単結合、エーテル結合、カルボニル基、スルホン酸基、炭素原子数1乃至5の飽和炭化水素基又はフッ素原子で置換された炭素原子数1乃至5の飽和炭化水素基を表す。
また、R4、R5は好ましくは単結合、炭素原子数1乃至3のアルキレン基を表す。
さらに、R6、R7は好ましくは炭素原子数1乃至3のアルキレン基を表す。 In the above formula, B 1 preferably represents a cyclic saturated hydrocarbon group having 4 to 8 carbon atoms, more preferably a cyclic saturated hydrocarbon group having 4 to 6 carbon atoms. In addition, any hydrogen atom contained in the B 1 group may be independently substituted with an aliphatic group.
Here, the aliphatic group as the substituent is preferably an aliphatic group having 1 to 5 carbon atoms, more preferably an aliphatic group having 1 to 3 carbon atoms. When these substituents are bonded to form a ring, for example, it becomes a bridged cyclic hydrocarbon group such as a norbornene group or an adamantane group, or a condensed polycyclic hydrocarbon group in which part or all of them are hydrogenated.
R 3 preferably represents a single bond, an ether bond, a carbonyl group, a sulfonic acid group, a saturated hydrocarbon group having 1 to 5 carbon atoms, or a saturated hydrocarbon group having 1 to 5 carbon atoms substituted with a fluorine atom. .
R 4 and R 5 are preferably a single bond or an alkylene group having 1 to 3 carbon atoms.
Further, R 6 and R 7 preferably represent an alkylene group having 1 to 3 carbon atoms.
特に、R8は単結合、エーテル結合、カルボニル基、スルホン酸基、炭素原子数1乃至5の飽和炭化水素基又はフッ素原子で置換された炭素原子数1乃至5の飽和炭化水素基であることが好ましい。
また、R9はエーテル結合、炭素原子数1乃至5の飽和炭化水素基又はフッ素原子で置換された炭素原子数1乃至5の飽和炭化水素基であることが好ましい。
そして、R10はエーテル結合、カルボニル基、スルホン酸基、炭素原子数1乃至5の飽和炭化水素基又はフッ素原子で置換された炭素原子数1乃至5の飽和炭化水素基であることが好ましい。 In the above formula, R 8 , R 9 and R 10 are preferably a single bond, an ether bond, a carbonyl group, a sulfonic acid group, a saturated hydrocarbon group having 1 to 5 carbon atoms or a carbon atom substituted with a fluorine atom. To 5 saturated hydrocarbon groups.
In particular, R 8 is a single bond, an ether bond, a carbonyl group, a sulfonic acid group, a saturated hydrocarbon group having 1 to 5 carbon atoms, or a saturated hydrocarbon group having 1 to 5 carbon atoms substituted with a fluorine atom. Is preferred.
R 9 is preferably an ether bond, a saturated hydrocarbon group having 1 to 5 carbon atoms, or a saturated hydrocarbon group having 1 to 5 carbon atoms substituted with a fluorine atom.
R 10 is preferably an ether bond, a carbonyl group, a sulfonic acid group, a saturated hydrocarbon group having 1 to 5 carbon atoms, or a saturated hydrocarbon group having 1 to 5 carbon atoms substituted with a fluorine atom.
(A)成分である修飾されたポリエステルは、後述するように、特定重合体にグリシジル基及びイソシアナート基から選ばれる官能基を有する化合物を反応させることによって得ることができる。 In the specific polymer, at least 60 mol% of at least one structural unit selected from the group consisting of groups in which A of the structural unit represented by the above formula (1) is represented by the above formula (1Al) to (1A3) It is preferable to include the above.
The modified polyester as the component (A) can be obtained by reacting a specific polymer with a compound having a functional group selected from a glycidyl group and an isocyanate group, as described later.
本発明において、特定重合体は、下記式(i)で表されるテトラカルボン酸二無水物を含むテトラカルボン酸二無水物成分(以下、酸成分ともいう)と、下記式(ii)で表されるジオール化合物(以下、ジオール成分ともいう)とを反応させることで得られる。
In the present invention, the specific polymer is represented by a tetracarboxylic dianhydride component (hereinafter, also referred to as an acid component) containing a tetracarboxylic dianhydride represented by the following formula (i), and the following formula (ii). It is obtained by reacting with a diol compound (hereinafter also referred to as a diol component).
本発明において、前記式(i)で表されるテトラカルボン酸二無水物、前記式(ii)で表されるジオール化合物はそれぞれ独立に、単独で用いてもよく或いは2種以上を用いることもできる。 Moreover, about said A and B, a preferable form is the same as what was mentioned above.
In the present invention, the tetracarboxylic dianhydride represented by the formula (i) and the diol compound represented by the formula (ii) may be used independently or in combination of two or more. it can.
本発明においては、上記式(i)で表されるテトラカルボン酸二無水物が酸成分中の少なくとも60モル%以上を含むことが好ましい。 In addition, preferred specific examples of the formula (1A4) and the formula (1A5) are also represented by the formula (al) to the formula (a7).
In the present invention, the tetracarboxylic dianhydride represented by the above formula (i) preferably contains at least 60 mol% or more of the acid component.
また、ジオール成分を過剰に用いて重合した場合には、末端は水酸基になりやすい。この場合、該末端水酸基にカルボン酸無水物を反応させ、末端水酸基を酸無水物で封止することができる。このようなカルボン酸無水物の例としては、フタル酸無水物、トリメリット酸無水物、無水マレイン酸、ナフタル酸無水物、水素化フタル酸無水物、メチル-5-ノルボルネン-2,3-ジカルボン酸無水物、無水イタコン酸、テトラヒドロフタル酸無水物等を挙げることができる。
その後の付加反応でグリシジル基を有する化合物と反応させる場合は、生成する水酸基と酸無水物が反応しゲル化が起こるため、特定重合体の末端を水酸基にするか末端水酸基を酸無水物で封止する必要がある。 The terminal of the specific polymer varies depending on the compounding ratio of the acid component and the diol component. For example, when the acid component is reacted excessively, the terminal tends to be an acid anhydride.
Moreover, when it superposes | polymerizes using a diol component excessively, the terminal tends to become a hydroxyl group. In this case, the terminal hydroxyl group can be reacted with a carboxylic acid anhydride, and the terminal hydroxyl group can be sealed with an acid anhydride. Examples of such carboxylic anhydrides include phthalic anhydride, trimellitic anhydride, maleic anhydride, naphthalic anhydride, hydrogenated phthalic anhydride, methyl-5-norbornene-2,3-dicarboxylic acid An acid anhydride, itaconic anhydride, tetrahydrophthalic anhydride, etc. can be mentioned.
When reacting with a compound having a glycidyl group in the subsequent addition reaction, the generated hydroxyl group and acid anhydride react to cause gelation. Therefore, the end of the specific polymer is changed to a hydroxyl group or the terminal hydroxyl group is sealed with an acid anhydride. It is necessary to stop.
また末端水酸基を酸無水物で保護する場合の反応温度は50乃至200℃、好ましくは80乃至170℃の任意の温度を選択することができる。 In the production of the specific polymer, the reaction temperature between the acid component and the diol component can be selected from 50 to 200 ° C., preferably 80 to 170 ° C. For example, the reaction temperature is 100 to 140 ° C., and the specific polymer can be obtained in a reaction time of 2 to 48 hours.
The reaction temperature for protecting the terminal hydroxyl group with an acid anhydride can be selected from 50 to 200 ° C., preferably 80 to 170 ° C.
これらの溶媒は単独でも、混合して使用しても良いが、安全性、カラーフィルタのオーバーコート剤のラインへの適用性の点からプロピレングリコールモノメチルエーテルアセテートがより好ましい。
さらに、特定重合体を溶解しない溶剤であっても、重合反応により生成した特定重合体が析出しない範囲で、前記溶剤に混合して使用してもよい。 The reaction between the acid component and the diol component is usually performed in a solvent (hereinafter, the solvent used for polymerizing the specific polymer is referred to as “polymerization solvent”). The solvent that can be used in this case is not particularly limited as long as it does not contain a functional group that reacts with an acid anhydride, such as a hydroxyl group or an amino group. For example, N, N-dimethylformamide, N, N-dimethylacetamide, N-methylpyrrolidone, N-vinylpyrrolidone, N-methylcaprolactam, dimethylsulfoxide, tetramethylurea, dimethylsulfone, hexamethylsulfoxide, m-cresol, γ -Butyrolactone, cyclohexanone, cyclopentanone, methyl ethyl ketone, methyl isobutyl ketone, 2-heptanone, methyl cellosolve acetate, ethyl cellosolve acetate, propylene glycol monomethyl ether acetate, propylene glycol propyl ether acetate, methyl 3-methoxypropionate, 2-methoxypropion Acid methyl, ethyl 3-methoxypropionate, ethyl 2-methoxypropionate, ethyl 3-ethoxypropionate 2-ethyl ethoxypropionate, and the like.
These solvents may be used alone or as a mixture, but propylene glycol monomethyl ether acetate is more preferable from the viewpoint of safety and applicability to a color filter overcoat agent line.
Furthermore, even if it is a solvent which does not melt | dissolve a specific polymer, you may mix and use it for the said solvent in the range in which the specific polymer produced | generated by the polymerization reaction does not precipitate.
特定重合体の重合時に用いる触媒の具体例としては、ベンジルトリメチルアンモニウムクロリド、ベンジルトリメチルアンモニウムブロミド、ベンジルトリエチルアンモニウムクロリド、ベンジルトリエチルアンモニウムブロミド、ベンジルトリプロピルアンモニウムクロリド、ベンジルトリプロピルアンモニウムブロミド、テトラメチルアンモニウムクロリド、テトラエチルアンモニウムブロミド、テトラプロピルアンモニウムクロリド、テトラプロピルアンモニウムブロミド等の四級アンモニウム塩、テトラフェニルホスホニウムクロリド、テトラフェニルホスホニウムブロミド、ベンジルトリフェニルホスホニウムクロリド、ベンジルトリフェニルホスホニウムブロミド、エチルトリフェニルホスホニウムクロリド、エチルトリフェニルホスホニウムブロミド等の4級ホスホニウム塩を挙げることができる。 A catalyst can also be used in the reaction of the acid component (formula (i) and formula (i2)) with the diol component (formula (ii)).
Specific examples of the catalyst used in the polymerization of the specific polymer include benzyltrimethylammonium chloride, benzyltrimethylammonium bromide, benzyltriethylammonium chloride, benzyltriethylammonium bromide, benzyltripropylammonium chloride, benzyltripropylammonium bromide, tetramethylammonium chloride. Quaternary ammonium salts such as tetraethylammonium bromide, tetrapropylammonium chloride, tetrapropylammonium bromide, tetraphenylphosphonium chloride, tetraphenylphosphonium bromide, benzyltriphenylphosphonium chloride, benzyltriphenylphosphonium bromide, ethyltriphenylphosphonium chloride, ethyl Trifeni Quaternary phosphonium salts such as bromide and the like.
成分(A)のポリエステルは、特定重合体のカルボキシル基に対し、グリシジル基及びイソシアナート基から選ばれる官能基を有する化合物を、10乃至90モル%加えて反応させることで得られる。その際、特定重合体の重合溶液をそのまま用いることが可能である。
さらに、アルコール系の溶剤を共存させると反応中のゲル化を抑制することができるので好ましい。そのようなアルコール系溶媒(以下、反応溶媒ともいう)の具体例を挙げると。プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、プロピレングリコールモノブチルエーテル、プロピレングリコールプロピルエーテル、ジエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、ジエチレングリコールモノブチルエーテル、メチルセルソルブ、ブチルセルソルブ、乳酸エチル、乳酸ブチル、メタノール、エタノール、1-プロパノール、2-プロパノール、1-ブタノール、2-ブタノール、tert-ブタノール、シクロヘキサノール等が挙げられる。これらの溶剤は、単独で又は2種以上の組合せで使用することができる。 <Manufacture of (A) component>
The polyester of component (A) can be obtained by adding 10 to 90 mol% of a compound having a functional group selected from a glycidyl group and an isocyanate group and reacting with the carboxyl group of the specific polymer. In that case, it is possible to use the polymerization solution of a specific polymer as it is.
Further, it is preferable to coexist with an alcohol solvent since gelation during the reaction can be suppressed. Specific examples of such alcohol solvents (hereinafter also referred to as reaction solvents) are given. Propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monobutyl ether, propylene glycol propyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, methyl cellosolve, butyl cellosolve, ethyl lactate, butyl lactate, methanol, Examples include ethanol, 1-propanol, 2-propanol, 1-butanol, 2-butanol, tert-butanol, cyclohexanol and the like. These solvents can be used alone or in combination of two or more.
本発明の(B)成分であるエポキシ基を2個以上有するエポキシ化合物としては、例えば、トリス(2,3-エポキシプロピル)イソシアヌレート、1,4-ブタンジオールジグリシジルエーテル、1,2-エポキシ-4-(エポキシエチル)シクロヘキサン、グリセロールトリグリシジルエーテル、ジエチレングリコールジグリシジルエーテル、2,6-ジグリシジルフェニルグリシジルエーテル、1,1,3-トリス[p-(2,3-エポキシプロポキシ)フェニル]プロパン、1,2-シクロヘキサンジカルボン酸ジグリシジルエステル、4,4’-メチレンビス(N,N-ジグリシジルアニリン)、3,4-エポキシシクロヘキシルメチル-3,4-エポキシシクロヘキサンカルボキシレート、トリメチロールエタントリグリシジルエーテル、ビスフェノールAジグリシジルエーテル、及びペンタエリスリトールポリグリシジルエーテル等を挙げることができる。
また、入手が容易である点から市販品の化合物を用いてもよい。以下にその具体例(商品名)を挙げるが、これらに限定されるものではない:YH-434、YH434L(東都化成(株)製)等のアミノ基を有するエポキシ樹脂;エポリードGT-401、同GT-403、同GT-301、同GT-302、セロキサイド2021、セロキサイド3000(ダイセル化学工業(株)製)等のシクロヘキセンオキサイド構造を有するエポキシ樹脂;エピコート1001、同1002、同1003、同1004、同1007、同1009、同1010、同828(油化シェルエポキシ(株)(現ジャパンエポキシレジン(株))製)等のビスフェノールA型エポキシ樹脂;エピコート807(油化シェルエポキシ(株)(現ジャパンエポキシレジン(株))製)等のビスフェノールF型エポキシ樹脂;エピコート152、同154(油化シェルエポキシ(株)(現ジャパンエポキシレジン(株))製)、EPPN201、同202(日本化薬(株)製)等のフェノールノボラック型エポキシ樹脂;EOCN-102、EOCN-103S、EOCN-104S、EOCN-1020、EOCN-1025、EOCN-1027(日本化薬(株)製)、エピコート180S75(油化シェルエポキシ(株)(現ジャパンエポキシレジン(株))製)等のクレゾールノボラック型エポキシ樹脂;デナコールEX-252(ナガセケムテックス(株)製)、CY175、CY177、CY179、アラルダイトCY-182、同CY-192、同CY-184(CIBA-GEIGY A.G製)、エピクロン200、同400(大日本インキ化学工業(株)製)、エピコート871、同872(油化シェルエポキシ(株)(現ジャパンエポキシレジン(株))製)、ED-5661、ED-5662(セラニーズコーティング(株)製)等の脂環式エポキシ樹脂;デナコールEX-611、同EX-612、同EX-614、同EX-622、同EX-411、同EX-512、同EX-522、同EX-421、同EX-313、同EX-314、同EX-321(ナガセケムテックス(株)製)等の脂肪族ポリグリシジルエーテル等。 <(B) component>
Examples of the epoxy compound having two or more epoxy groups as the component (B) of the present invention include tris (2,3-epoxypropyl) isocyanurate, 1,4-butanediol diglycidyl ether, and 1,2-epoxy. -4- (epoxyethyl) cyclohexane, glycerol triglycidyl ether, diethylene glycol diglycidyl ether, 2,6-diglycidylphenyl glycidyl ether, 1,1,3-tris [p- (2,3-epoxypropoxy) phenyl] propane 1,2-cyclohexanedicarboxylic acid diglycidyl ester, 4,4′-methylenebis (N, N-diglycidylaniline), 3,4-epoxycyclohexylmethyl-3,4-epoxycyclohexanecarboxylate, trimethylolethane triglycidyl D And ether, bisphenol A diglycidyl ether, and pentaerythritol polyglycidyl ether.
A commercially available compound may be used because it is easily available. Specific examples (trade names) are listed below, but are not limited to these: epoxy resins having amino groups such as YH-434, YH434L (manufactured by Tohto Kasei Co., Ltd.); Epolide GT-401, Epoxy resin having a cyclohexene oxide structure such as GT-403, GT-301, GT-302, Celoxide 2021, Celoxide 3000 (manufactured by Daicel Chemical Industries, Ltd.); Epicoat 1001, 1002, 1003, 1004, Bisphenol A type epoxy resins such as 1007, 1009, 1010, 828 (Oilized Shell Epoxy Co., Ltd. (currently Japan Epoxy Resin Co., Ltd.)); Epicoat 807 (Oilized Shell Epoxy Co., Ltd. (current) Bisphenol F type epoxy resin such as manufactured by Japan Epoxy Resin Co., Ltd .; Epi Phenol novolac type epoxy resins such as EP 152, 154 (manufactured by Yuka Shell Epoxy Co., Ltd. (currently Japan Epoxy Resin Co., Ltd.)), EPPN 201, 202 (manufactured by Nippon Kayaku Co., Ltd.); EOCN-102 , EOCN-103S, EOCN-104S, EOCN-1020, EOCN-1025, EOCN-1027 (manufactured by Nippon Kayaku Co., Ltd.), Epicoat 180S75 (Okasei Shell Epoxy Co., Ltd. (current Japan Epoxy Resin Co., Ltd.)) ) Cresol novolac type epoxy resin; Denacol EX-252 (manufactured by Nagase ChemteX Corporation), CY175, CY177, CY179, Araldite CY-182, CY-192, CY-184 (CIBA-GEIGY A.G ), Epicron 200, 400 (Dai Nippon Ink Chemical Co., Ltd. ( )), Epicoat 871, 872 (Oka Shell Epoxy Co., Ltd. (currently Japan Epoxy Resin Co., Ltd.)), ED-5661, ED-5661 (Celanese Coating Co., Ltd.), etc. Epoxy resin: Denacol EX-611, EX-612, EX-614, EX-622, EX-411, EX-512, EX-522, EX-421, EX-313, EX -314, EX-321 (manufactured by Nagase ChemteX Corp.) and the like.
前記エポキシ基を有するポリマーは、例えばエポキシ基を有する付加重合性モノマーを用いた付加重合により製造することができる。一例として、ポリグリシジルアクリレート、グリシジルメタクリレートとエチルメタクリレートの共重合体、グリシジルメタクリレートとスチレンと2-ヒドロキシエチルメタクリレートの共重合体等の付加重合ポリマーや、エポキシノボラック等の縮重合ポリマーを挙げることができる。
或いは、前記エポキシ基を有するポリマーは、水酸基を有する高分子化合物とエピクロルヒドリン、グリシジルトシレート等のエポキシ基を有する化合物との反応により製造することもできる
このようなポリマーの重量平均分子量としては、ポリスチレン換算で、例えば、300乃至200,000である。 A polymer having an epoxy group can be used as the compound having at least two epoxy groups. As such a polymer, any polymer having an epoxy group can be used without particular limitation.
The polymer having an epoxy group can be produced, for example, by addition polymerization using an addition polymerizable monomer having an epoxy group. Examples include addition polymerization polymers such as polyglycidyl acrylate, copolymers of glycidyl methacrylate and ethyl methacrylate, copolymers of glycidyl methacrylate and styrene and 2-hydroxyethyl methacrylate, and condensation polymerization polymers such as epoxy novolac. .
Alternatively, the polymer having an epoxy group may be produced by a reaction between a polymer compound having a hydroxyl group and a compound having an epoxy group such as epichlorohydrin or glycidyl tosylate. The weight average molecular weight of such a polymer is polystyrene. In terms of conversion, for example, 300 to 200,000.
(C)成分は、ジアミン化合物とジカルボン酸二無水物を反応させて得られるアミノ基含有カルボン酸化合物である。詳細には、下記式(iii)で表されるジアミン化合物1モルと下記式(iv)で表されるジカルボン酸二無水物1.7乃至2モル、好ましくは1.8乃至2モルとを反応させて得られるアミノ基含有カルボン酸化合物である。
The component (C) is an amino group-containing carboxylic acid compound obtained by reacting a diamine compound with dicarboxylic dianhydride. Specifically, 1 mol of a diamine compound represented by the following formula (iii) is reacted with 1.7 to 2 mol, preferably 1.8 to 2 mol of a dicarboxylic dianhydride represented by the following formula (iv). It is an amino group containing carboxylic acid compound obtained by making it.
前記P及びQは、中でもそれぞれ独立に環構造を有する2価の有機基であることが好ましい。ここで環構造としては、ベンゼン環、脂環、縮合多環式炭化水素が挙げられる。 In the present invention, each of the diamine compound and the dicarboxylic dianhydride may be used alone or in combination. Therefore, as the amino group-containing carboxylic acid compound of the component (C) of the present invention, not only one type of compound represented by the formula (2) but also a plurality of types can be used.
P and Q are preferably divalent organic groups each independently having a ring structure. Here, examples of the ring structure include a benzene ring, an alicyclic ring, and a condensed polycyclic hydrocarbon.
従って、そのような環構造を有するジアミン化合物の具体例としては以下のものが挙げられる:p-フェニレンジアミン、m-フェニレンジアミン、2,4-ジアミノトルエン、2,5-ジアミノトルエン、2,6-ジアミノトルエン、2,4-ジメチル-1,3-ジアミノベンゼン、2,5-ジメチル-1,4-ジアミノベンゼン、2,3,5,6-テトラメチル-1,4-ジアミノベンゼン、2,4-ジアミノフェノール、2,5-ジアミノフェノール、4,6-ジアミノレゾルシノール、2,5-ジアミノ安息香酸、3,5-ジアミノ安息香酸、N,N-ジアリル-2,4-ジアミノアニリン、N,N-ジアリル-2,5-ジアミノアニリン、4-アミノベンジルアミン、3-アミノベンジルアミン、2-(4-アミノフェニル)エチルアミン、2-(3-アミノフェニル)エチルアミン、1,5-ナフタレンジアミン、2,7-ナフタレンジアミン、4,4’-ジアミノビフェニル、3,4’-ジアミノビフェニル、3,3’-ジアミノビフェニル、2,2’-ジメチル-4,4’-ジアミノビフェニル、3,3’-ジメチル-4,4’-ジアミノビフェニル、3,3’-ジメトキシ-4,4’-ジアミノビフェニル、3,3’-ジヒドロキシ-4,4’-ジアミノビフェニル、3,3’-ジカルボキシ-4,4’-ジアミノビフェニル、3,3’-ジフルオロ-4,4’-ジアミノビフェニル、2,2’-トリフルオロメチル-4,4’-ジアミノビフェニル、3,3’-トリフルオロメチル-4,4’-ジアミノビフェニル、4,4’-ジアミノジフェニルメタン、3,3’-ジアミノジフェニルメタン、3,4’-ジアミノジフェニルメタン、4,4’-ジアミノジフェニルエーテル、3,3’-ジアミノジフェニルエーテル、3,4’-ジアミノジフェニルエーテル、4,4’-ジアミノジフェニルスルホン、3,3’-ジアミノジフェニルスルホン、4,4’-ジアミノジフェニルアミン、3,3’-ジアミノジフェニルアミン、3,4’-ジアミノジフェニルアミン、N-メチル(4,4’-ジアミノジフェニル)アミン、N-メチル(3,3’-ジアミノジフェニル)アミン、N-メチル(3,4’-ジアミノジフェニル)アミン、4,4’-ジアミノベンゾフェノン、3,3’-ジアミノベンゾフェノン、3,4’-ジアミノベンゾフェノン、4,4’-ジアミノベンズアニリド、1,2-ビス(4-アミノフェニル)エタン、1,2-ビス(3-アミノフェニル)エタン、4,4’-ジアミノトラン、1,3-ビス(4-アミノフェニル)プロパン、1,3-ビス(3-アミノフェニル)プロパン、2,2-ビス(4-アミノフェニル)プロパン、2,2-ビス(3-アミノフェニル)プロパン、2,2-ビス(3-アミノ-4-メチルフェニル)プロパン、2,2-ビス(4-アミノフェニル)ヘキサフルオロプロパン、2,2-ビス(3-アミノフェニル)ヘキサフルオロプロパン、2,2-ビス(3-アミノ-4-メチルフェニル)ヘキサフルオロプロパン、1,3-ビス(4-アミノフェノキシ)プロパン、1,4-ビス(4-アミノフェノキシ)ブタン、1,5-ビス(4-アミノフェノキシ)ペンタン、1,6-ビス(4-アミノフェノキシ)へキサン、1,7-ビス(4-アミノフェノキシ)ヘプタン、1,8-ビス(4-アミノフェノキシ)オクタン、1,9-ビス(4-アミノフェノキシ)ノナン、1,10-ビス(4-アミノフェノキシ)デカン、1,11-ビス(4-アミノフェノキシ)ウンデカン、1,12-ビス(4-アミノフェノキシ)ドデカン、ビス(4-アミノフェニル)プロパンジオアート、ビス(4-アミノフェニル)ブタンジオアート、ビス(4-アミノフェニル)ペンタンジオアート、ビス(4-アミノフェニル)ヘキサンジオアート、ビス(4-アミノフェニル)ヘプタンジオアート、ビス(4-アミノフェニル)オクタンジオアート、ビス(4-アミノフェニル)ノナンジオアート、ビス(4-アミノフェニル)デカンジオアート、1,4-ビス(4-アミノフェニル)ベンゼン、1,3-ビス(4-アミノフェニル)ベンゼン、1,4-ビス(4-アミノフェノキシ)ベンゼン、1,3-ビス(4-アミノフェノキシ)ベンゼン、1,4-ビス(4-アミノベンジル)ベンゼン、1,3-ビス(4-アミノベンジル)ベンゼン、ビス(4-アミノフェニル)テレフタラート、ビス(3-アミノフェニル)テレフタラート、ビス(4-アミノフェニル)イソフタラート、ビス(3-アミノフェニル)イソフタラート、1,4-フェニレンビス[(4-アミノフェニル)メタノン]、1,4-フェニレンビス[(3-アミノフェニル)メタノン]、1,3-フェニレンビス[(4-アミノフェニル)メタノン]、1,3-フェニレンビス[(3-アミノフェニル)メタノン]、1,4-フェニレンビス(4-アミノベンゾアート)、1,4-フェニレンビス(3-アミノベンゾアート)、1,3-フェニレンビス(4-アミノベンゾアート)、1,3-フェニレンビス(3-アミノベンゾアート)、N,N’-(1,4-フェニレン)ビス(4-アミノベンズアミド)、N,N’-(1,3-フェニレン)ビス(4-アミノベンズアミド)、N,N’-(1,4-フェニレン)ビス(3-アミノベンズアミド)、N,N’-(1,3-フェニレン)ビス(3-アミノベンズアミド)、ビス(4-アミノフェニル)テレフタルアミド、ビス(3-アミノフェニル)テレフタルアミド、ビス(4-アミノフェニル)イソフタルアミド、ビス(3-アミノフェニル)イソフタルアミド、2,2-ビス[4-(4-アミノフェノキシ)フェニル]プロパン、2,2-ビス[4-(4-アミノフェノキシ)フェニル]ヘキサフルオロプロパン、4,4’-ビス(4-アミノフェノキシ)ジフェニルスルホン、2,6-ジアミノピリジン、2,4-ジアミノピリジン、2,4-ジアミノ-1,3,5-トリアジン、2,6-ジアミノジベンゾフラン、2,7-ジアミノジベンゾフラン、3,6-ジアミノジベンゾフラン、2,6-ジアミノカルバゾール、2,7-ジアミノカルバゾール、3,6-ジアミノカルバゾール、2,4-ジアミノ-6-イソプロピル-1,3,5-トリアジン、2,5-ビス(4-アミノフェニル)-1,3,4-オキサジアゾール、1,4-ジアミノシクロヘキサン、1,3-ジアミノシクロヘキサン、ビス(4-アミノシクロヘキシル)メタン、ビス(4-アミノ-3-メチルシクロヘキシル)メタン等が挙げられる。 In the formula (iii), the ring structure of P is preferably a benzene ring, an alicyclic group having 4 to 8 carbon atoms, or a condensed polycyclic hydrocarbon having 7 to 16 carbon atoms.
Accordingly, specific examples of the diamine compound having such a ring structure include the following: p-phenylenediamine, m-phenylenediamine, 2,4-diaminotoluene, 2,5-diaminotoluene, 2,6 -Diaminotoluene, 2,4-dimethyl-1,3-diaminobenzene, 2,5-dimethyl-1,4-diaminobenzene, 2,3,5,6-tetramethyl-1,4-diaminobenzene, 2, 4-diaminophenol, 2,5-diaminophenol, 4,6-diaminoresorcinol, 2,5-diaminobenzoic acid, 3,5-diaminobenzoic acid, N, N-diallyl-2,4-diaminoaniline, N, N-diallyl-2,5-diaminoaniline, 4-aminobenzylamine, 3-aminobenzylamine, 2- (4-aminophenyl) ethyl Amine, 2- (3-aminophenyl) ethylamine, 1,5-naphthalenediamine, 2,7-naphthalenediamine, 4,4′-diaminobiphenyl, 3,4′-diaminobiphenyl, 3,3′-diaminobiphenyl, 2,2′-dimethyl-4,4′-diaminobiphenyl, 3,3′-dimethyl-4,4′-diaminobiphenyl, 3,3′-dimethoxy-4,4′-diaminobiphenyl, 3,3′- Dihydroxy-4,4′-diaminobiphenyl, 3,3′-dicarboxy-4,4′-diaminobiphenyl, 3,3′-difluoro-4,4′-diaminobiphenyl, 2,2′-trifluoromethyl- 4,4'-diaminobiphenyl, 3,3'-trifluoromethyl-4,4'-diaminobiphenyl, 4,4'-diaminodiphenylmethane, 3,3'-diaminodiphenyl 3,4'-diaminodiphenylmethane, 4,4'-diaminodiphenyl ether, 3,3'-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether, 4,4'-diaminodiphenyl sulfone, 3,3'-diaminodiphenyl Sulfone, 4,4'-diaminodiphenylamine, 3,3'-diaminodiphenylamine, 3,4'-diaminodiphenylamine, N-methyl (4,4'-diaminodiphenyl) amine, N-methyl (3,3'-diamino) Diphenyl) amine, N-methyl (3,4'-diaminodiphenyl) amine, 4,4'-diaminobenzophenone, 3,3'-diaminobenzophenone, 3,4'-diaminobenzophenone, 4,4'-diaminobenzanilide 1,2-bis (4-aminophenyl) ethane, 1,2-bis (3-a Nophenyl) ethane, 4,4′-diaminotolane, 1,3-bis (4-aminophenyl) propane, 1,3-bis (3-aminophenyl) propane, 2,2-bis (4-aminophenyl) propane 2,2-bis (3-aminophenyl) propane, 2,2-bis (3-amino-4-methylphenyl) propane, 2,2-bis (4-aminophenyl) hexafluoropropane, 2,2- Bis (3-aminophenyl) hexafluoropropane, 2,2-bis (3-amino-4-methylphenyl) hexafluoropropane, 1,3-bis (4-aminophenoxy) propane, 1,4-bis (4 -Aminophenoxy) butane, 1,5-bis (4-aminophenoxy) pentane, 1,6-bis (4-aminophenoxy) hexane, 1,7-bis (4-a Nophenoxy) heptane, 1,8-bis (4-aminophenoxy) octane, 1,9-bis (4-aminophenoxy) nonane, 1,10-bis (4-aminophenoxy) decane, 1,11-bis ( 4-aminophenoxy) undecane, 1,12-bis (4-aminophenoxy) dodecane, bis (4-aminophenyl) propanedioate, bis (4-aminophenyl) butanedioate, bis (4-aminophenyl) pentane Geoate, bis (4-aminophenyl) hexane geoate, bis (4-aminophenyl) heptane geoate, bis (4-aminophenyl) octane geoate, bis (4-aminophenyl) nonanedioate, bis (4 -Aminophenyl) decanedioate, 1,4-bis (4-aminophenyl) benzene, 1 , 3-bis (4-aminophenyl) benzene, 1,4-bis (4-aminophenoxy) benzene, 1,3-bis (4-aminophenoxy) benzene, 1,4-bis (4-aminobenzyl) benzene 1,3-bis (4-aminobenzyl) benzene, bis (4-aminophenyl) terephthalate, bis (3-aminophenyl) terephthalate, bis (4-aminophenyl) isophthalate, bis (3-aminophenyl) isophthalate, 1,4-phenylenebis [(4-aminophenyl) methanone], 1,4-phenylenebis [(3-aminophenyl) methanone], 1,3-phenylenebis [(4-aminophenyl) methanone], 1, 3-phenylenebis [(3-aminophenyl) methanone], 1,4-phenylenebis (4-aminobenzoer) ), 1,4-phenylenebis (3-aminobenzoate), 1,3-phenylenebis (4-aminobenzoate), 1,3-phenylenebis (3-aminobenzoate), N, N ′-( 1,4-phenylene) bis (4-aminobenzamide), N, N ′-(1,3-phenylene) bis (4-aminobenzamide), N, N ′-(1,4-phenylene) bis (3- Aminobenzamide), N, N ′-(1,3-phenylene) bis (3-aminobenzamide), bis (4-aminophenyl) terephthalamide, bis (3-aminophenyl) terephthalamide, bis (4-aminophenyl) ) Isophthalamide, bis (3-aminophenyl) isophthalamide, 2,2-bis [4- (4-aminophenoxy) phenyl] propane, 2,2-bis [4- (4 Aminophenoxy) phenyl] hexafluoropropane, 4,4'-bis (4-aminophenoxy) diphenylsulfone, 2,6-diaminopyridine, 2,4-diaminopyridine, 2,4-diamino-1,3,5- Triazine, 2,6-diaminodibenzofuran, 2,7-diaminodibenzofuran, 3,6-diaminodibenzofuran, 2,6-diaminocarbazole, 2,7-diaminocarbazole, 3,6-diaminocarbazole, 2,4-diamino- 6-isopropyl-1,3,5-triazine, 2,5-bis (4-aminophenyl) -1,3,4-oxadiazole, 1,4-diaminocyclohexane, 1,3-diaminocyclohexane, bis ( 4-aminocyclohexyl) methane, bis (4-amino-3-methylcyclohexyl) me Emissions, and the like.
このような環構造を有するジカルボン酸二無水物の具体例としては、フタル酸無水物、トリメリット酸無水物、無水マレイン酸、ナフタル酸無水物、水素化フタル酸無水物、メチル-5-ノルボルネン-2,3-ジカルボン酸無水物、無水イタコン酸、テトラヒドロフタル酸無水物等を挙げることができる。 In the formula (iv), the ring structure of Q is preferably a benzene ring, an alicyclic group having 4 to 8 carbon atoms, or a condensed polycyclic hydrocarbon having 7 to 16 carbon atoms. More preferable Q is a benzene ring, an alicyclic group having 4 to 8 carbon atoms, or a condensed polycyclic hydrocarbon having 7 to 16 carbon atoms.
Specific examples of the dicarboxylic dianhydride having such a ring structure include phthalic anhydride, trimellitic anhydride, maleic anhydride, naphthalic anhydride, hydrogenated phthalic anhydride, methyl-5-norbornene -2,3-dicarboxylic anhydride, itaconic anhydride, tetrahydrophthalic anhydride and the like.
これらの溶媒は単独でも、混合して使用しても良いが、溶解性の点からプロピレングリコールモノメチルエーテル、プロピレングリコールモノメチルエーテルアセテート、N,N-ジメチルアセトアミド、N-メチル-2-ピロリドン、ジメチルイミダゾールが好ましい。
さらに、アミノ基含有カルボン酸化合物を溶解しない溶剤であっても、重合反応により生成した該化合物が析出しない範囲で、前記溶剤に混合して使用してもよい。 The reaction is usually performed in a solvent. The solvent that can be used in this case is not particularly limited as long as it does not contain a functional group that reacts with an acid anhydride, such as a hydroxyl group or an amino group. For example, N, N-dimethylformamide, N, N-dimethylacetamide, N-methyl-2-pyrrolidone, N-vinylpyrrolidone, N-methylcaprolactam, dimethylimidazole, dimethylsulfoxide, tetramethylurea, dimethylsulfone, hexamethylsulfoxide , M-cresol, γ-butyrolactone, cyclohexanone, cyclopentanone, methyl ethyl ketone, methyl isobutyl ketone, 2-heptanone, propylene glycol monomethyl ether acetate, propylene glycol propyl ether acetate, methyl 3-methoxypropionate, methyl 2-methoxypropionate Ethyl 3-methoxypropionate, ethyl 2-methoxypropionate, ethyl 3-ethoxypropionate, ethyl 2-ethoxypropionate , Methyl cellosolve acetate, ethyl cellosolve acetate, methyl cellosolve, ethyl cellosolve, butyl cellosolve, propylene glycol monomethyl ether, propylene glycol propyl ether, cyclohexanol, ethyl acetate, butyl acetate, ethyl lactate, butyl lactate, etc. Can do.
These solvents may be used alone or in combination, but from the viewpoint of solubility, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, N, N-dimethylacetamide, N-methyl-2-pyrrolidone, dimethylimidazole Is preferred.
Further, even a solvent that does not dissolve the amino group-containing carboxylic acid compound may be used by mixing with the solvent as long as the compound produced by the polymerization reaction does not precipitate.
(D)成分である1,2-キノンジアジド化合物としては、水酸基又はアミノ基のいずれか一方か、水酸基及びアミノ基の両方を有する化合物であって、これらの水酸基又はアミノ基(水酸基とアミノ基の両方を有する場合は、それらの合計量)のうち、好ましくは10乃至100モル%、特に好ましくは20乃至95モル%が1,2-キノンジアジドスルホン酸でエステル化、またはアミド化された化合物を用いることができる。 <(D) component>
The 1,2-quinonediazide compound as component (D) is a compound having either a hydroxyl group or an amino group, both a hydroxyl group and an amino group, and these hydroxyl groups or amino groups (of hydroxyl groups and amino groups). In the case where both are included, a compound in which 10 to 100 mol%, particularly preferably 20 to 95 mol% of the total amount) is esterified or amidated with 1,2-quinonediazidesulfonic acid is used. be able to.
本発明においては(E)成分として下記の式(3)で表されるビスマレイミド化合物を含有しても良い。
(E)成分であるビスマレイミド化合物は、平坦化性を向上させることができる。
In the present invention, a bismaleimide compound represented by the following formula (3) may be contained as the component (E).
The bismaleimide compound as component (E) can improve planarization.
これらは、単独で又は2種以上の成分を併用することが可能である。 Examples of such bismaleimide compounds include N, N′-3,3-diphenylmethane bismaleimide, N, N ′-(3,3-diethyl-5,5-dimethyl) -4,4-diphenyl-methane. Bismaleimide, N, N′-4,4-diphenylmethane bismaleimide, 3,3-diphenylsulfone bismaleimide, 4,4-diphenylsulfone bismaleimide, N, N′-p-benzophenone bismaleimide, N, N′— Diphenylethane bismaleimide, N, N′-diphenyl ether bismaleimide, N, N ′-(methylenedi-ditetrahydrophenyl) bismaleimide, N, N ′-(3-ethyl) -4,4-diphenylmethane bismaleimide, N, N ′-(3,3-dimethyl) -4,4-diphenylmethane bismaleimide, N, N ′-(3,3-die Til) -4,4-diphenylmethane bismaleimide, N, N ′-(3,3-dichloro) -4,4-diphenylmethane bismaleimide, N, N′-isophorone bismaleimide, N, N′-tolidine bismaleimide, N, N′-diphenylpropane bismaleimide, N, N′-naphthalene bismaleimide, N, N′-m-phenylene bismaleimide, N, N′-5-methoxy-1,3-phenylene bismaleimide, 2,2 -Bis (4- (4-maleimidophenoxy) phenyl) propane, 2,2-bis (3-chloro-4- (4-maleimidophenoxy) phenyl) propane, 2,2-bis (3-bromo-4- ( 4-maleimidophenoxy) phenyl) propane, 2,2-bis (3-ethyl-4- (4-maleimidophenoxy) phenyl) propane, 2,2- Bis (3-propyl-4- (4-maleimidophenoxy) phenyl) propane, 2,2-bis (3-isopropyl-4- (4-maleimidophenoxy) phenyl) propane, 2,2-bis (3-butyl- 4- (4-maleimidophenoxy) phenyl) propane, 2,2-bis (3-methoxy-4- (4-maleimidophenoxy) phenyl) propane, 1,1-bis (4- (4-maleimidophenoxy) phenyl) Ethane, 1,1-bis (3-methyl-4- (4-maleimidophenoxy) phenyl) ethane, 1,1-bis (3-chloro-4- (4-maleimidophenoxy) phenyl) ethane, 1,1- Bis (3-bromo-4- (4-maleimidophenoxy) phenyl) ethane, 3,3-bis (4- (4-maleimidophenoxy) phenyl) pen 1,1,1,3,3,3-hexafluoro-2,2-bis (4- (4-maleimidophenoxy) phenyl) propane, 1,1,1,3,3,3-hexafluoro- 2,2-bis (3,5-dimethyl-4- (4-maleimidophenoxy) phenyl) propane, 1,1,1,3,3,3-hexafluoro-2,2-bis (3,5-dibromo -4- (4-maleimidophenoxy) phenyl) propane, N, N'-ethylenedimaleimide, N, N'-hexamethylene bismaleimide, N, N'-dodecamethylene bismaleimide, N, N'-m-xylene Bismaleimide, N, N′-p-xylene bismaleimide, N, N′-1,3-bismethylenecyclohexane bismaleimide, N, N′-2,4-tolylene bismaleimide, N, N′-2, 6-Trilembi And maleimide. These bismaleimide compounds are not particularly limited to those described above.
These can be used alone or in combination of two or more components.
本発明の熱硬化膜形成用感光性ポリエステル組成物は、溶剤に溶解した溶液状態で用いられることが多い。その際に用いられる溶剤は、(A)成分乃至(D)成分、必要に応じて(E)成分、及び/又は、後述するその他添加剤を溶解するものであり、斯様な溶解能を有する溶剤であれば、その種類及び構造などは特に限定されるものでない。 <Solvent>
The photosensitive polyester composition for forming a thermosetting film of the present invention is often used in a solution state dissolved in a solvent. The solvent used in that case is a component that dissolves the components (A) to (D), and if necessary, the component (E) and / or other additives described later, and has such solubility. If it is a solvent, the kind and structure thereof are not particularly limited.
更に、本発明の熱硬化膜形成用感光性ポリエステル組成物は、本発明の効果を損なわない限りにおいて、必要に応じて、界面活性剤、レオロジー調整剤、シランカップリング剤等の接着補助剤、顔料、染料、保存安定剤、消泡剤、多価フェノールや多価カルボン酸等の溶解促進剤等を含有することができる。 <Other additives>
Furthermore, the photosensitive polyester composition for forming a thermosetting film of the present invention, as long as the effects of the present invention are not impaired, an adhesion aid such as a surfactant, a rheology modifier, a silane coupling agent, Pigments, dyes, storage stabilizers, antifoaming agents, dissolution accelerators such as polyhydric phenols and polycarboxylic acids can be contained.
本発明の熱硬化膜形成用感光性ポリエステル組成物は、(A)成分のポリエステル、(B)成分のエポキシ基を2個以上有するエポキシ化合物、(C)成分のアミノ基含有カルボン酸化合物、(D)成分の1,2-キノンジアジド化合物を含有し、所望により(E)成分のビスマレイミド化合物、更にその他添加剤のうち一種以上を含有することができる組成物である。そして、通常は、それらが溶剤に溶解した溶液として用いられることが多い。 <Photosensitive polyester composition for thermosetting film formation>
The photosensitive polyester composition for forming a thermosetting film of the present invention comprises (A) component polyester, (B) component epoxy compound having two or more epoxy groups, (C) amino group-containing carboxylic acid compound, ( The composition contains a 1,2-quinonediazide compound as component D) and can optionally contain one or more of the bismaleimide compound as component (E) and other additives. Usually, they are often used as a solution in which they are dissolved in a solvent.
[1]:(A)成分100質量部に基づいて、3乃至50質量部の(B)成分、3乃至50質量部の(C)成分、5乃至80質量部の(D)成分を含有する熱硬化膜形成用感光性ポリエステル組成物。
[2]:(A)成分100質量部に基づいて、3乃至50質量部の(B)成分、3乃至50質量部の(C)成分、5乃至80質量部の(D)成分、溶剤を含有する熱硬化膜形成用感光性ポリエステル組成物。
[3]:(A)成分100質量部に基づいて、3乃至50質量部の(B)成分、3乃至50質量部の(C)成分、5乃至80質量部の(D)成分、0.5乃至50質量部の(E)成分を含有する熱硬化膜形成用感光性ポリエステル組成物。
[4]:(A)成分100質量部に基づいて、3乃至50質量部の(B)成分、3乃至50質量部の(C)成分、5乃至80質量部の(D)成分、0.5乃至50質量部の(E)成分、溶剤を含有する熱硬化膜形成用感光性ポリエステル組成物。 Especially, the preferable example of the photosensitive polyester composition for thermosetting film formation of this invention is as follows.
[1]: Based on 100 parts by mass of component (A), 3 to 50 parts by mass of component (B), 3 to 50 parts by mass of component (C), and 5 to 80 parts by mass of component (D). Photosensitive polyester composition for thermosetting film formation.
[2]: Based on 100 parts by mass of component (A), 3 to 50 parts by mass of component (B), 3 to 50 parts by mass of component (C), 5 to 80 parts by mass of component (D), and solvent. A photosensitive polyester composition for forming a thermosetting film.
[3]: Based on 100 parts by mass of component (A), 3 to 50 parts by mass of component (B), 3 to 50 parts by mass of component (C), 5 to 80 parts by mass of component (D), A photosensitive polyester composition for forming a thermosetting film containing 5 to 50 parts by mass of the component (E).
[4]: Based on 100 parts by mass of component (A), 3 to 50 parts by mass of component (B), 3 to 50 parts by mass of component (C), 5 to 80 parts by mass of component (D), The photosensitive polyester composition for thermosetting film formation containing 5 thru | or 50 mass parts (E) component and a solvent.
本発明の熱硬化膜形成用感光性ポリエステル組成物における固形分の割合は、各成分が均一に溶剤に溶解している限り、特に限定されるものではないが、1乃至80質量%であり、好ましくは5乃至60質量%であり、より好ましくは10乃至50質量%である。ここで、固形分とは、熱硬化膜形成用感光性ポリエステル組成物の全成分から溶剤を除いたものをいう。 The blending ratio, preparation method, and the like when the photosensitive polyester composition for forming a thermosetting film of the present invention is used as a solution will be described in detail below.
The ratio of the solid content in the photosensitive polyester composition for thermosetting film formation of the present invention is not particularly limited as long as each component is uniformly dissolved in the solvent, but is 1 to 80% by mass, The amount is preferably 5 to 60% by mass, more preferably 10 to 50% by mass. Here, solid content means what remove | excluded the solvent from all the components of the photosensitive polyester composition for thermosetting film formation.
本発明の熱硬化膜形成用感光性ポリエステル組成物を基板(例えば、シリコン/二酸化シリコン被覆基板、シリコンナイトライド基板、金属、例えば、アルミニウム、モリブデン、クロムなどが被覆された基板、ガラス基板、石英基板、ITO基板等)やフィルム(例えば、トリアセチルセルロースフィルム、ポリエステルフィルム、アクリルフィルム等の樹脂フィルム)等の上に、回転塗布、流し塗布、ロール塗布、スリット塗布、スリットに続いた回転塗布、インクジェット塗布、印刷などによって塗布し、その後、ホットプレート又はオーブン等で予備乾燥(プリベーク)することにより、塗膜を形成することができる。その後、この塗膜を加熱処理することにより、被膜が形成される。 <Coating film, cured film and liquid crystal alignment layer>
The photosensitive polyester composition for forming a thermosetting film of the present invention is coated with a substrate (for example, a silicon / silicon dioxide coated substrate, a silicon nitride substrate, a substrate coated with a metal such as aluminum, molybdenum, chromium, etc., a glass substrate, quartz Substrate, ITO substrate, etc.) and film (for example, resin film such as triacetyl cellulose film, polyester film, acrylic film), etc., spin coating, flow coating, roll coating, slit coating, spin coating following slit, A coating film can be formed by coating by inkjet coating, printing, etc., and then pre-drying (pre-baking) with a hot plate or oven. Then, a coating film is formed by heat-processing this coating film.
ラビング処理の条件としては、一般に回転速度300乃至1000rpm、送り速度3乃至200mm/秒、押し込み量0.1乃至1mmという条件が用いられる。
その後、純水等を用いて超音波洗浄によりラビングにより生じた残渣が除去される。 The cured film thus formed can be made to function as a liquid crystal material alignment layer, that is, a layer for aligning a compound having liquid crystallinity, by performing a rubbing treatment.
As conditions for the rubbing treatment, generally, conditions of a rotational speed of 300 to 1000 rpm, a feed speed of 3 to 200 mm / second, and an indentation amount of 0.1 to 1 mm are used.
Thereafter, the residue generated by rubbing is removed by ultrasonic cleaning using pure water or the like.
位相差材料としては、例えば、重合性基を有する液晶モノマーやそれを含有する組成物等が用いられる。 After coating the retardation material on the liquid crystal alignment layer thus formed, the retardation material can be photocured in a liquid crystal state to form a layer having optical anisotropy.
As the retardation material, for example, a liquid crystal monomer having a polymerizable group or a composition containing the same is used.
以下の実施例で用いる略記号の意味は、次のとおりである。
<ポリエステル原料>
BPDA:ビフェニルテトラカルボン酸二無水物
HBPDA:3,3’-4,4’-ビシクロヘキシルテトラカルボン酸二無水物
HBPA:水素化ビスフェノールA
THPA:1,2,5,6-テトラヒドロフタル酸無水物
BTEAC:ベンジルトリエチルアンモニウムクロライド
TPPB:テトラフェニルホスホニウムブロミド
GMA:グリシジルメタクリレート
GME:グリシジルメチルエーテル
DTBC:ジ―tert―ブチルクレゾール
<ポリイミド前駆体及びアミノ基含有カルボン酸化合物原料>
CBDA:シクロヘキサンテトラカルボン酸二無水物
DA-4P:1,3-ビス(4-アミノフェニル)ベンゼン
DA-1M:4,4’-ビス(4-アミノフェノキシ)ジフェニルスルホン
TA:トリメリット酸無水物
DDS:4,4’-ジアミノジフェニルスルホン
pDA:p-フェニレンジアミン
<アクリル共重合体原料>
MAA:メタクリル酸
MMA:メチルメタクリレート
HEMA:2-ヒドロキシエチルメタクリレート
CHMI:N-シクロヘキシルマレイミド
AIBN:アゾビスイソブチロニトリル
<エポキシ化合物>
CEL:ダイセル化学工業(株)製 セロキサイドP-2021(製品名)(化合物名:3,4-エポキシシクロヘキセニルメチル-3',4'-エポキシシクロヘキセンカルボキシレート)
<ビスマレイミド化合物>
BMI1:N,N’-(3,3-ジエチル-5,5-ジメチル)-4,4-ジフェニル-メタンビスマレイミド
<1,2-キノンジアジド化合物>
QD1:1,3,3-トリス(4-ヒドロキシフェニル)ブタン 1molと1,2-ナフトキノン-2-ジアジド-5-スルホニルクロリド 2molとの縮合反応によって合成される化合物。
QD2:α、α、α’-トリス(4-ヒドロキシフェニル)-1-エチル-4-イソプロピルベンゼン 1molと1,2-ナフトキノン-2-ジアジド-5-スルホニルクロリド 2molとの縮合反応によって合成される化合物。
<溶剤>
PGMEA:プロピレングリコールモノメチルエーテルアセテート
PGME:プロプレングリコールモノメチルエーテル
DMAc:N,N-ジメチルアセトアミド
NMP:N-メチル-2-ピロリドン [Abbreviations used in Examples]
The meanings of the abbreviations used in the following examples are as follows.
<Polyester raw material>
BPDA: biphenyltetracarboxylic dianhydride HBPDA: 3,3′-4,4′-bicyclohexyltetracarboxylic dianhydride HBPA: hydrogenated bisphenol A
THPA: 1,2,5,6-tetrahydrophthalic anhydride BTEAC: benzyltriethylammonium chloride TPPB: tetraphenylphosphonium bromide GMA: glycidyl methacrylate GME: glycidyl methyl ether DTBC: di-tert-butylcresol <polyimide precursor and amino Group-containing carboxylic acid compound raw material>
CBDA: cyclohexanetetracarboxylic dianhydride DA-4P: 1,3-bis (4-aminophenyl) benzene DA-1M: 4,4′-bis (4-aminophenoxy) diphenyl sulfone TA: trimellitic anhydride DDS: 4,4′-diaminodiphenyl sulfone pDA: p-phenylenediamine <Acrylic copolymer raw material>
MAA: methacrylic acid MMA: methyl methacrylate HEMA: 2-hydroxyethyl methacrylate CHMI: N-cyclohexylmaleimide AIBN: azobisisobutyronitrile <epoxy compound>
CEL: Daicel Chemical Industries, Ltd. Celoxide P-2021 (product name) (compound name: 3,4-epoxycyclohexenylmethyl-3 ′, 4′-epoxycyclohexene carboxylate)
<Bismaleimide compound>
BMI1: N, N ′-(3,3-diethyl-5,5-dimethyl) -4,4-diphenyl-methane bismaleimide <1,2-quinonediazide compound>
QD1: a compound synthesized by a condensation reaction of 1 mol of 1,3,3-tris (4-hydroxyphenyl) butane and 2 mol of 1,2-naphthoquinone-2-diazide-5-sulfonyl chloride.
QD2: synthesized by a condensation reaction of 1 mol of α, α, α'-tris (4-hydroxyphenyl) -1-ethyl-4-isopropylbenzene and 2 mol of 1,2-naphthoquinone-2-diazide-5-sulfonyl chloride Compound.
<Solvent>
PGMEA: Propylene glycol monomethyl ether acetate PGME: Propylene glycol monomethyl ether DMAc: N, N-dimethylacetamide NMP: N-methyl-2-pyrrolidone
HBPDA 40.0g、BPDA 8.23g、HBPA 49.3g、THPA 5.96g、BTEAC 0.18g、TPPB 0.33gをPGMEA 241.96g中にて120℃で17時間反応させることにより、特定重合体の溶液(固形分濃度:30.0質量%)を得た(P1)。得られた特定重合体のMnは1,500、Mwは3,430であった。 <Synthesis Example 1>
By reacting 40.0 g of HBPDA, 8.23 g of BPDA, 49.3 g of HBPA, 5.96 g of THPA, 0.18 g of BTEAC and 0.33 g of TPPB in PGMEA 241.96 g at 120 ° C. for 17 hours, a specific polymer (Solid content concentration: 30.0 mass%) was obtained (P1). The obtained specific polymer had Mn of 1,500 and Mw of 3,430.
合成例1で得られた特定重合体の溶液(P1) 252.00gにGMA 18.42g、DTBC 0.057g、PGME 42.99gを加え110℃で9時間反応させることにより、ポリエステル溶液(固形分濃度:30.0質量%)を得た(P2)。得られたポリエステルのMnは1,260、Mwは6,880であった。 <Synthesis Example 2>
A solution (P1) of the specific polymer obtained in Synthesis Example 1 was added 18.42 g of GMA, 0.057 g of DTBC and 42.99 g of PGME to 252.00 g and reacted at 110 ° C. for 9 hours to obtain a polyester solution (solid content (Concentration: 30.0% by mass) was obtained (P2). Mn of the obtained polyester was 1,260 and Mw was 6,880.
合成例1で得られた特定重合体の溶液(P1) 252.00gにGME 11.16g、PGME 26.05gを加え110℃で9時間反応させることにより、ポリエステル溶液(固形分濃度:30.0質量%)を得た(P3)。得られたポリエステルのMnは1,450、Mwは5,340であった。 <Synthesis Example 3>
A polyester solution (solid content concentration: 30.0) was prepared by adding 11.16 g of GME and 26.05 g of PGME to 252.00 g of the specific polymer solution (P1) obtained in Synthesis Example 1 and reacting at 110 ° C. for 9 hours. % By mass) was obtained (P3). Mn of the obtained polyester was 1,450 and Mw was 5,340.
DA-1M 15.14g、THPA 10.64gをPGME 60.15g中にて23℃で24時間反応させることにより、アミノ基含有カルボン酸化合物溶液(固形分濃度30.0質量%)を得た(A1)。得られたアミノ基含有カルボン酸化合物は高速液体クロマトグラフィーを用いてTHPAが残存していないことを確認した。 <Synthesis Example 4>
DA-1M 15.14 g and THPA 10.64 g were reacted in PGME 60.15 g at 23 ° C. for 24 hours to obtain an amino group-containing carboxylic acid compound solution (solid content concentration 30.0 mass%) ( A1). The obtained amino group-containing carboxylic acid compound was confirmed to be free of THPA using high performance liquid chromatography.
DA-4P 10.23g、THPA 10.64gをPGME 48.71g中にて23℃で24時間反応させることにより、アミノ基含有カルボン酸化合物溶液(固形分濃度30.0質量%)を得た(A2)。得られたアミノ基含有カルボン酸化合物は高速液体クロマトグラフィーを用いてTHPAが残存していないことを確認した。 <Synthesis Example 5>
By reacting 10.43 g of DA-4P and 10.64 g of THPA in 48.71 g of PGME at 23 ° C. for 24 hours, an amino group-containing carboxylic acid compound solution (solid content concentration: 30.0% by mass) was obtained ( A2). The obtained amino group-containing carboxylic acid compound was confirmed to be free of THPA using high performance liquid chromatography.
BPDA 40.0g、HBPA 35.3g、THPA 3.31g、BTEAC 0.77gをPGMEA 175.7g中にて120℃で19時間反応させることにより、特定重合体の溶液(固形分濃度:30.0質量%)を得た。得られた特定重合体のMnは1,100、Mwは2,580であった。この特定重合体の溶液 252.00gにGMA 18.42g、DTBC 0.057g、PGME 42.99gを加え110℃で9時間反応させることにより、ポリエステル溶液(固形分濃度:30.0質量%)を得た(P4)。得られたポリエステルのMnは1,580、Mwは7,540であった。 <Synthesis Example 6>
By reacting 40.0 g of BPDA, 35.3 g of HBPA, 3.31 g of THPA, 0.77 g of BTEAC in PGMEA 175.7 g at 120 ° C. for 19 hours, a solution of a specific polymer (solid content concentration: 30.0) Mass%). The obtained specific polymer had Mn of 1,100 and Mw of 2,580. By adding 18.42 g of GMA, 0.057 g of DTBC and 42.99 g of PGME to 252.00 g of this specific polymer solution and reacting at 110 ° C. for 9 hours, a polyester solution (solid content concentration: 30.0 mass%) was obtained. Obtained (P4). Mn of the obtained polyester was 1,580 and Mw was 7,540.
CBDA 17.7g、pDA10.2gをNMP 66.4g中にて23℃で24時間反応させることにより、ポリイミド前駆体溶液(固形分濃度:30.0質量%)を得た(P5)。得られたポリイミド前駆体のMnは5,800、Mwは12,500であった。 <Synthesis Example 7>
By reacting 17.7 g of CBDA and 10.2 g of pDA in 66.4 g of NMP at 23 ° C. for 24 hours, a polyimide precursor solution (solid content concentration: 30.0 mass%) was obtained (P5). Mn of the obtained polyimide precursor was 5,800 and Mw was 12,500.
モノマー成分として、MAA 10.9g、CHMI 35.3g、HEMA 25.5g、MMA 28.3gを使用し、ラジカル重合開始剤としてAIBN 5gを使用し、これらを溶剤PGMEA 150g中において温度60℃乃至100℃で重合反応させることにより、アクリル共重合体溶液(固形分濃度:40.0質量%)を得た(P6)。得られたアクリル共重合体の溶液のMnは3,800、Mwは6,700であった。 <Synthesis Example 8>
As monomer components, MAA 10.9 g, CHMI 35.3 g, HEMA 25.5 g, MMA 28.3 g are used, and AIBN 5 g is used as a radical polymerization initiator, and these are used in a solvent PGMEA 150 g at a temperature of 60 ° C. to 100 ° C. An acrylic copolymer solution (solid content concentration: 40.0% by mass) was obtained by performing a polymerization reaction at ° C (P6). Mn of the obtained acrylic copolymer solution was 3,800, and Mw was 6,700.
表1に示す組成にて実施例1乃至5及び比較例1乃至5の各組成物を調製し、該組成物から得られる硬化膜について、平坦化性、溶剤耐性、配向性、耐熱性、パターン形成性、並びに透過率の評価を行った。 <Examples 1 to 5 and Comparative Examples 1 to 5>
Each composition of Examples 1 to 5 and Comparative Examples 1 to 5 was prepared with the composition shown in Table 1, and the cured film obtained from the composition was flattened, solvent resistant, oriented, heat resistant, and patterned. Formability and transmittance were evaluated.
実施例1乃至実施例5並びに比較例1乃至比較例5の各組成物を高さ0.5μm、ライン幅10μm、ライン間スペース50μmの段差基板(ガラス製)上にスピンコーターを用いて塗布した後、温度110℃で120秒間ホットプレート上においてプリベークを行い、膜厚2.8μmの塗膜を形成した。膜厚はFILMETRICS社製 F20を用いて測定した。この塗膜を温度230℃で30分間加熱することによりポストベークを行い、膜厚2.5μmの硬化膜を形成した。
段差基板ライン上の塗膜とスペース上の塗膜の膜厚差を測定し(図1参照)、平坦化率(DOP)=100×〔1-{塗膜の膜厚差(μm)/段差基板の高さ(0.5μm)}〕の式を用いて平坦化率を求めた。 [Evaluation of flatness]
Each composition of Examples 1 to 5 and Comparative Examples 1 to 5 was applied on a stepped substrate (made of glass) having a height of 0.5 μm, a line width of 10 μm, and a space between lines of 50 μm using a spin coater. Thereafter, pre-baking was performed on a hot plate at a temperature of 110 ° C. for 120 seconds to form a coating film having a thickness of 2.8 μm. The film thickness was measured using F20 manufactured by FILMETRICS. This coating film was post-baked by heating at a temperature of 230 ° C. for 30 minutes to form a cured film having a thickness of 2.5 μm.
The film thickness difference between the coating film on the stepped substrate line and the coating film on the space is measured (see FIG. 1), and the flattening ratio (DOP) = 100 × [1− {film thickness difference (μm) / step difference The flattening rate was obtained using the formula of height of substrate (0.5 μm)}].
実施例1乃至実施例5並びに比較例1乃至比較例5の各組成物をガラス基板上にスピンコーターを用いて塗布した後、温度110℃で120秒間ホットプレート上においてプリベークを行い、膜厚2.8μmの塗膜を形成した。膜厚はFILMETRICS社製 F20を用いて測定した。この塗膜に10μmのライン&スペースパターンを有するマスクを介し、キヤノン(株)製紫外線照射装置PLA-600FAにより365nmにおける光強度が5.5mW/cm2の紫外線を100mJ/cm2照射した。その後0.2質量%の水酸化テトラメチルアンモニウム(以下、TMAHと称す)水溶液に60秒間浸漬することで現像を行った後、超純水で20秒間流水洗浄を行った。得られたライン&スペースパターンを光学顕微鏡で観察し、マスク設計どおりのパターンが得られているものを○、パターンが解像されていないものや現像時に溶解したものを×とした。 [Evaluation of pattern formability]
Each composition of Example 1 to Example 5 and Comparative Example 1 to Comparative Example 5 was applied on a glass substrate using a spin coater, and then prebaked on a hot plate at a temperature of 110 ° C. for 120 seconds to obtain a film thickness of 2 A film having a thickness of 8 μm was formed. The film thickness was measured using F20 manufactured by FILMETRICS. This coating film was irradiated with 100 mJ / cm 2 of ultraviolet light having a light intensity of 5.5 mW / cm 2 at 365 nm through an ultraviolet irradiation device PLA-600FA manufactured by Canon Inc. through a mask having a 10 μm line & space pattern. Thereafter, development was performed by immersing in a 0.2 mass% aqueous solution of tetramethylammonium hydroxide (hereinafter referred to as TMAH) for 60 seconds, followed by washing with running ultrapure water for 20 seconds. The obtained line & space pattern was observed with an optical microscope. The pattern obtained according to the mask design was indicated as ◯, and the pattern not resolved or dissolved during development was indicated as x.
実施例1乃至実施例5並びに比較例1乃至比較例5の各組成物をシリコンウェハにスピンコーターを用いて塗布した後、温度100℃で120秒間ホットプレート上においてプリベークを行い、膜厚2.8μmの塗膜を形成した。膜厚はFILMETRICS社製 F20を用いて測定した。この塗膜を温度230℃で30分間ホットプレート上においてポストベークを行い、膜厚2.5μmの硬化膜を形成した。
この硬化膜をPGMEA又はNMP中に60秒間浸漬させた後、それぞれ温度100℃にて60秒間乾燥し、膜厚を測定した。PGMEA又はNMP浸漬後の膜厚変化がないものを○、浸漬後に膜厚の減少が見られたものを×とした。 [Evaluation of solvent resistance]
After each composition of Examples 1 to 5 and Comparative Examples 1 to 5 was applied to a silicon wafer using a spin coater, it was pre-baked on a hot plate at a temperature of 100 ° C. for 120 seconds to obtain a film thickness of 2. An 8 μm coating film was formed. The film thickness was measured using F20 manufactured by FILMETRICS. This coating film was post-baked on a hot plate at a temperature of 230 ° C. for 30 minutes to form a cured film having a thickness of 2.5 μm.
This cured film was immersed in PGMEA or NMP for 60 seconds, and then dried at a temperature of 100 ° C. for 60 seconds, and the film thickness was measured. The case where there was no change in the film thickness after immersion in PGMEA or NMP was marked with ○, and the case where the film thickness decreased after immersion was marked with x.
実施例1乃至実施例5並びに比較例1乃至比較例5の各組成物を石英基板上にスピンコーターを用いて塗布した後、温度100℃で120秒間ホットプレート上においてプリベークを行い、膜厚2.8μmの塗膜を形成した。膜厚はFILMETRICS社製 F20を用いて測定した。この塗膜を0.2質量%のTMAH水溶液に60秒間浸漬することで現像を行った後、超純水で20秒間流水洗浄を行った。その後、キヤノン(株)製紫外線照射装置PLA-600FAにより365nmにおける光強度が5.5mW/cm2の紫外線を500mJ/cm2照射した。この塗膜を温度230℃で30分間ホットプレート上においてポストベークを行い硬化膜を形成した。
この硬化膜を紫外線可視分光光度計((株)島津製作所製SHIMADSU UV-2550型番)を用いて波長400nm時の透過率を測定した。 [Evaluation of light transmittance (transparency)]
Each composition of Examples 1 to 5 and Comparative Examples 1 to 5 was applied on a quartz substrate using a spin coater, and then pre-baked on a hot plate at a temperature of 100 ° C. for 120 seconds to obtain a film thickness of 2 A film having a thickness of 8 μm was formed. The film thickness was measured using F20 manufactured by FILMETRICS. Development was performed by immersing this coating film in a 0.2% by weight TMAH aqueous solution for 60 seconds, and then washing with running ultrapure water for 20 seconds. Thereafter, ultraviolet light having a light intensity at 365 nm of 5.5 mW / cm 2 was irradiated with 500 mJ / cm 2 by an ultraviolet irradiation device PLA-600FA manufactured by Canon Inc. This coating film was post-baked on a hot plate at a temperature of 230 ° C. for 30 minutes to form a cured film.
The cured film was measured for transmittance at a wavelength of 400 nm using an ultraviolet-visible spectrophotometer (SHIMADSU UV-2550 model number, manufactured by Shimadzu Corporation).
実施例1乃至実施例5並びに比較例1乃至比較例5の各組成物をITO基板上にスピンコーターを用いて塗布した後、温度100℃で120秒間ホットプレート上においてプリベークを行い、膜厚2.8μmの塗膜を形成した。膜厚はFILMETRICS社製 F20を用いて測定した。この膜を温度230℃で30分間ホットプレート上においてポストベークを行い硬化膜を形成した。
この硬化膜を回転速度300rpm、送り速度10mm/秒、押し込み量0.45mmでラビング処理した。ラビング処理した基板を純水で5分間超音波洗浄した。この基板上に液晶モノマーからなる位相差材料をスピンコーターを用いて塗布した後、100℃で40秒間、55℃で30秒間ホットプレート上においてプリベークを行い膜厚1.1μmの塗膜を形成した。この基板を窒素雰囲気下2,000mJで露光した。作製した基板を偏向板に挟み、配向性を目視にて確認した。基板を45度に傾けた時と傾けない時で光の透過性が著しく変化するものを○、変化しないものを×とした。 [Evaluation of orientation]
Each composition of Examples 1 to 5 and Comparative Examples 1 to 5 was applied on an ITO substrate using a spin coater and then pre-baked on a hot plate at a temperature of 100 ° C. for 120 seconds to obtain a film thickness of 2 A film having a thickness of 8 μm was formed. The film thickness was measured using F20 manufactured by FILMETRICS. This film was post-baked on a hot plate at a temperature of 230 ° C. for 30 minutes to form a cured film.
The cured film was rubbed at a rotational speed of 300 rpm, a feed speed of 10 mm / second, and an indentation amount of 0.45 mm. The rubbed substrate was ultrasonically cleaned with pure water for 5 minutes. A retardation material composed of a liquid crystal monomer was applied onto the substrate using a spin coater, and then prebaked on a hot plate at 100 ° C. for 40 seconds and at 55 ° C. for 30 seconds to form a coating film having a thickness of 1.1 μm. . This substrate was exposed at 2,000 mJ in a nitrogen atmosphere. The produced substrate was sandwiched between deflection plates, and the orientation was confirmed visually. The case where the light transmittance changed significantly when the substrate was tilted at 45 degrees and the case where the substrate was not tilted was evaluated as ◯, and the case where the substrate did not change as x.
実施例1乃至実施例5並びに比較例1乃至比較例5の各組成物を石英基板上にスピンコーターを用いて塗布した後、温度100℃で120秒間ホットプレート上においてプリベークを行った後、温度230℃で30分間ホットプレート上においてポストベークを行い、硬化膜を形成し、膜厚をFILMETRICS社製 F20を用いて測定した。その後、さらに硬化膜を温度230℃にて60分間ホットプレート上において焼成し再度膜厚を測定し、ポストベーク後からの膜厚の変化率を算出した。なお、耐熱性を有する硬化膜と認められるには、少なくとも膜厚変化率±5%未満の性能を有するものであることが望まれる。 [Evaluation of heat resistance]
After applying each composition of Examples 1 to 5 and Comparative Examples 1 to 5 on a quartz substrate using a spin coater, prebaking on a hot plate at a temperature of 100 ° C. for 120 seconds, Post-baking was performed on a hot plate at 230 ° C. for 30 minutes to form a cured film, and the film thickness was measured using F20 manufactured by FILMETRICS. Thereafter, the cured film was further baked on a hot plate at a temperature of 230 ° C. for 60 minutes, the film thickness was measured again, and the rate of change in film thickness after post-baking was calculated. In order to be recognized as a heat-resistant cured film, it is desirable that the film has a performance of at least a film thickness change rate of less than ± 5%.
以上の評価を行った結果を、次の表2に示す。 [Evaluation results]
The results of the above evaluation are shown in Table 2 below.
比較例2は、露光部が現像液に溶解せずパターン形成ができなかった。
比較例3は、耐熱性が低くパターン形成もできなかった。
比較例4は、平坦化率が低くパターン形成もできなかった。
一方、比較例5は、パターン形成が可能であり、平坦化率、耐熱性、溶剤耐性及び透過率は良好とする結果が得られたが、配向性が劣る結果となった。 In Comparative Example 1, the unexposed part was also dissolved in the developer and the pattern could not be formed.
In Comparative Example 2, the exposed portion was not dissolved in the developer and the pattern could not be formed.
In Comparative Example 3, the heat resistance was low and the pattern could not be formed.
In Comparative Example 4, the flattening rate was low and pattern formation could not be performed.
On the other hand, in Comparative Example 5, pattern formation was possible, and a result that the flattening rate, heat resistance, solvent resistance, and transmittance were good was obtained, but the orientation was poor.
Claims (10)
- (A)成分、(B)成分、(C)成分及び(D)成分を含有する熱硬化膜形成用感光性ポリエステル組成物。
(A)成分:下記式(1)で表される構造単位を含むポリエステルに、グリシジル基及びイソシアナート基から選ばれる官能基を有する化合物を反応させて得られる修飾されたポリエステル
(B)成分:エポキシ基を2個以上有するエポキシ化合物
(C)成分:ジアミン化合物とジカルボン酸二無水物とを反応させて得られるアミノ基含有カルボン酸化合物
(D)成分:1,2-キノンジアジド化合物
Component (A): Modified polyester (B) component obtained by reacting a polyester containing a structural unit represented by the following formula (1) with a compound having a functional group selected from a glycidyl group and an isocyanate group: Epoxy compound (C) component having two or more epoxy groups: amino group-containing carboxylic acid compound (D) component obtained by reacting a diamine compound and dicarboxylic dianhydride: 1,2-quinonediazide compound
- 前記式(1)で表わされる構造単位を含むポリエステルが、下記式(i)で表されるテトラカルボン酸二無水物を含むテトラカルボン酸二無水物成分と、下記式(ii)で表されるジオール化合物を含むジオール成分とを反応させて得られるポリエステルである、請求項1に記載の熱硬化膜形成用感光性ポリエステル組成物。
- 前記式(1)中、Aは下記式(A-1)乃至式(A-8)で表される基から選ばれる少なくとも一種の基を表し、Bは下記式(B-1)乃至式(B-5)で表される基から選ばれる少なくとも一種の基を表す、請求項1又は請求項2に記載の熱硬化膜形成用感光性ポリエステル組成物。
- 前記(A)成分の修飾されたポリエステルは、ポリスチレン換算で1,000乃至30,000の重量平均分子量を有する、請求項1乃至請求項3のうちいずれか一項に記載の熱硬化膜形成用感光性ポリエステル組成物。 4. The thermosetting film forming device according to claim 1, wherein the polyester modified with the component (A) has a weight average molecular weight of 1,000 to 30,000 in terms of polystyrene. 5. Photosensitive polyester composition.
- 前記(C)成分が、ジアミン化合物1モルと、ジカルボン酸二無水物1.7乃至2モルとを反応させて得られるアミノ基含有カルボン酸化合物である、請求項1乃至請求項4のうちいずれか一項に記載の熱硬化膜形成用感光性ポリエステル組成物。 Any one of Claim 1 thru | or 4 whose said (C) component is an amino-group containing carboxylic acid compound obtained by making 1 mol of diamine compounds and 1.7-2 mol of dicarboxylic acid dianhydrides react. The photosensitive polyester composition for thermosetting film formation as described in any one.
- 前記(A)成分の100質量部に基づいて、3乃至50質量部の前記(B)成分、3乃至50質量部の前記(C)成分、5乃至80質量部の前記(D)成分をそれぞれ含有する、請求項1乃至請求項5のうちいずれか一項に記載の熱硬化膜形成用感光性ポリエステル組成物。 Based on 100 parts by mass of the component (A), 3 to 50 parts by mass of the component (B), 3 to 50 parts by mass of the component (C), and 5 to 80 parts by mass of the component (D). The photosensitive polyester composition for thermosetting film formation as described in any one of Claims 1 thru | or 5 containing.
- 更に、(E)成分としてビスマレイミド化合物を含有する、請求項1乃至請求項5のうちいずれか一項に記載の熱硬化膜形成用感光性ポリエステル組成物。 Furthermore, the photosensitive polyester composition for thermosetting film formation as described in any one of Claims 1 thru | or 5 which contains a bismaleimide compound as (E) component.
- 前記(A)成分の100質量部に基づいて、0.5乃至50質量部の請求項7記載の(E)成分を含有する、請求項6に記載の熱硬化膜形成用感光性ポリエステル組成物。 The photosensitive polyester composition for thermosetting film formation according to claim 6, comprising 0.5 to 50 parts by mass of the component (E) according to claim 7 based on 100 parts by mass of the component (A). .
- 請求項1乃至請求項8のうちいずれか一項に記載の熱硬化膜形成用感光性ポリエステル組成物から形成される硬化膜。 A cured film formed from the photosensitive polyester composition for thermosetting film formation according to any one of claims 1 to 8.
- 請求項1乃至請求項8のうちいずれか一項に記載の熱硬化膜形成用感光性ポリエステル組成物を用いて得られる液晶配向層。 A liquid crystal alignment layer obtained using the photosensitive polyester composition for thermosetting film formation according to any one of claims 1 to 8.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201080016297.0A CN102395614B (en) | 2009-04-14 | 2010-04-13 | Photosensitive polyester composition for use in forming thermally cured film |
KR1020117023063A KR101660827B1 (en) | 2009-04-14 | 2010-04-13 | Photosensitive polyester composition for use in forming thermally cured film |
JP2011509300A JP5626536B2 (en) | 2009-04-14 | 2010-04-13 | Photosensitive polyester composition for thermosetting film formation |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009-098425 | 2009-04-14 | ||
JP2009098425 | 2009-04-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2010119868A1 true WO2010119868A1 (en) | 2010-10-21 |
Family
ID=42982530
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2010/056601 WO2010119868A1 (en) | 2009-04-14 | 2010-04-13 | Photosensitive polyester composition for use in forming thermally cured film |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5626536B2 (en) |
KR (1) | KR101660827B1 (en) |
CN (1) | CN102395614B (en) |
TW (1) | TWI500657B (en) |
WO (1) | WO2010119868A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017129768A (en) * | 2016-01-21 | 2017-07-27 | 富士フイルム株式会社 | Photosensitive resin composition, method for producing cured product, cured film, display device, and touch panel |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018028062A (en) * | 2016-08-10 | 2018-02-22 | Jnc株式会社 | Thermosetting composition |
US20200364752A1 (en) * | 2017-08-25 | 2020-11-19 | Nec Corporation | Storefront device, storefront system, storefront management method, and program |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5041998A (en) * | 1973-08-20 | 1975-04-16 | ||
JPS531284A (en) * | 1977-05-30 | 1978-01-09 | Nok Corp | Photosensitive compositions |
JPS5388097A (en) * | 1977-03-04 | 1978-08-03 | Nitto Electric Ind Co Ltd | Epoxy resin composition |
JPH0665335A (en) * | 1992-08-19 | 1994-03-08 | Nippon Kayaku Co Ltd | Curable resin composition and its cured article |
JPH07310048A (en) * | 1994-03-25 | 1995-11-28 | Chisso Corp | Varnish composition |
JPH10120786A (en) * | 1996-10-21 | 1998-05-12 | Nec Corp | Liquid crystal-aligning film material and formation of liquid crystal-aligning film |
JPH10239842A (en) * | 1997-03-03 | 1998-09-11 | Hitachi Chem Co Ltd | Heat-resistant photosensitive polymer composition and manufacture of relief pattern |
JPH10273525A (en) * | 1997-03-31 | 1998-10-13 | Jsr Corp | Alkaline solution-soluble polymer |
JP2001147529A (en) * | 1999-09-23 | 2001-05-29 | Hitachi Chemical Dupont Microsystems Ltd | Photosensitive resin composition, method for producing pattern and electronic parts |
JP2002116541A (en) * | 2000-10-04 | 2002-04-19 | Nissan Chem Ind Ltd | Positive type photosensitive polyimide resin composition |
WO2003072634A1 (en) * | 2002-02-26 | 2003-09-04 | Nippon Kayaku Kabushiki Kaisha | Photosensitive resins, resin compositions and products of curing thereof |
JP2005037920A (en) * | 2003-06-24 | 2005-02-10 | Jsr Corp | Liquid crystal alignment agent, liquid crystal alignment layer, and liquid crystal display element |
WO2008153101A1 (en) * | 2007-06-15 | 2008-12-18 | Nissan Chemical Industries, Ltd. | Resin composition for forming heat-cured film |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3959732B2 (en) | 1998-09-29 | 2007-08-15 | Jsr株式会社 | Thermosetting resin composition |
JP3991349B2 (en) | 1998-10-13 | 2007-10-17 | Jsr株式会社 | Thermosetting resin composition |
US6984262B2 (en) * | 2003-07-16 | 2006-01-10 | Transitions Optical, Inc. | Adhesion enhancing coating composition, process for using and articles produced |
JP4930143B2 (en) | 2006-06-29 | 2012-05-16 | Jnc株式会社 | Composition for protective film, color filter substrate and liquid crystal display device |
JP5061709B2 (en) | 2006-06-29 | 2012-10-31 | Jnc株式会社 | Composition for liquid crystal alignment film, liquid crystal alignment film, and liquid crystal display element |
JP5641250B2 (en) * | 2009-03-31 | 2014-12-17 | 日産化学工業株式会社 | Polyester composition for thermosetting film formation |
-
2010
- 2010-04-13 WO PCT/JP2010/056601 patent/WO2010119868A1/en active Application Filing
- 2010-04-13 JP JP2011509300A patent/JP5626536B2/en active Active
- 2010-04-13 CN CN201080016297.0A patent/CN102395614B/en active Active
- 2010-04-13 KR KR1020117023063A patent/KR101660827B1/en active Active
- 2010-04-14 TW TW099111627A patent/TWI500657B/en active
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5041998A (en) * | 1973-08-20 | 1975-04-16 | ||
JPS5388097A (en) * | 1977-03-04 | 1978-08-03 | Nitto Electric Ind Co Ltd | Epoxy resin composition |
JPS531284A (en) * | 1977-05-30 | 1978-01-09 | Nok Corp | Photosensitive compositions |
JPH0665335A (en) * | 1992-08-19 | 1994-03-08 | Nippon Kayaku Co Ltd | Curable resin composition and its cured article |
JPH07310048A (en) * | 1994-03-25 | 1995-11-28 | Chisso Corp | Varnish composition |
JPH10120786A (en) * | 1996-10-21 | 1998-05-12 | Nec Corp | Liquid crystal-aligning film material and formation of liquid crystal-aligning film |
JPH10239842A (en) * | 1997-03-03 | 1998-09-11 | Hitachi Chem Co Ltd | Heat-resistant photosensitive polymer composition and manufacture of relief pattern |
JPH10273525A (en) * | 1997-03-31 | 1998-10-13 | Jsr Corp | Alkaline solution-soluble polymer |
JP2001147529A (en) * | 1999-09-23 | 2001-05-29 | Hitachi Chemical Dupont Microsystems Ltd | Photosensitive resin composition, method for producing pattern and electronic parts |
JP2002116541A (en) * | 2000-10-04 | 2002-04-19 | Nissan Chem Ind Ltd | Positive type photosensitive polyimide resin composition |
WO2003072634A1 (en) * | 2002-02-26 | 2003-09-04 | Nippon Kayaku Kabushiki Kaisha | Photosensitive resins, resin compositions and products of curing thereof |
JP2005037920A (en) * | 2003-06-24 | 2005-02-10 | Jsr Corp | Liquid crystal alignment agent, liquid crystal alignment layer, and liquid crystal display element |
WO2008153101A1 (en) * | 2007-06-15 | 2008-12-18 | Nissan Chemical Industries, Ltd. | Resin composition for forming heat-cured film |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017129768A (en) * | 2016-01-21 | 2017-07-27 | 富士フイルム株式会社 | Photosensitive resin composition, method for producing cured product, cured film, display device, and touch panel |
Also Published As
Publication number | Publication date |
---|---|
KR20120013941A (en) | 2012-02-15 |
TWI500657B (en) | 2015-09-21 |
KR101660827B1 (en) | 2016-09-28 |
CN102395614A (en) | 2012-03-28 |
JPWO2010119868A1 (en) | 2012-10-22 |
CN102395614B (en) | 2013-10-30 |
TW201107367A (en) | 2011-03-01 |
JP5626536B2 (en) | 2014-11-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5382346B2 (en) | Thermosetting film forming resin composition | |
JP5435230B2 (en) | Polyester composition for thermosetting film formation | |
US20040048188A1 (en) | Positive photosensitive polyimide resin composition | |
TW201224043A (en) | Resin composition, liquid crystal alignment material and retardation material | |
TWI633128B (en) | Composition, liquid crystal alignment treatment agent, liquid crystal alignment film, and liquid crystal display element | |
KR20170082645A (en) | Process for production of polyhydroxyimide | |
JP5626536B2 (en) | Photosensitive polyester composition for thermosetting film formation | |
TWI624494B (en) | Composition, liquid crystal alignment treatment agent, liquid crystal alignment film, and liquid crystal display element | |
JP5641250B2 (en) | Polyester composition for thermosetting film formation | |
TW201602242A (en) | Liquid crystal display element, liquid crystal alignment film, and liquid crystal alignment treatment agent | |
TWI525129B (en) | A liquid crystal alignment agent, a liquid crystal alignment film, and a liquid crystal display device | |
JP5641251B2 (en) | Polyester composition for thermosetting film formation | |
JP5574122B2 (en) | Polyester composition for thermosetting film formation | |
TW201609968A (en) | Liquid crystal aligning agent, liquid crystal alignment film and liquid crystal display element |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 201080016297.0 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 10764452 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2011509300 Country of ref document: JP |
|
ENP | Entry into the national phase |
Ref document number: 20117023063 Country of ref document: KR Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 10764452 Country of ref document: EP Kind code of ref document: A1 |