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WO2001050102A1 - Capteur a thermopile et procede de mesure de temperature par rayons infrarouges - Google Patents

Capteur a thermopile et procede de mesure de temperature par rayons infrarouges Download PDF

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Publication number
WO2001050102A1
WO2001050102A1 PCT/JP2000/000047 JP0000047W WO0150102A1 WO 2001050102 A1 WO2001050102 A1 WO 2001050102A1 JP 0000047 W JP0000047 W JP 0000047W WO 0150102 A1 WO0150102 A1 WO 0150102A1
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WO
WIPO (PCT)
Prior art keywords
cold junction
temperature
self
heating element
resistor
Prior art date
Application number
PCT/JP2000/000047
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English (en)
Japanese (ja)
Inventor
Kazuhito Sakano
Original Assignee
Kazuhito Sakano
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kazuhito Sakano filed Critical Kazuhito Sakano
Priority to PCT/JP2000/000047 priority Critical patent/WO2001050102A1/fr
Priority to AU18919/00A priority patent/AU1891900A/en
Publication of WO2001050102A1 publication Critical patent/WO2001050102A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
    • G01J5/14—Electrical features thereof
    • G01J5/16—Arrangements with respect to the cold junction; Compensating influence of ambient temperature or other variables

Definitions

  • the present invention relates to a thermopile sensor and a temperature measuring method using infrared rays. More particularly, the present invention relates to a thermopile sensor and a temperature measuring method using infrared rays. The present invention relates to a thermopile sensor for detecting temperature and a method of measuring temperature using infrared rays using the thermopile sensor.
  • thermometers emit more infrared radiation from the eardrum and surrounding tissues than contact-type thermometers such as the sublingual thermometer that measures the temperature in the oral cavity and the axillary thermometer that measures the temperature in the axilla for hygiene reasons.
  • contact-type thermometers such as the sublingual thermometer that measures the temperature in the oral cavity and the axillary thermometer that measures the temperature in the axilla for hygiene reasons.
  • non-contact ear thermometers that measure body temperature by detecting body temperature.
  • ear ear thermometers are attracting attention because they can measure body temperature more accurately than other parts of the human body, such as the oral cavity and the axilla. one of.
  • Non-contact type thermometers generally use a pyroelectric sensor or a thermopile sensor as a non-contact type temperature sensor for detecting infrared rays emitted from a measurement target.
  • a pyroelectric sensor is a sensor that detects, as an output, a change in surface charge of a pyroelectric body due to a temperature change when absorbing infrared energy radiated from a measurement target. The pyroelectric sensor outputs an output only when the temperature of the pyroelectric body changes. Therefore, the incident infrared ray is shoved to intermittently intercept and output continuously.
  • a thermopile sensor is a sensor that deposits thermocouples using integrated circuit technology and uses a large number of directly connected thermocouples to obtain a continuous output for the temperature difference between the hot junction and the cold junction.
  • thermopile sensor for example, there is a thermopile sensor for infrared measurement disclosed in Japanese Patent Application Laid-Open No. 11-258555. Such a thermopile sensor is shown in FIGS. 11 to 13 and will be described below.
  • FIG. 11 is a cross-sectional view of the conventional thermopile sensor disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 11-25055, after the thermopile sensor is mounted on a sensor stem, and FIG. It is a top view of a mopile part.
  • a concave portion 3 is formed at the center of the upper surface of the heat sink 2 having a large heat capacity made of a silicon substrate. (Thin film) 4 is formed.
  • thermocouple materials 5 and second thermocouple materials 6 are alternately wired on the heat sink 2 and the hot junction supporting film 4 from the upper surface of the heat sink 2 to the upper surface of the hot junction supporting film 4.
  • the thermopile 9 is formed by connecting to the thermopile.
  • electrodes 10 are provided at both ends of the thermopile 9. Note that the upper surface of the thermal junction 8 is covered with the infrared absorber 11.
  • thermoelectromotive force is generated in the hot junction 8 and an electromotive force corresponding to the temperature difference between the hot junction 8 and the cold junction 7 is output from the electrode 10. Is done.
  • An aluminum thin film 12 is formed on the entire lower surface of the heat sink 2, and the entire aluminum thin film 12 is covered with an insulating thin film 13.
  • a thin-film summit 14 is formed as shown in FIG. 13, and lead wires 15 and 16 are provided at both ends of the thin-film summit 14. Is provided. Since the heat capacity of the heat sink 2 is large, the temperature change is small, and the temperature of the cold junction 7 is equal to the temperature of the heat sink 2. Therefore, the temperature of the cold junction 7 can be measured by measuring the temperature of the heat sink 2 using the thin film thermistor 14.
  • a thin film sensor is mounted on the upper surface of the sensor stem 17 for mounting the thermopile sensor 1.
  • a recess 18 is formed by lowering the area facing the mistake 14 by one step, and a wiring pattern (not shown) is formed on both sides of the recess 18 and connected to the extraction electrodes 15 and 16.
  • wire bonding (not shown) is connected to the electrode 10, and the output of the thermopile 9 can be taken out to the sensor stem 17, and the wiring is connected to the output circuit from the above wiring pattern, and the output of the thin film semiconductor 14 is output. That is, the temperature of the cold junction 7 can be extracted.
  • the infrared radiation emitted from the measurement target is absorbed by the infrared absorber 11 formed on the hot junction 8 and a temperature difference occurs between the hot junction 8 and the cold junction ⁇ , and the temperature is measured.
  • An electromotive force is generated between the electrodes 10 of the thermopile 9.
  • the temperature of the hot junction 8 is T
  • the temperature of the cold junction 7 is ⁇ .
  • the electromotive force V generated between the electrodes 10 of the thermopile 9 for temperature measurement is calculated by Stefan-Boltzmann's law.
  • V k (T 4 — T. 4 ) (k is a constant)... (1)
  • the analog data of the electromotive force V is sent to a microcomputer via an analog / digital converter (not shown), and the fourth root calculation is performed at a microphone mouth on the basis of the digital data. It is possible to know the temperature of the junction 8, that is, the relative temperature T of the sample to be measured.
  • the temperature of the cold junction is measured as the reference temperature of the relative temperature T, so it is important to accurately detect the temperature of the cold junction.
  • a thin-film thermistor 14 is provided on the lower surface of the heat sink 2. Therefore, if the heat sink 2 does not transmit infrared light even when the thermal junction 8 is irradiated with infrared rays, the infrared rays are blocked by the heat sink 2 and the hot junction supporting film 4 and the heat sink 2 Even in the case of transparency, infrared rays are blocked by the aluminum thin film 12. In other words, no electromotive force due to infrared rays is generated at the bottom of the film, and the temperature of the cold junction can be detected accurately, and the Error can be reduced.
  • thermopile 9 and the thin-film thermometer 14 occupy the same area as the thermopile 9.
  • the chip size of the thermopile sensor 1 can be reduced.For example, it is possible to measure the thermopile sensor 1 as close as possible to the eardrum near the eardrum in an ear thermometer, and accurate measurement is possible. Becomes Furthermore, since the chip size can be reduced, the number of chips obtained from one silicon wafer increases, and the cost of the thermopile sensor 1 can be reduced.
  • thermopile sensor or the thermopile type temperature sensor disclosed in Japanese Patent Application Laid-Open No. 11-250555.
  • the measurement error was large when the ambient temperature changed rapidly.
  • the heat sink 2 immediately after being transported from a cool place to a warm place, or vice versa, the heat sink 2 has a large heat capacity and is thermally connected to the sensor stem (metal housing) 17, so that the ambient temperature changes. Can not follow. Further, it cannot follow the thermal response speed of the thermal bonding support film 4 having a small heat capacity.
  • the temperature T of the cold junction 7 becomes the reference temperature of the relative temperature T. Is a state that is different from the ambient temperature or a transient state that continues to fluctuate until it reaches an equilibrium state with the ambient temperature. It is difficult to detect stably. That is, the relative electromotive force generated in the thermopile 9 depends on the temperature of the infrared absorber 11 installed on the hot-junction support film 4 and the temperature of the hot-junction support film 4 itself caused by the infrared absorption from the measurement target. Since an electromotive force is generated due to the temperature difference between the hot junction temperature and the cold junction temperature that depends on the upper surface temperature of the heat sink 2, a measurement error occurs if the upper surface temperature of the heat sink 2 is not stable. Easy.
  • thermopile sensor is a sensor that takes out a relative output with respect to the temperature difference between the hot junction and the cold junction as described above.
  • a relative output error due to the so-called “temperature coefficient of sensitivity” generally occurs at a rate of 0.2 to 0.4% / ° C. Error prone.
  • thermopile is a sensor that outputs a relative electromotive force based on the temperature of the cold junction.
  • the temperature of the cold junction itself is measured, and this cold junction temperature is measured as the thermopile output temperature. Unless it is added, it is not possible to know the temperature of the measurement evening.
  • the cold junction temperature depends on the temperature of the heat sink, and it may not be possible to accurately measure the cold junction temperature depending on the installation position of the thin-film sensor, which is a cold junction temperature measuring element.
  • the silicon substrate heat sink 2 having a thickness of several hundred microns is thermally coupled to the sensor stem 17 on the lower surface and cooled on the upper surface. Thermally bonded to the joint. Since the heat sink 2 itself is made of silicon, it does not have the same thermal conductivity as a metal material such as copper, and has a thickness of several hundred microns, so that the lower surface and the upper surface cannot be said to be heat equivalent. Temperature gradient exists. Therefore, the temperature of the cold junction installed on the upper surface of the heat sink 2 cannot be accurately measured because the thin-film sensor 14 for measuring the temperature of the cold junction installed on the lower surface of the heat sink 2 cannot be measured accurately. When the ambient temperature suddenly changed, measurement errors were likely to occur.
  • thermopile sensor This time difference fluctuates in various situations when the ambient temperature is stable, slowly changing, and rapidly changing, so that the relative output temperature of the thermopile sensor and the cold junction
  • a temperature difference occurs in the measurement result due to the change of the ambient temperature even though the temperature of the same measurement is measured at the same time. It was the cause of being born.
  • An object of the present invention is to solve the above-mentioned problems in the prior art, improve the measurement accuracy, and provide an inexpensive and durable thermopile sensor with a small number of components.
  • thermopile sensor characterized by having a resistor having a self-controlling positive temperature coefficient characteristic therein.
  • a resistor with a self-controlling positive temperature coefficient characteristic has the property that the electrical resistance of the heating element increases as the temperature of the heating element rises due to energization. It has the feature of being maintained at a constant temperature.
  • thermopile sensor has a resistor having a self-control type positive temperature coefficient characteristic for maintaining the same at a required temperature, so that a constant bias temperature at which the cold junction of the thermopile sensor is set is applied in advance.
  • the self-regulating heating element with positive temperature coefficient characteristics adjusts itself to absorb changes in ambient temperature below the set temperature.As a result, it is possible to detect an accurate temperature that is not affected by the ambient temperature. Wear. Also, overheating of the thermopile can be prevented without adding a safety device and a separate temperature detection device. Further, a complicated feedback temperature control circuit including a temperature measuring element such as a thermistor for maintaining the temperature at a required temperature is not required. Therefore, it is possible to provide an inexpensive, durable, and highly safe thermopile sensor with improved measurement accuracy and a reduced number of parts.
  • thermopile sensor having a structure in which a resistor including a self-controlling positive temperature coefficient characteristic is incorporated in a cold junction region.
  • thermopile sensor having a self-control type positive temperature coefficient characteristic, in which the thermal response speed of the resistor is as close as possible to the output response speed of the thermopile, and having a small measurement error and high reliability.
  • the present invention provides a thermopile sensor characterized by having a structure in which a resistor having a self-controlling positive temperature coefficient characteristic is thermally directly connected to a cold junction region. is there.
  • the thermal response speed of the resistor including the self-controlling positive temperature coefficient characteristic is made as close as possible to the output response speed of the thermopile, thereby providing a highly reliable thermopile sensor with a small measurement error. be able to.
  • the present invention provided to solve the above problems provides a heating element system for heating the cold junction region and a cold junction temperature measuring element system for measuring the temperature of the cold junction region.
  • a thermopile sensor wherein at least one of the heating element system and the cold junction temperature measuring element system is synchronized in thermopile output and thermal response speed.
  • the cold junction and the cold junction temperature measuring element are forcibly subordinated by the heating element system and raised in advance to a certain bias temperature. Therefore, it is possible to suppress an output error due to the “temperature coefficient of sensitivity” which becomes a problem when the temperature difference between the hot junction region and the cold junction region is large.
  • the change in resistance of the cold junction temperature measuring element system is only the temperature rise of the hot junction due to infrared energy from the first measurement, and the thermal response speed of the cold junction temperature measuring element system is extremely fast. This enables synchronization with the output response speed of the thermopile sensor, and reduces measurement errors.
  • thermopile sensor comprising: a resistor having a self-controlling positive temperature coefficient characteristic as the heating element system; and a thermistor temperature measuring element as the cold junction temperature measuring element system. is there.
  • NTC Negative Temperature Coefficient
  • PTC Positive Temperature Coefficient
  • thermopile overheating accident can be prevented without adding a temperature detecting device separate from a safety device, and a highly safe thermopile sensor can be provided.
  • the present invention provided to solve the above-mentioned problem is to arrange a semiconductor heating element as the heating element system, and arrange a resistor including a self-controlling positive temperature coefficient characteristic as the cold junction temperature measuring element system.
  • a thermopile sensor The above-mentioned semiconductor element generates heat by passing a predetermined current through a transistor or a diode to heat the cold junction region, and at this time, a cold junction temperature measuring element generated in response to the temperature of the cold junction region The temperature of the cold junction can be detected by directly detecting the change in the self-resistance of the resistor including the self-control type positive temperature coefficient characteristic of the system and converting it to a temperature.
  • thermopile sensor with small measurement errors can be provided.
  • the present invention provided to solve the above-described problems includes a resistor having a self-controlling positive temperature coefficient characteristic, a heating element system for heating a cold junction region, and a heating element system that does not generate self-heating and has a cold junction region.
  • the thermopile sensor has a function divided into a non-heated cold junction temperature measuring element system for measuring temperature.
  • thermopile In the resistor including the self-control type positive temperature coefficient characteristic of the heating element system, a thermopile is used to stabilize and heat at a constant temperature of the saturation self-stabilizing temperature when a predetermined current is applied to heat the cold junction region. A constant bias temperature at which the sensor's cold junction is set is pre-applied.Ambient temperature change below the set temperature is controlled by a resistor with a self-controlling positive temperature coefficient characteristic. As a result, an accurate temperature that is not affected by the ambient temperature can be detected. Furthermore, without adding a safety device and a separate temperature detection device, overheating of the thermopile can be prevented.
  • thermo-resistor with a self-control positive temperature coefficient
  • a constant bias temperature is set in advance at the cold junction of the pile sensor, so even if the ambient temperature suddenly changes, the ambient temperature change below the set temperature will be self-controlling positive temperature coefficient characteristics.
  • the heating element adjusts itself to absorb the temperature change, and as a result, the cold junction temperature is maintained at a constant temperature.
  • the temperature rise of the cold junction caused by this temperature rise reaches a thermal equilibrium state after a predetermined time, and a temperature difference occurs between the hot junction and the cold junction. Since the temperature of the cold junction is regulated at a fixed bias temperature before measuring the measurement target temperature, it is easy to extract the rise in the temperature of the cold junction by infrared rays from the sunset. By directly detecting the self-resistance change of the resistor, including the self-control type positive temperature coefficient characteristic of the cold junction temperature measuring element system generated in response to the temperature of the junction area, the temperature is converted to a cold junction. Temperature can be accurately detected.
  • the temperature measuring element system has a structure in which a resistor including the self-control type positive temperature coefficient characteristic is thermally connected directly to the cold junction area, and under a constant bias temperature condition excluding the influence of ambient temperature.
  • the temperature of the cold junction is constrained and treated as a specified value, and only the change in the temperature of the hot junction, that is, the output temperature of the thermopile, is detected, and the information processor outputs the output temperature value of the thermopile and the constant bias temperature. Detect the temperature of the cold junction of the thermopile each time by adding the specified value And more accurate temperature detection becomes possible.
  • thermopile sensor having a structure in which a plurality of systems each composed of a body are incorporated in the cold junction region.
  • the present invention provides a resistor 2 including a self-controlling positive temperature coefficient characteristic of a different resistor which is thermally directly connected to a cold junction region and electrically insulated between elements.
  • a thermopile sensor having a structure in which at least one pair composed of individual pieces is incorporated in the cold junction region.
  • the present invention provides a resistor 2 including a self-controlling positive temperature coefficient characteristic of a different resistor which is thermally directly connected to a cold junction region and electrically insulated between elements.
  • a thermopile sensor is characterized by having a structure in which a plurality of pairs of individual pairs are combined into a plurality of systems in the cold junction region.
  • the resistors including the self-control type positive temperature coefficient characteristic can be heated for each system and fine temperature control can be performed.
  • the resistors including the self-controlling positive temperature coefficient characteristic of the heating system and the temperature measuring element system are both safe without being overheated to a certain temperature or higher.
  • thermopile sensor of the present invention may be configured such that at least one of a resistor having a self-controlling positive temperature coefficient characteristic of the heating system and a resistor having a self-controlling positive temperature coefficient characteristic of the temperature measuring element system is provided.
  • the composition is formed on the substrate surface by vapor deposition.
  • thermopile sensor is generally formed on a surface of a silicon pellet, a silicon chip, or a silicon wafer by using a semiconductor lamination technique. Therefore, even when forming a resistor having a self-controlling positive temperature coefficient characteristic, it is possible to increase the degree of integration of the thermopile sensor of the present invention by forming it using a vapor deposition technique, which is one method of such a semiconductor lamination technique. It can be manufactured efficiently. In addition, the cooling of the resistor and thermopile including the self-control type It is easy to thermally connect directly to the joint area.
  • thermopile sensor of the present invention may include at least one of a resistor having a self-controlling positive temperature coefficient characteristic of the heating system and a resistor having a self-controlling positive temperature coefficient characteristic of the temperature measuring element system. However, it is preferably formed by baking on the substrate surface.
  • the thermopile sensor of the present invention can be efficiently manufactured by pasting and baking a resistor having a self-controlling positive temperature coefficient characteristic on a substrate surface such as a printed circuit board.
  • thermopile sensor of the present invention may include at least one of a resistor having a self-controlling positive temperature coefficient characteristic of the heating system and a resistor having a self-controlling positive temperature coefficient characteristic of the temperature measuring element system.
  • the surface is printed on the substrate surface.
  • the thermopile sensor of the present invention can be efficiently manufactured by printing a resistor having a self-controlling positive temperature coefficient characteristic on the surface of a printed circuit board or the like.
  • thermopile sensor of the present invention the heating element region in which the heating element system is arranged and the cold junction temperature measuring element region in which the cold junction temperature measuring element system is arranged are located outside the cold junction around the hot junction. In addition, it is preferable that they are arranged on a substrate on which the cold junctions are arranged, and that they are arranged in a horizontal direction.
  • thermopile sensor of the present invention With this configuration, the arrangement of the hot junction and the cold junction, which has been applied in the conventional thermopile sensor, can be applied to the thermopile sensor of the present invention.
  • thermopile sensor of the present invention includes a heating element region in which the heating element system is arranged and a cold junction temperature measuring element region in which the cold junction temperature measuring element system is arranged, wherein a cold junction portion is formed around a hot junction portion. It is preferable that they are arranged on the outside and on the substrate on which the cold junction is arranged so that they are lined up vertically.
  • thermopile sensor of the present invention With this configuration, the arrangement of the hot junction and the cold junction, which has been applied in the conventional thermopile sensor, can be applied to the thermopile sensor of the present invention.
  • the heating element region in which the heating element system is arranged and the cold junction temperature measuring element region in which the cold junction temperature measuring element system is arranged include a hot junction. It is preferable that they are arranged outside the cold junction as a center and outside the substrate on which the cold junction is arranged, so that they are aligned in the vertical direction.
  • thermopile sensor of the present invention With this configuration, the arrangement of the hot junction and the cold junction, which has been applied in the conventional thermopile sensor, can be applied to the thermopile sensor of the present invention.
  • the shape of the heating element region in which the heating element system is arranged and the shape of the cold junction temperature measuring element region in which the cold junction temperature measuring element system is arranged are separated by a continuous square or a fixed angle. It is preferable to use a discontinuous polygon, a continuous circle, or a discontinuous circle separated by a certain angle.
  • thermopile sensor of the present invention With this configuration, the arrangement of the hot junction and the cold junction, which has been applied in the conventional thermopile sensor, can be applied to the thermopile sensor of the present invention.
  • thermopile sensor of the present invention is a thermopile having a structure in which a cold junction is incorporated in or inside a silicon pellet or a silicon chip, and has a buried layer structure in the silicon pellet or the silicon chip.
  • the resistor having a self-controlling positive temperature coefficient characteristic has a hybrid structure with the cold junction.
  • thermopile sensor of the present invention With this configuration, the arrangement of the hot junction and the cold junction, which has been applied in the conventional thermopile sensor, can be applied to the thermopile sensor of the present invention.
  • thermopile sensor of the present invention provides a thermopile having a structure in which a cold junction is incorporated into or inside a silicon pellet or a silicon chip, and the thermopile sensor includes a silicon thin film formed on the surface of the silicon pellet or the silicon chip. It is preferable to have a structure in which a resistor having a self-controlling positive temperature coefficient characteristic is composed. With this configuration, the arrangement of the hot junction and the cold junction, which has been applied in the conventional thermopile sensor, can be applied to the thermopile sensor of the present invention.
  • thermopile sensor of the present invention is a thermopile having a structure in which a cold junction is formed as a thick film on the surface of a chip substrate made of an insulator. It is preferable that a resistor having a temperature coefficient characteristic has a thick film hybrid structure hybridized with the cold junction.
  • thermopile sensor of the present invention is formed by arranging a planar self-controlling positive temperature coefficient characteristic resistor having an electric insulating film on the surface of the cold junction area.
  • thermopile sensor of the present invention With this configuration, the arrangement of the hot junction and the cold junction, which has been applied in the conventional thermopile sensor, can be applied to the thermopile sensor of the present invention.
  • the present invention provided to solve the above-mentioned problem provides a non-heated cold junction temperature measuring element that measures the temperature of a cold junction without generating heat by using a resistor having a self-controlling positive temperature coefficient characteristic. And a heating element system that self-heats and heats the cold junction temperature measuring element area and the cold junction area in which the cold junction temperature measuring element system is arranged.
  • the shape of the resistor including the self-controlling positive temperature coefficient characteristic is planar, and a large number of positive electrodes and negative electrodes are alternately arranged on the surface of the resistor including the planar self-controlling positive temperature coefficient characteristic.
  • This is a thermopile sensor characterized by horizontally arranging a comb-shaped analog thermostat acting horizontally.
  • the cold junction temperature is kept constant because analog continuous correction is performed for local temperature changes in the cold junction region and the cold junction temperature measuring element region caused by a rapid change in the ambient temperature. Temperature measurement with high accuracy.
  • the present invention provided to solve the above-mentioned problem provides a non-heated cold junction temperature measuring element that measures the temperature of a cold junction without generating heat by using a resistor having a self-controlling positive temperature coefficient characteristic. And a heating element system that self-heats and heats the cold junction temperature measuring element area and the cold junction area in which the cold junction temperature measuring element system is arranged.
  • the shape of the resistor including the self-controlling positive temperature coefficient characteristic is a sheet having a predetermined thickness, and the sheet-like positive electrode and the negative electrode are the table of the sheet-like self-controlling positive temperature coefficient heating element.
  • Vertically-operated analog thermos arranged so as to sandwich the back side This is a thermopile sensor in which a slot is arranged.
  • thermopile sensor of the present invention it is preferable that a resistor including a self-controlling positive temperature coefficient characteristic of the heating element system is formed by planar printing.
  • the thermopile sensor of the present invention can be efficiently manufactured by baking a resistor having a self-controlling positive temperature coefficient characteristic on the surface of a substrate such as a print substrate.
  • thermopile sensor having a heating element system for heating a cold junction region and a cold junction temperature measuring element system for measuring the temperature of the cold junction region.
  • a resistor including a self-controlling positive temperature coefficient characteristic is arranged in at least one of the heating element system and the cold junction temperature measuring element system, and at least This is a method of measuring temperature by infrared rays, characterized in that one of them is thermally connected directly to the cold junction region to synchronize the thermopile output with the thermal response speed of the cold junction.
  • Resistors with self-control type positive temperature coefficient characteristics have the property that the electrical resistance of the heating element increases as the temperature of the heating element rises due to energization, so the current is suppressed as the temperature approaches the specified temperature. And has the characteristic of being maintained at a constant temperature of the saturated self-stabilizing temperature. Therefore, by providing the thermopile sensor with a resistor having a self-control type positive temperature coefficient characteristic for maintaining the same at a required temperature, a constant bias temperature set for the cold junction of the thermopile sensor can be reduced. Because it is added in advance, the self-regulating heating element with a positive temperature coefficient characteristic adjusts the ambient temperature change below the set temperature by itself and absorbs the temperature change, so that an accurate temperature that is not affected by the ambient temperature is detected. Can be.
  • thermopile it is possible to prevent the thermopile from overheating without adding a safety device and a separate temperature detection device.
  • a complicated temperature control circuit including a temperature measuring element such as a thermistor for maintaining the temperature at a required temperature becomes unnecessary.
  • thermopile sensor Since the temperature is applied in advance, the change in resistance of the cold junction temperature measuring element system is only the temperature rise of the hot junction due to infrared energy from the measurement sample, and as a result, the cold junction temperature measuring element system The thermal response speed becomes extremely fast, enabling synchronization with the output response speed of the thermopile sensor, reducing measurement errors.
  • thermopile the temperature of the cold junction of the thermopile can be easily maintained at a constant bias temperature without using a complicated temperature control circuit, and non-contact temperature measurement can be performed safely and with high accuracy by preventing overheating.
  • the present invention provided to solve the above-mentioned problem maintains the cold junction region at a constant bias temperature by the heating system, detects a thermopile output, converts the output to a temperature value, The temperature of the cold junction region is measured each time by the cold junction temperature measuring element system, and the temperature value obtained by the thermopile output is added using the cold junction temperature as a reference temperature to measure the temperature.
  • This is a method of measuring temperature using infrared rays, which is characterized by determining the temperature.
  • the constant junction temperature set for the cold junction of the thermopile sensor is pre-applied, so that the resistance change of the cold junction temperature measuring element system can be measured from the measurement target.
  • the thermal response speed of the cold junction temperature measuring element system is extremely fast, and it is possible to synchronize with the output response speed of the thermopile sensor, thereby reducing the measurement error. Become smaller.
  • thermopile the temperature of the cold junction of the thermopile can be easily maintained at a constant bias temperature without using a complicated temperature control circuit, and non-contact temperature measurement can be performed safely and with high accuracy by preventing overheating.
  • the present invention provided to solve the above-mentioned problem is that the cold junction region is maintained at a constant bias temperature by the heating element system and is treated as a specified value, and only the thermopile output is detected. Is converted into a temperature value, and the predetermined value of the constant bias temperature is added to the temperature value obtained by the thermopile output to obtain the temperature of the measurement target.
  • the cold junction is maintained at a constant bias temperature by a resistor having a self-controlling positive temperature coefficient characteristic, and the temperature rise of the junction due to infrared rays radiated from the measurement target is measured by the heat sink.
  • Tosink allows for complete heat absorption and offset. Therefore, the temperature of the cold junction is constrained and treated as a specified value, and only the temperature change of the hot junction, that is, the output temperature of the thermopile, is detected, and the output temperature of the thermopile and the constant value are detected by the information processing device. By adding the bias temperature specified value, it is possible to detect the temperature of the cold junction of the thermopile more accurately without detecting the temperature each time.
  • the present invention provided to solve the above-mentioned problem is to provide a resistor including a self-controlling positive temperature coefficient characteristic as the heating element system, and to perform a temperature measurement using a thermocouple as the cold junction temperature measuring element system.
  • This is a temperature measurement method using infrared rays, which is characterized by disposing an element.
  • thermopile With this configuration, the temperature of the cold junction of the thermopile can be easily maintained at a constant bias temperature without using a complicated temperature control circuit, and the temperature by infrared rays can be safely and highly accurately prevented by preventing overheating. A measurement can be made.
  • thermometer an NTC (Negative Temperature Coefficient) resistor or a PTC (Positive Temperature Coefficient) resistor can be used as the thermometer.
  • NTC Negative Temperature Coefficient
  • PTC Positive Temperature Coefficient
  • a semiconductor heating element is arranged as the heating element system, and a resistor including a self-controlling positive temperature coefficient characteristic is arranged as the cold junction temperature measuring element system.
  • the self-resistance change of the resistor including the self-control type positive temperature coefficient characteristic of the cold junction temperature measuring element system is directly detected, and by controlling the cold junction to a predetermined temperature, the ambient temperature is reduced. Temperature measurement can be performed with high accuracy without being affected by only infrared rays from the object to be measured.
  • the present invention provided to solve the above-mentioned problems includes a heating element system that causes a resistor having a self-control type positive temperature coefficient characteristic to generate heat by passing a predetermined current or more, and a cold junction temperature measuring element system. And the cold junction cold junction by the heating element system The self-resistance change of the cold junction temperature measuring element system generated in response to the temperature of the cold junction area when heated is directly detected, and the temperature is converted into a temperature to detect the temperature of the cold junction area. This is a method for measuring temperature using infrared rays.
  • the temperature of the cold junction of the thermopile can be easily maintained at a constant bias temperature without using a complicated temperature control circuit, and an overheating accident can be prevented to safely and accurately measure the temperature by infrared rays. It can be carried out.
  • the present invention provided to solve the above problems provides a system including a plurality of resistors including self-controlling positive temperature coefficient characteristics having the same resistance characteristics and electrically insulated between elements.
  • Infrared temperature characterized in that multiple systems are built in such a way that they are directly connected, and different voltages are applied to them from outside the thermopile to generate different heat generation temperatures in the cold junction area for each system. It is a measuring method.
  • the present invention provided to solve the above problems provides a system including a resistor including a self-controlling positive temperature coefficient characteristic having different resistance characteristics electrically insulated between elements, and thermally connecting the system to a cold junction region.
  • a temperature measurement method using infrared rays characterized by incorporating multiple systems in a direct connection, applying the same voltage to these from outside the thermopile, and generating different heat generation temperatures in the cold junction area for each system. is there.
  • the present invention provided to solve the above-mentioned problem provides a non-heated cold junction temperature measuring element that measures the temperature of a cold junction without generating heat by using a resistor having a self-controlling positive temperature coefficient characteristic. And a heating element system that self-heats and heats the cold junction temperature measuring element area and the cold junction area in which the cold junction temperature measuring element system is arranged.
  • a self-regulating positive temperature coefficient heating element having a planar shape is arranged as a self-controlling positive temperature coefficient heating element, and a positive electrode and a negative electrode are provided on the surface of the planar self-controlling positive temperature coefficient heating element.
  • the heating element heats the cold junction temperature measuring element region and the cold junction region to maintain a constant self-saturation stable temperature. While maintaining the temperature, The cold junction temperature measuring element region and a cold by comb Ana port Gusa one Mosutatsu bets This is a temperature measurement method using infrared rays, which continuously corrects a partial temperature change in a joint region in an analog manner.
  • the temperature of the cold junction is kept constant to compensate for local temperature changes in the cold junction region and the cold junction temperature measuring element region due to a rapid change in the ambient temperature. Therefore, temperature measurement can be performed with high accuracy.
  • the present invention provided to solve the above-mentioned problem provides a non-heated cold junction temperature measuring element that measures the temperature of a cold junction without generating heat by using a resistor having a self-controlling positive temperature coefficient characteristic. And a heating element system that self-heats and heats the cold junction temperature measuring element area and the cold junction area in which the cold junction temperature measuring element system is arranged.
  • a planar self-control type positive temperature coefficient heating element having a predetermined thickness is arranged as a resistor having a self-control type positive temperature coefficient characteristic, and the planar positive electrode and negative planar electrode have the planar self-control.
  • This is a temperature measurement method using infrared rays, characterized by disposing an analog thermostat acting in a vertical direction, which is disposed so as to sandwich the front and back surfaces of a mold positive temperature coefficient heating element.
  • FIG. 1 is a top view and a sectional view showing the structure of a thermopile sensor according to one embodiment of the present invention.
  • FIG. 2 is a top view showing a thermopile structure of the thermopile sensor according to one embodiment of the present invention.
  • FIG. 3 is a top view showing a thermopile structure of the thermopile sensor according to one embodiment of the present invention.
  • FIG. 4 is a diagram showing a resistance-temperature characteristic of a self-control type positive temperature coefficient characteristic in a thermopile sensor according to an embodiment of the present invention.
  • FIG. 5 is a block diagram showing a temperature measurement circuit in the thermopile sensor according to one embodiment of the present invention.
  • FIG. 6 is a top view and a sectional view showing the structure of a thermopile sensor according to another embodiment of the present invention.
  • FIG. 7 is a top view and a sectional view showing the structure of a thermopile sensor according to still another embodiment of the present invention.
  • FIG. 8 is a top view and a sectional view showing the structure of a thermopile sensor according to still another embodiment of the present invention.
  • FIG. 9 is a diagram showing the principle of temperature compensation of a thermopile sensor according to still another embodiment of the present invention.
  • FIG. 10 is a top view showing the structure of a thermopile sensor according to still another embodiment of the present invention.
  • FIG. 11 is a sectional view showing the structure of a conventional thermopile sensor.
  • FIG. 12 is a top view showing the structure of a thermopile portion in a conventional thermopile sensor.
  • FIG. 13 is a top view showing the structure of a conventional thin-film thermopile sensor.
  • thermopile sensor according to an embodiment of the present invention.
  • a heat sink 2 having a thickness of about several hundred microns and having a bit portion 19 formed in the center made of silicon has a hot junction support having electrical insulation on the upper and lower surfaces.
  • the film 4 is formed.
  • the hot-junction support film 4 is formed of silicon oxide, silicon nitride, or the like, and has a thickness of several microns for the purpose of reducing heat capacity.
  • thermopile 9 is formed by the connection.
  • Output terminals 20 are provided at both ends of the thermopile 9.
  • the upper surface of the thermal junction 8 is covered with the infrared ray absorber 11.
  • the thermopile 9 may be formed in a shape as shown in FIG. 3, and the thermal junction 8 may not be covered with the infrared absorber.
  • the area where the cold junction 7 is formed is the cold junction area 21, and the area where the hot junction 8 is formed is the hot junction area 22.
  • a heating element 23 made of a resistor having a self-control type positive temperature coefficient characteristic and a self-control type positive temperature coefficient characteristic
  • the cold-junction temperature measuring element 24 consisting of a resistor including the cold-junction temperature measuring element 24 and the heating element are located outside the four sides of the cold-junction area 21 when viewed from the center of the diaphragm 25. Arranged in the order of 23.
  • the heating elements 23 and the cold junction temperature measuring elements 24 are electrically connected to each other, and electrodes 26 and 27 made of Au or the like are formed at both ends.
  • the area where the heating element 23 is formed is the heating element area 28, and the area where the cold junction temperature measuring element 24 is formed is the cold junction temperature measurement. This is referred to as an element region 29, and this name will be used as needed.
  • thermopile sensor 1 is fixed to the housing 2 by die-bonding the thermopile sensor 1 to the housing 2 as described above.
  • thermopile sensor 1 a manufacturing process of the thermopile sensor 1 will be described.
  • a hot junction support film 4 made of silicon oxide or silicon nitride and having a thickness of several microns is formed on both surfaces of a silicon pellet, a silicon chip, or a silicon wafer serving as a heat sink 2 using a CVD apparatus or the like.
  • dissimilar metals first thermocouple material 5 and second thermocouple material 6
  • thermopile 9 examples include polysilicon and aluminum, or bismuth and antimony.
  • a resistor including a self-controlling positive temperature coefficient characteristic of the heating element 23 and the cold junction temperature measuring element 24 is formed by a vapor deposition method. They can also be formed by paste baking. Alternatively, it may be formed by planar printing.
  • thermopile 9 is partially removed by jet etching. Thereafter, the oxide film is removed by wet etching using hydrofluoric acid or the like, whereby the thermopile sensor 1 is completed.
  • thermopile sensor according to the embodiment of the present invention.
  • the details of the resistor including the positive temperature coefficient characteristic and the temperature measurement method using such a thermopile sensor will be described.
  • the self-regulating positive temperature coefficient heating element is a heating element having a property that its electrical resistance increases as the temperature of the heating element rises due to energization.
  • the self-regulating positive temperature coefficient heating element has the property that the electrical resistance rapidly increases at a certain temperature (self-saturation stable temperature).
  • self-saturation stable temperature Generally, when a current is passed through a resistor, heat is generated.However, the self-control type positive temperature coefficient heating element rapidly increases its electrical resistance at the self-saturation stable temperature as described above, and the flowing current is suppressed.
  • the control-type positive temperature coefficient heating element is maintained at a constant temperature of the self-saturation stable temperature. That is, the self-control positive temperature coefficient heating element is a heating element that can control the heating temperature by itself.
  • the conductive resin is made of a conductive resin, or a mixture of such a conductive resin and a semiconductor as appropriate.
  • the self-control type positive temperature coefficient heating element of the heating element 23 generates heat by applying a predetermined constant voltage thereto, and maintains the cold junction 7 at a constant temperature of the self-saturation stable temperature. Therefore, the cold junction can be maintained at a desired temperature by using a self-controlling positive temperature coefficient heating element having a desired self-saturation stable temperature.
  • thermopile sensor By pre-biasing the cold junction to a constant temperature near the measurement target temperature in this way, the voltage output of the thermopile sensor decreases, and as the output increases, the output-temperature correlation becomes linear. It is possible to suppress the relative output error of the thermopile sensor due to the so-called “temperature coefficient of sensitivity”, which is not appropriate, so that accurate temperature measurement can be performed.
  • the self-regulating positive temperature coefficient heating element is maintained at a constant self-saturation stable temperature only by passing a predetermined constant current, so that complicated circuits and devices for temperature control are unnecessary. Yes, which contributes to cost reduction.
  • the device configuration is simple, failure due to impact or the like is unlikely to occur, and the strength is excellent.
  • the self-regulating positive temperature coefficient heating element is kept at a constant temperature, and there is no risk of overheating more than necessary.
  • the resistor including the self-control type positive temperature coefficient characteristic of the cold junction temperature measuring element 24 In particular, no current flows from outside. Then, when the temperature of the cold junction 7 changes due to a rapid change in the ambient temperature, a self-resistance change is induced in the resistor including the self-controlled positive temperature coefficient characteristic of the cold junction temperature measuring element 24. You. Therefore, by directly detecting this and converting the temperature, the temperature of the cold junction can be accurately detected. As shown in FIG. 1, the cold junction temperature measuring element region 29 and the cold junction region 21 are adjacent to each other and are directly thermally connected.
  • the relative output of the thermopile sensor 1, that is, the temperature change of the hot junction 8 and the cold balance that thermally balances this temperature change The temperature change of the joint 7 is linked in a predetermined physical time. Accordingly, the self-controlled positive temperature coefficient heating element of the cold junction temperature measuring element 24 can be synchronized as much as possible with the output of the thermopile sensor in the thermal response speed.
  • thermopile sensor 1 caused by the infrared radiation radiated from the measurement target and the temperature of the cold junction 7 by the resistor including the self-controlling positive temperature coefficient characteristic of the cold junction temperature measuring element 24
  • the deviation of the response speed from the temperature measurement is extremely small, the measurement error is small, and accurate measurement results can be obtained.
  • Resistors including the self-controlling positive temperature coefficient characteristics of the heating element 23 and the cold junction temperature measuring element 24 are arranged on the four sides of the cold junction region 21 as shown in FIG.
  • the positions are not limited to those shown above.
  • the shape may be a frame shape, or may be a concentric circle, a regular polygon, or a shape obtained by dividing such a circle or regular polygon at a certain angle according to the shape of the thermopile 9.
  • thermopile sensor 1 Next, how the temperature is measured by the thermopile sensor 1 will be described with reference to the block circuit diagram of FIG.
  • the hot junction 7 absorbs infrared radiation radiated from the measurement target, and the thermopile sensor 1 outputs a voltage depending on the amount of infrared radiation and the temperature of the cold junction 7 at this time. That is, the thermopile sensor 1 outputs a voltage corresponding to the temperature of the measurement target, that is, the difference between the temperature of the hot junction region 22 and the temperature of the cold junction region 21.
  • the operational amplifier 30 connected to the thermopile sensor 1 amplifies a small voltage output from the thermopile sensor 1 to a predetermined magnitude.
  • the microcomputer 31 connected to the operational amplifier 30 has an AZD converter built-in.
  • the mouth computer 31 performs arithmetic processing based on the output signal from the operational amplifier 30 to obtain a temperature value of the measured target.
  • the drive IC 32 supplies a predetermined current to the self-controlling positive temperature coefficient characteristic heating element of the heat generating element 23 according to a heating command signal from the microphone 1 co-viewer 31. Then, the self-regulating positive temperature coefficient characteristic heating element of the heating element 23 is heated to a certain temperature of the self-saturation stable temperature near the temperature of the measurement target, and the cold junction temperature measuring element area 29 and the cold Junction area 21 is set temperature T. Is maintained at a constant bias temperature.
  • the microcomputer 31 When the measurement start command is transmitted to the microcomputer 31, the microcomputer 31 generates heat to the resistor including the self-controlled positive temperature coefficient characteristic of the cold junction temperature measuring element 24. A current below a predetermined level that does not occur flows, and the analog voltage obtained by this is amplified by the operational amplifier 33, and converted into a digital signal by the built-in A / D converter all over the micro-computer. Calculation is performed based on the temperature T of the cold junction 7. Detect this T. Then, the temperature of the measurement target is detected by arithmetically processing the relative output signal of the thermo-modifier 1 amplified by the operational amplifier 30. The above is the procedure for measuring the temperature when the change in the ambient temperature is within a certain range, that is, in the steady state.
  • thermopile sensor 1 The constant temperature bias temperature set for the cold junction 7 of the thermopile sensor 1 is applied in advance by the self-control type positive temperature coefficient heating element of the heating element 23, so that the ambient temperature change below the set temperature can be suppressed.
  • the self-regulating positive temperature coefficient characteristic heating element adjusting the self-temperature and absorbing the temperature change
  • the cold junction temperature is kept at a constant temperature. Therefore, the self-resistance change of the resistor including the self-control type positive temperature coefficient characteristic of the cold junction temperature measuring element system 29 generated in response to the temperature of the cold junction region 21 is not affected by the ambient temperature change at all. Therefore, the relative output signal of the thermopile sensor 1 and the signal processing from the cold junction temperature measuring element 24 can be processed in exactly the same manner as in the above-mentioned ambient temperature stable state, and accurately detect the temperature of the measurement target. can do.
  • the circuit that controls the temperature of the heating element 23 by applying the resistor containing the self-control type positive temperature coefficient characteristic to both the heating element 23 and the cold junction temperature measuring element 24 Do not need.
  • the temperature of the cold junction area 29 is set to T by the self-control positive temperature coefficient heating element of the heating element 23. It is not affected by changes in ambient temperature because it is maintained at a constant bias temperature. Further, since the relative output of the thermopile sensor is compressed, the output error due to the “temperature coefficient of sensitivity” is also suppressed, so that the measurement error can be reduced.
  • the self-regulating positive temperature coefficient characteristic heating element is safe because it is not overheated above the self-saturation stable temperature.
  • the resistor including the self-control type positive temperature coefficient characteristic of the cold junction temperature measuring element 24 is thermally directly connected to the cold junction region 21. Furthermore, by measuring the temperature of the measurement target under a constant pipe temperature condition excluding the influence of the ambient temperature, the relative output of the thermopile sensor 1, that is, the temperature change of the hot junction 8 and the cold balance that thermally balances this temperature change. The temperature change of the joint 7 is linked in a predetermined physical time. Therefore, the resistor including the self-control type positive temperature coefficient characteristic of the cold junction temperature measuring element 24 can be synchronized with the output of the thermopile sensor as much as possible in the thermal response speed, and it is accurate and quick. Temperature measurement becomes possible.
  • the heat sink 2 and the sensor stem 17 to which the heat sink 2 is thermally connected have sufficient heat radiation characteristics to include a self-control positive temperature coefficient characteristic when measuring the temperature of the measurement target. It is possible to maintain the cold junction 7 at a constant bias temperature by means of a resistor, and to completely cancel the temperature rise of the junction due to infrared rays radiated from the measurement target by the heat sink. it can. Therefore, a constant bias temperature at the cold junction temperature 7 can be treated as the specified value. That is, by detecting only the thermopile output and converting the temperature, the temperature change of the hot junction 8 is detected, and the micropile output temperature value and the constant bias temperature specified value are compared with the thermopile output temperature value. Can be added to obtain the temperature of the measurement target. That is, the temperature of the cold junction 7 is Even more accurate temperature detection is possible without detecting the temperature.
  • FIG. 6 is a top view and a sectional view of a thermopile sensor according to another embodiment of the present invention.
  • a heating element 23 made of a resistor having a self-controlling positive temperature coefficient characteristic and a cold junction measurement made of a resistor also having a self-controlling positive temperature coefficient characteristic are provided.
  • the heating element 24 is disposed outside the four sides of the cold junction area 21 when viewed from the center of the diaphragm 25, in the order of the heating element 23 and the cold junction temperature measuring element 24.
  • the heating element region 28 is adjacent to the cold junction region 21 and has a structure directly thermally connected.
  • the self-controlling positive temperature coefficient characteristic heating element of the heating element 23 becomes the cold junction area 2. It is possible to heat 1 rapidly and reach a constant temperature (self-saturation stable temperature) in a short time. Therefore, the time required to start the measurement is reduced.
  • FIG. 7 is a top view and a sectional view of a thermopile sensor according to still another embodiment of the present invention.
  • a heating element 23 made of a resistor having a self-controlling positive temperature coefficient characteristic and a cold junction made of a resistor also having a self-controlling positive temperature coefficient characteristic
  • the temperature measuring elements 24 are stacked and arranged.
  • thermopile sensor 1 The manufacturing process of the thermopile sensor 1 will be described. First, a thermal bonding support film 4 made of silicon oxide or silicon nitride is formed on both surfaces of a silicon pellet, a silicon chip, or a silicon wafer to be a heat sink 2 to a thickness of several micrometer by a CVD apparatus or the like. Next, the self-control type positive temperature coefficient characteristic of the cold junction temperature measuring element 24 is included on the thermal junction supporting film 4 on the upper surface side of the heat sink 2 by vapor deposition, paste baking, or sheet printing. A resistor is formed, and a CVD device etc. is used to heat it again, using a thermal oxide made of silicon oxide or silicon nitride. The joint support film 4 is formed to a thickness of several microns.
  • thermopile having a cold junction 7 and a hot junction 8.
  • first thermocouple material 5 and second thermocouple material 6 are connected in series to form a thermopile having a cold junction 7 and a hot junction 8.
  • a self-control type positive temperature heating element of the heating element 23 is formed on the surface of the heat sink 2 by a vapor deposition method, a paste baking method, or a sheet printing method.
  • a region under the thermopile 9 is partially removed by wet etching.
  • thermopile sensor 1 After that, the oxide film is removed by gate etching using hydrofluoric acid or the like, whereby the thermopile sensor 1 is completed.
  • the cold junction area 21 and the cold junction temperature measuring element area 24 are disposed adjacent to each other, and the cold heating element area 28 and the cold junction temperature measuring element area 29 are arranged in the vertical direction. It is arranged to overlap.
  • thermopile sensor of the present embodiment the heating element region 28 and the cold junction temperature measuring element region 29 are arranged so as to vertically overlap with each other, and the insulating junction supporting film 4 having insulation is interposed therebetween.
  • the temperature of the cold junction and the temperature of the cold junction are forcedly dependent on the temperature of the heating element 23 because the temperature of the cold junction and the temperature of the cold junction are constant. Has been raised in advance. Therefore, the resistance change of the cold junction temperature measuring element is only the temperature rise of the hot junction due to infrared energy from the measurement target, and the thermal response speed of the cold junction temperature measuring element is extremely fast, and the thermopile sensor Output response speed and synchronization.
  • FIG. 8 is a top view and a sectional view of a thermopile sensor according to still another embodiment of the present invention.
  • a planar self-control type positive temperature coefficient heating element 34 as a heating element 23 is provided with a cold junction area 21 and a cold junction temperature measurement.
  • the element regions 29 are arranged on the upper surfaces of both.
  • a comb-shaped analog thermostat 37 in which positive electrodes 35 and negative electrodes 36 are alternately arranged is formed on the upper surface of the planar self-control type positive temperature coefficient heating element 34.
  • thermopile sensor 1 is described in ninth This will be described with reference to the drawings.
  • a comb-shaped analog thermostat is used. According to 37, the temperature is corrected as follows. That is, a current between the electrodes flows between the positive electrode 35 and the negative electrode 36 of the comb-shaped analog thermostat 37 according to a resistance change caused by a temperature difference therebetween.
  • a local temperature drop occurs in the part A due to the influence of the ambient temperature
  • the current 3 caused by the resistance change is generated between the positive electrode 35 and the negative electrode 36 in the part A. 8 is generated and heat is generated.
  • the current 38 decreases due to the resistance change, and becomes almost zero when the temperature reaches the set temperature.
  • part B near part A, a small temperature change occurs compared to part A, and a smaller current 39 is generated than in part A, generating heat, and the current 39 becomes the set temperature. At which point it is almost zero.
  • the current value is almost 0 in the part C maintained at the set temperature.
  • the comb-shaped analog thermostat 37 generates a current corresponding to the temperature change between the mutual electrodes composed of the large number of the positive electrode 35 and the negative electrode 36, thereby changing the ambient temperature. It compensates for the effects. Therefore, finely controlled temperature is locally controlled for both the cold junction area 21 and the cold junction temperature measuring element area 29 to assist in maintaining the temperature by the heating element 23, and always maintain them at a constant temperature. By doing so, the accuracy of the temperature measurement can be improved.
  • FIG. 10 is a top view and a sectional view of a thermopile sensor according to still another embodiment of the present invention.
  • a planar self-control positive temperature coefficient characteristic heating element 34 is used as the heating element 23.
  • the cold junction area 21 and the cold junction temperature measuring element area 29 are both arranged on the upper surface.
  • an analog thermostat 4 consisting of a planar positive electrode 40 disposed on the upper surface of the planar self-control type positive temperature coefficient characteristic heating element 34 and a planar negative electrode 41 disposed on the lower surface 4 2 are formed.
  • the analog thermostat 42 has the same action as the comb analog thermostat 37 shown in FIG. In other words, local fine-grained temperature control is performed on both the cold junction area 21 and the cold junction temperature measuring element area 29 to assist in maintaining the temperature by the heating element 23 and always maintain them at a constant temperature. By doing so, the accuracy of the temperature measurement can be improved.
  • the number of pairs of mutual electrodes whose number was limited in the comb-shaped analog thermostat 37 in the thermostat 42, is innumerable on the surface, so that a more localized It is possible to perform temperature control that is non-boundary and has no positional limitation.

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Abstract

L'invention concerne un capteur à themopile et un procédé de mesure par rayons infrarouges. Un capteur à thermopile conçu pour mesurer une température cible en peu de temps, avec une grande précision et sécurité, comporte, de sorte que le nombre de pièces soit minimisé, une résistance possédant des caractéristiques de coefficient de température positive de type à auto-contrôle. L'invention porte également sur un procédé de mesure de température par rayons infrarouges permettant l'augmentation de la précision de mesure et la réduction du temps de mesure. Une résistance possédant des caractéristiques de coefficient de température positive à auto-contrôle est prévue dans au moins un système de chauffage destiné à chauffer une zone de jonction froide de la thermopile et/ou un système à élément de mesure de température de jonction froide conçu pour mesurer la température d'une zone de jonction froide, au moins un des deux étant relié thermiquement directement à une zone de jonction froide, la sortie de la thermopile étant synchronisée avec la vitesse de la réponse thermique.
PCT/JP2000/000047 2000-01-07 2000-01-07 Capteur a thermopile et procede de mesure de temperature par rayons infrarouges WO2001050102A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2000/000047 WO2001050102A1 (fr) 2000-01-07 2000-01-07 Capteur a thermopile et procede de mesure de temperature par rayons infrarouges
AU18919/00A AU1891900A (en) 2000-01-07 2000-01-07 Thermopile sensor and temperature measuring method by infrared rays

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PCT/JP2000/000047 WO2001050102A1 (fr) 2000-01-07 2000-01-07 Capteur a thermopile et procede de mesure de temperature par rayons infrarouges

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TWI691709B (zh) 2019-01-30 2020-04-21 國立彰化師範大學 熱輻射溫度量測系統

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TWI691709B (zh) 2019-01-30 2020-04-21 國立彰化師範大學 熱輻射溫度量測系統

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