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USD1036399S1 - Gripper for wafer cassette - Google Patents

Gripper for wafer cassette Download PDF

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Publication number
USD1036399S1
USD1036399S1 US29/918,288 US202329918288F USD1036399S US D1036399 S1 USD1036399 S1 US D1036399S1 US 202329918288 F US202329918288 F US 202329918288F US D1036399 S USD1036399 S US D1036399S
Authority
US
United States
Prior art keywords
gripper
wafer cassette
view
wafer
cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/918,288
Inventor
Tomohiro Okada
Tamehide Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp filed Critical Omron Corp
Assigned to OMRON CORPORATION reassignment OMRON CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SHIMADA, TAMEHIDE, OKADA, TOMOHIRO
Application granted granted Critical
Publication of USD1036399S1 publication Critical patent/USD1036399S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

FIG. 1 is a front view of a gripper for wafer cassette showing our new design;
FIG. 2 is a rear view thereof;
FIG. 3 is a right side view thereof;
FIG. 4 is a left side view thereof;
FIG. 5 is a top view thereof;
FIG. 6 is a bottom view thereof;
FIG. 7 is a first perspective view thereof; and,
FIG. 8 is a second perspective view thereof.
The broken lines seen in the drawings are for the purpose of showing environmental structure, and form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a gripper for wafer cassette, as shown and described.
US29/918,288 2023-06-22 2023-11-27 Gripper for wafer cassette Active USD1036399S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023012779F JP1762250S (en) 2023-06-22 2023-06-22 Gripping machine for semiconductor wafer storage cassettes
JP2023-012779D 2023-06-22

Publications (1)

Publication Number Publication Date
USD1036399S1 true USD1036399S1 (en) 2024-07-23

Family

ID=89616384

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/918,288 Active USD1036399S1 (en) 2023-06-22 2023-11-27 Gripper for wafer cassette

Country Status (2)

Country Link
US (1) USD1036399S1 (en)
JP (1) JP1762250S (en)

Citations (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4770590A (en) * 1986-05-16 1988-09-13 Silicon Valley Group, Inc. Method and apparatus for transferring wafers between cassettes and a boat
US4892455A (en) * 1987-05-21 1990-01-09 Hine Derek L Wafer alignment and transport mechanism
US5102291A (en) * 1987-05-21 1992-04-07 Hine Design Inc. Method for transporting silicon wafers
US5810935A (en) * 1994-12-06 1998-09-22 Electronics And Telecommunications Research Institute Apparatus for transferring a wafer
US6012192A (en) * 1997-04-21 2000-01-11 Dainippon Screen Mfg. Co., Ltd. Substrate processing apparatus
USD444157S1 (en) * 1998-07-14 2001-06-26 Bayer Corporation Gripper finger
US6256555B1 (en) * 1998-12-02 2001-07-03 Newport Corporation Robot arm with specimen edge gripping end effector
US6468022B1 (en) * 2000-07-05 2002-10-22 Integrated Dynamics Engineering, Inc. Edge-gripping pre-aligner
US6769861B2 (en) * 2002-10-08 2004-08-03 Brooks Automation Inc. Apparatus for alignment and orientation of a wafer for processing
US6961639B2 (en) * 2002-01-29 2005-11-01 Recif, Societe Anonyme Apparatus and process for identification of characters inscribed on a semiconductor wafer containing an orientation mark
US6986636B2 (en) * 2000-06-09 2006-01-17 Brooks Automation, Inc. Device for positioning disk-shaped objects
USD589474S1 (en) * 2007-06-06 2009-03-31 Tokyo Electron Limited Wafer holding member
USD589912S1 (en) * 2007-06-06 2009-04-07 Tokyo Electron Limited Wafer holding member
USD594424S1 (en) * 2007-07-12 2009-06-16 Hiwin Mikrosystem Corp. Wafer carrier
USD674366S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Wafer holding member
USD674761S1 (en) * 2011-10-20 2013-01-22 Tokyo Electron Limited Wafer holding member
US8998561B2 (en) * 2010-07-02 2015-04-07 Shibaura Mechatronics Corporation Gripping device, transfer device, processing device, and manufacturing method for electronic device
US9455171B2 (en) * 2012-12-28 2016-09-27 Kawasaki Jukogyo Kabushiki Kaisha End effector
US10249524B2 (en) * 2017-08-09 2019-04-02 Asm Ip Holding B.V. Cassette holder assembly for a substrate cassette and holding member for use in such assembly
USD911986S1 (en) * 2019-05-03 2021-03-02 Raytheon Company Handheld semiconductor wafer handling tool

Patent Citations (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4770590A (en) * 1986-05-16 1988-09-13 Silicon Valley Group, Inc. Method and apparatus for transferring wafers between cassettes and a boat
US4892455A (en) * 1987-05-21 1990-01-09 Hine Derek L Wafer alignment and transport mechanism
US5102291A (en) * 1987-05-21 1992-04-07 Hine Design Inc. Method for transporting silicon wafers
US5810935A (en) * 1994-12-06 1998-09-22 Electronics And Telecommunications Research Institute Apparatus for transferring a wafer
US6012192A (en) * 1997-04-21 2000-01-11 Dainippon Screen Mfg. Co., Ltd. Substrate processing apparatus
USD444157S1 (en) * 1998-07-14 2001-06-26 Bayer Corporation Gripper finger
US6256555B1 (en) * 1998-12-02 2001-07-03 Newport Corporation Robot arm with specimen edge gripping end effector
US6986636B2 (en) * 2000-06-09 2006-01-17 Brooks Automation, Inc. Device for positioning disk-shaped objects
US6468022B1 (en) * 2000-07-05 2002-10-22 Integrated Dynamics Engineering, Inc. Edge-gripping pre-aligner
US6961639B2 (en) * 2002-01-29 2005-11-01 Recif, Societe Anonyme Apparatus and process for identification of characters inscribed on a semiconductor wafer containing an orientation mark
US6769861B2 (en) * 2002-10-08 2004-08-03 Brooks Automation Inc. Apparatus for alignment and orientation of a wafer for processing
USD589474S1 (en) * 2007-06-06 2009-03-31 Tokyo Electron Limited Wafer holding member
USD589912S1 (en) * 2007-06-06 2009-04-07 Tokyo Electron Limited Wafer holding member
USD594424S1 (en) * 2007-07-12 2009-06-16 Hiwin Mikrosystem Corp. Wafer carrier
US8998561B2 (en) * 2010-07-02 2015-04-07 Shibaura Mechatronics Corporation Gripping device, transfer device, processing device, and manufacturing method for electronic device
USD674366S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Wafer holding member
USD674761S1 (en) * 2011-10-20 2013-01-22 Tokyo Electron Limited Wafer holding member
US9455171B2 (en) * 2012-12-28 2016-09-27 Kawasaki Jukogyo Kabushiki Kaisha End effector
US10249524B2 (en) * 2017-08-09 2019-04-02 Asm Ip Holding B.V. Cassette holder assembly for a substrate cassette and holding member for use in such assembly
USD911986S1 (en) * 2019-05-03 2021-03-02 Raytheon Company Handheld semiconductor wafer handling tool

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Edge Gripper—our patented edge gripper,https://enkoba.de/im-reinraum/edge-gripper/,2023. (Year: 2023). *

Also Published As

Publication number Publication date
JP1762250S (en) 2024-01-25

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