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USD623673S1 - Large area substrate processor - Google Patents

Large area substrate processor Download PDF

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Publication number
USD623673S1
USD623673S1 US29/330,000 US33000008F USD623673S US D623673 S1 USD623673 S1 US D623673S1 US 33000008 F US33000008 F US 33000008F US D623673 S USD623673 S US D623673S
Authority
US
United States
Prior art keywords
large area
area substrate
substrate processor
processor
processing system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/330,000
Inventor
Thomas L. Duer
John A. Miller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to US29/330,000 priority Critical patent/USD623673S1/en
Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: DUER, THOMAS L., MILLER, JOHN A.
Application granted granted Critical
Publication of USD623673S1 publication Critical patent/USD623673S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a top plan view of a processing system for processing large area substrates.
FIG. 2 is a front elevation of the processing system of FIG. 1. The back elevation being the same as the front elevation.
FIGS. 3-4 are side views of the processing system of FIG. 1.
FIG. 5 is a bottom view of the processing system of FIG. 1; and,
FIG. 6 is a perspective view of the processing system of FIG. 1.
The present invention generally includes a vacuum processing system for processing large area substrates, such as flat panel displays (i.e., LCD, OLED, and other types of flat panel displays), solar panels, and the like.
The broken lines in the drawings depict unclaimed environmental subject matter.

Claims (1)

  1. The ornamental design for a large area substrate processor, as shown and described.
US29/330,000 2008-12-24 2008-12-24 Large area substrate processor Expired - Lifetime USD623673S1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/330,000 USD623673S1 (en) 2008-12-24 2008-12-24 Large area substrate processor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/330,000 USD623673S1 (en) 2008-12-24 2008-12-24 Large area substrate processor

Publications (1)

Publication Number Publication Date
USD623673S1 true USD623673S1 (en) 2010-09-14

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Family Applications (1)

Application Number Title Priority Date Filing Date
US29/330,000 Expired - Lifetime USD623673S1 (en) 2008-12-24 2008-12-24 Large area substrate processor

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US (1) USD623673S1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD831086S1 (en) * 2016-12-09 2018-10-16 Hitachi High-Technologies Corporation Substrate processing unit
USD831085S1 (en) * 2016-12-09 2018-10-16 Hitachi High-Technologies Corporation Substrate processing unit
USD847237S1 (en) * 2016-12-09 2019-04-30 Hitachi High-Technologies Corporation Substrate processing unit
US11551960B2 (en) 2020-01-30 2023-01-10 Applied Materials, Inc. Helical plug for reduction or prevention of arcing in a substrate support

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD831086S1 (en) * 2016-12-09 2018-10-16 Hitachi High-Technologies Corporation Substrate processing unit
USD831085S1 (en) * 2016-12-09 2018-10-16 Hitachi High-Technologies Corporation Substrate processing unit
USD847237S1 (en) * 2016-12-09 2019-04-30 Hitachi High-Technologies Corporation Substrate processing unit
US11551960B2 (en) 2020-01-30 2023-01-10 Applied Materials, Inc. Helical plug for reduction or prevention of arcing in a substrate support

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