WO1995015480A1 - Simple microamplitude vibration detector - Google Patents
Simple microamplitude vibration detector Download PDFInfo
- Publication number
- WO1995015480A1 WO1995015480A1 PCT/US1994/013276 US9413276W WO9515480A1 WO 1995015480 A1 WO1995015480 A1 WO 1995015480A1 US 9413276 W US9413276 W US 9413276W WO 9515480 A1 WO9515480 A1 WO 9515480A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- probe
- sample
- recited
- interaction
- additional
- Prior art date
Links
- 238000000034 method Methods 0.000 claims abstract description 21
- 239000000523 sample Substances 0.000 claims description 89
- 230000003993 interaction Effects 0.000 claims description 17
- 238000005286 illumination Methods 0.000 abstract description 5
- 238000012544 monitoring process Methods 0.000 abstract description 4
- 230000004075 alteration Effects 0.000 abstract description 3
- 238000001514 detection method Methods 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000000386 microscopy Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000006707 environmental alteration Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005329 nanolithography Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000000399 optical microscopy Methods 0.000 description 1
- 230000001443 photoexcitation Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011896 sensitive detection Methods 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
Definitions
- the invention is a simple and general purpose 6 method for monitoring ultrasmall, ⁇ 0.01 °A vibrational amplitudes with applications to many 8 areas such as high resolution tips with acoustic sensing capabilities, near-field optics, point 10 thermal couples, multichannel force probes etc.
- This invention does not require a transparent 12 sample, is very simple to implement and is extremely reliable. This reliability is 14 particularly important for applications in which large disturbances occur due to some external 16 factors such as the firing of a pulsed laser.
- the essence of this invention is a method of position detection that is widely applicable to a 28 variety of fields.
- One area in which our method of detection could be very valuable is in the 30 operation of force microscopes in which an interaction is monitored between a surface and an 32 ultra small tip, which in our detection scheme can be a part of a cantilevered structure or as a 34 straight element. Any interactions which disturb the positional properties of the probe could be detected with our method.
- a force tip is modulated at its resonance frequency parallel to the plane of a sample surface.
- the mechanical oscillator that is produced by vibrating the tip is very sensitive to any interaction with the sample surface.
- the frictional damping produces both an amplitude reduction and a phase [shift] in the probe modulation. This signal is then used to drive a feedback system to maintain a constant interaction strength and thus a constant distance from the surface.
- the present invention is method which is capable
- FIG. 20 The basic principle of our position detection scheme is diagrammatically illustrated in Figure 20 1.
- a source of light (1.1) having a defined functional dependence in its intensity 22 illuminates an object (called the probe and labeled as 1.2) the position of which is to be 24 measured.
- the intensity of part of the light beam passing near the probe is detected by a 26 photodetector (1.3) which monitors the position of the probe in the beam. This is a result of the 28 defined functional dependence of the beam.
- the illuminating beam has to have a reasonable size which can be produced with an appropriate
- the light source is a laser with a Gaussian profile, which is the conventional configuration of a single mode laser beam
- the best sensitivity is obtained when the laser beam diameter is 1.4 time the diameter of the probe (assuming that the diameter of the probe in this example is 10 - 20 ⁇ ) .
- the illumination is a superposition of the interference of the beam on the probe and a geometrical shadow of the probe.
- the parameter monitoring the position of the probe in the beam is the integral intensity of the light passing the probe.
- the part of the light reaching the photodetector plane that is of interest to us, as seen in Figure 1, is the intensity around the geometrical shadow (1.4) rather than the intensity at the interference maxima (1.5) that occur as indicated in this figure.
- This microvibration detector can be very sensitive to the vibration amplitude and this is especially the case when using a noise compensator, lock-in amplification etc.
- Changing of the vibration amplitude can monitor interaction of the probe with a sample or excitation force.
- This external modulation excites the probe vibration with an amplitude dependence that is related to the probe properties. These properties include the functional dependence of the sample and probe tip interaction, the Q-factor of the probe, its resonance frequency, the effective mass of the tip, etc.
- this detector can be used as a monitor of a variety of atomic forces that could effect the amplitude and/or phase of the probe vibrations.
- Other - 2 effects that could also induce similar changes include acoustic waves that may be induced in the , 4 sample by photoexcitation, i.e. the probe acts in this case as a point microphone, and other 6 alterations in the near environment of the probe.
- an additional modification could be the use of two 10 photodetectors (1.3) at the same time (as is shown in Figure 1) .
- An alternate illumination 14 geometry would reflect the light illuminating the tip of the probe off the sample surface onto the 16 detector and this could also add additional sensitivity to the system since only the probe tip 18 is illuminated.
- This device detects vibrations of the probe as the probe moves relative to the illuminating beam
- the main advantages of the method is that it is 30 based on a very simple and extremely reliable scheme. This reliability is particularly 32 important for all applications even those in which large disturbances occur due to some external 34 factors such as the firing of a pulsed laser. 7.
- the technique can be used in association with many applications including point microphonic detection for photoacoustic microscopy, near-field optical microscopy, near-field nanolithography, near-field thermal measurements etc.
- FIG. 1 An illustrative overview of the parts of the device.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
A microamplitude vibration detector and a method for monitoring micromovement disturbances provide illumination of an object (1.2), the position of which is to be detected, from a light source (1.1) having a defined functional dependence. The intensity of the illumination passing near the object is detected by a photodetector (1.3) which monitors the relative position of the object. The functional dependence of the light source may be a Gaussian profile, which provides a sharp alteration of light at the photodetection as a result of movement of the object.
Description
SIMPLE MICROAMPLITUDE VIBRATION DETECTOR
* 2
Field of the Invention
. 4
The invention is a simple and general purpose 6 method for monitoring ultrasmall, ≥ 0.01 °A vibrational amplitudes with applications to many 8 areas such as high resolution tips with acoustic sensing capabilities, near-field optics, point 10 thermal couples, multichannel force probes etc.
This invention does not require a transparent 12 sample, is very simple to implement and is extremely reliable. This reliability is 14 particularly important for applications in which large disturbances occur due to some external 16 factors such as the firing of a pulsed laser.
18 2. Background of the Invention.
20 There are many applications in which highly local vibrations have to be detected in order to monitor 22 a variety of highly local phenomena including those associated with acoustics, optics, 24 electromagnetic, temperature and ultra localized force interactions. 26 The essence of this invention is a method of position detection that is widely applicable to a 28 variety of fields. One area in which our method of detection could be very valuable is in the 30 operation of force microscopes in which an interaction is monitored between a surface and an 32 ultra small tip, which in our detection scheme can be a part of a cantilevered structure or as a 34 straight element. Any interactions which disturb the positional properties of the probe could be
detected with our method. In one implementation, that is important in force microscopy, a force tip is modulated at its resonance frequency parallel to the plane of a sample surface. The mechanical oscillator that is produced by vibrating the tip is very sensitive to any interaction with the sample surface. The frictional damping produces both an amplitude reduction and a phase [shift] in the probe modulation. This signal is then used to drive a feedback system to maintain a constant interaction strength and thus a constant distance from the surface.
State of Prior Art ,
Presently there is a great deal of interest in the detection of ultrasmall positional information of highly localized probes. A variety of techniques have been devised. . These include detection schemes which are based on such methods as position sensitive detection [G. Meyer and N. M.
Amer. Appl Phys . Lett . 53, 2400, (1988) .] , polarization [Y. Martin, C.C. Williams and H. K.
Wickramasinghe, J. Appl. Phys. 61, 4723, (1987)] , interferometry [D. Sarid, P. Pax, L. Yi, S.
Howells, M. Gallagher, and T. Chan, V. Elings and D. Bocek, Rev. Sci. Instrum 63, 3905 (1992) , electron tunneling [K. Lieberman and A. Lewis, Appl . Phys . Lett . 62, 1335 (1993)] , capacitance
[Y. Martin, D. E. Abraham and H. K. Wickramasinghe, Appl . Phys . Lett . 52, 1103,
(1988)] , ion conductance [C. B. Prater, P. K. Hansma, M. Tortonese and C. F. Quate, .Rev. Sci .
Instrum. 62 (1991) ] .
4. Summary of the Invention , 2
The present invention is method which is capable
4 of monitoring micromovement disturbances introduced into a system and using the information
6 obtained to microposition cantilevers, glass rods, fibers, glass capillaries etc. The invention uses
8 a method of illumination with defined functional dependence, an obscuring probe and a detector that
10 is sensitive to the illuminating source in order to monitor environmental alterations on the probe
12 with a sensitivity that is ≥O.Ol °A
14 5. Description of the Invention
16 5.1 Parts of the Device
18 The basic principle of our position detection scheme is diagrammatically illustrated in Figure 20 1. In this figure a source of light (1.1) having a defined functional dependence in its intensity 22 illuminates an object (called the probe and labeled as 1.2) the position of which is to be 24 measured. The intensity of part of the light beam passing near the probe is detected by a 26 photodetector (1.3) which monitors the position of the probe in the beam. This is a result of the 28 defined functional dependence of the beam.
30 The illuminating beam has to have a reasonable size which can be produced with an appropriate
32 objective lens. The functional dependence of the beam has to produce a sharp enough alteration as
34 a result of the movement of the probe in order to maximize the signal to noise at the photodetector.
As an example, if the light source is a laser with a Gaussian profile, which is the conventional configuration of a single mode laser beam, the best sensitivity is obtained when the laser beam diameter is 1.4 time the diameter of the probe (assuming that the diameter of the probe in this example is 10 - 20μ) . At the plane of the photodetector, the illumination is a superposition of the interference of the beam on the probe and a geometrical shadow of the probe. The parameter monitoring the position of the probe in the beam is the integral intensity of the light passing the probe. The part of the light reaching the photodetector plane that is of interest to us, as seen in Figure 1, is the intensity around the geometrical shadow (1.4) rather than the intensity at the interference maxima (1.5) that occur as indicated in this figure. This microvibration detector can be very sensitive to the vibration amplitude and this is especially the case when using a noise compensator, lock-in amplification etc.
Changing of the vibration amplitude can monitor interaction of the probe with a sample or excitation force. In such a case of probe/sample can be used. This external modulation excites the probe vibration with an amplitude dependence that is related to the probe properties. These properties include the functional dependence of the sample and probe tip interaction, the Q-factor of the probe, its resonance frequency, the effective mass of the tip, etc. In this case this detector can be used as a monitor of a variety of atomic forces that could effect the amplitude
and/or phase of the probe vibrations. Other - 2 effects that could also induce similar changes include acoustic waves that may be induced in the , 4 sample by photoexcitation, i.e. the probe acts in this case as a point microphone, and other 6 alterations in the near environment of the probe.
8 To further reduce noise, an additional modification could be the use of two 10 photodetectors (1.3) at the same time (as is shown in Figure 1) . This gives the system the ability 12 to compensate for light source noise which limits detector sensitivity. An alternate illumination 14 geometry would reflect the light illuminating the tip of the probe off the sample surface onto the 16 detector and this could also add additional sensitivity to the system since only the probe tip 18 is illuminated.
20 5.2 Operation of the Device
22 This device detects vibrations of the probe as the probe moves relative to the illuminating beam
24 which changes the integral intensity of passing the probe light.
26
6. Advantages Over Prior Art
28
The main advantages of the method is that it is 30 based on a very simple and extremely reliable scheme. This reliability is particularly 32 important for all applications even those in which large disturbances occur due to some external 34 factors such as the firing of a pulsed laser.
7. Applications
The technique can be used in association with many applications including point microphonic detection for photoacoustic microscopy, near-field optical microscopy, near-field nanolithography, near-field thermal measurements etc.
8. Description of Figures
Figure 1. An illustrative overview of the parts of the device.
Claims
2 CLAIMS
4 1. A device consisting of a probe whose vibrations are measured by placing it between a
6 light source having a defined intensity dependence and a photodetector which monitors part of the
8 intensity of the light that passes near the probe.
10 2. A device as recited in claim 1 where instead one photodetector two photodetectors are used. 12
3. A device as recited in claim 1 with an 14 additional sample interaction which changes the position of the probe. 16
4. A device as recited in claim 3 with two 18 photodetectors as it described in claim 2.
20 5. A device as recited in claim 1 with additional probe modulation in which the probe/sample 22 interaction is changes the probe vibration amplitude and/or phase. 24
6. A device as recited in claim 2 with additional 26 probe modulation in which the probe/sample interaction is changes the probe vibration 28 amplitude and/or phase.
30 7. A device as recited in claim 1 with additional sample modulation in which the probe/sample 32 interaction is changes the probe vibration
■ amplitude and/or phase.
34
8. A device as recited in claim 2 with additional sample modulation. In this case the result of the probe to the sample interaction is changing of the probe vibration amplitude and (or) phase.
9. A device as recited in claim 1 with the sample being used to reflect the light beam in order that the very tip of the probe can be illuminated and permitting large sample areas to be employed.
10. A device as recited in claim 2 with the sample being used to reflect the light beam ion order that the very tip of the probe can be illuminated and permitting large sample areas to be employed.
11. A method consisting of a probe whose vibrations are measured by placing it between a light source having a defined intensity dependence and a photodetector which monitors part of the intensity of the light that passes near the probe.
12. A method as recited in claim 11 where instead one photodetector two photodetectors are used.
13. A method as recited in claim 11 with an additional sample interaction which changes the position of the probe.
14. A method as recited in claim 13 with two photodetectors as it described in claim 2.
15. A method as recited in claim 11 with additional probe modulation in which the probe/sample interaction is changes the probe vibration amplitude and/or phase.
16. A method as recited in claim 12 with additional probe modulation in which theprobe/sample interaction is changes the probe vibration amplitude and/or phase.
17. A method as recited in claim 11 with additional sample modulation in which the probe/sample interaction is changes the probe vibration amplitude and/or phase.
18. A method as recited in claim 12 with additional sample modulation. In this case the result of the probe to the sample interaction is changing of the probe vibration amplitude and (or) phase.
19. A method as recited in claim 11 with the sample being used to reflect the light beam in order that the very tip of the probe can be illuminated and permitting large sample areas to be employed.
20. A method as recited in claim 12 with the sample being used to reflect the light beam in order that the very tip of the probe can be illuminated and permitting large sample areas to be employed.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IL107807 | 1993-11-30 | ||
| IL10780793A IL107807A0 (en) | 1993-11-30 | 1993-11-30 | Simple microamplitude vibration detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO1995015480A1 true WO1995015480A1 (en) | 1995-06-08 |
Family
ID=11065529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US1994/013276 WO1995015480A1 (en) | 1993-11-30 | 1994-11-29 | Simple microamplitude vibration detector |
Country Status (2)
| Country | Link |
|---|---|
| IL (1) | IL107807A0 (en) |
| WO (1) | WO1995015480A1 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0822435A1 (en) | 1996-08-03 | 1998-02-04 | Hüls Aktiengesellschaft | Device and method for scanning near field optical microscopy of samples in fluids |
| CN103884416A (en) * | 2014-03-10 | 2014-06-25 | 杭州电子科技大学 | Device and method for measuring amplitude of output end of ultrasonic acoustic system |
| RU2535237C1 (en) * | 2013-06-20 | 2014-12-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Пензенский государственный университет" | Vibrations measurement method |
| RU2535522C1 (en) * | 2013-06-20 | 2014-12-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Пензенский государственный университет" | Vibrations measurement method |
| US9618369B2 (en) | 2008-08-26 | 2017-04-11 | The University Court Of The University Of Glasgow | Uses of electromagnetic interference patterns |
| RU2666583C1 (en) * | 2017-10-26 | 2018-09-11 | Федеральное государственное автономное научное учреждение "Центральный научно-исследовательский и опытно-конструкторский институт робототехники и технической кибернетики" (ЦНИИ РТК) | Method of indicating mechanical resonances on photographs of fluorescent marker tracks |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4599711A (en) * | 1984-10-29 | 1986-07-08 | The United States Of America As Represented By The Secretary Of The Navy | Multi-lever miniature fiber optic transducer |
| JPS63271125A (en) * | 1987-04-28 | 1988-11-09 | Mitsubishi Electric Corp | Vibration detector |
| US4792931A (en) * | 1985-04-16 | 1988-12-20 | Schlumberger Technology Corporation | Optical seismic detector |
-
1993
- 1993-11-30 IL IL10780793A patent/IL107807A0/en unknown
-
1994
- 1994-11-29 WO PCT/US1994/013276 patent/WO1995015480A1/en active Application Filing
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4599711A (en) * | 1984-10-29 | 1986-07-08 | The United States Of America As Represented By The Secretary Of The Navy | Multi-lever miniature fiber optic transducer |
| US4792931A (en) * | 1985-04-16 | 1988-12-20 | Schlumberger Technology Corporation | Optical seismic detector |
| JPS63271125A (en) * | 1987-04-28 | 1988-11-09 | Mitsubishi Electric Corp | Vibration detector |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0822435A1 (en) | 1996-08-03 | 1998-02-04 | Hüls Aktiengesellschaft | Device and method for scanning near field optical microscopy of samples in fluids |
| US9618369B2 (en) | 2008-08-26 | 2017-04-11 | The University Court Of The University Of Glasgow | Uses of electromagnetic interference patterns |
| RU2535237C1 (en) * | 2013-06-20 | 2014-12-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Пензенский государственный университет" | Vibrations measurement method |
| RU2535522C1 (en) * | 2013-06-20 | 2014-12-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Пензенский государственный университет" | Vibrations measurement method |
| CN103884416A (en) * | 2014-03-10 | 2014-06-25 | 杭州电子科技大学 | Device and method for measuring amplitude of output end of ultrasonic acoustic system |
| RU2666583C1 (en) * | 2017-10-26 | 2018-09-11 | Федеральное государственное автономное научное учреждение "Центральный научно-исследовательский и опытно-конструкторский институт робототехники и технической кибернетики" (ЦНИИ РТК) | Method of indicating mechanical resonances on photographs of fluorescent marker tracks |
Also Published As
| Publication number | Publication date |
|---|---|
| IL107807A0 (en) | 1994-02-27 |
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