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WO2007069416A1 - Organic semiconductor material, organic semiconductor film, organic semiconductor device and organic thin film transistor - Google Patents

Organic semiconductor material, organic semiconductor film, organic semiconductor device and organic thin film transistor Download PDF

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Publication number
WO2007069416A1
WO2007069416A1 PCT/JP2006/322542 JP2006322542W WO2007069416A1 WO 2007069416 A1 WO2007069416 A1 WO 2007069416A1 JP 2006322542 W JP2006322542 W JP 2006322542W WO 2007069416 A1 WO2007069416 A1 WO 2007069416A1
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Prior art keywords
group
organic semiconductor
organic
ring
semiconductor material
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PCT/JP2006/322542
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French (fr)
Japanese (ja)
Inventor
Hidekane Ozeki
Rie Katakura
Yasushi Okubo
Original Assignee
Konica Minolta Holdings, Inc.
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Priority to JP2007550101A priority Critical patent/JPWO2007069416A1/en
Publication of WO2007069416A1 publication Critical patent/WO2007069416A1/en

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/649Aromatic compounds comprising a hetero atom
    • H10K85/657Polycyclic condensed heteroaromatic hydrocarbons
    • H10K85/6576Polycyclic condensed heteroaromatic hydrocarbons comprising only sulfur in the heteroaromatic polycondensed ring system, e.g. benzothiophene
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462Insulated gate field-effect transistors [IGFETs]
    • H10K10/484Insulated gate field-effect transistors [IGFETs] characterised by the channel regions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10Organic polymers or oligomers
    • H10K85/111Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10Organic polymers or oligomers
    • H10K85/111Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H10K85/113Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene

Definitions

  • Organic semiconductor materials organic semiconductor films, organic semiconductor devices, and organic thin film transistors
  • the present invention relates to an organic semiconductor material, an organic semiconductor film, an organic semiconductor device, and an organic thin film transistor.
  • a display medium is formed by using elements utilizing liquid crystal, organic EL (organic electoluminescence), electrophoresis, or the like.
  • a technology using an active drive element (TFT element) as an image drive element has become mainstream to ensure uniformity of screen brightness, screen rewriting speed, and the like!
  • TFT element active drive element
  • these TFT elements are formed on a glass substrate, and liquid crystal, organic EL elements, etc. are sealed.
  • TFT elements such as a—Si (amorphous silicon) and p—Si (polysilicon) can be mainly used for TFT elements, and these S ⁇ conductors (and metal films as required).
  • the TFT element is manufactured by forming a multi-layered structure and sequentially forming source, drain, and gate electrodes on the substrate. The production of such TFT elements usually requires sputtering and other vacuum-based manufacturing processes.
  • the substrate material is limited to a material that can withstand the process temperature. Become. For this reason, in practice, glass must be used, and when the above-mentioned electronic paper or digital paper! /, And a thin display using such a conventionally known TFT element are used, the display Will be heavy and inflexible, and may be broken by the impact of a drop.
  • organic semiconductor materials have been energetically advanced in recent years as an organic compound having a high charge transporting property. These compounds are reported in numerous papers such as organic laser oscillators as discussed in Non-Patent Document 1, etc., as well as, for example, Non-Patent Document 2, in addition to charge transport materials for organic EL devices. Applications to organic thin film transistor devices (organic TFT devices) are expected! If these organic semiconductor devices can be realized, it is possible to obtain a semiconductor that can be made into a solution by making the manufacturing process relatively low, vacuuming at a temperature, simplifying the manufacturing process by low-pressure deposition, and further improving the molecular structure appropriately. Production by printing methods including inkjet method by converting organic semiconductor solution into ink is also considered.
  • a TFT element may be formed on the transparent resin substrate. If a TFT element is formed on a transparent resin substrate and the display material can be driven by the TFT element, the display will be lighter and more flexible than conventional ones, and will not crack even if dropped (or (It is difficult to break)).
  • the acenes such as pentacene and tetracene have been studied so far (see, for example, Patent Document 1) and phthalocyanines including lead phthalocyanine.
  • Low molecular weight compounds such as perylene and its tetracarboxylic acid derivatives (see, for example, Patent Document 2), and aromatic oligomers typically represented by thiophene hexamer called oc-chenyl or sexithiophene (for example, see Patent Document 3) ), Naphthalene, anthracene and a compound in which a 5-membered aromatic heterocyclic ring is condensed symmetrically (for example, see Patent Document 4), modified oligo and polydithienopyridine (for example, see Patent Document 5), and polythiophene.
  • Patent Document 2 Low molecular weight compounds such as perylene and its tetracarboxylic acid derivatives
  • aromatic oligomers typically represented by thiophene hexamer called oc-chenyl or sexithiophene (for example, see Patent Document 3)
  • Polyethylene biylene, poly-p-phenylene biylene, and other conjugated polymers A material exhibiting sufficient carrier mobility / ONZOFF ratio while maintaining sufficient solubility in a solvent that is only possible with various types of compounds (for example, see Non-Patent Documents 1 to 3) has been found. ,.
  • Non-Patent Document 4 Crystals are produced by vapor phase epitaxy, and films cast by solution casting are amorphous, and sufficient mobility is not obtained.
  • Patent Document 1 Japanese Patent Laid-Open No. 5-55568
  • Patent Document 2 JP-A-5-190877
  • Patent Document 3 JP-A-8-264805
  • Patent Document 4 JP-A-11-195790
  • Patent Document 5 Japanese Patent Laid-Open No. 2003-155289
  • Patent Document 6 Pamphlet of International Publication No. 03Z016599
  • Patent Document 7 U.S. Pat.No. 6690029B1
  • Non-patent literature 1 Science magazine 289 ⁇ , 599 pages (2000)
  • Non-patent literature 2 Nature magazine 403 ⁇ , 521 pages (2000)
  • Non-patent literature 3 Advanced Material magazine, 2002, 2nd
  • Non-Patent Document 4 Sci R Xe Ince, vol. 303 (2004), p. 1644
  • Non-Patent Document 5 Org. Lett., Vol. 4 (2002), p. 15
  • Non-Patent Document 6 J. Am. Chem. Soc., Vol. 127 (2005), p. 4986
  • Non-Patent Document 7 Org. Lett., Vol. 7 (2005), p. 3163
  • An object of the present invention is an organic semiconductor material that is manufactured by a simple process, has good characteristics as a transistor, is stable against oxygen in the air, and sufficiently suppresses deterioration over time.
  • Organic semiconductor films, organic semiconductor devices and organic thin film transistors are used as a simple process.
  • X represents Ge or Sn.
  • Y represents a mother nucleus or fullerene mother nucleus having at least one heterocycle.
  • R to R each represents a hydrogen atom or a substituent.
  • X represents Ge or Sn.
  • R to R each represents a hydrogen atom or a substituent, and Z
  • -Z represents an aromatic heterocyclic group.
  • nl and n2 represent an integer of 0 to 3.
  • R ⁇ R ⁇ represents an alkyl group or a cycloalkyl group
  • the organic semiconductor material according to any one of 1 to 3.
  • an organic semiconductor material that is manufactured by a simple process, has good characteristics as a transistor, and further suppresses deterioration over time, an organic semiconductor film using the organic semiconductor material, an organic semiconductor device, and an organic thin film transistor are provided.
  • an organic semiconductor film using the organic semiconductor material, an organic semiconductor device, and an organic thin film transistor are provided.
  • FIG. 1 is a diagram showing a configuration example of an organic thin film transistor of the present invention.
  • FIG. 2 is an example of a schematic equivalent circuit diagram of the organic thin film transistor sheet of the present invention.
  • FIG. 3 is a schematic view showing an example of an organic EL element having a sealing structure.
  • FIG. 4 is a schematic diagram showing an example of a substrate having TFTs used in an organic EL element.
  • organic semiconductor material of the present invention an organic semiconductor material useful for thin film transistor applications is obtained by using a compound having a structure defined in any one of claims 1 to 7. be able to.
  • organic semiconductor film, organic semiconductor device, and organic thin film transistor (hereinafter, also referred to as organic TFT) of the present invention manufactured using the organic semiconductor material have excellent carrier mobility and good ONZOFF characteristics. It was found to be highly durable while exhibiting transistor characteristics.
  • the researchers of the present invention studied further improvement with reference to the above-mentioned known information, and as a result, the acene compound substituted with a silylethynyl group appeared to be substituted with an alkyl group, an aryl group, or the like. It was confirmed that it has improved oxygen stability compared to nacene compounds.
  • Non-Patent Document 5 As an effect of substitution with a silylethynyl group, V in Non-Patent Document 5 described above, an aromatic ring in a crystal can be obtained by introducing a large substituent such as a silylethyl group into the peri-position of pentacene. However, when a crystal that only has a “Face to Face” structure was produced, a stable thin film was obtained only with a specific size of substituent that resulted in a stable crystal structure.
  • Non-Patent Document 6 “the introduction of the silylethyl group has made it possible to deepen the HOMO level by 300 mV or more with respect to the unsubstituted aromatic ring, so that stability against acid (oxygen) is obtained. There is a description of "Isn't it?"
  • the researchers of the present invention substituted the end of the ethynyl group with various metals.
  • the crystallinity was better than when Si was used. It was discovered that the stability of the acid was greatly improved.
  • the organic semiconductor material of the present invention will be described.
  • the organic semiconductor material of the present invention has a structure represented by the following general formula (1).
  • the partial structures excluding Y from the structure represented by the general formula (1) are each a germylethynyl group.
  • Y represents a mother nucleus having at least one heterocycle or a fullerene mother nucleus.
  • the heterocycle may be a single ring or may be contained in a condensed ring, and the heterocycle is preferably an aromatic heterocycle.
  • examples of the substituent represented by R to R include an alkyl group.
  • cycloalkyl group (For example, methyl group, ethyl group, propyl group, isopropyl group, tert-butyl group, pentyl group, hexyl group, octyl group, dodecyl group, tridecyl group, tetradecyl group, pentadecyl group, etc.), cycloalkyl group ( For example, cyclopentyl group, cyclohexyl group, etc.), alkenyl group (for example, bur group, allyl group, etc.), alkyl group (for example, ethul group, propargyl group, etc.), aromatic hydrocarbon group (aromatic group) Also referred to as carbocyclic group, aryl group, etc.
  • acyl group for example, acetyl group, ethylcarbonyl group, propylcarbon group, pentylcarbonyl group, cyclohexylcarboxyl group.
  • octylcarbol group 2-ethylhexylcarbol group, dodecylcarpol group, phenolcarol group, naphthylcarbol group, pyridylcarbol group, etc.
  • acyloxy group for example, acetylyloxy group
  • Ethylcarbonyloxy group butylcarbonyloxy group
  • octylcarbonyloxy group dodecylcarbonyloxy group, phenylcarbonyloxy group, etc.
  • amide group for example, methylcarbolamino group, ethylcarbo- group) Luamino group, dimethyl carbolumino group, propyl carbolumino group, pentyl carbolumino group, cyclohexyl Lucacarbomino group, 2-ethylhexylcarbolumino group, octylcarbolumino group, dodecy Rucarbo-
  • the compound having the structure represented by the general formula (1) is not particularly limited, but is a compound containing a substituted or unsubstituted aromatic hydrocarbon ring or a substituted or unsubstituted aromatic heterocycle.
  • aromatic hydrocarbon rings include benzene ring, biphenyl ring, naphthalene ring, azulene ring, anthracene ring, phenanthrene ring, pyrene ring, tali Sen ring, naphthacene ring, triphenylene ring, o-terphel ring, m-terphel ring, p terphel ring, acenaphthene ring, coronene ring, fluorene ring, fluoranthrene ring, naphthacene ring, pentacene ring Perylene ring, pentaphen ring, picene ring, pyrene ring, pyranthrene ring, pyr
  • Aromatic heterocycles include furan ring, thiophene ring, pyridine ring, pyridazine ring, pyrimidine ring, pyrazine ring, triazine ring, benzimidazole ring, oxadiazole ring, triazole ring, imidazole ring, pyrazole ring, thiazole ring, indole ring.
  • Benzimidazole ring is a benzimidazole ring, benzothiazole ring, benzoxazole ring, quinoxaline ring, quinazoline ring, phthalazine ring, force rubazole ring, carboline ring, and at least one carbon atom of the hydrocarbon ring constituting the carboline ring is a nitrogen atom A ring that is substituted!
  • a compound having a structure represented by the general formula (2) is more preferable.
  • examples of the aromatic heterocycle represented by Z to Z include a furan ring,
  • Thiophene ring pyridine ring, pyridazine ring, pyrimidine ring, pyrazine ring, triazine ring, benzoimidazole ring, oxadiazole ring, triazole ring, imidazole ring, pyrazole ring, thiazole ring, indole ring, benzimidazole ring, benzothiazole ring, benzothiazole ring Examples include a ring in which at least one carbon atom of a hydrocarbon ring constituting a zoxazole ring, quinoxaline ring, quinazoline ring, phthalazine ring, force rubazole ring, force ruporin ring, or carboline ring is further substituted with a nitrogen atom. . Of these, a thiophene ring is preferred. These aromatic heterocycles may be unsubstituted or have a substituent.
  • nl and n2 are preferably both forces nl and n2 representing an integer of 0 to 3.
  • the precursor which may contain a precursor of a compound having the structure represented by the general formula (1) relating to the organic semiconductor material of the present invention is defined by energy application or chemical treatment.
  • an aromatic ring A force that includes a compound in which a part of an aromatic hydrocarbon ring or aromatic heterocycle is oxidized with oxygen is not limited thereto.
  • Exemplified compound 19 was synthesized according to the following scheme.
  • organic semiconductor film, organic semiconductor device, and organic thin film TFT (organic thin film transistor) of the present invention will be described.
  • an organic semiconductor device and an organic thin film transistor that are driven well can be provided.
  • An organic thin film transistor has a source electrode and a drain electrode connected with an organic semiconductor as a semiconductor layer on a support, a top gate type having a gate electrode on the gate electrode via a gate insulating layer, and a support.
  • a bottom gate type having a gate electrode and having a source electrode and a drain electrode connected by an organic semiconductor through a gate insulating layer.
  • the organic semiconductor material of the present invention can be installed on a substrate by vacuum deposition.
  • the solution prepared by dissolving in an appropriate solvent and adding additives as necessary is preferably placed on the substrate by cast coating, spin coating, printing, ink jet method, abrasion method or the like.
  • the solvent for dissolving the organic semiconductor material of the present invention dissolves the organic semiconductor material.
  • a chain ether solvent such as dimethyl ether or diisopropyl ether, a cyclic ether solvent such as tetrahydrofuran or dioxane, Ketone solvents such as acetone methyl ketone, alkyl halide solvents such as chloroform and 1,2-dichloroethane, aromatics such as toluene, o-dichlorobenzene, nitrobenzene, and m-talezole.
  • Solvent N-methylpyrrolidone, disulfur carbon, and the like.
  • a solvent containing a non-halogen solvent is preferably a non-halogen solvent.
  • the organic semiconductor material of the present invention for the semiconductor layer as described above.
  • the semiconductor layer is preferably formed by applying a solution or dispersion containing these organic semiconductor materials.
  • the solvent that dissolves the organic semiconductor material is preferably composed of a non-halogen solvent that is preferably a solvent containing the non-halogen solvent.
  • the material for forming the source electrode, the drain electrode, and the gate electrode is not particularly limited as long as it is a conductive material.
  • conductive polymers whose conductivity has been improved by doping or the like, for example, conductive polyarlin, conductive polypyrrole, conductive polythiophene, a complex of polyethylene dioxythiophene and polystyrene sulfonic acid, etc. are also suitably used. . Of these, those having low electrical resistance on the contact surface with the semiconductor layer are preferred.
  • a method for forming an electrode a method for forming an electrode using a known photolithographic method or a lift-off method using a conductive thin film formed by a method such as vapor deposition or sputtering using the above as a raw material, aluminum, copper, or the like
  • a method of etching on a metal foil using a resist by thermal transfer, ink jet or the like.
  • the conductive polymer solution or dispersion, or the conductive fine particle dispersion may be directly patterned by inkjet, or may be formed from the coating film by lithography, laser abrasion, or the like.
  • a method of patterning an ink containing a conductive polymer or conductive fine particles, a conductive paste, or the like by a printing method such as relief printing, intaglio printing, planographic printing, or screen printing can also be used.
  • an inorganic oxide film having a high relative dielectric constant is preferable.
  • inorganic oxides include silicon oxide, aluminum oxide, tantalum oxide, titanium oxide, tin oxide, vanadium oxide, barium strontium titanate, barium zirconate titanate, lead zirconate titanate, titanate Examples include lead lanthanum, strontium titanate, barium titanate, barium magnesium fluoride, bismuth titanate, strontium bismuth titanate, strontium bismuth tantanoate, bismuth tantalate niobate, and trioxide yttrium.
  • silicon oxide, acid aluminum, acid tantalum, and acid titanium Inorganic nitrides such as silicon nitride and aluminum nitride can also be suitably used.
  • Examples of the method for forming the film include a vacuum deposition method, a molecular beam epitaxy growth method, an ion cluster beam method, a low energy ion beam method, an ion plating method, a CVD method, a sputtering method, and an atmospheric pressure plasma method. Dry process, spray coating method, spin coating method, blade coating method, dip coating method, casting method, roll coating method, bar coating method, die coating method, and other methods by patterning such as printing and inkjet Etc., and can be used depending on the material.
  • the wet process includes a method of applying and drying a liquid in which fine particles of inorganic oxide are dispersed in an arbitrary organic solvent or water using a dispersion aid such as a surfactant as necessary, or an oxide precursor.
  • a so-called sol-gel method in which a solution of a body, for example, an alkoxide body is applied and dried is used.
  • the atmospheric pressure plasma method and the sol-gel method are preferable.
  • a method for forming an insulating film by plasma film formation under atmospheric pressure is atmospheric pressure or atmospheric pressure.
  • the method is described in JP-A-11-61406, JP-A-11-133205, JP2000- No. 121804, No. 2000-147209, No. 2000-185362, etc. (hereinafter also referred to as atmospheric pressure plasma method).
  • atmospheric pressure plasma method As a result, a highly functional thin film can be formed with high productivity.
  • organic compound film polyimide, polyamide, polyester, polyacrylate, photo-radical polymerization system, photopower thione polymerization system photocurable resin, or a copolymer containing an acrylonitrile component, polybutanol, Polybulal alcohol, novolac resin, cyanoethyl pullulan and the like can also be used.
  • the wet process is preferred as a method for forming the organic compound film.
  • An inorganic oxide film and an organic oxide film can be laminated and used together.
  • the film thickness of these insulating films is generally 5011111 to 3111, preferably 100 nm to l ⁇ m.
  • the support is composed of glass or a flexible resin sheet, and for example, a plastic film can be used as the sheet.
  • the plastic film include polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), polyetherimide, polyetheretherketone, polyethylene-sulfuride, polyarylate, polyimide, polycarbonate ( PC), cellulose triacetate (TAC), and cellulose acetate propionate (CAP).
  • PET polyethylene terephthalate
  • PEN polyethylene naphthalate
  • PES polyethersulfone
  • polyetherimide polyetheretherketone
  • polyethylene-sulfuride polyarylate
  • PC polycarbonate
  • TAC cellulose triacetate
  • CAP cellulose acetate propionate
  • FIG. 1 is a diagram showing a configuration example of an organic thin film transistor of the present invention.
  • a source electrode 2 and a drain electrode 3 are formed on a support 6 with a metal foil or the like, an organic semiconductor layer 1 made of the organic semiconductor material of the present invention is formed between the two electrodes, and the organic semiconductor layer 1 is formed thereon.
  • An insulating layer 5 is formed, and further a gate electrode 4 is formed thereon to form an organic thin film transistor.
  • B) shows the organic semiconductor layer 1 formed between the electrodes in (a). The electrode is formed so as to cover the entire surface of the electrode and the support.
  • C shows that the organic semiconductor layer 1 is first formed on the support 6 by using a coating method or the like, and then the source electrode 2, the drain electrode 3, the insulating layer 5, and the gate electrode 4 are formed.
  • FIG. 6D after forming the gate electrode 4 with a metal foil or the like on the support 6, the insulating layer 5 is formed, and the source electrode 2 and the drain electrode 3 are formed with the metal foil or the like thereon. Then, an organic semiconductor layer 1 formed of the organic semiconductor material of the present invention is formed between the electrodes.
  • Other configurations such as shown in (e) and (f) of FIG.
  • FIG. 2 is a diagram showing an example of a schematic equivalent circuit diagram of an organic thin film transistor sheet.
  • the organic thin film transistor sheet 10 has a large number of organic thin film transistors 11 arranged in a matrix. 7 is a gate bus line of each organic thin film transistor 11, and 8 is a source bus line of each organic thin film transistor 11.
  • An output element 12 is connected to the source electrode of each organic thin film transistor 11, and this output 12 is, for example, a liquid crystal, an electrophoretic element or the like, and constitutes a pixel in the display device.
  • the pixel electrode may be used as the input electrode of the photosensor.
  • the liquid crystal is shown as an output element in an equivalent circuit having resistance and capacitor power.
  • 13 is a storage capacitor
  • 14 is a vertical drive circuit
  • 15 is a horizontal drive circuit.
  • a 2000 A thick thermal oxide film was formed on a Si wafer with a specific resistance of 0.01 ⁇ 'cm as the gate electrode to form a gate insulating layer, and then surface treatment with octadecyltrichlorosilane was performed. Apply a solution of Comparative Compound (2) with a mouth-opening solution using an applicator and dry naturally to form a cast film (thickness 50 nm), and then at 50 ° C for 30 minutes in a nitrogen atmosphere. Heat treatment was applied.
  • Organic TFT elements 1 and 3 to 5 were produced in the same manner except that the comparative compound (2) was changed to comparative compounds (1) and (3) to (5), respectively, in the production of the organic TFT element 2.
  • the organic thin film transistor elements 6 to 13 were produced in the same manner except that the organic TFT material of the present invention shown in Table 1 was changed. did.
  • the carrier mobility and the ONZOFF ratio of each element immediately after fabrication and after standing for 1 month in the air were determined.
  • the saturation region force of the I-V characteristic is also obtained for the carrier mobility, and further, the drain bias is set to 50V, the gate bias is set to 50V and OV, and the ONZOFF ratio is calculated from the ratio of the drain current value. Asked.
  • the organic thin film transistor elements 6 to 13 of the present invention show excellent transistor characteristics even immediately after the production, compared with the comparative organic thin film transistor element produced using the comparative organic semiconductor material. It can also be seen that it has high durability with little deterioration with time.
  • An organic EL device using an organic thin film transistor will be described as an application example of an organic thin film transistor using the organic semiconductor material of the present invention.
  • the organic EL device was manufactured by referring to the method described in Nature, 395 ⁇ , pages 151 to 154, and a top emission type organic EL device having a sealing structure as shown in FIG.
  • 101 is a substrate
  • 102a is an anode
  • 102b is an organic EL layer (specifically, an electron transport layer, a light-emitting layer, a hole transport layer, etc. are included)
  • 102c is a cathode
  • the light emitting element 102 is formed by the organic EL layer 102b and the cathode 102c.
  • Reference numeral 103 denotes a sealing film.
  • the organic EL device of the present invention may be either a bottom emission type or a top emission type.
  • the organic EL device of the present invention and the organic thin film transistor of the present invention (here, the organic thin film of the present invention A transistor is used as a switching transistor, a driving transistor, etc.) to produce an active matrix light-emitting element.
  • the organic thin film of the present invention A transistor is used as a switching transistor, a driving transistor, etc.
  • an embodiment using a substrate on which a thin film transistor 602 may be formed is used.
  • a known TFT manufacturing method can be referred to for the TFT602 manufacturing method.
  • the TFT may be a conventionally known top gate type TFT or a bottom gate type TFT.
  • the organic EL device fabricated above showed good emission characteristics in various emission modes such as single color, full color, and white.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Thin Film Transistor (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

Disclosed are an organic semiconductor material, organic semiconductor film, organic semiconductor device and organic thin film transistor having high mobility and excellent durability. Specifically disclosed is an organic semiconductor material characterized by having a structure represented by the following general formula (1). (In the formula, X represents Ge or Sn; Y represents a parent nucleus having at least one heterocycle or a fullerene parent nucleus; and R1-R3 respectively represent a hydrogen atom or a substituent.)

Description

明 細 書  Specification
有機半導体材料、有機半導体膜、有機半導体デバイス及び有機薄膜トラ ンジスタ  Organic semiconductor materials, organic semiconductor films, organic semiconductor devices, and organic thin film transistors
技術分野  Technical field
[0001] 本発明は、有機半導体材料、有機半導体膜、有機半導体デバイス及び有機薄膜ト ランジスタに関する。  The present invention relates to an organic semiconductor material, an organic semiconductor film, an organic semiconductor device, and an organic thin film transistor.
背景技術  Background art
[0002] 情報端末の普及に伴い、コンピュータ用のディスプレイとしてフラットパネルディスプ レイに対するニーズが高まっている。また、さらに情報化の進展に伴い、従来、紙媒 体で提供されていた情報が電子化される機会が増え、薄くて軽い、手軽に持ち運び が可能なモパイル用表示媒体として、電子ペーパーある 、はデジタルペーパーへの ニーズも高まりつつある。  With the widespread use of information terminals, there is an increasing need for flat panel displays as computer displays. In addition, with the progress of computerization, information that has been provided in paper media has been increasingly digitized, and electronic paper is a display media for mopile that is thin, light, and easy to carry. There is a growing need for digital paper.
[0003] 一般に平板型のディスプレイ装置にぉ 、ては、液晶、有機 EL (有機エレクト口ルミ ネッセンス)、電気泳動等を利用した素子を用いて表示媒体を形成している。また、こ うした表示媒体では画面輝度の均一性や画面書き換え速度等を確保するために、 画像駆動素子としてアクティブ駆動素子 (TFT素子)を用いる技術が主流になって!/ヽ る。例えば、通常のコンピュータディスプレイではガラス基板上にこれら TFT素子を形 成し、液晶、有機 EL素子等が封止されている。  [0003] Generally, in a flat display device, a display medium is formed by using elements utilizing liquid crystal, organic EL (organic electoluminescence), electrophoresis, or the like. In such display media, a technology using an active drive element (TFT element) as an image drive element has become mainstream to ensure uniformity of screen brightness, screen rewriting speed, and the like! For example, in an ordinary computer display, these TFT elements are formed on a glass substrate, and liquid crystal, organic EL elements, etc. are sealed.
[0004] ここで TFT素子には主に a— Si (アモルファスシリコン)、 p— Si (ポリシリコン)等の半 導体を用いることができ、これらの S泮導体 (必要に応じて金属膜も)を多層化し、ソ ース、ドレイン、ゲート電極を基板上に順次形成していくことで TFT素子が製造される 。こうした TFT素子の製造には通常、スパッタリング、その他の真空系の製造プロセス が必要とされる。  Here, semiconductors such as a—Si (amorphous silicon) and p—Si (polysilicon) can be mainly used for TFT elements, and these S 泮 conductors (and metal films as required). The TFT element is manufactured by forming a multi-layered structure and sequentially forming source, drain, and gate electrodes on the substrate. The production of such TFT elements usually requires sputtering and other vacuum-based manufacturing processes.
[0005] し力しながら、このような TFT素子の製造では、真空チャンバ一を含む真空系の製 造プロセスを何度も繰り返して各層を形成せざるを得ず、装置コスト、ランニングコスト が非常に膨大なものとなっていた。例えば、 TFT素子では、通常それぞれの層の形 成のために真空蒸着、ドープ、フォトリソグラフ、現像等の工程を何度も繰り返す必要 があり、何十もの工程を経て素子を基板上に形成している。スイッチング動作の要と なる半導体部分に関しても、 p型、 n型等、複数種類の半導体層を積層している。こう した従来の Si半導体による製造方法ではディスプレイ画面の大型化のニーズに対し 、真空チャンバ一等の製造装置の大幅な設計変更が必要とされる等、設備の変更が 容易ではない。 [0005] However, in the manufacture of such a TFT element, the vacuum system manufacturing process including the vacuum chamber must be repeated many times to form each layer, resulting in extremely high equipment costs and running costs. It was huge. For example, in TFT devices, it is usually necessary to repeat the steps of vacuum deposition, dope, photolithography, development, etc. many times to form each layer. The device is formed on the substrate through several tens of steps. For the semiconductor portion that is the key to the switching operation, multiple types of semiconductor layers such as p-type and n-type are stacked. In such a conventional manufacturing method using Si semiconductors, it is not easy to change the equipment, for example, a design change of a manufacturing apparatus such as a vacuum chamber is required in response to the need for a large display screen.
[0006] また、このような従来からの Si材料を用いた TFT素子の形成には高い温度の工程 が含まれるため、基板材料には工程温度に耐える材料であると ヽぅ制限が加わること になる。このため実際上はガラスを用いざるをえず、先に述べた電子ペーパーあるい はデジタルペーパーと!/、つた薄型ディスプレイを、こうした従来知られた TFT素子を 利用して構成した場合、そのディスプレイは重ぐ柔軟性に欠け、落下の衝撃で割れ る可能性のある製品となってしまう。ガラス基板上に TFT素子を形成することに起因 するこれらの特徴は、情報化の進展に伴う手軽な携行用薄型ディスプレイへの-一 ズを満たすにあたり望ましくな 、ものである。  [0006] In addition, since the formation of a TFT element using such a conventional Si material includes a process at a high temperature, the substrate material is limited to a material that can withstand the process temperature. Become. For this reason, in practice, glass must be used, and when the above-mentioned electronic paper or digital paper! /, And a thin display using such a conventionally known TFT element are used, the display Will be heavy and inflexible, and may be broken by the impact of a drop. These characteristics resulting from the formation of TFT elements on a glass substrate are desirable in satisfying the demand for easy-to-use thin displays for portable use as information technology advances.
[0007] 一方、近年にぉ ヽて高 ヽ電荷輸送性を有する有機化合物として、有機半導体材料 の研究が精力的に進められて 、る。これらの化合物は有機 EL素子用の電荷輸送性 材料のほか、例えば非特許文献 1等において論じられているような有機レーザー発 振素子や、例えば非特許文献 2等、多数の論文にて報告されている有機薄膜トラン ジスタ素子 (有機 TFT素子)への応用が期待されて!ヽる。これら有機半導体デバイス を実現できれば、比較的低 、温度での真空な 、し低圧蒸着による製造プロセスの簡 易化や、さらにはその分子構造を適切に改良することによって、溶液化できる半導体 を得る可能性があると考えられ、有機半導体溶液をインク化することによりインクジェ ット方式を含む印刷法による製造も考えられる。これらの低温プロセスによる製造は、 従来の Si系半導体材料については不可能と考えられてきたが、有機半導体を用い たデバイスにはその可能性があり、従って前述の基板耐熱性に関する制限が緩和さ れ、透明榭脂基板上にも例えば TFT素子を形成できる可能性がある。透明榭脂基 板上に TFT素子を形成し、その TFT素子により表示材料を駆動させることができれ ば、ディスプレイを従来のものよりも軽ぐ柔軟性に富み、落としても割れない (もしくは 非常に割れにくい)ディスプレイとすることができるであろう。 [0008] し力しながら、こうした TFT素子を実現するための有機半導体としてこれまでに検討 されてきたのは、ペンタセンゃテトラセンといったァセン類 (例えば、特許文献 1参照。 )、鉛フタロシアニンを含むフタロシアニン類、ペリレンやそのテトラカルボン酸誘導体 といった低分子化合物(例えば、特許文献 2参照。)や、 oc チェニールもしくはセク シチォフェンと呼ばれるチォフェン 6量体を代表例とする芳香族オリゴマー(例えば、 特許文献 3参照。)、ナフタレン、アントラセンに 5員の芳香族複素環が対称に縮合し た化合物(例えば、特許文献 4参照。)、モ入オリゴ及びポリジチエノピリジン (例えば 、特許文献 5参照。)、さらにはポリチォフェン、ポリチェ-レンビ-レン、ポリ p フ ェ-レンビ-レンと 、つた共役高分子等限られた種類の化合物 (例えば、非特許文献 1〜3参照。)でしかなぐ溶剤への十分な溶解性を保持しながら、十分なキャリア移 動度 · ONZOFF比を示す材料は見出されて 、な 、。 [0007] On the other hand, research on organic semiconductor materials has been energetically advanced in recent years as an organic compound having a high charge transporting property. These compounds are reported in numerous papers such as organic laser oscillators as discussed in Non-Patent Document 1, etc., as well as, for example, Non-Patent Document 2, in addition to charge transport materials for organic EL devices. Applications to organic thin film transistor devices (organic TFT devices) are expected! If these organic semiconductor devices can be realized, it is possible to obtain a semiconductor that can be made into a solution by making the manufacturing process relatively low, vacuuming at a temperature, simplifying the manufacturing process by low-pressure deposition, and further improving the molecular structure appropriately. Production by printing methods including inkjet method by converting organic semiconductor solution into ink is also considered. Manufacturing using these low-temperature processes has been considered impossible for conventional Si-based semiconductor materials, but there are possibilities for devices using organic semiconductors, and therefore the above-mentioned restrictions on substrate heat resistance are relaxed. For example, a TFT element may be formed on the transparent resin substrate. If a TFT element is formed on a transparent resin substrate and the display material can be driven by the TFT element, the display will be lighter and more flexible than conventional ones, and will not crack even if dropped (or (It is difficult to break)). [0008] However, as an organic semiconductor for realizing such a TFT element, the acenes such as pentacene and tetracene have been studied so far (see, for example, Patent Document 1) and phthalocyanines including lead phthalocyanine. , Low molecular weight compounds such as perylene and its tetracarboxylic acid derivatives (see, for example, Patent Document 2), and aromatic oligomers typically represented by thiophene hexamer called oc-chenyl or sexithiophene (for example, see Patent Document 3) ), Naphthalene, anthracene and a compound in which a 5-membered aromatic heterocyclic ring is condensed symmetrically (for example, see Patent Document 4), modified oligo and polydithienopyridine (for example, see Patent Document 5), and polythiophene. Polyethylene biylene, poly-p-phenylene biylene, and other conjugated polymers A material exhibiting sufficient carrier mobility / ONZOFF ratio while maintaining sufficient solubility in a solvent that is only possible with various types of compounds (for example, see Non-Patent Documents 1 to 3) has been found. ,.
[0009] 最近、溶解性の高!、ァセン類であるルブレンの単結晶が非常に高 、移動度を有す ることが報告されているが (非特許文献 4参照。)、このような単結晶は気相成長法で 作製したものであり、溶液キャストで製膜した膜はアモルファスであり、十分な移動度 は得られていない。  [0009] Recently, it has been reported that a single crystal of rubrene, which is highly soluble and acene, has very high mobility (see Non-Patent Document 4). Crystals are produced by vapor phase epitaxy, and films cast by solution casting are amorphous, and sufficient mobility is not obtained.
[0010] また、真空蒸着によって高いキャリア移動度を有する化合物であるペンタセンに官 能基を付与した化合物等も開示され、溶液塗布によって比較的良好なキャリア移動 度が得られるとの報告もなされている(例えば、特許文献 6参照。 )0 [0010] In addition, a compound in which a functional group is added to pentacene, which is a compound having high carrier mobility by vacuum deposition, is disclosed, and it has been reported that relatively good carrier mobility can be obtained by solution coating. (For example, refer to Patent Document 6.) 0
[0011] しかし、ルブレンやペンタセン等のァセン系の化合物は空気によって容易に酸ィ匕さ れてエンドパーォキシドと呼ばれる酸化体に転化し、電界効果トランジスタとしての性 能が大きく劣化してしまうことが知られており、溶液での保存安定性や塗布膜の安定 性につ 、ては 、まだ解決すべき課題が残されて!/、る。  However, acene-based compounds such as rubrene and pentacene are easily oxidized by air and converted into an oxidant called endperoxide, which greatly deteriorates the performance as a field effect transistor. It is known that there are still problems to be solved regarding the storage stability in solution and the stability of the coating film! /
[0012] このような有機半導体素子の経時安定性については、例えば、特開 2003— 2925 88号公報、米国特許出願公開第 2003Z136958号明細書、同 2003Z160230 号明細書、同 2003Z164495号明細書において、「マイクロエレクトロニクス用の集 積回路論理素子にポリマー TFTを用いると、その機械的耐久性が大きく向上し、そ の使用可能寿命が長くなる。  [0012] With regard to the stability over time of such an organic semiconductor element, for example, in JP-A 2003-292588, US Patent Application Publication No. 2003Z136958, 2003Z160230, 2003Z164495, “The use of polymer TFTs in integrated circuit logic elements for microelectronics greatly improves their mechanical durability and extends their useful life.
[0013] しかし、半導体ポリチォフェン類の多くは、周囲の酸素によって酸ィ匕的にドープされ 、導電率が増大してしまうため空気に触れると安定ではないと考えられる。この結果、 これらの材料力 製造したデバイスのオフ電流は大きくなり、そのため電流オン zォ フ比は小さくなる。従ってこれらの材料の多くは、材料加工とデバイス製造の間に環 境酸素を排除して酸ィ匕的ドーピングを起こさない、あるいは最小とするよう厳重に注 意しなければならない。この予防措置は製造コストを押し上げるため、特に大面積デ バイスのための、アモルファスシリコン技術に代わる経済的な技術としてのある種のポ リマー TFTの魅力が削がれてしまう。これら及びその他の欠点は、本発明の実施の 形態において回避され、あるいは最小となる。従って、酸素に対して強い対抗性を有 し、比較的高 、電流 ONZOFF比を示すエレクトロニックデバイスが望まれて 、る」と の記載があるように、有機半導体材料が経時で劣化することを!ヽかに防ぐかと!ヽつた 課題が、実用化を行う上での大きな課題となってきている。 [0013] However, many of the semiconductor polythiophenes are acidicly doped with ambient oxygen. It is considered unstable when exposed to air because the conductivity increases. As a result, the off-state currents of these device-powered devices increase, and therefore the current on-zoff ratio decreases. Therefore, many of these materials must be taken with great care to eliminate environmental oxygen and eliminate or minimize environmental oxygen during material processing and device fabrication. This precautionary measure raises the cost of manufacturing, and the appeal of certain polymer TFTs as an alternative to amorphous silicon technology, especially for large area devices, is diminished. These and other disadvantages are avoided or minimized in embodiments of the present invention. Therefore, there is a demand for an electronic device having a strong resistance to oxygen, a relatively high current ONZOFF ratio, '' and the organic semiconductor material will deteriorate over time! To prevent it much! The problem has become a major issue for practical application.
[0014] 酸化に対して比較的安定なァセン系化合物の例としては、ペンタセンの 6、 13位を シリルェチュル基で置換した一部の化合物が、塗布膜の安定性が良 、との報告があ る程度である(例えば、非特許文献 5、 6及び特許文献 7参照。 ) 0 [0014] As an example of an acene compound that is relatively stable against oxidation, it has been reported that some compounds in which the 6th and 13th positions of pentacene are substituted with silylethyl groups have good coating film stability. is the degree that (for example, non-patent document 5, 6 and Patent Document 7.) 0
[0015] し力しながら、これらの報告においては、酸ィ匕に対する安定性が向上したと定性的 な記載があるのみであり、 、まだ実用に耐えうる程度の安定性は得られて 、な 、。 [0015] However, in these reports, there is only a qualitative description that the stability to acid and soot has been improved, and the stability that can still withstand practical use is obtained. ,.
[0016] また、ペンタセンの 6、 13位をシリルェチュル基で置換した化合物のペンタセン母 核の一部をハロゲン原子やシァノ基などといった電子吸引性基で置換することで、化 合物の酸ィ匕還元電位を深くすることができると ヽつた試みもなされて ヽる(例えば、非 特許文献 7参照。)が、高移動度と素子の耐久性を兼ね備えた有機半導体材料はい まだ得られて 、な 、のが現状である。 [0016] Further, by substituting a part of the pentacene nucleus of a compound in which the 6th and 13th positions of pentacene are substituted with a silylethyl group with an electron-withdrawing group such as a halogen atom or a cyano group, the acid of the compound is reduced. Some attempts have been made to increase the reduction potential (see, for example, Non-Patent Document 7), but organic semiconductor materials that combine high mobility and device durability have not yet been obtained. ,is the current situation.
特許文献 1:特開平 5— 55568号公報  Patent Document 1: Japanese Patent Laid-Open No. 5-55568
特許文献 2:特開平 5 - 190877号公報  Patent Document 2: JP-A-5-190877
特許文献 3:特開平 8 - 264805号公報  Patent Document 3: JP-A-8-264805
特許文献 4:特開平 11— 195790号公報  Patent Document 4: JP-A-11-195790
特許文献 5 :特開 2003— 155289号公報  Patent Document 5: Japanese Patent Laid-Open No. 2003-155289
特許文献 6:国際公開第 03Z016599号パンフレット  Patent Document 6: Pamphlet of International Publication No. 03Z016599
特許文献 7 :米国特許第 6690029B1号明細書 非特許文献 1:『サイエンス』 (Science)誌 289卷、 599ページ(2000) 非特許文献 2:『ネイチヤー』 (Nature)誌 403卷、 521ページ(2000) Patent Document 7: U.S. Pat.No. 6690029B1 Non-patent literature 1: Science magazine 289 卷, 599 pages (2000) Non-patent literature 2: Nature magazine 403 卷, 521 pages (2000)
非特許般文献 3 :『アドバンスド 'マテリアル』(Advanced Material)誌、 2002年、第 2 Non-patent literature 3: Advanced Material magazine, 2002, 2nd
¾ Y ¾ Y
号、 99ページ  No., page 99
非特許文献 4 : Sci R Xe I- nce, vol. 303 (2004) , 1644ページ  Non-Patent Document 4: Sci R Xe Ince, vol. 303 (2004), p. 1644
1一  1
非特許文献 5 : Org. Lett. , vol. 4 (2002) , 15ページ  Non-Patent Document 5: Org. Lett., Vol. 4 (2002), p. 15
非特許文献 6 :J. Am. Chem. Soc. , vol. 127 (2005) , 4986ページ  Non-Patent Document 6: J. Am. Chem. Soc., Vol. 127 (2005), p. 4986
非特許文献 7 : Org. Lett. , vol. 7 (2005) , 3163ページ  Non-Patent Document 7: Org. Lett., Vol. 7 (2005), p. 3163
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0017] 本発明の目的は、簡単なプロセスで製造され、トランジスタとしての特性が良好であ り、さらに空気中の酸素に対して安定で経時劣化が十分抑制された有機半導体材料 、それを用いた有機半導体膜、有機半導体デバイス及び有機薄膜トランジスタを提 供することである。 [0017] An object of the present invention is an organic semiconductor material that is manufactured by a simple process, has good characteristics as a transistor, is stable against oxygen in the air, and sufficiently suppresses deterioration over time. Organic semiconductor films, organic semiconductor devices and organic thin film transistors.
課題を解決するための手段  Means for solving the problem
[0018] 本発明の上記目的は、下記の構成 1〜7により達成された。 [0018] The above object of the present invention has been achieved by the following configurations 1 to 7.
[0019] 1.下記一般式 (1)で表される構造であることを特徴とする有機半導体材料。 [0019] 1. An organic semiconductor material having a structure represented by the following general formula (1):
[0020] [化 1] [0020] [Chemical 1]
R3 R 3
[0021] 〔式中、 Xは Geまたは Snを表す。 Yは少なくとも Iつのへテロ環を有する母核またはフ ラーレン母核を表す。 R〜Rは、各々水素原子または置換基を表す。〕 [In the formula, X represents Ge or Sn. Y represents a mother nucleus or fullerene mother nucleus having at least one heterocycle. R to R each represents a hydrogen atom or a substituent. ]
I 3  I 3
2.前記一般式(I)で表される構造から Yを除いた部分構造を少なくとも 2つ有する ことを特徴とする前記 Iに記載の有機半導体材料。 [0022] 3.前記一般式(1)で表される構造が下記一般式 (2)で表されることを特徴とする前 記 1または 2に記載の有機半導体材料。 2. The organic semiconductor material according to I, wherein the organic semiconductor material has at least two partial structures obtained by removing Y from the structure represented by the general formula (I). [0022] 3. The organic semiconductor material as described in 1 or 2 above, wherein the structure represented by the general formula (1) is represented by the following general formula (2).
[0023] [化 2] 一般式 (2) [0023] [Chemical formula 2] General formula (2)
Figure imgf000008_0001
Figure imgf000008_0001
[0024] 〔式中、 Xは Geまたは Snを表す。 R〜Rは、各々水素原子または置換基を表し、 Z [Wherein, X represents Ge or Sn. R to R each represents a hydrogen atom or a substituent, and Z
4 9 1 4 9 1
〜Zは、芳香族複素環基を表す。 nl、 n2は、 0〜3の整数を表す。〕 -Z represents an aromatic heterocyclic group. nl and n2 represent an integer of 0 to 3. ]
2  2
4.前記 R〜R ί アルキル基またはシクロアルキル基を表すことを特徴とする前記  4. Said R ~ R ί represents an alkyl group or a cycloalkyl group,
1 9  1 9
1〜3のいずれか 1項に記載の有機半導体材料。  The organic semiconductor material according to any one of 1 to 3.
[0025] 5.前記 1〜4のいずれか 1項に記載の有機半導体材料を含有することを特徴とす る有機半導体膜。 [0025] 5. An organic semiconductor film comprising the organic semiconductor material according to any one of 1 to 4 above.
[0026] 6.前記 1〜4のいずれか 1項に記載の有機半導体材料を用いることを特徴とする有 機半導体デバイス。  [0026] 6. An organic semiconductor device using the organic semiconductor material according to any one of 1 to 4 above.
[0027] 7.前記 1〜4のいずれか 1項に記載の有機半導体材料を半導体層に用いることを 特徴とする有機薄膜トランジスタ。  [0027] 7. An organic thin film transistor, wherein the organic semiconductor material according to any one of 1 to 4 is used for a semiconductor layer.
発明の効果  The invention's effect
[0028] 本発明により、簡単なプロセスで製造され、トランジスタとしての特性が良好であり、 さらに経時劣化が抑えられた有機半導体材料、それを用いた有機半導体膜、有機半 導体デバイス及び有機薄膜トランジスタを提供することができた。 図面の簡単な説明 [0028] According to the present invention, an organic semiconductor material that is manufactured by a simple process, has good characteristics as a transistor, and further suppresses deterioration over time, an organic semiconductor film using the organic semiconductor material, an organic semiconductor device, and an organic thin film transistor are provided. Could be provided. Brief Description of Drawings
[0029] [図 1]本発明の有機薄膜トランジスタの構成例を示す図である。  [0029] FIG. 1 is a diagram showing a configuration example of an organic thin film transistor of the present invention.
[図 2]本発明の有機薄膜トランジスタシートの概略等価回路図の 1例である。  FIG. 2 is an example of a schematic equivalent circuit diagram of the organic thin film transistor sheet of the present invention.
[図 3]封止構造を有する有機 EL素子の一例を示す模式図である。  FIG. 3 is a schematic view showing an example of an organic EL element having a sealing structure.
[図 4]有機 EL素子に用レヽる、 TFTを有する基板の一例を示す模式図である 符号の説明  FIG. 4 is a schematic diagram showing an example of a substrate having TFTs used in an organic EL element.
[0030] 1 有機半導体層 [0030] 1 Organic semiconductor layer
2 ソース電極  2 Source electrode
3 ドレイン電極  3 Drain electrode
4 ゲート電極  4 Gate electrode
5 絶縁層  5 Insulation layer
6 支持体  6 Support
7 ゲートバスライン  7 Gate bus line
8 ソースノ スライン  8 Sourcenos line
10 有機薄膜トランジスタシート  10 Organic thin film transistor sheet
11 有機薄膜トランジスタ  11 Organic thin-film transistors
12 出力素子  12 Output element
13 蓄積コンデンサ  13 Storage capacitor
14 垂直駆動回路  14 Vertical drive circuit
15 水平駆動回路  15 Horizontal drive circuit
101、 201 基板  101, 201 substrate
102 有機 EL素子  102 organic EL devices
102a, 202 陽極  102a, 202 anode
102b 有機 EL層  102b OLED layer
102c, 204 陰極  102c, 204 cathode
103 封止膜  103 Sealing film
205 駆動用素子  205 Drive element
206 正孔輸送層 207 発光層 206 Hole transport layer 207 Light emitting layer
208 電子輸送層  208 Electron transport layer
601 基板  601 board
602 TFT  602 TFT
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0031] 本発明の有機半導体材料においては、請求の範囲第 1項乃至第 7項のいずれか 1 項に規定される構造を有する化合物を用いることにより、薄膜トランジスタ用途に有用 な有機半導体材料を得ることができる。また、該有機半導体材料を用いて作製した本 発明の有機半導体膜、有機半導体デバイス、有機薄膜トランジスタ (以下、有機 TFT ともいう)は、キャリア移動度が高ぐ良好な ONZOFF特性を示す等、優れたトランジ スタ特性を示しながら、且つ、高耐久性であることが判った。  In the organic semiconductor material of the present invention, an organic semiconductor material useful for thin film transistor applications is obtained by using a compound having a structure defined in any one of claims 1 to 7. be able to. In addition, the organic semiconductor film, organic semiconductor device, and organic thin film transistor (hereinafter, also referred to as organic TFT) of the present invention manufactured using the organic semiconductor material have excellent carrier mobility and good ONZOFF characteristics. It was found to be highly durable while exhibiting transistor characteristics.
[0032] 以下、本発明に係る各構成要素の詳細について説明する。  Hereinafter, details of each component according to the present invention will be described.
[0033] 上記課題について、上記公知情報を参考として本発明の研究者らがさらなる改良 を検討したところ、シリルェチニル基によって置換されたァセンィ匕合物は、アルキル 基、ァリール基等によって置換されたようなァセン系化合物と比べると、改良された酸 素安定性を有して 、ることが確認された。  [0033] With regard to the above problems, the researchers of the present invention studied further improvement with reference to the above-mentioned known information, and as a result, the acene compound substituted with a silylethynyl group appeared to be substituted with an alkyl group, an aryl group, or the like. It was confirmed that it has improved oxygen stability compared to nacene compounds.
[0034] シリルェチニル基によって置換することによる効果としては、前記非特許文献 5にお V、ては、ペンタセンのペリ位にシリルェチュル基のような大きな置換基を導入すること によって結晶中の芳香族環が "Face to Face"構造のみ力もなる結晶を作製したと ころ、安定な結晶構造となる特定の大きさの置換基の場合にのみ、安定な薄膜が得 られたとしている。  [0034] As an effect of substitution with a silylethynyl group, V in Non-Patent Document 5 described above, an aromatic ring in a crystal can be obtained by introducing a large substituent such as a silylethyl group into the peri-position of pentacene. However, when a crystal that only has a “Face to Face” structure was produced, a stable thin film was obtained only with a specific size of substituent that resulted in a stable crystal structure.
[0035] 前記非特許文献 6においては、「シリルェチュル基の導入によって無置換の芳香族 環に対して 300mV以上 HOMOレベルを深くすることができたために酸ィ匕(酸素)に 対する安定性が得られたのではな 、か」との記載がある。  [0035] According to Non-Patent Document 6, “the introduction of the silylethyl group has made it possible to deepen the HOMO level by 300 mV or more with respect to the unsubstituted aromatic ring, so that stability against acid (oxygen) is obtained. There is a description of "Isn't it?"
[0036] また、前記非特許文献 7に記載されているように、電子吸引性基によってペンタセン 母核を置換することによって酸ィ匕還元電位が深くなり、酸ィ匕安定性が付与されること が知られている。 [0036] Further, as described in Non-Patent Document 7, by substituting the pentacene mother nucleus with an electron-withdrawing group, the acid-reduction potential is deepened, and acid-acid stability is imparted. It has been known.
[0037] このように、ペンタセンのようなァセン系の化合物の酸ィ匕に対する安定性を向上さ せるためには、電子的な要因だけでなぐ立体的な要因の双方が関係していると推 測される。 [0037] As described above, the stability of the acene-based compound such as pentacene with respect to acid is improved. In order to achieve this, it is presumed that both three-dimensional factors, not just electronic factors, are involved.
[0038] このような知見を踏まえ本発明の研究者らは、ェチニル基の末端をさまざまな金属 を用いて置換したところ、 Ge、 Snを用いた時、 Siを用いた時より結晶性が良好である ことを発見し、酸ィ匕安定性も非常に向上することを発見するに至った。  [0038] Based on these findings, the researchers of the present invention substituted the end of the ethynyl group with various metals. When Ge and Sn were used, the crystallinity was better than when Si was used. It was discovered that the stability of the acid was greatly improved.
[0039] また、 Ge、 Snに結合するアルキル基などの置換基の長さや大きさを調節することに より、アントラジチォフェンだけでなぐ例えば、ポリチォフェン、オリゴチォフェン、フタ ロシアニン、フラーレン等他の有機半導体材料にも適用可能になり、溶解性を飛躍 的に向上させ、また結晶性、酸ィ匕安定性も良好であることを確認し、本発明を 完成するに至った。  [0039] Further, by adjusting the length and size of substituents such as alkyl groups bonded to Ge and Sn, it is possible to use only anthradithiophene, for example, polythiophene, oligothiophene, phthalocyanine, fullerene, etc. As a result, the present invention was completed by confirming that the solubility was drastically improved and the crystallinity and acidity stability were also good.
[0040] 《有機半導体材料》  [0040] << Organic semiconductor material >>
本発明の有機半導体材料について説明する。  The organic semiconductor material of the present invention will be described.
[0041] 《一般式 (1)で表される構造の化合物》 [0041] << Compound with structure represented by general formula (1) >>
本発明の有機半導体材料は、下記一般式 (1)で表される構造であることを特徴と する。  The organic semiconductor material of the present invention has a structure represented by the following general formula (1).
[0042] 前記一般式(1)で表される構造から Yを除く部分構造は、各々ゲルミルェチニル基 [0042] The partial structures excluding Y from the structure represented by the general formula (1) are each a germylethynyl group.
、スタニルェチ二ル基を表す。 Represents a stannylenyl group.
[0043] 一般式(1)において、 Yは少なくとも 1つのへテロ環を有する母核、またはフラーレ ン母核を表す。ここでへテロ環は単環でも縮合環中に含まれていても構わなぐへテ 口環としては芳香族複素環が好ま 、。 In general formula (1), Y represents a mother nucleus having at least one heterocycle or a fullerene mother nucleus. Here, the heterocycle may be a single ring or may be contained in a condensed ring, and the heterocycle is preferably an aromatic heterocycle.
[0044] 一般式(1)において、 R〜Rで各々表される置換基としては、例えば、アルキル基 In the general formula (1), examples of the substituent represented by R to R include an alkyl group.
1 3  13
(例えば、メチル基、ェチル基、プロピル基、イソプロピル基、 tert—ブチル基、ペン チル基、へキシル基、ォクチル基、ドデシル基、トリデシル基、テトラデシル基、ペンタ デシル基等)、シクロアルキル基 (例えば、シクロペンチル基、シクロへキシル基等)、 ァルケ-ル基 (例えば、ビュル基、ァリル基等)、アルキ-ル基 (例えば、ェチュル基、 プロパルギル基等)、芳香族炭化水素基 (芳香族炭素環基、ァリール基等ともいい、 例えば、フエ-ル基、 p—クロ口フエニル基、メシチル基、トリル基、キシリル基、ナフチ ル基、アントリル基、ァズレニル基、ァセナフテュル基、フルォレニル基、フエナントリ ル基、インデニル基、ピレニル基、ビフヱ-リル基等)、芳香族複素環基 (例えば、フリ ル基、チェニル基、ピリジル基、ピリダジ -ル基、ピリミジニル基、ピラジュル基、トリア ジニル基、イミダゾリル基、ピラゾリル基、チアゾリル基、キナゾリニル基、フタラジニル 基等)、複素環基 (例えば、ピロリジル基、イミダゾリジル基、モルホリル基、ォキサゾリ ジル基等)、アルコキシ基 (例えば、メトキシ基、エトキシ基、プロピルォキシ基、ペン チルォキシ基、へキシルォキシ基、ォクチルォキシ基、ドデシルォキシ基等)、シクロ アルコキシ基 (例えば、シクロペンチルォキシ基、シクロへキシルォキシ基等)、ァリー ルォキシ基 (例えば、フエノキシ基、ナフチルォキシ基等)、アルキルチオ基 (例えば、 メチルチオ基、ェチルチオ基、プロピルチオ基、ペンチルチオ基、へキシルチオ基、 ォクチルチオ基、ドデシルチオ基等)、シクロアルキルチオ基 (例えば、シクロペンチ ルチオ基、シクロへキシルチオ基等)、ァリールチオ基 (例えば、フエ二ルチオ基、ナ フチルチオ基等)、アルコキシカルボ-ル基(例えば、メチルォキシカルボ-ル基、ェ チルォキシカルボニル基、ブチルォキシカルボニル基、ォクチルォキシカルボニル 基、ドデシルォキシカルボニル基等)、ァリールォキシカルボ-ル基 (例えば、フエ- ルォキシカルボ-ル基、ナフチルォキシカルボ-ル基等)、スルファモイル基(例えば 、アミノスルホ -ル基、メチルアミノスルホ -ル基、ジメチルアミノスルホ -ル基、ブチ ルアミノスルホニル基、へキシルアミノスルホニル基、シクロへキシルアミノスルホニル 基、ォクチルアミノスルホ -ル基、ドデシルアミノスルホ-ル基、フエ-ルアミノスルホ(For example, methyl group, ethyl group, propyl group, isopropyl group, tert-butyl group, pentyl group, hexyl group, octyl group, dodecyl group, tridecyl group, tetradecyl group, pentadecyl group, etc.), cycloalkyl group ( For example, cyclopentyl group, cyclohexyl group, etc.), alkenyl group (for example, bur group, allyl group, etc.), alkyl group (for example, ethul group, propargyl group, etc.), aromatic hydrocarbon group (aromatic group) Also referred to as carbocyclic group, aryl group, etc. For example, phenyl group, p-chlorophenyl group, mesityl group, tolyl group, xylyl group, naphthyl group, anthryl group, azulenyl group, acenaphthyl group, fluorenyl group, phenanthryl group Group, indenyl group, pyrenyl group, bif ヱ -ryl group, etc.), aromatic heterocyclic group (for example, furyl group, chenyl group, pyridyl group, pyridazyl group, pyrimidinyl group, pyrazyl group, triazinyl group, imidazolyl group) Group, pyrazolyl group, thiazolyl group, quinazolinyl group, phthalazinyl group, etc.), heterocyclic group (eg, pyrrolidyl group, imidazolidyl group, morpholyl group, oxazolidyl group, etc.), alkoxy group (eg, methoxy group, ethoxy group, propyloxy group) , Pentyloxy, hexyloxy, octyloxy, dodecyloxy, etc.), cycloalkoxy (eg, cyclopentyloxy, cyclohexyloxy, etc.), aryloxy (eg, phenoxy, naphthyloxy, etc.), alkylthio Groups (e.g. methylthio, ethyl Group, propylthio group, pentylthio group, hexylthio group, octylthio group, dodecylthio group, etc.), cycloalkylthio group (eg, cyclopentylthio group, cyclohexylthio group, etc.), arylthio group (eg, phenylthio group, naphthylthio group, etc.) Etc.), alkoxy carbo yl groups (eg methyloxy carbo yl group, ethyloxy carbonyl group, butyloxy carbonyl group, octyloxy carbonyl group, dodecyloxy carbonyl group, etc.), arylo A xycarbonyl group (for example, a phenylcarboxyl group, a naphthyloxycarboxyl group, etc.), a sulfamoyl group (for example, an aminosulfol group, a methylaminosulfol group, a dimethylaminosulfol group, a butyrate) Ruaminosulfonyl group, hexylaminosulfonyl group, cyclohexylaminosulfo Group, O-lipped Le aminosulfonyl - group, dodecyl aminosulfonyl - group, Hue - Ruaminosuruho
-ル基、ナフチルアミノスルホ -ル基、 2—ピリジルアミノスルホ -ル基等)、ァシル基( 例えば、ァセチル基、ェチルカルボ-ル基、プロピルカルボ-ル基、ペンチルカルボ ニル基、シクロへキシルカルボ-ル基、ォクチルカルポ-ル基、 2—ェチルへキシル カルボ-ル基、ドデシルカルポ-ル基、フエ-ルカルポ-ル基、ナフチルカルボ-ル 基、ピリジルカルボ-ル基等)、ァシルォキシ基 (例えば、ァセチルォキシ基、ェチル カルボニルォキシ基、ブチルカルボニルォキシ基、ォクチルカルボニルォキシ基、ド デシルカルボニルォキシ基、フエ-ルカルポニルォキシ基等)、アミド基 (例えば、メチ ルカルボ-ルァミノ基、ェチルカルボ-ルァミノ基、ジメチルカルボ-ルァミノ基、プロ ピルカルボ-ルァミノ基、ペンチルカルボ-ルァミノ基、シクロへキシルカルボ-ルァ ミノ基、 2—ェチルへキシルカルボ-ルァミノ基、ォクチルカルボ-ルァミノ基、ドデシ ルカルボ-ルァミノ基、フエ-ルカルポ-ルァミノ基、ナフチルカルボ-ルァミノ基等) 、力ルバモイル基(例えば、ァミノカルボ-ル基、メチルァミノカルボ-ル基、ジメチル ァミノカルボ-ル基、プロピルアミノカルボ-ル基、ペンチルァミノカルボ-ル基、シク 口へキシルァミノカルボ-ル基、ォクチルァミノカルボ-ル基、 2—ェチルへキシルァ ミノカルボ-ル基、ドデシルァミノカルボ-ル基、フエ-ルァミノカルボ-ル基、ナフチ ルァミノカルボ-ル基、 2—ピリジルァミノカルボ-ル基等)、ウレイド基 (例えば、メチ ルゥレイド基、ェチルウレイド基、ペンチルゥレイド基、シクロへキシルウレイド基、オタ チルウレイド基、ドデシルウレイド基、フエニルゥレイド基、ナフチルウレイド基、 2—ピ リジルアミノウレイド基等)、スルフィエル基(例えば、メチルスルフィ-ル基、ェチルス ルフィ-ル基、ブチルスルフィ-ル基、シクロへキシルスルフィ-ル基、 2—ェチルへ キシルスルフィ-ル基、ドデシルスルフィ-ル基、フヱニルスルフィ-ル基、ナフチル スルフィエル基、 2—ピリジルスルフィエル基等)、アルキルスルホ -ル基(例えば、メ チルスルホ-ル基、ェチルスルホ -ル基、ブチルスルホ -ル基、シクロへキシルスル ホ-ル基、 2—ェチルへキシルスルホ -ル基、ドデシルスルホ -ル基等)、ァリールス ルホ -ル基(例えば、フエ-ルスルホ-ル基、ナフチルスルホ-ル基、 2—ピリジルス ルホ -ル基等)、アミノ基 (例えば、アミノ基、ェチルァミノ基、ジメチルァミノ基、プチ ルァミノ基、シクロペンチルァミノ基、 2—ェチルへキシルァミノ基、ドデシルァミノ基、 ァ-リノ基、ナフチルァミノ基、 2—ピリジルァミノ基等)、ハロゲン原子 (例えば、フッ素 原子、塩素原子、臭素原子等)、フッ化炭化水素基 (例えば、フルォロメチル基、トリ フルォロメチル基、ペンタフルォロェチル基、ペンタフルォロフエ-ル基等)、シァノ 基、シリル基 (例えば、トリメチルシリル基、トリイソプロビルシリル基、トリフエ-ルシリル 基、フエ-ルジェチルシリル基等)等が挙げられる。中でも、前記置換基はアルキル 基であることが好ましい。これらの置換基は上記の置換基によってさらに置換されて V、ても、複数が互いに結合して環を形成して 、てもよ!/、。 Group, naphthylaminosulfol group, 2-pyridylaminosulfol group, etc.), acyl group (for example, acetyl group, ethylcarbonyl group, propylcarbon group, pentylcarbonyl group, cyclohexylcarboxyl group). Group, octylcarbol group, 2-ethylhexylcarbol group, dodecylcarpol group, phenolcarol group, naphthylcarbol group, pyridylcarbol group, etc.), acyloxy group (for example, acetylyloxy group) , Ethylcarbonyloxy group, butylcarbonyloxy group, octylcarbonyloxy group, dodecylcarbonyloxy group, phenylcarbonyloxy group, etc.), amide group (for example, methylcarbolamino group, ethylcarbo- group) Luamino group, dimethyl carbolumino group, propyl carbolumino group, pentyl carbolumino group, cyclohexyl Lucacarbomino group, 2-ethylhexylcarbolumino group, octylcarbolumino group, dodecy Rucarbo-amino group, phenyl-carboamino group, naphthyl-carbolamino group, etc., strong rubamoyl group (for example, amino-carboro group, methylaminocarbolo group, dimethylaminocarbole group, propylaminocarbole group) Group, pentylaminocarbol group, cyclohexaminocarbol group, octylaminocarbol group, 2-ethylhexylaminomino group, dodecylaminocarbol group, phenol Ruaminocarbol group, naphthylaminocarbole group, 2-pyridylaminocarbol group, etc., ureido group (for example, methylureido group, ethylureido group, pentylureido group, cyclohexylureido group, octylureido group, dodecyl group) Ureido group, phenylureido group, naphthylureido group, 2-pyridylaminoureido group), sulfier group For example, methylsulfyl group, ethylsulfyl group, butylsulfyl group, cyclohexylsulfuryl group, 2-ethylhexylsulfyl group, dodecylsulfuryl group, phenylsulfyl group, naphthylsulfuryl group, 2-pyridylsulfeyl group, etc.), alkylsulfol groups (for example, methylsulfol group, ethylsulfol group, butylsulfol group, cyclohexylsulfol group, 2-ethylhexylsulfol group, Dodecylsulfol group, etc.), arylsulfol group (eg, phenylsulfol group, naphthylsulfol group, 2-pyridylsulfol group, etc.), amino group (eg, amino group, ethylamino group, Dimethylamino group, butylamino group, cyclopentylamino group, 2-ethylhexylamino group, dodecylamino group, arlino group, A tyramino group, a 2-pyridylamino group, etc.), a halogen atom (for example, a fluorine atom, a chlorine atom, a bromine atom, etc.), a fluorinated hydrocarbon group (for example, a fluoromethyl group, a trifluoromethyl group, a pentafluoroethyl group, a pentafluoro group) For example, a triphenylsilyl group, a triisopropylpropyl group, a triphenylsilyl group, a ferroethyl group, etc.). Among these, the substituent is preferably an alkyl group. These substituents may be further substituted with the above substituents V, or a plurality may be bonded to each other to form a ring! / ,.
また、前記一般式(1)の構造の化合物としては、特に限定はしないが、置換または 無置換の芳香族炭化水素環、あるいは置換または無置換の芳香族複素環を含む化 合物であることが好ましい。例えば、芳香族炭化水素環としては、ベンゼン環、ビフエ 二ノレ環、ナフタレン環、ァズレン環、アントラセン環、フエナントレン環、ピレン環、タリ セン環、ナフタセン環、トリフエ-レン環、 ο—テルフエ-ル環、 m—テルフエ-ル環、 p テルフエ-ル環、ァセナフテン環、コロネン環、フルオレン環、フルオラントレン環、 ナフタセン環、ペンタセン環、ペリレン環、ペンタフェン環、ピセン環、ピレン環、ピラン トレン環、アンスラアントレン環等が挙げられる。芳香族複素環としては、フラン環、チ オフェン環、ピリジン環、ピリダジン環、ピリミジン環、ピラジン環、トリアジン環、ベンゾ イミダゾール環、ォキサジァゾール環、トリァゾール環、イミダゾール環、ピラゾール環 、チアゾール環、インドール環、ベンゾイミダゾール環、ベンゾチアゾール環、ベンゾ ォキサゾール環、キノキサリン環、キナゾリン環、フタラジン環、力ルバゾール環、カル ボリン環、カルボリン環を構成する炭化水素環の炭素原子の少なくともひとつがさら に窒素原子で置換されて!ヽる環等が挙げられる。 The compound having the structure represented by the general formula (1) is not particularly limited, but is a compound containing a substituted or unsubstituted aromatic hydrocarbon ring or a substituted or unsubstituted aromatic heterocycle. Is preferred. For example, aromatic hydrocarbon rings include benzene ring, biphenyl ring, naphthalene ring, azulene ring, anthracene ring, phenanthrene ring, pyrene ring, tali Sen ring, naphthacene ring, triphenylene ring, o-terphel ring, m-terphel ring, p terphel ring, acenaphthene ring, coronene ring, fluorene ring, fluoranthrene ring, naphthacene ring, pentacene ring Perylene ring, pentaphen ring, picene ring, pyrene ring, pyranthrene ring, anthraanthrene ring, and the like. Aromatic heterocycles include furan ring, thiophene ring, pyridine ring, pyridazine ring, pyrimidine ring, pyrazine ring, triazine ring, benzimidazole ring, oxadiazole ring, triazole ring, imidazole ring, pyrazole ring, thiazole ring, indole ring. , Benzimidazole ring, benzothiazole ring, benzoxazole ring, quinoxaline ring, quinazoline ring, phthalazine ring, force rubazole ring, carboline ring, and at least one carbon atom of the hydrocarbon ring constituting the carboline ring is a nitrogen atom A ring that is substituted!
[0046] 《一般式 (2)で表される構造の化合物》  [0046] <Compound with structure represented by general formula (2)>
上記の一般式(1)で表される構造の化合物の中でも、更に好ましいのは、上記一 般式 (2)で表される構造の化合物である。  Among the compounds having the structure represented by the general formula (1), a compound having a structure represented by the general formula (2) is more preferable.
[0047] 一般式(2)において、 R〜Rで各々表される置換基は、一般式(1)において、 R  In the general formula (2), the substituents represented by R to R in the general formula (1)
4 9 1 4 9 1
〜Rで各々表される置換基と同義である。 It is synonymous with the substituent respectively represented by -R.
3  Three
[0048] 一般式(2)において、 Z〜Zで表される芳香族複素環としては、例えば、フラン環、  [0048] In the general formula (2), examples of the aromatic heterocycle represented by Z to Z include a furan ring,
1 2  1 2
チォフェン環、ピリジン環、ピリダジン環、ピリミジン環、ピラジン環、トリアジン環、ベン ゾイミダゾール環、ォキサジァゾール環、トリァゾール環、イミダゾール環、ピラゾール 環、チアゾール環、インドール環、ベンゾイミダゾール環、ベンゾチアゾール環、ベン ゾォキサゾール環、キノキサリン環、キナゾリン環、フタラジン環、力ルバゾール環、力 ルポリン環、カルボリン環を構成する炭化水素環の炭素原子の少なくともひとつがさ らに窒素原子で置換されている環等が挙げられる。中でもチォフェン環が好ましい。 これらの芳香族複素環は、無置換でも置換基を有していてもよぐ該置換基としては Thiophene ring, pyridine ring, pyridazine ring, pyrimidine ring, pyrazine ring, triazine ring, benzoimidazole ring, oxadiazole ring, triazole ring, imidazole ring, pyrazole ring, thiazole ring, indole ring, benzimidazole ring, benzothiazole ring, benzothiazole ring Examples include a ring in which at least one carbon atom of a hydrocarbon ring constituting a zoxazole ring, quinoxaline ring, quinazoline ring, phthalazine ring, force rubazole ring, force ruporin ring, or carboline ring is further substituted with a nitrogen atom. . Of these, a thiophene ring is preferred. These aromatic heterocycles may be unsubstituted or have a substituent.
、一般式(1)において、 R〜Rで各々表される置換基と同義のものが挙げられる。 n In general formula (1), those having the same meanings as the substituents represented by R to R can be mentioned. n
1 3  13
1、 n2は、 0〜3の整数を表す力 nl、 n2がともに 1であることが好ましい。  1 and n2 are preferably both forces nl and n2 representing an integer of 0 to 3.
[0049] 以下、本発明の有機半導体材料に係る、前記一般式(1)で表される構造の化合物 及び上記一般式 (2)で表される構造の化合物の具体例を示すが、本発明はこれらに 限定されない。
Figure imgf000015_0001
[0049] Specific examples of the compound having the structure represented by the general formula (1) and the compound having the structure represented by the general formula (2) relating to the organic semiconductor material of the present invention are shown below. Is not limited to these.
Figure imgf000015_0001
置s005 S005
[2S00] [2S00]
Figure imgf000016_0001
Figure imgf000016_0001
ひ S而 900Zdf/ェ:) d 9 690/ 00Z OAV [9^] [seoo] ひ S meta 900Zdf / e :) d 9 690 / 00Z OAV [9 ^] [seoo]
Figure imgf000017_0001
Figure imgf000017_0001
ひ S而 900Zdf/ェ:) d 91- 9 690/ 00Z OAV [ 00]ひ S meta 900Zdf / e :) d 91- 9 690 / 00Z OAV [00]
Figure imgf000018_0001
Figure imgf000018_0001
Figure imgf000018_0002
Figure imgf000018_0002
ひ S而 900Zdf/ェ:) d 9 V 9 690/ 00Z OAV ひ S meta 900Zdf / e :) d 9 V 9 690 / 00Z OAV
[8^] [eeoo] [8 ^] [eeoo]
Figure imgf000019_0001
Figure imgf000019_0001
9 690/ 00Z OAV 9 690 / 00Z OAV
[6^ ] [9S00] [6 ^] [9S00]
Figure imgf000020_0001
Figure imgf000020_0001
ε  ε
9 690/ム00 OAV [οτ^] [zeoo] 9 690 / M 00 OAV [οτ ^] [zeoo]
Figure imgf000021_0001
Figure imgf000021_0001
ひ S而 900Zdf/ェ:) d 61· 9 690/ 00Z OAV ひ S meta 900Zdf / e :) d 61 · 9 690 / 00Z OAV
[π¾] [8S00] [π¾] [8S00]
Figure imgf000022_0001
Figure imgf000022_0001
ひ S而 900Zdf/ェ:) d 03 9 690/ 00Z OAV ひ S meta 900Zdf / e :) d 03 9 690 / 00Z OAV
Figure imgf000023_0001
Figure imgf000023_0001
[0059] [化 12] [0059] [Chemical 12]
Figure imgf000024_0001
本発明の有機半導体材料に係る前記一般式 (1)で表される構造の化合物の前駆 体を含有していてもよぐ該前駆体とは、エネルギーの印加または化学的処理により
Figure imgf000024_0001
The precursor which may contain a precursor of a compound having the structure represented by the general formula (1) relating to the organic semiconductor material of the present invention is defined by energy application or chemical treatment.
、本発明の化合物を生成させることを目的とした化合物である。例えば、芳香族環( 芳香族炭化水素環、芳香族複素環)の一部を酸素により酸化させた化合物等があげ られる力 これらに限定されない。 A compound intended to produce the compound of the present invention. For example, an aromatic ring ( A force that includes a compound in which a part of an aromatic hydrocarbon ring or aromatic heterocycle is oxidized with oxygen is not limited thereto.
[0061] 本発明の有機半導体材料に係る前記一般式(1)で表される構造の化合物の合成 の一例を下記に示すが、本発明はこれらに限定されない。  [0061] An example of the synthesis of the compound having the structure represented by the general formula (1) relating to the organic semiconductor material of the present invention is shown below, but the present invention is not limited thereto.
[0062] 《合成例 1:化合物 19の合成》 << Synthesis Example 1: Synthesis of Compound 19 >>
下記スキームにより例示化合物 19を合成した。  Exemplified compound 19 was synthesized according to the following scheme.
[0063] [化 13] [0063] [Chemical 13]
(化合物 19の合成)
Figure imgf000025_0001
(Synthesis of Compound 19)
Figure imgf000025_0001
原料 1 中間体 1  Raw material 1 Intermediate 1
Figure imgf000025_0002
原料 1 (合成法は、 Tetrahedron. Vol. 28, 1972, pp4591に記載)を 5. 4mmol を脱水 THF40mlに溶解し、— 70°Cで n— BuLiを 4. 3mmolを加え、— 70°Cで 2時 間撹拌し、中間体 1を生成。さらに— 70°Cで原料 2 (合成法は、 J. Org. Chem. , Vo 1. 57, No23, 1992, 6193に記載)を 0. 87molカロえ、室温に戻したところで、 3. 5 gの SnCl · 2Η Ο及び 2Μの HC1水溶液 15mlをカ卩え、 5分間室温で撹拌し反応を終
Figure imgf000025_0002
5.4 mmol of raw material 1 (synthetic method is described in Tetrahedron. Vol. 28, 1972, pp4591) is dissolved in 40 ml of dehydrated THF, and 4.3 mmol of n-BuLi is added at -70 ° C, and at -70 ° C. 2 o'clock Stir for a while to produce Intermediate 1. Furthermore, the raw material 2 (the synthesis method is described in J. Org. Chem., Vo 1.57, No23, 1992, 6193) at 70 ° C was adjusted to 0.887 mol and returned to room temperature. Add 15 ml of SnCl · 2Η and 2 ml of HC1 aqueous solution, and stir for 5 minutes at room temperature to complete the reaction.
2 2  twenty two
了した。  Finished.
[0065] その後、へキサン 600mlをカ卩え、蒸留水、飽和食塩水で洗浄し、有機層をそのまま シリカゲルカラムに吸着させ溶媒を除去し、展開溶媒へキサンでカラムクロマトグラフ ィーを行うことにより、原料を除去した。またカラムクロマトグラフィーにより得られたへ キサン溶液を濃縮後、へキサンで 3回再結晶を行うことにより、化合物 19を収率 32% で得た。得られた化合物 19の分子構造は、 NMR (核磁気共鳴スペクトル)及び 質量スペクトル測定を行い、目的物と矛盾しないことを確認した。さらに HPLC (高速 液体クロマトグラフィ)測定した結果より 99%以上の純度であることを確認した。  [0065] Thereafter, 600 ml of hexane is added, washed with distilled water and saturated saline, the organic layer is adsorbed onto a silica gel column as it is, the solvent is removed, and column chromatography is performed with hexane as a developing solvent. The raw material was removed. Further, the hexane solution obtained by column chromatography was concentrated and then recrystallized three times with hexane to obtain Compound 19 in a yield of 32%. The molecular structure of the obtained compound 19 was measured by NMR (nuclear magnetic resonance spectrum) and mass spectrum, and confirmed to be consistent with the target product. Furthermore, it was confirmed that the purity was 99% or more from the result of HPLC (high performance liquid chromatography) measurement.
[0066] 他の類似化合物も同様にして合成した。  [0066] Other similar compounds were synthesized in the same manner.
[0067] 《有機半導体膜、有機半導体デバイス、有機薄膜トランジスタ》  [0067] << Organic Semiconductor Film, Organic Semiconductor Device, Organic Thin Film Transistor >>
本発明の有機半導体膜、有機半導体デバイス、有機薄膜 TFT (有機薄膜トランジ スタ)について説明する。  The organic semiconductor film, organic semiconductor device, and organic thin film TFT (organic thin film transistor) of the present invention will be described.
[0068] 本発明の有機半導体材料は、有機半導体膜、有機半導体デバイス、有機薄膜トラ ンジスタの半導体層に用いることにより、良好に駆動する有機半導体デバイス、有機 薄膜トランジスタを提供することができる。有機薄膜トランジスタは、支持体上に、半導 体層として有機半導体で連結されたソース電極とドレイン電極を有し、その上にゲー ト絶縁層を介してゲート電極を有するトップゲート型と、支持体上にまずゲート電極を 有し、ゲート絶縁層を介して有機半導体で連結されたソース電極とドレイン電極を有 するボトムゲート型に大別される。  [0068] When the organic semiconductor material of the present invention is used for a semiconductor layer of an organic semiconductor film, an organic semiconductor device, or an organic thin film transistor, an organic semiconductor device and an organic thin film transistor that are driven well can be provided. An organic thin film transistor has a source electrode and a drain electrode connected with an organic semiconductor as a semiconductor layer on a support, a top gate type having a gate electrode on the gate electrode via a gate insulating layer, and a support. First, it is roughly divided into a bottom gate type having a gate electrode and having a source electrode and a drain electrode connected by an organic semiconductor through a gate insulating layer.
[0069] 本発明の有機半導体材料を有機半導体膜、有機半導体デバイス、有機薄膜トラン ジスタの半導体層に設置するには、真空蒸着により基板上に設置することもできるが [0069] In order to install the organic semiconductor material of the present invention on a semiconductor layer of an organic semiconductor film, an organic semiconductor device, or an organic thin film transistor, the organic semiconductor material can be installed on a substrate by vacuum deposition.
、適切な溶媒に溶解し必要に応じ添加剤を加えて調製した溶液をキャストコート、ス ピンコート、印刷、インクジェット法、アブレーシヨン法等によって基板上に設置するの が好ましい。 The solution prepared by dissolving in an appropriate solvent and adding additives as necessary is preferably placed on the substrate by cast coating, spin coating, printing, ink jet method, abrasion method or the like.
[0070] この場合、本発明の有機半導体材料を溶解する溶媒は、有機半導体材料を溶解し て適切な濃度の溶液が調製できるものであれば格別の制限はな 、が、具体的にはジ ェチルエーテルゃジイソプロピルエーテル等の鎖状エーテル系溶媒、テトラヒドロフ ランやジォキサン等の環状エーテル系溶媒、アセトンゃメチルェチルケトン等のケト ン系溶媒、クロ口ホルムや 1, 2—ジクロロェタン等のハロゲン化アルキル系溶媒、トル ェン、 o—ジクロ口ベンゼン、ニトロベンゼン、 m—タレゾール等の芳香族系溶媒、 N— メチルピロリドン、 2硫ィ匕炭素等を挙げることができる。これらの溶媒のうち、非ハロゲ ン系溶媒を含む溶媒が好ましぐ非ハロゲン系溶媒で構成することが好ましい。 [0070] In this case, the solvent for dissolving the organic semiconductor material of the present invention dissolves the organic semiconductor material. However, there is no particular limitation as long as a solution with an appropriate concentration can be prepared. Specifically, a chain ether solvent such as dimethyl ether or diisopropyl ether, a cyclic ether solvent such as tetrahydrofuran or dioxane, Ketone solvents such as acetone methyl ketone, alkyl halide solvents such as chloroform and 1,2-dichloroethane, aromatics such as toluene, o-dichlorobenzene, nitrobenzene, and m-talezole. Solvent, N-methylpyrrolidone, disulfur carbon, and the like. Among these solvents, a solvent containing a non-halogen solvent is preferably a non-halogen solvent.
[0071] 本発明の有機薄膜トランジスタは、本発明の有機半導体材料を前述のように半導 体層に用いることが好ましい。前記半導体層は、これらの有機半導体材料を含有す る溶液または分散液を塗布することにより形成することが好ま ヽ。有機半導体材料 を溶解する溶媒は、前記非ハロゲン系溶媒を含む溶媒が好ましぐ非ハロゲン系溶 媒で構成することが好ましい。  In the organic thin film transistor of the present invention, it is preferable to use the organic semiconductor material of the present invention for the semiconductor layer as described above. The semiconductor layer is preferably formed by applying a solution or dispersion containing these organic semiconductor materials. The solvent that dissolves the organic semiconductor material is preferably composed of a non-halogen solvent that is preferably a solvent containing the non-halogen solvent.
[0072] 本発明にお 、て、ソース電極、ドレイン電極及びゲート電極を形成する材料は導電 性材料であれば特に限定されず、白金、金、銀、ニッケル、クロム、銅、鉄、錫、アン チモン鈴、タンタル、インジウム、パラジウム、テルル、レニウム、イリジウム、ァノレミ-ゥ ム、ルテニウム、ゲルマニウム、モリブデン、タングステン、酸化スズ 'アンチモン、酸化 インジウム'スズ (ITO)、フッ素ドープ酸ィ匕亜鉛、亜鉛、炭素、グラフアイト、グラッシ一 カーボン、銀ペースト及びカーボンペースト、リチウム、ベリリウム、ナトリウムマグネシ ゥム、カリウム、カルシウム、スカンジウム、チタン、マンガン、ジルコニウム、ガリウム、 ニオブ、ナトリウム、ナトリウム一カリウム合金、マグネシウム、リチウム、ァノレミ-ゥム、 マグネシウム Z銅混合物、マグネシウム Z銀混合物、マグネシウム Zアルミニウム混 合物、マグネシウム Zインジウム混合物、アルミニウム Z酸ィ匕アルミニウム混合物、リ チウム Zアルミニウム混合物等が用いられるが、特に、白金、金、銀、銅、アルミ-ゥ ム、インジウム、 ιτο及び炭素が好ましい。あるいはドーピング等で導電率を向上させ た公知の導電性ポリマー、例えば、導電性ポリア-リン、導電性ポリピロール、導電性 ポリチォフェン、ポリエチレンジォキシチォフェンとポリスチレンスルホン酸の錯体等も 好適に用いられる。中でも半導体層との接触面にぉ ヽて電気抵抗が少な ヽものが好 ましい。 [0073] 電極の形成方法としては、上記を原料として蒸着やスパッタリング等の方法を用い て形成した導電性薄膜を、公知のフォトリソグラフ法やリフトオフ法を用いて電極形成 する方法、アルミニウムや銅等の金属箔上に熱転写、インクジェット等によるレジスト を用いてエッチングする方法がある。また導電性ポリマーの溶液あるいは分散液、導 電性微粒子分散液を直接インクジェットによりパターユングしてもよ ヽし、塗工膜から リソグラフやレーザーアブレーシヨン等により形成してもよい。さらに導電性ポリマーや 導電性微粒子を含むインク、導電性ペースト等を凸版、凹版、平版、スクリーン印刷 等の印刷法でパターユングする方法も用いることができる。 [0072] In the present invention, the material for forming the source electrode, the drain electrode, and the gate electrode is not particularly limited as long as it is a conductive material. Platinum, gold, silver, nickel, chromium, copper, iron, tin, Antimony bell, tantalum, indium, palladium, tellurium, rhenium, iridium, ano-remium, ruthenium, germanium, molybdenum, tungsten, tin oxide 'antimony, indium oxide' tin (ITO), fluorine-doped zinc oxide, zinc , Carbon, graphite, glassy carbon, silver paste and carbon paste, lithium, beryllium, sodium magnesium, potassium, calcium, scandium, titanium, manganese, zirconium, gallium, niobium, sodium, sodium monopotassium alloy, magnesium, Lithium, Anoleum, Magne Umum Z copper mixture, Magnesium Z silver mixture, Magnesium Z aluminum mixture, Magnesium Z indium mixture, Aluminum Z acid-aluminum mixture, Lithium Z aluminum mixture, etc. are used, especially platinum, gold, silver, copper Aluminum, indium, ιτο and carbon are preferred. Alternatively, known conductive polymers whose conductivity has been improved by doping or the like, for example, conductive polyarlin, conductive polypyrrole, conductive polythiophene, a complex of polyethylene dioxythiophene and polystyrene sulfonic acid, etc. are also suitably used. . Of these, those having low electrical resistance on the contact surface with the semiconductor layer are preferred. [0073] As a method for forming an electrode, a method for forming an electrode using a known photolithographic method or a lift-off method using a conductive thin film formed by a method such as vapor deposition or sputtering using the above as a raw material, aluminum, copper, or the like There is a method of etching on a metal foil using a resist by thermal transfer, ink jet or the like. Alternatively, the conductive polymer solution or dispersion, or the conductive fine particle dispersion may be directly patterned by inkjet, or may be formed from the coating film by lithography, laser abrasion, or the like. In addition, a method of patterning an ink containing a conductive polymer or conductive fine particles, a conductive paste, or the like by a printing method such as relief printing, intaglio printing, planographic printing, or screen printing can also be used.
[0074] ゲート絶縁層としては種々の絶縁膜を用いることができる力 特に比誘電率の高い 無機酸ィ匕物皮膜が好ましい。無機酸ィ匕物としては、酸化ケィ素、酸ィ匕アルミニウム、 酸化タンタル、酸化チタン、酸化スズ、酸化バナジウム、チタン酸バリウムストロンチウ ム、ジルコニウム酸チタン酸バリウム、ジルコニウム酸チタン酸鉛、チタン酸鉛ランタン 、チタン酸ストロンチウム、チタン酸バリウム、フッ化バリウムマグネシウム、チタン酸ビ スマス、チタン酸ストロンチウムビスマス、タンタノレ酸ストロンチウムビスマス、タンタノレ 酸ニオブ酸ビスマス、トリオキサイドイットリウム等が挙げられる。それらのうち好ましい のは酸化ケィ素、酸ィ匕アルミニウム、酸ィ匕タンタル、酸ィ匕チタンである。窒化ケィ素、 窒化アルミニウム等の無機窒化物も好適に用いることができる。  As a gate insulating layer, various insulating films can be used. In particular, an inorganic oxide film having a high relative dielectric constant is preferable. Examples of inorganic oxides include silicon oxide, aluminum oxide, tantalum oxide, titanium oxide, tin oxide, vanadium oxide, barium strontium titanate, barium zirconate titanate, lead zirconate titanate, titanate Examples include lead lanthanum, strontium titanate, barium titanate, barium magnesium fluoride, bismuth titanate, strontium bismuth titanate, strontium bismuth tantanoate, bismuth tantalate niobate, and trioxide yttrium. Among them, preferable are silicon oxide, acid aluminum, acid tantalum, and acid titanium. Inorganic nitrides such as silicon nitride and aluminum nitride can also be suitably used.
[0075] 上記皮膜の形成方法としては、真空蒸着法、分子線ェピタキシャル成長法、イオン クラスタービーム法、低エネルギーイオンビーム法、イオンプレーティング法、 CVD法 、スパッタリング法、大気圧プラズマ法等のドライプロセスや、スプレーコート法、スピ ンコート法、ブレードコート法、ディップコート法、キャスト法、ロールコート法、バーコ ート法、ダイコート法等の塗布による方法、印刷やインクジェット等のパターユングに よる方法等のウエットプロセスが挙げられ、材料に応じて使用できる。  [0075] Examples of the method for forming the film include a vacuum deposition method, a molecular beam epitaxy growth method, an ion cluster beam method, a low energy ion beam method, an ion plating method, a CVD method, a sputtering method, and an atmospheric pressure plasma method. Dry process, spray coating method, spin coating method, blade coating method, dip coating method, casting method, roll coating method, bar coating method, die coating method, and other methods by patterning such as printing and inkjet Etc., and can be used depending on the material.
[0076] ウエットプロセスは、無機酸化物の微粒子を、任意の有機溶媒あるいは水に必要に 応じて界面活性剤等の分散補助剤を用いて分散した液を塗布、乾燥する方法や、 酸化物前駆体、例えば、アルコキシド体の溶液を塗布、乾燥する、いわゆるゾルゲル 法が用いられる。これらのうち好ましいのは、大気圧プラズマ法とゾルゲル法である。  [0076] The wet process includes a method of applying and drying a liquid in which fine particles of inorganic oxide are dispersed in an arbitrary organic solvent or water using a dispersion aid such as a surfactant as necessary, or an oxide precursor. A so-called sol-gel method in which a solution of a body, for example, an alkoxide body is applied and dried is used. Among these, the atmospheric pressure plasma method and the sol-gel method are preferable.
[0077] 大気圧下でのプラズマ製膜処理による絶縁膜の形成方法は、大気圧または大気圧 近傍の圧力下で放電し、反応性ガスをプラズマ励起し、基材上に薄膜を形成する処 理で、その方法については特開平 11— 61406号公報、同 11 133205号公報、特 開 2000— 121804号公報、同 2000— 147209号公報、同 2000— 185362号公報 等に記載されている(以下、大気圧プラズマ法とも称する)。これによつて高機能性の 薄膜を、生産性高く形成することができる。 [0077] A method for forming an insulating film by plasma film formation under atmospheric pressure is atmospheric pressure or atmospheric pressure. A process in which a discharge is performed under a nearby pressure, a reactive gas is plasma-excited, and a thin film is formed on the substrate. The method is described in JP-A-11-61406, JP-A-11-133205, JP2000- No. 121804, No. 2000-147209, No. 2000-185362, etc. (hereinafter also referred to as atmospheric pressure plasma method). As a result, a highly functional thin film can be formed with high productivity.
[0078] また有機化合物皮膜として、ポリイミド、ポリアミド、ポリエステル、ポリアタリレート、光 ラジカル重合系、光力チオン重合系の光硬化性榭脂、あるいはアクリロニトリル成分 を含有する共重合体、ポリビュルフエノール、ポリビュルアルコール、ノボラック榭脂 及びシァノエチルプルラン等を用いることもできる。有機化合物皮膜の形成法として は、前記ウエットプロセスが好ましい。無機酸ィ匕物皮膜と有機酸ィ匕物皮膜は積層して 併用することができる。またこれら絶縁膜の膜厚としては、ー般に5011111〜3 111、好 ましくは 100nm〜l μ mである。  [0078] Further, as the organic compound film, polyimide, polyamide, polyester, polyacrylate, photo-radical polymerization system, photopower thione polymerization system photocurable resin, or a copolymer containing an acrylonitrile component, polybutanol, Polybulal alcohol, novolac resin, cyanoethyl pullulan and the like can also be used. The wet process is preferred as a method for forming the organic compound film. An inorganic oxide film and an organic oxide film can be laminated and used together. The film thickness of these insulating films is generally 5011111 to 3111, preferably 100 nm to l μm.
[0079] また、支持体はガラスやフレキシブルな榭脂製シートで構成され、例えば、プラスチ ックフィルムをシートとして用いることができる。前記プラスチックフィルムとしては、例 えば、ポリエチレンテレフタレート(PET)、ポリエチレンナフタレート(PEN)、ポリエー テルスルホン(PES)、ポリエーテルイミド、ポリエーテルエーテルケトン、ポリフエ-レ ンスルフイド、ポリアリレート、ポリイミド、ボリカーボネート(PC)、セルローストリァセテ ート (TAC)、セルロースアセテートプロピオネート(CAP)等力 なるフィルム等が挙 げられる。このように、プラスチックフィルムを用いることで、ガラス基板を用いる場合に 比べて軽量ィ匕を図ることができ、可搬性を高めることができるとともに、衝撃に対する 耐性を向上できる。  [0079] The support is composed of glass or a flexible resin sheet, and for example, a plastic film can be used as the sheet. Examples of the plastic film include polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), polyetherimide, polyetheretherketone, polyethylene-sulfuride, polyarylate, polyimide, polycarbonate ( PC), cellulose triacetate (TAC), and cellulose acetate propionate (CAP). Thus, by using a plastic film, it is possible to reduce the weight as compared with the case of using a glass substrate, to improve portability, and to improve resistance to impact.
[0080] 以下に、本発明の有機半導体材料を用いて形成された有機半導体膜を用いた有 機薄膜トランジスタについて説明する。  Hereinafter, an organic thin film transistor using an organic semiconductor film formed using the organic semiconductor material of the present invention will be described.
[0081] 図 1は、本発明の有機薄膜トランジスタの構成例を示す図である。同図(a)は、支持 体 6上に金属箔等によりソース電極 2、ドレイン電極 3を形成し、両電極間に本発明の 有機半導体材料からなる有機半導体層 1を形成し、その上に絶縁層 5を形成し、さら にその上にゲート電極 4を形成して有機薄膜トランジスタを形成したものである。同図 (b)は、有機半導体層 1を、(a)では電極間に形成したものを、コート法等を用いて電 極及び支持体表面全体を覆うように形成したものを表す。(c)は、支持体 6上に先ず コート法等を用いて、有機半導体層 1を形成し、その後ソース電極 2、ドレイン電極 3、 絶縁層 5、ゲート電極 4を形成したものを表す。 FIG. 1 is a diagram showing a configuration example of an organic thin film transistor of the present invention. In FIG. 2 (a), a source electrode 2 and a drain electrode 3 are formed on a support 6 with a metal foil or the like, an organic semiconductor layer 1 made of the organic semiconductor material of the present invention is formed between the two electrodes, and the organic semiconductor layer 1 is formed thereon. An insulating layer 5 is formed, and further a gate electrode 4 is formed thereon to form an organic thin film transistor. (B) shows the organic semiconductor layer 1 formed between the electrodes in (a). The electrode is formed so as to cover the entire surface of the electrode and the support. (C) shows that the organic semiconductor layer 1 is first formed on the support 6 by using a coating method or the like, and then the source electrode 2, the drain electrode 3, the insulating layer 5, and the gate electrode 4 are formed.
[0082] 同図(d)は、支持体 6上にゲート電極 4を金属箔等で形成した後、絶縁層 5を形成 し、その上に金属箔等で、ソース電極 2及びドレイン電極 3を形成し、該電極間に本 発明の有機半導体材料により形成された有機半導体層 1を形成する。その他同図 (e )、 (f)に示すような構成を取ることもできる。 [0082] In FIG. 6D, after forming the gate electrode 4 with a metal foil or the like on the support 6, the insulating layer 5 is formed, and the source electrode 2 and the drain electrode 3 are formed with the metal foil or the like thereon. Then, an organic semiconductor layer 1 formed of the organic semiconductor material of the present invention is formed between the electrodes. Other configurations such as shown in (e) and (f) of FIG.
[0083] 図 2は、有機薄膜トランジスタシートの概略等価回路図の 1例を示す図である。 FIG. 2 is a diagram showing an example of a schematic equivalent circuit diagram of an organic thin film transistor sheet.
[0084] 有機薄膜トランジスタシート 10はマトリクス配置された多数の有機薄膜トランジスタ 1 1を有する。 7は各有機薄膜トランジスタ 11のゲートバスラインであり、 8は各有機薄膜 トランジスタ 11のソースバスラインである。各有機薄膜トランジスタ 11のソース電極に は、出力素子 12が接続され、この出力 12は例えば液晶、電気泳動素子等であり、表 示装置における画素を構成する。画素電極は光センサの入力電極として用いてもよ い。図示の例では、出力素子として液晶が、抵抗とコンデンサ力もなる等価回路で示 されている。 13は蓄積コンデンサ、 14は垂直駆動回路、 15は水平駆動回路である。 実施例 The organic thin film transistor sheet 10 has a large number of organic thin film transistors 11 arranged in a matrix. 7 is a gate bus line of each organic thin film transistor 11, and 8 is a source bus line of each organic thin film transistor 11. An output element 12 is connected to the source electrode of each organic thin film transistor 11, and this output 12 is, for example, a liquid crystal, an electrophoretic element or the like, and constitutes a pixel in the display device. The pixel electrode may be used as the input electrode of the photosensor. In the illustrated example, the liquid crystal is shown as an output element in an equivalent circuit having resistance and capacitor power. 13 is a storage capacitor, 14 is a vertical drive circuit, and 15 is a horizontal drive circuit. Example
[0085] 以下、実施例により本発明を詳細に説明するが本発明はこれらに限定されない。ま た、実施例に用いる比較ィ匕合物 1〜5の構造を下記に示す。  Hereinafter, the present invention will be described in detail by way of examples, but the present invention is not limited thereto. In addition, the structures of Comparative Compounds 1 to 5 used in Examples are shown below.
[0086] [化 14] [0086] [Chemical 14]
比較化合物 (1 ) Comparative compound (1)
Figure imgf000031_0001
実施例 1
Figure imgf000031_0001
Example 1
《有機 TFT (有機薄膜トランジスタ)素子 2の作製》:比較例  << Production of Organic TFT (Organic Thin Film Transistor) Element 2 >>: Comparative Example
ゲート電極としての比抵抗 0. 01 Ω 'cmの Siウェハーに、厚さ 2000Aの熱酸化膜 を形成してゲート絶縁層とした後、ォクタデシルトリクロロシランによる表面処理を行つ た。比較ィ匕合物(2)のクロ口ホルム溶液をアプリケーターを用いて塗布し、 自然乾燥 することによりキャスト膜 (厚さ 50nm)を形成して、窒素雰囲気下で 50°C、 30分間の 熱処理を施した。 A 2000 A thick thermal oxide film was formed on a Si wafer with a specific resistance of 0.01 Ω'cm as the gate electrode to form a gate insulating layer, and then surface treatment with octadecyltrichlorosilane was performed. Apply a solution of Comparative Compound (2) with a mouth-opening solution using an applicator and dry naturally to form a cast film (thickness 50 nm), and then at 50 ° C for 30 minutes in a nitrogen atmosphere. Heat treatment was applied.
[0088] 更に、この膜の表面にマスクを用いて金を蒸着してソース電極及びドレイン電極を 形成した。ソース電極及びドレイン電極は幅 100 m、厚さ 200nmで、チャネル幅 W = 3mm、チャネル長 L = 20 μ mの有機薄膜トランジスタ素子 1を作製した。  [0088] Furthermore, gold was deposited on the surface of this film using a mask to form a source electrode and a drain electrode. An organic thin film transistor element 1 having a source electrode and a drain electrode having a width of 100 m, a thickness of 200 nm, a channel width W = 3 mm, and a channel length L = 20 μm was produced.
[0089] 《有機 TFT素子 1、 3〜5の作製》:比較例  [0089] << Preparation of organic TFT elements 1, 3-5 >>: Comparative example
有機 TFT素子 2の作製において、比較化合物(2)をそれぞれ比較化合物(1)、 (3 )〜(5)に変更した以外は同様にして、有機 TFT素子 1、 3〜5を作製した。  Organic TFT elements 1 and 3 to 5 were produced in the same manner except that the comparative compound (2) was changed to comparative compounds (1) and (3) to (5), respectively, in the production of the organic TFT element 2.
[0090] 《有機 TFT素子 6〜 13の作製》:本発明  [0090] <Production of organic TFT elements 6 to 13>: The present invention
有機 TFT素子 2の作製において、比較ィ匕合物(2)の代替として、表 1に記載の、本 発明の有機 TFT材料に変更した以外は同様にして、有機薄膜トランジスタ素子 6〜1 3を作製した。  In the production of the organic TFT element 2, as an alternative to the comparative compound (2), the organic thin film transistor elements 6 to 13 were produced in the same manner except that the organic TFT material of the present invention shown in Table 1 was changed. did.
[0091] 《キャリア移動度評価及び ONZOFF比の評価》  [0091] << Evaluation of carrier mobility and ONZOFF ratio >>
得られた有機 TFT素子 1〜13の各々について、作製直後と大気中で 1ヶ月放置後 の各素子のキャリア移動度と ONZOFF比を各々求めた。  For each of the obtained organic TFT elements 1 to 13, the carrier mobility and the ONZOFF ratio of each element immediately after fabrication and after standing for 1 month in the air were determined.
[0092] 尚、本発明では、 I—V特性の飽和領域力もキャリア移動度を求め、更に、ドレイン バイアス一 50Vとし、ゲートバイアス一 50Vおよび OVにしたときのドレイン電流値の 比率から ONZOFF比を求めた。 [0092] In the present invention, the saturation region force of the I-V characteristic is also obtained for the carrier mobility, and further, the drain bias is set to 50V, the gate bias is set to 50V and OV, and the ONZOFF ratio is calculated from the ratio of the drain current value. Asked.
[0093] 得られた結果を表 1に示す。 [0093] Table 1 shows the obtained results.
[0094] [表 1] [0094] [Table 1]
有機 TFT. 作製直後 1力月放置後 Organic TFT. Immediately after fabrication After 1 month
有機半導体材料 移動度 移動度 備考  Organic semiconductor material Mobility Mobility Remarks
0NZOFF値 ON/OFF値  0NZOFF value ON / OFF value
素子 No. cra^^/Vsec cm2/Vsec Element No. cra ^^ / Vsec cm 2 / Vsec
1 比較化合物 1 製膜できず 製膜できず 製膜できず 製膜できず 比較例 1 Comparative compound 1 Cannot be formed Cannot be formed Cannot be formed Cannot be formed Comparative example
2 比較化合物 2 9.3X10—2 1.1 X104 1.3X103 4.3X103 比較例2 Comparative compound 2 9.3X10— 2 1.1 X10 4 1.3X10 3 4.3X10 3 Comparative example
3 比較化合物 3 製膜できず 製膜できず 製膜できず 製膜できず 比較例3Comparative Compound 3 Cannot be formed Cannot be formed Cannot be formed Cannot be formed Comparative example
4 比較化合物 4 6.0X10—2 3.1X103 測 ^不能 測定不能 比較例4 Comparative compound 4 6.0X10— 2 3.1X10 3 Measurement not possible Measurement impossible Comparative example
5 比較化合物 5 2.5X10- 3 4.8X103 5.1X10一4 1.0X103 比铰例5 Comparative compound 5 2.5X10- 3 4.8X10 3 5.1X10 1 4 1.0X10 3
6 例示化合物 1 9.8X10— 3 1.3 X 103 5.3 X 10— 3 7.1X102 本発明6 Example Compound 1 9.8X10- 3 1.3 X 10 3 5.3 X 10- 3 7.1X10 2 invention
7 例示化合物 2 9.7X10— 3 1.2X103 5.2X10-3 6.9X102 本発明7 Example Compound 2 9.7X10- 3 1.2X10 3 5.2X10- 3 6.9X10 2 invention
8 例/丁、化合物 3 9.8X102 1.5X104 1.8X10- 2 5.3 X103 本発明8 examples / choice, compound 3 9.8X10 2 1.5X10 4 1.8X10- 2 5.3 X10 3
9 例示化合物 4 9.6X10— 2 1.6X104 1.7X10—2 4.8X103 本発明9 Exemplified compounds 4 9.6X10— 2 1.6X10 4 1.7X10— 2 4.8X10 3 The present invention
10 例示化合物 5 1.6X10— 1 3.3X105 7.4X10— 2 3.9X104 本発明10 Exemplary compounds 5 1.6X10— 1 3.3X10 5 7.4X10— 2 3.9X10 4 Present invention
11 例示化合物 6 1.3X10— L 3.1X10C 6.8X10— 2 3.3X104 本発明11 Exemplified compounds 6 1.3X10— L 3.1X10 C 6.8X10— 2 3.3X10 4 Present invention
12 例示化合物 7 3.5X10— 1 3.8X105 8.2X10 4.3X104 本発明12 Exemplary compounds 7 3.5X10— 1 3.8X10 5 8.2X10 4.3X10 4 The present invention
13 例示化合物 8 3.4X10— 1 3.5X105 7.8X 10 3.8X104 本発明 13 Example Compound 8 3.4X10- 1 3.5X10 5 7.8X 10 3.8X10 4 present invention
[0095] 表 1から、比較の有機半導体材料を用いて作製した、比較の有機薄膜トランジスタ 素子と比べて、本発明の有機薄膜トランジスタ素子 6〜: 13は、作製直後においても 優れたトランジスタ特性を示し、且つ、経時劣化が少ないという高い耐久性を併せ持 つということが判る。 [0095] From Table 1, the organic thin film transistor elements 6 to 13 of the present invention show excellent transistor characteristics even immediately after the production, compared with the comparative organic thin film transistor element produced using the comparative organic semiconductor material. It can also be seen that it has high durability with little deterioration with time.
[0096] 実施例 2  [0096] Example 2
また、本発明の有機半導体材料を用いた有機薄膜トランジスタの応用例として、有 機薄膜トランジスタを用いた有機 EL素子を説明する。  An organic EL device using an organic thin film transistor will be described as an application example of an organic thin film transistor using the organic semiconductor material of the present invention.
[0097] 《有機 EL素子の作製》 [0097] << Production of organic EL elements >>
有機 EL素子の作製は、 Nature, 395卷, 151〜154頁に記載の方法を参考にし て、図 3に示したような封止構造を有するトップェミッション型の有機 EL素子を作製し た。尚、図 3において、 101は基板、 102aは陽極、 102bは有機 EL層(具体的には、 電子輸送層、発光層、正孔輸送層等が含まれる)、 102cは陰極を示し、陽極 102a、 有機 EL層 102b、陰極 102cにより、発光素子 102が形成されている。 103は封止膜 を示す。尚、本発明の有機 EL素子は、ボトムェミッション型でもトップェミッション型の どちらでもよい。  The organic EL device was manufactured by referring to the method described in Nature, 395 卷, pages 151 to 154, and a top emission type organic EL device having a sealing structure as shown in FIG. In FIG. 3, 101 is a substrate, 102a is an anode, 102b is an organic EL layer (specifically, an electron transport layer, a light-emitting layer, a hole transport layer, etc. are included), 102c is a cathode, and anode 102a The light emitting element 102 is formed by the organic EL layer 102b and the cathode 102c. Reference numeral 103 denotes a sealing film. The organic EL device of the present invention may be either a bottom emission type or a top emission type.
[0098] 本発明の有機 EL素子と本発明の有機薄膜トランジスタ (ここで、本発明の有機薄膜 トランジスタは、スイッチングトランジスタや駆動トランジスタ等として用いられる)を組 み合わせて、アクティブマトリクス型の発光素子を作製した力 その場合は、例えば、 図 4に示すように、ガラス基板 601上に TFT602 (有機薄膜トランジスタ 602でもよい) が形成されている基板を用いる態様が一例として挙げられる。ここで、 TFT602の作 製方法は公知の TFTの作製方法が参照できる。勿論、 TFTとしては、従来公知のト ップゲート型 TFTであってもボトムゲート型 TFTであっても構わない。 [0098] The organic EL device of the present invention and the organic thin film transistor of the present invention (here, the organic thin film of the present invention A transistor is used as a switching transistor, a driving transistor, etc.) to produce an active matrix light-emitting element. In that case, for example, as shown in FIG. As an example, an embodiment using a substrate on which a thin film transistor 602 may be formed is used. Here, a known TFT manufacturing method can be referred to for the TFT602 manufacturing method. Of course, the TFT may be a conventionally known top gate type TFT or a bottom gate type TFT.
上記で作製した有機 EL素子は、単色、フルカラー、白色等の種々の発光形態にお いて、良好な発光特性を示した。  The organic EL device fabricated above showed good emission characteristics in various emission modes such as single color, full color, and white.

Claims

請求の範囲 下記一般式 (1)で表される構造であることを特徴とする有機半導体材料。 An organic semiconductor material having a structure represented by the following general formula (1):
[化 1]  [Chemical 1]
-般式 (1 ) -General formula (1)
Y— =— X― R, Y— = — X— R,
R  R
〔式中、 Xは Geまたは Snを表す。 Yは少なくとも 1つのへテロ環を有する母核またはフ ラーレン母核を表す。 R〜Rは、各々水素原子または置換基を表す。〕 [Wherein X represents Ge or Sn. Y represents a mother nucleus or a fullerene mother nucleus having at least one hetero ring. R to R each represents a hydrogen atom or a substituent. ]
1 3  13
[2] 前記一般式(1)で表される構造力も Yを除いた部分構造を少なくとも 2つ有することを 特徴とする請求の範囲第 1項に記載の有機半導体材料。  [2] The organic semiconductor material according to claim 1, wherein the structural force represented by the general formula (1) also has at least two partial structures excluding Y.
[3] 前記一般式(1)で表される構造が下記一般式 (2)で表されることを特徴とする請求の 範囲第 1項または第 2項に記載の有機半導体材料。 [3] The organic semiconductor material according to claim 1 or 2, wherein the structure represented by the general formula (1) is represented by the following general formula (2).
[化 2] [Chemical 2]
Figure imgf000035_0001
Figure imgf000035_0001
〔式中、 Xは Geまたは Snを表す。 R〜Rは、各々水素原子または置換基を表し、 Z 〜Zは、芳香族複素環基を表す。 nl、 n2は、 0〜3の整数を表す。〕[Wherein X represents Ge or Sn. R to R each represents a hydrogen atom or a substituent, and Z -Z represents an aromatic heterocyclic group. nl and n2 represent an integer of 0 to 3. ]
2 2
[4] 前記 R〜R力 アルキル基またはシクロアルキル基を表すことを特徴とする請求の範  [4] The R to R force represents an alkyl group or a cycloalkyl group.
1 9  1 9
囲第 1項乃至第 3項のいずれか 1項に記載の有機半導体材料。  Item 5. The organic semiconductor material according to any one of Items 1 to 3.
[5] 請求の範囲第 1項乃至第 4項のいずれか 1項に記載の有機半導体材料を含有するこ とを特徴とする有機半導体膜。 [5] An organic semiconductor film comprising the organic semiconductor material according to any one of claims 1 to 4.
[6] 請求の範囲第 1項乃至第 4項のいずれか 1項に記載の有機半導体材料を用いること を特徴とする有機半導体デバイス。 [6] An organic semiconductor device using the organic semiconductor material according to any one of claims 1 to 4.
[7] 請求の範囲第 1項乃至第 4項のいずれか 1項に記載の有機半導体材料を半導体層 に用いることを特徴とする有機薄膜トランジスタ。 [7] An organic thin film transistor, wherein the organic semiconductor material according to any one of claims 1 to 4 is used for a semiconductor layer.
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