USD711331S1 - Upper chamber liner - Google Patents
Upper chamber liner Download PDFInfo
- Publication number
- USD711331S1 USD711331S1 US29/472,048 US201329472048F USD711331S US D711331 S1 USD711331 S1 US D711331S1 US 201329472048 F US201329472048 F US 201329472048F US D711331 S USD711331 S US D711331S
- Authority
- US
- United States
- Prior art keywords
- upper chamber
- chamber liner
- view
- liner
- design
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Description
The broken lines in the figures form no part of the claimed design.
The upper chamber liner is shown broken away in FIGS. 10 and 11 to indicate that no particular length is claimed.
All surfaces not shown, form no part of the claimed design.
Claims (1)
- The ornamental design for an upper chamber liner, as shown and described.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/472,048 USD711331S1 (en) | 2013-11-07 | 2013-11-07 | Upper chamber liner |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/472,048 USD711331S1 (en) | 2013-11-07 | 2013-11-07 | Upper chamber liner |
Publications (1)
Publication Number | Publication Date |
---|---|
USD711331S1 true USD711331S1 (en) | 2014-08-19 |
Family
ID=51302155
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/472,048 Active USD711331S1 (en) | 2013-11-07 | 2013-11-07 | Upper chamber liner |
Country Status (1)
Country | Link |
---|---|
US (1) | USD711331S1 (en) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD736261S1 (en) * | 2012-11-29 | 2015-08-11 | Cummins Inc. | Shroud |
USD741823S1 (en) * | 2013-07-10 | 2015-10-27 | Hitachi Kokusai Electric Inc. | Vaporizer for substrate processing apparatus |
US20160033070A1 (en) * | 2014-08-01 | 2016-02-04 | Applied Materials, Inc. | Recursive pumping member |
USD875054S1 (en) * | 2017-04-28 | 2020-02-11 | Applied Materials, Inc. | Plasma connector liner |
USD875053S1 (en) * | 2017-04-28 | 2020-02-11 | Applied Materials, Inc. | Plasma connector liner |
USD875055S1 (en) * | 2017-04-28 | 2020-02-11 | Applied Materials, Inc. | Plasma connector liner |
USD910400S1 (en) * | 2019-09-04 | 2021-02-16 | Yongkang Moyi Tools Co., Ltd. | Grinder dust shroud |
USD913979S1 (en) * | 2019-08-28 | 2021-03-23 | Applied Materials, Inc. | Inner shield for a substrate processing chamber |
USD925481S1 (en) * | 2018-12-06 | 2021-07-20 | Kokusai Electric Corporation | Inlet liner for substrate processing apparatus |
USD1034493S1 (en) * | 2022-11-25 | 2024-07-09 | Ap Systems Inc. | Chamber wall liner for a semiconductor manufacturing apparatus |
US12100577B2 (en) | 2019-08-28 | 2024-09-24 | Applied Materials, Inc. | High conductance inner shield for process chamber |
USD1051867S1 (en) * | 2020-03-19 | 2024-11-19 | Applied Materials, Inc. | Confinement liner for a substrate processing chamber |
USD1064005S1 (en) | 2022-08-04 | 2025-02-25 | Applied Materials, Inc. | Grounding ring of a process kit for semiconductor substrate processing |
-
2013
- 2013-11-07 US US29/472,048 patent/USD711331S1/en active Active
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD736261S1 (en) * | 2012-11-29 | 2015-08-11 | Cummins Inc. | Shroud |
USD741823S1 (en) * | 2013-07-10 | 2015-10-27 | Hitachi Kokusai Electric Inc. | Vaporizer for substrate processing apparatus |
US20160033070A1 (en) * | 2014-08-01 | 2016-02-04 | Applied Materials, Inc. | Recursive pumping member |
USD875054S1 (en) * | 2017-04-28 | 2020-02-11 | Applied Materials, Inc. | Plasma connector liner |
USD875053S1 (en) * | 2017-04-28 | 2020-02-11 | Applied Materials, Inc. | Plasma connector liner |
USD875055S1 (en) * | 2017-04-28 | 2020-02-11 | Applied Materials, Inc. | Plasma connector liner |
USD925481S1 (en) * | 2018-12-06 | 2021-07-20 | Kokusai Electric Corporation | Inlet liner for substrate processing apparatus |
US12100577B2 (en) | 2019-08-28 | 2024-09-24 | Applied Materials, Inc. | High conductance inner shield for process chamber |
USD913979S1 (en) * | 2019-08-28 | 2021-03-23 | Applied Materials, Inc. | Inner shield for a substrate processing chamber |
USD910400S1 (en) * | 2019-09-04 | 2021-02-16 | Yongkang Moyi Tools Co., Ltd. | Grinder dust shroud |
USD1051867S1 (en) * | 2020-03-19 | 2024-11-19 | Applied Materials, Inc. | Confinement liner for a substrate processing chamber |
USD1064005S1 (en) | 2022-08-04 | 2025-02-25 | Applied Materials, Inc. | Grounding ring of a process kit for semiconductor substrate processing |
USD1034493S1 (en) * | 2022-11-25 | 2024-07-09 | Ap Systems Inc. | Chamber wall liner for a semiconductor manufacturing apparatus |
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