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WO2001090732A3 - Capacitive-impedance type humidity/moisture sensing apparatus and method - Google Patents

Capacitive-impedance type humidity/moisture sensing apparatus and method Download PDF

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Publication number
WO2001090732A3
WO2001090732A3 PCT/US2001/040304 US0140304W WO0190732A3 WO 2001090732 A3 WO2001090732 A3 WO 2001090732A3 US 0140304 W US0140304 W US 0140304W WO 0190732 A3 WO0190732 A3 WO 0190732A3
Authority
WO
WIPO (PCT)
Prior art keywords
moisture
gas
impedance
capacitive
capacitor
Prior art date
Application number
PCT/US2001/040304
Other languages
French (fr)
Other versions
WO2001090732A2 (en
Inventor
Gerald Cooper
Original Assignee
Matheson Tri Gas Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matheson Tri Gas Inc filed Critical Matheson Tri Gas Inc
Priority to AU2001253860A priority Critical patent/AU2001253860A1/en
Publication of WO2001090732A2 publication Critical patent/WO2001090732A2/en
Publication of WO2001090732A3 publication Critical patent/WO2001090732A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

The moisture content of a gas is sensed by subjecting a moisture-sensing capacitor to the gas and then measuring the impedance of the capacitor. The moisture-sensing capacitor comprises a pair of closely spaced, porous, and parallel metal electrodes having a thin coating of a water-absorbing dielectric, such as zeolite therebetween. In a two-sensor system, the impedance of a dry reference capacitor is differentially compared to the impedance of the moisture-sensing capacitor in order to eliminate any effects that variations in gas temperature and/or gas pressure may have on the measurement of the moisture content of the gas.
PCT/US2001/040304 2000-05-10 2001-03-15 Capacitive-impedance type humidity/moisture sensing apparatus and method WO2001090732A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001253860A AU2001253860A1 (en) 2000-05-10 2001-03-15 Capacitive-impedance type humidity/moisture sensing apparatus and method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US56911200A 2000-05-10 2000-05-10
US09/569,112 2000-05-10

Publications (2)

Publication Number Publication Date
WO2001090732A2 WO2001090732A2 (en) 2001-11-29
WO2001090732A3 true WO2001090732A3 (en) 2003-02-13

Family

ID=24274148

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/040304 WO2001090732A2 (en) 2000-05-10 2001-03-15 Capacitive-impedance type humidity/moisture sensing apparatus and method

Country Status (2)

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AU (1) AU2001253860A1 (en)
WO (1) WO2001090732A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010003710A1 (en) * 2010-04-08 2011-10-13 Endress + Hauser Gmbh + Co. Kg Method and device for determining a proportion of an adsorbed substance contained in an adsorbent material
WO2015014379A1 (en) * 2013-08-02 2015-02-05 Universität Duisburg-Essen Electrical capacitor comprising nanoparticles of a semiconductive material
CN103630582B (en) * 2013-12-11 2016-02-10 江苏物联网研究发展中心 A kind of MEMS humidity sensor and preparation method

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2976728A (en) * 1958-01-20 1961-03-28 Union Carbide Corp Electrolytic moisture measuring apparatus
US3315518A (en) * 1966-02-07 1967-04-25 Research Corp Humidity sensing devices
DE2536778A1 (en) * 1975-08-19 1977-03-03 Issel Wolfgang Continuous determination of plant water content - is for irrigation control using capacitive probe containing adsorption layer
US4876890A (en) * 1988-06-29 1989-10-31 Uop Moisture sensing apparatus and method
US5143696A (en) * 1989-11-04 1992-09-01 Dornier Gmbh Selective gas sensor
WO1997037288A1 (en) * 1996-03-29 1997-10-09 Netzer, Yohay A window capacitive moisture sensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2976728A (en) * 1958-01-20 1961-03-28 Union Carbide Corp Electrolytic moisture measuring apparatus
US3315518A (en) * 1966-02-07 1967-04-25 Research Corp Humidity sensing devices
DE2536778A1 (en) * 1975-08-19 1977-03-03 Issel Wolfgang Continuous determination of plant water content - is for irrigation control using capacitive probe containing adsorption layer
US4876890A (en) * 1988-06-29 1989-10-31 Uop Moisture sensing apparatus and method
US5143696A (en) * 1989-11-04 1992-09-01 Dornier Gmbh Selective gas sensor
WO1997037288A1 (en) * 1996-03-29 1997-10-09 Netzer, Yohay A window capacitive moisture sensor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
G. J. SZEPAROWICZ: "continuous humidity monitor for large computer systems", IBM TECHNICAL DISCLOSURE BULLETIN, vol. 22, no. 10, 1980, pages 4652 - 4653, XP002206186 *

Also Published As

Publication number Publication date
AU2001253860A1 (en) 2001-12-03
WO2001090732A2 (en) 2001-11-29

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