WO2009002067A1

WO2009002067A1 - Electric inspection apparatus

Info

Publication number: WO2009002067A1
Application number: PCT/KR2008/003567
Authority: WO
Inventors: Byoung-Hak Song
Original assignee: Phicom Corporation
Priority date: 2007-06-22
Filing date: 2008-06-23
Publication date: 2008-12-31
Also published as: TW200912348A

Abstract

In an electric inspection apparatus, at least two substrate pieces is provided to include at least one probe making in contact with an inspection object. The probe is positioned on a first surface of the substrate piece and the substrate pieces and the probe constitutes a primary substrate structure. The apparatus includes at least one support member supporting the substrate pieces such that the substrate pieces are positioned adjacent to each other and at least one adjusting member that adjusts a relative position of each of the substrate pieces with respect to the support member. Accordingly, the large scale substrate of an electric inspection apparatus may be adjusted in the vertical and horizontal directions.

Description

ELECTRIC INSPECTION APPARATUS

Technical Field Example embodiments of the present invention relate to an electric inspection apparatus including a large scale substrate having a plurality of substrate pieces.

Background Art

Semiconductor devices are generally manufactured through a series of unit processes such as a fab process, an electrical die sorting (EDS) process and a packaging process. Various electric circuits and devices are fabricated on a semiconductor substrate such as a silicon wafer in the fab process, and electrical characteristics of the electric circuits are inspected and defective chips are detected in the wafer in the EDS process. Then, the devices are individually separated from the wafer and each device is sealed in an epoxy resin and packaged into an individual semiconductor device in the packaging process.

The EDS process is generally performed as follows. An electrical signal is applied by an electric tester to an electrode pad of a chip on a silicon wafer through a probe tip that makes contact with the electrode pad of the chip. Then, the electric tester receives a response signal from the electrode pad of the chip through the probe tip and detects whether or not the chip is operating normally. Therefore, the EDS process is usually performed by the electric tester including the probe tip making contact with the electrode pad of the chip.

Recently, a larger size of a silicon wafer has been used for manufacturing a semiconductor device due to development of semiconductor process technology, so that much more semiconductor chips are manufactured from a single silicon wafer. As the size of the silicon wafer increase, the electric tester for inspecting the larger silicon wafer also requires having a large probe substrate. However, as the probe substrate of the electric tester is enlarged, a flatness of the electric tester is deteriorated, and thus there is a problem in that the probe tips of the large electric tester do not make uniform contact with the electrode pad of the chip.

So as to solve the problem, there has been suggested that a number of small substrate pieces of which the flatness is sufficiently good be assembled into the probe substrate of the large electric tester. However, there are many difficulties in arranging each of the substrate pieces in a horizontal direction or in a vertical direction of the electric tester. In such a case, each of the substrate pieces may be located in different vertical positions in the large electric tester, and thus the probe of each substrate piece may not be uniformly arranged at the same height.

In addition, in case of the large electric tester, when any one of the probes does not work in the large electric tester, the whole electric tester is necessarily substituted with new one, to thereby deteriorate maintenance efficiency of the electric tester.

Disclosure of the Invention Technical Problem

Example embodiments of the present invention provide an electric inspection apparatus of which the substrate is assembled from a number of substrate pieces.

Technical Solution

According to an aspect of the present invention, there is provided an electric apparatus including at least two substrate pieces including at least one probe making in contact with an inspection object, at least one support member supporting the substrate pieces such that the substrate pieces are positioned adjacent to each other, and at least one adjusting member that adjusts a relative position of each of the substrate pieces with respect to the support member. The probe is positioned on a first surface of the substrate piece and the substrate pieces and the probe constitutes a primary substrate structure.

In an example embodiment, the adjusting member including a first adjusting unit that adjusts the relative position of each of the substrate pieces with respect to the support member in a direction vertical to the support member.

In an example embodiment, the adjusting member includes a second adjusting unit that adjusts the relative position of each of the substrate pieces with respect to the support member in a direction parallel with the support member.

In an example embodiment, the first adjusting unit or the second adjusting unit includes an adjusting screw applying a pressure to the substrate piece, to thereby adjust the relative position of the substrate piece.

In an example embodiment, the adjusting screw includes a pull screw that pulls the substrate piece and a push screw that pushes the substrate piece.

In an example embodiment, the inspection apparatus further includes at least one insertion member interposed between the substrate piece and the support member.

In an example embodiment, the inspection apparatus further includes at least one reinforce member interposed between the substrate piece and the adjusting screw.

In an example embodiment, the reinforce member includes a penetration hole into which the adjusting screw is inserted.

In an example embodiment, the electric inspection apparatus further includes a supplementary substrate structure making in contact with a second surface of each of the substrates, the second surface of the substrate piece being opposite to the first surface of the substrate piece.

In an example embodiment, the supplementary substrate includes a printed circuit board.

In an example embodiment, the supplementary substrate includes a space transformer.

In an example embodiment, the supplementary substrate further includes a printed circuit board positioned on the space transformer.

In an example embodiment, the electric inspection apparatus further includes a connection member electrically connecting the substrate pieces of the primary substrate structure to the supplementary substrate structure.

In an example embodiment, the substrate pieces are bonded to the supplementary substrate structure by a soldering.

In an example embodiment, the electric inspection apparatus further includes a connection terminal on a second surface of the substrate structure opposite to the first surface, the connection terminal and the probe being electrically connected to each other by an internal circuit.

In an example embodiment, the support member includes a first frame supporting an edge portion of the first surface of the substrate piece and a second frame supporting a side surface of the substrate piece, so that the probes are positioned in an inside of the first frame.

In an example embodiment, the support member includes a first frame supporting a second surface of the substrate piece opposite to the first surface and a second frame supporting a side surface of the substrate piece.

In an example embodiment, the probe includes a spring device. In an example embodiment, the probe includes a composite connection device.

In an example embodiment, the support member includes a plurality of support bars supporting the substrate pieces in such a manner that the substrate pieces positioned adjacent to each other.

In an example embodiment, the support member further includes a frame supporting the substrate pieces in such a manner that the substrate pieces positioned adjacent to each other.

In an example embodiment, the adjusting member adjusts the relative position of the substrate piece in a direction parallel with the first surface of the substrate pieces that are positioned in the frame.

In an example embodiment, the adjusting member adjusts the relative position of the substrate piece in a direction vertical to the first surface of the substrate pieces that are positioned in the frame.

In an example embodiment, the adjusting member adjusts the relative position of the substrate piece in a direction parallel with the first surface of the substrate pieces that are positioned on the support bar.

In an example embodiment, the adjusting member includes an adjusting screw applying a pressure to the substrate piece, to thereby adjust the relative position of the substrate piece.

In an example embodiment, the adjusting screw includes a first screw that pulls the substrate piece and a second screw that pushes the substrate piece.

In an example embodiment, the electric inspection apparatus further includes a plurality of reinforce members installed to portions of the substrate pieces to which the first screw is joined. In an example embodiment, the electric inspection apparatus further includes at least one reinforce member interposed between the substrate piece and the adjusting screw.

In an example embodiment, the support bars include a first bar extending on the substrate pieces in a first direction and a second bar extending on the substrate pieces in a second direction perpendicular to the first direction.

In an example embodiment, the first and second bars are positioned on same surfaces of the substrate pieces.

In an example embodiment, the second bar is secured to the first bar.

In an example embodiment, the electric inspection apparatus further includes at least one additional adjusting member for adjusting a relative position of the second bar in relation with the frame in a vertical direction.

In an example embodiment, the first bar and the second bar are positioned on different surface of the substrate pieces.

In an example embodiment, the electric inspection apparatus further includes at least one additional adjusting member for adjusting a relative position of one of first and the second bars in relation with the frame in a vertical direction.

In an example embodiment, the support member includes a plate supporting the substrate pieces such that the substrate pieces are positioned adjacent to each other.

In an example embodiment, the support member further includes a column protruded from the plate. In an example embodiment, the electric inspection apparatus further includes at least one bolt penetrating the support member and secured to a second surface of the substrate piece opposite to the first surface, the adjusting member adjusting the relative positions of the substrate pieces by adjusting a position of the bolt.

In an example embodiment, the adjusting member includes at least one nut coupled with the bolt, so that the bolt moves in a vertical direction in accordance with a rotation of the nut and the relative position of the substrate piece secured to the bolt is adjusted by the vertical movement of the bolt.

In an example embodiment, the adjusting member further includes at least one bolt cover securing to both of the support member and the adjusting screw, the bolt cover applying a pressure to the bolt to thereby maintain the vertical positions of the bolt adjusted by the nut.

In an example embodiment, the adjusting member further includes at least one screw securing to the support member, the screw applying a pressure to the bolt to thereby move the bolt in a direction parallel with the support member.

In an example embodiment, a diameter of the penetration hole is larger than that of the bolt.

Advantageous Effects According to the example embodiments of the present invention, the substrate pieces may be supported in such a manner that the substrate pieces are arranged adjacent to each other in the frame, and thus the substrate pieces may be formed into a large scale substrate. The gap distances between the substrate pieces and the frame may be adjusted by adjusting screws in a direction vertical to and parallel with the upper surface of the substrate pieces. Therefore, the large scale substrate of an electric inspection apparatus may be adjusted in the vertical and horizontal directions. In addition, the support bars may be further installed on the substrate pieces and the gap distance between the substrate pieces and the support bars may be adjusted as well as the gap distance between the substrate pieces and the frame in the vertical and horizontal directions.

Brief Description of the Drawings

The above and other features and advantages of the invention will become readily apparent by reference to the following detailed description when considered in conjunction with the accompanying drawings wherein: FIG. 1 is a plan view illustrating an electric inspection apparatus in accordance with a first example embodiment of the present invention;

FIG. 2 is a cross sectional view taken along a line A-A' of the electric inspection apparatus shown in FIG. 1;

FIG. 3 is a perspective view illustrating the frame shown in FIG. 1;

FIG. 4 is a perspective view illustrating a modification of the frame shown in FIG. 1;

FIG. 5 is a plan view illustrating the adjustment of the substrate pieces in the electric inspection apparatus shown in FIG. 1;

FIG. 6 is a cross sectional view illustrating the adjustment of the substrate pieces in the electric inspection apparatus shown in FIG. 2;

FIG. 7 is a plan view illustrating an electric inspection apparatus in accordance with a second example embodiment of the present invention;

FIG. 8 is a cross sectional view taken along a line B-B' of the electric inspection apparatus shown in FIG. 7;

FIG. 9 is a plan view illustrating an electric inspection apparatus in accordance with a third example embodiment of the present invention;

FIG. 10 is a cross sectional view taken along a line C-C of the electric inspection apparatus shown in FIG. 9;

FIG. 11 is a plan view illustrating an electric inspection apparatus in accordance with a fourth example embodiment of the present invention;

FIG. 12 is a cross sectional view taken along a line D-D' of the electric inspection apparatus shown in FIG. 11;

FIG. 13 is a plan view illustrating an electric inspection apparatus in accordance with a fifth example embodiment of the present invention;

FIG. 14 is a cross sectional view taken along a line E-E' of the electric inspection apparatus shown in FIG. 13;

FIG. 15 is a plan view illustrating an electric inspection apparatus in accordance with a sixth example embodiment of the present invention;

FIG. 16 is a cross sectional view taken along a line F-F' of the electric inspection apparatus shown in FIG. 15;

FIG. 17 is a plan view illustrating an electric inspection apparatus in accordance with a seventh example embodiment of the present invention;

FIG. 18 is a cross sectional view taken along a line G-G' of the electric inspection apparatus shown in FIG. 17;

FIG. 19 is a cross-sectional view illustrating an electric inspection apparatus in accordance with an eighth example embodiment of the present invention;

FIG. 20 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a ninth example embodiment of the present invention;

FIG. 21 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a tenth example embodiment of the present invention;

FKJ. 22 is a cross-sectional view illustrating an electric inspection apparatus in accordance with an eleventh example embodiment of the present invention;

FIG. 23 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a twelfth example embodiment of the present invention;

FIG. 24 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a thirteenth embodiment of the present invention;

FIG. 25 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a fourteenth example embodiment of the present invention;

FIG. 26 is a flow chart showing processing steps for a method of assembling the electric inspection apparatuses shown in FIGS. 1 to 18;

FIG. 27 is a flow chart showing processing steps for a method of assembling the electric inspection apparatuses shown in FIGS. 19 to 25;

FIG. 28 is a plan view illustrating an electric inspection apparatus in accordance with a fifteenth example embodiment of the present invention;

FIG. 29 is a cross-sectional view taken along a line H-H' of FIG. 28;

FIG. 30 is a cross-sectional view taken along a line I-I' of FIG. 28;

FIG. 31 is a plan view illustrating the substrate piece shown in FIG. 28; FIG. 32 is a cross-sectional view taken along a line J-J' of the substrate piece shown in FIG. 31 ;

FIG. 33 is a perspective view illustrating the frame of the electric inspection apparatus shown in FIG. 28;

FIG. 34 is a plan view illustrating an electric inspection apparatus shown in FIGS. 28 to 32 having adjusted substrate pieces;

FIG. 35 is a cross-sectional view of the electric inspection apparatus shown in FIG. 34;

FIG. 36 is a plan view illustrating an electric inspection apparatus in accordance with a sixteenth example embodiment of the present invention;

FIG. 37 is a cross sectional view taken along a line K-K' of the inspection apparatus shown in FIG. 36;

FIG. 38 is a perspective view illustrating a frame of the electric inspection apparatus shown in FIG. 36;

FIG. 39 is a plan view illustrating an electric inspection apparatus in accordance with a seventeenth example embodiment of the present invention;

FIG. 40 is a cross sectional view taken along a line L-L' of the inspection apparatus shown in FIG. 39;

FIG. 41 is a plan view illustrating an electric inspection apparatus in accordance with an eighteenth example embodiment of the present invention;

FIG. 42 is a cross sectional view taken along a line M-M' of the inspection apparatus shown in FIG. 41;

FIG. 43 is a plan view illustrating the substrate pieces of the electric inspection apparatus shown in FIG. 41 ; FIG. 44 is a cross sectional view taken along a line N-N' of FIG. 43;

FIG. 45 is a plan view illustrating an electric inspection apparatus in accordance with a nineteenth example embodiment of the present invention;

FIG. 46 is a cross sectional view taken along a line O-O' of the inspection apparatus shown in FIG. 45;

FIG. 47 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a twentieth example embodiment of the present invention;

FIG. 48 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a twenty first example embodiment of the present invention;

FIG. 49 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a twenty second example embodiment of the present invention;

FIG. 50 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a twenty third example embodiment of the present invention;

FIG. 51 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a twenty fourth example embodiment of the present invention;

FIG. 52 is a flow chart showing processing steps for a method of assembling the electric inspection apparatuses shown in FIGS. 28 to 46;

FIGS. 53 to 57 are plan views illustrating the electric inspection apparatus corresponding the processing steps shown in FIG. 52;

FIG. 58 is a flow chart showing processing steps for a method of assembling the electric inspection apparatuses shown in FIGS. 47 to 51;

FIG. 59 is a plan view illustrating an electric inspection apparatus in accordance with a twenty fifth example embodiment of the present invention;

FIG. 60 is a cross-sectional view taken along a line P-P' of FIG. 55;

FIG. 61 is a plan view illustrating an electric inspection apparatus in accordance with a twenty sixth example embodiment of the present invention;

FIG. 62 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a twenty seventh example embodiment of the present invention;

FIG. 63 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a twenty eighth example embodiment of the present invention;

FIG. 64 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a twenty ninth example embodiment of the present invention;

FIG. 65 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a thirtieth example embodiment of the present invention;

FIG. 66 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a thirty first example embodiment of the present invention; and

FIG. 67 is a flow chart showing process steps for assembling the electric inspection apparatus 2500 shown in FIGS. 55 and 62.

Best Mode for Carrying Out the Invention The present invention is described more fully hereinafter with reference to the accompanying drawings, in which exemplary embodiments of the present invention are shown. The present invention may, however, be embodied in many different forms and should not be construed as limited to the exemplary embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the present invention to those skilled in the art. In the drawings, the sizes and relative sizes of layers and regions may be exaggerated for clarity.

It will be understood that when an element or layer is referred to as being "on" or "connected to" another element or layer, it can be directly on or connected to the other element or layer or intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element or layer, there are no intervening elements or layers present. Like reference numerals refer to like elements throughout. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

It will be understood that, although the terms first, second, third etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present invention. Spatially relative terms, such as "lower," "upper" and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the example term "below" can encompass both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the present invention. As used herein, the singular forms "a," "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.

Exemplary embodiments of the present invention are described herein with reference to cross-sectional illustrations that are schematic illustrations of idealized embodiments (and intermediate structures) of the present invention. As such, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, exemplary embodiments of the present invention should not be construed as limited to the particular shapes of regions illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. The regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the actual shape of a region of a device and are not intended to limit the scope of the present invention.

Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

This detailed description describes exemplary embodiments of processes consistent with the present disclosure, which addresses the problem associated with a polymer mask. Applications of the invention are not limited to the following exemplary embodiments. Although some exemplary embodiments refer to non-transparent inks on the PET substrate repaired by the ArF excimer laser at 193 nm, other types of non-UV-transparent layers and polymer substrates may be used with other types of lasers which are known to those skilled in the art.

FIG. 1 is a plan view illustrating an electric inspection apparatus in accordance with a first example embodiment of the present invention, and FIG. 2 is a cross sectional view taken along a line A-A' of the electric inspection apparatus shown in FIG. 1.

Referring to FIGS. 1 and 2, the electric inspection apparatus 100 may include a number of substrate pieces 110, a number of support members, a number of adjusting members and a number of insertion members 140.

In an example embodiment, the support member may include a frame 120 for supporting the substrate pieces 110 in such a configuration that the substrate pieces 110 are positioned adjacent to each other. The adjusting member may include an adjusting screw 130 for adjusting a relative position of the substrate piece 110 with respect to the support member.

Each of the substrate pieces 110 may be shaped into a plate, and a plurality of probes 112 may be located on a lower surface of the substrate piece 110 in such a configuration that the probe may be protruded from the lower surface of the substrate piece 110. The probe 112 makes direct contact with an inspection object. For example, the probe 112 may be manufactured independently from the substrate piece 110, and a group of the probes 112 may be installed to the lower surface of the substrate piece 110 or each of the probes 112 may be individually installed to the lower surface of the substrate piece 110. Otherwise, the probes 112 may be manufactured simultaneously with the substrate piece 110 in one body. While the present example embodiment discloses a cantilever type probe, any other modifications known to one of ordinary skill in the art may be allowed as the shape of the probe. For example, a vertical type may be used in place of or in conjunction with the cantilever type as the probe 112.

In an example embodiment, the probe may include a spring unit, a composite connection unit and a point-contacted bump on a membrane. The spring unit may include all kinds of longitudinal devices of which the end portion is elastic with respect to an external force. The composite connection unit may include a core device and an over-coating device that is a core device coated with some materials. The core device has relatively small yield strength and comprises ductile materials, and the over-coating device has relatively great yield strength and comprises hard materials. An example of the ductile material may include a gold wire, and an example of the hard material may include nickel (Ni) and a nickel alloy. An over-coating process for the over-coating device may include a core over-coating for over-coating the core of the core device, a single or a multilayer over-coating process, a rough over-coating process in which a plurality of minute protrusions remain on a coated surface and a whole or a partial over-coating process in which a whole core or a portion o the core is over-coated. The over-coating process may be performed by a proper method known to one of ordinary skill in the art such as a precipitation, an electroplating, a chemical vapor deposition (CVD), a physical vapor deposition (PVD), a phase separation between solid, liquid and gas phases. In addition, the core device may include a longitudinal device that comprises hard materials and functions as a spring device.

A number of the electrode pads (not shown) may be located on an upper surface of each of the substrate pieces 110 and each of the electrode pads may comprise conductive materials. A signal line (not shown) may be positioned in an inside of the substrate piece 110 and may be electrically connected to the electrode pad and the probe 112. For example, the signal line may include a multi-layered wiring structures and a via-plug electrically connected to the multi-layered wiring structures.

The substrate pieces 110 may be arrange in such a configuration that side surfaces of the substrate pieces 110 are adjacent to one another. For example, the side surfaces of the substrate pieces 110 may make direct contact with one another or may spaced apart from an adjacent side surface by a small gap distance.

In addition, the substrate pieces 110 may be arranged into a check pattern or a cross stripe pattern. Otherwise, the substrate pieces 110 may be arranged in series. When the substrate pieces 110 are arranged into a check pattern or a cross stripe pattern, even number of the substrate pieces 110 may be provided for the large electric inspection apparatus 100. In the present embodiment, two, four, six or eight substrate pieces are provided for the large electric inspection apparatus 100. When the substrate pieces 110 may be arranged in series, at least two substrate pieces may be provided for the large electric inspection apparatus 100.

FIG. 3 is a perspective view illustrating the frame shown in FIG. 1, and FIG. 4 is a perspective view illustrating a modification of the frame shown in FIG. 1. Referring to FIGS. 1 to 4, the frame 120 may include a first sub-frame 122 and a second sub-frame 124.

The first sub-frame 122 may be shaped into a plate and may have openings as many as the number of the substrate pieces 110. The first sub-frame 122 may support an edge portion of the substrate piece 110. The probes 112 on the substrate piece 110 may be exposed through the opening of the first sub-frame 122.

The second sub-frame 124 may be vertically protruded from an edge portion of the first sub-frame 122. The second sub-frame 124 may support side surfaces of the substrate pieces 110 arranged adjacent to each other. When the substrate pieces 110 are arranged into the check pattern in the frame 120, a pair of the side surfaces of the neighboring substrate pieces 110 makes direct contact with each other and at least one side surface of the substrate piece 110 makes no contact with other substrate piece 110. Hereinafter, the side surface of the substrate piece 110, which makes direct contact with another side surface of neighboring substrate piece, is referred to as conjugate side surface and the side surface of the substrate piece 110, which makes no contact with another side surface of another substrate piece 110, referred to as isolated side surface. Therefore, the second sub-frame 124 may support the isolated side surface of the substrate piece 110. As shown in FIG. 3, the second sub-frame 124 may not be located between the neighboring substrate pieces 110, so that the neighboring substrate pieces 110 may have at least one conjugate side surface. However, the second sub-frame 124 may also be located between the neighboring substrate pieces 110 as shown in FIG. 4, so that the substrate piece 110 may have no conjugate side surface. In such a case, the second sub-frame 124 may support all of the side surfaces of the substrate pieces 110.

The frame 120 may support the substrate piece 110 in such a configuration that the substrate pieces 110 are adjacent to one another, so that a number of the substrate pieces 110 may be assembled into a single large probe substrate in the electric inspection apparatus 100.

A center member (not shown) may be interposed between the frame 120 and the substrate piece 110, so that each of the substrate pieces 110 may be positioned at a center of the frame 120. An example of the center member may include a leaf spring. Referring again to FIGS. 1 and 2, the adjusting screw 130 may include a first screw 132 and a second screw 134.

In an example embodiment, the first screw 132 may include a first pull screw 132a and a first push screw 132b. The first pull screw 132a may screw up from a lower surface of the first sub-frame 122 to an upper surface of the first sub-frame 122 in a z-axis direction in FIGS. 3 and 4, to thereby penetrate through the first sub-frame 122 and to be stuck into the substrate piece 110. The first pull screw 132a may also screw down from an upper surface of the substrate piece 110 to a lower surface of the substrate piece 110, to thereby penetrate through the substrate piece 110 and to be stuck into the first sub-frame 122. Therefore, a first gap distance between the first sub-frame 122 and the substrate piece 110 may be shortened by tightening the first pull screw 132a in the z-axis direction.

The first push screw 132b may screw up from a lower surface of the first sub-frame 122 to an upper surface of the first sub-frame 122 in the z-axis direction, to thereby penetrate through the first sub-frame 122 and to make contact with the substrate piece 110. The first push screw 132b may also screw down from an upper surface of the substrate piece 110 to a lower surface of the substrate piece 110, to thereby penetrate through the substrate piece 110 and to make contact with the first sub-frame 122. Therefore, the first gap distance between the first sub-frame 122 and the substrate piece 110 may be increased by tightening the first push screw 132b in the z-axis direction.

Accordingly, the first gap distance between the first sub-frame 122 and the substrate piece 110 may be controlled by the first pull screw 132a and the first push screw 132b, to thereby adjust a relative vertical position of the substrate pieces 110 to the first sub-frame 122 in the z-axis direction.

In an example embodiment, the second screw 134 may include a second pull screw 134a and a second push screw 134b.

The second pull screw 134a may screw inward from an outer surface of the second sub-frame 124 to an inner surface of the second sub-frame 124 in an x-axis or a y-axis direction in FIGS. 3 and 4, to thereby penetrate through the second sub-frame 124 and to be stuck into the substrate piece 110. Therefore, a second gap distance between the second sub-frame 124 and the substrate piece 110 may be shortened by tightening the second pull screw 134a in the x- axis or y-axis direction.

The second push screw 134b may screw inward from an outer surface of the second sub-frame 124 to an inner surface of the second sub-frame 124 in the x-axis or the y-axis direction, to thereby penetrate through the second sub-frame 124 and to make contact with the substrate piece 110. Therefore, the second gap distance between the second sub-frame 124 and the substrate piece 110 may be increased by tightening the second push screw 134b in the x-axis or the y-axis direction.

Accordingly, the second gap distance between the second sub-frame 124 and the substrate piece 110 may be controlled by the second pull screw 134a and the second push screw 134b, to thereby adjust a relative horizontal position of the substrate pieces 110 to the second sub-frame 124 in the x-axis or the y-axis direction. The second screw 134 may penetrate through the second sub-frame 124 and may pull or push the substrate piece 110 on at least one isolated side surface of the substrate piece 110, so that each of the substrate pieces 110 may be adjusted in the x-axis or the y-axis direction in parallel with an upper surface of the substrate piece 110. In the present embodiment, the second screw 134 is joined to two isolated side surfaces of the substrate piece 110.

The first and second screws 132 and 134 may pass through a first hole of the frame 120 and may be stuck into the substrate piece 110 through a second hole thereof.

In an example embodiment, the first hole through which the first pull screw 132a and the second pull screw 134a pass may have a diameter larger than that of the first hole through which the first push screw 132b and the second push screw 134b pass.

In an example embodiment, a diameter of the first hole may be substantially the same as that of the first screw 132, and a diameter of the second hole may be substantially the same as that of the second screw 134. The first and second screws 132 and 134 may be spaced apart from sidewalls of the first and the second holes by a distance within an allowable processing tolerance, as would be known to one of ordinary skill in the art.

In the present embodiment, the second screws 134 are joined to first and second isolated side surfaces of the substrate piece 110, which are adjacent to each other, and the substrate piece 110 may be adjusted in the x-axis or the y-axis direction in parallel with the upper surface of the substrate piece 110 by loosening or tightening one of the second screws 134 joined to the second isolated side surface on condition that the other second screw 134 is joined to the first isolated side surface of the substrate piece 110. Further, the substrate piece 110 may be adjusted in the x-axis or the y-axis direction in parallel with the upper surface of the substrate piece 110 by loosening or tightening the second screw 134 joined to the isolated side surface on condition that the first screw 132 is joined to the lower surface of the substrate piece 110. Furthermore, the substrate piece 110 may be adjusted in the z-axis direction by loosening or tightening the first screw 132 on condition that the second screws 134 are joined to the lower surface of the substrate piece 110.

In an example embodiment, the adjusting screw 130 may include only the first screw 132 except the second screw 134, so that the substrate piece 110 may be adjusted merely in the z-axis direction, not in the x-axis and y-axis direction, as would be known to one of ordinary skill in the art.

In an example embodiment, the adjusting screw 130 may include only the second screw 132 except the first screw 134, so that the substrate piece 110 may be adjusted merely in the x-axis and y-axis direction, not in the z-axis direction, as would be known to one of ordinary skill in the art. In an example embodiment, the adjusting screw 130 may include only the first push screw 132b and the second push screw 134b except the first pull screw 132a and the second pull screw 134a, so that the substrate piece 110 may be adjusted in such a manner that the first and second gap distances between the substrate piece 110 and the frame 120 are merely increased, but not decreased in the x-axis, y-axis and z-axis direction, as would be known to one of ordinary skill in the art.

Accordingly, the adjusting screws 130 may control the first and second gap distances between the substrate pieces 110 and the frame 120, to thereby adjust the horizontal and vertical positions of each substrate piece 110.

As is described hereinafter with reference to FIGS. 55 and 56, a bolt and a nut that are joined to the substrate piece 110 may be utilized in place of the adjusting screws 130, so that the horizontal and vertical positions of each substrate piece 110 may be adjusted by the bolt and nut. In an example embodiment, the insertion member 140 may include a first inserting part 142 and a second inserting part 144.

The first inserting part 142 may be interposed between the first sub-frame 122 and the lower surface of the substrate piece 110. The first inserting part 142 may have volume elasticity and shape elasticity. An example of the first inserting part 142 having the volume elasticity may include an elastic plate comprising elastic materials, and an example of the first inserting part 142 having the shape elasticity may include a spring and a washer. The spring or the washer may be used together with the first screw 132. The first sub-frame 122 may be spaced apart from the substrate piece 110 by the first inserting part 142. Tightening of the first screw 132 may cause compression of the first inserting part 142 and the compressed first inserting part 142 may be restored by the loosening of the first screw 132. In addition, the first inserting part 142 may absorb external shocks applied Io the substrate piece 110. While the present example embodiment discloses that the first inserting part 142 comprises elastic materials, the first inserting part 142 may also comprise inelastic materials, as would be known to one of ordinary skill in the art. When the first sub-frame 122 is separated or spaced apart from the substrate piece 110 by the first inserting part 142, the separation distance between the first sub-frame 122 and the substrate piece 110 5 may be determined by the length of the first inserting part 142. Therefore, when adjusting the substrate piece 110, the first inserting part 142 of which the length corresponds to the separation distance may be inserted between the first sub-frame 122 and the substrate piece 110, to thereby easily control the separation distance between the first sub-frame 122 and the substrate piece 110.

10 The second inserting part 144 may be interposed between the second sub-frame 124 and the isolated side surface of the substrate piece 110 and may be interposed between neighboring substrate pieces 110. When the second sub-frame 124 is interposed between the substrate pieces 110, the second inserting part 144 may merely be interposed between the second sub-frame 124

I o and the isolated side surface of the substrate piece 110. The second inserting part 144 may have the same structure and configuration as the first inserting part 142, and thus any further detailed descriptions on the second inserting part 144 will be omitted.

While the present example embodiment discloses the insertion members 0 140 are interposed between the frame 120 and the substrate pieces 110, no insertion member may be interposed between the frame 120 and the substrate pieces 110, as would be known to one of ordinary skill in the art.

Accordingly, the vertical and horizontal position of the substrate pieces 110 may be adjusted by the adjustment screws 130, so that the vertical 5 adjustment of the substrate pieces 110 may allow the substrate pieces 110 to locate at the same position in the z-axis direction to thereby improve height uniformity of the substrate pieces 110 and the horizontal adjustment of the substrate pieces 110 may allow the probes installed to the substrate pieces 110 to be arranged in series in the x-axis or the y-axis direction. FIG. 5 is a plan view illustrating the adjustment of the substrate pieces in the electric inspection apparatus shown in FIG. 1, and FIG. 6 is a cross sectional view illustrating the adjustment of the substrate pieces in the electric inspection apparatus shown in FIG. 2. In FIGS. 5 and 6, the same Cartesian coordinate system as shown in FIGS.

3 and 4 is utilized for description conveniences' sake, and thus the x-axis and y-axis pass in parallel with a top surface of the frame 120 and the z-axis passes perpendicularly to the top surface of the frame 120. In the present example embodiment, the substrate piece 111 includes two isolated side surfaces and two conjugated side surfaces, and thus the isolated side surface of the substrate piece 110 parallel with the x-axis is referred to as first isolated side surface and the isolated side surface of the substrate piece 110 parallel with the y-axis is referred to as second isolated side surface hereinafter.

In an example embodiment, the substrate piece 110 may move closely to the second sub-frame 124 in the x-axis direction by tightening the second pull screw 134a that is joined to the second isolated side surface of the substrate piece 110, and may move away from the second sub-frame 124 in the x-axis direction by tightening the second push screw 134b that is joined to the second isolated side surface of the substrate piece 110. In such a case, the second pull screw 134a facing the first isolated side surface of the substrate piece 110 is firmly joined to the substrate piece 110, so that the second pull screw 134a facing the first isolated side surface moves in the x-axis direction together with the substrate piece 110 under the condition that the second push screw 134b facing the first isolated side surface still makes contact with the substrate piece 110. Since the diameter of the first hole of the frame 120 through which the second pull screw 134a passes is larger than that of second pull screw 134a, the second pull screw 134a stuck into the first isolated side surface of the substrate piece 110 through the first hole of the frame 120 may move in the x-axis direction until the second pull screw 134a facing the second isolated side surface is completely screwed into the substrate piece 110.

The substrate piece 110 may move in the y-axis direction substantially in the same manner as the above movement of x-axis direction.

In an example embodiment, the substrate piece 110 may move downward in the z-axis direction by tightening the first pull screw 132a and may move upward in the z-axis direction by tightening the first push screw 132b. In the same way, since the diameter of the first hole of the frame 120 through which the second pull screw 134a passes is larger than that of second pull screw 134a, the second pull screw 134a stuck into the isolated side surfaces of the substrate piece 110 through the first hole of the frame 120 may move in the z-axis direction until the first pull screw 132a is completely screwed into the substrate piece 110 penetrating through the first sub-frame. In that case, the second push screw 134b facing the isolated side surfaces still makes contact with the substrate piece 110.

FIG. 7 is a plan view illustrating an electric inspection apparatus in accordance with a second example embodiment of the present invention, and FIG. 8 is a cross sectional view taken along a line B-B' of the electric inspection apparatus shown in FIG. 7.

Referring to FIGS. 7 and 8, the electric inspection apparatus 200 in accordance with a second example embodiment of the present invention may include a number of substrate pieces 210, a support member, adjustment members and insertion members 240.

The support member may include a frame 220 and the adjustment member may include a number of adjusting screws 230.

The substrate pieces 210, the frame 220, the adjusting screws 230 and the insertion members 240 are substantially the same as the substrate pieces 110, the frame 120, the adjusting screws 130 and the insertion members 140 that are described in detail with reference to FIGS. 1 and 6, except the following configuration of the adjusting screw 230.

The first screws 232 of the adjusting screws 230 may be jointed to or make contact with a peripheral portion of the substrate piece 210 in such a configuration that the first screws 232 are arranged in a zigzag shape in the x-axis direction. That is, the first screws 232 around a first substrate piece 210 and the first screws around a second substrate piece 210 adjacent to the first substrate piece 210 are not arranged in series in the x-axis direction. Particularly, the first screws 232 are located at the peripheral portion of the substrate piece 210, to thereby reduce a width of the first sub-frame 222 of the frame 220. Therefore, the probes may be installed to the lower surface of the substrate piece 210 at a larger gap distance. FIG. 9 is a plan view illustrating an electric inspection apparatus in accordance with a third example embodiment of the present invention, and FIG. 10 is a cross sectional view taken along a line C-C of the electric inspection apparatus shown in FIG. 9.

Referring to FIGS. 9 and 10, the electric inspection apparatus 300 in accordance with a third example embodiment of the present invention may include a number of substrate pieces 310, a support member, adjustment members and insertion members 340.

The support member may include a frame 320 and the adjustment member may include a number of adjusting screws 330. The electric inspection apparatus 300 according the third example embodiment has substantially the same structure and configuration as the electric inspection apparatus 100 as described with reference to FIGS. 1 to 6, except that the electric inspection apparatus 100 according to the first example embodiment is turned over. That is, an upper portion of the electric inspection apparatus 300 of the third example embodiment corresponds to a lower portion of the electric inspection apparatus 100 of the first example embodiment. As a result, the substrate pieces 310, the frame 320, the adjusting screws 330 and the insertion members 340 are substantially the same as the substrate pieces 110, the frame 120, the adjusting screws 130 and the insertion members 140 that are described in detail with reference to FIGS. 1 and 6, except that the probes 312 on the substrate piece 310 is located at a position opposite to that of the probe 112 on the substrate piece 110.

The frame 320 may support the side surfaces and an upper surface of the substrate pieces 310 in the electric inspection apparatus 300 of the third example embodiment, to thereby minimize a gap distance between the neighboring substrate pieces 310 at a lower surface thereof and to minimize a gap distance between the neighboring probes 312 installed at the lower surface of the each of the substrate pieces 310.

FIG. 11 is a plan view illustrating an electric inspection apparatus in accordance with a fourth example embodiment of the present invention, and FIG. 12 is a cross sectional view taken along a line D-D' of the electric inspection apparatus shown in FIG. 11.

Referring to FIGS. 11 and 12, the electric inspection apparatus 400 in accordance with a fourth example embodiment of the present invention may include a number of substrate pieces 410, a support member, adjustment members, insertion members 440 and a reinforce member 450.

The support member may include a frame 420 and the adjustment member may include a number of adjusting screws 430.

The substrate pieces 410, the frame 420, the adjusting screws 430 and the insertion members 440 have substantially the same structure and configuration as the substrate pieces 110, the frame 120, the adjusting screws 130 and the insertion members 140 that are described in detail with reference to FIGS. 1 and

6.

The reinforce member 450 may include a first reinforce part 452 and a second reinforce part 454.

In an example embodiment, the first reinforce pat 452 may be located at a position of the substrate piece 410 to which the first screw 432 is joined. The first reinforce part 452 may have material strength greater than that of the substrate piece 410, to thereby facilitate formation of a screw hole thereon though which the first screw 432 passes.

In an example embodiment, when the first screw 432 may screw upward from a lower surface of the first sub-frame 422, the first reinforce part 452 may be located at a position of the substrate piece 410 to which the first pull screw 432a is joined.

In addition, when the first screw 432 may screw downward from an upper surface of the substrate piece 410, the first reinforce part 452 may be located at a position of the substrate piece 410 to which the first screw 432 is joined.

A first gap distance between the first frame 422 and the substrate piece 410 may be controlled by the first screws 432, and thus each of the substrate pieces 410 may be adjusted in a vertical direction in such a configuration that an upper surface of each substrate piece 410 may be coplanar with one another.

The first reinforce part 452 may be adhered to the substrate piece 410 by adhesives or may be joined to the substrate piece 410 by an interference fit. In an example embodiment, the second reinforce pat 454 may be located at a position of the substrate piece 410 to which the first screw 434 is joined. The second reinforce part 454 may have material strength greater than that of the substrate piece 410, to thereby facilitate formation of a screw hole thereon though which the second screw 434 passes. In an example embodiment, when the first screw 432 may screw downward from a lower surface of the first sub-frame 422, the first reinforce part 452 may be located at a position of the substrate piece 410 to which the first pull screw 432a is joined.

The second screw 434 may pass through the second sub-frame 424 and be joined to the substrate piece 410, so that the second reinforce part 454 may be located at a position of the substrate piece 410 to which the second pull screw 434a is joined.

FIG. 13 is a plan view illustrating an electric inspection apparatus in accordance with a fifth example embodiment of the present invention, and FIG. 14 is a cross sectional view taken along a line E-E' of the electric inspection apparatus shown in FIG. 13.

Referring to FIGS. 13 and 14, the electric inspection apparatus 500 in accordance with a fifth example embodiment of the present invention may include a number of substrate pieces 510, a support member, adjustment members and insertion members 540.

The support member may include a frame 520 and the adjustment member may include a number of adjusting screws 530.

The substrate piece 510 may include a body 512 and a supplementary member 514.

The body 512 of the substrate piece 510 may be shaped into a plate, and a number of probes 515 may be protruded from a lower surface of the body 512. The probe 515 may make direct contact with an object that is to be inspected. A number of electric pads (not shown) are arranged on an upper surface of the body 512. A signal line (not shown) is arranged in the body 512, and the probe 515 is electrically connected to the electric pad through the signal line.

The supplementary member 514 may be arranged along an edge portion of the body 542. The supplementary member 514 may have material strength greater than that of the body 512, to thereby facilitate formation of a screw hole through which the adjusting screws pass.

In an example embodiment, the supplementary member 514 may be joined to the body 512 by a screw. For example, the body 512 includes a protrusion portion and the supplementary member 514 includes a recessed portion corresponding to the protrusion portion, so that the protrusion portion of the body 512 is inserted into the recessed portion of the supplementary portion 514 and the screw is screwed into the protrusion portion in the recessed portion. Otherwise, the protrusion portion of the body 512 may be joined to the recessed portion of the supplementary member 514 by an interference fit. The protrusion portion of the body 512 may be adhered into the recessed portion of the supplementary member 514 by adhesives.

The frame 520, the adjusting screws 530 and the insertion members 540 are substantially the same as the frame 120, the adjusting screws 130 and the insertion members 140 that are described in detail with reference to FIGS. 1 and 6, and the substrate piece 510 is different from the substrate piece 110 in that the adjusting screws are jointed to the supplementary member 514 of the substrate piece 510.

FIG. 15 is a plan view illustrating an electric inspection apparatus in accordance with a sixth example embodiment of the present invention, and FIG. 16 is a cross sectional view taken along a line F-F' of the electric inspection apparatus shown in FIG. 15.

Referring to FIGS. 15 and 16, the electric inspection apparatus 600 in accordance with a sixth example embodiment of the present invention may include a number of substrate pieces 610, a support member, adjustment members and insertion members 640.

The support member may include a frame 620 and the adjustment member may include a number of adjusting screws 630.

The substrate pieces 610 and the frame 620 have the same structure and configuration as the substrate pieces 110 and the frame 120 as described with reference to FIGS. 1 to 6.

The adjusting screws 630 may include first screws 632 and second screws 634.

The first screw 632 may screw upward from a lower surface of the first sub-frame 622 and penetrate through the first sub-frame 622, to thereby make direct contact with a lower surface of the substrate piece 610. Therefore, a first gap distance between the substrate piece 610 and the first sub-frame 622 may be controlled by the movement of the first screw 632. Accordingly, the substrate pieces 610 may be adjusted in a vertical direction in such a configuration that an upper surface of each of the substrate pieces 610 may be coplanar with one another.

The second screw 634 may screw inward from an outer surface of the second sub-frame 624 and may penetrate through the second sub-frame 624 obliquely to the substrate piece 610, to thereby make direct contact with a side surface of the substrate piece 610. Therefore, a second gap distance between the substrate piece 610 and the second sub-frame 624 may be controlled by the movement of the second screw 634. Accordingly, the substrate pieces 610 may be adjusted in a horizontal direction in such a configuration that the probes on the substrate pieces 610 may be arranged in a line. As shown in FIGS. 15 and 16, the second sub-frame 624 may be interposed between the substrate pieces 610 adjacent to each other, so that the second sub-frame 624 may support all the side surfaces of the substrate pieces 610. In such a case, the second screw 634 may penetrate through the second sub-frame 624 obliquely to the substrate piece 610, and thus each of the side surfaces of the substrate piece 610 may make direct contact with the second screw 634, respectively.

In an example embodiment, the adjusting screws 630 may include the first screws 632 without any second screws 634, so that the substrate piece 610 may be adjusted only in a vertical direction. In an example embodiment, the adjusting screws 630 may include the second screws 634 without any first screws 632, so that the substrate piece 610 may be adjusted only in a horizontal direction.

Accordingly, the gap distance between the substrate pieces 610 and the frame 620 may be controlled by the adjusting screws 630 in vertical and horizontal directions, to thereby adjust the positions of each of the substrate pieces 610.

The insertion members 640 may include first inserting parts 642 and second inserting parts 644.

The first inserting part 642 may be interposed between the first sub-frame 622 and the lower surface of the substrate piece 610. The first inserting part 642 may have volume elasticity and shape elasticity. An example of the first inserting part 642 may include an elastic plate comprising elastic materials, a spring and a washer. The first sub-frame 622 may be spaced apart from the substrate piece 610 by the first inserting part 642. The first inserting part 642 may absorb external shocks applied to the substrate piece 610.

The second inserting part 644 may be interposed between the second sub-frame 624 and the isolated side surface of the substrate piece 610 and may be interposed between neighboring substrate pieces 610. When the second sub-frame 624 is interposed between the neighboring substrate pieces 610, the second inserting part 644 may merely be interposed between the second sub-frame 124 and the isolated side surface of the substrate piece 110.

The second inserting part 644 may also have volume elasticity and shape elasticity. An example of the second inserting part 644 may include an elastic plate comprising elastic materials, a spring and a washer. The second sub-frame 624 may be spaced apart from the substrate piece 610 by the second inserting part 644. Tightening of the second screw 634 may cause compression to the second inserting part 644 and the compressed second inserting part 644 may be restored by the loosening of the second screw 634. The second inserting part 644 may absorb external shocks applied to the substrate piece 610.

While the above example embodiment discloses the insertion members 640 are interposed between the frame 620 and the substrate pieces 610, the insertion members 640 may not be necessarily be interposed between the frame 620 and the substrate pieces 610, as would be known to one of ordinary skill in the art. For example, no insertion members may be interposed between the frame 620 and the substrate pieces 610.

FIG. 17 is a plan view illustrating an electric inspection apparatus in accordance with a seventh example embodiment of the present invention, and FIG. 18 is a cross sectional view taken along a line G-G' of the electric inspection apparatus shown in FIG. 17.

Referring to FIGS. 17 and 18, the electric inspection apparatus 700 in accordance with a seventh example embodiment of the present invention may include a number of substrate pieces 710, support members, adjustment members and insertion members 740.

The support member may include a number of unit frames 720 and the adjustment member may include a number of adjusting screws 730.

The substrate pieces 710, the adjusting screws 730 and the insertion members 740 have the same structure and configuration as the substrate pieces 110, the adjusting screws 130 and the insertion members 140 as described with reference to FIGS. 1 to 6.

Otherwise, the substrate pieces 710, the adjusting screws 730 and the insertion members 740 may also have the same structures and configurations as the substrate pieces 110, the adjusting screws 130 and the insertion members 140 as described with reference to FIGS. 7 to 16, as would be known to one of the ordinary skill in the art.

The electric inspection apparatus 700 may include at least two unit frames 720 that are joined with one another and each of the unit frames 720 may shaped into a square ring of which the cross sectional surface has a capital letter 'L' shape. Each of the unit frames 720 may make contact with a side surface and an edge portion of a lower surface of the substrate piece 710, so that the probes 712 may be located on the lower surface of the substrate piece 710 except the edge portion thereof.

In the present example embodiment, the unit frame 720 may include in a first sub-frame 722 and a second sub-frame 724.

The first sub-frame 722 may be shaped into a plate and may have openings as many as the number of the substrate pieces 710. The probes 712 on the substrate piece 710 may be exposed through the openings of the first sub-frame 722. The first sub-frame 722 may support the edge portion of the substrate piece 710.

The second sub-frame 724 may be vertically extended from the edge portion of the first sub-frame 722. The second sub-frame 724 may support side surfaces of the substrate pieces 710. Each of the unit frames 720 may include a protrusion 726 and/or a recess

728 corresponding to the protrusion 726. In an example embodiment, the protrusion 726 and the recess 728 corresponding to the protrusion 726 may be positioned at side surfaces of the second sub-frames 724 of the unit frames 720 facing each other, respectively. Therefore, when the protrusion 726 and the recess 728 are coupled to each other between the neighboring second sub-frames 724, the neighboring unit frames 720 are joined to each other and thus a number of the unit frames 720 are formed into a large-scaled frame similar to the frame 120 described with reference to FIG. 4. Accordingly, a number of the substrate pieces 710 may be located at each of the unit frames 720 constituting the large-scaled frame by the protrusions 726 and the recesses 728, respectively, and thus the substrate pieces 710 may also be formed into a large-scaled substrate positioned on the same coplanar surface.

In an example embodiment, the protrusions 726 and the recesses 728 may be located at the same height on the side surfaces of the second sub-frames 724 of the unit frames 720. However, each pair of the protrusion 726 and the recess 728 may be located at different height on the side surfaces of the second sub-frames 724 of the unit frames 720, as would be known to one of the ordinary skill in the art.

While the present example embodiment discloses that the protrusion 726 and the recess 728 may be located on different side surfaces of the second sub-frame 724 of the unit frame 720, the protrusion 726 and the recess 728 may also be located at the same side surface of the second sub-frame 724 of the unit frame 720.

A center member (not shown) may be interposed between the unit frames 720 adjacent to each other, so that each of the substrate pieces 710 may be positioned at a center of the unit frame 720. An example of the center member may include a leaf spring.

In an example embodiment, a main frame (not shown) may be located at a lower portion of the large-scaled frame of the unit frames 720 in such a configuration that the main frame supports a side surface and an edge portion of the lower surface of the large-scaled frame. The main frame may further include a support lattice extending across a central portion of the main frame. The support lattice may support a coupled portion of the neighboring unit frames 720. FIG. 19 is a cross-sectional view illustrating an electric inspection apparatus in accordance with an eighth example embodiment of the present invention.

Referring to FIG. 19, the electric inspection apparatus 800 in accordance with an eighth example embodiment may include first and second substrate structures 810 and 820, connection members 830, a coupling member 840 and a flatness controller 850.

In an example embodiment, the first substrate structure 810 may include a number of substrate pieces, a frame, a number of adjusting screws and a number of insertion members. The first substrate structure 810 may have substantially the same structures and configurations as the apparatus 100 as described with reference to FIGS. 1 to 6.

In addition, the first substrate structure 810 may also have substantially the same structures and configurations as the apparatuses as described with reference to FIGS. 7 to 18, and may be replaced with the apparatuses as described with reference to FIGS. 7 to 18.

The second substrate structure 820 may positioned on the first substrate structure 810 and may include a signal line (not shown) and a plurality of connection holes 822 electrically connected to the signal line. A conductive layer 824 is formed on an inner surface of the connection holes 822. The conductive layer 824 may comprise a first conductive material such as copper (Cu). The signal line may be electrically connected to an additional tester. The second substrate structure 820 may include a printed circuit board (PCB) and a multilayer substrate. The first and second substrate structures 810 and 820 may be electrically connected by the connection member 830. For example, the conductive layer 824 on the inner surface of the connection hole 822 may be electrically connected to an electric pad (not shown) by the connection member 830. The connection member 830 may include a second conductive material such as a metal. A first end portion 832 of the connection member 830 may be electrically connected to the electric pad of the first substrate structure 810. For example, the first end portion 832 may make contact with the electric pad or may be secured to the electric pad.

A second portion 834 of the connection member 830, which is opposite to the first end portion 832, may be inserted into the connection hole 822 of the second substrate structure 820. For example, the second portion 834 may make contact with the conductive layer 824 on the inner surface of the connection hole 822 or may be secured to the conductive layer 824.

In an example embodiment, a wiring member such as a flexible printed circuit (FPC) may be used in place of the connection member 830, and thus the first and second substrate structures 810 and 820 may be electrically connected to each other by the wiring member.

The first and second substrate structures 810 and 820 are mechanically coupled with each other by the coupling member 840. In an example embodiment, the coupling member 840 may include first and second reinforce members 841 and 842, a leaf spring 844 and a number of bolts.

The first reinforce member 841 may be shaped into a disk and may be positioned on the second substrate structure 820. The second reinforce member 842 may be shaped into a ring and may be arranged along an edge portion of the second substrate structure 820. The first reinforce member 841, the second substrate structure 820 and the second reinforce member 842 are secured with one another by a first bolt 845. The leaf spring may make contact with the second reinforce member 842 and the frame of the first substrate structure 810. The second reinforce member 842 may be secured to the leaf spring 844 by a second bolt 846 and the leaf spring may be secured to the frame by a third bolt 847.

The flatness controller 850 may penetrate the first reinforce member 841 and the second substrate structure 820, and then may make contact with an upper surface of the first substrate structure 810. A thickness of the first substrate structure 810 may be varied along a longitudinal direction thereof in accordance with various process conditions and environments for manufacturing the first substrate structure 810, and thus the tips of the probes of the first substrate structure 810 may not be positioned on the same coplanar surface although the first and the second substrate structures 810 and 820 are arranged parallel with each other. The flatness controller 850 making contact with an upper surface of the first substrate structure 810 may control flatness of a lower surface of the first substrate structure 810 by control on contact strength between the flatness controller 850 and the first substrate structure 810 in such a configuration that the tips of the probes are arranged on the same coplanar surface. The flatness controller 850 may not necessarily be arranged in the electric inspection apparatus 800. The substrate pieces of the first substrate structure 810 may be adjusted in a vertical direction with respect to a top surface of the substrate pieces by the first adjusting screws, so that the flatness or a horizontal degree of the lower surface of the first substrate structure 810 may be controlled by the adjusting screws in place of the flatness controller 850.

In addition, the second adjusting screws may also adjust the positions of the substrate pieces in the electric inspection apparatus 800.

In an example embodiment, when the electric inspection apparatus 800 has substantially the same structures and configurations as the apparatus 700 described with reference to FIGS. 17 and 18, the first substrate structure 810 may include some unit frames and each of the unit frames may be coupled to the second substrate structure 820. Therefore, the first bolt 845 may join the first reinforce member 841, the second substrate structure 820 and the unit frame with one another.

FIG. 20 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a ninth example embodiment of the present invention.

Referring to FIG. 20, the electric inspection apparatus 900 in accordance with a ninth example embodiment may include first and second substrate structures 910 and 920 and a coupling member 930.

In an example embodiment, the first and second substrate structures 910 and 920 may be coupled to each other by the coupling member 930 in such a configuration that an upper surface of the first substrate structure 910 makes electrical direct contact with a lower surface of the second substrate structure 920. For example, the coupling member 930 may include a reinforce member 931 and a plurality of bolts 932.

The first reinforce member 931 may be shaped into a disk and may be positioned on an upper surface of the second substrate structure 920. The first reinforce member 931, the second substrate structure 920 and the frames of the first substrate structure 910 are secured to one another by the bolts 932.

The second substrate structures 920 may be directly coupled to the frame of the first substrate structure 910 by the bolts 932 without the first reinforce member 931. In an example embodiment, when the electric inspection apparatus 900 has substantially the same structures and configurations as the apparatus 700 described with reference to FIGS. 17 and 18, the first substrate structure 910 may include some unit frames, and thus the bolts may be secured into each of the frames of the first substrate structure 910, respectively. Accordingly, the substrate pieces of the electric inspection apparatus 900 may be adjusted in a vertical direction with respect to a top surface of the substrate pieces by the first adjusting screws of the first substrate structure 910.

FIG. 21 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a tenth example embodiment of the present invention.

Referring to FIG. 21, the electric inspection apparatus 1000 in accordance with a tenth example embodiment may include first and second substrate structures 1010 and 1020. The first and second substrate structures 1010 and 1020 may have substantially the same structures and configurations as the first and second substrate structures 810 and 820 described with reference to FIG. 19.

In an example embodiment, the first and second substrate structures 1010 and 1020 may be secured to each other in such a configuration that an upper surface of the first substrate structure 1010 makes electrical direct contact with a lower surface of the second substrate structure 1020 by a bonding member (not shown) such as a soldering and an adhesive.

In an example embodiment, when the first substrate structure 1010 has substantially the same structures and configurations as the apparatus 700 described with reference to FIGS. 17 and 18, the first substrate structure 1010 may include some unit frames, and thus the second substrate structure 1020 may be secured with each of the unit frames, respectively.

Accordingly, the substrate pieces of the electric inspection apparatus 1000 may be adjusted in a vertical direction with respect to a top surface of the substrate pieces by the first adjusting screws of the first substrate structure 1010.

FIG. 22 is a cross-sectional view illustrating an electric inspection apparatus in accordance with an eleventh example embodiment of the present invention.

Referring to FIG. 22, the electric inspection apparatus 1100 in accordance with an eleventh example embodiment may include first, second and third substrate structures 1110, 1120 and 1130, first and second connection members 1140 and 1150, a coupling member 1160 and a flatness controller 1170.

The first and second substrate structures 1110 and 1120 may have substantially the same structures and configurations as the first and second substrate structures 810 and 820 described with reference to FIG. 19.

In an example embodiment, the third substrate structure 1130 may be interposed between the first and second substrate structures 1110 and 1120 and may include a substrate 1132 and a support 1134 supporting side and lower surfaces of the substrate 1132. A signal line may be positioned in the substrate 1132 of the third substrate structure 1130. Examples of the substrate 1132 may include a printed circuit board (PCB) and a multilayered substrate.

The first connection member 1140 may electrically connect the first substrate structure 1110 and the third substrate structure 1130. A first end portion 1142 of the first connection member 1140 may make contact with the first substrate structure 1110 or may be secured to the first substrate structure 1110. A second end portion 1144 of the first connection member 1140, which is opposite to the first end portion, may make contact with the third substrate structure 1130 or may be secured to the third substrate structure 1130. The second connection member 1150 may electrically connect the second substrate structure 1120 and the third substrate structure 1130. In the present example embodiment, the second connection member 1150 may electrically connect a conductive layer 1124 on an inner surface of the connection hole 1122 and an electronic pad of the third substrate structure 1130. A first end portion 1152 of the second connection member 1150 may make contact with the third substrate structure 1130 or may be secured to the third substrate structure 1130. A second end portion 1154 of the second connection member 1150, which is opposite to the first end portion, may make contact with or may be secured to the conductive layer of the second substrate structure 1120. In an example embodiment, a wiring member such as a flexible printed circuit (FPC) may be used in place of the first and second connection members

1140 and 1150, and thus the first and the third substrate structures 1110 and 1130 and the third and the second substrate structures 1130 and 1120 may be electrically connected to each other by the wiring members.

The coupling member 1160 may couples the first, second and third substrate structures 1110, 1120 and 1130 to one another. In an example embodiment, the coupling member 1160 may include first, second and third reinforce members 1161, 1162 and 1163, a leaf spring 1164 and a number of bolts.

The first reinforce member 1161 may be shaped into a disk and may be positioned on an upper surface of the second substrate structure 1120. The second reinforce member 1162 may be shaped into a ring and may be arranged along an edge portion of the second substrate structure 1120. The third reinforce member 1163 may be shaped into a ring and may be arranged along an edge portion of the third substrate structure 1130, so that the third reinforce member

1163 may be arranged along the support 1134 of the third substrate structure 1130. A first bolt 1165 of the coupling member 1160 may secures the first reinforce member 1161, the second substrate structure 1120 and the second reinforce member 1162 to one another. The leaf spring 1164 may connect the second reinforce member 1162 and the support 1134 of the third substrate structure 1130 with each other in such a configuration that a portion of the leaf

1164 spring suppresses the upper surface of the substrate 1132 and thus the substrate 1 132 is supported by the support 1134. The second bolt 1166 may secure the leaf spring 1164 to the second reinforce member 1162, and the third bolt 1167 may secure the leaf spring 1164 to the support 1134 of the third substrate structure 1130. The fourth bolt 1168 may secure the support 1134 to the third reinforce member 1163 and the fifth bolt 1169 may secure the third reinforce member 1163 to the frame of the first substrate structure 1110. An additional leaf spring (not shown) may be further installed between the third reinforce member 1163 and the frame of the first substrate structure 1110, so that an upper surface of the substrate piece of the first substrate structure 1110 may be elastically pressed by the additional leaf spring to thereby secure the substrate piece to the frame of the first substrate structure 1110.

While the present example embodiment discloses that the frame of the first substrate structure 1110 may be arranged separately from the third reinforce member 1163 and thus the frame of the first substrate structure 1110 and the third reinforce member may be secured to each other by the fifth bolt 1169, the frame and the third reinforce member 1169 may also be integrally formed in a body without the fifth bolt 1169.

The flatness controller 1170 may penetrate the first reinforce member

1161 and the second substrate structure 1120, and then may make contact with an upper surface of the third substrate structure 1130. A thickness of the first substrate structure 1110 may be varied along a longitudinal direction thereof in accordance with various process conditions and environments for manufacturing the first substrate structure 1110, and thus the tips of the probes of the first substrate structure 1110 may not be positioned on the same coplanar surface although the first substrate structure 1110 may be arranged parallel with the second substrate structure 1120. The flatness controller 1170 making contact with an upper surface of the third substrate structure 1130 may control the horizontal degree of the first substrate structure 1110 by control on contact strength between the flatness controller 1170 and the third substrate structure 1130 in such a configuration that the tips of the probes are arranged on the same coplanar surface. Therefore, the tips of the probes on the lower surface of the first substrate structure 1110 may be positioned at the same coplanar surface.

No flatness controller 1170 may be arranged in the electric inspection apparatus 1100. The substrate pieces of the first substrate structure 110 may be adjusted in a vertical direction with respect to a top surface of the substrate pieces by the first adjusting screws, so that the flatness or the horizontal degree of the lower surface of the first substrate structure 1110 may be controlled by the adjusting screws in place of the flatness controller 1170. In addition, the second adjusting screws may also adjust the positions of the substrate pieces in the first substrate structure 1110 in a direction parallel with a top surface of the substrate pieces.

FIG. 23 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a twelfth example embodiment of the present invention.

Referring to FIG. 23, the electric inspection apparatus 1200 in accordance with a twelfth example embodiment may include first, second and third substrate structures 1210, 1220 and 1230, a connection member 1240, a coupling member 1250 and a flatness controller 1260. The first and second substrate structures 1210 and 1220 may have substantially the same structures and configurations as the first and second substrate structures 810 and 820 described with reference to FIG. 19.

The third substrate structure 1230, the connection member 1240 and the flatness controller 1260 may have substantially the same structures and configurations as the third substrate structure 1130, the second connection member 1150 and the flatness controller 1170 described with reference to FIG. 22.

The coupling member 1250 may couples the first, second and third substrate structures 1210, 1220 and 1230 with one another in such a configuration that an upper surface of the first substrate structure 1210 makes direct contact with a lower surface of the third substrate structure 1230 and thus the first and the third substrate structures 1210 and 1230 are electrically connected with each other. In an example embodiment, the coupling member 1250 may include first and second reinforce embers 1251 and 1252, a leaf spring 1254 and a number of bolts.

The first reinforce member 1251 may be shaped into a disk and may be positioned on an upper surface of the second substrate structure 1220. The second reinforce member 1252 may be shaped into a ring and may be arranged along an edge portion of the second substrate structure 1220. A first bolt 1255 of the coupling member 1250 may secures the first reinforce member 1251, the second substrate structure 1220 and the second reinforce member 1252 with one another. The leaf spring 1254 may make contact with the second reinforce member 1252 and a support 1234 of the third substrate structure 1230. A second bolt 1256 may secure the leaf spring 1254 to the second reinforce member 1252, and a third bolt 1257 may secure the leaf spring 1254 to the support 1234 of the third substrate structure 1230.

The leaf spring 1254 may connect the second reinforce member 1252 and the support 1234 of the third substrate structure 1230 with each other in such a configuration that a portion of the leaf 1254 spring presses the upper surface of the substrate 1232 and thus the substrate 1232 is supported by the support 1234.

A fourth bolt 1258 may secure the support 1234 to a frame of the first substrate structure 1210, so that the first and the third substrate structures 1210 and 1230 make direct contact and are electrically connected with each other. Otherwise, an electric pad on the first substrate structure 1210 may be bonded to another electric pad on the third substrate structure 1230, to thereby electrically connect the first and third substrate structure with each other.

In an example embodiment, the first substrate structure 1210 and the third substrate structure 1230 may be electrically connected with each other by the connection member 1240, and the second and third substrate structures 1220 and 1230 ma be electrically connected with each other by direct contact thereof.

In addition, the first adjusting screws of the first substrate structure 1210 may also adjust the substrate pieces in the first substrate structure 1210 in a vertical direction with respect to a top surface of the substrate pieces. FIG. 24 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a thirteenth embodiment of the present invention.

Referring to FIG. 24, the electric inspection apparatus 1300 in accordance with a thirteenth example embodiment may include first, second and third substrate structures 1310, 1320 and 1330, first and second connection members 1340 and 1350, a coupling member 1360 and a flatness controller 1370.

The first substrate structure 1310 may include a number of substrate pieces each of which is supported by one of unit frames and the coupling member 1360 may secure the first substrate structure 1310 to the third substrate structure 1330 in such a configuration that each of the unit frames is spaced apart from each other. Except the above-mentioned separated unit frames, the first, second and third substrate structures 1310, 1320 and 1330, the first and second connection members 1340 and 1350, the coupling member 1360 and the flatness controller 1370 in the electric inspection apparatus 1300 may have the same structures and configurations as the first, second and third substrate structures 1110, 1120 and 1130, the first and second connection members 1140 and 1150, the coupling member 1160 and the flatness controller 1170 in the electric inspection apparatus 1100 as described with reference to FIG. 22.

Accordingly, the first adjusting screws of the first substrate structure 1310 may adjust the substrate pieces of the first substrate structure 1310 in a vertical direction with respect to a top surface of the substrate pieces in the electric inspection apparatus 1300.

In addition, the second adjusting screws of the first substrate structure 1310 may also adjust the substrate pieces of the first substrate structure 1310 in a horizontal direction with respect to the top surface of the substrate pieces in the electric inspection apparatus 1300.

FIG. 25 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a fourteenth example embodiment of the present invention. Referring to FIG. 25, the electric inspection apparatus 1400 in accordance with a fourteenth example embodiment may include first, second and third substrate structures 1410, 1420 and 1430, a connection member 1440, a coupling member 1450 and a flatness controller 1460. The first substrate structure 1410 may include a number of substrate pieces each of which is supported by one of unit frames and the coupling member 1450 may secure the first substrate structure 1410 to the third substrate structure 1430 in such a configuration that each of the unit frames is spaced apart from each other. Except the above-mentioned separated unit frames, the first, second and third substrate structures 1410, 1420 and 1430, the connection members 1440, the coupling member 1450 and the flatness controller 1460 in the electric inspection apparatus 1400 may have the same structures and configurations as the first, second and third substrate structures 1210, 1220 and 1230, the connection members 1240, the coupling member 1250 and the flatness controller 1260 in the electric inspection apparatus 1200 as described with reference to FIG. 23.

Accordingly, the first adjusting screws of the first substrate structure 1410 may adjust the substrate pieces of the first substrate structure 1410 in a vertical direction with respect to a top surface of the substrate pieces in the electric inspection apparatus 1400.

FIG. 26 is a flow chart showing processing steps for a method of assembling the electric inspection apparatuses shown in FIGS. 1 to 18.

The electric inspection apparatuses disclosed in FIGS. 1 to 18 have similar structures and configurations, and thus the assembling method of the electric inspection apparatus is to be described based on the apparatuses disclosed in FIGS. 1 to 6 hereinafter.

Referring to FIG. 26, the substrate pieces 110 may be positioned in the frame 120 (step SIlO).

The frame 120 including the first sub-frame 122 and the second sub-frame 124 may be provided and the substrate pieces may be positioned in the frame 120, so that the substrate pieces are positioned adjacent to each other and some portions of surfaces of the substrate pieces are supported by the frame 120. For example, an edge portion of a lower surface and a side surface of the substrate piece 110 may be supported by the frame 120, and thus the probes 112, which are installed on the lower surface of the substrate piece except the edge portion thereof, may be exposed to surroundings. An edge portion of a top surface and the side surface of the substrate piecel lO may also be supported by the frame 120, as shown in FIG. 10. Then, the probes 112 that are to make direct contact with an inspection object may be installed on the substrate pieces 110. For example, the probes may be installed on the lower surface of the substrate pieces 110 before the substrate pieces 110 are positioned in the frame 120. The substrate pieces 110 may be positioned in the frame 120 and then the probes 112 may be installed on the lower surface of the substrate pieces 110 in the frame 120.

Then, the adjusting screws 130 may be installed to the frame 120 (step S 120).

The first adjusting screws 132 may penetrate the first sub-frame 122 upward from a bottom portion thereof and may be secured to or make contact with the substrate pieces 110. Otherwise, the first adjusting screws 130 may penetrate the substrate pieces 110 downward from a top portion thereof and may be secured to or make contact with the first sub-frame 122. The second adjusting screws 134 may penetrate the second sub-frame 124 in a direction parallel with a top surface of the substrate pieces 110 and may be secured to or make contact with the substrate pieces 110. The insertion member 140 including the first and second inserting parts 142 and 144 may be installed to the substrate pieces 110 and then the adjusting screws 140 may be installed to the frame 120. The first inserting part 142 may be inserted into a first boundary area between the first sub-frame 122 and the lower surface of the substrate piece 110. The second inserting part 144 may be inserted into second boundary areas between the second sub-frame 124 and the side surface of the substrate piece 110 and between the side surfaces of the neighboring substrate pieces adjacent to each other. A gap distances between the frame 120 and the substrate pieces 110 may be controlled by the adjusting member 130, and thus the positions of the substrate pieces 110 in the frame 120 may be adjusted by the adjusting members 130 (step S130).

The substrate pieces 110 may be pushed or pulled by the first adjusting screws 132, to thereby adjust the gap distance between the first sub-frame 122 and the lower surface of the substrate pieces 110. Therefore, the positions of the substrate pieces may be adjusted by the first adjusting screws 132 in a vertical direction with respect to the upper surface of the substrate pieces 110 in the frame 120. The substrate pieces 110 may be pushed or pulled by the second adjusting screws 134, to thereby adjust the gap distance between the second sub-frame 122 and the side surface of the substrate pieces 110. Therefore, the positions of the substrate pieces may be adjusted by the second adjusting screws 134 in a horizontal direction parallel with the upper surface of the substrate pieces 110 in the frame 120.

FIG. 27 is a flow chart showing processing steps for a method of assembling the electric inspection apparatuses shown in FIGS. 19 to 25.

The electric inspection apparatuses disclosed in FIGS. 19 to 25 have similar structures and configurations, and thus the assembling method of the electric inspection apparatus is to be described based on the apparatuses disclosed in FIG. 19 hereinafter.

Referring to FIG. 27, the frame, a number of the substrate pieces 110 and a number of adjusting screws are assembled into the first substrate structure 800 (step S210). Then, the probes that are to make direct contact with an inspection object may be installed on the substrate pieces 810. For example, the probes may be installed on the lower surface of the substrate pieces 810 before the substrate pieces 810 are positioned in the frame. The substrate pieces 810 may be positioned in the frame and then the probes may be installed on the lower surface of the substrate pieces 810 in the frame.

Then, the first substrate structure 810 may be electrically connected to the second substrate structure 820 by a direct contact of the first and second substrate structures 810 and 820 (step S220). A gap distances between the frame and the substrate pieces 810 may be controlled by the adjusting members, and thus the positions of the substrate pieces in the frame may be adjusted by the adjusting members (step S230).

The process for controlling the gap distances between the frame and the substrate pieces 810 may be substantially the same as the control process for adjusting the gap distances between the frame and the substrate pieces as described with reference to FIG. 26.

The positions of the substrate pieces may be adjusted by controlling the gap distances between the frame and the substrate pieces by the adjusting screws.

FIG. 28 is a plan view illustrating an electric inspection apparatus in accordance with a fifteenth example embodiment of the present invention. FIG. 29 is a cross-sectional view taken along a line H-H' of FIG. 28 and FIG. 30 is a cross-sectional view taken along a line I-I' of FIG. 28.

Referring to FIGS. 28 to 30, the electric inspection apparatus 1500 in accordance with a fifteenth example embodiment may include substrate pieces 1510, a support member, an adjusting member, coupling members 1550, insertion members 1560 and reinforce members 1570.

In an example embodiment, the support member may include a frame 1520 and support bars 1530 and may support the substrate pieces in such a configuration that the substrate pieces are positioned adjacent to each other. The adjusting members may include a number of adjusting screws 1540 and may adjust relative positions of the substrate pieces with respect to the frame 1520.

FIG. 31 is a plan view illustrating the substrate piece shown in FIG. 28, and FIG. 32 is a cross-sectional view taken along a line J-J' of the substrate piece shown in FIG. 31.

Referring to FIGS. 28 to 32, each of the substrate pieces 1510 may include a plurality of probes 1512 on a lower surface thereof. The substrate pieces 1510 in the present example embodiment may have substantially the same structure and configurations as the substrate pieces 110 described with reference to FIGS. 1 and 2.

FIG. 33 is a perspective view illustrating the frame of the electric inspection apparatus shown in FIG. 28.

Referring to FIG. 33, the frame 1520 may support the substrate pieces 1510 and may include a first sub-frame 1522 and a second sub-frame 1524. The first sub-frame 1522 may be shaped into a plate and may have openings as many as the number of the substrate pieces 1510. The first sub-frame 122 may support an edge portion of the lower surface of the substrate piece 1510. The probes 1512 on the substrate piece 1510 may be exposed through the opening of the first sub-frame 1522. The second sub-frame 1524 may be vertically protruded from an edge portion of the first sub-frame 1522. The second sub-frame 1524 may support side surfaces of the substrate pieces 1510 arranged adjacent to each other. When the substrate pieces 1510 are arranged into a check pattern in the frame 1520, a pair of the side surfaces of the neighboring substrate pieces 1510 makes direct contact with each other and at least one side surface of the substrate piece 1510 makes no contact with other substrate piece 1510. As defined above, the side surface of the substrate piece 1510, which makes direct contact with another side surface of neighboring substrate piece 1510, is referred to as conjugate side surface and the side surface of the substrate piece 1510, which makes no contact with another side surface of another substrate piece 1510, referred to as isolated side surface. Therefore, the second sub-frame 1524 may support the isolated side surface of the substrate piece 1510. A top surface of the second sub-frame 1524 may be a little bit higher than an upper surface of the substrate pieces 1510. As shown in FIGS. 28 to 30 and 33, the second sub-frame 1524 may not be located between the neighboring substrate pieces 1510, so that the neighboring substrate pieces 1510 may have at least one conjugate side surface. However, the second sub-frame 1524 may also be located between the neighboring substrate pieces 1510, so that the substrate piece 1510 may have no conjugate side surface. In such a case, the second sub-frame 1524 may support all of the side surfaces of the substrate pieces 1510.

In an example embodiment, the frame 1520 may include just only the second sub-frame 1524 without the first sub-frame 1522.

The frame 1520 may support the substrate piece 1510 in such a configuration that the substrate pieces 1510 are adjacent to each other, so that a number of the substrate pieces 1510 may be assembled into a single large probe substrate in the electric inspection apparatus 1500.

A center member (not shown) may be interposed between the frame 1520 and the substrate piece 1510, so that each of the substrate pieces 1510 may be positioned at a center of the frame 1520. An example of the center member may include a leaf spring.

The support member 1530 may be positioned on the upper surface of the substrate pieces 1510 and shaped into a bar. For example, the support member 1530 may include a number of a first bar 1532 and a number of a second bar 1534.

In an example embodiment, a pair of the first bars 1532 may be positioned at edge portions of the substrate pieces 1510 and extend in a first direction parallel with each other. Therefore, a contact pad located on the upper surface of the substrate pieces may be exposed through a space between the pair of the substrate pieces 1510.

The second bars 1534 may be positioned on the first bars 1532 and extend in a second direction perpendicular to the first direction in parallel with each other. For example, the second bar 1534 may extend along central portions of the substrate pieces 1510 over the substrate pieces 1510 in the second direction. Since the first and second bars may be shaped into a slender bar and cross each other, the electric pad on the upper surface of the substrate pieces 1510 may be exposed through a space defined by the first and second bars 1532 and 1534.

The first and second bars 1532 and 1534 may be integrally formed in a body, so that the support member 1530 may be shaped into a lattice (support lattice). In the present example embodiment, the support bars on the upper surface of the substrate pieces 1510 may be utilized as the support member 1530 in place of the support lattice.

The support member 1530 may also include the first bars 1532 without the second bars 1534. In such a case, the first bars 1532 may connected with each other and be formed into one body.

Referring again to FIGS. 28 to 30, the adjusting screw 1540 may include first and second adjusting screws 1542 and 1544.

The first adjusting screws 1542 may adjust relative positions of the substrate pieces 1510 with respect to the first and second bars 1532 and 1534 and the second adjusting screws 1544 may adjust the relative positions of the substrate pieces 1510 with respect to the frame 1520.

In an example embodiment, the first and the second adjusting screws 1542 and 1544 may include a number of pull screws that may pull the substrate pieces 1510 by a tightening of the pull screws to thereby adjust the positions of the substrate pieces 1510 and a number of push screws that may push the substrate pieces 1510 by a tightening of the push screws to thereby adjust the positions of the substrate pieces 1510.

In an example embodiment, the first adjusting screws 1542 may include a first pull screw 1542a and a first push screw 1542b.

The first pull screw 1542a may screw down from an upper portion of the support bars 1532 to a lower portion thereof, to thereby penetrate through the support bars 1532 and to be stuck into the substrate pieces 1510. The first pull screw 1542a may also screw up from a lower surface of the substrate pieces 1510 to an upper surface thereof, to thereby penetrate through the substrate pieces 1510 and to be stuck into the support bars 1532. Therefore, a first gap distance between the first support bar 1532 and the substrate piece 1510 may be shortened by tightening the first pull screw 1542a. The first push screw 1542b may screw down from an upper portion of the support bars 1532 to a lower portion thereof, to thereby penetrate through the support bars 1532 and to make in contact with the substrate pieces 1510. The first push screw 1542b may also screw up from a lower surface of the substrate pieces 1510 to an upper surface thereof, to thereby penetrate through the substrate pieces 1510 and to make in contact with the first bars 1532. Therefore, the first gap distance between the first bars 1532 and the substrate piece 1510 may be increased by tightening the first push screw 1542b.

Accordingly, the first gap distance between the first bars 1532 and the substrate piece 1510 may be controlled by the first pull screw 1542a and the first push screw 1542b, to thereby adjust a relative position of the substrate pieces 1510 in a vertical direction with respect to the upper surface of the substrate pieces 1510.

When one of the first pull and push screws 1542a and 1542b may be used as the adjusting screws 1540 for adjusting the positions of the substrate pieces 1510, the adjusting screws 1540 may be easily loosened by external conditions such as thermal expansion and vibration of the adjusting screws 1540 and thus the positions of the substrate pieces 1510 may be easily varied with respect to the first bars 1532. However, when both of the first pull screw 1542a and the first push screw 1542b may be simultaneously used as the adjusting screws 1540 for adjusting the positions of the substrate pieces 1510, the first push screw 1542b may be complementary tightened by the first pull screw 1542a and the first pull screw 1542a may be complementary tightened by the first push screw 1542b, and thus the substrate pieces 1510 may be steadily positioned in relation to the first bars 1542 once the positions of the substrate pieces 1510 are adjusted by the adjusting screws 1540.

In an example embodiment, the second adjusting screws 1544 may include a second pull screw 1544a and a second push screw 1544b.

The second pull screw 1544a may screw inward from an outer surface of the second sub-frame 1524 to an inner surface of the second sub-frame 1524, to thereby penetrate through the second sub-frame 1524 and to be stuck into the substrate piece 1510. Therefore, a second gap distance between the second sub-frame 1524 and the substrate piece 1510 may be shortened by tightening the second pull screw 1544a. The second push screw 1544b may screw inward from an outer surface of the second sub-frame 1524 to an inner surface of the second sub-frame 1524, to thereby penetrate the second sub-frame 1524 and to make in contact with the substrate piece 1510. Therefore, the second gap distance between the second sub-frame 1524 and the substrate piece 1510 may be increased by tightening the second push screw 1544b.

Accordingly, the second gap distance between the second sub-frame 1524 and the substrate piece 1510 may be controlled by the second pull screw 1544a and the second push screw 1544b, to thereby adjust a relative horizontal position of the substrate pieces 1510 to the second sub-frame 1524. The second screw 1544 may penetrate through the second sub-frame 1524 and may pull or push the substrate piece 1510 on at least one isolated side surface of the substrate piece 1510, so that each of the substrate pieces 1510 may be adjusted in a direction parallel with an upper surface of the substrate piece 1510. In the present embodiment, the second screw 1534 is joined to two isolated side surfaces of the substrate pieces 1510.

In addition, the second pull and push screws 1544a and 1544b may be used for securing the substrate pieces 1510 to the adjusted positions in relation to the second sub-frame 1524 after the adjustment by the second pull and push screws 1544a and 1544b is completed.

The first and second adjusting screws 1542 and 1544 may pass through first screw holes of the frame 1520 and the first bars 1532 and may be stuck into the substrate piece 1510 through second screw holes thereof.

In an example embodiment, the first screw hole through which the first pull screw 1542a and the second pull screw 1544a pass may have a diameter larger than that of the first screw hole through which the first push screw 1542b and the second push screw 1544b pass.

In an example embodiment, a diameter of the first screw hole may be substantially the same as that of the first adjusting screw 1542, and a diameter of the second screw hole may be substantially the same as that of the second adjusting screw 1544. The first and second adjusting screws 1542 and 1544 may be spaced apart from sidewalls of the first and the second screw holes by a distance within an allowable processing tolerance.

The second adjusting screws 1544 are joined to first and second isolated side surfaces of the substrate piece 1510, which are adjacent to each other, and the substrate piece 1510 may be adjusted in a direction parallel with the upper surface of the substrate piece 110 by loosening or tightening one of the second adjusting screws 1544 joined to the second isolated side surface on condition that the other second adjusting screw 1544 is joined to the first isolated side surface of the substrate piece 1510. Further, the substrate piece 1510 may be adjusted in a direction parallel with the upper surface of the substrate piece 1510 by loosening or tightening the second adjusting screw 1544 joined to the isolated side surface on condition that the first screws 1542 are joined to the lower surface of the substrate piece 1510. Furthermore, the substrate pieces 1510 may be adjusted in a direction vertical to the upper surface of the substrate pieces 1510 by loosening or tightening the first adjusting screws 1542 on condition that the second adjusting screws 1544 are joined to the lower surface of the substrate pieces 1510. In an example embodiment, the adjusting screws 1540 may include just only the first adjusting screws 1542 without the second adjusting screws 1544, so that the substrate pieces 1510 may be adjusted merely in a direction vertical to the upper surface of the substrate pieces 1510, not in a direction parallel with the upper surface of the substrate pieces 1510. In an example embodiment, the adjusting screws 1540 may only include the first and second push screws 1542b and 1544b without the first and second pull screws 1542a and 1544a, so that the substrate pieces 1510 may be adjusted in such a manner that the first gap distances between the substrate pieces 1510 and the first bars 1532 and the second gap distances between the substrate pieces 1510 and the second sub-frame 1524 are merely decreased, but not increased in a direction vertical and horizontal with respect to the upper surface of the substrate pieces 1510.

In an example embodiment, the adjusting screws 1540 may only include the first and second pull screws 1542a and 1544a without the first and second push screws 1542b and 1544b, so that the substrate pieces 1510 may be adjusted in such a manner that the first gap distances between the substrate pieces 1510 and the first bars 1532 and the second gap distances between the substrate pieces 1510 and the second sub-frame 1524 are merely increased, but not decreased in a direction vertical and horizontal with respect to the upper surface of the substrate pieces 1510.

Accordingly, the adjusting screws 1540 may control the first gap distance between the substrate pieces 1510 and the support bars 1530 and the second gap distances between the substrate pieces 1510 and the frame 1520, to thereby adjust the horizontal and vertical positions of each substrate piece 110 in relation to the support bars 1530 and the frame 1520.

The coupling members 1550 may couples the first and second bars 1532 and 1534 to each other. For example, the coupling member 1550 may penetrate through the second support bar 1534 downward and may be stuck into the first bars 1532. As a result, the first and second bars 1532 and 1534 are secured to each other by the coupling members 1550.

As is described hereinafter with reference to FIGS. 55 and 56, a bolt and a nut that are joined to the substrate pieces 1510 may be utilized in place of the adjusting screws 1540, so that the horizontal and vertical positions of each substrate piece 1510 may be adjusted by the bolt and nut.

In an example embodiment, the insertion member 1560 may include a first inserting part 1562 and a second inserting part 1564.

The first inserting part 1562 may be interposed between the first bars 1532 and the upper surface of the substrate pieces 1510. The first inserting part 1562 may have volume elasticity and shape elasticity. An example of the first inserting part 1562 having the volume elasticity may include an elastic plate comprising elastic materials, and an example of the first inserting part 1562 having the shape elasticity may include a spring and a washer. The spring or the washer may be used together with the first adjusting screws 1542. The first bars 1532 may be spaced apart from the substrate pieces 1510 by the first inserting part 1562.

Tightening of the first adjusting screw 1542 may cause compression of the first inserting part 1562 and the compressed first inserting part 1562 may be restored by the loosening of the first adjusting screw 1542. In addition, the first inserting part 1562 may absorb external shocks applied to the substrate pieces 1510. In addition, the first inserting part 1562 may be further interposed between the first sub-frame 1522 and the lower surface of the substrate pieces 1510.

The second inserting part 1564 may be interposed between the second sub-frame 1524 and the isolated side surface of the substrate piece 1510 and may be interposed between conjugated side surfaces of the neighboring substrate pieces 1510. When the second sub-frame 1524 is interposed between the substrate pieces 1510, the second inserting part 1564 may merely be interposed between the second sub-frame 1524 and the side surface of the substrate piece 1510. The second inserting part 1564 may have the same structures and configurations as the first inserting part 1562, and thus any further detailed descriptions on the second inserting part 1564 will be omitted.

While the present example embodiment discloses the insertion members 1560 are interposed between the second sub-frame 1524 and the substrate pieces 1510 and between the first support bar 1532 and the substrate piece 1510, no insertion member may be interposed between the second sub-frame 1524 and the substrate pieces 1510 and between the first support bar 1532 and the substrate piece 1510. In such a case, the substrate pieces 1510 makes direct contact with the first bars 1532 or the second sub-frame 1524.

The reinforce member 1570 may include a first reinforce part 1572 and a second reinforce part 1574.

As shown in FIGS. 31 and 32, the first reinforce pat 1572 may be located at a position of the substrate piece 1510 to which the first pull screw 1542a of the first adjusting screw 1542 is joined. The first reinforce part 1572 may have material strength greater than that of the substrate piece 1510, to thereby facilitate formation of the screw hole on the substrate piece 1510 though which the first adjusting screw 1542 passes. In an example embodiment, the first reinforce part 1572 may be adhered to the substrate piece 1510 by an adhesive or may be inserted by an interference fitting.

The second reinforce pat 1574 may be located at a position of the substrate piece 1510 to which the second pull screw 1544a of the second adjusting screw 1544 is joined. The second reinforce part 1574 may have the same structures and configurations as the first reinforce part 1572, and thus any detailed descriptions on the second reinforce part 1574 will be omitted.

While the present example embodiment discloses that the reinforce members 1570 are installed onto the substrate pieces 1510 as shown in FIGS. 28 to 32, no reinforce members may also be installed onto the substrate pieces 1510. In such a case, the first and second pull screws 1542a and 1544a may make direct contact with the substrate pieces 1510. Accordingly, the adjusting screws 1540 of the electric inspection apparatus 1500 may adjust the positions of the substrate pieces 1510. That is, the substrate pieces 1510 may be adjusted in a vertical direction with respect to the upper surface of the substrate pieces 1510, so that the substrate pieces 1510 may have the same height. In addition, the substrate pieces 1510 may be adjusted in a horizontal direction with respect to the upper surface of the substrate pieces 1510, so that the probes 1512 on the substrate pieces 1510 may be positioned on the same coplanar surface.

In an example embodiment, the frame 1520 and the second adjusting screws 1544 may not be included in the electric inspection apparatus 1500. In such a case, the relative positions of the substrate pieces 1510 with respect to the support bars 1530 may be adjusted merely by the first adjusting screws 1542 in a vertical direction with respect to the upper surface of the substrate pieces 1510.

FIG. 34 is a plan view illustrating an electric inspection apparatus shown in FIGS. 28 to 32 having adjusted substrate pieces, and FIG. 35 is a cross-sectional view of the electric inspection apparatus shown in FIG. 35.

In FIGS. 34 and 35, a Cartesian coordinate system is defined for description conveniences' sake as follows. An x-axis and a y-axis pass perpendicular to the x-axis are defined in such a configuration that a top surface of the substrate pieces 1510 is parallel with a surface generated by the x-axis and the y-axis. A z-axis is defined as perpendicular to both of the x-axis and the y-axis, so that the z-axis is perpendicular to the top surface of the substrate pieces 1510. Hereinafter, a side surface of the frame 1520 perpendicular to the x-axis is refereed to as first surface, and a side surface of the frame 1520 perpendicular to the y-axis is refereed to as second surface. A surface of the support bar 1530 facing the substrate piece 1510 and perpendicular to both of the first and the second surfaces are referred to as third surface.

Referring to FIGS. 34 and 35, the second pull screws 1544a on the first surface of the frame 1520 may be tightened and thus the substrate piece 1510 may be pulled in the x-axis direction, and the second push screws 1544b on the first surface of the frame 1520 may be tightened and thus the substrate pieces 1510 may be pushed in the x-axis direction. As a result, the substrate pieces 1510 may move in the x-axis direction by the second adjusting screws 1544 on the first surface of the frame 1520. In such a case, the second push screws 1544b on the second surface of the frame 1520 is secured to the substrate pieces 1510 and thus the second push screws 1544b on the second surface of the frame 1520 also moves in the x-axis direction together with the substrate pieces 1510. The second push screws 1544b on the second surface of the frame 1520 merely make in contact with the substrate pieces 1510. For that reasons, a diameter of the screw holes of the frame 1520 through which the second pull screws 1544a penetrate is larger than that of the diameter of the second pull screws 1544a. Therefore, when the second pull screws 1544a located on the second surface of the frame 1520 is joined to the substrate pieces 1510 through the first screw holes of the frame 1520, the second pull screws 1544a moves in the x-axis direction together with the substrate pieces 1510 until the second adjusting screws 1544 is completely tightened.

The movement of the substrate pieces 1510 in the y-axis direction may be the same as the x-axis movement, and thus any further detailed descriptions on the movement of the substrate pieces in the y-axis direction will be omitted. The first pull screws 1542a on the third surface of the support bar 1530 may be tightened and thus the substrate piece 1510 may move upward in the z-axis direction, and the first push screws 1542b on the third surface of the support bar 1530 may be tightened and thus the substrate pieces 1510 may move downward in the z-axis direction. As a result, the substrate pieces 1510 may move in the z-axis direction by the first adjusting screws 1542 on the third surface of the support bar 1530. In such a case, the second pull screws 1544a on the first and second surfaces of the frame 1520 is secured to the substrate pieces 1510 through the first screw holes of the frame 1520 and thus the second pull screws 1544a on the second surface of the frame 1520 also moves in the z-axis direction together with the substrate pieces 1510. Therefore, the second pull screws 1544a moves in the z-axis direction together with the substrate pieces 1510 until the second adjusting screws 1544 is completely tightened, and the second push screws 1544b on the first and second surfaces of the frame 1520 merely make in contact with the substrate pieces 1510.

In an example embodiment, a plurality of the support bars 1530 may be located on the substrate pieces 1510. The number of the support bars 1530 may be varied in accordance with the number (e.g., 2, 4, 9, 16 pieces) and the size of the substrate pieces 1510. When the number of the substrate pieces is increased, for example, 4 pieces to 16 pieces, and an overall size of the assembled substrate is not changed, merely increase of the screw holes on the support bars 1530 is sufficient for adjusting the increased substrate pieces without any change of the support bars 1530. Particularly, when the number and array of the substrate pieces 1510 are to be changed in accordance with various inspection conditions, for example, from 2 columns by 2 rows (2x2) matrix type into 2 columns by 3 rows (2x3) matrix type, merely adding an additional substrate piece is sufficient for the change of the substrate pieces 1510 without any modifications of the whole inspection apparatus. That is, the original 2x2 matrix type substrate pieces still remains without any modifications and an additional substrate piece is added to the original 2x2 matrix type substrate pieces 1510 in a row direction along which the first bars 1532 extend. The additional substrate piece is easily secured to the original 2x2 substrate pieces 1510 just by adding or exchanging the second bars 1534. Accordingly, the number and array of the substrate pieces 1510 may be easily changed in accordance with inspection environments. Further, when one of the support bars 1530 is broken in the electric inspection apparatus, the broken support bar is only replaced with a new support bar while the other support bars except the broken support bar are maintained unchanged and the adjustment of the relative positions of a whole substrate is merely performed to the substrate piece to which the broken support bar is installed, to thereby facilitate the maintenance of the inspection apparatus.

FIG. 36 is a plan view illustrating an electric inspection apparatus in accordance with a sixteenth example embodiment of the present invention, and FIG. 37 is a cross sectional view taken along a line K-K' of the inspection apparatus shown in FIG. 36.

Referring to FIGS. 36 and 37, the electric inspection apparatus 1600 in accordance with a sixteenth example embodiment may include substrate pieces 1610, a support member, an adjusting member, coupling members 1650, insertion members 1660 and reinforce members 1670. In an example embodiment, the support member may include a frame

1620 and support bars 1630 and may support the substrate pieces 1610 in such a configuration that the substrate pieces 1610 are positioned adjacent to each other. The adjusting members may include a number of adjusting screws 1640 and may adjust relative positions of the substrate pieces 1610 with respect to the frame 1620.

The substrate pieces 1610, the frame 1620, the adjusting screws 1640 and the insertion members 1660 in the present example embodiment may have substantially the same structures and configurations as the substrate pieces 1510, the frame 1520, the adjusting screws 1540 and the insertion members 1560 which are described with reference to FIGS. 28 to 32.

The support bars 1630 may also have substantially the same structures and configurations as the support bars 1530 described with reference to FIGS. 28 to 32, except that the second bars 1634 is extended to the frame 1620 and thus the second bars 1634 makes in contact with an upper surface of the frame 1620. The coupling members 1650 may include first securing screws 1652 and second securing screws 1654.

The first securing screws 1652 may have substantially the same structures and configurations as the coupling members 1550 described with reference to FIGS. 28 to 32.

The second securing screws 1654 may include third pull screws 1654a and third push screws 1654b.

The third pull screws 1654a may screw downward from an upper surface of the second bars 1634 to a lower surface thereof, to thereby penetrate the second bars 1634 and to be stuck into the second sub-frame 1624. The third push screws 1654b may screw upward from the lower surface of the second bars 1634 to the upper surface thereof, to thereby penetrate the second bars 1634 and to be stuck into the second sub-frame 1624. A first gap distance between the second sub-frame 1624 and the second bars 1634 may be shortened by tightening the third pull screws 1654a and may be increased by tightening the third push screws

1654b.

The third pull and push screws 1654a and 1654b may also adjust a second gap distance between the first frame 1622 and the substrate pieces 1610, so that the substrate pieces 1610 may be adjusted in a vertical direction with respect to the upper surface of the substrate pieces 1610.

The reinforce members 1670 may include first reinforce parts 1672 and second reinforce parts 1674.

The first and second reinforce parts 1672 and 1674 may have substantially the same structures and configurations as the first and second reinforce parts 1572 and 1574 described with respect to FIGS. 28 to 32, and thus any detailed descriptions on the first and second reinforce parts 1672 and 1674 are omitted.

In an example embodiment, the first bars 1632 may be further extended to the second sub-frame 1624, so that the first bars 1632 may contact with an upper surface of the second sub-frame 1624. Accordingly, the second securing screws 1654 including the third pull and push screws 1654a and 1654b may also adjust a third gap distance between the first bars 1632 and the second sub-frame 1624.

FIG. 38 is a perspective view illustrating a frame of the electric inspection apparatus shown in FIG. 36. Referring to FIG. 38, the frame 1620 may only include the second sub-frame 1624 without the first sub-frame 1622, and thus the first bars 1632 or the second bars 1634 may be joined to the second frame 1624.

FIG. 39 is a plan view illustrating an electric inspection apparatus in accordance with a seventeenth example embodiment of the present invention, and FIG. 40 is a cross sectional view taken along a line L-L' of the inspection apparatus shown in FIG. 39.

Referring to FIGS. 39 and 40, the electric inspection apparatus 1700 in accordance with a seventeenth example embodiment may include substrate pieces 1710, a support member, an adjusting member, coupling members 1750, insertion members 1760 and reinforce members 1770.

In an example embodiment, the support member may include a frame 1720 and support bars 1730 and may support the substrate pieces 1710 in such a configuration that the substrate pieces 1710 are positioned adjacent to each other. The adjusting members may include a number of adjusting screws 1740 and may adjust relative positions of the substrate pieces 1710 with respect to the frame 1720.

The second bars 1734 may be positioned at an edge portion of the substrate pieces 1710 and the first securing screws 1752 of the coupling members 1750 secures the second bars 1734 to the substrate pieces 1710. The substrate pieces 1710, the frame 1720, the support bars 1730, the adjusting screws 1740, the coupling members 1750 and the insertion members 1760 may have substantially the same structures and configurations as the substrate pieces 1610, the frame 1620, the support bars 1630, the adjusting screws 1640, the coupling members 1650 and the insertion members 1660 that are described with reference to FIGS. 36 to 38, except the above-described configuration of the first securing screws 1752 of the coupling member 1750, so that any detailed descriptions on the substrate pieces 1710, the frame 1720, the support bars 1730, the adjusting screws 1740, the coupling members 1750 and the insertion members 1760 are omitted.

The reinforce members 1770 may include first reinforce parts 1772, second reinforce parts 1774 and third reinforce parts 1776.

The first and second reinforce parts 1772 and 1774 may have substantially the same structures and configurations as the first and second reinforce parts 1572 and 1574 described with respect to FIGS. 28 to 32, and thus any detailed descriptions on the first and second reinforce parts 1772 and 1774 are omitted.

In an example embodiment, the third reinforce part 1776 may be located at a position of the substrate piece 1710 to which the first securing screw 1752 of the coupling member 750 is joined. The third reinforce part 1776 may have material strength greater than that of the substrate piece 1710, to thereby facilitate formation of screw holes on the third reinforce parts 1776 though which the first securing screw 1752 passes. In an example embodiment, the third reinforce part 1776 may be adhered to the substrate piece 1710 by an adhesive or may be inserted by an interference fitting. The second securing screws 1754, which are joined to a lower surface of the substrate pieces 1710 on which a plurality of the probes is installed, may adjust a gap distance between the second bars 1734 and the frame 1720. Therefore, the substrate pieces 1710 may be adjusted at a lower portion thereof in a vertical direction of an upper surface thereof by the second securing screws 1734.

FIG. 41 is a plan view illustrating an electric inspection apparatus in accordance with an eighteenth example embodiment of the present invention, and FIG. 42 is a cross sectional view taken along a line M-M' of the inspection apparatus shown in FIG. 41.

Referring to FIGS. 41 and 42, the electric inspection apparatus 1800 in accordance with an eighteenth example embodiment may include substrate pieces 1810, a support member, an adjusting member, coupling members 1850 and insertion members 1860. In an example embodiment, the support member may include a frame

1820 and support bars 1830 and may support the substrate pieces 1810 in such a configuration that the substrate pieces 1810 are positioned adjacent to each other. The adjusting members may include a number of adjusting screws 1840 and may adjust relative positions of the substrate pieces 1810 with respect to the frame 1820. FIG. 43 is a plan view illustrating the substrate pieces of the electric inspection apparatus shown in FIG. 41, and FIG. 44 is a cross sectional view taken along a line N-N' of FIG. 43.

Referring to FIGS. 41 to 44, the substrate piece 1810 may include a body 1812 and a supplementary member 1814. The body 1812 may be shaped into a plate and a plurality of probes 1815 may be located on a lower surface of the body 1812. The probes 1815 may make direct contact with an inspection object. A plurality of electric pads (not shown) may be located on an upper surface of the body 1812. A signal line (not shown) is installed in the body 1812 and the electric pads and the probes 1815 are electrically connected with each other by the signal line.

The supplementary member 1814 may enclose an upper portion of a side surface of the body 1812. The supplementary member 1814 may have material strength greater than that of the body 1812, to thereby facilitate formation of screw holes on the body 1814 though which the adjusting screws 1840 passes. In an example embodiment, the supplementary member 1814 and the body 1812 may be secured to each other by screws. For example, the body 1812 may include a protrusion portion and the supplementary member 1814 may include a recess portion into which the protrusion portion of the body 1812 is inserted, and the screw may penetrate the protrusion portion of the body 1814 in the recess portion of the supplementary member 1814. In an example embodiment, the supplementary member 1814 and the body 1812 may be adhered to each other by an adhesive or may be inserted by an interference fitting. As shown FIGS. 42 to 44, when the supplementary member 1814 encloses the side surface of the upper portion of the body 1812, much more space around the lower portion of the body 1712 may be provided for the probes 1815 and thus more probes 1815 may be installed to the lower surface of the body 1812. In addition, the probes may be installed in such a configuration that first and second probes on first and second bodies 1812a and 18132b adjacent to each other are spaced apart from each other by a minimized distance.

In an example embodiment, the supplementary member 1814 may enclose a whole side surface of the body 1812.

The frame 1820, the support bars 1830, the adjusting screws 1840, the securing screws 1850 and the insertion members 1860 in the present example embodiment may have substantially the same structures and configurations as the frame 1520, the support bars 1530, the adjusting screws 1540, the securing screws 1550 and the insertion members 1560 that are described with reference to FIGS. 28 to 33, except that the adjusting screws 1840 is stuck to the supplementary member 1814 of the substrate pieces 1810, and thus any further detailed descriptions on the frame 1820, the support bars 1830, the adjusting screws 1840, the securing screws 1850 and the insertion members 1860 are omitted.

FIG. 45 is a plan view illustrating an electric inspection apparatus in accordance with a nineteenth example embodiment of the present invention, and FIG. 46 is a cross sectional view taken along a line O-O' of the inspection apparatus shown in FIG. 45.

Referring to FIGS. 45 and 46, the electric inspection apparatus 1900 in accordance with a nineteenth example embodiment may include substrate pieces 1910, support members, adjusting members, coupling members 1950, insertion members 1960 and reinforce members 1970.

In an example embodiment, the support member may include a frame 1920 and support bars 1930 and may support the substrate pieces 1910 in such a configuration that the substrate pieces 1910 are positioned adjacent to each other. The adjusting members may include a number of adjusting screws 1940.

The substrate pieces 1910, the frame 1920, the securing screws 1950 and the reinforce members 1970 in the present example embodiment may have substantially the same structures and configurations as the substrate pieces 1510, the frame 1520, the securing screws 1550 and the reinforce members 1570 which are described with reference to FIGS. 28 to 29.

The support bars 1930 may include first bars 1932 and second bars 1934. The support bars 1930 may have substantially the same structures and configurations as the support bars 1530 described with reference to FIGS. 28 to 33, except that the support bars 1930 of the present example embodiment is extended to a boundary portion between the second frame 1934 and the substrate pieces 1910 as well as to an upper surface o the substrate pieces 1910 to thereby support the side surfaces of the substrate pieces 1910. Therefore, any further detailed descriptions on the support bars 1930 are omitted hereinafter. In an example embodiment, the adjusting screws 1940 may be used as the adjusting members and may adjust relative positions of the substrate pieces 1910 with respect to the support bars 1930.

The adjusting screws 1940 may be positioned on the support bars 1930 and may include first screws 1942 for adjusting the positions of the substrate pieces in a vertical direction and second screws 1944 for adjusting the positions of the substrate pieces in a horizontal direction.

The adjusting screws 1940 in the present example embodiment may have the same structures and configurations as the adjusting screws 1540 in the fifteenth example embodiment that is described with reference to FIGS. 28 to 33, except that the second screws are located on the support bars 1930 supporting side surfaces of the substrate pieces 1910 and adjusts the positions of the substrate pieces 1910 in a direction parallel with the upper surface of the substrate pieces 1910. Therefore, any further detailed descriptions on the adjusting screws 1940 are omitted.

In an example embodiment, the second sub-frame 1924 may include an opening through which a head portion of the second screw 1944 is exposed, to thereby facilitate the tightening and loosening of the second screws 1944.

The insertion members 1960 in the present example embodiment may have the same structures and configurations as the adjusting screws 1540 in the fifteenth example embodiment that is described with reference to FIGS. 28 to 33, except that the second inserting parts 1964 are interposed between the support bars 1930 and the side surfaces of the substrate pieces 1910 and between the side surfaces of the substrate pieces 1910 adjacent to each other. Therefore, any further detailed descriptions on the insertion members 1960 are omitted.

No frame 1920 may be installed to the electric inspection apparatus 1900. The positions of the substrate pieces 1910 may be adjusted in a direction vertical to and parallel with the upper surface of the substrate pieces 1910 by the support bars 1930 and the adjusting screws 1940. FIG. 47 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a twentieth example embodiment of the present invention.

Referring to FIG. 47, the electric inspection apparatus 2000 in accordance with a twentieth example embodiment may include first and second substrate structures 2010 and 2020, connection members 2030, a coupling member 2040 and a flatness controller 2050.

In an example embodiment, the first substrate structure 2010 may include a number of substrate pieces, a frame, a number of support bars, a number of adjusting screws, a number of securing screws, a number of insertion members and a number of reinforce members. The first substrate structure 2010 may have substantially the same structures and configurations as the apparatus 1500 as described with reference to FIGS. 28 to 33.

In addition, the first substrate structure 2010 may also have substantially the same structures and configurations as the apparatuses as described with reference to FIGS. 34 to 46, and thus may be replaced with the apparatuses shown in FIGS. 34 to 46.

The second substrate structure 2020 may positioned on the first substrate structure 2010 and may include a signal line (not shown) in an inside thereof and a plurality of connection holes 2022 electrically connected to the signal line. A conductive layer 2024 is formed on an inner surface of the connection holes 2022. The conductive layer 2024 may comprise a first conductive material such as copper (Cu). The signal line may be electrically connected to an additional tester. The second substrate structure 2020 may include a printed circuit board (PCB) and a multilayer substrate.

The first and second substrate structures 2010 and 2020 may be electrically connected by the connection member 2030. For example, the conductive layer 2024 on the inner surface of the connection hole 2022 may be electrically connected to an electric pad (not shown) by the connection member 2030. The connection member 2030 may include a second conductive material such as a metal.

A first end portion 2032 of the connection member 2030 may be electrically connected to the electric pad of the first substrate structure 2010. For example, the first end portion 2032 may make in contact with the electric pad or may be secured to the electric pad.

A second portion 2034 of the connection member 2030, which is opposite to the first end portion 2032, may be inserted into the connection hole 2022 of the second substrate structure 2020. For example, the second portion 2034 may make in contact with the conductive layer 2024 on the inner surface of the connection hole 2022 or may be secured to the conductive layer 2024.

In an example embodiment, a wiring member such as a flexible printed circuit (FPC) may be used in place of the connection member 2030, and thus the first and second substrate structures 2010 and 2020 may be electrically connected to each other by the wiring member.

The first and second substrate structures 2010 and 2020 are mechanically coupled with each other by the coupling member 2040. In an example embodiment, the coupling member 2040 may include first and second reinforce members 2041 and 2042, a leaf spring 2044 and a number of bolts. The first reinforce member 2041 may be shaped into a disk and may be positioned on the second substrate structure 2020. The second reinforce member 2042 may be shaped into a ring and may be arranged along an edge portion of the second substrate structure 2020. The first reinforce member 2041, the second substrate structure 2020 and the second reinforce member 2042 are secured with one another by a first bolt 2045. The leaf spring may make in contact with the second reinforce member 2042 and the frame of the first substrate structure 2010. The second reinforce member 2042 may be secured to the leaf spring 2044 by a second bolt 2046 and the leaf spring may be secured to the frame by a third bolt 2047. The flatness controller 2050 may penetrate the first reinforce member

2041 and the second substrate structure 2020, and then may make in contact with an upper surface of the first substrate structure 2010. A thickness of the first substrate structure 2010 may be varied along a longitudinal direction thereof in accordance with various process conditions and environments for manufacturing the first substrate structure 2010, and thus the tips of the probes of the first substrate structure 2010 may not be positioned on the same coplanar surface although the first and the second substrate structures 2010 and 2020 are arranged parallel v/ith each other. The flatness controller 2050 making in contact with an upper surface of the first substrate structure 2010 may control flatness of a lower surface of the first substrate structure 2010 by control on contact strength between I he flatness controller 2050 and the first substrate structure 2010 in such a configuration that the tips of the probes are arranged on the same coplanar surface. The flatness controller 2050 may not necessarily be arranged in the electric inspection apparatus 2000. The substrate pieces of the first substrate structure 2010 may be adjusted in a vertical direction with respect to a top surface of the substrate pieces by the first adjusting screws, so that the flatness or a horizontal degree of the lower surface of the first substrate structure 2010 may be controlled by the adjusting screws in place of the flatness controller 2050.

Accordingly, the positions of the substrate pieces may be adjusted in a direction vertical to an upper surface of the substrate piece by the first adjusting screws and may be adjusted in a direction parallel with an upper surface of the substrate piece by the first adjusting screws. FIG. 48 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a twenty first example embodiment of the present invention

Referring to FIG. 48, the electric inspection apparatus 2100 in accordance with a twenty first example embodiment may include first and second substrate structures 2110 and 2120 and a coupling member 2130.

The first and second substrate structures 2110 and 2120 in the present example embodiment may have substantially the same structures and configurations as the first and second substrate structures 2010 and 2020 in the twentieth example embodiment that are described with reference to FIG. 47, and thus any further detailed descriptions on the first and second substrate structure 2110 and 2120 are omitted.

The first and second substrate structures 2110 and 2120 may be electrically connected by the coupling member 2130. For example, the first and second substrate structures 2110 and 2120 may be secured to each other by the coupling member 2130 in such a manner that an upper surface of the first substrate structure 2110 may be electrically connected to a lower surface of the second substrate structure 2120. The coupling member 2130 may include a reinforce plate 2131 and a plurality of bolts 2132. The reinforce plate 2131 may be shaped into a disk and may be positioned on the second substrate structure 2120. The bolts 2132 may penetrate the reinforce plate 2131 and the second substrate structure 2120 and may be joined to the first substrate structure 2110.

The bolts 2132 may penetrate the second substrate structure 2120 and be joined to the first substrate structure 2110 without the reinforce plate 2131.

Accordingly, the positions of the substrate pieces may be adjusted in a direction vertical to the upper surface of the substrate piece by the bolts 2132 of the first substrate structure 2110.

Further, the positions of the substrate pieces may be adjusted in a direction vertical to the upper surface of the substrate pieces by the adjusting screws of the first subsirate structure 2110 before the first and second substrate structures 2110 and 2120 are coupled to each other.

FIG. 49 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a twenty second example embodiment of the present invention.

Referring to FIG. 49, the electric inspection apparatus 2200 in accordance with a twenty first example embodiment may include first and second substrate structures 2210 and 2220.

The first and second substrate structures 2210 and 2220 in the present example embodiment may have substantially the same structures and configurations as the first and second substrate structures 2010 and 2020 in the twentieth example embodiment that are described with reference to FIG. 47, and thus any further detailed descriptions on the first and second substrate structure 2210 and 2220 are omitted.

The first and second substrate structures 2210 and 2220 may be secured to each other in such a manner that an upper surface of the first substrate structure 2210 may make in direct contact with a lower surface of the second substrate structure 2220 to thereby electrically connect the first and second substrate structure 2210 and 2220. The first and second substrate structures 2210 and 2220 may be secured to each other by a bonding member (not shown) such as a soldering and an adhesive.

Accordingly, the positions of the substrate pieces may be adjusted in a direction vertical to and parallel with the upper surface of the substrate pieces by the adjusting screws of the first substrate structure 2210 before the first and second substrate structures 2210 and 2220 are coupled to each other.

FIG. 50 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a twenty third example embodiment of the present invention. Referring to FIG. 50, the electric inspection apparatus 2300 in accordance with a twenty third example embodiment may include first, second and third substrate structures 2310, 2320 and 2330, first and second connection members 2340 and 2350, a coupling member 2360 and a flatness controller 2370.

The first and second substrate structures 2310 and 2320 may have substantially the same structures and configurations as the first and second substrate structures 2010 and 2020 described with reference to FIG. 47.

In an example embodiment, the third substrate structure 2330 may be interposed between the first and second substrate structures 2310 and 2320 and may include a substrate 2332 and a support 2334 supporting side and lower surfaces of the substrate 2332. A signal line (not shown) may be positioned in the substrate 2332 of the third substrate structure 2330. Examples of the substrate 2332 ma)/ include a printed circuit board (PCB) and a multilayered substrate.

The first connection member 2340 may electrically connect the first substrate structure 2310 and the third substrate structure 2330. A first end portion 2342 of the first connection member 2340 may make in contact with the first substrate structure 2310 or may be secured to the first substrate structure 2310. A second end portion 2344 of the first connection member 2340, which is opposite to the first end portion 2342, may make in contact with the third substrate structure 2330 or may be secured to the third substrate structure 2330.

In an example embodiment, a wiring member such as a flexible printed circuit (FPC) may be used in place of the first connection members 2340, and thus the first and the third substrate structures 2310 and 2330 may be electrically connected to each other by the wiring members. The second connection member 2350 may electrically connect the second substrate structure 2320 and the third substrate structure 2330. In the present example embodiment, the second connection member 2350 may electrically connect a conductive layer 2324 on an inner surface of the connection hole 2322 and an electronic pad of the third substrate structure 2330. A first end portion 2352 of the second connection member 2350 may make in contact with the third substrate structure 2330 or may be secured to the third substrate structure 2330. A second end portion 2354 of the second connection member 2350, which is opposite to the first end portion, may make in contact with or may be secured to the conductive layer of the second substrate structure 2320. In an example embodiment, a wiring member such as a flexible printed circuit (FPC) may be used in place of the second connection members 2350, and thus the second and the third substrate structures 2320 and 2330 may be electrically connected to each other by the wiring members.

The coupling member 2360 may couples the first, second and third substrate structures 2310, 2320 and 2330 to one another. In an example embodiment, the coupling member 2360 may include first, second and third reinforce members 2361, 2362 and 2363, a leaf spring 2364 and a number of bolts. The first reinforce member 2361 may be shaped into a disk and may be positioned on an upper surface of the second substrate structure 2320. The second reinforce member 2362 may be shaped into a ring and may be arranged along an edge portion of the second substrate structure 2320. The third reinforce member 2363 may be shaped into a ring and may be arranged along an edge portion of the third substrate structure 2330, so that the third reinforce member 2363 may be arranged along the frame 2334 of the third substrate structure 2330. A first bolt 2365 of the coupling member 2360 may secures the first reinforce member 2361, the second substrate structure 2320 and the second reinforce member 2362 to one another. The leaf spring 2364 may connect the second reinforce member 2362 and the frame 2334 of the third substrate structure 2330 with each other in such a configuration that a portion of the leaf spring 2364 presses the upper surface of the substrate 2332 and thus the substrate 2332 is supported by the frame 2334.

The second bolt 2366 may secure the leaf spring 2364 to the second reinforce member 2362, and the third bolt 2367 may secure the leaf spring 2364 to the frame 2334 of the third substrate structure 2330. The fourth bolt 2368 may secure the frame 2334 to the third reinforce member 2363 and the fifth bolt 2369 may secure the third reinforce member 2363 to the frame of the first substrate structure 2310. An additional leaf spring (not shown) may be further installed between the third reinforce member 2363 and the frame of the first substrate structure 2310, so that an upper surface of the substrate piece of the first substrate structure 2310 may be elastically pressed by the additional leaf spring to thereby secure the substrate piece to the frame of the first substrate structure 2310.

While the present example embodiment discloses that the frame of the first substrate structure 2310 may be arranged separately from the third reinforce member 2363 and thus the frame of the first substrate structure 2310 and the third reinforce member may be secured to each other by the fifth bolt 2369, the frame and the third reinforce member 2369 may also be integrally formed in a body without the fifth bolt 2369.

The flatness controller 2370 may penetrate the first reinforce member

2361 and the second substrate structure 2320, and then may make in contact with an upper surface of the third substrate structure 2330. A thickness of the first substrate structure 2310 may be varied along a longitudinal direction thereof in accordance with various process conditions and environments for manufacturing the first substrate structure 2310, and thus the tips of the probes of the first substrate structure 2310 may not be positioned on the same coplanar surface although the first substrate structure 2310 may be arranged parallel with the second substrate structure 2320. The flatness controller 2370 making in contact with an upper surface of the third substrate structure 2330 may control the horizontal degree of the first substrate structure 2310 by control on contact strength between the flatness controller 2370 and the third substrate structure

2330 in such a configuration that the tips of the probes are arranged on the same coplanar surface. Therefore, the tips of the probes on the lower surface of the first substrate structure 2310 may be positioned at the same coplanar surface.

No flatness controller 2370 may be arranged in the electric inspection apparatus 2300. The substrate pieces of the first substrate structure 2310 may be adjusted in a vertical direction with respect to a top surface of the substrate pieces by the first adjusting screws, so that the flatness or the horizontal degree of the lower surface of the first substrate structure 2310 may be controlled by the adjusting screws in place of the flatness controller 2370.

In addition, the second adjusting screws may also adjust the positions of the substrate pieces in the first substrate structure 2310 in a direction parallel with a top surface of the substrate pieces. FIG. 51 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a twenty fourth example embodiment of the present invention.

Referring to FIG. 51, the electric inspection apparatus 2400 in accordance with a twenty fourth example embodiment may include first, second and third substrate structures 2410, 2420 and 2430, a connection member 2440, a coupling member 2450 and a flatness controller 2460.

The first and second substrate structures 2410 and 2420 may have substantially the same structures and configurations as the first and second substrate structures 2010 and 2020 described with reference to FIG. 47.

The third substrate structure 2430, the connection member 2440 and the flatness controller 2460 in the present example embodiment may have substantially the same structures and configurations as the third substrate structure 2330, the second connection member 2350 and the flatness controller 2370 in the previous example embodiment that is described in detail with reference to FIG. 50.

The coupling member 2450 may secures the first, second and third substrate structures 2410, 2420 and 2430 to one another in such a manner that an upper surface of the first substrate structure 2410 makes in direct contact with a lower surface of the third substrate structure 2430. In an example embodiment, the coupling member 2450 may include first and second reinforce members 2451 and 2452, a leaf spring 2454 and a number of bolts.

The first reinforce member 2451 may be shaped into a disk and may be positioned on an upper surface of the second substrate structure 2420. The second reinforce member 2452 may be shaped into a ring and may be arranged along an edge portion of the second substrate structure 2420. A first bolt 2455 of the coupling member 2450 may secures the first reinforce member 2451, the second substrate structure 2420 and the second reinforce member 2452 to one another. The leaf spring 2454 may connect the second reinforce member 2452 and the frame 2434 of the third substrate structure 2430. The second bolt 2456 may secure the leaf spring 2454 to the second reinforce member 2452, and the third boll 2457 may secure the leaf spring 2454 to the frame 2434 of the third substrate structure 2430. The leaf spring 2454 may connect the second reinforce member 2452 and the frame 2434 of the third substrate structure 2430 with each other in such a configuration that a portion of the leaf spring 2454 presses the upper surface of the substrate 2432 and thus the substrate 2432 is secured to the frame 2434.

The fourth bolt 2458 may secure the frame 2434 of the third substrate structure 2430 to the frame o the first substrate structure 2410, so that the first and third substrate structures 2410 and 2430 are electrically connected to each other by the fourth bolt 2458. Otherwise, an electric pad (not shown) on the first substrate structure 2410 and another electric pad (not shown) on the third substrate structure 2430 may be joined to each other by a bonding process, and thus the first and third substrate structures may be electrically connected to each other.

Therefore, the positions of the substrate pieces may be adjusted in a direction vertical to the upper surface of the substrate pieces by the fourth bolt 2458. In an example embodiment, the first and third substrate structures 2410 and 2430 may be electrically connected to each other by indirect contact through the connection members 2440, and the second and third substrate structures 2420 and 2430 may be electrically connected to each other by direct contact.

Accordingly, the positions of the substrate pieces may be adjusted in a direction vertical to and parallel with the upper surface of the substrate pieces by the adjusting screws before the first and third substrate structures 2410 and 2430 are coupled to each other.

FIG. 52 is a flow chart showing processing steps for a method of assembling the electric inspection apparatuses shown in FIGS. 28 to 46. FIGS. 53 to 53E are plan views illustrating the electric inspection apparatus corresponding the processing steps shown in FIG. 52.

The electric inspection apparatuses disclosed in FIGS. 28 to 46 have similar structures and configurations, and thus the assembling method of the electric inspection apparatus is to be described based on the apparatuses 1500 disclosed in FIGS. 28 to 33 hereinafter.

Referring to FIGS. 52 and 53, at least two substrate pieces 1510 may be arranged in such a manner that the substrate pieces 1510 are positioned adjacent to each other and thus the side surfaces thereof face each other. Each of the substrate pieces has a first surface area (step S310). Hereinafter, a resulting substrate assembled from the substrate pieces 1510 is referred to as large scale substrate so as to separate each of the substrate pieces 1510.

Referring to FIGS. 52 and 53B, a plurality of the support bars 1530 may be located on the substrate pieces 1510 (step S320). The first support bars 1532 may be arranged on the large scale substrate in a first direction and the second support bars 1534 may be arranged on the first support bars 1532 in a second direction perpendicular to the first direction.

Referring to FIGS. 52 and 53C, the substrate pieces 1510 and the support bars 1530 are secured to each other by the first adjusting screws 1542 (step S330).

The first pull screw 1542a of the first adjusting screws 1542 may penetrate through the first support bars 1532 and thus may be joined to the substrate piece 1510. The first push screw 1542b of the first adjusting screws 1542 may screw down through the first support bars 1532 and thus may make contact with the upper surface of the substrate pieces 1510. Then, the first and second support bars 1532 and 1534 may be secured to each other by the securing screws 1550.

A relative position of the substrate pieces 1510 in relation to the support bars 1530 may be adjusted by the first adjusting screws 1542 (step S340).

In an example embodiment, each of the substrate pieces may be pulled or pushed by the first pull screws 1542a and the first push screws 1542b, and thus the first gap distances between the substrate pieces 1510 and the support bars 1532 may be adjusted by the first screws 1542. Therefore, the position of the substrate pieces may be adjusted in a direction vertical to the upper surface of the substrate pieces 1510.

In an example embodiment, the support bars 1530 may be positioned on a side surface of the substrate pieces as well as the upper surface thereof, and the first adjusting screws 1542 may secure the first support bars 1532 to the side surface of the substrate pieces 1510. Therefore, the position of the substrate pieces may be adjusted in a direction parallel with the upper surface of the substrate pieces 1510 by the first pull screws 154a2 and the first push screws 1542b.

In another example embodiment, the support bars 1530 may be positioned on a side surface of the substrate pieces as well as the upper surface thereof, and the first adjusting screws 1542 may secure the first support bars 1532 to the upper surface of the substrate pieces 1510 and the second adjusting screws 1544 may secure the first support bars 1532 to the side surface of the substrate pieces

1510. Therefore, the position of the substrate pieces may be adjusted in a direction vertical to and parallel with the upper surface of the substrate pieces 1510 by the first screws 1542 and the second screws 1544.

Referring to FIGS. 52 and 53D, the substrate pieces 1510 may be positioned into the frame 1520 (step S350).

The substrate pieces 1510 to which the support bars 1530 are secured may be installed into the frame 1520, and thus the side surfaces and the upper or lower surface of the substrate pieces may be supported by the frame 1520.

In an example embodiment, the positions of the substrate pieces 1510 may be adjusted in a vertical direction with respect to the support bars 1530 by the first adjusting screws 1542, and then the assembled substrate pieces 1510 may be installed into the frame 1520. In another example embodiment, the support bars 1530 are secured to the assembled substrate pieces 1510 by the first adjusting screws 1542, and then the assembled substrate pieces 1510 may be installed into the frame 1520.

Referring to FIGS. 52 and 53E, the second adjusting screws 1544 may be installed to the frame 1520 (step S360).

The second pull screw 1544a of the second adjusting screws 1544 may penetrate through the second sub-frame 1524 of the frame 1520 and thus may be joined to the substrate piece 1510. The second push screw 1544b of the second adjusting screws 1544 may screw inward through the second sub-frame 1524 and thus may make contact with the side surface of the substrate pieces 1510. The second adjusting screws 1544 may be installed to the second sub-frame 1524 after the second inserting part 1564 of the insertion members 1560 is interposed between the substrate pieces 1510 and the second sub-frame 1524.

The positions of the substrate pieces 1510 may be adjusted in a direction parallel with the frame 1520 by the second adjusting screws 1544 (step S370).

Each of the substrate pieces 1510 may be pulled or pushed by the second pull screws 1544a and the second push screws 1544b, and thus the second gap distances between the substrate pieces 1510 and the second sub-frame 1524 may be adjusted by the second screws 1544. Therefore, the position of the substrate pieces may be adjusted in a direction parallel with the upper surface of the substrate pieces 1510.

In an example embodiment, a plurality of the probes, which may make in direct contact with an inspection object, may be installed to the each of the substrate pieces 1510 before the substrate pieces 1510 are arranged adjacent to each other.

In an example embodiment, the probes 1512, which may make in direct contact with an inspection object, may be installed to the substrate pieces 1510 after the position of the substrate pieces are adjusted in relation to the support bars 1530 by the adjusting screws 1540. In an example embodiment, the probes 1512, which may make in direct contact with an inspection object, may be installed to the substrate pieces 1510 after the position of the substrate pieces are adjusted in relation to the support bars 1530 by the adjusting screws 1540 in a direction vertical to an upper surface of the substrate pieces 1510.

In an example embodiment, the probes 1512, which may make in direct contact with an inspection object, may be installed to the substrate pieces 1510 after the position of the substrate pieces are adjusted in relation to the support bars 1530 by the adjusting screws 1540 in a direction parallel with an upper surface of the substrate pieces 1510.

In an example embodiment, the probes 1512, which may make in direct contact with an inspection object, may be installed to the substrate pieces 1510 after the position of the substrate pieces are adjusted in relation to the frame 1520 by the adjusting screws 1540 in a direction vertical to an upper surface of the substrate pieces 1510.

In an example embodiment, the probes 1512, which may make in direct contact with an inspection object, may be installed to the substrate pieces 1510 after the position of the substrate pieces are adjusted in relation to the frame 1520 by the adjusting screws 1540 in a direction parallel with an upper surface of the substrate pieces 1510.

In an example embodiment, the probes 1512, which may make in direct contact with an inspection object, may be installed to the substrate pieces 1510 after the assembled substrate pieces 1510 are positioned in the frame 1520.

FIG. 54 is a flow chart showing processing steps for a method of assembling the electric inspection apparatuses shown in FIGS. 47 to 51.

The electric inspection apparatuses disclosed in FIGS. 7 to 51 have similar structures and configurations, and thus the assembling method of the electric inspection apparatus is to be described based on the apparatuses 2000 disclosed in FIG. 47 hereinafter. Referring to FIG. 54, a frame, substrate pieces, support bars and adjusting screws are assembled into the first substrate structure 2010 (step S410).

In an example embodiment, the substrate pieces are arranged adjacent to each other and the support bars are positioned on the substrate pieces. The support bars are secured to the substrate pieces by the first adjusting screws, and then the substrate pieces are positioned into the frame. The second adjusting screws are screwed into the frame.

The processing steps of the arrangement of the substrate pieces, the positioning of the support bars, the installation of the first adjusting screws, the positioning of the substrate pieces in the frame and the installation of the second adjusting screws are the same as the process steps of S310 to S360 that are described above with reference to FIGS. 52 and 53 to 53E.

Then, the second substrate structure 2020 may be joined to the first substrate structure 2010 in such a manner that the first and second substrate structures 2010 and 2020 are electrically connected to each other (step S420).

In an example embodiment, the first and the second substrate structures 2010 and 2020 are electrically connected to each other by the connection members 2030. Then, the second substrate structure 2020 may be secured to the first substrate structure 2010 by the coupling member 2040. The flatness controller 2050 may penetrate through the second substrate structure 2020 and make in contact with an upper surface of the first substrate structure 2010.

In an example embodiment, no flatness controller 2050 may be installed to the inspection apparatus 2000.

In an example embodiment, the first and second substrate structures 2010 and 2020 may be connected to each other by a direct contact.

The first gap distance between the substrate pieces 2010 and the support bars and the second gap distance between the substrate pieces 2010 and the frame may be adjusted by the adjusting screws (step S430).

In an example embodiment, the first adjusting screws may adjust the relative positions of the substrate pieces in relation to the support bars in a vertical direction and the second adjusting screws may adjust the relative positions of the substrate pieces in relation to the frame in a horizontal direction.

The processing steps of adjusting the positions of the substrate pieces in vertical and horizontal directions are substantially the same as the processing steps S340 and S370 that are described above with reference to FIGS. 52 and 53 to 53E.

Accordingly, the relative positions of the substrate pieces may be adjusted by controlling the first and second gap distances by the adjusting screws. FIG. 55 is a plan view illustrating an electric inspection apparatus in accordance with a twenty fifth example embodiment of the present invention and FIG. 56 is a cross-sectional view taken along a line P-P' of FIG. 55.

Referring to FIGS. 55 and 56, the electric inspection apparatus 2500 in accordance with a twenty fifth example embodiment may include substrate pieces 2510, support members 2530 and adjusting members.

In an example embodiment, the support member may include a support plate 2532 and a support column 2534 and may support the substrate pieces in such a configuration that the substrate pieces are positioned adjacent to each other. The adjusting member may include a plurality of bolts 2520, a plurality of nuts 2540, a plurality of bolt covers 2550 and a plurality of screws 2560 and may adjust the relative positions of the substrate pieces 2510 in relation to the support member.

A plurality of probes 2512 may be positioned on each of the substrate pieces 2510. The substrate pieces 2510 may have substantially the same structures and configurations that are described with reference to FIGS. 1 and 2.

The bolts 2520 may be joined to the substrate pieces 2510 in a vertical direction to an upper surface of the substrate pieces 2510. For example, the bolts 2520 may be bonded to the upper surface of the substrate pieces 2510 by a bonding agent such as an epoxy resin, or may be formed integrally with the substrate pieces 2510 in a body.

In an example embodiment, the support member 2530 may include a plate 2532 and a column 2534.

The support plate 2532 may be shaped into a flat board and make in contact with an upper surface of the substrate pieces 2510. The support plate 2532 may include a plurality of openings through which an electric pad on the substrate pieces 2510 is exposed.

The support columns 2534 may be protruded from a surface of the support plate 2532 and may be spaced apart from each other by a column gap distance that is substantially the same as a bolt gap distance between neighboring bolts

2520. For example, the support column 2534 may have a cylindrical shape or a square pillar shape.

The support member 2530 may also include a plurality of penetration holes 2536 penetrating through the support plate 2532 and the support column 2534, and the penetration hole 2536 may include a first hole 2536a and a second hole 2536b.

The first hole 2536a may be positioned on the support plate 2532 and a portion of the support column 2534. The second hole 2536b may be connected to the first hole 2536a and be positioned on a residual portion of the support column 2534.

A diameter of the first hole 2536a may be larger than that of the bolt 2520, and thus the bolt 2520 may be easily inserted into the support plate 2532 through the first hole 2536a. In addition, the bolt 2520 may move in a horizontal direction with respect to the support plate 2532 while the bolt 2520 is inserted into the support plate 2532.

In an example embodiment, the first hole 2536a may be shorter than the second hole 2536b, and thus the bolt 2520 may be inserted into the support plate 2532 through the first and second holes 2536a and 2536b.

A diameter of the second hole 2536b may be larger than that of the first hole 2536a, and screw threads may be formed on an inner surface of the second hole 2536b that is defined by the support column 2534.

The nuts 2540 may be coupled with the bolts 2520 in the second holes 2536b, respectively. An outer diameter of the nut 2540 may be larger than the diameter of the first hole 2536a and may be smaller than the diameter of the second hole 2536b.

Tightening and loosening of the nut 2540 may allow the bolt 2520 to move down and up in a vertical direction with respect to the support plate 2532, and the movement of the bolt 2520 may cause the movement of the substrate pieces 2510 in the vertical direction because the substrate piece 2510 is secured to the bolt 2520. That is, the position of the substrate pieces 2510 may be adjusted by the tightening and loosening of the nuts 2540.

The bolt cover 2550 may be inserted into the second hole 2536 and may be joined to the support column 2534. The bolt cover 2550 may apply a pressure to a head portion of the bolt 2520 and maintain the adjusted vertical position of the bolt 2520 and the substrate piece 2510.

The screws 2560 may penetrate through a sidewall of the support column 2534 and make in contact with the bolt 2520 in the first hole 2536a. For example, four screws penetrate through the support column2534 at a right angle with each other and make in contact with a single bolt 2520 in the first hole 2536a. That is, four screws 2560 may make in contact with the bolt 2520 in the first hole 2536a in different four directions each of which is perpendicular to each other.

Positions of the bolt 2520 may be adjusted in a horizontal direction parallel with an upper surface of the support plate 2532 by tightening and loosening of the screws 2560. The horizontal adjustment of the bolt 2520 may cause the horizontal adjustment of the substrate piece 2510 because the bolt 2520 is secured to the substrate piece 2510.

In an example embodiment, a screw hole may be located at the sidewall of the support column 2534 through which the screw 2560 passes. For example, the screw hole may be shaped into an elliptic shape of which the longer axis is parallel with an axis of the support column 2534.

In an example embodiment, the diameter of the screw hole may be substantially identical to the diameter of the screw 2560 within an allowable processing tolerance.

Therefore, the vertical positions of the bolts 2520 may be adjusted by tightening and loosening the nuts 2540 under the circumstances that the screws make in contact with the bolt 2560.

Since the diameter of the first hole 2536a is larger than that of the bolt 2520 and the outer diameter of the nut 2540 is larger than the diameter of the first hole 2536a and smaller than the diameter of the second hole 2536b, the positions of the bolts 2520 may also be adjusted in a horizontal direction parallel with the upper surface of the substrate piece 2510 by the tightening and loosening the nuts 2540 under the circumstances that the screws make in contact with the bolt 2560. Accordingly, the position of the substrate pieces 2510 may be adjusted in vertical and horizontal directions by the adjustment of the vertical and horizontal positions of the bolts 2520.

FIG. 57 is a plan view illustrating an electric inspection apparatus in accordance with a twenty sixth example embodiment of the present invention. Referring to FIG. 55, the electric inspection apparatus 2600 in accordance with a twenty sixth example embodiment may include first and second substrate structures 2610 and 2620, connection members 2630, a coupling member 2640 and a flatness controller 2650.

In an example embodiment, the first substrate structure 2610 may include a number of substrate pieces, bolts, nuts, bolt covers and screws. The first substrate structure 2610 may have substantially the same structures and configurations as the apparatus 2500 as described with reference to FIGS. 55 to

56.

The second substrate structure 2620 may be positioned on the first substrate structure 2610 and may include a signal line (not shown) in an inside thereof and a plurality of connection holes 2622 electrically connected to the signal line. A conductive layer 2624 is formed on an inner surface of the connection holes 2622. The conductive layer 2624 may comprise a first conductive material such as copper (Cu). The signal line may be electrically connected to an additional tester. The second substrate structure 2620 may include a printed circuit board (PCB) and a multilayer substrate.

The first and second substrate structures 2610 and 2620 may be electrically connected by the connection member 2630. For example, the conductive layer 2624 on the inner surface of the connection hole 2622 may be electrically connected to an electric pad (not shown) by the connection member 2630. The connection member 2630 may include a second conductive material such as a metal.

A first end portion 2632 of the connection member 2630 may be electrically connected to the electric pad of the first substrate structure 2610. For example, the first end portion 2632 may make in contact with the electric pad or may be secured to the electric pad.

A second portion 2634 of the connection member 2630, which is opposite to the first end portion 2632, may be inserted into the connection hole 2622 of the second substrate structure 2620. For example, the second portion 2634 may make in contact with the conductive layer 2624 on the inner surface of the connection hole 2622 or may be secured to the conductive layer 2624.

In an example embodiment, a wiring member such as a flexible printed circuit (FPC) may be used in place of the connection member 2630, and thus the first and second substrate structures 2610 and 2620 may be electrically connected to each other by the wiring member.

The first and second substrate structures 2610 and 2620 are mechanically coupled with each other by the coupling member 2640. In an example embodiment, the coupling member 2640 may include first and second reinforce members 2641 and 2642, a leaf spring 2644 and a number of bolts.

The first reinforce member 2641 may be shaped into a disk and may be positioned on the second substrate structure 2620. The second reinforce member 2642 may be shaped into a ring and may be arranged along an edge portion of the second substrate structure 2020. The first reinforce member 2641, the second substrate structure 2620 and the second reinforce member 2642 are secured with one another by a first bolt 2645. The leaf spring may make in contact with the second reinforce member 2642 and the frame of the first substrate structure 2610. The second reinforce member 2642 may be secured to the leaf spring 2644 by a second bolt 2646 and the leaf spring may be secured to the frame by a third bolt 2647.

The flatness controller 2650 may penetrate the first reinforce member 2641 and the second substrate structure 2620, and then may make in contact with an upper surface of the first substrate structure 2610. A thickness of the first substrate structure 2610 may be varied along a longitudinal direction thereof in accordance with various process conditions and environments for manufacturing the first substrate structure 2610, and thus the tips of the probes of the first substrate structure 2610 may not be positioned on the same coplanar surface although the first and the second substrate structures 2610 and 2620 are arranged parallel with each other. The flatness controller 2650 making in contact with an upper surface of the first substrate structure 2610 may control flatness of a lower surface of the first substrate structure 2610 by control on contact strength between the flatness controller 2650 and the first substrate structure 2610 in such a configuration that the tips of the probes are arranged on the same coplanar surface.

The flatness controller 2650 may not necessarily be arranged in the electric inspection apparatus 2600. The substrate pieces of the first substrate structure 2610 may be adjusted in a vertical direction with respect to a top surface of the substrate pieces by the first adjusting screws, so that the flatness or a horizontal degree of the lower surface of the first substrate structure 2610 may be controlled by the adjusting screws in place of the flatness controller 2650.

Accordingly, the positions of the substrate pieces may be adjusted in a direction vertical to an upper surface of the substrate piece by the first adjusting screws and may be adjusted in a direction parallel with an upper surface of the substrate piece by the first adjusting screws.

FIG. 58 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a twenty seventh example embodiment of the present invention. Referring to FIG. 58, the electric inspection apparatus 2700 in accordance with a twenty seventh example embodiment may include first, second and third substrate structures 2710, 2720 and 2730, first and second connection members 2740 and 2750, a coupling member 2760 and a flatness controller 2770.

The first and second substrate structures 2710 and 2720 may have substantially the same structures and configurations as the first and second substrate structures 2610 and 2620 described with reference to FIG. 57.

In an example embodiment, the third substrate structure 2730 may be interposed between the first and second substrate structures 2710 and 2720 and may include a substrate 2732 and a support 2734 supporting side and lower surfaces of the substrate 2732. A signal line (not shown) may be positioned in the substrate 2732 of the third substrate structure 2730. Examples of the substrate 2732 may include a printed circuit board (PCB) and a multilayered substrate.

The first connection member 2740 may electrically connect the first substrate structure 2710 and the third substrate structure 2730. A first end portion 2742 of the first connection member 2740 may make in contact with the first substrate structure 2710 or may be secured to the first substrate structure 2710. A second end portion 2744 of the first connection member 2740, which is opposite to the first end portion 2742, may make in contact with the third substrate structure 2730 or may be secured to the third substrate structure 2730. The second connection member 2750 may electrically connect the second substrate structure 2720 and the third substrate structure 2730. In the present example embodiment, the second connection member 2750 may electrically connect a conductive layer 2724 on an inner surface of the connection hole 2722

5 and an electronic pad of the third substrate structure 2730. A first end portion

2752 of the second connection member 2750 may make in contact with the third substrate structure 2730 or may be secured to the third substrate structure 2730.

A second end portion 2754 of the second connection member 2750, which is opposite to the first end portion, may make in contact with or may be secured to l ϋ the conductive layer of the second substrate structure 2720.

In an example embodiment, a wiring member such as a flexible printed circuit (FPC) may be used in place of the first and second connection members

2740 and 2750, and thus the first and the third substrate structures 2710 and 2730 and the second and the third substrate structures 2720 and 2730 may be

15 electrically connected to each other by the wiring members.

The coupling member 2760 may couples the first, second and third substrate structures 2710, 2720 and 2730 to one another. In an example embodiment, the coupling member 2760 may include first, second and third reinforce members 2761, 2762 and 2763, a leaf spring 2764 and a number of 0 bolts.

The first reinforce member 2761 may be shaped into a disk and may be positioned on an upper surface of the second substrate structure 2720. The second reinforce member 2762 may be shaped into a ring and may be arranged along an edge portion of the second substrate structure 2720. The third reinforce 5 member 2763 may be shaped into a ring and may be arranged along an edge portion of the third substrate structure 2730, so that the third reinforce member 2763 may be arranged along the frame 2734 of the third substrate structure 2730. A first bolt 2765 of the coupling member 2760 may secures the first reinforce member 2761, the second substrate structure 2720 and the second reinforce member 2762 to one another. The leaf spring 2764 may connect the second reinforce member 2762 and the frame 2734 of the third substrate structure 2730 with each other in such a configuration that a portion of the leaf spring 2764 presses the upper surface of the substrate 2732 and thus the substrate 2732 is supported by the frame 2734.

The second bolt 2766 may secure the leaf spring 2764 to the second reinforce member 2762, and the third bolt 2767 may secure the leaf spring 2764 to the frame 2734 of the third substrate structure 2730. The fourth bolt 2768 may secure the frame 2734 to the third reinforce member 2763 and the fifth bolt 2769 may secure the third reinforce member 2763 to the frame of the first substrate structure 2710. An additional leaf spring (not shown) may be further installed between the third reinforce member 2763 and the frame of the first substrate structure 2710, so that an upper surface of the substrate piece of the first substrate structure 2710 may be elastically pressed by the additional leaf spring to thereby secure the substrate piece to the frame of the first substrate structure 2710.

While the present example embodiment discloses that the frame of the first substrate structure 2710 may be arranged separately from the third reinforce member 2763 and thus the frame of the first substrate structure 2710 and the third reinforce member may be secured to each other by the fifth bolt 2769, the frame and the third reinforce member 2769 may also be integrally formed in a body without the fifth bolt 2769.

The flatness controller 2770 may penetrate the first reinforce member 2761 and the second substrate structure 2720, and then may make in contact with an upper surface of the third substrate structure 2730. A thickness of the first substrate structure 2710 may be varied along a longitudinal direction thereof in accordance with various process conditions and environments for manufacturing the first substrate structure 2710, and thus the tips of the probes of the first substrate structure 2710 may not be positioned on the same coplanar surface although the first substrate structure 2710 may be arranged parallel with the second substrate structure 2720. The flatness controller 2770 making in contact with an upper surface of the third substrate structure 2730 may control the horizontal degree of the first substrate structure 2710 by control on contact strength between the flatness controller 2770 and the third substrate structure 2730 in such a configuration that the tips of the probes are arranged on the same coplanar surface. Therefore, the tips of the probes on the lower surface of the first substrate structure 2710 may be positioned at the same coplanar surface.

No flatness controller 2770 may be arranged in the electric inspection apparatus 2700. The substrate pieces of the first substrate structure 2710 may be adjusted in a vertical direction with respect to a top surface of the substrate pieces by the first adjusting screws, so that the flatness or the horizontal degree of the lower surface of the first substrate structure 2710 may be controlled by the adjusting screws in place of the flatness controller 2770.

In addition, the second adjusting screws may also adjust the positions of the substrate pieces in the first substrate structure 2710 in a direction parallel with a top surface of the substrate pieces.

FIG. 59 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a twenty eighth example embodiment of the present invention. Referring to FIG. 59, the electric inspection apparatus 2800 in accordance with a twenty eighth example embodiment may include substrate pieces 2810, coupling members, adjusting members, a substrate structure 2860 and connection members 2865.

In an example embodiment, the coupling member may include a support part 2830 and a reinforce part 2870 and may the substrate pieces may be supported by the coupling member in such a manner that the substrate pieces are positioned adjacent to each other. The adjusting member may include a plurality of bolts 2820, a plurality of first nuts 2840, a plurality of screws 2850, a plurality of second nuts 2880 and a plurality of bolt covers 2890 and may adjust the relative positions of the substrate pieces in relation to the coupling member.

The substrate pieces 2810, the bolts 2820, the support part 2830 and the screws 2850 may have substantially the same structures and configurations as the substrate pieces 2510, the bolts 2520, the support member 2530 and the screws 2560 in the twenty fifth example embodiment that are described in detail with reference to FIGS. 55 and 56.

The first nut 2840 may be coupled with the bolts 2820, and thus the support part 2830 may be secured to the substrate piece 2810 by the bolt and nut

2820 and 2840. The first nut 2840 may not be installed to the inspection apparatus 2800 of the present example embodiment in accordance with inspection conditions and environments.

The substrate structure 2860 and the connection member 2865 may have substantially the same structures and configurations as the second substrate structure 2620 and the connection member 2630 in the twenty sixth example embodiment that are described in detail with reference to FIG. 57, except that the substrate structure 2860 includes a lower penetration hole 2863 into which the bolt 2820 is inserted and of which the diameter is equal to or larger than the diameter of the bolt 2820.

The reinforce part 2870 may be positioned on the substrate structure 2860 and may include an upper penetration hole 2872 into which the bolt is inserted.

The upper penetration hole 2872 may include a third hole 2872a and a fourth hole 2872b.

The third hole 2872a may be located at a lower portion of the reinforce part 2870 and the fourth hole 2872b may be located at an upper portion of the reinforce part 2870 and may be connected to the third hole 2872a.

A diameter of the third hole 2872a may be larger than that of the bolt 2820 and a diameter of the fourth hole 2872b may be larger than that of the third hole 2872a. Screw threads may be formed on an inner surface of the fourth hole 2872b that is defined by the reinforce part 2870. The second nut 2880 and the bolt cover 2890 may have substantially the same structures and configurations as the nut 2540 and the bolt cover 2550 in the twenty fifth example embodiment that are described in detail with reference to FIG. 55, except that the second nut 2880 is joined to a head portion of the bolt 2820 in the fourth hole 2872b and the bolt cover 2890 is inserted into the fourth hole 2872b and is secured to the reinforce part 2870.

Accordingly, the position of the substrate pieces 2810 may be adjusted in vertical and horizontal directions by the adjustment of the vertical and horizontal positions of the bolts 2820. FIG. 60 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a twenty ninth example embodiment of the present invention.

Referring to FIG. 60, the electric inspection apparatus 2900 in accordance with a twenty ninth example embodiment may include substrate pieces 2910, support members, adjusting members, substrate structures 2930 and connection members 2940.

In an example embodiment, the support member may include a reinforce part 2950 and the adjusting member may include a plurality of bolts 2920, a plurality of screws 2960, plurality of nuts 2970 and a plurality of bolt covers 2980.

The substrate pieces 2910 and the bolts 2920 may have substantially the same structures and configurations as the substrate pieces 2510 and the bolts 2520in the twenty fifth example embodiment that are described in detail with reference to FIGS. 55 and 56. The substrate structure 2930 and the connection member 2940 may have substantially the same structures and configurations as the substrate structure 2860 and the connection member 2865 in the twenty eighth example embodiment that are described in detail with reference to FIG. 59, except that the substrate structure 2930 is spaced apart from the substrate piece 2910. In an example embodiment, the reinforce part 2950 may include a plate 2951 and a column 2952.

The plate 2951 may be shaped into a flat board and make in contact with an upper surface of the substrate structure 2930. The columns 2952 may be protruded from a surface of the plate 2951 and may be spaced apart from each other by a column gap distance that is substantially the same as a bolt gap distance between neighboring bolts 2920. For example, the column 2952 may have a cylindrical shape or a square pillar shape.

The reinforce part 2950 may also include a plurality of penetration holes 2953 penetrating through the plate 2951 and the column 2952, and the penetration hole 2953 may include a first hole 2953 and a second hole 2953b.

The first hole 2953a may be positioned on the plate 2951 and a portion of the column 2952. The second hole 2953b may be connected to the first hole 2953a and be positioned on a residual portion of the column 2952. A diameter of the first hole 2953a may be larger than that of the bolt 2920, and thus the bolt 2920 may be easily inserted into the plate 2951 through the first hole 2953a. In addition, the bolt 2920 may move in a horizontal direction with respect to the plate 2951 while the bolt 2920 makes in contact with the plate 2951. A diameter of the second hole 2953b may be larger than that of the first hole 2953a, and screw threads may be formed on an inner surface of the second hole 2953b that is defined by the column 2952.

The reinforce part 2950 may be secured to the substrate structure 2930 by a securing member 2954. Since the substrate structure 2930 is secured to the reinforce part 2950, the substrate structure 2930 may spaced apart from the substrate pieces 2910.

The screws 2960, the nuts 2970 and the bolt covers 2980 may have the same structures and configurations as the screws 2560, the nuts 2540 and the bolt covers 2550 in the twenty fifth example embodiment that are described in detail with reference to FIGS. 55 and 56, except that the screws 2960 may penetrate through a sidewall of the column 2952 and make in contact with the bolt 2920 in the first hole 2953a, the nuts 2970 may be coupled with the bolts 2920 in the second holes 2853b, and the bolt cover 2980 may be inserted into the second hole 2953b and may be joined to the column 2952.

Accordingly, the position of the substrate pieces 2910 may be adjusted in vertical and horizontal directions by the adjustment of the vertical and horizontal positions of the bolts 2920.

FIG. 61 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a thirtieth example embodiment of the present invention.

Referring to FIG. 61, the electric inspection apparatus 3000 in accordance with a thirtieth example embodiment may include substrate pieces 3010, substrate structures 3030, support members and adjusting members. In an example embodiment, the support member may include a reinforce part 3040 and may support the substrate pieces 3010 in such a manner that the substrate pieces 3010 may be arranged adjacent to each other. The adjusting member may include a plurality of bolts 3020, a plurality of screws 3050, plurality of nuts 3060 and a plurality of bolt covers 3070 and may adjust the position of the substrate pieces 3010 in relation to the support member.

The substrate pieces 3010, the bolts 3020, the substrate structures 3030, the reinforce part 3040, the screws 3050, the nuts 3060 and the bolt covers 3070 may have substantially the same structures and configurations as the substrate pieces 2910, the bolts 2920, the substrate structures 2930, the reinforce part 2950, the screws 2960, the nuts 2970 and the bolt covers 2980 in the twenty ninth example embodiment that are described in detail with reference to FIG. 60, except that substrate pieces 3010 may make in direct contact with the substrate structure 3030.

FIG. 62 is a cross-sectional view illustrating an electric inspection apparatus in accordance with a thirty first example embodiment of the present invention.

Referring to FIG. 62, the electric inspection apparatus 3100 in accordance with a thirty first example embodiment may include substrate pieces 3110, substrate structures 3150, connection members 3155, coupling members and adjusting members.

In an example embodiment, the coupling member may include a support part 3120 and a reinforce part 3160 and may the substrate pieces 3110 may be supported by the coupling member in such a manner that the substrate pieces 3110 are positioned adjacent to each other. The adjusting member may include a plurality of bolts 3130, a plurality of first nuts 3140, a plurality of screws 3170, a plurality of second nuts 3180 and a plurality of bolt covers 3190 and may adjust the relative positions of the substrate pieces 3110 in relation to the coupling member. The substrate pieces 3110, the substrate structures 3150, the connection members 3155, the reinforce part 3160, the screws 3170, the second nuts 3180 and the bolt covers 3190 may have substantially the same structures and configurations as the substrate pieces 2910, the substrate structures 2930, the connection members 2940, the reinforce part 2950, the screws 2960, the nuts 2970 and the bolt covers 2980 in the twenty ninth example embodiment that are described in detail with reference to FIG. 60.

The support part 3120 and the first nuts 3140 may have substantially the same structures and configurations as the support part 2830 and the first nuts 2840 in the twenty eighth example embodiment that are described in detail with reference to FIG. 59, except that the support part 3120 includes an opening 3123 only in the column 3122 in place of the penetration hole and is secured to the substrate pieces 3110 by a securing member 3124.

The substrate pieces 3110 may be secured to each other by the bolts 3130 in such a manner that the bolt 3130 may be inserted into the opening 3123 of the support part 3120. That is, the bolt 3123 is not inserted into the substrate piece 3110. The bolt 3123 may be connected to the substrate piece 3110 by a bonding agent such as an adhesive. Otherwise, the bolt 3130 may be formed integrally with the support part 3120. The first nut 3140 may be secured to both of the bolt 5 3130 and the support part 3120.

Since the substrate piece 3110 is secured to the support part 3120 and the support part 3120 is secured to the bolt 3130, the substrate piece 3110, the support part 3120 and the bolt 3130 are secured together with one another. Accordingly, the position of the substrate pieces 3110 may be adjusted in vertical 10 and horizontal directions by the adjustment of the vertical and horizontal positions of the bolts 3130.

FIG. 63 is a flow chart showing process steps for assembling the electric inspection apparatus 2500 shown in FIGS. 55 and 62.

The electric inspection apparatuses disclosed in FIGS. 55 to 62 have l fj similar structures and configurations, and thus the assembling method of the electric inspection apparatus is to be described based on the apparatuses 2500 disclosed in FIGS. 55 and 56 hereinafter.

Referring to FIG. 63, the bolt 2520 secured to the substrate piece 2510 may be inserted into the penetration hole 2536 of the support member 2530 (step 0 S510).

The nut 2540 may be joined to the head portion of the bolt 2520 in the penetration hole 2536 (step S520). The support member 2530 and the substrate pieces 25 10 may be secured to each other by the joining of the bolt and the nut 2520 and 2540. 5 The screw 2560 may be screwed inward through the support column 2534

(step S530).

In an example embodiment, the screw 2560 may be screwed through the first hole 2536a on the sidewall of the support column 2534, and thus may make in contact with the bolt 2520 in the penetration hole 2536. In the present example embodiment, four screws are screwed through the support column 2534.

The position of the substrate pieces 2510 may be adjusted in a direction vertical to and parallel with the upper surface of the substrate pieces 2510 by tightening and loosening the screw 2560 (step S540). Positions of the bolt 2520 may be adjusted in a horizontal direction parallel with an upper surface of the support plate 2532 by tightening and loosening of the screws 2560 making in contact with the support column 2540 in the penetration hole 2536. The horizontal adjustment of the bolt 2520 may cause the horizontal adjustment of the substrate piece 2510 because the bolt 2520 is secured to the substrate piece 2510.

The nut 2540 may be coupled with the bolt 2520 in the second holes 2536b, and an outer diameter of the nut 2540 may be larger than the diameter of the first hole 2536a and may be smaller than the diameter of the second hole 2536b. Therefore, tightening and loosening of the nut 2540 may allow the bolt 2520 to move down and up in a vertical direction with respect to the support plate 2532, and the movement of the bolt 2520 may cause the movement of the substrate pieces 2510 in the vertical direction because the substrate piece 2510 is secured to the bolt 2520. That is, the position of the substrate pieces 2510 may be adjusted by the tightening and loosening of the nuts 2540 in the vertical direction (step S550).

The bolt cover 2550 may be inserted into the second hole 2536b and may be joined to the support column 2534. The bolt cover 2550 may apply a pressure to a head portion of the bolt 2520 and maintain the adjusted vertical position of the bolt 2520 and the substrate piece 2510. That is, the adjusted position of the substrate piece 2510 may be prevented from varying by the bolt cover 2550, to thereby fixing the adjusted positions of the substrate pieces 2510 (step S560).

Industrial Applicability

According to the example embodiments of the present invention, the substrate pieces may be supported in such a manner that the substrate pieces are arranged adjacent to each other in the frame, and thus the substrate pieces may be formed into a large scale substrate. The gap distances between the substrate pieces and the frame may be adjusted by adjusting screws in a direction vertical to and parallel with the upper surface of the substrate pieces. Therefore, the large scale substrate of an electric inspection apparatus may be adjusted in the vertical and horizontal directions.

In addition, the support bars may be further installed on the substrate pieces and the gap distance between the substrate pieces and the support bars may be adjusted as well as the gap distance between the substrate pieces and the frame in the vertical and horizontal directions.

Although the exemplary embodiments of the present invention have been described, it is understood that the present invention should not be limited to these exemplary embodiments but various changes and modifications can be made by one skilled in the art within the spirit and scope of the present invention as hereinafter claimed.

Claims

1. An electric inspection apparatus comprising: at least two substrate pieces including at least one probe making in contact δ with an inspection object, the probe being positioned on a first surface of the substrate piece and the substrate pieces and the probe constituting a primary substrate structure; at least one support member supporting the substrate pieces such that the substrate pieces are positioned adjacent to each other; and 0 at least one adjusting member that adjusts a relative position of each of the substrate pieces with respect to the support member.

2. The electric inspection apparatus of claim 1, wherein the adjusting member including a first adjusting unit that adjusts the relative position of each 5 of the substrate pieces with respect to the support member in a direction vertical to the support member.

3. The electric inspection apparatus of claim 1, wherein the adjusting member includes a second adjusting unit that adjusts the relative position of each of the substrate pieces with respect to the support member in a direction parallel with the support member.

4. The electric inspection apparatus of claim 2 or claim 3, wherein the first adjusting unit or the second adjusting unit includes an adjusting screw applying a pressure to the substrate piece, to thereby adjust the relative position of the substrate piece.

5. The electric inspection apparatus of claim 4, wherein the adjusting screw includes a pull screw that pulls the substrate piece and a push screw that pushes the substrate piece.

6. The electric inspection apparatus of claim 1, further comprising at least one insertion member interposed between the substrate piece and the support member.

7. The electric inspection apparatus of claim 4, further comprising at least one reinforce member interposed between the substrate piece and the adjusting screw.

8. The electric inspection apparatus of claim 7, wherein the reinforce member includes a penetration hole into which the adjusting screw is inserted.

9. The electric inspection apparatus of claim 1, further comprising a supplementary substrate structure making in contact with a second surface of each of the substrates, the second surface of the substrate piece being opposite to the first surface of the substrate piece.

10. The electric inspection apparatus of claim 9, wherein the supplementary substrate includes a printed circuit board.

11. The electric inspection apparatus of claim 9, wherein the supplementary substrate includes a space transformer.

12. The electric inspection apparatus of claim 11, wherein the supplementary substrate further includes a printed circuit board positioned on the space transformer.

13. The electric inspection apparatus of claim 9, further comprising a connection member electrically connecting the substrate pieces of the primary substrate structure to the supplementary substrate structure.

14. The electric inspection apparatus of claim 9, wherein the substrate pieces are bonded to the supplementary substrate structure by a soldering.

15. The electric inspection apparatus of claim 1, further comprising a connection terminal on a second surface of the substrate structure opposite to the first surface, the connection terminal and the probe being electrically connected to each other by an internal circuit.

16. The electric inspection apparatus of claim 1, wherein the support member includes a first frame supporting an edge portion of the first surface of the substrate piece and a second frame supporting a side surface of the substrate piece, so that the probes are positioned in an inside of the first frame.

17. The electric inspection apparatus of claim 1, wherein the support member includes a first frame supporting a second surface of the substrate piece opposite to the first surface and a second frame supporting a side surface of the substrate piece.

18. The electric inspection apparatus of claim 1, wherein the probe includes a spring device.

19. The electric inspection apparatus of claim 1, wherein the probe includes a composite connection device.

20. The electric inspection apparatus of claim 1, wherein the support member includes a plurality of support bars supporting the substrate pieces in such a manner that the substrate pieces positioned adjacent to each other.

21 The electric inspection apparatus of claim 20, wherein the support member further includes a frame supporting the substrate pieces in such a manner that the substrate pieces positioned adjacent to each other.

22, The electric inspection apparatus of claim 21, wherein the adjusting member adjusts the relative position of the substrate piece in a direction parallel with the first surface of the substrate pieces that are positioned in the frame.

23. The electric inspection apparatus of claim 21, wherein the adjusting member adjusts the relative position of the substrate piece in a direction vertical to the first surface of the substrate pieces that are positioned in the frame.

24. The electric inspection apparatus of claim 21, wherein the adjusting member adjusts the relative position of the substrate piece in a direction parallel with the first surface of the substrate pieces that are positioned on the support bar.

25 The electric inspection apparatus one of claims 22, 23 and 24, wherein the adjusting member includes an adjusting screw applying a pressure to the substrate piece, to thereby adjust the relative position of the substrate piece.

26. The electric inspection apparatus of claim 25, wherein the adjusting screw includes a first screw that pulls the substrate piece and a second screw that pushes the substrate piece.

27. The electric inspection apparatus of claim 26, further comprising a plurality of reinforce members installed to portions of the substrate pieces to which the first screw is joined.

28. The electric inspection apparatus of claim 26, further comprising at least one reinforce member interposed between the substrate piece and the adjusting screw.

29. The electric inspection apparatus of claim 28, wherein the reinforce member includes a penetration hole into which the adjusting screw is inserted.

30. The electric inspection apparatus of claim 21, wherein the support bars include a first bar extending on the substrate pieces in a first direction and a second bar extending on the substrate pieces in a second direction perpendicular to the first direction.

31. The electric inspection apparatus of claim 30, wherein the first and second bars are positioned on same surfaces of the substrate pieces.

32. The electric inspection apparatus of claim 31, wherein the second bar is secured to the first bar.

33, The electric inspection apparatus of claim 32, further comprising at least one additional adjusting member for adjusting a relative position of the second bar in relation with the frame in a vertical direction.

34. The electric inspection apparatus of claim 30, wherein the first bar and the second bar are positioned on different surface of the substrate pieces.

35. The electric inspection apparatus of claim 34, further comprising at least one additional adjusting member for adjusting a relative position of one of first and the second bars in relation with the frame in a vertical direction.

36. The electric inspection apparatus of claim 1, wherein the support member includes a plate supporting the substrate pieces such that the substrate pieces are positioned adjacent to each other.

37. The electric inspection apparatus of claim 36, wherein the support member further includes a column protruded from the plate.

38. The electric inspection apparatus of claim 37, further comprising at least one bolt penetrating the support member and secured to a second surface of the substrate piece opposite to the first surface, the adjusting member adjusting the relative positions of the substrate pieces by adjusting a position of the bolt.

39. The electric inspection apparatus of claim 38, wherein the adjusting member includes at least one nut coupled with the bolt, so that the bolt moves in a vertical direction in accordance with a rotation of the nut and the relative position of the substrate piece secured to the bolt is adjusted by the vertical movement of the bolt.

40. The electric inspection apparatus of claim 39, wherein the adjusting member further includes at least one bolt cover securing to both of the support member and the adjusting screw, the bolt cover applying a pressure to the bolt to thereby maintain the vertical positions of the bolt adjusted by the nut.

41. The electric inspection apparatus of claim 38, wherein the adjusting member further includes at least one screw securing to the support member, the screw applying a pressure to the bolt to thereby move the bolt in a direction parallel with the support member.

42. The electric inspection apparatus of claim 38, wherein a diameter of the penetration hole is larger than that of the bolt.