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WO2008142873A1 - 半導体装置及びその製造方法 - Google Patents

半導体装置及びその製造方法 Download PDF

Info

Publication number
WO2008142873A1
WO2008142873A1 PCT/JP2008/050723 JP2008050723W WO2008142873A1 WO 2008142873 A1 WO2008142873 A1 WO 2008142873A1 JP 2008050723 W JP2008050723 W JP 2008050723W WO 2008142873 A1 WO2008142873 A1 WO 2008142873A1
Authority
WO
WIPO (PCT)
Prior art keywords
contact portion
channel region
insulation film
source
semiconductor layer
Prior art date
Application number
PCT/JP2008/050723
Other languages
English (en)
French (fr)
Inventor
Hidehito Kitakado
Original Assignee
Sharp Kabushiki Kaisha
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Kabushiki Kaisha filed Critical Sharp Kabushiki Kaisha
Priority to JP2009515098A priority Critical patent/JP5243414B2/ja
Priority to US12/530,775 priority patent/US20100117155A1/en
Priority to CN200880006486.2A priority patent/CN101622715B/zh
Priority to EP08703573A priority patent/EP2149909A1/en
Publication of WO2008142873A1 publication Critical patent/WO2008142873A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6713—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
    • H10D30/6715—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/431—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having different compositions, shapes, layouts or thicknesses of gate insulators in different TFTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/6737—Thin-film transistors [TFT] characterised by the electrodes characterised by the electrode materials
    • H10D30/6739—Conductor-insulator-semiconductor electrodes

Landscapes

  • Thin Film Transistor (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Abstract

本発明は、同一基板上に異なる特性の薄膜トランジスタが形成されるとともに高性能かつ高信頼性を有する半導体装置及びその製造方法を提供する。本発明は、基板上に、第一半導体層及び第二半導体層と第一絶縁膜と第二絶縁膜とが積層された半導体装置であって、上記第一半導体層は、第一チャネル領域と、第一コンタクト部を含む第一ソース・ドレイン領域とを有し、上記第二半導体層は、第二チャネル領域と、第二コンタクト部を含む第二ソース・ドレイン領域とを有し、上記第一絶縁膜は、第二チャネル領域を含み、かつ第一チャネル領域、第一コンタクト部及び第二コンタクト部を除く領域上に形成され、上記第二絶縁膜は、第一チャネル領域と、第一絶縁膜の第二チャネル領域に対向する領域との上に形成されるとともに、第一コンタクト部を除く第一ソース・ドレイン領域と、第二コンタクト部を除く第二ソース・ドレイン領域とに対向して形成される半導体装置である。
PCT/JP2008/050723 2007-05-21 2008-01-21 半導体装置及びその製造方法 WO2008142873A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009515098A JP5243414B2 (ja) 2007-05-21 2008-01-21 半導体装置及びその製造方法
US12/530,775 US20100117155A1 (en) 2007-05-21 2008-01-21 Semiconductor device and production method thereof
CN200880006486.2A CN101622715B (zh) 2007-05-21 2008-01-21 半导体装置及其制造方法
EP08703573A EP2149909A1 (en) 2007-05-21 2008-01-21 Semiconductor device and its manufacturing method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007134465 2007-05-21
JP2007-134465 2007-05-21

Publications (1)

Publication Number Publication Date
WO2008142873A1 true WO2008142873A1 (ja) 2008-11-27

Family

ID=40031592

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/050723 WO2008142873A1 (ja) 2007-05-21 2008-01-21 半導体装置及びその製造方法

Country Status (5)

Country Link
US (1) US20100117155A1 (ja)
EP (1) EP2149909A1 (ja)
JP (1) JP5243414B2 (ja)
CN (1) CN101622715B (ja)
WO (1) WO2008142873A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130126883A1 (en) * 1999-06-22 2013-05-23 Semiconductor Energy Laboratory Co., Ltd. Wiring Material, Semiconductor Device Provided with a Wiring Using the Wiring Material and Method of Manufacturing Thereof
JP2014060399A (ja) * 2012-09-17 2014-04-03 In-Cha Hsieh 薄膜トランジスタデバイスを作成する方法
JP2019505999A (ja) * 2016-01-28 2019-02-28 武漢華星光電技術有限公司 低温ポリシリコンアレイ基板の製造方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130007065A (ko) * 2011-06-28 2013-01-18 삼성디스플레이 주식회사 박막 트랜지스터, 이를 구비하는 화소 및 유기 발광 표시 장치
TWI419336B (zh) 2011-08-26 2013-12-11 Au Optronics Corp 半導體元件及其製作方法
JP6106024B2 (ja) 2013-05-21 2017-03-29 株式会社ジャパンディスプレイ 薄膜トランジスタの製造方法及び薄膜トランジスタ
CN104091832B (zh) * 2014-06-27 2018-07-17 京东方科技集团股份有限公司 薄膜晶体管及其制作方法、阵列基板和显示装置
KR101930439B1 (ko) 2017-12-18 2018-12-19 삼성디스플레이 주식회사 화소
CN112259553B (zh) * 2020-09-30 2022-09-20 昆山国显光电有限公司 阵列基板及其制备方法、显示面板
US11791389B2 (en) * 2021-01-08 2023-10-17 Wolfspeed, Inc. Radio frequency transistor amplifiers having widened and/or asymmetric source/drain regions for improved on-resistance performance
US12224318B2 (en) * 2022-02-11 2025-02-11 Wolfspeed, Inc. Radio frequency transistor amplifiers having self-aligned double implanted source/drain regions for improved on-resistance performance and related methods

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06132303A (ja) * 1991-11-29 1994-05-13 Semiconductor Energy Lab Co Ltd 薄膜トランジスタおよびその作製方法
JPH08250742A (ja) * 1995-03-14 1996-09-27 Toshiba Corp 半導体装置
JP2005183774A (ja) 2003-12-22 2005-07-07 Semiconductor Energy Lab Co Ltd 半導体装置及びその作製方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7195960B2 (en) * 1996-06-28 2007-03-27 Seiko Epson Corporation Thin film transistor, manufacturing method thereof, and circuit and liquid crystal display device using the thin film transistor
TW518650B (en) * 1999-04-15 2003-01-21 Semiconductor Energy Lab Electro-optical device and electronic equipment
JP4439766B2 (ja) * 2001-08-02 2010-03-24 シャープ株式会社 薄膜トランジスタ装置及びその製造方法
JP2003332578A (ja) * 2002-05-09 2003-11-21 Sharp Corp 薄膜トランジスタ及びその製造方法並びにこれを用いた液晶表示装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06132303A (ja) * 1991-11-29 1994-05-13 Semiconductor Energy Lab Co Ltd 薄膜トランジスタおよびその作製方法
JPH08250742A (ja) * 1995-03-14 1996-09-27 Toshiba Corp 半導体装置
JP2005183774A (ja) 2003-12-22 2005-07-07 Semiconductor Energy Lab Co Ltd 半導体装置及びその作製方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130126883A1 (en) * 1999-06-22 2013-05-23 Semiconductor Energy Laboratory Co., Ltd. Wiring Material, Semiconductor Device Provided with a Wiring Using the Wiring Material and Method of Manufacturing Thereof
US9660159B2 (en) * 1999-06-22 2017-05-23 Semiconductor Energy Laboratory Co., Ltd. Wiring material, semiconductor device provided with a wiring using the wiring material and method of manufacturing thereof
JP2014060399A (ja) * 2012-09-17 2014-04-03 In-Cha Hsieh 薄膜トランジスタデバイスを作成する方法
US8912058B2 (en) 2012-09-17 2014-12-16 Incha Hsieh Method of forming a thin film transistor using a gray-scale photoresist
JP2019505999A (ja) * 2016-01-28 2019-02-28 武漢華星光電技術有限公司 低温ポリシリコンアレイ基板の製造方法

Also Published As

Publication number Publication date
CN101622715A (zh) 2010-01-06
US20100117155A1 (en) 2010-05-13
JPWO2008142873A1 (ja) 2010-08-05
CN101622715B (zh) 2012-06-13
JP5243414B2 (ja) 2013-07-24
EP2149909A1 (en) 2010-02-03

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