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USD829778S1 - Vacuum chuck - Google Patents

Vacuum chuck Download PDF

Info

Publication number
USD829778S1
USD829778S1 US35/355,021 US35502184F USD829778S US D829778 S1 USD829778 S1 US D829778S1 US 35502184 F US35502184 F US 35502184F US D829778 S USD829778 S US D829778S
Authority
US
United States
Prior art keywords
vacuum chuck
design
view
lines represent
broken lines
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US35/355,021
Other versions
USD825923S1 (en
USD825524S1 (en
USD834014S1 (en
USD832974S1 (en
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USD830220S1 (en
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Inventor
Tomohiro Ishino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to US35/355,021 priority Critical patent/USD829778S1/en
Assigned to NGK SPARK PLUG CO., LTD. reassignment NGK SPARK PLUG CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ISHINO, TOMOHIRO
Application granted granted Critical
Publication of USD829778S1 publication Critical patent/USD829778S1/en
Assigned to NITERRA CO., LTD. reassignment NITERRA CO., LTD. CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: NGK SPARK PLUG CO., LTD.
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)

Description

1. Vacuum chuck
1.1 : Front View
Broken lines represent no part of claimed design.
Dots inside of solid lines represent projected portions which are not colored and are unclaimed.
1.2 : Rear View
Broken lines represent no part of claimed design.
1.3 : Right View
Broken lines represent no part of claimed design.
1.4 : Left View
Broken lines represent no part of claimed design.
1.5 : Top View
Broken lines represent no part of claimed design.
1.6 : Bottom View
Broken lines represent no part of claimed design.
1.7 : Perspective Enlarged View
Broken lines represent no part of claimed design.
Dots inside of solid lines represent projected portions which are not colored and are unclaimed.
1.8 : Partial Enlarged View of X-Y part of Fig. 1.1
Broken lines represent no part of claimed design.
Dot-dash line illustrates the border of enlarged view and forms no part of the claimed design and forms no part thereof.
1.9 : Cross-Sectional View of A-A line of Fig. 1.1
Broken lines represent no part of claimed design and form no part thereof.
The dotted-dashed broken lines in view 1.9 represent an unclaimed boundary line and form no part of the claimed design; view 1.8 is a partial enlarged view to show a part of the claimed portion; view 1.9 is a cross-sectional view to show a part of the claimed portion.

Claims (1)

    CLAIM
  1. The ornamental design for a vacuum chuck, as shown and described.
US35/355,021 2016-06-27 2016-06-27 Vacuum chuck Active USD829778S1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US35/355,021 USD829778S1 (en) 2016-06-27 2016-06-27 Vacuum chuck

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US35/355,021 USD829778S1 (en) 2016-06-27 2016-06-27 Vacuum chuck

Publications (1)

Publication Number Publication Date
USD829778S1 true USD829778S1 (en) 2018-10-02

Family

ID=63639165

Family Applications (1)

Application Number Title Priority Date Filing Date
US35/355,021 Active USD829778S1 (en) 2016-06-27 2016-06-27 Vacuum chuck

Country Status (1)

Country Link
US (1) USD829778S1 (en)

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2691937A (en) * 1947-10-01 1954-10-19 Homer Laughlin China Company Apparatus for multicolor stamping of dinnerware
US2852264A (en) * 1955-02-28 1958-09-16 Granata Rosario Charles Vacuum chuck
US4551192A (en) * 1983-06-30 1985-11-05 International Business Machines Corporation Electrostatic or vacuum pinchuck formed with microcircuit lithography
USD307593S (en) * 1987-02-26 1990-05-01 Chishty Aqeel M Vacuum chuck for a lathe for making optically-smooth surfaces
US5564682A (en) * 1993-08-13 1996-10-15 Kabushiki Kaisha Toshiba Wafer stage apparatus for attaching and holding semiconductor wafer
US5857667A (en) * 1995-10-27 1999-01-12 Samsung Aerospace Industries, Ltd. Vacuum chuck
US6032997A (en) * 1998-04-16 2000-03-07 Excimer Laser Systems Vacuum chuck
US6176770B1 (en) * 2000-01-31 2001-01-23 United Microelectronics Corp. Grindstone having a vacuum system in a pin chuck stepper
US6271676B1 (en) * 1999-03-02 2001-08-07 Tsk America, Inc. Spiral chuck
US6464790B1 (en) * 1997-07-11 2002-10-15 Applied Materials, Inc. Substrate support member
US6538733B2 (en) * 2000-08-22 2003-03-25 Ade Corporation Ring chuck to hold 200 and 300 mm wafer
US6994386B2 (en) * 2002-03-21 2006-02-07 Novartis Ag Gripper
US7357115B2 (en) * 2003-03-31 2008-04-15 Lam Research Corporation Wafer clamping apparatus and method for operating the same
US8122795B2 (en) * 2006-07-10 2012-02-28 Mar Don Corporation Method for making an elastomeric sealing device
US8336188B2 (en) * 2008-07-17 2012-12-25 Formfactor, Inc. Thin wafer chuck
US9558985B2 (en) * 2012-03-28 2017-01-31 Acm Research (Shanghai) Inc. Vacuum chuck

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2691937A (en) * 1947-10-01 1954-10-19 Homer Laughlin China Company Apparatus for multicolor stamping of dinnerware
US2852264A (en) * 1955-02-28 1958-09-16 Granata Rosario Charles Vacuum chuck
US4551192A (en) * 1983-06-30 1985-11-05 International Business Machines Corporation Electrostatic or vacuum pinchuck formed with microcircuit lithography
USD307593S (en) * 1987-02-26 1990-05-01 Chishty Aqeel M Vacuum chuck for a lathe for making optically-smooth surfaces
US5564682A (en) * 1993-08-13 1996-10-15 Kabushiki Kaisha Toshiba Wafer stage apparatus for attaching and holding semiconductor wafer
US5857667A (en) * 1995-10-27 1999-01-12 Samsung Aerospace Industries, Ltd. Vacuum chuck
US6464790B1 (en) * 1997-07-11 2002-10-15 Applied Materials, Inc. Substrate support member
US6032997A (en) * 1998-04-16 2000-03-07 Excimer Laser Systems Vacuum chuck
US6271676B1 (en) * 1999-03-02 2001-08-07 Tsk America, Inc. Spiral chuck
US6176770B1 (en) * 2000-01-31 2001-01-23 United Microelectronics Corp. Grindstone having a vacuum system in a pin chuck stepper
US6538733B2 (en) * 2000-08-22 2003-03-25 Ade Corporation Ring chuck to hold 200 and 300 mm wafer
US6994386B2 (en) * 2002-03-21 2006-02-07 Novartis Ag Gripper
US7357115B2 (en) * 2003-03-31 2008-04-15 Lam Research Corporation Wafer clamping apparatus and method for operating the same
US8122795B2 (en) * 2006-07-10 2012-02-28 Mar Don Corporation Method for making an elastomeric sealing device
US8336188B2 (en) * 2008-07-17 2012-12-25 Formfactor, Inc. Thin wafer chuck
US9558985B2 (en) * 2012-03-28 2017-01-31 Acm Research (Shanghai) Inc. Vacuum chuck

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