WO2007069686A1

WO2007069686A1 - Vacuum capacitor and vacuum valve

Info

Publication number: WO2007069686A1
Application number: PCT/JP2006/324940
Authority: WO
Inventors: Toru Nishizawa; Eiichi Takahashi; Toshimichi Yamada; Shuji Hojo
Original assignee: Meidensha Corporation
Priority date: 2005-12-16
Filing date: 2006-12-14
Publication date: 2007-06-21
Also published as: JPWO2007069686A1; JP5024049B2

Abstract

[PROBLEMS] To solve a problem that, when an adjusting nut is rotated in such a state that an adjusting screw and the adjusting nut are screwed together resulting in collision of thread grooves against microspikes during sliding between the thread grooves, cracking starts from the microspikes leading to breaking of a coating layer which in turn deteriorates the yield of a vacuum capacitor. [MEANS FOR SOLVING PROBLEMS] Fine particles (46) having a higher hardness than a first high-hardness coating layer (41) is sprayed from a nozzle (45) on the first high-hardness coating layer (41) covered with a moving-side thread groove (32x) located in a direction indicated by arrows, and a protruded part (32y) is removed to form a surface of the first high-hardness coating layer (41) on a smooth surface (47). Since the thread grooves are slid against each other on the smooth surface, the first high-hardness coating layer (41) is not broken, and the yield of the vacuum capacitor can be improved.

Description

Specification

Vacuum capacitor and vacuum valve technology

[0001] The present invention attaches the thread groove of the movable conductor to which the movable electrode is attached to the thread groove of the adjustment nut that is rotatably inserted into the bearing, and the movable conductor is moved in accordance with the rotation of the adjustment nut. The present invention relates to a vacuum capacitor and a vacuum valve with an improved sliding surface that moves in the axial direction.

Background art

[0002] The structure of a conventional vacuum capacitor can be broadly divided into two types: a fixed capacitance type vacuum capacitor with a fixed capacitance value and a variable capacitance type vacuum capacitor with a variable capacitance value. is there. The latter vacuum capacitor will be described with reference to FIGS.

In FIG. 3, copper cylindrical tubes 11a and 11b are joined to both ends of an insulating cylinder 12 that also serves as a ceramic member, and a fixed side end plate 13 and a movable side end are connected to both ends of the cylindrical tubes 11a and ib. Mounted with the plate 14, the container 10 is formed.

[0004] A plurality of cylindrical electrode plates F 1, F 2, -F having different radii are arranged on the inner side of the fixed side end plate 13.

1 2 n A fixed electrode 15 is formed by being attached at regular intervals in a circular shape. In addition, a plurality of cylindrical electrode plates M 1, M 2, M 3,

1 2 to M are provided on the mounting conductor 18 to form the movable electrode 16 n

The The fixed electrode 15 and the movable electrode 16 constitute a capacitor part.

The mounting conductor 18 is provided with a movable lead 2. One end of the bellows 19 is applied to the movable lead 2, and the other end of the bellows 19 is brazed to the movable side end plate 14. The bellows 19 allows the movable lead 2 to move up and down. The fixed electrode 15 side and the movable electrode 16 side surrounded by the bellows 19 form a vacuum state, that is, a vacuum chamber. A guide pin 1 is provided on the fixed-side electrode shaft center portion of the fixed-side end plate 13 so as to extend inwardly of the container 10 so that the movable lead 2 can smoothly move in the axial direction. Guide pin 1 is formed of an insulating member. The guide pin 1 is inserted into a guide portion 5 provided on the movable lead 2, and the movable lead bolt 32 is guided in the axial direction using the guide portion 5 as a guide. The The end of the movable lead bolt 32 opposite to the electrode is inserted into the bearing portion 34.

[0006] The bearing portion 34 is configured as follows. One end of the screw receiving portion 31 is attached to the inner side of the movable side end plate 14, and the other end of the screw receiving portion 31 is bent at the end protruding to the electrode side to the movable lead bolt 32 side to form a flange 31a. . A through-hole is formed in the center of the collar 31a, although no figure number is attached. An adjustment nut 33 is disposed outside the collar portion 31a via a bearing portion 34 of a thrust bearing. A central portion of the bearing portion 34 forms a through hole communicating with the above-described through hole.

[0007] The end portion 32b of the connecting portion 37 of the movable lead bolt 32 on the side opposite to the adjustment nut 33 is fixedly supported on the end face 2a of the movable lead 2 via the guide pin 1 and the space portion. The thread groove 32x formed in the outer peripheral portion of the other end of the movable lead bolt 32 passes through the through hole of the bearing portion 34 and the adjustment nut 33, and the screw hole 33c formed in the inner surface of the adjustment nut 33 (shown in FIG. 4). It is screwed into. A screw hole 32a is formed at the tip of the movable lead bolt 32 on the screw groove 32x side. The adjusting screw 36 is inserted into the screw hole 32a.

FIG. 4 is an enlarged view showing details of the maximum capacitance adjusting portion 35. The maximum capacitance adjusting portion 35 is screwed into the screw hole 32a at the tip of the movable lead bolt 32 and screwed into the screw hole 32a. The adjustment screw 36, the adjustment nut 33 and the movable lead bolt 32, and the adjustment screw 36 inserted into the adjustment nut 33 where the movable lead bolt 32 is screwed into the adjustment nut 33. A force is formed between the drilled large-diameter portion 33a and a stepped portion 33b between the large-diameter portion 33a and the screw hole 33c.

[0009] When adjusting the maximum capacitance adjustment value of the vacuum capacitor configured as described above, first adjust the adjustment nut 36 before screwing in and adjusting the adjustment screw 36. Turn the screw slightly to the right (in the case of a right-hand thread), and move the movable lead 2 slightly below the position of the maximum capacitance where the tip la of the guide pin 1 and the end face 32b of the connecting part 37 of the movable lead bolt 32 abut. Adjust to the maximum capacitance adjustment value. This slight adjustment is determined by the degree of variation in the capacitance of the vacuum capacitor.

[0010] Next, in this state, the adjustment screw 36 is screwed into the screw hole 32a until the contact surface of the head abuts on the stepped portion 33b. Fix the bolt 32 with adhesive, and regulate the raised position of the movable lead bolt 32 (does not bond to the adjusting nut 33). [0011] By regulating the raised position of the movable lead bolt 32 in this way, even if the maximum capacitance adjustment value of the manufactured vacuum capacitor varies, the maximum capacitance adjustment for each vacuum capacitor. The value can be adjusted, and a vacuum capacitor with a quality that matches the maximum capacitance adjustment value can be obtained.

[0012] Even if the adjustment screw 36 tries to turn the adjustment nut 33 counterclockwise from the position of the maximum capacitance adjustment value, the adjustment screw 36 hits the step 33b and does not turn further to the left. It also has the function of a stagger to prevent 33 from coming off the movable lead bolt 32.

[0013] The electrostatic capacitance of the vacuum capacitor is adjusted by rotating the adjustment nut 33. For example, the movable lead bolt 32 moves downward in the clockwise direction and moves upward in the counterclockwise direction, and the movable electrode 16 moves up and down. The capacitance value is arbitrarily adjusted by varying the total area facing the fixed electrode 15. This capacitance adjusting means is performed by, for example, an electric means (not shown).

[0014] As a characteristic required for the capacitance variable vacuum capacitor configured as described above, there is a demand for extending the life of the adjustment nut 33 and the adjustment screw 36 for capacitance adjustment. In vacuum capacitors, the material and shape of the adjustment nut and adjustment screw have a significant impact on the above-mentioned long life. Particularly in the case of vacuum capacitors used in high-frequency power supply circuits for semiconductor manufacturing equipment, the adjustment nut and adjustment screw are used because the adjustment nut is fast and has a high total rotation speed in order to frequently change the capacitance value. Intense damage will cause a decline in their durability! As this type of technology, the following patent documents 1 and 2 can be cited.

[0015] Patent Document 1: Japanese Patent No. 3263992

Patent Document 2: Patent No. 3365082

Disclosure of the invention

Problems to be solved by the invention

[0016] In order to change the capacitance of the vacuum capacitor, the adjustment nut is rotated to overcome the vacuum pressure in the container and move the movable electrode. For this reason, when the other screw groove moves along one screw part according to the rotation of the adjusting nut, friction resistance force and surface pressure act on the adjusting screw part while it is being used. The thread is worn and deformed. There was a fear.

[0017] Further, if the threaded portion is worn or deformed, the frictional resistance of the threaded portion may be further increased, and the rotational torque may be increased. Further, if the threaded portion is worn or deformed, the movable electrode with respect to the rotational position may be used. Since the position of is displaced by the amount of wear and deformation of the thread, there is a risk that the capacitance will change. In particular, when the motor rotates in the opposite direction to the vacuum pressure where the area between the counter electrodes decreases, the mounting conductor 18 is moved against the vacuum pressure in the vacuum vessel, which may cause a large surface pressure. It was.

[0018] Further, in the high-frequency power supply circuit, since it is necessary to quickly adjust the impedance, it is rotated at a high speed and a high acceleration in order to shorten the capacitance moving time per time. There was a risk of working on the thread. In particular, for high-frequency power supply circuits for semiconductor manufacturing equipment, until now, a means to control the adjustment nut 33 with a stepping motor of about 600 rpm has been taken, but recently, a means to control the adjustment nut with a servo motor has been adopted. I use it. For this reason, the adjustment nut 33 and the adjustment screw 36 described above cannot cope with high speed and high acceleration, and there is a problem that they are worn out and cannot be used in a short period of time.

[0019] Conventionally, the operation interval of the power supply circuit has been relatively long as the rotation interval with a relatively long stop time. However, in recent years, operations that are constantly rotating and finely hunting have been used. Yes. For this reason, the adjustment nut and the adjustment screw as described above cannot cope with fine hunting of the same part, and there is a problem that they are worn out in a short period of time and the vacuum capacitor cannot be used.

[0020] Furthermore, when manufacturing a vacuum capacitor, the container is subjected to high-temperature vacuum brazing of about 750 ° C to 850 ° C, so that the adjustment nut and adjusting screw are annealed by brazing and the hardness is lowered. In addition to the above, each material is unlikely to generate heat even when high-frequency current is applied.In order to make it nonmagnetic and hard, heat treatment and demagnetization are performed to make the material highly hard. However, the problem that the hardness of the material decreases due to the heat generated by high-frequency energization is eliminated.

[0021] In addition, if high-temperature vacuum brazing is performed using a high-hardness adjustment nut, adjustment screw material, or coated material in the same manner as described above, the material and coding force gas are released during brazing, There is also a problem that the function as a vacuum capacitor is lost. [0022] The present invention has been made in view of the above circumstances, and reduces deformation and wear of the adjusting nut and adjusting screw due to rotation as much as possible, and solves problems that occur during brazing to improve durability. An object of the present invention is to provide a vacuum capacitor and a vacuum valve.

Means for solving the problem

In order to solve the above problems, a vacuum capacitor according to a first aspect of the present invention includes a vacuum vessel having a fixed side end plate on one end side of a cylindrical portion and a movable side end plate on the other end side, and the vacuum vessel A fixed electrode formed by concentrically attaching a plurality of concentric cylindrical electrode plates having different diameters to the fixed electrode mounting conductor, and the cylindrical electrode plates of the fixed electrode can be inserted and removed in a non-contact state. A movable electrode formed by concentrically attaching a plurality of cylindrical electrode plates having different diameters to a movable electrode mounting conductor, and this movable electrode is applied to the external force of the movable side end plate of the vacuum vessel in the axial direction of the cylindrical electrode plate. A movable lead to be moved, a bellows provided inside the movable side end plate on an outer peripheral side of the movable lead and capable of moving the movable lead in a vacuum state, and the fixed electrode mounting conductor; The center of the opposing surfaces of the movable electrode mounting conductor Each of which is provided with a guide portion formed by a guide pin provided to each of the guide pins and a guide portion that is electrically insulated and slidably inserted.

A movable lead bolt is attached to the tip of the movable lead in the bellows in the axial direction, and the movable side end plate is provided with a screw receiving portion protruding into the bellows on the inner side, and a bearing is provided at the end. The movable lead bolt is screwed into an adjustment nut supported by a bearing, and the capacitance of the capacitor is adjusted by rotating the adjustment nut, and the movable lead bolt and the adjustment nut are screwed together. After adjusting to the maximum capacitance value defined by operating the adjustment nut, adjust the maximum capacitance adjustment means to restrict the movement of the movable lead bolt to the guide pin side at this adjustment position. The capacity adjustment means is provided with a screw hole at the tip of the movable lead bolt, and the adjustment nut is provided with a large diameter portion larger than the screw hole into which the movable lead bolt is screwed. In the vacuum capacitor in which the screw is inserted into the screw hole at the tip of the movable lead bolt, the first high-hardness coating layer is provided on one of the adjustment screw and the adjustment nut, and the second is provided on the other. It is characterized by having a high hardness coating layer.

[0024] In the vacuum capacitor of the second invention, the first high-hardness coating layer has a titanium nitride core. It is characterized by an electroless coating that retains slipping and hardness, and an electroless coating or titanium nitride coating that retains slipping and hardness on the second high hardness coating layer. To do.

[0025] The vacuum capacitor of the third invention is characterized in that only one of the first and second high-hardness coating layers is provided with an electroless plating coating that maintains slipperiness and hardness. .

[0026] A vacuum capacitor according to a fourth aspect of the present invention is a container in which a fixed side end plate and a movable side end plate are attached to both ends of an insulating cylinder, a fixed electrode provided on the fixed side end plate in the container, A movable electrode disposed so as to form a capacitance with the fixed electrode; a movable electrode having a movable electrode at one end and a movable screw groove at the other end; and the movable conductor and the movable end plate A bellows attached so as to create a vacuum on the electrode side, an adjustment nut having a thread groove that engages with a movable side thread groove outside the mouthpiece, and the adjustment nut is rotatably inserted. And a bearing portion attached to the movable side end plate, and when the adjustment nut is rotated, the movable side conductor moves in a direction to increase or decrease the capacitance via the movable side thread groove.

A member having a hardness which is harder than the hardness of titanium nitride, and is formed with a coating layer having fine protrusions coated with titanium nitride on one side of the threaded side of the movable side conductor and the adjusting nut. In this case, the coating layer is brought into contact with the surface to remove minute protrusions, thereby making the coating layer a smooth surface.

[0027] A vacuum capacitor according to a fifth aspect of the invention is characterized in that fine particles having a hardness higher than that of titanium nitride are sprayed on the coating layer to remove fine protrusions to make the coating layer a smooth surface. Is.

[0028] A vacuum capacitor according to a sixth aspect of the invention is characterized in that the smooth surface is a smooth surface that does not cause damage from minute protrusions when the movable conductor is rotated.

[0029] In the vacuum capacitor of the seventh invention, the sliding surface of the movable side conductor on which the movable side conductor moves while sliding on the bearing portion is formed on a coating layer having fine protrusions coated with titanium nitride, The coating layer is harder than the hardness of titanium nitride and is in contact with the coating layer to remove minute protrusions and make the coating layer smooth. It is a feature.

[0030] A vacuum valve according to an eighth aspect of the present invention houses a pair of electrodes in a vacuum vessel, extends a movable side conductor from the one side electrode to the outside of the bearing portion of the vacuum vessel, and moves the movable side conductor to move to one side. In a vacuum valve that opens and closes an electrode with the other electrode, when the movable conductor slides on the bearing portion, the movable conductor has a smooth sliding surface coated with a titanium nitride coating layer. It is what.

The invention's effect

[0031] As described above, according to the present invention, one of the adjusting screw and the adjusting nut is provided with the first high hardness coating layer, and the other is provided with the second high hardness coating layer. Since either one of the adjustment nuts is coated with titanium nitride and the other is coated with an electroless coating that retains slipperiness and hardness, high-hardness coated screws and nuts are constructed. Since the movable electrode can be moved with low frictional force by overcoming the vacuum pressure, it is possible to prevent the wear and deformation of the screw and nut, thereby suppressing the increase in rotational torque and extending the life of the rotating part. Can be planned.

[0032] Further, according to the present invention, the adjustment screw and adjustment nut of the high-hardness coating layer are used to rotate with a low frictional force, so that higher speed and higher acceleration than conventional screw rotation are achieved. Since there is little wear and deformation even when rotating, variable control of capacitance can be performed faster.

[0033] Furthermore, since the high-hardness coating layer is a weak magnetic material, heat generation does not occur even in vacuum brazing by high-frequency energization even in a high-frequency environment with little hysteresis loss, and the temperature inside the vacuum vessel is increased. The high heat resistance of the high-hardness coating layer can be suppressed, and high hardness can be maintained even during high-temperature vacuum brazing at 750 ° C to 850 ° C, and no force is required during high-temperature vacuum brazing There is an advantage that it is possible to eliminate the occurrence of a decrease in the degree of vacuum because no gas is released.

[0034] In addition to the above advantages, the present invention only has a high hardness coating on the adjusting screw, so that the life can be extended with the same shape without changing the arrangement inside the vacuum capacitor. Since any material can be used, screws can be manufactured without any restrictions on workability, and the inner diameter side of the adjusting nut can be coated. Thus, wear and deformation can be suppressed.

[0035] Furthermore, according to the present invention, the screw groove side on one side of the movable side conductor and the adjusting nut is formed on the coating layer having the microprojections coated with titanium nitride, The layer was contacted with the coating layer with a material harder than that of titanium nitride, and the microprotrusions were removed to make the coating layer smooth, so that the thread groove slid on the smooth surface and damaged the coating layer. As a result, the yield of movable conductors and vacuum capacitors was improved.

[0036] According to the present invention, when the movable side conductor slides on the bearing portion, the movable side conductor has a smooth sliding surface coated with the titanium nitride coating layer. And the yield of vacuum valves was improved.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, a first embodiment, a second embodiment, and a third embodiment of the present invention will be described with reference to the drawings.

[0038] [First Embodiment]

FIG. 1 is an enlarged cross-sectional view showing an embodiment. FIG. 1 (a) shows an adjusting screw 36, and FIG. 1 (b) shows an adjusting nut 卜 33. The adjustment screw 36 uses SUS304 as a base material, and the first high-hardness coating layer 41 is coated on the movable side screw groove 32x formed on the outer peripheral side of the movable lead bolt 32 of the adjustment screw 36 formed of this SUS304. did. The first high-hardness coating layer 41 was coated with titanium nitride (TiN) [hardness: 2200HV] to a thickness of 3 μm.

[0039] In addition, SUS304 similar to the above is used as the base material for the adjustment nut 33 in FIG. 1 (b), and the screw hole 33c of the adjustment nut 33 formed of this SUS304 has a thread groove 33x on the inner surface. Then, the second high hardness coating layer 42 was coated on the thread groove 33x. This second high-hardness coating layer 42 is made of a coating in which fine particles of PTFE are uniformly dispersed and co-deposited in the electroless nickel plating film, for example, Ni—P—PTFE (PTFE It has a content of 5%) and a [hardness: 750 to 900 HV] and is coated to a thickness of 10 m. The friction coefficient at this time is 0.10-10.12.

[0040] [Second Embodiment]

As in the first embodiment, the adjustment screw 36 uses SUS304 as the base material. The adjustment screw 36 formed of 304 has a movable side thread groove 32x formed on the outer peripheral side of the movable lead bolt 32. The movable side thread groove 32x is covered with the first high hardness coating layer 41! /

. The first high-hardness coating layer 41 is coated with titanium nitride (TiN) [hardness: 2200HV] to a thickness of 3 μm.

[0041] Further, the adjustment nut 33 uses the same SUS304 as the base material, and this SUS30

The adjustment nut 33 formed of 4 has a second hard coating layer 42 Ni—P—PTF

E (PTFE content 20% type), [Hardness: 400-600HV] is coated to a thickness of 10 μm. The coefficient of friction at this time is 0.08-0.10.

[0042] The first and second high hardness coating layers 41, 42 shown in the first and second embodiments are the first high hardness coating layer 41 on the adjusting nut 33 and the second high hardness coating layer 36 on the adjusting screw 36. Each of the hardness coating layers 42 may be coated.

[0043] The adjustment nut 33 and the adjustment screw 36 shown in the first and second embodiments are covered with the first and second high-hardness coating layers 42, the maximum rotation speed 1200rpm, the maximum acceleration Z deceleration lOOrpmZ ms (lms Fig. 2 shows the results of investigating the life characteristics when the life is defined when the rotational torque exceeds the specified value for each lOOrpm change).

[0044] From Fig. 2, it can be seen that with SUS304 alone, the force adjustment nut 33, which was 200,000 cycles, was coated with electroless plating (Ni—P—PTFE) in the first and second embodiments, 800,000. The life is extended even to the cycle.

[0045] From the results of the life characteristics shown in FIG. 2, the mechanical adjustment nut 33 and the adjustment screw 36, which have been hardened as shown in the first and second embodiments, are applied to the vacuum capacitor. Because it has high tensile strength and high heat resistance, it can withstand high temperature brazing.

[0046] In addition, the coating with a higher hardness can reduce wear and deformation, and the sliding force can be reduced by the coating, thereby reducing wear. Is possible.

[0047] Furthermore, only one of the adjusting nut 33 and the adjusting screw 36 is provided with an electroless plating (Ni-P

The same effect can be obtained by coating a coating layer of a different material on the other side or coating only one of them with an electroless plating (Ni-P-PTFE). It is.

[0048] In the first and second embodiments, the coating thickness, multiple coating, coating manufacturing method, and thickness direction may be arbitrarily used. In addition, any thread shape such as single thread, multiple thread, trapezoidal thread, square thread, etc. can be used, and stainless steel, copper alloy, steel, etc. can be used as the screw base material. In addition, the configuration of bolts and nuts of the vacuum capacitor guide pin, capacitance adjustment means, male and female, etc. can be used arbitrarily. Of course.

[0049] [Third embodiment]

A third embodiment of the present invention will be described with reference to FIGS. Fig. 5 is an enlarged view of the movable lead screw 32, which is a movable conductor, with the movable thread 32x on the movable nut 32 and the thread 33x on the adjustment nut 33 screwed together. FIG.

[0050] A screw groove 33x was formed on the inner surface of the screw hole 33c of the adjustment nut 33, and the second high hardness coating layer 42 as a coating layer was coated on the screw groove 33x. This second high-hardness coating layer 42 is made of a coating in which fine particles of PTFE are uniformly dispersed and co-deposited in the electroless nickel plating film, for example, Ni—P—PTFE (PTFE It has a content of 5%) and a [hardness: 750 to 900 HV] and is coated to a thickness of 10 m. The friction coefficient at this time is 0.10-10.12.

[0051] A movable side thread groove 32x is formed on the outer peripheral side of the movable lead bolt 32 of the adjusting screw 36, and titanium nitride (TiN) is sprayed on the movable side thread groove 32x to form a hard coating layer. A first high hardness coating layer 41 is formed. When the first high-hardness coating layer 41 is observed with a microscope, the first high-hardness coating layer 41 has innumerable protrusions 32y. This protrusion 32y is particularly present at the bottom of the movable side thread groove 32x, and the protrusion 32y is also called a droplet.

Next, the case where the protrusion 32y is removed will be described with reference to FIG. Place the adjusting screw 36 and the movable lead bolt 32 on a work table (not shown), and place the nozzle 45 of the spraying device directly above the adjusting screw 36. The nozzle 45 moves in the arrow direction X. Fine particles 46 having a hardness higher than that of the first high-hardness coating layer 41, for example, diamond abrasive grains, are sprayed from the nozzle 45 onto the first high-hardness coating layer 41 covering the movable-side thread groove 32x in the direction of the arrow. As a result, the protrusion 32y is removed as shown in FIG. 7, and the surface of the first high hardness coating layer 41 is formed into a smooth surface.

[0053] When the adjustment nut 33 is rotated in a state where the movable side screw groove 32x having the smooth surface 47 and the screw groove 33x on the adjustment nut 33 side are screwed together, the screw groove 33x becomes a smooth surface of the movable side screw groove 32x. 4 Slide and rotate 7 smoothly. At this time, since there is no protrusion 32y, the frictional resistance is reduced by the absence of the protrusion 32y, preventing the first high hardness coating layer 41 from being damaged and improving the yield and life of the vacuum capacitor. Can be done.

[0054] Further, when the adjustment nut 33 is rotated in a state where the movable side screw groove 32x having the protrusion 32y and the screw groove 33x on the adjustment nut 33 side are screwed together, the protrusion 32y presses the screw groove 33x. As the adjustment nut 33 rotates, the load increases by the amount of the protrusion 32y, and the motor requires a large amount of power consumption.In the present invention, however, the load decreases by the smooth surface 47. The power consumption of the motor can be reduced. That is, energy saving can be achieved.

[0055] Further, in order to remove the protrusion 32y, the protrusion 32y may be rubbed with a cloth adhered with diamond cannons in addition to the spraying of this embodiment. Since the spray force reaches the bottom of 32x, there is an advantage that the entire movable side thread groove 32x can be finished to a uniform smooth surface.

The smoothness of the smooth surface 47 may be a smooth surface that does not damage the first high-hardness coating layer 41 when the thread groove 33x slides and rotates on the movable side thread groove 32x.

[0057] The second high-hardness coating layer 42 may be coated on the movable-side thread groove 32x side, and the first high-hardness coating layer 41 may be coated on the thread groove 33x side. However, as in the third embodiment, It is better to coat the first high hardness coating layer 41 on the screw groove 32x side and the second high hardness coating layer 42 on the screw groove 33x side. This is because the first high-hardness coating layer 41 whose expansion in the circumferential direction on the first high-hardness coating layer 41 side is smaller than that on the second high-hardness coating layer 42 side is difficult to break.

In addition, the movable lead bolt 32 may be a movable side conductor having a movable side thread groove with a movable electrode attached to one end and inserted into the bearing portion at the other end.

[0059] Further, a sliding surface of the movable side conductor on which the movable side conductor moves while sliding with the bearing portion is provided.

Formed on a coating layer having fine protrusions coated with titanium nitride, It can also be applied to spraying the coating layer on the coating layer with a member having a hardness higher than that of titanium nitride and removing the fine protrusions to make the coating layer smooth.

[0060] For example, a pair of electrodes are housed in a vacuum vessel, a movable side conductor is extended from the one side electrode to the outside of the bearing portion of the vacuum vessel, and the movable side conductor is moved to move the one side electrode to the other side electrode. In the open / close vacuum valve, when the movable conductor slides on the bearing portion, the sliding surface of the movable conductor covered with the titanium nitride coating layer is made smooth.

[0061] As described above, according to the present invention, the sliding surface coated with the coating layer is made smooth to prevent the coating layer from being damaged, and the yield and life of the vacuum capacitor and the vacuum valve are reduced. I was able to improve it.

Brief Description of Drawings

FIG. 1 is an enlarged cross-sectional view showing an adjustment nut and an adjustment screw of the first embodiment.

[Fig. 2] Life characteristics when using the adjusting nut and adjusting screw used in Fig. 1.

FIG. 3 is a cross-sectional view of a vacuum capacitor.

圆 4] An enlarged view of the maximum capacitance adjustment section.

FIG. 5 is an enlarged cross-sectional view when an adjusting nut and an adjusting screw according to a third embodiment of the present invention are combined.

FIG. 6 is a cross-sectional view illustrating an operation for making the first high-hardness coating layer on the adjustment screw side a smooth surface according to the third embodiment of the present invention.

FIG. 7 is a cross-sectional view of the first high-hardness coating layer made smooth according to FIG.

Explanation of symbols

[0063] 1 ... Guide pin

2 ... Moveable lead

32

32a ... Screwing

32x… Moving side thread groove

32y ... Protrusions

33 ··· Adjustment nut

33a… large diameter part b ... Step

c --- fc

χ ... thread groove

... Bearing part

... Maximum capacitance adjustment part ... Adjustment screw

... 1st high hardness coating layer ... 2nd high hardness coating layer ... Fine particles

... smooth surface

Claims

The scope of the claims

A vacuum vessel having a fixed end plate on one end of the cylindrical portion and a movable end plate on the other end, and a plurality of concentric cylindrical electrode plates having different diameters are concentric with the fixed electrode mounting conductor in the vacuum vessel. A fixed electrode formed in a shape,

A movable electrode formed by concentrically attaching a plurality of cylindrical electrode plates having different diameters to the movable electrode mounting conductor so that the fixed electrode can be inserted / removed in a non-contact state between the cylindrical electrode plates;

A movable lead for moving the movable electrode in the axial direction of the cylindrical electrode plate from the outside of the movable side end plate of the vacuum vessel;

A bellows provided inside the movable side end plate on the outer peripheral side of the movable lead, and capable of moving the movable lead in a vacuum state;

A guide portion formed by a guide pin provided in the center of each of the opposing surfaces of the fixed electrode mounting conductor and the movable electrode mounting conductor, and a guide portion that is electrically insulated and slidably inserted. Comprises a vacuum capacitor,

A movable lead bolt is attached to the tip of the movable lead in the bellows in the axial direction, and the movable side end plate is provided with a screw receiving portion protruding into the bellows on the inner side, and a bearing is provided at the end. Provided,

The movable lead bolt is screwed into an adjustment nut supported by a bearing, and the capacitance of the capacitor is adjusted by rotating the adjustment nut. After adjusting the maximum capacitance value defined by operating the adjustment nut, a maximum capacitance adjustment means is provided to regulate the movement of the movable lead bolt toward the guide pin at this adjustment position.

This maximum capacitance adjusting means is provided with a screw hole at the tip of the movable lead bolt, and the adjusting nut is provided with a large diameter portion larger than the screw hole into which the movable lead bolt is screwed. In a vacuum capacitor in which an adjustment screw is inserted from and inserted into the screw hole at the tip of the movable lead bolt,

One of the adjusting screw and the adjusting nut is provided with a first high-hardness coating layer, and the other is provided with a second high-hardness coating layer.

[2] The first high-hardness coating layer is a titanium nitride coating or an electroless coating that retains slipperiness and hardness, and the second high-hardness coating layer is an electroless plating that retains slipperiness and hardness. 2. The vacuum capacitor according to claim 1, wherein a coating or a titanium nitride coating is applied.

[3] The vacuum capacitor according to [1], wherein only one of the first and second high-hardness coating layers is provided with an electroless plating coating that maintains slipperiness and hardness.

[4] A container having a fixed side end plate and a movable side end plate attached to both ends of the insulating cylinder, a fixed electrode provided on the fixed side end plate in the container, and a static electrode between the fixed electrode. A movable electrode arranged so as to form a capacitor; a movable electrode having a movable electrode at one end and a movable screw groove at the other end; and an electrode side between the movable conductor and the movable end plate And an adjustment nut having a thread groove screwed to a movable side thread groove outside the mouthpiece, and the adjustment nut is rotatably inserted, and the movable side end A vacuum capacitor in which the movable side conductor moves in a direction to increase or decrease the capacitance via the movable side thread groove when the adjustment nut is rotated. Coat the thread groove on either side of the nut with titanium nitride. The coating layer is formed with a coated microprojection, and the coating layer is harder than the hardness of titanium nitride. The coating layer is contacted with a member having a hardness to remove the microprojection, and the coating layer becomes a smooth surface. A vacuum capacitor characterized by that.

5. The vacuum capacitor according to claim 4, wherein the coating layer is harder than the hardness of titanium nitride, and fine particles having a hardness are sprayed on the coating layer to remove minute protrusions to make the coating layer a smooth surface. .

6. The vacuum capacitor according to claim 4, wherein the smooth surface is a smooth surface that does not cause a microprojection force damage when the movable conductor is rotated.

[7] The sliding surface of the movable conductor that moves while the movable conductor slides on the bearing portion is formed on a coating layer having fine protrusions coated with titanium nitride, and the coating layer has a hardness of titanium nitride. 5. The trueness according to claim 4, wherein the coating layer is brought into contact with a member having a harder hardness to remove minute protrusions, thereby making the coating layer a smooth surface. Empty capacitor.

A vacuum valve that houses a pair of electrodes in a vacuum vessel, extends the movable conductor from the bearing of the vacuum vessel to the outside from one side electrode, and moves the movable side conductor to open and close the one side electrode with the other side electrode In

A vacuum valve characterized in that, when the movable conductor slides with the bearing portion, the sliding surface of the movable conductor covered with a coating layer of titanium nitride is made smooth.