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USD1051081S1 - Exhaust wall liner for semiconductor manufacturing apparatus - Google Patents

Exhaust wall liner for semiconductor manufacturing apparatus Download PDF

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Publication number
USD1051081S1
USD1051081S1 US29/891,976 US202329891976F USD1051081S US D1051081 S1 USD1051081 S1 US D1051081S1 US 202329891976 F US202329891976 F US 202329891976F US D1051081 S USD1051081 S US D1051081S
Authority
US
United States
Prior art keywords
manufacturing apparatus
semiconductor manufacturing
wall liner
exhaust wall
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/891,976
Inventor
Chang Min KWON
Chang Kyo Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AP Systems Inc
Original Assignee
AP Systems Inc
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Filing date
Publication date
Application filed by AP Systems Inc filed Critical AP Systems Inc
Assigned to AP SYSTEMS INC. reassignment AP SYSTEMS INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KIM, CHANG KYO, KWON, CHANG MIN
Application granted granted Critical
Publication of USD1051081S1 publication Critical patent/USD1051081S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

FIG. 1 is a perspective view of an exhaust wall liner for a semiconductor manufacturing apparatus showing our new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a left side view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a top plan view thereof; and,
FIG. 7 is a bottom plan view thereof.

Claims (1)

    CLAIM
  1. The ornamental design for an exhaust wall liner for a semiconductor manufacturing apparatus, as shown and described.
US29/891,976 2022-11-25 2023-05-11 Exhaust wall liner for semiconductor manufacturing apparatus Active USD1051081S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR30-2022-0049282 2022-11-25
KR20220049282 2022-11-25

Publications (1)

Publication Number Publication Date
USD1051081S1 true USD1051081S1 (en) 2024-11-12

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ID=88972778

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/891,976 Active USD1051081S1 (en) 2022-11-25 2023-05-11 Exhaust wall liner for semiconductor manufacturing apparatus

Country Status (2)

Country Link
US (1) USD1051081S1 (en)
TW (1) TWD228904S (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD237605S (en) 2024-02-05 2025-04-11 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 (荷蘭) Precursor vessel nozzle

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4117672A (en) * 1975-08-15 1978-10-03 Honda Giken Kogyo Kabushiki Kaisha Exhaust reaction chamber system of engine
US5260116A (en) * 1987-03-24 1993-11-09 Ngk Insulators, Ltd. Ceramicm port liners
US5414993A (en) * 1993-12-22 1995-05-16 Caterpillar Inc. Exhaust port liner and seal assembly
US6134881A (en) * 1997-02-21 2000-10-24 Northrop Grumman Corporation Fiber reinforced ceramic matrix composite internal combustion engine intake/exhaust port liners
US20040137175A1 (en) * 1996-06-18 2004-07-15 3M Innovative Properties Company Free-standing internally insulating liner
US20140260282A1 (en) * 2013-03-15 2014-09-18 Rolls-Royce Corporation Gas turbine engine combustor liner
US20190329355A1 (en) * 2018-04-27 2019-10-31 United States Of America As Represented By The Administrator Of Nasa Method for Fabricating Seal-Free Multi-Metallic Thrust Chamber Liner
USD876504S1 (en) * 2017-04-03 2020-02-25 Asm Ip Holding B.V. Exhaust flow control ring for semiconductor deposition apparatus
US10989137B2 (en) * 2018-10-29 2021-04-27 Cartridge Limited Thermally enhanced exhaust port liner
TWD214307S (en) 2021-07-02 2021-09-21 家登精密工業股份有限公司 Support for upper cover of reticle box
US11319894B2 (en) * 2020-05-29 2022-05-03 GM Global Technology Operations LLC Insulated exhaust port liner for a cylinder head assembly of a motor vehicle
US11486293B2 (en) * 2020-08-28 2022-11-01 Honda Motor Co., Ltd. Exhaust structure of internal combustion engine
USD983151S1 (en) * 2020-09-09 2023-04-11 Kokusai Electric Corporation Exhaust liner for reaction tube
USD1034493S1 (en) * 2022-11-25 2024-07-09 Ap Systems Inc. Chamber wall liner for a semiconductor manufacturing apparatus

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4117672A (en) * 1975-08-15 1978-10-03 Honda Giken Kogyo Kabushiki Kaisha Exhaust reaction chamber system of engine
US5260116A (en) * 1987-03-24 1993-11-09 Ngk Insulators, Ltd. Ceramicm port liners
US5414993A (en) * 1993-12-22 1995-05-16 Caterpillar Inc. Exhaust port liner and seal assembly
US20040137175A1 (en) * 1996-06-18 2004-07-15 3M Innovative Properties Company Free-standing internally insulating liner
US6134881A (en) * 1997-02-21 2000-10-24 Northrop Grumman Corporation Fiber reinforced ceramic matrix composite internal combustion engine intake/exhaust port liners
US20140260282A1 (en) * 2013-03-15 2014-09-18 Rolls-Royce Corporation Gas turbine engine combustor liner
USD876504S1 (en) * 2017-04-03 2020-02-25 Asm Ip Holding B.V. Exhaust flow control ring for semiconductor deposition apparatus
US20190329355A1 (en) * 2018-04-27 2019-10-31 United States Of America As Represented By The Administrator Of Nasa Method for Fabricating Seal-Free Multi-Metallic Thrust Chamber Liner
US10989137B2 (en) * 2018-10-29 2021-04-27 Cartridge Limited Thermally enhanced exhaust port liner
US11319894B2 (en) * 2020-05-29 2022-05-03 GM Global Technology Operations LLC Insulated exhaust port liner for a cylinder head assembly of a motor vehicle
US11486293B2 (en) * 2020-08-28 2022-11-01 Honda Motor Co., Ltd. Exhaust structure of internal combustion engine
USD983151S1 (en) * 2020-09-09 2023-04-11 Kokusai Electric Corporation Exhaust liner for reaction tube
TWD214307S (en) 2021-07-02 2021-09-21 家登精密工業股份有限公司 Support for upper cover of reticle box
USD1034493S1 (en) * 2022-11-25 2024-07-09 Ap Systems Inc. Chamber wall liner for a semiconductor manufacturing apparatus

Also Published As

Publication number Publication date
TWD228904S (en) 2023-12-01

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