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WO2009034804A1 - 防塵機構付きリニアアクチュエータ - Google Patents

防塵機構付きリニアアクチュエータ Download PDF

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Publication number
WO2009034804A1
WO2009034804A1 PCT/JP2008/064449 JP2008064449W WO2009034804A1 WO 2009034804 A1 WO2009034804 A1 WO 2009034804A1 JP 2008064449 W JP2008064449 W JP 2008064449W WO 2009034804 A1 WO2009034804 A1 WO 2009034804A1
Authority
WO
WIPO (PCT)
Prior art keywords
ball screw
linear actuator
dustproof
housing member
dustproof mechanism
Prior art date
Application number
PCT/JP2008/064449
Other languages
English (en)
French (fr)
Inventor
Toshiyuki Aso
Toshiya Tanaka
Norinobu Ogawa
Toshiaki Mizuno
Minoru Tsukada
Yukitoshi Kobayashi
Original Assignee
Thk Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thk Co., Ltd. filed Critical Thk Co., Ltd.
Priority to JP2009532117A priority Critical patent/JP5469459B2/ja
Priority to KR1020107005482A priority patent/KR101516456B1/ko
Priority to CN2008801067675A priority patent/CN101802455B/zh
Priority to DE112008002379.4T priority patent/DE112008002379B4/de
Priority to US12/676,474 priority patent/US8272286B2/en
Publication of WO2009034804A1 publication Critical patent/WO2009034804A1/ja

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • F16H25/2418—Screw seals, wipers, scrapers or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/08—Arrangements for covering or protecting the ways
    • F16C29/082—Arrangements for covering or protecting the ways fixed to the way
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H2025/2031—Actuator casings
    • F16H2025/2034—Extruded frame casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/22—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members
    • F16H25/2204—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members with balls
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
    • Y10T74/18576—Reciprocating or oscillating to or from alternating rotary including screw and nut
    • Y10T74/18712—Contamination related
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
    • Y10T74/18576—Reciprocating or oscillating to or from alternating rotary including screw and nut
    • Y10T74/18712—Contamination related
    • Y10T74/1872—Imperforate enclosure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transmission Devices (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

　ストローク範囲の全域に亘って確実な防塵機能を発揮することの可能な防塵機構付きリニアアクチュエータを提供する。 　防塵機構付きリニアアクチュエータ１００は、ボールねじと、ボールねじに係合するボールねじナットを有し、ボールねじの回転運動にともなって該ボールねじの軸方向に往復直線運動自在とされる移動ステージ４と、少なくともボールねじを覆って設置されるハウジング部材２と、移動ステージ４の移動軌跡に沿ってハウジング部材２に形成される開口部２７，２８と、開口部２７，２８を封鎖するためにハウジング部材２の内側に配置される防塵ベルト２９，３０と、を備える装置である。そして、この防塵機構付きリニアアクチュエータ１００は、ハウジング部材２の端部側を覆うエンドプレートカバー１０５ａ，１０５ｂを備えることにより、高い防塵性能を有している。
PCT/JP2008/064449 2007-09-13 2008-08-12 防塵機構付きリニアアクチュエータ WO2009034804A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2009532117A JP5469459B2 (ja) 2007-09-13 2008-08-12 防塵機構付きリニアアクチュエータ
KR1020107005482A KR101516456B1 (ko) 2007-09-13 2008-08-12 방진 기구가 구비된 리니어 액추에이터
CN2008801067675A CN101802455B (zh) 2007-09-13 2008-08-12 带有防尘机构的直线运动促动器
DE112008002379.4T DE112008002379B4 (de) 2007-09-13 2008-08-12 Linearantrieb mit einem Staubschutzmechanismus
US12/676,474 US8272286B2 (en) 2007-09-13 2008-08-12 Linear actuator with dustproof mechanism

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-237768 2007-09-13
JP2007237768 2007-09-13

Publications (1)

Publication Number Publication Date
WO2009034804A1 true WO2009034804A1 (ja) 2009-03-19

Family

ID=40451814

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/064449 WO2009034804A1 (ja) 2007-09-13 2008-08-12 防塵機構付きリニアアクチュエータ

Country Status (7)

Country Link
US (1) US8272286B2 (ja)
JP (2) JP5469459B2 (ja)
KR (1) KR101516456B1 (ja)
CN (1) CN101802455B (ja)
DE (1) DE112008002379B4 (ja)
TW (1) TWI431211B (ja)
WO (1) WO2009034804A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011086791A1 (ja) * 2010-01-15 2011-07-21 Thk株式会社 防塵機構付きリニアアクチュエータ
WO2012141222A1 (ja) 2011-04-15 2012-10-18 Thk株式会社 グリース組成物、および該グリース組成物で潤滑された運動案内装置
WO2014061688A1 (ja) * 2012-10-17 2014-04-24 Ntn株式会社 直動案内装置
CN108568699A (zh) * 2017-03-08 2018-09-25 宁波米控机器人科技有限公司 一种用于机床丝杆的防尘装置
JP7645002B2 (ja) 2023-06-29 2025-03-13 東佑達自動化科技股▲ふん▼有限公司 アクチュエータ装置

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102590955B (zh) * 2011-01-18 2014-09-24 富士康(昆山)电脑接插件有限公司 光纤连接器
TWM425959U (en) * 2011-12-07 2012-04-01 Univ Nat Formosa Nut structure of ball screw having micro fan
JP2013143824A (ja) * 2012-01-11 2013-07-22 Smc Corp 電動アクチュエータ
JP5934585B2 (ja) * 2012-06-19 2016-06-15 シャープ株式会社 蛍光検出装置
DE102013100019A1 (de) * 2013-01-02 2014-07-03 Conductix-Wampfler Gmbh Zustelleinheit zur Positionierung einer Stromabnehmereinheit
CN104750106A (zh) * 2013-12-30 2015-07-01 鸿富锦精密工业（深圳）有限公司 单轴机器人
JP6506508B2 (ja) * 2014-06-26 2019-04-24 日本トムソン株式会社 アクチュエータ
DE102016219923A1 (de) * 2016-10-13 2018-04-19 Robert Bosch Gmbh Linearbewegungsvorrichtung mit Abdeckplatte welche Dichtlippen aufweist
CN106438897A (zh) * 2016-11-07 2017-02-22 东莞市汉翔机械设备有限公司 一种全密防尘螺杆滑台结构
CN107327481A (zh) * 2017-06-30 2017-11-07 成都福誉科技有限公司 一种封闭式直线模组及其制作方法
TWI644033B (zh) * 2017-08-10 2018-12-11 銀泰科技股份有限公司 線性模組
KR101956462B1 (ko) * 2017-08-16 2019-06-24 에스케이에프코리아(주) 리니어 모듈
CN109424709B (zh) * 2017-08-31 2022-02-15 上海微电子装备（集团）股份有限公司 一种线性模组及其工作方法
TWI655375B (zh) * 2017-11-23 2019-04-01 上銀科技股份有限公司 線性模組
TWI860430B (zh) * 2019-12-11 2024-11-01 日商東京威力科創股份有限公司 直線運動機構及顆粒之飛散抑制方法
KR102432778B1 (ko) * 2021-02-18 2022-08-16 (주)에스피시스템스 개방형 구조의 집진 시스템이 적용된 크린룸용 단축 로봇
JP2023104051A (ja) * 2022-01-17 2023-07-28 株式会社日立ハイテク ステージ装置、荷電粒子線装置及び真空装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63172545U (ja) * 1987-04-30 1988-11-09
JPH02145235A (ja) * 1988-11-28 1990-06-04 Hitachi Electron Eng Co Ltd 作業機構の直線搬送装置
JPH08290384A (ja) * 1995-04-18 1996-11-05 Nippon Seiko Kk 低発塵直動アクチュエータ
JPH09201002A (ja) * 1996-01-19 1997-07-31 Smc Corp アクチュエータ
JP2002206530A (ja) * 2000-10-25 2002-07-26 Nippon Thompson Co Ltd スライド装置のシール構造

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62175972A (ja) * 1986-01-29 1987-08-01 Hitachi Ltd リニアアクチユエ−タ組立体
JPS63172545A (ja) 1987-01-10 1988-07-16 Bijikon Kk カ−ド・インデツクス式無接触選択自動ダイアリング装置
JPH05283509A (ja) * 1992-03-31 1993-10-29 Nippon Seiko Kk ダスト吸引装置
DE9211093U1 (de) 1992-08-19 1992-10-22 INA Wälzlager Schaeffler KG, 8522 Herzogenaurach Schutzabdeckung für die Laufbahn und die Vortriebseinrichtung einer Linearführung
JPH07217607A (ja) * 1994-02-03 1995-08-15 Smc Corp 負荷の位置決め装置
GB2323716B (en) * 1997-02-10 2001-02-07 Matsushita Electric Ind Co Ltd Linear actuator and optical equipment using the same
JP4311801B2 (ja) 1999-03-15 2009-08-12 Ｔｈｋ株式会社 防塵機構付きリニアアクチュエータ
US6460859B1 (en) * 2000-04-12 2002-10-08 Parker-Hannifin Corporation Resilient elastomer and metal retainer gasket for sealing between curved surfaces
AU2000257088A1 (en) * 2000-07-03 2002-01-14 Thk Co., Ltd. Linear actuator with dustproof mechanism
US6588289B2 (en) * 2001-07-06 2003-07-08 Danaher Motion Technology, Llc Linear actuator with protective guide chassis enclosing the lead screw
JP2003090411A (ja) * 2001-09-19 2003-03-28 Hitachi Electronics Eng Co Ltd ボールねじ移動機構
JP3750637B2 (ja) * 2002-07-12 2006-03-01 日本精工株式会社 低発塵直動アクチュエータ
JP4568497B2 (ja) 2003-12-25 2010-10-27 Ｔｈｋ株式会社 防塵アクチュエータ及び防塵運動案内装置
JP4452551B2 (ja) * 2004-05-11 2010-04-21 日本トムソン株式会社 低発塵用スライド装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63172545U (ja) * 1987-04-30 1988-11-09
JPH02145235A (ja) * 1988-11-28 1990-06-04 Hitachi Electron Eng Co Ltd 作業機構の直線搬送装置
JPH08290384A (ja) * 1995-04-18 1996-11-05 Nippon Seiko Kk 低発塵直動アクチュエータ
JPH09201002A (ja) * 1996-01-19 1997-07-31 Smc Corp アクチュエータ
JP2002206530A (ja) * 2000-10-25 2002-07-26 Nippon Thompson Co Ltd スライド装置のシール構造

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8650978B2 (en) 2010-01-15 2014-02-18 Thk Co., Ltd. Linear actuator provided with dust-proof mechanism
JP2011144897A (ja) * 2010-01-15 2011-07-28 Thk Co Ltd 防塵機構付きリニアアクチュエータ
CN102713354A (zh) * 2010-01-15 2012-10-03 Thk株式会社 设置有防尘机构的线性致动器
WO2011086791A1 (ja) * 2010-01-15 2011-07-21 Thk株式会社 防塵機構付きリニアアクチュエータ
KR101234438B1 (ko) * 2010-01-15 2013-02-18 티에치케이 가부시끼가이샤 방진 기구가 구비된 리니어 액추에이터
CN102713354B (zh) * 2010-01-15 2013-09-11 Thk株式会社 设置有防尘机构的线性致动器
WO2012141222A1 (ja) 2011-04-15 2012-10-18 Thk株式会社 グリース組成物、および該グリース組成物で潤滑された運動案内装置
WO2014061688A1 (ja) * 2012-10-17 2014-04-24 Ntn株式会社 直動案内装置
US20150260220A1 (en) * 2012-10-17 2015-09-17 Ntn Corporation Linear motion guide device
US10294989B2 (en) 2012-10-17 2019-05-21 Ntn Corporation Linear motion guide device
US10294990B2 (en) 2012-10-17 2019-05-21 Ntn Corporation Linear motion guide device
CN108568699A (zh) * 2017-03-08 2018-09-25 宁波米控机器人科技有限公司 一种用于机床丝杆的防尘装置
JP7645002B2 (ja) 2023-06-29 2025-03-13 東佑達自動化科技股▲ふん▼有限公司 アクチュエータ装置

Also Published As

Publication number Publication date
KR20100061474A (ko) 2010-06-07
JPWO2009034804A1 (ja) 2010-12-24
TWI431211B (zh) 2014-03-21
KR101516456B1 (ko) 2015-05-04
CN101802455B (zh) 2012-07-04
TW200925461A (en) 2009-06-16
US20100206102A1 (en) 2010-08-19
DE112008002379B4 (de) 2018-07-05
DE112008002379T5 (de) 2010-07-22
CN101802455A (zh) 2010-08-11
JP5728046B2 (ja) 2015-06-03
JP2013174356A (ja) 2013-09-05
JP5469459B2 (ja) 2014-04-16
US8272286B2 (en) 2012-09-25

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