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WO2009157074A1 - Prober for inspecting liquid crystal substrate - Google Patents

Prober for inspecting liquid crystal substrate Download PDF

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Publication number
WO2009157074A1
WO2009157074A1 PCT/JP2008/061616 JP2008061616W WO2009157074A1 WO 2009157074 A1 WO2009157074 A1 WO 2009157074A1 JP 2008061616 W JP2008061616 W JP 2008061616W WO 2009157074 A1 WO2009157074 A1 WO 2009157074A1
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WO
WIPO (PCT)
Prior art keywords
liquid crystal
crystal substrate
frame
prober
probe pin
Prior art date
Application number
PCT/JP2008/061616
Other languages
French (fr)
Japanese (ja)
Inventor
岳 田中
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to PCT/JP2008/061616 priority Critical patent/WO2009157074A1/en
Publication of WO2009157074A1 publication Critical patent/WO2009157074A1/en

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    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards

Definitions

  • the present invention relates to a liquid crystal substrate inspection apparatus, and more particularly to a liquid crystal substrate inspection prober that applies an inspection signal to a liquid crystal substrate.
  • a liquid crystal substrate or a thin film transistor array substrate includes a TFT array in which thin film transistors (TFTs) constituting a liquid crystal panel are arranged in a matrix on a glass substrate or the like, and electrodes for supplying drive signals to the thin film transistors
  • the thin film transistor is driven by a signal supplied from an electrode terminal for a scanning signal and an electrode terminal for a video signal.
  • a substrate inspection device such as a TFT array inspection device or a liquid crystal substrate inspection device is known.
  • the substrate inspection apparatus includes an inspection prober and an inspection circuit that are electrically connected to an electrode terminal for a scanning signal and an electrode terminal for a video signal.
  • the prober frame of the prober When inspecting the liquid crystal substrate, the prober frame of the prober is overlapped from above or below the liquid crystal substrate, and the probe pin provided on the prober frame is brought into contact with the electrode of the liquid crystal substrate, and the liquid crystal substrate is contacted by the contact between the probe pin and the electrode. An electrical connection is made to the prober.
  • the inspection circuit detects a current flowing by applying a voltage from a prober or a voltage state, and checks a short circuit between the gate and the source, a point defect, a disconnection, and the like.
  • the liquid crystal panel formed on the liquid crystal substrate has various sizes and specifications, and the layouts thereof are different, and the arrangement of the electrode terminals formed on the liquid crystal substrate is also different for each layout. Therefore, even in a substrate inspection apparatus for inspecting a liquid crystal substrate, a prober for inspection is prepared according to the position of the electrode of the liquid crystal substrate according to the layout of the liquid crystal panel, and according to the liquid crystal substrate to be inspected. Are replaced and inspected.
  • FIG. 8 is a diagram for explaining the configuration of a conventional prober.
  • FIG. 8 shows an example in which the arrangement of the electrode terminals is different.
  • the electrode terminals 20a of the liquid crystal substrate 10a in FIG. 8A and the electrode terminals 20b of the liquid crystal substrate 10b in FIG. 8C are arranged at different positions.
  • the prober frame 102a of the prober 101a shown in FIG. 8B is provided with a probe pin 105a at a position corresponding to the electrode terminal 20a of the liquid crystal substrate 10a, and the prober frame 102b of the prober 101b shown in FIG. Are provided with probe pins 105b at positions corresponding to the electrode terminals 20b of the liquid crystal substrate 10b.
  • the liquid crystal substrates 10a and 10b cannot be inspected using the same prober, and therefore it is necessary to prepare a prober corresponding to each liquid crystal substrate.
  • an object of the present invention is to solve the above-described conventional problems and to enable inspection with a common prober for liquid crystal substrates having different specifications.
  • the prober according to the present invention is a case where the arrangement positions of the electrode terminals differ depending on the specifications of the liquid crystal substrate by separating the probe pins from the prober frame and making the installation position of the probe pins variable with respect to the prober frame. However, it is possible to perform the inspection only by changing the installation position of the probe pin in a common prober.
  • the prober of the present invention is a prober for inspecting a liquid crystal substrate that applies an inspection signal to the liquid crystal substrate, and includes a frame that surrounds at least the outer periphery of the liquid crystal substrate, and a frame that allows the installation position to be freely set between opposing sides of the frame frame.
  • a prober frame including a bar, and a probe pin assembly that is detachable at an arbitrary position in the length direction of the frame bar.
  • the frame bar is provided with a frame bar wiring along the length direction.
  • the probe pin assembly section includes a plurality of probe pins that contact the electrode terminals of the liquid crystal substrate, a plurality of connectors that contact the frame bar wiring, a pin holder wiring that connects the probe pins and the connector, a probe pin, a connector, and a pin holder.
  • the probe pin assembly section supplies a test signal to the electrode terminal of the liquid crystal substrate by contact between the connector and the frame bar wiring and contact between the probe pin and the electrode terminal of the liquid crystal substrate. .
  • the prober of the present invention can change the installation position of the probe pin with respect to the prober in two dimensions by making the installation position of the frame bar relative to the frame frame flexible and making the installation position of the probe pin assembly part relative to the frame bar flexible.
  • the arrangement interval of the plurality of probe pins provided in the probe pin assembly section is set according to the arrangement interval of the electrode terminals on the liquid crystal substrate side to be inspected.
  • probe pin assembly units There are several types of probe pin assembly units that have different probe pin arrangement intervals according to the electrode terminal arrangement specifications of the liquid crystal substrate, and probe pin assembly units of the type corresponding to the specifications of the liquid crystal substrate to be inspected. You can choose.
  • the prober frame it is also possible to prepare multiple types of prober frames with different frame frame sizes according to the size specification of the liquid crystal substrate itself, and select the type of prober frame corresponding to the size specification of the liquid crystal substrate to be inspected. it can.
  • One form of the frame bar provided in the prober frame of the present invention can be a long material having a U-shaped cross section with one side opened.
  • a frame bar wiring can be formed by disposing a printed board on the inner surface of the U-shape.
  • this frame bar when the probe pin is attached to the frame bar, the probe pin is provided protruding from the U-shaped opening, and the probe pin is brought close to the liquid crystal substrate, so that the probe pin is placed on the liquid crystal substrate side.
  • the electrode terminal can be contacted.
  • the other form of the frame bar included in the prober frame of the present invention can be a long material having an I-shaped cross section with both open.
  • a frame bar wiring can be formed by disposing a printed board on at least one of the two I-shaped inner surfaces.
  • the probe pin when the probe pin is attached to the frame bar, the probe pin is provided so as to protrude from the I-shaped opening, and the probe pin is brought close to the liquid crystal substrate so that the probe pin is located on the liquid crystal substrate side. It can be made to contact with the electrode terminal.
  • the above-mentioned frame bar having a U-shaped or I-shaped cross-section has a part along the length direction below, and a part of the lower part of the probe pin assembly part in this part. By supporting, the probe pin assembly can be held at an arbitrary position of the frame bar.
  • the arrangement position of the probe pin can be changed two-dimensionally with respect to the liquid crystal substrate, it is possible to inspect the liquid crystal substrates having different specifications with a common prober.
  • the prober of the present invention can be applied to a liquid crystal substrate inspection apparatus.
  • the liquid crystal substrate inspection apparatus includes, for example, an inspection chamber that inspects an introduced liquid crystal substrate, and a load lock chamber that carries the substrate in and out of the inspection chamber.
  • the inspection room supports a charged particle source that irradiates a liquid crystal substrate to be inspected with a charged particle beam, a detector that detects secondary electrons emitted from the liquid crystal substrate by irradiation of the charged particles, and a liquid crystal substrate to be inspected.
  • a charged particle source that irradiates a liquid crystal substrate to be inspected with a charged particle beam
  • a detector that detects secondary electrons emitted from the liquid crystal substrate by irradiation of the charged particles
  • a liquid crystal substrate to be inspected supports a charged particle source that irradiates a liquid crystal substrate to be inspected with a charged particle beam
  • a detector that detects secondary electrons emitted from the liquid crystal substrate by irradiation of the charged particles
  • a liquid crystal substrate to be inspected to be inspected.
  • each part such as a stage for two-dimensional scanning is provided, and substrate inspection is performed based on a scanning image obtained by a detector.
  • the liquid crystal substrate has, for example, a TFT array formed on a glass substrate.
  • the layout, electrodes, wiring patterns, etc. of the TFT array formed on the liquid crystal substrate are variously set according to the size and specifications of the liquid crystal panel.
  • Thin film transistors are formed in a matrix on the TFT array on the liquid crystal substrate, and signal electrode terminals (for example, scanning signal electrode terminals and video signal electrode terminals) for driving the thin film transistors are formed.
  • an electrode for electrically connecting to the outside of the liquid crystal substrate is formed outside the array of the liquid crystal substrate.
  • the liquid crystal substrate inspection apparatus includes a prober that supplies an inspection signal to the liquid crystal substrate.
  • the prober is provided with a prober frame to be electrically connected to the electrodes of the liquid crystal substrate for inspection, and probe pins are electrically connected to the electrodes of the liquid crystal substrate.
  • a prober frame is placed on the liquid crystal substrate placed on the stage. Between the liquid crystal substrate and the prober frame, the electrode terminal and the probe pin come into contact to make an electrical connection, and an inspection signal is supplied to the TFT array through the connection between the probe pin and the electrode terminal.
  • the connection between the prober frame and the stage is made by a connector provided on the prober frame and the stage side.
  • FIG. 1 is a schematic diagram for explaining the prober of the present invention.
  • the liquid crystal substrate 10 to be inspected has nine liquid crystal panels, and the electrode terminal of each liquid crystal panel is located at one position of the liquid crystal panel (the position on the upper left side with respect to the liquid crystal substrate in FIG. 1).
  • the specification of the liquid crystal substrate 10 may be arbitrary.
  • a liquid crystal substrate 10 includes a plurality of pixels formed by a TFT array, ITO electrodes, etc. (not shown) arranged in a lattice pattern on an insulating substrate such as a glass substrate 11.
  • a liquid crystal panel 12 is provided on which wiring for supplying drive signals to the pixels is wired.
  • the prober 1 When inspecting the liquid crystal substrate 10, an inspection signal is applied to the liquid crystal substrate 10 by the prober 1 for inspecting the liquid crystal substrate.
  • the prober 1 includes a prober frame 2 and a probe pin assembly portion 5.
  • the prober frame 2 includes a frame frame 3 surrounding at least the outer periphery of the liquid crystal substrate 10 and a frame bar 4 installed between opposing sides of the frame frame 3, and the frame bar 4 is at least one axial direction of the frame frame 3.
  • the installation position can be freely set.
  • the prober frame 2 includes a rectangular frame 3 formed of a frame at the outer peripheral portion so that the liquid crystal panel can be seen with the inside hollow, and a frame bar 4 attached to the frame 3.
  • the frame bar 4 is disposed in the X-axis direction with respect to the frame frame 3 and can be installed at an arbitrary position in the Y-axis direction with respect to two opposite sides of the frame frame 3 in the Y-axis direction.
  • fixed part which fixes the frame bar 4 to the frame frame 3 is not shown, it can fix to the arbitrary positions of the frame frame 3.
  • the frame bar 4 may be arranged in the Y direction in addition to being arranged in the X direction shown in FIG.
  • the frame bar 4 is provided with frame bar wiring 4a along the length direction.
  • the frame bar wiring 4a is a wiring for applying an inspection signal to the electrode terminal of the liquid crystal substrate 10 from the outside of the prober 1 via a probe pin, and for example, a printed circuit board can be used.
  • the probe pin assembly portion 5 is detachable at an arbitrary position in the length direction of the frame bar 4, and includes a plurality of probe pins 5a that come into contact with the electrode terminals of the liquid crystal substrate 10 and a plurality that comes into contact with the frame bar wiring 4a.
  • Connector 5b, a pin holder wire 5c for connecting the probe pin 5a and the connector 5b, and a pin holder 5d for holding the probe pin 5a, the connector 5b and the pin holder wire 5c, and the connector 5b is brought into contact with the frame bar wire 4a.
  • the inspection signal is supplied to the electrode terminal of the liquid crystal substrate 10.
  • the installation position of the prober frame 2 with respect to the frame frame 3 can be changed in the Y-axis direction, and the installation position of the probe pin assembly portion 5 with respect to the frame bar 4 can be changed in the X-axis direction.
  • the pin 5a can be aligned with the electrode terminal provided on the liquid crystal substrate 10.
  • FIG. 2 and 3 are a schematic perspective view and a cross-sectional view for explaining the configuration of the frame bar 4 and the probe pin assembly portion 5.
  • FIG. 2 and 3 are a schematic perspective view and a cross-sectional view for explaining the configuration of the frame bar 4 and the probe pin assembly portion 5.
  • FIG. 2 (a) and 3 (a) show a configuration example of a frame bar 4A having a U-shaped cross section.
  • the frame bar wiring 4a is arranged in the length direction of the inner surface.
  • FIG. 3A shows a configuration provided on the surface of the central side of the three sides of the U-shape, but a configuration provided on the side of the end portion side of the three sides of the U-shape. It is good.
  • a printed circuit board can be used for the frame bar wiring 4a.
  • the frame bar wiring 4a is arranged in the length direction of the frame bar 4, and is in electrical contact with the connector 5b of the probe pin assembly 5 at any position to supply an inspection signal.
  • the configuration is not limited to this as long as it can be configured.
  • the lower side of the U-shape of the frame bar 4A constitutes a support part that supports the probe pin assembly part 5.
  • the probe pin assembly 5 can be supported by the frame bar 4A by placing a part of the bottom surface of the probe pin assembly 5 on the lower side of the frame bar 4A.
  • FIG. 3B shows a configuration example of the frame bar 4B having an I-shaped cross section.
  • the frame bar wiring 4a is arranged in the length direction of the inner surface.
  • FIG. 3B shows a configuration provided on both sides of the central side of the I-shape, a configuration may be provided on the other side of the I-shape.
  • a printed circuit board can be used for the frame bar wiring 4a.
  • the frame bar wiring 4a is arranged in the length direction of the frame bar 4, and is in electrical contact with the connector 5b of the probe pin assembly 5 at any position to supply an inspection signal.
  • the configuration is not limited to this as long as it can be configured.
  • the lower side of the I-shape of the frame bar 4B constitutes a support portion that supports the probe pin assembly portion 5.
  • the probe pin assembly 5 can be supported by the frame bar 4B by placing a part of the bottom surface of the probe pin assembly 5 on the lower side of the frame bar 4B.
  • 3B shows a configuration in which the probe pin assembly portions 5 are arranged on both sides of the frame bar 4B, but a configuration in which the probe pin assembly portions 5 are arranged on either side is also possible.
  • the probe pin assembly parts 5A and 5B can have the same configuration except that the arrangement interval of the probe pins 5a is different.
  • the probe pin assembly portion 5 is configured by holding the probe pin 5a, the connector 5b, and the pin holder wiring 5c by a pin holder 5d made of, for example, resin.
  • the probe pins 5a are arranged at the same intervals as the arrangement intervals of the electrode terminals of the liquid crystal substrate, and when the prober 1 is brought close to the liquid crystal substrate 10, each of the plurality of probe pins 5a corresponds to the electrode terminals of the corresponding liquid crystal substrate. It is comprised so that it may contact.
  • the arrangement interval d1 of the probe pins 5a of the probe pin assembly 5A shown in FIG. 2B corresponds to the type of substrate in which the arrangement interval of the electrode terminals of the liquid crystal substrate is d1, and the probe pins shown in FIG.
  • the arrangement interval d2 of the probe pins 5a of the assembly unit 5B corresponds to a type of substrate in which the arrangement interval of the electrode terminals of the liquid crystal substrate is d2.
  • the connector 5b can be constituted by, for example, a conductive spring member.
  • the connector 5b is brought into contact with the frame bar wiring 4a by the elasticity of the connector 5b.
  • the frame bar wiring 4a can be electrically connected.
  • the connector 5b is not limited to a spring member, but may be configured as another configuration as long as electrical connection between the connector 5b and the frame bar wiring 4a is obtained when the probe pin assembly 5 is installed on the frame bar 4. Also good.
  • the probe pin assembly section 5A including the probe pins 5a having the same arrangement interval as d1 is used. Even if the arrangement specifications of the electrode terminals are different, the common prober frame 2 can be used.
  • the probe pin assembly portion 5B including the probe pins 5a having the same arrangement interval as that of d2 Even if the arrangement specifications of the electrode terminals are different, the common prober frame 2 can be used.
  • the arrangement interval of the probe pins 5a is not limited to the two types d1 and d2 described above, but by preparing the arrangement corresponding to the arrangement intervals of the electrode terminals included in various liquid crystal substrate types, the probe pins 5a can be arranged according to the type of liquid crystal substrate to be inspected. Can be selected.
  • the probe pins can be contacted with a common prober on liquid crystal substrates having different specifications.
  • FIG. 4 shows an example in which the arrangement of the electrode terminals is different as in FIG.
  • the liquid crystal substrate 10a in FIG. 4 (a) and the liquid crystal substrate 10b in FIG. 4 (c) have a common coordinate position where the electrode terminals are arranged, and each liquid crystal panel of the liquid crystal substrate is a substrate from among the common coordinate positions.
  • An electrode terminal is set at the coordinate position selected for each species.
  • the left three common coordinate positions in the figure are selected from the six common coordinate positions, and the electrode terminal 13 (in the figure) is selected at the common coordinate position.
  • the three common coordinate positions on the right side in the figure are the unused electrode terminals 14 (indicated by the broken lines in the figure).
  • the three common coordinate positions on the right side in the figure are selected from the six common coordinate positions, and the electrode terminal 13 ( The left three common coordinate positions in the figure are the unused electrode terminals 14 (indicated by the broken lines in the figure).
  • this unused electrode terminal 14 is not used as an electrode terminal and forms an electrode terminal at a common coordinate position, the electrode terminal is not formed at a common coordinate position in addition to a configuration in which the electrode terminal is unused. It is good also as a structure.
  • the liquid crystal substrate 10a and the liquid crystal substrate 10b are configured differently in the arrangement of the electrode terminals, and in the case of a prober configuration in which the arrangement position of the probe pin is fixed corresponding to any one of the liquid crystal substrates, The other liquid crystal substrate cannot be used.
  • the prober 1a shown in FIG. 4B shows a configuration in which the probe pin assembly portion 5 is arranged on the frame bar 4 in correspondence with the arrangement position of the use electrode terminal 13 of the liquid crystal substrate 10a shown in FIG. Yes. According to the arrangement of the probe pin assembly portion 5, the position of the probe pin 5a and the position of the use electrode terminal 13 of the liquid crystal substrate 10a can be matched.
  • the prober 1b shown in FIG. 4D shows a configuration in which the probe pin assembly portion 5 is arranged on the frame bar 4 in correspondence with the arrangement position of the use electrode terminal 13 of the liquid crystal substrate 10b shown in FIG. ing. According to the arrangement of the probe pin assembly portion 5, the position of the probe pin 5a and the position of the use electrode terminal 13 of the liquid crystal substrate 10b can be matched.
  • FIG. 5 is a view for explaining the common coordinate position of the substrate and the relationship between each substrate and the probe pin assembly.
  • FIG. 5A shows a common coordinate position 15 of the substrate with a broken line. Here, an example in which six terminal positions are set as one unit is shown.
  • FIG. 5B shows an example of the liquid crystal substrate 10a.
  • the coordinate position 15 including the six terminal positions three consecutive coordinate positions (indicated by a ground pattern) on the left in the figure are used.
  • the three consecutive coordinate positions (shown by broken lines) on the right side in the figure are the arrangement positions of the unused electrode terminals 14.
  • the probe pin assembly 5 can be brought into contact with the use electrode terminal 13 by arranging the probe pin assembly 5 on the frame bar 4 in correspondence with the arrangement position of the use electrode terminal 13.
  • FIG. 5C shows an example of the liquid crystal substrate 10b, and at the coordinate position 15 including the six terminal positions, three consecutive coordinate positions (indicated by a ground pattern) on the right in the figure are used.
  • the arrangement position of the terminal 13 the three consecutive coordinate positions (shown by broken lines) on the left side in the figure are the arrangement positions of the unused electrode terminals 14.
  • the probe pin assembly 5 can be brought into contact with the use electrode terminal 13 by arranging the probe pin assembly 5 on the frame bar 4 in correspondence with the arrangement position of the use electrode terminal 13.
  • FIG. 6 shows an example in which the arrangement of the liquid crystal panel is different in addition to the arrangement of the electrode terminals.
  • the liquid crystal substrate 10c in FIG. 6 (a) and the liquid crystal substrate 10d in FIG. 6 (c) have a common coordinate position in which electrode terminals are arranged in a panel specification having a liquid crystal panel with six surfaces.
  • An electrode terminal is set at a coordinate position selected for each substrate type from the common coordinate positions.
  • the three common coordinate positions on the right side in the figure are selected from the six common coordinate positions, and the use electrode terminal 13 ( The left three common coordinate positions in the figure are the unused electrode terminals 14 (indicated by the broken lines in the figure).
  • this unused electrode terminal 14 is not used as an electrode terminal and forms an electrode terminal at a common coordinate position, the electrode terminal is not formed at a common coordinate position in addition to a configuration in which the electrode terminal is unused. It is good also as a structure.
  • the liquid crystal substrate 10c and the liquid crystal substrate 10d are configured differently in the arrangement of the electrode terminals similarly to the liquid crystal substrate 10a and the liquid crystal substrate 10b described above, and the arrangement positions of the probe pins corresponding to one of the liquid crystal substrates. In the case of a fixed prober configuration, the other liquid crystal substrate cannot be used.
  • the prober 1c shown in FIG. 6B shows a configuration in which the probe pin assembly portion 5 is arranged on the frame bar 4 so as to correspond to the arrangement position of the use electrode terminal 13 of the liquid crystal substrate 10c shown in FIG. Yes. According to the arrangement of the probe pin assembly portion 5, the position of the probe pin 5a and the position of the use electrode terminal 13 of the liquid crystal substrate 10c can be matched.
  • the prober 1d shown in FIG. 6 (d) shows a configuration in which the probe pin assembly portion 5 is arranged on the frame bar 4 so as to correspond to the arrangement position of the use electrode terminal 13 of the liquid crystal substrate 10d shown in FIG. 6 (c). ing. According to the arrangement of the probe pin assembly portion 5, the position of the probe pin 5a and the position of the use electrode terminal 13 of the liquid crystal substrate 10d can be matched.
  • FIG. 7 is a diagram for explaining the common coordinate position of the substrate and the relationship between each substrate and the probe pin assembly.
  • FIG. 7A shows an example in which the electrode terminal interval at the common substrate coordinate position is d2
  • FIG. 7B shows an example in which the electrode terminal interval at the common substrate coordinate position is d1.
  • the case where the interval d1 is smaller than the interval d2 is shown as an example.
  • FIG. 7 (a-1) shows a common coordinate position 15a of the substrate with a broken line.
  • FIG. 7 (a-1) shows a common coordinate position 15a of the substrate with a broken line.
  • six terminal positions are set as one unit is shown.
  • FIG. 7 (a-2) shows a coordinate position 15a including six terminal positions, and three consecutive coordinate positions on the left side in the figure are used electrode terminal arrangement positions, and the right side in the figure is continuous.
  • the three coordinate positions to be used are the positions where the unused electrode terminals are arranged, and the probe pin assembly 5 is shown to correspond to the positions where the used electrode terminals are arranged.
  • FIG. 7 (a-3) shows the coordinate position 15a including six terminal positions, and the three consecutive coordinate positions on the right side in the figure are used electrode terminal arrangement positions, and the left side in the figure. 3 is a configuration in which the three consecutive coordinate positions are used as the positions where the unused electrode terminals are arranged, and the probe pin assembly 5 corresponds to the positions where the used electrode terminals are arranged.
  • FIG. 7 (b-1) shows a common coordinate position 15b of the substrate with a broken line.
  • FIG. 7 (b-1) shows a common coordinate position 15b of the substrate with a broken line.
  • six terminal positions are set as one unit is shown.
  • FIG. 7 (b-2) shows the arrangement positions of the electrode terminals used at the left three consecutive coordinate positions in the drawing at the coordinate position 15b including the six terminal positions, and the right continuous in the drawing.
  • the three coordinate positions to be used are the positions where the unused electrode terminals are arranged, and the probe pin assembly 5 is shown to correspond to the positions where the used electrode terminals are arranged.
  • FIG. 7 (b-3) shows the three consecutive coordinate positions on the right side in the figure at the coordinate position 15b including the six terminal positions, and the left electrode position in the figure. 3 is a configuration in which the three consecutive coordinate positions are used as the positions where the unused electrode terminals are arranged, and the probe pin assembly 5 corresponds to the positions where the used electrode terminals are arranged.
  • the prober frame can be used.
  • the prober for inspecting a liquid crystal substrate of the present invention can be applied to an inspection of a semiconductor substrate as well as a liquid crystal substrate used for a liquid crystal display, an organic EL substrate used for an organic EL display and the like.

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  • Engineering & Computer Science (AREA)
  • Liquid Crystal (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

In a prober, a probe pin is separated from a prober frame, and an arrangement position of the probe pin on a prober frame can be freely changed. Thus, even when the arrangement position of an electrode terminal varies due to liquid crystal substrate specifications, inspection can be performed only by changing the arrangement position of the probe pin in the common prober, and liquid crystal substrates having different specifications can be inspected by the common prober. The prober inspects the liquid crystal substrates by applying inspection signals to the liquid crystal substrates. The prober is provided with at least a prober frame and a probe pin assembly. The prober frame includes a frame which surrounds the outer circumference of the liquid crystal substrate, and a frame bar which can be arranged at any position between the facing sides of the frame. The probe pin assembly can be freely attached/removed to and from a discretionary position in the length direction of the frame bar. In the frame bar, a frame bar wiring is arranged along the longitudinal direction.

Description

液晶基板検査用プローバLCD prober
　本発明は、液晶基板検査装置に関し、特に液晶基板に検査信号を印加する液晶基板検査用プローバに関する。 The present invention relates to a liquid crystal substrate inspection apparatus, and more particularly to a liquid crystal substrate inspection prober that applies an inspection signal to a liquid crystal substrate.
　液晶基板や薄膜トランジスタアレイ基板（ＴＦＴアレイ基板）は、ガラス基板等の基板上に液晶パネルを構成する薄膜トランジスタ（ＴＦＴ）がマトリックス状に配置されてなるＴＦＴアレイと、この薄膜トランジスタに駆動信号を供給する電極端子とを備え、薄膜トランジスタは走査信号用の電極端子，映像信号用の電極端子から供給された信号により駆動される。 A liquid crystal substrate or a thin film transistor array substrate (TFT array substrate) includes a TFT array in which thin film transistors (TFTs) constituting a liquid crystal panel are arranged in a matrix on a glass substrate or the like, and electrodes for supplying drive signals to the thin film transistors The thin film transistor is driven by a signal supplied from an electrode terminal for a scanning signal and an electrode terminal for a video signal.
　基板に形成されるＴＦＴアレイや液晶基板を検査する装置としてＴＦＴアレイ検査装置や液晶基板検査装置等の基板検査装置が知られている。基板検査装置は、走査信号用の電極端子，映像信号用の電極端子と電気的に接続する検査用のプローバと検査回路を備える。 As a device for inspecting a TFT array or a liquid crystal substrate formed on a substrate, a substrate inspection device such as a TFT array inspection device or a liquid crystal substrate inspection device is known. The substrate inspection apparatus includes an inspection prober and an inspection circuit that are electrically connected to an electrode terminal for a scanning signal and an electrode terminal for a video signal.
　液晶基板を検査する際には、液晶基板の上方あるいは下方からプローバのプローバフレームを重ね、プローバフレームに設けたプローブピンを液晶基板の電極に接触させ、このプローブピンと電極との接触によって液晶基板とプローバとに間の電気的接続を行っている。検査回路は、プローバからの電圧印加により流れる電流、あるいは電圧状態を検出して、ゲート－ソース間の短絡、点欠陥、断線等を調べる。 When inspecting the liquid crystal substrate, the prober frame of the prober is overlapped from above or below the liquid crystal substrate, and the probe pin provided on the prober frame is brought into contact with the electrode of the liquid crystal substrate, and the liquid crystal substrate is contacted by the contact between the probe pin and the electrode. An electrical connection is made to the prober. The inspection circuit detects a current flowing by applying a voltage from a prober or a voltage state, and checks a short circuit between the gate and the source, a point defect, a disconnection, and the like.
　液晶基板上に形成される液晶パネルは様々なサイズや仕様があり、それぞれレイアウトが異なり、液晶基板上に形成される電極端子の配置もレイアウト毎に異なる。そのため、液晶基板を検査する基板検査装置においても、液晶パネルのレイアウトに応じて検査用のプローバは、液晶基板の電極位置に応じてそれぞれ設計したものを用意しておき、検査する液晶基板に応じて交換して検査を行っている。 The liquid crystal panel formed on the liquid crystal substrate has various sizes and specifications, and the layouts thereof are different, and the arrangement of the electrode terminals formed on the liquid crystal substrate is also different for each layout. Therefore, even in a substrate inspection apparatus for inspecting a liquid crystal substrate, a prober for inspection is prepared according to the position of the electrode of the liquid crystal substrate according to the layout of the liquid crystal panel, and according to the liquid crystal substrate to be inspected. Are replaced and inspected.
　図８は従来のプローバの構成を説明するための図である。図８では、電極端子の配置が異なる例を示している。図８（ａ）の液晶基板１０aの電極端子２０ａと図８（ｃ）の液晶基板１０ｂの電極端子２０ｂは、配置位置を異にしている。図８（ｂ）に示すプローバ１０１ａのプローバフレーム１０２ａには、液晶基板１０ａの電極端子２０ａに対応した位置にプローブピン１０５ａを設け、また、図８（ｄ）に示すプローバ１０１ｂのプローバフレーム１０２ｂには、液晶基板１０ｂの電極端子２０ｂに対応した位置にプローブピン１０５ｂを設けている。 FIG. 8 is a diagram for explaining the configuration of a conventional prober. FIG. 8 shows an example in which the arrangement of the electrode terminals is different. The electrode terminals 20a of the liquid crystal substrate 10a in FIG. 8A and the electrode terminals 20b of the liquid crystal substrate 10b in FIG. 8C are arranged at different positions. The prober frame 102a of the prober 101a shown in FIG. 8B is provided with a probe pin 105a at a position corresponding to the electrode terminal 20a of the liquid crystal substrate 10a, and the prober frame 102b of the prober 101b shown in FIG. Are provided with probe pins 105b at positions corresponding to the electrode terminals 20b of the liquid crystal substrate 10b.
　プローブピン１０５ａとプローブピン１０５ｂの配置位置は異なるため、同じプローバを用いて液晶基板１０ａ，１０ｂの検査を行うことはできないため、各液晶基板に対応したプローバを用意する必要がある。 Since the arrangement positions of the probe pin 105a and the probe pin 105b are different, the liquid crystal substrates 10a and 10b cannot be inspected using the same prober, and therefore it is necessary to prepare a prober corresponding to each liquid crystal substrate.
　そこで、本発明は前記した従来の問題点を解決し、仕様が異なる液晶基板に対して共通のプローバによる検査を可能とすることを目的とする。 Therefore, an object of the present invention is to solve the above-described conventional problems and to enable inspection with a common prober for liquid crystal substrates having different specifications.
　本発明のプローバは、プローブピンをプローバフレームから分離し、プローブピンをプローバフレームに対して設置位置を変更自在な構成とすることによって、液晶基板の仕様により電極端子の配置位置が異なる場合であっても、共通のプローバにおいてプローブピンの設置位置を変更するだけで検査を行うことができる。 The prober according to the present invention is a case where the arrangement positions of the electrode terminals differ depending on the specifications of the liquid crystal substrate by separating the probe pins from the prober frame and making the installation position of the probe pins variable with respect to the prober frame. However, it is possible to perform the inspection only by changing the installation position of the probe pin in a common prober.
　本発明のプローバは、液晶基板に検査信号を印加する液晶基板検査用プローバであり、少なくとも液晶基板の外周を囲むフレーム枠、およびこのフレーム枠の対向する辺部間に設置位置を自在とするフレームバーとを含むプローバフレームと、フレームバーの長さ方向の任意の位置に着脱自在とするプローブピン組立部とを備える。フレームバーは長さ方向に沿ってフレームバー配線を配設する。 The prober of the present invention is a prober for inspecting a liquid crystal substrate that applies an inspection signal to the liquid crystal substrate, and includes a frame that surrounds at least the outer periphery of the liquid crystal substrate, and a frame that allows the installation position to be freely set between opposing sides of the frame frame. A prober frame including a bar, and a probe pin assembly that is detachable at an arbitrary position in the length direction of the frame bar. The frame bar is provided with a frame bar wiring along the length direction.
　また、プローブピン組立部は、液晶基板の電極端子と接触する複数本のプローブピンと、フレームバー配線と接触する複数個のコネクタと、プローブピンとコネクタとを接続するピンホルダ配線と、プローブピンとコネクタとピンホルダ配線を保持するピンホルダとを有し、このプローブピン組立部は、コネクタとフレームバー配線との接触、およびプローブピンと液晶基板の電極端子との接触によって、液晶基板の電極端子に検査信号を供給する。 The probe pin assembly section includes a plurality of probe pins that contact the electrode terminals of the liquid crystal substrate, a plurality of connectors that contact the frame bar wiring, a pin holder wiring that connects the probe pins and the connector, a probe pin, a connector, and a pin holder. The probe pin assembly section supplies a test signal to the electrode terminal of the liquid crystal substrate by contact between the connector and the frame bar wiring and contact between the probe pin and the electrode terminal of the liquid crystal substrate. .
　本発明のプローバは、フレーム枠に対するフレームバーの設置位置を自在とし、また、フレームバーに対するプローブピン組立部の設置位置を自在とすることによって、プローバに対するプローブピンの設置位置を二次元で変更可能とする。 The prober of the present invention can change the installation position of the probe pin with respect to the prober in two dimensions by making the installation position of the frame bar relative to the frame frame flexible and making the installation position of the probe pin assembly part relative to the frame bar flexible. And
　プローブピン組立部が備える複数のプローブピンの配置間隔は、検査対象の液晶基板側の電極端子の配置間隔に応じて設定する。この構成とすることで、電極端子の配置間隔が共通な液晶基板であれば、その電極端子の液晶基板上の配置位置に関わらず、本発明のプローバを適用して液晶基板に検査信号を印加することができる。 The arrangement interval of the plurality of probe pins provided in the probe pin assembly section is set according to the arrangement interval of the electrode terminals on the liquid crystal substrate side to be inspected. With this configuration, if the liquid crystal substrate has a common arrangement of electrode terminals, an inspection signal is applied to the liquid crystal substrate by applying the prober of the present invention regardless of the arrangement position of the electrode terminals on the liquid crystal substrate. can do.
　プローブピン組立部は、液晶基板の電極端子の配置仕様に応じて、プローブピンの配置間隔を異にする複数種類を用意し、検査対象の液晶基板の仕様に対応した種類のプローブピン組立部を選択することができる。 There are several types of probe pin assembly units that have different probe pin arrangement intervals according to the electrode terminal arrangement specifications of the liquid crystal substrate, and probe pin assembly units of the type corresponding to the specifications of the liquid crystal substrate to be inspected. You can choose.
　また、プローバフレームについても、液晶基板自体のサイズ仕様に応じてフレーム枠のサイズを異にする複数種類を用意し、検査対象の液晶基板のサイズ仕様に対応した種類のプローバフレームを選択することができる。 As for the prober frame, it is also possible to prepare multiple types of prober frames with different frame frame sizes according to the size specification of the liquid crystal substrate itself, and select the type of prober frame corresponding to the size specification of the liquid crystal substrate to be inspected. it can.
　本発明のプローバフレームが備えるフレームバーの一形態は、一方が開放された断面がコの字型の長尺材とすることができる。このフレームバーにおいて、コの字型の内側表面にプリント基板を配設することでフレームバー配線を形成することができる。 One form of the frame bar provided in the prober frame of the present invention can be a long material having a U-shaped cross section with one side opened. In this frame bar, a frame bar wiring can be formed by disposing a printed board on the inner surface of the U-shape.
　このフレームバーの一形態において、プローブピンは、フレームバーに取り付けた際に、コの字型の開口部分から突出させて設け、プローバを液晶基板に接近させることで、プローブピンを液晶基板側の電極端子に接触させることができる。 In one form of this frame bar, when the probe pin is attached to the frame bar, the probe pin is provided protruding from the U-shaped opening, and the probe pin is brought close to the liquid crystal substrate, so that the probe pin is placed on the liquid crystal substrate side. The electrode terminal can be contacted.
　本発明のプローバフレームが備えるフレームバーの他の形態は、両方が開放された断面がＩの字型の長尺材とすることができる。このフレームバーにおいて、Ｉの字型の２つの内側表面の少なくとも一方の面にプリント基板を配設することでフレームバー配線を形成することができる。 The other form of the frame bar included in the prober frame of the present invention can be a long material having an I-shaped cross section with both open. In this frame bar, a frame bar wiring can be formed by disposing a printed board on at least one of the two I-shaped inner surfaces.
　このフレームバーの他の形態において、プローブピンは、フレームバーに取り付けた際に、Ｉの字型の開口部分から突出させて設け、プローバを液晶基板に接近させることで、プローブピンを液晶基板側の電極端子に接触させることができる。 In another form of this frame bar, when the probe pin is attached to the frame bar, the probe pin is provided so as to protrude from the I-shaped opening, and the probe pin is brought close to the liquid crystal substrate so that the probe pin is located on the liquid crystal substrate side. It can be made to contact with the electrode terminal.
　上記した、断面形状がコの字型、あるいはＩの字型のフレームバーは、下方に長さ方向に沿って片部分を有しており、この片部分にプローブピン組立部の下部の一部を支持させることで、プローブピン組立部をフレームバーの任意の位置に保持させることができる。 The above-mentioned frame bar having a U-shaped or I-shaped cross-section has a part along the length direction below, and a part of the lower part of the probe pin assembly part in this part. By supporting, the probe pin assembly can be held at an arbitrary position of the frame bar.
　本発明によれば、プローブピンの配置位置を液晶基板に対して二次元で変更可能であるため、仕様が異なる液晶基板に対して共通のプローバによる検査を可能とすることができる。 According to the present invention, since the arrangement position of the probe pin can be changed two-dimensionally with respect to the liquid crystal substrate, it is possible to inspect the liquid crystal substrates having different specifications with a common prober.
本発明のプローバを説明するための概略図である。It is the schematic for demonstrating the prober of this invention. 本発明のフレームバーとプローブピン組立部の構成を説明するための概略斜視図である。It is a schematic perspective view for demonstrating the structure of the frame bar and probe pin assembly part of this invention. 本発明のフレームバーとプローブピン組立部の構成を説明するための断面図である。It is sectional drawing for demonstrating the structure of the frame bar and probe pin assembly part of this invention. 本発明のプローバの構成を説明するための図である。It is a figure for demonstrating the structure of the prober of this invention. 基板の共通座標位置と各基板とプローブピン組立部の関係を説明するための図である。It is a figure for demonstrating the relationship between a common coordinate position of a board | substrate, each board | substrate, and a probe pin assembly part. 本発明において、基板の共通座標位置と各基板とプローブピン組立部の関係を説明するための図である。In this invention, it is a figure for demonstrating the relationship between the common coordinate position of a board | substrate, each board | substrate, and a probe pin assembly part. 本発明において、基板の共通座標位置と各基板とプローブピン組立部の関係を説明するための図である。In this invention, it is a figure for demonstrating the relationship between the common coordinate position of a board | substrate, each board | substrate, and a probe pin assembly part. 従来のプローバの構成を説明するための図である。It is a figure for demonstrating the structure of the conventional prober.
符号の説明Explanation of symbols
　１，１ａ～１ｄ…プローバ、２…プローバフレーム、３…フレーム枠、４，４Ａ，４Ｂ…フレームバー、４ａ…フレームバー配線、５，５Ａ，５Ｂ…プローブピン組立部、５ａ…プローブピン、５ｂ…コネクタ、５ｃ…ピンホルダ配線、５ｄ…ピンホルダ、１０，１０ａ～１０ｄ…液晶基板、１１…ガラス基板、１２…液晶パネル、１３…使用電極端子、１４…未使用電極端子、１５，１５ａ，１５ｂ…座標位置、２０ａ，２０ｂ…電極端子、１０１ａ，１０１ｂ…プローバ、１０２ａ，１０２ｂ…プローバフレーム、１０５ａ，１０５ｂ…プローブピン。 1, 1a to 1d ... prober, 2 ... prober frame, 3 ... frame frame, 4,4A, 4B ... frame bar, 4a ... frame bar wiring, 5,5A, 5B ... probe pin assembly, 5a ... probe pin, 5b ... Connector, 5c ... Pin holder wiring, 5d ... Pin holder, 10, 10a to 10d ... Liquid crystal substrate, 11 ... Glass substrate, 12 ... Liquid crystal panel, 13 ... Used electrode terminal, 14 ... Unused electrode terminal, 15, 15a, 15b ... Coordinate position, 20a, 20b ... electrode terminal, 101a, 101b ... prober, 102a, 102b ... prober frame, 105a, 105b ... probe pin.
　以下、本発明の実施の形態について、図を参照しながら詳細に説明する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
　本発明のプローバは、液晶基板検査装置に適用することができる。液晶基板検査装置は、例えば、導入された液晶基板を検査する検査室と、この検査室に対して基板を搬出入するロードロック室を備える。 The prober of the present invention can be applied to a liquid crystal substrate inspection apparatus. The liquid crystal substrate inspection apparatus includes, for example, an inspection chamber that inspects an introduced liquid crystal substrate, and a load lock chamber that carries the substrate in and out of the inspection chamber.
　検査室は、検査対象である液晶基板に荷電粒子ビームを照射する荷電粒子源、この荷電粒子の照射によって液晶基板から放出される二次電子を検出する検出器、検査対象の液晶基板を支持すると共に二次元的に走査させるステージ等の各部分を備え、検出器で得られる走査画像に基づいて基板検査を行う。 The inspection room supports a charged particle source that irradiates a liquid crystal substrate to be inspected with a charged particle beam, a detector that detects secondary electrons emitted from the liquid crystal substrate by irradiation of the charged particles, and a liquid crystal substrate to be inspected. In addition, each part such as a stage for two-dimensional scanning is provided, and substrate inspection is performed based on a scanning image obtained by a detector.
　液晶基板は、例えばガラス基板上にＴＦＴアレイが形成されている。この液晶基板に形成されるＴＦＴアレイのレイアウト、電極、配線パターン等は液晶パネルのサイズや仕様に応じて種々に設定される。液晶基板上のＴＦＴアレイには薄膜トランジスタがマトリックス状に形成され、各薄膜トランジスタを駆動する信号電極端子（例えば、走査信号電極端子，映像信号電極端子）が形成されている。また、液晶基板のアレイの外側には、液晶基板の外部と電気的に接続するための電極が形成される。 The liquid crystal substrate has, for example, a TFT array formed on a glass substrate. The layout, electrodes, wiring patterns, etc. of the TFT array formed on the liquid crystal substrate are variously set according to the size and specifications of the liquid crystal panel. Thin film transistors are formed in a matrix on the TFT array on the liquid crystal substrate, and signal electrode terminals (for example, scanning signal electrode terminals and video signal electrode terminals) for driving the thin film transistors are formed. In addition, an electrode for electrically connecting to the outside of the liquid crystal substrate is formed outside the array of the liquid crystal substrate.
　また、液晶基板検査装置は、液晶基板に検査信号を供給するプローバを備える。プローバは、液晶基板の電極と電気的に接続し検査を行うためにプローバフレームを備え、液晶基板の電極と電気的に接続するプローブピンを備える。 Also, the liquid crystal substrate inspection apparatus includes a prober that supplies an inspection signal to the liquid crystal substrate. The prober is provided with a prober frame to be electrically connected to the electrodes of the liquid crystal substrate for inspection, and probe pins are electrically connected to the electrodes of the liquid crystal substrate.
　液晶基板の検査を行うには、ステージに載置した液晶基板にプローバフレームを配置する。液晶基板とプローバフレームとの間において、電極端子とプローブピンが接触することによって電気的な接続が行われ、プローブピンと電極端子との接続を通してＴＦＴアレイに検査信号が供給される。また、プローバフレームとステージとの間の接続は、プローバフレーム及びステージ側に設けたコネクタにより行われる。 To inspect the liquid crystal substrate, a prober frame is placed on the liquid crystal substrate placed on the stage. Between the liquid crystal substrate and the prober frame, the electrode terminal and the probe pin come into contact to make an electrical connection, and an inspection signal is supplied to the TFT array through the connection between the probe pin and the electrode terminal. The connection between the prober frame and the stage is made by a connector provided on the prober frame and the stage side.
　　図１は本発明のプローバを説明するための概略図である。なお、図１では、検査対象の液晶基板１０は９枚の液晶パネルを有し、各液晶パネルの電極端子は液晶パネルの一つの位置（図１中で液晶基板に対して上方左方の位置）に配置される例を示しているが、液晶基板１０の仕様は任意とすることができる。 FIG. 1 is a schematic diagram for explaining the prober of the present invention. In FIG. 1, the liquid crystal substrate 10 to be inspected has nine liquid crystal panels, and the electrode terminal of each liquid crystal panel is located at one position of the liquid crystal panel (the position on the upper left side with respect to the liquid crystal substrate in FIG. 1). However, the specification of the liquid crystal substrate 10 may be arbitrary.
　図１において、液晶基板１０には、ガラス基板１１等の絶縁性基板の上に、ＴＦＴアレイ、ＩＴＯ電極等（図示していない）で形成される複数個のピクセルが格子状に配置され、これらのピクセルに駆動信号を供給する配線が配線された液晶パネル１２が設けられている。 In FIG. 1, a liquid crystal substrate 10 includes a plurality of pixels formed by a TFT array, ITO electrodes, etc. (not shown) arranged in a lattice pattern on an insulating substrate such as a glass substrate 11. A liquid crystal panel 12 is provided on which wiring for supplying drive signals to the pixels is wired.
　この液晶基板１０を検査する際、液晶基板検査用のプローバ１によって液晶基板１０に検査信号を印加する。プローバ１は、プローバフレーム２とプローブピン組立部５とを備える。プローバフレーム２は、少なくとも液晶基板１０の外周を囲むフレーム枠３とフレーム枠３の対向する辺部間に設置されるフレームバー４とを含み、フレームバー４はフレーム枠３の少なくとも一方の軸方向に対して設置位置を自在とする。 When inspecting the liquid crystal substrate 10, an inspection signal is applied to the liquid crystal substrate 10 by the prober 1 for inspecting the liquid crystal substrate. The prober 1 includes a prober frame 2 and a probe pin assembly portion 5. The prober frame 2 includes a frame frame 3 surrounding at least the outer periphery of the liquid crystal substrate 10 and a frame bar 4 installed between opposing sides of the frame frame 3, and the frame bar 4 is at least one axial direction of the frame frame 3. The installation position can be freely set.
　図１では、プローバフレーム２は、内側を中空として液晶パネルを見通せるように外周部分の枠体で形成した矩形のフレーム枠３と、このフレーム枠３に取り付けられるフレームバー４を備える。フレームバー４は、フレーム枠３に対してＸ軸方向に配置され、フレーム枠３の対向するＹ軸方向の２本の辺部に対してＹ軸方向の任意の位置に設置することができる。なお、図１では、フレームバー４をフレーム枠３に固定する固定部は示していないが、フレーム枠３の任意の位置に固定することができる。フレームバー４は、図１で示すＸ方向に配置する他、Ｙ方向に配置する構成としてもよい。 In FIG. 1, the prober frame 2 includes a rectangular frame 3 formed of a frame at the outer peripheral portion so that the liquid crystal panel can be seen with the inside hollow, and a frame bar 4 attached to the frame 3. The frame bar 4 is disposed in the X-axis direction with respect to the frame frame 3 and can be installed at an arbitrary position in the Y-axis direction with respect to two opposite sides of the frame frame 3 in the Y-axis direction. In addition, in FIG. 1, although the fixing | fixed part which fixes the frame bar 4 to the frame frame 3 is not shown, it can fix to the arbitrary positions of the frame frame 3. FIG. The frame bar 4 may be arranged in the Y direction in addition to being arranged in the X direction shown in FIG.
　また、フレームバー４は長さ方向に沿ってフレームバー配線４ａを配設している。このフレームバー配線４ａは、プローバ１の外部からプローブピンを介して液晶基板１０の電極端子に検査信号を印加するための配線であり、例えば、プリント基板を用いることができる。 Also, the frame bar 4 is provided with frame bar wiring 4a along the length direction. The frame bar wiring 4a is a wiring for applying an inspection signal to the electrode terminal of the liquid crystal substrate 10 from the outside of the prober 1 via a probe pin, and for example, a printed circuit board can be used.
　プローブピン組立部５は、フレームバー４の長さ方向の任意の位置に着脱自在であり、液晶基板１０の電極端子と接触する複数本のプローブピン５ａと、フレームバー配線４ａと接触する複数個のコネクタ５ｂと、プローブピン５ａとコネクタ５ｂとを接続するピンホルダ配線５ｃと、プローブピン５ａとコネクタ５ｂとピンホルダ配線５ｃを保持するピンホルダ５ｄとを備え、コネクタ５ｂをフレームバー配線４ａに接触させてフレームバー配線４ａから検査信号を受け、プローブピン５ａを液晶基板１０の電極端子に接触させることによって、液晶基板１０の電極端子に検査信号を供給する。 The probe pin assembly portion 5 is detachable at an arbitrary position in the length direction of the frame bar 4, and includes a plurality of probe pins 5a that come into contact with the electrode terminals of the liquid crystal substrate 10 and a plurality that comes into contact with the frame bar wiring 4a. Connector 5b, a pin holder wire 5c for connecting the probe pin 5a and the connector 5b, and a pin holder 5d for holding the probe pin 5a, the connector 5b and the pin holder wire 5c, and the connector 5b is brought into contact with the frame bar wire 4a. By receiving an inspection signal from the frame bar wiring 4 a and bringing the probe pin 5 a into contact with the electrode terminal of the liquid crystal substrate 10, the inspection signal is supplied to the electrode terminal of the liquid crystal substrate 10.
　図１において、プローバフレーム２のフレーム枠３に対する設置位置をＹ軸方向で変更可能であり、また、プローブピン組立部５のフレームバー４に対する設置位置をＸ軸方向で変更可能であるため、プローブピン５ａを液晶基板１０上に設けられた電極端子に対して位置合わせを行うことが可能である。 In FIG. 1, the installation position of the prober frame 2 with respect to the frame frame 3 can be changed in the Y-axis direction, and the installation position of the probe pin assembly portion 5 with respect to the frame bar 4 can be changed in the X-axis direction. The pin 5a can be aligned with the electrode terminal provided on the liquid crystal substrate 10.
　図２、図３は、フレームバー４とプローブピン組立部５の構成を説明するための概略斜視図および断面図である。 2 and 3 are a schematic perspective view and a cross-sectional view for explaining the configuration of the frame bar 4 and the probe pin assembly portion 5. FIG.
　図２（ａ）、図３（ａ）は、断面形状がコの字型のフレームバー４Ａの構成例を示している。このフレームバー４Ａは、内側表面の長さ方向にフレームバー配線４ａを配置する。図３（ａ）では、コの字型の３辺の中央側の辺の面上に設ける構成を示しているが、コの字型の３辺の端部側の辺の面上に設ける構成としてもよい。フレームバー配線４ａはプリント基板を用いることができるが、フレームバー４の長さ方向に配置し、その任意の位置においてプローブピン組立部５のコネクタ５ｂと電気的に接触し、検査信号を供給することができる構成であればこれに限られるものではない。 2 (a) and 3 (a) show a configuration example of a frame bar 4A having a U-shaped cross section. In this frame bar 4A, the frame bar wiring 4a is arranged in the length direction of the inner surface. FIG. 3A shows a configuration provided on the surface of the central side of the three sides of the U-shape, but a configuration provided on the side of the end portion side of the three sides of the U-shape. It is good. A printed circuit board can be used for the frame bar wiring 4a. However, the frame bar wiring 4a is arranged in the length direction of the frame bar 4, and is in electrical contact with the connector 5b of the probe pin assembly 5 at any position to supply an inspection signal. However, the configuration is not limited to this as long as it can be configured.
　また、フレームバー４Ａのコの字型の下側の辺はプローブピン組立部５を支持する支持部を構成する。プローブピン組立部５は、プローブピン組立部５の底面部の一部をフレームバー４Ａの下側の辺上に載置することによって、フレームバー４Ａに支持させることができる。 Also, the lower side of the U-shape of the frame bar 4A constitutes a support part that supports the probe pin assembly part 5. The probe pin assembly 5 can be supported by the frame bar 4A by placing a part of the bottom surface of the probe pin assembly 5 on the lower side of the frame bar 4A.
　図３（ｂ）は断面形状がＩの字型のフレームバー４Ｂの構成例を示している。このフレームバー４Ｂは、内側表面の長さ方向にフレームバー配線４ａを配置する。図３（ｂ）では、Ｉの字型の中央辺の両面に設ける構成を示しているが、Ｉの字型の他の辺の面上に設ける構成としてもよい。フレームバー配線４ａはプリント基板を用いることができるが、フレームバー４の長さ方向に配置し、その任意の位置においてプローブピン組立部５のコネクタ５ｂと電気的に接触し、検査信号を供給することができる構成であればこれに限られるものではない。 FIG. 3B shows a configuration example of the frame bar 4B having an I-shaped cross section. In the frame bar 4B, the frame bar wiring 4a is arranged in the length direction of the inner surface. Although FIG. 3B shows a configuration provided on both sides of the central side of the I-shape, a configuration may be provided on the other side of the I-shape. A printed circuit board can be used for the frame bar wiring 4a. However, the frame bar wiring 4a is arranged in the length direction of the frame bar 4, and is in electrical contact with the connector 5b of the probe pin assembly 5 at any position to supply an inspection signal. However, the configuration is not limited to this as long as it can be configured.
　また、フレームバー４ＢのＩの字型の下側の辺はプローブピン組立部５を支持する支持部を構成する。プローブピン組立部５は、プローブピン組立部５の底面部の一部をフレームバー４Ｂの下側の辺上に載置することによって、フレームバー４Ｂに支持させることができる。また、図３（ｂ）では、フレームバー４Ｂの両側にプローブピン組立部５を配置する構成を示しているが、何れか一方に配置する構成としてもよい。 Further, the lower side of the I-shape of the frame bar 4B constitutes a support portion that supports the probe pin assembly portion 5. The probe pin assembly 5 can be supported by the frame bar 4B by placing a part of the bottom surface of the probe pin assembly 5 on the lower side of the frame bar 4B. 3B shows a configuration in which the probe pin assembly portions 5 are arranged on both sides of the frame bar 4B, but a configuration in which the probe pin assembly portions 5 are arranged on either side is also possible.
　図２（ｂ）および図２（ｃ）はプローブピン組立部５Ａ，５Ｂの構成例を示している。プローブピン組立部５Ａ，５Ｂは、プローブピン５ａの配置間隔が異なる他は、同様の構成とすることができる。 2 (b) and 2 (c) show configuration examples of the probe pin assembly parts 5A and 5B. The probe pin assembly parts 5A and 5B can have the same configuration except that the arrangement interval of the probe pins 5a is different.
　プローブピン組立部５は、プローブピン５ａと、コネクタ５ｂと、ピンホルダ配線５ｃとを、例えば樹脂製からなるピンホルダ５ｄによって保持して構成される。プローブピン５ａは、液晶基板の電極端子の配置間隔と同一の間隔で配置し、プローバ１を液晶基板１０に接近させた際に、複数のプローブピン５ａのそれぞれが対応する液晶基板の電極端子と接触するように構成されている。 The probe pin assembly portion 5 is configured by holding the probe pin 5a, the connector 5b, and the pin holder wiring 5c by a pin holder 5d made of, for example, resin. The probe pins 5a are arranged at the same intervals as the arrangement intervals of the electrode terminals of the liquid crystal substrate, and when the prober 1 is brought close to the liquid crystal substrate 10, each of the plurality of probe pins 5a corresponds to the electrode terminals of the corresponding liquid crystal substrate. It is comprised so that it may contact.
　図２（ｂ）に示すプローブピン組立部５Ａのプローブピン５ａの配置間隔d1は、液晶基板の電極端子の配置間隔がd1である種類の基板に対応し、図２（ｃ）に示すプローブピン組立部５Ｂのプローブピン５ａの配置間隔d2は、液晶基板の電極端子の配置間隔がd2である種類の基板に対応する。 The arrangement interval d1 of the probe pins 5a of the probe pin assembly 5A shown in FIG. 2B corresponds to the type of substrate in which the arrangement interval of the electrode terminals of the liquid crystal substrate is d1, and the probe pins shown in FIG. The arrangement interval d2 of the probe pins 5a of the assembly unit 5B corresponds to a type of substrate in which the arrangement interval of the electrode terminals of the liquid crystal substrate is d2.
　コネクタ５ｂは、例えば、導電性を有するバネ部材によって構成することができ、プローブピン組立部５をフレームバー４に設置した際に、コネクタ５ｂの弾性によってフレームバー配線４ａに接触させ、コネクタ５ｂとフレームバー配線４ａとを電気的に接続させることができる。 The connector 5b can be constituted by, for example, a conductive spring member. When the probe pin assembly 5 is installed on the frame bar 4, the connector 5b is brought into contact with the frame bar wiring 4a by the elasticity of the connector 5b. The frame bar wiring 4a can be electrically connected.
　なお、コネクタ５ｂは、プローブピン組立部５をフレームバー４に設置した際に、コネクタ５ｂとフレームバー配線４ａとの電気的接続が得られる構成であれば、バネ部材に限らず別の構成としてもよい。 The connector 5b is not limited to a spring member, but may be configured as another configuration as long as electrical connection between the connector 5b and the frame bar wiring 4a is obtained when the probe pin assembly 5 is installed on the frame bar 4. Also good.
　上記構成とすることで、液晶基板の電極端子の配置間隔がd1である種類の基板であれば、この配置間隔がd1と同じ配置間隔のプローブピン５ａを備えるプローブピン組立部５Ａを用いることで、電極端子の配置仕様が異なる場合であっても、共通のプローバフレーム２を用いることができる。また、同様にして、液晶基板の電極端子の配置間隔がd2である種類の基板であれば、この配置間隔がd2と同じ配置間隔のプローブピン５ａを備えるプローブピン組立部５Ｂを用いることで、電極端子の配置仕様が異なる場合であっても、共通のプローバフレーム２を用いることができる。 By adopting the above-described configuration, if the arrangement interval of the electrode terminals of the liquid crystal substrate is d1, the probe pin assembly section 5A including the probe pins 5a having the same arrangement interval as d1 is used. Even if the arrangement specifications of the electrode terminals are different, the common prober frame 2 can be used. Similarly, in the case of a type of substrate in which the arrangement interval of the electrode terminals of the liquid crystal substrate is d2, by using the probe pin assembly portion 5B including the probe pins 5a having the same arrangement interval as that of d2, Even if the arrangement specifications of the electrode terminals are different, the common prober frame 2 can be used.
　プローブピン５ａの配置間隔は上記したd1,d2の２種類に限らず、種々の液晶基板種が備える電極端子の配置間隔に対応させて用意しておくことで、検査対象の液晶基板種に応じて選択することができる。 The arrangement interval of the probe pins 5a is not limited to the two types d1 and d2 described above, but by preparing the arrangement corresponding to the arrangement intervals of the electrode terminals included in various liquid crystal substrate types, the probe pins 5a can be arranged according to the type of liquid crystal substrate to be inspected. Can be selected.
　図４～図７を用いて、本発明のプローバを用いることによって、仕様が異なる液晶基板に対して共通のプローバによるプローブピンの接触が可能となることを説明する。 Referring to FIGS. 4 to 7, it will be described that by using the prober of the present invention, the probe pins can be contacted with a common prober on liquid crystal substrates having different specifications.
　図４は、前記した図８と同様に、電極端子の配置が異なる例を示している。図４（ａ）の液晶基板１０aと図４（ｃ）の液晶基板１０ｂとは、電極端子を配置する共通の座標位置を有し、液晶基板の各液晶パネルはこの共通座標位置の中から基板種毎に選択した座標位置に電極端子を設定する。 FIG. 4 shows an example in which the arrangement of the electrode terminals is different as in FIG. The liquid crystal substrate 10a in FIG. 4 (a) and the liquid crystal substrate 10b in FIG. 4 (c) have a common coordinate position where the electrode terminals are arranged, and each liquid crystal panel of the liquid crystal substrate is a substrate from among the common coordinate positions. An electrode terminal is set at the coordinate position selected for each species.
　図４（ａ）に示す液晶基板１０ａでは、６個の共通座標位置の中から図中の左方の３個の共通座標位置を選択して、この共通座標位置に使用電極端子１３（図中の実線で示す）を設け、図中の右方の３個の共通座標位置については未使用電極端子１４（図中の破線で示す）とする。 In the liquid crystal substrate 10a shown in FIG. 4A, the left three common coordinate positions in the figure are selected from the six common coordinate positions, and the electrode terminal 13 (in the figure) is selected at the common coordinate position. The three common coordinate positions on the right side in the figure are the unused electrode terminals 14 (indicated by the broken lines in the figure).
　一方、図４（ｃ）に示す液晶基板１０ｂでは、６個の共通座標位置の中から図中の右方の３個の共通座標位置を選択して、この共通座標位置に使用電極端子１３（図中の実線で示す）を設け、図中の左方の３個の共通座標位置については未使用電極端子１４（図中の破線で示す）とする。 On the other hand, in the liquid crystal substrate 10b shown in FIG. 4C, the three common coordinate positions on the right side in the figure are selected from the six common coordinate positions, and the electrode terminal 13 ( The left three common coordinate positions in the figure are the unused electrode terminals 14 (indicated by the broken lines in the figure).
　この未使用電極端子１４は電極端子として使用しないものであって、共通座標位置に電極端子を形成するものの、その電極端子を未使用状態とする構成の他、共通座標位置に電極端子を形成しない構成としてもよい。 Although this unused electrode terminal 14 is not used as an electrode terminal and forms an electrode terminal at a common coordinate position, the electrode terminal is not formed at a common coordinate position in addition to a configuration in which the electrode terminal is unused. It is good also as a structure.
　したがって、液晶基板１０ａと液晶基板１０ｂとは、電極端子の配置において異なる構成とし、何れか一方の液晶基板に対応してプローブピンの配置位置を固定して定めたプローバの構成の場合には、他方の液晶基板については使用することができないことになる。 Therefore, the liquid crystal substrate 10a and the liquid crystal substrate 10b are configured differently in the arrangement of the electrode terminals, and in the case of a prober configuration in which the arrangement position of the probe pin is fixed corresponding to any one of the liquid crystal substrates, The other liquid crystal substrate cannot be used.
　図４（ｂ）に示すプローバ１ａは、図４（ａ）に示す液晶基板１０ａの使用電極端子１３の配置位置に対応させて、プローブピン組立部５をフレームバー４に配置した構成を示している。このプローブピン組立部５の配置によれば、プローブピン５ａの位置と液晶基板１０ａの使用電極端子１３の位置とを合わせることができる。 The prober 1a shown in FIG. 4B shows a configuration in which the probe pin assembly portion 5 is arranged on the frame bar 4 in correspondence with the arrangement position of the use electrode terminal 13 of the liquid crystal substrate 10a shown in FIG. Yes. According to the arrangement of the probe pin assembly portion 5, the position of the probe pin 5a and the position of the use electrode terminal 13 of the liquid crystal substrate 10a can be matched.
　また、図４（ｄ）に示すプローバ１ｂは、図４（ｃ）に示す液晶基板１０ｂの使用電極端子１３の配置位置に対応させてプローブピン組立部５をフレームバー４に配置した構成を示している。このプローブピン組立部５の配置によれば、プローブピン５ａの位置と液晶基板１０ｂの使用電極端子１３の位置とを合わせることができる。 Further, the prober 1b shown in FIG. 4D shows a configuration in which the probe pin assembly portion 5 is arranged on the frame bar 4 in correspondence with the arrangement position of the use electrode terminal 13 of the liquid crystal substrate 10b shown in FIG. ing. According to the arrangement of the probe pin assembly portion 5, the position of the probe pin 5a and the position of the use electrode terminal 13 of the liquid crystal substrate 10b can be matched.
　図５は、基板の共通座標位置と各基板とプローブピン組立部の関係を説明するための図である。 FIG. 5 is a view for explaining the common coordinate position of the substrate and the relationship between each substrate and the probe pin assembly.
　図５（ａ）は、基板の共通な座標位置１５を破線で示している。ここでは、６個の端子位置を一つのユニットとする例を示している。 FIG. 5A shows a common coordinate position 15 of the substrate with a broken line. Here, an example in which six terminal positions are set as one unit is shown.
　図５（ｂ）は液晶基板１０ａの例を示し、６個の端子位置を含む座標位置１５において、図中の左方の連続する３個の座標位置（地模様で示す）を使用電極端子１３の配置位置とし、図中の右方の連続する３個の座標位置（破線で示す）を未使用電極端子１４の配置位置としている。プローブピン組立部５は使用電極端子１３の配置位置に対応させてフレームバー４に配置することによって、プローブピン５ａを使用電極端子１３に接触させることができる。 FIG. 5B shows an example of the liquid crystal substrate 10a. At the coordinate position 15 including the six terminal positions, three consecutive coordinate positions (indicated by a ground pattern) on the left in the figure are used. The three consecutive coordinate positions (shown by broken lines) on the right side in the figure are the arrangement positions of the unused electrode terminals 14. The probe pin assembly 5 can be brought into contact with the use electrode terminal 13 by arranging the probe pin assembly 5 on the frame bar 4 in correspondence with the arrangement position of the use electrode terminal 13.
　一方、図５（ｃ）は液晶基板１０ｂの例を示し、６個の端子位置を含む座標位置１５において、図中の右方の連続する３個の座標位置（地模様で示す）を使用電極端子１３の配置位置とし、図中の左方の連続する３個の座標位置（破線で示す）を未使用電極端子１４の配置位置としている。プローブピン組立部５は使用電極端子１３の配置位置に対応させてフレームバー４に配置することによって、プローブピン５ａを使用電極端子１３に接触させることができる。 On the other hand, FIG. 5C shows an example of the liquid crystal substrate 10b, and at the coordinate position 15 including the six terminal positions, three consecutive coordinate positions (indicated by a ground pattern) on the right in the figure are used. As the arrangement position of the terminal 13, the three consecutive coordinate positions (shown by broken lines) on the left side in the figure are the arrangement positions of the unused electrode terminals 14. The probe pin assembly 5 can be brought into contact with the use electrode terminal 13 by arranging the probe pin assembly 5 on the frame bar 4 in correspondence with the arrangement position of the use electrode terminal 13.
　図６に示す例は、電極端子の配置の他に液晶パネルの配置も異なる例を示している。図６（ａ）の液晶基板１０ｃと図６（ｃ）の液晶基板１０ｄとは、６面の液晶パネルを有するパネル仕様において、電極端子を配置する共通の座標位置を有し、各液晶パネルはこの共通座標位置の中から基板種毎に選択した座標位置に電極端子を設定する。 The example shown in FIG. 6 shows an example in which the arrangement of the liquid crystal panel is different in addition to the arrangement of the electrode terminals. The liquid crystal substrate 10c in FIG. 6 (a) and the liquid crystal substrate 10d in FIG. 6 (c) have a common coordinate position in which electrode terminals are arranged in a panel specification having a liquid crystal panel with six surfaces. An electrode terminal is set at a coordinate position selected for each substrate type from the common coordinate positions.
　図６（ａ）に示す液晶基板１０ｃでは、６個の共通座標位置の中から図中の左方の３個の共通座標位置を選択して、この共通座標位置に使用電極端子１３（図中の実線で示す）を設け、図中の右方の３個の共通座標位置については未使用電極端子１４（図中の破線で示す）とする。 In the liquid crystal substrate 10c shown in FIG. 6A, three common coordinate positions on the left side of the figure are selected from the six common coordinate positions, and the electrode terminal 13 (in the figure) is selected at the common coordinate position. The three common coordinate positions on the right side in the figure are the unused electrode terminals 14 (indicated by the broken lines in the figure).
　一方、図６（ｃ）に示す液晶基板１０ｄでは、６個の共通座標位置の中から図中の右方の３個の共通座標位置を選択して、この共通座標位置に使用電極端子１３（図中の実線で示す）を設け、図中の左方の３個の共通座標位置については未使用電極端子１４（図中の破線で示す）とする。 On the other hand, in the liquid crystal substrate 10d shown in FIG. 6C, the three common coordinate positions on the right side in the figure are selected from the six common coordinate positions, and the use electrode terminal 13 ( The left three common coordinate positions in the figure are the unused electrode terminals 14 (indicated by the broken lines in the figure).
　この未使用電極端子１４は電極端子として使用しないものであって、共通座標位置に電極端子を形成するものの、その電極端子を未使用状態とする構成の他、共通座標位置に電極端子を形成しない構成としてもよい。 Although this unused electrode terminal 14 is not used as an electrode terminal and forms an electrode terminal at a common coordinate position, the electrode terminal is not formed at a common coordinate position in addition to a configuration in which the electrode terminal is unused. It is good also as a structure.
　したがって、液晶基板１０ｃと液晶基板１０ｄとは、前記した液晶基板１０ａおよび液晶基板１０ｂと同様に、電極端子の配置において異なる構成とし、何れか一方の液晶基板に対応してプローブピンの配置位置を固定して定めたプローバの構成の場合には、他方の液晶基板については使用することができないことになる。 Therefore, the liquid crystal substrate 10c and the liquid crystal substrate 10d are configured differently in the arrangement of the electrode terminals similarly to the liquid crystal substrate 10a and the liquid crystal substrate 10b described above, and the arrangement positions of the probe pins corresponding to one of the liquid crystal substrates. In the case of a fixed prober configuration, the other liquid crystal substrate cannot be used.
　図６（ｂ）に示すプローバ１ｃは、図６（ａ）に示す液晶基板１０ｃの使用電極端子１３の配置位置に対応させて、プローブピン組立部５をフレームバー４に配置した構成を示している。このプローブピン組立部５の配置によれば、プローブピン５ａの位置と液晶基板１０ｃの使用電極端子１３の位置とを合わせることができる。 The prober 1c shown in FIG. 6B shows a configuration in which the probe pin assembly portion 5 is arranged on the frame bar 4 so as to correspond to the arrangement position of the use electrode terminal 13 of the liquid crystal substrate 10c shown in FIG. Yes. According to the arrangement of the probe pin assembly portion 5, the position of the probe pin 5a and the position of the use electrode terminal 13 of the liquid crystal substrate 10c can be matched.
　また、図６（ｄ）に示すプローバ１ｄは、図６（ｃ）に示す液晶基板１０ｄの使用電極端子１３の配置位置に対応させてプローブピン組立部５をフレームバー４に配置した構成を示している。このプローブピン組立部５の配置によれば、プローブピン５ａの位置と液晶基板１０ｄの使用電極端子１３の位置とを合わせることができる。 Further, the prober 1d shown in FIG. 6 (d) shows a configuration in which the probe pin assembly portion 5 is arranged on the frame bar 4 so as to correspond to the arrangement position of the use electrode terminal 13 of the liquid crystal substrate 10d shown in FIG. 6 (c). ing. According to the arrangement of the probe pin assembly portion 5, the position of the probe pin 5a and the position of the use electrode terminal 13 of the liquid crystal substrate 10d can be matched.
　図７は、基板の共通座標位置と各基板とプローブピン組立部の関係を説明するための図である。 FIG. 7 is a diagram for explaining the common coordinate position of the substrate and the relationship between each substrate and the probe pin assembly.
　図７（ａ）は基板共通座標位置の電極端子の間隔がd2の例を示し、図７（ｂ）は基板共通座標位置の電極端子の間隔がd1の例を示している。なお、ここでは、間隔d1は間隔d2よりも小さい場合を例として示している。 7A shows an example in which the electrode terminal interval at the common substrate coordinate position is d2, and FIG. 7B shows an example in which the electrode terminal interval at the common substrate coordinate position is d1. Here, the case where the interval d1 is smaller than the interval d2 is shown as an example.
　図７（a-1）は、基板の共通な座標位置１５ａを破線で示している。ここでは、６個の端子位置を一つのユニットとする例を示している。 FIG. 7 (a-1) shows a common coordinate position 15a of the substrate with a broken line. Here, an example in which six terminal positions are set as one unit is shown.
　図７（a-2）は、６個の端子位置を含む座標位置１５ａにおいて、図中の左方の連続する３個の座標位置を使用電極端子の配置位置とし、図中の右方の連続する３個の座標位置を未使用電極端子の配置位置とし、プローブピン組立部５を使用電極端子の配置位置に対応させる構成を示している。 FIG. 7 (a-2) shows a coordinate position 15a including six terminal positions, and three consecutive coordinate positions on the left side in the figure are used electrode terminal arrangement positions, and the right side in the figure is continuous. The three coordinate positions to be used are the positions where the unused electrode terminals are arranged, and the probe pin assembly 5 is shown to correspond to the positions where the used electrode terminals are arranged.
　一方、図７（a-3）は、６個の端子位置を含む座標位置１５ａにおいて、図中の右方の連続する３個の座標位置を使用電極端子の配置位置とし、図中の左方の連続する３個の座標位置を未使用電極端子の配置位置とし、プローブピン組立部５を使用電極端子の配置位置に対応させる構成を示している。 On the other hand, FIG. 7 (a-3) shows the coordinate position 15a including six terminal positions, and the three consecutive coordinate positions on the right side in the figure are used electrode terminal arrangement positions, and the left side in the figure. 3 is a configuration in which the three consecutive coordinate positions are used as the positions where the unused electrode terminals are arranged, and the probe pin assembly 5 corresponds to the positions where the used electrode terminals are arranged.
　図７（b-1）は、基板の共通な座標位置１５ｂを破線で示している。ここでは、６個の端子位置を一つのユニットとする例を示している。 FIG. 7 (b-1) shows a common coordinate position 15b of the substrate with a broken line. Here, an example in which six terminal positions are set as one unit is shown.
　図７（b-2）は、６個の端子位置を含む座標位置１５ｂにおいて、図中の左方の連続する３個の座標位置を使用電極端子の配置位置とし、図中の右方の連続する３個の座標位置を未使用電極端子の配置位置とし、プローブピン組立部５を使用電極端子の配置位置に対応させる構成を示している。 FIG. 7 (b-2) shows the arrangement positions of the electrode terminals used at the left three consecutive coordinate positions in the drawing at the coordinate position 15b including the six terminal positions, and the right continuous in the drawing. The three coordinate positions to be used are the positions where the unused electrode terminals are arranged, and the probe pin assembly 5 is shown to correspond to the positions where the used electrode terminals are arranged.
　一方、図７（b-3）は、６個の端子位置を含む座標位置１５ｂにおいて、図中の右方の連続する３個の座標位置を使用電極端子の配置位置とし、図中の左方の連続する３個の座標位置を未使用電極端子の配置位置とし、プローブピン組立部５を使用電極端子の配置位置に対応させる構成を示している。 On the other hand, FIG. 7 (b-3) shows the three consecutive coordinate positions on the right side in the figure at the coordinate position 15b including the six terminal positions, and the left electrode position in the figure. 3 is a configuration in which the three consecutive coordinate positions are used as the positions where the unused electrode terminals are arranged, and the probe pin assembly 5 corresponds to the positions where the used electrode terminals are arranged.
　上記したように、基板共通座標位置に応じて、その電極端子間隔に応じてプローブピンの配置間隔を設定したプローブピン組立部を用意することによって、基板の仕様が異なる場合であっても、共通のプローバフレームを利用することができる。 As described above, by preparing the probe pin assembly part with the probe pin arrangement interval set according to the electrode terminal interval according to the board common coordinate position, even if the board specifications are different, it is common The prober frame can be used.
　本発明の液晶基板検査用プローバは、液晶ディスプレイに用いられる液晶基板、有機ＥＬディスブレイなどに使われる有機ＥＬ基板の他、半導体基板の検査に適用することができる。 The prober for inspecting a liquid crystal substrate of the present invention can be applied to an inspection of a semiconductor substrate as well as a liquid crystal substrate used for a liquid crystal display, an organic EL substrate used for an organic EL display and the like.

Claims (4)

  1. 　液晶基板に検査信号を印加する液晶基板検査用プローバであって、
    　少なくとも液晶基板の外周を囲むフレーム枠と前記フレーム枠の対向する辺部間において設置位置を自在とするフレームバーとを含むプローバフレームと、
    　前記フレームバーの長さ方向の任意の位置に着脱自在とするプローブピン組立部とを備え、
    　前記フレームバーは長さ方向に沿ってフレームバー配線を配設し、
    　前記プローブピン組立部は、
    　液晶基板の電極端子と接触する複数本のプローブピンと、
    　前記フレームバー配線と接触する複数個のコネクタと、
    　前記プローブピンと前記コネクタとを接続するピンホルダ配線と、
    　前記プローブピンとコネクタとピンホルダ配線を保持するピンホルダとを有し、
    　前記プローブピン組立部は、コネクタとフレームバー配線との接触、およびプローブピンと液晶基板の電極端子との接触によって、液晶基板の電極端子に検査信号を供給することを特徴とする液晶基板検査用プローバ。     A prober for inspecting a liquid crystal substrate for applying an inspection signal to the liquid crystal substrate,
    A prober frame including at least a frame frame that surrounds the outer periphery of the liquid crystal substrate and a frame bar that allows an installation position to be freely set between opposing sides of the frame frame;
    A probe pin assembly that is detachable at an arbitrary position in the length direction of the frame bar;
    The frame bar is provided with a frame bar wiring along the length direction,
    The probe pin assembly is
    A plurality of probe pins in contact with the electrode terminals of the liquid crystal substrate;
    A plurality of connectors in contact with the frame bar wiring;
    A pin holder wiring connecting the probe pin and the connector;
    The probe pin, the connector, and a pin holder that holds the pin holder wiring,
    The probe pin assembly section supplies a test signal to the electrode terminal of the liquid crystal substrate by contact between the connector and the frame bar wiring, and contact between the probe pin and the electrode terminal of the liquid crystal substrate. .
  2. 　液晶基板の電極端子の配置仕様に応じて、前記プローブピンの配置間隔を異にする複数種類のプローブピン組立部を備えることを特徴とする、請求項１に記載の液晶基板検査用プローバ。 2. The prober for inspecting a liquid crystal substrate according to claim 1, comprising a plurality of types of probe pin assembly parts having different arrangement intervals of the probe pins according to the arrangement specification of the electrode terminals of the liquid crystal substrate.
  3. 　前記フレームバーは、一方が開放された断面がコの字型の長尺材であり、
    　前記フレームバー配線は、前記コの字型の内側表面にプリント基板を配設し、
    　前記プローブピンは、前記フレームバーに取り付けた際に、前記コの字型の開口部分から突出することを特徴とする、請求項１又は２に記載の液晶基板検査用プローバ。     The frame bar is a long material having a U-shaped cross section with one side open,
    The frame bar wiring is provided with a printed circuit board on the inner surface of the U-shape,
    3. The prober for inspecting a liquid crystal substrate according to claim 1, wherein the probe pin protrudes from the U-shaped opening when attached to the frame bar.
  4. 　前記フレームバーは、両方が開放された断面がＩの字型の長尺材であり、
    　前記フレームバー配線は、前記Ｉの字型の２つの内側表面の少なくとも一方の面にプリント基板を配設し、
    　前記プローブピンは、前記フレームバーに取り付けた際に、前記Ｉの字型の開口部分から突出することを特徴とする、請求項１又は２に記載の液晶基板検査用プローバ。     The frame bar is a long material having an I-shaped cross section with both open,
    The frame bar wiring has a printed circuit board disposed on at least one of the two I-shaped inner surfaces,
    3. The prober for inspecting a liquid crystal substrate according to claim 1, wherein the probe pin protrudes from the I-shaped opening when attached to the frame bar. 4.
PCT/JP2008/061616 2008-06-26 2008-06-26 Prober for inspecting liquid crystal substrate WO2009157074A1 (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09229965A (en) * 1996-02-26 1997-09-05 Nippon Maikuronikusu:Kk Probe unit and adjusting method thereof
JP2004301658A (en) * 2003-03-31 2004-10-28 Shimadzu Corp Board inspection equipment
JP2007171094A (en) * 2005-12-26 2007-07-05 Shimadzu Corp LCD substrate inspection equipment

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09229965A (en) * 1996-02-26 1997-09-05 Nippon Maikuronikusu:Kk Probe unit and adjusting method thereof
JP2004301658A (en) * 2003-03-31 2004-10-28 Shimadzu Corp Board inspection equipment
JP2007171094A (en) * 2005-12-26 2007-07-05 Shimadzu Corp LCD substrate inspection equipment

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