US8896295B2 - Magnetic field sensor having multiple sensing elements and a programmable misalignment adjustment device for misalignment detection and correction in current sensing and other applications - Google Patents
Magnetic field sensor having multiple sensing elements and a programmable misalignment adjustment device for misalignment detection and correction in current sensing and other applications Download PDFInfo
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- US8896295B2 US8896295B2 US13/439,074 US201213439074A US8896295B2 US 8896295 B2 US8896295 B2 US 8896295B2 US 201213439074 A US201213439074 A US 201213439074A US 8896295 B2 US8896295 B2 US 8896295B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0094—Sensor arrays
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
- G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
- G01R15/20—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices
- G01R15/207—Constructional details independent of the type of device used
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N52/00—Hall-effect devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N52/00—Hall-effect devices
- H10N52/101—Semiconductor Hall-effect devices
Definitions
- This invention relates generally to high accuracy differential current sensors and to high accuracy differential current sensors disposed on a single integrated circuit.
- Current measurement circuits are employed in a variety of different applications, for example, power monitoring, power consumption management, motor control, diagnostics and fault detection. Technologies that are typically used in current measurement circuits to measure current in a current-carrying conductor include sense resistors, magnetic field sensors (such as Hall-effect sensors) and current transformers.
- a current measurement circuit can monitor current flow for fault conditions, e.g., by measuring current in the path from power source to load, the return path (from load to power source) or the differential between current levels in the two paths.
- One type of fault detection that uses differential current measurement is the ground fault interrupter (GFI).
- GFI is a device designed to prevent electrical shock by detecting potentially hazardous ground faults.
- the GFI when installed in a circuit, compares the amount of current in the phase (ungrounded or “hot”) conductor with the amount of current in the neutral conductor in the circuit. When a circuit is operating normally, equal current flows from the power source to the load through the phase conductor and returns through the neutral conductor.
- the GFI device interrupts the circuit (that is, disconnects power from the circuit) when it detects a small current difference in the phase and neutral conductors.
- a difference typically in the range of 1 mA to 30 mA
- an abnormal diversion of current from the phase conductor is occurring, e.g., as would be the case when someone touches the phase conductor.
- an amount of current (“ground fault current”) is returned by some path other than the intended neutral conductor.
- GFI protection is required by electrical code for many household circuits, such as receptacles in bathrooms, some kitchen receptacles, some outside receptacles, and receptacles near swimming pools.
- GFI devices have been designed to use a differential current transformer, which surrounds both the phase and the neutral conductors, to detect imbalances in the flow of current in those conductors. Such a solution tends to be bulky and expensive.
- the invention is directed to a sensor that includes an arrangement of two or more magnetic field sensing elements to sense magnetic field associated with a target when the sensor is positioned in proximity to the target.
- the sensor further includes circuitry, coupled to the arrangement of two or more magnetic field sensing elements, to generate a sensor output signal based on sensing of at least one of the magnetic field sensing elements.
- a programmable misalignment adjustment block coupled to the circuitry, to control the circuitry to generate the output signal with compensation for misalignment between the sensor and the target.
- Embodiments of the invention may include one or more of the following features.
- the programmable misalignment adjustment block can be programmed to select measurement of one of the two more magnetic field sensing elements for generating the sensor output signal when a test of the sensor indicates a misalignment.
- the programmable misalignment adjustment block can be programmed to select a mathematical combination of measurements of the two more magnetic field sensing elements for generating the sensor output signal when a test of the sensor indicates a misalignment.
- the arrangement can be an arrangement of at least three magnetic field sensing elements, and such arrangement can be linear or non-linear.
- Each of the magnetic field sensing elements can be a selected one of a Hall-effect sensing element and a magnetoresistive sensing element.
- Each can be made of a selected one of IV type semiconductor material and a III-V type semiconductor material.
- the arrangement of two or more magnetic field sensing elements and the circuitry can be integrated on a common substrate as an integrated circuit.
- the target can include a pair of current conduction paths. When the target is a pair of current conduction paths including a first current conduction path carrying a first current and a second current conduction path carrying a second current, the sensor output signal comprises a difference signal indicative of a difference between magnitudes of the first current and the second current.
- the sensor can further include a coil driver and interface logic to interface the circuitry to the coil driver, the interface logic to receive the different signal from the circuitry and generate an input signal to the coil driver and the coil driver, in response to the input signal, to provide a driver signal to driver a coil of an external trip circuit.
- the arrangement of two or more magnetic field sensing elements, the circuitry, the coil driver and the interface logic can be integrated on a common substrate as an integrated circuit.
- the sensor can also include a first magnetic field sensing element to sense a magnetic field associated with the first current and a second magnetic field sensing element to sense a magnetic field associated with the second current.
- the circuitry can be coupled to the first and second magnetic field sensing elements and operate to produce first and second signals based on the first and second magnetic fields, respectively.
- the circuitry can provide a total current output signal based on a sum of the first and second signals, and indicative of a total of the magnitudes of the first current and the second current.
- the circuitry can provide an output signal based on the first signal indicative of the magnitude of the first current and an output signal based on the second signal indicative of the magnitude of the second current.
- the target can include a magnet.
- the output signal can be an output signal indicative of positioning of the magnet relative to the sensor. The positioning can correspond to a linear displacement of the magnet relative to the sensor.
- the solution presented herein provides a sensor device with internal magnetic field sensing to measure the current difference between the two conductors as well as to measure the absolute current flowing in the two conductors.
- the conventional GFI circuit uses a bulky differential current transformer, a through-hole solution that requires a cost-intensive passing of both phase and neutral wires through the differential current transformer. Such circuits contribute to high component and assembly costs.
- the sensor device with magnetic field sensing elements described herein provides an integrated low-cost solution that allows for module cost optimization.
- the sensor device can be packaged in a small footprint, low profile surface mount package, allowing for miniaturization and easier assembly of a GFI module, as the phase and neutral conductor wires can be directly connected to the package pins.
- An integrated circuit (IC) approach to the design of the sensor device allows for easy integration of additional functionality, for example, a coil driver to actuate a trip coil.
- the device is ideal for differential current sensing, particularly in GFI circuit applications, it also has the potential to be used as a redundant current sensor, redundant linear position sensor or 360 degree angle sensor. Also, compensation for mechanical misalignment can be made possible during device testing or calibration through the inclusion of programmable on-chip features.
- the programmable on-chip features can be used to select the most accurate difference measurement by selecting measurements of particular sensing elements or mathematical combinations of such measurements, or applying an offset parameter to the difference measurement.
- FIG. 1A is top view of a structure of an exemplary differential current sensor
- FIG. 1B is a partial side view of the structure shown in FIG. 1A ;
- FIG. 2A is a block diagram of an example IC implementation for a sensor in which the amplitude of a phase current, the amplitude of a neutral current and the difference between the phase and neutral current amplitudes are available at the sensor output;
- FIG. 2B is a block diagram of an example IC implementation for a sensor in which the total of the phase and neutral current amplitudes and the difference between the phase and neutral current amplitudes are available at the sensor output;
- FIG. 2C is block diagram of another example IC implementation for a sensor in which the total of the phase and neutral current amplitudes and the difference between the phase and neutral current amplitudes are available at the sensor output;
- FIG. 2D is a block diagram of example IC implementation for a sensor in which the difference between the phase and neutral current amplitudes is available at the sensor output;
- FIG. 3 is a block diagram of a ground fault interrupter circuit application in which a differential current sensor like that shown in FIGS. 1A-2D is employed;
- FIG. 4 is a block diagram of an exemplary current sensor IC that includes a coil driver
- FIGS. 5A-5E are diagrams illustrating different approaches to potential misalignment of sensing elements relative to current conductors
- FIGS. 6A-6B are block diagrams of exemplary current sensor ICs that allow for compensation for the type of misalignment illustrated in FIGS. 5A-5B ;
- FIGS. 7A-7B are diagrams illustrating an exemplary angle sensor application in which a sensor IC like that shown in FIGS. 1A-1B and FIG. 2A is employed;
- FIGS. 8A-8B are diagrams illustrating exemplary angle sensor devices that include a sensor IC like that shown in FIGS. 1A-1B and FIG. 2A as an angle sensor;
- FIG. 9 is a diagram illustrating an exemplary linear position sensing application that includes a sensor IC like that shown in FIGS. 1A-1B and FIG. 2A ;
- FIG. 10 is a diagram illustrating a current sensor IC like that shown in FIG. 2A that also includes self-test support.
- a differential current sensor 10 that includes at least one independent sensing element for measuring small differences between two incoming currents of similar amplitudes is shown.
- the sensor 10 includes a first structure 12 that is provided with a first conduction path 14 a and a second conduction path 14 b .
- the first conduction path 14 a has input terminals 16 a and output terminals 18 a .
- the second conduction path 14 b has input terminals 16 b and output terminals 18 b .
- a primary current I 1 of a first external conductor or bus can be provided to the input terminals 16 a , flow through the conduction path 14 a and exit the output terminals 18 a .
- a primary current I 2 of a second external conductor or bus can be applied to the input terminals 16 b , flow through the conduction path 14 b and exit the output terminals 18 b.
- the sensor 10 further includes a second structure (or device) 20 to measure the primary currents I 1 and I 2 .
- the device 20 includes at least one magnetic field sensing element (also referred to as magnetic field transducer).
- the device 20 includes three magnetic field sensing elements SE1 22 a , SE2 22 b and SE3 22 c (generally denoted 22 ).
- the element SE1 22 a is used to measure the primary current I 1
- the element SE2 22 b is used to measure the primary current I 2 .
- the element SE3 22 c is used to measure the current difference between and I 2 .
- the device 20 is implemented as a sensor integrated circuit (IC).
- IC sensor integrated circuit
- pins or terminals indicated by reference numerals 24 a , 24 b , to correspond to the IC inputs, outputs, supply and ground connections on opposing sides of the IC, respectively, as well. Pins may be provided on only one side of the IC in an alternative pin layout.
- the first structure 12 may be implemented as a printed circuit (PC) board.
- PC printed circuit
- the conduction paths 14 a , 14 b would be provided with the PC board traces.
- the sensor IC 20 would be coupled to or positioned relative to the PC board so that the internal sensing elements 22 a - 22 c are in close proximity to the conduction paths 14 a and 14 b .
- the first structure 12 could be implemented as a package that encloses the sensor IC 20 with the conduction paths 14 a , 14 b .
- a flip chip style assembly may be used to position the die over PC board traces or within a package.
- Packaging options can include surface mounted or through-hole type packages.
- the first structure 12 when implemented with a package to enclose the sensor IC 20 with the conduction paths 14 a , 14 b , can be constructed according to known techniques, for example, those described in U.S. Pat. No. 7,166,807 and U.S. Pat. No. 7,476,816, both entitled “Current Sensor” and assigned to Allegro Microsystems, Inc., the assignee of the subject application. Other techniques may be used as well.
- the first structure 12 should be designed to include an appropriate insulator between the conduction paths 14 a , 14 b and the sensor IC 20 . Such insulation should provide the safety isolation required by target applications such as ground fault interrupter (GFI) applications.
- GFI ground fault interrupter
- the current I 1 corresponds to the phase current and the current I 2 the neutral current.
- the neutral current When such an application is functioning normally, all the return current from an application load flows through the neutral conductor. The presence of a current difference between the phase and neutral currents would therefore indicate a malfunction. The detection of such a malfunction is critical, as it can result in a dangerous or even lethal shock hazard in some circumstances.
- the magnetic field sensing elements SE1 22 a , SE2 22 b and SE3 22 c can be based on Hall-effect technology and monolithically integrated into a Silicon (Si) IC. In order to measure small current differences, e.g., in the range of approximately 1 mA to 30 mA, the magnetic field sensing element SE3 22 c needs to be very sensitive. Since the nominal primary currents I 1 and I 2 can be in the range of typically 1 A to 30 A (i.e., three orders of magnitude larger than the small current difference between I 1 and I 2 ), SE1 22 a and SE2 22 b can be made of conventional Si-Hall plates.
- a magnetic field sensitive structure based on a different, more magnetically sensitive semiconductor material may be chosen for SE3 22 c .
- a different, more magnetically sensitive semiconductor material e.g., Gallium Arsenide (GaAs) or Germanium (Ge)
- GaAs Gallium Arsenide
- Ge Germanium
- Other high mobility compound semiconductor materials e.g., Silicon Germanium (SiGe), Gallium Nitride (GaN), Indium compounds such as Indium Phosphide (InP), Indium Gallium Arsenide (InGaAs), Indium Gallium Arsenide Phosphide (InGaAsP), Indium Arsenide (InAs) and Indium Antimonide (InSb), and other materials, could be used as well.
- Different types of Hall-effect elements for example, planar Hall elements, vertical Hall elements or circular vertical Hall (CVH) elements, can be used for the sensing elements 22 .
- the sensor IC can be any type of sensor and is therefore not limited to Hall-effect technology.
- the sensing elements 22 may take a form other than that of a Hall-effect element, such as a magnetoresistance (MR) element.
- An MR element may be made from any type of MR device, including, but not limited to: an anisotropic magnetoresistance (AMR) device; a giant magnetoresistance (GMR) device; a tunneling magnetoresistance (TMR) device; and a device made of a semiconductor material other than Silicon, such as GaAs or an Indium compound, e.g., InAs or InSb.
- the change in sensitivity axis of the sensing element may require that the sensing element be disposed at a different position relative to the current conductor(s). Such “re-positioning” would be apparent to one skilled in the art and is not discussed further here.
- the primary current conduction paths 14 a , 14 b may be implemented as PC board traces rather than being integrated into a package. In a configuration that utilizes PC board traces for the conduction paths, trimming may be required to optimize sensor accuracy. A PCB trace trimming or calibration (sensor or system-level calibration) may be used.
- the current sensor 10 may be utilized in a current shunt configuration in which only a portion of the total current to be measured is applied to the conduction paths 14 a , 14 b and the remainder bypasses the current sensor 10 .
- the shunt path or paths may be external, that is, they reside on the circuit board.
- the sensor may be calibrated, for example, using a “self-calibration” technique as described in U.S. patent application Ser. No. 13/181,926 entitled “Current Sensor with Calibration for a Current Divider Configuration,” filed Jul. 13, 2011 and assigned to Allegro Microsystems, Inc., the assignee of the subject application, or other calibration techniques.
- the shunt path or paths may be internal, that is, they may be part of the sensor package.
- An example of this type of internal (or “integrated”) shunt is provided in the above-mentioned U.S. Pat. No. 7,476,816.
- a current sensor like the differential current sensor 10 depicted in FIG. 1A could be used in a “current divider configuration” to measure a current that is larger (e.g., by a factor of 2 ⁇ ) than the nominal rating of I 1 and I 2 .
- a current may be measured by physically splitting the current path between two subpaths, in this instance, using conduction paths 14 a and 14 b as the two subpaths.
- the differential current sensor 10 could also be useful for applications requiring redundancy, since the same current could be measured by more than one independent sensing element, e.g., SE1 22 a and SE2 22 b .
- FIG. 1B illustrates a partial side view of the structure 10 of FIG. 1A , indicated by reference numeral 30 .
- This view shows the three sensing elements 22 a - 22 c of the sensing IC 20 , as well as the portion of conduction path 14 a that passes near (and is sensed by) sensing elements 22 a and 22 c , along with the portion of conduction path 14 b that passes near (and is sensed by) sensing elements 22 b and 22 c .
- Also shown in this view are the magnetic flux lines associated with the magnetic fields generated by the conduction paths 14 a and 14 b (assuming the direction of current flow points out of the plane of the drawing).
- the magnetic field to be sensed by sensing element 22 a and corresponding to conduction path 14 a is represented by B SE1
- the magnetic field to be sensed by sensing element 22 b and corresponding to path 14 b is represented by B SE2
- the magnetic field to be sensed by sensing element 22 c and corresponding to conduction paths 14 a and 14 b is represented by B SE3
- the magnetic field B SE3 includes magnetic field contributions from conduction paths 14 a and 14 b , which are of opposite polarity. It should be noted that sensing element 22 a and sensing element 22 b will ‘see’ a small magnetic field generated by conduction path 14 b and conduction path 14 a , respectively, as well.
- FIGS. 2A-2D illustrate possible implementations of the sensing device (or IC) 20 .
- the implementations depicted in FIGS. 2A and 2B utilize three sensing elements.
- the implementation depicted in FIG. 2C only requires the use of two sensing elements.
- the implementation depicted in FIG. 2D makes use of only one sensing element.
- the various architectures shown in FIGS. 2A-2D are described within the context of GFI current sensor applications, the architectures have application beyond GFI current sensors and other types of current sensors, as will be discussed later.
- the architecture shown in FIG. 2A can also be used for position or displacement measurements, such as angular displacement measurement (as will be described with reference to FIGS. 7A-7B and 8 A- 8 B).
- an exemplary implementation of the sensor IC 20 (from FIGS. 1A-1B ), shown here as current sensor IC 40 , includes the three sensing elements 22 a , 22 b and 22 c .
- the sensing elements 22 a , 22 b , 22 c are part of magnetic field signal generating circuits 42 a , 42 b , 42 c , respectively.
- the sensing elements 22 a , 22 b , 22 c sense magnetic fields associated with one or both of conduction paths 14 a , 14 b and produce respective sensing element output signals 44 a , 44 b , 44 c , e.g., voltage signals, proportional to the sensed magnetic fields.
- the magnetic field signal generating circuits 42 a , 42 b , 42 c may contain various conventional circuits that operate collectively to generate magnetic field signal generating circuit output signals (or magnetic field signals) 46 a , 46 b , 46 c , respectively.
- each of the magnetic field signal generating circuits 42 a , 42 b and 42 c includes at least an amplifier for amplifying the output signal of the sensing element 22 a , 22 b and 22 c , respectively.
- magnetic field signal generating circuit 42 a includes amplifier 48 a to produce the magnetic field signal 46 a
- magnetic field signal generating circuit 42 b includes amplifier 48 b to produce the magnetic field signal 46 b
- magnetic field signal generating circuit 42 c includes amplifier 48 c to produce magnetic field signal 46 c.
- each circuit 42 a - 42 c may include circuitry to implement dynamic offset cancellation. If the sensing elements 22 a - 22 c are Hall plates, a chopper stabilization circuit can be provided to minimize the offset voltage of the Hall plates and associated amplifiers 48 a - 48 c . Also, or alternatively, each circuit 42 a - 42 c may implement an offset adjustment feature, by which the magnetic field signal is centered within the power supply range of the sensor and/or a gain adjustment feature, by which the gain of the magnetic field signal is adjusted to maximize the peak-to-peak within the power supply range without causing clipping.
- the sensor device or IC 40 also includes magnetic field signal processing circuits 50 a , 50 b , 50 c .
- the circuits 50 a - 50 c each includes a respective low-pass filter 52 and output amplifier/buffer 54 , which process respective magnetic field signal 46 a , 46 b , 46 c to produce respective magnetic field signal processing circuitry output signals 56 , 60 , 58 .
- Output signals 56 , and 60 are absolute measurement signals and output signal 58 is a measured difference measurement signal (or difference signal).
- the output signal 56 and output signal 60 would be indicative of phase current magnitude and neutral current magnitude (as shown), respectively, and the difference signal 58 would be indicative of a difference between the phase and neutral current magnitudes.
- the sensor device 40 may be provided in the form of an IC containing a semiconductor substrate on which the various circuit elements are formed.
- the IC would have at least one pin (terminal or lead) to correspond to each of: the VCC input or terminal 62 (to connect to an external power supply), GND terminal 64 (to connect to ground), and outputs including ‘output 1’ 66 , ‘output 2’ 68 and ‘output 3’ 70 .
- Outputs 66 , 70 , 68 enable an external differential current sensor application such as a GFI circuit or other application to receive and make use of any one or more of the output signals 56 , 60 , 58 , respectively.
- VCC pin 62 Power is supplied to the IC 40 through the VCC pin 62 , which is connected internally to the various subcircuits, as shown.
- a protection circuit represented here as a simple Zener diode 72 , is provided between the VCC pin 62 and ground for protection in the event that the supply pin is shorted to ground.
- the GND pin 64 is connected internally to provide a ground connection for subcircuits of the sensor.
- Other circuitry, such as control and clock generation, for example, has been eliminated from the figure for purposes of simplification.
- the three sensing elements 22 a - 22 c are used to obtain the same measurements as device 40 from FIG. 2A .
- the device 80 differs from device 40 in that the device 80 provides a sum or total signal instead of signals corresponding to separate absolute measurements at its outputs.
- the device 80 includes only two signal paths, one to produce a total signal 82 at a “new” output 1 84 (which replaces outputs 66 and 70 on device 40 ).
- the device 80 includes a magnetic field signal generating circuit 86 , which includes sensing elements 22 a and 22 b , as well as a summer element 88 to combine the sensing elements outputs 44 a and 44 b (from sensing elements 22 a and 22 b , respectively) to produce a total sensing element output 90 .
- the circuit 86 also includes an amplifier, shown as amplifier 48 a ′, which provides an output 92 .
- the device 80 further includes a magnetic field signal processing circuit, shown as circuitry 50 a ′, which processes the output 92 to produce the total signal 82 .
- the difference signal path is the same as device 40 , that is, it uses magnetic field signal generating circuit 42 c and magnetic field signal processing circuitry 50 c to produce difference signal 58 at output 68 .
- the total signal 82 would be indicative of a total (or sum) of phase and neutral current magnitudes.
- a sensing device or IC 100 like device 80 , provides two outputs corresponding to total and difference signals, but utilizes only sensing elements 22 a and 22 b to do so.
- a magnetic field signal generating circuit 102 in device 100 replaces the circuit 42 c in device 80 .
- Circuit 102 includes sensing elements 22 a and 22 b , and a subtractor (or difference) element 104 to take the difference between the outputs 44 a and 44 b from sensing elements 22 a and 22 b , respectively, and to provide the result as a difference output 106 .
- circuit 102 includes an amplifier, shown here as amplifier 48 c ′, to amplify the difference output 106 .
- the corresponding output signal (provided at the output of circuit 50 c and made available at output 68 ) is shown here as difference signal 108 .
- the difference signal 108 indicates a difference determined from the measurements of sensing elements 22 a and 22 b , not one that is based on the measurement of sensing element 22 c (like the difference signal 58 in FIG. 2B ).
- That difference signal may be produced/computed by SE1 22 a and SE2 22 b , or measured by a “middle” sensing element positioned to measure current of both conductors, like SE3 22 c .
- the circuitry to support the total current signal that is, the signal path from sum element 76 through output 84 ), could be eliminated.
- the signal paths for (and including) the sensing elements SE1 22 a and SE2 22 b e.g., as shown in FIGS.
- the ACS710 current sensor includes internal circuitry and pins to detect overcurrent conditions, as well as provides a zero current reference pin and filter pin to which a user can connect an external capacitor to set device bandwidth.
- exemplary functions such as those available in the ACS761 current monitor IC, which incorporates circuitry and pins to support various levels of fault protection, including overpower, overcurrent and short circuit faults (with an external high-side FET gate driver for disabling the load), and other features (e.g., valid power indicator), could also be included.
- the signal paths of the sensor IC embodiments of FIGS. 2A-2D can be implemented in the analog or in the digital domain.
- sensing element 22 a senses the magnetic field associated with the phase current in conduction path 14 a and sensing element 22 b senses the magnetic field associated with the neutral current in conduction path 14 b .
- sensing element 22 b senses the magnetic field associated with the neutral current in conduction path 14 b .
- the sensing element 22 c senses the magnetic fields associated with both the phase current flowing in conduction path 14 a and the neutral current flowing in conduction path 14 b .
- the sensing element 22 c detects that difference (the amount of current that was diverted from the conduction path 14 b ).
- that current difference or loss is determined by taking the difference between the outputs of sensing elements 22 a and 22 b , as described earlier.
- the sensor device or IC can be implemented to provide a total signal indicative of the total of the phase and neutral current magnitudes, or alternatively, separate signals indicative of the absolute current in each conduction path, also as described earlier with respect to FIGS. 2A-2C .
- FIG. 3 illustrates a simple ground fault interrupter circuit 110 that employs the differential current sensor 10 (from FIG. 1A ).
- the differential current sensor 10 is coupled to current conductors or wires 112 a and 112 b , which are connected to a load 114 .
- the current conductor 112 a carries the phase current from a power source to the load 114 .
- the current conductor 112 b carries the neutral current from the load 114 .
- the sensor 10 measures the difference between the amount of neutral current and the amount of phase current and provides a difference signal, difference signal 116 (generated by the internal sensing IC, e.g., as depicted in FIGS.
- the GFI circuit 110 also includes a trip circuit 122 (or “circuit breaker”), which actuates a set of switches, for example, switches 124 a , 124 b (coupled to the conductors/wires 112 a , 112 b , respectively) in response to the trip signal 120 . That is, the trip signal 120 is used to trigger the trip circuit 122 to open the switches 124 (and thus disconnect the power source).
- the trip circuit 122 may be implemented with any suitable electromechanical trip device, e.g., a trip coil.
- FIG. 3 is a simplified depiction of a GFI application and is not intended to show the physical layout of signals at the board or system level.
- the current conductors 112 a , 112 b would be appropriately routed to the current sensor 10 (via the circuit board traces) so that I 1 and I 2 flow into and out of the current sensor 10 in the same direction as described earlier (and not in opposite directions as shown in FIG. 3 ).
- An alternative GFI design in which I 1 and I 2 flow into and out of the current sensor in opposite directions could also be used, but such a design would need to take into account that SE3 would sense twice the magnetic field.
- a sensor IC with an integrated coil driver circuit, sensor IC 130 can include the internal magnetic field signal generating and processing circuitry from the sensing device, for example, sensor device 80 (from FIG. 2B ), indicated here as sensor 132 .
- sensor device 80 from FIG. 2B
- the sensor 132 would produce the total current signal 82 and difference signal 58 .
- the new sensor 130 has two outputs, output 84 and output 122 .
- the output 84 receives the total current signal 82 .
- the sensor 130 also includes a coil driver 134 and sensor/driver interface logic 136 to interface the sensor 132 to the coil driver 134 .
- the sensor/driver interface logic 136 receives the difference signal 58 and, in response to that signal, produces a coil driver input signal 138 .
- the coil driver 134 In response to the coil driver input signal 138 , the coil driver 134 generates an appropriate drive signal 140 .
- sensor 130 could replace sensor device 20 inside differential current sensor 10 to enable that sensor to directly trigger the trip circuit 122 with the new sensor's drive signal 140 .
- This more integrated solution eliminates the need for the drive circuit 118 in the GFI circuit 110 .
- the circuitry of sensor 132 could include that shown in FIG. 2C , or alternatively, the circuitry of sensor IC 40 shown in FIG. 2A with outputs 66 and 70 replacing output 84 or the circuitry of sensor IC 104 shown in FIG. 2D with total current signal 82 and output 84 omitted.
- FIGS. 5A and 5B show partial side views of sensor IC and conduction paths, indicated by reference numerals 150 and 152 .
- FIG. 5A illustrates a perfect alignment of sensing elements 22 a , 22 b and 22 c relative to conduction paths 14 a , 14 b .
- FIG. 5B illustrates a case of misalignment. The outline of the IC is omitted, as the misalignment may occur as the result of sensing element spacing on the die or positioning the IC within a sensor package, as discussed above. Other sources of error that would lead to misalignment may include manufacturing tolerances in placement or the width of the conduction paths 14 a and 14 b . Referring to FIG.
- the sensing element 22 c will not be centered between the two conduction paths 14 a and 14 b as shown. Instead, and referring to FIG. 5B , the sensing elements 22 a , 22 b and 22 c will be offset to one side, e.g., offset 154 , as shown.
- the middle (differential current) sensing can be implemented with an arrangement of two or more sensing elements. The arrangement is centered relative to the two conduction paths 14 a , 14 b when the sensor IC is properly aligned with the conduction paths, as is depicted in FIGS. 5C-5E .
- the direction of misalignment, should it occur, is indicated by arrow 158 .
- sensing element 22 c and additional sensing elements 22 d and 22 e located on either side of sensing element 22 c .
- the sensing elements 22 c - 22 e may be provided in a linearly spaced arrangement as shown in FIG. 5D or non-linearly spaced arrangement.
- An example of a non-linearly spaced arrangement of the sensing elements is illustrated in FIG. 5E .
- FIG. 5E shows sensing elements of uniform size, the size of the sensing elements can vary within a given arrangement.
- the sensing elements 22 a and 22 b (from FIGS. 5A-5B ) have been omitted from the illustrations of FIGS.
- the measurement of the difference between the currents flowing in the conduction paths provided by the middle sensing element 22 c may be adjusted in a number of different ways.
- the electronics for the sensor IC can be adjusted by means of electronic trimming. For example, and referring to FIGS. 6A-6B , the sensor IC, shown as current sensor IC 160 in FIG. 6A or current sensor IC 160 ′ in FIG.
- the block 162 can include some type of memory element(s) 164 , a digital-to-analog converter 166 to convert digital contents of the memory element(s) 164 to analog format, if necessary, and a programmable control logic block 168 to provide a control interface to the magnetic field signal generating circuits, for example, magnetic field signal generating circuits 42 a , 42 b , 42 c (from FIG. 2A ).
- the memory element(s) 164 can be registers, RAM, one time programmable or re-programmable ROM or other nonvolatile memory.
- the memory element(s) 164 are coupled to the D/A converter 166 via a memory-to-D/A line 170 and the D/A converter 166 is coupled to the control logic block 168 via a D/A-to-control line 172 .
- the output of the control logic block 168 is provided to the magnetic field signal generating circuits 42 a - 42 c , shown collectively as magnetic field signal generating circuits 174 , via a control logic output line 176 .
- the magnetic field signal processing circuits 50 a - 50 c from FIG. 2A are shown collectively as magnetic field signal processing circuits 178 .
- Other features of the sensor IC 160 are the same as shown in FIG. 2A .
- the control logic output line from block 162 is provided to magnetic field signal generating circuits 174 ′, which differs from the magnetic field signal generating circuits 174 in FIG. 6A in that the circuits 174 ′ also includes magnetic field signal generating circuitry for sensing elements 22 d and 22 e .
- circuits 174 ′ includes such circuits for sensing elements 22 d and 22 e .
- Sensing element 22 d provides an output 44 d that is amplified by an amplifier 48 d , which provides a signal 46 d to magnetic signal processing circuits 178 .
- Sensing element 22 e provides an output 44 e that is amplified by an amplifier 48 e , which provides a signal 46 e to the magnetic field signal processing circuits 178 .
- the magnetic field signal generating circuitry that produces the signals 46 c , 46 d and 46 e is indicated collectively as block 179 .
- the line 176 ′ is provided to the magnetic field signal generating circuits 174 ′, e.g., at least the portion shown as block 179 (as shown in FIG. 6B ).
- misalignment compensation or correction can be accomplished with digital correction to the signal paths using parameters programmed into the sensor chip. For example, in one possible implementation, testing can determine the offset (e.g., offset 154 from FIG. 5B ) and program the block 162 to add or subtract that offset from the sensing element output 44 c . Thus, and referring to FIG. 6A , the offset value would be provided to the memory element(s) 164 and applied to the appropriate sensing element circuitry via the control logic block 168 .
- the adjustment block 162 may be used to select the most accurate of the measurements of the sensing elements, 22 c , 22 d , 22 e or a mathematical arrangement (or combination) of the three sensing elements' measurements to use as the difference measurement.
- An example of a simple mathematical arrangement would be to average the measurements for two adjacent sensing elements, for example, (A+B)/2 to arrive at a value between A and B, where A denotes the measurement associated with sensing element 22 d and B denotes the measurement associated with sensing element 22 c (for example).
- the sensing elements of interest for the mathematical averaging could be sensing element 22 e and sensing element 22 c instead of sensing elements 22 d and 22 c .
- the sensing elements 22 d , 22 c and 22 e may be non-linearly spaced (for example, as illustrated in FIG. 5E ) to allow other mathematical combinations of interest or positions of interest based on assembly tolerances of the differential current sensor. It may be possible to utilize sensing elements 22 a , 22 c and 22 b in the same manner (as sensing elements 22 d , 22 c and 22 e , respectively), but such usage would be application specific.
- differential current sensing elements it is also possible to use some other number of differential current sensing elements than the three shown in FIGS. 5C-5D and 6 B, for example, but not limited to: 2, 4, 5, 6, 7 and 8 sensing elements.
- the number of the sensing elements will be practically limited by required die area and test time to find the best combination to be used in the final product or programming of the individual part. The adjustment could be performed before or after installation, depending on the type of package that is used.
- the block 179 (shown in dashed lines) is a programmable or configurable block. That is, it contains various programmable on-chip features (not shown) that enable the desired configuration, e.g., selection and/or combination of signals 44 c , 44 d and 44 e , and appropriate selection of any magnetic field signal generating circuitry and signal paths necessary to provide a single output from block 179 . That single output, which may appear at a selected one of lines 46 c , 46 d and 46 e , is provided to the corresponding magnetic field signal processing circuit (in block 178 ), e.g., circuit 50 c shown in FIG. 2A , for generating the difference signal 58 at output 68 . That difference signal that appears at output 68 will have been compensated for misalignment offset based on selections applied under the control of programmable misalignment offset adjustment block 162 .
- the desired configuration e.g., selection and/or combination of signals 44 c , 44 d and 44 e
- FIGS. 6A and 6B include sensing elements 22 a , 22 b and corresponding signal paths, those sensing elements and signal paths may be eliminated.
- the magnetic field signal generating and processing circuits associated with the sensing elements 22 a , 22 b may be replaced with those shown in FIG. 2B (to provide a single “total current” output instead of separate phase and neutral current outputs).
- sensing element 22 c (or 22 c , 22 d , 22 e , if additional sensing elements 22 d and 22 e are also used) to be implemented as a standard Si Hall plate instead of one made of a more sensitive material, as was mentioned earlier.
- sensing element 22 c or 22 c , 22 d , 22 e , if additional sensing elements 22 d and 22 e are also used
- the concept of using multiple sensing elements and selecting the best one or a mathematical combination to provide a value based on the middle sensing element(s), i.e., sensing element 22 c or, alternatively, multiple sensing elements, e.g., sensing elements 22 c , 22 d and 22 e could also be applied to implementations in which any one or more of the sensing elements are made of materials other than Si.
- the sensor IC depicted in FIGS. 1A-1B and 2 A- 2 C provides information at its outputs corresponding to absolute or total values (in addition to difference values) for a measured parameter, such as current, it is a multi-purpose device that can be used in a variety of different applications. For example, as discussed above, it may be used to measure current in current divider applications or current measurement applications that require redundancy. The device would also be suitable for use in applications that sense magnetic field to measure displacement.
- FIGS. 7A-7B show different views of an example angle sensing structure 180 .
- the structure 180 includes a permanent magnet 182 shown as a two-pole magnet having a South pole 184 a and a North pole 184 b .
- the sensor IC 20 Positioned in proximity to the magnet 82 is the sensor IC 20 .
- the sensor IC 20 can determine a rotation angle ⁇ 186 of the two-pole magnet 182 about an axis of rotation 188 .
- sensing element 22 a is used to generate a sine signal and sensing element 22 b is used to generate a cosine signal for the rotation angle 186 at outputs 66 and 70 , respectively. From the two outputs, a value indicative of the rotation angle 186 can be determined.
- the rotation angle 186 that is measured can be in the range of 0 to 360 degrees.
- the sensor IC 20 may be stationary and the magnet 182 attached to a rotating shaft (rotor) near the sensor IC 20 .
- the third (or middle) sensing element 22 c is used to detect sensor-to-magnet misalignment.
- SE1 22 a and SE2 22 b have to be positioned on two lines (SE1 on line 189 a and SE2 on line 189 b ) that are at 90 degrees to each other and pass through point 188 .
- sensing by SE1 22 a provides a first sine waveform
- sensing by SE2 22 b provides a second sine waveform phase shifted by 90 degrees from the first sine waveform (that is, a cosine waveform).
- sensing by SE3 22 c provides a sine waveform that is phased shifted from the first sine waveform by a phase angle that is less than 90 degrees.
- the positioning of SE3 22 c is such that it results in a sine waveform that is phase shifted by a phase angle of 45 degrees. More generally, the phase angle may be within a range of values, for example, 30 to 60 degrees.
- SE3 22 c need not be located on a line formed by SE1 22 a and SE2 22 b , and that the distance from SE3 22 c to SE1 22 a need not be equal to the distance from SE3 22 c to SE2 22 b .
- prior angle sensing devices with only two sensing elements and capable of producing only a sine signal and a cosine signal, the amplitudes and phases of both signals needed to be examined and corrected, if necessary, in cases of misalignment.
- IC 20 provides an arrangement of three sensing elements, with SE3 22 c being located between SE1 22 a and SE2 22 b (e.g., at a mid-point between SE1 22 a and SE2 22 b as illustrated in earlier figures and illustrated again in FIGS. 7A and 7B ), the IC 20 produces three signals. Referring back to FIG. 2A , the IC 20 generates a sine signal at output 66 , a cosine signal at output 70 and a signal produced from sensing by SE3 22 c and made available at output 68 . Consequently, the signal based in sensing by SE3 22 c provides additional information that can be used to determine and correct for misalignment.
- the signal information from all three sensing elements is used to define an error function or equation.
- the error function provides an error value “X” as being equal to a mathematical combination of the signal values (that is, amplitudes) of the three signals.
- An application employing the error function may be implemented to recognize X as a first, “minimal error” value for an alignment condition and as a different second value (e.g., not equal to, or greater than, the first value) for a misalignment condition.
- the goal of an application that uses an error function based on the sensing of SE1 22 a , SE2 22 b and SE3 22 c , as described above, is to minimize the error function (and thus the amount of misalignment) for a desired level of accuracy in angle determination. It can do so through some form of correction.
- the correction may be implemented electronically or with a mechanical adjustment of the sensor/magnet assembly for optimal alignment, resulting in improved angle accuracy.
- FIGS. 8A-8B show exemplary angle measurement devices 190 (FIG. 8 A) and 190 ′ ( FIG. 8B ) that utilize the output of the angle sensor to determine a rotation angle value.
- the angle measurement device 190 (or 190 ′) includes an angle sensor, for example, the sensor IC 20 from FIG. 2A , and a processing unit 192 ( FIG. 8A ) or 192 ′ ( FIG. 8B ).
- the signal processing unit 192 (or 192 ′) performs the angle calculation. It combines the two absolute output signals from the angle sensor 20 into one digital output signal.
- the processing unit 192 (or 192 ′) provides a digital output, although it could be designed to provide an analog output instead.
- Output signals provided at the sensor's outputs 66 and 70 are sampled and then converted into the digital domain by an Analog-to-Digital Converter (ADC) 196 ( FIG. 8A ) or 196 ′ ( FIG. 8B ).
- a processor (or microcontroller) 198 ( FIG. 8A ) or 198 ′ ( FIG. 8B ) receives digital representations of the sensor output signals, shown as ADC outputs 200 a , 200 b , and uses software shown as an angle determiner 202 ( FIG. 8A ) or 202 ′ ( FIG. 8B ) to determine an angle value from the ADC outputs 200 a , 200 b .
- CORDIC COordinate Rotation DIgital Computer
- arctangent or “arctan” trigonometric function calculation for angle value determination.
- Other algorithms that can determine the angle value from the sine and cosine signals may be used as well.
- Clock and control signals are provided to the ADC 196 (or 196 ′) and the processor 198 (or 198 ′) by a clock generation and control circuit 203 . Once the angle is determined, it is represented as an angle value at an output 204 ( FIG. 8A ) or 204 ′ ( FIG. 8B ) that is accessible by an external controller or user (not shown).
- the output signal provided at the sensor's output 68 (from FIG. 2A ), shown here as output signal 194 c , provides information that is used to compensate for the sensor-to-magnet misalignment electronically.
- the output signal 194 c is sampled and then converted into the digital domain by the ADC 196 ′.
- the processor 198 ′ receives the digital representation of that sensor output signal, shown as ADC output 200 c , along with the ADC outputs 200 a and 200 b , and uses software shown as misalignment corrector 205 to compute the error function and to compensate for misalignment indicated by the error function.
- misalignment corrector 205 uses software shown as misalignment corrector 205 to compute the error function and to compensate for misalignment indicated by the error function.
- the misalignment corrector 205 includes an error determiner (or error function block) 206 and a corrector (or correction block) 207 .
- the error function block 206 defines an error function that combines the signal values 200 a , 200 b and 200 c , and performs the error function to generate an error value 208 indicative of alignment or misalignment.
- the error value 208 is provided to the correction block 207 , which determines an appropriate correction based on the error value 208 and provides correction information 209 to the angle determiner 202 ′.
- the angle determiner 202 ′ uses the correction information to produce the angle value 204 ′. That is, the angle determiner 202 ′ produces an angle value that has been corrected for any misalignment detected by the misalignment corrector 205 .
- the misalignment corrector 205 receives the signal values 200 a , 220 b and 200 c , and uses those signal values to compute the error value (according to a predetermined error function, as discussed above) to detect misalignment.
- the misalignment corrector 205 then applies a correction to the output produced by the angle determiner 202 ′ (or provides correction information 209 to angle determiner 202 ′, which incorporates the correction information in its angle determination, as discussed above), thus minimizing error on the angle value 204 ′.
- the correction block 207 could be configured to compute a correction value “on-the-fly.” Other implementations are possible as well.
- the correction block 207 could be provided with a lookup table of predetermined correction values and configured to perform a lookup to provide appropriate correction values for computed error values.
- the process could include an electronic misalignment detection and mechanical misalignment correction.
- the misalignment detection could be performed “externally” using a device like the programming device 163 shown in FIG. 6 .
- the user could rotate the magnet (again, for example, one half turn or one full turn) and examine the sensor output signals 194 a , 194 b and 194 c to detect misalignment.
- This could be done, for example, by using software running on the programming device 163 .
- the software of programming device 163 would include an error function block (like error function block 206 of the processing unit 192 ′ of FIG. 8B ) to provide an error value based on a mathematical combination of the signals 194 a - 194 c .
- the user When the error value indicates misalignment, the user would then correct the misalignment mechanically, that is, by adjusting the magnet-to-sensor position in that user's system and possibly repeating this routine (e.g., by performing the magnet rotation followed by the error function computation, for each magnet-to-sensor position) until minimal error function corresponding to a desired degree of alignment is achieved.
- the angle sensor e.g., IC 20
- outputs 194 a and 194 b could be processed by a device such as processing unit 192 (FIG. 8 BA) for angle determination.
- An electronic misalignment correction of the type provided by a device like processing unit 192 ′ ( FIG. 8B ) would not be necessary.
- IC 20 hardware and/or software to implement the error function block may be included in IC 20 . If IC 20 is modified to include this functionality, then the functionality need not be provided elsewhere, for example, in misalignment corrector 205 (of FIG. 8B ) for applications that utilize electronic misalignment correction or other devices such as programming device 163 for applications that utilize a mechanical misalignment correction.
- the permanent magnet 182 illustrated in FIGS. 7A-7B has only one pair of North/South poles, the above-described approach to misalignment detection and correction is also applicable to sensing applications that utilize magnets with more than one pole pair.
- the use of a magnet with more than one pole pair is possible as long as the positions of SE1 22 a and SE2 22 b are such that they generate 90 degrees out-of-phase signals when the sensor 20 is aligned with the magnet.
- the sensor IC 20 and processing unit 192 may be packaged in separate integrated circuit chips. Alternatively, devices can be manufactured that incorporate both sensor and processing electronics on the same chip.
- FIG. 9 Another type of displacement measurement that could be performed by the sensor IC 20 presented in FIG. 1A-1B and FIG. 2A is linear displacement.
- the sensor IC would be particularly useful for a linear displacement measurement application requiring redundancy.
- the sensing elements 22 a , 22 b , 22 c of sensor IC 20 would sense the magnetic field associated with the linear movement of the bar magnet.
- the middle sensing element 22 c is now performing the same function as the other sensing elements 22 a , 22 b , that is, it is making an absolute (rather than a differential) measurement.
- the path of linear motion is along an axis indicated by an arrow 216 . That movement or displacement, which could be bidirectional or unidirectional, would be represented as a linear voltage value (proportional to the magnetic field) at corresponding outputs 66 , 70 , 68 . In a redundancy application, only one of the outputs 66 , 68 , 70 would be used at any given time.
- the application (or alternatively, the IC itself) could be configured with a failover type scheme to switch from the output currently in use to one of the unused outputs, e.g., when an error has occurred.
- the IC 20 and magnet 212 would be part of a larger system (not shown), for example, a magnet and sensor IC/coil assembly (of a linear motor or other linear motion system).
- a magnet and sensor IC/coil assembly of a linear motor or other linear motion system.
- the flux generated by the energized coil interacts with flux generated by the magnet, which causes the magnet to move either in one direction or the opposite direction depending on the polarity of the coil flux.
- the sensor device described above can be used in any consumer, industrial or automotive application requiring the measurement of a small difference between two similar currents, and is therefore not limited to GFI applications. Also, since it can be implemented to include two individual magnetic field sensing elements to measure the absolute incoming currents, the sensor device can be used for redundancy applications if the same current is applied to both conduction paths. The sensor device can also be used for linear position applications requiring redundancy, as well as for 360 degree angle sensing. In the angle sensing application, two sensing elements can provide sine and cosine signals for the angle determination, and the third sensing element can be used to improve magnet-to-sensor alignment (and therefore total angle accuracy), as discussed above.
- the arrangement In absence of any misalignment, the arrangement would be centered relative to the external target (that is, the source of the magnetic flux to be sensed by the SEs, whether that source is a pair of current conduction paths or magnet(s)) for a zero field indication. If misalignment between the sensor and such target should occur, a non-zero field would be indicated by the arrangement.
- One of the misalignment offset compensation schemes discussed earlier could then be used to “zero” the result provided by the arrangement so that the sensor output signal (such as a difference signal for a GFI application current sensor, as described above, or a linear position sensor's output signal, for example) is more accurate.
- the sensor circuitry can be modified to provide a sensor IC 220 that includes a self-test block or circuit (also referred to as a built-in self-test or “BIST” circuit) 222 , coupled to subcircuits via an interconnect 224 , to provide self-test functionality.
- the self-test circuit 222 could have at least one input line 226 and output line 230 and corresponding terminals 228 and 232 , respectively, for exchanging diagnostics test information with an external device (e.g., a controller).
- a command or request for diagnostics test could be provided to the self-test circuit 222 on the input line 226 (via terminal 228 ) and results could be returned on the output line 230 (via terminal 232 ).
- the self-test circuit 222 in response to a command on input line 226 , would enable self-test of at least some or all of the various subcircuits (such as circuits 42 a - 42 c and circuits 50 a - 50 c ).
- the self-test circuit is shown as part of a sensor IC like that shown in FIG. 2A , it is applicable to other described embodiments as well. This type of circuitry would provide added safety, thus making its inclusion particularly attractive for GFI applications.
- the self-test circuit 222 can be implemented in a number of different ways, according to design and application requirements. For example, it could be implemented to incorporate self-test features described in U.S. Patent Application Publication No. US2010/0211347, of application Ser. No. 12/706,318 entitled “Circuits and Methods for Generating a Self-Test of a Magnetic Field Sensor,” filed Feb. 16, 2010 and assigned to Allegro Microsystems, Inc., the assignee of the subject application.
- the self-test circuit 222 can be implemented to include a self-test current conductor for generating a self-test magnetic field and circuitry to process the measured self-test magnetic field to generate a diagnostic and/or other signal(s), as discussed in the aforementioned patent application.
- the use of other types of self-test/BIST mechanisms is contemplated as well.
- each sensing element may be a device made of a IV type semiconductor material such as Si or Ge, or a III-V type semiconductor material like GaAs or an Indium compound.
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EP20183925.5A EP3742180A1 (en) | 2012-04-04 | 2013-03-21 | High accuracy differential current sensor for applications like ground fault interrupters |
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