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WO2008134914A1 - Dispositif d'entraînement linéaire - Google Patents

Dispositif d'entraînement linéaire Download PDF

Info

Publication number
WO2008134914A1
WO2008134914A1 PCT/CN2007/001505 CN2007001505W WO2008134914A1 WO 2008134914 A1 WO2008134914 A1 WO 2008134914A1 CN 2007001505 W CN2007001505 W CN 2007001505W WO 2008134914 A1 WO2008134914 A1 WO 2008134914A1
Authority
WO
WIPO (PCT)
Prior art keywords
stator
linear actuator
circular plate
rotor
actuator according
Prior art date
Application number
PCT/CN2007/001505
Other languages
English (en)
Chinese (zh)
Inventor
Xiangcheng Chu
Ye Ji
Long Ma
Longtu Li
Original Assignee
Tsinghua University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tsinghua University filed Critical Tsinghua University
Priority to PCT/CN2007/001505 priority Critical patent/WO2008134914A1/fr
Priority to CN2007800441835A priority patent/CN101563839B/zh
Publication of WO2008134914A1 publication Critical patent/WO2008134914A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors

Definitions

  • the present invention relates to a linear actuator, and more particularly to a threaded linear actuator.
  • the piezoelectric actuator is a new type of driver, which uses the inverse piezoelectric effect of piezoelectric ceramics to transform a small amplitude vibration into a required motion through structural design, and has a simple structure, easy miniaturization, power-off self-locking, etc. Advantages, have broad application prospects in the above fields.
  • FIG. 1 it is a threaded rod ultrasonic motor disclosed in the US Patent No. 6,940,209B2, which comprises a multi-faceted tubular body 1 with a central hole, a threaded rod 2, and four rectangular piezoelectric ceramic sheets 6 pasted. On the four sides of the pipe body 1. Applying a specific voltage signal to the piezoelectric ceramic sheet 6 excites the tubular body 1 to generate a bending traveling wave, thereby pushing the threaded rod 2 to rotate and linearly move in the axial direction.
  • the invention patent proposes an effective piezoelectric driving scheme for realizing linear motion, which is promising for use in the field of micromachined and optical focusing.
  • the invention patent has the following disadvantages: 1.
  • the structure of the stator has a plurality of side platforms which are relatively complicated; 2. There are many ceramic sheets required, and the paste is relatively complicated; 3 the structure is not easy to be thinned, and is incompatible with the integrated circuit process;
  • the structure of the motor stator of the invention is a non-axisymmetric structure and is not suitable for producing an ideal curved traveling wave.
  • an object of the present invention is to provide a linear actuator.
  • a linear actuator comprising a stator, a rotor and an excitation element, characterized in that: the stator is fixed by a circular plate and a perpendicular to the circular plate
  • the rotor is composed of a threaded central rod, the shape of the excitation element is corresponding to the circular plate, and is integrally bonded thereto, the stator, the rotor and the excitation element have a common central axis; after the excitation element is connected Exciting the vibration of the stator to promote axial movement of the rotor while rotating the rotor relative to the stator.
  • the central rod of the stator is a circular tube fixed at the center of the circular plate, the inner wall of the circular tube is provided with an internal thread, and the outer wall of the rotor is provided with an external thread that cooperates with the internal thread.
  • the round tube extends to one side of the circular plate.
  • the round tube extends to both sides of the circular plate.
  • the central rod of the stator is a circular tube fixed at the center of the circular plate, the circular tube extends to two sides of the circular plate, and two ends of the circular tube are respectively provided with a screw plug, the screw plug
  • the inner wall is provided with an internal thread
  • the outer wall of the rotor is provided with an external thread that cooperates with the internal thread.
  • the center rod of the stator is a threaded rod fixed to the center of the circular plate, and the inner wall of the rotor is provided with an internal thread that cooperates with the threaded rod.
  • the excitation element is a piece of piezoelectric ceramic sheet attached to one side of the stator disc.
  • the piezoelectric ceramic sheet is uniformly divided into four sectors which are mutually insulated and polarized along the thickness direction, wherein the polarization directions of two adjacent partitions are uniform and opposite to the polarization directions of the other two partitions.
  • the piezoelectric ceramic piece is divided into four independent sector pieces which are polarized in the thickness direction, wherein two adjacent polarization directions are coincident and opposite to the polarization directions of the other two.
  • the excitation elements are two piezoelectric ceramic sheets disposed on both sides of the circular plate of the stator.
  • the piezoelectric ceramic sheets on both sides are uniformly divided into four sectors which are insulated from each other, and are polarized along the thickness direction, wherein polarization directions of two adjacent partitions are uniform and polarization with the other two partitions The directions are opposite, and the relative polarization directions of the two regions of the two excitation elements on both sides are the same.
  • the two side piezoelectric ceramic sheets are divided into four independent sector pieces, which are polarized along the thickness direction, wherein two adjacent polarization directions are uniform and opposite to the polarization directions of the other two.
  • the stator disc has two spatially orthogonal vibration modes including a pitch diameter and a pitch circle, which is the operating mode of the driver.
  • the frequency of the vibration mode is greater than 20 kH Z .
  • the present invention has the following advantages due to the above technical solution: 1.
  • the present invention provides the stator in a circular plate shape, which can be conveniently matched with the excitation component, and is simpler than the prior art threaded driven polyhedral ultrasonic motor, thereby reducing the manufacturing cost.
  • the piezoelectric ceramic sheet of the present invention is provided in an annular shape or a circular arc-shaped fan shape as a whole structure, so that it is easy to stick with the circular plate, is easy to be thin, and is compatible with an integrated circuit process, and is suitable for mass production. 3.
  • the center rod of the present invention amplifies the vibration amplitude of the circular plate, and the performance of the driver is directly related to the vibration amplitude of the driving end of the center rod, thereby improving the output performance such as displacement and speed of the driver.
  • the structure of the stator of the present invention is an axisymmetric structure, which can produce an ideal curved traveling wave, thereby improving the output stability of the driver.
  • the invention has simple manufacturing process and is suitable for industrial production, and is easy to miniaturize compared with the prior art.
  • the output performance is more stable, and it has broad application prospects in the fields of optical focusing, precision driving and micro-systems.
  • FIG. 1 is a schematic structural view of a threaded rod ultrasonic motor in the prior art
  • Figure 2 is a schematic view of the structure of the present invention
  • Figure 3 is an exploded view of the components of Figure 2
  • Figure 4 is a schematic view showing the division polarization and wiring of the piezoelectric ceramic sheet of the present invention.
  • Figure 5 is a schematic view of the structure of the present invention having two piezoelectric ceramic sheets
  • Figure 6 is a schematic view showing the structure of the structure of Figure 5
  • FIG. 7 is a schematic view showing the structure of the stator of the present invention having two round tubes
  • FIG. 8 is a schematic view showing the structure of the stator of the present invention having two screw plugs
  • Figure 9 is a schematic view showing the structure of the structure of Figure 8.
  • Figure 10 is a schematic view showing the structure of four sector-shaped piezoelectric ceramic sheets of the present invention.
  • Figure 11 is a schematic view of the structural assembly relationship of Figure 10
  • Figure 12 is a schematic view of another structure of the present invention.
  • Figure 13 is a schematic view showing the structure of the structure of Figure 12
  • Figure 14 is a schematic diagram of two orthogonal B (l, 1) modes.
  • the present invention comprises a stator 4, a rotor 5 which is screwed to the stator 4, and a circular piezoelectric ceramic sheet 6 as an exciting element.
  • the stator 4 is composed of a circular plate 41 and a center rod.
  • the center rod of this embodiment is a circular tube 42, and one end of the circular tube 42 is fixed at the center of the circular plate 41 and perpendicular to the circular plate 41.
  • the rotor 5 is connected to the internal thread of the circular tube 42 by the external thread thereon, and the piezoelectric ceramic sheet 6 is bonded to the circular plate 41 of the stator 4 as a single body.
  • the piezoelectric ceramic sheet 6, the circular plate 41 constituting the stator 4, and the circular tube 42, and the rotor 5 have a common central axis 7.
  • the stator disc 41 has two spatially orthogonal out-of-plane bending vibration modes including a pitch diameter and a pitch circle.
  • the frequency of the vibration mode is greater than 20 kHz, and the mode is defined as a B (1, 1) mode (
  • the solid line in the figure represents the boundary of the circular plate, and the broken line represents the so-called pitch line, which is the place where the amplitude of the circular plate B (1, 1) is zero when the mode is vibrating.
  • FIG. 4 the solid line in the figure represents the boundary of the circular plate, and the broken line represents the so-called pitch line, which is the place where the amplitude of the circular plate B (1, 1) is zero when the mode is vibrating.
  • the surface electrode of the piezoelectric ceramic sheet 6 is evenly divided into four sections I, II, III, and IV, wherein the partitions I and II are uniformly polarized in the thickness direction, and the polarization directions of the partitions III and W are uniform.
  • the partitions I and IV are connected to the voltage signal Vx
  • the partition ⁇ and the III are connected to the voltage signal Vy
  • the voltage signals Vx and Vy are the phases at the frequency corresponding to the B (1, 1) mode. Sinusoidal and cosine signals with a difference of 90 degrees.
  • a bending traveling wave in the B (l, 1) mode is generated in the stator disc 41, and the circular tube 42 of the stator 4 amplifies the vibration amplitude of the circular plate 41, and the end trajectory of the circular tube 42 is similar to the moving head movement.
  • the rotor 5 is rotated in the circumferential direction by the friction generated by the above motion, and the movement in the direction of the central axis 7 is generated by the screw drive. Exchanging the two signals Vx and Vy enables reverse rotation and reverse linear motion of the rotor 5.
  • the annular piezoelectric ceramic piece as the excitation element can be provided with two pieces 6, 8, and two piezoelectric ceramic sheets 6, 8 respectively attached to the circular plate 41 of the stator 4.
  • the partitions I, II, III, W of the two piezoelectric ceramic sheets 6, 8 are in the circumferential position, and the rotor 5 is internally threadedly connected to the circular tube 42 of the stator 4, and the piezoelectric ceramic sheets 6 and 8 are connected.
  • the stator 4 and the rotor 5 have a common central axis 7.
  • the stator 4 is composed of a circular plate 41 and a circular tube 42 which protrudes from the circular plate 41 at both ends, and the rotor 5 is connected to the internal thread of the inner wall of the circular tube 42 of the stator 4 by external threads. .
  • the circular plate 41, the circular tube 42 and the rotor 5 share a central axis 7.
  • the stator 4 is composed of a circular plate 41, a circular tube 42 with two ends extending from the circular plate 41, and two screw plugs 43, 44, and two screw plugs 43 and 44.
  • the two ends of the round pipe 42 are respectively inserted, and the rotor 5 is connected to the internal threads of the two screw plugs 44 by external threads.
  • each of the piezoelectric ceramic sheets 6 may be composed of four independent sector-shaped piezoelectric ceramic sheets 61, 62, 63, 64 which are uniformly and uniformly bonded to the stator. 4 on the side of the disc 41.
  • the individual sector-shaped piezoelectric ceramic sheets 61, 62, 63, 64 may also be two sets, which are respectively attached to both sides of the circular plate 41.
  • the sector-shaped piezoelectric ceramic sheets 61 and 62 are uniformly polarized in the thickness direction, the polarization directions of the sector-shaped piezoelectric ceramic sheets 63 and 64 are uniform and opposite to the polarization directions of 61 and 62, and the sector-shaped piezoelectric ceramic sheets 62 and 64 are connected to the voltage.
  • the signal Vx, the sector-shaped piezoelectric ceramic sheets 61 and 63 are connected to the voltage signal Vy; Vx and Vy are sinusoidal signals having a phase difference of 90 degrees at a frequency corresponding to the B (1, 1) mode. And cosine signals.
  • the present embodiment includes a stator 4, a rotor 9, and a piezoelectric ceramic sheet 6.
  • the stator 4 is composed of a circular plate 41 and a threaded rod 45 which is located at the center of the circular plate 41 and is perpendicular to the circular plate 41.
  • the rotor 9 is a circular tube having an internal thread with an internal thread, the rotor 9 is connected to a threaded rod 45 on the stator 4, and the piezoelectric ceramic sheet 6, the disc 41 constituting the stator 4, and the threaded rod 45 and the rotor 9 have a common central axis 7 .
  • the piezoelectric ceramic sheet 6 is integrally bonded to the circular plate 41 of the stator 4.
  • the stator circular plate 41 has two spatially orthogonal out-of-plane bending vibration modes including a pitch diameter and a pitch circle, and the frequency of the vibration mode is greater than 20kHz, the modal is defined as B ( 1, 1 ) mode (as shown in Figure 4).
  • the surface electrode division of the piezoelectric ceramic sheet 6 of the present embodiment is the same as that of the above embodiments (as shown in FIG. 5), and the surface electrode of the piezoelectric ceramic sheet 6 is divided into four sections I, II, III, and IV, wherein the partition I And II are uniformly polarized along the thickness direction, the polarization directions of the partitions III and IV are the same and opposite to the polarization directions of the partitions I and II, the partitions I and IV are connected to the voltage signal Vx, and the partitions II and III are connected to the voltage signal Vy;
  • the voltage signals V X and Vy are sinusoidal signals and cosine signals having a phase difference of 90 degrees at a frequency corresponding to the B (1, 1) mode. As shown in FIG.
  • a B (1, l) mode bending traveling wave is generated in the circular plate 41 of the stator 4, and the threaded rod 45 on the stator 4 amplifies the vibration amplitude of the circular plate 41, and the end of the threaded rod 45
  • the trajectory of the part is similar to the moving head.
  • the rotor 9 rotates in the circumferential direction under the friction generated by the above motion, and generates a linear motion along the central axis 7 by screwing.
  • the two signals Vx and Vy are exchanged to realize the rotor 9. Reverse rotation and reverse linear motion.
  • the piezoelectric ceramic sheets 6 in the above embodiment may also be two sheets disposed on both sides of the circular plate 41; at the same time, each of the piezoelectric ceramic sheets 6 may be composed of four independent sector sheets.
  • the excitation element may be a magnetically stretchable material, an electrostrictive material, an artificial muscle, a shape memory alloy or the like.

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

Cette invention se rapporte à un dispositif d'entraînement linéaire se composant d'un stator, d'un rotor et d'un élément d'excitation. Le stator se compose d'une plaque circulaire et d'une tige centrale fixée perpendiculairement à la plaque circulaire et est relié de façon filetée au rotor. La forme de l'élément d'excitation correspond à la forme de la plaque circulaire, et elles s'adaptent l'une à l'autre. Le stator, le rotor et l'élément d'excitation comportent un axe central commun. Lorsque l'élément d'excitation est sous tension, il suscite une vibration du stator puis entraîne une rotation filetée du rotor par rapport au stator, réalisant ainsi en même temps un mouvement linéaire du rotor dans la direction axiale.
PCT/CN2007/001505 2007-05-08 2007-05-08 Dispositif d'entraînement linéaire WO2008134914A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/CN2007/001505 WO2008134914A1 (fr) 2007-05-08 2007-05-08 Dispositif d'entraînement linéaire
CN2007800441835A CN101563839B (zh) 2007-05-08 2007-05-08 一种直线驱动器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2007/001505 WO2008134914A1 (fr) 2007-05-08 2007-05-08 Dispositif d'entraînement linéaire

Publications (1)

Publication Number Publication Date
WO2008134914A1 true WO2008134914A1 (fr) 2008-11-13

Family

ID=39943100

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2007/001505 WO2008134914A1 (fr) 2007-05-08 2007-05-08 Dispositif d'entraînement linéaire

Country Status (2)

Country Link
CN (1) CN101563839B (fr)
WO (1) WO2008134914A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105656346A (zh) * 2016-03-18 2016-06-08 河南师范大学 压电单晶片式惯性压电马达
CN113114065A (zh) * 2021-04-23 2021-07-13 吉林大学 微小型设备用纵弯模态复合的压电超声电机及其驱动方法
CN113852291A (zh) * 2021-08-25 2021-12-28 南京航空航天大学 基于摩擦力驱动的夹心式压电释放器及其工作方法
CN113928055A (zh) * 2021-10-25 2022-01-14 江西农业大学 基于压电驱动的新型高机动性轮式移动装置及其控制方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102386802B (zh) * 2011-11-09 2014-04-30 黑龙江科技学院 压电型步进式双向直线驱动器
CN106712570B (zh) * 2017-03-17 2019-05-24 浙江师范大学 一种串联型正反螺旋定子直线超声电机
FR3092454B1 (fr) * 2019-02-04 2022-06-10 Cedrat Tech Mecanisme de deplacement nanometrique a vis

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62285679A (ja) * 1986-06-02 1987-12-11 Canon Inc 微動直線送り装置
JPS63124784A (ja) * 1986-11-14 1988-05-28 Taga Electric Co Ltd 超音波モ−タの駆動制御方法
JPH05168258A (ja) * 1991-12-12 1993-07-02 Aisan Ind Co Ltd 超音波リニアモータ
JPH05199775A (ja) * 1991-08-05 1993-08-06 Honda Electron Co Ltd 圧電ステッピングモータ
US6940209B2 (en) * 2003-09-08 2005-09-06 New Scale Technologies Ultrasonic lead screw motor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62285679A (ja) * 1986-06-02 1987-12-11 Canon Inc 微動直線送り装置
JPS63124784A (ja) * 1986-11-14 1988-05-28 Taga Electric Co Ltd 超音波モ−タの駆動制御方法
JPH05199775A (ja) * 1991-08-05 1993-08-06 Honda Electron Co Ltd 圧電ステッピングモータ
JPH05168258A (ja) * 1991-12-12 1993-07-02 Aisan Ind Co Ltd 超音波リニアモータ
US6940209B2 (en) * 2003-09-08 2005-09-06 New Scale Technologies Ultrasonic lead screw motor

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105656346A (zh) * 2016-03-18 2016-06-08 河南师范大学 压电单晶片式惯性压电马达
CN105656346B (zh) * 2016-03-18 2018-07-10 河南师范大学 压电单晶片式惯性压电马达
CN113114065A (zh) * 2021-04-23 2021-07-13 吉林大学 微小型设备用纵弯模态复合的压电超声电机及其驱动方法
CN113114065B (zh) * 2021-04-23 2024-03-19 吉林大学 微小型设备用纵弯模态复合的压电超声电机及其驱动方法
CN113852291A (zh) * 2021-08-25 2021-12-28 南京航空航天大学 基于摩擦力驱动的夹心式压电释放器及其工作方法
CN113852291B (zh) * 2021-08-25 2023-09-29 南京航空航天大学 基于摩擦力驱动的夹心式压电释放器及其工作方法
CN113928055A (zh) * 2021-10-25 2022-01-14 江西农业大学 基于压电驱动的新型高机动性轮式移动装置及其控制方法
CN113928055B (zh) * 2021-10-25 2024-05-28 江西农业大学 基于压电驱动的高机动性轮式移动装置及其控制方法

Also Published As

Publication number Publication date
CN101563839A (zh) 2009-10-21
CN101563839B (zh) 2012-09-05

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