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WO1995008716A3 - Micromachined valve apparatus - Google Patents

Micromachined valve apparatus Download PDF

Info

Publication number
WO1995008716A3
WO1995008716A3 PCT/US1994/009319 US9409319W WO9508716A3 WO 1995008716 A3 WO1995008716 A3 WO 1995008716A3 US 9409319 W US9409319 W US 9409319W WO 9508716 A3 WO9508716 A3 WO 9508716A3
Authority
WO
WIPO (PCT)
Prior art keywords
valve seat
port opening
layer
fluid flow
brittle layer
Prior art date
Application number
PCT/US1994/009319
Other languages
French (fr)
Other versions
WO1995008716A2 (en
Inventor
Cynthia R Nelson
Fred C Sittler
Gregory A Boser
Original Assignee
Rosemount Analytical Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Analytical Inc filed Critical Rosemount Analytical Inc
Priority to JP7509758A priority Critical patent/JPH09505130A/en
Publication of WO1995008716A2 publication Critical patent/WO1995008716A2/en
Publication of WO1995008716A3 publication Critical patent/WO1995008716A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0059—Operating means specially adapted for microvalves actuated by fluids actuated by a pilot fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0076—Fabrication methods specifically adapted for microvalves using electrical discharge machining [EDM], milling or drilling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0078—Fabrication methods specifically adapted for microvalves using moulding or stamping
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Fluid-Driven Valves (AREA)
  • Micromachines (AREA)
  • Lift Valve (AREA)

Abstract

A valve controlling fluid flow includes a brittle layer (12) of material having a port opening (30, 32) therein and a valve seat (24A-24F) disposed about a perimeter of the port opening (30, 32). The valve seat (24A-24F) is selectively covered to control fluid flow through the port opening (30, 32). A second layer of material (20) is spaced apart from the brittle layer (12) and has a surface facing the valve seat (24A-24F). A flexible sheet of material (18) sandwiched between the brittle layer of material (12) and the second layer of material (20) includes a diaphragm (22A-22F) actuated by a control force to selectively cover the valve seat (24A-24F) to thereby control fluid flow through the port opening (30, 32). The flexible sheet of material (18) includes a moldable material (64) a portion of which conforms to a contour of the valve seat (24A-24F). The moldable material (64) is preferably joined to a flexible organic material (66).
PCT/US1994/009319 1993-09-24 1994-08-18 Micromachined valve apparatus WO1995008716A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7509758A JPH09505130A (en) 1993-09-24 1994-08-18 Micromachined valve device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12636693A 1993-09-24 1993-09-24
US08/126,366 1993-09-24

Publications (2)

Publication Number Publication Date
WO1995008716A2 WO1995008716A2 (en) 1995-03-30
WO1995008716A3 true WO1995008716A3 (en) 1995-05-11

Family

ID=22424441

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1994/009319 WO1995008716A2 (en) 1993-09-24 1994-08-18 Micromachined valve apparatus

Country Status (4)

Country Link
JP (1) JPH09505130A (en)
CN (1) CN1133080A (en)
CA (1) CA2169826A1 (en)
WO (1) WO1995008716A2 (en)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997033094A1 (en) * 1996-03-05 1997-09-12 Westonbridge International Limited Micro-machined membrane valve
DE19631693A1 (en) * 1996-08-06 1998-02-12 Gaswaerme Inst E V Valve arrangement
US6612535B1 (en) 1997-01-24 2003-09-02 California Institute Of Technology MEMS valve
US5932799A (en) * 1997-07-21 1999-08-03 Ysi Incorporated Microfluidic analyzer module
US6293012B1 (en) 1997-07-21 2001-09-25 Ysi Incorporated Method of making a fluid flow module
US6073482A (en) * 1997-07-21 2000-06-13 Ysi Incorporated Fluid flow module
DE19816283A1 (en) * 1998-04-11 1999-10-14 Festo Ag & Co Quantity amplifier device for fluid flows
US6770322B1 (en) 2000-03-03 2004-08-03 Ysi Incorporated Method of making a platform for use in a sensor in a microfluidic device
US6551496B1 (en) 2000-03-03 2003-04-22 Ysi Incorporated Microstructured bilateral sensor
ATE401566T1 (en) * 2001-04-03 2008-08-15 Micronics Inc SEPARATE FOCUSING CYTOMETER
EP1679121A3 (en) * 2001-04-06 2006-07-26 Fluidigm Corporation Microfabricated fluidic circuit elements and applications
US6802342B2 (en) 2001-04-06 2004-10-12 Fluidigm Corporation Microfabricated fluidic circuit elements and applications
US7913928B2 (en) 2005-11-04 2011-03-29 Alliant Techsystems Inc. Adaptive structures, systems incorporating same and related methods
GB2434643B (en) * 2006-01-31 2011-06-01 Microsaic Systems Ltd Planar micromachined valve and thermal desorber
RU2422204C2 (en) 2006-03-20 2011-06-27 Конинклейке Филипс Электроникс Н.В. Encased carrier system for electronic micro fluid devices
ES2504215T3 (en) 2007-03-21 2014-10-08 SOCIéTé BIC Fluid collector and procedure for it
US8679694B2 (en) 2007-03-21 2014-03-25 Societe Bic Fluidic control system and method of manufacture
US8133629B2 (en) 2007-03-21 2012-03-13 SOCIéTé BIC Fluidic distribution system and related methods
CN101713471B (en) * 2007-06-15 2011-12-28 微邦科技股份有限公司 Valve structure and micro pump using same
CN101324226B (en) * 2007-06-15 2010-09-01 微邦科技股份有限公司 Valve structure and micro pump using same
EP2766606B1 (en) * 2012-12-21 2015-12-16 Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. Pump arrangement comprising a safety valve arrangement
JP7452927B2 (en) * 2018-03-02 2024-03-19 ナショナル リサーチ カウンシル オブ カナダ Polymer microfluidic valve
US10767789B2 (en) * 2018-07-16 2020-09-08 Asm Ip Holding B.V. Diaphragm valves, valve components, and methods for forming valve components
EP4484945A1 (en) * 2022-02-24 2025-01-01 Shimadzu Corporation Gas analysis system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4869282A (en) * 1988-12-09 1989-09-26 Rosemount Inc. Micromachined valve with polyimide film diaphragm
EP0546427A1 (en) * 1991-12-02 1993-06-16 Forschungszentrum Karlsruhe GmbH Microvalve and process of producing the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4869282A (en) * 1988-12-09 1989-09-26 Rosemount Inc. Micromachined valve with polyimide film diaphragm
EP0546427A1 (en) * 1991-12-02 1993-06-16 Forschungszentrum Karlsruhe GmbH Microvalve and process of producing the same

Also Published As

Publication number Publication date
CN1133080A (en) 1996-10-09
WO1995008716A2 (en) 1995-03-30
JPH09505130A (en) 1997-05-20
CA2169826A1 (en) 1995-03-30

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