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WO2008123224A1 - 感光性樹脂組成物 - Google Patents

感光性樹脂組成物 Download PDF

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Publication number
WO2008123224A1
WO2008123224A1 PCT/JP2008/055518 JP2008055518W WO2008123224A1 WO 2008123224 A1 WO2008123224 A1 WO 2008123224A1 JP 2008055518 W JP2008055518 W JP 2008055518W WO 2008123224 A1 WO2008123224 A1 WO 2008123224A1
Authority
WO
WIPO (PCT)
Prior art keywords
resin composition
photosensitive
specified
photosensitive resin
silicone compound
Prior art date
Application number
PCT/JP2008/055518
Other languages
English (en)
French (fr)
Inventor
Tomohiro Yorisue
Original Assignee
Asahi Kasei E-Materials Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Kasei E-Materials Corporation filed Critical Asahi Kasei E-Materials Corporation
Priority to US12/531,803 priority Critical patent/US8043899B2/en
Priority to JP2009509107A priority patent/JP5078992B2/ja
Publication of WO2008123224A1 publication Critical patent/WO2008123224A1/ja

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C08F290/08—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated side groups
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F283/00—Macromolecular compounds obtained by polymerising monomers on to polymers provided for in subclass C08G
    • C08F283/12—Macromolecular compounds obtained by polymerising monomers on to polymers provided for in subclass C08G on to polysiloxanes
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04—Polysiloxanes
    • C08G77/20—Polysiloxanes containing silicon bound to unsaturated aliphatic groups
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/48—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms
    • C08G77/58—Metal-containing linkages
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/04—Polysiloxanes
    • C08L83/06—Polysiloxanes containing silicon bound to oxygen-containing groups
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
    • C09D183/14—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers in which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y10T428/24612—Composite web or sheet

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Materials For Photolithography (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Silicon Polymers (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

特定の感光性置換基を有する、特定の分子量の感光性シリコーン化合物及び光重合開始剤を特定の割合で含有する感光性樹脂組成物を用いる。すると、ＬＳＩチップのバッファコート材料や再配線層として好適な、キュア前後の膜減りが少なく、露光する前の材料のべたつきが改善された感光性シリコーン化合物を含む樹脂組成物、及びそれを用いた樹脂絶縁膜を得ることができる。
PCT/JP2008/055518 2007-04-04 2008-03-25 感光性樹脂組成物 WO2008123224A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/531,803 US8043899B2 (en) 2007-04-04 2008-03-25 Photosensitive resin composition
JP2009509107A JP5078992B2 (ja) 2007-04-04 2008-03-25 感光性樹脂組成物

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007098089 2007-04-04
JP2007-098089 2007-04-04

Publications (1)

Publication Number Publication Date
WO2008123224A1 true WO2008123224A1 (ja) 2008-10-16

Family

ID=39830719

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/055518 WO2008123224A1 (ja) 2007-04-04 2008-03-25 感光性樹脂組成物

Country Status (4)

Country Link
US (1) US8043899B2 (ja)
JP (1) JP5078992B2 (ja)
TW (1) TW200907580A (ja)
WO (1) WO2008123224A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009078336A1 (ja) * 2007-12-14 2009-06-25 Asahi Kasei E-Materials Corporation 感光性樹脂組成物
JP2010031272A (ja) * 2008-07-01 2010-02-12 Asahi Kasei E-Materials Corp 感光性樹脂組成物
JP2010047746A (ja) * 2008-07-01 2010-03-04 Asahi Kasei E-Materials Corp 感光性樹脂組成物
WO2012050201A1 (ja) * 2010-10-14 2012-04-19 旭化成イーマテリアルズ株式会社 感光性樹脂組成物及びその製造方法
JP2017525834A (ja) * 2014-06-19 2017-09-07 インクロン オサケユキチュアＩｎｋｒｏｎ Ｏｙ 透過性シロキサン封入剤及び接着剤

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9434818B2 (en) 2011-01-21 2016-09-06 Fraundhofer-Gesellschaft zur Foerderung der angewandter Forschung e.V. Polymerizable compositions, cured products obtained therewith, and use of these materials
JP6674157B2 (ja) * 2016-04-11 2020-04-01 日産化学株式会社 フェナントレン環含有反応性シルセスキオキサン化合物を含む重合性組成物
KR102314075B1 (ko) * 2016-05-30 2021-10-18 닛산 가가쿠 가부시키가이샤 반응성 폴리실록산 및 이것을 포함하는 중합성 조성물
US10894800B2 (en) * 2016-05-30 2021-01-19 Nissan Chemical Corporation Polymerizable silane compound

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63121043A (ja) * 1986-11-10 1988-05-25 Toshiba Corp シリコ−ンレジスト材料
WO2001004186A1 (de) * 1999-07-13 2001-01-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Organisch modifizierte kieselsäurepolykondensate, deren herstellung und deren verwendung
JP2005298800A (ja) * 2004-04-12 2005-10-27 Korea Advanced Inst Of Sci Technol 無機／有機混成オリゴマー、ナノ混成高分子及びこれらの製造方法
JP2007226209A (ja) * 2006-01-25 2007-09-06 Asahi Kasei Electronics Co Ltd 感光性樹脂組成物

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101314513B1 (ko) * 2005-03-15 2013-10-07 도레이 카부시키가이샤 감광성 수지 조성물
CN101273303B (zh) * 2005-10-26 2011-07-06 旭化成电子材料株式会社 正型感光性树脂组合物
US20090029287A1 (en) 2006-01-24 2009-01-29 Asahi Kasei Emd Corporation Photosensitive resin composition

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63121043A (ja) * 1986-11-10 1988-05-25 Toshiba Corp シリコ−ンレジスト材料
WO2001004186A1 (de) * 1999-07-13 2001-01-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Organisch modifizierte kieselsäurepolykondensate, deren herstellung und deren verwendung
JP2005298800A (ja) * 2004-04-12 2005-10-27 Korea Advanced Inst Of Sci Technol 無機／有機混成オリゴマー、ナノ混成高分子及びこれらの製造方法
JP2007226209A (ja) * 2006-01-25 2007-09-06 Asahi Kasei Electronics Co Ltd 感光性樹脂組成物

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009078336A1 (ja) * 2007-12-14 2009-06-25 Asahi Kasei E-Materials Corporation 感光性樹脂組成物
US20100209669A1 (en) * 2007-12-14 2010-08-19 Natsumi Aoai Photosensitive resin composition
US8475996B2 (en) 2007-12-14 2013-07-02 Asahi Kasei E-Materials Corporation Photosensitive resin composition
JP5525821B2 (ja) * 2007-12-14 2014-06-18 旭化成イーマテリアルズ株式会社 感光性樹脂組成物
JP2010031272A (ja) * 2008-07-01 2010-02-12 Asahi Kasei E-Materials Corp 感光性樹脂組成物
JP2010047746A (ja) * 2008-07-01 2010-03-04 Asahi Kasei E-Materials Corp 感光性樹脂組成物
WO2012050201A1 (ja) * 2010-10-14 2012-04-19 旭化成イーマテリアルズ株式会社 感光性樹脂組成物及びその製造方法
CN103154053A (zh) * 2010-10-14 2013-06-12 旭化成电子材料株式会社 感光性树脂组合物及其制造方法
JPWO2012050201A1 (ja) * 2010-10-14 2014-02-24 旭化成イーマテリアルズ株式会社 感光性樹脂組成物及びその製造方法
JP2017525834A (ja) * 2014-06-19 2017-09-07 インクロン オサケユキチュアＩｎｋｒｏｎ Ｏｙ 透過性シロキサン封入剤及び接着剤

Also Published As

Publication number Publication date
US8043899B2 (en) 2011-10-25
US20100123259A1 (en) 2010-05-20
TW200907580A (en) 2009-02-16
JPWO2008123224A1 (ja) 2010-07-15
TWI375126B (ja) 2012-10-21
JP5078992B2 (ja) 2012-11-21

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