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WO2005093441A1 - Dispositif et procede de reparation et de mise a l'essai d'un defaut de ligne - Google Patents

Dispositif et procede de reparation et de mise a l'essai d'un defaut de ligne Download PDF

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Publication number
WO2005093441A1
WO2005093441A1 PCT/CN2004/000262 CN2004000262W WO2005093441A1 WO 2005093441 A1 WO2005093441 A1 WO 2005093441A1 CN 2004000262 W CN2004000262 W CN 2004000262W WO 2005093441 A1 WO2005093441 A1 WO 2005093441A1
Authority
WO
WIPO (PCT)
Prior art keywords
contact
line defect
laser
glass substrate
contact probe
Prior art date
Application number
PCT/CN2004/000262
Other languages
English (en)
Chinese (zh)
Inventor
Guoting Liao
Guokui Li
Junjie Zhu
Original Assignee
Quanta Display Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quanta Display Inc. filed Critical Quanta Display Inc.
Priority to PCT/CN2004/000262 priority Critical patent/WO2005093441A1/fr
Publication of WO2005093441A1 publication Critical patent/WO2005093441A1/fr

Links

Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

Definitions

  • the invention relates to a process equipment for a liquid crystal display, and in particular, the equipment has the functions of glass substrate circuit defect detection and laser repairing of the circuit defect to improve the productivity, reduce the defect rate and save the clean room space.
  • metal lines such as data lines (ie, source lines) 11 and scan lines 12 are formed on the glass substrate 10 as a matrix.
  • Short circuit defects (Short defect) 30, or Open defect 20 often occur between lines due to poor manufacturing processes. Process stations that detect such line defects are commonly referred to as open / short detection. (Open / Short Inspection machine), the detection methods can usually be divided into non-contact detection and contact detection, non-contact detection usually includes two non-contact sensors 13, 14, which can be in the form of electrostatic capacitance coupling Electrostatic Capacitory Coupling style, where one sensor is a signal output terminal and the other sensor is a signal receiving terminal.
  • the sensor is close to the glass substrate at a distance of about 100 microns during operation; the source line of the glass substrate is used.
  • the line defect inspection of the two sensors can be synchronized to check the line position of the line defect point, and then detect the signal output end.
  • the signal receiving end sensor moves along the line with the line defect point toward the signal output end sensor, and the position of the open circuit defect point 20 can be detected (as shown in Figure 1). (Shown); or when a line defect line position j5 is detected, use a pair of contact probes 50 to contact the metal line contact pads 40 on the glass substrate, and then cooperate with the non-contact sensor 13 to detect The position of the short circuit defect point 30 (as shown in FIG. 2).
  • the defective product measured by the open / short circuit detector needs to be submitted to another laser repairing machine to repair the short circuit between the metal wire and the wire to improve the overall process yield.
  • the data previously detected by the testing machine station such as the position coordinates of the line defect, and the image of the line defect, are stored in a memory unit of the testing machine, and then this data is transmitted to the laser repairing machine through the network or magnetic disk.
  • the defective glass substrate to be repaired it is necessary to use a robotic arm to remove the glass substrate and place it on a transportation vehicle. After the transportation vehicle is transported to the laser repairing machine, the glass substrate is taken out and placed on the laser repairing machine by another robotic arm. The substrate is clamped and aligned again in the laser repairing machine, and the line defect is repaired with the data transmitted by the inspection machine.
  • the two actions of line defect detection and laser repair belong to different machines.
  • the loading and unloading of substrates requires a robot arm and a truck. This is not only time consuming, but also the product process line is elongated. It increases the risk of defective products and occupies valuable clean room space.
  • the glass substrate needs to be repositioned and clamped separately on the two machines, which not only results in prolonged working hours, but also has different coordinate systems for the two positioning, which reduces the overall accuracy. It is not conducive to the trend of shrinking line width and the goal of full automation of line defect detection and laser repair.
  • US Pat. 5164565 discloses a laser repairing machine.
  • the operation mode is that the substrate 10 is placed and clamped on the XY transmission platform 60.
  • the XY movement platform 60 drives the substrate 10 to move when repairing a line defect.
  • the laser repair head 70 does not move, this design is also common for defect inspection machines.
  • this design method will occupy too much space, causing an increase in equipment costs and The overall accuracy of the machine has declined and it is becoming infeasible.
  • the more feasible way is to use a fixed substrate and the laser repair head 70 to move.
  • the more feasible way is to use a glass substrate.
  • the contact probe 50 and the non-contact sensors 13 and 14 move.
  • the main object of the present invention is to provide a single device that has both line defect detection and laser repair functions and takes up less space.
  • Another object of the present invention is to provide a method for detecting and repairing a glass substrate circuit defect.
  • the present invention provides a line defect detection and laser repairing device.
  • the device includes a machine base for supporting members, and a substrate bearing platform disposed on the machine base for placing. And a bearing glass substrate; a contact probe detection module having a contact probe and a contact probe drive system, the contact probe drive system is used to drive the contact probe so that the contact probe contacts the glass substrate; Line to detect line defects; a non-contact detection module with a non-contact sensor and a non-contact detection drive system, the non-contact detection drive system is used to drive the non-contact sensor to non-contact Detecting the line defect of the glass substrate by a contact method, and determining the position of the line defect together with the contact probe detection module; and a laser repair module, which has a laser repair head and a laser repair transmission system, and the laser repair transmission system is used for The laser repair head is driven to the position of the line defect, and the line defect of the glass substrate is repaired by laser.
  • the present invention further provides a method for detecting line defects and laser repairing of a glass substrate of a flat display, including the following steps:
  • FIG. 1 is a schematic diagram of detecting a substrate circuit open circuit defect using a non-contact sensor in the prior art.
  • FIG. 2 is a schematic diagram of detecting a short circuit defect of a substrate circuit using a contact probe and a non-contact sensor in the prior art.
  • FIG. 3 is a prior art laser repair system.
  • FIG. 4 is a perspective view of a line defect detection and repair device of the present invention.
  • FIG. 5 is a perspective view of a contact probe detection module of the present invention.
  • FIG. 6 is an enlarged perspective view of a vertical motion transmission module of the contact probe detection module of the present invention.
  • FIG. 7 is a side view of a front and rear transmission module of the contact probe detection module of the present invention.
  • FIG. 8 is a perspective view of a non-contact detection module of the present invention.
  • FIG. 9 is an enlarged perspective view of a vertical motion transmission module in a perspective view of a non-contact detection module of the present invention.
  • FIG. 10 is a perspective view of a laser repair module of the present invention.
  • FIG. 11 is a perspective view of the operation of a device for detecting and repairing line defects according to the first step of the present invention.
  • FIG. 12 is a perspective view of the operation of the device for detecting and repairing a line defect according to the second step of the present invention.
  • FIG. 13 is a perspective view of the operation of a device for detecting and repairing a line defect according to step 3 of the present invention.
  • FIG. 14 is a perspective view of the operation of a device for detecting and repairing a line defect according to step 4 of the present invention.
  • FIG. 4 it is a perspective view of a line defect detection and repair device of the present invention, including an organic base 101, a substrate carrier 200, a contact probe detection module 300, and a non-contact type. Detection module 400 and laser repair module 500;
  • the machine base 101 and the machine support base 102 form the main support of the whole machine, and provide a space for placing other modules.
  • the motor support base 103 is used to support and elevate the motor.
  • the substrate carrier 200 is generally a rectangular flat plate for placing and holding a glass substrate. Its material is usually made of a transparent material such as glass or acrylic. The transparent material can be conveniently located when needed.
  • the light source module (not shown in the figure) can be used for back-lighting the substrate to increase image contrast.
  • the contact probe detection module 300 usually has two groups, symmetrically arranged, and the contact probes 305 are placed in the sensor head 305 a to contact the glass substrate circuit to confirm. For the defective part of the substrate, the contact probe 305 and the sensing head 305a are driven by the vertical movement transmission module 301 and can move vertically.
  • the main constituent elements of the vertical movement transmission module 301 include the first The bottom plate 301a, the linear slide group 301b, the servo rotary motor 301c, the ball lead screw 301d, and the second bottom plate 301e are connected to the linear slide group 301b through a linear slider (not shown), and the connecting plate 301f is connected to the first The second base plate 301e and the probe module sensor 304; therefore, the contact probe 305 can be moved vertically up and down relative to the glass substrate by the drive of the servo rotation motor 301c.
  • the contact probe 305 needs to move up and down with respect to the substrate. It also needs to move horizontally with respect to the substrate.
  • a horizontal motion transmission module 302 can be used to achieve this function. Its main components include a support beam 3021 and a linear slide group 3022.
  • the linear motor body 3024a includes a linear slider group (not shown in the figure), a position sensor (not shown in the figure), and a motor stator (not shown in the figure).
  • linear motors can be divided into linear stepping motors and linear servo motors.
  • linear stepping motors have small thrust, they can be used for open-loop control for positioning control.
  • the structure is simpler and linear servos
  • the main components of a motor usually include a linearly arranged motor stator made of permanent magnets, position sensors such as optical rulers, slide blocks and other supporting parts, a drive system and a mover composed of built-in coils of silicon steel sheets. Composed of other elements, mover system and slide rail, slide Blocks and other scales are connected, which can slide relative to the stator.
  • the drive system sends drive signals to the mover through the coil input voltage and current in the mover, and causes the mover and the stator's magnetic field to generate a force to drive the mover forward.
  • the driving voltage or current is adjusted to form a closed-loop control system (Close-loop control system :).
  • the mover 3024b moves relative to the motor body 3024a through the driving circuit system, and the mover 3024b is connected to the first base plate 301a of the vertical motion transmission module 301. Therefore, the entire vertical motion transmission module 301 can be Driven by the horizontal motion transmission 302, the contact probe 305 moves horizontally to the left and right relative to the glass substrate.
  • the contact probe 305 can be moved back and forth relative to the substrate through a linear motor positioning transmission system 303.
  • the linear motor positioning transmission system 303 is configured on the outside of the substrate bearing platform and the center of the scale is approximately the centerline of the substrate.
  • the main components thereof include the motor body 3031, the mover 3032 and its corresponding drive circuit system (not shown in the figure), and the mover 3033 and its corresponding drive circuit system (not shown in the figure);
  • the composition of the motor body 3031 also includes a slide block (not shown in the figure), a position sensor (not shown in the figure) ) And a motor stator (not shown in the figure), and the linear motor positioning transmission system 303 differs from the linear motor positioning transmission system 3024 in that the linear motor positioning transmission system 303 connects two movers 3032 and 3031 in a single motor body 3031 and 3033 and its corresponding driving circuit system (not shown in the figure), and the movers 3032 and 3033 can be driven by them independently.
  • the circuit system It is driven by the circuit system, that is, it can independently move relative to the motor body 3031, which is the so-called single-axis dual-carrier technology generally known in the industry; compared with the traditional ball screw with a linear motor in the form of a rotary motor, the linear motor is used for positioning and transmission
  • the system's single-axis dual-carrier technology will greatly reduce the area occupied by the machine.
  • the linear motor positioning transmission system 303 and the horizontal motion transmission module 302 can be connected through a connection support base 304.
  • the connection support base 304 is connected to the movers 3032, 3033 and the horizontal motion transmission module 302 of the linear motor positioning transmission system 303, respectively.
  • the support beam 3021 enables the linear motor positioning transmission system 303 to drive the entire horizontal motion transmission module 302
  • the contact probe 305 can be moved up, down, left, and right relative to the glass substrate through the probe vertical movement transmission module 301, horizontal movement transmission module 302, and linear motor positioning transmission system 303, so that the contact probe 305 can It can maintain good contact with the circuit on the substrate according to different circuit design conditions, and provide accurate measurement quality.
  • the electrostatic capacitance coupling sensor 401 is driven by the telescopic rod 4021 of the actuator 402 to be close to or away from the substrate.
  • the actuator 402 and the linear motor are positioned and driven.
  • the mover 4031 of the system 403 is connected.
  • the linear motor positioning transmission system 403 uses single-axis and dual-carrier technology to make it possible to have two movers and actuators connected to each other. Its main components include a stator 4033, a linear slide 4032, and The linear slider (not shown in the figure), the base 4034, and the linear motor positioning transmission system 403 can move the sensor 401 horizontally to the left and right.
  • the linear motor positioning transmission system 403 is connected to another linear motor positioning transmission system 404.
  • the linear motor positioning transmission system 404 also adopts the aforementioned single-axis dual-mover technology. Its main components include a motor body 4041 and two pairs of movers 4042 ( (As shown in FIG. 8) and 4043 (as shown in FIG.
  • the composition of the motor body 4041 also includes a slide block (not shown in the figure) , Position sensor (not shown in the figure) and motor stator (not shown in the figure), and the base 4034 of the linear motor positioning transmission system 403 is connected to one pair of movers 4042 of the linear motor positioning transmission system 404
  • the linear motor positioning transmission system 404 can be driven to drive the linear motor positioning transmission system 403 and then drive the sensor to move forward and backward.
  • a laser method can be used to cut off a short circuit of the line defect point coordinate, thereby repairing the substrate.
  • a laser repairing head 501 which includes a laser generating system for generating a laser with a power to cut off a short-circuited metal foreign body, which may further include an optical microscope magnification component (not shown in the figure) to provide When the image is cut, the laser repairing head 501 needs a transmission system to be connected to the line defect point to perform its function.
  • the laser repairing head 501 and a The linear motor positioning transmission system 502 is connected with a mover 5021.
  • the linear motor positioning transmission system 502 mainly includes a stator 5022, a slide rail 5023, and a slider, a base 5024, and a linear motor positioning transmission system 502, which can drive a laser repair head. 501 moves left and right horizontally.
  • the linear motor positioning transmission system 502 is connected to another linear motor positioning transmission system 404, which can further drive the laser repairing head 501 to move forward and backward.
  • the linear motor positioning transmission system 404 is connected to the linear motor positioning transmission system 502 and the linear motor positioning transmission system 403 through movers 4042 and 4043, respectively. Therefore, a single motor body 4041 can independently drive and control the electrostatic capacitance coupling sensor 401. And the laser repair head 501, which moves relative to the glass substrate, can greatly save the components required for transmission, compared with the combination of a commonly used rotary motor and a ball lead screw, thereby reducing the size of the machine and saving space in the clean room.
  • the completed metal circuit and the glass substrate 10 to be inspected are loaded into a machine table by a transmission system such as a robot arm, and placed and held on the substrate carrier 200.
  • the driving probe 305 is driven by the driving system 301, the driving system 302, and the driving system 303 to correctly contact the metal lines on the glass substrate 10, and the driving system 402, the driving system 403, and the driving system 404 are used to drive the non-
  • the touch sensor 401 can be brought close to the glass substrate 10 to an appropriate distance to detect a short circuit defect and determine the position of the line defect.
  • the laser repairing die 501 is driven to the position of the line short-circuit defect via the transmission system 502 and the transmission system 404, and is cut off by laser to cause a short circuit. Foreign matter, making the area a normal area.
  • the laser repairing die head 501 is returned to the original position, and the glass substrate 10 is removed by using a transmission system such as a robot arm, and the machine returns to the initial stage. Status, waiting for the next substrate to be tested.
  • the present invention has the following advantages:
  • the machine can save a lot of manufacturing components, which can greatly reduce the construction cost and is suitable for standard mass production line configuration.
  • linear motor positioning drive system 3031 motor body 3032 mover 3033 mover 304 connection support seat

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Liquid Crystal (AREA)

Abstract

Un équipement pour LCD ayant spécifiquement des fonctions de réparation au laser et de mise à l'essai de défaut de ligne pour une plaque de base en verre. L'équipement comprend une base de table; un module de support d'une plaque de base pour la mise en place et le support de la plaque de base en verre; un module de mise à l'essai/sonde ayant des sondes de contact et un système d'actionnement de sondes de contact; un module de mise à l'essai sans contact ayant des capteurs sans contact et un système d'actionnement de mise à l'essai sans contact; et un module de réparation au laser qui présente une tête de réparation laser et un système actionnement de réparation laser et répare le défaut de ligne sur la plaque de base en verre grâce au laser. Un procédé de mise à l'essai de réparation du défaut de ligne sur une plaque de base en verre.
PCT/CN2004/000262 2004-03-26 2004-03-26 Dispositif et procede de reparation et de mise a l'essai d'un defaut de ligne WO2005093441A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/CN2004/000262 WO2005093441A1 (fr) 2004-03-26 2004-03-26 Dispositif et procede de reparation et de mise a l'essai d'un defaut de ligne

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2004/000262 WO2005093441A1 (fr) 2004-03-26 2004-03-26 Dispositif et procede de reparation et de mise a l'essai d'un defaut de ligne

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Publication Number Publication Date
WO2005093441A1 true WO2005093441A1 (fr) 2005-10-06

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1167921A (zh) * 1996-04-23 1997-12-17 钟国桢 自动多探针印刷电路板测试设备和方法
CN1205774A (zh) * 1995-12-22 1999-01-20 新系统有限公司 探针位置可以调节的对印刷电路进行电气测试的机器
CN1223455A (zh) * 1997-11-28 1999-07-21 联华电子股份有限公司 半导体器件的修补测试方法
CN2507609Y (zh) * 2001-08-17 2002-08-28 优升精机工业有限公司 立体测量装置
CN1383489A (zh) * 2000-07-05 2002-12-04 Oht株式会社 检查装置及检查方法
CN1427265A (zh) * 2001-12-21 2003-07-02 瀚宇彩晶股份有限公司 电子产品电路讯号定位检测系统及其方法
CN1473354A (zh) * 2001-09-10 2004-02-04 ������������ʽ���� 基片缺陷修补装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1205774A (zh) * 1995-12-22 1999-01-20 新系统有限公司 探针位置可以调节的对印刷电路进行电气测试的机器
CN1167921A (zh) * 1996-04-23 1997-12-17 钟国桢 自动多探针印刷电路板测试设备和方法
CN1223455A (zh) * 1997-11-28 1999-07-21 联华电子股份有限公司 半导体器件的修补测试方法
CN1383489A (zh) * 2000-07-05 2002-12-04 Oht株式会社 检查装置及检查方法
CN2507609Y (zh) * 2001-08-17 2002-08-28 优升精机工业有限公司 立体测量装置
CN1473354A (zh) * 2001-09-10 2004-02-04 ������������ʽ���� 基片缺陷修补装置
CN1427265A (zh) * 2001-12-21 2003-07-02 瀚宇彩晶股份有限公司 电子产品电路讯号定位检测系统及其方法

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