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WO2010106079A1 - Machine de placement de composant électronique avec axe pneumatique pour son système de tri et/ou de placement - Google Patents

Machine de placement de composant électronique avec axe pneumatique pour son système de tri et/ou de placement Download PDF

Info

Publication number
WO2010106079A1
WO2010106079A1 PCT/EP2010/053415 EP2010053415W WO2010106079A1 WO 2010106079 A1 WO2010106079 A1 WO 2010106079A1 EP 2010053415 W EP2010053415 W EP 2010053415W WO 2010106079 A1 WO2010106079 A1 WO 2010106079A1
Authority
WO
WIPO (PCT)
Prior art keywords
air bearing
component placement
electric component
carriage
placement apparatus
Prior art date
Application number
PCT/EP2010/053415
Other languages
English (en)
Inventor
Ulf Friederichs
Michael P. Schmidt-Lange
Kam-Shing Wong
Original Assignee
Kulicke And Soffa Die Bonding Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kulicke And Soffa Die Bonding Gmbh filed Critical Kulicke And Soffa Die Bonding Gmbh
Publication of WO2010106079A1 publication Critical patent/WO2010106079A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic

Definitions

  • the present invention pertains to the field of automation technology.
  • die bonding that is, the bonding of semiconductor dies or chips onto a substrate, where the substrate may also be (or include) a semiconductor wafer, chip or die.
  • the chips tend to be pressed onto the substrate with ever increasing force to compensate for increasing chip size and/or to allow the use of novel bonding agents.
  • machine parts tend to be mechanically rigid and stable; however, this undesirably tends to lead to increased weight.
  • the maximum motion speed of machine parts is often increased. However, this involves higher accelerations and thus generally results in increased heating due to increased dissipation of energy within the machine. Heating, on the other hand, is generally detrimental to accuracy, as it results in deformation of machine parts.
  • EP 1 143 489 A1 seeks to overcome this by controlling a thermal state of the carriage and the stationary bar with active heating, to preserve a uniform air bearing gap.
  • This solution may not solve the problem sufficiently well under all circumstances, and it consumes power to drive the heaters, and it may be subject to practical limitations of how much heat can be applied to the structure and how quickly and uniformly the heat can be controlled.
  • Active heating of parts may also limit their ability to serve as a heat sink for a motor that drives the carriage.
  • a corresponding air bearing system may be sensitive to any curvature induced on the stationary bar or on the carriage. Only a few microns of bending in either part due to non-uniform heating (such as may be experienced when a linear motor coil unit is carried on the carriage) can significantly increase the chance that air bearing surfaces make contact with each other, leading to premature failure.
  • an electric component placement apparatus in particular a die bonder
  • the apparatus includes a carriage configured to travel in at least one travel direction along a linear motion axis.
  • the carriage includes a plurality of air bearing pads and a preloading mechanism for each of the air bearing pads.
  • the apparatus also includes a guide structure defining a plurality of guiding surfaces, each guiding surface being configured for engagement with at least one of the air bearing pads.
  • an electric component placement apparatus in particular a die bonder, is provided.
  • the apparatus includes at least three air bearing pads, where each air bearing pad is guided by an associated guiding surface of the apparatus that allows for movement with respect to at least two degrees of freedom.
  • the three pads are connected by a carriage to allow for movement of the carriage along one common degree of freedom.
  • a preloading mechanism is provided for each of the air bearing pads.
  • FIG. 1 is a block diagram representation of a pick and place motion axis of a basic die bonder
  • FIG. 2 is a perspective view of an apparatus in accordance with an exemplary embodiment of the present invention.
  • FIG. 3 is another perspective view of the apparatus shown in FIG. 2, with some parts removed for better visibility;
  • FIG. 4 is a cross sectional block diagram of a pivotal mount of an air bearing pad and associated components in accordance with an exemplary embodiment of the present invention.
  • FIG. 2 is a perspective view of an exemplary linear motion axis for picking and placing of dies in a die bonder, the linear motion axis featuring five air bearing pads 1 1 , 12, 13 (not visible: 14, 15) with magnetic preload.
  • the air bearing pads are mounted on a carriage 2 that can move in a y-direction along a guide structure 3.
  • the guide structure 3 includes three guiding surfaces 31 , 32, 33. Each air bearing pad 1 1 , 12, 13, 14, 15 is associated with one of the guiding surfaces 31 , 32, 33.
  • the carriage 2 is not shown in this Figure to make fourth and fifth air bearing pads 14, 15 visible.
  • Preloading magnets 41 , 42, 43, 44, 45 are also shown for each of the air bearing pads 1 1 , 12, 13, 14, 15.
  • the preloading magnets 41 , 42, 43, 44, 45 provide for an attraction between the carriage 2 and the guide structure 3.
  • a repulsive force between pads and associated guiding surfaces 31 , 32, 33 results.
  • Attractive and repulsive forces give rise to a stable equilibrium state and thus a well defined air bearing gap.
  • One particular advantage of magnetic preloading is that ensures a substantially constant preload force and therefore a substantially constant air bearing gap and a substantially constant stiffness.
  • the air bearing pads in FIGS. 2 and 3 are arranged in a kinematic arrangement configured to allow motion of the carriage along one degree of freedom.
  • the carriage is kinematically arranged to move in the 6 th degree of freedom, that is, the y-axis. This ensures fundamental insensitivity to any deformation of guide structure 3 and/or of the carriage 2 itself. Axis straightness may change slightly, but there is virtually no increased chance of air bearing surfaces of the guiding surfaces 31 , 32, 33 and the air bearing pads 1 1 , 12, 13, 14, 15 coming into contact due to thermally-induced distortion.
  • FIG. 2 Due to the use of air bearings, the design shown in FIG. 2 is advantageous for the pick and place axis of a die bonder because, compared to rolling element bearings, air bearings have lower friction, which allows better position accuracy at the end of a movement for a given servo bandwidth. Additionally, air bearings have an increased life compared to mechanical bearings. This increased life will become increasingly significant as distances travelled on die bonders increase, and as speeds increase on die bonders. With increased travel and increased speed, mechanical bearings will be limited by life, and will eventually need to be replaced, whereas air bearings have no tribological wear behaviour and therefore have an essentially infinite life.
  • the air bearing gap may vary considerably (increase or decrease) as a result of temperature changes or deformation of the parts (e.g. , the carriage, the guide surfaces, etc.) .
  • Such changes in the air bearing gap in conventional arrangements tend to have undesirable effects on the maximum load that can be carried, the stiffness of the system, amongst other problems.
  • the present invention provides substantial benefits over these conventional arrangements.
  • FIG. 4 illustrates air bearing pad 11 carried by a portion of carriage 2, where air bearing pad 11 is separated from guide surface 31 of guide structure 3 by a gap 50. Also shown is an exemplary air inlet supply 47 to air bearing 1 1 .
  • a ball joint 61 is provided at one and of an adjustment screw 6.
  • a corresponding ball socket 7 provided in the air bearing pads 1 1 , 12, 13, 14, 15 allows for rotation in all directions.
  • pivotal structures other than that shown in FIG. 4 (and non- pivotal structures) are contemplated within the scope of the present invention.
  • preloading of one or more air bearing pads 1 1 , 12, 13, 14, 1 5 may be achieved by one or more preloading air bearing pads that are configured to counteract the repulsive force between pads and associated guiding surfaces 31 , 32, 33.
  • this may be achieved by providing a preloading guiding surface on the guide structure 3, where said preloading guiding surface is preferably parallel to one of the guiding surfaces 31 , 32, 33 but facing in an opposite direction.
  • one or more air bearing pads 1 1 , 12, 13, 14, 15 have non planar active surfaces.
  • planar surfaces of the air bearing pads described above may actually exhibit some curvature (e.g., spherical concavity) or other non-planarity.
  • the existence (or non-existence) of such non-planarity of the air bearing surfaces may depend on the particular time during operation of the air bearings (e.g., in a pressurized state, in an unpressurized state, etc.)
  • active surfaces might be concave so that they can be engaged by a cylindrical surface.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

La présente invention concerne un appareil de placement de composant électrique, en particulier une microsoudeuse de puces, comprenant : un chariot configuré pour se déplacer dans au moins une direction de déplacement le long d'un axe de mouvement linéaire, ce chariot comprenant une pluralité de patins pneumatiques ; et un mécanisme de préchargement pour chacun des patins pneumatiques. Une structure guide définit une pluralité de surfaces de guidage, chaque surface de guidage étant configurée pour venir en prise avec au moins un des patins pneumatiques.
PCT/EP2010/053415 2009-03-16 2010-03-16 Machine de placement de composant électronique avec axe pneumatique pour son système de tri et/ou de placement WO2010106079A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16050909P 2009-03-16 2009-03-16
US61/160,509 2009-03-16

Publications (1)

Publication Number Publication Date
WO2010106079A1 true WO2010106079A1 (fr) 2010-09-23

Family

ID=42111772

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2010/053415 WO2010106079A1 (fr) 2009-03-16 2010-03-16 Machine de placement de composant électronique avec axe pneumatique pour son système de tri et/ou de placement

Country Status (1)

Country Link
WO (1) WO2010106079A1 (fr)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10646883B2 (en) 2017-04-19 2020-05-12 Renishaw Plc Contamination trap
US10718602B2 (en) 2017-04-19 2020-07-21 Renishaw Plc Bearing mount
US10816335B2 (en) 2015-08-05 2020-10-27 Renishaw Plc Coordinate positioning machine
US10826369B2 (en) 2017-04-19 2020-11-03 Renishaw Plc Positioning apparatus with relatively moveable members and a linear motor mounted thereon
US11035658B2 (en) 2017-04-19 2021-06-15 Renishaw Plc Positioning apparatus
US11060836B2 (en) 2017-04-19 2021-07-13 Renishaw Plc Bearing arrangement
EP3765907A4 (fr) * 2018-03-16 2021-09-01 Hewlett-Packard Development Company, L.P. Paliers à air
EP3765906A4 (fr) * 2018-03-16 2021-09-01 Hewlett-Packard Development Company, L.P. Paliers à air

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4704712A (en) * 1985-06-24 1987-11-03 Rca Corporation Low-friction slide apparatus for optical disc translation stage
US4798985A (en) * 1987-02-17 1989-01-17 Anwar Chitavat Linear motor with air-lift bearing unloading
EP1143489A1 (fr) 2000-04-04 2001-10-10 ESEC Trading SA Guide lineaire avec un palier à air
US20020047320A1 (en) * 2000-09-09 2002-04-25 Mirae Corporation Linear motor having air bearing integrally
WO2005077592A1 (fr) * 2004-02-11 2005-08-25 Siemens Aktiengesellschaft Guidage lineaire aerostatique pour bras de positionnement dote d'une tete de montage de composants electriques

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4704712A (en) * 1985-06-24 1987-11-03 Rca Corporation Low-friction slide apparatus for optical disc translation stage
US4798985A (en) * 1987-02-17 1989-01-17 Anwar Chitavat Linear motor with air-lift bearing unloading
EP1143489A1 (fr) 2000-04-04 2001-10-10 ESEC Trading SA Guide lineaire avec un palier à air
US20020047320A1 (en) * 2000-09-09 2002-04-25 Mirae Corporation Linear motor having air bearing integrally
WO2005077592A1 (fr) * 2004-02-11 2005-08-25 Siemens Aktiengesellschaft Guidage lineaire aerostatique pour bras de positionnement dote d'une tete de montage de composants electriques

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10816335B2 (en) 2015-08-05 2020-10-27 Renishaw Plc Coordinate positioning machine
US11300408B2 (en) 2015-08-05 2022-04-12 Renishaw Plc Coordinate positioning machine
US10646883B2 (en) 2017-04-19 2020-05-12 Renishaw Plc Contamination trap
US10718602B2 (en) 2017-04-19 2020-07-21 Renishaw Plc Bearing mount
US10826369B2 (en) 2017-04-19 2020-11-03 Renishaw Plc Positioning apparatus with relatively moveable members and a linear motor mounted thereon
US11035658B2 (en) 2017-04-19 2021-06-15 Renishaw Plc Positioning apparatus
US11060836B2 (en) 2017-04-19 2021-07-13 Renishaw Plc Bearing arrangement
US11236987B2 (en) 2017-04-19 2022-02-01 Renishaw Plc Load bearing structure
EP3765907A4 (fr) * 2018-03-16 2021-09-01 Hewlett-Packard Development Company, L.P. Paliers à air
EP3765906A4 (fr) * 2018-03-16 2021-09-01 Hewlett-Packard Development Company, L.P. Paliers à air
US11150599B2 (en) 2018-03-16 2021-10-19 Hewlett-Packard Development Company, L.P. Air bearings
US11294323B2 (en) 2018-03-16 2022-04-05 Hewlett-Packard Development Company, L.P. Air bearings

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