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WO2009069770A1 - アルミナ質焼結体およびその製法ならびに半導体製造装置用部材、液晶パネル製造装置用部材および誘電体共振器用部材 - Google Patents

アルミナ質焼結体およびその製法ならびに半導体製造装置用部材、液晶パネル製造装置用部材および誘電体共振器用部材 Download PDF

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Publication number
WO2009069770A1
WO2009069770A1 PCT/JP2008/071699 JP2008071699W WO2009069770A1 WO 2009069770 A1 WO2009069770 A1 WO 2009069770A1 JP 2008071699 W JP2008071699 W JP 2008071699W WO 2009069770 A1 WO2009069770 A1 WO 2009069770A1
Authority
WO
WIPO (PCT)
Prior art keywords
sinter
aluminous
crystal
production apparatus
alumina
Prior art date
Application number
PCT/JP2008/071699
Other languages
English (en)
French (fr)
Inventor
Tatsuji Furuse
Shinya Yokomine
Hiroaki Seno
Original Assignee
Kyocera Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2008278134A external-priority patent/JP5371373B2/ja
Priority claimed from JP2008278133A external-priority patent/JP5371372B2/ja
Priority to US12/745,246 priority Critical patent/US8247337B2/en
Priority claimed from JP2008301038A external-priority patent/JP5435932B2/ja
Application filed by Kyocera Corporation filed Critical Kyocera Corporation
Priority to KR1020107010888A priority patent/KR101200385B1/ko
Publication of WO2009069770A1 publication Critical patent/WO2009069770A1/ja

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • C04B35/111—Fine ceramics

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)

Abstract

【課題】　ＭＨｚ帯～ＧＨｚ帯における誘電正接を小さくできるアルミナ質焼結体およびその製法ならびに半導体製造装置用部材、液晶パネル製造装置用部材および誘電体共振器用部材を提供する。 【解決手段】　ＡｌをＡｌ２Ｏ３換算で９９．３質量％以上含有し、他の元素としてＳｉをＳｉＯ２換算で０．０５質量％以上、ＳｒをＳｒＯ換算で０．０１質量％以上含有し、アルミナ結晶粒子１を主結晶粒子としてなり、アルミナ結晶粒子１で構成される３重点２にＳｉ、Ａｌ、ＳｒおよびＯの各元素を含有する結晶相が存在する。アルミナの優れた耐腐食性と機械的特性、電気特性を維持できるとともに、アルミナ結晶粒子１で構成される３重点２に、Ｓｉ、Ａｌ、ＳｒおよびＯ元素を含有する化合物からなる低損失の結晶相が存在するため、従来よりもＭＨｚ帯～ＧＨｚ帯で低損失のアルミナ質焼結体を得ることができる。
PCT/JP2008/071699 2007-11-28 2008-11-28 アルミナ質焼結体およびその製法ならびに半導体製造装置用部材、液晶パネル製造装置用部材および誘電体共振器用部材 WO2009069770A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/745,246 US8247337B2 (en) 2007-11-28 2008-11-11 Alumina sintered article
KR1020107010888A KR101200385B1 (ko) 2007-11-28 2008-11-28 알루미나질 소결체, 그 제법, 반도체 제조장치용 부재, 액정 패널 제조장치용 부재, 및 유전체 공진기용 부재

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP2007-307350 2007-11-28
JP2007307350 2007-11-28
JP2008-080842 2008-03-26
JP2008080842 2008-03-26
JP2008-278134 2008-10-29
JP2008278134A JP5371373B2 (ja) 2008-10-29 2008-10-29 アルミナ質焼結体ならびに半導体製造装置用部材、液晶パネル製造装置用部材および誘電体共振器用部材
JP2008278133A JP5371372B2 (ja) 2008-03-26 2008-10-29 アルミナ質焼結体ならびに半導体製造装置用部材、液晶パネル製造装置用部材および誘電体共振器用部材
JP2008-278133 2008-10-29
JP2008-301038 2008-11-26
JP2008301038A JP5435932B2 (ja) 2007-11-28 2008-11-26 アルミナ質焼結体およびその製法ならびに半導体製造装置用部材、液晶パネル製造装置用部材および誘電体共振器用部材

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12745246 Continuation 2010-05-27

Publications (1)

Publication Number Publication Date
WO2009069770A1 true WO2009069770A1 (ja) 2009-06-04

Family

ID=40678659

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/071699 WO2009069770A1 (ja) 2007-11-28 2008-11-28 アルミナ質焼結体およびその製法ならびに半導体製造装置用部材、液晶パネル製造装置用部材および誘電体共振器用部材

Country Status (1)

Country Link
WO (1) WO2009069770A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011116615A (ja) * 2009-11-02 2011-06-16 Kyocera Corp アルミナ質焼結体
WO2017220888A1 (fr) * 2016-06-22 2017-12-28 Imerys Fused Minerals Beyrède Particule abrasive frittee a base d'oxydes presents dans la bauxite

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05301762A (ja) * 1992-04-27 1993-11-16 Mitsubishi Materials Corp 靭性のすぐれた酸化アルミニウム基セラミックス製切削工具の製造法
JPH0616469A (ja) * 1992-06-30 1994-01-25 Kyocera Corp アルミナ磁器組成物
JPH08208317A (ja) * 1995-01-31 1996-08-13 Kyocera Corp アルミナ質焼結体およびその製造方法
JPH08235933A (ja) * 1995-02-28 1996-09-13 Kyocera Corp アルミナ質焼結体
JP2003238249A (ja) * 2002-02-19 2003-08-27 Kyocera Corp ガラスセラミックス並びに配線基板
JP2005050875A (ja) * 2003-07-29 2005-02-24 Kyocera Corp セラミックパッケージ
JP2007254273A (ja) * 2006-02-24 2007-10-04 Kyocera Corp アルミナ質焼結体及びこれを用いた処理装置用部材と処理装置ならびに処理方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05301762A (ja) * 1992-04-27 1993-11-16 Mitsubishi Materials Corp 靭性のすぐれた酸化アルミニウム基セラミックス製切削工具の製造法
JPH0616469A (ja) * 1992-06-30 1994-01-25 Kyocera Corp アルミナ磁器組成物
JPH08208317A (ja) * 1995-01-31 1996-08-13 Kyocera Corp アルミナ質焼結体およびその製造方法
JPH08235933A (ja) * 1995-02-28 1996-09-13 Kyocera Corp アルミナ質焼結体
JP2003238249A (ja) * 2002-02-19 2003-08-27 Kyocera Corp ガラスセラミックス並びに配線基板
JP2005050875A (ja) * 2003-07-29 2005-02-24 Kyocera Corp セラミックパッケージ
JP2007254273A (ja) * 2006-02-24 2007-10-04 Kyocera Corp アルミナ質焼結体及びこれを用いた処理装置用部材と処理装置ならびに処理方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011116615A (ja) * 2009-11-02 2011-06-16 Kyocera Corp アルミナ質焼結体
WO2017220888A1 (fr) * 2016-06-22 2017-12-28 Imerys Fused Minerals Beyrède Particule abrasive frittee a base d'oxydes presents dans la bauxite
FR3052993A1 (fr) * 2016-06-22 2017-12-29 Alteo Arc Particule abrasive frittee a base d'oxydes presents dans la bauxite

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