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WO2007094607A8 - Method for preparing granular polycrystalline silicon using fluidized bed reactor - Google Patents

Method for preparing granular polycrystalline silicon using fluidized bed reactor

Info

Publication number
WO2007094607A8
WO2007094607A8 PCT/KR2007/000781 KR2007000781W WO2007094607A8 WO 2007094607 A8 WO2007094607 A8 WO 2007094607A8 KR 2007000781 W KR2007000781 W KR 2007000781W WO 2007094607 A8 WO2007094607 A8 WO 2007094607A8
Authority
WO
WIPO (PCT)
Prior art keywords
reactor
polycrystalline silicon
reactor tube
granular polycrystalline
fluidized bed
Prior art date
Application number
PCT/KR2007/000781
Other languages
French (fr)
Other versions
WO2007094607A1 (en
Inventor
Hee Young Kim
Kyung Koo Yoon
Yong Ki Park
Won Choon Choi
Original Assignee
Korea Res Inst Chem Tech
Hee Young Kim
Kyung Koo Yoon
Yong Ki Park
Won Choon Choi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Res Inst Chem Tech, Hee Young Kim, Kyung Koo Yoon, Yong Ki Park, Won Choon Choi filed Critical Korea Res Inst Chem Tech
Priority to EP07708931.6A priority Critical patent/EP1986956B1/en
Priority to JP2008555148A priority patent/JP4910003B2/en
Priority to CN2007800054832A priority patent/CN101384510B/en
Priority to US12/160,145 priority patent/US7771687B2/en
Priority to ES07708931T priority patent/ES2429568T3/en
Publication of WO2007094607A1 publication Critical patent/WO2007094607A1/en
Publication of WO2007094607A8 publication Critical patent/WO2007094607A8/en

Links

Classifications

    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01M—CATCHING, TRAPPING OR SCARING OF ANIMALS; APPARATUS FOR THE DESTRUCTION OF NOXIOUS ANIMALS OR NOXIOUS PLANTS
    • A01M1/00—Stationary means for catching or killing insects
    • A01M1/14—Catching by adhesive surfaces
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01M—CATCHING, TRAPPING OR SCARING OF ANIMALS; APPARATUS FOR THE DESTRUCTION OF NOXIOUS ANIMALS OR NOXIOUS PLANTS
    • A01M1/00—Stationary means for catching or killing insects
    • A01M1/02—Stationary means for catching or killing insects with devices or substances, e.g. food, pheronones attracting the insects
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/029—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of monosilane
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01M—CATCHING, TRAPPING OR SCARING OF ANIMALS; APPARATUS FOR THE DESTRUCTION OF NOXIOUS ANIMALS OR NOXIOUS PLANTS
    • A01M2200/00—Kind of animal
    • A01M2200/01—Insects
    • A01M2200/012—Flying insects

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Pest Control & Pesticides (AREA)
  • Insects & Arthropods (AREA)
  • Engineering & Computer Science (AREA)
  • Wood Science & Technology (AREA)
  • Zoology (AREA)
  • Environmental Sciences (AREA)
  • Silicon Compounds (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
  • Photovoltaic Devices (AREA)

Abstract

The present invention relates to a method for mass preparation of granular polycrystalline silicon in a fluidized bed reactor, comprising (a) a reactor tube, (b) a reactor shell encompassing the reactor tube, (c) an inner zone formed within the reactor tube, where a silicon particle bed is formed and silicon deposition occurs, and an outer zone formed in between the reactor shell and the reactor tube, which is maintained under an inert gas atmosphere, and (d) a controlling means to keep the pressure difference between the inner zone and the outer zone being maintained within the range of 0 to 1 bar, thereby capable of maintaining physical stability of the reactor tube and efficiently preparing granular polycrystalline silicon even at a relatively high reaction pressure.
PCT/KR2007/000781 2006-02-14 2007-02-14 Method for preparing granular polycrystalline silicon using fluidized bed reactor WO2007094607A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP07708931.6A EP1986956B1 (en) 2006-02-14 2007-02-14 Method for preparing granular polycrystalline silicon using fluidized bed reactor
JP2008555148A JP4910003B2 (en) 2006-02-14 2007-02-14 Method for producing polycrystalline silicon using fluidized bed reactor
CN2007800054832A CN101384510B (en) 2006-02-14 2007-02-14 Method for preparing granular polycrystalline silicon using fluidized bed reactor
US12/160,145 US7771687B2 (en) 2006-02-14 2007-02-14 Method for preparing granular polycrystalline silicon using fluidized bed reactor
ES07708931T ES2429568T3 (en) 2006-02-14 2007-02-14 Method for the production of granular polycrystalline silicon using a fluidized bed reactor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2006-0013973 2006-02-14
KR1020060013973A KR100661284B1 (en) 2006-02-14 2006-02-14 Polysilicon Production Method Using Fluidized Bed Reactor

Publications (2)

Publication Number Publication Date
WO2007094607A1 WO2007094607A1 (en) 2007-08-23
WO2007094607A8 true WO2007094607A8 (en) 2008-07-24

Family

ID=37815541

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2007/000781 WO2007094607A1 (en) 2006-02-14 2007-02-14 Method for preparing granular polycrystalline silicon using fluidized bed reactor

Country Status (8)

Country Link
US (1) US7771687B2 (en)
EP (1) EP1986956B1 (en)
JP (1) JP4910003B2 (en)
KR (1) KR100661284B1 (en)
CN (1) CN101384510B (en)
ES (1) ES2429568T3 (en)
RU (1) RU2397953C2 (en)
WO (1) WO2007094607A1 (en)

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KR100756310B1 (en) * 2006-02-07 2007-09-07 한국화학연구원 High Pressure Fluidized Bed Reactor for Particle Polycrystalline Silicon Production
KR100783667B1 (en) * 2006-08-10 2007-12-07 한국화학연구원 Method and apparatus for manufacturing particulate polycrystalline silicon
DE102007021003A1 (en) * 2007-05-04 2008-11-06 Wacker Chemie Ag Process for the continuous production of polycrystalline high-purity silicon granules
SG192438A1 (en) * 2008-06-30 2013-08-30 Memc Electronic Materials Fluidized bed reactor systems and methods for reducing the deposition of silicon on reactor walls
CN101676203B (en) 2008-09-16 2015-06-10 储晞 Reactor for producing high purity granular silicon and method thereof
DE102009043947B4 (en) 2009-09-04 2011-07-07 G+R Technology Group AG, 93128 Plant for the production of polycrystalline silicon with a device for discharging gaseous measuring samples
CN102713001B (en) * 2009-11-18 2014-03-05 瑞科硅公司 Fluid bed reactor
JP2013515673A (en) * 2009-12-29 2013-05-09 エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド Method for reducing silicon deposits on reactor walls using silicon tetrachloride led to the peripheral opening of the distributor
JP2011219286A (en) * 2010-04-06 2011-11-04 Koji Tomita Method and system for manufacturing silicon and silicon carbide
KR101329030B1 (en) * 2010-10-01 2013-11-13 주식회사 실리콘밸류 Fluidized Bed Reactor
US20120100061A1 (en) 2010-10-22 2012-04-26 Memc Electronic Materials, Inc. Production of Polycrystalline Silicon in Substantially Closed-loop Processes
US8449848B2 (en) 2010-10-22 2013-05-28 Memc Electronic Materials, Inc. Production of polycrystalline silicon in substantially closed-loop systems
US9156705B2 (en) 2010-12-23 2015-10-13 Sunedison, Inc. Production of polycrystalline silicon by the thermal decomposition of dichlorosilane in a fluidized bed reactor
US8452547B2 (en) 2010-12-29 2013-05-28 Memc Electronic Materials, Inc. Systems and methods for particle size determination and control in a fluidized bed reactor
US8849584B2 (en) 2010-12-29 2014-09-30 Sunedison, Inc. Systems and methods for particle size determination and control in a fluidized bed reactor for use with thermally decomposable silicon-containing gas
KR101329032B1 (en) * 2011-04-20 2013-11-14 주식회사 실리콘밸류 Apparatus for manufacturing polycrystalline silicon and method for manufacturing polycrystalline silicon using the same
TW201304864A (en) * 2011-06-10 2013-02-01 Rec Silicon Inc Production of high purity silicon-coated granules
CN103842070B (en) 2011-09-30 2017-07-21 Memc电子材料有限公司 Polysilicon is prepared by making silane thermally decompose in a fluidized bed reactor
WO2013049325A1 (en) 2011-09-30 2013-04-04 Memc Electronic Materials, Inc. Production of polycrystalline silicon by the thermal decomposition of silane in a fluidized bed reactor
US9212421B2 (en) 2013-07-10 2015-12-15 Rec Silicon Inc Method and apparatus to reduce contamination of particles in a fluidized bed reactor
US9587993B2 (en) 2012-11-06 2017-03-07 Rec Silicon Inc Probe assembly for a fluid bed reactor
KR101450532B1 (en) 2013-01-15 2014-10-14 주식회사 실리콘밸류 Apparatus for manufacturing polycrystalline silicon
CN103172381B (en) * 2013-04-08 2014-03-26 无锡中彩科技有限公司 Preparation method and applications of cold-wall fluidized bed
CN107364869A (en) 2013-04-16 2017-11-21 江苏中能硅业科技发展有限公司 Fluidized-bed reactor and its method for preparing high-purity granular polysilicon
CN103449442B (en) * 2013-09-03 2015-03-18 浙江精功新材料技术有限公司 System for preparing polysilicon granules in fluidized bed and process for preparing polysilicon by using same
US9585199B2 (en) * 2013-10-30 2017-02-28 Atomic Energy Council—Institute of Nuclear Energy Research Hybrid heating apparatus applicable to the moving granular bed filter
CN103673607B (en) * 2013-12-04 2015-12-09 中国科学院过程工程研究所 A visual heating furnace
JP6256073B2 (en) * 2014-02-12 2018-01-10 日立化成株式会社 Reaction tube and catalyst loading method
US9662628B2 (en) 2014-08-15 2017-05-30 Rec Silicon Inc Non-contaminating bonding material for segmented silicon carbide liner in a fluidized bed reactor
US9446367B2 (en) 2014-08-15 2016-09-20 Rec Silicon Inc Joint design for segmented silicon carbide liner in a fluidized bed reactor
US9238211B1 (en) 2014-08-15 2016-01-19 Rec Silicon Inc Segmented silicon carbide liner
DE102015224099A1 (en) * 2015-12-02 2017-06-08 Wacker Chemie Ag Fluidized bed reactor and process for producing polycrystalline silicon granules
WO2017100564A1 (en) * 2015-12-11 2017-06-15 Sunedison, Inc. Reactor systems having multiple pressure balancers
WO2017100404A1 (en) * 2015-12-11 2017-06-15 Sunedison, Inc. Reactor systems having external pressure balancer
KR101987129B1 (en) * 2016-09-19 2019-06-10 한화케미칼 주식회사 Fluidized bed reactor for composing trichlorosilane
CN113840648B (en) * 2019-03-28 2023-02-28 瑞科硅公司 Pressure-based control of a fluidized bed reactor
EP3900818A1 (en) * 2020-04-23 2021-10-27 Linde GmbH Reactor and method for performing a chemical reaction
EP3900817A1 (en) * 2020-04-23 2021-10-27 Linde GmbH Reactor and method for performing a chemical reaction
CN114225849A (en) * 2021-12-06 2022-03-25 亚洲硅业(青海)股份有限公司 Silicon particle production device and method

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Also Published As

Publication number Publication date
EP1986956A4 (en) 2012-10-10
EP1986956B1 (en) 2013-08-14
US7771687B2 (en) 2010-08-10
JP4910003B2 (en) 2012-04-04
CN101384510A (en) 2009-03-11
JP2009526734A (en) 2009-07-23
RU2397953C2 (en) 2010-08-27
EP1986956A1 (en) 2008-11-05
RU2008136843A (en) 2010-03-20
ES2429568T3 (en) 2013-11-15
US20090004090A1 (en) 2009-01-01
KR100661284B1 (en) 2006-12-27
CN101384510B (en) 2012-08-29
WO2007094607A1 (en) 2007-08-23

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