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WO2004036727A3 - Piezoelectric driving apparatus - Google Patents

Piezoelectric driving apparatus Download PDF

Info

Publication number
WO2004036727A3
WO2004036727A3 PCT/JP2003/013298 JP0313298W WO2004036727A3 WO 2004036727 A3 WO2004036727 A3 WO 2004036727A3 JP 0313298 W JP0313298 W JP 0313298W WO 2004036727 A3 WO2004036727 A3 WO 2004036727A3
Authority
WO
WIPO (PCT)
Prior art keywords
tip
actuator
driving apparatus
movable body
piezoelectric driving
Prior art date
Application number
PCT/JP2003/013298
Other languages
French (fr)
Other versions
WO2004036727A2 (en
Inventor
Junichi Seki
Original Assignee
Canon Kk
Junichi Seki
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk, Junichi Seki filed Critical Canon Kk
Priority to AU2003272100A priority Critical patent/AU2003272100A1/en
Publication of WO2004036727A2 publication Critical patent/WO2004036727A2/en
Publication of WO2004036727A3 publication Critical patent/WO2004036727A3/en

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

A driving apparatus, comprising a piezoelectric actuator (118) having a tip (108) displaceable in X,Y,Z three-axis directions, and a movable body (111) having translational movement freedom in X,Y two-axis directions, wherein the tip of the actuator is placed to be displaceable in Z-axis direction to come into pressure contact with the movable body, and the tip of the actuator under pressure contact is displaced within an XY-axis plane to move the movable body translationally in the direction of displacement of the tip of the actuator.
PCT/JP2003/013298 2002-10-18 2003-10-17 Piezoelectric driving apparatus WO2004036727A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003272100A AU2003272100A1 (en) 2002-10-18 2003-10-17 Piezoelectric driving apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002304558A JP2004140946A (en) 2002-10-18 2002-10-18 Actuator
JPNO.2002-304558 2002-10-18

Publications (2)

Publication Number Publication Date
WO2004036727A2 WO2004036727A2 (en) 2004-04-29
WO2004036727A3 true WO2004036727A3 (en) 2004-10-28

Family

ID=32105121

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2003/013298 WO2004036727A2 (en) 2002-10-18 2003-10-17 Piezoelectric driving apparatus

Country Status (3)

Country Link
JP (1) JP2004140946A (en)
AU (1) AU2003272100A1 (en)
WO (1) WO2004036727A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4649263B2 (en) * 2005-04-22 2011-03-09 キヤノン株式会社 Optical equipment
GB2425882A (en) 2005-04-29 2006-11-08 Univ Northumbria Newcastle Positioning apparatus
JP5620065B2 (en) * 2009-03-26 2014-11-05 株式会社日本総合研究所 External force direction detection system
JP2012178947A (en) 2011-02-28 2012-09-13 Ngk Insulators Ltd Piezoelectric actuator and piezoelectric actuator array
CN106026763B (en) * 2016-05-17 2017-05-17 西安交通大学 Piezoelectric ceramic drive three-freedom-degree angle adjusting device and method
FR3068751B1 (en) * 2017-07-06 2019-08-02 Universite Pierre Et Marie Curie TRANSMISSION MECHANISM WITH VARIABLE TRANSLATION RATIO
CN111338037A (en) * 2020-04-10 2020-06-26 季华实验室 Optical fiber coupling adjusting device and adjusting method thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0424609A1 (en) * 1989-09-28 1991-05-02 Rockwell International Corporation Piezoelectric actuator
JPH06204107A (en) * 1992-12-25 1994-07-22 Canon Inc Positioning stage apparatus
DE19715226A1 (en) * 1997-04-11 1998-10-15 Univ Schiller Jena Precision micro=positioning method using piezoelectric setting elements
WO1999059192A1 (en) * 1998-05-14 1999-11-18 Massachusetts Institute Of Technology Omni-directional high precision friction drive positioning stage
DE19859024A1 (en) * 1998-12-21 2000-06-29 Bosch Gmbh Robert Drive device has pressure element different from driven part arranged on side of piezo-element facing driven part to bias piezo-element, pressure element on other side, and clamp element

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0424609A1 (en) * 1989-09-28 1991-05-02 Rockwell International Corporation Piezoelectric actuator
JPH06204107A (en) * 1992-12-25 1994-07-22 Canon Inc Positioning stage apparatus
DE19715226A1 (en) * 1997-04-11 1998-10-15 Univ Schiller Jena Precision micro=positioning method using piezoelectric setting elements
WO1999059192A1 (en) * 1998-05-14 1999-11-18 Massachusetts Institute Of Technology Omni-directional high precision friction drive positioning stage
DE19859024A1 (en) * 1998-12-21 2000-06-29 Bosch Gmbh Robert Drive device has pressure element different from driven part arranged on side of piezo-element facing driven part to bias piezo-element, pressure element on other side, and clamp element

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 018, no. 556 (E - 1620) 24 October 1994 (1994-10-24) *

Also Published As

Publication number Publication date
JP2004140946A (en) 2004-05-13
AU2003272100A1 (en) 2004-05-04
WO2004036727A2 (en) 2004-04-29
AU2003272100A8 (en) 2004-05-04

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