WO1996028276A1

WO1996028276A1 - Biaxial table apparatus driven by linear motor

Info

Publication number: WO1996028276A1
Application number: PCT/JP1996/000604
Authority: WO
Inventors: Susumu Ito; Kunio Kojima
Original assignee: Fanuc Ltd
Priority date: 1995-03-14
Filing date: 1996-03-11
Publication date: 1996-09-19
Also published as: KR960033649A; JPH08243866A

Abstract

A biaxial table apparatus for cable treatment using a linear motor includes a first table (40) above a fixed bed (38) and a second table (42). This apparatus has an improved fitting structure between fixed magnet elements (48a and 50a) of two linear motors (48 and 50) for X- and Y-axis driving of the biaxial table apparatus and excitation coil elements (48b and 50b), while using only one belt-like flexible cable support member (60).

Description

Description Two-axis table device driven by linear motor

The present invention generally relates to a biaxial stapling apparatus driven by a linear motor, and in particular, simplifies the processing of wiring and piping for conducting a drive current to the linear motor and supplying a cooling medium. The present invention relates to a two-axis table device having a structure capable of: Conventional technology

A table moving mechanism using a linear motor as a drive source for a work table of a machine tool has already been proposed.

The general configuration of a linear motor used as a drive source is as shown in the perspective view of FIG. 6, and the linear motor 10 is composed of fixed magnet pieces 12 and 1 with the pole faces of the N and S poles facing upward. 3 is a stationary element 1 extending in a two-row arrangement (may be a single-row arrangement) on a machine base 14 made of a magnetic material (for example, iron plate) as shown in the example shown in FIG. The excitation coil element 15 is moved in a linear direction while maintaining the same operation gap by a well-known linear guide mechanism (not shown) through an appropriate operation gap above the stay element 11. It is provided as possible.

The upper surface of the stay element 11 is formed as a substantially flat surface area including the N pole surface and the S pole surface of the fixed magnet pieces 12 and 13. Is formed on a smooth surface by pouring the metal.

On the other hand, the exciting coil element 15 has a structure in which an exciting coil (not shown) is built in a rectangular parallelepiped machine frame and is solidified by a resin mold. Fixed 1 By performing an electromagnetic interaction with the magnet pieces 12 and 13, a moving force in a linear direction indicated by an arrow L is obtained. When a moving body 16 such as a table of a machine tool or a measuring machine, which is illustrated by a broken line, is fixed to the exciting coil element 15 by a coupling means such as a bolt, the moving body 16 is fixed. Exciting current is supplied to the exciting coil element 15 via a conductive wire (not shown), and an appropriate current is supplied inside the element 15. Pressurized air is introduced from the inlets 17a and 17b, and the heat generated due to eddy current loss and the like generated during the electromagnetic interaction between the exciting coil element 15 and the fixed magnet pieces 12 and 13 is air-cooled. It is common that the configuration is taken.

On the other hand, the conventional general configuration of a two-axis table device using the linear motor 10 as a drive source for linear table movement as described above is shown in the front view of Fig. 7 and the side view of Fig. 8. It is specified.

Referring to FIGS. 7 and 8, a conventional example in which the X and Y table devices of a machine tool are driven by a linear motor moves linearly in the Y-axis direction above a bed 18. This is a two-axis table device in which a saddle 20 is arranged, and a work table 22 is arranged above the saddle 20 so as to be linearly movable in the X-axis direction.

In this table device, the saddle 20 slides in the Y-axis direction by the guide of a well-known linear guide means 24 composed of a guide rail and a sliding nut arranged in a pair on the left and right, and the work table 22 is moved. Similarly, it slides in the X-axis direction under the guidance of the linear guide means 26 arranged on the left and right pair. Here, a Y-axis driving means 28 composed of a linear motor is provided between the bead 18 and the saddle 20, and between the saddle 20 and the work table 22. An X-axis drive means 30 comprising a linear motor is provided. In this case, the fixed magnet portion 28a of the Y-axis drive An excitation coil section 28 b that is fixedly arranged on the upper surface of the node 18 and cooperates with the fixed magnet section 28 a is attached to the bottom side of the saddle 20.

The fixed magnet portion 30a of the X-axis driving means 30 is disposed on the upper surface of the saddle 20, and the exciting coil portion 30b cooperating with the fixed magnet portion 30a is It is attached to the bottom side of the work table 22.

According to such a configuration, the exciting coil sections 30b and 2b of the X-axis driving means 30 and the Y-axis driving means 28 attached to the respective linear moving bodies of the saddle 20 and the worktable 22 are provided. Since the supply of excitation current and the supply of a cooling medium (generally, pressurized air for cooling) is required for 8b, cables can move following the movement of the linear moving body. Wiring and piping 32, 34 must be designed.

Practical means that are often used as the means of such wiring and piping 32, 34 in machine tools and robotic aircraft of industrial robots include, for example, well-known conductive wires and fluid supply hoses. It is typical to use a cable support member having a belt-like structure which is housed inside and formed so as to be able to follow a moving body, and which is bent in a U-shape.

However, in the configuration of the table device as shown in FIGS. 7 and 8 described above, the saddle 20 is not connected to the exciting magnet portion 30 b of the X-axis drive means 30 attached to the bottom surface of the work table 22. Wiring and piping 32 extending from the side so as to have an extra length can be configured with a well-known cable support member, because the U-shaped structure of the cable support member with respect to the low height structure of the linear motor 30 In consideration of the inability to obtain sufficient curvature of the part and the high speed of linear motion, it is often necessary to treat cables separately using, for example, wiring using flexible pipes, piping, etc. There is a problem that makes designing difficult.

Also, if the above-mentioned belt-like cable support member is used to forcibly configure the wiring and piping 32, the work tape is inevitably removed from the saddle 20. It is necessary to design a large height distance to the top surface of 2 and there is a disadvantage that it is not possible to meet the demand to reduce the height of the table device by adopting Linimo overnight. Disclosure of the invention

An object of the present invention is to provide a two-axis table capable of achieving cable processing by effectively utilizing a belt-shaped flexible cable supporting member while enjoying the advantage of using a linear motor as a driving means for linear motion. In order to provide the equipment.

It is another object of the present invention to provide a two-axis table device using a linear camera that can be designed to have a structure with a reduced height.

In view of the object of the invention described above, the arrangement structure of the fixed magnet portion and the excitation coil portion of the two linear motors constituting the X-axis drive means and the Y-axis drive means is devised, and one belt-shaped flexible cable support member is provided. This is a new configuration that uses only this to form a two-axis table unit and improves cable handling.

That is, according to the present invention, a first table section linearly moving in the I-axis direction via the first linear motor means above the fixed bed, and a first table section above the first table section. And a second table section that linearly moves in a second axis direction orthogonal to the first predetermined axis direction via the second linear motor.

At least a fixed magnet element of the second linear motor that drives a second table disposed above the first table has a configuration mounted on a bottom surface of the second table.

Flexible cable supporting means having one end coupled to the first table so as to be movable with the first table; A linear motor in which the exciting coil element in the second linear stage is fixed to the first taper portion and a conductive wire and a pipe hose are statically wired and piped from the flexible cable supporting member to the exciting coil element; It is intended to provide a two-axis table device driven by the evening.

Preferably, the exciting coil elements of the first linear motor and the second linear motor are fixed to both upper and lower surfaces of the first table, respectively, and the upper and lower surfaces of the first table are fixed. A two-axis table device having a configuration in which a slider in the linear guide means is provided, and a fixed bed on the other side and a guide rail of the linear guide means on the second table side is provided.

Also, the excitation coil element of the first linear motor may be provided on the fixed bed, and the excitation coil element of the second linear motor may be provided on the upper surface of the intermediate first table portion. Since the exciting coil element of the first linear motor is a completely stationary element, the supply of conductive wiring and cooling fluid to the exciting coil element can be independently performed by fixed wiring.

According to the configuration described above, in the second linear motor that drives the linear movement of the second table unit, which is the uppermost element in the two-axis table device, the excitation coil element is positioned below the second table unit. Since the single flexible cable supporting member having one end connected to the first table portion can be disposed so as to be movable together with the first table portion, there is no space between the first and second table portions. There is no need to provide any cable processing means. For this reason, it has become possible to simplify the processing of cables such as conductive wires and piping while maintaining a configuration in which the table height is kept low by using a linear motor as a table drive source. BRIEF DESCRIPTION OF THE FIGURES Other objects, features, and advantages of the present invention will be described in more detail with reference to the embodiments shown in the accompanying drawings.

FIG. 1 is a schematic front view showing a basic configuration of a first embodiment of a biaxial stapling apparatus driven by a linear motor according to the present invention,

Figure 2 is a schematic side view of the device,

FIG. 3 is a schematic front view showing a basic configuration of a second embodiment of a two-axis table device driven by a linear motor according to the present invention,

FIG. 4 is a schematic side view of the two-axis table device shown in FIG. 3,

FIG. 5 is a schematic perspective view showing a preferred embodiment of the arrangement of the slider in the linear guide means,

Fig. 6 is a cross-sectional view schematically showing the configuration of a conventional two-axis table device driven by a linear motor.

Figure 7 is a schematic side view of the device shown in Figure 6,

FIG. 8 is a perspective view showing a general configuration of a linear motor. BEST MODE FOR CARRYING OUT THE INVENTION

Now, referring to FIGS. I and 2, the biaxial table device according to the embodiment of the present invention includes a fixed bed portion 38 and a second fixed table portion provided above the fixed bed portion 38. 1 has a table section 40 and a second table section 42 disposed above the first table section 40, and the first table section 40 is guided to the fixed bed section 38. A linear guide means 4 4 consisting of a rail 44 a and a guide slider 44 b provides one linear direction, that is, as shown in FIG.

It is provided so that it can slide linearly in the Y-axis direction.

Further, the second table section 42 is moved in one linear direction, that is, the Y direction by the linear guide means 46 composed of the guide rail 46a and the guide slider 46b with respect to the first table section 40. It is provided so that it can slide linearly in the X-axis direction shown in Fig. 1 perpendicular to the axial direction. Here, in the first linear motor 48 constituting the drive source for linearly moving the first table section 40 in the Y-axis direction, the fixed magnet element 48 a of the first linear motor 48 a The excitation coil element 48 b cooperating with the fixed magnet element 48 a is provided on the upper surface in a stationary arrangement, and is attached to the bottom side of the first table section 40. For this purpose, wiring of conductive wires and piping for supplying a cooling medium (usually a pressurized air flow) are required for the exciting coil element 48 b attached to the first table section 40.

On the other hand, in the second linear motor 50 constituting a drive source for linearly sliding the second table section 42 in the X-axis direction, the fixed magnet element 50 a force of the second table section 42 is used. The excitation coil element 50b, which is fixed to the bottom surface and cooperates with the fixed magnet element 50a, is attached to the upper surface side of the first table section 40. For this reason, it is necessary to provide a conductive wire and a pipe for supplying a cooling medium to the exciting coil element 5 Ob mounted on the upper surface of the first table section 40.

According to the above-described configuration, the first and second linear motors 48, 5 are concentrated on the first table section 40 interposed between the fixed bed 38 and the uppermost second table section 42. Since the excitation coil elements 48b and 5Ob of No. 0 are attached, the conductive wire and the cooling fluid supply hose for these are connected to the first table section 40 by a flexible cable having one end fixed thereto. This is achieved by wiring and arranging the conductive wire 62 and the fluid supply hose 64 housed in the support member 60.

As shown in FIG. 2, the other end of the flexible cable supporting member 60 passes through the side portion of the fixing pad 38 and is connected to an appropriate fixing position. It is only necessary to connect the conductive wire 62 and the fluid supply hose 64 stored in the tube to an external conductive wire or a pipe from the fluid supply source.

The flexible cable supporting member 60 is the first cable from the fixed bead 38 side. The buckle portion 40 is arranged with a predetermined margin so as to form a U-shape, and is configured to be pulled and moved in accordance with the linear movement of the first table portion 40.

In the embodiment of the present invention described above, the first and second linear modes are used.

48 In both the linear motors of 50 and 50, the upper

Cable processing such as wiring and piping for 50 can also be performed using the flexible cable support member 60 disposed between the first table section 40 and the fixed bed 38. Thus, the characteristics of the low-height drive source of the linear motor can be effectively exhibited. Of course, also with respect to the first linear module 48 interposed between the first table section 40 and the fixed bed 38, the flexible cable supporting member 60 is fixed as a stationary element. Since the bed 38 can be arranged so as to bypass the side surface, the cable processing can be performed without any trouble in the U-shaped arrangement of the flexible cable supporting means 60.

Next, referring to FIGS. 3 and 4, there is shown a configuration of a two-axis table device according to another embodiment of the present invention.

According to this embodiment, the fixed table 38, the first table section 40, and the second table section 42 are the same as in the first embodiment described above. Also, the linear guide means 44, 46 for guiding the linear movement of the first table section 40 and the second table section 42 have the same structurally identical structure, With respect to the linear guide means 44 of the first table 40 which slides linearly in the Y-axis direction with respect to the rail 38, the guide rail 44a is fixed to the bottom surface of the first table portion 40, and the slider 4 4 b is fixed to the upper surface of the fixed bed 38. The reason for such a slight change in configuration will be described later.

In the second embodiment, in the first linear motor driving the first table section 40, the fixed magnet element 48a is connected to the first table section 40. The excitation coil element 48 b cooperating with the fixed magnet element 48 a is mounted on the bottom surface of the fixed bed 38 so as to be immovably arranged. The exciting coil element 48 b is immovably arranged on the fixed bed 38 which is a fixed structure as described above. Therefore, there is no movable requirement for the conductive wire or cooling fluid hose wiring and piping for the exciting coil element 48b. For this purpose, the laid wiring 63, 65 extending from the outside may be directly connected to an appropriate connector means or a hose joint provided at one end of the exciting coil element 48b.

On the other hand, the second linear motor 50 for driving the uppermost second table section 42 in the X-axis direction is provided with the completely same structure and the same arrangement as the first linear motor 50 of the first embodiment described above. Conductive wire 62 accommodated in a single flexible cable support member 60 for the exciting coil element 50 b attached to the upper surface of the first table section 40, for supplying the cooling medium. The cable treatment for wiring and piping of the hose 64 of the same to the excitation coil element 5 Ob is performed. The fixed magnet element cooperating with the excitation coil element 5 O b

50 a is attached to the back side of the second table section 42.

In the above-described second embodiment of the present invention, inside the flexible cable supporting member 60, a conductive wire 62 for supplying a current and a cooling medium to the second linear motor 50 and a fluid supply hose 64 are housed. Therefore, the cable processing is further simplified than the cable processing in the first embodiment described above.

As shown in FIG. 5, the excitation coil 80a of the drive liner motor is connected like the first table section 40 in the first embodiment or the fixed bed 38 in the second embodiment. The structure of the linear guide means attached to the moving body 82 or the structure to which the built-in excitation coil element 80 is attached is provided with a guide slider 84 a rather than a guide rail. I like it. This is because a large magnetic attraction force acts between the fixed magnet element and the exciting coil element when driving the linear motion due to the electromagnetic interaction of the linear motor, and especially the exciting coil element 80 Because it is mounted in the central area, a local magnetic attraction acts on this area. Since such magnetic attraction force causes local deformation of the moving body 82, the element of the straight line planning means 84 is a sliding element which is a single element rather than a long guide rail. The configuration in which the armature 84 side is attached to the surface of the moving body 82 together with the excitation coil element 80 is not affected by the local deformation, and the mechanical rigidity of the linear guide means It is preferable from the viewpoint of the service life.

As described above, the present invention has been described based on the two embodiments. However, these are the most preferable embodiments, and it goes without saying that various modifications and changes can be made within the scope of the present invention. For example, the arrangement of the flexible cable support members 60 may be different from the arrangement in the illustrated example.

As described above, according to the present invention, in a two-axis table device having two linear moving elements, that is, a first table portion and a second table portion, two X-axis driving units and two Y-axis driving units This is a two-axis table device that devises the arrangement structure of the fixed magnet part and the excitation coil part of the linear motor and performs cable processing using only one belt-shaped flexible cable support member. The height of the shaft table device is prevented from becoming bulky by using a linear motor, and both the conductive di and the fluid supply hose can be achieved only by using a single flexible cable support member. Since cable processing can be performed, simplification around the table can be achieved, making it easier to design the table and reducing manufacturing costs.In addition, complicated cable creeping, wiring, etc. From no Two Cities, obtained biaxially table device or high application performance.

Claims

The scope of the claims

1. A first table section that linearly moves in the first axial direction above the fixed bed via first linear motor means, and a second linear motor above the first table section via the second linear motor. A second table driven by a linear motor, the second table being linearly moved in a second axis direction orthogonal to the first predetermined axis direction.

At least a fixed magnet element in the second linear motor that drives a second table portion disposed above the first table portion is attached to a bottom surface of the second table portion,

A flexible cable support member having one end coupled to the first table portion so as to be movable with the first table portion,

The excitation coil element of the second linear motor is fixed to the first taper section, and a conductive wire and a distribution hose are directly wired and piped from the flexible cable support member to the excitation coil element. A two-axis table driven by a linear motor.

2. The exciting coil elements in the first linear motor and the second linear motor in the respective motors are fixed to the upper and lower surfaces of the first table, and the upper and lower surfaces are linearly guided by the first table. 2. The linear motor according to claim 1, wherein a slider is provided on the other side, and a guide rail of the linear guide means is provided on the fixed bed on the other side and the second table portion. Two-axis table device driven by

3. A flexible cable supporting member having one end coupled to the first table portion is formed in a U-shape, and the other end of the flexible cable supporting member is externally connected via a side portion of the fixed bed. The two-axis table device driven by the linear motor according to claim 1, wherein the two-axis table device is attached to a fixed position of the table.

4. The flexible cable is connected to the exciting coil element of the first linear motor. The two-axis table device driven by a linear motor according to claim 3, wherein a conductive wire and a distribution hose are wired and piped from the one end of the support member.

5. An excitation coil element for the first linear mode is provided on the fixed bed,

The two-axis table device driven by a linear motor according to claim 1, wherein an exciting coil element for the second linear motor is provided on an upper surface of the first table unit.

6. A conductive wire and a distribution hose are connected to the excitation coil element of the first linear motor directly from the outside, and are wired and piped without passing through the flexible cable supporting member. A two-axis table device driven by the linear motor according to claim 5.