WO1999010771A1 - Focusing and autofocusing in scanning laser imaging - Google Patents
Focusing and autofocusing in scanning laser imaging Download PDFInfo
- Publication number
- WO1999010771A1 WO1999010771A1 PCT/US1998/017259 US9817259W WO9910771A1 WO 1999010771 A1 WO1999010771 A1 WO 1999010771A1 US 9817259 W US9817259 W US 9817259W WO 9910771 A1 WO9910771 A1 WO 9910771A1
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- target
- light
- focus
- light source
- detection data
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70641—Focus
Definitions
- This invention relates to a method and apparatus for focusing and autofocusing in carrying out scanning imaging, particularly scanning laser imaging of translucent objects.
- Tomei et al. shows a conventional laser imaging system.
- Figure 1 depicts the system.
- a primary laser provides a beam to a beam expander composed of an objective lens and a spatial filter. The beam exits the beam expander as an input collimated beam.
- a three-dimensional beam position controller receives the input collimated beam.
- the beam controller includes an imaging lens and galvanometrically- driven mirrors to provide control of the spot focus of a focused laser beam on a sample target.
- Forward light i.e., light that is either scattered by the sample and transmitted through the target or primary light that is transmitted through the sample without scatter by the sample
- the detector assembly comprises an optical fiber faceplate, diffusion elements and a photomultiplier tube ("PMT").
- the image signal produced by the PMT is subsequently sent to a support computer system which further processes the image signal for display on a high resolution monitor or for storage in an image storage unit. Further details concerning the overall construction and operation of the laser imaging system are provided in the Tomei et al. patent.
- the laser light must be accurately focused on the target. Focusing can be done manually, but that often requires special focusing equipment and requires human intervention with the potential for introducing error. In most cases, automatic focusing, or "autofocusing,” makes the scanning process faster and more efficient than manual focusing. Unless focusing can be done with a minimum of extra equipment or steps, however, many of the advantages of scanning laser imaging are lost.
- the present invention encompasses methods and apparatus for focusing and autofocusing light imaging systems so as to improve image clarity and resolution.
- the method utilizes programming logic responsive to absorption, scattering or emission of light from a target onto a light detector.
- the programming logic compares real-time detection data with previously stored data to determine the degree of focus of the light source on the target.
- the programming logic then adjusts the distance between the focusing objective and the target based on the degree of focusing of the light source on the target.
- the invention is used in conjunction with a laser imaging system.
- Figure 1 is a high level block diagram of a conventional laser imaging system.
- Figures 2A and 2B are photographs depicting, respectively, the intensity attenuation (absorption) measurements made by the photodetector when the light source is focused on the target and when it is not focused on the target.
- Figures 3 A and 3B are photographs depicting, respectively, the fluorescence or light scattering (emission) measurements made by the photodetector when the light source is focused on the target and when it is not focused on the target.
- Figure 4 is a flowchart of the algorithm used to determine the optimum focal length offset for focusing the light beam on the target based on the photodetector output.
- the present invention uses a computer and a beam controller or other focusing means that are already part of the imaging system, and requires only additional software.
- the apparatus and methods described herein can be used to image a wide variety of objects.
- the invention is useful, for instance, in material sciences for material inspection. An example of this is inspection of chips in the semiconductor industry.
- the invention also finds use in the biological sciences. Examples of this are tissue samples, cell lines or populations, chromosomal spreads, nucleic acids, and proteins.
- the target being scanned is a microscope slide or Petri dish containing a biological specimen which has been stained histologically, immunochemically or fluorescently.
- a photodetector such as a photomultiplier tube (“PMT") or other sensitive solid state detector.
- light scattering may be measured as the indicator using any laser wavelength.
- the output of the photodetector will increase, decrease or remain unchanged, depending on whether the laser beam is intercepting a fluorophore stained cell, which emits light, or a color stained cell, which absorbs light, or an unstained cell, or no cell at all.
- Focal length offset refers to the static modification to the focal length, and is independent of the dynamic modification performed automatically by a three-dimensional (3D) scanner during the scanning process. Once set, static modification or "offset" will remain constant for all pixel positions (x, y) in the scanning field before, during and after scanning.
- the dynamic focal length adjustment varies across the scanning field depending on the pixel position and occurs only during scanning. The dynamic focal length adjustment are calculated in advance for any scanning field.
- the static modification or offset is used to adjust the nominal focal length of a 3D scanner and to compensate for the differences in the target's thickness.
- the output signal of the photodetector is monitored in real- time to assist in the focal length offset adjustment, which is accomplished through varying the position of the z-axis scanner, or retroreflector.
- the z-axis can be driven by a stepping motor and may be implemented on the sample stage.
- the PMT 32 collects the light from the focused laser beam 16 transmitted through, or reflected by, a sample target 20.
- the absorbed or scattered light generated by the beam 16 striking the target 20 may be measured, or the fluorescent light at a set of predetermined wavelengths may be measured.
- the target 20 may comprise either a single light-transmissive substrate (such as glass, Plexiglas, fused silica and optically clear polymers) or a multiplicity of such substrates.
- a single light-transmissive substrate such as glass, Plexiglas, fused silica and optically clear polymers
- cells, particles or a thin layer of tissue are placed for image analysis.
- the focused laser beam 40 strikes a spot on the target 20
- light is scattered through a variety of angles, transmitted, reflected, absorbed, or generates fluorescence, depending on the nature of the spot on the target 20.
- most rays are transmitted through the target 20 and collected by the PMT 32. These rays may then be detected in the same fashion as noted in the above-incorporated Tomei et al. patent.
- the PMT 32 then passes the data representing these collected light rays as a signal out to the support computer system 34.
- the support computer system 34 stores the data generated by several scan lines internally. As the scanning progresses, the support computer system 34 also passes the data to image storage 38, for storage of the complete image for later playback, if desired, and to a high resolution monitor 36, where it can be viewed in real time.
- a computer program running on the support computer system 34 can be used to display on the monitor 36 the signal being produced by the photodetector.
- the human operator can then monitor the peaks and valleys of the signal (samples of valleys can be seen in Figs. 2A and 2B, and of peaks in Figs. 3 A and 3B), and in particular, the number of peaks and valleys and the steepness of the curves of the peaks and valleys. As explained below, these factors can be used to determine the degree of focus of the laser beam 40 on the target 20.
- the operator can then send a signal through the support computer system 34 to the beam controller 18 to adjust the position of the z-axis scanner of the 3D beam controller, or retroreflector. By adjusting this position, the laser beam 40 can be focused on the target 20.
- the present invention also allows for autofocusing. In most cases, autofocusing will be preferable to manual focusing, since it allows scanning to occur without human monitoring or intervention.
- a computer program running on the support computer system 34 uses an algorithm (which will be explained in detail later) to determine the degree of focus of the laser beam 40 on the target 20. This algorithm then corrects the focus by sending a signal from the support computer system 34 to the beam controller 18. Both the scanning process and the autofocusing process use the same data collected by the PMT 32.
- any suitable light detector such as a sensitive solid state detector or the like, can be used in place of the PMT 32.
- the basic routine is to optimize, on a line-by-line basis, the acuity of the scanning laser beam as it scans the target 20.
- the method of optimization depends on the mode of acquisition (fluorescence, scattering or absorption) of the light from the target 20.
- fluorescence and scattering optimum focus occurs when the signal at the peaks (e.g., the highest points shown in Figs. 3 A and 3B) is at a maximum over the entire range of focal length offset adjustment.
- optimum focus occurs when the signal at the valleys (e.g., the lowest points shown in Figs. 2A and 2B) is at a minimum over the range of focal length offset.
- the focal length offset between the beam controller 18 and the target 20 can be adjusted. This can be accomplished either interactively by a human operator, or automatically with control software running on the support computer system 34.
- a human operator can move the focal length offset continuously by adjusting the focus scroll bar 48 on the focus dialog box displayed on the monitor 36 within a particular adjustment range (for example, between 0 mm and 6 mm) while watching the display of the output signal from the PMT 32 on the monitor 36.
- a photodetector output signal like those shown in Figs. 2A, 2B, 3 A, and 3B on the monitor screen 36.
- Figs. 2A and 2B are photographs of monitor screen 36 displaying the photodetector output signal of a target being scanned in absorption acquisition mode.
- FIGS. 3 A and 3B show photographs of monitor screens displaying the photodetector output of a scan of a different target when in either a fluorescence or scattering light acquisition mode, this time with focal length offsets of 3.201 mm and 3.659 mm, respectively (as identified by the Z OFFSET indicator on the monitor control panel 46) .
- the operator can vary the focal length offset of the laser beam 40 and observe the results.
- the operator knows that he or she has improved the focus. Such improvement is shown by comparing Fig. 2B to Fig. 2A where it can be seen that the depth of the valleys has decreased when focal length offset varies from 2.906 mm to 3.308 mm. The operator can continue to adjust the focal length offset until the depth no longer appears to decrease, an indication of optimum focus. Similarly, by comparing Fig. 3B to Fig. 3A, it can be seen that the height of the peaks has increased when focal length offset varies from 3.201 mm to 3.659 mm.
- the operator can continue to adjust the focal length offset until the height no longer appears to increase, also an indication of optimum focus.
- the autofocus routine mimics the manual operations, except that the maximum peak height and minimum valley depth are identified by the computer instead of a human operator.
- This routine is shown by the flowchart in Fig. 4.
- the focal length offset range is from 0 mm to 6 mm.
- a computer program running on the support computer system 34 performs most of the required steps.
- the computer program initially, at step 50, splits a 1 mm span of focal length offset range into four equal intervals (representing five focal offset values: center; lower; lower middle; upper; and upper middle).
- the 1 mm focal adjusting span is set empirically based on the expected variation in sample thickness from one slide to another of within 0.5 mm. In any particular case where the variation is larger than 1 mm, the focal length offset optimizing routine will eventually yield the correct value.
- the computer program first sets the Center value by taking the current location of the focal offset scroll bar, which may be left there during the previous auto- or manual focusing operation.
- the Center value can be also set interactively based on the operator's best guess by moving the focal scroll bar 48 on the focus dialog box displayed on the monitor 36.
- the computer program sets the upper value of the focal length offset adjustment range as either the center value plus 0.5 mm, or if that result is greater than the maximum focal offset value of 6 mm, at 6 mm. Similarly, the computer program sets the lower value of the adjustment range at the center value minus 0.5 mm, or at 0 mm if it would otherwise fall below zero. Next, the computer program calculates two intermediate values, the lower middle and upper middle values. These values are set midway between, respectively, the lower and center values, and the upper and center values.
- the computer program then sends the appropriate signals from the support computer system 34 to have the beam controller 18 direct the beam 40 to scan the same line on the target 20 at each of these five focal offset values (the lower value, the lower middle value, the center value, the upper middle value, and the upper value). Then, the computer program acquires from PMT 32 the data it collects from each scan line, identified respectively as Data (1), Data (2), Data (3), Data (4), and Data (5).
- focal offset value provides the "best focus”
- a straight-forward "maximum peak height detection” routine for fluorescence and scattering, or “minimum valley depth detection” for absorption, will give a fairly good determination of the focal offset which provides the best focus.
- this method produces a focus that compensates (in an averaging sense) for astigmatism by scanning along both the x and y axes and averaging their focal offset values.
- the peak (or valley) linewidth Another possible criterion for the determination of the best focal offset value is the peak (or valley) linewidth.
- the width of the peak (or valley) should be minimized, with the linewidth being measured at FWHM (Full Width at Half Maximum). If peak linewidth is used as the criterion, a better focus will be produced if the lines along the two independent axes are scanned, using methods that will be evident to those skilled in the art. Focusing with a laser beam of finite spot size will optimize focusing only along the scanned direction.
- any astigmatism will cause the orthogonal axis (y-axis) to be slightly off focus, so for any optical system that is not free of aberrations, an optimized focus point would be a compromise between the best focus points of the two axes. It should be noted that focusing based on peak linewidth will be greatly enhanced if
- Fourier transform filtering is done prior to determining the peak linewidth.
- Fourier transform filtering can be done in a variety of ways, such as including a Fast Fourier Transform computer routine within the computer program running on the support computer system 34.
- the resultant line profile signal of peaks or valleys will be a convolution of the laser beam intensity profile of the focus spot at the beam's interception with the target profile depending on the size of the target.
- the resultant peak (or valley) linewidth can be used as the criterion for determining the focus point in a relatively straight-forward manner. However, it is the relative change of the peak (or valley) linewidth that provides the measure for adjusting the focus. Using Fourier Transform filtering to remove high frequency noise contained in the acquired data should improve results since it allows the intrinsic change to be distinguished from noise.
- the scan line data arrays (Data (1) - Data (5)) acquired at step 52 are then processed by the computer program at step 54 to determine the current best focal offset value by using one of the criteria described above.
- the most straight-forward one is to find which focal offset value i generates in Data (i) the maximized valley depth for absorption or the maximized peak height for fluorescence (or scattering). For each of the five focal offset values initially set at step 50, the focal value which provides the best focus, as determined by whatever criterion is being used, is made the next center value. Then the computer program re-assigns the values for the other four focal offsets and applies a narrower focal offset adjusting range for the next loop. Essentially, three different situations can occur.
- the best focus corresponds to i as 1
- the new lower value is set at 0.9 times the old lower value and the new upper value is the previous center value, shown at step 64.
- the new center value is at midway between the new lower and new upper values, shown at step 72.
- the new lower middle value is located midway between the new lower and new center values, and likewise, the new upper middle value is located midway between the new center and new upper values.
- the third case is that the best focus is at the center value, which remains as the next center value.
- the new lower and upper values will be assigned, respectively, the previous lower- and upper-middle values at step 70.
- the new lower- and upper- middle values will be determined by taking the point midway between the new center value and lower or upper value, respectively, as indicated at step 72.
- the line scan data will be acquired again at the five new focal length offset values, processed and compared to determine the best focus under the narrower focal length offset adjusting range.
- the entire sequence is repeated using an increasingly narrower focal length offset range until the focusing is achieved at the desired level of precision.
- the best focal length offset is determined, the desired portion of the target is scanned at that focal length offset, in conjunction of the dynamic focal length adjustment, which keeps the scanning beam focused at a flat target within the scanning field.
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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AU90273/98A AU9027398A (en) | 1997-08-22 | 1998-08-20 | Focusing and autofocusing in scanning laser imaging |
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US5681097P | 1997-08-22 | 1997-08-22 | |
US60/056,810 | 1997-08-22 |
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WO1999010771A1 true WO1999010771A1 (en) | 1999-03-04 |
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PCT/US1998/017259 WO1999010771A1 (en) | 1997-08-22 | 1998-08-20 | Focusing and autofocusing in scanning laser imaging |
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WO (1) | WO1999010771A1 (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4000417A (en) * | 1975-08-25 | 1976-12-28 | Honeywell Inc. | Scanning microscope system with automatic cell find and autofocus |
US4587416A (en) * | 1982-07-02 | 1986-05-06 | Nippon Kogaku K. K. | Focus detecting apparatus for microscope or camera |
US4677286A (en) * | 1985-02-14 | 1987-06-30 | Quantronix Corporation | Method and apparatus for autofocusing a microscope |
US5037207A (en) * | 1986-02-12 | 1991-08-06 | Ohio State University Research Foundation | Laser imaging system |
US5287272A (en) * | 1988-04-08 | 1994-02-15 | Neuromedical Systems, Inc. | Automated cytological specimen classification system and method |
-
1998
- 1998-08-20 WO PCT/US1998/017259 patent/WO1999010771A1/en active Application Filing
- 1998-08-20 AU AU90273/98A patent/AU9027398A/en not_active Abandoned
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4000417A (en) * | 1975-08-25 | 1976-12-28 | Honeywell Inc. | Scanning microscope system with automatic cell find and autofocus |
US4587416A (en) * | 1982-07-02 | 1986-05-06 | Nippon Kogaku K. K. | Focus detecting apparatus for microscope or camera |
US4677286A (en) * | 1985-02-14 | 1987-06-30 | Quantronix Corporation | Method and apparatus for autofocusing a microscope |
US5037207A (en) * | 1986-02-12 | 1991-08-06 | Ohio State University Research Foundation | Laser imaging system |
US5287272A (en) * | 1988-04-08 | 1994-02-15 | Neuromedical Systems, Inc. | Automated cytological specimen classification system and method |
US5287272B1 (en) * | 1988-04-08 | 1996-08-27 | Neuromedical Systems Inc | Automated cytological specimen classification system and method |
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AU9027398A (en) | 1999-03-16 |
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