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WO2009034697A1 - シリコン構造体およびその製造方法並びにセンサチップ - Google Patents

シリコン構造体およびその製造方法並びにセンサチップ Download PDF

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Publication number
WO2009034697A1
WO2009034697A1 PCT/JP2008/002430 JP2008002430W WO2009034697A1 WO 2009034697 A1 WO2009034697 A1 WO 2009034697A1 JP 2008002430 W JP2008002430 W JP 2008002430W WO 2009034697 A1 WO2009034697 A1 WO 2009034697A1
Authority
WO
WIPO (PCT)
Prior art keywords
silicon
silicon structure
manufacturing
same
sensor chip
Prior art date
Application number
PCT/JP2008/002430
Other languages
English (en)
French (fr)
Inventor
Masaya Nakatani
Hiroshi Ushio
Soichiro Hiraoka
Akiyoshi Oshima
Makoto Takahashi
Original Assignee
Panasonic Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corporation filed Critical Panasonic Corporation
Priority to JP2009532057A priority Critical patent/JP5458887B2/ja
Priority to EP08830937.2A priority patent/EP2172415B1/en
Priority to US12/676,826 priority patent/US8314466B2/en
Priority to US12/359,426 priority patent/US8202439B2/en
Publication of WO2009034697A1 publication Critical patent/WO2009034697A1/ja
Priority to US13/651,103 priority patent/US8816450B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/487—Physical analysis of biological material of liquid biological material
    • G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48728—Investigating individual cells, e.g. by patch clamp, voltage clamp
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00206—Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0214—Biosensors; Chemical sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/052—Ink-jet print cartridges
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/23907—Pile or nap type surface or component
    • Y10T428/23943—Flock surface

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biomedical Technology (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Immunology (AREA)
  • Medicinal Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Urology & Nephrology (AREA)
  • General Physics & Mathematics (AREA)
  • Food Science & Technology (AREA)
  • Pathology (AREA)
  • Biophysics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Micromachines (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

　本発明のシリコン構造体は、基材となるシリコン基板（１）と、シリコン基板（１）のシリコンからなる表面（１ａ）に直接接合された、二酸化珪素からなる複数の繊維状突起物（２）とを備えている。この繊維状突起物（２）を形成した領域を任意に所定の領域に構成することにより、親水性および保水性のうちの少なくともいずれかを持たせることができ、各種デバイスに有用なシリコン構造体を提供することができる。
PCT/JP2008/002430 2002-06-05 2008-09-04 シリコン構造体およびその製造方法並びにセンサチップ WO2009034697A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2009532057A JP5458887B2 (ja) 2007-09-11 2008-09-04 シリコン構造体およびセンサチップ
EP08830937.2A EP2172415B1 (en) 2007-09-11 2008-09-04 Silicon structure and method for manufacturing the same
US12/676,826 US8314466B2 (en) 2007-09-11 2008-09-04 Silicon structure, method for manufacturing the same, and sensor chip
US12/359,426 US8202439B2 (en) 2002-06-05 2009-01-26 Diaphragm and device for measuring cellular potential using the same, manufacturing method of the diaphragm
US13/651,103 US8816450B2 (en) 2007-09-11 2012-10-12 Fibrous projections structure

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2007-234935 2007-09-11
JP2007234935 2007-09-11
JP2007244829 2007-09-21
JP2007-244829 2007-09-21
JP2007-267596 2007-10-15
JP2007267596 2007-10-15

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US12/133,432 Continuation-In-Part US20080257726A1 (en) 2002-06-05 2008-06-05 Extracellular potential sensing element, device for measuring extracellular potential, apparatus for measuring extracellular potential and method of measuring extracellular potential by using the same

Related Child Applications (4)

Application Number Title Priority Date Filing Date
US11/913,116 Continuation-In-Part US20100019756A1 (en) 2006-05-17 2007-05-11 Device for measuring cellular potential, substrate used for the same and method of manufacturing substrate for device for measuring cellular potential
PCT/JP2007/059743 Continuation-In-Part WO2007132769A1 (ja) 2002-06-05 2007-05-11 細胞電位測定デバイスとそれに用いる基板、細胞電位測定デバイス用基板の製造方法
US12/676,826 A-371-Of-International US8314466B2 (en) 2007-09-11 2008-09-04 Silicon structure, method for manufacturing the same, and sensor chip
US13/651,103 Continuation US8816450B2 (en) 2007-09-11 2012-10-12 Fibrous projections structure

Publications (1)

Publication Number Publication Date
WO2009034697A1 true WO2009034697A1 (ja) 2009-03-19

Family

ID=40451717

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/002430 WO2009034697A1 (ja) 2002-06-05 2008-09-04 シリコン構造体およびその製造方法並びにセンサチップ

Country Status (4)

Country Link
US (2) US8314466B2 (ja)
EP (1) EP2172415B1 (ja)
JP (1) JP5458887B2 (ja)
WO (1) WO2009034697A1 (ja)

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WO2010004695A1 (ja) * 2008-07-09 2010-01-14 パナソニック株式会社 シークエンサー
WO2010082279A1 (ja) * 2009-01-15 2010-07-22 パナソニック株式会社 流路構造体およびその製造方法
WO2011036496A1 (en) * 2009-09-25 2011-03-31 Memsstar Limited Improved selectivity in a xenon difluoride etch process
WO2011135824A1 (ja) 2010-04-27 2011-11-03 パナソニック株式会社 金属酸化物ナノファイバ製造装置および金属酸化物ナノファイバの製造方法
WO2011135801A1 (ja) * 2010-04-27 2011-11-03 パナソニック株式会社 シート状繊維構造体およびそれを用いた電池、断熱材、防水シート、および細胞培養用の足場
JP2011224005A (ja) * 2010-04-22 2011-11-10 Kangwon National Univ Industry Cooperation Foundation 硫酸化微生物を用いた生態毒性探知装置
WO2011142109A1 (ja) * 2010-05-11 2011-11-17 パナソニック株式会社 センサ基板及びそれを用いたアレイ基板
WO2012039129A1 (ja) * 2010-09-24 2012-03-29 パナソニック株式会社 フィルターデバイス
US20120146045A1 (en) * 2010-12-08 2012-06-14 Kabushiki Kaisha Toshiba Semiconductor light emitting device
WO2012077325A1 (ja) * 2010-12-07 2012-06-14 パナソニック株式会社 シリコン構造体およびこれを用いたアレイ基板およびシリコン構造体の製造方法
WO2013061591A1 (ja) * 2011-10-26 2013-05-02 パナソニック株式会社 バイオチップの作製方法
WO2014073195A1 (ja) * 2012-11-06 2014-05-15 パナソニック株式会社 生体由来物の検査デバイス
JP5823291B2 (ja) * 2009-07-24 2015-11-25 ニプロ株式会社 細胞電位測定容器
US10173894B2 (en) 2009-09-25 2019-01-08 Memsstar Limited Selectivity in a xenon difluoride etch process

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JP2010183900A (ja) * 2008-07-09 2010-08-26 Panasonic Corp センサおよびセンサの製造方法と、シークエンサー
US8962248B2 (en) 2008-07-09 2015-02-24 Panasonic Corporation Sequencer
WO2010004695A1 (ja) * 2008-07-09 2010-01-14 パナソニック株式会社 シークエンサー
WO2010082279A1 (ja) * 2009-01-15 2010-07-22 パナソニック株式会社 流路構造体およびその製造方法
US8840850B2 (en) 2009-01-15 2014-09-23 Panasonic Corporation Flow channel structure and method of manufacturing same
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JPWO2010082279A1 (ja) * 2009-01-15 2012-06-28 パナソニック株式会社 流路構造体およびその製造方法
JP5823291B2 (ja) * 2009-07-24 2015-11-25 ニプロ株式会社 細胞電位測定容器
US10173894B2 (en) 2009-09-25 2019-01-08 Memsstar Limited Selectivity in a xenon difluoride etch process
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JP2011224005A (ja) * 2010-04-22 2011-11-10 Kangwon National Univ Industry Cooperation Foundation 硫酸化微生物を用いた生態毒性探知装置
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WO2011135824A1 (ja) 2010-04-27 2011-11-03 パナソニック株式会社 金属酸化物ナノファイバ製造装置および金属酸化物ナノファイバの製造方法
JP5824645B2 (ja) * 2010-04-27 2015-11-25 パナソニックＩｐマネジメント株式会社 シート状繊維構造体およびそれを用いた電池、断熱材、防水シート、および細胞培養用の足場
US8557195B2 (en) 2010-05-11 2013-10-15 Panasonic Corporation Sensor substrate and array substrate using the same
JP5824646B2 (ja) * 2010-05-11 2015-11-25 パナソニックＩｐマネジメント株式会社 センサ基板及びそれを用いたアレイ基板
WO2011142109A1 (ja) * 2010-05-11 2011-11-17 パナソニック株式会社 センサ基板及びそれを用いたアレイ基板
WO2012039129A1 (ja) * 2010-09-24 2012-03-29 パナソニック株式会社 フィルターデバイス
US8906234B2 (en) 2010-09-24 2014-12-09 Panasonic Corporation Filter device
WO2012077325A1 (ja) * 2010-12-07 2012-06-14 パナソニック株式会社 シリコン構造体およびこれを用いたアレイ基板およびシリコン構造体の製造方法
US9130098B2 (en) * 2010-12-08 2015-09-08 Kabushiki Kaisha Toshiba Semiconductor light emitting device
US20120146045A1 (en) * 2010-12-08 2012-06-14 Kabushiki Kaisha Toshiba Semiconductor light emitting device
WO2013061591A1 (ja) * 2011-10-26 2013-05-02 パナソニック株式会社 バイオチップの作製方法
WO2014073195A1 (ja) * 2012-11-06 2014-05-15 パナソニック株式会社 生体由来物の検査デバイス

Also Published As

Publication number Publication date
US20130040094A1 (en) 2013-02-14
EP2172415B1 (en) 2016-11-02
US8314466B2 (en) 2012-11-20
EP2172415A4 (en) 2014-10-08
JPWO2009034697A1 (ja) 2010-12-24
JP5458887B2 (ja) 2014-04-02
EP2172415A1 (en) 2010-04-07
US8816450B2 (en) 2014-08-26
US20100219488A1 (en) 2010-09-02

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