[go: up one dir, main page]

USD630657S1 - Shaft portion of an apparatus for holding and heating semiconductor wafers or the like - Google Patents

Shaft portion of an apparatus for holding and heating semiconductor wafers or the like Download PDF

Info

Publication number
USD630657S1
USD630657S1 US29/323,534 US32353408F USD630657S US D630657 S1 USD630657 S1 US D630657S1 US 32353408 F US32353408 F US 32353408F US D630657 S USD630657 S US D630657S
Authority
US
United States
Prior art keywords
holding
shaft portion
semiconductor wafers
heating semiconductor
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/323,534
Inventor
Taichi Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Assigned to NGK INSULATORS, LTD. reassignment NGK INSULATORS, LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: NAKAMURA, TAICHI
Application granted granted Critical
Publication of USD630657S1 publication Critical patent/USD630657S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Description

FIG. 1 is a perspective view of a shaft portion of an apparatus for holding and heating semiconductor wafers or the like;
FIG. 2 is a front view thereof, a rear view being the same image of a front view;
FIG. 3 is a right side view thereof, a left side view being the same image of a right side view;
FIG. 4 is a bottom plan view thereof; and,
FIG. 5 is a sectional view taken vertically at the center of the portion shown by 5—5 in FIG. 2.
The broken lines showing on the drawing disclosure are for illustrative purposes only and form no part of the claimed design. The lines consisting of long lines and dots indicate conceptual border lines between the claimed portions and the disclaimed portions.

Claims (1)

  1. The ornamental design for a shaft portion of an apparatus for holding and heating semiconductor wafers or the like, as shown and described.
US29/323,534 2008-02-29 2008-08-27 Shaft portion of an apparatus for holding and heating semiconductor wafers or the like Expired - Lifetime USD630657S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008-004937 2008-01-11
JP2008004937 2008-02-29

Publications (1)

Publication Number Publication Date
USD630657S1 true USD630657S1 (en) 2011-01-11

Family

ID=43416063

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/323,534 Expired - Lifetime USD630657S1 (en) 2008-02-29 2008-08-27 Shaft portion of an apparatus for holding and heating semiconductor wafers or the like

Country Status (2)

Country Link
US (1) USD630657S1 (en)
TW (1) TWD133940S1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1031676S1 (en) * 2020-12-04 2024-06-18 Asm Ip Holding B.V. Combined susceptor, support, and lift system

Citations (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US645199A (en) * 1898-04-25 1900-03-13 Walter E Jennison Bag-holder.
US3044624A (en) * 1958-01-08 1962-07-17 Tyler Co W S Screening machine and rubber mounting unit therefor
US5615429A (en) * 1994-08-08 1997-04-01 Williams; Susan R. Bed elevating blocks
USD387524S (en) * 1996-09-30 1997-12-09 Allen Robert G Water pressure plunger
US5762120A (en) * 1996-01-16 1998-06-09 Smith; Alan Threaded jar funnel
USD415552S (en) * 1997-12-23 1999-10-19 9036-5305 Quebec Inc. Funnel for filling up windshield washer fluid tank
USD422189S (en) * 1999-02-05 2000-04-04 Armament Systems And Procedures, Inc. Tool holder
US20010054381A1 (en) * 1998-12-14 2001-12-27 Salvador P Umotoy High temperature chemical vapor deposition chamber
USD452761S1 (en) * 2000-06-30 2002-01-08 Lawrence F. Swift Ice cream cone plastic sleeve
US20030019428A1 (en) * 2001-04-28 2003-01-30 Applied Materials, Inc. Chemical vapor deposition chamber
US20030075639A1 (en) * 2000-07-24 2003-04-24 Windings Inc. Molded fiber and plastic tubes
USD474270S1 (en) * 2001-12-21 2003-05-06 Medico International, Inc. Set of nose cones
USD481109S1 (en) * 2002-12-16 2003-10-21 Victaulic Company Of America Tee coupling
USD481447S1 (en) * 2002-12-16 2003-10-28 Victaulic Company Of America Elbow coupling
US20050029820A1 (en) * 2003-08-04 2005-02-10 Mannella Eugenio G. Handle set including a spindle assembly configured to resist removal
USD513549S1 (en) * 2004-07-09 2006-01-10 Doc Allen's Tool, Ltd. Device for filling a bag with packing materials
TWM298774U (en) 2006-01-26 2006-10-01 Forever Group Prec Ind Co Ltd Plate transportation device
USD535422S1 (en) * 2004-05-06 2007-01-16 Genlyte Thomas Group Llc Track luminaire
US7200877B2 (en) * 2004-04-04 2007-04-10 Karl Peng Dual flush water saving toilet system
USD547896S1 (en) * 2006-12-08 2007-07-31 Ningbo Jinhui Photographic Equipment Co., Ltd. Studio flash light
USD547894S1 (en) * 2006-12-08 2007-07-31 Ningbo Jinhui Photographic Equipment Co., Ltd. Studio flash light
TWD118408S1 (en) 2006-02-20 2007-08-01 東京威力科創股份有限公司 Processing tubes for semiconductor manufacturing
USD557438S1 (en) * 2007-05-15 2007-12-11 Dong Guan Bright Yinhuey Lighting Co., Ltd. Pendent lamp
US7318454B2 (en) * 2003-06-11 2008-01-15 Technip France Flexible tubular duct for the transport of fluid and particularly gaseous hydrocarbons with an anti-turbulence carcass and internal lining
USD564120S1 (en) * 2007-04-12 2008-03-11 Juno Manufacturing, Inc. Track lampholder
USD567429S1 (en) * 2007-05-02 2008-04-22 Mark Pickett Ceiling fan light fixture
USD589764S1 (en) * 2007-08-14 2009-04-07 Terry Alan Randolph Spill guard
USD616395S1 (en) * 2009-03-11 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD616394S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers

Patent Citations (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US645199A (en) * 1898-04-25 1900-03-13 Walter E Jennison Bag-holder.
US3044624A (en) * 1958-01-08 1962-07-17 Tyler Co W S Screening machine and rubber mounting unit therefor
US5615429A (en) * 1994-08-08 1997-04-01 Williams; Susan R. Bed elevating blocks
US5762120A (en) * 1996-01-16 1998-06-09 Smith; Alan Threaded jar funnel
USD387524S (en) * 1996-09-30 1997-12-09 Allen Robert G Water pressure plunger
USD415552S (en) * 1997-12-23 1999-10-19 9036-5305 Quebec Inc. Funnel for filling up windshield washer fluid tank
US20010054381A1 (en) * 1998-12-14 2001-12-27 Salvador P Umotoy High temperature chemical vapor deposition chamber
USD422189S (en) * 1999-02-05 2000-04-04 Armament Systems And Procedures, Inc. Tool holder
USD452761S1 (en) * 2000-06-30 2002-01-08 Lawrence F. Swift Ice cream cone plastic sleeve
US20030075639A1 (en) * 2000-07-24 2003-04-24 Windings Inc. Molded fiber and plastic tubes
US20030019428A1 (en) * 2001-04-28 2003-01-30 Applied Materials, Inc. Chemical vapor deposition chamber
USD474270S1 (en) * 2001-12-21 2003-05-06 Medico International, Inc. Set of nose cones
USD481109S1 (en) * 2002-12-16 2003-10-21 Victaulic Company Of America Tee coupling
USD481447S1 (en) * 2002-12-16 2003-10-28 Victaulic Company Of America Elbow coupling
US7318454B2 (en) * 2003-06-11 2008-01-15 Technip France Flexible tubular duct for the transport of fluid and particularly gaseous hydrocarbons with an anti-turbulence carcass and internal lining
US20050029820A1 (en) * 2003-08-04 2005-02-10 Mannella Eugenio G. Handle set including a spindle assembly configured to resist removal
US7200877B2 (en) * 2004-04-04 2007-04-10 Karl Peng Dual flush water saving toilet system
USD535422S1 (en) * 2004-05-06 2007-01-16 Genlyte Thomas Group Llc Track luminaire
USD513549S1 (en) * 2004-07-09 2006-01-10 Doc Allen's Tool, Ltd. Device for filling a bag with packing materials
TWM298774U (en) 2006-01-26 2006-10-01 Forever Group Prec Ind Co Ltd Plate transportation device
TWD118408S1 (en) 2006-02-20 2007-08-01 東京威力科創股份有限公司 Processing tubes for semiconductor manufacturing
USD547896S1 (en) * 2006-12-08 2007-07-31 Ningbo Jinhui Photographic Equipment Co., Ltd. Studio flash light
USD547894S1 (en) * 2006-12-08 2007-07-31 Ningbo Jinhui Photographic Equipment Co., Ltd. Studio flash light
USD564120S1 (en) * 2007-04-12 2008-03-11 Juno Manufacturing, Inc. Track lampholder
USD567429S1 (en) * 2007-05-02 2008-04-22 Mark Pickett Ceiling fan light fixture
USD557438S1 (en) * 2007-05-15 2007-12-11 Dong Guan Bright Yinhuey Lighting Co., Ltd. Pendent lamp
USD589764S1 (en) * 2007-08-14 2009-04-07 Terry Alan Randolph Spill guard
USD616394S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD616395S1 (en) * 2009-03-11 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1031676S1 (en) * 2020-12-04 2024-06-18 Asm Ip Holding B.V. Combined susceptor, support, and lift system

Also Published As

Publication number Publication date
TWD133940S1 (en) 2010-03-21

Similar Documents

Publication Publication Date Title
USD645889S1 (en) Shaft portion of an apparatus for holding and heating semiconductor wafers or the like
USD575773S1 (en) Earphone
USD598299S1 (en) Pouch
USD599664S1 (en) Top portion of a container
USD588836S1 (en) Dresser
USD537095S1 (en) Surface treatment for image capture device
USD593640S1 (en) Showerhead
USD617695S1 (en) Vehicle front valance
USD590916S1 (en) Hand-held showerhead
USD587587S1 (en) Container
USD595409S1 (en) Hemorrhoid treatment device
USD608011S1 (en) Vial
USD632119S1 (en) Exercise alignment mat
USD589912S1 (en) Wafer holding member
USD602096S1 (en) Attachment for controller
USD589227S1 (en) Pretzel chip
USD577548S1 (en) Mug
USD590643S1 (en) Television hutch
USD596376S1 (en) Pretzel chip
USD603889S1 (en) Image pickup apparatus
USD600081S1 (en) Cultivator head
USD580962S1 (en) Image pickup apparatus
USD599578S1 (en) Dresser
USD619056S1 (en) Vehicle front side grille
USD589232S1 (en) Pretzel chip