US9005357B2 - Method of preparing molybdenum oxide films - Google Patents
Method of preparing molybdenum oxide films Download PDFInfo
- Publication number
- US9005357B2 US9005357B2 US13/898,826 US201313898826A US9005357B2 US 9005357 B2 US9005357 B2 US 9005357B2 US 201313898826 A US201313898826 A US 201313898826A US 9005357 B2 US9005357 B2 US 9005357B2
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- US
- United States
- Prior art keywords
- chloride
- acid
- iodide
- bromide
- ink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000000034 method Methods 0.000 title claims abstract description 34
- 229910000476 molybdenum oxide Inorganic materials 0.000 title abstract description 14
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 title abstract description 14
- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical compound O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 claims abstract description 72
- APUPEJJSWDHEBO-UHFFFAOYSA-P ammonium molybdate Chemical compound [NH4+].[NH4+].[O-][Mo]([O-])(=O)=O APUPEJJSWDHEBO-UHFFFAOYSA-P 0.000 claims abstract description 36
- 239000011609 ammonium molybdate Substances 0.000 claims abstract description 32
- 235000018660 ammonium molybdate Nutrition 0.000 claims abstract description 32
- 229940010552 ammonium molybdate Drugs 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 229910017053 inorganic salt Inorganic materials 0.000 claims abstract description 24
- 239000002904 solvent Substances 0.000 claims abstract description 14
- 239000011877 solvent mixture Substances 0.000 claims abstract description 6
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 claims description 44
- -1 molybdate compound Chemical class 0.000 claims description 26
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 22
- 239000011592 zinc chloride Substances 0.000 claims description 22
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims description 20
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims description 20
- 239000011248 coating agent Substances 0.000 claims description 12
- 238000000576 coating method Methods 0.000 claims description 12
- 238000002156 mixing Methods 0.000 claims description 12
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical compound [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 claims description 11
- 239000001110 calcium chloride Substances 0.000 claims description 11
- 229910001628 calcium chloride Inorganic materials 0.000 claims description 11
- 239000002253 acid Substances 0.000 claims description 10
- 229910001850 copernicium Inorganic materials 0.000 claims description 10
- 229910019626 (NH4)6Mo7O24 Inorganic materials 0.000 claims description 9
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 8
- CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical compound Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 claims description 8
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 8
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 8
- LELOWRISYMNNSU-UHFFFAOYSA-N hydrogen cyanide Chemical compound N#C LELOWRISYMNNSU-UHFFFAOYSA-N 0.000 claims description 8
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 claims description 8
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 235000005074 zinc chloride Nutrition 0.000 claims description 7
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 claims description 6
- YLQBMQCUIZJEEH-UHFFFAOYSA-N Furan Chemical compound C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 claims description 6
- TWRXJAOTZQYOKJ-UHFFFAOYSA-L Magnesium chloride Chemical compound [Mg+2].[Cl-].[Cl-] TWRXJAOTZQYOKJ-UHFFFAOYSA-L 0.000 claims description 6
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 claims description 6
- LWBPNIJBHRISSS-UHFFFAOYSA-L beryllium dichloride Chemical compound Cl[Be]Cl LWBPNIJBHRISSS-UHFFFAOYSA-L 0.000 claims description 6
- KPWJBEFBFLRCLH-UHFFFAOYSA-L cadmium bromide Chemical compound Br[Cd]Br KPWJBEFBFLRCLH-UHFFFAOYSA-L 0.000 claims description 6
- YKYOUMDCQGMQQO-UHFFFAOYSA-L cadmium dichloride Chemical compound Cl[Cd]Cl YKYOUMDCQGMQQO-UHFFFAOYSA-L 0.000 claims description 6
- OKIIEJOIXGHUKX-UHFFFAOYSA-L cadmium iodide Chemical compound [Cd+2].[I-].[I-] OKIIEJOIXGHUKX-UHFFFAOYSA-L 0.000 claims description 6
- VNDYJBBGRKZCSX-UHFFFAOYSA-L zinc bromide Chemical compound Br[Zn]Br VNDYJBBGRKZCSX-UHFFFAOYSA-L 0.000 claims description 6
- UAYWVJHJZHQCIE-UHFFFAOYSA-L zinc iodide Chemical compound I[Zn]I UAYWVJHJZHQCIE-UHFFFAOYSA-L 0.000 claims description 6
- 229910001507 metal halide Inorganic materials 0.000 claims description 5
- 150000005309 metal halides Chemical group 0.000 claims description 5
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 claims description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims description 4
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 claims description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 4
- LSNNMFCWUKXFEE-UHFFFAOYSA-N Sulfurous acid Chemical compound OS(O)=O LSNNMFCWUKXFEE-UHFFFAOYSA-N 0.000 claims description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 4
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims description 4
- 239000004327 boric acid Substances 0.000 claims description 4
- XTEGARKTQYYJKE-UHFFFAOYSA-N chloric acid Chemical compound OCl(=O)=O XTEGARKTQYYJKE-UHFFFAOYSA-N 0.000 claims description 4
- 229940005991 chloric acid Drugs 0.000 claims description 4
- QBWCMBCROVPCKQ-UHFFFAOYSA-N chlorous acid Chemical compound OCl=O QBWCMBCROVPCKQ-UHFFFAOYSA-N 0.000 claims description 4
- 229940077239 chlorous acid Drugs 0.000 claims description 4
- 229910000042 hydrogen bromide Inorganic materials 0.000 claims description 4
- 229910000043 hydrogen iodide Inorganic materials 0.000 claims description 4
- 229910017604 nitric acid Inorganic materials 0.000 claims description 4
- 229940074355 nitric acid Drugs 0.000 claims description 4
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical compound O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 claims description 4
- 229940032330 sulfuric acid Drugs 0.000 claims description 4
- UNMYWSMUMWPJLR-UHFFFAOYSA-L Calcium iodide Chemical compound [Ca+2].[I-].[I-] UNMYWSMUMWPJLR-UHFFFAOYSA-L 0.000 claims description 3
- VIUODKCIIYIXHC-UHFFFAOYSA-L [I-].[I-].[Ra+2] Chemical compound [I-].[I-].[Ra+2] VIUODKCIIYIXHC-UHFFFAOYSA-L 0.000 claims description 3
- NKQIMNKPSDEDMO-UHFFFAOYSA-L barium bromide Chemical compound [Br-].[Br-].[Ba+2] NKQIMNKPSDEDMO-UHFFFAOYSA-L 0.000 claims description 3
- 229910001620 barium bromide Inorganic materials 0.000 claims description 3
- WDIHJSXYQDMJHN-UHFFFAOYSA-L barium chloride Chemical compound [Cl-].[Cl-].[Ba+2] WDIHJSXYQDMJHN-UHFFFAOYSA-L 0.000 claims description 3
- 229910001626 barium chloride Inorganic materials 0.000 claims description 3
- SGUXGJPBTNFBAD-UHFFFAOYSA-L barium iodide Chemical compound [I-].[I-].[Ba+2] SGUXGJPBTNFBAD-UHFFFAOYSA-L 0.000 claims description 3
- 229910001638 barium iodide Inorganic materials 0.000 claims description 3
- 229940075444 barium iodide Drugs 0.000 claims description 3
- 229910001621 beryllium bromide Inorganic materials 0.000 claims description 3
- PBKYCFJFZMEFRS-UHFFFAOYSA-L beryllium bromide Chemical compound [Be+2].[Br-].[Br-] PBKYCFJFZMEFRS-UHFFFAOYSA-L 0.000 claims description 3
- 229910001627 beryllium chloride Inorganic materials 0.000 claims description 3
- 229910001639 beryllium iodide Inorganic materials 0.000 claims description 3
- JUCWKFHIHJQTFR-UHFFFAOYSA-L beryllium iodide Chemical compound [Be+2].[I-].[I-] JUCWKFHIHJQTFR-UHFFFAOYSA-L 0.000 claims description 3
- 229940075417 cadmium iodide Drugs 0.000 claims description 3
- 229910001622 calcium bromide Inorganic materials 0.000 claims description 3
- WGEFECGEFUFIQW-UHFFFAOYSA-L calcium dibromide Chemical compound [Ca+2].[Br-].[Br-] WGEFECGEFUFIQW-UHFFFAOYSA-L 0.000 claims description 3
- 229910001640 calcium iodide Inorganic materials 0.000 claims description 3
- 229940046413 calcium iodide Drugs 0.000 claims description 3
- RCTYPNKXASFOBE-UHFFFAOYSA-M chloromercury Chemical compound [Hg]Cl RCTYPNKXASFOBE-UHFFFAOYSA-M 0.000 claims description 3
- OTCKOJUMXQWKQG-UHFFFAOYSA-L magnesium bromide Chemical compound [Mg+2].[Br-].[Br-] OTCKOJUMXQWKQG-UHFFFAOYSA-L 0.000 claims description 3
- 229910001623 magnesium bromide Inorganic materials 0.000 claims description 3
- 229910001629 magnesium chloride Inorganic materials 0.000 claims description 3
- BLQJIBCZHWBKSL-UHFFFAOYSA-L magnesium iodide Chemical compound [Mg+2].[I-].[I-] BLQJIBCZHWBKSL-UHFFFAOYSA-L 0.000 claims description 3
- 229910001641 magnesium iodide Inorganic materials 0.000 claims description 3
- NGYIMTKLQULBOO-UHFFFAOYSA-L mercury dibromide Chemical compound Br[Hg]Br NGYIMTKLQULBOO-UHFFFAOYSA-L 0.000 claims description 3
- QKEOZZYXWAIQFO-UHFFFAOYSA-M mercury(1+);iodide Chemical compound [Hg]I QKEOZZYXWAIQFO-UHFFFAOYSA-M 0.000 claims description 3
- GIKWXTHTIQCTIH-UHFFFAOYSA-L radium bromide Chemical compound [Br-].[Br-].[Ra+2] GIKWXTHTIQCTIH-UHFFFAOYSA-L 0.000 claims description 3
- 229910001624 radium bromide Inorganic materials 0.000 claims description 3
- 229940075451 radium bromide Drugs 0.000 claims description 3
- RWRDJVNMSZYMDV-UHFFFAOYSA-L radium chloride Chemical compound [Cl-].[Cl-].[Ra+2] RWRDJVNMSZYMDV-UHFFFAOYSA-L 0.000 claims description 3
- 229910001630 radium chloride Inorganic materials 0.000 claims description 3
- 229910001642 radium iodide Inorganic materials 0.000 claims description 3
- YJPVTCSBVRMESK-UHFFFAOYSA-L strontium bromide Chemical compound [Br-].[Br-].[Sr+2] YJPVTCSBVRMESK-UHFFFAOYSA-L 0.000 claims description 3
- 229910001625 strontium bromide Inorganic materials 0.000 claims description 3
- 229940074155 strontium bromide Drugs 0.000 claims description 3
- 229910001631 strontium chloride Inorganic materials 0.000 claims description 3
- AHBGXTDRMVNFER-UHFFFAOYSA-L strontium dichloride Chemical compound [Cl-].[Cl-].[Sr+2] AHBGXTDRMVNFER-UHFFFAOYSA-L 0.000 claims description 3
- KRIJWFBRWPCESA-UHFFFAOYSA-L strontium iodide Chemical compound [Sr+2].[I-].[I-] KRIJWFBRWPCESA-UHFFFAOYSA-L 0.000 claims description 3
- 229910001643 strontium iodide Inorganic materials 0.000 claims description 3
- 229940102001 zinc bromide Drugs 0.000 claims description 3
- 229910019934 (NH4)2MoO4 Inorganic materials 0.000 claims description 2
- 150000001298 alcohols Chemical class 0.000 claims description 2
- QGAVSDVURUSLQK-UHFFFAOYSA-N ammonium heptamolybdate Chemical compound N.N.N.N.N.N.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.[Mo].[Mo].[Mo].[Mo].[Mo].[Mo].[Mo] QGAVSDVURUSLQK-UHFFFAOYSA-N 0.000 claims description 2
- XUFUCDNVOXXQQC-UHFFFAOYSA-L azane;hydroxy-(hydroxy(dioxo)molybdenio)oxy-dioxomolybdenum Chemical compound N.N.O[Mo](=O)(=O)O[Mo](O)(=O)=O XUFUCDNVOXXQQC-UHFFFAOYSA-L 0.000 claims description 2
- 150000002148 esters Chemical class 0.000 claims description 2
- 150000004677 hydrates Chemical class 0.000 claims description 2
- 239000002798 polar solvent Substances 0.000 claims description 2
- 239000000976 ink Substances 0.000 abstract description 57
- 230000005693 optoelectronics Effects 0.000 abstract description 20
- 239000010408 film Substances 0.000 description 65
- 239000010410 layer Substances 0.000 description 43
- 238000013086 organic photovoltaic Methods 0.000 description 37
- 229920000144 PEDOT:PSS Polymers 0.000 description 17
- 239000000654 additive Substances 0.000 description 17
- 230000000996 additive effect Effects 0.000 description 11
- MCEWYIDBDVPMES-UHFFFAOYSA-N [60]pcbm Chemical compound C123C(C4=C5C6=C7C8=C9C%10=C%11C%12=C%13C%14=C%15C%16=C%17C%18=C(C=%19C=%20C%18=C%18C%16=C%13C%13=C%11C9=C9C7=C(C=%20C9=C%13%18)C(C7=%19)=C96)C6=C%11C%17=C%15C%13=C%15C%14=C%12C%12=C%10C%10=C85)=C9C7=C6C2=C%11C%13=C2C%15=C%12C%10=C4C23C1(CCCC(=O)OC)C1=CC=CC=C1 MCEWYIDBDVPMES-UHFFFAOYSA-N 0.000 description 10
- 229920000301 poly(3-hexylthiophene-2,5-diyl) polymer Polymers 0.000 description 10
- 235000002639 sodium chloride Nutrition 0.000 description 9
- 239000011521 glass Substances 0.000 description 8
- 229920000642 polymer Polymers 0.000 description 8
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 7
- GNTDGMZSJNCJKK-UHFFFAOYSA-N divanadium pentaoxide Chemical compound O=[V](=O)O[V](=O)=O GNTDGMZSJNCJKK-UHFFFAOYSA-N 0.000 description 6
- 150000003839 salts Chemical class 0.000 description 6
- 238000000137 annealing Methods 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229920001467 poly(styrenesulfonates) Polymers 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- RFFLAFLAYFXFSW-UHFFFAOYSA-N 1,2-dichlorobenzene Chemical compound ClC1=CC=CC=C1Cl RFFLAFLAYFXFSW-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical group 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000005457 optimization Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 2
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 238000004630 atomic force microscopy Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 238000007641 inkjet printing Methods 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- 239000003446 ligand Substances 0.000 description 2
- 239000008204 material by function Substances 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 238000007764 slot die coating Methods 0.000 description 2
- 238000010345 tape casting Methods 0.000 description 2
- 238000002207 thermal evaporation Methods 0.000 description 2
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten(VI) oxide Inorganic materials O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 description 2
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical class C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000000089 atomic force micrograph Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- OVHDZBAFUMEXCX-UHFFFAOYSA-N benzyl 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)OCC1=CC=CC=C1 OVHDZBAFUMEXCX-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229920001400 block copolymer Polymers 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
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- 229910010272 inorganic material Inorganic materials 0.000 description 1
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- 229910052749 magnesium Inorganic materials 0.000 description 1
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- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
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- 238000007650 screen-printing Methods 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
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- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- 231100000331 toxic Toxicity 0.000 description 1
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- 229910001428 transition metal ion Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
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Definitions
- the invention relates to methods of preparing molybdenum oxide inks and molybdenum oxide films, and use of the molybdenum oxide films as hole-transporting layers in optoelectronic devices.
- OPV Organic photovoltaic
- BHJ bulk heterojunction
- P3HT:PCBM poly(3-hexylthiophene) and [6,6]-phenyl C61-butyric acid methyl ester
- PCE power conversion efficiency
- PEDOT:PSS poly(styrene sulfonate)
- It is commonly adopted as the anode buffer layer in traditional polymer OPV cells due to its high transparency, high work function, smooth morphology and good conductivity.
- PEDOT:PSS styrene sulfonate
- PEDOT:PSS has been replaced with metal oxides such as molybdenum (VI) oxide (MoO 3 ), vanadium (V) oxide (V 2 O 5 ), and tungsten (VI) oxide (WO 3 ).
- VI molybdenum
- V vanadium
- WO 3 tungsten oxide
- a solution-processed MoO 3 layer for OPV cells was prepared by spin-coating an aqueous MoO 3 solution.
- the solution was prepared from (NH 4 ) 6 Mo 7 O 24 (ammonium molybdate) and hydrochloric acid solution.
- the ink is highly acidic, which can etch the indium tin oxide (ITO) electrodes.
- an ink for forming a hybrid molybdenum (VI) oxide (MoO 3 ) film on a substrate comprising:
- the ammonium molybdate is (NH 4 ) 6 Mo 7 O 24 .
- the inorganic salt is a metal halide, such as zinc chloride or calcium chloride.
- a method for preparing a molybdenum (VI) oxide (MoO 3 ) coating ink comprising:
- a method for forming a hybrid molybdenum (VI) oxide (MoO 3 ) film on a substrate comprising:
- the ink comprises an ammonium molybdate, at least one inorganic salt different from ammonium molybdate, and a solvent or a solvent mixture.
- an optoelectronic device comprising a hybrid molybdenum (VI) oxide (MoO 3 ) film coated substrate formed by coating a substrate with an ink to form a film and annealing the film, wherein the ink comprises an ammonium molybdate, at least one inorganic salt different from ammonium molybdate, and a solvent or a solvent mixture.
- VI molybdenum oxide
- FIG. 1 shows the morphology of (a) pure ITO; (b) MoO 3 film coated onto ITO from ammonium molydate ink; and (c) hybridized MoO 3 film coated onto ITO from ammonium molydate ink with ZnCl 2 .
- Scan area is 1 ⁇ 1 ⁇ m.
- FIG. 2 shows the cross-section of the OPV device under investigation.
- the OPV device can be formed of a normal (or forward) structure configuration shown in FIG. 2A where different types of hybridized MoO 3 films functioning as the hole-transporting layer were coated onto ITO glass.
- the OPV device can also be formed of an inverted structure configuration shown in FIG. 2B .
- FIG. 3 shows the comparison of cell performances with pure MoO 3 film as the hole-transporting layer (marked as A) and a PEDOT:PSS control device.
- FIG. 4 shows the comparison of cell performances with MoO 3 films as the hole-transporting layer: MoO 3 film (B) prepared from ammonium molybdate ink with ZnCl 2 additive; MoO 3 film (C) prepared from ammonium molybdate ink with CaCl 2 additive.
- FIG. 5 shows the comparison of cell performances with MoO 3 films as the hole-transporting layer: MoO 3 film (D) prepared from ammonium molybdate ink with HCl; MoO 3 film (E) prepared from ammonium molybdate ink with HCl and ZnCl 2 additive.
- FIG. 6 shows a scheme showing the method for the preparation of hybridized molybdenum oxide (H—Mo) films.
- FIG. 7 shows preliminary lifetime studies, demonstrating that H—MoO 3 OPV devices are generally more stable.
- MoO 3 molybdenum oxide
- OLED organic photovoltaic
- MoO 3 films are prepared from ammonium molybdate inks with soluble inorganic salts as additives, producing comparable cell performances at a less acidic ink condition.
- the solution-processable MoO 3 film is environment friendly since water is employed as the formulation solvent.
- the formation of the MoO 3 film is processed at relatively low temperatures for a short period of time. By applying the MoO 3 film as a hole-transporting layer in OPV devices, the overall solar cell efficiency can be improved.
- the present invention relates to an ink for forming a hybrid MoO 3 film on a substrate.
- the ink comprises an ammonium molybdate, at least one inorganic salt different from ammonium molybdate, and a solvent or a solvent mixture.
- the ammonium molybdate may be selected from the group consisting of ammonium heptamolybdate ((NH 4 ) 6 Mo 7 O 24 ), ammonium dimolybdate ((NH 4 ) 2 Mo 2 O 7 ), ammonium orthomolybdate ((NH 4 ) 2 MoO 4 ), (NH 4 ) 4 Mo 5 O 17 , (NH 4 ) 2 Mo 4 O 13 , ⁇ -(NH 4 ) 2 Mo 4 O 13 , (NH 4 ) 4 Mo 8 O 26 , (NH 4 ) 4 Mo 8 O 26 , (NH 4 ) 2 Mo 14 O 43 , (NH 4 ) 2 Mo 22 O 67 and hydrates thereof.
- the ammonium molybdate is (NH 4 ) 6 Mo 7 O 24 .
- the inorganic salts comprise soluble inorganic salts containing transition metal ions and counter ions.
- the inorganic salt is a metal halide.
- the metal can be selected from zinc, calcium, beryllium, magnesium, strontium, barium, radium, cadmium, mercury, and copernicium.
- the halogen ion can be selected from fluoride, chloride, bromide and iodide.
- the metal halide can be selected from the group consisting of zinc chloride, zinc bromide, zinc iodide, calcium chloride, calcium bromide, calcium iodide, beryllium chloride, beryllium bromide, beryllium iodide, magnesium chloride, magnesium bromide, magnesium iodide, strontium chloride, strontium bromide, strontium iodide, barium chloride, barium bromide, barium iodide, radium chloride, radium bromide, radium iodide, cadmium chloride, cadmium bromide, cadmium iodide, mercury chloride, mercury bromide, mercury iodide, copernicium chloride, copernicium bromide, and copernicium iodide.
- the inorganic salt may be zinc chloride or calcium chloride.
- the solvent is a polar solvent selected from the group consisting of water, alcohols, furan, esters, acetonitrile, acetone, dimethylformamide, dimethyl sulfoxide and mixture thereof.
- the solvent is water.
- the solvent is furan or an alcohol.
- the ink further comprises an acid.
- the acid may be selected from the group consisting of hydrogen chloride, hydrogen bromide, hydrogen iodide, sulfuric acid, nitric acid, chloric acid, chlorous acid, sulfurous acid, hydrocyanic acid, perchloric acid, phosphoric acid, hypophosphorous acid, and boric acid.
- the acid is hydrogen chloride.
- the pH of the ink is at least 1.
- the pH of the ink may be 1, 1.5, 2, 2.5, 3, 3.3, 4, 4.5, 5, 5.3, or 6 and even higher.
- the present invention relates to a method of preparing a MoO 3 coating ink of the first aspect, the method comprising (i) mixing a molybdate compound and an inorganic salt in a solution, or (ii) mixing a solution of molybdate compound and an inorganic salt, or (iii) mixing a molybdate compound and a solution of an inorganic salt, or (iv) mixing a solution of a molybdate compound and a solution of an inorganic salt.
- the method of preparing the molybdenum oxide coating ink further comprises adding an acid to the mixture.
- the acid may be selected from the group consisting of hydrogen chloride, hydrogen bromide, hydrogen iodide, sulfuric acid, nitric acid, chloric acid, chlorous acid, sulfurous acid, hydrocyanic acid, perchloric acid, phosphoric acid, hypophosphorous acid, and boric acid.
- the present invention relates to a method of forming a hybrid MoO 3 film on a substrate, the method comprising coating the substrate with an ink according to the first aspect to form a film, and annealing the film.
- coating the substrate is solution-based.
- the solution-based coating and/or printing technique may be selected from the group consisting of spin coating, slot die coating, inkjet printing, dispensing, spray coating, blade coating, doctor blading, knife coating, curtain coating, gravure printing, flexo printing, offset printing, screen printing, and pad printing.
- FIG. 6 shows a scheme showing the method for the preparation of hybridized MoO 3 (H—Mo) films.
- a molybdenum compound or salt e.g. (NH 4 ) 6 Mo 7 O 24 which is a cheap and commercially available salt
- a solvent e.g. water which is green and sustainable
- common salts additives such as ZnCl 2 or CaCl 2 (which are cheap and easily available) are added to the Mo ink to form a H—Mo (hybrid) ink.
- the H—Mo ink is then processed, for example using printing and coating techniques described above, to make OPV devices.
- the thus-fabricated OPV devices may be rigid or flexible.
- the entire process is conducted at low process temperature with a high throughput and the advantages in employing such process include a green, low-cost technique, and solution-based printable technique, yielding improved OPV device efficiency and life time. Additionally, the H—Mo ink can be processed before or after forming the active layer depending on the normal or inverted OPV configuration, which gives great flexibility and advantage for OPV fabrication and performance optimization.
- the ink may be slot die coated onto the substrate.
- the substrate may be flexible or rigid.
- the substrate may be glass, paper/synthetic paper and plastic films such as PEN, PET, or polyimide.
- the substrate may be indium tin oxide (ITO) patterned glass substrate.
- ITO indium tin oxide
- the film may be annealed at a temperature between 50 and 500° C.
- the thickness of the film may be at least 1 nm.
- the thickness of the film may be 1 nm, 10 nm, 25 nm, 50 nm, 75 nm, 100 nm, 125 nm, 150 nm, 175 nm, 200 nm, 300 nm, 400 nm, 500 nm, 600 nm, 700 nm, 800 nm, 900 nm, 1 ⁇ m and even higher.
- the present invention relates to the hybrid MoO 3 film coated substrate prepared according to the third aspect.
- the present invention relates to an optoelectronic device comprising the hybrid MoO 3 film coated substrate according to the fourth aspect.
- the optoelectronic device can be formed of a normal configuration or an inverted configuration.
- the conductive substrate i.e. substrate with a conductive coating
- the hybrid MoO 3 film forms the hole-transporting layer (conductive layer; charge transport layer).
- the optoelectronic device may further comprise an active layer formed on the MoO 3 film and a cathode layer.
- the structure sequence of the normal configuration optoelectronic device is anode/hole-transporting layer/active layer/cathode.
- the conductive substrate forming the anode may comprise or consist of ITO.
- the active layer may be poly(3-hexylthiophene) and [6,6]-phenyl C61-butyric acid methyl ester (P3HT:PCBM).
- the cathode layer may be aluminium metal.
- the device comprises a cathode, an electron transporting layer formed on the cathode, an active layer formed on the electron transporting layer, the hybrid MoO 3 film forming a hole transporting layer formed on the active layer, and an anode formed on the hybrid MoO 3 film.
- the structure sequence of the inverted configuration optoelectronic device is ITO glass/ZnO/P3HT:PCBM/H—MoO 3 /Ag wherein the cathode is ITO glass, the electron transport layer is ZnO, the active layer is P3HT:PCBM and the anode is Ag.
- the optoelectronic device may be a printed electronic device, sensor, or chromic window.
- the optoelectronic device may be a printed electronic device.
- the printed electronic device may be a photoelectrical device, photoelectrical sensor, photovoltaic, organic photovoltaic, thin film transistor, organic thin film transistor, light emitting device, light emitting diode, organic light emitting diode, thermochromic, photochromic, electrochromic, or optoelectric sensor related optoelectronic devices.
- the inorganic material of the photoelectrical device, photoelectrical sensor, photovoltaic, thin film transistor, light emitting device, light emitting diode, thermochromic, photochromic, electrochromic, optoelectric sensor related optoelectronic devices may be inorganic functional materials.
- the organic material of the photoelectrical device, photoelectrical sensor, photovoltaic, thin film transistor, light emitting device, light emitting diode, thermochromic, photochromic, electrochromic, optoelectric sensor related optoelectronic devices may be small molecules or polymeric materials.
- the hybrid material of the photoelectrical device, photoelectrical sensor, photovoltaic, thin film transistor, light emitting device, light emitting diode, thermochromic, photochromic, electrochromic, optoelectric sensor related optoelectronic devices includes a combination of inorganic and organic functional materials.
- the optoelectronic device may be of normal configuration or inverted configuration.
- a PCE comparable to our control cells, using PEDOT:PSS as the hole-transporting layer, has been achieved. Utilizing a combination of HCl and ZnCl 2 as additives yields a PCE of 3.09%. This value is comparable to our control OPV device, which has a PCE of 3.14% (see Table 3 below).
- the films were analyzed by atomic force microscopy (AFM), which revealed that the molybdenum oxide films were deposited onto the ITO substrate surface. A significant change in the morphology is observed. AFM images seem to suggest that there is a roughening of the ITO surface after the films are fabricated ( FIG. 1 ). The thickness of the films is 10 nm, which was determined by ellipsometry.
- an OPV device having a normal configuration is first described. Both P3HT and PCBM were dissolved in 1,2-dichlorobenzene (DCB) solution in a ratio of 1:0.8. Devices were prepared on ITO patterned glass substrate. The ITO patterned glass substrates were first sonicated in a detergent bath for half an hour, followed by a rinsing of de-ionized water for 20 min. This was succeeded by sonicating in an acetone and isoproponal bath for 15 min and 20 min, respectively. The cleaning step was concluded by drying the substrates in an oven at 80° C. for at least an hour. The substrates were subjected to an ozone plasma treatment for 10 min before the MoO 3 inks were spin-coated.
- DCB 1,2-dichlorobenzene
- Annealing was done at 150° C. for 10 min. Ellipsometric data reveals that the thickness of the MoO 3 layers was approximately 10 nm. Annealing was performed at 120° C. for 10 min. Next, the active layer of P3HT:PCBM was spin-coated and allowed to dry for 2 hours before being annealed at 120° C. for 10 min, yielding a film thickness of ⁇ 200 nm. Lastly, a 100 nm thick Al as the cathode were deposited via an MBraun evaporation system at a pressure less than 10 ⁇ 3 Pa. The active area of the device was 9 mm 2 . The device structure is shown in FIG. 2A . For the control device, a 45 nm thick PEDOT:PSS was spin-coated onto the ITO surface. Pure MoO 3 ink is prepared directly from (NH 4 ) 6 Mo 7 O 24 .
- an inverted configuration OPV device is shown in FIG. 2B .
- the structure sequence consists of ITO glass/ZnO/P3HT:PCBM/H—MoO 3 /Ag (i.e. cathode/electron transporting layer/active layer/hole transporting layer/anode).
- the H—Mo ink can be processed before or after forming the active layer depending on the normal or inverted OPV configuration, which gives great flexibility and advantage for OPV fabrication and performance optimization.
- Example 2 The trend can be reversed in Example 2 if the MoO 3 film is hybridized. They are prepared as ink B and ink C, which has a pH value of 5.3 and 5.2, respectively Ink B was prepared from ammonium molybdate ink with ZnCl 2 as the additive. The I-V curves are plotted in FIG. 4 and the figures merits are summarized in Table 2. An improvement is observed, with its PCE rising to 2.12% (Table 2, B). The cell efficiency was improved by 89%. An 80% improvement in the cell performance can be observed by hybridizing MoO 3 with CaCl 2 additive (Table 2, C). In this case, a PCE of 2.02% is obtained.
- MoO 3 films were prepared as ink D and ink E, having a pH value of 3.6 and 3.5, respectively.
- HCl as an additive was introduced. It has been found that efficiency of OPV cells can be improved by using HCl as an additive.
- Two different samples were prepared for comparisons: HCl and HCl+ZnCl 2 as the additives in the ammonium molybdate inks.
- the thickness of the P3HT:PCBM layer was kept the same as the data in Table 2. As shown in Table 3 below, a further improvement is observed.
- the I-V curves are plotted in FIG. 5 .
- ZnCl 2 helps to improve the cell efficiency by 8%.
- PEDOT:PSS has a pH value of ⁇ 1.6 while MoO 3 hybridized with HCl and ZnCl 2 has helped to lift the pH value to 3.5
- the usage of other salts such as CaCl 2 can be expected to produce the same observation as well.
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Abstract
Description
TABLE 1 |
Cell Performances of OPV Devices with Pure MoO3 Film as the |
Hole-Transporting Layer (A) and PEDOT:PSS |
Voc (V) | Jsc (mA/cm2) | FF | PCE (%) | |
PEDOT:PSS | 0.55 | 9.10 | 0.63 | 3.14 | |
(Control) | |||||
A | 0.48 | 4.38 | 0.53 | 1.12 | |
TABLE 2 |
Cell Performances of OPV Devices with MoO3 Films as the |
Hole-Transporting Layer. |
Voc (V) | Jsc (mA/cm2) | FF | PCE (%) | |
PEDOT:PSS | 0.55 | 9.10 | 0.63 | 3.14 | |
(Control) | |||||
A | 0.48 | 4.38 | 0.53 | 1.12 | |
B | 0.53 | 6.81 | 0.58 | 2.12 | |
C | 0.53 | 6.36 | 0.60 | 2.02 | |
Ink B is marked as MoO3 film prepared from ammonium molybdate ink with ZnCl2 additive; Ink C is marked as MoO3 film prepared from ammonium molybdate ink with CaCl2 additive. |
TABLE 3 |
Cell Performances of OPV Devices with MoO3 Films as the |
Hole-Transporting Layer. |
Voc (V) | Jsc (mA/cm2) | FF | PCE (%) | |
PEDOT:PSS | 0.55 | 9.10 | 0.63 | 3.14 | |
(Control) | |||||
A | 0.48 | 4.38 | 0.53 | 1.12 | |
D | 0.54 | 8.54 | 0.62 | 2.86 | |
E | 0.55 | 8.88 | 0.63 | 3.09 | |
Ink D is marked as MoO3 film prepared from ammonium molybdate ink with HCl; Ink E is marked as MoO3 film prepared from ammonium molybdate ink with HCl and ZnCl2 additive. |
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US9373804B2 (en) | 2016-06-21 |
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US20150179964A1 (en) | 2015-06-25 |
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