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WO2004108566A3 - Conveyor for plate-shaped members - Google Patents

Conveyor for plate-shaped members Download PDF

Info

Publication number
WO2004108566A3
WO2004108566A3 PCT/KR2004/001338 KR2004001338W WO2004108566A3 WO 2004108566 A3 WO2004108566 A3 WO 2004108566A3 KR 2004001338 W KR2004001338 W KR 2004001338W WO 2004108566 A3 WO2004108566 A3 WO 2004108566A3
Authority
WO
WIPO (PCT)
Prior art keywords
plate
shaped member
conveying system
pressurized fluid
shaped members
Prior art date
Application number
PCT/KR2004/001338
Other languages
French (fr)
Other versions
WO2004108566A2 (en
Inventor
Dong-Heon Lee
Original Assignee
Dong-Heon Lee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dong-Heon Lee filed Critical Dong-Heon Lee
Publication of WO2004108566A2 publication Critical patent/WO2004108566A2/en
Publication of WO2004108566A3 publication Critical patent/WO2004108566A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

This invention is intended to provide a conveying system that can convey both thin and large plate-shaped members such as LCD, PDP, and organic EL without generating dust or causing damage to the plate-shaped members, to improve the performance of the conveying system in the patent of the applicant of this invention, the 'Plate-shaped Member Conveying System and Washing Device' (Korea Patent No. 0339716) by applying the technology, the 'Plate-shaped Member Conveying System and Washing Device' for which the applicant of this invention has applied for an international patent on March 30, 2004 (Patent Application No. 6-1-2004-0005158-13) and to expand the usage of the system. The plate-shaped member conveying system of this invention conveys a plate-shaped member through such means as follows: Install porous material having a flat part on top of the main body into which pressurized fluid is supplied, seal the space among several porous materials with a horizontal plate to form a layer of pressurized fluid erupting through the porous materials and another pressurized fluid layer between the horizontal sealing plate and the plate-shaped member so that the weight of the plate-shaped member can be supported by the pressurized fluid throughout a large area uniformly. Then the plate-shaped member can be conveyed vertically or inclined without contacting the floating device with its bottom being supported on the conveyor.
PCT/KR2004/001338 2003-06-05 2004-06-04 Conveyor for plate-shaped members WO2004108566A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2003-0036538 2003-06-05
KR1020030036538A KR20040105325A (en) 2003-06-05 2003-06-05 Conveyor for plate-shaped members

Publications (2)

Publication Number Publication Date
WO2004108566A2 WO2004108566A2 (en) 2004-12-16
WO2004108566A3 true WO2004108566A3 (en) 2005-03-10

Family

ID=33509618

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2004/001338 WO2004108566A2 (en) 2003-06-05 2004-06-04 Conveyor for plate-shaped members

Country Status (2)

Country Link
KR (1) KR20040105325A (en)
WO (1) WO2004108566A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100833881B1 (en) * 2007-02-20 2008-06-02 세메스 주식회사 Substrate Transfer Device
KR100847093B1 (en) * 2007-03-19 2008-07-18 에프엔에스테크 주식회사 Board Feeder
CN103648934B (en) * 2011-08-12 2015-08-12 川崎重工业株式会社 The Handling device of sheet material and the method for carrying of sheet material

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010050424A (en) * 1999-09-10 2001-06-15 이동헌 Conveyor for plate-shaped members
JP2001213517A (en) * 1999-11-24 2001-08-07 Daiichi Shisetsu Kogyo Kk Conveying device for plate member

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010050424A (en) * 1999-09-10 2001-06-15 이동헌 Conveyor for plate-shaped members
JP2001213517A (en) * 1999-11-24 2001-08-07 Daiichi Shisetsu Kogyo Kk Conveying device for plate member

Also Published As

Publication number Publication date
KR20040105325A (en) 2004-12-16
WO2004108566A2 (en) 2004-12-16

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