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WO2008111404A1 - 超音波洗浄装置 - Google Patents

超音波洗浄装置 Download PDF

Info

Publication number
WO2008111404A1
WO2008111404A1 PCT/JP2008/053552 JP2008053552W WO2008111404A1 WO 2008111404 A1 WO2008111404 A1 WO 2008111404A1 JP 2008053552 W JP2008053552 W JP 2008053552W WO 2008111404 A1 WO2008111404 A1 WO 2008111404A1
Authority
WO
WIPO (PCT)
Prior art keywords
cleaning
ultrasonic vibration
article
ultrasonic
cleaned
Prior art date
Application number
PCT/JP2008/053552
Other languages
English (en)
French (fr)
Inventor
Hiroshi Hasegawa
Tomoharu Kamamura
Yasuhiro Imazeki
Original Assignee
Kaijo Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kaijo Corporation filed Critical Kaijo Corporation
Priority to US12/531,178 priority Critical patent/US20100108111A1/en
Publication of WO2008111404A1 publication Critical patent/WO2008111404A1/ja
Priority to US13/661,694 priority patent/US8652262B2/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/048—Overflow-type cleaning, e.g. tanks in which the liquid flows over the tank in which the articles are placed

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

本発明は、洗浄槽内全域における音圧の均一化を確保しつつ、単位時間当たりに被洗浄物に加わる音圧の低下を抑え、洗浄効率の良い超音波洗浄装置を提供することを目的とする。 超音波振動により被洗物を洗浄する超音波洗浄装置であって、周波数変調された信号を生成し超音波振動を発生する超音波振動発生手段と、前記被洗浄物が浸漬される洗浄液を内部に貯留し、前記超音波振動発生手段により発生した超音波振動により前記被洗浄物を洗浄するための洗浄槽と、を備え、前記信号は、単一の周波数を中心周波数として変調幅が異なる少なくとも２つの周波数変調部を有する。
PCT/JP2008/053552 2007-03-14 2008-02-28 超音波洗浄装置 WO2008111404A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/531,178 US20100108111A1 (en) 2007-03-14 2008-02-28 Ultrasonic cleaning apparatus
US13/661,694 US8652262B2 (en) 2007-03-14 2012-10-26 Ultrasonic cleaning method for generating ultrasonic vibrations by a frequency modulated signal

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-065620 2007-03-14
JP2007065620A JP4493675B2 (ja) 2007-03-14 2007-03-14 超音波洗浄装置

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US12/531,178 A-371-Of-International US20100108111A1 (en) 2007-03-14 2008-02-28 Ultrasonic cleaning apparatus
US13/661,694 Division US8652262B2 (en) 2007-03-14 2012-10-26 Ultrasonic cleaning method for generating ultrasonic vibrations by a frequency modulated signal

Publications (1)

Publication Number Publication Date
WO2008111404A1 true WO2008111404A1 (ja) 2008-09-18

Family

ID=39759347

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/053552 WO2008111404A1 (ja) 2007-03-14 2008-02-28 超音波洗浄装置

Country Status (4)

Country Link
US (2) US20100108111A1 (ja)
JP (1) JP4493675B2 (ja)
TW (1) TW200841946A (ja)
WO (1) WO2008111404A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5780890B2 (ja) * 2011-08-31 2015-09-16 株式会社国際電気セミコンダクターサービス 超音波洗浄方法及びその装置
JP5892109B2 (ja) * 2013-05-14 2016-03-23 信越半導体株式会社 超音波洗浄装置及び洗浄方法
CN114097024B (zh) * 2020-06-05 2022-09-09 株式会社海上 超声波清洗装置
JP7308182B2 (ja) * 2020-12-21 2023-07-13 株式会社Ｓｃｒｅｅｎホールディングス ノズル洗浄装置および塗布装置
US12042827B1 (en) * 2023-05-09 2024-07-23 Yield Engineering Systems, Inc. Integrated ultrasonics and megasonics cleaning

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0263580A (ja) * 1987-01-09 1990-03-02 William L Puskas 超音波周波数ジェネレータ
JPH07289991A (ja) * 1994-04-28 1995-11-07 Mitsui Petrochem Ind Ltd 駆動装置
JPH0947733A (ja) * 1995-08-03 1997-02-18 Kokusai Denki L Tec:Kk 超音波洗浄装置
JPH10135176A (ja) * 1996-09-04 1998-05-22 Tokyo Electron Ltd 超音波洗浄装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336534A (ja) 1986-07-30 1988-02-17 Puretetsuku:Kk 洗浄装置
JP2696017B2 (ja) * 1991-10-09 1998-01-14 三菱電機株式会社 洗浄装置及び洗浄方法
KR0144949B1 (ko) * 1994-07-26 1998-08-17 김광호 웨이퍼 카세트 및 이를 사용한 세정장치
JPH08131978A (ja) 1994-09-22 1996-05-28 Kaijo Corp 超音波洗浄装置
JPH10128255A (ja) * 1996-11-01 1998-05-19 Kaijo Corp 超音波洗浄装置
US6276370B1 (en) * 1999-06-30 2001-08-21 International Business Machines Corporation Sonic cleaning with an interference signal
JP4990439B2 (ja) * 2001-02-26 2012-08-01 芝浦メカトロニクス株式会社 超音波発振装置及び超音波発振方法、洗浄装置及び洗浄方法
US20090173358A1 (en) * 2008-01-09 2009-07-09 Micron Technology, Inc. Megasonic cleaning with controlled boundary layer thickness and associated systems and methods

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0263580A (ja) * 1987-01-09 1990-03-02 William L Puskas 超音波周波数ジェネレータ
JPH07289991A (ja) * 1994-04-28 1995-11-07 Mitsui Petrochem Ind Ltd 駆動装置
JPH0947733A (ja) * 1995-08-03 1997-02-18 Kokusai Denki L Tec:Kk 超音波洗浄装置
JPH10135176A (ja) * 1996-09-04 1998-05-22 Tokyo Electron Ltd 超音波洗浄装置

Also Published As

Publication number Publication date
US20100108111A1 (en) 2010-05-06
US20130048013A1 (en) 2013-02-28
US8652262B2 (en) 2014-02-18
JP4493675B2 (ja) 2010-06-30
TWI361729B (ja) 2012-04-11
TW200841946A (en) 2008-11-01
JP2008227300A (ja) 2008-09-25

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