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WO2008114333A1 - Container transfer apparatus - Google Patents

Container transfer apparatus Download PDF

Info

Publication number
WO2008114333A1
WO2008114333A1 PCT/JP2007/053160 JP2007053160W WO2008114333A1 WO 2008114333 A1 WO2008114333 A1 WO 2008114333A1 JP 2007053160 W JP2007053160 W JP 2007053160W WO 2008114333 A1 WO2008114333 A1 WO 2008114333A1
Authority
WO
WIPO (PCT)
Prior art keywords
container
transfer apparatus
container transfer
pallet
conveyer
Prior art date
Application number
PCT/JP2007/053160
Other languages
French (fr)
Japanese (ja)
Inventor
Katsuyoshi Tachibana
Original Assignee
Hirata Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirata Corporation filed Critical Hirata Corporation
Priority to PCT/JP2007/053160 priority Critical patent/WO2008114333A1/en
Publication of WO2008114333A1 publication Critical patent/WO2008114333A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

[PROBLEMS] To provide a container transfer apparatus, which has a simplified structure and can be operated and controlled in a simplified manner. [MEANS FOR SOLVING PROBLEMS] Provided is a container transfer apparatus for transferring a container (3), which hermetically stores articles such as a semiconductor wafer, between a plurality of processing apparatuses (1-n) within a bay area. The container transfer apparatus is provided with a conveyer (5), which is arranged along an arrangement direction of the processing apparatuses (1-n) in a ceiling space within the bay area, for transferring the container (3) by placing it on a pallet (6).The container transfer apparatus is also provided with a lift apparatus (7), which is arranged for each of the processing apparatuses (1-n) and for each of load ports (4) arranged below the conveyer (5), in order to transfer the container (3) by bringing up and down the container between a pallet (60) on the conveyer (5) and the load port (4). The pallet (60) has U-shaped notches (61a, 62a) opened parallel in the advancing direction. The notches are formed in a size which permits the lift apparatus (7) to pass through.
PCT/JP2007/053160 2007-02-21 2007-02-21 Container transfer apparatus WO2008114333A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/053160 WO2008114333A1 (en) 2007-02-21 2007-02-21 Container transfer apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/053160 WO2008114333A1 (en) 2007-02-21 2007-02-21 Container transfer apparatus

Publications (1)

Publication Number Publication Date
WO2008114333A1 true WO2008114333A1 (en) 2008-09-25

Family

ID=39765454

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/053160 WO2008114333A1 (en) 2007-02-21 2007-02-21 Container transfer apparatus

Country Status (1)

Country Link
WO (1) WO2008114333A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01222827A (en) * 1988-03-02 1989-09-06 Canon Inc Device for feeding article
JPH09110155A (en) * 1995-10-13 1997-04-28 Masaji Shitamachi Carrying in/out device for elevator and pallet
WO2006035473A1 (en) * 2004-09-24 2006-04-06 Hirata Corporation Container carrying equipment

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01222827A (en) * 1988-03-02 1989-09-06 Canon Inc Device for feeding article
JPH09110155A (en) * 1995-10-13 1997-04-28 Masaji Shitamachi Carrying in/out device for elevator and pallet
WO2006035473A1 (en) * 2004-09-24 2006-04-06 Hirata Corporation Container carrying equipment

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